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JP6950285B2 - Manufacturing method of optical equipment - Google Patents
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JP6950285B2 - Manufacturing method of optical equipment - Google Patents

Manufacturing method of optical equipment Download PDF

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JP6950285B2
JP6950285B2 JP2017109351A JP2017109351A JP6950285B2 JP 6950285 B2 JP6950285 B2 JP 6950285B2 JP 2017109351 A JP2017109351 A JP 2017109351A JP 2017109351 A JP2017109351 A JP 2017109351A JP 6950285 B2 JP6950285 B2 JP 6950285B2
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housing
optical member
straightening
state
force
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JP2018202701A (en
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旭彦 遠藤
旭彦 遠藤
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Fujifilm Business Innovation Corp
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Fuji Xerox Co Ltd
Fujifilm Business Innovation Corp
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  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lens Barrels (AREA)
  • Exposure Or Original Feeding In Electrophotography (AREA)

Description

本発明は、光学装置の製造方法に関する。 The present invention relates to a method for manufacturing an optical device.

特許文献1には、複数個の発光素子アレイチップが主走査方向に直線状に配列されているヘッド基板の上方に、上部にロッド光学部材が挿入される矩形状の枠体を有したハウジングを配設してなる光プリンタヘッドが記載されている。 Patent Document 1 describes a housing having a rectangular frame in which a rod optical member is inserted above a head substrate in which a plurality of light emitting element array chips are linearly arranged in the main scanning direction. An arranged optical printer head is described.

特開2002−225339号公報JP-A-2002-225339

本発明は、矯正された状態で光学部材が接着剤を用いて筐体に取り付けられている光学装置を得ることを目的とする。 An object of the present invention is to obtain an optical device in which an optical member is attached to a housing by using an adhesive in a corrected state.

第1態様の光学装置の製造方法は、開口部に光学部材が挿入された長尺状の筐体を治具に取り付けた状態で、前記筐体に矯正力を付与して該筐体を前記治具に対して矯正する筐体矯正状態、及び前記筐体に短手方向から挟持する挟持力を付与して前記光学部材を前記筐体に対して矯正する光学部材矯正状態を形成する矯正工程と、前記光学部材矯正状態で前記光学部材を前記筐体に接着剤で固定する固定工程と、を備えている。 In the method for manufacturing an optical device according to the first aspect , in a state where a long housing having an optical member inserted in an opening is attached to a jig, a correction force is applied to the housing to obtain the housing. A straightening step of forming a housing straightening state for correcting the jig and an optical member straightening state for correcting the optical member with respect to the housing by applying a holding force to the housing from the lateral direction. And a fixing step of fixing the optical member to the housing with an adhesive in the state of correcting the optical member.

第2態様の光学装置の製造方法は、前記矯正工程は、前記筐体矯正状態を形成した後に前記光学部材矯正状態を形成する。 In the method of manufacturing the optical device of the second aspect, the straightening step forms the optical member straightening state after forming the housing straightening state.

第3態様の光学装置の製造方法は、前記矯正工程は、前記筐体矯正状態を形成した後に前記矯正力を解除してから前記光学部材矯正状態を形成する。 In the method of manufacturing the optical device according to the third aspect, in the straightening step, after forming the housing straightening state, the straightening force is released, and then the optical member straightening state is formed.

第4態様の光学装置の製造方法は、前記矯正工程は、前記筐体矯正状態を維持したまま前記光学部材矯正状態を形成する。 In the method of manufacturing the optical device of the fourth aspect, the straightening step forms the optical member straightening state while maintaining the housing straightening state.

第5態様の光学装置の製造方法は、前記矯正工程は、前記矯正力及び前記挟持力を分力として生じさせる押圧力を前記筐体の短手方向の両側部に加えて前記筐体矯正状態及び前記光学部材矯正状態を形成する。 In the method for manufacturing an optical device according to a fifth aspect, in the straightening step, a pressing force generated by the straightening force and the holding force as a component force is applied to both side portions of the housing in the lateral direction, and the housing is corrected. And the optical member corrected state is formed.

第6態様の光学装置の製造方法は、前記矯正工程は、前記筐体の前記両側部に形成された傾斜面に対して交差する方向へ押圧力を加えて前記矯正力及び前記挟持力を分力として生じさせる。 In the method of manufacturing the optical device of the sixth aspect, in the straightening step, a pressing force is applied in a direction intersecting the inclined surfaces formed on both side portions of the housing to divide the straightening force and the holding force. Generate as a force.

第1態様の光学装置の製造方法では、矯正された状態で接着剤を用いて筐体に取り付けられている光学部材を得ることができる。 In the method for manufacturing an optical device of the first aspect , it is possible to obtain an optical member attached to a housing by using an adhesive in a straightened state.

第2態様の光学装置の製造方法では、治具に対してずれた状態で筐体が短手方向から挟持される場合と比して、光学部材の矯正不良を抑制することができる。 In the method of manufacturing the optical device of the second aspect , it is possible to suppress the correction failure of the optical member as compared with the case where the housing is sandwiched from the lateral direction in a state of being displaced from the jig.

第3態様の光学装置の製造方法では、筐体矯正状態を形成した後に矯正力を解除しない場合と比して、小さな挟持力で光学部材の矯正不良を抑制することができる。 In the method for manufacturing the optical device of the third aspect , it is possible to suppress the correction failure of the optical member with a small holding force as compared with the case where the correction force is not released after the housing correction state is formed.

第4態様の光学装置の製造方法では、筐体矯正状態を解除してから光学部材矯正状態を形成する場合と比して、筐体に対する光学部材の位置精度を高めることができる。 In the method of manufacturing the optical device of the fourth aspect , the positional accuracy of the optical member with respect to the housing can be improved as compared with the case where the optical member straightening state is formed after the housing straightening state is released.

第5態様の光学装置の製造方法では、筐体矯正状態を形成する機構と光学部材矯正状態を形成する機構とを用いる場合と比して、構成の簡素化を図ることができる。 In the method for manufacturing the optical device according to the fifth aspect , the configuration can be simplified as compared with the case where the mechanism for forming the housing straightening state and the mechanism for forming the optical member straightening state are used.

第6態様の光学装置の製造方法では、筐体を斜めに押す場合と比して、構成の簡素化を図ることができる。 In the method for manufacturing an optical device according to the sixth aspect , the configuration can be simplified as compared with the case where the housing is pushed diagonally.

第一実施形態に係る画像形成装置を示す概略構成図である。It is a schematic block diagram which shows the image forming apparatus which concerns on 1st Embodiment. 第一実施形態に係る露光装置を示した斜視図である。It is a perspective view which showed the exposure apparatus which concerns on 1st Embodiment. 第一実施形態に係る露光装置を示した分解斜視図である。It is an exploded perspective view which showed the exposure apparatus which concerns on 1st Embodiment. 図2のA−A断面図である。FIG. 2 is a cross-sectional view taken along the line AA of FIG. 第一実施形態に係る製造装置を示す側面図である。It is a side view which shows the manufacturing apparatus which concerns on 1st Embodiment. 図5のB−B断面図である。FIG. 5 is a cross-sectional view taken along the line BB of FIG. 第一実施形態に係る製造装置を示す斜視図である。It is a perspective view which shows the manufacturing apparatus which concerns on 1st Embodiment. (A)は、治具にセットした筐体にずれが生じた状態を示す側面図であり、(B)は、図8(A)のC−C断面図である。(A) is a side view showing a state in which the housing set on the jig is displaced, and (B) is a cross-sectional view taken along the line CC of FIG. 8 (A). (A)は、反りのある筐体が治具にセットされた状態を示す側面図であり、(B)は、図9(A)のD−D断面図である。(A) is a side view showing a state in which a warped housing is set on a jig, and (B) is a cross-sectional view taken along the line DD of FIG. 9 (A). ずれが生じた筐体や反りのある筐体で光学部材を矯正する様子を示す説明図である。It is explanatory drawing which shows the mode that the optical member is corrected in the housing where the deviation occurs and the housing with a warp. 第一実施形態に係る矯正工程の筐体矯正状態を示す側面図である。It is a side view which shows the housing correction state of the correction process which concerns on 1st Embodiment. 第一実施形態に係る筐体に接着剤を充填した状態を示す断面図である。It is sectional drawing which shows the state which filled with the adhesive in the housing which concerns on 1st Embodiment. 第一実施形態に係る矯正工程の光学部材矯正状態を示す側面図である。It is a side view which shows the optical member straightening state of the straightening process which concerns on 1st Embodiment. 第一実施形態に係る筐体に封止剤を塗布し、実装基板を取り付けた状態を示す説明図である。It is explanatory drawing which shows the state which applied the sealing agent to the housing which concerns on 1st Embodiment, and attached the mounting board. 第二実施形態に係る矯正工程を示す説明図である。It is explanatory drawing which shows the correction process which concerns on 2nd Embodiment. 第三実施形態に係る矯正工程を示す説明図である。It is explanatory drawing which shows the correction process which concerns on 3rd Embodiment. 第四実施形態に係る矯正工程を示す説明図である。It is explanatory drawing which shows the correction process which concerns on 4th Embodiment. 第五実施形態に係る矯正工程を示す説明図である。It is explanatory drawing which shows the correction process which concerns on 5th Embodiment.

