JP6964469B2 - Light source device and its manufacturing method - Google Patents

Description

The present invention relates to a light source device using two lenses.

Since a small light source module using a light source such as a semiconductor laser needs to be thin in order to be used as a light source device of a projector, the size of the lens is limited to a small one. Therefore, the lens must be arranged near the light emitting point of the semiconductor laser, and a high accuracy of 10 um to several um is required for the allowable deviation of the distance between the light emitting point of the semiconductor laser and the lens.

Patent Document 1 discloses a method of spatially adjusting a lens in an optical module using such a small lens and fixing the lens with an adhesive such as a thermosetting resin or a UV curable resin.

International Publication WO 2016/002267 (Published January 7, 2016)

However, in the lens fixing method as described above, the lens is fixed after the position adjustment in each of the three-dimensional directions. Therefore, even if the adhesive is applied to the fixing in any of the X-axis, Y-axis, and Z-axis directions, it cannot be avoided that the effect of the curing shrinkage of the adhesive extends to the fixing position in the other direction. Therefore, there is a problem that the lens moves at the time of adhesion.

Due to such a problem, in the bonding of the lens after adjusting the optical axis and the beam spot size, the lens shifts due to the curing shrinkage of the adhesive. Furthermore, this problem is particularly remarkable in high temperature operation. The optical axis of the laser changes depending on the temperature because the lens shifts due to the expansion of the adhesive portion that fixes the lens to the housing due to the high temperature. Therefore, when the light source device is incorporated in a projector or the like, there is a concern that the projected image may be blurred or blurred due to the relative deviation of the optical axes of the plurality of lasers. Further, at present, there is a strong demand for optical characteristics of convergence and divergence, which are small in size and difficult to realize with one lens in the market. In addition, there is a strong demand for reliability that stable operation can be performed even at high temperatures.

One aspect of the present invention provides a light source device capable of reducing the influence of curing shrinkage of an adhesive that occurs in any of the three-dimensional directions in adhesive fixing of a lens of a small light source device, and reducing optical axis deviation even in high temperature operation. The purpose is to do.

In order to solve the above problems, the light source device according to one aspect of the present invention includes a semiconductor laser, a first lens unit, a second lens unit, the semiconductor laser, the first lens unit, and the second lens. The housing includes a first surface to which the first lens portion is fixed, and the housing includes a first lens holding recess for holding the first lens portion, and the second lens. It has a second lens holding recess that includes a second surface to which the portion is fixed and holds the second lens portion, and the first surface is perpendicular to the direction of the optical axis of the semiconductor laser and Wider than the first fixed surface fixed to the first surface of the first lens portion, the second surface is parallel to the direction of the optical axis, and is fixed to the second surface of the second lens portion. The first lens holding recess and the second lens holding recess are connected to each other so as to be wider than the second fixed surface, and the lower surface side of the first lens holding recess is open and the first lens portion is formed. is positionable, the second lens holding recess, the lower surface side is open so as to be continuous with the opening portion of the first lens holding recess, and Ru der positionable said second lens unit.

According to one aspect of the present invention, it is possible to reduce the influence of the curing shrinkage of the adhesive that occurs in any of the three-dimensional directions in the adhesive fixing of the lens of the small light source device, and to reduce the optical axis deviation even in high temperature operation. .. Further, one aspect of the present invention is to adjust the beam direction (optical axis adjustment) and the spot size of the beam by dividing the lens into a first lens and a second lens (the beam spot size is the convergence or divergence of the beam). It represents the degree, and is the size of the cross section along the plane perpendicular to the optical axis at one point on the optical axis), and can be performed independently.

It is a perspective view which shows the appearance structure of the light source apparatus which concerns on Embodiment 1 of this invention. (A) is a plan view showing the configuration of the light source device, (b) is a cross-sectional view taken along the line AA of (a), and (c) is a cross-sectional view taken along the line BB of (a). It is a figure, (d) is the cross-sectional view taken along the line CC of (a). It is a perspective view which shows a part of the housing in the said light source device. It is sectional drawing of the main part which shows the sliding surface on which the 1st lens holder slides in the said housing. It is a perspective view seen from the direction different from FIG. 3 which shows a part of the said housing. (A) is a perspective view showing the appearance configuration of the second lens portion, and (b) is a perspective view showing another appearance configuration of the second lens portion. It is a perspective view which shows the structure of the 2nd lens holder. FIG. 5 is a cross-sectional view of a main part showing a structural relationship between a first lens holder arranged in the light source device and a first lens holding recess of the housing. It is a perspective view which shows the posture of the housing in the lens adjustment method which concerns on Embodiment 2 of this invention. It is a perspective view which shows the appearance structure of the 1st lens holder suitable for the lens adjustment method which concerns on Embodiment 2. FIG. (A) is a cross-sectional view of a main part showing a state in which the first lens holder is held by the chucking mechanism and the clamp mechanism, and (b) is a movement of the first lens holder by the chucking mechanism and the clamp mechanism. It is sectional drawing of the main part which shows the state. (A) is a cross-sectional view of a main part showing a state in which the first lens holder is moved, and (b) is a cross-sectional view of a main part showing a state in which the first lens holder is returned to a reference position. (A) is a cross-sectional view of a main part showing the first lens holder holding structure used in the second embodiment, and (b) is a cross-sectional view of the main part showing another first lens holder holding structure used in the second embodiment. be.

[Embodiment 1]
The first embodiment of the present invention will be described below with reference to FIGS. 1 to 8.

<Structure of light source device>
FIG. 1 is a perspective view showing an external configuration of the light source device 100 according to the present embodiment. FIG. 2A is a plan view showing the configuration of the light source device 100. FIG. 2B is a cross-sectional view taken along the line AA of FIG. 2A. FIG. 2C is a cross-sectional view taken along the line BB of FIG. 2A. FIG. 2D is a cross-sectional view taken along the line CC of FIG. 2A.

As shown in FIGS. 1 and 2 (a) to 2 (d), the light source device 100 includes a housing 1, a laser holder 2, a fixed spring 3, a composite prism 4, and first lens portions 10, 20. , 30, second lens units 110, 120, 130, and semiconductor lasers 210, 220, 230.

<Structure of housing and parts>
FIG. 3 is a perspective view showing a part of the housing 1 in the light source device 100. FIG. 4 is a cross-sectional view of a main part showing a sliding surface on which the first lens holders 12, 22, and 32 slide in the housing 1. FIG. 5 is a perspective view showing a part of the housing 1 as viewed from a direction different from that of FIG.

The housing 1 is formed of metal or resin on a cube having a predetermined thickness, and includes a composite prism 4, first lens portions 10, 20, 30, second lens portions 110, 120, 130, and a semiconductor laser. Accommodates 210, 220, 230. As the metal, a material such as copper or aluminum having a high thermal conductivity is preferable, but a metal material such as zinc, brass or kovar may be used. Further, it is still preferable that the housing 1 is subjected to black alumite treatment.

Semiconductor lasers 210, 220, 230 are fitted in one end of the housing 1, and light emitted from the semiconductor lasers 210, 220, 230 is passed to the side where the first lens portions 10, 20, 30 are arranged. As described above, a hole (for example, a penetration H shown in FIG. 2D) is formed.

