JP7008466B2 - UV irradiation device and UV irradiation method - Google Patents

Description

The present invention relates to an ultraviolet irradiation device and an ultraviolet irradiation method.

Fine patterns such as wiring patterns and electrode patterns are formed on a glass substrate constituting a display panel such as a liquid crystal display. For example, such a pattern is formed by a method such as a photolithography method. The photolithography method includes a step of applying a resist material to a substrate, a step of exposing a film formed of the resist material (hereinafter referred to as "resist film") after coating, and a step of developing the resist film after exposure. For example, Patent Documents 1 to 4 disclose a technique for performing an exposure process on an outer peripheral portion of a resist film on a substrate. For example, an exposure apparatus that scans the outer peripheral portion of the substrate is used for the exposure process.
For example, as the substrate, a large glass substrate of G8 size or larger is used. Here, the G8 size means a substrate size of 2160 mm × 2460 mm.

Japanese Unexamined Patent Publication No. 2017-92306 Japanese Unexamined Patent Publication No. 2008-648860 Japanese Unexamined Patent Publication No. 2005-93951 Japanese Unexamined Patent Publication No. 2006-278389

By the way, when a resist material is applied to a substrate, if the resist film is transported or made to stand by in a state where the resist film is not sufficiently dried, the resist material may drip from the edge of the substrate or may be on the back surface from the edge of the substrate. It may wrap around. In particular, when a large glass substrate is used or when the substrate is moved immediately after coating, this phenomenon is likely to occur.
In addition, in the case of an exposure apparatus that scans the outer peripheral portion of the substrate, the larger the substrate, the longer the exposure time.

In view of the above circumstances, it is an object of the present invention to provide an ultraviolet irradiation device and an ultraviolet irradiation method capable of suppressing dripping of a resist material from a substrate and shortening the tact time. do.

The ultraviolet irradiation device according to one aspect of the present invention includes an irradiation unit including an ultraviolet LED element capable of irradiating a substrate with ultraviolet rays, a moving unit capable of relatively moving between the substrate and the irradiation unit, and the substrate and the above. It includes a detection unit capable of detecting a relative position with the irradiation unit, and a control unit that controls the irradiation unit so that the outer peripheral portion of the substrate is irradiated with the ultraviolet rays based on the detection result of the detection unit. It is characterized by that.

According to this configuration, since the outer peripheral portion of the substrate is irradiated with ultraviolet rays, the outer peripheral portion of the resist material applied to the substrate can be cured by the ultraviolet rays. In addition, it is possible to irradiate the outer peripheral portion of the substrate with ultraviolet rays while relatively moving the substrate and the irradiation portion. Therefore, it is possible to suppress dripping of the resist material from the substrate and shorten the tact time.
In addition, by curing the outer peripheral portion of the resist material coated on the substrate with ultraviolet rays, even when a large substrate is used or the substrate is moved after coating, the resist material drips from the substrate. Can be suppressed.
In addition, by additionally exposing only the outer peripheral portion of the substrate, it can be used for applications such as removal of resist residue on the outer peripheral portion (normal peripheral exposure application). In addition, the tact time can be shortened by exposing a large substrate while moving.
By the way, when irradiating the substrate with ultraviolet rays, it is conceivable to use a metal halide lamp or a mercury lamp. However, in the case of a metal halide lamp or a mercury lamp, it may take several tens of minutes for the lamp to stabilize after lighting, and the life of the lamp is short, so that it may not be possible to continuously turn on and off the lamp.
On the other hand, when the outer peripheral portion of the substrate is irradiated with ultraviolet rays using a metal halide lamp or a mercury lamp, it is conceivable to maintain the lighting state of the lamp. However, maintaining the lighting state of the lamp is not preferable in order to secure the life.
On the other hand, according to this configuration, by including the ultraviolet LED element, it is possible to stabilize the lamp immediately after lighting and prolong the life as compared with the case where the metal halide lamp or the mercury lamp is used. It can be turned on and off instantly and continuously. In addition, by controlling the irradiation unit based on the detection result of the detection unit, it is possible to control the lighting and extinguishing of the ultraviolet LED element in consideration of the relative position between the substrate and the irradiation unit. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate with ultraviolet rays with energy saving.

In the above-mentioned ultraviolet irradiation device, the moving part may be able to convey the substrate.
According to this configuration, the substrate can be transported while the irradiation unit is in a fixed position, so that an extra drive system for moving the irradiation unit is not required and the relative movement between the substrate and the irradiation unit is simple. Can be done.

