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JP7002170B2 - Graphite powder manufacturing method - Google Patents
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JP7002170B2 - Graphite powder manufacturing method - Google Patents

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JP7002170B2
JP7002170B2 JP2018044542A JP2018044542A JP7002170B2 JP 7002170 B2 JP7002170 B2 JP 7002170B2 JP 2018044542 A JP2018044542 A JP 2018044542A JP 2018044542 A JP2018044542 A JP 2018044542A JP 7002170 B2 JP7002170 B2 JP 7002170B2
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graphite powder
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JP2018150228A (en
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潔 野中
弘徳 石田
賢太 増田
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Taiheiyo Cement Corp
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Description

本発明は、鉛直上端面が大気開放され、内壁面に電極を有する炉を用いた黒鉛粉末の製造方法に関する。 The present invention relates to a method for producing graphite powder using a furnace in which the vertical upper end surface is open to the atmosphere and an electrode is provided on the inner wall surface.

高純度黒鉛粉末は、二次電池負極材料、メカニカルシール材といった粉体、または半導体製造に使用する部材として用いられる。特に、灰分が数十~数ppmオーダーの半導体製造工程で使用される製品は、高温かつ長時間の処理で高度に不純物を除去して製造され、高価である。従来、ハロゲンガスやハロゲン化物を用いた高純度黒鉛粉末の製造方法が知られている。 The high-purity graphite powder is used as a powder such as a secondary battery negative electrode material and a mechanical sealant, or as a member used for semiconductor production. In particular, products used in a semiconductor manufacturing process having an ash content on the order of several tens to several ppm are expensive because they are manufactured by highly removing impurities by high-temperature and long-term treatment. Conventionally, a method for producing a high-purity graphite powder using a halogen gas or a halide has been known.

特許文献1には、断熱材を充填した加熱炉に黒鉛製で円筒形の加熱容器を入れ、黒鉛を供給しながら通電加熱することで、連続的に純化処理を行う装置が記載されている。特許文献2には、縮合多環炭化水素を重合させてメソフェーズピッチとしてから、熱処理および粉砕によって結晶性で平均粒径10μmの黒鉛粉末を得る方法が記載されている。特許文献3には、炭素原料粉末をバインダと共に焼成したのちにハロゲンを含む有機物を含浸させ、含浸体を熱処理することで高純度な黒鉛部材を得る方法が記載されている。 Patent Document 1 describes an apparatus for continuously purifying by placing a cylindrical heating container made of graphite in a heating furnace filled with a heat insulating material and energizing and heating while supplying graphite. Patent Document 2 describes a method of polymerizing condensed polycyclic hydrocarbons to obtain a mesophase pitch, and then heat-treating and pulverizing to obtain a crystalline graphite powder having an average particle size of 10 μm. Patent Document 3 describes a method of obtaining a high-purity graphite member by firing a carbon raw material powder together with a binder, impregnating it with an organic substance containing halogen, and heat-treating the impregnated body.

特許文献1~3に記載の方法は、いずれもハロゲン化物を用い、黒鉛中の金属酸化物を金属ハロゲン化物に還元し、沸点を下げて揮発させている。これらと同様に、バインダと共に焼成成型する、あるいは炭素内に埋没するといった方法で加熱装置内に設置したのち、ハロゲンガスやハロゲン化物の存在下で熱を加えることで灰分を低減する方法も一般的に行われている。しかし、ハロゲンガスやハロゲン化物を用いて灰分が数十ppm以下の高純度な黒鉛粉末を製造しようとすると、ガスの漏洩防止策や排ガス処理設備を設ける必要があり、高コストになる。 In all of the methods described in Patent Documents 1 to 3, a halide is used, and the metal oxide in the graphite is reduced to the metal halide to lower the boiling point and volatilize. Similar to these, it is also common to reduce the ash content by applying heat in the presence of halogen gas or halide after installing it in the heating device by firing it together with the binder or burying it in carbon. It is done in. However, if it is attempted to produce high-purity graphite powder having an ash content of several tens of ppm or less using halogen gas or a halide, it is necessary to provide gas leakage prevention measures and exhaust gas treatment equipment, resulting in high cost.

一方、アチソン炉(非特許文献1、特許文献4参照)を用いた黒鉛の製造方法が知られている。特許文献5記載の方法では、炉内の容器に黒鉛化したい原料を充填し細い炭素棒に電流を流すことで、簡易に黒鉛を製造している。特許文献6記載の方法では、炉内にコークスと珪石の混合物を充填し、炭素材に通電して、炭化珪素を生成し、加熱により珪素原子を熱解離して黒鉛を製造している。 On the other hand, a method for producing graphite using an Athison furnace (see Non-Patent Document 1 and Patent Document 4) is known. In the method described in Patent Document 5, graphite is simply produced by filling a container in a furnace with a raw material to be graphitized and passing an electric current through a thin carbon rod. In the method described in Patent Document 6, a mixture of coke and silica stone is filled in a furnace, a carbon material is energized to generate silicon carbide, and silicon atoms are thermally dissociated by heating to produce graphite.

特開平8-198612号公報Japanese Unexamined Patent Publication No. 8-198612 特開平10-121054号公報Japanese Unexamined Patent Publication No. 10-121054 特開2006-232565号公報Japanese Unexamined Patent Publication No. 2006-232565 特開2015-157737号公報Japanese Unexamined Patent Publication No. 2015-157737 昭和十年特許出願公告第525号公報1945 Patent Application Publication No. 525 特開平9-157022号公報Japanese Unexamined Patent Publication No. 9-157022

新版工業炉ハンドブック、財団法人省エネルギーセンター発行、1997年11月28日、P485~488New Edition Industrial Reactor Handbook, published by Energy Conservation Center, Japan, November 28, 1997, P485-488

上記のように、従来は、簡易な方法で黒鉛粉末を製造すると灰分が数十ppm以下の高純度の黒鉛粉末は製造できない。一方、高純度の黒鉛粉末を製造しようとすると高価な設備等が必要となり製造コストが嵩む。 As described above, conventionally, when graphite powder is produced by a simple method, high-purity graphite powder having an ash content of several tens of ppm or less cannot be produced. On the other hand, if it is attempted to produce high-purity graphite powder, expensive equipment or the like is required and the production cost increases.

本発明は、このような事情に鑑みてなされたものであり、簡易な設備で高効率に黒鉛粉末原料内の不純物を排出し、低コストで高純度の黒鉛粉末が得られる黒鉛粉末の製造方法を提供することを目的とする。 The present invention has been made in view of such circumstances, and is a method for producing graphite powder, which can obtain high-purity graphite powder at low cost by efficiently discharging impurities in the graphite powder raw material with simple equipment. The purpose is to provide.

