JP6963504B2 - Polyimide laminate and its manufacturing method - Google Patents
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
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- B32B2457/00—Electrical equipment
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Description
この発明は、支持体上に第1のポリイミド層と第2のポリイミド層とが積層されたポリイミド積層体及びその製造方法に関し、詳しくは、第2のポリイミド層からなり可撓性を有した樹脂基材上に表示部を備えた表示装置等を得るのに好適なポリイミド積層体及びその製造方法に関する。 The present invention relates to a polyimide laminate in which a first polyimide layer and a second polyimide layer are laminated on a support and a method for producing the same. Specifically, the present invention relates to a flexible resin composed of a second polyimide layer. The present invention relates to a polyimide laminate suitable for obtaining a display device or the like having a display portion on a base material, and a method for producing the same.
液晶表示装置や有機EL表示装置等の表示装置は、テレビのような大型ディスプレイから、携帯電話、パソコン、スマートフォンなどの小型ディスプレイに至るまで、幅広く使用されている。例えば、有機EL表示装置では、ガラス基板上に薄膜トランジスタ(TFT)を形成し、電極、発光層、電極等を順次形成し、最後に別途ガラス基板や多層薄膜等で気密封止して作られる。 Display devices such as liquid crystal displays and organic EL display devices are widely used from large displays such as televisions to small displays such as mobile phones, personal computers, and smartphones. For example, in an organic EL display device, a thin film transistor (TFT) is formed on a glass substrate, electrodes, light emitting layers, electrodes and the like are sequentially formed, and finally, the glass substrate and a multilayer thin film are separately airtightly sealed.
ここで、表示装置の種類は特に制限しないが、液晶表示装置、有機EL表示装置、電子ペーパーをはじめとする表示装置、及び、カラーフィルター等の表示装置の構成部品も含んでいる。また、有機EL照明装置、タッチパネル装置、ITO等が積層された導電性フィルム、水分や酸素等の浸透を防止するガスバリアフィルム、フレキシブル回路基板の構成部品などを含めた、前記表示装置に付随して使用される各種機能装置も包含される。すなわち、本発明で言うフレキシブルデバイスとは、液晶表示装置、有機EL表示装置、及びカラーフィルター等の構成部品のみならず、有機EL照明装置、タッチパネル装置、有機EL表示装置の電極層もしくは発光層、ガスバリアフィルム、接着フィルム、薄膜トランジスタ(TFT)、液晶表示装置の配線層もしくは透明導電層等の、1種又は2種以上を組み合わせたものも含めている。 Here, the type of display device is not particularly limited, but includes components of a liquid crystal display device, an organic EL display device, a display device such as electronic paper, and a display device such as a color filter. In addition, the display device includes an organic EL lighting device, a touch panel device, a conductive film on which ITO and the like are laminated, a gas barrier film that prevents permeation of moisture, oxygen, and the like, and components of a flexible circuit board. Various functional devices used are also included. That is, the flexible device referred to in the present invention includes not only components such as a liquid crystal display device, an organic EL display device, and a color filter, but also an organic EL lighting device, a touch panel device, an electrode layer or a light emitting layer of the organic EL display device, and the like. It also includes one type or a combination of two or more types such as a gas barrier film, an adhesive film, a thin film transistor (TFT), a wiring layer of a liquid crystal display device, or a transparent conductive layer.
ガラス基板を樹脂基材に置き換えることで、薄型化、軽量化、フレキシブル化が実現でき、表示装置の用途を更に広げることが可能になる。ところが、樹脂はガラスと比較して寸法安定性、透明性、耐熱性、耐湿性、ガスバリア性等に劣るといった問題がある。 By replacing the glass substrate with a resin base material, it is possible to realize thinning, weight reduction, and flexibility, and it becomes possible to further expand the use of the display device. However, resin has a problem that it is inferior in dimensional stability, transparency, heat resistance, moisture resistance, gas barrier property, etc. as compared with glass.
例えば、特許文献1は、フレキシブルディスプレー用プラスチック基板として有用なポリイミド、及びその前駆体に係る発明に関し、シクロへキシルフェニルテトラカルボン酸等のような脂環式構造を含んだテトラカルボン酸類を用いて、各種ジアミンと反応させたポリイミドが、透明性に優れることを開示している。この他にも、ガラス基板の替わりにフレキシブルな樹脂基材を用いて軽量化を図る試みがなされており、例えば、非特許文献1及び2では、透明性の高いポリイミドを利用した有機EL表示装置が提案されている。
For example,
このように、ポリイミド等の樹脂フィルムがフレキシブルディスプレー用の支持基材に有用であることは知られているが、表示装置の製造工程は、既にガラス基板を用いて行なわれており、その生産設備の大半はガラス基板を使用することを前提に設計されている。したがって、既存の生産設備を有効活用しながら、表示装置を生産できることが望ましい。 As described above, it is known that a resin film such as polyimide is useful as a supporting base material for a flexible display, but the manufacturing process of a display device has already been performed using a glass substrate, and the production equipment thereof. Most of them are designed on the assumption that a glass substrate is used. Therefore, it is desirable to be able to produce display devices while effectively utilizing existing production equipment.
その検討例の一つとして、ガラス基板上に樹脂を積層した状態で所定の表示装置の製造工程を完了させ、その後にガラス基板を取り除くことで、樹脂の基材の上に表示部を備えた表示装置を製造する方法がある(特許文献2〜3、非特許文献3〜4参照)。このような方法の場合、樹脂基材上に形成された表示部に損傷を与えずに樹脂基材とガラスとを分離することが重要となる。
As one of the study examples, a display unit is provided on the resin base material by completing the manufacturing process of a predetermined display device in a state where the resin is laminated on the glass substrate and then removing the glass substrate. There is a method of manufacturing a display device (see
すなわち、特許文献3や非特許文献3では、ガラス基板上に塗布して固着した樹脂基材に対して所定の表示部を形成した後、EPLaR(Electronics on Plastic by Laser Release)プロセスと呼ばれる方法によりガラス側からレーザーを照射して、表示部を備えた樹脂基材をガラス基板から強制分離している。また、特許文献2や非特許文献4では、ガラス基板に剥離層を形成した上で、剥離層よりもひとまわり大きくポリイミド樹脂を塗布してポリイミド層を形成し、剥離層に達する切断線を入れて、剥離層からひとまわり小さいポリイミドフィルムを剥離するようにしている。
That is, in
一方で、ガラス基板上に樹脂を積層させた場合には、反りが大きな問題になる。すなわち、ガラス基板の熱膨張係数は数ppm/Kであるのに対し、一般に樹脂は数十ppm/K以上の熱膨張係数を有することから、例えば、ガラス基板上に樹脂溶液を塗布し、加熱処理等により硬化させて樹脂層を形成して、室温まで放冷すると、反りが発生してしまう。このような反りを抑制できなければ、その後の表示部の形成等に悪影響を与えてしまう。 On the other hand, when the resin is laminated on the glass substrate, warpage becomes a big problem. That is, while the coefficient of thermal expansion of a glass substrate is several ppm / K, resin generally has a coefficient of thermal expansion of several tens of ppm / K or more. Therefore, for example, a resin solution is applied onto a glass substrate and heated. When it is cured by a treatment or the like to form a resin layer and allowed to cool to room temperature, warpage occurs. If such warpage cannot be suppressed, the subsequent formation of the display portion and the like will be adversely affected.
または、ポリイミド積層体を使用する工程において、フレキシブルディスプレイTFT基板工程は、通常、In-Ga-Zn-O半導体(IGZO)または低温ポリシリコン(LTPS)工法が使われており、350℃以上の熱をかける。その際、ガラス基板の熱膨張係数は数ppm/Kであることに対し、一般に樹脂は数十ppm/K以上の熱膨張係数を有することから、積層体は反りが発生してしまい、表示部の微細化ができなくなる恐れがある。 Alternatively, in the process of using the polyimide laminate, the flexible display TFT substrate process usually uses the In-Ga-Zn-O semiconductor (IGZO) or low temperature polysilicon (LTPS) method, and heats up to 350 ° C. or higher. multiply. At that time, the coefficient of thermal expansion of the glass substrate is several ppm / K, whereas the resin generally has a coefficient of thermal expansion of several tens of ppm / K or more, so that the laminated body is warped and the display unit is displayed. There is a risk that it will not be possible to miniaturize.
