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JP6963817B2 - Particle projection device with wear mark measurement function - Google Patents
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JP6963817B2 - Particle projection device with wear mark measurement function - Google Patents

Particle projection device with wear mark measurement function Download PDF

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JP6963817B2
JP6963817B2 JP2018197528A JP2018197528A JP6963817B2 JP 6963817 B2 JP6963817 B2 JP 6963817B2 JP 2018197528 A JP2018197528 A JP 2018197528A JP 2018197528 A JP2018197528 A JP 2018197528A JP 6963817 B2 JP6963817 B2 JP 6963817B2
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wear
projection device
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JP2020064027A (en
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亨 松原
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株式会社パルメソ
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Description

本発明は、セラミックス、金属、プラスチック、ゴム等の各種材料(被験体)への摩耗痕の形成と、形成された摩耗痕の深さ、表面形状、断面形状、粗さ等の計測を一台で行うことのできる摩耗痕計測機能付き粒子投射装置に関するものである。 The present invention is one unit for forming wear marks on various materials (subjects) such as ceramics, metals, plastics, and rubber, and measuring the depth, surface shape, cross-sectional shape, roughness, etc. of the formed wear marks. It relates to a particle projection device with a wear mark measurement function that can be performed in.

本件出願の発明者は、先に、砥粒と液体とが混合された噴射粒子(スラリー)を、圧搾空気と共に高速で被験体に衝突させて、被験体を表面側からエロージョン(摩耗)させる粒子投射機と、エロージョンさせた摩耗痕の深さを計測して被験体の摩耗強度その他の機械的特性を評価する被験体計測評価装置を開発した(特許文献1〜4)。この被験体計測評価装置はMSE評価装置(MSEは本件出願人の登録商標)と呼ばれて世の中に普及し始めている。 The inventor of the present application first collides the jet particles (slurry), which is a mixture of abrasive grains and liquid, with the subject at high speed together with the compressed air, and causes the subject to erosion (wear) from the surface side. We have developed a projector and a subject measurement evaluation device that measures the depth of eroded wear marks and evaluates the wear strength and other mechanical properties of the subject (Patent Documents 1 to 4). This subject measurement evaluation device is called an MSE evaluation device (MSE is a registered trademark of the applicant) and is beginning to spread in the world.

前記粒子投射機と被験体計測評価装置は別々であるため、粒子投射機による摩耗作業と、被験体計測評価装置による摩耗痕計測作業を別々に行わなければならなかった。この場合、被験体を、摩耗時には粒子投射機に、計測時には被験体計測評価装置にセットし直さなければならないため、セットに多くの工程を必要とし、その為に時間がかかり、セット時の位置決め精度の不安もあった。また、粒子投射機と被験体計測評価装置の双方の機器が必要であることから、設備が大型化し、設置に広いスペースが必要となるという難点もあった。 Since the particle projector and the subject measurement / evaluation device are separate, the wear work by the particle projector and the wear mark measurement work by the subject measurement / evaluation device must be performed separately. In this case, since the subject must be reset to the particle projector at the time of wear and to the subject measurement / evaluation device at the time of measurement, many steps are required for the setting, which takes time and positioning at the time of setting. There was also concern about accuracy. In addition, since both the particle projector and the subject measurement / evaluation device are required, there is a problem that the equipment becomes large and a large space is required for installation.

特開2001−183279号公報Japanese Unexamined Patent Publication No. 2001-183279 特開2006−184188号公報Japanese Unexamined Patent Publication No. 2006-184188 特開2010−237073号公報Japanese Unexamined Patent Publication No. 2010-237073 特開2013−050378号公報Japanese Unexamined Patent Publication No. 2013-050378

本発明の解決課題は、被験体へのスラリーの投射と、スラリーの投射による摩耗痕の計測を一台の機械(粒子投射機)で行うことができる摩耗痕計測機能付き粒子投射装置を提供にすることにある。 An object of the present invention is to provide a particle projection device with a wear mark measurement function capable of projecting a slurry onto a subject and measuring wear marks by projecting the slurry with a single machine (particle projector). To do.

本発明の摩耗痕計測機能付き粒子投射装置(以下、単に「粒子投射装置」という。)は、被験体にスラリーを圧縮エアーで投射して被験体を摩耗させることのできる噴射ガンに計測部を備えたものである。計測部は摩耗痕の深さ、表面形状、断面形状、粗さ、その他を計測することができる。計測部は摩耗痕に接触する接触子を備えた機械式(接触式)でも、摩耗痕に非接触の光学式(非接触式)でもよい。 The particle projection device with a wear mark measurement function of the present invention (hereinafter, simply referred to as “particle projection device”) has a measurement unit on an injection gun capable of projecting a slurry onto a subject with compressed air to wear the subject. It is prepared. The measuring unit can measure the depth of wear marks, surface shape, cross-sectional shape, roughness, and the like. The measuring unit may be a mechanical type (contact type) having a contactor that contacts the wear marks, or an optical type (non-contact type) that does not contact the wear marks.

機械式の計測部は、粒子投射機内に接触子を備え、接触子が噴射ガンのスラリー投射軸上に配置されており、接触子は被験体へのスラリー投射時には噴射ガンのノズルから退避し、計測時にはノズル先端から突出して噴射ガンのスラリー投射軸上で摩耗痕に接触できるようにしてある。 The mechanical measuring unit is equipped with a contact in the particle projector, and the contact is arranged on the slurry projection axis of the injection gun, and the contact is retracted from the nozzle of the injection gun when the slurry is projected onto the subject. At the time of measurement, it protrudes from the tip of the nozzle so that it can come into contact with the wear marks on the slurry projection shaft of the injection gun.