<第一実施形態>
以下、図1から図14を参照しつつ、第一実施形態に係る光学装置の製造方法について説明する。
<First Embodiment>
Hereinafter, a method for manufacturing an optical device according to the first embodiment will be described with reference to FIGS. 1 to 14.

図1は、本実施形態に係る画像形成装置10を示す概略図であり、この画像形成装置10は、長尺の媒体に画像を形成する装置である。なお、図中に示す矢印Hは装置上下方向(鉛直方向)を示し、矢印Wは装置幅方向(水平方向)を示し、矢印Dは装置奥行方向(水平方向)を示す。 FIG. 1 is a schematic view showing an image forming apparatus 10 according to the present embodiment, and the image forming apparatus 10 is an apparatus for forming an image on a long medium. The arrow H shown in the figure indicates the device vertical direction (vertical direction), the arrow W indicates the device width direction (horizontal direction), and the arrow D indicates the device depth direction (horizontal direction).

(全体構成)
画像形成装置10の装置本体10Aには、転写ユニット32を構成すると共に、複数のローラ12に張架され、モータ(図示省略)の駆動により矢印A方向に周回される無端ベルト状の中間転写体ベルト14が設けられている。
(overall structure)
A transfer unit 32 is formed in the apparatus main body 10A of the image forming apparatus 10, and an endless belt-shaped intermediate transfer body is stretched on a plurality of rollers 12 and is circulated in the direction of arrow A by driving a motor (not shown). A belt 14 is provided.

この画像形成装置10は、カラー画像の形成に対応しており、イエロー(Y)、マゼンタ(M)、シアン(C)、ブラック(K)の4色に対応するトナー画像を形成する画像形成ユニット28Y、28M、28C、28Kが、中間転写体ベルト14の周回方向に沿って配置され、装置本体10Aに脱着可能に支持されている。 The image forming apparatus 10 corresponds to the formation of a color image, and is an image forming unit that forms a toner image corresponding to four colors of yellow (Y), magenta (M), cyan (C), and black (K). 28Y, 28M, 28C, and 28K are arranged along the circumferential direction of the intermediate transfer body belt 14 and are detachably supported by the apparatus main body 10A.

なお、各色に設けられた部材については、符号の末尾に各々の色を示すアルファベット(Y/M/C/K)を付与して示すが、特に色を区別せずに説明する場合は、この末尾のアルファベットを省略して説明する。 The members provided for each color are indicated by adding an alphabet (Y / M / C / K) indicating each color to the end of the code, but when the explanation is given without distinguishing the colors, this is used. The explanation will be made by omitting the alphabet at the end.

〔画像形成ユニット〕
画像形成ユニット28は、図示しないモータ及びギアからなる駆動手段によって時計方向へ回転する像保持体16を備えている。さらに、像保持体16の周面には、像保持体16の表面を所定の電位に一様に帯電させる帯電ローラ18が配置されている。
[Image formation unit]
The image forming unit 28 includes an image holder 16 that is rotated clockwise by a driving means including a motor and a gear (not shown). Further, on the peripheral surface of the image holder 16, a charging roller 18 that uniformly charges the surface of the image holder 16 to a predetermined potential is arranged.

また、像保持体16の回転方向において帯電ローラ18よりも下流側には、像保持体16上に光を照射して静電潜像を形成する露光装置20が像保持体16の軸方向に延びている。この露光装置20は、画像データに応じて光ビームを像保持体16に照射することにより、像保持体16上に静電潜像を形成する。なお、露光装置20については詳細を後述する。 Further, on the downstream side of the charging roller 18 in the rotation direction of the image holder 16, an exposure device 20 that irradiates the image holder 16 with light to form an electrostatic latent image is provided in the axial direction of the image holder 16. It is extending. The exposure apparatus 20 forms an electrostatic latent image on the image holder 16 by irradiating the image holder 16 with a light beam according to the image data. The details of the exposure apparatus 20 will be described later.

さらに、像保持体16の回転方向において露光装置20よりも下流側には、像保持体16上に形成された静電潜像を所定色(イエロー/マゼンタ/シアン/ブラック)のトナーによって現像してトナー画像を形成させる現像装置22が配置されている。 Further, an electrostatic latent image formed on the image holder 16 is developed with toner of a predetermined color (yellow / magenta / cyan / black) on the downstream side of the exposure device 20 in the rotation direction of the image holder 16. A developing device 22 for forming a toner image is arranged.

〔転写ユニット〕
像保持体16の回転方向において現像装置22よりも下流側には、転写ユニット32を構成する転写ローラ30が、中間転写体ベルト14を挟んで像保持体16の反対側に配置されている。
[Transfer unit]
A transfer roller 30 constituting the transfer unit 32 is arranged on the downstream side of the developing device 22 in the rotation direction of the image holder 16 on the opposite side of the image holder 16 with the intermediate transfer body belt 14 interposed therebetween.

これに対して、中間転写体ベルト14の周回方向において各色の像保持体16よりも下流側には、対向する2つのローラ34A、34Bを含んで構成される転写装置34が配置されている。そして、画像形成装置10の底部に設けられた用紙トレイ36から取り出されて、このローラ34A、34Bの間に搬送されてきた記録媒体としてのシート部材Pに、中間転写体ベルト14上に形成された最終トナー画像が転写される。 On the other hand, a transfer device 34 including two opposing rollers 34A and 34B is arranged on the downstream side of the image holder 16 of each color in the circumferential direction of the intermediate transfer body belt 14. Then, the sheet member P as a recording medium taken out from the paper tray 36 provided at the bottom of the image forming apparatus 10 and conveyed between the rollers 34A and 34B is formed on the intermediate transfer body belt 14. The final toner image is transferred.

〔定着ユニット〕
また、最終トナー画像が転写されたシート部材Pの搬送経路には、定着装置40が設けられている。定着装置40に搬送されたシート部材Pは、加熱ローラ40Aと加圧ローラ40Bとによって挟持搬送されることにより、シート部材P上のトナーが、溶融すると共にシート部材Pに圧着されてシート部材Pに定着される。
[Fixing unit]
Further, a fixing device 40 is provided in the transport path of the sheet member P to which the final toner image is transferred. The sheet member P conveyed to the fixing device 40 is sandwiched and conveyed by the heating roller 40A and the pressure roller 40B, so that the toner on the sheet member P is melted and pressed against the sheet member P to be pressed against the sheet member P. Is fixed in.

(全体構成の作用)
この画像形成装置10では、次のようにして画像が形成される。
(Action of the whole composition)
In this image forming apparatus 10, an image is formed as follows.

先ず、帯電ローラ18が、像保持体16の表面を予定の帯電部電位で一様にマイナス帯電する。さらに、帯電された像保持体16上の画像部分が予定の露光部電位になるように露光装置20で露光を行ない像保持体16上に静電潜像が形成される。そして、回転する像保持体16上の静電潜像が現像装置22によってトナー画像として可視化される。 First, the charging roller 18 uniformly negatively charges the surface of the image holder 16 at a planned charging portion potential. Further, exposure is performed by the exposure apparatus 20 so that the image portion on the charged image holder 16 has a predetermined exposure portion potential, and an electrostatic latent image is formed on the image holder 16. Then, the electrostatic latent image on the rotating image holder 16 is visualized as a toner image by the developing device 22.