この点について、特許文献3では、支持基板と樹脂フィルム(a)との間に、熱膨張係数が支持基板と樹脂フィルム(a)との間にあるような樹脂層(b)を設けることを開示しているが、反りの抑制効果は十分ではない。
Regarding this point, in
上述したように、ガラス基板上に樹脂基材を積層した状態で所定の表示部を設けて、その後にガラス基板を取り除いて表示装置を得ることができれば、従来のガラス基板を表示装置の一部として用いたものから、薄型化、軽量化、フレキシブル化の観点等で表示装置の用途を更に拡大することができる。そのためには、ガラス基板に代表される支持体と樹脂基材との分離を容易に行うことができるようにすると共に、ガラス基板と樹脂基材とが積層された状態での反りの問題を解消することが重要になってくる。 As described above, if a predetermined display unit is provided in a state where a resin base material is laminated on a glass substrate and then the glass substrate can be removed to obtain a display device, a conventional glass substrate can be used as a part of the display device. The application of the display device can be further expanded from the viewpoint of thinning, weight reduction, flexibility, and the like. For that purpose, the support typified by the glass substrate and the resin base material can be easily separated, and the problem of warpage when the glass substrate and the resin base material are laminated is solved. It becomes important to do.
したがって、本発明の目的は、反りが抑制されると共に、樹脂基材の分離を容易かつ簡便に行うことができるポリイミド積層体を提供することにある。また、本発明の別の目的は、反りの発生が抑制されて、樹脂基材の分離が容易かつ簡便に行えるポリイミド積層体の製造方法を提供することにある。 Therefore, an object of the present invention is to provide a polyimide laminate in which warpage is suppressed and the resin base material can be easily and easily separated. Another object of the present invention is to provide a method for producing a polyimide laminate in which the occurrence of warpage is suppressed and the resin base material can be easily and easily separated.
そこで、本発明者らは、これらの課題を解決するために鋭意検討した結果、先に、特願2014-062776号に係る発明を提案したところであるが、さらに検討した結果、驚くべきことには、ガラス基板等の支持体に対して、それより熱膨張係数が大きく、5〜30ppm/Kの範囲にある特定組成の第1のポリイミド層を設け、その上に、熱膨張係数が第1のポリイミド層以上の特定組成の第2のポリイミド層を設けることで、反りの発生を抑制した積層体にすることができると共に、樹脂基材の分離も容易に行うことができるようになることを見出し、本発明を完成させた。 Therefore, as a result of diligent studies to solve these problems, the present inventors have previously proposed the invention according to Japanese Patent Application No. 2014-062776, but as a result of further studies, it is surprising. A first polyimide layer having a specific composition, which has a larger coefficient of thermal expansion and is in the range of 5 to 30 ppm / K, is provided on a support such as a glass substrate, and the coefficient of thermal expansion is first on the first polyimide layer. It has been found that by providing a second polyimide layer having a specific composition equal to or higher than the polyimide layer, a laminate in which the occurrence of warpage is suppressed can be obtained, and the resin base material can be easily separated. , The present invention has been completed.
すなわち、本発明の要旨は、以下のとおりである。
(1)熱膨張係数が1〜10ppm/Kの支持体上に、第1のポリイミド層と、第2のポリイミド層の順に複数のポリイミド層を備える積層体であって、
第1のポリイミド層の膜厚が1〜50μmであり、熱膨張係数が支持体の熱膨張係数以上、5〜30ppm/kであり、ガラス転移温度が300℃以上であること、
第2のポリイミド層の膜厚が5〜30μmであり、熱膨張係数が第1のポリイミド層の熱膨張係数以上であること、及び
第1のポリイミド層と第2のポリイミド層は、その界面で剥離可能であることを特徴とするポリイミド積層体。That is, the gist of the present invention is as follows.
(1) A laminate having a plurality of polyimide layers in the order of a first polyimide layer and a second polyimide layer on a support having a coefficient of thermal expansion of 1 to 10 ppm / K.
The thickness of the first polyimide layer is 1 to 50 μm, the coefficient of thermal expansion is equal to or higher than the coefficient of thermal expansion of the support, 5 to 30 ppm / k, and the glass transition temperature is 300 ° C. or higher.
The thickness of the second polyimide layer is 5 to 30 μm, the coefficient of thermal expansion is equal to or greater than the coefficient of thermal expansion of the first polyimide layer, and the first polyimide layer and the second polyimide layer are at the interface thereof. A polyimide laminate characterized by being peelable.
(2)第2のポリイミド層は波長500nmにおける光透過率が80%以上である上記(1)のポリイミド積層体。
(3)第1のポリイミド層の弾性率が3〜11GPaであり、第2のポリイミド層の弾性率が3〜5GPaである上記(1)又は(2)のポリイミド積層体。
(4)第2のポリイミド層の熱膨張係数が10〜80ppm/Kである上記(1)〜(3)のいずれかのポリイミド積層体。
(5)第1のポリイミド層と第2のポリイミド層との剥離強度が、1〜100N/mである上記(1)〜(4)のいずれかのポリイミド積層体。
(6)第1のポリイミド層が、下記一般式(1)で表される構造単位を有するポリイミドを含有する上記(1)〜(5)のいずれかのポリイミド積層体。
(7)第2のポリイミド層が、下記一般式(2)で表される構造単位を有するポリイミドを含む上記(1)〜(6)のいずれかのポリイミド積層体。
(8)第2のポリイミド層が、波長500nmにおける光透過率が80%以上であり、かつ、厚さ方向のリタデーションが200nm以下である上記(1)〜(7)のいずれかのポリイミド積層体。
(9)第2のポリイミド層上に所定の表示部を形成した後、第1のポリイミド層と第2のポリイミド層との界面で分離して、第2のポリイミド層からなる樹脂基材上に表示部を備えた表示装置を得るのに用いられる上記(1)〜(8)のいずれかのポリイミド積層体。(2) The second polyimide layer is the polyimide laminate according to (1) above, which has a light transmittance of 80% or more at a wavelength of 500 nm.
(3) The polyimide laminate according to (1) or (2) above, wherein the first polyimide layer has an elastic modulus of 3 to 11 GPa, and the second polyimide layer has an elastic modulus of 3 to 5 GPa.
(4) The polyimide laminate according to any one of (1) to (3) above, wherein the coefficient of thermal expansion of the second polyimide layer is 10 to 80 ppm / K.
(5) The polyimide laminate according to any one of (1) to (4) above, wherein the peel strength between the first polyimide layer and the second polyimide layer is 1 to 100 N / m.
(6) The polyimide laminate according to any one of (1) to (5) above, wherein the first polyimide layer contains a polyimide having a structural unit represented by the following general formula (1).
(7) The polyimide laminate according to any one of (1) to (6) above, wherein the second polyimide layer contains a polyimide having a structural unit represented by the following general formula (2).
(8) The polyimide laminate according to any one of (1) to (7) above, wherein the second polyimide layer has a light transmittance of 80% or more at a wavelength of 500 nm and a retardation in the thickness direction of 200 nm or less. ..
(9) After forming a predetermined display portion on the second polyimide layer, it is separated at the interface between the first polyimide layer and the second polyimide layer, and is placed on a resin base material composed of the second polyimide layer. The polyimide laminate according to any one of (1) to (8) above, which is used to obtain a display device provided with a display unit.
(10)熱膨張係数が1〜10ppm/Kの支持体上に、ポリイミド又はポリイミド前駆体の樹脂溶液を塗布・乾燥し、加熱処理して熱膨張係数が支持体の熱膨張係数以上、5〜30ppm/Kの第1のポリイミド層を形成した後、前記樹脂溶液とは異なるポリイミド又はポリイミド前駆体の樹脂溶液を塗布・乾燥し、加熱処理して熱膨張係数が第1のポリイミド層の熱膨張係数以上の第2のポリイミド層を形成することを特徴とするポリイミド積層体の製造方法。 (10) A resin solution of polyimide or polyimide precursor is applied on a support having a coefficient of thermal expansion of 1 to 10 ppm / K, dried, and heat-treated so that the coefficient of thermal expansion is equal to or greater than the coefficient of thermal expansion of the support, 5 After forming the first polyimide layer of 30 ppm / K, a resin solution of polyimide or polyimide precursor different from the resin solution is applied, dried, and heat-treated to thermally expand the first polyimide layer having a coefficient of thermal expansion. A method for producing a polyimide laminate, which comprises forming a second polyimide layer having a coefficient or more.
