JP6973814B2 - Size measurement system - Google Patents

Description

The present invention relates to a size measuring system that measures the size of a body to be measured.

As a measuring device for measuring the size of the object to be measured, the difference between the compressed air regulator, the reference system path leading to the atmosphere and the measuring system path leading to the injection nozzle, which are provided by branching the air system path after that, and the two system paths. There is an air micrometer including a circuit leading to a pressure-sensitive semiconductor air pressure-electric converter and a display meter that displays a gap dimension value with the converter output (for example, Patent Document 1).

The measuring device of Patent Document 1 relates to an air micrometer that detects the differential pressure of the falling pressure by injecting compressed air from a nozzle, converts it into an electric signal, and measures the clearance dimension facing the nozzle. be.

Japanese Unexamined Patent Publication No. 2001-996342

However, the measuring device described in Patent Document 1 has problems that it is necessary to increase the compressed air, the air consumption is large, the measurement takes time, and the configuration of the device itself becomes complicated.

The present invention has been made in view of the above points, and an object of the present invention is to provide a size measurement system capable of easily measuring the size of an object to be measured with a simple configuration.

The size measurement system of the present invention is a size measurement system that measures the size of a body to be measured, and is a measurement head that is arranged with a gap between the body to be measured and an air supply that supplies air. Air that is formed in a tubular shape with a device, has a base end connected to the air supply device, has a tip connected to the measurement head, and sends air supplied from the air supply device to the measurement head. It has a delivery pipe and a detection element arranged on the air flow path inside the air delivery pipe, and detects the flow rate of air based on the change in the resistance value of the detection element due to the temperature change of the detection element. The measurement head includes a flow rate detecting unit and a size calculating unit that calculates the size of the measured object based on the detection result of the flow rate detecting unit, and the measuring head is an accommodating unit capable of accommodating the measured object. The size calculation unit includes a storage member that sends out the air sent out by the air delivery pipe to the storage unit, and the size calculation unit has the flow rate in a non-containment state in which the measurement object is not housed in the storage member. The outer diameter size of the object to be measured is calculated based on the difference between the detection result in the detection unit and the detection result in the flow rate detection unit in the accommodation state in which the object to be measured is accommodated in the accommodation member. It is characterized by that.

The temperature of the detection element arranged inside the air delivery tube changes between the set state in which the object to be measured is set in the measurement head and the non-set state in which the object to be measured is not set in the measurement head.

According to the present invention, the air flow rate is detected based on the change in the resistance value due to the temperature change of the detection element arranged inside the air delivery pipe, and the size of the object to be measured is calculated based on the detection result. Therefore, the size of the object to be measured can be easily measured with a simple configuration. Further, since the air flow rate is detected based on the change in the resistance value due to the temperature change of the detection element, the detection accuracy is improved as compared with the case where the air flow rate is detected by using the mechanical piezoelectric element.

According to this configuration, the outer diameter size of the object to be measured can be easily calculated. Further, since the outer diameter size of the object to be measured is calculated based on the detection result in the non-accommodation state and the detection result in the accommodation state each time, for example, the detection of the non-measurement body which is the calibration reference once measured. The outer diameter size of the object to be measured can be measured more accurately than the one in which the results are repeatedly used.

The size measurement system of the present invention is a size measurement system that measures the size of the object to be measured, and is a measurement head that is arranged with a gap between the object to be measured and an air supply that supplies air. Air that is formed in a tubular shape with a device, has a base end connected to the air supply device, has a tip connected to the measurement head, and sends air supplied from the air supply device to the measurement head. It has a delivery pipe and a detection element arranged on the air flow path inside the air delivery pipe, and detects the flow rate of air based on the change in the resistance value of the detection element due to the temperature change of the detection element. A flow rate detecting unit and a size calculating unit for calculating the size of the measured object based on the detection result of the flow rate detecting unit are provided, and the measuring head is a recess or a recess formed in the measured object. The size calculation unit includes an insertion member that is inserted into the through hole and sends out the air sent out by the air delivery pipe from the outer peripheral surface to the outside, and the size calculation unit is in a non-insertion state in which the insertion member is not inserted into the body to be measured. Based on the difference between the detection result of the flow detection unit and the detection result of the flow detection unit when the insertion member is inserted into the object to be measured, the inner diameter size of the object to be measured is determined. It is characterized by calculating.