可視化された各色のトナー画像は、転写ローラ30の静電気力で中間転写体ベルト14へ順次転写され、中間転写体ベルト14上にカラーの最終トナー画像が形成される。 The visualized toner images of each color are sequentially transferred to the intermediate transfer body belt 14 by the electrostatic force of the transfer roller 30, and the final color toner image is formed on the intermediate transfer body belt 14.

この最終トナー画像は転写装置34に設けられたローラ34A、34Bの間に送り込まれる。そして、この最終トナー画像は、用紙トレイ36から取り出されてローラ34A、34Bの間に搬送されてきたシート部材Pに転写される。 This final toner image is sent between the rollers 34A and 34B provided in the transfer device 34. Then, this final toner image is transferred to the sheet member P which has been taken out from the paper tray 36 and conveyed between the rollers 34A and 34B.

さらに、シート部材Pへ転写されたトナー画像は定着装置40でシート部材Pに定着され、シート部材Pは装置外へ排出される。 Further, the toner image transferred to the sheet member P is fixed to the sheet member P by the fixing device 40, and the sheet member P is discharged to the outside of the device.

(要部構成)
次に、露光装置20の構成について説明する。
(Main part composition)
Next, the configuration of the exposure apparatus 20 will be described.

〔露光装置の構成〕
像保持体16の下方に配置された露光装置20は、図2及び図3に示すように、装置奥行方向Dへ延びるLEDプリントヘッドであり、露光装置20は、光学装置の一例である。
[Structure of exposure equipment]
As shown in FIGS. 2 and 3, the exposure apparatus 20 arranged below the image holder 16 is an LED print head extending in the depth direction D of the apparatus, and the exposure apparatus 20 is an example of an optical apparatus.

露光装置20は、筐体58と、筐体58に取り付けられた実装基板50と、筐体58に固定された光学部材54を備えている。光学部材54は、図4に示すように、接着剤82によって筐体58に固定されており、接着剤82の表面は、封止剤84で覆われている。 The exposure device 20 includes a housing 58, a mounting substrate 50 attached to the housing 58, and an optical member 54 fixed to the housing 58. As shown in FIG. 4, the optical member 54 is fixed to the housing 58 by the adhesive 82, and the surface of the adhesive 82 is covered with the sealing agent 84.

[実装基板]
実装基板50は、図2及び図3に示したように、プリント配線基板であって、装置奥行方向Dに延びている。実装基板50は、基板本体52と、基板本体52に実装された複数の発光ダイオード62Aで構成された発光ダイオードアレイ62と、基板本体52に実装された電子部品64(図4参照)とを備えている。
[Mounting board]
As shown in FIGS. 2 and 3, the mounting board 50 is a printed wiring board and extends in the device depth direction D. The mounting board 50 includes a board body 52, a light emitting diode array 62 composed of a plurality of light emitting diodes 62A mounted on the board body 52, and an electronic component 64 (see FIG. 4) mounted on the board body 52. ing.

基板本体52は、板面が上下方向を向くように配置され、上方から見て、装置奥行方向Dに延びる矩形状とされている。 The substrate main body 52 is arranged so that the plate surface faces in the vertical direction, and has a rectangular shape extending in the device depth direction D when viewed from above.

発光ダイオード62Aは、発光素子の一例であって、基板本体52の上面に、装置奥行方向に延びるように、千鳥状に実装されている。 The light emitting diode 62A is an example of a light emitting element, and is mounted on the upper surface of the substrate main body 52 in a staggered manner so as to extend in the depth direction of the device.

電子部品64は、図4に示したように、基板本体52の下面に実装されており、電子部品64は、各発光ダイオード62Aの発光を制御する。 As shown in FIG. 4, the electronic component 64 is mounted on the lower surface of the substrate main body 52, and the electronic component 64 controls the light emission of each light emitting diode 62A.

[光学部材]
光学部材54は、レンズアレイを構成し、図2及び図3に示したように、実装基板50の上方に配置され装置奥行方向Dに延びる直方体状とされている。そして、光学部材54は、装置奥行方向Dに延びるように、千鳥状に配置された複数のロッドレンズ56を備えており、発光ダイオードアレイ62の発光ダイオード62Aからの光がロッドレンズ56を透過する。
[Optical member]
The optical member 54 constitutes a lens array, and as shown in FIGS. 2 and 3, has a rectangular shape that is arranged above the mounting substrate 50 and extends in the depth direction D of the device. The optical member 54 includes a plurality of rod lenses 56 arranged in a staggered manner so as to extend in the depth direction D of the device, and light from the light emitting diode 62A of the light emitting diode array 62 transmits through the rod lens 56. ..

また、本実施形態では、光学部材54が筐体58に取り付けられておらず、かつ、荷重が負荷されていない自由状態において、光学部材54には、1.5°程度の小さな捻れが生じている。この場合の光学部材54の捻れとは、光学部材54の長手方向NHに対して直交する断面において、光学部材54の一端から他端までの間で、光学部材54が傾くように変化する変形である。なお、各図において、光学部材54の捻れについては、捻れが小さいため省略する。 Further, in the present embodiment, in a free state in which the optical member 54 is not attached to the housing 58 and no load is applied, the optical member 54 is twisted as small as about 1.5 °. There is. The twist of the optical member 54 in this case is a deformation in which the optical member 54 changes so as to be tilted between one end and the other end of the optical member 54 in a cross section orthogonal to the longitudinal direction NH of the optical member 54. be. In each figure, the twist of the optical member 54 is omitted because the twist is small.

この構成において、後述する筐体58に、光学部材54、及び実装基板50が取り付けられた状態で、光学部材54のロッドレンズ56と発光ダイオードアレイ62とが対向する。さらに、光学部材54の上方側の部分は、筐体58から突出する。そして、発光ダイオード62Aから出射された光は、ロッドレンズ56を透過し、像保持体16(図1参照)に結像する。 In this configuration, the rod lens 56 of the optical member 54 and the light emitting diode array 62 face each other with the optical member 54 and the mounting substrate 50 attached to the housing 58 described later. Further, the upper portion of the optical member 54 projects from the housing 58. Then, the light emitted from the light emitting diode 62A passes through the rod lens 56 and forms an image on the image holder 16 (see FIG. 1).

[筐体]
筐体58は、樹脂材料で一体的に形成され、装置奥行方向Dに延びる長尺状に形成されている。また、筐体58には、図3及び図4に示したように、上下方向に貫通する開口部74が装置奥行方向Dに延設されており、開口部74には、光学部材54の下方側の部分が挿入されている。そして、筐体58は、実装基板50が取り付けられた本体部70と、光学部材54を保持するレンズ保持部76とを有している。
[Case]
The housing 58 is integrally formed of a resin material and is formed in a long shape extending in the depth direction D of the device. Further, as shown in FIGS. 3 and 4, the housing 58 has an opening 74 extending in the vertical direction extending in the depth direction D of the device, and the opening 74 is below the optical member 54. The side part is inserted. The housing 58 has a main body 70 to which the mounting board 50 is attached, and a lens holding portion 76 that holds the optical member 54.

開口部74は、図4に示したように、光学部材54が挿入される挿入部74Aと、挿入部74Aの下部に設けられ挿入部74Aより幅広の幅広部74Bと、幅広部74Bの下部に設けられ幅広部74Bより幅広で下方へ開放された開放部74Cとを備える。幅広部74Bと開放部74Cとの間には、段部70Aが形成されており、段部70Aには、実装基板50の外周部分が支持された状態で図示せぬ接着剤等で固定されている。 As shown in FIG. 4, the opening 74 is provided in the insertion portion 74A into which the optical member 54 is inserted, the wide portion 74B provided below the insertion portion 74A and wider than the insertion portion 74A, and the lower portion of the wide portion 74B. It is provided with an open portion 74C that is wider than the wide portion 74B and is open downward. A step portion 70A is formed between the wide portion 74B and the open portion 74C, and the step portion 70A is fixed to the step portion 70A with an adhesive or the like (not shown) while the outer peripheral portion of the mounting substrate 50 is supported. There is.

レンズ保持部76には、開口部74の挿入部74Aが形成されると共に、図3に示したように、光学部材54を装置幅方向Wから挟む一対の内壁面76Aが形成されている。また、レンズ保持部76には、装置幅方向Wの外側(光学部材54の反対側)を向く一対の外壁面76Bが形成されている。また、レンズ保持部76には、上方を向いた上向き面76Cが形成されている。 The lens holding portion 76 is formed with an insertion portion 74A of the opening 74, and as shown in FIG. 3, a pair of inner wall surfaces 76A that sandwich the optical member 54 from the device width direction W. Further, the lens holding portion 76 is formed with a pair of outer wall surfaces 76B facing the outside (opposite side of the optical member 54) in the device width direction W. Further, the lens holding portion 76 is formed with an upward surface 76C facing upward.

