JP6987376B2 - Sealing mechanism - Google Patents

Description

The present invention relates to a sealing mechanism for sealing a container.

A sealing mechanism is known in which an electronic component such as a piezoelectric element is inserted into a container body, a lid is put on the container body, and the container body and the lid are sealed with a sealing material. As shown in FIG. 10 of Patent Document 1, the container 64, which is a combination of the container body and the lid, is mounted in the recess of the pallet 63. A pair of heating means 67 are arranged above and below the pallet 63, and the pallet 63 is heated by sandwiching the pallet 63 with the pair of heating means 67. A pin is attached to the heating means 67 as a pressing protrusion 68 that presses a part of the container 64 from above, and the pin is pressed against the container 64 to seal the heated container 64.

Japanese Unexamined Patent Publication No. 2011-146491

However, since the sealing mechanism of Patent Document 1 presses the container with a pin, the structure becomes complicated and the molding cost of the apparatus is high. In addition, if the pin is used for a long time, the pin may be worn or deformed, resulting in malfunction. Therefore, it was necessary to inspect the device regularly and replace the pins.

The present invention has been made in view of the above circumstances. By sealing the container without using a pin, the device structure can be simplified and the cost can be reduced, and the number of inspections of the device can be reduced. It is an object of the present invention to provide a sealing mechanism capable of continuous operation for a long period of time.

The sealing mechanism according to the first aspect of the present invention is
A sealing mechanism for sealing a quadrangular container having an opening and accommodating a work and a lid for closing the opening with a sealing material.
A pair of main surfaces pair direction, a first recess for accommodating the container are formed on one main surface, a first through-penetrating to the main surface of the bottom or found other side of the first recess With a tray , with a hole,
Having a first surface and a second surface facing each other, and contacting one main surface of the tray with the first surface causes the container housed in the tray to separate from the tray. a container holding plate to prevent, through from said first surface to said second surface, a container pressing plate comprising a second through-hole communicating with the first recess of said tray,
A first heat block disposed to abut on the other main surface of said tray,
And a second heat block disposed abutting to the second side of the container holding plate,
The first heat block heats the container housed in the first recess by heat radiation through the first through hole.
The second heat block heats the container in which the first recess is housed by heat radiation through the second through hole .
The second through hole is formed into an elongated hole shape having a pair of long sides having a cross-sectional shape perpendicular to the penetration direction.
When the tray and the container holding plate are viewed from the second heat block, the pair of long sides of the second through hole intersects two adjacent sides of the container housed in the tray. Two diagonal corners of the container are located outside the pair of long sides, and the other two diagonal corners are inside the pair of long sides. The container holding plate holds two diagonal corners of the container.

The first heat block may be formed with a second recess facing the first through hole of the tray.

The second heat block may be formed with a third recess facing the second through hole of the container holding plate.

In the second heat block, a third through hole is formed so as to face the second through hole of the container holding plate and one of them opens.
A radiation thermometer may be placed in the other opening of the third through hole.

The sealing mechanism according to the second aspect of the present invention is
A sealing mechanism for sealing a quadrangular container having an opening and accommodating a work and a lid for closing the opening with a sealing material.
A plurality of recesses having a pair of facing main surfaces and arranged in a matrix on one main surface to accommodate the container, and a plurality of first penetrations penetrating from the bottom of the plurality of recesses to the other main surface. With a tray, with a hole,
Having a first surface and a second surface facing each other, and contacting one main surface of the tray with the first surface causes the container housed in the tray to separate from the tray. A container holding plate having a plurality of second through holes penetrating from the first surface to the second surface and communicating with the plurality of recesses.
A first heat block arranged in contact with the other main surface of the tray,
A second heat block arranged in contact with the second surface of the container holding plate is provided.
The plurality of second through holes are formed into an elongated hole shape having a pair of long sides having a cross-sectional shape perpendicular to the penetration direction.
When the tray and the container holding plate are viewed from the second heat block, the pair of long sides of the plurality of second through holes is oriented with respect to the direction of the row of the plurality of recesses arranged in a matrix. Two corners of one diagonal of each container are located outside the pair of long sides, and the two corners of the other diagonal are of the pair of long sides. Located on the inside, the container holding plate holds two diagonal corners of the container.