本発明によれば、反りの発生が抑制されると共に、支持体上に積層された第1及び第2のポリイミド層から第2のポリイミド層を分離可能にしたポリイミド積層体を得ることができる。そのため、例えば、第2のポリイミド層からなる樹脂基材上に表示部を備えた表示装置を得る上で、所定の表示部を第2のポリイミド層上に精度良くかつ確実に形成することができると共に、表示装置の薄型・軽量・フレキシブル化を実現することができる。 According to the present invention, it is possible to obtain a polyimide laminate in which the occurrence of warpage is suppressed and the second polyimide layer can be separated from the first and second polyimide layers laminated on the support. Therefore, for example, in obtaining a display device having a display unit on a resin base material made of a second polyimide layer, a predetermined display unit can be accurately and reliably formed on the second polyimide layer. At the same time, the display device can be made thinner, lighter, and more flexible.
先ず、本発明におけるポリイミド積層体は、熱膨張係数が1〜10ppm/Kの支持体を備える。このような支持体は無機系材料からなるものであり、例えば、一般的に熱膨張係数が1〜10ppm/Kのガラス基板、同じく熱膨張係数が1〜6ppm/Kのシリコンウエハ、同じく熱膨張係数が1〜10ppm/Kのステンレス、同じく熱膨張係数が1〜10ppm/Kの炭化ケイ素等を挙げることができ、なかでも好適には、ガラス基板又はシリコンウエハである。 First, the polyimide laminate in the present invention includes a support having a coefficient of thermal expansion of 1 to 10 ppm / K. Such a support is made of an inorganic material, and for example, a glass substrate having a coefficient of thermal expansion of 1 to 10 ppm / K, a silicon wafer having a coefficient of thermal expansion of 1 to 6 ppm / K, and a silicon wafer having a coefficient of thermal expansion of 1 to 6 ppm / K are generally used. Stainless steel having a coefficient of 1 to 10 ppm / K, silicon carbide having a coefficient of thermal expansion of 1 to 10 ppm / K, and the like can be mentioned, and among them, a glass substrate or a silicon wafer is preferable.
また、支持体上には、支持体の熱膨張係数以上、且つ5〜30ppm/Kの熱膨張係数を有し、かつ、ガラス転移温度が300℃以上の第1のポリイミド層が積層される。このような第1のポリイミド層を支持体と後述する第2のポリイミド層との間に介在させることで、反りの発生を確実に抑制させることができる。特に、いわゆるガラス基板の第四世代(680×880mm〜730×920mm)以降に相当する比較的大きな積層体にした場合でも、反りの抑制効果を十分に得ることができる。加えて、この第1のポリイミド層の存在により、後述する第2のポリイミド層の設計自由度を高めることができる。なお、第1のポリイミド層のガラス転移温度は300℃以上であればよいが、好ましくは、表示装置の適用範囲が広がる理由で、320℃以上である。 Further, a first polyimide layer having a coefficient of thermal expansion of 5 to 30 ppm / K or more and a glass transition temperature of 300 ° C. or more is laminated on the support. By interposing such a first polyimide layer between the support and the second polyimide layer described later, the occurrence of warpage can be reliably suppressed. In particular, even when a relatively large laminated body corresponding to the fourth generation (680 × 880 mm to 730 × 920 mm) or later of the so-called glass substrate is used, the effect of suppressing warpage can be sufficiently obtained. In addition, the presence of the first polyimide layer can increase the degree of freedom in designing the second polyimide layer, which will be described later. The glass transition temperature of the first polyimide layer may be 300 ° C. or higher, but preferably 320 ° C. or higher for the reason that the applicable range of the display device is expanded.
具体的には、第1のポリイミド層の熱膨張係数は、支持体より大きく、5〜30ppm/Kであるのがよく、好ましくは5〜15ppm/Kであるのがよい。熱膨張係数が5ppm/Kより小さいと、第1のポリイミド層自体が脆くなり、ガラスから剥離しやすい恐れがある。また、熱膨張係数が30ppm/Kより大きくなると反り抑制効果が弱くなる。第1のポリイミド層の弾性率は3〜11GPaであるのがよく、好ましくは5〜10GPaであり、このような第1のポリイミド層と第2のポリイミド層との組み合わせにより、積層体とした際の反りを効果的に抑制することができる。 Specifically, the coefficient of thermal expansion of the first polyimide layer is larger than that of the support, and is preferably 5 to 30 ppm / K, preferably 5 to 15 ppm / K. If the coefficient of thermal expansion is less than 5 ppm / K, the first polyimide layer itself becomes brittle and may easily peel off from the glass. Further, when the coefficient of thermal expansion becomes larger than 30 ppm / K, the warp suppressing effect becomes weak. The elastic modulus of the first polyimide layer is preferably 3 to 11 GPa, preferably 5 to 10 GPa, and when a laminate is formed by combining such a first polyimide layer and a second polyimide layer. Warp can be effectively suppressed.
この第1のポリイミド層を得る手段については、特に制限されないが、そのひとつとして、下記一般式(1)で表される構造単位を有するポリイミドにより形成することが挙げられる。好ましくは、下記一般式(1)で表される構造単位を50モル%以上含有するポリイミドであるのがよい。
ここで、上記一般式(1)におけるXは、芳香族基又は脂環式基であって、芳香環又は脂環を1個以上有する4価の有機基であり、Rは炭素数1〜6の置換基である。このうち、基Xを形成するための原料となる好適な具体例としては、例えば、ピロメリット酸二無水物(PMDA)、ナフタレン-2,3,6,7-テトラカルボン酸二無水物(NTCDA)、3,3',4,4'-ビフェニルテトラカルボン酸二無水物(BPDA)、1,2,3,4-シクロブタンテトラカルボン酸二無水物、1,2,4,5-シクロヘキサンテトラカルボン酸二無水物等が挙げられる。また、Rの好適な具体例としては、例えば、-CH3、-CF3等が挙げられる。Here, X in the general formula (1) is an aromatic group or an alicyclic group, and is a tetravalent organic group having one or more aromatic rings or alicyclics, and R is a
なかでも、Rが-CF3であると、第1のポリイミド層と第2のポリイミド層との界面での剥離性を高めることができて、これらの分離を容易にすることができる。Among them, when R is -CF 3 , the peelability at the interface between the first polyimide layer and the second polyimide layer can be enhanced, and the separation of these can be facilitated.
