JP6986317B2 - Mask unit and exposure equipment - Google Patents

Description

The invention of this application relates to an exposure apparatus used for pattern transfer in the manufacture of various products, and also relates to a mask unit mounted on the exposure apparatus.

An exposure apparatus that irradiates an object with a predetermined pattern of light to expose it is used in various applications as a core elemental technology of photolithography. A type of exposure apparatus that directly draws a pattern is also known, but usually, light is irradiated through a mask to transfer the pattern of the mask to an object.

The mask mounted on the exposure apparatus has a structure in which a pattern is drawn on a transparent glass plate with a light-shielding material. Usually, a glass plate is coated with a film of a light-shielding material and patterned by photolithography.
In contrast to such glass masks, so-called film masks have recently come to be widely used. The pattern is formed by the light-shielding material, which is a transparent thin film made of a material such as PET (polyethylene terephthalate) film, and has a structure in which this film (film mask) is received by a glass plate. ..
In the case of a film mask, the glass plate can be shared, and it is sufficient to manufacture and store various film masks according to the type. Therefore, the cost is low and it is easy to store and handle. The space required for storage is also reduced. For this reason, the number of exposure devices that use film masks is increasing.

Japanese Unexamined Patent Publication No. 61-411151 Japanese Unexamined Patent Publication No. 11-30851

Although the film mask has the above-mentioned advantages, it must be mounted on the exposure apparatus in a state of being sufficiently adhered to the glass plate, which is a problem. A thin and soft film mask tends to leave air bubbles in between even if it is applied to a glass plate to bring it into close contact. If air bubbles remain, the pattern of the film mask is distorted at that portion, so that the transferred pattern is also distorted, which tends to cause product defects.

For this reason, after pressing the film mask against the glass plate, it is necessary for the operator to rub it with a spatula to push out the air bubbles to the outside, which is an obstacle to the improvement of productivity. In addition, the film mask is distorted (stretched) when rubbed with a spatula, and the film mask is easily adhered to and fixed to the glass plate in the distorted state. The problem is that this distortion occurs randomly and is difficult to control. Therefore, it tends to lead to a decrease in the shape accuracy of the transferred pattern.
The invention of this application was made to solve the above-mentioned problems in the film mask, the film mask can be easily adhered to the transparent plate, and the shape accuracy of the transferred pattern is lowered. The purpose is to make sure there are no problems.

In order to solve the above problems, the invention according to claim 1 of the present application is a mask unit mounted on an exposure apparatus.
With a film mask,
A transparent plate that receives a film mask and
It is equipped with a mask frame that holds the transparent plate in the peripheral part.
The mask frame has a vacuum suction hole capable of vacuum suctioning the film mask.
The region of the surface of the transparent plate facing the film mask facing the film mask is provided with a concave portion or a convex portion forming a gas venting space reaching the edge of one side of the surface.
Further, in order to solve the above-mentioned problems, the invention according to claim 2 is the suction according to claim 1, wherein the mask frame can be vacuum-sucked on the inner surface facing the end face of the transparent plate. It has a structure of having a mouth.
Further, in order to solve the above problems, in the invention according to claim 3, in the configuration of claim 1 or 2, the transparent plate is a chamfered surface which is an oblique surface connecting a surface facing the film mask and an end surface. Has a part,
The portion is characterized in that the degassing space has a shape that reaches the middle of the chamfered portion.
Further, in order to solve the above-mentioned problem, the invention according to claim 4 has, in the configuration of any one of claims 1 to 3, the concave portion or the convex portion is the edge of the one side and the one side of the opposite surface. The edge of the one side is reached from the position between the edge of the side opposite to the edge, and the edge of the one side is reached from the position between the edge of the one side and the edge of the side opposite to the edge of the one side. It has a configuration in which it does not have a concave portion and a convex portion that reach the edge of the side opposite to the edge and form a degassing space.
Further, in order to solve the above problems, the invention according to claim 5 comprises a transport system for transporting a substrate to an exposure work position and a transport system.
The mask unit according to any one of claims 1 to 3 arranged at the exposure work position, and the mask unit.
An exposure apparatus including an exposure unit that irradiates light through the film mask in the mask unit to expose a substrate.
A cleaning head for removing foreign matter on the surface of the film mask and a head moving mechanism are provided.
The head moving mechanism is a mechanism for moving the cleaning head while contacting the film mask, and is a mechanism for moving the cleaning head from the edge of the side of the transparent plate opposite to the one side toward the edge of the one side. der is,
The concave portion or the convex portion reaches the edge of the one side from the middle position in the moving direction of the cleaning head on the surface of the transparent plate facing the mask frame, and the one side from the middle position in the moving direction of the cleaning head. It has a configuration that does not have a concave portion and a convex portion that reach the edge of the side opposite to the side and form a degassing space.
Further, in order to solve the above problems, the invention according to claim 6 is a cleaning roller in which the cleaning head has an adhesive layer formed on the surface and rotates while in contact with the film mask in the configuration of claim 5. It has the configuration.
Further, in order to solve the above problems, the invention according to claim 7 has the configuration according to claim 5 or 6 , wherein the head moving mechanism determines the moving speed when the cleaning head approaches the edge of one side. It has a configuration that it is a mechanism for decelerating.