According to the present invention, by sealing the container without using a pin, the device structure can be simplified and the cost can be reduced, and the number of inspections of the device can be reduced to enable continuous operation for a long period of time. A mechanism can be provided.

It is a conceptual diagram of the sealing apparatus including the sealing mechanism which concerns on Embodiment 1. FIG. It is a top view of a tray. It is sectional drawing of the main part of a sealing mechanism. (A) is a view of the tray in which the container is housed in the recess and the container holding plate from the second heat block, and (b) is the view of the tray in which the container in the recess is removed and the container holding plate. It is a figure seen from the 2nd heat block. It is a conceptual diagram of the sealing apparatus including the sealing mechanism which concerns on Embodiment 2. FIG. It is sectional drawing of the main part of a sealing mechanism. FIG. 3 is a schematic cross-sectional view of a sealing mechanism in which a second recess, a third recess, and a third through hole are formed. It is sectional drawing of the main part of the sealing mechanism provided with a radiation thermometer.

Hereinafter, embodiments of the sealing mechanism according to the present invention will be specifically described with reference to the accompanying drawings. It should be noted that the embodiments described below are for illustration purposes only and do not limit the scope of the present invention. Therefore, those skilled in the art can adopt embodiments in which each or all of these elements are replaced with equivalent ones, but these embodiments are also included in the scope of the present invention.

(Embodiment 1)
A sealing device including a sealing mechanism according to an embodiment of the present invention will be described with reference to FIG.

As shown in FIG. 1, the sealing device 1 according to the present embodiment has a tray 140 on which a first preheating mechanism 110, a second preheating mechanism 120, a sealing mechanism 130, and a container 200 are mounted. Is provided with a transport mechanism 150 for transporting the heat in a fixed direction. The first preheating mechanism 110, the second preheating mechanism 120, the sealing mechanism 130, and the transfer mechanism 150 are housed in the vacuum chamber 100.

The vacuum chamber 100 includes a carry-in inlet 101 for carrying in the tray 140 on which the container 200 is mounted, and a carry-out outlet 102 for carrying out the tray 140 having been sealed. A vacuum pump (not shown) creates a vacuum atmosphere inside. The carry-in inlet 101 and the carry-out port 102 are provided with a gate valve to hold the vacuum in the vacuum chamber 100. The tray 140 on which the container 200 is mounted is sealed in the container 200 while being conveyed in the X direction shown in the drawing.

As shown in FIG. 2, the tray 140 is formed by arranging a plurality of first recesses 141 for accommodating containers in a matrix. The tray 140 is formed by using titanium having a small volume specific heat and strength. Here, the longitudinal direction of the tray 140 is the L direction, and the lateral direction is the M direction. The tray 140 is conveyed with the L direction of the tray 140 parallel to the X direction of the sealing device 1.

As shown in FIG. 3, the container 200 has an opening, and includes a container main body 202 that houses a work 201 such as a crystal oscillator and a lid 203 that closes the opening of the container main body 202. A sealing material is inserted between the container body 202 and the lid 203. As the sealing material, low melting point glass, gold tin, silver wax, solder and the like are used. The container body 202 is formed of a ceramic material, and the lid 203 is formed of a metal such as Kovar or a ceramic material.

The first preheating mechanism 110 includes a pair of heat blocks 111 arranged one above the other. The pair of heat blocks 111 is composed of a lower heat block 111a and an upper heat block 111b. The heat block 111 includes a heat source 112, and the entire heat block 111 is heated by heat conduction from the heat source 112. A tray 140 on which the container 200 is mounted is conveyed between the pair of heat blocks 111, and the tray 140 is heated.

The second preheating mechanism 120 includes a pair of heat blocks 121 arranged one above the other. The pair of heat blocks 121 is composed of a lower heat block 121a and an upper heat block 121b. The heat block 121 includes a heat source 122, and the entire heat block 121 is heated by heat conduction from the heat source 122. The tray 140 heated by the first preheating mechanism 110 is conveyed between the pair of heat blocks 121, and the tray 140 is further heated.

The first and second preheating mechanisms 110 and 120 preheat the tray 140 at a temperature lower than the melting point of the encapsulant inserted between the container body 202 and the lid 203. Preheating promotes degassing by heating, shortens the heating time in the sealing mechanism 130 in the next step, and prevents diffusion of the sealing material due to long-time heating.