The rear end side of each of the semiconductor lasers 210, 220, and 230 is held by the laser holder 2. The laser holder 2 has a function of a heat sink. Since the light source device 100 is a small light source module, the volume of the housing 1 is small. Therefore, the heat dissipation of the semiconductor lasers 210, 220, 230 themselves is not good. Therefore, holding the semiconductor lasers 210, 220, 230 by the laser holder 2 that functions as a heat sink improves the heat dissipation of the semiconductor lasers 210, 220, 230. The material of the laser holder 2 may be any material having high thermal conductivity, and copper, aluminum, brass, ceramic and the like can be used. Further, it is more preferable that the laser holder 2 is subjected to black alumite treatment.

The laser holder 2 is fixed to the housing 1 by the fixing spring 3. The fixing spring 3 is a sheet metal that fixes the laser holder 2 so as to press it against the housing 1, and has a spring function.

The semiconductor laser 210 is a blue laser having a wavelength of about 450 nm. The semiconductor laser 220 is a green laser having a wavelength of about 525 nm. The semiconductor laser 230 is a red laser having a wavelength of about 640 nm.

As shown in FIG. 2D, the semiconductor laser 220 has a semiconductor laser element 221 including a semiconductor laser chip and a submount, a stem 222, and three lead pins 223. The semiconductor laser element 221 is fixed on the stem 222 and emits a laser beam (beam) to the side of the first lens unit 20. The lead pin 223 is pulled out from the laser holder 2. The other semiconductor lasers 210 and 230 are configured in the same manner as the semiconductor laser 220, but the colors of the emitted light are different.

The housing 1 has first lens holding recesses 1a to 1c, second lens holding recesses 1d to 1f, and a composite prism holding recess 1g.

The composite prism holding recess 1g is a recess provided for accommodating the composite prism 4. The composite prism holding recess 1g is located in the vicinity of the light emitting side of the housing 1 on a horizontal plane with respect to the direction of the optical axis of the emitted light of the semiconductor lasers 210, 220, 230 (the z direction in FIG. 2A). It is formed long in the vertical direction (x direction).

On one end side of the composite prism holding recess 1g in the housing 1, an optical combined wave emission light 1m penetrating from the composite prism holding recess 1g to the outside is formed. As will be described later, the optical combined wave emission light 1 m is provided to emit the light combined by the composite prism 4. Further, at the end of the housing 1 on the light emitting side, light emitting holes 1h to 1j penetrating from the composite prism holding recess 1g to the outside are formed. The emitted light of the semiconductor lasers 210, 220, and 230 is emitted to the outside through these light emitting holes 1h to 1j. By detecting the light emitted to the outside with a photodiode (PD) or the like, the intensity of the emitted light can be monitored.

The composite prism 4 is an optical component having a function of transmitting and reflecting a specific wavelength by combining a dichroic mirror with glass. The composite prism 4 is formed in a long rectangular parallelepiped, and is arranged so that its longitudinal direction is along the x direction of FIG. 2A. The composite prism 4 emits the laser beams emitted from the second lens portions 110, 120, and 130, respectively, but these laser beams can also be combined and emitted. The composite prism 4 emits a combined wave in a direction different from the direction in which the individual laser beams are emitted (z direction), for example, in the lateral direction (opposite to the x direction).

The first lens holding recesses 1a to 1c are recesses provided for holding the first lens portions 10, 20, and 30, respectively. The lower surface side of the first lens holding recesses 1a to 1c is open as shown in FIGS. 2B, 3 and 4. The first lens holding recesses 1a to 1c are formed symmetrically with respect to a plane parallel to the y direction including the optical axes of the semiconductor lasers 210, 220, and 230.

The first lens portions 10, 20 and 30 can be moved in the first lens holding recesses 1a to 1c so that the positions (optical axes) of the first lens portions 10, 20 and 30 in the x direction and the y direction can be adjusted. It is formed to the size that becomes.

In other words, the first lens holding recesses 1a to 1c are fixed surfaces (semiconductor laser 210,) fixed to the first lens holding recesses 1a to 1c of the first lens holders 12, 22, and 32, as shown in FIG. The sliding surfaces 1aa, 1ba, 1ca (first surface) wider than the surface on the 220, 230 side (first fixed surface)) are provided on the wall surface on the semiconductor laser 210, 220, 230 side.

As shown in FIG. 5, the sliding surfaces of the first lens holding recesses 1a to 1c are provided with stepped portions 1ab, 1bb, and 1cc at the upper end and the lower end, respectively. The stepped portions 1ab, 1bb, 1cc are formed as portions for pressing protrusions (rods, pins, etc.) (not shown) in order to remove the housing 1 from the substrate or the like on which the housing 1 is attached. As a result, the housing 1 can be easily removed when work on the housing 1 is required after the housing 1 is attached. Further, in these stepped portions 1ab, 1bb, 1cc, needles (particularly needle tips) for applying an adhesive for fixing the first lens portions 10, 20, 30 to the sliding surface 1aa, It can be used as a part for easy insertion into 1ba and 1ca, and can also be used as a part for pouring an adhesive.

The second lens holding recesses 1d to 1f are recesses provided for holding the second lens portions 110, 120, and 130, respectively. The lower surface side of the second lens holding recesses 1d to 1f is open as shown in FIGS. 2 (c) and 3 (c). The second lens holding recesses 1d to 1f are connected to the composite prism holding recesses 1g. The second lens holding recesses 1d to 1f are formed symmetrically with respect to a plane parallel to the y direction including the optical axes of the semiconductor lasers 210, 220, and 230. However, the second lens holding recesses 1d to 1f may be formed asymmetrically with respect to the above plane.

As shown in FIG. 5, the second lens holding recess 1d has a pair of tilted support surfaces 1da, the second lens holding recess 1e has a pair of tilted support surfaces 1ea, and the second lens holding recess 1f has a pair of tilted support surfaces 1f. It has an inclined support surface 1fa. The inclined support surface 1da is a surface that is inclined from the lower end of the vertical surface of the second lens holding recess 1d to the lower end surface of the housing 1. The inclined support surface 1ea is a surface that is inclined from the lower end of the vertical surface of the second lens holding recess 1e to the lower end surface of the housing 1. The inclined support surface 1fa is a surface that is inclined from the lower end of the vertical surface of the second lens holding recess 1f to the lower end surface of the housing 1.

The pair of inclined support surfaces 1da (second surface) are provided with the open lower end portion of the second lens holding recess 1d between them, so that the second lens portion 110 is provided in the direction of the optical axis (z direction) of the semiconductor laser 210. ) Is slidable. The pair of inclined support surfaces 1ea (second surface) are provided with the open lower end portion of the second lens holding recess 1e between them, so that the second lens portion 120 is provided in the direction of the optical axis (z direction) of the semiconductor laser 220. ) Is slidable. The pair of inclined support surfaces 1fa (second surface) are provided with the open lower end portion of the second lens holding recess 1f between them, so that the second lens portion 130 is provided in the direction of the optical axis (z direction) of the semiconductor laser 230. ) Is slidable.