According to this configuration, the inner diameter size of the object to be measured can be easily calculated. Further, since the inner diameter size of the object to be measured is calculated based on the detection result in the non-inserted state and the detection result in the inserted state each time, for example, the detection result in the non-inserted state once measured is repeatedly used. It is possible to measure the inner diameter size of the object to be measured more accurately than the one.

Further, the detection element is preferably made of tungsten.

According to this configuration, since tungsten has stable physical properties in air, it is possible to improve the detection accuracy of the flow rate of air to be detected based on the change in the resistance value of the detection element. ..

Further, it is preferable that the air supply device includes an air blowing pipe that is inserted inside the air sending pipe and blows air toward the detection element.

According to this configuration, since air is blown toward the detection element, the temperature change and resistance change of the detection element due to the air become large, and the detection accuracy of the flow rate of the air to be detected based on the change in the resistance value of the detection element is improved. can do.

The schematic which shows the size measurement system of this invention. The plan view which shows the measured object and the accommodating jig. The schematic diagram which shows the size measurement system in the case of measuring the inner diameter size of the object to be measured. The graph which shows the inner diameter size and the outer diameter size of the object to be measured according to the air flow rate difference.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

As shown in FIG. 1, the size measuring system 2 measures, for example, the inner diameter size and the outer diameter size of a cylindrical object to be measured 3, and includes a measuring head 4 and an air supply device 5 for supplying air. To prepare for.

In the size measurement system 2, the air delivery pipe 6 whose base end portion 6a is connected to the air supply device 5, the flow rate detection unit 7 for detecting the air flow rate in the air delivery pipe 6, and the detection result in the flow rate detection unit 7 A size calculation unit 8 for calculating the inner diameter size and the outer diameter size of the object to be measured 3 is provided based on the above.

The air supply device 5 includes a first accumulator tank 11, a second accumulator tank 12, a well-known compressor 13 that supplies air, and a control unit 14 that collectively controls the air supply device 5. The first accumulator tank 11 and the compressor 13 are connected by a first pipe 15a, and the first accumulator tank 11 and the second accumulator tank 12 are connected by a second pipe 15b.

Further, the second accumulator tank 12 and the air delivery pipe 6 are connected by the third pipe 15c and the ultrafine pipe 16, and the tip portion 6b of the air delivery pipe 6 and the accommodating jig 41 are connected by the fourth pipe 15d. ing. The first to fourth pipes 15a to 15d are made of, for example, resin, and their lengths can be appropriately changed.

The first pressure accumulator tank 11 is, for example, a pressure accumulator that reduces the pressure pulsation of the compressor 13, and is composed of a small glass bell jar for vacuum.

The second accumulator tank 12 is made of glass, for example, and is a supply device capable of supplying air having a constant pressure and a minute flow rate. Inside, an air monitor sensor 21 capable of detecting the temperature, pressure, and humidity of the air is arranged. .. The air monitor sensor 21 is connected to the control unit 14.

The control unit 14 drives the air supply device 5 so that the temperature, pressure, and humidity of the air become predetermined set values based on various data (air temperature, pressure, and humidity) from the air monitor sensor 21. Control.

The second pipe 15b is provided with a minute flow rate valve 24 for allowing a minute amount of air to flow. A minute amount of air is supplied to the downstream side of the minute flow rate valve 24.

The base end of the third pipe 15c is connected to the second accumulator tank 12, and the base end of the ultrafine pipe 16 (air blowing pipe) is connected to the tip end. The tip portion of the ultrafine pipe 16 is inserted into the inside through the base end portion 6a of the air delivery pipe 6, and an acceleration nozzle 16a for accelerating and supplying (delivering) a minute flow rate of air is provided. The acceleration nozzle 16a supplies air toward the detection element 31 of the flow rate detection unit 7, which will be described in detail later.

The air delivery pipe 6 is made of, for example, a glass tube, the tip portion 6b is formed in a tapered shape so as to taper toward the tip, and the fourth pipe 15d is connected to the air delivery pipe 6.

As shown in FIGS. 1 to 3, the measuring head 4 can accommodate the measured object 3 and has an accommodating jig 41 used for measuring the outer diameter size of the measured object 3 and a tubular object to be measured. It is provided with an insertion jig 42 that is inserted into the through hole of 3 and is used when measuring the inner diameter size of the object to be measured 3.