The sealing mechanism 130 includes a pair of heat blocks 131 arranged one above the other. The heat block 131 includes a heat source 132, and the entire heat block 131 is heated by heat conduction from the heat source 132. The tray 140 heated by the second preheating mechanism 120 is conveyed between the pair of heat blocks 131, the tray 140 is further heated, the sealing material is melted, and the container 200 is sealed.

The first preheating mechanism 110, the second preheating mechanism 120, and the sealing mechanism 130 include elevating drive devices 113, 123, and 133 that move the lower heat block up and down, respectively. The lower heat block is raised by the elevating drive devices 113, 123, 133, and the tray 140 conveyed between the upper heat block and the upper heat block is sandwiched between the upper and lower heat blocks.

The transport mechanism 150 includes a plurality of rollers 151 in which the tray 140 is arranged along the X direction, which is the transport direction, and a drive device (not shown) for rotating the rollers 151. The plurality of rollers 151 are cylindrical rollers in which a rotation axis is arranged in a direction perpendicular to the X direction for transporting the tray 140. By rotating the roller 151 by the drive device, the tray 140 mounted on the roller 151 is conveyed in the X direction.

A cooling device (not shown) may be arranged on the downstream side of the sealing mechanism 130. The cooling device is composed of, for example, a pair of cooling blocks, and a tray 140 having been sealed is inserted and sandwiched between the pair of cooling blocks. The sandwiched tray 140 is cooled by the cooling block, and the encapsulant can be hardened.

Next, the sealing mechanism 130 will be described with reference to FIG. FIG. 3 is a schematic cross-sectional view showing a state in which a container placed in one first recess 141 of the tray 140 is sandwiched by a heat block.

The tray 140 has a pair of main surfaces, and a first recess 141 is formed in one main surface 142. The tray 140 is formed with a first through hole 144 that penetrates from the bottom surface of the first recess 141 to the other main surface 143 of the tray 140. The first through hole 144 is a cylindrical hole in the present embodiment. The diameter of the first through hole 144 is smaller than the width of the container 200 placed on the bottom surface of the first recess 141.

The first through hole 144 may be used as a degassing hole for discharging gas generated during the sealing process. Further, the first through hole 144 may be used as a hole through which a pin passes for taking out the container 200 for which the sealing process has been completed from the first recess 141.

A container holding plate 160 is attached to one main surface 142 of the tray 140 to prevent the container 200 housed in the first recess 141 of the tray 140 from detaching from the first recess 141 of the tray 140. ..

Specifically, as shown in FIG. 3, the container holding plate 160 has a first surface 161 facing one main surface 142 of the tray 140, and the one main surface 142 and the first surface 161 have one surface 142. The contact prevents the container 200 from coming off the tray 140.

As shown in FIGS. 1 and 3, the container holding plate 160 is formed with a second through hole 163 that penetrates from the first surface 161 to the second surface 162, which is a surface facing the first surface 161. ing.

4 (a) and 4 (b) are views of the second through hole 163 seen from the second heat block 131b, and the tray 140 and the container holding plate 160 are partially formed along the M direction of the tray 140. It is a figure which shows the state which cut out. (A) is a diagram showing a state in which the container 200 is housed in the first recess 141, and (b) is a diagram showing a state in which the container 200 is removed from the first recess 141.

As shown in FIGS. 3, 4 (a) and 4 (b), the second through hole 163 is a cylindrical hole having a long hole-shaped cross section perpendicular to the through direction of the hole. The second through hole 163 has a direction in which a plurality of first recesses 141 formed along the M direction of the abutting tray 140 are arranged and a long side of the long hole of the second through hole 163. It is formed so as to be inclined so that the angle formed is α degree.

As shown in FIG. 4A, a part of the peripheral portion of the container 200 housed in the first recess 141 is arranged outside the second through hole 163. Specifically, the container 200 is pressed by the container holding plate 160 by arranging a part of the peripheral edge portion of the container 200 outside the side of the inclined elongated hole of the second through hole 163.