光学式の計測部は、噴射ガン内のスラリー投射軸上に光伝送路が配置され、その光伝送路で測定光を伝送して摩耗痕に照射し、摩耗痕からの反射光を受けて受光器に伝送するものである。この場合、光源にはレーザ光源、白色光源、その他の光源を使用することができる。レーザ光源の場合は光伝送路として光ファイバーを使用し、その光ファイバーでレーザ光を送受信することができる。白色光源の場合は光伝送路として光ファイバー或いは光導波ロッドを使用し、それらで白色光を送受信することができる。測定光がレーザ光の場合は受光器として、摩耗痕からの反射光の光強度に基づいて摩耗痕の深さを計測可能なもの、例えば、汎用の光受光器を使用することができる。測定光が白色光の場合は受光器として摩耗痕の三次元形状を測定可能な三次元形状測定機、例えば、共焦点顕微鏡型や走査型白色干渉顕微鏡を使用することができる。 In the optical measurement unit, an optical transmission line is arranged on the slurry projection axis in the injection gun, and the measurement light is transmitted through the optical transmission line to irradiate the wear marks, and the reflected light from the wear marks is received and received. It is transmitted to the vessel. In this case, a laser light source, a white light source, or another light source can be used as the light source. In the case of a laser light source, an optical fiber is used as an optical transmission path, and the laser beam can be transmitted and received through the optical fiber. In the case of a white light source, an optical fiber or an optical waveguide rod is used as an optical transmission path, and white light can be transmitted and received by them. When the measurement light is laser light, a receiver capable of measuring the depth of the wear marks based on the light intensity of the reflected light from the wear marks, for example, a general-purpose light receiver can be used. When the measurement light is white light, a three-dimensional shape measuring machine capable of measuring the three-dimensional shape of wear marks, for example, a confocal microscope type or a scanning white interference microscope can be used as a receiver.

機械式で計測された摩耗痕の深さ、光学式で検知された摩耗の表面形状や断面形状等は処理部で演算処理して、被験体の機械的特性を評価することができる。処理部は計測部に内蔵されたものでも、計測部に外付けされたものでもよい。 The depth of the wear mark measured by the mechanical method, the surface shape and the cross-sectional shape of the wear detected by the optical method can be calculated by the processing unit to evaluate the mechanical characteristics of the subject. The processing unit may be built in the measuring unit or externally attached to the measuring unit.

本発明の粒子投射装置は、噴射ガンに既存のものを使用し、それに計測部を組み込んだものでも、新規の噴射ガンに計測部を組み込んだものでもよい。 The particle projection device of the present invention may use an existing injection gun and incorporate a measuring unit into the injection gun, or may incorporate a measuring unit into a new injection gun.

本発明の粒子投射装置は次の効果がある。
(1)一台で、被験体(試料)を摩耗しながら、摩耗痕の計測が可能であるため、摩耗途中で摩耗を一時停止させて摩耗痕を計測し、それを繰り返すことにより、オーバーシュート(摩耗し過ぎ)及び惰性削りを可及的に減らすことができる。この場合、随時、摩耗途中の計測データも得られるため被験体の評価精度も向上する。
(2)一台で、被験体の摩耗と計測が可能であるため、摩耗時と計測時に被験体を別々の機械にセットし直す必要がなく、迅速(高速)な計測が可能となる。
(3)一台で、スラリーの投射と計測とを同軸上で(同じ位置で)行うことができるので、高精度の計測が可能となる。
(4)一台で、被験体の摩耗と摩耗痕の計測を間欠的に繰り返し行うことができるので、材料の表面側から内部までの摩耗分布の精密な取得と、計測精度の向上と高速化が可能になる。
(5)一台で、被験体の摩耗と摩耗痕の計測が可能であるため、粒子投射機と計測機を別々に用意する必要がなく、コンパクトに小型化でき、設置スペースも狭くてすむ。
(6)計測部の接触子が、スラリー投射時に移動して投射軸上から退避するので、スラリーの投射に接触子が邪魔になることがない。また、投射されるスラリーが接触子に当たって接触子が損傷することもない。
(7)計測部が光学式であって、光ファイバーを固定式にした場合は、光ファイバーをノズル内で移動させる(退避させる)必要がないため、移動機構が不要となり、構成が簡潔になる。
(8)計測部に三次元形状測定機を使用した場合は、摩耗痕の深さだけでなく、摩耗痕の表面形状や断面形状等の測定(三次元測定)も可能となる。
The particle projection device of the present invention has the following effects.
(1) Since it is possible to measure the wear marks while wearing the subject (sample) with one unit, the wear is paused during the wear, the wear marks are measured, and the wear marks are repeated to overshoot. (Excessive wear) and inertial scraping can be reduced as much as possible. In this case, since measurement data during wear can be obtained at any time, the evaluation accuracy of the subject is also improved.
(2) Since it is possible to measure the wear of the subject with one unit, it is not necessary to reset the subject to different machines at the time of wear and at the time of measurement, and quick (high-speed) measurement is possible.
(3) Since the projection and measurement of the slurry can be performed coaxially (at the same position) with one unit, highly accurate measurement is possible.
(4) Since the wear and wear marks of the subject can be measured intermittently and repeatedly with one unit, the wear distribution from the surface side to the inside of the material can be accurately acquired, and the measurement accuracy can be improved and speeded up. Becomes possible.
(5) Since it is possible to measure the wear and wear marks of the subject with one unit, it is not necessary to prepare a particle projector and a measuring device separately, the size can be reduced compactly, and the installation space can be narrowed.
(6) Since the contacts of the measuring unit move and retract from the projection axis during slurry projection, the contacts do not interfere with the projection of the slurry. In addition, the projected slurry does not hit the contacts and the contacts are not damaged.
(7) When the measuring unit is an optical type and the optical fiber is a fixed type, it is not necessary to move (retract) the optical fiber in the nozzle, so that a moving mechanism becomes unnecessary and the configuration becomes simple.
(8) When a three-dimensional shape measuring machine is used for the measuring unit, not only the depth of the wear mark but also the surface shape and the cross-sectional shape of the wear mark can be measured (three-dimensional measurement).

本発明の粒子投射装置の一例であり、計測機能に接触子を使用し、接触子を退避させた場合の説明図。It is an example of the particle projection apparatus of this invention, and is explanatory drawing when the contact is used for the measurement function, and the contact is retracted. 図1の粒子投射装置の接触子を摩耗痕に接触させた場合の説明図。Explanatory drawing when the contactor of the particle projection apparatus of FIG. 1 is brought into contact with a wear mark. 図1の粒子投射装置による粒子投射時の説明図。The explanatory view at the time of particle projection by the particle projection apparatus of FIG. 図1の粒子投射装置による摩耗痕深さ計測時の説明図。The explanatory view at the time of the wear mark depth measurement by the particle projection apparatus of FIG. 試験データの一例を示す説明図。Explanatory drawing which shows an example of test data. (a)は図1の粒子投射装置を二軸移動可能とした粒子投射装置の説明図、(b)は(a)の摩耗痕の断面形状説明図。(A) is an explanatory view of a particle projection device in which the particle projection device of FIG. 1 is biaxially movable, and (b) is an explanatory view of a cross-sectional shape of a wear mark of (a). 本発明の粒子投射装置であって、計測部に光ファイバーを配置固定にした場合の説明図。The explanatory view of the particle projection apparatus of this invention in the case where the optical fiber is arranged and fixed in the measuring part. 本発明の粒子投射装置であって、計測部に光導波ロッドを昇降可能に配置した場合の説明図。The explanatory view of the particle projection apparatus of this invention in the case where the optical waveguide rod is arranged in the measuring part so that it can move up and down.