The second lens holding recesses 1d to 1f (tilted support surfaces 1da, 1ea, 1fa) have the second lens portions 110, 120, 120, respectively, so that the positions of the second lens portions 110, 120, 130 in the z direction can be adjusted. It is formed to a length that allows movement of 130. The lengths of the second lens holding recesses 1d to 1f differ depending on the wavelengths of the semiconductor lasers 210, 220, and 230, respectively. Further, the second lens holding recesses 1d to 1f are inclined support surfaces 1da, as surfaces (second surfaces) wider than the fixed surfaces fixed to the second lens holding recesses 1d to 1f of the second lens holders 112, 122, 132. It has 1ea and 1fa.

<Structure of the first lens part>
As shown in FIG. 2B, the first lens portions 10, 20 and 30, respectively, have the first lens 11, 21, 31 and the first lens holders 12, 22, 32 and the first lens aperture 13, respectively. , 23, 33 and so on.

The first lenses 11, 21, and 31 have a function of emitting incident light as parallel light. The first lenses 11, 21, and 31 are plano-convex lenses made of glass. The first lenses 11, 21, 31 may be made of a material (glass, plastic, etc.) having a desired lens function. Further, the first lenses 11, 21, 31 are a cylindrical lens in which a spherical surface is formed in a direction perpendicular to the optical axis of the semiconductor lasers 210, 220, 230, and a spherical surface is formed in a direction parallel to the optical axis. It may be a cylindrical lens to be used, or an aspherical lens having less aberration.

When the first lenses 11, 21, 31 are composed of a cylindrical lens, it is preferable that the first lenses have different spherical functions with respect to the selected light incident surfaces of the second lenses 111, 121, 131, which will be described later. For example, if the first lenses 11,21,31 are cylindrical lenses in which a spherical surface is formed in the direction perpendicular to the light emitting surface, the second lenses 111, 121, 131 are formed on the cylindrical lens or the light emitting surface. On the other hand, it is a cylindrical lens in which a spherical surface is formed in the parallel direction.

The first lens holders 12, 22, and 32 (first lens holders) are holding members that hold the first lenses 11, 21, and 31, respectively. The first lens holders 12, 22, and 32 have an octagonal shape when viewed from the direction of the optical axis. As shown in FIG. 2D, the first lens holder 22 holds the first lens holder 22 so as to surround the periphery of the first lens 21, and the first lens is formed on the incident side and the outgoing side of the light of the first lens 21. 21 is exposed. The first lens holders 12 and 32 are also configured to hold the first lenses 11 and 31 in the same manner.

The first lens 11,21,31 and the first lens holders 12, 22, 32 are formed separately from each other. Not limited to this, the first lens portions 10, 20, and 30 may be formed by integrally forming the first lens 11, 21, 31 and the first lens holders 12, 22, 32 with glass, resin, or the like. good.

The first lens apertures 13, 23, and 33 are opening members provided for cutting unnecessary components such as stray light contained in the light emitted from the first lenses 11, 21, and 31, respectively. The first lens apertures 13, 23, and 33 are plate members made of resin or metal, and are provided with a light transmitting hole in the center for passing laser light. The first lens apertures 13, 23, 33 are formed separately from the first lens holders 12, 22, 32. As a result, the positions of the first lenses 11, 21, and 31 can be adjusted after they are attached to the first lens holders 12, 22, and 32, respectively. Further, since the first lens apertures 13, 23, and 33 can be replaced with ones having different diameters of the light transmitting holes, the diameters of the light transmitting holes can be easily changed.

The first lens apertures 13, 23, and 33 are not limited to such a structure, and may be integrally formed with the first lens holders 12, 22, and 32 together with the lens function by resin molding or the like, respectively.

<Structure of the second lens section>
FIG. 6A is a perspective view showing the external configuration of the second lens unit 110. FIG. 6B is a perspective view showing another external configuration of the second lens unit 110. FIG. 7 is a perspective view showing the configuration of the second lens holder 112.

As shown in (c) of FIG. 2 and (a) of FIG. 6, the second lens portions 110, 120, 130 have the second lens 111, 121, 131 and the second lens holder 112, 122, 132, respectively. And the second lens apertures 113, 123, 133. Note that FIG. 6A shows only the second lens portion 110. The second lens holder 112 has a vertical surface 112a perpendicular to the direction of the optical axis of the semiconductor laser 210 on its upper surface. Further, as shown in FIG. 6B, the second lens portion 110 is given a force to move the second lens portion 110 by pressing the pressing plate 114 against the vertical surface 112a. Although not shown, the second lens holders 122 and 132 also have the same vertical plane as the vertical plane 112a.

The second lenses 111, 121, and 131 have a function of emitting incident light as parallel light. The second lenses 111, 121, 131 are plano-convex lenses made of glass. The second lenses 111, 121, 131 may be made of a material (glass, plastic, etc.) having a desired lens function. Further, as described above, for example, if the first lens 11,21,31 is a cylindrical lens in which a spherical surface is formed in the direction perpendicular to the light emitting surface, the second lenses 111, 121, 131 are cylindrical. A lens or a cylindrical lens in which a spherical surface is formed in a direction parallel to the light emitting surface may be used.

The second lens holders 112, 122, 132 (second lens holders) are holding members that hold the second lenses 111, 121, 131, respectively. As shown in FIG. 2D, the second lens holder 122 is held so as to surround the periphery of the second lens 121 on one end side (first lens holder 12 side), and the light of the second lens 121 The second lens 121 is exposed on the incident side and the outgoing side. Further, the second lens holder 122 has a cylindrical internal space formed between an end portion that holds the second lens 121 and an end portion on the opposite side (end portion on the light emitting side). The second lens holders 112 and 132 are also configured to hold the second lenses 111 and 131 in the same manner, and also have an internal space.

As shown in FIG. 7, the bottom surface 112b of the second lens holder 112 has a shape (semi-cylindrical shape) as if it were divided along the optical axis of a cylinder centered on the optical axis of the semiconductor laser 210. There is. When the bottom surface 112b having such a shape comes into contact with the pair of inclined support surfaces 1da, the second lens holder 112 is slidably supported on the inclined support surface 1da. The length of the bottom surface 112b is preferably as long as possible in order to stabilize the sliding operation on the inclined support surface 1da or to prevent the second lens holder 112 from tipping over. Further, the bottom surface 112b is fixed to a surface facing the pair of inclined support surfaces 1da (the above-mentioned fixing surface (second fixing surface)) with an adhesive or the like.

Although not shown, the second lens holders 122 and 132 also have the same bottom surface as the bottom surface 112b. As a result, the second lens holders 122 and 132 are also slidably supported by the pair of inclined support surfaces 1ea and 1fa, respectively, and are also fixed to the inclined support surfaces 1ea and 1fa on the bottom surface.

The second lens 111, 121, 131 and the second lens holder 112, 122, 132 are formed separately from each other. Not limited to this, the second lens portions 110, 120, 130 may be formed by integrally forming the second lenses 111, 121, 131 and the second lens holders 112, 122, 132 with glass, resin, or the like. good.

The second lens apertures 113, 123, and 133 are opening members provided to cut the light emitted from the second lenses 111, 121, and 131 so as to have a predetermined diameter, respectively. The second lens apertures 113, 123, 133 can realize the regulation of the emission point size, the suppression of color unevenness of light, the suppression of stray light, and the like by such a light cut function.