As described below, according to the invention of claim 1 of the present application, the adsorption force at the edge of one side of the surface of the transparent plate facing the film mask is relaxed, and the gas generating bubbles creates a degassing space. Since it is discharged through the film, there is no residual air bubbles, and the film mask is in a state of being sufficiently adhered to the transparent plate. Therefore, the problem of deterioration in shape accuracy of the pattern to be transferred is eliminated.
Further, according to the second aspect of the present invention, the gas discharged through the degassing space is rapidly discharged from the suction port, so that the effect of preventing the residual bubbles is further enhanced.
Further, according to the third aspect of the present invention, in addition to the above effect, the degassing space reaches the middle of the chamfered portion, so that the film mask is strongly adsorbed at the chamfered portion and the gas escape is prevented from being hindered. To. Therefore, the effect of preventing residual bubbles is higher.
Further, according to the invention of claim 4, in addition to the above effect, the head moving mechanism removes air bubbles by moving the cleaning head, so that air bubbles can be removed and cleaning can be performed at the same time. In addition to this, it is possible to give reproducibility to the elongation of the film mask, and it is possible to prevent the problem of deterioration of the transfer accuracy of the pattern from occurring.
Further, according to the fifth aspect of the present invention, in addition to the above effects, since the cleaning head is a cleaning roller that rolls on the film mask, it is difficult for an excessive force to be applied to the film mask, and distortion of the film mask is prevented. It becomes suitable above.
Further, according to the invention of claim 6, in addition to the above effect, the cleaning head is decelerated when it approaches the edge of one side, so that there is no risk of gas backflow and prevention of residual bubbles without reducing productivity. The effect of can be made higher.

It is a front sectional schematic diagram of the mask unit of an embodiment. It is an exploded perspective schematic diagram of the mask unit of FIG. It is a plan view which looked at the mask frame and the glass plate from the lower side. It is a front sectional schematic diagram which showed the operation of the degassing groove. It is a front sectional schematic diagram which showed the problem when the degassing groove did not reach the chamfered portion. It is a schematic diagram which showed the other shape which forms the degassing space. It is a schematic diagram which showed the other shape which forms the degassing space. It is a front schematic diagram of the exposure apparatus of an embodiment. It is a front schematic diagram which showed the mask maintenance program provided in the exposure apparatus.

Next, an embodiment (embodiment) for carrying out the invention of this application will be described.
FIG. 1 is a schematic front sectional view of the mask unit of the embodiment, and FIG. 2 is an exploded perspective schematic view of the mask unit of FIG.
The mask unit shown in FIGS. 1 and 2 is a mask unit mounted on an exposure apparatus. This mask unit includes a film mask 1, a transparent plate 2, and a mask frame 3.

The film mask 1 is a transparent thin film made of a material such as polyester, and has a thickness of, for example, about 100 μm to 200 μm. Since it is mounted on an exposure apparatus, a pattern to be transferred (not shown) is drawn on the film mask 1. In this example, the film mask 1 is a square.

The transparent plate 2 is a member that receives the film mask 1 in order to form a stable shape without slack during exposure. In this embodiment, the transparent plate 2 is made of glass (glass plate). The transparent plate 2 needs to be sufficiently transparent to light having an exposure wavelength, but a glass plate commercially available under the name of a blue plate or a white plate can be used. The thickness is preferably about 5 mm to 10 mm from the viewpoint of ensuring mechanical strength. The transparent plate 2 is a square having a size slightly smaller than that of the film mask 1. Further, as the transparent plate 2, a material other than glass such as acrylic resin may be used.