本発明の粒子投射装置の各種実施形態を図面に基づいて説明する。 Various embodiments of the particle projection device of the present invention will be described with reference to the drawings.

(実施形態1)
本発明の粒子投射装置の実施形態1を図1に示す。図1の粒子投射装置は、一台の粒子投射機(噴射ガン)1に計測部2を備えたものである。
(Embodiment 1)
The first embodiment of the particle projection apparatus of the present invention is shown in FIG. The particle projection device of FIG. 1 includes a particle projector (injection gun) 1 and a measurement unit 2.

図1の噴射ガン1の下部にはノズル3があり、ノズル3の中心部に噴射孔(スラリー噴射孔)4が貫通している。噴射ガン1の外周にはスラリー供給口5と圧縮エアー供給口6があり、両供給口5、6は共にノズル3の噴射孔4に開口して連通しており、スラリー供給口5から供給されるスラリーが、圧縮エアー供給口6から供給される圧縮エアーと共にノズル3から高圧噴射して、セラミックス板やプラスチック板などの被験体7に衝突させて、被験体7を表面側から摩耗させて、摩耗痕20を形成できるようにしてある。 There is a nozzle 3 at the bottom of the injection gun 1 of FIG. 1, and an injection hole (slurry injection hole) 4 penetrates through the center of the nozzle 3. There are a slurry supply port 5 and a compressed air supply port 6 on the outer periphery of the injection gun 1, and both supply ports 5 and 6 are open to the injection hole 4 of the nozzle 3 and communicate with each other, and are supplied from the slurry supply port 5. The slurry is injected at high pressure from the nozzle 3 together with the compressed air supplied from the compressed air supply port 6 to collide with the subject 7 such as a ceramic plate or a plastic plate to wear the subject 7 from the surface side. The wear marks 20 can be formed.

スラリー供給口5にはスラリーを供給又は停止させるスラリーバルブ(図示しない)が付いており、圧縮エアー供給口6には圧縮エアーを供給又は停止させる圧縮エアーバルブ(図示しない)がついている。これらバルブの開閉操作は図示しない制御部(コントローラ)で自動的に制御されるようにしてある。 The slurry supply port 5 is provided with a slurry valve (not shown) for supplying or stopping the slurry, and the compressed air supply port 6 is provided with a compressed air valve (not shown) for supplying or stopping the compressed air. The opening and closing operations of these valves are automatically controlled by a control unit (controller) (not shown).

計測部2は噴射ガン1の上方にある。計測部2はベルト式の回転体9とモータMを備えた駆動部10、触針用針金11、触針用針金11に固定された計測用コマ12、計測器13を備えている。触針用針金11の先端部は摩耗痕20に接触する接触子11aとなっている。 The measuring unit 2 is above the injection gun 1. The measuring unit 2 includes a driving unit 10 having a belt-type rotating body 9 and a motor M, a wire for a stylus 11, a measuring piece 12 fixed to the wire for a stylus 11, and a measuring instrument 13. The tip of the stylus wire 11 is a contactor 11a that comes into contact with the wear mark 20.

駆動部10はケース14内にベルト式の回転体9が回転可能に収容されており、その回転体9がモータMの回転により上下移動するようにしてある。回転体9には連結具15が取付けられており、その連結具15に触針用針金11の上端部と計測用コマ12が固定されて、回転体9の上下移動により連結具15が上下移動すると、触針用針金11と計測用コマ12が共に上下移動するようにしてある。 In the drive unit 10, a belt-type rotating body 9 is rotatably housed in the case 14, and the rotating body 9 moves up and down by the rotation of the motor M. A connecting tool 15 is attached to the rotating body 9, and the upper end of the stylus wire 11 and the measuring piece 12 are fixed to the connecting tool 15, and the connecting tool 15 moves up and down by moving the rotating body 9 up and down. Then, the stylus wire 11 and the measuring piece 12 are both moved up and down.

触針用針金11は金属、セラミック等の非伸縮性材製であり、ノズル3を貫通して連結具15に達する長さにしてあり、連結具15の上昇に伴って図1のようにノズル3の噴射孔4の上まで上昇して噴射孔4の上方に退避し、連結具15の降下に伴って図2のように噴射孔4の出口4aから下方に突出して摩耗痕20に接触するようにしてある。触針用針金11の材質は剛性であれば、金属またはセラミック以外の材質であってもよく、ノズル3の噴射孔4内を昇降できる太さの細長であれば針金以外のものであってもよい。 The stylus wire 11 is made of a non-stretchable material such as metal or ceramic, has a length that penetrates the nozzle 3 and reaches the connector 15, and as the connector 15 rises, the nozzle is as shown in FIG. It rises above the injection hole 4 of 3 and retracts above the injection hole 4, and as the connector 15 descends, it protrudes downward from the outlet 4a of the injection hole 4 and comes into contact with the wear mark 20 as shown in FIG. It is done like this. The material of the stylus wire 11 may be a material other than metal or ceramic as long as it is rigid, and may be a material other than the wire as long as it is elongated and has a thickness capable of moving up and down in the injection hole 4 of the nozzle 3. good.

計測器13には長さ測定器を使用してある。触針用針金11の先端部(接触子)11aが、図2のようにノズル3の下方まで突出して被験体7の摩耗痕20に接触したとき、その降下長(接触位置:摩耗痕の深さ)を計測できるようにしてある。 A length measuring instrument is used for the measuring instrument 13. When the tip (contactor) 11a of the stylus wire 11 protrudes below the nozzle 3 and comes into contact with the wear mark 20 of the subject 7, the descent length (contact position: depth of the wear mark). It is designed so that it can be measured.