The second lens apertures 113, 123, 133 are provided at the ends of the second lens holders 112, 122, 132 on the light emitting side, as shown in (c) of FIG. 2 and (a) of FIG. ..

<Lower end structure of the first lens holding recess>
FIG. 8 is a cross-sectional view of a main part showing the structural relationship between the first lens holder 12 arranged in the light source device 100 and the first lens holding recess 1a of the housing 1.

Although the lower ends of the first lens holding recesses 1a to 1c are open, the first lens portions 10, 20 and 30 have a structure capable of holding the first lens portions 10, 20 and 30 at the lower end positions of the housing 1, respectively. The structure will be described below. In the following description, for convenience, the first lens holder 12 of the first lens unit 10 will be illustrated and described.

As shown in FIG. 8, the first lens holder 12 has a bottom surface 12a and two inclined surfaces 12b provided on both sides of the bottom surface 12a. The inclined surface 12b is inclined at a first inclination angle θ1 with respect to the horizontal plane (including the bottom surface 12a).

On the other hand, the pair of inclined surfaces 1k (opposing surfaces) formed in the lower part of the first lens holding recess 1a are formed so as to face the inclined surface 12b in the y direction. The inclined surface 1k is inclined at a second inclination angle θ2 with respect to a horizontal plane (including the bottom surface of the housing 1) so as to support the lower portion of the first lens holder 12. Further, the bottom width W1 (width between the lower ends of the pair of inclined surfaces 1k) of the bottom (open portion) of the first lens holding recess 1a is equal to the width of the bottom surface 12a of the first lens holder 12.

When the first lens holder 12 moves in the direction opposite to the y direction in the position adjustment of the first lens 11, the inclined surface 12b of the first lens holder 12 comes into contact with the inclined surface 1k of the housing 1. The above movement is restricted and is held on the inclined surface 1k. This prevents the first lens holder 12 from falling from the lower end of the first lens holding recess 1a.

Here, as described above, the bottom width W1 and the width of the bottom surface 12a are equal, and the top width W2 is wider than the bottom width W1 (W1 <W2). Further, the first inclination angle θ1 is equal to the second inclination angle θ2 (θ1 = θ2). For example, the values of the bottom width W1, the top width W2, the first inclination angle θ1, and the second inclination angle θ2 are W1 = 3.0 mm, W2 = 4.4 mm, θ1 = 45 °, and θ2 = 45 °, respectively. Can be mentioned. It goes without saying that the values of the bottom width W1, the top width W2, the first inclination angle θ1 and the second inclination angle θ2 are not limited to the above-mentioned specific values.

By defining the relationship between the lower portion of the first lens holding recess 1a and the first lens holder 12 in this way, the first lens holder 12 is held at the lower end of the first lens holding recess 1a. Two advantages are obtained.

First, the range in which the first lens holder 12 can move can be maximized for adjusting the position in the first lens holding recess 1a.

Instead of such a structure, by making the width of the first lens holding recess 1a substantially equal to the width of the first lens holder 12, it is possible to prevent the first lens holder 12 from protruding from the lower end of the first lens holding recess 1a. .. However, since the width of the first lens holding recess 1a in the x direction becomes narrow, it becomes difficult to adjust the position of the first lens holder 12. Therefore, the adjustment range of the beam direction of the first lens 11 is narrowed, so that the beam direction of the first lens 11 cannot be adjusted significantly.

Second, in the process of temporarily lowering the first lens holder 12 to the lower end of the first lens holding recess 1a, the inclined surface 12b of the first lens holder 12 comes into contact with the inclined surface 1k of the first lens holding recess 1a. , The first lens holder 12 is guided to a fixed position (reference position) at the lower end. The reference position is a reference position when adjusting the optical axis of the first lens 11. As a result, as shown in FIG. 8, the bottom surface 12a of the first lens holder 12 can be returned to the specified position in the x direction, for example, the coordinate 0 on the x axis.

Therefore, the position adjustment of the first lens holder 12 can be roughly adjusted only in the y direction. After this rough adjustment, the adjustment time can be shortened by making fine adjustments in the x-direction and the y-direction. Further, even if the position of the first lens holder 12 is not well understood during adjustment by an unfamiliar operator, the adjustment can be easily resumed by returning the first lens holder 12 to the reference position at the lower end of the first lens holding recess 1a. can do.

Although not shown between the first lens holder 22 and the first lens holding recess 1b and between the first lens holder 32 and the first lens holding recess 1c, the first lens holder as shown in FIG. 8 is not shown. There is a structural relationship between the 12 and the first lens holding recess 1a of the housing 1.

<Effect of embodiment>
The light source device 100 according to the present embodiment includes a housing 1 having first lens holding recesses 1a to 1c and second lens holding recesses 1d to 1f. The first lens holding recesses 1a to 1c have sliding surfaces 1aa, 1ba, 1ca wider than the fixed surfaces fixed to the first lens holding recesses 1a to 1c of the first lens holders 12, 22, and 32. Further, the second lens holding recesses 1d to 1f have inclined support surfaces 1da, 1ea, 1fa wider than the fixed surfaces fixed to the second lens holding recesses 1d to 1f of the second lens holders 112, 122, 132. There is.

Thereby, by moving the first lens holders 12, 22, and 32 along the sliding surface, the positions of the first lenses 11, 21, and 31 in the x-direction and the y-direction can be adjusted. Further, by sliding the second lens holders 112, 122, 132 along the inclined support surfaces 1da, 1ea, 1fa, the positions of the second lenses 111, 121, 131 in the z direction can be adjusted.

When the positions of the first lenses 11, 21, and 31 are adjusted, the first lens holders 12, 22, and 32 are fixed at the positions by the adhesive. When the positions of the second lenses 111, 121, 131 are adjusted, the second lens holders 112, 122, 132 are fixed at the positions by the adhesive.

As a result, after adjusting the positions of the first lenses 11, 21, 31, the position shifts in the z direction due to the shrinkage due to the effect of the adhesive, or after adjusting the positions of the second lenses 111, 121, 131, the shrinkage due to the effect of the adhesive causes x. It is possible to prevent the position from shifting in the direction and the y direction. Therefore, the positions of the first lenses 11, 21, 31 and the second lenses 111, 121, 131 can be prevented from affecting the positions in directions unrelated to the respective position adjustment directions. Therefore, as compared with the conventional light source device having only one lens for one semiconductor laser, the lens is fixed with an adhesive after adjusting the position of the lens in a three-dimensional direction. It is possible to reduce the influence on the position due to the curing shrinkage of the adhesive that occurs in any of the dimensional directions.

Therefore, it is possible to provide a highly reliable light source device that is compact and has desired convergence and divergence characteristics and is less likely to cause a relative optical axis shift of a plurality of lasers.

[Embodiment 2]
The second embodiment of the present invention will be described below with reference to FIGS. 4 to 6 and 9 to 13. For convenience of explanation, the same reference numerals will be added to the members having the same functions as the members described in the first embodiment, and the description thereof will be omitted.

<Manufacturing method of light source device>
In this embodiment, a method of manufacturing the light source device 100 will be described.

