JP6976886B2 - Shape measuring device and shape measuring method - Google Patents

Description

The present invention relates to a technique for measuring the shape of a measurement object based on a plurality of images obtained by imaging the measurement object using a plurality of imaging units.

In shape measurement using the optical cutting method, there is a technique using a plurality of imaging units (for example, in order to measure a shape in a range that cannot be imaged with the angle of view of one imaging unit (for example, a shape in a relatively wide range)). , Patent Document 1, Patent Document 2). In this technique, the shape of the measurement range is measured based on a plurality of images obtained by dividing the measurement range into a plurality of images and assigning an image pickup of a part of the measurement range to each of the plurality of imaging units.

The technique of Patent Document 1 calculates the weighted average of the overlapping sections of the data 1 by one camera and the data 2 by another camera, and makes the weighted average the data of the overlapping sections. As a result, a plurality of data are joined together to measure the three-dimensional shape of the object to be measured.

In the technique of Patent Document 1, an overlapping section is provided in order to connect a plurality of data. Since the weighted average is the data in the overlapping section, it is not possible to measure the accurate three-dimensional shape in the overlapping section.

Therefore, in the technique of Patent Document 2, a portion to which a plurality of measuring units are assigned is imaged so as not to generate an overlapping section, and a plurality of measurement results are obtained based on each of the plurality of images obtained thereby. Using the calculated position deviation amount and the tilt angle calculated by using a predetermined method, a plurality of measurement results are joined together to measure the three-dimensional shape of the object to be measured.

Japanese Unexamined Patent Publication No. 3-209112 Japanese Unexamined Patent Publication No. 2017-75880

In the technique of Patent Document 2, the amount of positional deviation and the inclination angle are calculated in order to connect the measurement results. The tilt angle is obtained from the design data of the object to be measured, or is obtained by actually measuring (actually measuring) the tilt angle with respect to the object to be measured. However, the design data and the actual tilt angle may not always match. If the difference between the design data and the actual tilt angle is large, the measurement accuracy of the shape will decrease. In the case of actual measurement, if the accuracy of the tilt angle measuring device is not good, the measurement accuracy of the shape will decrease. As described above, the present inventor has found that even if the amount of positional deviation and the inclination angle are calculated in order to connect the measurement results, the measurement accuracy of the shape may decrease due to the inclination angle.

An object of the present invention is to divide a measurement range into a plurality of parts, assign an image pickup of a part of the measurement range to each of the plurality of image pickup units, and measure the cross-sectional shape of the measurement range based on the plurality of images obtained thereby. In this case, it is an object of the present invention to provide a shape measuring device and a shape measuring method capable of improving the measurement accuracy.

In the shape measuring device according to one aspect of the present invention, the imaging ranges are set side by side, and a plurality of integrally movable imaging units and a state in which the measuring range is covered by the arranged imaging ranges. With the plurality of imaging units positioned at the first imaging position of the measurement range, the positions of the partial range that is a part of the measurement range and the plurality of measurement points for obtaining the cross-sectional shape of the partial range. The first calculation unit that executes the first process of calculating the average value of the deviation amount for each of the plurality of the partial ranges formed by dividing the measurement range into a plurality of parts, and the partial range and the plurality of measurement points. The plurality of imaging units are integrally moved in a direction in which the amount of positional deviation is smaller by the average value when viewed from the first imaging position, and the imaging unit includes the partial range in the imaging range. A control unit that executes a first control for capturing an image of the partial range for each of the plurality of the partial ranges, and an image of the partial range captured by the first control, based on the image of the partial range. A second calculation unit that executes a second process of calculating the cross-sectional shape for each of the plurality of said partial ranges is provided.

The first calculation unit performs a plurality of first processes for calculating a plurality of measurement points for obtaining a cross-sectional shape of a partial range formed by dividing the measurement range into a plurality of parts and an average value of the amount of positional deviation from the partial range. Execute for each of the subranges of.

The control unit integrally moves a plurality of imaging units in a direction in which the amount of positional deviation becomes smaller by the average value calculated in advance when viewed from the first imaging position, and the imaging unit includes a partial range in the imaging range. The first control for causing the unit to capture an image of a partial range is executed for each of the plurality of partial ranges. As a result, the average value of the amount of positional deviation between the plurality of measurement points for measuring the cross-sectional shape of the partial range and the partial range at the time of capturing each image of the plurality of partial ranges is calculated by the first calculation unit. It can be smaller than the average value. Therefore, according to the shape measuring device according to one aspect of the present invention, the measurement range is divided into a plurality of parts, and the image pickup of a part (partial range) of the measurement range is assigned to each of the plurality of image pickup units, thereby obtaining the image. When measuring the cross-sectional shape of the measurement range based on a plurality of images, the measurement accuracy can be improved. In addition, moving integrally means moving without changing the mutual positional relationship between the plurality of imaging units.

In the above configuration, when the control unit executes the first control, there are a plurality of the measurement points on the optical cutting line, and the second calculation unit is a cross section of each of the plurality of the partial ranges by the optical cutting method. Calculate the shape.

This configuration is an example of a method for measuring the cross-sectional shape of a partial range.

In the above configuration, a third process for calculating the variation in the amount of positional deviation between the partial range and the plurality of measurement points is executed for each of the plurality of the partial ranges, and the variation is set to a predetermined threshold value. With respect to the exceeding partial range, a plurality of portions formed by dividing the partial range into a plurality of portions are used as a new plurality of the partial ranges, and the third process is executed to newly calculate the variation. The third calculation unit further includes a calculation unit, and the third calculation unit executes the third process for the partial range in which the variation exceeds the threshold value until the variation becomes equal to or less than the threshold value. The first calculation unit calculates the average value for the partial range in which the variation is equal to or less than the threshold value.

When there is a large variation in the amount of positional deviation between the partial range and a plurality of measurement points for measuring the cross-sectional shape of this partial range, the amount of positional deviation between this partial range and the plurality of measurement points is the average of the amount of positional deviation. Even if a plurality of imaging units move in a direction in which the value becomes smaller, the measurement accuracy of the cross-sectional shape in this partial range does not improve. This is because when the variation is large, a measurement point is generated in which the amount of positional deviation is not sufficiently small.

According to this configuration, the third calculation unit executes the process of dividing the partial range in which the variation exceeds the threshold value until the variation becomes equal to or less than the threshold value. Therefore, the average value is calculated for all of the plurality of partial ranges with the variation reduced. Therefore, it is possible to improve the measurement accuracy of the cross-sectional shape in the measurement range.

In the above configuration, the control unit performs the first control in the order of the magnitude of the average value.

According to this configuration, the movement of the plurality of image pickup units can be made efficient, so that the measurement speed of the cross-sectional shape can be improved. The order of the magnitude of the average value may be the order of the smallest average value or the order of the largest average value.

In the above configuration, the first calculation unit calculates the average value with the portion of the measurement range included in each of the arranged imaging ranges as the partial range.

This configuration shows an example of a partial range. In this configuration, the portion of the measurement range located in the imaging range is a partial range. Therefore, the number of partial ranges and the number of image pickup units are the same.

In the above configuration, the first calculation unit calculates the average value with a portion of the measurement range included in each of the arranged imaging ranges as the partial range.

This configuration shows another example of a subrange. In this configuration, the number of partial ranges is larger than the number of image pickup units.

In the above configuration, the shape measuring device is formed of a rigid body and further includes a support member that supports the plurality of image pickup units, and the control unit controls the movement of the support member in the first control. , Controls to move the plurality of image pickup units integrally.

If the positional relationship between the plurality of image pickup units changes, the measurement accuracy of the cross-sectional shape in the measurement range decreases. In this configuration, a plurality of image pickup units are supported by a support member formed of a rigid body, and the movement of the support members is controlled to control the movement of the plurality of image pickup units integrally. Therefore, it is possible to prevent the positional relationship between the plurality of imaging units from changing.

In the above configuration, the control unit has a plurality of the imaging units at the second imaging position of the reference measuring range in which the reference measuring range that is the reference of the measuring range is covered in the arranged imaging ranges. After performing the second control of integrally moving the image, the third control is performed to make the plurality of image pickup units capture an image of the reference measurement range at the second image pickup position, and the first calculation unit performs the reference. An image of the reference measurement range is shown, and the average of the amount of positional deviation between the reference partial range corresponding to the partial range and the plurality of measurement points is taken as the average value, and instead of the first processing, the image of the reference measurement range is shown. The fourth process of calculating the average value based on the above is executed for each of the plurality of reference subranges formed by dividing the reference measurement range, and the control unit integrally integrates the plurality of image pickup units. After performing the fourth control of moving to the first imaging position, the first control is performed.