図1の粒子投射装置の駆動部10は、エアーリンダとか油圧シリンダ、或いはピニオン・ラック等の駆動機構とすることもできる。これら駆動機構の場合は、駆動部10に触針用針金11を連結して、触針用針金11が駆動部10の上下動と共に昇降するようにし、触針用針金11の昇降位置を計測器13で計測し、その昇降距離、または初回計測との差分から摩耗痕の深さを計測できるようにする。 The drive unit 10 of the particle projection device of FIG. 1 may be a drive mechanism such as an air linder, a hydraulic cylinder, or a pinion rack. In the case of these drive mechanisms, the stylus wire 11 is connected to the drive unit 10 so that the stylus wire 11 moves up and down with the vertical movement of the drive unit 10, and the elevating position of the stylus wire 11 is measured. The depth of the wear mark can be measured from the ascending / descending distance or the difference from the initial measurement.

(実施形態2)
粒子投射装置の実施形態2を図6に示す。この粒子投射装置は基本的には図1の粒子投射装置と同じものであり、異なるのは、被験体7をセットするセット台21を横方向(X方向)と前後方向(Y方向)に移動(2軸移動)可能な移動台22の上に固定し、移動台22を駆動装置、例えば油圧式或いはエアー式のシリンダ23で横移動(X方向への移動)及び前後移動(Y方向への移動)を可能としたものである。
(Embodiment 2)
The second embodiment of the particle projection device is shown in FIG. This particle projection device is basically the same as the particle projection device of FIG. 1, and the difference is that the set table 21 on which the subject 7 is set is moved in the lateral direction (X direction) and the front-back direction (Y direction). (Two-axis movement) It is fixed on a movable base 22 that can be moved, and the moving base 22 is moved laterally (moved in the X direction) and back and forth (moved in the Y direction) by a driving device, for example, a hydraulic or pneumatic cylinder 23. It is possible to move).

(実施形態3)
粒子投射装置の実施形態3を図7に示す。この粒子投射装置は基本的には図1の粒子投射装置と同じであり、異なるのは図1の触針用針金11を光ファイバー31に代え、光ファイバー31を噴射ガン1のノズル3の噴射孔4の軸線上に配置固定し、計測部2を光学式にしたことにある。図7の粒子投射装置ではスラリー投射軸上でスラリーを被験体7に噴射して摩耗痕20を形成でき、レーザ光源及び演算ユニット32のレーザ光源32aから出射されるレーザ光を、投・受光ユニット33の投光器33aから光ファイバー31を通して伝送し、光ファイバー31の端部からレーザ光を摩耗痕20に照射する。摩耗痕20からの反射光を投・受光ユニット33の受光器33bで受光して、レーザ光源及び演算ユニット32の演算処理部32bに送ることができるようにしてある。受光器33bで受光された反射光データは、レーザ光源及び演算ユニット32の演算処理部32bに送られて演算処理される。この場合、投・受光ユニット33の受光器33bに反射光強度を検知可能なものを使用すれば、その反射光強度に基づいて摩耗痕20の深さを計測することができ、三次元計測器を使用すれば、摩耗痕の形状(表面形状、断面形状)を計測することができる。レーザ光源32aと演算処理部32bはユニットではなく別体であってもよい。投光器33aと受光器33bもユニットではなく別体であってもよい。
(Embodiment 3)
The third embodiment of the particle projection device is shown in FIG. This particle projection device is basically the same as the particle projection device of FIG. 1, the difference is that the wire 11 for the stylus in FIG. 1 is replaced with the optical fiber 31, and the optical fiber 31 is used as the injection hole 4 of the nozzle 3 of the injection gun 1. The measurement unit 2 is made optical by arranging and fixing it on the axis of. In the particle projection device of FIG. 7, the slurry can be ejected onto the subject 7 on the slurry projection axis to form wear marks 20, and the laser light emitted from the laser light source and the laser light source 32a of the calculation unit 32 is emitted and received by the light receiving / receiving unit. It is transmitted from the light source 33a of 33 through the optical fiber 31, and the laser beam is applied to the wear mark 20 from the end of the optical fiber 31. The reflected light from the wear marks 20 is received by the light receiver 33b of the light receiving / receiving unit 33 and sent to the laser light source and the calculation processing unit 32b of the calculation unit 32. The reflected light data received by the light receiver 33b is sent to the laser light source and the arithmetic processing unit 32b of the arithmetic unit 32 for arithmetic processing. In this case, if the light receiver 33b of the light emitting / receiving unit 33 is capable of detecting the reflected light intensity, the depth of the wear mark 20 can be measured based on the reflected light intensity, and the three-dimensional measuring instrument can be used. Can be used to measure the shape of wear marks (surface shape, cross-sectional shape). The laser light source 32a and the arithmetic processing unit 32b may be separate bodies instead of the unit. The floodlight 33a and the receiver 33b may also be separate bodies instead of the unit.

(実施形態4)
粒子投射装置の実施形態4を図8に示す。この実施例は計測部2が光学式ではあるが、光源及び演算ユニット34の光源に白色光源34aを使用し、光伝送路に光導波ロッド35を使用し、光導波ロッド35をノズル3のスラリー投射軸上に配置し、その光導波ロッド35を駆動部10で昇降可能としてある。また、光導波ロッド35の上方に投・受光ユニット36を連結して、白色光源34aからの白色光が投・受光ユニット36の投光器36aから光導波ロッド35を通して摩耗痕20に投射でき、摩耗痕20からの反射光が光導波ロッド35を通して投・受光ユニット36の受光器36bに受光されるようにしてある。受光器36bの反射光データは光源及び演算ユニット34の演算処理部34bに送られて演算処理される。この場合、受光器36bに三次元計測器を使用することにより、摩耗痕20の形状(平面形状、断面形状)の計測が可能となる。白色光源34aと演算処理部34bはユニットではなく別体であってもよい。投光器36aと受光器36bもユニットではなく別体であってもよい。
(Embodiment 4)
A fourth embodiment of the particle projection device is shown in FIG. In this embodiment, although the measurement unit 2 is an optical type, a white light source 34a is used as the light source and the light source of the arithmetic unit 34, an optical waveguide rod 35 is used for the optical transmission path, and the optical waveguide rod 35 is used as a slurry of the nozzle 3. It is arranged on the projection axis, and the optical waveguide rod 35 can be raised and lowered by the drive unit 10. Further, by connecting the light emitting / receiving unit 36 above the optical waveguide rod 35, white light from the white light source 34a can be projected from the floodlight 36a of the light emitting / receiving unit 36 onto the wear mark 20 through the optical waveguide rod 35. The reflected light from 20 is received by the light receiver 36b of the light emitting / receiving unit 36 through the optical waveguide rod 35. The reflected light data of the receiver 36b is sent to the light source and the arithmetic processing unit 34b of the arithmetic unit 34 for arithmetic processing. In this case, by using a three-dimensional measuring instrument for the receiver 36b, it is possible to measure the shape (planar shape, cross-sectional shape) of the wear mark 20. The white light source 34a and the arithmetic processing unit 34b may be separate bodies instead of the unit. The floodlight 36a and the receiver 36b may also be separate bodies instead of the unit.