First, the semiconductor lasers 210, 220, and 230 are attached to the housing 1. At this time, the semiconductor lasers 210, 220, 230 are fitted into the housing 1, and the fixing springs 3 covering the periphery of the laser holder 2 are screwed together while the semiconductor lasers 210, 220, 230 are held by the laser holder 2. It is fixed to the housing 1 by.

Next, the composite prism 4 is arranged in the composite prism holding recess 1g of the housing 1 and fixed with an adhesive. The composite prism 4 may be fixed before the semiconductor lasers 210, 220, and 230 are attached.

In this state, the first lens portions 10, 20, and 30 are arranged in the first lens holding recesses 1a, 1b, and 1c of the housing 1, respectively. Further, the second lens portions 110, 120, and 130 are arranged in the second lens holding recesses 1d, 1e, and 1f of the housing 1, respectively. As a result, in the housing 1, the first lens portions 10, 20, 30 and the second lens portions 110, 120, 130 are arranged at positions that allow the emitted light from the semiconductor lasers 210, 220, 230 to pass through, respectively. Further, the first lens portions 10, 20, 30 and the second lens portions 110, 120, 130 are arranged in the order of proximity to the semiconductor lasers 210, 220, 230.

Further, the optical axes of the first lenses 11, 21, and 31 are adjusted by moving the first lens portions 10, 20 and 30 within the first lens holding recesses 1a to 1c, respectively (first lens optical axis adjustment). Process). Then, the first lens portions 10, 20, and 30 are fixed to the adjusted positions in the first lens holding recesses 1a to 1c with an adhesive (first lens fixing step).

Further, the spot size of the beam emitted from the second lens 111, 121, 131 is adjusted by moving the second lens portions 110, 120, and 130 within the second lens holding recesses 1d to 1f, respectively (the first). Beam focused divergence adjustment process with two lenses). Then, the second lens portions 110, 120, and 130 are fixed to the adjusted positions in the second lens holding recesses 1d to 1f with an adhesive (second lens fixing step).

The lens position is adjusted as follows. First, with the semiconductor lasers 210, 220, and 230 lit, the positions of the first lenses 11, 21, and 31 are roughly adjusted in the y direction to match the emission positions of the laser light. After that, the beam spot size of the laser beam is adjusted by adjusting the positions of the second lenses 111, 121, 131. Further, the positions of the first lenses 11, 21, and 31 are finely adjusted to adjust the direction of the laser beam. In this adjustment, it is possible to reduce the relative optical axis deviation of the plurality of laser beams in which the laser beams emitted from the second lenses 111, 121, and 131 are combined by the composite prism 4. Thereby, the relative angle deviation of each laser beam after the combined wave can be easily adjusted by adjusting the x-direction and the y-direction of the first lenses 11, 21, 31.

The position adjustment of the first lenses 11, 21, 31 and the position adjustment of the second lenses 111, 121, 131 are not limited to the above procedure, and either of them may be performed first or may be performed at the same time.

In this way, the light source device 100 is manufactured.

Since the first lens portions 10, 20, and 30 are directly fixed to the housing 1 (sliding surfaces 1aa, 1ba, 1ca of the first lens holding recesses 1a to 1c), the first lens holders 12, 22, 33 Each fixed surface of the lens is substantially perpendicular to the emission direction of the laser beam. Therefore, the heat of the laser beam is easily transmitted to the first lens portions 10, 20, and 30, which affects the adhesiveness of the adhesive. Therefore, a material having a thermal conductivity lower than that of the housing 1 is inserted between the housing 1 and the first lens portions 10, 20, and 30 instead of directly in the housing 1. Thereby, the influence of heat can be reduced, and the influence of heat on the adhesiveness of the adhesive can be reduced.

<Adjusting the position of the first lens>
Subsequently, the position adjustment (optical axis adjustment step) of the first lenses 11, 2, and 31 will be described in detail.

FIG. 9 is a perspective view showing the posture of the housing 1 in the lens adjusting method according to the second embodiment. FIG. 10 is a perspective view showing an external configuration of the first lens holder 12 suitable for the lens adjusting method. FIG. 11A is a cross-sectional view of a main part showing a state in which the first lens holder 12 is held by the chucking mechanism 5 and the clamp mechanism 6. FIG. 11B is a cross-sectional view of a main part showing a state in which the first lens holder 12 is moved by the chucking mechanism 5 and the clamp mechanism 6. FIG. 12A is a cross-sectional view of a main part showing a state in which the first lens holder 12 is moved. FIG. 12B is a cross-sectional view of a main part showing a state in which the first lens holder 12 is returned to the reference position. FIG. 13A is a cross-sectional view of a main part showing the first lens holder holding structure used in the present embodiment. FIG. 13B is a cross-sectional view of a main part showing another first lens holder holding structure used in the present embodiment.

The positions of the first lenses 11, 21, and 31 may be adjusted when the bottom surface of the housing 1 is parallel to the horizontal plane, but as shown in FIG. 9, the housing 1 is tilted with respect to the horizontal plane. It may be carried out, or it may be carried out in a state where the housing 1 is erected perpendicular to the horizontal plane. When the housing 1 is tilted with respect to the horizontal plane, the tilt angle is 30 ° or more and less than 90 °.

Hereinafter, the position adjustment of the first lens 11 will be described as a representative. The position adjustment of the other first lenses 21 and 31 will be omitted, but will be performed in the same manner as the position adjustment of the first lens 11.

First, the first lens portion 10 is arranged in the first lens holding recess 1a. At this time, the fixed surface (surface on the semiconductor laser 210 side) fixed to the first lens holding recess 1a of the first lens holder 12 in the first lens unit 10 is pressed against the sliding surface 1aa shown in FIG. Here, by tilting the housing 1 or standing it vertically, gravity acts on the first lens holder 12 so that the housing 1 falls toward the sliding surface 1aa.

Further, the first lens holder 12 is pressed against the sliding surface 1aa with a jig such as a spring or a pressing rod. Alternatively, as shown in FIG. 10, a contact plate 14 is provided on both side end faces of the first lens holder 12, and a spring is pressed against the contact plates 14 to form the first lens holder 12. A spring may be pressed against the sliding surface 1aa. By pressing the lens holder 12 in this way, it is possible to prevent the first lens holder 12 from moving in the z direction and perform stable adjustment.

In this state, the first lens holder 12 is arranged at the reference position shown in FIG. 11A while turning on the semiconductor laser 210. At the reference position (reset position), the bottom surface 12a of the first lens holder 12 and the bottom surface of the housing 1 are on the same plane, and the position of the first lens holder 12 in the x coordinate is 0.

From this state, as shown in FIG. 11A, the pair of chuck surfaces 5a of the chucking mechanism 5 press the inclined surfaces 12c on both sides of the upper portion of the first lens holder 12 from above, and the clamp mechanism 6 presses from below. Hold the bottom surface 12a of the first lens holder 12. Then, as shown in FIG. 11B, the chucking mechanism 5 and the clamp mechanism 6 are moved in the y direction (arrow direction) while the first lens holder 12 is held down so as not to be displaced, and further chucked. The mechanism 5 and the clamp mechanism 6 are moved in the x direction.