(1)上記の目的を達成するため、本発明の黒鉛粉末の製造方法は、鉛直上端面が大気開放され、内壁面に電極を有する炉を用いた黒鉛粉末の製造方法であって、無機珪酸質粒子および炭素質粒子が混合された充填材の内部に埋設され、炉内の電極間を接続する黒鉛粉末原料を配置する工程と、前記黒鉛粉末原料を通電加熱する工程と、を含み、前記充填材のかさ密度は、0.50×10kg/m以上1.2×10kg/m以下であることを特徴としている。 (1) In order to achieve the above object, the method for producing graphite powder of the present invention is a method for producing graphite powder using a furnace in which the vertical upper end surface is open to the atmosphere and an electrode is provided on the inner wall surface, and is an inorganic silicic acid. It includes a step of arranging a graphite powder raw material which is embedded inside a filler in which quality particles and carbonaceous particles are mixed and connects the electrodes in the furnace, and a step of energizing and heating the graphite powder raw material. The bulk density of the filler is 0.50 × 10 3 kg / m 3 or more and 1.2 × 10 3 kg / m 3 or less.

上記のようなかさ密度の充填材で加熱することで、充填材から生じたSiOガスを黒鉛粉末原料の形状を維持しつつその内部に速く拡散させて金属酸化物を還元し、高効率で還元された金属を充填材中へ排出できる。その結果、簡易な設備で高効率に黒鉛粉末原料内の不純物を排出し、低コストで高純度の黒鉛粉末が得られる。また、黒鉛粉末原料に電流を流して直接加熱していることに加え、充填材が無機珪酸質粒子および炭素質粒子の混合物であり周囲に余分な電流が生じ難いことから、エネルギー効率を向上できる。 By heating with the above-mentioned bulk density filler, the SiO gas generated from the filler is rapidly diffused inside the filler while maintaining the shape of the graphite powder raw material to reduce the metal oxide and reduce it with high efficiency. Metal can be discharged into the filler. As a result, impurities in the graphite powder raw material can be discharged with high efficiency by simple equipment, and high-purity graphite powder can be obtained at low cost. Further, in addition to directly heating the graphite powder raw material by passing an electric current, the filler is a mixture of inorganic silicic acid particles and carbonaceous particles, and an extra electric current is unlikely to be generated in the surroundings, so that energy efficiency can be improved. ..

(2)また、本発明の黒鉛粉末の製造方法は、前記黒鉛粉末原料が、前記炉の電極が設置されていない内壁面および鉛直上端面のいずれに対しても、前記黒鉛粉末原料の代表太さの2倍以上10倍以下の間隔を空けて前記充填材の内部に埋設されていることを特徴としている。これにより、SiOガスを炉内に維持し金属不純物を効率的に除去しつつ、高純度の黒鉛粉末の収率を向上できる。 (2) Further, in the method for producing graphite powder of the present invention, the graphite powder raw material is representative of the graphite powder raw material on both the inner wall surface and the vertical upper end surface where the electrodes of the furnace are not installed. It is characterized in that it is embedded inside the filler at intervals of 2 times or more and 10 times or less of the graphite. This makes it possible to improve the yield of high-purity graphite powder while maintaining SiO gas in the furnace and efficiently removing metal impurities.

(3)また、本発明の黒鉛粉末の製造方法は、前記黒鉛粉末原料の代表太さが、50mm以上500mm以下の範囲であることを特徴としている。これにより、加熱に十分な通電を維持しつつ、黒鉛粉末原料の中心まで金属不純物を除去できる。 (3) Further, the method for producing graphite powder of the present invention is characterized in that the representative thickness of the graphite powder raw material is in the range of 50 mm or more and 500 mm or less. As a result, metal impurities can be removed to the center of the graphite powder raw material while maintaining sufficient energization for heating.

(4)また、本発明の黒鉛粉末の製造方法は、前記充填材のSiを除いた灰分が、前記充填材に対して重量分率で1000ppm以下であることを特徴としている。これにより、充填材から黒鉛粉末原料に流れる不純物を低減し、黒鉛粉末原料を高純度化できる。 (4) Further, the method for producing graphite powder of the present invention is characterized in that the ash content of the filler excluding Si is 1000 ppm or less by weight with respect to the filler. As a result, impurities flowing from the filler to the graphite powder raw material can be reduced, and the graphite powder raw material can be highly purified.

(5)また、本発明の黒鉛粉末の製造方法は、前記充填材に含まれる炭素質粒子の重量分率が、前記炭素質粒子および無機珪酸質粒子の合計重量に対して30wt%以上60wt%以下であることを特徴としている。これにより、高い効率でSiOガスを発生させることができる。 (5) Further, in the method for producing graphite powder of the present invention, the weight fraction of the carbonic particles contained in the filler is 30 wt% or more and 60 wt% with respect to the total weight of the carbonic particles and the inorganic silicic acid particles. It is characterized by the following. This makes it possible to generate SiO gas with high efficiency.

本発明によれば、簡易な設備で高効率に黒鉛粉末原料内の不純物を排出し、低コストで高純度の黒鉛粉末が得られる。 According to the present invention, impurities in the graphite powder raw material can be discharged with high efficiency by simple equipment, and high-purity graphite powder can be obtained at low cost.

(a)、(b)それぞれ炉、充填材および黒鉛粉末原料を示す側断面図および正断面図である。(A) and (b) are side sectional views and normal sectional views showing a furnace, a filler, and a graphite powder raw material, respectively. 各実施例、比較例の実験条件および16時間焼成後の灰分の測定結果を示す表である。It is a table which shows the experimental conditions of each Example and a comparative example, and the measurement result of the ash content after firing for 16 hours. 焼成時間と灰分量の関係を示すグラフである。It is a graph which shows the relationship between the firing time and the amount of ash.

本発明者らは、鋭意研究の結果、黒鉛粉末原料を、無機珪酸質原料及び炭素質原料を含む充填材内に充填し、黒鉛粉末原料を通電加熱することで、ハロゲン化物を用いず、安価に高純度黒鉛を製造できる方法を発明した。以下に、本発明の実施形態について説明する。 As a result of diligent research, the present inventors have filled a filler containing an inorganic siliceous raw material and a carbonaceous raw material into a filler, and the graphite powder raw material is energized and heated, so that no halide is used and the cost is low. Invented a method capable of producing high-purity graphite. Hereinafter, embodiments of the present invention will be described.

[高純度黒鉛が得られる原理]
一般に、黒鉛は熱処理により高純度化される。これは、揮発性物質を揮発させるとともに、黒鉛に含まれる金属の酸化物を還元して金属単体とし、蒸発させることによる。高純度化したい黒鉛をハロゲンガスで保たれた場所に置いたり、炭素中に埋没させたりすることで還元雰囲気を保つことができる。
[Principle for obtaining high-purity graphite]
Generally, graphite is highly purified by heat treatment. This is because the volatile substance is volatilized and the oxide of the metal contained in graphite is reduced to form a simple substance of metal and evaporated. The reducing atmosphere can be maintained by placing the graphite to be highly purified in a place kept with halogen gas or by burying it in carbon.