As shown in FIG. 4B, the tray 140 from which the container 200 is removed from the first recess 141 has a first through hole 144 formed in the bottom surface of the first recess 141. Since the second through hole 163 is formed so as to open into the first recess 141, the first through hole 144 and the second through hole 163 communicate with each other.

As shown in FIG. 1, the pair of heat blocks 131 are arranged so as to sandwich the tray 140 and the container holding plate 160 from both sides. As shown in FIG. 3, the heat block that abuts on the other main surface 143 of the tray 140 is the first heat block 131a, and the heat block that abuts on the second surface 162 of the container holding plate 160 is the second heat block. Let it be 131b. The first heat block 131a and the second heat block 131b are formed of a metal such as copper having good thermal conductivity.

The first heat block 131a is heated by the heat source 132 shown in FIG. 1 and transfers heat to the tray 140 in contact with the first heat block 131a. The heat conducted to the tray 140 heats the container 200 housed in the first recess 141.

The container 200 is also heated by the heat radiation of the first heat block 131a. Heat radiation is a phenomenon in which electromagnetic waves such as infrared rays are radiated from the surface of the first heat block 131a when the first heat block 131a is heated by the heat source 132. When the radiated electromagnetic wave hits the object to be heated, the object to be heated is heated. In the present embodiment, the electromagnetic wave radiated from the first heat block 131a is propagated in a direction orthogonal to the electromagnetic wave generation surface of the first heat block 131a while drawing a constant trajectory. Specifically, the electromagnetic wave radiated from the first heat block 131a propagates toward the container 200 inside the first through hole 144 formed in the tray 140, and the first penetration is in the process of propagating. It hits the container 200 while reflecting on the inner wall of the hole 144.

The larger the surface area of the inner wall of the first through hole 144, the more the electromagnetic wave radiated from the first heat block 131a is reflected on the inner wall and hits the container 200. Therefore, when the electromagnetic wave is radiated to the container 200 through the first through hole 144, a large radiant heat is generated in the container 200.

The second heat block 131b is heated by the heat source 132 and transfers heat to the container holding plate 160 in contact with the second heat block 131b. The heat conducted to the container holding plate 160 is conducted to the tray 140 in contact with the container holding plate 160 and heats the container 200 housed in the first recess 141.

The container 200 is also heated by heat radiation from the second heat block 131b. When the second heat block 131b is heated by the heat source 132, electromagnetic waves such as infrared rays are radiated from the surface of the second heat block 131b. The radiated electromagnetic wave propagates toward the container 200 inside the second through hole 163 formed in the container holding plate 160, and while propagating, the electromagnetic wave is reflected on the inner wall of the second through hole 163 while being reflected in the container 200. It hits.

The electromagnetic wave radiated from the second heat block 131b is reflected more on the inner wall as the surface area of the inner wall of the second through hole 163 is larger. Therefore, when the electromagnetic wave is radiated to the container 200 through the second through hole 163, a large radiant heat is generated in the container 200. Here, since the second through hole 163 has a long hole shape in a cross section perpendicular to the through direction, the surface area of the inner wall of the second through hole 163 is made larger than that of the through hole having a cylindrical cross section. be able to. Therefore, a large amount of radiant heat can be given to the container 200 by the electromagnetic wave radiated from the second heat block 131b. Further, as shown in FIG. 4A, the second through hole 163 has a direction in which a plurality of first recesses 141 formed along the M direction of the abutting tray 140 are arranged and a second through hole 163. It is formed so as to be inclined so that the angle formed by the long side of the long hole of the through hole 163 is α degree. By forming the second through hole 163 in such a shape, the surface area of the inner wall of the second through hole 163 can be increased while effectively using the limited area of the plate surface of the container holding plate 160. Can be done.

Next, a method of sealing the container 200 by the sealing device 1 including the sealing mechanism 130 will be described.

As shown in FIG. 1, the tray 140 on which the container 200 is mounted is carried in from the carry-in inlet 101 of the vacuum chamber 100, and is carried to the first preheating mechanism 110 by the transfer mechanism 150.

The tray 140 conveyed to the first preheating mechanism 110 is arranged between a pair of heat blocks 111 arranged above and below the first preheating mechanism 110. The elevating drive device 113 raises the lower heat block 111a, so that the tray 140 is sandwiched between the pair of heat blocks 111. The heat block 111 heats the tray 140 to such an extent that the sealing material inserted between the container body 202 and the lid 203 does not melt.