なお、上記一般式(1)で表される構造単位以外に含めることができるもの、好適には最大で50モル%含むことができるものについては、一般的な酸無水物とジアミンとを用いた構造単位が挙げられる。なかでも好適に用いられる酸無水物としては、ピロメリット酸二無水物(PMDA)、ナフタレン-2,3,6,7-テトラカルボン酸二無水物(NTCDA)、3,3',4,4'-ビフェニルテトラカルボン酸二無水物(BPDA)、シクロヘキサンテトラカルボン酸二無水物、フェニレンビス(トリメリット酸モノエステル無水物)、4,4'-オキシジフタル酸二無水物、ベンゾフェノン‐3,4,3',4'‐テトラカルボン酸二無水物、ジフェニルスルホン‐3,4,3',4'-テトラカルボン酸二無水物、2,3,6,7-ナフタレンテトラカルボン酸二無水物、4,4'-(2,2'-ヘキサフルオロイソプロピリデン)ジフタル酸二無水物等である。一方、ジアミンとしては、m-フェニレンジアミン、p-フェニレンジアミン、2,4-ジアミノトルエン、4,4'-ジアミノジフェニルエーテル、1,3-ビス(4-アミノフェノキシ)ベンゼン、4,4'-ジアミノジフェニルスルホン、2,2−ビス(4−アミノベンジルオキシフェニル)プロパン、ビス〔4-(4-アミノフェノキシ)フェニル〕スルホン、4,4'-ジアミノベンズアニリド、9,9-ビス(4-アミノフェニル)フルオレン等である。 A general acid anhydride and a diamine were used for those that can be contained in addition to the structural unit represented by the above general formula (1), preferably those that can contain up to 50 mol%. Structural units can be mentioned. Among them, the acid anhydrides preferably used are pyromellitic dianhydride (PMDA), naphthalene-2,3,6,7-tetracarboxylic hydride (NTCDA), 3,3', 4,4. '-Biphenyltetracarboxylic acid dianhydride (BPDA), cyclohexanetetracarboxylic acid dianhydride, phenylenebis (trimeritic acid monoester anhydride), 4,4'-oxydiphthalic acid dianhydride, benzophenone-3,4, 3', 4'-Tetracarboxylic Acid Dianhydride, Diphenylsulfone-3,4,3', 4'-Tetracarboxylic Acid Dianhydride, 2,3,6,7-Naphthalene Tetracarboxylic Acid Dianhydride, 4 , 4'-(2,2'-hexafluoroisopropyridene) diphthalate dianhydride and the like. On the other hand, as diamines, m-phenylenediamine, p-phenylenediamine, 2,4-diaminotoluene, 4,4'-diaminodiphenyl ether, 1,3-bis (4-aminophenoxy) benzene, 4,4'-diamino Diphenyl sulfone, 2,2-bis (4-aminobenzyloxyphenyl) propane, bis [4- (4-aminophenoxy) phenyl] sulfone, 4,4'-diaminobenzanilide, 9,9-bis (4-amino) Phenyl) Fluorene and the like.
また、本発明において、第1のポリイミド層の上には、第1のポリイミド層の熱膨張係数以上の熱膨張係数を有する第2のポリイミド層が積層される。具体的には、第2のポリイミド層の熱膨張係数は10〜80ppm/Kであるのがよく、好ましくは10〜70ppm/Kであるのがよい。熱膨張係数が10ppm/K未満であると、第2のポリイミド層単独で硬すぎ、切れやすくなり、作業性が悪くなる恐れがあり、反対に80ppm/Kより大きくなると反り抑える効果が小さくなり、反りが発生しまう恐れがある。また、積層体とした際の反りをより効果的に抑制する観点から、第2のポリイミド層の弾性率は3〜5GPaであるのがよい。 Further, in the present invention, a second polyimide layer having a coefficient of thermal expansion equal to or higher than the coefficient of thermal expansion of the first polyimide layer is laminated on the first polyimide layer. Specifically, the coefficient of thermal expansion of the second polyimide layer is preferably 10 to 80 ppm / K, preferably 10 to 70 ppm / K. If the coefficient of thermal expansion is less than 10 ppm / K, the second polyimide layer alone is too hard and may be easily cut, resulting in poor workability. On the contrary, if it is larger than 80 ppm / K, the effect of suppressing warpage becomes small. Warpage may occur. Further, from the viewpoint of more effectively suppressing the warp when formed into a laminated body, the elastic modulus of the second polyimide layer is preferably 3 to 5 GPa.
一般に、ポリイミドの熱膨張係数が小さくなると透明性が低下すると共に、厚み方向のリタデーション(複屈折の差による位相差)が高くなってしまう。そのため、第1のポリイミド層から分離した第2のポリイミド層を、例えば、表示装置の樹脂基材として利用したり、ガスバリアフィルム、タッチパネル基板に用いることなどを考えた場合には不向きになる。それに対して本発明では、上記のとおり、比較的大きな熱膨張係数を有した第2のポリイミド層の使用が許容される。それは、先に説明した第1のポリイミド層の存在により、積層体としての反りが抑制されるためである。 In general, when the coefficient of thermal expansion of polyimide becomes small, the transparency decreases and the retardation in the thickness direction (phase difference due to the difference in birefringence) increases. Therefore, the second polyimide layer separated from the first polyimide layer is unsuitable when it is considered to be used as a resin base material of a display device, a gas barrier film, a touch panel substrate, or the like. On the other hand, in the present invention, as described above, the use of the second polyimide layer having a relatively large coefficient of thermal expansion is permitted. This is because the presence of the first polyimide layer described above suppresses warpage as a laminated body.
そのため、第2のポリイミド層を形成するポリイミドは、ポリイミド積層体の用途に応じて適宜選択することができる。なかでも、液晶表示装置、有機EL表示装置、電子ペーパー、カラーフィルター、タッチパネル等の表示装置における可撓性を有した樹脂基材として利用する場合には、下記一般式(2)で表される構造単位を有するポリイミドが挙げられ、好ましくは、この一般式(2)で表される構造単位を50モル%以上含有するポリイミドである。なお、この一般式(2)で表される構造単位以外に含めることができるもの(好適には最大で50モル%含有するもの)については、透明性を有するものであるのがよく、一般式(1)で説明したものと同様のものが挙げられる。好適に用いられる酸無水物としては、ピロメリット酸二無水物(PMDA)、ナフタレン-2,3,6,7-テトラカルボン酸二無水物(NTCDA)、3,3',4,4'-ビフェニルテトラカルボン酸二無水物(BPDA)、シクロヘキサンテトラカルボン酸二無水物、フェニレンビス(トリメリット酸モノエステル無水物)、4,4'-オキシジフタル酸二無水物、ベンゾフェノン‐3,4,3',4'‐テトラカルボン酸二無水物、ジフェニルスルホン‐3,4,3',4'-テトラカルボン酸二無水物、2,3,6,7-ナフタレンテトラカルボン酸二無水物、4,4'-(2,2'-ヘキサフルオロイソプロピリデン)ジフタル酸二無水物、1,4-シクロヘキサンジカルボン酸、1,2,3,4-シクロブタンテトラカルボン酸二無水物、1,2,4,5-シクロヘキサンテトラカルボン酸二無水物等である。一方、ジアミンとしては、m-フェニレンジアミン、p-フェニレンジアミン、2,4-ジアミノトルエン、4,4'-ジアミノジフェニルエーテル、1,3-ビス(4-アミノフェノキシ)ベンゼン、4,4'-ジアミノジフェニルスルホン、2,2−ビス(4−アミノベンジルオキシフェニル)プロパン、ビス〔4-(4-アミノフェノキシ)フェニル〕スルホン、4,4'-ジアミノベンズアニリド、9,9-ビス(4-アミノフェニル)フルオレン等である。
ここで、上記一般式(2)におけるYは、下記式(3)で示したいずれかであるのが好ましい。
なかでも、波長500nmにおける光透過率が80%以上であり、かつ、厚さ方向のリタデーションが200nm以下の第2のポリイミド層を得る観点から、好ましくは、
最も好適には、下記式(4)で表されるポリイミドにより第2のポリイミド層が形成されるのがよい。
上記で説明したような各種ポリイミドは、ポリイミド前駆体(以下「ポリアミド酸」ともいう)をイミド化して得られるが、ポリアミド酸の樹脂溶液は、原料であるジアミンと酸二無水物とを実質的に等モル使用し、有機溶媒中で反応させることによって得ることができる。詳しくは、例えば、窒素気流下にN,N−ジメチルアセトアミド等の有機極性溶媒にジアミンを溶解させた後、テトラカルボン酸二無水物を加えて、室温で5時間程度反応させることにより得ることができる。ここで、塗工時の膜厚均一化や、得られるポリイミドの機械強度の観点から、ポリアミド酸の重量平均分子量(Mw)は1万から30万程度が好ましい。第1及び第2のポリイミド層の好適な分子量範囲もポリアミド酸と同じ分子量範囲である。 Various polyimides as described above are obtained by imidizing a polyimide precursor (hereinafter, also referred to as "polyamic acid"), but a resin solution of polyamic acid is substantially composed of diamine and acid dianhydride which are raw materials. It can be obtained by using an equimolar amount of polyimide and reacting it in an organic solvent. Specifically, for example, it can be obtained by dissolving diamine in an organic polar solvent such as N, N-dimethylacetamide under a nitrogen stream, adding tetracarboxylic dianhydride, and reacting at room temperature for about 5 hours. can. Here, from the viewpoint of uniform film thickness at the time of coating and the mechanical strength of the obtained polyimide, the weight average molecular weight (Mw) of the polyamic acid is preferably about 10,000 to 300,000. The preferred molecular weight range of the first and second polyimide layers is also the same molecular weight range as the polyamic acid.