ハロゲンガス中で加熱する方法は、ガスを介しての間接加熱となるためエネルギー効率が悪くなる。また、反応性の高いハロゲンガスを多量に使用する必要があり、ガスに対する安全対策を講ずる必要がある。内部に対象物を埋没させた炭素に電圧をかけてジュール熱で加熱する直接加熱の方法がある。しかし、他の炭素にも電流が流れてしまい、電流効率に劣る。また、炉内に粒子の流れがないため、金属が単体になったとしても、炭素原料中から排斥されにくく、不純物が残りやすい。 The method of heating in halogen gas results in indirect heating via gas, resulting in poor energy efficiency. In addition, it is necessary to use a large amount of highly reactive halogen gas, and it is necessary to take safety measures against the gas. There is a direct heating method in which a voltage is applied to carbon in which an object is buried and heated by Joule heat. However, the current also flows to other carbons, and the current efficiency is inferior. Further, since there is no flow of particles in the furnace, even if the metal becomes a simple substance, it is difficult to be excluded from the carbon raw material and impurities are likely to remain.

これに対し、黒鉛粉末原料を無機珪酸質原料および炭素質原料からなる充填材に埋没させて通電加熱すれば、黒鉛粉末原料を直接加熱でき、ガス中で加熱する場合と比較してエネルギー効率が高い。また、充填材が無機珪酸質原料および炭素質原料の混合物であることから、炭素を充填材として用いるより周囲に余分な電流が流れにくい。 On the other hand, if the graphite powder raw material is embedded in a filler composed of an inorganic silicic acid raw material and a carbonaceous raw material and heated by energization, the graphite powder raw material can be directly heated, and the energy efficiency is higher than that in the case of heating in gas. high. Further, since the filler is a mixture of an inorganic siliceous raw material and a carbonaceous raw material, it is difficult for an extra current to flow to the surroundings as compared with the case where carbon is used as the filler.

また、炉内が高温になると、無機珪酸質原料と炭素質原料が反応し、活性の高いSiOガスが生じる。このSiOガスの一部が黒鉛粉末原料の間に進入するが、SiOガスは還元性が強く、黒鉛粉末原料に含まれる金属酸化物を還元できる。加熱により黒鉛粉末原料は2500℃以上に昇温し、この温度ではほとんどの金属は少なくとも一部が気化する。気化した金属は、SiOガスの流れによって黒鉛粉末原料中から充填材中に移動する。 Further, when the temperature inside the furnace becomes high, the inorganic silicic acid raw material and the carbonaceous raw material react with each other to generate highly active SiO gas. A part of this SiO gas enters between the graphite powder raw materials, but the SiO gas has strong reducing property and can reduce the metal oxide contained in the graphite powder raw material. By heating, the graphite powder raw material is heated to 2500 ° C. or higher, and at this temperature, at least a part of the metal is vaporized. The vaporized metal moves from the graphite powder raw material into the filler by the flow of SiO gas.

低温になると金属は再び酸化物や炭化物になる。充填材中の方が黒鉛粉末原料中より還元雰囲気が弱くまた温度が低いため、不純物は充填材側に移動する。同様の不純物の移動は炭素中で黒鉛を高純度化する場合でも起こる。上記の製造方法では、還元性のあるSiOガスを発生させることで、黒鉛粉末原料に含まれる不純物元素を速やかに還元し充填材側へ排斥できる。その結果、黒鉛粉末原料から高純度化された黒鉛粉末を得ることができる。 At low temperatures, metals become oxides and carbides again. Since the reducing atmosphere is weaker and the temperature is lower in the filler than in the graphite powder raw material, impurities move to the filler side. Similar transfer of impurities occurs even when graphite is purified in carbon. In the above manufacturing method, by generating a reducing SiO gas, the impurity element contained in the graphite powder raw material can be quickly reduced and eliminated to the filler side. As a result, highly purified graphite powder can be obtained from the graphite powder raw material.

[黒鉛粉末の製造方法]
次に、上記の原理に基づく黒鉛粉末の製造方法について説明する。
[Method for manufacturing graphite powder]
Next, a method for producing graphite powder based on the above principle will be described.

(炉の構成)
まず、製造方法に用いる炉の構成を説明する。図1(a)、(b)は、それぞれ炉10、充填材20および黒鉛粉末原料30を示す側断面図および正断面図である。本発明の黒鉛粉末の製造方法は、電極15a、15bつきの反応容器である炉10を用いて行う。炉10は、鉛直上端面が大気開放され、内壁面に電極を有する。
(Composition of furnace)
First, the configuration of the furnace used in the manufacturing method will be described. 1 (a) and 1 (b) are a side sectional view and a normal sectional view showing a furnace 10, a filler 20, and a graphite powder raw material 30, respectively. The method for producing graphite powder of the present invention is carried out using a furnace 10 which is a reaction vessel with electrodes 15a and 15b. The furnace 10 has a vertical upper end surface open to the atmosphere and has electrodes on the inner wall surface.

炉本体11を形成する容器の形状は特に問わないが、黒鉛粉末原料30に通電するための電極15a、15bを有していることが必要である。電極15a、15bは、容器内側の対向する両端面に設けられていることが好ましく、炉本体11は平行な対向する二面を有することが好ましい。炉本体11には、直方形の形状の容器を用いるのが簡便で好ましい。炉本体11は、反応ガスが過剰に発生した際にその濃度を適度に保つためのガス抜け用の隙間としてスリットを有してもよい。 The shape of the container forming the furnace body 11 is not particularly limited, but it is necessary to have electrodes 15a and 15b for energizing the graphite powder raw material 30. The electrodes 15a and 15b are preferably provided on opposite end surfaces inside the container, and the furnace body 11 preferably has two parallel facing surfaces. It is convenient and preferable to use a rectangular container for the furnace body 11. The furnace body 11 may have a slit as a gap for venting gas to maintain an appropriate concentration when the reaction gas is excessively generated.

炉本体11の材質は特に問わないが、通電時に黒鉛粉末原料からの伝熱により壁面が高温になるため、充填材と接触する部分には耐火性の高い材料を使うことが望ましい。例えば、高アルミナ質耐火れんが、珪酸カルシウムボード等が好適である。 The material of the furnace body 11 is not particularly limited, but since the wall surface becomes hot due to heat transfer from the graphite powder raw material when energized, it is desirable to use a material having high fire resistance for the portion in contact with the filler. For example, high alumina refractory bricks, calcium silicate boards and the like are suitable.

炉本体11に保持させる電極15a、15bとしては、高純度化の観点から金属を含まない素材が好ましい。電極15a、15bは、黒鉛粉末原料からの伝熱の影響を受けることから、高温にも耐性のある黒鉛成型体が好適である。 As the electrodes 15a and 15b to be held in the furnace body 11, metal-free materials are preferable from the viewpoint of high purity. Since the electrodes 15a and 15b are affected by heat transfer from the graphite powder raw material, a graphite molded body that is resistant to high temperatures is suitable.

(方法全体の手順)
黒鉛粉末原料30の埋設は、無機珪酸質粒子および炭素質粒子が混合された充填材20の内部に炉10内の電極15a、15b間を接続するように行う。
(Procedure of the whole method)
The graphite powder raw material 30 is embedded so as to connect the electrodes 15a and 15b in the furnace 10 inside the filler 20 in which the inorganic silicic acid particles and the carbonic acid particles are mixed.