In the ultraviolet irradiation device, the irradiation units are arranged along the relative movement direction between the substrate and the irradiation unit, and a plurality of the ultraviolet LED elements arranged along the direction orthogonal to the relative movement direction. May include.
According to this configuration, it is possible to selectively control the lighting and extinguishing of a plurality of ultraviolet LED elements arranged along the relative moving direction and the direction orthogonal to the relative moving direction. Therefore, as compared with the case where the lighting state of the plurality of ultraviolet LED elements is maintained, the ultraviolet irradiation to the outer peripheral portion of the substrate can be efficiently performed with energy saving. For example, by performing the relative movement between the substrate and the irradiation unit only once (passing the substrate under the irradiation unit only once), all the edges of the substrate can be exposed at one time, which is efficient. It is a target.

In the above-mentioned ultraviolet irradiation device, the irradiation region of the irradiation unit may be larger than the length of the moving portion in the direction orthogonal to the relative moving direction between the substrate and the irradiation unit.
By the way, if the irradiation region of the irradiation portion is smaller than the length of the moving portion in the direction orthogonal to the relative moving direction between the substrate and the irradiation portion, the relative between the substrate and the irradiation portion when irradiating the outer peripheral portion of the substrate with ultraviolet rays. You need to move multiple times. On the other hand, according to this configuration, the irradiation region of the irradiation portion is larger than the length of the moving portion in the direction orthogonal to the relative moving direction between the substrate and the irradiation portion, so that the outer peripheral portion of the substrate is irradiated with ultraviolet rays. It is sufficient to perform the relative movement between the substrate and the irradiation unit once. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate with ultraviolet rays with further energy saving.

In the above-mentioned ultraviolet irradiation device, the irradiation unit may include a first irradiation unit and a second irradiation unit that are adjacent to each other in the relative moving direction between the substrate and the irradiation unit.
According to this configuration, it is possible to control the lighting and extinguishing of the ultraviolet LED element for each of the first irradiation unit and the second irradiation unit. Therefore, as compared with the case where the lighting and extinguishing of the ultraviolet LED element are controlled for the entire irradiation unit, the ultraviolet irradiation to the outer peripheral portion of the substrate can be efficiently performed with energy saving.

In the above-mentioned ultraviolet irradiation device, the irradiation region of the irradiation unit may have an I-shape extending in a direction orthogonal to the relative moving direction between the substrate and the irradiation unit.
By the way, when the irradiation region of the irradiation portion has only a straight portion extending in a direction orthogonal to the relative movement direction between the substrate and the irradiation portion, ultraviolet rays are emitted at the end portion in the direction orthogonal to the relative movement direction between the substrate and the irradiation portion. It may not be possible to secure a sufficient installation area for the LED element.
According to this configuration, the irradiation region of the irradiation unit has an I-shape extending in a direction orthogonal to the relative movement direction between the substrate and the irradiation unit, so that the irradiation region is orthogonal to the relative movement direction between the substrate and the irradiation unit. It is possible to secure an installation area of the ultraviolet LED element in the relative moving direction between the substrate and the irradiation portion at both ends in the direction of the UV LED. Therefore, compared to the case where the irradiation region of the irradiation portion has only a straight portion extending in a direction orthogonal to the relative movement direction between the substrate and the irradiation portion, ultraviolet irradiation to the outer peripheral portion of the substrate is performed efficiently with energy saving. be able to.

In the ultraviolet irradiation device, the moving unit includes a plurality of rollers arranged with a gap in the relative moving direction between the substrate and the irradiation unit, and the detecting unit is between two adjacent rollers. It may be arranged in the said gap of.
According to this configuration, it is possible to reduce the size of the ultraviolet irradiation device as compared with the case where the detection unit is arranged outside the roller in the direction orthogonal to the relative moving direction between the substrate and the irradiation unit.

In the above-mentioned ultraviolet irradiation device, the detection unit may include a first sensor and a second sensor arranged at intervals in the relative moving direction between the substrate and the irradiation unit.
According to this configuration, the relative moving speed in the relative moving direction between the substrate and the irradiation unit can be obtained based on the detection results of the first sensor and the second sensor.