そして、本発明における第1及び第2のポリイミド層は、好ましくは、それぞれポリイミド又はポリイミド前駆体の樹脂溶液を塗布・乾燥し、加熱処理する、いわゆるキャスト法により得られたものであるのがよい。すなわち、本発明のポリイミド積層体を得るにあたって、好適には、熱膨張係数が1〜10ppm/Kの支持体上に、ポリイミド又はポリイミド前駆体の樹脂溶液を塗布・乾燥し、加熱処理して熱膨張係数が5〜30ppm/Kの第1のポリイミド層を形成した後、ポリイミド又はポリイミド前駆体の樹脂溶液を塗布・乾燥し、加熱処理して熱膨張係数が10〜80ppm/Kの第2のポリイミド層を形成する。その際、支持体上に第1のポリイミド層となる樹脂溶液を塗布し、加熱処理するに際して、十分な加熱処理でイミド化しておくことが、第2のポリイミド層の分離を容易にする上で望ましい。例えば、乾燥などのために90〜130℃にて5〜30分程度の予備加熱処理を行った後、さらにイミド化のため130〜360℃にて10〜240分程度の高温加熱処理を行うことが好ましい。 The first and second polyimide layers in the present invention are preferably obtained by a so-called casting method in which a resin solution of polyimide or a polyimide precursor is applied, dried, and heat-treated, respectively. .. That is, in obtaining the polyimide laminate of the present invention, preferably, a resin solution of polyimide or a polyimide precursor is applied and dried on a support having a coefficient of thermal expansion of 1 to 10 ppm / K, and heat-treated to heat the polyimide laminate. After forming the first polyimide layer having an expansion coefficient of 5 to 30 ppm / K, a resin solution of polyimide or a polyimide precursor is applied, dried, and heat-treated to treat a second polyimide layer having a coefficient of thermal expansion of 10 to 80 ppm / K. Form a polyimide layer. At that time, when the resin solution to be the first polyimide layer is applied on the support and imidized by sufficient heat treatment when heat-treating, in order to facilitate the separation of the second polyimide layer. desirable. For example, after performing a preliminary heat treatment at 90 to 130 ° C. for about 5 to 30 minutes for drying or the like, a high temperature heat treatment for about 10 to 240 minutes at 130 to 360 ° C. is further performed for imidization. Is preferable.
このようにして得られたポリイミド積層体は、第1のポリイミド層と第2のポリイミド層との界面で分離可能になるが、これらの界面での分離を容易にするには、好ましくは、第1又は第2のポリイミド層の少なくともいずれか一方が、ポリイミド構造中にフッ素原子を有した含フッ素ポリイミドから形成されるようにするのがよい。このような含フッ素ポリイミドを用いることで、第1のポリイミド層と第2のポリイミド層との剥離強度を好適には1〜200N/m、よい好適には1〜100N/mにすることができるため、例えば人の手で容易に剥離できる程度の分離性を備える。また、第1のポリイミド層と第2のポリイミド層との界面における第2のポリイミド層の分離面は、キャスト法によって得られる表面粗さ(一般に表面粗さRa=1〜80nm程度)がそのまま維持されるため、表示装置の視認性等に悪影響を及ぼすようなこともない。 The polyimide laminate thus obtained can be separated at the interface between the first polyimide layer and the second polyimide layer, but in order to facilitate the separation at these interfaces, it is preferable to use the first polyimide layer. It is preferable that at least one of the first or second polyimide layer is formed from a fluorine-containing polyimide having a fluorine atom in the polyimide structure. By using such a fluorine-containing polyimide, the peel strength between the first polyimide layer and the second polyimide layer can be preferably 1 to 200 N / m, preferably 1 to 100 N / m. Therefore, for example, it has a separability that can be easily peeled off by human hands. Further, the surface roughness (generally, surface roughness Ra = about 1 to 80 nm) obtained by the casting method is maintained as it is on the separation surface of the second polyimide layer at the interface between the first polyimide layer and the second polyimide layer. Therefore, the visibility of the display device is not adversely affected.
また、本発明のポリイミド積層体において、支持体の厚みは0.01〜1.0mm、好ましくは0.02〜0.7mmであるのがよく、第1のポリイミド層の厚みは1〜50μm、好ましくは5〜30μmであるのがよく、第2のポリイミド層の厚みは5〜30μm、好ましくは10〜20μmであるのがよい。これら各層の厚みは、積層体で発生する反りにも影響を及ぼすことから、上記範囲内になるようにするのがよい。ここで、本発明においては、異なる材料が積層された積層板について、以下のような考えのもと、反り変形(反り量)を計算により求めて、ポリイミド積層体の最適化を図ることができる。 Further, in the polyimide laminated body of the present invention, the thickness of the support is preferably 0.01 to 1.0 mm, preferably 0.02 to 0.7 mm, and the thickness of the first polyimide layer is 1 to 50 μm. The thickness of the second polyimide layer is preferably 5 to 30 μm, preferably 10 to 20 μm. Since the thickness of each of these layers also affects the warpage generated in the laminated body, it is preferable to keep the thickness within the above range. Here, in the present invention, it is possible to optimize the polyimide laminated body by calculating the warp deformation (warp amount) of the laminated board in which different materials are laminated based on the following idea. ..
また、本発明のポリイミド積層体は、上述したように、第2のポリイミド層からなる樹脂基材上に表示部を備えた表示装置を得るのに好適に用いることができる。すなわち、ポリイミド積層体における第2のポリイミド層上に所定の表示部を形成した後、第1のポリイミド層と第2のポリイミド層との界面で分離すればよい。ここで、支持体は、第2のポリイミド層側に表示部を形成する際の台座の役割をするものであり、表示部の製造過程で樹脂基材(第2のポリイミド層)の取り扱い性や寸法安定性等を担保することはあっても、最終的には除去されて表示装置を構成するものではない。また、第1のポリイミド層についても同様に最終的に除去されて表示装置を構成するものではなく、仮に透明性に劣るものであっても何ら構わない。このようなポリイミド積層体を利用することにより、所定の表示部を第2のポリイミド層上に精度良くかつ確実に形成することができると共に、薄型・軽量・フレキシブル化を実現した表示装置を得ることができる。更に、本発明のポリイミド積層体は、上記表示装置の他、蒸着マスク、ファンアウトウェハーレベルパッケージ(FOWLP)用基板に適用することができる。 Further, as described above, the polyimide laminate of the present invention can be suitably used for obtaining a display device having a display unit on a resin base material composed of a second polyimide layer. That is, after forming a predetermined display portion on the second polyimide layer in the polyimide laminate, it may be separated at the interface between the first polyimide layer and the second polyimide layer. Here, the support serves as a pedestal when forming the display portion on the second polyimide layer side, and the handleability of the resin base material (second polyimide layer) in the manufacturing process of the display portion is improved. Although dimensional stability and the like can be ensured, they are not finally removed to form a display device. Similarly, the first polyimide layer is not finally removed to form a display device, and it does not matter if the first polyimide layer is inferior in transparency. By using such a polyimide laminate, a predetermined display unit can be accurately and surely formed on the second polyimide layer, and a thin, lightweight, and flexible display device can be obtained. Can be done. Further, the polyimide laminate of the present invention can be applied to a vapor deposition mask and a substrate for a fan-out wafer level package (FOWLP) in addition to the above display device.