無機珪酸質原料には、化学式SiOで表される物質一般が使用できる。SiOで表される物質には、例えば、珪砂、石英粉末、結晶質シリカ粉末、非晶質シリカ粉末、シリカゲル等が挙げられる。上記SiOガスの発生は非晶質のSiOを使用した方が起こりやすいことから、非晶質シリカ粉末、シリカゲルは特に好適である。 As the inorganic silicic acid raw material, a substance generally represented by the chemical formula SiO 2 can be used. Examples of the substance represented by SiO 2 include silica gel, quartz powder, crystalline silica powder, amorphous silica powder, silica gel and the like. Amorphous silica powder and silica gel are particularly suitable because the generation of SiO gas is more likely to occur when amorphous SiO 2 is used.

炭素質原料には、結晶質の黒鉛、非晶質のカーボンブラックの両方が使用できる。いずれも形態は問わず、例えば土状、鱗片状等であってもよい。高純度化の対象となる黒鉛により多くの電流を流すことがエネルギーコストの面で望ましいため、炭素質原料には電導性の小さい非晶性のカーボンブラック粉末が特に適している。 As the carbonaceous raw material, both crystalline graphite and amorphous carbon black can be used. Both may be in any form, for example, soil-like, scale-like, or the like. Amorphous carbon black powder with low conductivity is particularly suitable as a carbonaceous raw material because it is desirable to pass a large amount of current through graphite, which is the target of high purification, in terms of energy cost.

充填材20に黒鉛粉末原料30を埋設し終えたら、電極15a、15bに通電する。その結果、充填された黒鉛粉末原料30が通電により発熱する。次第に伝熱により黒鉛粉末原料30から周囲の充填材20に熱が伝わり、徐々にSiOガスの発生、それに伴う黒鉛の高純度化が起こる。 After the graphite powder raw material 30 is embedded in the filler 20, the electrodes 15a and 15b are energized. As a result, the filled graphite powder raw material 30 generates heat when energized. Heat is gradually transferred from the graphite powder raw material 30 to the surrounding filler 20 by heat transfer, and SiO gas is gradually generated, and the graphite becomes highly purified.

反応が進んでいくと、次第に、黒鉛粉末原料30の周囲の炭素質原料と無機珪酸質原料が溶融あるいは反応し、ガラス質の組織や反応によって生じた炭化珪素結晶が生じる。このようにして黒鉛粉末原料30から高純度化した黒鉛粉末が得られる。黒鉛粉末原料に電流を流して直接加熱していることに加え、充填材が無機珪酸質粒子および炭素質粒子の混合物であり周囲に余分な電流が生じ難いことから、エネルギー効率を向上できる。 As the reaction progresses, the carbonaceous raw material around the graphite powder raw material 30 and the inorganic silicic acid raw material gradually melt or react to form a vitreous structure and silicon carbide crystals generated by the reaction. In this way, highly purified graphite powder can be obtained from the graphite powder raw material 30. In addition to directly heating the graphite powder raw material by passing an electric current, the filler is a mixture of inorganic silicic acid particles and carbonaceous particles, and an extra electric current is unlikely to be generated in the surroundings, so that energy efficiency can be improved.

通電は、黒鉛粉末原料30周辺の温度が1500℃以上になるように電流等を調整するのが好ましい。これにより、SiOガスが生じる。後述する単離を容易にするため、硬質な炭化珪素結晶の生じやすい2200℃以上になるようにするのが特に好ましい。 For energization, it is preferable to adjust the current or the like so that the temperature around the graphite powder raw material 30 becomes 1500 ° C. or higher. This produces SiO gas. In order to facilitate the isolation described later, it is particularly preferable to set the temperature to 2200 ° C. or higher at which hard silicon carbide crystals are likely to occur.

所定時間の通電の後、得られた黒鉛粉末が冷めるのを待って炉本体11から取り出す。黒鉛粉末は、上記の反応中に生成したガラス質組織または炭化珪素結晶の殻に包まれたような状態となっており、充填材や、上記の殻との分離は容易に行うことができる。例えば、上記の殻ごと取り出し、殻をハンマー等で粉砕後、中の黒鉛粉末をかき出し、混入した殻をふるいで除去することができる。 After energization for a predetermined time, the obtained graphite powder is taken out from the furnace body 11 after waiting for cooling. The graphite powder is in a state of being wrapped in a glassy structure or a shell of silicon carbide crystals generated during the above reaction, and can be easily separated from the filler and the above shell. For example, the whole shell can be taken out, the shell can be crushed with a hammer or the like, the graphite powder inside can be scraped out, and the mixed shell can be removed by sieving.

このようにして、灰分を0.1%程度含む黒鉛粉末を安価に精製し、灰分を50ppm以下にまで低減できる。製造された高純度の黒鉛粉末は、高純度の黒鉛るつぼ、半導体製造部材等に使用できる。 In this way, the graphite powder containing about 0.1% of ash can be purified at low cost, and the ash can be reduced to 50 ppm or less. The produced high-purity graphite powder can be used for high-purity graphite crucibles, semiconductor manufacturing members, and the like.

(炉本体内の充填材および黒鉛粉末原料の詳細)
炉本体内に充填された充填材のかさ密度は、0.50×10kg/m以上1.2×10kg/m以下に調整する。かさ密度を1.2×10kg/m以下にすることで、充填材内にて発生したSiOガスの拡散速度を維持でき、不純物金属の還元反応を促進できる。また、かさ密度を0.50×10kg/m以上にすることで、充填材の一部が反応して炭化珪素(真密度3.21×10kg/m)となる反応の進行を抑制して充填材の体積を維持し、柱状に充填した黒鉛粉末原料の崩壊を防止できる。充填材のかさ密度は、0.55×10kg/m以上1.15×10kg/m以下であることがさらに好ましい。これにより、不純物金属の排出効果が高まり、さらに取扱いが容易になる。
(Details of filler in the furnace body and raw material for graphite powder)
The bulk density of the filler filled in the furnace body is adjusted to 0.50 × 10 3 kg / m 3 or more and 1.2 × 10 3 kg / m 3 or less. By setting the bulk density to 1.2 × 10 3 kg / m 3 or less, the diffusion rate of the SiO gas generated in the filler can be maintained, and the reduction reaction of the impurity metal can be promoted. Further, by setting the bulk density to 0.50 × 10 3 kg / m 3 or more, a part of the filler reacts to form silicon carbide (true density 3.21 × 10 3 kg / m 3 ). It is possible to suppress the progress, maintain the volume of the filler, and prevent the collapse of the graphite powder raw material packed in columns. The bulk density of the filler is more preferably 0.55 × 10 3 kg / m 3 or more and 1.15 × 10 3 kg / m 3 or less. As a result, the effect of discharging the impurity metal is enhanced, and the handling becomes easier.