In the ultraviolet irradiation device, the control unit is a substrate that lights the irradiation unit as a whole when the tip end portion of the substrate in the relative moving direction between the substrate and the irradiation unit overlaps the irradiation region of the irradiation unit. After the tip irradiation control and the substrate tip irradiation control, when the tip portion of the substrate deviates from the irradiation region and both ends of the substrate overlap the irradiation region in the direction orthogonal to the relative movement direction, the irradiation unit. Of the substrate, both ends of the substrate are turned off, and the portion of the irradiated portion that overlaps with both ends of the substrate is turned on, and the irradiation control of both ends of the substrate is followed by the irradiation in the relative moving direction. When the rear end portion of the substrate overlaps the irradiation region, the rear end portion of the substrate is removed from the irradiation region after the substrate rear end irradiation control for lighting the irradiation portion as a whole and the substrate rear end irradiation control. If this is the case, the extinguishing control may be performed to turn off the irradiation unit as a whole.
According to this configuration, the lighting and extinguishing of the irradiation unit are controlled in consideration of the relative positions between the substrate and the irradiation unit for each of the substrate tip irradiation control, the substrate both ends irradiation control, the substrate rear end irradiation control, and the extinguishing control. be able to. Therefore, compared with the case where the irradiation control of the substrate is performed collectively, it is possible to efficiently irradiate the outer peripheral portion of the substrate with ultraviolet rays with energy saving.

The ultraviolet irradiation device further includes an integrated light amount measuring unit capable of measuring the integrated light amount of ultraviolet rays from the irradiation unit, and the control unit includes the irradiation unit and the irradiation unit based on the measurement result of the integrated light amount measuring unit. At least one of the moving parts may be controlled.
According to this configuration, it is possible to control the lighting and extinguishing of the ultraviolet LED element by adding the integrated amount of ultraviolet rays from the irradiation unit, and to control the relative movement between the substrate and the irradiation unit. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate with ultraviolet rays with energy saving.

The ultraviolet irradiation device further includes a surface height detection unit capable of detecting the height of the surface of the substrate, and the control unit includes the irradiation unit and the irradiation unit based on the detection result of the surface height detection unit. At least one of the moving parts may be controlled.
According to this configuration, it is possible to control the lighting and extinguishing of the ultraviolet LED element in consideration of the height of the surface of the substrate, and to control the relative movement between the substrate and the irradiation unit. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate with ultraviolet rays with energy saving.

The ultraviolet irradiation method according to one aspect of the present invention includes an irradiation unit including an ultraviolet LED element capable of irradiating a substrate with ultraviolet rays, a moving unit capable of relatively moving between the substrate and the irradiation unit, and the substrate and the above. An ultraviolet irradiation method using a detection unit that can detect the relative position with the irradiation unit, that is, an irradiation step of irradiating the substrate with ultraviolet rays and a moving step of relatively moving the substrate and the irradiation unit. And control to control the irradiation unit so that the outer peripheral portion of the substrate is irradiated with the ultraviolet rays based on the detection step of detecting the relative position between the substrate and the irradiation unit and the detection result of the detection unit. It is characterized by including a process.

According to this method, since the outer peripheral portion of the substrate is irradiated with ultraviolet rays, the outer peripheral portion of the resist material applied to the substrate can be cured by the ultraviolet rays. In addition, it is possible to irradiate the outer peripheral portion of the substrate with ultraviolet rays while relatively moving the substrate and the irradiation portion. Therefore, it is possible to suppress dripping of the resist material from the substrate and shorten the tact time.
In addition, by curing the outer peripheral portion of the resist material coated on the substrate with ultraviolet rays, even when a large substrate is used or the substrate is moved after coating, the resist material drips from the substrate. Can be suppressed.
In addition, by additionally exposing only the outer peripheral portion of the substrate, it can be used for applications such as removal of resist residue on the outer peripheral portion (normal peripheral exposure application). In addition, the tact time can be shortened by exposing a large substrate while moving.
In addition, by including an ultraviolet LED element, it is possible to stabilize the lamp immediately after lighting and prolong the life of the lamp as compared with the case of using a metal halide lamp or a mercury lamp, so that the lamp can be turned on and off instantly continuously. Can be done. In addition, by controlling the irradiation unit based on the detection result of the detection unit, it is possible to control the lighting and extinguishing of the ultraviolet LED element in consideration of the relative position between the substrate and the irradiation unit. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate with ultraviolet rays with energy saving.

In the above-mentioned ultraviolet irradiation method, the substrate may be conveyed in the moving step.
According to this method, the substrate can be transported while the irradiation unit is in a fixed position, so that an extra step for moving the irradiation unit is not required and the relative movement between the substrate and the irradiation unit is simplified. It can be carried out.

