JP6971583B2 - Separate liquid jet guided laser nozzle cap - Google Patents

Description

Generally, nozzle caps for liquid jet guided laser systems are disclosed. Specifically, the nozzle cap separates the liquid jet from the axial assist gas in order to reduce the turbulence of the liquid jet.

Liquid jet guided laser technology is sometimes referred to as a liquid microjet (LMJ), for example, a focusing lens that couples the laser focus into a small liquid jet. This binding is done within the binding unit. The coupling unit may include a metal chamber on the focusing lens side, which is closed by a laser protection window. The other side of the chamber is equipped with a nozzle. The liquid supplied to the coupling unit flows between the window and the nozzle and exits the nozzle in the form of a liquid jet. The energy of the laser spot in the focal plane is taken into the liquid jet and guided to the workpiece by internal reflection. This method eliminates the need for precise control of the workpiece distance as the energy required to perform the machining is available over the entire laminar flow length of the liquid jet. Any liquid that provides the appropriate light-inducing ability can be used to form the liquid jet.

By supplying the assist gas to the liquid jet, the laminar flow length of the liquid jet can be increased to extend the working distance of the process. The assist gas is directed directly into the liquid jet as a boundary layer in order to increase the laminar flow length of the liquid jet by reducing the resistance between the liquid and the ambient air. In this way, the liquid jet is surrounded by the assist gas inside the coupling unit and the assist gas is directed towards the liquid jet. For example, the assist gas can enter the coupling unit in a horizontal plane towards a liquid jet moving in a vertical plane. The assist gas and liquid jet then exit the system with the liquid jet surrounded by the assist gas in the center.

There is a dependency between the assist gas and the liquid jet. For example, the pressure and flow characteristics of the assist gas can be selected to optimize the laminar flow of the liquid jet. Other operating conditions of the assist gas can adversely affect the liquid jet. For example, the high pressure of the assist gas can shorten the laminar flow of the liquid jet, and the higher pressure of the assist gas can destroy the liquid jet. The assist gas can also interrupt the internal reflection of the laser beam in the liquid jet, thereby affecting the output of the laser machining.

U.S. Patent Application Publication No. 2015/016559

Aspects and advantages of the present disclosure are described in part in the following specification, or may be apparent from the specification, or can be learned through the practice of the present disclosure.

Disclosed is a head assembly for a liquid jet guided laser system having a coupling unit detachably disposed in a laser focus optical module of the laser system. The coupling unit has a nozzle assembly that is detachably connected to the coupling unit. The nozzle assembly defines axial and radial directions and has a liquid jet nozzle and a nozzle cap. The liquid jet nozzle is configured to form a liquid jet. The nozzle cap is a nozzle cap body and has a nozzle cap body that is axially arranged and defines a liquid jet hole that extends through the center of the nozzle cap body. Multiple axial assist gas conduits and fixed assist gas conduits are in fluid communication with the assist gas source and enter the nozzle cap body through inlet ports arranged in an annular pattern concentric with the liquid jet holes. The axial assist gas conduit and the fixed assist gas conduit are through the nozzle cap body to individually transport the assist gas to the axial outlet port and the fixed outlet port, which are arranged to discharge the assist gas closest to the liquid jet. Extend. At least a portion of the plurality of axially assisted gas conduits is partitioned from fluid communication with the liquid jet holes. Also disclosed is a liquid jet guided laser system having a laterally moving assembly configured to attach to a laser focus optical module with a coupling unit detachably attached to the laterally moving assembly.

These and other features, embodiments, and advantages of the present disclosure will be better understood by reference to the following claims and the appended claims. The accompanying drawings are incorporated herein and constitute a portion of the present specification, exemplifying embodiments of the present disclosure and serving together with the present specification to explain the principles of the present disclosure.

A fully practicable disclosure of the invention to those of skill in the art, including the best embodiments, is described herein, which is referred to in the accompanying drawings below.

It is sectional drawing of one Embodiment of a head assembly. It is a side view of one Embodiment of a nozzle cap. It is a top view of one Embodiment of a nozzle cap. It is a perspective view of one Embodiment of a nozzle cap. FIG. 3 is a perspective view of another embodiment of a nozzle cap having a fixed assist gas port. It is an end view of one Embodiment of a nozzle cap.