図8の駆動部10は図1の駆動部10と同じものであり、ベルト式の回転体9とモータMを備えている。回転体9には連結具37が連結され、連結具37に計測用コマ38が連結され、連結具37に光導波ロッド35が連結固定されている。計測用コマ38には定位置ストッパー39が連結されている。 The drive unit 10 of FIG. 8 is the same as the drive unit 10 of FIG. 1, and includes a belt-type rotating body 9 and a motor M. A connecting tool 37 is connected to the rotating body 9, a measuring piece 38 is connected to the connecting tool 37, and an optical waveguide rod 35 is connected and fixed to the connecting tool 37. A fixed position stopper 39 is connected to the measuring piece 38.

図8では、回転体9が矢印A方向(上方)に回転すると連結具37が上昇し、その上昇に伴って光導波ロッド35が図8のノズル3の噴射孔4の上まで上昇して、噴射孔4から退避する。この場合、上昇が定位置ストッパー39で検知されて、光導波ロッド35が噴射孔4からのスラリー噴射の邪魔にならない位置に自動的に停止する。回転体9が図8の矢印B方向(下方)に回転して連結具37が降下すると、光導波ロッド35が図8のように噴射孔4の出射端(下端)から下方に突出する。光導波ロッド35の下端が摩耗痕20の直上まで到達すると、定位置ストッパー39によりその位置が検出されて、自動的に停止して、それ以上降下しないようにしてある。 In FIG. 8, when the rotating body 9 rotates in the direction of arrow A (upward), the connector 37 rises, and along with the rise, the optical waveguide rod 35 rises above the injection hole 4 of the nozzle 3 in FIG. Retract from the injection hole 4. In this case, the rise is detected by the fixed position stopper 39, and the optical waveguide rod 35 automatically stops at a position that does not interfere with the slurry injection from the injection hole 4. When the rotating body 9 rotates in the direction of arrow B (downward) in FIG. 8 and the connector 37 descends, the optical waveguide rod 35 projects downward from the exit end (lower end) of the injection hole 4 as shown in FIG. When the lower end of the optical waveguide rod 35 reaches just above the wear mark 20, the position is detected by the fixed position stopper 39, and the rod is automatically stopped so as not to descend any further.

図8の投・受光ユニット36には3次元の形状測定が可能な機器(3D測定器)を使用して、摩耗痕20の表面形状や断面形状を3次元計測可能とすることができる。3D測定器には共焦点型顕微鏡、走査型白色干渉顕微鏡、3次元測定可能なその他の機器を使用することができる。この場合、使用する3D測定器に合わせて光学系の構成を選択可能である。 For the throwing / receiving unit 36 of FIG. 8, a device (3D measuring device) capable of three-dimensional shape measurement can be used to enable three-dimensional measurement of the surface shape and cross-sectional shape of the wear mark 20. A confocal microscope, a scanning white interference microscope, and other equipment capable of three-dimensional measurement can be used as the 3D measuring device. In this case, the configuration of the optical system can be selected according to the 3D measuring instrument to be used.

[実施形態1(図1)の粒子投射装置の動作説明]
図1の粒子投射装置を使用して被験体7をエロージョンし、それにより得られる摩耗痕20(の深さ)を計測するには、次のようにして行うことができる。
[Explanation of operation of the particle projection device of the first embodiment (FIG. 1)]
To erosion the subject 7 using the particle projection device of FIG. 1 and measure the wear mark 20 (depth) obtained thereby, the following can be performed.

図2のように、被験体7を粒子投射装置にセットして、被験体7の表面と噴射孔4の出口4aの距離を固定する。この固定状態で、モータMの回転により、回転体9を回転させて、触針用針金11をノズル3の噴射孔4の上方まで上昇させて、噴射孔4から退避させる。 As shown in FIG. 2, the subject 7 is set in the particle projection device, and the distance between the surface of the subject 7 and the outlet 4a of the injection hole 4 is fixed. In this fixed state, the rotating body 9 is rotated by the rotation of the motor M to raise the stylus wire 11 above the injection hole 4 of the nozzle 3 and retract it from the injection hole 4.

前記退避状態で、スラリー供給口5からスラリーを供給し、圧縮エアー供給口6から圧縮(高圧)エアーを供給して、スラリーとエアーをノズル3の噴射孔4内で合流させ、混合させて噴射孔4の出口4aから噴射させる(図3)。この噴射で、被験体7を表面側から摩耗する。スラリーの砥粒の形状、サイズ、種類、液体との混合比等は、この種の摩耗で使用されているスラリーと同様のものを使用することができる。 In the retracted state, the slurry is supplied from the slurry supply port 5, compressed (high pressure) air is supplied from the compressed air supply port 6, and the slurry and air are merged in the injection hole 4 of the nozzle 3, mixed and injected. It is injected from the outlet 4a of the hole 4 (FIG. 3). This injection wears the subject 7 from the surface side. The shape, size, type, mixing ratio with liquid, etc. of the abrasive grains of the slurry can be the same as those of the slurry used for this type of wear.

前記噴射は連続噴射でも間欠噴射でもよいが、図3は間欠噴射の例である。間欠噴射の場合は一回の噴射量、噴射強度といった噴射条件を一定にし、投射を繰り返して摩耗痕を得る。一回の投射での摩耗痕の深さは評価目的、被験体7の材質、厚さ等に応じて設定することができるが、例えば数ナノメートル〜数マイクロメートルである。 The injection may be continuous injection or intermittent injection, but FIG. 3 shows an example of intermittent injection. In the case of intermittent injection, the injection conditions such as the amount of one injection and the injection intensity are kept constant, and the projection is repeated to obtain wear marks. The depth of the wear marks in one projection can be set according to the purpose of evaluation, the material of the subject 7, the thickness, and the like, and is, for example, several nanometers to several micrometers.