In the above-mentioned ultraviolet irradiation method, in the control step, when the tip end portion of the substrate in the relative movement direction between the substrate and the irradiation portion overlaps with the irradiation region of the irradiation portion, the substrate that lights the irradiation portion as a whole. When the tip of the substrate deviates from the irradiation region and both ends of the substrate overlap the irradiation region in a direction orthogonal to the relative movement direction after the tip irradiation control step and the substrate tip irradiation control step. After the substrate both-end irradiation control step of turning off the portion of the irradiation unit that is separated from both ends of the substrate and turning on the portion of the irradiation portion that overlaps with both ends of the substrate, and the substrate both-end irradiation control step, the relative When the rear end portion of the substrate in the moving direction overlaps the irradiation region, the rear end portion of the substrate is after the substrate rear end irradiation control step of lighting the irradiation portion as a whole and the substrate rear end irradiation control step. May include a turn-off control step of turning off the irradiation unit as a whole when the irradiation portion is out of the irradiation region.
According to this method, the irradiation unit is turned on and off in consideration of the relative positions between the substrate and the irradiation unit in each of the substrate tip irradiation control step, the substrate both ends irradiation control step, the substrate rear end irradiation control step, and the extinguishing control step. It is possible to control the extinguishing. Therefore, compared with the case where the irradiation control of the substrate is performed collectively, it is possible to efficiently irradiate the outer peripheral portion of the substrate with ultraviolet rays with energy saving.

The ultraviolet irradiation method further includes an integrated light amount measuring step of measuring the integrated light amount of ultraviolet rays from the irradiation unit, and in the control step, the irradiation unit and the moving unit are based on the measurement result of the integrated light amount. At least one may be controlled.
According to this method, it is possible to control the lighting and extinguishing of the ultraviolet LED element by adding the integrated amount of ultraviolet rays from the irradiation unit, and to control the relative movement between the substrate and the irradiation unit. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate with ultraviolet rays with energy saving.

The ultraviolet irradiation method further includes a surface height detection step of detecting the height of the surface of the substrate, and in the control step, the irradiation unit and the irradiation unit are based on the detection result of the height of the surface of the substrate. At least one of the moving parts may be controlled.
According to this method, it is possible to control the lighting and extinguishing of the ultraviolet LED element in consideration of the height of the surface of the substrate, and to control the relative movement between the substrate and the irradiation unit. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate with ultraviolet rays with energy saving.

According to the present invention, it is possible to provide an ultraviolet irradiation device and an ultraviolet irradiation method capable of suppressing dripping of a resist material from a substrate and shortening the tact time.

Top view of the pattern forming apparatus according to the embodiment. The top view of the ultraviolet irradiation apparatus which concerns on embodiment. The side view of the ultraviolet irradiation apparatus which concerns on embodiment. The front view of the ultraviolet irradiation apparatus which concerns on embodiment. The bottom view of the irradiation part which concerns on embodiment. The bottom view of the irradiation unit which concerns on embodiment. The operation explanatory drawing of the ultraviolet irradiation apparatus which concerns on embodiment. FIG. 7A is an operation explanatory view of the substrate tip irradiation control. FIG. 7B is an operation explanatory view of the irradiation control at both ends of the substrate. FIG. 7C is an operation explanatory view of the substrate rear end irradiation control. FIG. 7D is an operation explanatory diagram of the extinguishing control.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, an XYZ Cartesian coordinate system will be set, and the positional relationship of each member will be described with reference to this XYZ Cartesian coordinate system. A predetermined direction in the horizontal plane is the X direction, a direction orthogonal to the X direction in the horizontal plane is the Y direction, and a direction orthogonal to each of the X direction and the Y direction (that is, the vertical direction) is the Z direction.

<Pattern forming device>
FIG. 1 is a top view showing a pattern forming apparatus 1 according to the present embodiment.
As shown in FIG. 1, the pattern forming apparatus 1 includes a cassette loading / unloading unit 2, a coating / developing processing unit 3, and a system control unit 4. The system control unit 4 comprehensively controls the components of the pattern forming apparatus 1.

<Cassette loading / unloading section>
The cassette loading / unloading unit 2 carries in / out the cassette 5. For example, the cassette 5 contains a plurality of substrates 6. For example, as the substrate 6, a rectangular glass substrate having a G8 size is used. The cassette loading / unloading section 2 includes a cassette standby section 7 and a substrate transport mechanism 8.

The cassette standby unit 7 is arranged at the first end portion (end portion on the −X direction side) of the pattern forming apparatus 1. A plurality of cassettes 5 are arranged in the Y direction in the cassette standby unit 7. For example, the cassette standby unit 7 is provided with an opening (not shown) for transferring the cassette 5 to and from the outside of the pattern forming apparatus 1.

