JP6984976B2 - Processing equipment and processing method - Google Patents

Description

The present invention relates to a processing apparatus and a processing method using an energy beam.

A laser processing technique for penetrating and cutting a cylindrical surface of a metal tube such as a stent with a laser beam is known (Patent Document 1). When a metal tube is irradiated with a laser beam to perform penetrating cutting, the inner wall surface facing the condensing point of the metal tube may be irradiated with the laser beam and the inner wall surface may be damaged. In the method disclosed in Patent Document 1, a rod-shaped protective mandrel is inserted into a metal tube and processed to protect the inner wall surface facing the condensing point.

Since the protective mandrel shields the laser beam, the laser beam does not reach the inner wall surface facing the focusing point. Therefore, it is possible to prevent damage to the inner wall surface facing the condensing point.

Japanese Unexamined Patent Publication No. 8-332230

When the shape of the workpiece is curved rather than linear, it is difficult to insert a rod-shaped protective mandrel into the workpiece. An object of the present invention is to provide a processing apparatus and a processing method applicable to workpieces having various shapes.

According to one aspect of the invention
The energy beam is attached to the workpiece including the workpiece to be cut through by the energy beam and the facing portion provided at the position where the energy beam is irradiated through the workpiece. A support device that supports the object to be processed so that it is irradiated with energy.
The supporting device supported by said workpiece, said possess a charging mechanism to inject the rolling element in a space between the opposing portion and the work portion,
The support device is provided with a processing device having a function of discharging the rolling element from the space between the workpiece and the facing portion by inclining the object to be processed and rolling the rolling element. ..

According to another aspect of the invention
The rolling element is held in the space between the workpiece and the facing portion of the object to be machined having the workpiece and the facing portion provided at a position separated by the space from the workpiece. ,
In a state where the rolling element is held in the space between the workpiece and the facing portion, the workpiece is irradiated with an energy beam to penetrate the workpiece, and after the penetration, the workpiece is penetrated. The energy beam passing through the above and toward the facing portion is shielded by the rolling element.
Provided is a processing method in which a rolling element is discharged from a space between the workpiece and the facing portion by inclining the rolling element after penetrating the workpiece and then rolling the rolling element. Will be done.

After the workpiece penetrates, the rolling element shields the energy beam toward the facing portion. Therefore, damage to the facing portion can be suppressed. The rolling element can be rolled to reach the space between the workpiece and the facing portion. Therefore, it is possible to drill a hole in a curved object to be machined.

1A is a schematic perspective view of a laser machining apparatus according to an embodiment, and FIG. 1B is a cross-sectional view orthogonal to the axial direction of a machining object. FIG. 2 is a schematic view of a laser processing apparatus before processing. 3A and 3B are a cross-sectional view parallel to the axial direction and a cross-sectional view perpendicular to the axial direction of the object to be machined at the time of machining, respectively. FIG. 4 is a cross-sectional view immediately after the through hole is formed in the object to be machined. FIG. 5 is a schematic view of the laser processing apparatus after the processing is completed. FIG. 6 is a cross-sectional view of an object to be machined when laser machining is performed by a laser machining apparatus according to another embodiment. 7A to 7C are cross-sectional views showing a step of holding a rolling element by a magnetic force by a laser processing apparatus according to a modification of the embodiment shown in FIG.

A laser processing apparatus according to an embodiment will be described with reference to FIGS. 1A and 1B.
FIG. 1A is a schematic perspective view of a laser processing apparatus according to an embodiment. The laser light source 10 outputs a laser beam for processing. As the laser light source 10, for example, an Nd: YAG laser oscillator can be used.

The laser beam output from the laser light source 10 is guided to the laser irradiation unit 12 via the laser transmission fiber 11. The laser irradiation unit 12 concentrates the laser beam on the surface of the object to be processed 50. Further, the laser irradiation unit 12 includes a nozzle that supplies assist gas toward the work point of the object to be machined 50. The scanning mechanism 15 moves the laser irradiation unit 12 with respect to the object to be machined 50. The scanning mechanism 15 is configured by, for example, connecting two linear motion mechanisms at right angles. By moving the laser irradiation unit 12, the laser beam can be incident on the target position of the workpiece 50.

