JP6970629B2 - Pumping equipment and substrate processing equipment - Google Patents

Description

The present invention relates to a semiconductor substrate, a substrate for FPD (Flat Panel Display) such as a liquid crystal display device and an organic EL (electroluminescence) display device, a glass substrate for a photomask, a substrate for an optical disk, a substrate for a magnetic disk, a ceramic substrate, and a solar cell. The present invention relates to a pump device for sending a chemical solution supplied to a substrate such as an electroluminescence board and a board processing device provided with the pump device.

Conventional pumping devices include a cylinder, a piston housed in the cylinder and reciprocated, and a rolling diaphragm that increases or decreases the volume in the chamber for delivering the drug solution. The central part (liquid pushing part) of the rolling diaphragm is attached to the piston. On the other hand, the peripheral edge of the rolling diaphragm is attached to the inner wall of the cylinder. The rolling diaphragm is deformed as the piston reciprocates, thereby increasing or decreasing the volume in the chamber (see, for example, Patent Document 1).

A U-shaped folded tubular portion formed by folding the film of the rolling diaphragm is arranged between the piston and the inner wall of the cylinder. As a result, the moving distance of the piston can be increased, so that a larger amount of the chemical solution can be sent. Further, since the gap between the piston and the inner wall of the cylinder is narrow due to the folded cylindrical portion of the rolling diaphragm, the volume in the chamber can be changed in proportion to the amount of movement of the piston. Therefore, it is also excellent in terms of quantitativeness.

Japanese Unexamined Patent Publication No. 2007-23935

However, such a conventional device has the following problems. The U-shaped folded tubular part is narrow and deep. Therefore, the overlapping portion (particularly the roll portion at the bottom of the folded tubular portion) has poor fluidity of the chemical solution, that is, poor liquid replaceability. Therefore, if the chemical solution solidified in the folded tubular portion is chewed, it is difficult to wash it out. Further, if the chemical solution solidified in the folded tubular portion is contained in the chemical solution in the chamber, the cleanliness of the chemical solution may be deteriorated.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a pump device and a substrate processing device capable of maintaining the cleanliness of a chemical solution.

The present invention has the following configuration in order to achieve such an object.
That is, the pump device according to the present invention is a rolling diaphragm that partitions a storage unit that stores the chemical liquid, a movable member that reciprocates in the storage unit, and a storage space that stores the chemical liquid in the storage unit, and is movable. The liquid pushing portion attached to the tip portion of the member, the ring-shaped peripheral edge portion attached to the inner peripheral wall of the accommodating portion, and the liquid pushing portion and the ring-shaped peripheral edge portion are connected and more than the ring-shaped peripheral edge portion. The rolling diaphragm having a folded tubular portion having an overlapping portion formed by folding back at a position in the suction moving direction of the movable member is provided, and the liquid pushing portion is provided at a preset end position in the extrusion moving direction. The volume of the accommodation space when is present is 49 cc or less, and the width of the gap of the overlapping portion of the folded tubular portion is 1/20 or more and 1/6 or less of the width of the liquid pushing portion. Ah is, the receiving portion includes an inlet for flowing the chemical liquid into the receiving space, and a flow outlet for flow out the chemical from the accommodating space, each said inlet and said outlet is of the folded tubular portion It is characterized in that it is provided so as to be inclined on the inner peripheral wall of the accommodating portion so as to face the roll portion side.

According to the pump device according to the present invention, the rolling diaphragm includes a liquid pushing portion, a ring-shaped peripheral edge portion, and a folded tubular portion connecting the liquid pushing portion and the ring-shaped peripheral edge portion. The folded tubular portion has an overlapping portion formed by folding. When the volume of the accommodation space is 49 cc or less, the width of the gap of the overlapping portion of the folded tubular portion is 1/20 or more and 1/6 or less of the width of the liquid pushing portion. If it is within that range, the chemical solution can easily flow into the folded tubular portion. Further, since the turbulence of the chemical solution flow due to the vortex is suppressed, the chemical solution can flow relatively smoothly from the inlet to the outlet. That is, the liquid replaceability of the folded tubular portion is improved. Therefore, it is possible to prevent the chemical solution from solidifying and being mixed into the chemical solution, and to maintain the cleanliness of the chemical solution.
Further, the inflow port and the outflow port are each provided so as to be inclined on the inner peripheral wall of the accommodating portion so as to face the roll portion side of the folded cylindrical portion. As a result, the chemical solution can be easily distributed to the folded tubular portion. The liquid replaceability of the folded portion is further improved.

Further, the pump device according to the present invention is a rolling diaphragm that partitions a storage unit that stores a chemical solution, a movable member that reciprocates in the storage unit, and a storage space that stores the chemical solution in the storage unit, and is movable. The liquid pushing portion attached to the tip portion of the member, the ring-shaped peripheral edge portion attached to the inner peripheral wall of the accommodating portion, and the liquid pushing portion and the ring-shaped peripheral edge portion are connected and more than the ring-shaped peripheral edge portion. The rolling diaphragm having a folded tubular portion having an overlapping portion formed by folding back at a position in the suction moving direction of the movable member is provided, and the liquid pushing portion is provided at a preset end position in the extrusion moving direction. The volume of the accommodation space when is present is 0.46 cc or more and 1.5 cc or less, and the width of the gap of the overlapping portion of the folded tubular portion is 1/30 of the width of the liquid pushing portion. Ri der 1/5 or more, the receiving portion includes an inlet for flowing the chemical liquid into the receiving space, and a outflow port for flowing out the liquid medicine from the accommodating space, wherein the inlet and the outlet each, It is characterized in that it is provided so as to be inclined on the inner peripheral wall of the accommodating portion so as to face the roll portion side of the folded tubular portion.