When the average value of the amount of misalignment is calculated using the measurement range itself, it is necessary to clarify the position of the measurement range on the image. For this purpose, for example, a scribe line indicating the measurement range is drawn on the measurement object. However, there are times when you do not want to draw a scribe line on the object to be measured. According to this configuration, since the average value of the amount of positional deviation is calculated using the reference measurement range, it is not necessary to draw a scribe line indicating the measurement range on the measurement target.

In the above configuration, a reference object having an edge within the reference measurement range is further provided.

According to this configuration, it is possible to save the trouble of drawing a line indicating the reference measurement range (for example, a scribing line) on the reference object.

The shape measuring method according to another aspect of the present invention is a shape measuring method in which imaging ranges are set side by side and uses a plurality of integrally movable imaging units, and the arranged imaging ranges are arranged. With a plurality of the imaging units located at the first imaging position of the measurement range in which the measurement range is covered with, the partial range that is a part of the measurement range and the cross-sectional shape of the partial range are obtained. The first calculation step for calculating the average value of the amount of positional deviation from the plurality of measurement points for the purpose, and the first calculation step for each of the plurality of the partial ranges formed by dividing the measurement range into a plurality of parts, and the portion. The plurality of imaging units are integrally moved in a direction in which the amount of positional deviation between the range and the plurality of measurement points is smaller by the average value when viewed from the first imaging position, and the imaging unit is moved to the imaging range. A control step of executing a first control for causing the imaging unit including the partial range to capture an image of the partial range for each of the plurality of the partial ranges, and an image of the partial range captured by the first control. A second calculation step of executing a second process of calculating the cross-sectional shape of the partial range for each of the plurality of the partial ranges is provided.

The shape measuring method according to another aspect of the present invention defines the shape measuring device according to one aspect of the present invention from the viewpoint of the method, and has the same function and effect as the shape measuring device according to one aspect of the present invention. ..

According to the present invention, the measurement range is divided into a plurality of parts, an image pickup of a part of the measurement range is assigned to each of the plurality of image pickup units, and the cross-sectional shape of the measurement range is measured based on the plurality of images obtained thereby. In this case, the measurement accuracy can be improved.

It is an overall block diagram which shows the shape measuring apparatus which concerns on embodiment. It is a top view of the measurement object and the reference object set in the shape measuring apparatus. It is a figure which shows the shape measuring apparatus when viewed from the front to the rear. It is a block diagram of a sensor part. In the embodiment, it is explanatory drawing explaining the planar positional relationship between a measurement range, a partial range, an optical cut line, and an image pickup range. It is a block diagram which shows the structure of the shape measuring apparatus which concerns on embodiment. It is a perspective view of the groove in which the optical cut line was formed. In the embodiment, it is explanatory drawing explaining the planar positional relationship between a reference measurement range, a reference partial range, an optical cut line, and an image pickup range. It is explanatory drawing explaining the positional relationship between a reference partial range and an optical cut line in one imaging range. It is a flowchart explaining the operation of the shape measuring apparatus which concerns on embodiment. It is explanatory drawing explaining 1st process of 1st control executed in Embodiment. It is explanatory drawing explaining the 2nd step. It is explanatory drawing explaining the 3rd process. It is explanatory drawing explaining the 4th process. In the first modification, it is explanatory drawing explaining the planar positional relationship between a measurement range, a partial range, an optical cut line, and an image pickup range. In the first modification, it is explanatory drawing explaining the planar positional relationship between a reference measurement range, a reference partial range, an optical cut line, and an image pickup range. It is explanatory drawing explaining the 1st process of 1st control executed in 1st modification. It is explanatory drawing explaining the 2nd step. It is explanatory drawing explaining the 3rd process. It is explanatory drawing explaining the 4th process. It is explanatory drawing explaining the 5th process. It is explanatory drawing explaining the 6th process. It is explanatory drawing explaining the 7th process. It is explanatory drawing explaining the 8th process. It is explanatory drawing explaining the 9th process. It is explanatory drawing explaining the tenth process. It is explanatory drawing explaining the 1st process of 1st control executed in 2nd modification. It is explanatory drawing explaining the 2nd step. It is explanatory drawing explaining the 3rd process. It is explanatory drawing explaining the 4th process. It is a block diagram which shows the structure of the shape measuring apparatus which concerns on 3rd modification. It is a flowchart explaining the operation of the shape measuring apparatus which concerns on 3rd modification. Of the explanatory diagrams illustrating an example of the method of measuring the amount of misalignment, it is an overall view of the main part. It is an enlarged sectional view among the explanatory views explaining an example of the method of measuring the amount of misalignment.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each figure, the configurations with the same reference numerals indicate that they are the same configuration, and the description of the configurations already described will be omitted. In the present specification, when they are generically referred to, they are indicated by reference numerals without subscripts (for example, sensor 13), and when they refer to individual configurations, they are indicated by reference numerals with subscripts (for example, sensor 13-1). ).

FIG. 1 is an overall configuration diagram showing a shape measuring device 1 according to an embodiment. FIG. 2 is a plan view of the measurement object 300 and the reference object 400 set in the shape measuring device 1 as viewed from above. The shape measuring device 1 is a device that measures the cross-sectional shape of the groove 302 with respect to the measurement object 300 in which the groove 302 is formed in a spiral shape. The shape measuring device 1 includes a mechanical unit ME and a computer unit CP. The mechanical unit ME performs various operations necessary for acquiring an image necessary for measuring the cross-sectional shape of the groove 302. The computer unit CP controls the machine unit ME and measures the cross-sectional shape of the groove 302 based on the image acquired by the machine unit ME.

In FIGS. 1 and 2, the Z direction refers to the longitudinal direction of the object to be measured 300, the + Z direction refers to the front in the longitudinal direction, and the −Z direction refers to the rear in the longitudinal direction. The Y direction points up and down, the + Y direction points up, and the -Y direction points down. The X direction refers to the left-right direction orthogonal to each of the Y direction and the Z direction, the + X direction points to the right when viewed from the rear to the front, and the -X direction points to the left when viewed from the rear to the front.

With reference to FIG. 1, the mechanical unit ME includes a pedestal unit 100, a stage 110, a support unit 120, a sensor unit 130, a mounting unit 140, and a ceiling unit 150.

On the surface of the object to be measured 300, a groove 302 is formed spirally with respect to the central axis CZ of the object to be measured 300. Although not shown in the drawings herein, the groove 302 extends spirally while twisting. As the measurement object 300, for example, a screw, a propeller, a drill, or the like is adopted.

The pedestal portion 100 has, for example, a flat plate shape and is fixed to the ground. The stage 110 is attached so as to be movable in the + Z direction and the −Z direction with respect to the pedestal portion 100, that is, to be movable in the longitudinal direction of the measurement object 300.

For example, a guide groove (not shown) is provided on the upper surface of the pedestal portion 100 along the Z direction, and a roller (not shown) that fits into the guide groove is provided on the bottom surface of the stage 110. As a result, the stage 110 can move along the Z direction on the pedestal portion 100 by guiding the rollers along the guide groove.

A pair of support portions 120 are erected at both ends of the stage 110 in the Z direction. The support portion 120 on the −Z direction side supports the end portion 320 on the −Z direction side of the measurement object 300, and the support portion 120 on the + Z direction side supports the end portion 320 on the + Z direction side of the measurement object 300. Here, the pair of support portions 120 support the measurement object 300 so that the longitudinal direction of the measurement object 300 is parallel to the Z direction.

With reference to FIG. 2, the measurement target 300 includes a measurement target region 310 in which a groove 302 is formed in a spiral shape, and a pair of end portions 320. Each of the pair of end portions 320 is a cylindrical member extending along the central axis CZ from the end portion on the Z direction side of the measurement target region 310.