The accommodating jig 41 is formed in a cylindrical shape, and the object to be measured 3 is accommodated (inserted) in the internal space 41a (accommodation portion) which is a hole thereof. Further, as shown in FIG. 2, the accommodating jig 41 is formed with a through hole 41b penetrating from the outer peripheral surface to the inner peripheral surface. A plurality of (for example, four at 90 ° pitch) through holes 41b are formed.

The first opening of the first joint 45a in which three openings are formed in a substantially T shape is connected to the tip of the fourth pipe 15d. The base ends of the first measurement pipe 47a and the second measurement pipe 47b are connected to the second and third openings of the first joint 45a.

The first opening of the second joint 45b, in which three openings are formed in a substantially T-shape, is connected to the tip of the first measurement pipe 47a. The base ends of the third measurement pipe 47c and the fourth measurement pipe 47d are connected to the second and third openings of the second joint 45a.

The first opening of the third joint 45c, in which three openings are formed in a substantially T-shape, is connected to the tip of the second measurement pipe 47b. The base ends of the fifth measurement pipe 47e and the sixth measurement pipe 47f are connected to the second and third openings of the third joint 45c.

The tips of the third to sixth measurement pipes 47c to 47f are connected to the four through holes 41b of the accommodating jig 41. As a result, the air sent out from the air delivery pipe 6 is passed through the fourth pipe 15d, the first to third joints 45a to 45c, the first to third measurement pipes 47a to 47f, and the four through holes 41b. It is sent to the internal space 41a of the accommodating jig 41.

The insertion jig 42 is formed in a columnar shape, and a delivery portion 42a extending from the base end surface (right side surface in FIG. 3) toward the tip end and then extending to the outer peripheral surface is formed inside. The 42a has a plurality of portions (for example, four at a 90 ° pitch) extending to the outer peripheral surface.

The tip of the fourth pipe 15d is connected to the base end of the insertion jig 42. As a result, the air discharged from the air delivery pipe 6 is sent to the insertion jig 42 via the fourth pipe 15d.

As shown in FIG. 1, the flow rate detection unit 7 includes a detection element 31 arranged inside the air delivery pipe 6, a resistor 32 connected to the detection element 31, and a power supply connected to the detection element 31 and the resistor 32. A detection circuit 34 having 33 is provided, and the air flow rate in the detection element 31 is detected based on the detection result in the detection circuit 34.

The detection element 31 is an element whose temperature is changed by the air supplied from the acceleration nozzle 16a of the ultrafine tube 16 and the resistance value is changed by this temperature change, and is made of, for example, tungsten.

The resistor 32 is, for example, a temperature guarantee resistance of 51Ω, and is a conversion element in which Δγ × 51Ω = ΔV when the amount of change in the resistance value in the detection element 31 due to a temperature change is Δγ. The power supply 33 is a polar constant voltage power supply, for example, a power supply of 4.09V.

[Calculation of outer diameter size of the object to be measured 3]
When calculating the outer diameter size of the object to be measured 3, the air flow rate in the detection element 31 in the non-accommodation state in which the object 3 to be measured is not accommodated in the accommodation jig 41 (hereinafter referred to as the non-accommodated air flow rate). The air flow rate (hereinafter referred to as the accommodation air flow rate) in the detection element 31 in the accommodation state in which the object to be measured 3 is inserted or accommodated in the accommodation jig 41 is detected.

When the object to be measured 3 is accommodated in the accommodation jig 41, for example, the arm of the robot is driven while the object to be measured 3 is held by a holding portion provided on the arm of the robot to drive the object to be measured. The radial center of 3 and the radial center of the accommodating jig 41 are accommodated in a aligned state.

First, in order to detect the non-contained air flow rate, the air supply device 5 is driven in the non-accommodated state, and the air supplied from the compressor 13 is supplied to the first pipe 15a, the first accumulator tank 11, and the second pipe 15b (microscopic). Flow valve 24), 2nd accumulator tank 12, 3rd pipe 15c, ultrafine pipe 16, air delivery pipe 6, 4th pipe 15d, 1st to 3rd joints 45a to 45c, 1st to 3rd measurement pipes 47a to Air is sent to the internal space 41a through the 47f and the four through holes 41b (hereinafter, "air is sent to the internal space 41a").

When the air is sent to the internal space 41a in the non-accommodated state, the temperature of the detection element 31 of the flow rate detection unit 7 changes due to the air supplied from the acceleration nozzle 16a, and the resistance value changes due to this temperature change.

The resistance 32 of the flow rate detection unit 7 is converted as the amount of change in the resistance value (Δγ) × 51Ω = ΔV in the detection element 31 due to the temperature change.