The object to be machined 50 is supported by the support device 20. The support device 20 includes a grip portion 21, motors 22, and 23. The grip portion 21 grips and fixes the object to be machined 50. We define an xyz Cartesian coordinate system with the horizontal plane as the xy plane and the direction facing vertically upward as the positive direction of the z-axis. By driving one of the motors 22, the workpiece 50 supported by the grip portion 21 can be tilted in the x-axis direction with respect to the horizontal plane. By driving the other motor 23, the workpiece 50 supported by the grip portion 21 can be tilted in the y-axis direction with respect to the horizontal plane. In this way, the support device 20 can incline the workpiece 50 in two directions with respect to the horizontal plane. The object to be processed 50 is, for example, a tubular member having both ends open and curved, and is made of iron, stainless steel, resin, or the like.

The charging mechanism 30 loads a plurality of rolling elements 60 into the tubular object to be machined 50. The rolling element 60 is a shape that rolls on a slope due to gravity, for example, a spherical object. The loading mechanism 30 includes a rolling element storage container 31, a funnel 32, and a rolling element transfer mechanism 33. The rolling element transfer mechanism 33 transfers a plurality of rolling elements 60 stored in the rolling element storage container 31 to the funnel 32. The rolling element 60 transferred to the funnel 32 rolls from the outlet of the funnel 32 to the open end of the workpiece 50. The rolling element 60 thrown into the object to be processed 50 is collected in the collection container 37 after processing.

The control device 40 controls the laser light source 10, the scanning mechanism 15, the support device 20, and the closing mechanism 30. For example, the control device 40 transmits a laser beam output command to the laser light source 10. Further, the control device 40 operates the scanning mechanism 15 to move the laser irradiation unit 12 to a target position. The control device 40 drives the motors 22 and 23 of the support device 20 to change the posture of the object to be machined 50. Further, the control device 40 adjusts the position of the funnel 32 so that the rolling element 60 rolls from the funnel 32 into the opening of the workpiece 50, and operates the rolling element transfer mechanism 33 in the rolling element storage container 31. The rolling elements of the above are transferred to the funnel 32.

FIG. 1B is a cross-sectional view of the workpiece 50 orthogonal to the axial direction. A hole penetrating the machined portion 51 can be formed by injecting the laser beam 18 into the machined portion 51 of the object to be machined 50 and performing the penetrating cutting process. By moving the laser irradiation unit 12 (FIG. 1A) based on a predetermined pattern, the workpiece 50 can be cut through to a desired shape.

When a hole penetrating the workpiece 51 of the workpiece 50 is formed, the laser beam 18 passes through the space inside the workpiece 50 and is incident on the wall opposite to the workpiece 51. The wall opposite to the workpiece 51 is referred to as the facing portion 52.

Next, a laser processing method using the laser processing apparatus shown in FIG. 1 will be described with reference to FIGS. 2 to 5.

FIG. 2 is a schematic view of a laser processing apparatus before processing. The support device 20 includes a base 20A, an x-direction inclined portion 20B, and a y-direction inclined portion 20C. When the motor 22 is operated, the x-direction inclined portion 20B is inclined in the x-direction with respect to the base 20A. Along with the inclination of the x-direction inclined portion 20B, the y-direction inclined portion 20C also inclines in the x-direction. When the motor 23 is operated, the y-direction inclined portion 20C is inclined in the y-direction with respect to the x-direction inclined portion 20B. The grip portion 21 is fixed to the y-direction inclined portion 20C. By tilting the x-direction tilted portion 20B in the x-direction and the y-direction tilted portion 20C in the y-direction, the workpiece 50 gripped by the gripping portion 21 is tilted in two directions, the x-direction and the y-direction. be able to.