摩耗痕の深さを計測するときは、スラリー供給口5からのスラリーの供給を停止し、圧縮エアー供給口6から圧縮エアーのみを供給して、ノズル3の噴射孔4内のスラリーを除去する。 When measuring the depth of the wear marks, the supply of the slurry from the slurry supply port 5 is stopped, only the compressed air is supplied from the compressed air supply port 6, and the slurry in the injection hole 4 of the nozzle 3 is removed. ..

前記のように、圧縮エアーを供給している状態で、又は圧縮エアーの供給も停止させてから、モータMを逆回転させて回転体9を下方に回転させて、触針用針金11をノズル3の噴射孔4内を降下させて、噴射孔4の出口から下方に突出させ、被験体7の摩耗痕(中心部)に接触させる(図4)。 As described above, in the state of supplying compressed air or after stopping the supply of compressed air, the motor M is rotated in the reverse direction to rotate the rotating body 9 downward, and the stylus wire 11 is nozzleed. The inside of the injection hole 4 of 3 is lowered so as to protrude downward from the outlet of the injection hole 4 and come into contact with the wear mark (center portion) of the subject 7 (FIG. 4).

前記接触状態での接触子11aの降下位置に基づいて、計測器13により摩耗痕の深さを計測する(図4の計測1)。具体的には、触針用針金11と共に降下して計測器13に接触した計測用コマ12の位置を計測器13で計測する。このとき計測された計測用コマ12の位置(被験体の摩耗痕の位置)と、その摩耗開始前の初期深さ又は摩耗前に計測器13で計測された計測用コマ12の位置(被験体の摩耗痕の位置)との差から、計測用コマ12の降下長、即ち、触針用針金11の降下長を計測し、摩耗痕の深さを計測する。 The depth of the wear mark is measured by the measuring instrument 13 based on the descending position of the contactor 11a in the contact state (measurement 1 in FIG. 4). Specifically, the measuring instrument 13 measures the position of the measuring top 12 that descends together with the stylus wire 11 and comes into contact with the measuring instrument 13. The position of the measuring piece 12 measured at this time (the position of the wear mark of the subject) and the initial depth before the start of wear or the position of the measuring piece 12 measured by the measuring instrument 13 before the wear (subject). From the difference from the position of the wear mark), the descent length of the measuring piece 12, that is, the descent length of the stylus wire 11, is measured, and the depth of the wear mark is measured.

前記計測は、スラリーの間欠噴射を再開して被験体を摩耗し、噴射が一時停止する度に、噴射孔4内のスラリーを除去し、触針用針金11を降下させて接触子11aを接触摩耗痕に接触させ(図4)、計測器13による摩耗痕の計測を繰り返し行って計測データを得る。前記摩耗、摩耗痕の計測を繰り返して、各回の摩耗痕の深さを求める(図5)。この場合、計測1の摩耗痕深さと計測2の摩耗痕深さとの差から二回目の摩耗の摩耗痕の深さを求める。この動作を、被験体7の表面と噴射孔4の出口4aの距離(同じ位置関係)で繰り返すことで、スラリー累積投射量と摩耗深さの関係を得ることもできる。 In the measurement, the intermittent injection of the slurry is restarted to wear the subject, and each time the injection is paused, the slurry in the injection hole 4 is removed, the wire 11 for the stylus is lowered, and the contactor 11a is brought into contact with the contact. The wear marks are brought into contact with the wear marks (FIG. 4), and the wear marks are repeatedly measured by the measuring instrument 13 to obtain measurement data. The measurement of the wear and the wear mark is repeated to obtain the depth of the wear mark each time (FIG. 5). In this case, the depth of the wear mark of the second wear is obtained from the difference between the wear mark depth of the measurement 1 and the wear mark depth of the measurement 2. By repeating this operation at a distance (same positional relationship) between the surface of the subject 7 and the outlet 4a of the injection hole 4, the relationship between the cumulative projected amount of slurry and the wear depth can be obtained.

前記のようにして摩耗痕の深さを計測したときは、その計測値(図5)に基づいて被験体の機械的強度を評価する。このとき、被験体の厚さ方向の機械的強度分布の評価を行うことができる。 When the depth of the wear mark is measured as described above, the mechanical strength of the subject is evaluated based on the measured value (FIG. 5). At this time, the mechanical strength distribution in the thickness direction of the subject can be evaluated.

前記の繰り返し計測によって取得できる試験データ例を図5に示す。材料(被験体)がポリカーボネート樹脂の場合であり、材料そのままの計測が被験体Bで、表面から紫外線照射し表面劣化処理を施した材料の計測が被験体Aで示されている。被験体Bは投射粒子量と摩耗深さがほぼ直線的な関係で増加することから、表面から内部まで一定の強さが分布していることが判る。被験体Aは投射粒子量と摩耗深さの関係が表面から加速的に摩耗する曲線で示され、ある深さからは被験体Bと同じ傾きで摩耗が進行していることがわかる。このような比較から本材料(ポリカーボネート樹脂)の場合は、紫外線照射によって表面部が早く摩耗する、すなわち弱くなっている(劣化する)ことが応用判定できる。 FIG. 5 shows an example of test data that can be obtained by the repeated measurement. When the material (subject) is a polycarbonate resin, the measurement of the material as it is is shown by the subject B, and the measurement of the material that has been subjected to surface deterioration treatment by irradiating ultraviolet rays from the surface is shown by the subject A. Since the amount of projected particles and the wear depth of subject B increase in a substantially linear relationship, it can be seen that a certain strength is distributed from the surface to the inside. In subject A, the relationship between the amount of projected particles and the wear depth is shown by a curve that accelerates wear from the surface, and from a certain depth, it can be seen that wear is progressing at the same inclination as that of subject B. From such a comparison, in the case of this material (polycarbonate resin), it can be determined by application that the surface portion is quickly worn, that is, weakened (deteriorated) by ultraviolet irradiation.