The air flow rate corresponding to ΔV is stored in advance in the storage unit (not shown) of the flow rate detection unit 7 for each ΔV having a different numerical value. The flow rate detection unit 7 detects the air flow rate corresponding to the received ΔV as the non-accommodated air flow rate. The data of the non-accommodated air flow rate is transmitted to the size calculation unit 8.

In this embodiment, as the air flow rate increases, the temperature at the detection element 31 decreases. It should be noted that as the air flow rate increases, air may be supplied so that the temperature at the detection element 31 rises.

Similarly, in order to detect the accommodation air flow rate, the air supply device 5 is driven in the accommodation state to send the air to the internal space 41a of the accommodation jig 41.

Even when the air is sent to the internal space 41a in the housed state, the temperature of the detection element 31 of the flow rate detecting unit 7 changes due to the air supplied from the acceleration nozzle 16a, and the resistance value changes due to this temperature change.

The resistance 32 of the flow rate detection unit 7 is converted as the amount of change in the resistance value (Δγ) × 51Ω = ΔV in the detection element 31 due to the temperature change. The flow rate detection unit 7 detects the air flow rate corresponding to the above ΔV as the accommodation air flow rate. The data of the accommodation air flow rate is transmitted to the size calculation unit 8. It should be noted that the accommodation air flow rate may be detected at a plurality of accommodation positions (positions in the vertical direction in FIG. 1) in which the object to be measured 3 is accommodated in the accommodation jig 41.

When calculating the outer diameter size of the object to be measured 3, the size calculation unit 8 calculates the air flow rate difference obtained by subtracting the accommodation air flow rate from the non-accommodation air flow rate.

In the storage unit (not shown) of the size calculation unit 8, the outer diameter size of the object to be measured 3 corresponding to the air flow rate difference is stored in advance for each different numerical value of the air flow rate difference. The size calculation unit 8 calculates the outer diameter size of the measured body 3 corresponding to the calculated air flow rate difference as the outer diameter size of the measured body 3. When the accommodation air flow rate is detected at the plurality of positions where the object to be measured 3 is accommodated in the accommodation jig 41, it is preferable to calculate the outer diameter size of the object to be measured 3 at each position.

FIG. 4 is an example of a graph showing the outer diameter size of the measured body 3 corresponding to the air flow rate difference, and the outer diameter size of the measured body 3 also increases as the air flow rate difference increases. This is because when the outer diameter size of the object to be measured 3 is large, the gap between the outer peripheral surface of the object to be measured 3 and the inner peripheral surface of the accommodating jig 41 becomes small, which makes it difficult for air to flow and the accommodating air flow rate. Is reduced. As a result, since the non-accommodated air flow rate is almost constant, the air flow rate difference becomes large.

[Calculation of inner diameter size of the object to be measured 3]
When calculating the inner diameter size of the object to be measured 3, as shown in FIG. 3, the air flow rate in the detection element 31 in the non-inserted state in which the insertion jig 42 is not inserted into the through hole of the object 3 to be measured ( Hereinafter, the non-inserted air flow rate) and the air flow rate in the detection element 31 in the inserted state in which the insertion jig 42 is inserted into the through hole of the object to be measured 3 (hereinafter, the inserted air flow rate) are detected.

When the insertion jig 42 is inserted into the through hole of the object to be measured 3, for example, the arm of the robot is driven while the object 3 to be measured is held by the holding portion provided on the arm of the robot to be measured. The radial center of the body 3 and the radial center of the insertion jig 42 are aligned with each other for insertion.

First, in order to detect the non-inserted air flow rate, the air supply device 5 is driven in the non-inserted state, and the air supplied from the compressor 13 is supplied to the first pipe 15a, the first accumulator tank 11, and the second pipe 15b (microscopic). The flow valve 24), the second accumulator tank 12, the third pipe 15c, the ultrafine pipe 16, the air delivery pipe 6, the fourth pipe 15d, and the delivery portion 42a of the insertion jig 42 are used to send air to the outside (hereinafter, "Sending air to the outside of the insertion jig 42").

When air is sent to the outside of the insertion jig 42 in the non-insertion state, the temperature of the detection element 31 of the flow rate detection unit 7 changes due to the air supplied from the acceleration nozzle 16a, and the resistance value changes due to this temperature change. Change.