The substrate transfer mechanism 8 is adjacent to the + X direction side of the cassette standby unit 7. The substrate transfer mechanism 8 transfers the substrate 6 between the cassette 5 and the coating and developing processing unit 3. Two substrate transport mechanisms 8 are arranged at intervals in the Y direction.

Hereinafter, the substrate transfer mechanism 8a arranged on the −Y direction side is also referred to as a “first transfer mechanism 8a”, and the substrate transfer mechanism 8b arranged on the + Y direction side is also referred to as a “second transfer mechanism 8b”.
The first transport mechanism 8a transports the substrate 6 from the cassette loading / unloading section 2 to the coating / developing processing section 3.
The second transport mechanism 8b transports the substrate 6 from the coating / developing processing unit 3 to the cassette loading / unloading unit 2.

The substrate transfer mechanism 8 includes a transfer arm 9 that can be expanded and contracted in one direction. For example, the transfer arm 9 is provided with a holding portion capable of holding the substrate 6.
The transfer arm 9 can move in the rotation direction around the Z axis. As a result, the transport arm 9 can be directed toward the cassette standby unit 7 or the coating / developing processing unit 3. The transfer arm 9 is made accessible to the cassette standby unit 7 or the coating and developing processing unit 3 by the expansion / contraction operation.

<Applying and developing processing unit>
The coating and developing processing unit 3 performs a series of processing including resist coating and development on the substrate 6. The coating and developing processing unit 3 includes a cleaning unit 10, a coating unit 11, a first light irradiation unit 12, a prebaking unit 13, an exposure device 14, a developing unit 15, a second light irradiation unit 16, and a post-baking unit 17.

The coating and developing processing unit 3 has a structure divided in the Y direction. In the portion on the −Y side of the coating and developing processing unit 3, the substrate 6 from the cassette loading / unloading unit 2 (first transport mechanism 8a) is transported toward the exposure device 14 in the + X direction. In the portion on the + Y side of the coating and developing processing unit 3, the substrate 6 from the exposure apparatus 14 is transported in the −X direction toward the cassette loading / unloading section 2 (second transport mechanism 8b). Hereinafter, in the transport direction of the substrate 6, the side of the first transport mechanism 8a is also referred to as “upstream side”, and the side of the second transport mechanism 8b is also referred to as “downstream side”.

The cleaning unit 10 is arranged on the downstream side (+ X direction side) of the first transport mechanism 8a. The cleaning unit 10 cleans the substrate 6.

The coating unit 11 is arranged on the downstream side (+ X direction side) of the cleaning unit 10. The coating unit 11 forms a resist film on the substrate 6. The coating unit 11 includes a coating device 11a for coating a resist material on the substrate 6.

For example, as the coating device 11a, a rotary coating device, a non-spin coating device, a slit nozzle coating device, or the like is used. For example, the coating device 11a may be configured such that a rotary coating device, a non-spin coating device, and a slit nozzle coating device are interchangeable.

The first light irradiation unit 12 is arranged on the downstream side (+ X direction side) of the coating unit 11. The first light irradiation unit 12 irradiates the substrate 6 with light. The first light irradiation unit 12 irradiates the resist material coated on the substrate 6 with light. The first light irradiation unit 12 cures the outer peripheral portion of the resist material coated on the substrate 6 by irradiating the outer peripheral portion of the substrate 6 with light, and suppresses the resist material from dripping to the outside of the substrate. ..

The pre-bake unit 13 is arranged on the downstream side (+ X direction side) of the first light irradiation unit 12. The pre-baking unit 13 performs a pre-baking process on the substrate 6. The prebake unit 13 includes a heating device 13a capable of heating the substrate 6 and a cooling device 13b capable of cooling the substrate 6.

The portion of the exposure apparatus 14 on the −Y direction side is arranged on the downstream side (+ X direction side) of the prebake unit 13. The exposure apparatus 14 exposes the resist film formed on the substrate 6.

The developing unit 15 is arranged on the downstream side (−X direction side) of the portion of the exposure apparatus 14 on the + Y direction side. The developing unit 15 includes a developing device 15a for developing a substrate 6 after exposure. The developing apparatus 15a forms a resist film (pre-pattern) patterned in a predetermined shape on the substrate 6 by a developing process.

The second light irradiation unit 16 is arranged on the downstream side (-X direction side) of the developing unit 15. The second light irradiation unit 16 irradiates the developed substrate 6 with light. The second light irradiation unit 16 irradiates the pre-pattern formed on the substrate 6 with light. The second light irradiation unit 16 performs a bleaching treatment for improving the visible light transmission of the pre-pattern and a curing treatment for improving the heat resistance by curing the pre-pattern.