[実施形態2(図6)の粒子投射装置の動作説明]
図6の粒子投射装置では、図1の場合と同様にして摩耗痕20を形成する。その後に、触針用針金11を降下させて摩耗痕20に接触させて摩耗痕20の深さを測定する。この場合、触針用針金11を少し上昇させて被験体7から浮かし、その状態でセット台21を横方向(X方向)と前後方向(Y方向)に移動させて、所定位置で停止させる。停止時に触針用針金11を降下させて摩耗痕20に接触させて、接触箇所の摩耗痕20の深さを計測する。この繰り返しにより、摩耗痕20の略全域の深さを計測して、摩耗痕20の断面形状、または3D形状を計測することができる。
[Explanation of operation of the particle projection device of the second embodiment (FIG. 6)]
In the particle projection device of FIG. 6, the wear marks 20 are formed in the same manner as in the case of FIG. After that, the stylus wire 11 is lowered and brought into contact with the wear mark 20, and the depth of the wear mark 20 is measured. In this case, the stylus wire 11 is slightly raised to float from the subject 7, and in that state, the set table 21 is moved in the lateral direction (X direction) and the front-rear direction (Y direction) to stop at a predetermined position. When stopped, the stylus wire 11 is lowered and brought into contact with the wear mark 20, and the depth of the wear mark 20 at the contact point is measured. By repeating this, the depth of substantially the entire area of the wear mark 20 can be measured, and the cross-sectional shape or the 3D shape of the wear mark 20 can be measured.

[実施形態3(図7)の粒子投射装置の動作説明]
図7の粒子投射装置で摩耗痕20を形成するには図1の粒子投射装置と場合と同様にして行う。
[Explanation of operation of the particle projection device of the third embodiment (FIG. 7)]
The wear marks 20 are formed by the particle projection device of FIG. 7 in the same manner as in the case of the particle projection device of FIG.

図7の粒子投射装置で摩耗痕20を計測するには次のようにする。
レーザ光源及び演算ユニット32のレーザ光源32aからのレーザ光を光ファイバー31に入射し、光ファイバー31の出射端から出射されるレーザ光を投・受光ユニット33の投光器33aから光ファイバー31を通して摩耗痕20に照射する。摩耗痕20からの反射光を投・受光ユニット33の受光器(3D測定器)33bで受光し、その反射光を演算ユニット32の演算処理部32bで演算処理して、摩耗痕20の断面形状、または3D形状を計測する。
To measure the wear marks 20 with the particle projection device of FIG. 7, the procedure is as follows.
The laser light from the laser light source and the laser light source 32a of the arithmetic unit 32 is incident on the optical fiber 31, and the laser light emitted from the exit end of the optical fiber 31 is irradiated from the floodlight 33a of the light receiving / receiving unit 33 to the wear mark 20 through the optical fiber 31. do. The reflected light from the wear mark 20 is received by the light receiver (3D measuring device) 33b of the light receiving / receiving unit 33, and the reflected light is calculated by the calculation processing unit 32b of the calculation unit 32 to process the cross-sectional shape of the wear mark 20. , Or measure the 3D shape.

[実施形態4(図8)の粒子投射装置の動作説明]
図8の粒子投射装置で摩耗痕20を形成するには光導波ロッド35を上昇させて噴射孔4から退避させる。その退避状態で、図1の粒子投射装置と場合と同様に、粒子投射装置のスラリー供給口5からスラリーを供給し、圧縮エアー供給口6から圧縮(高圧)エアーを供給して、スラリーとエアーをノズル3の噴射孔4内で合流させ、混合させて噴射孔4の出口4aから噴射させる。この噴射で、被験体7を表面側から摩耗する。スラリーの砥粒の形状、サイズ、種類、液体との混合比等は、この種の摩耗で使用されているスラリーと同様のものを使用することができる。
[Explanation of operation of the particle projection device of the fourth embodiment (FIG. 8)]
In order to form the wear marks 20 with the particle projection device of FIG. 8, the optical waveguide rod 35 is raised and retracted from the injection hole 4. In the retracted state, the slurry is supplied from the slurry supply port 5 of the particle projection device, compressed (high pressure) air is supplied from the compressed air supply port 6, and the slurry and air are supplied in the same manner as in the case of the particle projection device of FIG. Are merged in the injection hole 4 of the nozzle 3, mixed, and injected from the outlet 4a of the injection hole 4. This injection wears the subject 7 from the surface side. The shape, size, type, mixing ratio with liquid, etc. of the abrasive grains of the slurry can be the same as those of the slurry used for this type of wear.

前記噴射も、連続噴射、間欠噴射のいずれでもよいが、間欠噴射の場合は一回の噴射量、噴射強度といった噴射条件を一定にし、投射を繰り返して摩耗痕を得る。一回の投射での摩耗痕の深さは評価目的、被験体7の材質、厚さ等に応じて設定することができる。この場合の摩耗痕の深さも数ナノメートル〜数マイクロメートル程度である。 The injection may be either continuous injection or intermittent injection, but in the case of intermittent injection, the injection conditions such as the amount of one injection and the injection intensity are kept constant, and the projection is repeated to obtain wear marks. The depth of the wear marks in one projection can be set according to the purpose of evaluation, the material of the subject 7, the thickness, and the like. The depth of the wear marks in this case is also about several nanometers to several micrometers.

間欠噴射の場合は。エロ―ジョンを行うたびに摩耗痕20の深さを計測する。この場合も、スラリー供給口5からのスラリーの供給を停止し、圧縮エアー供給口6から圧縮エアーのみを供給して、ノズル3の噴射孔4内のスラリーを除去する。 For intermittent injection. The depth of the wear mark 20 is measured each time the erosion is performed. Also in this case, the supply of the slurry from the slurry supply port 5 is stopped, only the compressed air is supplied from the compressed air supply port 6, and the slurry in the injection hole 4 of the nozzle 3 is removed.

前記のようにして形成された摩耗痕20の断面形状を計測するには、前記のように圧縮エアーを供給している状態で、又は圧縮エアーの供給も停止させてから、光導波ロッド35を降下させ、所定位置に停止させる。この停止状態で、白色光源34aから光導波ロッド35に白色光を入射して、光導波ロッド35の出射端から出射される白色光を摩耗痕20に向けて照射する。摩耗痕20からの反射光を3D形状測定器で受光し、その反射光を演算処理部で演算処理して摩耗痕20の3D形状を計測する。 In order to measure the cross-sectional shape of the wear marks 20 formed as described above, the optical waveguide rod 35 is moved in the state where the compressed air is being supplied as described above, or after the supply of the compressed air is also stopped. Lower and stop in place. In this stopped state, white light is incident on the optical waveguide rod 35 from the white light source 34a, and the white light emitted from the exit end of the optical waveguide rod 35 is irradiated toward the wear marks 20. The reflected light from the wear mark 20 is received by the 3D shape measuring device, and the reflected light is calculated and processed by the arithmetic processing unit to measure the 3D shape of the wear mark 20.