According to the pump device according to the present invention, the rolling diaphragm includes a liquid pushing portion, a ring-shaped peripheral edge portion, and a folded tubular portion connecting the liquid pushing portion and the ring-shaped peripheral edge portion. The folded tubular portion has an overlapping portion formed by folding. When the volume of the accommodation space is 0.46 cc or more and 1.5 cc or less, the width of the gap of the overlapping portion of the folded tubular portion is 1/30 or more and 1/5 or less of the width of the liquid pushing portion. If it is within that range, the chemical solution can easily flow into the folded tubular portion. Further, since the turbulence of the chemical solution flow due to the vortex is suppressed, the chemical solution can flow relatively smoothly from the inlet to the outlet. That is, the liquid replaceability of the folded tubular portion is improved. Therefore, it is possible to prevent the chemical solution from solidifying and being mixed into the chemical solution, and to maintain the cleanliness of the chemical solution.
Further, the inflow port and the outflow port are each provided so as to be inclined on the inner peripheral wall of the accommodating portion so as to face the roll portion side of the folded cylindrical portion. As a result, the chemical solution can be easily distributed to the folded tubular portion. The liquid replaceability of the folded portion is further improved.

Further, in the above-mentioned pump device, when the liquid pushing portion is present at a preset end position in the pushing movement direction, the width of the gap of the overlapping portion of the folded tubular portion is the width of the liquid pushing portion. It is preferable that the width of the gap between the liquid pushing portion and the inner wall of the accommodating portion facing the liquid pushing portion is larger than the width of the gap. As a result, the chemical solution is more likely to flow in the gap of the overlapping portion than in the gap between the liquid pushing portion and the inner wall of the accommodating portion in the moving direction of the liquid pushing portion. Therefore, the liquid replaceability of the folded tubular portion is improved.

Further, the substrate processing apparatus according to the present invention includes a holding portion for holding the substrate, a nozzle for discharging the chemical liquid to the substrate held by the holding portion, and a pump device for sending the chemical liquid to the nozzle. The pump device is a rolling diaphragm that partitions a storage unit that stores a chemical solution, a movable member that reciprocates in the storage unit, and a storage space that stores the chemical solution in the storage unit, and is a tip of the movable member. The liquid pushing portion attached to the portion, the ring-shaped peripheral edge portion attached to the inner peripheral wall of the accommodating portion, and the liquid pushing portion and the ring-shaped peripheral edge portion are connected to each other, and the movable member is more than the ring-shaped peripheral edge portion. The rolling diaphragm having a folded tubular portion having an overlapping portion formed by folding back at a position in the suction moving direction of the above, and the liquid pushing portion is present at a preset end position in the extrusion moving direction. and the volume of the accommodating space when that is not more than 49cc, the overlapping portion of the width of the gap of the folded tubular part state, and are 1/20 1/6 or less of the width of the liquid pushing portion, The accommodating portion includes an inflow port for flowing the drug solution into the accommodating space and an outlet for discharging the drug solution from the accommodating space, and the inlet and the outlet are each on the roll portion side of the folded tubular portion. It is characterized in that it is provided so as to be inclined on the inner peripheral wall of the accommodating portion so as to face toward.

According to the substrate processing apparatus according to the present invention, the rolling diaphragm of the pump device includes a liquid pushing portion, a ring-shaped peripheral edge portion, and a folded tubular portion connecting the liquid pushing portion and the ring-shaped peripheral edge portion. .. The folded tubular portion has an overlapping portion formed by folding. When the volume of the accommodation space is 49 cc or less, the width of the gap of the overlapping portion of the folded tubular portion is 1/20 or more and 1/6 or less of the width of the liquid pushing portion. If it is within that range, the chemical solution can easily flow into the folded tubular portion. Further, since the turbulence of the chemical solution flow due to the vortex is suppressed, the chemical solution can flow relatively smoothly from the inlet to the outlet. That is, the liquid replaceability of the folded tubular portion is improved. Therefore, it is possible to prevent the chemical solution from solidifying and being mixed into the chemical solution, and to maintain the cleanliness of the chemical solution.
Further, the inflow port and the outflow port are each provided so as to be inclined on the inner peripheral wall of the accommodating portion so as to face the roll portion side of the folded cylindrical portion. As a result, the chemical solution can be easily distributed to the folded tubular portion. The liquid replaceability of the folded portion is further improved.

Further, the substrate processing apparatus according to the present invention includes a holding portion for holding the substrate, a nozzle for discharging the chemical liquid to the substrate held by the holding portion, and a pump device for sending the chemical liquid to the nozzle. The pump device is a rolling diaphragm that partitions a storage unit that stores a chemical solution, a movable member that reciprocates in the storage unit, and a storage space that stores the chemical solution in the storage unit, and is a tip of the movable member. The liquid pushing portion attached to the portion, the ring-shaped peripheral edge portion attached to the inner peripheral wall of the accommodating portion, and the liquid pushing portion and the ring-shaped peripheral edge portion are connected to each other, and the movable member is more than the ring-shaped peripheral edge portion. The rolling diaphragm having a folded tubular portion having an overlapping portion formed by folding back at a position in the suction moving direction of the above, and the liquid pushing portion is present at a preset end position in the extrusion moving direction. The volume of the accommodating space is 0.46 cc or more and 1.5 cc or less, and the width of the gap of the overlapping portion of the folded tubular portion is 1/30 or more and 1/30 or more of the width of the liquid pushing portion. 5 Ri der below the receiving portion includes an inlet for flowing the chemical liquid into the receiving space, and a outflow port for flowing out the liquid medicine from the accommodating space, each said inlet and said outlet, said folded tube It is characterized in that it is provided so as to be inclined on the inner peripheral wall of the accommodating portion so as to face the roll portion side of the shaped portion.

According to the pump device according to the present invention, the rolling diaphragm of the pump device includes a liquid pushing portion, a ring-shaped peripheral edge portion, and a folded tubular portion connecting the liquid pushing portion and the ring-shaped peripheral edge portion. The folded tubular portion has an overlapping portion formed by folding. When the volume of the accommodation space is 0.46 cc or more and 1.5 cc or less, the width of the gap of the overlapping portion of the folded tubular portion is 1/30 or more and 1/5 or less of the width of the liquid pushing portion. If it is within that range, the chemical solution can easily flow into the folded tubular portion. Further, since the turbulence of the chemical solution flow due to the vortex is suppressed, the chemical solution can flow relatively smoothly from the inlet to the outlet. That is, the liquid replaceability of the folded tubular portion is improved. Therefore, it is possible to prevent the chemical solution from solidifying and being mixed into the chemical solution, and to maintain the cleanliness of the chemical solution.
Further, the inflow port and the outflow port are each provided so as to be inclined on the inner peripheral wall of the accommodating portion so as to face the roll portion side of the folded cylindrical portion. As a result, the chemical solution can be easily distributed to the folded tubular portion. The liquid replaceability of the folded portion is further improved.