Reference numerals in the present specification and drawings are used repeatedly to represent the same or similar features or elements of the present disclosure.

Next, references to embodiments of the present disclosure will be made in detail. One or more examples of embodiments of the present disclosure are shown in the drawings. Each example is given by explaining the present disclosure, but is not limiting the present disclosure. In fact, it will be apparent to those skilled in the art that various modifications and modifications may be made to this disclosure without departing from the scope or spirit of the present disclosure. For example, the features illustrated or described as part of one embodiment can be used in conjunction with another embodiment to result in even further embodiments. Accordingly, the present disclosure is intended to include such modifications and modifications within the scope of the appended claims and their equivalents.

As used herein, the terms "axial" and "radial" refer to the direction relative to the flow of fluid in the central fluid path, and "axial" refers to the central fluid. Parallel to the path, "radial" is orthogonal to the central fluid path and diverges from a common center point within the central fluid path. Further, "upstream" refers to the direction in which the fluid flows, and "downstream" refers to the direction in which the fluid flows.

References in all directions (eg, radial, axial, proximal, distal, superior, inferior, upward, inferior, left, right, lateral, anterior, posterior, up, inferior, superior, inferior, vertical, Horizontal, clockwise, counterclockwise) are used only for specific purposes to aid the reader's understanding and do not impose any particular limitation on the position, orientation, or use of the invention. References to connections (eg, attached, combined, connected, and joined) should be broadly interpreted and may include intermediate members between the collection of elements unless otherwise indicated. , May include relative movement between elements. Therefore, the reference to connection does not necessarily mean that the two elements are directly connected and in a fixed relationship with each other. The exemplary drawings are for illustration purposes only, and the dimensions, positions, order, and relative sizes shown in the drawings attached herein may vary.

FIG. 1 shows a cross-sectional view of an embodiment of a head assembly (21) of a liquid jet guided laser system 20 capable of comprising a coupling assembly 22 coupled to a laser focus optical module 24. The laser focus optical module 24 can include a laser beam 26 and an optical element such as a focus lens 28. In some embodiments, the focus adjustment of the laser beam 26 is aided by a laterally moving assembly 30 that can be coupled between the laser focus optical module 24 and the coupling assembly 22 in this way. Allows the coupling assembly 22 to move within a lateral plane orthogonal to the direction of the laser beam 26.

The mount 51 has an annular connector portion 53 and forms a funnel shape so that the focused laser beam 26 from the laser focus optical module 24 passes through the laterally moving assembly 30. The laser beam 26 is focused into the fluid nozzle 71 in the liquid jet nozzle 65 through the window element 62. The mount 51 surrounds the coupling unit 57 in an annular shape and holds it in a coaxial arrangement. The upper part of the coupling unit 57 has an opening 59, which is tapered from top to bottom in a conical shape. A shoulder portion with which the window element 62 contacts is formed at the lower end of the lower end conical opening 59. On the lower surface of the window element 62 is a nozzle assembly 60 having a liquid jet nozzle 65 and a nozzle cap 77. The thin intermediate space 63 acts as a fluid inflow path between the window element 62 and the liquid jet nozzle 65.

The liquid 70 (eg, water) is introduced into the intermediate space 63 via the annular duct 69 and then through the radial path 67 with the required pressure (eg 400 bar). The liquid jet nozzle 65 is inserted from below into the cylindrical internal space of the coupling unit 57 adjacent to the fluid nozzle 71. The liquid jet nozzle 65 has a recess on the upper side facing the intermediate space 63 into which the fluid nozzle 71 is inserted. The fluid nozzle 71 has a central axial duct that forms a fine jet of fluid 33 (see FIG. 2) that guides laser radiation in the manner of an optical waveguide. This duct has a diameter corresponding to the desired fluid jet diameter, eg 30-60 micrometers.

Adjacent to the fluid nozzle 71, in this example, there is a gas holding space formed from the upper subspace 73 and the lower subspace 75. This allows the assist gas 31 introduced at the lower end of the liquid jet nozzle 65 to spread without disturbing the fluid jet 33.