前記計測値に基づいて被験体の機械的強度を評価する。被験体7の表面と噴射孔4の出口4aの距離(同じ位置関係)で前記エロ―ジョンを繰り返すことで、被験体の厚さ方向の機械的強度分布の評価を行うことができる。スラリー累積投射量と摩耗深さの関係を得ることもできる。 The mechanical strength of the subject is evaluated based on the measured values. By repeating the erosion at a distance (same positional relationship) between the surface of the subject 7 and the outlet 4a of the injection hole 4, the mechanical strength distribution in the thickness direction of the subject can be evaluated. It is also possible to obtain the relationship between the cumulative slurry projection amount and the wear depth.

[被験体の評価、利用]
本発明の粒子投射装置を使用して得られた摩耗痕のデータは演算処理部で演算処理して、被験体(材料)の評価、被験体として用いた材料の加工条件の設定等に利用することができる。この場合、摩耗痕20の形状を図形化したり、摩耗痕の変化をグラフ化、数値化したりしてモニタ画面に表示することができる。
[Subject evaluation and utilization]
The data of the wear marks obtained by using the particle projection device of the present invention is arithmetically processed by the arithmetic processing unit and used for evaluation of the subject (material), setting of processing conditions of the material used as the subject, and the like. be able to. In this case, the shape of the wear mark 20 can be graphicized, and the change in the wear mark can be graphed and quantified and displayed on the monitor screen.

前記実施形態はあくまでも本発明の一例である。本発明はその課題を解決可能であれば、他の材料や機器等を使用することができ、他の構成、サイズ等とすることもできる。また、摩耗痕20の測定手順等も任意に設定可能である。 The embodiment is merely an example of the present invention. In the present invention, other materials, devices, and the like can be used as long as the problem can be solved, and other configurations, sizes, and the like can be used. Further, the measurement procedure of the wear marks 20 and the like can be arbitrarily set.

1 粒子投射機(噴射ガン)
2 計測部
3 ノズル
4 噴射孔(スラリー噴射孔)
4a (噴射孔の)出口
5 スラリー供給口
6 圧縮エアー供給口
7 被験体
9 回転体
10 駆動部
11 触針用針金
11a 触針用針金の先端部(接触子)
12 計測用コマ
13 計測器
14 ケース
15 連結具
20 摩耗痕
21 セット台
22 移動台
23 シリンダ
31 光ファイバー
32 レーザ光源及び演算ユニット
32a レーザ光源
32b 演算処理部
33 投・受光ユニット
33a 投光器
33b 受光器
34 光源及び演算ユニット
34a 白色光源
34b 演算処理部
35 光導波ロッド
36 投・受光ユニット
36a 投光器
36b 受光器
37 連結具
38 計測用コマ
39 定位置ストッパー
M モータ
1 Particle projector (injection gun)
2 Measuring unit 3 Nozzle 4 Injection hole (slurry injection hole)
4a (injection hole) outlet 5 Slurry supply port 6 Compressed air supply port 7 Subject 9 Rotating body 10 Drive unit 11 Wire for stylus 11a Tip of wire for stylus (contactor)
12 Measuring piece 13 Measuring instrument 14 Case 15 Connector 20 Wear mark 21 Set stand 22 Moving stand 23 Cylinder 31 Optical fiber 32 Laser light source and arithmetic unit 32a Laser light source 32b Arithmetic processing unit 33 Throw / receive unit 33a Floodlight 33b Receiver 34 Light source And arithmetic unit 34a white light source 34b arithmetic processing unit 35 optical waveguide rod 36 throwing / receiving unit 36a floodlight 36b receiver 37 connector 38 measuring piece 39 fixed position stopper M motor

Claims (3)

スラリーを圧縮エアーと共に高速で被験体に投射して当該被験体を摩耗させる噴射ガンを備えた粒子投射装置において、
前記粒子投射装置が、少なくとも摩耗痕の深さ又は/及び形状を計測可能な計測部を備え、
計測部は、噴射ガンのスラリー投射軸と同軸上で摩耗痕を計測できる、
ことを特徴とする摩耗痕計測機能付き粒子投射装置。
In a particle projection device equipped with an injection gun that projects the slurry together with compressed air onto a subject at high speed to wear the subject.
The particle projection device, e Bei at least the depth of the wear scar and / or measurable measuring section shape,
The measuring unit can measure the wear marks coaxially with the slurry projection shaft of the injection gun.
A particle projection device with a wear mark measurement function.
請求項1記載の摩耗痕計測機能付き粒子投射装置おいて、
計測部が摩耗痕に接触可能な接触子と、接触子を摩耗痕に接触・離間可能に往復移動させる駆動部を備え、
前記接触子は噴射ガンの粒子投射軸上に配置され、
前記駆動部は、噴射ガンのノズルからのスラリー投射時に、接触子をノズルのスラリー投射軸から退避させ、被験体の少なくとも摩耗痕深さ計測時に、接触子を噴射ガンの噴射口から外に突出させて摩耗痕に接触させることができる、
ことを特徴とする摩耗痕計測機能付き粒子投射装置。
In the particle projection device with a wear mark measurement function according to claim 1,
The measuring unit is equipped with a contact that can contact the wear mark and a drive unit that reciprocates the contact so that it can contact and separate from the wear mark.
The contacts are placed on the particle projection axis of the injection gun and
The drive unit retracts the contact from the slurry projection shaft of the nozzle when projecting slurry from the nozzle of the injection gun, and projects the contact out from the injection port of the injection gun when at least measuring the depth of wear marks of the subject. Can be brought into contact with wear marks,
A particle projection device with a wear mark measurement function.
請求項1記載の摩耗痕計測機能付き粒子投射装置において、
計測部が、光源と、光源からの測定光を伝送して摩耗痕に非接触で照射する光伝送路と、光伝送路から照射されて摩耗痕から反射する反射光を受信する受光器又は/及び3D計測器を備え、
光伝送路は噴射ガンのノズルのスラリー投射軸上に配置され、その配置箇所に固定又は昇降可能である、
ことを特徴とする摩耗痕計測機能付き粒子投射装置。
In the particle projection device with a wear mark measuring function according to claim 1.
A light source, an optical transmission line that transmits the measurement light from the light source and irradiates the wear marks in a non-contact manner, and a receiver or / or a receiver that receives the reflected light that is emitted from the optical transmission line and reflected from the wear marks. And equipped with 3D measuring instrument
The optical transmission line is arranged on the slurry projection axis of the nozzle of the injection gun, and can be fixed or moved up and down at the arrangement location.
A particle projection device with a wear mark measurement function.
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