When the workpiece 51 of the workpiece 50 is positioned above the facing portion 52, the workpiece 50 has a shape curved downward in the vicinity of the workpiece 51 and the facing portion 52. There is. The object to be machined 50 having such a shape is gripped and fixed by the gripping portion 21 of the support device 20 in a posture in which the facing portion 52 is arranged at the lowest position.

The control device 40 moves the funnel 32 so that the outlet of the funnel 32 is inserted into one opening of the object 50 to be machined. The rolling element 60 is made of a magnetic material, and the rolling element transfer mechanism 33 has an electromagnet that can be moved by control from the control device 40. The control device 40 attracts the rolling element 60 in the rolling element storage container 31 with the electromagnet of the rolling element transfer mechanism 33 and moves it to the funnel 32. When the electromagnet is turned off above the funnel 32, the rolling element 60 adsorbed by the rolling element transfer mechanism 33 falls into the funnel 32. The rolling element 60 that has fallen into the funnel 32 rolls into the workpiece 50 due to gravity. The rolling element 60 that has rolled into the object to be machined 50 stays on the facing portion 52 at the lowermost end.

3A and 3B are a cross-sectional view parallel to the axial direction and a cross-sectional view perpendicular to the axial direction of the object to be machined 50 at the time of machining, respectively. The plurality of rolling elements 60 thrown into the object to be machined 50 are stationary and held on the facing portion 52 and in the vicinity thereof. In this state, the control device 40 (FIG. 1) outputs a laser beam from the laser light source 10 (FIG. 1). The laser beam output from the laser light source 10 is guided to the laser irradiation unit 12 and focused on the machined portion 51. The energy of the laser beam 18 melts the workpiece 51 to form a through hole.

FIG. 4 is a cross-sectional view immediately after the through hole is formed in the object to be machined 50. The laser beam 18 passes through the through hole formed in the workpiece 51, is introduced into the space inside the workpiece 50, and heads toward the facing portion 52. The rolling element 60 held on the facing portion 52 shields the laser beam 18 toward the facing portion 52.

The control device 40 (FIG. 1) controls the scanning mechanism 15 (FIG. 1) to move the laser irradiation unit 12, thereby performing penetrating cutting of the workpiece 50.

FIG. 5 is a schematic view of the laser processing apparatus after the processing is completed. When the machining is completed, the control device 40 controls the support device 20 to incline the workpiece 50. As a result, the rolling element 60 held on the facing portion 52 in the object to be machined 50 rolls in the object to be machined 50 and is discharged from one open end. The rolling element 60 discharged from the object to be processed 50 is collected in the collection container 37. The recovered rolling element 60 can be reused.

Next, the excellent effect obtained by performing laser processing using the laser processing apparatus according to the above embodiment will be described.

In the above embodiment, as shown in FIG. 4, after the through hole is formed in the workpiece 51 of the workpiece 50, the laser beam 18 toward the facing portion 52 is shielded by the rolling element 60. Since the laser beam 18 does not reach the facing portion 52, damage to the facing portion 52 can be suppressed. Further, since the rolling element 60 rolls in the workpiece 50 and reaches the space between the workpiece 51 and the facing portion 52, the workpiece 50 is not linear but is curved in a complicated manner. However, the rolling element 60 can be held in the space between the workpiece 51 and the facing portion 52.

It is also possible to arrange the powder on the facing portion 52 and shield the laser beam 18 toward the facing portion 52 with the powder. However, since the powder has a strong tendency to adhere to the inner wall of the object to be processed 50, it is difficult to discharge the powder to the outside of the object to be processed 50 without remaining in the object to be processed 50. In the above embodiment, since the rolling element 60 is used as a member for shielding the laser beam 18, the rolling element 60 is rolled and easily discharged from the processing object 50 by inclining the processing object 50 after processing. Can be done.

By adhering the scattered matter scattered by the laser processing to the rolling element 60, it is possible to suppress the adhesion of the scattered matter to the inner wall of the object to be machined 50. The shape and size of the rolling element 60 shall be such that even if the scattered material scattered by laser processing adheres to the rolling element 60, the rolling element 60 easily rolls in the processing object 50 and is discharged to the outside. Is preferable. For example, it is preferable that each of the rolling elements 60 is a sphere having a diameter of 5 mm or more.