Next, the tray 140 is transported to the second preheating mechanism 120 by the transport mechanism 150. In the second preheating mechanism 120, similarly to the first preheating mechanism 110, the elevating drive device 123 raises the lower heat block 121a, so that the tray 140 is sandwiched between the pair of heat blocks 121. Is done. The heat block 121 heats the tray 140 until just before the sealing material inserted between the container body 202 and the lid 203 melts.

Next, the tray 140 is conveyed to the sealing mechanism 130 by the conveying mechanism 150. In the sealing mechanism 130, as shown in FIG. 3, the container 200 is placed on the bottom surface of the first recess 141 of the tray 140 via the first heat block 131a and the container holding plate 160. It is sandwiched between the second heat block 131b and the like.

The container 200 is formed by the conduction heat conducted to the tray 140 by the first heat block 131a and the radiant heat generated by the electromagnetic wave radiated by the first heat block 131a propagating through the first through hole 144. , Is heated. Further, in the container 200, the conduction heat conducted by the second heat block 131b to the tray 140 via the container holding plate 160 and the electromagnetic wave radiated by the second heat block 131b propagate through the second through hole 163. It is heated by the radiant heat generated by this.

The container 200 is heated by the conduction heat and radiant heat generated by the first heat block 131a and the second heat block 131b, and the sealing material inserted between the container body 202 and the lid 203 is melted. The container body 202 and the lid 203 are joined. By joining the container body 202 and the lid 203, the container 200 is hermetically sealed.

According to the present embodiment, the first heat block 131a and the second heat block are formed by forming the first through hole 144 in the tray 140 and the second through hole 163 in the container holding plate 160. The heat radiation of 131b can give a large amount of radiant heat to the container 200. Therefore, even without a pin, the container body 202 and the lid 203 can be easily joined to seal the container 200. In addition, since there are no pins, it is not necessary to inspect the device for a long time, and continuous operation is possible.

(Embodiment 2)
In the first embodiment, the first through hole 144 is formed in the tray 140 and the second through hole 163 is formed in the container holding plate 160, but in addition to the first through hole 144 and the second through hole 163. Alternatively, a recess may be formed in the first heat block 131a or the second heat block 131b.

FIG. 5 shows a sealing device 1 provided with a sealing mechanism according to the present embodiment. As shown in FIG. 5, the sealing device 1 conveys the first preheating mechanism 110, the second preheating mechanism 120, the sealing mechanism 300, and the tray 140 on which the container 200 is mounted in a fixed direction. The transport mechanism 150 is provided. The first preheating mechanism 110, the second preheating mechanism 120, the sealing mechanism 300, and the transfer mechanism 150 are housed in the vacuum chamber 100.

Here, the first preheating mechanism 110, the second preheating mechanism 120, and the transport mechanism 150 have the same configuration as that of the first embodiment, and are not described in detail in the present embodiment.

The sealing mechanism 300 will be described with reference to FIGS. 5 and 6. FIG. 6 is a schematic cross-sectional view showing a state in which the container 200 placed in the first recess 141 of the sealing mechanism 300 is sandwiched by the heat block.

The sealing mechanism 300 is arranged with a tray 140, a container holding plate 160 for preventing the container 200 housed in the tray 140 from coming off, and a pair of heat blocks 131 for sandwiching the tray 140 and the container holding plate 160 from both sides. To. The structure of the tray 140 and the container holding plate 160 is the same as that of the first embodiment, and will not be described in detail in the present embodiment.

As shown in FIG. 6, in the pair of heat blocks 131, the heat block that abuts on the other main surface 143 of the tray 140 is set as the first heat block 131a, and the heat that abuts on the second surface 162 of the container holding plate 160. The block is a second heat block 131b.

In the first heat block 131a, a second recess 301 is formed on a surface of the tray 140 facing the other main surface 143. In the second heat block 131b, a third recess 302 is formed on a surface of the container holding plate 160 facing the second surface 162. The second recess 301 and the third recess 302 are cylindrical holes, respectively.