2 to 6 are various views of the nozzle cap 77 installed on the lower surface of the liquid jet nozzle 65. The nozzle cap 77 connects the upper subspace 73 and the lower subspace 75 at positions adjacent to each other. The nozzle cap 77 has a nozzle cap body 78 that defines a liquid jet hole 79 extending axially through the center of the nozzle cap body 78 from the cavity forming the lower subspace 75 to the lower tip. The nozzle cap 77 is tapered in a conical shape from top to bottom in the axial direction. The liquid jet hole 79 has a diameter of, for example, 1 to 2 mm.

The nozzle cap 77 has an assist gas manifold 83 arranged adjacent to the upper surface of the nozzle cap 77 (see FIG. 1). The manifold 83 is supplied through the annular space 85 (see FIG. 1). From the manifold 83, the assist gas 31 is introduced into the plurality of axial assist gas conduits 81a, 81b and the fixed assist gas conduit 32. The plurality of axial gas conduits 81a, 81b and the fixed assist gas conduit 32 can be any number of conduits suitable for delivering the assist gas 31 to various positions. The diameters of both the axial assist gas conduits 81a, 81b and the fixed assist gas conduit 32 may be different or the same, from a diameter of about 0.13 mm ( about 0.005 inch) to 0.76 mm ( 0.03). Can be within the diameter range of inches). The plurality of axial assist gas conduits 81a and 81b are fluidly communicated with the assist gas source 31 entering the nozzle cap main body 78 through the inlet ports 61a and 61b (FIG. 2), and are arranged in an annular pattern concentric with the liquid jet hole 79. Has been done. The fixed assist gas conduit 32 also communicates with the assist gas source 31 and can be arranged so as to extend in a radial pattern orthogonal to the central fluid path to discharge the static assist gas. The axial assist gas conduits 81a and 81b are nozzle cap bodies 78 for individually transporting the assist gas 31 to the axial outlet ports 91a and 91b arranged to discharge the assist gas 31 closest to the liquid jet 33. Extend through. At least a portion of the axial assist gas conduits 81a, 81b is partitioned from fluid communication with the liquid jet hole 79 in order to separate the assist gas 31 from the liquid jet 33. The axial outlet ports 91a and 91b can be configured as an axial outlet port formed to inject an assist gas at a liquid jet convergence angle θ within a range of about 10 degrees to about 40 degrees.

2 and 5 are removablely arranged in a diaphragm slot 41 arranged orthogonally in the axial direction through the liquid jet hole 79 and extending a sufficient distance to block the assist gas transmitted through the diaphragm 42. An embodiment of the diaphragm 42 that can be shown is shown. The diaphragm can be about 1.0 mm to 12.7 mm ( about 0.04 inch to 0.5 inch) thick and about 0.51 mm to 1.27 mm ( about 0.02 inch to 0.05 inch). ) Has a central hole in diameter. These dimensions can vary within an aspect ratio (hole diameter: diaphragm thickness) between about 1: 2 and 1:10. 3 and 4 are a plan view and a perspective view of the nozzle cap 77 shown in FIG.

FIG. 5 is the shape of another embodiment of the nozzle cap 77 with a plurality of fixed assist gas conduits 32 in which the fixed outlet port 35 is arranged to exhaust into the lower portion 75. The fixed outlet port 35 exits the nozzle cap body 78 in a radial pattern so as to exhaust the static assist gas 31 substantially orthogonal to the central fluid path. The fixed exit port diverges from a common center point in the central fluid path. FIG. 6 is a bottom view of the embodiment of FIG.

Additional manufacturing techniques suitable for constructing the nozzle cap 77 with the axial assist gas conduits 81a, 81b, the fixed assist gas conduit 32, the diaphragm 42, and the rest of the LMJ head assembly (21) are not limited. Not, but material injection, binder injection, material extrusion, powder bed melt bonding, direct metal laser melting, selective laser melting, selective laser sintering, direct metal laser sintering, electron beam melting, selective heat sintering, Includes sheet stacking, directional energy deposition, and / or combinations thereof.

The present specification uses examples to disclose the invention, including the best embodiments, by those skilled in the art, such as making and using any device or system, performing any incorporated method, and the like. It also makes it possible to carry out. The patentable scope of the present disclosure is defined by the claims and may include other examples conceived by those skilled in the art. Another such example is the scope of claims if they contain components that do not differ from the wording of the claims, or if they contain equal components that differ slightly from the wording of the claims. Intended to be within.