The resistance 32 of the flow rate detection unit 7 is converted as the amount of change in the resistance value (Δγ) × 51Ω = ΔV in the detection element 31 due to the temperature change.

The air flow rate corresponding to ΔV is stored in advance in the storage unit (not shown) of the flow rate detection unit 7 for each ΔV having a different numerical value. The flow rate detecting unit 7 detects the air flow rate corresponding to the received ΔV as the non-inserted air flow rate. The data of the non-inserted air flow rate is transmitted to the size calculation unit 8.

In this embodiment, as the air flow rate decreases, the temperature at the detection element 31 increases. It should be noted that when the air flow rate decreases, air may be supplied so that the temperature at the detection element 31 becomes low.

Similarly, in order to detect the inserted air flow rate, the air supply device 5 is driven in the inserted state, and the air supplied from the compressor 13 is used in the first pipe 15a, the first accumulator tank 11, and the second pipe 15b (minute flow rate). Air is sent to the through hole of the measured body 3 through the valve 24), the second accumulator tank 12, the third pipe 15c, the ultrafine pipe 16, the air delivery pipe 6, the fourth pipe 15d, and the delivery portion 42a of the insertion jig 42. It is sent out (hereinafter, "air is sent out to the through hole of the object to be measured 3").

Even when air is sent to the through hole of the object to be measured 3 in the inserted state, the temperature of the detection element 31 of the flow rate detection unit 7 changes due to the air supplied from the acceleration nozzle 16a, and the resistance value due to this temperature change. Changes.

The resistance 32 of the flow rate detection unit 7 is converted as the amount of change in the resistance value (Δγ) × 51Ω = ΔV in the detection element 31 due to the temperature change. The flow rate detecting unit 7 detects the air flow rate corresponding to the above ΔV as the inserted air flow rate. The data of the inserted air flow rate is transmitted to the size calculation unit 8.

When calculating the inner diameter size of the object to be measured 3, the size calculation unit 8 calculates the air flow rate difference obtained by subtracting the inserted air flow rate from the non-inserted air flow rate.

In the storage unit (not shown) of the size calculation unit 8, the inner diameter size of the object to be measured 3 corresponding to the air flow rate difference is stored in advance for each different numerical value of the air flow rate difference. The size calculation unit 8 calculates the inner diameter size of the measured body 3 corresponding to the calculated air flow rate difference as the inner diameter size of the measured body 3. The inner diameter size of the recessed portion of the object to be measured 3 that does not penetrate can be calculated in the same manner.

FIG. 4 is an example of a graph showing the inner diameter size of the measured object 3 corresponding to the air flow rate difference, and is an inverse proportional relationship graph in which the inner diameter size of the measured object 3 decreases as the air flow rate difference increases. This is because when the inner diameter size of the object to be measured 3 is small, it becomes difficult for air to flow and the flow rate of inserted air decreases. As a result, since the non-inserted air flow rate is almost constant, the difference in air flow rate becomes large.

As described above, the air flow rate is calculated based on the change in the resistance value due to the temperature change of the detection element 31, and the inner diameter size and the outer diameter size of the object to be measured 3 are measured based on this air flow rate. The inner diameter size and the outer diameter size of the object to be measured 3 can be measured more accurately than those measuring the air flow rate by a mechanical piezoelectric element.

Further, every time the inner diameter size and the outer diameter size of the object to be measured 3 are measured, the non-inserted air flow rate and the non-accommodated air flow rate and the inserted air flow rate and the accommodated air flow rate are measured to calculate the air flow rate difference. Therefore, for example, the inner diameter size and the outer diameter size of the object to be measured 3 can be measured more accurately than those in which the non-inserted air flow rate and the non-air flow rate once measured are repeatedly used. This is because when the non-inserted air flow rate and the non-air flow rate are used repeatedly, the current non-inserted air flow rate and the non-air flow rate and the non-inserted air flow rate at the time of measurement are due to the difference in the environment (temperature, etc.) between the time of measurement and the present. This is because there is a difference between the flow rate and the non-air flow rate.

Although the preferred embodiment of the present invention has been described above, the present invention is not limited to such an embodiment and can be appropriately modified without departing from the spirit of the present invention.

For example, in the above embodiment, the present invention is implemented in a measurement system that measures the inner diameter size and the outer diameter size of the cylindrical object to be measured 3, but the shape of the object to be measured is not limited to a cylinder but may be a polygonal shape. good. Further, it can be implemented in any measurement system that measures the size of the object to be measured, and may be implemented in a system that measures the thickness of the object to be measured, the tilt angle of the object to be measured, and the like.