Similar to the first embodiment, the first heat block 131a has a heat source 132, is heated by the heat source 132, and transfers heat to the tray 140 in contact with the first heat block 131a. The container 200 housed in the first recess 141 is heated by the conduction heat conducted to the tray 140.

The container 200 is also heated by the heat radiation of the first heat block 131a. The electromagnetic wave radiated from the inner surface of the second recess 301 of the first heat block 131a is a container through the space formed in the second recess 301 and the first through hole 144 formed in the tray 140. Propagate towards 200. The electromagnetic wave hits the container 200 while being reflected on the inner surface of the second recess 301 and the inner wall of the first through hole 144 while propagating.

The electromagnetic wave radiated from the first heat block 131a is reflected more as the area of the inner surface of the second recess 301 and the area of the inner wall of the first through hole 144 are larger, and a large amount of radiant heat is generated in the container 200. Let me.

The second heat block 131b is heated by the heat source 132 and transfers heat to the container holding plate 160 in contact with the second heat block 131b. The conduction heat conducted to the container holding plate 160 is conducted to the tray 140 in contact with the container holding plate 160, and the container 200 housed in the first recess 141 is heated by the conducted heat.

The container 200 is also heated by the heat radiation of the second heat block 131b. The electromagnetic wave radiated from the inner surface of the third recess 302 of the second heat block 131b passes through the space formed in the third recess 302 and the second through hole 163 formed in the container holding plate 160. And propagates toward the container 200. The electromagnetic wave hits the container 200 while being reflected on the inner surface of the third recess 302 and the inner wall of the second through hole 163 while propagating.

The electromagnetic wave radiated from the second heat block 131b is reflected more as the area of the inner surface of the third recess 302 and the area of the inner wall of the second through hole 163 are larger, and a large amount of radiant heat is generated in the container 200. Let me.

Since the second recess 301 is formed in the first heat block 131a and the third recess 302 is formed in the second heat block 131b, the area where the electromagnetic waves radiated from both heat blocks are reflected is the area of the implementation. It is larger than the case of the first form, and a large radiant heat can be generated in the container 200.

When the tray 140 in which the plurality of first recesses 141 are formed is used, the sealing mechanism 300 used in the present embodiment has a second recess 301 corresponding to each of the plurality of first recesses 141. A third recess 302 may be formed.

As shown in FIG. 7, the tray 140 is formed with a plurality of first through holes 144 corresponding to the plurality of first recesses 141. In the first heat block 131a facing the tray 140, a plurality of second recesses 301 are formed at positions facing the plurality of first through holes 144.

Further, the container holding plate 160 is formed with a plurality of second through holes 163 corresponding to the plurality of first recesses 141. In the second heat block 131b facing the container holding plate 160, a plurality of third recesses 302 are formed at positions facing the plurality of second through holes 163.

The plurality of second recesses 301 and the plurality of third recesses 302 are cylindrical recesses. It is preferable that the depth and diameter of the cylinders of the plurality of second recesses 301 are the same. Further, it is preferable that the depths and diameters of the plurality of third recesses 302 are also the same. By aligning the depth and diameter of the cylinder, the surface area reflected by the electromagnetic wave can be made equal, and the radiant heat applied to the container 200 can be made uniform.

Further, of the plurality of third recesses 302, any one of the third recesses 302 is used as a third through hole 303 that penetrates the second heat block 131b, and as shown in FIGS. The radiation thermometer 400 may be arranged in the opening portion of the through hole 303 of 3. Specifically, one opening of the third through hole 303 opens into the second through hole 163 of the container holding plate 160, and the other opening faces the container holding plate 160 of the second heat block 131b. Open on the opposite side of the surface. A radiation thermometer 400 is placed in the other opening of the third through hole 303.

The radiation thermometer 400 is a thermometer that measures the temperature of an object by measuring the intensity of radiant energy radiated by the object. Since the radiation thermometer is a thermometer that measures heat radiation derived from light, it is possible to measure the temperature at high speed.

The radiation thermometer 400 may have a viewing window or the like that transmits infrared rays attached to the vacuum chamber 100 and may be arranged outside the vacuum chamber 100 or inside the vacuum chamber 100.