FIG. 3 is a schematic plan view of the transparent plate 2 and the mask frame 32 as viewed from below. In FIG. 3, the film mask is not shown. The mask frame 3 is made of metal such as aluminum or stainless steel, and has a rectangular frame shape as shown in FIGS. 2 and 3. As shown in FIG. 1, the mask frame 3 has a step on the inner edge. The height of the step is substantially equal to the thickness of the transparent plate 2, and the transparent plate 2 is attached to the mask frame 3 in a state where the peripheral portion is located in the step. Hereinafter, among the steps, the surface 31 facing the end surface of the transparent plate 2 is referred to as an inner surface surface, and the surface 32 facing the plate surface of the transparent plate 2 is referred to as a plate receiving surface.

The transparent plate 2 is fixed to the mask frame 3 by adhesion at the peripheral portion. That is, as shown in FIG. 1, an adhesive layer 20 is provided between the upper surface of the peripheral portion of the transparent plate 2 and the plate receiving surface 32 of the mask frame 3. A gap 30 exists between the end surface of the transparent plate 2 and the inner side surface 31 of the mask frame 3. Hereinafter, this gap 30 is referred to as a surrounding space.

The film mask 1 is fixed to the transparent plate 2 and the mask frame 3 by vacuum suction. The surface 33 of the mask frame 3 that receives the film mask 1 is called a film receiving surface. As shown in FIG. 1, a vacuum suction hole 34 is formed on the film receiving surface 33. The vacuum suction hole 34 has a groove shape and extends to each side of the mask frame 3 to form a circumferential shape.

The vacuum suction hole 34 is connected to the pipe connecting portion 36 via a communication passage (detailed not shown) 35 provided in the mask frame 3. As shown in FIG. 1, when the mask unit is used, the exhaust pipe 61 is connected to the pipe connecting portion 36 and vacuum suction is performed. As a result, the film mask 1 is vacuum-sucked to the mask frame 3. Since the vacuum suction hole 34 is a circumferential groove, the peripheral portion of the film mask 1 is attracted to the mask frame 3 in a circumferential shape.
Further, a suction port 37 is formed on the inner side surface 31 of the mask frame 3, and the suction port 37 is connected to a communication passage 35 in the mask frame 3. Therefore, the surrounding space 30 is also evacuated to a negative pressure.

In this embodiment, the mask unit is used in a horizontal position, and the film mask 1 is held under the transparent plate 2 by vacuum suction. Hereinafter, for convenience of explanation, the surface of the transparent plate 2 on the film mask 1 side is referred to as the front surface, and the opposite side thereof is referred to as the back surface.

The mask unit of such an embodiment has a structure for preventing the generation of the above-mentioned bubbles. Specifically, as shown in FIGS. 1 and 2, a groove 21 is formed on the surface of the transparent plate 2. The groove 21 forms a space (hereinafter referred to as a degassing space) for allowing gas to escape so that bubbles are not formed between the film mask 1 and the transparent plate 2. Hereinafter, this groove 21 is referred to as a degassing groove.

As shown in FIG. 2, a plurality of degassing grooves 21 are provided, and each degassing groove 21 reaches the edge of the right side of the surface of the transparent plate 2. The direction in which each degassing groove 21 extends is parallel to the direction of the left and right sides of the transparent plate 2.
The left end of each degassing groove 21 is located far to the right of the center of the transparent plate 2. That is, each degassing groove 21 is formed so as to cross the margin region at the right end of the surface of the transparent plate 2.
When the transparent plate 2 is a glass plate, such a degassing groove 21 can be formed by grinding or chemical etching. When the transparent plate 2 is made of resin, it can be realized by the shape of the mold used at the time of molding.

Further, as shown in FIG. 1, a chamfered portion 22 is formed on the peripheral edge of the surface of the transparent plate 2. The chamfered portion 22 is an oblique surface that connects the surface and the end surface of the transparent plate 2. The chamfered portion 22 prevents the film mask 1 from being scratched by preventing the peripheral edge of the surface of the transparent plate 2 from having sharp corners. Then, as shown in FIG. 1, each degassing groove 21 reaches the chamfered portion 22 from the edge of the surface, and the middle of the chamfered portion 22 is terminated.

With each of the degassing grooves 22 as described above, the film mask 1 comes into close contact with the transparent plate 2 in a state without air bubbles. Hereinafter, this point will be described with reference to FIG. FIG. 4 is a schematic front sectional view showing the operation of the degassing groove 21. FIG. 4A shows a mask unit of a reference example without a degassing groove 21, and FIG. 4B shows a mask unit of an embodiment.