With reference to FIG. 1, the measurement object 300 is rotatably supported by a pair of support portions 120 with the central axis CZ in the longitudinal direction as a rotation axis. Specifically, each of the pair of support portions 120 includes a bearing (not shown) into which the end portion 320 is inserted, and rotatably supports the object to be measured 300 via the bearing.

The ceiling portion 150 has, for example, a flat plate shape, and is provided on the upper side of the pedestal portion 100. A mounting portion 140 is mounted on the ceiling portion 150 so as to be movable in the Z direction. For example, the ceiling portion 150 is provided with a guide groove (not shown) parallel to the Z direction, and the upper surface of the mounting portion 140 is provided with a roller (not shown) that fits into the guide groove. The mounting portion 140 can be moved in the Z direction with respect to the ceiling portion 150 by being guided by a roller in this guide groove.

A sensor unit 130 is detachably attached to the lower surface of the attachment unit 140.

The sensor unit acquires an image for measuring the cross-sectional shape of the object. In the embodiment, a light cutting method is used to measure the cross-sectional shape of an object in a non-contact manner. In the light cutting method, by irradiating the surface of an object with sheet light, an optical cutting line is formed on the surface of the object, and light is cut from an imaging direction having a predetermined angle (for example, 45 degrees) with the irradiation direction of the sheet light. An image of a region including a line is imaged, and based on the image, height data of a cross section obtained by cutting the object along a light cutting line is calculated. In the optical cutting method, the three-dimensional shape of an object can be measured by scanning the object in a direction orthogonal to the direction in which the optical cutting line extends.

With reference to FIGS. 1 and 2, as one of the groove cross sections measured by the optical cutting method, there is a cross section C1 of the groove 302. The cross section C1 is a surface showing the shape of the groove 302 when the groove 302 is cut at the intersection P21 at a surface orthogonal to the extension direction L21 of the groove 302 (in other words, a surface along the width direction of the groove 302). .. The intersection P21 will be described. The intersection P21 is located above the central axis CZ. The intersection point P21 indicates a point where the groove bottom of the groove 302 is located at a position where the groove bottom line L23 passing through the bottom of the groove 302 and the central axis CZ are grade-separated. At the position Z1 directly above the intersection P21, the sensor unit 130 captures an image for measuring the shape of the cross section C1 in a non-contact manner. In this imaging, the light source of the sensor unit 130 irradiates the light cutting line in the direction orthogonal to the extending direction L21 (the width direction of the groove 302).

A groove 402 having a cross section C2 is formed in the reference object 400. The material of the reference object 400 is the same as the material of the measurement object 300. The design value of the cross section C2 is the same as the design value of the cross section C1. The design value is, in other words, the design shape and the design dimension.

The reference object 400 is installed on the upper surface of the support portion 120 on the + Z direction side. The extension direction L11 of the groove 402 is parallel to the extension direction L21 of the groove 302. The sensor unit 130 is positioned at a predetermined position Z2 above the reference object 400 by the mounting unit 140, and captures an image of the reference measurement range mr (FIG. 7) formed in the groove 402 of the reference object 400.

The cross section C2 is a surface showing the shape of the groove 402 when the groove 402 is cut at the intersection P11 at a surface orthogonal to the extension direction L11 of the groove 402 (in other words, a surface along the width direction of the groove 402). .. The intersection P11 will be described. The intersection P11 is located above the central axis CZ. The intersection P11 indicates a point where the groove bottom of the groove 402 is located at a position where the groove bottom line L13 passing through the bottom of the groove 402 and the central axis CZ sterically intersect. At the position Z2 directly above the intersection P11, the sensor unit 130 captures an image of the reference measurement range mr. In this imaging, the light source of the sensor unit 130 irradiates the light cutting line in the direction orthogonal to the extending direction L11 (the width direction of the groove 402).

The position Z1 is on the central axis CZ when the measurement object 300 is viewed from above to below. Therefore, after positioning the sensor unit 130 at the position Z2 and capturing an image of the reference measurement range mr, the sensor unit 130 is simply moved in the −Z direction and positioned at the position Z1 to measure the shape of the cross section C1. You can capture the required image.

In the embodiment, it is assumed that the object to be measured 300 is moved only in the Z direction and is not rotated around the central axis CZ. Therefore, the shape measuring device 1 cannot measure the shape of the entire region of the groove 302 of the object to be measured 300. Therefore, the shape measuring device 1 measures the shape of the cross section of the groove 302 at one place or several places. Here, a cross section (cross section C1) at one location will be described as an example.

The shape measuring device 1 may be configured by a cutting machine. In this case, the shape measuring device 1 becomes a cutting machine by replacing the sensor unit 130 with a processing blade. When cutting, a cylindrical object to be machined is mounted on the stage 110. Then, after the mounting portion 140 to which the machining blade is mounted is positioned at the position Z1, it moves in the −Y direction to bring the machining blade into contact with the object to be machined. Then, the object to be machined is moved in the −Z direction or the + Z direction by the stage 110 while being rotated around the central axis CZ by the support portion 120, so that the spiral groove 302 is formed. As a result, the object to be measured 300 is processed.

FIG. 3 is a diagram showing a shape measuring device 1 when viewed from the front to the rear. The support portion 120 includes a pillar portion 1202 erected on the stage 110 and a jig 1201 provided on the upper side of the pillar portion 1202. The reference object 400 is placed on the upper surface of the jig 1201. Therefore, the width of the jig 1201 in the X direction is slightly wider than the width of the pillar portion 1202.

The jig 1201 includes a semi-cylindrical hole 1203 that abuts on the upper half of the end 320. Further, the jig 1201 is provided with a hole 1204 that abuts on the lower half of the end portion 320. The hole 1203 and the hole 1204 form a bearing by sandwiching the end portion 320.

The sensor unit 130 will be described in detail. FIG. 4 is a configuration diagram of the sensor unit 130. This figure shows a state in which the shape of the cross section C1 of the groove 302 is measured by the sensor unit 130. The cross section C1 has an arcuate shape. When measuring the shape of the cross section C1, the sensor unit 130 sets a linear measurement range MR on the surface of the groove 302 on the cross section C1. Therefore, the measurement range MR is an arcuate line. The cross section obtained by cutting the groove 302 along the measurement range MR is the cross section C1.

The sensor unit 130 includes three sensors 13. Each sensor 13 includes a light source 11 and an image pickup unit 12. Since the entire image of the measurement range MR cannot be captured with the angle of view of one imaging unit 12, a plurality of imaging units 12 are used. In the embodiment, the number of image pickup units 12 is three.

The light source 11 is a laser light source that emits sheet light SL. The tip of the sheet light SL is linear. As a result, a light cut line is formed on the surface of the measurement object irradiated with the sheet light SL. The image pickup unit 12 is, for example, a camera equipped with a CCD image sensor or a CMOS image sensor and capable of shooting moving images. A predetermined angle (for example, 45 degrees) is formed between the optical axis of the light source 11 (not shown) and the optical axis of the imaging unit 12 (not shown).

The three (plural) sensors 13 are fixedly supported by the support member 10 formed of a rigid body. By forming the support member 10 with a rigid body, the positional relationship (distance relationship) between the three (plural) sensors 13 does not change. The support member 10 is, for example, a rigid body pedestal (rigid body plate) made of a steel material, a stainless steel material, or the like. These sensors 13 are fixed to the support member 10 by fastening members (for example, screws, bolts and nuts).

The measurement range MR is an arcuate line and is divided into three at equal intervals. The portion of these measurement range MRs is the partial range PR. Each sensor 13 irradiates the facing partial range PR with the sheet light SL, and captures an image of the region including the partial range PR. The distance between the sensor 13-1 and the partial region PR facing it, the distance between the sensor 13-2 and the partial region PR facing it, and the distance between the sensor 13-3 and the partial region PR facing it are, respectively. Have been equalized.

FIG. 5 is an explanatory diagram illustrating a planar positional relationship between the measurement range MR, the partial range PR, the optical cut line LC, and the imaging range IR in the embodiment. The image pickup range IR-1 of the image pickup unit 12-1, the image pickup range IR-2 of the image pickup unit 12-2, and the image pickup range IR-3 of the image pickup unit 12-3 are arranged along the measurement range MR. These imaging range IRs are continuously arranged (in other words, they are connected without a gap). Part of the adjacent imaging range IRs may overlap. When the sensor unit 130 is at the position Z1 (first imaging position) shown in FIG. 1, the measurement range MR is covered with three arranged imaging ranges.