この上向き面76Cには、図2及び図3に示したように、光学部材54を筐体58に取り付けるための接着剤82が付与される付与部80が、複数形成されている。 As shown in FIGS. 2 and 3, a plurality of imparting portions 80 to which the adhesive 82 for attaching the optical member 54 to the housing 58 is applied are formed on the upward surface 76C.

具体的には、付与部80は、開口部74を挟んで、装置幅方向Wに対向するように形成され、対向した一対の付与部80が、装置奥行方向Dに間隔を空けて複数配置されている。そして、夫々の付与部80は、上方側の部分が開いたテーパー形状とされている。 Specifically, the granting portion 80 is formed so as to face the device width direction W with the opening 74 interposed therebetween, and a plurality of facing granting portions 80 are arranged at intervals in the device depth direction D. ing. Each of the imparting portions 80 has a tapered shape in which the upper portion is open.

この構成において、光学部材54の下方側の部分を、筐体58の開口部74に挿入し、光学部材54を筐体58に取り付ける前の状態では、装置幅方向Wにおいて、内壁面76Aと光学部材54との間に隙が生じている(隙間を誇張して記載した図12参照)。 In this configuration, in the state before the lower portion of the optical member 54 is inserted into the opening 74 of the housing 58 and the optical member 54 is attached to the housing 58, the inner wall surface 76A and the optics are in the device width direction W. There is a gap between the member 54 and the member 54 (see FIG. 12 in which the gap is exaggerated).

[接着剤・封止剤]
接着剤82は、紫外線硬化型の接着剤である。この接着剤82は、図2及び図3に示したように、筐体58のレンズ保持部76に形成された付与部80に充填されている。接着剤82は、自由状態で、捻れが生じている光学部材54の形状が矯正された状態で、光学部材54を筐体58に接着して取り付けている。
[Adhesive / Sealant]
The adhesive 82 is an ultraviolet curable adhesive. As shown in FIGS. 2 and 3, the adhesive 82 is filled in the applying portion 80 formed in the lens holding portion 76 of the housing 58. The adhesive 82 is attached to the housing 58 by adhering the optical member 54 in a free state and in a state where the shape of the twisted optical member 54 is corrected.

ここで、「捻れが生じている光学部材54の形状が矯正された状態で、光学部材54を筐体58に接着して取り付けている」とは、接着剤82による光学部材54の拘束を解除すると、光学部材54の捻れが再現されることである。具体的には、筐体58に取り付けられている光学部材54を筐体58から取り外すと、光学部材54の装置幅方向Wを向く側面54A(図3参照)の平面度(JISB0419 1991)が、0.05以上悪化し、光学部材54の捻れが再現されることである。 Here, "the optical member 54 is adhered to and attached to the housing 58 in a state where the shape of the optical member 54 in which the twist is generated is corrected" means that the restraint of the optical member 54 by the adhesive 82 is released. Then, the twist of the optical member 54 is reproduced. Specifically, when the optical member 54 attached to the housing 58 is removed from the housing 58, the flatness (JISB0419 1991) of the side surface 54A (see FIG. 3) of the optical member 54 facing the device width direction W is increased. It deteriorates by 0.05 or more, and the twist of the optical member 54 is reproduced.

封止剤84は、図4に示したように、光学部材54と筐体58との間を封止するように塗布されている。そして、封止剤84は、埃等が、露光装置20の外部から露光装置20の内部に侵入するのを防止している。 As shown in FIG. 4, the sealing agent 84 is applied so as to seal between the optical member 54 and the housing 58. The sealing agent 84 prevents dust and the like from entering the inside of the exposure apparatus 20 from the outside of the exposure apparatus 20.

〔露光装置の製造装置〕
次に、図5から図7を参照しつつ、露光装置20を製造するための露光装置の製造装置100について説明する。
[Manufacturing equipment for exposure equipment]
Next, the manufacturing apparatus 100 of the exposure apparatus for manufacturing the exposure apparatus 20 will be described with reference to FIGS. 5 to 7.

製造装置100は、露光装置20がセットされる治具102を備えている。製造装置100は、図5及び図6に示したように、露光装置20の筐体58に矯正力F1を付与して筐体58の治具102への取付状態を矯正する筐体矯正部104を備えている。また、製造装置100は、図7に示したように、筐体58に短手方向THから挟持する挟持力F2を付与して光学部材54の筐体58への取付状態を矯正する光学部材矯正部106とを備えている。 The manufacturing apparatus 100 includes a jig 102 in which the exposure apparatus 20 is set. As shown in FIGS. 5 and 6, the manufacturing apparatus 100 applies a straightening force F1 to the housing 58 of the exposure apparatus 20 to correct the mounting state of the housing 58 on the jig 102. It has. Further, as shown in FIG. 7, the manufacturing apparatus 100 applies a holding force F2 for holding the housing 58 from the lateral direction TH to correct the mounting state of the optical member 54 on the housing 58. It is provided with a unit 106.

[治具]
治具102は、図5から図7に示すように、露光装置20より長さ寸法が長い平板状のベース102Aと、ベース102Aの中央部に突設された凸部102Bと、凸部102Bの中央部より延出した板状の延出部102Cとを有している。
[jig]
As shown in FIGS. 5 to 7, the jig 102 includes a flat plate-shaped base 102A having a length longer than that of the exposure apparatus 20, a convex portion 102B projecting from the center of the base 102A, and a convex portion 102B. It has a plate-shaped extending portion 102C extending from the central portion.

凸部102Bは、図6に示したように、セットされた筐体58の開口部74における幅広部74Bに嵌め込める大きさに形成されている。凸部102Bの上面102Dは、筐体58の段部70Aを面接触させた状態で筐体58への治具102の挿入量(装置上下方向H方向の位置)を規定する基準面を構成する。すなわち、凸部102Bは、開口部74における挿入部74Aへの光学部材54の挿入量を定める基準を構成し、凸部102Bからの延出部102Cの延出量は、筐体58の段部70Aから光学部材54の下面54Bまでの離間距離を定めた規定値と同寸法に設定されている。 As shown in FIG. 6, the convex portion 102B is formed in a size that can be fitted into the wide portion 74B in the opening 74 of the set housing 58. The upper surface 102D of the convex portion 102B constitutes a reference surface that defines the amount of insertion of the jig 102 into the housing 58 (position in the H direction in the vertical direction of the device) with the stepped portion 70A of the housing 58 in surface contact. .. That is, the convex portion 102B constitutes a reference for determining the insertion amount of the optical member 54 into the insertion portion 74A at the opening 74, and the extension amount of the extension portion 102C from the convex portion 102B is the step portion of the housing 58. The separation distance from 70A to the lower surface 54B of the optical member 54 is set to the same dimension as the defined value.

[筐体矯正部]
筐体矯正部104は、図5及び図6に示すように、矩形長尺状に形成されており、筐体58に形成された開口部74の両側の上向き面76Cに対応して一対設けられている。夫々の筐体矯正部104の下面104Aは、平坦面で構成されており、開口部74の両脇の上向き面76Cに面接触して矯正力F1を付与する。
[Case correction part]
As shown in FIGS. 5 and 6, the housing straightening portions 104 are formed in a rectangular elongated shape, and are provided in pairs corresponding to the upward surfaces 76C on both sides of the opening 74 formed in the housing 58. ing. The lower surface 104A of each housing straightening portion 104 is formed of a flat surface, and is in surface contact with the upward surfaces 76C on both sides of the opening 74 to apply a straightening force F1.

筐体矯正部104は、昇降装置108で昇降され、昇降装置108は、一例として複数のソレノイドで構成されている。昇降装置108は、図示しない制御部に接続され、制御部からの制御信号に従って動作する。 The housing correction unit 104 is lifted and lowered by the lifting device 108, and the lifting device 108 is composed of a plurality of solenoids as an example. The elevating device 108 is connected to a control unit (not shown) and operates according to a control signal from the control unit.