As described above, when vacuum exhaust is performed from the exhaust pipe 61, the film mask 1 is vacuum-sucked to the mask frame 3 at the peripheral portion. At this time, when the film mask 1 is rubbed with a spatula or the like to push out the air bubbles g in order to bring the film mask 1 into close contact with the transparent plate 2, the reference example without the degassing groove 21 is transparent as shown in FIG. 4 (A). Since the film mask 1 is strongly adsorbed on the edge of the surface of the plate 2, the bubbles g are difficult to be pushed out. Even if you try to push it out forcibly, bubbles will be created (moved) in another place. The reason why the film mask 1 is strongly adsorbed at the edge of the surface of the transparent plate 2 is that it is close to the vacuum suction hole 34 and the suction port 37 of the mask frame 3, and the transparent plate 2 is particularly attracted by suction from the suction port 37. Since the space between the end surface and the inner side surface 31 of the mask frame 3 has a negative pressure, the mask film is easily strongly adsorbed on the peripheral edge of the surface of the transparent plate 2.

On the other hand, in the structure of the embodiment having the degassing groove 21, the suction force at the peripheral edge of the surface of the transparent plate 2 is relaxed, and the gas generating bubbles g when rubbed with a spatula or the like is the degassing groove 21. It reaches the surrounding space 30 through the suction port 37 and is exhausted from the suction port 37. Therefore, as shown in FIG. 4B, there is no residual bubble g, and the film mask 1 is in a state of being sufficiently in close contact with the surface of the transparent plate 2. The width of the degassing groove 21 may be, for example, about 0.5 mm to 1 mm, and the depth may be about 0.05 mm to 0.3 mm. The length from the peripheral edge is about 5 mm to 30 mm.

In the structure of the mask unit of the above embodiment, the point that the degassing groove 21 reaches the chamfered portion 22 is that bubbles do not remain even when the vacuum suction force is increased to increase the fixing force of the film mask 1. It makes sense to do so. This point will be described with reference to FIG. FIG. 5 is a schematic front sectional view showing a problem when the degassing groove 21 does not reach the chamfered portion 22.

As described above, when the film mask 1 is vacuum-sucked to the mask frame 3, the surrounding space 30 also has a negative pressure, so that the film mask 1 protrudes toward the surrounding space 30 and is in a slightly curved state. In this case, if the degassing groove 21 is terminated at the edge of the surface of the transparent plate 2, the film mask 1 may be strongly adsorbed on the chamfered portion 22 and may be closed there. In this case, the gas forming the bubbles does not flow to the surrounding space 30, and the bubbles g tend to remain as shown in FIG. On the other hand, when the degassing groove 21 reaches the middle of the chamfered portion 22, the film mask 1 is not strongly adsorbed by the chamfered portion 22 as shown in FIG. 4B, and no bubbles remain.

However, if the vacuum suction force is not so high, even if the degassing groove 21 does not reach the middle of the chamfered portion 22, the state as shown in FIG. 5 does not occur, and there is no problem. Conversely, the structure in which the degassing groove 21 reaches the middle of the chamfered portion 22 has an advantage that the vacuum suction force can be increased and the fixing strength of the film mask 1 can be further increased. In order to obtain this effect, it is not necessary for the degassing groove 21 to be terminated in the middle of the chamfered portion 22, and it is of course possible that the degassing groove 21 reaches the boundary between the chamfered portion 22 and the end face.

In the mask unit of the above embodiment, the suction port 37 on the inner side surface 31 of the mask frame 3 is not always essential. The gas forming the bubbles leaks unless the surrounding space 30 is a completely airtightly sealed space. For example, it is discharged from a fine hole or the like in the adhesive layer 20 in which the transparent plate 2 and the mask frame 3 are joined. Further, if the vacuum suction hole 34 in which the film mask 1 is vacuum-sucked is not in a non-terminal circular shape and the mask film 1 is not vacuum-sucked in a state where the surrounding space 30 is airtightly sealed, gas is emitted from the unsealed portion. Leaks. However, as compared with these, the conductance is higher in the configuration in which the suction port 37 is provided for suction, so that the gas is discharged quickly. Therefore, the effect of preventing residual bubbles is higher. If the adhesive layer 20 is provided intermittently and the conductance of the gas is high, the suction port 37 may not be provided. However, since the adhesive strength is lowered, it is preferable to provide the adhesive layer 20 in a non-terminating circumferential shape (not intermittently) while providing the suction port 37.

Next, other shapes forming the degassing space will be described. 6 and 7 are schematic views showing other shapes forming the degassing space. Of these, FIG. 6 is a schematic plan view showing another example of the degassing groove 21, and FIG. 7 is a schematic side sectional view showing an example of forming a degassing space.