表示装置を構成する表示部については特に制限されない。例えば、有機EL表示装置の場合には、代表的には、TFT、電極、発光層を含む有機EL素子等が表示部に相当する。また、液晶表示装置の場合には、TFT、駆動回路、必要に応じてカラーフィルター等である。これらのほか、電子ペーパーやMEMSディスプレイ等のような各種表示装置を含めて、従来、ガラス基板上に形成している種々の機能層であって、所定の映像(動画又は画像)を映し出すのに必要な部品が表示部に相当する。このうち、例えば、TFTの形成には、一般に400℃程度のアニール工程が必要になるが、本発明におけるポリイミド積層体は、このようなアニール工程にも耐え得る耐熱性を有する。 The display unit constituting the display device is not particularly limited. For example, in the case of an organic EL display device, a TFT, an electrode, an organic EL element including a light emitting layer, or the like typically corresponds to the display unit. Further, in the case of a liquid crystal display device, it is a TFT, a drive circuit, a color filter or the like if necessary. In addition to these, various functional layers conventionally formed on a glass substrate, including various display devices such as electronic paper and MEMS displays, are used to project a predetermined image (moving image or image). The necessary parts correspond to the display unit. Of these, for example, the formation of a TFT generally requires an annealing step of about 400 ° C., and the polyimide laminate in the present invention has heat resistance that can withstand such an annealing step.
以下、実施例及び比較例に基づき、本発明を具体的に説明する。なお、本発明はこれらの内容に制限されるものではない。 Hereinafter, the present invention will be specifically described based on Examples and Comparative Examples. The present invention is not limited to these contents.
先ず、下記で使用する略号の意味と実施例等における物性等の評価方法を示す。
・PMDA:ピロメリット酸二無水物
・BPDA:3,3',4,4'-ビフェニルテトラカルボン酸二無水物
・6FDA:2,2'-ビス(3,4-ジカルボキシフェニル)ヘキサフルオロプロパン二無水物
・AAPBZ:5-アミノ-2-(4-アミノフェニル)ベンゾイミダゾール
・BAPP:2,2'-ビス(4-アミノフェノキシフェニル)プロパン
・TFMB:2,2'-ビス(トリフルオロメチル)-4,4'-ジアミノビフェニル
・DMAc:N,N-ジメチルアセトアミド
・GBL:γブチルラクトンFirst, the meanings of the abbreviations used below and the evaluation method of physical properties, etc. in Examples and the like are shown.
・ PMDA: pyromellitic acid dianhydride ・ BPDA: 3,3', 4,4'-biphenyltetracarboxylic acid dianhydride ・ 6FDA: 2,2'-bis (3,4-dicarboxyphenyl) hexafluoropropane Dianhydride ・ AAPBZ: 5-amino-2- (4-aminophenyl) benzoimidazole ・ BAPP: 2,2'-bis (4-aminophenoxyphenyl) propane ・ TFMB: 2,2'-bis (trifluoromethyl) )-4,4'-Diaminobiphenyl / DMAc: N, N-dimethylacetamide / GBL: γ-butyl lactone
〔光透過率(%)〕
ポリイミドフィルム(50mm×50mm)をU4000形分光光度計にて、500nmにおける光透過率を求めた。[Light transmittance (%)]
The light transmittance of a polyimide film (50 mm × 50 mm) at 500 nm was determined with a U4000 type spectrophotometer.
〔熱膨張係数(CTE)〕
3mm×15mmのサイズのポリイミドフィルムを、熱機械分析(TMA)装置にて5.0gの荷重を加えながら一定の昇温速度(10℃/min)で30℃から280℃の温度範囲で引張り試験を行い、250℃から100℃までの降温時における温度に対するポリイミドフィルムの伸び量から熱膨張係数(ppm/K)を測定した。[Coefficient of thermal expansion (CTE)]
A tensile test of a 3 mm x 15 mm size polyimide film in a temperature range of 30 ° C to 280 ° C at a constant temperature rise rate (10 ° C / min) while applying a load of 5.0 g using a thermomechanical analysis (TMA) device. The coefficient of thermal expansion (ppm / K) was measured from the amount of elongation of the polyimide film with respect to the temperature when the temperature was lowered from 250 ° C. to 100 ° C.
〔弾性率〕
テンションテスターを用い、幅12.4mm、長さ160mmのポリイミドフィルムを10kgの荷重を加えながら50mm/minで引っ張り試験を行い、25℃における引張り弾性率(E’)を求めた。[Elastic modulus]
Using a tension tester, a polyimide film having a width of 12.4 mm and a length of 160 mm was subjected to a tensile test at 50 mm / min while applying a load of 10 kg, and a tensile elastic modulus (E') at 25 ° C. was determined.
〔カール(反り)の測定〕
ガラス基板に第1のポリイミド層、第2のポリイミド層を形成した後、100cm四方の積層体を作製した。そして、第2層目のポリイミド層面を上にして、23℃、50%RHで、24時間静置した。静置後、積層体の反りを1mm厚のスペーサで判定した。即ち、スペーサが積層体の下側に入るものは反りあり「×」とし、スペーサが積層体の下側にシートが入らないものは反りなし「○」とした。[Measurement of curl (warp)]
After forming the first polyimide layer and the second polyimide layer on the glass substrate, a 100 cm square laminate was prepared. Then, the polyimide layer surface of the second layer was turned up, and the mixture was allowed to stand at 23 ° C. and 50% RH for 24 hours. After standing, the warp of the laminated body was determined by a spacer having a thickness of 1 mm. That is, the one in which the spacer enters the lower side of the laminated body is marked with "x" with warp, and the one in which the spacer does not enter the lower side of the laminated body is marked with "○" without warping.
〔カール(反り)の計算(シミュレーション)〕
計算方法としては熱変形と自重が釣り合った状態の最終的な反り変形について積層シェル要素を用いて離散化し数値計算的にコンピューターで演算を実施する有限要素法を用いた(図2参照)。
数値が大きいほど、カール(反り)を生じ易いことを示す。[Calculation of curl (warp) (simulation)]
As a calculation method, a finite element method was used in which the final warp deformation in a state where the thermal deformation and its own weight were balanced was discreteized using a laminated shell element and numerically calculated by a computer (see FIG. 2).
The larger the value, the more likely it is that curl (warp) will occur.
〔厚み方向リタデーション〕
ジェーエ・ウーラム・ジャパン製装置M−2000Vを用いて、第2のポリイミド層の厚さ方向のリタデーション(厚さ方向位相差:Rth)を求めた。[Thickness direction retardation]
The retardation (thickness direction phase difference: Rth) in the thickness direction of the second polyimide layer was determined using the apparatus M-2000V manufactured by JE Woolam Japan.
〔積層体状態品質評価〕
ガラスに樹脂を塗工して得られた積層体を、目視・手作業にて品質評価を行った。ガラス基板から剥離したり、フィルムが脆くて切れて評価できなかったり場合は「×」とし、特に外観上問題なかった場合は「○」とした。[Laminated state quality evaluation]
The quality of the laminate obtained by coating the glass with resin was visually and manually evaluated. When the film was peeled off from the glass substrate or the film was too brittle to be evaluated, it was evaluated as "x", and when there was no particular problem in appearance, it was evaluated as "○".
〔剥離性〕
ポリイミド積層体の第2のポリイミド層の表面に対し垂直にカッターナイフで第1のポリイミド層を貫通してガラス基板表面に達するように、ポリイミド積層体の各辺の端部から略5mmの距離を開けて各辺と並行な直線の切り口を4カ所付けたのち、切り口によって区切られた剥離範囲について、第1のポリイミド層と支持体との間を手で剥離した(図1)。次いで、第1のポリイミド層と第2のポリイミド層の界面を同様にして手で剥離した。手で剥離可能なら「○」とし、剥離できない場合は「×」とした。また、剥離強度を表3にまとめて示す。[Peelability]
Approximately 5 mm from the end of each side of the polyimide laminate so that it penetrates the first polyimide layer with a cutter knife perpendicular to the surface of the second polyimide layer of the polyimide laminate and reaches the surface of the glass substrate. After opening and making four straight cuts parallel to each side, the first polyimide layer and the support were manually peeled for the peeling range separated by the cuts (FIG. 1). Then, the interface between the first polyimide layer and the second polyimide layer was peeled off by hand in the same manner. If it can be peeled off by hand, it is marked with "○", and if it cannot be peeled off, it is marked with "x". The peel strength is also shown in Table 3.