昇降装置108は、制御部からの制御信号に応じ、筐体矯正部104を下降して筐体58の上向き面76Cを下方へ矯正力F1で押圧した筐体矯正状態110と(図11参照)、筐体矯正部104を上昇して筐体58の上向き面76Cから離間させた筐体矯正解除状態112とを形成する(図5及び図6参照)。 The elevating device 108 has a housing straightening state 110 in which the housing straightening unit 104 is lowered and the upward surface 76C of the housing 58 is pressed downward by a straightening force F1 in response to a control signal from the control unit (see FIG. 11). , The housing straightening portion 104 is raised to form a housing straightening release state 112 separated from the upward surface 76C of the housing 58 (see FIGS. 5 and 6).

筐体矯正状態110では、図11に示したように、筐体矯正部104が筐体58を下方へ押圧し筐体58の段部70Aを治具102の凸部102Bの上面102Dに押し付け、筐体58を治具102に対して矯正する。これにより、治具102への筐体58の取付状態を矯正する。 In the housing straightening state 110, as shown in FIG. 11, the housing straightening portion 104 presses the housing 58 downward and presses the step portion 70A of the housing 58 against the upper surface 102D of the convex portion 102B of the jig 102. The housing 58 is straightened with respect to the jig 102. As a result, the mounting state of the housing 58 on the jig 102 is corrected.

筐体58の取付状態の矯正としては、筐体58の取付位置や姿勢の矯正が挙げられる。図8(筐体58がずれた状態を誇張した図)に示すように、筐体58がずれた状態で治具102に取り付けられている場合には、筐体58の段部70Aが全域に渡って治具102の凸部102Bの上面102Dに面接するように矯正する。また、筐体58の取付状態の矯正としては、筐体58の形状の矯正が挙げられる。例えば図9に示すように、筐体58に上方へ湾曲する反りがある場合には、筐体58の段部70Aが全域に渡って治具102の凸部102Bの上面102Dに面接するようにして、反りが無くなるように矯正する。 Examples of the correction of the mounting state of the housing 58 include correction of the mounting position and posture of the housing 58. As shown in FIG. 8 (an exaggerated view in which the housing 58 is displaced), when the housing 58 is attached to the jig 102 in a displaced state, the step portion 70A of the housing 58 covers the entire area. It is straightened so as to come into contact with the upper surface 102D of the convex portion 102B of the jig 102. Further, as the correction of the mounting state of the housing 58, correction of the shape of the housing 58 can be mentioned. For example, as shown in FIG. 9, when the housing 58 has a warp that curves upward, the step portion 70A of the housing 58 is brought into contact with the upper surface 102D of the convex portion 102B of the jig 102 over the entire area. And correct it so that there is no warp.

[光学部材矯正部]
光学部材矯正部106は、図7に示すように、装置奥行方向Dに延び、筐体58の外壁面76Bを装置幅方向Wから挟むように、一対設けられている。また、夫々の光学部材矯正部106は、筐体58の外壁面76B側に突出した複数の突出部106Aを有している。この突出部106Aは、装置奥行方向Dに間隔を空け、かつ、装置奥行方向Dにおいて、筐体58の付与部80とは異なる位置に配置されている。
[Optical member straightening part]
As shown in FIG. 7, a pair of optical member straightening portions 106 are provided so as to extend in the device depth direction D and sandwich the outer wall surface 76B of the housing 58 from the device width direction W. Further, each of the optical member straightening portions 106 has a plurality of protruding portions 106A protruding toward the outer wall surface 76B side of the housing 58. The projecting portions 106A are spaced apart from each other in the device depth direction D, and are arranged at positions different from the granting portion 80 of the housing 58 in the device depth direction D.

光学部材矯正部106は、移動装置114で装置幅方向Wへ移動され、移動装置114は、一例としての複数のソレノイドで構成されている。移動装置114は、図示しない制御部に接続され、制御部からの制御信号に従って動作する。 The optical member straightening unit 106 is moved in the device width direction W by the moving device 114, and the moving device 114 is composed of a plurality of solenoids as an example. The mobile device 114 is connected to a control unit (not shown) and operates according to a control signal from the control unit.

移動装置114は、制御部からの制御信号に応じ、一対の光学部材矯正部106を近接する方向へ移動した光学部材矯正状態116と(図13参照)、一対の光学部材矯正部106を離れる方向へ移動した光学部材矯正解除状態118とを形成する(図7及び図11参照)。 The moving device 114 has an optical member straightening state 116 in which the pair of optical member straightening sections 106 are moved in a close direction in response to a control signal from the control unit (see FIG. 13), and a direction in which the pair of optical member straightening sections 106 are separated. The optical member correction release state 118 that has moved to is formed (see FIGS. 7 and 11).

光学部材矯正状態116では、光学部材矯正部106の突出部106Aがレンズ保持部76の外壁面76Bを両側から押圧し、筐体58を介して光学部材54を挟んで光学部材54を筐体58に対して矯正する。これにより、光学部材54の取付状態を矯正する。 In the optical member straightening state 116, the protruding portion 106A of the optical member straightening portion 106 presses the outer wall surface 76B of the lens holding portion 76 from both sides, sandwiches the optical member 54 via the housing 58, and holds the optical member 54 in the housing 58. Correct against. As a result, the mounting state of the optical member 54 is corrected.

光学部材54の取付状態の矯正としては、光学部材54の形状(捻れ)の矯正が挙げられる。また、光学部材54の取付状態の矯正としては、光学部材54を筐体58の中心に移動させる光学部材54の取付位置の矯正が挙げられる。 Examples of the correction of the attached state of the optical member 54 include correction of the shape (twist) of the optical member 54. Further, as the correction of the mounting state of the optical member 54, correction of the mounting position of the optical member 54 for moving the optical member 54 to the center of the housing 58 can be mentioned.

一方、光学部材矯正解除状態118では、一対の光学部材矯正部106の突出部106Aが外壁面76Bから離間する。 On the other hand, in the optical member straightening release state 118, the protruding portions 106A of the pair of optical member straightening portions 106 are separated from the outer wall surface 76B.

〔露光装置の製造方法〕
次に、製造装置100を用いて、露光装置20を製造する露光装置の製造方法について説明する。なお、製造装置100の非稼働状態において、筐体矯正部104は筐体矯正解除状態112とされており、光学部材矯正部106は、光学部材矯正解除状態118とされている。また、露光装置の製造方法を説明する上で用いる方向については、露光装置20を説明で用いた方向を使用する。
[Manufacturing method of exposure equipment]
Next, a method of manufacturing the exposure apparatus for manufacturing the exposure apparatus 20 using the manufacturing apparatus 100 will be described. In the non-operating state of the manufacturing apparatus 100, the housing straightening unit 104 is in the housing straightening release state 112, and the optical member straightening unit 106 is in the optical member straightening release state 118. Further, as for the direction used in explaining the manufacturing method of the exposure apparatus, the direction used in the explanation of the exposure apparatus 20 is used.

先ず、図6に示したように、筐体58を治具102に取り付け、光学部材54の下方側の部分を筐体58の開口部78における挿入部74Aへ挿入する。具体的には、光がロッドレンズ56を透過する方向が装置上下方向となるように、光学部材54を開口部78に挿入し、光学部材54の下面54Bを延出部102Cの頂面102Eに面接触した状態で支持する。なお、この状態では、光学部材54は、筐体58に対して拘束されておらず、筐体58に対して装置幅方向Wにガタついている。 First, as shown in FIG. 6, the housing 58 is attached to the jig 102, and the lower portion of the optical member 54 is inserted into the insertion portion 74A in the opening 78 of the housing 58. Specifically, the optical member 54 is inserted into the opening 78 so that the light passes through the rod lens 56 in the vertical direction of the device, and the lower surface 54B of the optical member 54 is placed on the top surface 102E of the extending portion 102C. Support in surface contact. In this state, the optical member 54 is not restrained with respect to the housing 58 and rattles with respect to the housing 58 in the device width direction W.

このとき、図8に示すように、治具102に対して筐体58が傾斜して取り付けられることがあり、この場合、図8(B)に示すように、筐体58の段部70Aが治具102の凸部102Bの上面102Dから浮いた状態となる。 At this time, as shown in FIG. 8, the housing 58 may be attached to the jig 102 at an angle. In this case, as shown in FIG. 8B, the step portion 70A of the housing 58 is attached. It is in a state of floating from the upper surface 102D of the convex portion 102B of the jig 102.