Further, when measuring the external size of the object to be measured, a columnar object to be measured may be used instead of a cylinder. In either case, the internal space 41a of the accommodation jig 41 has a shape that matches the shape of the object to be measured. Further, the accommodating jig 41 may accommodate the object to be measured and may not penetrate the hole.

Further, the housing jig 41 used for calculating the inner diameter size of the object to be measured 3 may be formed so as to close the upper surface or the lower surface (covered cylinder shape or bottomed cylinder shape).

Further, in the above embodiment, the size calculation unit 8 calculates the outer diameter size of the object to be measured 3 based on the air flow rate difference obtained by subtracting the accommodation air flow rate from the non-accommodation air flow rate. Without limitation, the outer diameter size of the object to be measured 3 may be calculated based on the detection result of the flow rate detecting unit 7. For example, the outer diameter size of the object to be measured 3 may be calculated based on the accommodation air flow rate.

Further, in the above embodiment, the detection element 31 is made of tungsten, but the detection element 31 is not limited to this, and is not limited to this. It is preferably composed of a metal or the like having stable physical properties.

Further, in the above embodiment, the ultrafine pipe 16 is provided as the air blowing pipe, but the third pipe 15c may be connected to the base end portion of the air delivery pipe 6 without providing the ultrafine pipe 16.

2 ... size measurement system, 3 ... object to be measured, 4 ... measurement head, 5 ... air supply device, 6 ... air delivery pipe, 7 ... flow detection unit, 8 ... size calculation unit, 16 ... ultrafine pipe (air spray pipe) ), 31 ... Detection element, 41 ... Accommodating jig (accommodating member), 41a ... Internal space (accommodating portion), 42 ... Inserting jig (insertion member)

Claims (4)

It is a size measurement system that measures the size of the object to be measured.
A measuring head arranged with a gap between the body to be measured and the measuring head,
An air supply device that supplies air and
With an air delivery pipe formed in a tubular shape, the base end portion is connected to the air supply device, the tip end portion is connected to the measurement head, and the air supplied from the air supply device is sent to the measurement head. ,
A flow rate detecting unit having a detection element arranged on an air flow path inside the air delivery pipe and detecting an air flow rate based on a change in the resistance value of the detection element due to a temperature change of the detection element. ,
A size calculation unit that calculates the size of the object to be measured based on the detection result of the flow rate detection unit, and a size calculation unit.
Equipped with
The measuring head has an accommodating portion capable of accommodating the measured body, and includes an accommodating member that sends out the air sent out by the air delivery pipe to the accommodating portion.
The size calculation unit has a detection result in the flow rate detection unit in a non-accommodation state in which the object to be measured is not accommodated in the accommodation member, and an accommodation state in which the object to be measured is accommodated in the accommodation member. A size measurement system characterized in that the outer diameter size of the object to be measured is calculated based on the difference from the detection result in the flow rate detection unit. It is a size measurement system that measures the size of the object to be measured.
A measuring head arranged with a gap between the body to be measured and the measuring head,
An air supply device that supplies air and
With an air delivery pipe formed in a tubular shape, the base end portion is connected to the air supply device, the tip end portion is connected to the measurement head, and the air supplied from the air supply device is sent to the measurement head. ,
A flow rate detecting unit having a detection element arranged on an air flow path inside the air delivery pipe and detecting an air flow rate based on a change in the resistance value of the detection element due to a temperature change of the detection element. ,
A size calculation unit that calculates the size of the object to be measured based on the detection result of the flow rate detection unit, and a size calculation unit.
Equipped with
The measurement head includes an insertion member that is inserted into a recess or a through hole formed in the body to be measured and that sends out air sent out by the air delivery pipe from the outer peripheral surface to the outside.
The size calculation unit has a detection result in the flow rate detection unit in a non-inserted state in which the insertion member is not inserted into the body to be measured, and an inserted state in which the insertion member is inserted into the body to be measured. A size measurement system characterized in that the inner diameter size of the object to be measured is calculated based on the difference from the detection result in the flow rate detection unit. In the size measurement system according to claim 1 or 2.
The detection element is a size measurement system characterized in that it is made of tungsten. In the size measurement system according to any one of claims 1 to 3,
The size measuring system is characterized in that the air supply device includes an air blowing pipe that is inserted inside the air sending pipe and blows air toward the detection element.

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