When a through hole is formed in the object to be machined 50, the assist gas flows into the space inside the object to be machined 50 through the through hole. When the rolling element 60 is light, the force of the assist gas may cause it to scatter or move from the region between the workpiece 51 and the facing portion 52 to the surroundings. It is preferable to increase the mass of the rolling element 60 so that the rolling element 60 does not scatter or move even if the assist gas flows in. In order to prevent the rolling element 60 from scattering or moving, the mass of the rolling element 60 may be determined based on the flow velocity of the assist gas, the distance from the workpiece 51 to the rolling element 60, the shape of the facing portion 52, and the like. When the material of the rolling element 60 is determined, its mass depends on the volume (diameter), so that the preferable volume (diameter) of the rolling element 60 can be obtained from the condition of the preferable mass.

Next, a modification of the embodiment shown in FIGS. 1 to 5 will be described. In the above embodiment, a sphere is used as the rolling element 60, but a sphere other than the sphere may be used as long as it has a shape that rolls on a slope. For example, as the rolling element 60, a spheroid, a cylinder, or the like having the major axis of the ellipse as the center of rotation may be used.

Further, in the above embodiment, a magnetic material was used for the rolling element 60, and the rolling element 60 was transferred to the funnel 32 (FIG. 2) by the rolling element transfer mechanism 33 (FIG. 2) including an electromagnet. The rolling elements 60 may be transferred to the funnel 32 by other mechanisms. For example, the rolling element storage container 31 may be transferred to the upper part of the funnel 32 by using a robot arm, and the rolling element 60 may be transferred from the rolling element storage container 31 to the funnel 32.

As the material of the rolling element 60, it is preferable to use a material that is more difficult to be processed by the laser beam than the object to be processed 50. When the laser beam is focused on the workpiece 51 (FIGS. 3A and 3B) of the object to be processed 50, the laser beam spreads on the surface of the rolling element 60 and the power density decreases. Therefore, as the rolling element 60, a material that is not melted or ablated by a laser beam having a reduced power density may be used.

If the number of rolling elements 60 held in the space between the workpiece 51 and the facing portion 52 is too small, the laser beam may reach the facing portion 52 through the gap of the rolling elements 60. In order to suppress damage to the facing portion 52, it is preferable to dispose the rolling element 60 from the workpiece 51 to the facing portion 52 so that a gap through which the laser beam propagates does not occur. If the rolling element 60 is too large, this gap is likely to occur. It is preferable that the rolling element 60 is a sphere having a diameter of 20 mm or less so as not to generate a gap.

If the rolling elements 60 are too large for the internal space of the object to be machined 50, it is difficult to hold a sufficient number of rolling elements 60 in the space. In order to hold a sufficient number of rolling elements 60 in the space, the diameter of the rolling elements 60 shall be 1/20 or more and 1/3 or less of the distance from the inner wall of the workpiece 51 to the inner wall of the facing portion 52. Is preferable.

If the distance between the uppermost surface of the rolling element 60 and the workpiece 51 is too narrow, there is an increased risk that the rolling element 60 will be damaged by the laser beam 18 (FIG. 4). When the rolling element 60 is damaged and deformed, it becomes difficult to roll the rolling element 60 and discharge it from the object to be machined 50. In order to prevent the rolling element 60 from being damaged, the distance from the inner wall of the workpiece 51 (FIG. 3A) to the uppermost surface of the rolling element 60 is set from the inner wall of the workpiece 51 to the inner wall of the facing portion 52. It is preferably 1/2 or more of the interval.

In the above embodiment, the cylindrical tubular object to be processed 50 is dealt with, but it is also possible to process an object to be processed having another shape. For example, when machining an object to be machined having a structure in which a facing portion is provided with a space separated from the workpiece, the excellent effect of using the laser machining apparatus can be obtained.