また、図9に示すように、上方へ湾曲する反りが筐体58に生じている場合、図9(B)に示すように、筐体58の段部70Aが治具102の凸部102Bの上面102Dから部分的に浮いた状態となり、筐体58の一部にずれを生ずる。 Further, as shown in FIG. 9, when the housing 58 is warped upward, the step portion 70A of the housing 58 is the convex portion 102B of the jig 102 as shown in FIG. 9B. A part of the housing 58 is displaced from the upper surface 102D.

このような状態で、光学部材矯正部106を作動して光学部材矯正状態116とすると、図10(筐体矯正状態110を形成しない比較例)に示すように、光学部材矯正部106の突出部106Aが筐体58のレンズ保持部76以外の部位を押圧することがある。この場合、光学部材54の矯正不良が生じたり、光学部材矯正部106の突出部106Aの破損を生じたりすることがあり得る。 In such a state, when the optical member straightening section 106 is operated to bring the optical member straightening state 116 to the optical member straightening state 116, as shown in FIG. 10 (comparative example in which the housing straightening state 110 is not formed), the protruding portion of the optical member straightening section 106 The 106A may press a portion of the housing 58 other than the lens holding portion 76. In this case, the optical member 54 may be poorly corrected, or the protruding portion 106A of the optical member straightening portion 106 may be damaged.

そこで、本実施形態では矯正工程において、図11に示すように、筐体58に矯正力F1を付与して筐体58を治具102に対して矯正する筐体矯正状態110を形成する。 Therefore, in the present embodiment, as shown in FIG. 11, in the straightening step, a straightening force F1 is applied to the housing 58 to form a housing straightening state 110 that straightens the housing 58 against the jig 102.

具体的には、昇降装置108で筐体矯正部104を下降して筐体58の上向き面76Cを下方へ押圧し、筐体58の段部70Aが、全域に渡って治具102の凸部102Bの上面102Dに面接触した状態を形成する。 Specifically, the elevating device 108 lowers the housing straightening portion 104 and presses the upward surface 76C of the housing 58 downward, so that the step portion 70A of the housing 58 is a convex portion of the jig 102 over the entire area. A state of surface contact with the upper surface 102D of 102B is formed.

これにより、治具102に対して筐体58がずれていた場合には、ずれを矯正することができる。また、筐体58に反りが生じていた場合には、反りが無くなるように矯正することができる。 As a result, if the housing 58 is misaligned with respect to the jig 102, the misalignment can be corrected. Further, if the housing 58 is warped, it can be corrected so that the warp disappears.

そして、図12に示すように、昇降装置108で筐体矯正部104を上昇して筐体58の上向き面76Cから離間させた筐体矯正解除状態112を形成する。 Then, as shown in FIG. 12, the elevating device 108 raises the housing straightening portion 104 to form the housing straightening release state 112 separated from the upward surface 76C of the housing 58.

この状態において、接着剤82を付与部80に付与し、接着剤82を光学部材54の側面54Aと筐体58の内壁面76Aとの隙間に充填する。 In this state, the adhesive 82 is applied to the applying portion 80, and the adhesive 82 is filled in the gap between the side surface 54A of the optical member 54 and the inner wall surface 76A of the housing 58.

次に、図13に示すように、筐体58に短手方向THから挟持する挟持力F2を付与して54光学部材を筐体58に対して矯正した光学部材矯正状態116を形成する。 Next, as shown in FIG. 13, a holding force F2 for holding the housing 58 from the lateral direction TH is applied to form an optical member straightening state 116 in which the 54 optical members are corrected with respect to the housing 58.

具体的には、移動装置114で一対の光学部材矯正部106を近接する方向へ移動し、一対の光学部材矯正部106の各突出部106Aで装置幅方向Wの両側から外壁面76Bを押圧し筐体58を介して光学部材54を挟んで取付状態を矯正する。これにより、光学部材54の形状(捻れ)を矯正する。また、光学部材54を筐体58の中心へ移動して光学部材54の取付位置を矯正する。 Specifically, the moving device 114 moves the pair of optical member straightening portions 106 in the approaching direction, and the protruding portions 106A of the pair of optical member straightening portions 106 press the outer wall surface 76B from both sides in the device width direction W. The mounting state is corrected by sandwiching the optical member 54 via the housing 58. As a result, the shape (twist) of the optical member 54 is corrected. Further, the optical member 54 is moved to the center of the housing 58 to correct the mounting position of the optical member 54.

この状態において、昇降装置108で筐体矯正部104を再度下降して筐体58の上向き面76Cを下方へ押圧し、筐体58に挟持力F2と矯正力F1とが同時に付与された状態を形成する。そして、固定工程において、制御部が図示せぬ照射部材を制御して接着剤82に紫外線を照射し、接着剤82を硬化させる。これにより、光学部材54を接着剤82で筐体58に固定する。 In this state, the elevating device 108 lowers the housing straightening portion 104 again to press the upward surface 76C of the housing 58 downward, so that the housing 58 is simultaneously provided with the holding force F2 and the straightening force F1. Form. Then, in the fixing step, the control unit controls an irradiation member (not shown) to irradiate the adhesive 82 with ultraviolet rays to cure the adhesive 82. As a result, the optical member 54 is fixed to the housing 58 with the adhesive 82.

ここで、本実施形態では、筐体58に挟持力F2と矯正力F1とを同時に付与した状態で光学部材54を接着剤82で筐体58に固定した場合について説明するが、これに限定されるものではない。例えば、治具102に対する筐体58のずれを矯正する場合など、筐体58に矯正力F1を加えた状態で固定しなくても良い場合には、筐体58に矯正力F1のみを付与した状態で光学部材54を接着剤82で筐体58に固定してもよい。 Here, in the present embodiment, the case where the optical member 54 is fixed to the housing 58 with the adhesive 82 in a state where the holding force F2 and the straightening force F1 are simultaneously applied to the housing 58 will be described, but the present invention is limited to this. It's not something. For example, when it is not necessary to fix the housing 58 with the correction force F1 applied to the housing 58, such as when correcting the deviation of the housing 58 with respect to the jig 102, only the correction force F1 is applied to the housing 58. In this state, the optical member 54 may be fixed to the housing 58 with the adhesive 82.

次に、制御部が、移動装置114を制御して、図7に示したように、一対の光学部材矯正部106を離間する方向へ移動して光学部材矯正解除状態118を形成する。このとき、接着剤82は、既に硬化しているため、光学部材矯正部106からの挟持力F2を解除しても、光学部材54の形状(捻れ)が矯正されている状態は維持される。 Next, the control unit controls the moving device 114 to move the pair of optical member straightening units 106 in a direction away from each other to form the optical member straightening release state 118, as shown in FIG. At this time, since the adhesive 82 has already been cured, the state in which the shape (twist) of the optical member 54 is corrected is maintained even if the holding force F2 from the optical member straightening portion 106 is released.

そして、光学部材54が取り付けられた筐体58を治具102から取り外し、図14に示すように、光学部材54と筐体58との間に封止剤84を塗布して接着剤82の表面を覆う。これにより、光学部材54と筐体58との間を封止する。また、この筐体58の段部70Aに実装基板50の外周側の部分を接触させ、実装基板50を接着剤120で筐体58に固定する。これにより、露光装置20が製造される。 Then, the housing 58 to which the optical member 54 is attached is removed from the jig 102, and as shown in FIG. 14, a sealing agent 84 is applied between the optical member 54 and the housing 58 to coat the surface of the adhesive 82. Cover. As a result, the space between the optical member 54 and the housing 58 is sealed. Further, the outer peripheral side portion of the mounting board 50 is brought into contact with the step portion 70A of the housing 58, and the mounting board 50 is fixed to the housing 58 with the adhesive 120. As a result, the exposure apparatus 20 is manufactured.

(作用・効果)
本実施形態の作用を説明する。
(Action / effect)
The operation of this embodiment will be described.

このように製造された露光装置20では、光学部材矯正状態116に維持された光学部材54が接着剤82で筐体58に固定されている。 In the exposure apparatus 20 manufactured in this way, the optical member 54 maintained in the optical member straightening state 116 is fixed to the housing 58 with the adhesive 82.