The optical cut line LC-1 is formed on the surface of the groove 302 by the sheet light SL (FIG. 4) emitted from the light source 11-1. The optical cut line LC-1 is included in the imaging range IR-1. The optical cut line LC-2 is formed on the surface of the groove 302 by the sheet light SL emitted from the light source 11-2. The optical cut line LC-2 is included in the imaging range IR-2. The optical cut line LC-3 is formed on the surface of the groove 302 by the sheet light SL emitted from the light source 11-3. The optical cut line LC-3 is included in the imaging range IR-3.

Of the measurement range MR, the portion included in the imaging range IR-1 is one partial range PR. This partial range PR faces the sensor 13-1. Of the measurement range MR, the portion included in the imaging range IR-2 is one partial range PR. This partial range PR faces the sensor 13-2. Of the measurement range MR, the portion included in the imaging range IR-3 is one partial range PR. This partial range PR faces the sensor 13-3.

Since the shape measuring device 1 measures the shape of the cross section along the optical cut line LC, the positions of the partial range PR and the optical cut line LC (in other words, the measurement range MR and the optical cut line LC) should be the same. Is. For that purpose, the three optical cut lines LC must be connected in a straight line parallel to the measurement range MR. The three sensors 13 are attached to the support member 10 shown in FIG. In this mounting, errors inevitably occur in the mounting position and mounting angle. Therefore, an event occurs in which the three optical cut lines LC are not connected or these optical cut lines LC are not parallel to the measurement range MR.

FIG. 6 is a block diagram showing the configuration of the shape measuring device 1 according to the embodiment. The mechanical part ME is as described above. The computer part CP will be described. The computer unit CP includes a main body unit 710, an operation unit 720, and a display unit 730.

The main body unit 710 includes a control processing unit 711, a storage unit 712, a first calculation unit 713, a control unit 714, and a second calculation unit 715 as functional blocks. The main body unit 710 of the third modification, which will be described later, further includes a third calculation unit 718 (FIG. 16). The main body 710 is composed of a hardware processor (CPU, RAM, ROM, HDD, etc.), software, a program, data, etc. for realizing these functions.

The control processing unit 711 sets each unit (storage unit 712, first calculation unit 713, control unit 714, second calculation unit 715, third calculation unit 718 (FIG. 16)) of the main body unit 710 according to the function of each unit. It is a device for controlling each.

The storage unit 712 stores the software, programs, data, and the like.

With reference to FIGS. 1, 5 and 6, when the sensor unit 130 is located at position Z1 (first imaging position), the measurement range MR is covered by three arranged imaging ranges. The first calculation unit 713 calculates the average value of the amount of positional deviation between the partial range PR and a plurality of measurement points for obtaining the cross-sectional shape of the partial range PR in the state where the sensor unit 130 is located at the position Z1. The first process is executed for each of the three partial range PRs formed by dividing the measurement range MR into three parts. A plurality of measurement points are selected from the points located on the optical cut line LC. In the embodiment, the number of partial range PRs will be described as an example, but the present invention is not limited to this, and the number of partial range PRs may be a plurality.

The control unit 714 includes a movement control unit 716 and an image pickup control unit 717. The movement control unit 716 controls the stage 110, the support unit 120, and the mounting unit 140. Specifically, the movement control unit 716 moves the stage 110 in the Z direction by outputting a drive signal to a motor (not shown) that moves the stage 110 in the Z direction.

Further, the movement control unit 716 outputs a drive signal to a motor (not shown) that rotates the measurement object 300 around the central axis CZ, thereby rotating the measurement object 300 around the central axis CZ on the support unit 120. Let me. However, in the embodiment, it is assumed that the measurement object 300 is not rotated around the central axis CZ. Further, the movement control unit 716 moves the mounting unit 140 in the Z direction by outputting a drive signal to a motor (not shown) that moves the mounting unit 140 in the Z direction. As a result, the sensor unit 130 moves along the central axis CZ and is positioned at the position Z1 or the position Z2.

The image pickup control unit 717 displays an image of the region including the measurement range MR (FIG. 5) and the optical cut line LC, and an image of the region including the reference measurement range mr (FIG. 7) and the optical cut line LC on the sensor unit 130. Control to image.

With reference to FIGS. 5 and 6, the control unit 714 includes a movement control unit 716 and an image pickup control unit 717, and performs the first control. In the first control, the amount of positional deviation between the partial range PR and the plurality of measurement points (optical cut line LC) for obtaining the cross-sectional shape of the partial range PR is viewed from the first imaging position (position Z1). By controlling the sensor unit 130 to be moved in a direction that is smaller by the average value calculated by the first calculation unit 713, and the imaging unit 12 including the partial range PR in the imaging range IR to capture an image of the partial range PR. be. The control unit 714 executes the first control for each of the three subrange PRs.

In the first control, the control unit 714 controls the movement of the sensor unit 130 to integrally move the three image pickup units 12. In other words, the control unit 714 integrally moves the three image pickup units 12 by controlling the movement of the support member 10 shown in FIG. 4 in the first control.

If the mutual positional relationship between the three imaging units 12 changes, the measurement accuracy of the cross-sectional shape of the measurement range MR decreases. In the embodiment, the three image pickup units 12 are supported by the support member 10 formed of a rigid body, and the movement of the support members 10 is controlled to control the movement of the three image pickup units 12 integrally. Therefore, it is possible to prevent the positional relationship between the three image pickup units 12 from changing.

The second calculation unit 715 executes the second process of calculating the cross-sectional shape of the partial range PR based on the image of the partial range PR captured by the first control for each of the three partial range PRs. The optical cutting method is used to calculate the cross-sectional shape. The second calculation unit 715 calculates the height data of each of the plurality of measurement points set at equal intervals on the optical cut line LC, and based on these height data, the cross-sectional shape of the partial range PR. Is calculated.

The operation unit 720 is composed of an input device such as a keyboard or a mouse, and receives various operations from the operator. The various operations include an instruction to start measuring the cross-sectional shape and the like.

The display unit 730 is composed of, for example, a display device such as a liquid crystal display, and displays a measurement result of a cross-sectional shape or the like.

The first calculation unit 713 uses the reference object 400 to average the amount of positional deviation between the partial range PR and a plurality of measurement points (optical cut line LC) for measuring the cross-sectional shape of the partial range PR. (Hereinafter, it may be simply referred to as "the average value of the amount of misalignment"). explain in detail. FIG. 7 is a perspective view of the groove 402 in which the optical cutting line LC is formed. A reference measurement range mr is drawn on the surface of the groove 402 of the reference object 400 along the width direction of the groove 402. The reference measurement range mr is designed so that the shape, length, and extension direction coincide with the measurement range MR, and can be visually recognized. The reference measurement range mr is drawn, for example, by scribe. The cross section obtained by cutting the reference object 400 along the reference measurement range mr is the cross section C2.

With reference to FIGS. 4 and 7, a light cut line LC-1 is formed on the surface of the groove 402 by the sheet light SL emitted from the light source 11-1. The optical cutting line LC-2 is formed on the surface of the groove 402 by the sheet light SL emitted from the light source 11-2. The optical cut line LC-3 is formed on the surface of the groove 402 by the sheet light SL emitted from the light source 11-3. The reference measurement range mr and the optical cut line LC are displaced in the Z direction for the same reason as in the case of the measurement range MR and the optical cut line LC.

Of the edges of the reference object 300, an edge (edge 400a or edge 400b) having the same length, shape, and extending direction as the reference measurement range mr may be used as the reference measurement range mr. According to this, it is possible to save the trouble of drawing a scribe line indicating the reference measurement range mr on the reference object 400. When the optical cutting line LC is located outside the edge 400a (edge 400b), the optical cutting line LC is located outside the groove 402, and the amount of misalignment cannot be measured. Therefore, it is necessary to adjust the optical cutting line LC so as to be located inside the edge 400a (edge 400b).