The gas vent grooves 21 in the above-described embodiment are a plurality of ones scattered in the direction of one side of the surface of the transparent plate 2, and all of them are provided at equal intervals, but as shown in FIG. 6 (1), they are narrow. A plurality of groups including a plurality of degassing grooves 21 provided at intervals may be provided. Further, as shown in FIGS. 6 (2) and 6 (3), the degassing groove 21 may be branched, or a plurality of branched gas vent grooves 21 may be provided.
The degassing groove 21 of the above embodiment has a shape as shown in FIG. 7 (1) in the side sectional view, but in addition, a degassing space is formed by the convex portion 23 as shown in FIG. 7 (2). In some cases. In this case, the convex portion 23 may have a shape (convex) long toward the edge of the surface of the transparent plate 2, or may have a shape in which protrusions are scattered. It should be noted that even if only one concave portion or convex portion is provided, a degassing space may be formed, and such a shape may be adopted.

Next, an embodiment of the invention of the exposure apparatus will be described.
FIG. 8 is a front schematic view of the exposure apparatus of the embodiment. The exposure apparatus shown in FIG. 8 irradiates the substrate S with light through a transport system 4 that conveys the substrate S as an exposure object, a mask unit 10 arranged at an exposure work position, and a film mask 1 of the mask unit 10. It is provided with an exposure unit 5 for exposure.
The exposure apparatus of the embodiment is, for example, an apparatus for exposing a strip-shaped flexible substrate S such as a substrate for a flexible printed circuit board. Therefore, the transport system 4 is a mechanism for transporting the substrate S by the roll tool method.

Specifically, in the transport system 4, the sending side core roller 41 on which the unexposed substrate S is wound, the sending side pinch roller 42 that pulls out the substrate S from the sending side core roller 41, and the exposed substrate S are wound. It includes a take-up side core roller 43 to be taken, and a take-up side pinch roller 44 for pulling out the exposed substrate S and causing the take-up side core roller 43 to take up the substrate S. The feeding direction of the substrate S by the transport system 4 is the X direction, and the horizontal direction perpendicular to this is the Y direction. The Y direction is the S width direction of the substrate. The direction perpendicular to the XY plane is the Z direction.

An exposure work position is set between the delivery side pinch roller 42 and the take-up side pinch roller 44. The exposure apparatus of the embodiment is an apparatus that simultaneously exposes both sides of the substrate S, and the mask unit 10 and the exposure unit 5 are arranged on both sides (upper and lower in this example) of the substrate S at the exposure work position. Therefore, two mask units 10 and two exposure units 5 are provided.

The upper and lower mask units 10 and the exposure unit 5 have the same configuration, and are arranged symmetrically in the vertical direction with the substrate S at the exposure work position interposed therebetween. That is, the upper mask unit 10 is arranged with the film mask 1 facing downward, and the transparent plate (not shown in FIG. 8) receives the film mask 1 on the upper side. The lower mask unit 10 is arranged with the film mask 1 facing upward, and the transparent plate receives the film mask 1 on the lower side.
The apparatus includes a stage (hereinafter referred to as a mask stage) (hereinafter, not shown) for mounting each mask unit 10. Each mask unit 10 is mounted on the apparatus by fixing the mask frame 3 to the mask stage.

Further, the apparatus includes a vacuum exhaust system 6 for keeping the film mask 1 adsorbed on the mask frame 3 in each mask unit 10. Each exhaust pipe 61 of the vacuum exhaust system 6 is connected to the pipe connection portion 36 of each mask frame 3 as described above. The vacuum exhaust system 6 is controlled by the main controller 8 described later, but manual control is also possible by input from the input unit 81 of the main controller 8. Although the description is omitted, each film mask 1 is provided with an alignment mark (hereinafter referred to as a mask mark).

Each exposure unit 5 includes a light source 51, an optical system 52 that irradiates the film mask 1 with light from the light source 51, and the like. The apparatus of this embodiment is an apparatus for performing contact exposure, and each exposure unit 5 is a unit that irradiates each film mask 1 with parallel light. Therefore, the optical system 52 includes a collimator lens.
For contact exposure, each mask unit 10 is provided with a mask moving mechanism 7. Each mask moving mechanism 7 is a mechanism that moves the mask in the Z direction so that the mask is brought into close contact with the substrate S or separated from the substrate S after exposure. Each mask moving mechanism 7 also has a function of moving each mask unit 10 in the XY direction to align (position) with respect to the substrate S for alignment at the time of exposure.