The post-bake unit 17 is arranged on the downstream side (-X direction side) of the second light irradiation unit 16. The post-bake unit 17 heats (bake) the substrate 6 after the light treatment.

<First light irradiation unit>
The first light irradiation unit 12 includes an ultraviolet irradiation device 18 and a substrate transfer mechanism 19.
The substrate transfer mechanism 19 transfers the substrate 6 between the ultraviolet irradiation device 18 and the coating unit 11 and between the ultraviolet irradiation device 18 and the prebake unit 13. For example, the substrate transfer mechanism 19 in the first light irradiation unit 12 has the same configuration as the substrate transfer mechanism 8 in the cassette loading / unloading section 2.

<Ultraviolet irradiation device>
FIG. 2 is a top view of the ultraviolet irradiation device 18. FIG. 3 is a side view of the ultraviolet irradiation device 18. FIG. 4 is a front view of the ultraviolet irradiation device 18.
As shown in FIG. 2, the ultraviolet irradiation device 18 includes an irradiation unit 20, a portal frame 25, a transport mechanism 30 (moving unit), a relative position detection unit 40 (detection unit), an integrated light amount measurement unit 41, and a surface height detection. A unit 42 and a control unit 45 are provided.

<Transport mechanism>
The transport mechanism 30 can transport the substrate 6. The transport mechanism 30 transports the substrate 6 in a state where the irradiation unit 20 is in a fixed position, so that the substrate 6 and the irradiation unit 20 are relatively moved. Hereinafter, the transport direction of the substrate 6 in the horizontal plane (the relative moving direction between the substrate 6 and the irradiation unit 20) is referred to as “first direction V1”, and the direction orthogonal to the first direction V1 in the horizontal plane is referred to as “second direction V2”. say.

The transport mechanism 30 can move the substrate 6 in the first direction V1. The transport mechanism 30 includes a plurality of rollers 31 and a support mechanism 32. The transport mechanism 30 is a roller conveyor in which a plurality of rollers 31 are arranged with a gap of 31h. The transport mechanism 30 mounts the substrate 6 on a plurality of rollers 31 and transports the substrate 6.

The plurality of rollers 31 are arranged with a gap 31h in the first direction V1. The roller 31 forms a columnar shape extending in the second direction V2. The plurality of rollers 31 are a driving roller 31a and a driven roller 31b. For example, only one drive roller 31a is provided. For example, a plurality of driven rollers 31b are provided. The drive roller 31a is rotated by the drive of the motor 34. The driven roller 31b rotates in accordance with the rotation of the driving roller 31a.

The support mechanism 32 rotatably supports the roller 31. The support mechanism 32 includes a pair of support walls 33, a motor 34, and a power transmission mechanism (not shown).

The pair of support walls 33 extend in the first direction V1. The pair of support walls 33 are arranged at intervals in the second direction V2. The pair of support walls 33 rotatably support both ends of the roller 31. The pair of support walls 33 are a first support wall 33a and a second support wall 33b. That is, the roller conveyor has a double-sided structure.

The motor 34 can rotate the drive roller 31a. For example, the motor 34 is built in the first support wall 33a.
The power transmission mechanism (not shown) transmits the rotational power of the drive roller 31a to the plurality of driven rollers 31b. For example, the power transmission mechanism is built in the first support wall 33a.

<Irradiated part>
FIG. 5 is a bottom view of the irradiation unit 20.
As shown in FIG. 5, the irradiation unit 20 includes a plurality of irradiation units 21. The irradiation unit 20 includes a first irradiation unit 21a and a second irradiation unit 21b adjacent to the first direction V1. Hereinafter, each of the first irradiation unit 21a and the second irradiation unit 21b is also simply referred to as "irradiation unit 21".
The plurality of irradiation units 21 are arranged along each of the first direction V1 and the second direction V2. In the embodiment, the irradiation unit 21 includes a plurality of ultraviolet LED elements 22 (see FIG. 6) capable of irradiating the substrate 6 with ultraviolet rays such as i-rays.
Here, "ultraviolet rays" means light having a lower limit of the wavelength range of about 1 nm and an upper limit of visible light at the short wavelength end. In the embodiment, the wavelength band of the ultraviolet LED element 22 is set to about 365 nm.