FIG. 8 is an explanatory diagram illustrating a planar positional relationship between the reference measurement range mr, the reference partial range pr, the optical cut line LC, and the imaging range IR in the embodiment. The difference between FIG. 8 and FIG. 5 is that the position of the sensor unit 130 is the second imaging position (position Z2), there is a reference measurement range mr instead of the measurement range MR, and the reference partial range is used instead of the partial range PR. There is pr. When the position of the sensor unit 130 is the second imaging position (position Z2), the reference measurement range mr is covered with three arranged imaging range IRs. The positional relationship between the reference measurement range mr and the optical cut line LC shown in FIG. 8 is the same as the positional relationship between the measurement range MR and the optical cut line LC shown in FIG. The first calculation unit 713 regards the reference measurement range mr as the measurement range MR and the reference partial range pr as the partial range PR, and calculates the average value of the amount of misalignment. The direction of the positional deviation is the Z direction.

An imaging range IR-1 will be described as an example. FIG. 9 is an explanatory diagram illustrating the positional relationship between the reference partial range pr and the optical cut line LC-1 in the imaging range IR-1. The first calculation unit 713 sets a plurality of measurement points P on the optical cut line LC-1 captured in the image of the imaging range IR-1. The plurality of measurement points P are used to obtain the cross-sectional shape of the partial range PR. The first calculation unit 713 executes a process of calculating the amount of positional deviation between the measurement point P and the reference partial range pr for each of the plurality of measurement points P set in the optical cut line LC-1. A specific example of the method of calculating the amount of misalignment will be described later. In FIG. 9, the amount of positional deviation between each of the plurality of measurement points P and the reference partial range pr is indicated by “z”. The first calculation unit 713 calculates the average value of these positional deviation amounts.

With reference to FIGS. 5 and 8, the partial range PR and the reference partial range pr included in the imaging range IR-1 are the first, and the partial range PR and the reference partial range pr included in the imaging range IR-2 are the second. The partial range PR and the reference partial range pr included in the imaging range IR-3 are set to the third. The average value of the positional deviation between the first reference partial range pr and the optical cutting line LC-1 is the average value of the positional deviation between the first partial range PR and the optical cutting line LC-1. The average value of the amount of positional deviation between the second reference partial range pr and the optical cutting line LC-2 is the average value of the amount of positional deviation between the second partial range PR and the optical cutting line LC-2. The average value of the positional deviation between the third reference partial range pr and the optical cutting line LC-3 is the average value of the positional deviation between the third partial range PR and the optical cutting line LC-3.

A plurality of measurement points P (FIG. 9) for obtaining the cross-sectional shape of the partial range PR are set on the optical cut line LC. Therefore, the average value of the positional deviation between the partial range PR and the optical cut line LC is the average value of the positional deviation between the partial range PR and the plurality of measurement points P for measuring the cross-sectional shape of the partial range PR. Means. The average value of the amount of positional deviation between the reference partial range pr and the optical cut line LC is determined by the partial range PR corresponding to the reference partial range pr and a plurality of measurement points P for measuring the cross-sectional shape of this partial range PR. It means the average value of the amount of misalignment. The subrange PR corresponding to the reference subrange pr is a subrange PR in the same order as the reference subrange pr (for example, when the reference subrange pr is the first, it is the first subrange PR).

When calculating the average value of the amount of positional deviation using the measurement range MR itself, it is necessary to clarify the position of the measurement range MR on the image. For this purpose, for example, a scribe line indicating the measurement range MR is drawn on the surface of the groove 302 corresponding to the cross section C1 shown in FIG. However, there are cases where it is not desirable to draw a scribe line in the groove 302 of the object to be measured 300. According to the embodiment, since the average value of the amount of positional deviation is calculated using the reference measurement range mr provided in the reference object 400, a scribe line indicating the measurement range MR is drawn in the groove 302 of the measurement object 300. It does not have to be.

The operation of the shape measuring device 1 according to the embodiment will be described. FIG. 10 is a flowchart illustrating this operation. With reference to FIGS. 1 and 6, the control processing unit 711 instructs the movement control unit 716 to move the position of the sensor unit 130 to the position Z2 (second imaging position). The movement control unit 716 controls to move the mounting unit 140 and move the sensor unit 130 mounted on the mounting unit 140 to the position Z2 (second control) (step S1 in FIG. 10). An optical cut line LC is formed on the surface of the groove 402. The positional relationship between the reference measurement range mr and the optical cut line LC is as shown in FIG.

With reference to FIGS. 6 and 8, the control processing unit 711 instructs the image pickup control unit 717 to have the sensor unit 130 capture an image. As a result, the image pickup control unit 717 has the image pickup unit 12-1 provided in the sensor 13-1 an image of the image pickup range IR-1 including the optical cut line LC-1 and the first reference partial range pr, and the sensor 13-. The image pickup unit 12-2 provided in 2 has an image of the image pickup range IR-2 including the optical cut line LC-2 and the second reference partial range pr, and the image pickup unit 12-3 provided in the sensor 13-3 has light. Control is performed (third control) to capture images of the imaging range IR-3 including the cutting line LC-3 and the third reference partial range pr (step S2 in FIG. 10).

Based on these images, the first calculation unit 713 performs a process (fourth process) of calculating the average value of the amount of positional deviation between the reference partial range pr and the optical cut line LC in each imaging range IR (fourth process). Step S3 in FIG. 10). Specifically, the first calculation unit 713 calculates the average value of the amount of positional deviation between the reference partial range pr and the optical cut line LC-1 based on the image of the imaging range IR-1 captured in step S2. Based on the calculated image of the imaging range IR-2 captured in step S2, the average value of the amount of positional deviation between the reference partial range pr and the optical cut line LC-2 was calculated, and the image was captured in step S2. Based on the image of the imaging range IR-3, the average value of the amount of positional deviation between the reference partial range pr and the optical cut line LC-3 is calculated.

With reference to FIGS. 1 and 6, the control processing unit 711 instructs the movement control unit 716 to move the position of the sensor unit 130 to the position Z1 (first imaging position). As a result, the movement control unit 716 controls to move the mounting unit 140 and move the sensor unit 130 mounted on the mounting unit 140 to the position Z1 (fourth control) (step S4 in FIG. 10). An optical cutting line LC is formed on the surface of the groove 302. The positional relationship between the measurement range MR and the optical cut line LC is as shown in FIG.

With reference to FIGS. 5 and 6, the control unit 714 performs the first control for the three partial range PRs in order from the first partial range PR (step S5 in FIG. 10). explain in detail. FIG. 11 is an explanatory diagram illustrating the first control executed in the embodiment. In this figure, the measurement range MR, the partial range PR, and the optical cut line LC shown in FIG. 5 are shown. The average value of the positional deviation between the first partial range PR and the optical cutting line LC-1 is z1, and the average value of the positional deviation between the second partial range PR and the optical cutting line LC-2 is z2. The average value of the amount of positional deviation between the third partial range PR and the optical cut line LC-3 is z3 (z2 <z1 <z3). The average value z1 is an average value of the amount of positional deviation between the first reference partial range pr shown in FIG. 8 and the optical cut line LC-1, and is calculated in advance in step S3. The average value z2 is an average value of the amount of positional deviation between the second reference partial range pr and the optical cut line LC-2, and is calculated in advance in step S3. The average value z3 is an average value of the amount of positional deviation between the third reference partial range pr and the optical cut line LC-3, and is calculated in advance in step S3.

FIG. 11A shows the state where the position of the sensor unit 130 is the position Z1 as in FIG. FIG. 11B shows a state in which the sensor unit 130 is moved from the position Z1 by the average value z1 of the positional deviation amount between the first partial range PR and the optical cut line LC-1. FIG. 11C shows a state in which the sensor unit 130 is moved from the position Z1 by the average value z2 of the positional deviation amount between the second partial range PR and the optical cut line LC-2. FIG. 11D shows a state in which the sensor unit 130 is moved from the position Z1 by the average value z3 of the position deviation amount between the third partial range PR and the optical cut line LC-3.

With reference to FIGS. 6 and 11, the movement control unit 716 has a position deviation amount between the first partial range PR and the optical cut line LC-1 when the position of the sensor unit 130 is the position Z1 (FIG. 11A). However, the sensor unit 130 is moved in a direction in which the average value z1 becomes smaller (FIG. 11B). The support member 10 (FIG. 4) that supports the sensor unit 130 is attached to the mounting unit 140, and the movement control unit 716 moves the sensor unit 130 by moving the mounting unit 140. The same applies to the movement of the following sensors. The imaging range IR-1 includes a first partial range PR and an optical cut line LC-1. The image pickup control unit 717 causes the image pickup unit 12-1 to take an image of the image pickup range IR-1.