下記の合成例1〜7に従い、実施例等のポリイミド積層体に係る第1及び第2のポリイミド層を形成するための樹脂溶液(ポリアミド酸溶液)を調製した。なお、各ポリアミド酸溶液におけるモノマーの質量組成を表1にまとめて示す。 According to the following Synthesis Examples 1 to 7, resin solutions (polyamic acid solutions) for forming the first and second polyimide layers related to the polyimide laminates of Examples and the like were prepared. Table 1 summarizes the mass composition of the monomers in each polyamic acid solution.
合成例1
窒素気流下で、100mlのセパラブルフラスコの中で攪拌しながら、TFMB:8.49gを溶剤85gのGBLに溶解させた。次いで、この溶液にPMDA:5.04gを加えた。10分後、酸無水物6FDA:1.47gを加えた。酸無水物とジアミンのモル比を0.998とした。その後、溶液を室温で4時間攪拌を続けて重合反応を行い、一昼夜保持した。そして、粘稠な無色のポリアミド酸溶液が得られて、高重合度のポリアミド酸Aが生成されていることが確認された。Synthesis example 1
TFMB: 8.49 g was dissolved in 85 g of GBL of solvent with stirring in a 100 ml separable flask under a nitrogen stream. PMDA: 5.04 g was then added to this solution. After 10 minutes, 1.47 g of acid anhydride 6FDA was added. The molar ratio of acid anhydride to diamine was 0.998. Then, the solution was stirred at room temperature for 4 hours to carry out a polymerization reaction and kept for 24 hours. Then, it was confirmed that a viscous colorless polyamic acid solution was obtained and a polyamic acid A having a high degree of polymerization was produced.
合成例2〜7
酸無水物及びジアミンを表1に示す質量組成に変更した以外は合成例1と同様にしてポリアミド酸溶液を調製し、ポリアミド酸(樹脂)B〜Gを得た。Synthesis Examples 2-7
Polyamic acid solutions were prepared in the same manner as in Synthesis Example 1 except that the acid anhydride and diamine were changed to the mass compositions shown in Table 1, to obtain polyamic acids (resins) B to G.
実施例1
上記合成例1で得られたポリアミド酸溶液Aに、溶剤GBLを加えて、粘度が3000cPになるように希釈した上で、サイズが150mm×150mm、厚みが0.7mm、CTEが3.5ppm/Kのガラス基板上に、スピンコーターを用いて製膜後の厚みが14μmになるように塗布した。続いて、90℃×3分間、それから110℃×10分間の熱処理を行い、予備乾燥を実施した。そして、30分をかけて90℃から360℃まで昇温させ、ガラス基板上に150mm×150mmの第1のポリイミド層(ポリイミドA)を形成した。Example 1
Solvent GBL is added to the polyamic acid solution A obtained in Synthesis Example 1 to dilute it so that the viscosity becomes 3000 cP, and then the size is 150 mm × 150 mm, the thickness is 0.7 mm, and the CTE is 3.5 ppm /. It was applied onto a K glass substrate using a spin coater so that the thickness after film formation was 14 μm. Subsequently, heat treatment was performed at 90 ° C. for 3 minutes and then at 110 ° C. for 10 minutes to perform pre-drying. Then, the temperature was raised from 90 ° C. to 360 ° C. over 30 minutes to form a first polyimide layer (polyimide A) having a size of 150 mm × 150 mm on the glass substrate.
次に、第1のポリイミド層の上に、合成例2で得られたポリアミド酸溶液Bを粘度が3000cPになるようにDMAc(溶剤)で希釈後、熱処理後の膜厚が約10μmとなるように塗布した。続いて、90℃×3分間、それから110℃×10分間の熱処理を行い、予備乾燥を実施した。そして、30分をかけて90℃から360℃まで昇温させ、150mm×150mmの第2のポリイミド層(ポリイミドB)を形成して、実施例1に係るポリイミド積層体を得た。 Next, on the first polyimide layer, the polyamic acid solution B obtained in Synthesis Example 2 is diluted with DMAc (solvent) so that the viscosity becomes 3000 cP, and then the film thickness after heat treatment becomes about 10 μm. Was applied to. Subsequently, heat treatment was performed at 90 ° C. for 3 minutes and then at 110 ° C. for 10 minutes to perform pre-drying. Then, the temperature was raised from 90 ° C. to 360 ° C. over 30 minutes to form a second polyimide layer (polyimide B) having a size of 150 mm × 150 mm to obtain a polyimide laminate according to Example 1.
得られたポリイミド積層体について、物性等の各種評価を行った。結果を表2及び表3に示す。ここで、このポリイミド積層体における第1のポリイミド層(ポリイミドA)と第2のポリイミド層(ポリイミドB)について、それぞれの熱膨張係数(CTE)、光透過率、弾性率、ガラス転移温度(Tg)及びリタデーションを測定するために、別途、上記と同じガラス基板に対して、合成例1及び2で得られたポリアミド酸溶液を熱処理後の膜厚が約15μmとなるようにそれぞれ個別に塗布し、90℃×3分間、それから110℃×10分間の熱処理を行い、予備乾燥を実施した後、30分をかけて90℃から360℃まで昇温させて、その後、ガラス基板から剥離して得られたポリイミドフィルムの状態にして測定した。
また、反り量(カール)については、シミュレーション計算も行い、その結果も表2に示す。シミュレーションの結果は実測による反り判定結果と整合していた。The obtained polyimide laminate was evaluated in various ways such as physical properties. The results are shown in Tables 2 and 3. Here, regarding the first polyimide layer (polyimide A) and the second polyimide layer (polyimide B) in this polyimide laminated body, the thermal expansion coefficient (CTE), light transmission rate, elasticity, and glass transition temperature (Tg), respectively. ) And the polyimide are separately applied to the same glass substrate as above so that the polyamic acid solutions obtained in Synthesis Examples 1 and 2 have a film thickness of about 15 μm after heat treatment. , 90 ° C for 3 minutes, then 110 ° C for 10 minutes, pre-drying, then raising the temperature from 90 ° C to 360 ° C over 30 minutes, and then peeling from the glass substrate. It was measured in the state of the polyimide film obtained.
A simulation calculation was also performed for the amount of warpage (curl), and the results are also shown in Table 2. The result of the simulation was consistent with the result of the warp judgment by the actual measurement.
実施例2
表2に示すように、合成例3で得られた樹脂Cを第1のポリイミド層とし、合成例2で得られた樹脂Bを第2のポリイミド層とすること以外、実施例1と同様な手順によってポリイミド積層体を得た(表2及び3の「積層体構成」に示した「ガラス/樹脂C/樹脂B」からなるポリイミド積層体であり、以下の実施例、比較例についても同様にこの順「支持体/第1のポリイミド層/第2のポリイミド層」で示す。)。このポリイミド積層体についても、反りなどの物性を測定した。その結果も表2及び表3に示す。Example 2
As shown in Table 2, the same as in Example 1 except that the resin C obtained in Synthesis Example 3 is used as the first polyimide layer and the resin B obtained in Synthesis Example 2 is used as the second polyimide layer. A polyimide laminate was obtained by the procedure (a polyimide laminate composed of "glass / resin C / resin B" shown in "Laminate composition" in Tables 2 and 3, and the same applies to the following Examples and Comparative Examples. In this order, "support / first polyimide layer / second polyimide layer" is shown). Physical properties such as warpage were also measured for this polyimide laminate. The results are also shown in Tables 2 and 3.
実施例3
表2に示すように、合成例7で得られた樹脂Gを第1のポリイミド層とし、合成例2で得られた樹脂Bを第2のポリイミド層とすること以外、実施例1と同様な手順によってポリイミド積層体を得た。このポリイミド積層体についても、反りなどの物性を測定した、併せて反り量のシミュレーション評価を行った。それらの結果も表2及び表3に示す。Example 3
As shown in Table 2, the same as in Example 1 except that the resin G obtained in Synthesis Example 7 is used as the first polyimide layer and the resin B obtained in Synthesis Example 2 is used as the second polyimide layer. A polyimide laminate was obtained by the procedure. For this polyimide laminate, physical properties such as warpage were measured, and the amount of warpage was also simulated and evaluated. The results are also shown in Tables 2 and 3.