充填材のSiを除いた灰分は、充填材に対して重量分率で1000ppm以下であることが好ましい。これにより、充填材から黒鉛粉末原料に流れる不純物を低減し、黒鉛粉末原料を高純度化できる。灰分が1000ppm以下なので、充填材の不純物の黒鉛粉末原料への移動が抑制される。その結果、有効に高純度化でき、灰分50ppm以下を達成できる。 The ash content of the filler excluding Si is preferably 1000 ppm or less by weight with respect to the filler. As a result, impurities flowing from the filler to the graphite powder raw material can be reduced, and the graphite powder raw material can be highly purified. Since the ash content is 1000 ppm or less, the transfer of impurities from the filler to the graphite powder raw material is suppressed. As a result, high purity can be effectively achieved and an ash content of 50 ppm or less can be achieved.

また、充填材に含まれる炭素質粒子の重量分率は、炭素質粒子および無機珪酸質粒子の合計重量に対して30wt%以上60wt%以下であることが好ましい。これにより、高い効率でSiOガスを発生させることができる。炭素質粒子の重量分率が30wt%以上なので、無機珪酸質原料のSiOの還元反応が起こりやすく、SiOガスの発生量を確保できる。また、炭素質粒子の重量分率が60wt%以下なので、SiOの存在量を確保でき、十分なSiOガスの発生量を維持できる。 The weight fraction of the carbonic particles contained in the filler is preferably 30 wt% or more and 60 wt% or less with respect to the total weight of the carbonic particles and the inorganic silicic acid particles. This makes it possible to generate SiO gas with high efficiency. Since the weight fraction of the carbonaceous particles is 30 wt% or more, the reduction reaction of SiO 2 as an inorganic siliceous raw material is likely to occur, and the amount of SiO gas generated can be secured. Further, since the weight fraction of the carbonaceous particles is 60 wt% or less, the abundance of SiO 2 can be secured and a sufficient amount of SiO gas generated can be maintained.

黒鉛粉末原料は、電極間を電気的に接続できればよいが、柱状に形成されていることが好ましい。そして、図1(a)に示すように、炉10の電極が設置されていない内壁面および鉛直上端面のいずれに対しても、黒鉛粉末原料30の代表太さXの2倍以上10倍以下の間隔を空けて充填材20の内部に埋設されていることが好ましい。これにより、SiOガスを炉内に維持し金属不純物を効率的に除去しつつ、高純度の黒鉛粉末の収率を向上できる。 The graphite powder raw material may be electrically connected between the electrodes, but is preferably formed in a columnar shape. Then, as shown in FIG. 1A, the thickness X of the graphite powder raw material 30 is twice or more and 10 times or less with respect to both the inner wall surface and the vertical upper end surface where the electrodes of the furnace 10 are not installed. It is preferable that the filler 20 is embedded inside the filler 20 at intervals. This makes it possible to improve the yield of high-purity graphite powder while maintaining SiO gas in the furnace and efficiently removing metal impurities.

すなわち、炉10の電極が設置されていない内壁面および鉛直上端面のいずれに対しても、黒鉛粉末原料30の代表太さの2倍以上の間隔で充填材20が充填されているため、高純度化の鍵となるSiOガスが炉外に拡散するのを防止でき、金属不純物の除去効率が向上する。また、黒鉛粉末からの伝熱が緩衝され炉壁の傷みを低減できる。炉壁から溶出した金属不純物による黒鉛粉末の汚染を防止できる。 That is, the filler 20 is filled on both the inner wall surface and the vertical upper end surface where the electrodes of the furnace 10 are not installed at intervals of at least twice the typical thickness of the graphite powder raw material 30, so that the filling material 20 is high. It is possible to prevent the SiO gas, which is the key to purification, from diffusing out of the furnace, and the efficiency of removing metal impurities is improved. In addition, heat transfer from the graphite powder is buffered and damage to the furnace wall can be reduced. It is possible to prevent contamination of graphite powder by metal impurities eluted from the furnace wall.

一方、炉10の電極が設置されていない内壁面および鉛直上端面のいずれに対しても、黒鉛粉末原料30の代表太さの10倍以下の間隔で充填材20が充填されているため、充填材20の使用量を抑えられる。また、黒鉛粉末原料30の柱が細くなりすぎないため、高純度化処理中の十分な通電を確保できる。 On the other hand, since the filler 20 is filled on both the inner wall surface and the vertical upper end surface where the electrodes of the furnace 10 are not installed at intervals of 10 times or less the typical thickness of the graphite powder raw material 30, the filling material 20 is filled. The amount of material 20 used can be reduced. Further, since the pillar of the graphite powder raw material 30 does not become too thin, sufficient energization can be ensured during the high purification treatment.

ここで代表太さXとは、柱状に形成された黒鉛粉末原料30の代表太さであり、柱の断面が正方形である場合はその一辺の長さを指す。また、各辺の長さがAおよびBの長方形である場合はX=(A+B)/2、円柱状である場合はその直径を指す。それ以外の場合は、断面の外周の長さをLとしたとき、同じ外周の長さを持つ円の直径(すなわちX=L/π)を指す。また、黒鉛粉末原料30の代表太さXが炉内で変化する場合は、最も黒鉛粉末原料30の柱の断面積が小さい位置におけるXを採用する。 Here, the representative thickness X is a representative thickness of the graphite powder raw material 30 formed in a columnar shape, and when the cross section of the column is square, it refers to the length of one side thereof. Further, when the length of each side is a rectangle of A and B, it means X = (A + B) / 2, and when it is a cylinder, it means the diameter thereof. In other cases, it refers to the diameter of a circle having the same outer peripheral length (that is, X = L / π), where L is the outer peripheral length of the cross section. When the representative thickness X of the graphite powder raw material 30 changes in the furnace, X is adopted at the position where the cross-sectional area of the pillar of the graphite powder raw material 30 is the smallest.

また、黒鉛粉末原料30の代表太さXは、50mm以上500mm以下の範囲であることが好ましい。黒鉛粉末原料30の代表太さXが50mm以上なので、高純度化処理中の十分な通電を確保できる。一方、500mm以下なので、SiOガスが十分に黒鉛粉末原料30中に拡散し、内部まで金属不純物を除去できる。 Further, the representative thickness X of the graphite powder raw material 30 is preferably in the range of 50 mm or more and 500 mm or less. Since the representative thickness X of the graphite powder raw material 30 is 50 mm or more, sufficient energization can be ensured during the high purification treatment. On the other hand, since it is 500 mm or less, SiO gas can be sufficiently diffused into the graphite powder raw material 30 and metal impurities can be removed to the inside.

[実施例、比較例の実験条件]
実施例1~10、比較例1~8として黒鉛粉末を製造し、純度を測定する実験を行った。
[Experimental conditions of Examples and Comparative Examples]
Graphite powder was produced as Examples 1 to 10 and Comparative Examples 1 to 8, and an experiment was conducted to measure the purity.