As can be seen from FIG. 11B, the sensor unit is in a direction in which the amount of positional deviation between the first partial range PR and the optical cut line LC-1 is smaller by the average value z1 when viewed from the position Z1 (first imaging position). 130 is moving.

Next, in the movement control unit 716, in the state where the position of the sensor unit 130 is shown in FIG. 11B, the amount of positional deviation between the second partial range PR and the optical cut line LC-2 is reduced by z1-z2. , The sensor unit 130 is moved (FIG. 11C). The imaging range IR-2 includes a second partial range PR and an optical cut line LC-2. The image pickup control unit 717 causes the image pickup unit 12-2 to take an image of the image pickup range IR-2.

As can be seen from FIG. 11C, the sensor unit is in a direction in which the amount of positional deviation between the second partial range PR and the optical cut line LC-2 is smaller by the average value z2 when viewed from the position Z1 (first imaging position). 130 is moving.

Next, in the movement control unit 716, in the state where the position of the sensor unit 130 is shown in FIG. 11C, the amount of positional deviation between the third partial range PR and the optical cut line LC-3 is reduced by z3-z2. , The sensor unit 130 is moved (FIG. 11D). The imaging range IR-3 includes a third partial range PR and an optical cut line LC-3. The image pickup control unit 717 causes the image pickup unit 12-3 to take an image of the image pickup range IR-3.

As can be seen from FIG. 11D, the sensor unit is such that the amount of positional deviation between the third partial range PR and the optical cut line LC-3 is smaller by the average value z3 when viewed from the position Z1 (first imaging position). 130 is moving.

The second calculation unit 715 calculates the cross-sectional shape of the first partial range PR based on the image of the imaging range IR-1 including the first partial range PR and the optical cut line LC-1, and the second calculation unit 715. Based on the image of the imaging range IR-2 including the partial range PR and the optical cut line LC-2, the cross-sectional shape of the second partial range PR is calculated, and the third partial range PR and the optical cut line LC-3 are calculated. Based on the image of the imaging range IR-3 including the image, the cross-sectional shape of the third partial range PR is calculated (step S6 in FIG. 10). As a result, the cross-sectional shape of the measurement range MR (the shape of the cross-sectional C1) is calculated.

The main effects of the embodiments will be described. The first calculation unit 713 calculates the average value of the amount of positional deviation between the partial range PR and the optical cut line LC using the reference partial range pr (step S3 in FIG. 10). The control unit 714 moves the sensor unit 130 in a direction in which the amount of positional deviation is smaller by the average value calculated by the first calculation unit 713 when viewed from the position Z1 (first image pickup position) (three image pickup units). (12 is moved integrally), and the first control for causing the imaging unit 12 including the partial range PR in the imaging range IR to image the image of the partial range PR is executed for each of the three partial range PRs (FIG. 12). Step S5 of 10. As a result, at the time of imaging each image of the three partial range PRs, the average of the amount of positional deviation between the plurality of measurement points (optical cut line LC) for measuring the cross-sectional shape of the partial range PRs and the partial range PRs. The value can be made smaller than the average value calculated by the first calculation unit 713. Therefore, according to the shape measuring device 1 according to the embodiment, the measurement range MR is divided into a plurality of parts, and the image pickup of a part (partial range PR) of the measurement range MR is assigned to each of the plurality of image pickup units 12, thereby obtaining the image. When measuring the cross-sectional shape of the measurement range MR based on the plurality of images obtained, the measurement accuracy can be improved.

In the embodiment and the modification described later, the average value of the position deviation amount is calculated by using the reference partial range pr, but the average value of the position deviation amount can be calculated by using the measurement range MR. good. In this case, a line indicating the measurement range MR (for example, a scribing line) is drawn on the surface of the groove 302 corresponding to the cross section C1 shown in FIG. 4, and instead of steps S1, S2, and S3 shown in FIG. The following steps S1a, S2a, and S3a are executed, and the execution of step S4 becomes unnecessary.

With reference to FIGS. 1 and 6, the movement control unit 716 controls to move the mounting unit 140 and move the sensor unit 130 mounted on the mounting unit 140 to the position Z1 (step S1a). The positional relationship between the measurement range MR and the optical cut line LC is as shown in FIG.

With reference to FIGS. 5 and 6, the image pickup control unit 717 includes an image pickup unit 12-1 provided in the sensor 13-1, an image pickup range IR-1 including an optical cut line LC-1 and a first partial range PR. Image of the image, the image of the image pickup range IR-2 including the optical cut line LC-2 and the second partial range PR in the image pickup unit 12-2 provided in the sensor 13-2, and the image pickup unit 12 provided in the sensor 13-3. -3 is made to capture an image of the imaging range IR-3 including the optical cut line LC-3 and the third partial range PR (step S2a).

The first calculation unit 713 calculates the average value of the amount of positional deviation between the first partial range PR and the optical cut line LC-1 based on the image of the imaging range IR-1 captured in step S2a. Based on the image of the imaging range IR-2 captured in step S2a, the average value of the amount of positional deviation between the second partial range PR and the optical cut line LC-2 is calculated, and the imaging captured in step S2a is performed. Based on the image of the range IR-3, the average value of the amount of positional deviation between the third partial range PR and the optical cut line LC-3 is calculated (step S3a).

A modified example of the embodiment will be described. The first modification will be described. As shown in FIG. 5, in the embodiment, the portion of the measurement range MR included in each of the arranged imaging range IRs is defined as the partial range PR. Therefore, in the embodiment, the number of partial range PRs included in one imaging range IR is one. On the other hand, in the first modification, the number of partial range PRs included in one imaging range IR is a plurality. The number of partial range PRs included in one imaging range IR will be described as an example. FIG. 12 is an explanatory diagram illustrating a planar positional relationship between the measurement range MR, the partial range PR, the optical cut line LC, and the imaging range IR in the first modification. FIG. 13 is an explanatory diagram illustrating a planar positional relationship between the reference measurement range mr, the reference partial range pr, the optical cut line LC, and the imaging range IR in the first modification.

In the first modification, the portion of the measurement range MR (reference measurement range mr) included in each of the arranged imaging range IRs is further divided, and the portion further divided is referred to as a partial range PR (reference partial range pr). Since the number of partial range PRs (reference partial range prs) included in one imaging range IR is 3, the number of partial range PRs (reference partial range prs) is nine. The 1st to 9th partial range PRs are represented by (1) PR to (9) PR, and the 1st to 9th reference partial range prs are represented by (1) pr to (9) pr. ..

In the first modification, the first calculation unit 713 (FIG. 6) calculates the average value of the amount of positional deviation between the first reference partial range pr and the optical cut line LC-1, and the second reference partial range pr. And the average value of the amount of positional deviation between the optical cutting line LC-1 and the optical cutting line LC-1, the average value of the amount of positional deviation between the third reference portion range pr and the optical cutting line LC-1 is calculated, and the fourth reference portion. The average value of the amount of positional deviation between the range pr and the optical cutting line LC-2 is calculated, the average value of the amount of positional deviation between the fifth reference partial range pr and the optical cutting line LC-2 is calculated, and the sixth is calculated. The average value of the amount of misalignment between the reference partial range pr and the optical cutting line LC-2 was calculated, and the average value of the amount of misalignment between the 7th reference partial range pr and the optical cutting line LC-3 was calculated. Calculate the average value of the positional deviation between the 9th reference partial range pr and the optical cutting line LC-3, and calculate the average value of the positional deviation between the 9th reference partial range pr and the optical cutting line LC-3. ..

The average value of the positional deviation between the first to ninth reference partial range pr and the optical cutting line LC is the average value of the positional deviation between the first to ninth partial range PR and the optical cutting line LC.

In the first modification, the first control is performed for each of the nine partial range PRs (step S5 in FIG. 10). FIG. 14 is an explanatory diagram illustrating the first control executed in the first modification. In this figure, the measurement range MR, the partial range PR, and the optical cut line LC shown in FIG. 12 are shown.