In this way, the positions of the first lens 11 in the y-direction and the x-direction are adjusted by moving the first lens portion 10 while pressing it against the sliding surface 1aa. The order of position adjustment in the y-direction and the x-direction may be reversed. Further, when moving the first lens unit 10, the semiconductor laser 210 is turned on.

The structure of the chucking mechanism 5 and the clamp mechanism 6 is not limited to the structure shown in FIG. 11 as long as the first lens holder 12 can be sandwiched.

When the direction of the laser beam is determined when the first lens unit 10 is at the position shown in FIG. 12A, the position adjustment (coarse adjustment) of the first lens 11 in the y direction is completed. When this position adjustment ends unsuccessfully and it becomes difficult to continue the position adjustment, the position adjustment can be restarted by returning the first lens unit 10 to the reference position shown in FIG. 12 (b).

The configurations shown in FIGS. 13 (a) and 13 (b) will be described as examples of the other housings 7 and 8.

In the configuration shown in FIG. 13A, the housing 7 is provided with the first lens holding recess 7a. The pair of bottom portions 7b of the first lens holding recess 7a have a predetermined thickness. Further, the space between the bottoms 7b is open. In such a configuration, the first lens portion 10 rides on the bottom portion 7b. Therefore, the first lens portion 10 cannot be brought closer to the bottom surface of the housing 7.

On the other hand, in the configuration shown in FIG. 13B, the housing 8 is provided with the first lens holding recess 8a. The pair of bottom portions 8b of the first lens holding recess 8a has a partially inclined surface, but also has a portion having a predetermined thickness. Further, the space between the bottom 8b is open. Even in such a configuration, the first lens portion 10 rides on the bottom portion 8b. Therefore, the first lens portion 10 cannot be brought closer to the bottom surface of the housing 8.

As described above, in the above configuration, the range of motion of the first lens unit 10 in the y direction is narrow, so that the position adjustment range in the y direction is narrow. Therefore, if the thickness (size in the y direction) of the housings 7 and 8 is reduced in order to reduce the thickness of the light source device, the position adjustment range in the y direction becomes narrower.

On the other hand, in the light source device 100 according to the first and second embodiments, the range of motion of the first lens unit 10 can be extended to the bottom surface of the housing 1. As a result, by reducing the thickness of the light source device 100, it is possible to secure a wide position adjustment range in the y direction even if the thickness of the housing 1 is reduced.

<Adjusting the position of the second lens>
The adjustment of the spot size of the beams emitted from the second lenses 111, 121, 131 (beam convergence / divergence adjustment step) is different from the adjustment of the first lenses 11, 21, 31 and the bottom surface of the housing 1 is parallel to the horizontal plane. Do it in the state.

First, the second lens portions 110, 120, and 130 are arranged in the second lens holding recesses 1d to 1f, respectively. At this time, the second lens portions 110, 120, 130 are arranged so that the bottom surfaces of the second lens holders 112, 122, 132 are in contact with the inclined support surfaces 1da, 1ea, and 1fa shown in FIG. 5, respectively.

In this state, the second lens portions 110, 120, 130 are moved in the z direction. At this time, the second lens unit 110 can be moved by pressing the pressing plate 114 shown in FIG. 6B against the vertical surface 112a in the direction of the arrow in the second lens unit 110. Similarly, the second lens portions 120 and 130 are also moved. As a result, the second lens portions 110, 120, and 130 slide on the inclined support surfaces 1da, 1ea, and 1fa, respectively.

In the present embodiment, the first lens units 10, 20, and 30 near the light source are provided with an optical axis adjustment function, and the second lens units 110, 120, 130 far from the light source are provided with a beam convergence and divergence adjustment function. There is. In this way, it is the first lens 11, which is closer to the light source than the second lenses 111, 121, 131, that divides the adjustment function between the first lens portions 10, 20, 30 and the second lens portions 110, 120, 130. This is because the sensitivity can be relaxed and the adjustment is easier if the optical axis is adjusted by 21 and 31. However, the first lens units 10, 20 and 30 may be provided with a beam focusing / divergence adjusting function, and the second lens units 110, 120 and 130 may be provided with an optical axis adjusting function.

<Adjustment of relative deviation of multiple optical axes>
The laser light emitted from the second lens portions 110, 120, 130 is combined by the composite prism 4. When the optical axes of the plurality of combined laser beams are relatively deviated, for example, only the first lens portion 10 is slid again in the x direction or the y direction. By adjusting the optical axes of the first lenses 11, 21, and 31 again in this way, it is possible to make adjustments so as to eliminate the relative deviation of the optical axes of the plurality of combined laser beams. In this adjustment, since it is not necessary to readjust the second lens portions 110, 120, 130, simpler and more accurate adjustment is possible.

<Collision prevention between the 1st lens part and the 2nd lens part>
In the light source device 100, in order to obtain a desired light emitting point required in the market, two first lenses 11, 21, 31 and two second lenses 111, for each of the semiconductor lasers 210, 220, and 230, 121 and 131 are used. Therefore, it is highly likely that the distance between the exit surface of the first lens portions 10, 20, and 30 and the incident surface of the second lens portions 110, 120, 130 corresponding to each is 1 mm or less. .. When the distance is 1 mm or less, there is a possibility that the first lens portions 10, 20, 30 and the second lens portions 110, 120, 130 may collide with each other when sliding. In order to prevent the second lenses 111, 121, and 131 from coming into contact with the first lens portions 10, 20, and 30, respectively, due to such a collision, the light source device 100 employs the following structure.

The end faces (first end faces) of the first lens holders 12, 22 and 32 on the light emitting side are spaced apart from the top of the convex faces (faces on the light emitting side) of the first lenses 11 and 21, 31 in the z direction, respectively. It is provided in the future. In the region of the predetermined interval, the first lens apertures 13, 23, 33 are arranged at positions receded from the end faces on the light emitting side of the first lens holders 12, 22, 32 to the light incident side. As a result, a step is formed between the end faces of the first lens apertures 13, 23, 33 on the light emitting side and the end faces of the first lens holders 12, 22, 32 protruding from the respective end faces to the light emitting side.

Specifically, as shown in FIG. 10, a step 12d is formed between the end face of the first lens aperture 13 on the light emitting side and the end face of the first lens holder 12 projecting from the end face to the light emitting side. Further, as shown in FIG. 2D, a step 22d is formed between the end face of the first lens aperture 23 on the light emitting side and the end face of the first lens holder 22 protruding from the end face to the light emitting side. .. Although not shown, a step is also formed between the end face of the first lens aperture 33 on the light emitting side and the end face of the first lens holder 32 protruding from the end face to the light emitting side.

On the other hand, the end faces (second end faces) of the second lens holders 112, 122, 132 on the light incident side are formed so as to face the end faces of the first lens holders 12, 22, 32 on the light emitting side, respectively. Further, the flat surfaces of the second lenses 111, 121, and 131 on the light incident side are arranged so as to face the end surfaces of the first lens apertures 13, 23, and 33 on the light emitting side, respectively.

With such a structure, even if the first lens portions 10, 20, 30 and the second lens portions 110, 120, 130 collide with each other during sliding, the light incident on the second lens holders 112, 122, 132 The end faces on the side collide with the end faces on the light emitting side of the first lens holders 12, 22, and 32, respectively. However, since the first lens apertures 13, 23, 33 are located at positions retracted to the light incident side from the end faces of the first lens holders 12, 22, 32 on the light incident side, the second lenses 111, 121, 131 are moved. It does not come into contact with the first lens apertures 13, 23, 33.