According to the pump device and the substrate processing device according to the present invention, the cleanliness of the chemical solution can be maintained.

It is a schematic block diagram of the substrate processing apparatus which concerns on Example. It is a vertical cross-sectional view which shows the pump device of an Example when the liquid pushing part of a rolling diaphragm exists at a preset end position in the pushing movement direction. It is a vertical cross-sectional view which shows the pump device of an Example when the liquid pushing part of a rolling diaphragm exists at the position in the suction moving direction. (A) is a perspective view of a fluid analysis model, and (b) is a fluid analysis model having a ratio of 1:20. (A) is a fluid analysis model having a ratio of 1:10, and (b) is a fluid analysis model having a ratio of 1: 5. It is a table which shows the fluid analysis result of a standard size. It is a table which shows the fluid analysis result of half size. It is a table which shows the fluid analysis result of double size. It is a figure which shows the accommodation space which is the cross section of the fluid analysis model of FIG. 4A. It is a figure which shows the accommodation space which is the cross section of the fluid analysis model (ratio 1: 2) of FIG. 4A. It is an example of the analysis data which shows the accommodation space which is the cross section of the fluid analysis model of FIG. 4A. It is an example of the analysis data which shows the accommodation space, the inlet and the outlet which are the vertical cross sections of the fluid analysis model of FIG. 4A. This is an example of analysis data showing the main flow trajectory of a fluid analysis model. It is a schematic block diagram of the substrate processing apparatus which concerns on a modification.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram of a substrate processing apparatus according to an embodiment. 2 and 3 are vertical cross-sectional views showing the pump device of the embodiment. Note that FIG. 2 is a diagram when the liquid pushing portion of the rolling diaphragm exists at a preset end position in the pushing movement direction. Further, FIG. 3 is a diagram when the liquid pushing portion of the rolling diaphragm is present at a position in the suction moving direction.

<Structure of substrate processing device 1>
See FIG. The substrate processing device 1 includes a nozzle 2 and a holding rotation unit 3. The nozzle 2 discharges the chemical solution to the substrate W held by the holding rotation unit 3. The chemical solution is, for example, a resist solution, a coating solution for forming an antireflection film, a solvent such as thinner, a rinsing solution such as pure water (DIW), a developing solution, or an etching solution.

The holding rotation unit 3 holds the substrate W and rotates the held substrate W. The holding rotation unit 3 includes a spin chuck 4 and a rotation drive unit 5. The spin chuck 4 is configured to be rotatable around the rotation axis AX. The spin chuck 4 holds the substrate W in a substantially horizontal posture by, for example, vacuum-sucking the back surface of the substrate W. On the other hand, the rotation drive unit 5 drives the spin chuck 4 to rotate around the rotation axis AX. The rotary drive unit 5 is composed of an electric motor or the like. The holding rotating portion 3 corresponds to the holding portion of the present invention.

Further, the substrate processing device 1 includes a chemical solution supply source 7, chemical solution pipes 8A and 8B, a pump device 9, and on-off valves (ON / OFF valves) V1 and V2. The chemical solution supply source 7 is composed of, for example, a tank or a bottle for storing the chemical solution. One end of the chemical liquid pipes 8A and 8B is connected to the chemical liquid supply source 7, and the other end is connected to the nozzle 2.

A pump device 9 is provided in the chemical liquid pipes 8A and 8B between the chemical liquid supply source 7 and the nozzle 2. The pump device 9 is a mechanism for sending a chemical solution. The details of the pump device 9 will be described later. An on-off valve V1 is provided in the chemical liquid pipe 8A between the chemical liquid supply source 7 and the pump device 9. An on-off valve V2 is provided in the chemical liquid pipe 8B between the pump device 9 and the nozzle 2. The on-off valve V2 supplies the chemical solution and stops the supply thereof. The chemical liquid pipes 8A and 8B may be provided with, for example, at least one of a foreign matter removing filter and a sackback valve for preventing dripping.

The substrate processing device 1 includes one or more control units 13 and an operation unit 15. The control unit 13 has a central processing unit (CPU). The control unit 13 controls each configuration of the substrate processing device 1 and the pump device 9. The operation unit 15 includes an input unit, a display unit, and a storage unit. The storage unit is composed of a ROM (Read-only Memory), a RAM (Random-Access Memory), a hard disk, and the like. For example, various conditions for substrate processing are stored in the storage unit.

<Configuration of pump device 9>
As shown in FIGS. 2 and 3, the pump device 9 includes a chamber 21, a movable member (also referred to as a piston) 23, a rolling diaphragm 25, an electric motor 27, and a conversion mechanism 29.

The chamber 21 houses the chemical solution and has a columnar cavity. The chamber 21 corresponds to the accommodating portion of the present invention. The chamber 21 includes a chamber body 31 and a guide portion 33. The chamber body 31 includes a storage space (also referred to as a pump chamber) 35, an inlet 37, an outlet 39, and a pressure sensor (not shown). The movable member 23 reciprocates in the chamber 21 in the X direction. The movable member 23 is formed in a columnar shape.

The rolling diaphragm 25 partitions the accommodation space 35 for accommodating the chemical solution in the chamber 21. That is, the accommodation space 35 is a space surrounded by the inner walls 31A and 31B (including the rounded corners) of the chamber main body 31 and the rolling diaphragm 25. The rolling diaphragm 25 is deformed by the movement of the movable member 23. When the rolling diaphragm 25 is deformed, the volume of the accommodation space 35 changes.

The rolling diaphragm 25 includes a liquid pushing portion 41, a peripheral portion 43, and a folded cylindrical portion 45. The rolling diaphragm 25 is formed of a fluororesin such as PTFE (polytetrafluoroethylene). The liquid pushing portion 41 is attached to the tip end portion of the movable member 23. Therefore, the liquid pushing portion 41 is moved integrally with the movable member 23. The peripheral edge portion 43 has a ring shape. The peripheral edge portion 43 is attached to an inner peripheral wall (inner wall) 31B such as the inner surface of a cylinder of the chamber 21. Specifically, as shown in FIG. 2, the peripheral edge portion 43 is attached by being sandwiched between the chamber main body 31 and the guide portion 33.