FIG. 14A shows the state where the position of the sensor unit 130 is the position Z1 as in FIG. FIG. 14B shows a state in which the sensor unit 130 is moved from the position Z1 by the average value of the positional deviation between the first partial range PR and the optical cut line LC-1. FIG. 14C shows a state in which the sensor unit 130 is moved from the position Z1 by the average value of the positional deviation between the second partial range PR and the optical cut line LC-1. FIG. 14D shows a state in which the sensor unit 130 is moved from the position Z1 by the average value of the positional deviation between the third partial range PR and the optical cut line LC-1.

FIG. 14E shows a state in which the sensor unit 130 is moved from the position Z1 by the average value of the positional deviation between the fourth partial range PR and the optical cut line LC-2. FIG. 14F shows a state in which the sensor unit 130 is moved from the position Z1 by the average value of the positional deviation between the fifth partial range PR and the optical cut line LC-2. FIG. 14G shows a state in which the sensor unit 130 is moved from the position Z1 by the average value of the positional deviation between the sixth partial range PR and the optical cut line LC-2.

FIG. 14H shows a state in which the sensor unit 130 is moved from the position Z1 by the average value of the positional deviation between the seventh partial range PR and the optical cut line LC-3. FIG. 14I shows a state in which the sensor unit 130 is moved from the position Z1 by the average value of the positional deviation between the eighth partial range PR and the optical cut line LC-3. FIG. 14J shows a state in which the sensor unit 130 is moved from the position Z1 by the average value of the positional deviation between the ninth partial range PR and the optical cut line LC-3.

In the first modification, the first control is performed in order from the first partial range PR for the nine partial range PRs. Since the first control of the first modification is the same as the first control of the embodiment, the description thereof will be omitted.

The second modification will be described. In the second modification, the control unit 714 performs the fourth control (step S4 in FIG. 10) and then performs the first control in ascending order of the average value of the displacement amounts (step S5 in FIG. 10). FIG. 15 is an explanatory diagram illustrating the first control executed in the second modification. In this figure, the measurement range MR, the partial range PR, and the optical cut line LC shown in FIG. 5 are shown. The average values z1 to z3 are the same as the average values z1 to z3 shown in FIG.

FIG. 15A shows the state where the position of the sensor unit 130 is the position Z1 as in FIG. 11A. FIG. 15B shows a state in which the sensor unit 130 is moved from the position Z1 by the average value z2 of the position deviation amount between the second partial range PR and the optical cut line LC-2. FIG. 15C shows a state in which the sensor unit 130 is moved from the position Z1 by the average value z1 of the positional deviation amount between the first partial range PR and the optical cut line LC-1. FIG. 15D shows a state in which the sensor unit 130 is moved from the position Z1 by the average value z3 of the position deviation amount between the third partial range PR and the optical cut line LC-3.

In the second modification, the first control is performed in ascending order of the average value of the amount of positional deviation. With reference to FIGS. 6 and 15, the movement control unit 716 has a position deviation amount between the second partial range PR and the optical cut line LC-2 when the position of the sensor unit 130 is the position Z1 (FIG. 15A). However, the sensor unit 130 is moved in a direction in which the average value z2 becomes smaller (FIG. 15B). The imaging range IR-2 includes a second partial range PR and an optical cut line LC-2. The image pickup control unit 717 causes the image pickup unit 12-2 to take an image of the image pickup range IR-2.

Next, in the movement control unit 716, in the state where the position of the sensor unit 130 is shown in FIG. 15B, the amount of positional deviation between the first partial range PR and the optical cut line LC-1 is reduced by z1-z2. , The sensor unit 130 is moved (FIG. 15C). The imaging range IR-1 includes a first partial range PR and an optical cut line LC-1. The image pickup control unit 717 causes the image pickup unit 12-1 to take an image of the image pickup range IR-1.

Next, in the movement control unit 716, in the state where the position of the sensor unit 130 is shown in FIG. 15C, the amount of positional deviation between the third partial range PR and the optical cut line LC-3 is reduced by z3-z1. , The sensor unit 130 is moved (FIG. 15D). The imaging range IR-3 includes a third partial range PR and an optical cut line LC-3. The image pickup control unit 717 causes the image pickup unit 12-3 to take an image of the image pickup range IR-3.

The total movement amount of the sensor unit 130 will be compared between the second modification and the embodiment. The total movement amount T1 of the sensor unit 130 of the second modification is represented by the equation 1.
T1 = z2 + (z1-z2) + (z3-z1)
= Z3 ... Equation 1

With reference to FIG. 11, the total movement amount T2 of the sensor unit 130 of the embodiment is represented by the equation 2.
T2 = z1 + (z1-z2) + (z3-z2)
= 2z1-2z2 + z3 ... Equation 2

Since the total movement amount T1 is smaller than the total movement amount T2, according to the second modification, the movement of the sensor unit 130 can be made more efficient than in the embodiment. In the second modification, the first control is performed in ascending order of the average value of the misalignment amount, but the first control may be performed in the order of the largest average value of the misalignment amount.

A third modification will be described. A plurality of measurement points P (FIG. 9) for obtaining the cross-sectional shape of the partial range PR are set on the optical cut line LC. When there is a large variation in the amount of positional deviation between the partial range PR and a plurality of measurement points set in the optical cutting line LC, the amount of positional deviation between this partial range PR and the optical cutting line LC is only the average value of the amount of positional deviation. Even if the sensor unit 130 is moved in the direction of becoming smaller, the measurement accuracy of the cross-sectional shape of this partial range PR does not improve. This is because when the variation is large, a measurement point is generated in which the amount of positional deviation is not sufficiently small.

Therefore, in the third modification, when the variation in the amount of positional deviation between the partial range PR and the plurality of measurement points set in the optical cut line LC exceeds a predetermined threshold value, the variation is equal to or less than the threshold value. The partial range PR is divided until For example, when the position shift amount is calculated using the reference measurement range mr as in the embodiment, the variation in the position shift amount between the reference partial range pr and the plurality of measurement points set in the optical cut line LC is previously found. If the threshold is exceeded, the reference subrange pr is divided until the variability is less than or equal to the threshold.

The predetermined value is predetermined based on the target value of the average value of the amount of positional deviation. The variation in the amount of misalignment is the difference between the maximum value and the minimum value of the amount of misalignment, the variance, the standard deviation, and the like.

FIG. 16 is a block diagram showing the configuration of the shape measuring device 2 according to the third modification. In the shape measuring device 2, the main body 710 of the shape measuring device 1 shown in FIG. 6 further includes a third calculation unit 718. The third calculation unit 718 performs the following processing before the first calculation unit 713 calculates the average value of the displacement amount. The third calculation unit 718 executes the third process of calculating the variation in the amount of positional deviation between the reference partial range pr and the plurality of measurement points set in the optical cut line for each of the plurality of reference partial range prs. For the reference subrange pr whose variation exceeds a predetermined threshold value, a plurality of parts formed by dividing the reference subrange pr into a plurality of parts are set as a new plurality of reference subrange prs, and the third process is executed. By doing so, the variation is newly calculated. The third calculation unit 718 executes the third process for the partial range PR whose variation exceeds the threshold value until the variation becomes equal to or less than the threshold value. When calculating the amount of positional deviation using the partial range PR, "reference partial range pr" is read as "partial range PR".

The operation of the shape measuring device 2 according to the third modification will be described. FIG. 17 is a flowchart illustrating this operation. Step S1 and step S2 are the same as steps S1 and S2 shown in FIG.

With reference to FIGS. 8 and 16, the third calculation unit 718 is based on the image of the imaging range IR, the reference partial range pr, and a plurality of measurement points set in the optical cut line LC (in other words, this). Three reference processes (third process) for calculating the variation in the amount of positional deviation of (multiple measurement points set on the optical cutting line LC) in order to obtain the cross-sectional shape of the reference partial range pr and the corresponding partial range PR. This is performed for each of the subrange prs (step S11 in FIG. 17).

The third calculation unit 718 executes a process of determining whether or not the variation in the amount of positional deviation exceeds a predetermined threshold value for each of the three reference subrange prs (step S12 in FIG. 17).

The third calculation unit 718 sets the reference partial range pr to, for example, three for the reference partial range pr that is determined that the variation in the amount of positional deviation exceeds the threshold value (Yes in step S12 of FIG. 17). Separately, a new reference subrange pr is generated (step S13 in FIG. 17). The number of dividing the reference subrange pr is not limited to 3, and may be a plurality. The third calculation unit 718 executes the process of step S12 for each of the three newly generated reference partial range prs.