FIG. 6 is a bottom view of the irradiation unit 21.
As shown in FIG. 6, the irradiation unit 21 includes a plurality of ultraviolet LED elements 22 arranged in a grid pattern. The plurality of ultraviolet LED elements 22 are mounted on a rectangular support base 23.

The plurality of ultraviolet LED elements 22 are arranged along the first direction V1 and the second direction V2, respectively. In the embodiment, one irradiation unit 21 includes 36 ultraviolet LED elements 22 arranged in 6 rows and 6 columns. The 36 ultraviolet LED elements 22 are arranged at equal intervals in each of the first direction V1 and the second direction V2.

As shown in FIG. 2, the irradiation region 24 of the irradiation unit 20 is larger than the length L2 of the transfer mechanism 30 (the portion that conveys the substrate 6) in the second direction V2.
Here, the "irradiation region 24" is a region including the ultraviolet LED elements 22 located at both ends of the second direction V2 among the plurality of ultraviolet LED elements 22 arranged along the second direction V2 in the top view. be. The length L1 of the irradiation region 24 in the second direction V2 corresponds to the arrangement interval of the ultraviolet LED elements 22 located at both ends of the second direction V2 in the top view.
The length L2 of the transport mechanism 30 in the second direction V2 is the length of the roller 31 in the extending direction. The length L2 of the transport mechanism 30 in the second direction V2 corresponds to the arrangement interval of the pair of support walls 33 arranged at intervals in the second direction V2 in the top view.
In the embodiment, the length L1 of the irradiation region 24 in the second direction V2 is longer than the length L2 of the transport mechanism 30 in the second direction V2 (L1> L2).

As shown in FIG. 5, the irradiation region 24 of the irradiation unit 20 has an I-shape extending in the second direction V2. The irradiation region 24 of the irradiation unit 20 protrudes from both ends of the straight line portion 24a extending linearly in the second direction V2 and both ends of the straight line portion 24a in the second direction V2 to both sides of the first direction V1 and is straight in the first direction V1. It is provided with an orthogonal portion 24b extending in a shape.

<Gate frame>
As shown in FIG. 4, the gantry frame 25 is formed in a gantry shape so as to straddle the transport mechanism 30 in the second direction V2. The portal frame 25 supports the irradiation unit 20. The gate type frame 25 includes a pair of gate pillar portions 25a extending in the Z direction and a connecting beam portion 25b extending in the second direction V2 so as to connect between the pair of gate pillar portions 25a.

Inside the connecting beam portion 25b of the portal frame 25, a holding portion 25c for holding a plurality of irradiation units 21 is provided. The holding portion 25c forms a recess that is recessed upward from the lower surface of the connecting beam portion 25b in the portal frame 25.

The portion of the irradiation portion 20 excluding the irradiation surface (lower surface) is surrounded by the recess of the holding portion 25c and is covered by the wall portion of the portal frame 25. For example, the portal frame 25 is formed by a light-shielding member that blocks ultraviolet rays. As a result, when irradiating the ultraviolet rays from the irradiation unit 20, it is possible to prevent the ultraviolet rays from diffusing toward the side of the portal frame 25, and it is possible to irradiate the ultraviolet rays downward (the substrate 6).

<Relative position detector>
In the top view of FIG. 2, the relative position detection unit 40 is arranged in the gap 31h between two adjacent rollers 31. As shown in FIG. 3, the relative position detecting unit 40 is arranged below the roller 31. The relative position detecting unit 40 can detect the relative position between the substrate 6 and the irradiation unit 20. The relative position detection unit 40 includes a first sensor 40a and a second sensor 40b arranged at intervals in the first direction V1. For example, as the first sensor 40a and the second sensor 40b, non-contact sensors such as a photoelectric sensor and an ultrasonic sensor may be used.

The first sensor 40a and the second sensor 40b detect the position of the substrate 6 from below the two adjacent rollers 31 through the gap 31h.
For example, the first sensor 40a detects the position of the tip of the substrate 6 (hereinafter, also simply referred to as “the tip of the substrate”) in the first direction V1. Here, the tip of the substrate corresponds to the downstream end of the substrate 6 in the transport direction. The detection result of the first sensor 40a is output to the control unit 45 as a detection signal of the position of the tip of the substrate.
For example, the second sensor 40b detects the position of the tip of the substrate after the first sensor 40a detects the position of the tip of the substrate. The detection result of the second sensor 40b is output to the control unit 45 as a detection signal of the position of the tip of the substrate.
The control unit 45 calculates the transport speed of the substrate 6 based on the detection results of the first sensor 40a and the second sensor 40b.