(実施例1)
高アルミナ質耐火れんがを用いて、内寸が、幅1050mm、長さ2530mm、高さ1020mmの直方体の炉本体を作製した。そして、炉本体の長尺方向の両端の二面における、高さ480mm、短尺両側の壁から均等な位置のれんがに穴を開けて、電極として直径100mm、長さ320mmの円柱状の黒鉛成型体を挿入した。
(Example 1)
Using high-alumina refractory bricks, a rectangular parallelepiped furnace body having internal dimensions of 1050 mm in width, 2530 mm in length, and 1020 mm in height was prepared. Then, holes are made in the bricks at equal positions from the walls on both sides of the short length 480 mm on the two sides of the furnace body in the long direction, and a columnar graphite molded body having a diameter of 100 mm and a length of 320 mm is used as an electrode. Was inserted.

炭素質原料としてカーボンブラック(灰分550ppm、かさ密度0.74×10kg/m)、無機珪酸質原料として非晶質シリカ(灰分670ppm、かさ密度0.53×10kg/m)を質量比4:6で混合し、灰分622ppm、かさ密度0.66×10kg/mの充填材を準備した。なお、原料のかさ密度は、炭素質原料については「JIS K 1474 活性炭試験方法 充填密度」に記される方法により、無機珪酸質原料については「JIS K 1150 シリカゲル試験方法 かさ密度」に記される方法により測定した。 Carbon black (ash content 550 ppm, bulk density 0.74 × 10 3 kg / m 3 ) as a carbonaceous raw material, and amorphous silica (ash content 670 ppm, bulk density 0.53 × 10 3 kg / m 3 ) as an inorganic siliceous raw material. Was mixed at a mass ratio of 4: 6 to prepare a filler having an ash content of 622 ppm and a bulk density of 0.66 × 10 3 kg / m 3 . The bulk density of the raw material is described in "JIS K 1474 Activated Carbon Test Method Filling Density" for carbonaceous raw materials and in "JIS K 1150 Silica Gel Test Method Bulk Density" for inorganic silicic acid raw materials. Measured by method.

また、灰分420ppm、かさ密度0.35×10kg/mの黒鉛粉末原料を準備した。ただし充填時の体積と重量から計算すると、充填時の黒鉛粉末原料のかさ密度は0.65×10kg/mである。なお、原料のかさ密度は、「JIS K 1474 活性炭試験方法 充填密度」に記される方法により測定した。 In addition, a graphite powder raw material having an ash content of 420 ppm and a bulk density of 0.35 × 10 3 kg / m 3 was prepared. However, when calculated from the volume and weight at the time of filling, the bulk density of the graphite powder raw material at the time of filling is 0.65 × 10 3 kg / m 3 . The bulk density of the raw material was measured by the method described in "JIS K 1474 Activated Carbon Test Method Filling Density".

炉本体内に、充填材1610kgと黒鉛粉末原料23.7kgを充填した。この時、黒鉛粉末原料は、両端の電極を結ぶよう、幅120mm、高さ120mm、長さ2530mmの直方体状に充填した。充填高さは960mmであった。充填材と黒鉛粉末原料の充填後、両端の電極を介して黒鉛粉末原料に通電を行った。 The furnace body was filled with 1610 kg of a filler and 23.7 kg of a graphite powder raw material. At this time, the graphite powder raw material was filled in a rectangular parallelepiped shape having a width of 120 mm, a height of 120 mm, and a length of 2530 mm so as to connect the electrodes at both ends. The filling height was 960 mm. After filling the filler and the graphite powder raw material, the graphite powder raw material was energized through the electrodes at both ends.

通電加熱により、2400℃で16時間の焼成を行った後、常温になるまで空冷し、炉本体から、ガラス質および炭化珪素結晶に内包された黒鉛粉末を取り出した。回収できた黒鉛粉末全体を十分混合した上でサンプリングし、後述の灰分の算出方法に沿って黒鉛粉末の灰分の測定を行った。同様に、8時間、24時間の焼成を行った際の黒鉛粉末の灰分も測定した。なお、8時間、24時間の焼成は実施例1、比較例1、3についてのみ行った。 After firing at 2400 ° C. for 16 hours by energization heating, the mixture was air-cooled to room temperature, and the graphite powder contained in the vitreous and silicon carbide crystals was taken out from the furnace body. The entire recovered graphite powder was sufficiently mixed before sampling, and the ash content of the graphite powder was measured according to the ash content calculation method described later. Similarly, the ash content of the graphite powder after firing for 8 hours and 24 hours was also measured. The firing for 8 hours and 24 hours was performed only for Example 1, Comparative Examples 1 and 3.

(実施例2)
黒鉛粉末原料の充填形状を、幅180mm、高さ180mm、長さ2530mmの直方体とし、その他の条件は実施例1と同様にして工程を行った。
(Example 2)
The filling shape of the graphite powder raw material was a rectangular parallelepiped having a width of 180 mm, a height of 180 mm, and a length of 2530 mm, and the other conditions were the same as in Example 1.

(実施例3)
黒鉛粉末原料の充填形状を、幅80mm、高さ80mm、長さ2530mmの直方体とし、その他の条件は実施例1と同様にして工程を行った。
(Example 3)
The filling shape of the graphite powder raw material was a rectangular parallelepiped having a width of 80 mm, a height of 80 mm, and a length of 2530 mm, and the other conditions were the same as in Example 1.

(実施例4)
無機珪酸質材料として、かさ密度1.40×10kg/m、灰分1070ppmのシリカゲルを使用し、その他の条件は実施例1と同様にして工程を行った。
(Example 4)
As the inorganic siliceous material, silica gel having a bulk density of 1.40 × 10 3 kg / m 3 and an ash content of 1070 ppm was used, and the other conditions were the same as in Example 1.

(実施例5)
無機珪酸質材料として、かさ密度0.38×10kg/m、灰分540ppmの非晶質シリカ粉末を使用し、その他の条件は実施例1と同様にして工程を行った。
(Example 5)
As the inorganic siliceous material, an amorphous silica powder having a bulk density of 0.38 × 10 3 kg / m 3 and an ash content of 540 ppm was used, and the other conditions were the same as in Example 1.

(実施例6)
実施例2の黒鉛粉末原料の形状と実施例4の無機珪酸質原料を採用し、その他の条件は実施例1と同様にして工程を行った。
(Example 6)
The shape of the graphite powder raw material of Example 2 and the inorganic silicic acid raw material of Example 4 were adopted, and the steps were carried out in the same manner as in Example 1 under other conditions.

(実施例7)
炭素質材料と無機珪酸質原料の混合比を5:5とし、その他の条件は実施例1と同様にして工程を行った。
(Example 7)
The mixing ratio of the carbonaceous material and the inorganic silicic acid raw material was 5: 5, and the other conditions were the same as in Example 1.

(実施例8)
炭素質材料と無機珪酸質原料の混合比を6:4とし、その他の条件は実施例1と同様にして工程を行った。
(Example 8)
The mixing ratio of the carbonaceous material and the inorganic silicic acid raw material was 6: 4, and the other conditions were the same as in Example 1.