Finally, typical embodiments are shown below.
[Embodiment 1]
A head assembly (21) for a liquid jet guided laser system (20).
The laser focus optical module (24) of the laser system (20) is provided with a detachably arranged coupling unit (57), and the coupling unit (57) is a coupling unit (57).
Detachably connected to the coupling unit, the liquid jet nozzle comprises a nozzle assembly that defines axial and radial directions and is equipped with a liquid jet nozzle and a nozzle cap, the liquid jet nozzle being configured to form a liquid jet. The nozzle cap is
A nozzle cap body (78) which is a nozzle cap body (78) and defines a liquid jet hole (79) which is arranged in the axial direction and extends through the center of the nozzle cap body (78).
A plurality of axial assist gas conduits (81a, 81b) and fixed assist gas conduits (32) that communicate fluid with the assist gas (31) source and are arranged in an annular pattern concentric with the liquid jet hole (79). Axial outlet ports (91a, 91a, arranged to enter the nozzle cap body (78) through the inlet ports (61a, 61b) and discharge the assist gas (31) closest to the liquid jet (33). A plurality of axial assist gas conduits (81a, 81b) and a plurality of fixed assist gas conduits extending through the nozzle cap body (78) to individually transport the assist gas (31) to the 91b) and the fixed outlet port (35). With (32)
A head assembly (21) for a liquid jet guided laser system (20), wherein at least a portion of the plurality of axially assisted gas conduits (81a, 81b) is partitioned from fluid communication with the liquid jet (79) hole. ).
[Embodiment 2]
An embodiment in which at least a part of the axial outlet ports (91a, 91b) is arranged to inject the assist gas (31) at a liquid jet convergence angle θ within a range of about 10 degrees to about 40 degrees. 1. The head assembly (21) according to 1.
[Embodiment 3]
The head assembly (21) according to embodiment 1, wherein at least a portion of the fixed outlet port (35) is arranged for radial fluid communication with the liquid jet hole (79).
[Embodiment 4]
The diameters of the plurality of axial assist gas conduits (81a, 81b) and the plurality of fixed assist gas conduits (32) are about 0.13 mm to about 0.76 mm ( about 0.005 inch to about 0.03 inch ). The head assembly according to the first embodiment, which is within the range of.
[Embodiment 5]
The head assembly (21) according to embodiment 1, further comprising a diaphragm (42) removably disposed in the diaphragm slot (41).
[Embodiment 6]
5. The fifth embodiment, wherein the diaphragm (42) is arranged orthogonally to the axial direction of the liquid jet (33) and extends a sufficient distance to block the assist gas (31) transmitted through the diaphragm (42). Head assembly (21).
[Embodiment 7]
The head assembly (21) according to embodiment 5, further comprising a diaphragm center hole that defines an aspect ratio in the range of about 1: 2 to 1:10.
[Embodiment 8]
The head assembly (21) according to the first embodiment, wherein the coupling unit (57) comprises a liquid for supplying to the annular duct (69).
[Embodiment 9]
An assist gas manifold (83) configured to supply the assist gas (31) to the plurality of axial assist gas conduits (81a, 81b) and the plurality of fixed assist gas conduits (32) through the annular space (85). The head assembly (21) according to the first embodiment, further comprising.
[Embodiment 10]
The head assembly (21) according to the first embodiment, wherein the coupling unit (57) includes a window element (62) removably arranged in the nozzle assembly (60).
[Embodiment 11]