よって、矯正された状態で接着剤82を用いて筐体58に取り付けられている光学部材の一例である露光装置20を得ることができる。 Therefore, it is possible to obtain the exposure apparatus 20 which is an example of the optical member attached to the housing 58 by using the adhesive 82 in the corrected state.

また、矯正工程では、筐体矯正状態110を形成した後に光学部材矯正状態116を形成する。 Further, in the straightening step, the optical member straightening state 116 is formed after the housing straightening state 110 is formed.

このため、治具102に対してずれた状態で筐体58が短手方向THから挟持される場合と比して、光学部材54の矯正不良を抑制することができる。 Therefore, it is possible to suppress the correction failure of the optical member 54 as compared with the case where the housing 58 is sandwiched from the lateral TH in a state of being displaced from the jig 102.

そして、矯正工程は、筐体矯正状態110を形成した後に矯正力F1を解除してから光学部材矯正状態116を形成する。 Then, in the straightening step, after the housing straightening state 110 is formed, the straightening force F1 is released, and then the optical member straightening state 116 is formed.

このため、治具102に対してずれた状態で筐体58が短手方向THから挟持される場合と比して、光学部材54の矯正不良や治具等の破損を抑制することができる。 Therefore, as compared with the case where the housing 58 is sandwiched from the lateral TH in a state of being displaced from the jig 102, it is possible to suppress the correction failure of the optical member 54 and the damage of the jig and the like.

また、光学部材矯正状態116を形成した後に筐体矯正状態110を形成する場合と比して、例えば筐体矯正状態110と同時に光学部材54を上面から付勢しても光学部材54の横移動に起因したレンズ面の傷つきを抑制することができる。さらに、筐体矯正状態110を形成した後に矯正力F1を解除しない場合と比して、小さな挟持力F2で光学部材54の矯正不良を抑制することができる。 Further, as compared with the case where the housing straightening state 110 is formed after the optical member straightening state 116 is formed, for example, even if the optical member 54 is urged from the upper surface at the same time as the housing straightening state 110, the optical member 54 moves laterally. It is possible to suppress damage to the lens surface caused by the above. Further, as compared with the case where the straightening force F1 is not released after the housing straightening state 110 is formed, it is possible to suppress the straightening failure of the optical member 54 with a small holding force F2.

なお、本実施形態では、筐体矯正状態110を形成した後に矯正力F1を解除してから光学部材矯正状態116を形成したが、これに限定されるものではない。例えば、次に示す実施形態の露光装置の製造方法としても良い。 In the present embodiment, after the housing straightening state 110 is formed, the straightening force F1 is released and then the optical member straightening state 116 is formed, but the present invention is not limited to this. For example, the method for manufacturing the exposure apparatus according to the following embodiment may be used.

<第二実施形態>
図15は、第二実施形態を示す図であり、第一実施形態と同一又は同等部分については、同符号を付して説明を割愛するとともに、異なる部分についてのみ説明する。
<Second embodiment>
FIG. 15 is a diagram showing a second embodiment, and the same or equivalent parts as those in the first embodiment are designated by the same reference numerals and description thereof will be omitted, and only different parts will be described.

本実施形態は、第一実施形態と比較して、矯正工程が異なる。 The correction step of this embodiment is different from that of the first embodiment.

本実施形態の矯正工程では、図15に示すように、筐体矯正部104で筐体58の上向き面76Cを押圧した筐体矯正状態110を維持したまま、光学部材矯正部106で筐体58を短手方向THから挟持して光学部材矯正状態116を形成する。 In the straightening step of the present embodiment, as shown in FIG. 15, the optical member straightening portion 106 keeps the housing 58 while maintaining the housing straightening state 110 in which the upward surface 76C of the housing 58 is pressed by the housing straightening portion 104. Is sandwiched from TH in the lateral direction to form the optical member straightening state 116.

本実施形態においても、筐体矯正解除状態112を形成する際の作用効果を除いて、第一実施形態と同様の作用効果を得ることができる。 Also in the present embodiment, the same effects as those in the first embodiment can be obtained except for the effects when the housing correction release state 112 is formed.

また、筐体矯正状態110を解除してから光学部材矯正状態116を形成する場合と比して、筐体58に対する光学部材54の位置精度を高めることができる。 Further, the positional accuracy of the optical member 54 with respect to the housing 58 can be improved as compared with the case where the optical member straightening state 116 is formed after the housing straightening state 110 is released.

なお、第一及び第二本実施形態では、昇降される筐体矯正部104で筐体矯正状態110を形成するとともに、光学部材矯正部106で光学部材矯正状態116を形成したが、これに限定されるものではない。例えば、次に示す実施形態の露光装置の製造方法としても良い。 In the first and second embodiments, the housing straightening section 104 that is raised and lowered forms the housing straightening state 110, and the optical member straightening section 106 forms the optical member straightening state 116, but the present invention is limited to this. It is not something that is done. For example, the method for manufacturing the exposure apparatus according to the following embodiment may be used.

<第三実施形態>
図16は、第三実施形態を示す図であり、第一実施形態と同一又は同等部分については、同符号を付して説明を割愛するとともに、異なる部分についてのみ説明する。
<Third Embodiment>
FIG. 16 is a diagram showing a third embodiment, and the same or equivalent parts as those in the first embodiment are designated by the same reference numerals and description thereof will be omitted, and only different parts will be described.

本実施形態は、第一及び第二実施形態と比較して、矯正工程において筐体58への矯正力F1の付与と挟持力F2の付与とを同一装置で同時に行う点が異なる。 This embodiment is different from the first and second embodiments in that the straightening force F1 and the holding force F2 are simultaneously applied to the housing 58 by the same device in the straightening step.

本実施形態に係る製造装置100は、図16に示すように、筐体58の治具102への取付状態の矯正と、光学部材54の筐体58への取付状態の矯正とを同時に行うプッシャー130を備えている。 As shown in FIG. 16, the manufacturing apparatus 100 according to the present embodiment is a pusher that simultaneously corrects the mounting state of the housing 58 to the jig 102 and the mounting state of the optical member 54 to the housing 58. It is equipped with 130.

プッシャー130は、筐体58のレンズ保持部76の両脇に設けられており、プッシャー130は、筐体58の長さ方向に延在する長尺の板状に形成されている。筐体58側に位置するプッシャー130の一縁部は、一縁130Aへ向かうに従って薄肉とされており、その縁は、丸められている。 Pushers 130 are provided on both sides of the lens holding portion 76 of the housing 58, and the pushers 130 are formed in the shape of a long plate extending in the length direction of the housing 58. One edge of the pusher 130 located on the housing 58 side is thinned toward the edge 130A, and the edge is rounded.

そして、プッシャー130は、筐体58のレンズ保持部76の外壁面76B及び本体部70の上面70Bに対して傾斜して配置されており、外壁面76B及び本体部70の上面70Bに対する傾斜角度は、一例として45度に設定されている。 The pusher 130 is arranged to be inclined with respect to the outer wall surface 76B of the lens holding portion 76 of the housing 58 and the upper surface 70B of the main body 70, and the inclination angle of the outer wall surface 76B and the main body 70 with respect to the upper surface 70B is , As an example, it is set to 45 degrees.

プッシャー130は、駆動装置132で移動され、駆動装置132は、一例としての複数のソレノイドで構成されている。駆動装置132は、図示しない制御部に接続され、制御部からの制御信号に従って動作する。 The pusher 130 is moved by the drive device 132, and the drive device 132 is composed of a plurality of solenoids as an example. The drive device 132 is connected to a control unit (not shown) and operates according to a control signal from the control unit.

プッシャー130は、駆動装置132で筐体58側へ移動されると、一縁130Aが筐体58の本体部70の上面70Bとレンズ保持部76の外壁面76Bとに当たる。すると、プッシャー130からの押圧力F3は、筐体58を下方へ付勢する矯正力F1と、筐体58のレンズ保持部76を短手方向THから挟持する挟持力F2とを分力として生じさせる。これにより、前述した筐体矯正状態110及び光学部材矯正状態116を形成する。 When the pusher 130 is moved toward the housing 58 by the drive device 132, the edge 130A hits the upper surface 70B of the main body 70 of the housing 58 and the outer wall surface 76B of the lens holding portion 76. Then, the pressing force F3 from the pusher 130 is generated as a component force of a correction force F1 for urging the housing 58 downward and a holding force F2 for holding the lens holding portion 76 of the housing 58 from the lateral direction TH. Let me. As a result, the housing straightening state 110 and the optical member straightening state 116 described above are formed.