The folded tubular portion 45 is a tubular film. The folded cylindrical portion 45 connects the liquid pushing portion 41 and the ring-shaped peripheral edge portion 43. As a result, the chemical solution contained in the accommodation space 35 does not reach the space SP behind the guide portion 33. That is, the rolling diaphragm 25 blocks the accommodation space 35 and the back space SP. Further, the folded cylindrical portion 45 is folded back at a position in the suction moving direction (right direction in FIG. 2) of the movable member 23 with respect to the peripheral edge portion 43. The overlapped portion 47 is formed by folding back the folded tubular portion 45. The folded tubular portion 45 is U-shaped. The bottom of the U-shape is arranged to the right in FIG. 2 with respect to the peripheral edge portion 43. The folded cylindrical portion 45 is folded while having a gap.

The folded cylindrical portion 45 includes a roll portion 45A, a non-roll portion 45B on the liquid pushing portion 41 side, and a non-roll portion 45C on the peripheral portion 43 side. In FIG. 2, when the movable member 23 moves in the suction moving direction (right direction in FIG. 2), the roll portion 45A moves to the region of the non-roll portion 45B on the liquid pushing portion 41 side as shown in FIG. That is, when the movable member 23 moves, the position of the roll portion 45A moves so that the roll portion 45A rolls. As a result, the non-roll portion 45B on the liquid pushing portion 41 side becomes shorter, and the non-roll portion 45C on the peripheral portion 43 side becomes longer.

In the present invention, the width WD1 of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 has the following relationship with the width WD2 of the liquid pushing portion 41. That is, the width WD1 (or the diameter of the roll portion 45A) of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 is 1/20 or more and 1/6 or less of the width of the liquid pushing portion 41. In this case, the volume of the accommodation space 35 when the liquid pushing portion 41 is present at the preset end position in the pushing movement direction is larger than 0 cc and 49 cc or less (see FIGS. 6 to 8).

Further, the width WD1 of the gap 47A of the overlapping portion 47 of the folded cylindrical portion 45 may be 1/30 or more and 1/5 or less of the width of the liquid pushing portion. In this case, the volume of the accommodation space is 0.46 cc or more and 1.5 cc or less when the liquid pushing portion is present at a preset end position in the pushing movement direction (see FIG. 7). The details of the relationship between the width WD1 of the gap 47A of the overlapping portion 47 and the width WD2 of the liquid pushing portion 41 will be described later.

The electric motor 27 is composed of a pulse motor or a servomotor having an encoder. The conversion mechanism 29 converts the rotation obtained from the electric motor 27 into a linear movement in the left-right direction (X direction). The conversion mechanism 29 includes, for example, a screw shaft, a female screw, and a guide portion.

<Operation of the substrate processing device 1 and the pump device 9>
Next, the operations of the substrate processing device 1 and the pump device 9 will be described. See FIG. A transport mechanism (not shown) transports the substrate W onto the spin chuck 4 of the holding rotation unit 3. The spin chuck 4 holds the substrate W by adsorbing the back surface of the substrate W. The rotation drive unit 5 rotates the substrate W held by the spin chuck 4. The nozzle 2 is moved above the substrate W by a moving mechanism (not shown). The two on-off valves V1 and V2 are closed (OFF state).

The pump device 9 takes in the chemical solution from the chemical solution supply source 7 and sends it to the nozzle 2. The operation of the pump device 9 will be specifically described. The on-off valve V1 is opened (ON state) and the on-off valve V2 is closed (OFF state). After that, the electric motor 27 is driven, and the conversion mechanism 29 converts the rotation by the electric motor 27 into linear movement. As a result, the movable member 23 is moved in the suction moving direction (right direction in FIG. 2), and the liquid pushing portion 41 of the rolling diaphragm 25 is also moved in the suction moving direction. When the liquid pushing portion 41 is moved in the suction moving direction, the volume of the accommodation space 35 in the chamber 21 increases. Therefore, the chemical solution is sent from the chemical solution supply source 7 to the accommodation space 35 in the chamber 21 via the chemical solution pipe 8A, the on-off valve V1 and the inflow port 37.

After sucking the chemical solution into the accommodation space 35, the on-off valve V1 is closed (OFF state) and the on-off valve V2 is opened (ON state). After that, the movable member 23 and the liquid pushing portion 41 are moved in the pushing movement direction (left direction in FIG. 2) by the electric motor 27 and the conversion mechanism 29. This reduces the volume of the accommodation space 35 in the chamber 21. Therefore, the chemical solution is sent from the accommodation space 35 to the nozzle 2 via the outlet 39, the chemical solution pipe 8B, and the on-off valve V2. The chemical solution sent to the nozzle 2 is discharged from the nozzle 2 onto the substrate W.

As described above, by operating the two on-off valves V1 and V2 and the pump device 9, a preset amount of the chemical solution is discharged from the nozzle 2 onto the substrate W. After discharging the chemical solution, the two on-off valves V1 and V2 are closed (OFF state).

After discharging the chemical solution, the nozzle 2 is retracted from above the substrate W to the outside of the substrate W. The holding rotation unit 3 stops the rotation of the held substrate W, and then releases the holding of the substrate W. A transfer mechanism (not shown) moves the substrate W on the holding rotation unit 3 to another device, a mounting unit, a carrier, or the like.

<About the gap of the overlapping part 47>
The folded cylindrical portion 45 of the rolling diaphragm 25 has a deep U-shaped groove, and the gap 47A of the overlapping portion 47 is narrow. Therefore, the liquid replaceability of the folded tubular portion 45 is poor. Therefore, when the chemical solution (for example, a resist solution) is solidified, not only is it difficult to wash out the solidified chemical solution, but the solidified substance deteriorates the cleanliness of the chemical solution and causes particles.

Therefore, in order to obtain the optimum ratio between the width WD1 of the gap 47A of the overlapping portion 47 and the width WD2 of the liquid pushing portion 41 as shown in FIG. 2, a fluid analysis was performed. In the fluid analysis, the ratio of the width WD1 and the width WD2 was changed. First, a model for fluid analysis will be described. 4 (a), 4 (b), 5 (a) and 5 (b) are simplifications of the chamber 21 and the rolling diaphragm 25 and the like shown in FIG. 2 for fluid analysis.