Conventionally, it has been difficult to measure the temperature of the container 200 housed in the first recess 141. As an experiment, even if the temperature of the tray 140 can be measured by a thermocouple attached to the tray 140 instead of the temperature of the container 200, the temperature during production cannot be measured by such a method. Further, when the tray 140 is heated by the heat block 131, a time difference occurs in the temperature rise due to the difference in heat capacity and heat transfer coefficient between the tray 140 and the container 200. In particular, in the heat transfer by radiant heat transfer according to the present embodiment, the temperature of the container 200 rises faster than the temperature of the tray 140, and it is difficult to accurately grasp the temperature of the container 200.

According to the present embodiment, a third through hole 303 is formed in the second heat block 131b, a radiation thermometer 400 is arranged in the other opening of the third through hole 303, and one opening is opened. The temperature of the container 200 can be measured directly through the second through hole 163. By directly measuring the temperature of the container 200, the container 200 being sealed can be measured in real time and reflected in the sealing process.

In the sealing mechanism using pins, the container was sandwiched by the heat block, and it was difficult to measure the temperature of the container. According to this embodiment, since the sealing process can be performed while measuring the temperature, the sealing process can be performed with high accuracy.

According to the present embodiment, in addition to the first through hole 144 and the second through hole 163, the first heat block 131a has a second recess 301, and the second heat block 131b has a third recess 302. Formed. Since the surface area on which the electromagnetic waves radiated from the first heat block 131a and the first heat block 131a can be reflected increases as compared with the first embodiment, a larger radiant heat can be applied to the container 200.

When a crystal oscillator is used as the work, the container sealed in the first and second embodiments has a mounting size of 2016 type (2.0 mm × 1.6 mm) or less, for example, a mounting size of the crystal oscillator. When 1612 type (1.6 mm × 1.2 mm) and 1210 type (1.2 mm × 1.0 mm) crystal units are used, the effect of the present invention is further increased. Since the heat capacity becomes smaller as the crystal unit becomes smaller, the encapsulant can be melted only by the conduction heat and the radiant heat to seal the container without receiving the load by the pin.

In the first and second embodiments, the first preheating mechanism 110 and the second preheating mechanism 120 are provided, and the tray 140 is preheated before the tray 140 is conveyed to the sealing mechanism 130. The present invention is not limited to the sealing device 1 provided with two preheating mechanisms. There may be one or three or more preheating mechanisms. Further, when the mounting size of the crystal oscillator is small, the preheating mechanism may not be provided.

It has been described that in the first and second embodiments, the first through hole 144 has a cylindrical shape, and the second through hole 163 has a cylindrical shape with an elongated cross section. The present invention is not limited to the shape in which the first through hole 144 and the second through hole 163 have a cylindrical shape. Any shape may be formed as long as the surface area of the inner wall of the hole can be increased, such as a conical shape or a hemispherical shape.

In the first and second embodiments, the second through hole 163 is the direction in which the plurality of first recesses 141 formed along the lateral direction of the tray 140 to be abutted are arranged, and the second through hole 163. It was explained that the shape is inclined so that the angle between the long hole and the long side of the hole is α degree. In the present invention, the α degree can be taken at any angle as long as a part of the container 200 is formed so as to be located outside the second through hole 163.

In the second embodiment, it has been described that the second recess 301 and the third recess 302 are cylindrical holes, respectively, but the present invention is not limited to the cylindrical shape. Similar to the first through hole 144 and the second through hole 163, any shape such as a conical shape or a hemispherical shape may be formed as long as the surface area of the inner wall of the recess can be increased.

Although it has been described in the second embodiment that both the second recess 301 and the third recess 302 are formed in the heat block 131, the present invention describes which of the second recess 301 and the third recess 302 is formed. One of them may be formed in the heat block 131.

In the second embodiment, it has been described that the third through hole 303 is formed in the second heat block 131b and the radiation thermometer is arranged in the other opening, but the second heat block 131b in the first embodiment has been described. A third through hole 303 may be formed in the hole, and a radiation thermometer may be placed in the other opening.