In the above embodiment, the penetration cutting process of the object to be machined 50 is performed using the laser beam, but the process may be performed using another energy beam. Examples of the energy beam that can be used for processing other than the laser beam include an electron beam, an ion beam, a plasma jet, a liquid jet, and jet abrasive grains. When processing is performed using an energy beam other than the laser beam, it is preferable to use an energy beam source that outputs these energy beams instead of the laser light source 10 and the laser transmission fiber 11 (FIG. 1).

Next, with reference to FIG. 6, the laser processing apparatus according to another embodiment will be described. Hereinafter, the description of the common configuration with the laser processing apparatus according to the embodiment shown in FIGS. 1 to 5 will be omitted.

FIG. 6 is a cross-sectional view taken along the axial direction of the object to be machined 50 when laser machining is performed by the laser machining apparatus according to the present embodiment. In the embodiment shown in FIGS. 1 to 5, when the workpiece 50 is supported by the workpiece 50 in a posture located above the facing portion 52, the workpiece 50 is curved downward. In this embodiment, when the workpiece 50 is supported by the workpiece 50 in a posture located above the facing portion 52, the workpiece 50 is curved upward. Therefore, the rolling element 60 cannot be held by gravity in the space between the workpiece 51 and the facing portion 52.

In this embodiment, the support device 20 (FIG. 1) includes an electromagnet 25 arranged so as to face or contact the outer wall surface of the facing portion 52. When the control device 40 excites the electromagnet 25, the rolling element 60 is held in the space between the workpiece 51 and the facing portion 52 by magnetic force. In this embodiment, since the rolling element 60 made of a magnetic material is held by a magnetic force, the rolling element 60 can be held even in a portion where the workpiece 50 is curved upward. As a result, the object to be machined 50 can be held in an upwardly curved posture, and damage to the facing portion 52 can be suppressed when cutting through the wall surface facing upward.

Next, with reference to FIGS. 7A to 7C, a laser processing apparatus according to a modified example of the embodiment shown in FIG. 6 will be described. 7A to 7C are cross-sectional views of a work object 50 and an electromagnet 25 for showing a procedure for holding the rolling element 60 by a magnetic force. In the embodiment shown in FIG. 6, one electromagnet 25 is arranged to hold the rolling element 60 by magnetic force, but in this modified example, the electromagnet 25 has a plurality of excitation units 25A to 25A in the axial direction of the workpiece 50. It is divided into 25D and can be excited in each excitation unit 25A to 25D. In FIGS. 7A to 7C, the excited excitation unit is hatched at a higher density than the unexcited excitation unit.

As shown in FIG. 7A, the exciting unit 25A at the position farthest from the opening for inserting the rolling element 60 into the workpiece 50 is excited, and the other exciting units 25B to 25D are not excited. When the rolling element 60 is thrown into the object to be machined 50 in this state, the rolling element 60 is held in the region corresponding to the exciting unit 25A by the magnetic force generated in the exciting unit 25A.

Then, as shown in FIG. 7B, in addition to the exciting unit 25A, the exciting unit 25B at the position second farthest from the opening into which the rolling element 60 is inserted is excited. As a result, the rolling element 60 is held in the region corresponding to the exciting unit 25B due to the magnetic force generated in the exciting unit 25B.

As shown in FIG. 7C, the exciting unit 25C at the position third farthest from the opening into which the rolling element 60 is inserted is excited, and then the exciting unit 25D at the position closest to the opening is excited. As a result, the rolling element 60 is held in the region corresponding to the excitation units 25C and 25D.

In this way, by starting the excitation in order from the excitation unit 25A farther from the opening into which the rolling element 60 is inserted toward the excitation unit 25D closer to the opening into which the rolling element 60 is inserted, the machining target is processed. With respect to the axial direction of the object 50, the rolling element 60 can be held in the entire area where the electromagnet 25 is arranged with good reproducibility.

It goes without saying that each of the above embodiments is exemplary and the configurations shown in different examples can be partially replaced or combined. Similar actions and effects due to the same configuration of a plurality of examples will not be mentioned sequentially for each example. Furthermore, the present invention is not limited to the above-mentioned examples. For example, it will be obvious to those skilled in the art that various changes, improvements, combinations, etc. are possible.