Further, the exposure apparatus of the embodiment includes a mask cleaning means for removing foreign matter adhering to the film mask 1. Cleaning means are provided for each of the upper and lower film masks 1.
Each cleaning means includes a cleaning head and a head moving mechanism for cleaning by moving the cleaning head in contact with the film mask 1. In this embodiment, the cleaning head is a roller (hereinafter referred to as a cleaning roller) 91 having an adhesive layer on the surface, and the head moving mechanism is a roller moving mechanism 92.

Although the details of the roller moving mechanism 92 are not shown in the illustration, each cleaning roller 91 is held so as to be driven and rotatable around a rotating shaft along the Y direction, and the roller moving mechanism 92 is held on the rotating shaft via a bearing. The structure is such that the X-direction moving source and the Z-direction (vertical) moving source are connected to the arm holding the bearings at both ends. For example, a linear guide is provided on the base plate, a linear motor is provided at the connecting portion between the arm and the linear guide so as to move in the X direction while being guided by the linear guide, and further, like an air cylinder with respect to the base plate. A mechanism is conceivable in which a moving source is provided to move the vehicle in the Z direction.

Further, as shown in FIG. 8, the apparatus includes a main controller 8 for controlling each unit. The main controller 8 is equipped with a main sequence program 82 that controls each part of the apparatus to operate according to a predetermined procedure. That is, the main sequence program 82 is stored in the storage unit 80 of the main controller 8, and can be executed by the processor (not shown) of the main controller 8. The main controller 8 includes an input unit 81 for manual operation and the like.

Next, the operation of the exposure apparatus will be schematically described.
The pair of mask units 10 are located at standby positions away from the substrate S in the Z direction. The main sequence program 82 sends a control signal to the transport system 4 to send the substrate S by a predetermined stroke. After the feed is completed, alignment is performed. A mark for alignment (board mark) is provided on the substrate S, and the mask mark and the substrate mark of each film mask 1 are photographed by a camera (not shown), and the mask moving mechanism 7 moves the mask unit 10 according to the photographed data. Alignment is performed by moving in the XY direction.

After the alignment is completed, the main sequence program 82 sends a control signal to the mask moving mechanism 7, moves each mask unit 10 toward the substrate S, and brings them into close contact with the film mask 1. In this state, the main sequence program 82 operates each exposure unit 5 and irradiates light through each film mask 1 to perform exposure.
After the exposure for a predetermined time, the main sequence program 82 sends a control signal to the mask moving mechanism 7, moves each mask unit 10 in a direction away from the substrate S, and returns the mask unit 10 to the initial standby position. Then, a control signal is sent to the transport system 4 to feed the predetermined stroke again. After that, the above operation is repeated.

After repeating the above operation, when switching to exposure for products of different varieties, the film mask 1 is replaced. The device of the embodiment has a special configuration used during this replacement operation. This point will be described below.
As shown in FIG. 8, the mask maintenance program 83 is mounted on the main controller 8 as a maintenance program. The mask maintenance program 83 is a program mainly executed when the film mask 1 is replaced, and can be executed by input from the input unit 81. FIG. 9 is a front schematic view showing the mask maintenance program 83 included in the exposure apparatus.

As described above, different types of film masks 1 are required, and the film masks 1 are replaced. In this embodiment, the replacement of the film mask 1 is performed by removing the mask unit 10.
First, the operator stops the operation of the vacuum exhaust system 6 that has adsorbed the film mask 1 and removes it from the mask stage. Then, the used film mask 1 is removed, and the film mask 1 for the next product type is attached to the mask frame 3. At this time, the film mask 1 is put on the mask frame 3 at a predetermined position and temporarily fixed with an adhesive tape or the like. Since the mask frame 3 is formed with a mark indicating the mounting position of the film mask 1, the mask frame 3 is covered with the mark as a mark and temporarily fixed.

Then, the mask unit 10 in which the film mask 1 is replaced is fixed to the mask stage as before. In this state, the operator operates the input unit 81 of the main controller 8 to operate the vacuum exhaust system 6. As a result, the film mask 1 is vacuum-sucked to the mask frame 3. In this state, the operator operates the input unit 81 to execute the mask maintenance program 83.

The mask maintenance program 83 is programmed to send a control signal to the roller moving mechanism 92 and control each cleaning roller 91 to move in a predetermined direction at a predetermined speed while contacting each film mask 1. The pair of cleaning rollers 91 are vertically symmetrical, and the operation by the mask maintenance program 83 is also vertically symmetrical. As an example, the movement of the upper cleaning roller 91 is shown in FIG.