FIG. 4A is a perspective view of the fluid analysis model. As shown by the arrow in FIG. 4A, the liquid (chemical solution) is put into the accommodation space 35 from the inflow port 37, moves in the accommodation space 35, and then the liquid is discharged from the outflow port 39. 4 (b), 5 (a) and 5 (b) are analysis models of the vertical cross section shown by the plane PL1 of FIG. 4 (a). The plane PL1 passes approximately in the horizontal center of the chamber 21. The plane PL2 passes approximately in the center of the chamber 21 in the vertical direction.

4 (b), 5 (a), and 5 (b) show a state in which the liquid pushing portion 41 shown in FIG. 2 is pushed completely, that is, a preset end in the pushing movement direction (left direction in FIG. 2). This is the state when the liquid pushing portion 41 is present at the position. The state in which the liquid pushing portion 41 is fully pushed is the case where the U-shaped groove of the folded cylindrical portion 45 becomes the deepest. In fact, the movable member 23 and the like are moved during the operation of the pump device 9. However, in the fluid analysis, the movable member 23 and the like are fixed without being moved in a state where the U-shaped groove is the deepest.

First, six types of ratios (shape ratios or ratios) of width WD2 and width WD1 were prepared. The six proportions are 1:30, 1:20, 1:10, 1: 6, 1: 5, and 1: 2. Note that FIG. 4B is a fluid analysis model with a ratio of 1:20. FIG. 5A is a fluid analysis model with a ratio of 1:10. FIG. 5B is a fluid analysis model with a ratio of 1: 5. Further, for example, in the standard size described later, the same dimensions are used for the dimensions other than the widths WD1 and WD2.

Next, FIGS. 6 to 8 are fluid analysis results. FIG. 6 is a standard size fluid analysis result. The standard size is substantially the same as the size adopted in the pump device 9 shown in FIG. The volume is the volume (volume) when the liquid pushing portion 41 is fully pushed, and includes the volumes of the inflow port 37 and the outflow port 39.

The flow rate (cc / sec) of the liquid flowing into the inflow port 37 is 3.0 cc / sec or less (greater than 0 cc / sec). Three types of flow rates were prepared for fluid analysis. The three types of flow rates are 0.4 cc / sec, 1.0 cc / sec and 2.0 cc / sec.

FIG. 7 shows the results of a half-sized fluid analysis. FIG. 8 shows the results of fluid analysis of double size. For example, when the width WD2 of the standard size liquid pushing portion 41 is, for example, PD (mm), the width WD2 of the half size liquid pushing portion 41 is PD / 2 (mm). Further, the width WD2 of the double-sized liquid pushing portion 41 is PD × 2 (mm). That is, each dimension of half size is 1/2 (half) of the standard size. Each dimension of double size is twice the standard size.

<Standard size fluid analysis results>
The standard size fluid analysis result shown in FIG. 6 will be described. The standard size volume (volume when the liquid pushing portion 41 is fully pushed) is 3.65 cc to 12 cc. The capacity when the liquid pushing portion 41 is fully pulled is about 25 cc. FIG. 9 shows a storage space 35 which is a cross section of the plane PL2 of the fluid analysis model shown in FIG. 4 (a).

When the ratio is 1:30, the liquid is more likely to flow in the regions RY2 and RY3 than in the region RY1 in FIG. If the liquid does not easily flow in the region RY1, the liquid replaceability deteriorates. Further, in the case of the ratio of 1:30, as the flow rate increases (for example, the flow rate is 1.0 cc / sec, 2.0 cc / sec), the liquid easily flows in the region RY1 shown in FIG. 9 (the speed (mm / sec) is large). However, there is unevenness in the flow such as the part where the flow is fast and the part where the flow is slow. Further, the tendency of the liquid to flow easily does not change in the regions RY2 and RY3 than in the region RY1. Therefore, the judgment is "x (bad)".

When the ratio is 1:20, the liquid is more likely to flow in the corner region RY2 than in the regions RY1 and RY3 shown in FIG. However, the liquid is more likely to flow in the region RY1 than in the region RY3. When the liquid easily flows in the region RY1, the liquid replaceability of the folded tubular portion 45 is improved. Further, the liquid flows evenly in the region RY1 as compared with the ratio of 1:30. Therefore, the judgment is "○ (good)". Further, in the ratio 1:10 and the ratio 1: 6, the liquid is more likely to flow in the regions RY1 and RY2 than in the region RY3 shown in FIG. Further, the liquid flows evenly in the region RY1 and the region RY2. Therefore, the judgment is "○ (good)".

The ratio 1: 2 will be described before the ratio 1: 5. In the case of a ratio of 1: 2, the liquid swirls and flows. Further, as shown in FIG. 10, the vortex becomes uneven. That is, in the regions RY1 and RY2, a portion SD1 in which the flow of the vortex is fast and a portion SD2 in which the flow of the vortex (or not being a vortex) is slow are generated. As in the ratio 1:20 to ratio 1: 6 (or ratio 1:20 to ratio 1: 5 described later), it is preferable that the liquid flows evenly in the regions RY1 and RY2. Therefore, the judgment is "x (bad)". When the ratio of unevenness in the vortex is 1: 2, the liquid does not flow from the inlet 37 to the outlet 39 at a relatively short distance, and the flow of the liquid is greatly disturbed in the cross-sectional direction as shown in FIG.

Further, the ratio 1: 5 suppresses the occurrence of unevenness in the vortex such as the ratio 1: 2. In the ratio 1: 5, the liquid flows relatively evenly in the regions RY1 and RY2, similarly to the ratio 1:20 to the ratio 1: 6. However, the influence of the vortex in the cross-sectional direction is large near the inflow port 37. The vortex stirs the liquid, even in the case of a ratio of 1: 2, and may be considered liquid-replaceable. If the liquid is agitated and returned to its original position, it is considered that the liquid replaceability is not good. The ratio 1: 5 is more affected by the vortex than the ratio 1: 6. Therefore, the judgment is "x (bad)". That is, the ratio 1: 6 is less affected by the vortex than the ratio 1: 5. The influence of the vortex is determined by the observer looking at the trajectory of the main flow in FIG. 13, which will be described later.