本実施形態においても、第一実施形態と同様の作用効果を得ることができる。 Also in this embodiment, the same effects as those in the first embodiment can be obtained.

また、プッシャー130を作動して矯正工程を実施することで、矯正力F1及び挟持力F2を分力として生じさせ、一動作で筐体矯正状態110及び光学部材矯正状態116を形成することができる。 Further, by operating the pusher 130 to carry out the straightening step, the straightening force F1 and the holding force F2 are generated as component forces, and the housing straightening state 110 and the optical member straightening state 116 can be formed in one operation. ..

このため、筐体矯正状態110を形成する機構と光学部材矯正状態116を形成する機構とを備える場合と比して、構成の簡素化を図ることができる。 Therefore, the configuration can be simplified as compared with the case where the mechanism for forming the housing straightening state 110 and the mechanism for forming the optical member straightening state 116 are provided.

<第四実施形態>
図17は、第四実施形態を示す図であり、第三実施形態と同一又は同等部分については、同符号を付して説明を割愛するとともに、異なる部分についてのみ説明する。
<Fourth Embodiment>
FIG. 17 is a diagram showing a fourth embodiment, and the same or equivalent parts as those in the third embodiment are designated by the same reference numerals and description thereof will be omitted, and only different parts will be described.

本実施形態は、第二及び第三実施形態と比較して、筐体58の本体部70とレンズ保持部76との間に傾斜面140が形成されている点が異なる。各プッシャー130は、筐体58の両側部に形成された対応する傾斜面140に対して交差する短手方向THから押圧力F3を加えて矯正力F1及び挟持力F2を分力として生じさせる。 This embodiment is different from the second and third embodiments in that an inclined surface 140 is formed between the main body 70 of the housing 58 and the lens holding portion 76. Each pusher 130 applies a pressing force F3 from the lateral direction TH intersecting the corresponding inclined surfaces 140 formed on both sides of the housing 58 to generate a straightening force F1 and a holding force F2 as a component force.

本実施形態においても、第二実施形態と同様の作用効果を得ることができる。 Also in this embodiment, the same effects as those in the second embodiment can be obtained.

また、本実施形態では、第三実施形態と同様に、筐体矯正状態110を形成する機構と光学部材矯正状態116を形成する機構とを備える場合と比して、構成の簡素化を図ることができる。 Further, in the present embodiment, as in the third embodiment, the configuration is simplified as compared with the case where the mechanism for forming the housing straightening state 110 and the mechanism for forming the optical member straightening state 116 are provided. Can be done.

<第五実施形態>
図18は、第五実施形態を示す図であり、第四実施形態と同一又は同等部分については、同符号を付して説明を割愛するとともに、異なる部分についてのみ説明する。
<Fifth Embodiment>
FIG. 18 is a diagram showing a fifth embodiment, and the same or equivalent parts as those in the fourth embodiment are designated by the same reference numerals and description thereof will be omitted, and only different parts will be described.

本実施形態は、第四実施形態と比較して、プッシャー130による押圧方向が異なり、各プッシャー130は、筐体58の両側部の傾斜面140に対して交差する上方から下方へ向けて押圧力F3を加えて矯正力F1及び挟持力F2を分力として生じさせる。 In the present embodiment, the pressing direction by the pushers 130 is different from that in the fourth embodiment, and each pusher 130 presses from above to below intersecting the inclined surfaces 140 on both sides of the housing 58. F3 is added to generate a correction force F1 and a holding force F2 as a component force.

本実施形態においても、第一実施形態と同様の作用効果を得ることができる。 Also in this embodiment, the same effects as those in the first embodiment can be obtained.

また、本実施形態では、第四実施形態と同様に、筐体矯正状態110を形成する機構と光学部材矯正状態116を形成する機構とを備える場合と比して、構成の簡素化を図ることができる。 Further, in the present embodiment, as in the fourth embodiment, the configuration is simplified as compared with the case where the mechanism for forming the housing straightening state 110 and the mechanism for forming the optical member straightening state 116 are provided. Can be done.

なお、各実施形態では、光学装置を露光装置20として説明したが、光学装置を読取ユニット(例えば、Contact Image Sensor)としてもよい。 In each embodiment, the optical device is described as the exposure device 20, but the optical device may be a reading unit (for example, a Contact Image Sensor).

また、第一実施形態では、複数の突出部106Aを有する光学部材矯正部106で筐体58の外壁面76Bを挟持したが、突出部106Aを有しない光学部材矯正部106で筐体58を挟持しても良い。 Further, in the first embodiment, the outer wall surface 76B of the housing 58 is sandwiched between the optical member straightening portions 106 having a plurality of protruding portions 106A, but the housing 58 is sandwiched between the optical member straightening portions 106 having no protruding portions 106A. You may.

また、上記実施形態では、筐体58の付与部80に接着剤82を充填した後に、光学部材矯正状態116を形成したが、光学部材矯正状態116を形成してから付与部80に接着剤82を充填してもよい。 Further, in the above embodiment, the optical member straightening state 116 is formed after the applying portion 80 of the housing 58 is filled with the adhesive 82, but after the optical member straightening state 116 is formed, the adhesive 82 is applied to the applying portion 80. May be filled.

54 光学部材
58 筐体
74 開口部
82 接着剤
102 治具
104 筐体矯正部
106 光学部材矯正部
110 筐体矯正状態
112 筐体矯正解除状態
116 光学部材矯正状態
118 光学部材矯正解除状態
140 傾斜面
F1 矯正力
F2 挟持力
54 Optical member 58 Housing 74 Opening 82 Adhesive 102 Jigger 104 Housing straightening part 106 Optical member straightening part 110 Housing straightening state 112 Housing straightening release state 116 Optical member straightening state 118 Optical member straightening release state 140 Inclined surface F1 Corrective force F2 Holding force

Claims (2)

開口部に光学部材が挿入された長尺状の筐体を治具に取り付けた状態で、前記筐体に矯正力を付与して該筐体を前記治具に対して矯正する筐体矯正状態、及び前記筐体に短手方向から挟持する挟持力を付与して前記光学部材を前記筐体に対して矯正する光学部材矯正状態を形成する矯正工程と、
前記光学部材矯正状態で前記光学部材を前記筐体に接着剤で固定する固定工程と、
を有し、
前記矯正工程は、前記筐体矯正状態を形成した後に前記矯正力を解除してから前記光学部材矯正状態を形成する光学装置の製造方法。
A housing straightening state in which a long housing having an optical member inserted in an opening is attached to a jig, and a straightening force is applied to the housing to correct the housing with respect to the jig. , And a straightening step of forming an optical member straightening state in which a holding force for holding the housing from the lateral direction is applied to correct the optical member with respect to the housing.
A fixing step of fixing the optical member to the housing with an adhesive in the state of correcting the optical member, and
Have,
The straightening step is a method for manufacturing an optical device that forms the housing straightening state, then releases the straightening force, and then forms the optical member straightening state.
開口部に光学部材が挿入された長尺状の筐体を治具に取り付けた状態で、前記筐体に矯正力を付与して該筐体を前記治具に対して矯正する筐体矯正状態、及び前記筐体に短手方向から挟持する挟持力を付与して前記光学部材を前記筐体に対して矯正する光学部材矯正状態を形成する矯正工程と、
前記光学部材矯正状態で前記光学部材を前記筐体に接着剤で固定する固定工程と、
を有し、
前記矯正工程は、前記矯正力及び前記挟持力を分力として生じさせる押圧力を前記筐体の短手方向の両側部に形成された傾斜面に対して交差する方向へ加えて前記筐体矯正状態及び前記光学部材矯正状態を形成する光学装置の製造方法。
A housing straightening state in which a long housing having an optical member inserted in an opening is attached to a jig, and a straightening force is applied to the housing to correct the housing with respect to the jig. , And a straightening step of forming an optical member straightening state in which a holding force for holding the housing from the lateral direction is applied to correct the optical member with respect to the housing.
A fixing step of fixing the optical member to the housing with an adhesive in the state of correcting the optical member, and
Have,
In the straightening step, the straightening force and the pressing force generated by the holding force as a component force are applied in a direction intersecting the inclined surfaces formed on both sides in the lateral direction of the housing to correct the housing. A method for manufacturing an optical device that forms a state and a corrected state of the optical member.
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