As shown in FIG. 9 (1), the roller moving mechanism 92 raises the cleaning roller 91 so that the upper cleaning roller 91 comes into contact with the film mask 1 at the start position set on the left side of the upper film mask 1. .. The starting position is a position corresponding to the left edge of the transparent plate 2 in the X direction. The roller moving mechanism 92 moves the cleaning roller 91 toward the right edge from the starting position (FIG. 9 (2)). The roller moving mechanism 92 moves the cleaning roller 91 to the end position set on the right side of the film mask 1, and when the end position is reached, lowers the cleaning roller 91 by a predetermined distance, and as shown in FIG. 9 (3), the initial standby on the left side. Return to the position. The end position is a position corresponding to the right edge of the transparent plate 2 in the X direction. The sequence program sends a control signal to the roller moving mechanism 92 so that the cleaning roller 91 makes such an operation.

In the above operation, the cleaning roller 91 is driven to rotate due to the frictional force with the film mask 1. Then, the foreign matter c on the surface of the film mask 1 is removed by the adhesive layer on the surface. Further, as shown in FIG. 9, the gas forming the bubbles g existing between the film mask 1 and the transparent plate 2 is pushed out by the cleaning roller 91. At this time, as described above, the gas is quickly pushed out through the degassing groove 21.

What is important in the above operation is that the cleaning roller 91 abuts on the film mask 1 at the edge (start position) on the side opposite to the side where the degassing groove 21 is provided, and the edge on the side where the degassing groove 21 is provided (end). It is to move toward the position). If this is reversed, there is no gas vent groove 21 at the point where the cleaning roller 91 pushes out the gas, so that the gas flows back and bubbles g tend to remain.

As can be seen from the above description, the mask maintenance program 83 in the embodiment realizes a function of simultaneously cleaning the film mask 1 and removing air bubbles. Since the air bubbles can be removed by the mask maintenance program 83, the operator does not need to manually remove the air bubbles when replacing the film mask 1. Therefore, the replacement work of the film mask 1 is completed in a short time as a whole. This means that the downtime of the device is shortened, which leads to an improvement in productivity.

When the cleaning roller 91 pushes out the gas forming bubbles, the film mask 1 is slightly stretched. It can be said that the film mask 1 is distorted, but the elongation of the film mask 1 is such that if the pressing force of the cleaning roller 91 against the film mask 1 is constant and the moving speed of the cleaning roller 91 is constant, the film mask 1 is stretched. The growth is also constant. That is, the elongation of the film mask 1 is reproducible and controllable. Therefore, it is possible to take measures such as forming the pattern of the film mask 1 in consideration of elongation, and it is possible to prevent the problem of deterioration of the transfer accuracy of the pattern from occurring.

Further, according to the research of the inventor, it is preferable that the moving speed of the cleaning roller 91 is lowered when the cleaning roller 91 is close to the edge on the side where the degassing groove 21 is provided. The reason for this is that when the cleaning roller 91 approaches the edge on the side where the degassing groove 21 is provided, the pressure of the gas forming bubbles tends to increase, and the pressure tends to increase to some extent before reaching the degassing groove 21. This is because if the height is high, the gas may flow back beyond the contact portion of the cleaning roller 91 with the film mask 1. Therefore, it is preferable to control the speed of the cleaning roller 91 at a high speed first and then at a low speed. This speed control is also realized by the sequence of the mask maintenance program 83. Although the speed may be reduced from the beginning, there is a problem that the required time becomes long and the productivity decreases. As an example of the speed, the speed (linear speed) of the cleaning roller 91 is initially about 100 to 150 mm / sec, and is decelerated to about 1 to 10 mm / sec at or slightly before the position of the degassing groove 21.

Since a large amount of foreign matter adheres to each cleaning roller 91 after repeated use, it is configured to be replaced with a new one or to transfer the foreign matter to a separately provided transfer roller. A transfer roller is provided near the standby position of each cleaning roller 91, and is a roller having a higher adhesive force than the adhesive force of each cleaning roller 91. The transfer roller is configured to be driven and rotated, and is configured to rotate while in contact with each cleaning roller 91 to transfer foreign matter on each cleaning roller 91 to itself.