Here, FIGS. 11 to 13 show an example of analysis data. FIG. 11 is an example of analysis data showing the accommodation space 35 which is a cross section of the plane PL2 in the fluid analysis model of FIG. 4A. FIG. 12 is an example of analysis data showing the accommodation space 35 which is a vertical cross section of the plane PL2 in the fluid analysis model of FIG. 4A. FIG. 13 is an example of analysis data showing the main flow locus (trace line) of the fluid analysis model when the liquid flows from the inflow port 37 to the outflow port 39.

11 to 13 are analysis data for a standard size, a flow rate of 0.4 cc / sec (sec), and a ratio of 1: 6. In FIGS. 11 and 12, the darker the color, the faster the flow velocity (mm / sec). FIG. 13 shows different shades from FIGS. 11 and 12 for convenience of illustration. Further, in FIG. 11, the liquid is more likely to flow in the regions RY1 and RY2 than in the region RY3. Further, the liquid flows evenly in the region RY1 and the corner region RY2. In FIG. 13, as shown by the regions MR1 and MR2 surrounded by a circle, it is shown that the liquid is more likely to flow in the regions RY1 and RY2 than in the region RY3 in FIG. Further, as shown by the arrow AR1, vortices are relatively unlikely to occur near the inflow port 37. Further, at a ratio of 1: 6, as shown in FIG. 13, although a vortex is generated near the inflow port 37, the liquid flows smoothly from the inflow port 37 to the outflow port 39 in a relatively shortest path without being greatly disturbed.

The larger the flow rate of the liquid flowing into the inflow port 37, the better the liquid replaceability. Further, the flow rate of 2.0 cc / sec is generally a set value larger than the flow rate. Therefore, when the flow rate is 3.0 cc / sec, it is considered that the result is the same as the result of the flow rate of 2.0 cc / sec.

<Half-sized fluid analysis results>
The half-sized fluid analysis result shown in FIG. 7 will be described. The volume of half size (volume when the liquid pushing portion 41 is fully pushed) is as small as 0.46 cc to 1.5 cc. This makes it easier for the liquid to flow compared to the standard size. Therefore, in the case of a half size (0.46 cc to 1.5 cc) ratio of 1:30, the liquid flows more easily in the regions RY2 and RY3 than in the region RY1 in FIG. 9, but the liquid also spreads in the region RY1 at a high speed. Further, the liquid flows relatively evenly in the region RY1. Therefore, in the analysis result of half size, the judgment for the ratio of 1:30 is "○ (good)".

The determination results of ratio 1:20 to ratio 1: 6 are the same as the description of the standard size, and are omitted. At the ratio of half size 1: 2, the liquid swirls and flows in the regions RY1 and region RY2 as in the case of the standard size. Further, as shown in FIG. 10, unevenness occurs in the vortex. That is, in the region RY1 and the region RY2, a portion SD1 in which the flow of the vortex is fast and a portion SD2 in which the flow of the vortex (or not being a vortex) is slow are generated. Therefore, the trace line from the inflow port 37 to the outflow port 39 does not pass a relatively short distance along the shape and is greatly disturbed. Therefore, as in the case of the standard size, the judgment is "x (bad)".

The half size ratio of 1: 5 allows the liquid to flow relatively evenly in the regions RY1 and RY2. Further, at a ratio of 1: 5 of half size, the liquid flows relatively along the shape, and the flow trace line is less disturbed. Therefore, the judgment is "○ (good)". The results of the ratio 1:30 to the ratio 1: 2 were the same even when the flow rates were changed to 0.4 cc / sec, 1.0 cc / sec, and 2.0 cc / sec.

Since the analysis result of the standard size ratio of 1:30 is "x (bad)", the width WD1 of the gap 47A of the overlapping portion 47 is 1 of the width WD2 of the liquid pushing portion 41 in the analysis result of half size. If it is less than / 30, it is estimated to be "x".

<Double size fluid analysis result>
The results of the double-sized fluid analysis shown in FIG. 8 will be described. The volume of twice the size (volume when the liquid pushing portion 41 is fully pushed) is as large as 29cc to 95cc. Since the present invention targets a volume size larger than 0 cc and approximately 50 cc (49 cc) or less, a ratio of 1: 6 to a ratio of 1: 2 (volume 64 cc to 95 cc) is excluded from the evaluation.

Since the volume of the double size is large, it is difficult for the liquid to flow as compared with the case of the standard size. That is, the speed (mm / sec) at each position tends to be slow. When the ratio is 1:30, the liquid is more likely to flow in the regions RY2 and RY3 than in the region RY1 shown in FIG. Therefore, as in the case of the standard size, the determination is "x (bad)".

The ratio of the double size of 1:20 makes it easier for the liquid to flow in the corner region RY2 than in the regions RY1 and RY3 shown in FIG. 9, as in the case of the standard size. However, the liquid is more likely to flow in the region RY1 than in the region RY3. In addition, the liquid tends to flow evenly in the region RY1 as compared with the ratio of 1:30. Therefore, the judgment is "○ (good)" as in the case of the standard size. As in the case of the standard size, the ratio of the double size of 1:10 makes it easier for the liquid to flow in the regions RY1 and RY2 than in the region RY3 shown in FIG. Further, the liquid flows evenly in the region RY1 and the region RY2. Therefore, the judgment is "○ (good)" as in the case of the standard size.

According to the pump device according to the present invention, the rolling diaphragm 25 includes a liquid pushing portion 41, a ring-shaped peripheral edge portion 43, and a folded cylindrical portion 45 for connecting the liquid pushing portion 41 and the ring-shaped peripheral edge portion 43. ing. The folded tubular portion 45 has an overlapping portion 47 formed by folding. When the volume of the accommodation space 35 is 49 cc or less, the width WD1 of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 is 1/20 or more and 1/6 or less of the width WD2 of the liquid pushing portion 41. Within that range, the chemical solution can easily flow into the folded tubular portion 45. Further, since the turbulence of the chemical solution flow due to the vortex is suppressed, the chemical solution can flow relatively smoothly from the inflow port 37 to the outflow port 39. That is, the liquid replaceability of the folded tubular portion is improved. Therefore, it is possible to prevent the chemical solution from solidifying and being mixed into the chemical solution, and to maintain the cleanliness of the chemical solution.