A laterally moving assembly (30) configured to attach to the laser focus optical module (24), and
A liquid jet guided laser system (20) with a coupling assembly (22) detachably attached to the lateral moving assembly (30).
The laterally moving assembly (30) allows the position of the coupling assembly (22) to be adjusted in a plane orthogonal to the laser beam of the liquid jet guided laser system (20) for coupling. The assembly (22) is
The liquid jet nozzle (60) comprising a nozzle assembly (60) detachably connected to a coupling unit (57), defining axial and radial directions and comprising a liquid jet nozzle (65) and a nozzle cap (77). 65) is configured to form a liquid jet (33), said nozzle cap (77).
A nozzle cap body (78) which is a nozzle cap body (78) and defines a liquid jet hole (79) which is arranged in the axial direction and extends through the center of the nozzle cap body (78).
A plurality of axial assist gas conduits (81a, 81b) and fixed assist gas conduits (32) that communicate fluid with the assist gas (31) source and are arranged in an annular pattern concentric with the liquid jet hole (79). Axial outlet ports (91a, 91a, arranged to enter the nozzle cap body (78) through the inlet ports (61a, 61b) and discharge the assist gas (31) closest to the liquid jet (33). A plurality of axial assist gas conduits (81a, 81b) and a plurality of fixed assist gas conduits extending through the nozzle cap body (78) to individually transport the assist gas (31) to the 91b) and the fixed outlet port (35). With (32)
A liquid jet guided laser system (20) in which at least a portion of the plurality of axially assisted gas conduits (81a, 81b) is partitioned from fluid communication with the liquid jet hole (79).
[Embodiment 12]
An embodiment in which at least a part of the axial outlet ports (91a, 91b) is arranged to inject the assist gas (31) at a liquid jet convergence angle θ within a range of about 10 degrees to about 40 degrees. 11. The laser system (20) according to 11.
[Embodiment 13]
11. The laser system (20) of embodiment 11, wherein at least a portion of the fixed outlet port (35) is arranged for radial fluid communication with the liquid jet hole (79).
[Embodiment 14]
11. The laser according to embodiment 11, wherein the diameter of the plurality of axial assist gas conduits (81a, 81b) and the plurality of fixed assist gas conduits (32) is in the range of about 0.005 inch to about 0.03 inch. System (20).
[Embodiment 15]
The laser system (20) according to embodiment 11, further comprising a diaphragm (42) removably disposed in the diaphragm slot (41).
[Embodiment 16]
25. The 15th embodiment, wherein the diaphragm (42) is arranged orthogonally to the axial direction of the liquid jet (33) and extends a sufficient distance to block the assist gas (31) transmitted through the diaphragm (42). Laser system (20).
[Embodiment 17]
25. The laser system (20) of embodiment 15, further comprising a diaphragm center hole that defines an aspect ratio in the range of about 1: 2 to 1:10.
[Embodiment 18]
The laser system (20) according to embodiment 11, wherein the coupling unit (57) comprises a liquid for supplying to the annular duct (69).
[Embodiment 19]
An assist gas manifold (83) configured to supply the assist gas (31) to the plurality of axial assist gas conduits (81a, 81b) and the plurality of fixed assist gas conduits (32) through the annular space (85). The laser system (20) according to the eleventh embodiment.
[Embodiment 20]
The laser system (20) according to embodiment 11, wherein the coupling unit (57) includes a window element (62) that is detachably arranged in the nozzle assembly (60).