10 Laser light source 11 Laser transmission fiber 12 Laser irradiation unit 15 Scanning mechanism 18 Laser beam 20 Support device 20A Base 20B x-direction tilting part 20C y-direction tilting part 21 Gripping part 22, 23 Motor 25 Electromagnet 25A, 25B, 25C, 25D Excitation Unit 30 Loading mechanism 31 Rolling element storage container 32 Lute 33 Rolling element transfer mechanism 37 Recovery container 40 Control device 50 Processing target 51 Processed part 52 Opposing part 60 Rolling element

Claims (13)

The energy beam is attached to the workpiece including the workpiece to be cut through by the energy beam and the facing portion provided at the position where the energy beam is irradiated through the workpiece. A support device that supports the object to be processed so that it is irradiated with energy.
The supporting device supported by said workpiece, said possess a charging mechanism to inject the rolling element in a space between the opposing portion and the work portion,
The support device is a processing device having a function of tilting the object to be machined and rolling the rolling element so that the rolling element is discharged from the space between the workpiece and the facing portion . The processing apparatus according to claim 1, wherein the processing object has a tubular shape, and the charging mechanism is for charging the rolling element into an internal space through an opening of the tubular processing object. The processing device according to claim 1 or 2 , wherein the support device has a function of holding the rolling element in a space between the machined portion and the facing portion. The object to be machined has a shape in which the facing portion is curved downward when the workpiece is positioned above the facing portion.
The support device adjusts the posture of the object to be machined so that the rolling element stands still on the facing portion under the action of gravity, so that the support device is between the workpiece and the facing portion. The processing apparatus according to claim 3 , which has a function of holding the rolling element in a space. The processing device according to claim 3 , wherein the rolling element contains a magnetic material, and the support device has a function of holding the rolling element in a space between the workpiece and the facing portion by magnetic force. By controlling the charging mechanism, the rolling element is charged into the space between the workpiece and the facing portion of the object to be machined supported by the support device.
The support device is controlled to hold the rolling element in the space between the workpiece and the facing portion.
A control device that controls an energy beam source to irradiate the machined portion of the machined object with the energy beam while the rolling element is held in the space between the machined portion and the facing portion. The processing apparatus according to any one of claims 3 to 5 , further comprising. The rolling element is held in the space between the workpiece and the facing portion of the object to be machined having the workpiece and the facing portion provided at a position separated by the space from the workpiece. ,
In a state where the rolling element is held in the space between the workpiece and the facing portion, the workpiece is irradiated with an energy beam to penetrate the workpiece, and after the penetration, the workpiece is penetrated. The energy beam passing through the above and toward the facing portion is shielded by the rolling element.
A processing method in which the rolling element is discharged from the space between the workpiece and the facing portion by inclining the rolling element after penetrating the workpiece and then rolling the rolling element. The object to be machined has a tubular shape, and when the rolling element is held in the space between the workpiece and the facing portion, the rolling element is held through the opening of the tubular object to be processed. The processing method according to claim 7 , wherein the machine is rolled to reach the space between the machined portion and the facing portion. The object to be machined has a shape in which the facing portion is curved downward when the workpiece is positioned above the facing portion, and the facing portion is placed on the facing portion by gravity. The processing method according to claim 7 or 8 , wherein the rolling element is held still in the space between the workpiece and the facing portion. The processing method according to claim 7 or 8 , wherein the rolling element contains a magnetic material, and the rolling element is held by a magnetic force in a space between the workpiece and the facing portion. The processing method according to any one of claims 7 to 10, wherein the rolling element has a diameter of 5 mm or more. The processing method according to any one of claims 7 to 11, wherein the rolling element has a diameter of 20 mm or less. The processing method according to any one of claims 7 to 12, wherein the diameter of the rolling element is 1/20 or more and 1/3 or less of the distance from the inner wall of the workpiece to the facing portion.

Images