Further, the rolling diaphragm 25 includes a liquid pushing portion 41, a ring-shaped peripheral edge portion 43, and a folded cylindrical portion 45 for connecting the liquid pushing portion 41 and the ring-shaped peripheral edge portion 43. The folded tubular portion 45 has an overlapping portion 47 formed by folding. When the volume of the accommodation space 35 is 0.46 cc or more and 1.5 cc or less (half size), the width WD1 of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 is 1 / of the width WD2 of the liquid pushing portion 41. It is 30 or more and 1/5 or less. Within that range, the chemical solution can easily flow into the folded tubular portion 45. Further, since the turbulence of the chemical solution flow due to the vortex is suppressed, the chemical solution can flow relatively smoothly from the inflow port 37 to the outflow port 39. That is, the liquid replaceability of the folded tubular portion 45 is improved. Therefore, it is possible to prevent the chemical solution from solidifying and being mixed into the chemical solution, and to maintain the cleanliness of the chemical solution.

Further, the chamber 21 includes an inflow port 37 for inflowing the drug solution into the accommodation space 35, and an outflow port 39 for allowing the drug solution to flow out from the accommodation space 39. The inflow port 37 and the outflow port 39 are each provided so as to be inclined on the inner peripheral wall 31B of the chamber 21 so as to face the roll portion 45A side of the folded cylindrical portion 45. As a result, the chemical solution can be easily distributed to the folded tubular portion 45. The liquid replaceability of the folded portion 45 is further improved.

The present invention is not limited to the above embodiment, and can be modified as follows.

(1) In the above-described embodiment, the ratio of the width WD1 of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 and the width WD2 of the liquid pushing portion 41 shows the condition that the liquid replaceability is good. In this respect, the relationship between the width WD1 and the width WD3 shown in FIG. 2 may indicate a condition in which the liquid replaceability is good.

In FIG. 2, when the liquid pushing portion 41 is present at a preset end position in the pushing movement direction (when the liquid pushing portion 41 is fully pushed), the width WD1 of the gap 47A of the overlapping portion 47 is The width of the gap between the liquid pushing portion 41 and the inner wall (opposing inner wall) 31A of the chamber body 31 facing the liquid pushing portion 41 is larger than the width WD3. For example, in the analysis model having a ratio of 1:20 in FIG. 4B, the ratio of the width WD1, the width WD2, and the width WD3 is 1:20: about 0.88. That is, at a ratio of 1:20, the width WD1 is larger than the width WD3.

As a result, the chemical solution is more likely to flow in the gap 47A of the overlapping portion 47 than in the gap between the liquid pushing portion 41 and the inner wall 31A of the chamber main body 31 facing the liquid pushing portion 41. Therefore, the liquid replaceability of the folded tubular portion 45 is improved.

When the recessed portion 59 shown by the two-dot chain line in FIG. 2 is provided on the inner wall 31A facing the liquid pushing portion 41, the width WD1 is compared with the width WD3 instead of the width WD3A of the recessed portion. Further, the end position can be adjusted in the left-right direction (X direction) of FIG. Normal pump operation is performed between the end position in the extrusion direction and the end position in the suction movement direction.

(2) In the above-described embodiment and modification (1), the substrate processing device 1 shown in FIG. 1 includes one pump device 9. Instead of the pump device 9, as shown in FIG. 14, the substrate processing device 1 may include two pump devices 61 and 62. Thereby, the liquid replaceability can be improved in each of the two pump devices 61 and 62.

As shown in FIG. 14, chemical liquid pipes 8C and 8D are provided between the chemical liquid pipes 8A and 8B. A downstream pump device 62 for sending the chemical solution to the nozzle 2 is provided between the two chemical solution pipes 8D and 8B. An upstream pump device 61 for sending a chemical solution to the downstream pump device 62 is provided between the two chemical liquid pipes 8A and 8C. The two chemical liquid pipes 8C and 8D between the downstream pump device 62 and the upstream pump device 61 are provided with a foreign matter removing filter 63.

The upstream pump device 61 and the downstream pump device 62 each include three connection ports (inflow ports 37A and 37B, outlets 39A and 39B and connection ports 65A and 65B). In addition, each of the upstream pump device 61 and the downstream pump device 62 has the same configuration as the pump device 9 of the embodiment, for example, a chamber 21, a movable member 23, and a rolling diaphragm 25. Further, for example, the width WD1 of the gap 47A of the overlapping portion 47 of the folded cylindrical portion 45 is configured to be 1/20 or more and 1/6 or less of the width of the liquid pushing portion 41. In this case, the volume of the accommodation space 35 when the liquid pushing portion 41 is present at the preset end position in the pushing movement direction is larger than 0 cc and 49 cc or less (see FIGS. 6 to 8).

The chemical liquid pipe 8A is connected to the inflow port 37A of the upstream pump device 61. One end of the chemical liquid pipe 8C is connected to the outlet 39A of the upstream pump device 61, and the other end of the chemical liquid pipe 8C is connected to the inlet 63A of the foreign matter removing filter 63. One end of the chemical liquid pipe 8D is connected to the outlet 63B of the foreign matter removing filter 63, and the other end of the chemical liquid pipe 8D is connected to the inflow port 37B of the downstream pump device 62. At the outlet 63B of the foreign matter removing filter 63, the chemical solution from which the foreign matter has been removed by the foreign matter removing filter 63 is sent out. Further, a discharge pipe 67 for discharging air bubbles, chemicals, and the like is connected to the vent 63C of the foreign matter removal filter 63.

The chemical liquid pipe 8B is connected to the connection port 65B of the downstream pump device 62. The outlet 39B of the downstream pump device 62 and the connection port 65A of the upstream pump device 61 are connected by a return pipe 69. The return pipe 69 is for returning the chemical solution from the downstream pump device 62 to the upstream pump device 61.