In the configuration of the exposure apparatus, the degassing space in the mask unit 10 is not limited to the degassing groove 21, and various configurations as shown in FIGS. 6 and 7 can be adopted.
Further, although the cleaning head is a cleaning roller 91, a cleaning head that is not roller-shaped (for example, a spatula-shaped one) may be used. However, when a cleaning roller that rolls on the film mask 1 is used, it is difficult for an excessive force to be applied to the film mask 1, and it is suitable for preventing distortion of the film mask 1. As the cleaning head, one that removes foreign matter by sweeping out the foreign matter may be used instead of one that removes foreign matter by adhesive force, and one that adsorbs foreign matter by static electricity may be used.

In the mask unit 10, the transparent plate 2 may be fixed to the mask frame 3 by other methods such as screwing instead of bonding. For example, a member for clamping the transparent plate 2 may be provided, and the member may be fixed to the mask frame 3 by screwing. However, in the case of the contact method or the proximity method, it is preferable that the front side (the side of the substrate S) of the film mask 1 does not have a member protruding from the film mask 1, and in that respect, fixing by the adhesive layer 20 is suitable. ..

The embodiment of the exposure apparatus is not necessarily limited to double-sided exposure, and may be one that exposes only one side of the substrate S. In this case, the mask unit 10 is provided only on one side of the substrate S, and one cleaning roller 91 for cleaning and removing air bubbles from one film mask 1 is provided.
As for the object to be exposed, instead of the strip-shaped substrate S as described above, a square substrate may be used as the object, and a rigid substrate that is not flexible may be used as the object to be exposed. Therefore, the substrate transfer method may be a roll-to-roll method or a single-wafer transfer method. In the case of a single-wafer type device, a stage facing the film mask is provided, and a substrate is placed on the stage. Then, the mask unit or the stage moves, and the substrate is brought into close contact with the film mask for exposure.
Further, as the exposure method, in addition to the contact method, a proximity method may be used, or a projection exposure method may be used.

1 Film mask 2 Transparent plate 21 Degassing groove 3 Mask frame 30 Surrounding space 31 Inner side surface 32 Plate receiving surface 33 Film receiving surface 34 Vacuum suction hole 35 Communication passage 36 Pipe connection part 37 Suction port 4 Conveyance system 5 Exposure unit 6 Vacuum exhaust System 61 Exhaust pipe 7 Mask movement mechanism 8 Main controller 83 Mask maintenance program 91 Cleaning roller 92 Roller movement mechanism

Claims (7)

A mask unit mounted on an exposure device,
With a film mask,
A transparent plate that receives a film mask and
It is equipped with a mask frame that holds the transparent plate in the peripheral part.
The mask frame has a vacuum suction hole capable of vacuum suctioning the film mask.
A mask unit characterized in that a concave portion or a convex portion forming a degassing space reaching the edge of one side of the surface is provided in a region of the surface of the transparent plate facing the film mask. The mask unit according to claim 1, wherein the mask frame has a suction port capable of vacuum suction on the inner surface facing the end surface of the transparent plate. The transparent plate has a chamfered portion which is an oblique surface connecting the surface facing the film mask and the end surface.
The mask unit according to claim 1 or 2, wherein the concave portion or the convex portion has a shape in which the degassing space reaches the middle of the chamfered portion. The concave portion or the convex portion reaches the edge of the one side from a position between the edge of the one side and the edge of the side opposite to the edge of the one side on the facing surface, and reaches the edge of the one side. It is not provided with recesses and protrusions that reach the edge of the side opposite to the edge of the one side from the position between the edge of the side opposite to the edge of the one side and form the degassing space. The mask unit according to any one of claims 1 to 3. A transport system that transports the substrate to the exposure work position,
The mask unit according to any one of claims 1 to 3 arranged at the exposure work position, and the mask unit.
An exposure apparatus including an exposure unit that irradiates light through the film mask of the mask unit to expose a substrate.
A cleaning head for removing foreign matter on the surface of the film mask and a head moving mechanism are provided.
The head moving mechanism is a mechanism for moving the cleaning head while contacting the film mask, and is a mechanism for moving the cleaning head from the edge of the side of the transparent plate opposite to the one side toward the edge of the one side. It is in,
The concave portion or the convex portion reaches the edge of the one side from the middle position in the moving direction of the cleaning head on the surface of the transparent plate facing the mask frame, and the one side from the middle position in the moving direction of the cleaning head. An exposure apparatus characterized in that it does not have recesses and protrusions that reach the edge of the side opposite to and form a degassing space. The exposure apparatus according to claim 5 , wherein the cleaning head is a cleaning roller having an adhesive layer formed on the surface thereof and rotating while in contact with the film mask. The exposure device according to claim 5 or 6 , wherein the head moving mechanism is a mechanism that reduces the speed of movement when the cleaning head approaches the edge of one side.

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