20 Liquid Jet Guided Laser System 21 Head Assembly 22 Coupling Assembly 24 Laser Focus Optical Module 26 Laser Beam 28 Focus Lens 30 Lateral Moving Assembly 31 Assist Gas 32 Fixed Assist Gas Conduit 33 Liquid Jet 35 Fixed Outlet Port 40 Lateral Mobile Assembly 41 Diaphragm Slot 42 Diaphragm 50 Laser Focus Optical Module 51 Mount 53 Circular Connector 5 Discharge Duct 57 Coupling Unit 59 Conical Opening 60 Nozzle Assembly 61a, 61b Inlet Port 62 Window Element 63 Intermediate Space 65 Liquid Jet Nozzle 67 Radial pipeline 69 Circular duct 70 Liquid 71 Fluid nozzle 73 Upper space 75 Lower space 77 Nozzle cap 78 Nozzle cap body 79 Liquid jet hole 81a, 81b Axial assist gas conduit 83 Assist gas manifold 85 Circular space 91a, 91b Axial exit port θ Liquid jet convergence angle

Claims (10)

A head assembly (21) for a liquid jet guided laser system (20), wherein the head assembly (21) is:
Wherein comprises a laser system laser focusable disposed removably on the optical module (24) binding for units (20) (57), said coupling unit (57),
A nozzle assembly (77) removably connected to the coupling unit (57) that defines axial and radial directions and comprises a liquid jet nozzle (65) and a nozzle cap (77). (60)
And wherein the liquid jet nozzle (65) is configured to form a liquid jet (33), said nozzle cap (77) is,
A nozzle cap body (78) which is a nozzle cap body (78) and defines a liquid jet hole (79) which is arranged in the axial direction and extends through the center of the nozzle cap body (78).
A plurality of axial assist gas conduits (81a, 81b) and fixed assist gas conduits (32) that communicate fluid with the assist gas (31) source and are arranged in an annular pattern concentric with the liquid jet hole (79). Axial outlet ports (91a, 91a, arranged to enter the nozzle cap body (78) through the inlet ports (61a, 61b) and discharge the assist gas (31) closest to the liquid jet (33). A plurality of axial assist gas conduits (81a, 81b) and a plurality of fixed assist gas conduits extending through the nozzle cap body (78) to individually transport the assist gas (31) to the 91b) and the fixed outlet port (35). (32) and a,
At least a portion of the plurality of axial assist gas conduits (81a, 81b) is partitioned from fluid communication with the liquid jet hole (79), and at least a portion of the fixed outlet port (35) is said. A head assembly (21) for a liquid jet guided laser system (20) that is arranged for radial fluid communication with the liquid jet hole (79). It said axial outlet port (91a, 91b) at least a part of, is arranged to inject the assist gas (31) with a liquid jet converges angle θ in the range of 1 0 degrees to 4 0 °, claim head assembly as claimed in 1 (21). Said plurality of axially assist gas conduit (81a, 81b) and the diameter of the plurality of fixed assist gas conduit (32) is in the range of 0.13mm~0.76mm (0 .005 inches ~0 .03 inch) The head assembly (21) according to claim 1 or 2. The head assembly (21) according to any one of claims 1 to 3 , further comprising a diaphragm (42) removably arranged in the diaphragm slot (41). Said diaphragm (42) is disposed perpendicular to the axial direction of the liquid jet (33), extends a distance sufficient to prevent the assist gas (31) transmitted through said diaphragm (42), according to claim 4 Head assembly (21). The head assembly (21) according to claim 4, further comprising a diaphragm center hole that determines the aspect ratio in the range of 1 : 4 to 1:10. The coupling unit (57) comprises a liquid to be supplied to the annular duct (69), the head assembly according to any one of claims 1 to 6 (21). An assist gas manifold (83) configured to supply the assist gas (31) to the plurality of axial assist gas conduits (81a, 81b) and the plurality of fixed assist gas conduits (32) through the annular space (85). The head assembly (21) according to any one of claims 1 to 7 , further comprising. The coupling unit (57) comprises provided with a nozzle assembly (60) removably window element disposed (62), the head assembly according to any one of claims 1 to 8 (21). A laterally moving assembly (30) configured to attach to the laser focus optical module (24), and
A said lateral moving assembly coupling assembly removably attached to the (30) (22), liquid jet-guided laser systems Ru and a (20),
It said lateral moving assembly (30), make it possible to adjust the position of the coupling assembly (22) in a plane perpendicular to the laser beam of the liquid jet-guided laser system (20), for the coupling the assembly (22),
A nozzle assembly (77) detachably connected to a coupling unit (57) that defines axial and radial directions and comprises a liquid jet nozzle (65) and a nozzle cap (77). 60)
And wherein the liquid jet nozzle (65) is configured to form a liquid jet (33), said nozzle cap (77) is,
A nozzle cap body (78) which is a nozzle cap body (78) and defines a liquid jet hole (79) which is arranged in the axial direction and extends through the center of the nozzle cap body (78).
A plurality of axial assist gas conduits (81a, 81b) and fixed assist gas conduits (32) that are fluid-communication with the assist gas (31) source and are arranged in an annular pattern concentric with the liquid jet hole (79). Axial outlet ports (91a, 91a, arranged to enter the nozzle cap body (78) through the inlet ports (61a, 61b) and discharge the assist gas (31) closest to the liquid jet (33). A plurality of axial assist gas conduits (81a, 81b) and a plurality of fixed assist gas conduits extending through the nozzle cap body (78) to individually transport the assist gas (31) to the 91b) and the fixed outlet port (35). (32) and a, at least a portion of said plurality of axial assist gas conduit (81a, 81b) is, are partitioned from fluid communication with said liquid jet hole (79), said fixed outlet port ( A liquid jet guided laser system (20 ) in which at least a portion of 35) is arranged for radial fluid communication with the liquid jet hole (79).

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