In the above structure, the first lens portions 10, 20 and 30 are provided with steps, but the second lens portions 110, 120 and 130 may be provided with steps. Further, steps may be provided on both the first lens portions 10, 20, 30 and the second lens portions 110, 120, 130. Here, the steps in the second lens portions 110, 120, 130 are such that the light incident surfaces (flat surfaces) of the second lenses 111, 121, 131 are the end surfaces of the second lens holders 112, 122, 132 on the light incident side, respectively. It is formed by arranging it at a position retreating to the light emitting side.

<Effect of embodiment>
In the method for manufacturing the light source device 100 according to the present embodiment, the positions of the semiconductor lasers 210, 220, and 230 are individually adjusted by the first lenses 11, 21, 31 and the second lenses 111, 121, 131, respectively. And fix it with adhesive. Specifically, the first lenses 11, 21, and 31 are fixed after adjusting the positions in the x and y directions, and the second lenses 111, 121 and 131 are adjusted in the z direction. Fix after going.

As a result, it is possible to prevent the positions of the first lenses 11,21,31 from shifting in the z direction due to shrinkage due to curing of the adhesive after the position adjustment of the first lenses 11,21,31. Further, it is possible to prevent the positions of the second lenses 111, 121, 131 from being displaced in the x-direction and the y-direction due to shrinkage due to curing of the adhesive after the position adjustment of the second lenses 111, 121, 131.

In this way, the positions of the first lenses 11, 21, 31 and the second lenses 111, 121, 131 can be prevented from affecting the positions in directions unrelated to the respective position adjustment directions. Therefore, as compared with the conventional light source device having only one lens for one semiconductor laser, the method of fixing the lens with the adhesive after adjusting the position of the lens in the three-dimensional direction, the adhesive The influence of curing shrinkage on the position of the lens can be reduced. Moreover, the amount of the adhesive applied can be reduced as compared with the conventional method.

Further, the beam direction of the laser beam can be changed by displacing the first lenses 11, 21, and 31 in the x-direction and the y-direction. Further, the beam spot size of the laser beam can be adjusted by moving the second lenses 111, 121, 131 in the z direction. As a result, it is possible to facilitate fine adjustment of the relative optical axis deviation when white light is generated by combining the laser beams of the respective wavelengths of the semiconductor lasers 210, 220, and 230.

〔summary〕
The light source device according to the first aspect of the present invention includes the semiconductor lasers 210, 220, 230, the first lens portions 10, 20, 30 and the second lens portions 110, 120, 130, and the semiconductor lasers 210, 220, 230. A housing 1 for holding the first lens portions 10, 20, 30 and the second lens portions 110, 120, 130 is provided, and the housing 1 is fixed to the first lens portions 10, 20, 30. It has a first surface (sliding surfaces 1aa, 1ba, 1ca) and a second surface (tilted support surfaces 1da, 1ea, 1fa) to which the second lens portions 110, 120, 130 are fixed. The first surface is perpendicular to the direction of the optical axis of the semiconductor lasers 210, 220, 230 and is wider than the first fixed surface fixed to the first surface of the first lens portions 10, 20, 30. The second surface is parallel to the direction of the optical axis and is wider than the second fixed surface fixed to the second surface of the second lens portions 110, 120, 130.

According to the above configuration, in order to adjust the optical axis of the first lens, the first lens can be moved in the direction perpendicular to the optical axis on the first surface, and the beam emitted from the second lens. The second lens can be moved in a direction parallel to the optical axis on the second surface in order to adjust the spot size of the lens. As a result, the first lens and the second lens can be moved in different directions when the optical axis of the first lens is adjusted and when the spot size of the beam emitted from the second lens is adjusted. Therefore, it is possible to prevent the position from being affected in the direction unrelated to the optical axis adjustment direction and the beam spot size adjustment direction. Therefore, it is possible to reduce the influence on the position of the lens due to the curing shrinkage of the adhesive.

In the light source device according to the second aspect of the present invention, in the first aspect, the first lens portions 10, 20, 30 are fixed to the first surface by an adhesive, and the second lens portions 110, 120, 130 are the same. It may be fixed to the second surface by an adhesive.

According to the above configuration, when the adhesive fixing the first lens is cured after the position adjustment of the first lens, the adhesive shrinks mainly in the z direction, but hardly shrinks in the x direction and the y direction. Therefore, the deviation of the optical axis at the time of curing shrinkage can be prevented. Further, after adjusting the position of the second lens, when the adhesive fixing the second lens is cured, it mainly shrinks in the y direction, but hardly shrinks in the z direction. Therefore, it is possible to prevent the spot size of the beam emitted from the second lens from shifting during curing shrinkage.

In the light source device according to the third aspect of the present invention, in the first or second aspect, the second surface is parallel to the optical axis and supports the second lens portions 110, 120, 130. It may be formed.

According to the above configuration, when adjusting the optical axis of the second lens, the second lens holder can be moved in a direction parallel to the optical axis.

In the light source device according to the fourth aspect of the present invention, in any one of the first to third aspects, the first lens portions 10, 20, and 30 have the first lens 11,21,31 and the first lens 11,21. , 31 is provided with a first lens holder (first lens holders 12, 22, 32), and the second lens portions 110, 120, 130 have the second lenses 111, 121, 131 and the first lens portion 110, 120, 130. It has a second lens holder (second lens holder 112, 122, 132) that holds the two lenses 111, 121, 131, and has a first end surface of the first lens holder on the light emitting side and the second lens. A structure in which the second end surface of the holder on the light incident side faces the second end surface, and the optical components including the first lenses 11, 21, and 31 are arranged at positions receded from the first end surface on the light incident side. The optical component including the second lenses 111, 121, 131 may include at least one of the structures arranged at a position recessed from the second end surface to the light emitting side.

When the first lens holder and the second lens holder are moved to adjust the positions of the optical components, the first lens, and the second lens, the first lens holder and the second lens holder collide with each other. However, the first end surface of the first lens holder and the second end surface of the second lens holder collide with each other. However, it is possible to prevent the optical component including the first lens from coming into contact with the second lens holder. Further, the optical component including the second lens can be prevented from coming into contact with the first lens holder.

In the light source device according to the fifth aspect of the present invention, in any one of the first to fourth aspects, the housing 1 includes the first surface and holds the first lens portions 10, 20, and 30. It has lens holding recesses 1a, 1b, 1c, and the first lens holding recesses 1a, 1b, 1c have facing surfaces (inclined surfaces 1k) facing the lower portions of the first lens portions 10, 20, 30. You may have.

According to the above configuration, by supporting the first lens holder on the support surface, the first lens holder can be held without falling from the first lens holding recess.

In the light source device according to the sixth aspect of the present invention, in the fifth aspect, the facing surface may be inclined with respect to the bottom portion of the housing 1.