(実施例9)
炉本体を、内寸で長さ2100mm、幅2530mm、高さ2040mm(充填高さ2000mm)で構成し、電極を底面からの高さ960mmに配置した。黒鉛粉末原料の充填形状を、幅240mm、高さ240mm、長さ2530mmの直方体とした。その他の条件は実施例1と同様にして工程を行った。
(Example 9)
The furnace body was configured with internal dimensions of 2100 mm in length, 2530 mm in width, and 2040 mm in height (filling height 2000 mm), and the electrodes were arranged at a height of 960 mm from the bottom surface. The filling shape of the graphite powder raw material was a rectangular parallelepiped having a width of 240 mm, a height of 240 mm, and a length of 2530 mm. The process was carried out in the same manner as in Example 1 under other conditions.

(実施例10)
炉本体を実施例9と同じ寸法で構成し、黒鉛粉末原料の充填形状を、幅360mm、高さ360mm、長さ2530mmの直方体とした。その他の条件は実施例1と同様にして工程を行った。
(Example 10)
The furnace body was configured with the same dimensions as in Example 9, and the filling shape of the graphite powder raw material was a rectangular parallelepiped having a width of 360 mm, a height of 360 mm, and a length of 2530 mm. The process was carried out in the same manner as in Example 1 under other conditions.

(比較例1)
黒鉛粉末原料の充填形状を、幅240mm、高さ240mm、長さ2530mmの直方体とした。その他の条件は実施例1と同様にして工程を行った。
(Comparative Example 1)
The filling shape of the graphite powder raw material was a rectangular parallelepiped having a width of 240 mm, a height of 240 mm, and a length of 2530 mm. The process was carried out in the same manner as in Example 1 under other conditions.

(比較例2)
黒鉛粉末原料の充填形状を、幅40mm、高さ40mm、長さ2530mmの直方体とした。その他の条件は実施例1と同様にして工程を行った。
(Comparative Example 2)
The filling shape of the graphite powder raw material was a rectangular parallelepiped having a width of 40 mm, a height of 40 mm, and a length of 2530 mm. The process was carried out in the same manner as in Example 1 under other conditions.

(比較例3)
無機珪酸質原料として、かさ密度1.66×10kg/m、灰分430ppmの珪砂を使用した。その他の条件は実施例1と同様にして工程を行った。
(Comparative Example 3)
As the inorganic siliceous raw material, silica sand having a bulk density of 1.66 × 10 3 kg / m 3 and an ash content of 430 ppm was used. The process was carried out in the same manner as in Example 1 under other conditions.

(比較例4)
無機珪酸質原料として、かさ密度0.16×10kg/m、灰分250ppmの非晶質シリカを使用した。その他の条件は実施例1と同様にして工程を行った。
(Comparative Example 4)
As the inorganic siliceous raw material, amorphous silica having a bulk density of 0.16 × 10 3 kg / m 3 and an ash content of 250 ppm was used. The process was carried out in the same manner as in Example 1 under other conditions.

(比較例5)
無機珪酸質材料として、かさ密度1.40×10kg/m、灰分1070ppmのシリカゲルを使用し、炭素質原料として、かさ密度0.91×10kg/m、灰分380ppmのカーボンブラックを使用した。その他の条件は実施例1と同様にして工程を行った。
(Comparative Example 5)
Silica gel with a bulk density of 1.40 × 10 3 kg / m 3 and an ash content of 1070 ppm is used as an inorganic siliceous material, and carbon black with a bulk density of 0.91 × 10 3 kg / m 3 and an ash content of 380 ppm is used as a carbonaceous raw material. It was used. The process was carried out in the same manner as in Example 1 under other conditions.

(比較例6)
炭素質材料と無機珪酸質原料の混合比を7:3とした。その他の条件は実施例1と同様にして工程を行った。
(Comparative Example 6)
The mixing ratio of the carbonaceous material and the inorganic silicic acid raw material was set to 7: 3. The process was carried out in the same manner as in Example 1 under other conditions.

(比較例7)
炉本体の寸法を実施例9と同じにし、黒鉛粉末原料の充填形状を、幅480mm、高さ480mm、長さ2530mmの直方体とした。その他の条件は実施例1と同様にして工程を行った。
(Comparative Example 7)
The dimensions of the furnace body were the same as in Example 9, and the filling shape of the graphite powder raw material was a rectangular parallelepiped having a width of 480 mm, a height of 480 mm, and a length of 2530 mm. The process was carried out in the same manner as in Example 1 under other conditions.

(比較例8)
炭素質原料として、かさ密度0.68×10kg/m、灰分4200ppmのカーボンブラックを使用した。その他の条件は実施例1と同様にして工程を行った。
(Comparative Example 8)
As a carbonaceous raw material, carbon black having a bulk density of 0.68 × 10 3 kg / m 3 and an ash content of 4200 ppm was used. The process was carried out in the same manner as in Example 1 under other conditions.

(灰分の算出方法)
黒鉛粉末および充填材中の炭素質原料の灰分は、「JIS M 8511 天然黒鉛の工業分析及び試験方法」に記載される灰分の分析方法に準じて分析できる。非晶質の炭素質原料、例えばカーボンブラックを使用する場合も同様の分析方法を用いる。
(Calculation method of ash content)
The ash content of the carbonaceous raw material in the graphite powder and the filler can be analyzed according to the ash content analysis method described in "JIS M 8511 Industrial Analysis and Test Method of Natural Graphite". The same analysis method is used when an amorphous carbonaceous raw material such as carbon black is used.

無機珪酸質原料の灰分は、「JIS R 2212-2:2006 耐火物製品の化学分析方法-第2部:けい石質耐火物」に記載されるけい砂の分析方法を用いることができる。すなわち、酸化アルミニウム、酸化鉄(III)、酸化チタン(IV)、酸化マンガン(II)、酸化カルシウム、酸化マグネシウム、酸化りん(V)、酸化ほう素(III)を定量(質量分率として算出)し、その和を算出する。非晶質の無機珪酸質原料、例えば非晶質シリカを使用する場合も同様の分析方法を用いる。充填材全体の灰分は、充填材を構成する各原料について灰分の測定を行い、混合比率に応じて加重平均をとることで算出できる。 For the ash content of the inorganic silicic acid raw material, the method for analyzing silica sand described in "JIS R 2212-2: 2006 Chemical Analysis Method for Refractory Products-Part 2: Silica Stone Refractory" can be used. That is, aluminum oxide, iron oxide (III), titanium oxide (IV), manganese oxide (II), calcium oxide, magnesium oxide, phosphorus oxide (V), and boron oxide (III) are quantified (calculated as mass fraction). And calculate the sum. The same analysis method is used when an amorphous inorganic siliceous raw material such as amorphous silica is used. The ash content of the entire filler can be calculated by measuring the ash content of each raw material constituting the filler and taking a weighted average according to the mixing ratio.

[実施例、比較例の実験結果]
(16時間焼成後の灰分量)
図2は、各実施例、比較例の実験条件および16時間焼成後の灰分の測定結果を示す表である。実施例1~10ではいずれの例も灰分が50ppmを下回った。比較例1~8はいずれも灰分が50ppmを大きく上回った。
[Experimental results of Examples and Comparative Examples]
(Amount of ash after firing for 16 hours)
FIG. 2 is a table showing the experimental conditions of each Example and Comparative Example and the measurement results of the ash content after firing for 16 hours. In Examples 1 to 10, the ash content was less than 50 ppm in each of the examples. In Comparative Examples 1 to 8, the ash content greatly exceeded 50 ppm.