比較例1〜3
表2に示したポリイミド樹脂を用いた三層構成とすること以外、実施例1と同様の手順によってポリイミド積層体を作成し、反り等の物性を測定した。併せて、反り(カール)量については、シミュレーションによる計算値と対比を行った。Comparative Examples 1 to 3
A polyimide laminate was prepared by the same procedure as in Example 1 except for the three-layer structure using the polyimide resin shown in Table 2, and the physical properties such as warpage were measured. At the same time, the amount of warpage (curl) was compared with the value calculated by the simulation.
比較例4
合成例2で得られたポリアミド酸溶液Bに、DMAcを加えて、粘度が3000cPになるように希釈した上で、実施例1と同じガラス基板上にスピンコーターを用いて熱処理後の膜厚が約15μmとなるように塗布した。そして、30分をかけて90℃から360℃まで昇温させ、ガラス基板上に100mm×100mmのポリイミド層を形成して、二層構成のポリイミド積層体を得た。Comparative Example 4
DMAc was added to the polyamic acid solution B obtained in Synthesis Example 2, diluted to a viscosity of 3000 cP, and then the film thickness after heat treatment was increased on the same glass substrate as in Example 1 using a spin coater. It was applied so as to be about 15 μm. Then, the temperature was raised from 90 ° C. to 360 ° C. over 30 minutes to form a polyimide layer of 100 mm × 100 mm on the glass substrate to obtain a polyimide laminate having a two-layer structure.
1 支持体
2 第1のポリイミド層
3 第2のポリイミド層1
Claims (8)
第1のポリイミド層の膜厚が5〜50μmであり、熱膨張係数が支持体の熱膨張係数以
上、5〜30ppm/Kであり、ガラス転移温度が300℃以上であり、弾性率が3〜11GPaであること、
第2のポリイミド層の膜厚が5〜30μmであり、熱膨張係数が第1のポリイミド層の
熱膨張係数以上、10〜80ppm/Kであること、及び
第1のポリイミド層と第2のポリイミド層は、その界面で剥離可能であることを特徴と
するポリイミド積層体。 A laminate having a plurality of polyimide layers in the order of a first polyimide layer and a second polyimide layer on a support having a thickness of 0.01 to 1.0 mm and a coefficient of thermal expansion of 1 to 10 ppm / K.
The thickness of the first polyimide layer is 5 to 50 μm, the coefficient of thermal expansion is equal to or higher than the coefficient of thermal expansion of the support, 5 to 30 ppm / K, the glass transition temperature is 300 ° C. or higher, and the elastic modulus is 3 to 3 to. Being 11 GPa,
The thickness of the second polyimide layer is 5 to 30 μm, the coefficient of thermal expansion is equal to or greater than the coefficient of thermal expansion of the first polyimide layer, 10 to 80 ppm / K , and the first polyimide layer and the second polyimide are used. The layer is a polyimide laminate characterized by being peelable at its interface.
記載のポリイミド積層体。 The polyimide laminate according to claim 1, wherein the second polyimide layer has a light transmittance of 80% or more at a wavelength of 500 nm.
求項1又は2に記載のポリイミド積層体。 The polyimide laminate according to claim 1 or 2 , wherein the peel strength between the first polyimide layer and the second polyimide layer is 1 to 100 N / m.
有する請求項1〜3のいずれかに記載のポリイミド積層体。
(式中、Xは芳香族又は脂環式の4価の有機基であり、Rは炭素数1〜6の置換基である
。) The polyimide laminate according to any one of claims 1 to 3 , wherein the first polyimide layer contains a polyimide having a structural unit represented by the following general formula (1).
(In the formula, X is an aromatic or alicyclic tetravalent organic group, and R is a substituent having 1 to 6 carbon atoms.)
む請求項1〜4のいずれかに記載のポリイミド積層体。
(式中、Yは芳香族又は脂環式の4価の有機基である。) The polyimide laminate according to any one of claims 1 to 4 , wherein the second polyimide layer contains a polyimide having a structural unit represented by the following general formula (2).
(In the formula, Y is an aromatic or alicyclic tetravalent organic group.)
厚さ方向のリタデーションが200nm以下である請求項1〜5のいずれかに記載のポリイミド積層体。 The second polyimide layer has a light transmittance of 80% or more at a wavelength of 500 nm and
The polyimide laminate according to any one of claims 1 to 5 , wherein the retardation in the thickness direction is 200 nm or less.
イミド層との界面で分離して、第2のポリイミド層からなる樹脂基材上に表示部を備えた
表示装置を得るのに用いられる請求項1〜6のいずれかに記載のポリイミド積層体。 After forming a predetermined display portion on the second polyimide layer, the display portion is separated at the interface between the first polyimide layer and the second polyimide layer, and the display portion is formed on the resin base material composed of the second polyimide layer. The polyimide laminate according to any one of claims 1 to 6 , which is used to obtain a display device provided.
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| JP2018094790A (en) * | 2016-12-13 | 2018-06-21 | 東洋紡株式会社 | Laminate, production method of laminate, and production method of flexible device |
| JP2018099800A (en) * | 2016-12-20 | 2018-06-28 | 東洋紡株式会社 | Laminate, laminate production method, and flexible device production method |
| JP2018099801A (en) * | 2016-12-20 | 2018-06-28 | 東洋紡株式会社 | Laminate, laminate production method, and flexible device production method |
| CN111070832A (en) * | 2018-10-18 | 2020-04-28 | 达迈科技股份有限公司 | Strippable polyimide composite film |
| JP7311079B2 (en) * | 2018-11-20 | 2023-07-19 | エルジー・ケム・リミテッド | LAMINATED BODY FOR FLEXIBLE DEVICE MANUFACTURING AND METHOD FOR MANUFACTURING FLEXIBLE DEVICE USING THE SAME |
| KR102274527B1 (en) | 2018-11-20 | 2021-07-07 | 주식회사 엘지화학 | A laminate structure for manufacturing flexible device and a process for manufacturing flexible device using same |
| WO2020110947A1 (en) * | 2018-11-28 | 2020-06-04 | 三菱瓦斯化学株式会社 | Polyimide resin, polyimide varnish and polyimide film |
| CN113874420B (en) * | 2019-06-27 | 2023-09-26 | 日铁化学材料株式会社 | Resin film and metal-clad laminate |
| TWI839543B (en) * | 2019-07-10 | 2024-04-21 | 日商三菱瓦斯化學股份有限公司 | Polyimide resin, polyimide varnish, and polyimide film |
| CN110610661A (en) * | 2019-08-29 | 2019-12-24 | 昆山工研院新型平板显示技术中心有限公司 | Display panel, electronic device and method for manufacturing display panel |
| WO2021241572A1 (en) * | 2020-05-29 | 2021-12-02 | 東洋紡株式会社 | Polyimide film and method for producing same |
| KR20230019064A (en) * | 2020-05-29 | 2023-02-07 | 도요보 가부시키가이샤 | Polyimide film and manufacturing method thereof |
| WO2022239657A1 (en) * | 2021-05-12 | 2022-11-17 | 株式会社カネカ | Resin film and method for manufacturing same, metallized resin film, and printed wiring board |
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| JP2008068406A (en) * | 2006-09-12 | 2008-03-27 | Tomoegawa Paper Co Ltd | Flexible metal laminate and flexible printed circuit board |
| JP2008246695A (en) * | 2007-03-29 | 2008-10-16 | Nippon Steel Chem Co Ltd | Method for producing metal-clad laminate |
| JP5029174B2 (en) * | 2007-07-02 | 2012-09-19 | 大日本印刷株式会社 | Non-contact data carrier device |
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| TWI454375B (en) * | 2008-03-06 | 2014-10-01 | Nippon Steel & Sumikin Chem Co | Laminates for flexible substrates and wireless conductive polyimide films |
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| JP6078319B2 (en) * | 2012-12-10 | 2017-02-08 | 新日鉄住金化学株式会社 | Manufacturing method of input device, substrate with conductive film used therefor, and laminated member |
| KR101773651B1 (en) * | 2013-04-09 | 2017-08-31 | 주식회사 엘지화학 | Laminate structure for manufacturing substrate and device comprising substrate manufactured by using same |
| JP6631011B2 (en) * | 2014-02-06 | 2020-01-15 | 三菱ケミカル株式会社 | Polyimide resin composition, polyimide film and device film using the resin composition |
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