The first calculation unit 713 calculates the average value of the position deviation amount for the reference partial range pr (No in step S12 of FIG. 17) in which the third calculation unit 718 determines that the variation in the position deviation amount is equal to or less than the threshold value. (Step S3 in FIG. 17). This is the same as step S3 shown in FIG. Subsequent steps are the same as the steps shown in FIG.

With reference to FIG. 8, for example, the variation in the amount of misalignment exceeds the threshold value for the third reference subrange pr, and the variation in the amount of misalignment for the first and second reference subrange prs. It should be below the threshold. In this case, the third calculation unit 718 divides the third reference subrange pr into three to generate the seventh to ninth new reference subrange prs as shown in FIG.

According to the third modification, the third calculation unit 718 executes the process of dividing the reference partial range pr whose variation exceeds the threshold value until the variation becomes equal to or less than the threshold value. Therefore, the average value is calculated for all of the plurality of reference subrange prs with the variation reduced. Therefore, the measurement accuracy of the cross-sectional shape of the measurement range MR can be improved.

The method of calculating the amount of positional deviation will be described by taking as an example the first reference partial range pr shown in FIG. 8 and the optical cutting line LC-1. FIG. 18 is an explanatory diagram illustrating this. FIG. 18A is an overall view of the main part, and FIG. 18B is an enlarged sectional view. Reference numeral AX1 indicates an optical axis of the light source 11-1, and reference numeral AX2 indicates an optical axis of the imaging unit 12-1.

With reference to FIGS. 8 and 18, the image pickup unit 12-1 takes an image of the optical cut line LC-1 formed in the groove 402 by the light source 11-1. Next, the first calculation unit 713 obtains the shape of the reference partial range pr (profile of the reference partial range pr) and the shape of the optical cut line LC-1 (laser line profile) from the image.

Next, the first calculation unit 713 determines the distance ΔZ (Xn) between the reference partial range pr and the optical cut line LC-1 at each point Xn on the X axis at each predetermined first interval set in advance. Is obtained as the amount of positional deviation z (Xn) (z (Xn) = ΔZ (Xn)). More specifically, since the imaging unit 12-1 faces the groove 402 of the reference object 400 at a predetermined angle φ, as shown in FIG. 18B on the image, the apparent distance (apparent position deviation). Amount) E is required. This apparent distance E is a projection of the actual distance ΔZ (actual position deviation amount z) onto a plane having the optical axis AX2 of the imaging unit 12-1 as a normal. Therefore, the actual distance ΔZ is E / cosφ. Therefore, in the calculation of the position shift amount z (Xn), the actual length (converted length) g of the subject reflected in one pixel is obtained and stored in advance in the storage unit 712 (FIG. 6), and the reference portion at the point Xn. The number of pixels en in the Z direction between the range pr and the optical cut line LC-1 is obtained, the calculated number of pixels en is multiplied by the conversion length g (en × g), and the multiplication result is divided by cosφ. Then, the distance ΔZ (Xn) (= position deviation amount z (Xn) = en × g / cosφ) is obtained. As a result, the amount of positional deviation z (Pn (Xn)) at each point Pn (Xn) is obtained with respect to the groove 402 of the reference object 400.

1, 2 Shape measuring device 10 Support member 11-1 to 11-3 Light source 12-1 to 12-3 Imaging unit 13-1 to 13-3 Sensor 130 Sensor unit 300 Measurement target 302 Groove 400 Reference 400a, 400b Edge 402 Groove IR-1 to IR-3 Imaging range LC-1 to LC-3 Optical cut line MR Measurement range mr Reference measurement range P Measurement point PR Part range pr Reference part range SL Sheet light Z1 position (first imaging position)
Z2 position (second imaging position)

Claims (10)

The imaging range is set side by side, and there are multiple imaging units that can be moved integrally, and
A partial range that is a part of the measurement range and a portion of the measurement range in a state where a plurality of the image pickup units are located at the first image pickup position of the measurement range in which the measurement range is covered by the arranged image pickup ranges. The first process of calculating the average value of the amount of positional deviation from a plurality of measurement points for obtaining the cross-sectional shape of the range is executed for each of the plurality of the partial ranges formed by dividing the measurement range into a plurality of parts. Calculation unit and
The plurality of image pickup units are integrally moved in a direction in which the amount of positional deviation between the partial range and the plurality of measurement points is smaller by the average value when viewed from the first image pickup position, and the image pickup is performed. A control unit that executes a first control for capturing an image of the partial range on the imaging unit including the partial range for each of the plurality of the partial ranges.
The present invention includes a second calculation unit that executes a second process of calculating the cross-sectional shape of the partial range based on the image of the partial range captured by the first control for each of the plurality of the partial ranges. Shape measuring device. When the control unit executes the first control, there are a plurality of the measurement points on the optical cut line.
The shape measuring device according to claim 1, wherein the second calculation unit calculates the cross-sectional shape of each of the plurality of partial ranges by an optical cutting method. The third process of calculating the variation in the amount of positional deviation between the partial range and the plurality of measurement points is executed for each of the plurality of the partial ranges, and the variation exceeds a predetermined threshold value. Regarding the partial range, a plurality of parts formed by dividing the partial range into a plurality of parts are used as a new plurality of the partial ranges, and by executing the third process, a third calculation unit for newly calculating the variation is further added. Prepare,
The third calculation unit executes the third process for the partial range in which the variation exceeds the threshold value until the variation becomes equal to or less than the threshold value.
The shape measuring device according to claim 1 or 2, wherein the first calculation unit calculates the average value for the partial range in which the variation is equal to or less than the threshold value. The shape measuring device according to any one of claims 1 to 3, wherein the control unit performs the first control in the order of the magnitude of the average value. The shape according to any one of claims 1 to 4, wherein the first calculation unit calculates the average value with a portion of the measurement range included in each of the arranged imaging ranges as the partial range. measuring device. One of claims 1 to 4, wherein the first calculation unit calculates the average value by using a portion of the measurement range included in each of the arranged imaging ranges as the partial range. The shape measuring device according to the section. The shape measuring device is formed of a rigid body and further includes a support member for supporting the plurality of image pickup units.
The first control, according to any one of claims 1 to 6, wherein the control unit controls the movement of the support member to integrally move the plurality of image pickup units. Shape measuring device. The control unit integrally integrates a plurality of the image pickup units at the second image pickup position of the reference measurement range in which the reference measurement range that is the reference of the measurement range is covered in the arranged image pickup ranges. After performing the second control of moving, the third control of causing the plurality of image pickup units to image the image of the reference measurement range at the second image pickup position is performed.
The first calculation unit indicates a portion of the reference measurement range, and the average of the amount of positional deviation between the reference partial range corresponding to the partial range and the plurality of measurement points is set as the average value, and the first process is performed. Instead, a fourth process of calculating the average value based on the image of the reference measurement range is executed for each of the plurality of reference subranges formed by dividing the reference measurement range.
The shape according to any one of claims 1 to 7, wherein the control unit performs the first control after performing the fourth control for integrally moving the plurality of the image pickup units to the first image pickup position. measuring device. The shape measuring apparatus according to claim 8, further comprising a reference object having an edge within the reference measurement range. It is a shape measurement method that uses multiple imaging units that can move integrally and the imaging ranges are set side by side.
A partial range that is a part of the measurement range and a portion of the measurement range in a state where a plurality of the image pickup units are located at the first image pickup position of the measurement range in which the measurement range is covered by the arranged image pickup ranges. The first process of calculating the average value of the amount of positional deviation from a plurality of measurement points for obtaining the cross-sectional shape of the range is executed for each of the plurality of the partial ranges formed by dividing the measurement range into a plurality of parts. Calculation steps and
The plurality of image pickup units are integrally moved in a direction in which the amount of positional deviation between the partial range and the plurality of measurement points is smaller by the average value when viewed from the first image pickup position, and the image pickup is performed. A control step of executing a first control for causing the image pickup unit including the partial range to capture an image of the partial range for each of the plurality of the partial ranges.
The present invention comprises a second calculation step of executing a second process of calculating the cross-sectional shape of the partial range based on the image of the partial range captured by the first control for each of the plurality of the partial ranges. Shape measurement method.

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