なお、比較例2、4は、通電中に急激な抵抗値の上昇が見られ、電力が印加できなくなった。比較例2は、通電開始から1時間後、比較例4は通電開始から3時間後に電力が印加できなくなった。これは、黒鉛粉末原料が断線したためと考えられ、処理対象の黒鉛粉末原料の柱が細すぎたり、充填材のかさ密度が小さすぎたりすると黒鉛粉末原料の柱が崩れやすいことを示している。 In Comparative Examples 2 and 4, a rapid increase in the resistance value was observed during energization, and electric power could not be applied. In Comparative Example 2, power could not be applied 1 hour after the start of energization, and in Comparative Example 4 3 hours after the start of energization. This is considered to be due to the disconnection of the graphite powder raw material, and indicates that the columns of the graphite powder raw material are likely to collapse if the columns of the graphite powder raw material to be treated are too thin or the bulk density of the filler is too small.

比較例1、3、5、7で灰分が低減しなかった理由は、SiOガスが処理対象の黒鉛粉末原料まで浸透しなかったためと考えられる。また、比較例6で灰分が低減しなかった理由は、炭素質原料が過多でSiOガスの発生量が少なかった(あるいはすぐに炭化珪素に変化してしまった)ためと考えられる。比較例8は、カーボンブラックの純度が低く、カーボンブラック中の不純物の一部が黒鉛粉末原料中に拡散したため黒鉛粉末原料の灰分も相対的に高くなったと考えられる。 The reason why the ash content was not reduced in Comparative Examples 1, 3, 5, and 7 is considered to be that the SiO gas did not permeate into the graphite powder raw material to be treated. Further, it is considered that the reason why the ash content was not reduced in Comparative Example 6 is that the carbonaceous raw material was excessive and the amount of SiO gas generated was small (or immediately changed to silicon carbide). In Comparative Example 8, it is considered that the purity of the carbon black was low and the ash content of the graphite powder raw material was relatively high because some of the impurities in the carbon black were diffused into the graphite powder raw material.

なお、炭素質材料と無機珪酸質原料の混合比を3:7とした実験は、実施していない。この実験を行うと、珪酸質原料の還元が進まず、SiOガス発生量が減るとともに、炭化珪素が生成しないことによって焼成後に充填材と黒鉛粉末の分離が困難になることが予測されたためである。 No experiment was conducted in which the mixing ratio of the carbonaceous material and the inorganic silicic acid raw material was 3: 7. This is because it was predicted that when this experiment was performed, the reduction of the siliceous raw material did not proceed, the amount of SiO gas generated decreased, and it became difficult to separate the filler and the graphite powder after firing due to the absence of silicon carbide. ..

(焼成時間と灰分量の関係)
実施例1、比較例1、3について焼成時間に応じて黒鉛粉末の灰分量を確認した。図3は、焼成時間と灰分量の関係を示すグラフである。いずれも焼成16時間後でほぼ値が一定になった。これは、充填材の反応が進んでSiCの生成が盛んになったため、SiOの黒鉛粉末原料への供給が行われなくなったためと考えられる。黒鉛粉末原料の量が多い比較例1や、充填材のかさ密度が大きい比較例3では、黒鉛粉末原料に対してSiOガスの供給が十分に行われないまま反応が終了している。
(Relationship between firing time and ash content)
For Example 1, Comparative Examples 1 and 3, the amount of ash in the graphite powder was confirmed according to the firing time. FIG. 3 is a graph showing the relationship between the firing time and the amount of ash. In each case, the values became almost constant 16 hours after firing. It is considered that this is because the reaction of the filler progressed and the production of SiC became active, so that the SiO was not supplied to the graphite powder raw material. In Comparative Example 1 in which the amount of the graphite powder raw material is large and Comparative Example 3 in which the bulk density of the filler is large, the reaction is completed without sufficiently supplying SiO gas to the graphite powder raw material.

以上から、黒鉛粉末原料を、炭素質および無機珪酸質からなる充填材中に埋設する際に、充填材のかさ密度、黒鉛粉末原料と充填材のサイズ比を適切な範囲にして通電させることで、黒鉛粉末を十分に高純度化できることが実証された。 From the above, when the graphite powder raw material is embedded in the filler composed of carbonaceous and inorganic silicic acid, the bulk density of the filler and the size ratio between the graphite powder raw material and the filler are set to an appropriate range and energized. , It was demonstrated that the graphite powder can be sufficiently purified.

10 炉
11 炉本体
15a、15b 電極
20 充填材
30 黒鉛粉末原料
10 Reactor 11 Reactor body 15a, 15b Electrode 20 Filler 30 Graphite powder raw material

Claims (1)

鉛直上端面が大気開放され、内壁面に電極を有する炉を用いた黒鉛粉末の製造方法であって、
無機珪酸質粒子および炭素質粒子が混合された充填材の内部に埋設され、炉内の電極間を接続する黒鉛粉末原料を配置する工程と、
前記黒鉛粉末原料を通電加熱する工程と、を含み、
前記充填材のかさ密度は、0.50×10kg/m以上1.2×10kg/m以下であり、
前記黒鉛粉末原料は、前記炉の電極が設置されていない内壁面および鉛直上端面のいずれに対しても、前記黒鉛粉末原料の代表太さの2倍以上10倍以下の間隔を空けて前記充填材の内部に埋設され、
前記黒鉛粉末原料の代表太さは、50mm以上500mm以下の範囲であり、
前記充填材のSiを除いた灰分は、前記充填材に対して重量分率で1000ppm以下であり、
前記充填材に含まれる炭素質粒子の重量分率は、前記炭素質粒子および無機珪酸質粒子の合計重量に対して30wt%以上60wt%以下であることを特徴とする黒鉛粉末の製造方法。
A method for producing graphite powder using a furnace in which the vertical upper end surface is open to the atmosphere and an electrode is provided on the inner wall surface.
A process of arranging a graphite powder raw material that is embedded inside a filler in which inorganic silicic acid particles and carbonaceous particles are mixed and connects the electrodes in the furnace, and
Including the step of energizing and heating the graphite powder raw material.
The bulk density of the filler is 0.50 × 10 3 kg / m 3 or more and 1.2 × 10 3 kg / m 3 or less .
The graphite powder raw material is filled in the inner wall surface and the vertical upper end surface where the electrodes of the furnace are not installed at intervals of 2 times or more and 10 times or less the typical thickness of the graphite powder raw material. Buried inside the material,
The representative thickness of the graphite powder raw material is in the range of 50 mm or more and 500 mm or less.
The ash content of the filler excluding Si is 1000 ppm or less by weight with respect to the filler.
A method for producing graphite powder , wherein the weight fraction of the carbonic particles contained in the filler is 30 wt% or more and 60 wt% or less with respect to the total weight of the carbonic particles and the inorganic silicic acid particles .
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