According to the above configuration, the first lens portion can be guided to the bottom portion of the housing along the inclined surface. As a result, if the bottom of the housing is set to the reference position with the starting point of the optical axis adjustment of the first lens as the reference position, the first lens portion can be returned to the reference position. Further, even if the optical axis adjustment of the first lens is unsuccessful, the optical axis adjustment of the first lens can be easily restarted by returning the first lens portion to the reference position.

In the method for manufacturing a light source device according to aspect 7 of the present invention, a first lens holder (first lens holders 12, 22, 32) for holding the first lenses 11, 21, 31 is provided in the housing 1. The first lens optical axis that adjusts the optical axis of the first lens 11, 21, 31 with respect to the optical axis of the semiconductor laser (210, 220, 230) by sliding on one surface (sliding surfaces 1aa, 1ba, 1ca). An adjustment step, a first lens fixing step of fixing the first lens holder to the first surface, and a second lens holder holding the second lenses 111, 121, 131 (second lens holders 112, 122, 132) is slid on the second surface (inclined support surfaces 1da, 1ea, 1fa) provided in the housing 1, and the second lenses 111, 121 with respect to the optical axis of the semiconductor laser (210, 220, 230). , 131 includes a beam convergence / divergence adjustment step of adjusting the spot size of the beam emitted from 131, and a second lens fixing step of fixing the second lens holder to the second surface.

According to the above configuration, the adjustment of the optical axis by the first lens and the adjustment of the beam spot size by the second lens can be performed independently.

In the method of manufacturing the light source device according to the eighth aspect of the present invention, in the seventh aspect, the first lens holder is slid on the first surface perpendicular to the optical axis in the first lens optical axis adjustment step. Then, in the beam convergence / divergence adjustment step, the second lens holder may be slid on the second surface parallel to the optical axis.

According to the above configuration, the optical axis of the first lens can be adjusted in the direction perpendicular to the optical axis in the first lens optical axis adjustment step, and the second lens is adjusted to the optical axis in the beam convergence / divergence adjustment step. Can be adjusted in a direction parallel to.

The method for manufacturing the light source device according to the ninth aspect of the present invention is the state in which the housing 1 is tilted with respect to the horizontal plane or the housing 1 is tilted with respect to the horizontal plane in the first lens optical axis adjusting step in the above aspect 7 or 8. The first lens holder may be slid in a state of being arranged perpendicular to the horizontal plane.

According to the above configuration, since gravity acts on the first lens holder, the first lens holder can be dropped onto the first surface. As a result, the first lens holder can be easily slid on the first surface.

In the method for manufacturing a light source device according to the tenth aspect of the present invention, in any one of the seventh to ninth aspects, the light source device includes a plurality of the semiconductor lasers, the first lens optical axis adjusting step, and the beam convergence / divergence adjustment. After the step, the first lens optical axis adjusting step may be performed again in order to adjust the deviation of the optical axes of the plurality of combined beams from the plurality of semiconductor lasers.

According to the above configuration, by performing the first lens optical axis adjustment step again, the deviation of the optical axes of the plurality of combined beams can be adjusted, so that the second lens portions 110, 120, and 130 are adjusted again. There is no need. Therefore, simpler and more accurate adjustment is possible.

[Additional notes]
The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims, and the embodiments obtained by appropriately combining the technical means disclosed in the different embodiments. Is also included in the technical scope of the present invention. Furthermore, new technical features can be formed by combining the technical means disclosed in each embodiment.

1 Housing 1a, 1b, 1c First lens holding recess 1aa, 1ba, 1ca Sliding surface (first surface)
1da, 1ea, 1fa inclined support surface (second surface)
1k inclined surface (opposing surface)
11,21,32 1st lens 12,22,32 1st lens holder (1st lens holder)
100 Light source device 111,121,131 Second lens 112,122,132 Second lens holder (second lens holder)
210, 220, 230 semiconductor laser

Claims (10)

With a semiconductor laser
With the first lens part
With the second lens part
A housing that holds the semiconductor laser, the first lens portion, and the second lens portion is provided.
The housing includes a first surface to which the first lens portion is fixed, and includes a first lens holding recess for holding the first lens portion and a second surface to which the second lens portion is fixed. And has a second lens holding recess for holding the second lens portion.
The first surface is perpendicular to the direction of the optical axis of the semiconductor laser and is wider than the first fixed surface fixed to the first surface of the first lens portion.
The second surface is parallel to the direction of the optical axis and is wider than the second fixed surface fixed to the second surface of the second lens portion.
The first lens holding recess and the second lens holding recess are connected to each other.
The lower surface side of the first lens holding recess is open, and the first lens portion can be arranged.
Said second lens holding recess, the light source device lower surface to the opened portion and is open so as to be continuous, and wherein the deployable der Rukoto the second lens portion of the first lens holding recess .. The first lens portion is fixed to the first surface with an adhesive, and is fixed to the first surface.
The light source device according to claim 1, wherein the second lens portion is fixed to the second surface by an adhesive. The light source device according to claim 1 or 2, wherein the second surface is parallel to the optical axis and is formed so as to support the second lens portion. The first lens unit has a first lens and a first lens holder that holds the first lens.
The second lens unit has a second lens and a second lens holder that holds the second lens.
The first end surface of the first lens holder on the light emitting side and the second end surface of the second lens holder on the light incident side face each other.
The optical component including the first lens has a structure that is arranged at a position retracted to the light incident side from the first end surface, and the optical component including the second lens is located on the light emitting side from the second end surface. The light source device according to any one of claims 1 to 3, further comprising at least one of structures arranged in a retracted position. The light source device according to any one of claims 1 to 4, wherein the first lens holding recess has a facing surface facing the lower portion of the first lens portion. The light source device according to claim 5, wherein the facing surface is inclined with respect to the bottom portion of the housing. The first lens holder that holds the first lens is slid on the first surface provided in the housing of the first lens holding recess that holds the first lens holder with respect to the optical axis of the semiconductor laser. The first lens optical axis adjustment step for adjusting the optical axis of the first lens, and
A first lens fixing step of fixing the first lens holder to the first surface, and
A second lens holder provided in the housing, which has a second lens holder for holding the second lens and a second lens holding recess that holds the second lens holder and is connected to the first lens holding recess. A beam focusing / divergence adjustment step of sliding on a surface to adjust the spot size of the beam emitted from the second lens, and
Look including a second lens fixing step of fixing the second lens holding member on said second surface,
The lower surface side of the first lens holding recess is open, and the first lens holding body can be arranged.
The light source device is characterized in that the lower surface side of the second lens holding recess is open so as to be continuous with the opened portion of the first lens holding recess, and the second lens holder can be arranged. Manufacturing method. In the first lens optical axis adjusting step, the first lens holder is slid on the first surface perpendicular to the optical axis.
The method for manufacturing a light source device according to claim 7, wherein in the beam focusing / divergence adjusting step, the second lens holder is slid on the second surface parallel to the optical axis. In the first lens optical axis adjustment step
7. Manufacturing method of light source device. The light source device includes a plurality of the semiconductor lasers.
After the first lens optical axis adjustment step and the beam convergence divergence adjustment step,
One of claims 7 to 9, wherein the first lens optical axis adjusting step is performed again in order to adjust the deviation of the optical axes of the plurality of beams combined from the plurality of semiconductor lasers. The method for manufacturing a light source device according to.

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