An on-off valve V1 is provided in the chemical liquid pipe 8A. An on-off valve V2 is provided in the chemical liquid pipe 8B. An on-off valve V3 is provided in the chemical liquid pipe 8C. An on-off valve V4 is provided in the chemical liquid pipe 8D. The discharge pipe 67 is provided with an on-off valve V5. The return pipe 69 is provided with an on-off valve V6. The control unit 13 operates the upstream pump device 61, the downstream pump device 62, and the on-off valves V1 to V6 to send the chemical solution from the chemical solution supply source 7 shown in FIG. 1 to the chemical solution nozzle 2.

1 ... Board processing device 2 ... Nozzle 3 ... Holding and rotating part 9, 61, 62 ... Pump device 13 ... Control unit 21 ... Chamber 23 ... Movable member 25 ... Rolling diaphragm 35 ... Containment space 37 (37A, 37B) ... Inflow port 39 (39A, 39B) ... Outlet 41 ... Liquid pushing part 43 ... Peripheral part 45 ... Folded tubular part 47 ... Overlapping part 47A ... Gap W ... Board WD1 to WD3 ... Width

Claims (5)

A containment unit for accommodating chemicals and
A movable member that reciprocates in the accommodating portion and
A rolling diaphragm that partitions a storage space for accommodating a drug solution in the accommodating portion, which is a liquid pushing portion attached to the tip of the movable member, a ring-shaped peripheral edge portion attached to the inner peripheral wall of the accommodating portion, and the liquid. The rolling having a folded tubular portion having an overlapping portion formed by connecting the push portion and the ring-shaped peripheral edge portion and folding back at a position in the suction moving direction of the movable member with respect to the ring-shaped peripheral edge portion. With a diaphragm,
The volume of the accommodation space when the liquid pushing portion is present at a preset end position in the extrusion moving direction is 49 cc or less.
The overlapping portion of the width of the gap of the folded tubular part state, and are 1/20 1/6 or less of the width of the liquid pushing portion,
The accommodating portion includes an inflow port for flowing the drug solution into the accommodating space and an outlet for discharging the drug solution from the accommodating space.
The pump device is characterized in that the inlet and the outlet are each inclined on the inner peripheral wall of the accommodating portion so as to face the roll portion side of the folded tubular portion. A containment unit for accommodating chemicals and
A movable member that reciprocates in the accommodating portion and
A rolling diaphragm that partitions a storage space for accommodating a drug solution in the accommodating portion, which is a liquid pushing portion attached to the tip of the movable member, a ring-shaped peripheral edge portion attached to the inner peripheral wall of the accommodating portion, and the liquid. The rolling having a folded tubular portion having an overlapping portion formed by connecting the push portion and the ring-shaped peripheral edge portion and folding back at a position in the suction moving direction of the movable member with respect to the ring-shaped peripheral edge portion. With a diaphragm,
The volume of the accommodation space when the liquid pushing portion is present at a preset end position in the extrusion moving direction is 0.46 cc or more and 1.5 cc or less.
The overlapping portion of the width of the gap of the folded tubular part, Ri 1/30 or 1/5 der less of the width of the liquid pushing portion,
The accommodating portion includes an inflow port for flowing the drug solution into the accommodating space and an outlet for discharging the drug solution from the accommodating space.
The pump device is characterized in that the inlet and the outlet are each inclined on the inner peripheral wall of the accommodating portion so as to face the roll portion side of the folded tubular portion. In the pump device according to claim 1 or 2.
When the liquid pushing portion is present at a preset end position in the pushing movement direction, the width of the gap between the overlapping portions of the folded tubular portion faces the liquid pushing portion and the liquid pushing portion. A pump device characterized in that it is larger than the width of the gap between the accommodating portion and the inner wall of the accommodating portion. The holding part that holds the board and
A nozzle that discharges a chemical solution to the substrate held by the holding portion,
With a pump device for sending chemicals to the nozzle,
The pump device includes a storage unit for accommodating a chemical solution and a storage unit.
A movable member that reciprocates in the accommodating portion and
A rolling diaphragm that partitions a storage space for accommodating a drug solution in the accommodating portion, which is a liquid pushing portion attached to the tip of the movable member, a ring-shaped peripheral edge portion attached to the inner peripheral wall of the accommodating portion, and the liquid. The rolling having a folded tubular portion having an overlapping portion formed by connecting the push portion and the ring-shaped peripheral edge portion and folding back at a position in the suction moving direction of the movable member with respect to the ring-shaped peripheral edge portion. With a diaphragm,
The volume of the accommodation space when the liquid pushing portion is present at a preset end position in the extrusion moving direction is 49 cc or less.
The overlapping portion of the width of the gap of the folded tubular part state, and are 1/20 1/6 or less of the width of the liquid pushing portion,
The accommodating portion includes an inflow port for flowing the drug solution into the accommodating space and an outlet for discharging the drug solution from the accommodating space.
A substrate processing apparatus , wherein each of the inflow port and the outflow port is provided so as to be inclined on an inner peripheral wall of the accommodating portion so as to face the roll portion side of the folded cylindrical portion. The holding part that holds the board and
A nozzle that discharges a chemical solution to the substrate held by the holding portion,
With a pump device for sending chemicals to the nozzle,
The pump device includes a storage unit for accommodating a chemical solution and a storage unit.
A movable member that reciprocates in the accommodating portion and
A rolling diaphragm that partitions a storage space for accommodating a drug solution in the accommodating portion, which is a liquid pushing portion attached to the tip of the movable member, a ring-shaped peripheral edge portion attached to the inner peripheral wall of the accommodating portion, and the liquid. The rolling having a folded tubular portion having an overlapping portion formed by connecting the push portion and the ring-shaped peripheral edge portion and folding back at a position in the suction moving direction of the movable member with respect to the ring-shaped peripheral edge portion. With a diaphragm,
The volume of the accommodation space when the liquid pushing portion is present at a preset end position in the extrusion moving direction is 0.46 cc or more and 1.5 cc or less.
The overlapping portion of the width of the gap of the folded tubular part, Ri 1/30 or 1/5 der less of the width of the liquid pushing portion,
The accommodating portion includes an inflow port for flowing the drug solution into the accommodating space and an outlet for discharging the drug solution from the accommodating space.
A substrate processing apparatus , wherein each of the inflow port and the outflow port is provided so as to be inclined on an inner peripheral wall of the accommodating portion so as to face the roll portion side of the folded cylindrical portion.

Images