Although it has been described that the third recess 302 and the third through hole 303 are arranged in the second embodiment, all the third recess 302 may be the third through hole 303. Since all the containers 200 mounted on the tray 140 communicate with the third through hole 303, all the containers 200 can be heat-sealed under the same conditions. Further, it is possible to measure the temperature of all the containers 200 mounted on the tray 140 by the radiation thermometer 400 through the third through hole 303. A part of the radiation thermometer 400 may be introduced inside the vacuum chamber 100, and a part of the radiation thermometer 400 may be moved to a position facing the desired third through hole 303, or the tray 140 and the heater block may be integrated. The third through hole 303 may be made to face the position of the radiation thermometer 400 by moving it by an XY stage or the like.

The present invention can be used as a sealing mechanism for sealing a container in which a work is housed.

1 Sealing device 100 Vacuum chamber 101 Carry-in port 102 Carry-out port 110 First preheating mechanism 120 Second preheating mechanism 130 Sealing mechanism 111, 121, 131 Heat block 112, 122, 132 Heat source 113, 123, 133 Lifting and lowering Drives 111a, 121a Lower heat block 111b, 121b Upper heat block 131a First heat block 131b Second heat block 140 Tray 141 First recess 142 One main surface 143 The other main surface 144 First through hole 150 Transport mechanism 151 Roller 160 Container holding plate 161 First surface 162 Second surface 163 Second through hole 200 Container 201 Work 202 Container body 203 Lid 300 Sealing mechanism 301 Second recess 302 Third recess 303 Second Through hole of 3 400 Radiation thermometer

Claims (5)

A sealing mechanism for sealing a quadrangular container having an opening and accommodating a work and a lid for closing the opening with a sealing material.
A pair of main surfaces pair direction, a first recess for accommodating the container are formed on one main surface, a first through-penetrating to the main surface of the bottom or found other side of the first recess With a tray , with a hole,
Having a first surface and a second surface facing each other, and contacting one main surface of the tray with the first surface causes the container housed in the tray to separate from the tray. a container holding plate to prevent, through from said first surface to said second surface, a container pressing plate comprising a second through-hole communicating with the first recess of said tray,
A first heat block disposed to abut on the other main surface of said tray,
And a second heat block disposed abutting to the second side of the container holding plate,
The first heat block heats the container housed in the first recess by heat radiation through the first through hole.
The second heat block heats the container in which the first recess is housed by heat radiation through the second through hole .
The second through hole is formed into an elongated hole shape having a pair of long sides having a cross-sectional shape perpendicular to the penetration direction.
When the tray and the container holding plate are viewed from the second heat block, the pair of long sides of the second through hole intersects two adjacent sides of the container housed in the tray. Two diagonal corners of the container are located outside the pair of long sides, and the other two diagonal corners are inside the pair of long sides. The container holding plate holds the two diagonal corners of the container.
Sealing mechanism. The first heat block was formed with a second recess facing the first through hole of the tray.
The sealing mechanism according to claim 1. The second heat block was formed with a third recess facing the second through hole of the container holding plate.
The sealing mechanism according to claim 1 or 2. In the second heat block, a third through hole is formed so as to face the second through hole of the container holding plate and one of them opens.
A radiation thermometer was placed in the other opening of the third through hole,
The sealing mechanism according to claim 1. A sealing mechanism for sealing a quadrangular container having an opening and accommodating a work and a lid for closing the opening with a sealing material.
A plurality of recesses having a pair of facing main surfaces and arranged in a matrix on one main surface to accommodate the container, and a plurality of first penetrations penetrating from the bottom of the plurality of recesses to the other main surface. With a tray, with a hole,
Having a first surface and a second surface facing each other, and contacting one main surface of the tray with the first surface causes the container housed in the tray to separate from the tray. A container holding plate having a plurality of second through holes penetrating from the first surface to the second surface and communicating with the plurality of recesses.
A first heat block arranged in contact with the other main surface of the tray,
A second heat block arranged in contact with the second surface of the container holding plate is provided.
The plurality of second through holes are formed into an elongated hole shape having a pair of long sides having a cross-sectional shape perpendicular to the penetration direction.
When the tray and the container holding plate are viewed from the second heat block, the pair of long sides of the plurality of second through holes is oriented with respect to the direction of the row of the plurality of recesses arranged in a matrix. Two corners of one diagonal of each container are located outside the pair of long sides, and the two corners of the other diagonal are of the pair of long sides. Located on the inside, the container holding plate holds two diagonal corners of the container.
Sealing mechanism.

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