<Integrated light amount measuring unit>
As shown in FIG. 3, the integrated light amount measuring unit 41 is arranged below the irradiation unit 20. In the top view of FIG. 2, the integrated light amount measuring unit 41 is arranged at a position overlapping with the irradiation region 24 of the irradiation unit 20. The integrated light amount measuring unit 41 can measure the integrated light amount of ultraviolet rays from the irradiation unit 20.
Here, the integrated light amount means the amount of ultraviolet rays (irradiation amount of ultraviolet rays) required to cure the ultraviolet curable resin (resist material). When the integrated light amount is A, the ultraviolet intensity is B, and the curing time is C, there is a relationship of A = B × C.
For example, as the integrated light amount measuring unit 41, an ultraviolet integrated photometer that measures the integrated light amount of ultraviolet rays is used.

<Surface height detector>
As shown in FIG. 3, the surface height detecting unit 42 is arranged above the transport mechanism 30. In the top view of FIG. 2, the surface height detecting unit 42 is arranged at a position avoiding the irradiation region 24 of the irradiation unit 20. The surface height detecting unit 42 is attached to a frame (not shown). The surface height detecting unit 42 can detect the height of the surface of the substrate 6 (hereinafter, also simply referred to as “board surface height”).
Here, the height of the substrate surface corresponds to the amount of displacement of the substrate 6 in the Z direction from the reference plane.

For example, the surface height detecting unit 42 includes a laser displacement meter (not shown) that measures the height of the surface of the substrate 6 (displacement amount from the reference surface). For example, a plurality of laser displacement meters are provided at fixed positions on the entire surface of the substrate 6 so that laser irradiation can be performed. The laser displacement meter may be movable by a drive mechanism including a motor or the like so that the entire surface of the substrate 6 can be irradiated with a laser. For example, the drive mechanism may include a gantry that supports the laser displacement meter, a rack and pinion mechanism that moves the gantry along the guide rails, and the like. The detection result of the surface height detecting unit 42 is output to the control unit 45 as a detection signal of the surface state of the substrate 6. The surface height detecting unit 42 may include an ultrasonic sensor.

<Control unit>
The control unit 45 collectively controls the components of the ultraviolet irradiation device 18.
The control unit 45 controls the irradiation unit 20 so that the outer peripheral portion of the substrate 6 is irradiated with ultraviolet rays based on the detection result of the relative position detection unit 40.

The control unit 45 controls the irradiation unit 20 and the transfer mechanism 30 based on the measurement result of the integrated light amount measurement unit 41.
For example, when the integrated light amount is larger than the light amount threshold value, the control unit 45 controls at least one of the following (1) and (2).
(1) The irradiation unit 20 is controlled to make the ultraviolet intensity lower than the reference intensity.
(2) The transfer mechanism 30 is controlled to make the transfer speed of the substrate 6 faster than the reference speed.
For example, when the integrated light amount is smaller than the light amount threshold value, the control unit 45 controls at least one of the following (3) and (4).
(3) The irradiation unit 20 is controlled to make the ultraviolet intensity higher than the reference intensity.
(4) The transfer mechanism 30 is controlled to make the transfer speed of the substrate 6 slower than the reference speed.

The control unit 45 controls the irradiation unit 20 and the transport mechanism 30 based on the detection result of the surface height detection unit 42.
For example, when the substrate surface height is larger than the height threshold value, the control unit 45 performs the same controls (3) and (4) as when the integrated light amount is smaller than the light amount threshold value.
For example, when the substrate surface height is smaller than the height threshold value, the control unit 45 performs the same controls (1) and (2) as when the integrated light amount is larger than the light amount threshold value.

<Second light irradiation unit>
As shown in FIG. 1, the second light irradiation unit 16 includes an ultraviolet irradiation device 48 and a substrate transfer mechanism 49.
The substrate transfer mechanism 49 in the second light irradiation unit 16 transfers the substrate 6 between the ultraviolet irradiation device 48 and the developing unit 15, and between the ultraviolet irradiation device 48 and the post-bake unit 17. For example, the ultraviolet irradiation device 48 and the substrate transfer mechanism 49 in the second light irradiation unit 16 have the same configuration as the ultraviolet irradiation device 18 and the substrate transfer mechanism 19 in the first light irradiation unit 12.

<Ultraviolet irradiation method>
Next, an example of the ultraviolet irradiation method according to the present embodiment will be described. In the present embodiment, the substrate 6 is irradiated with ultraviolet rays by using the above-mentioned ultraviolet irradiation device 18. The operation performed by each part of the ultraviolet irradiation device 18 is controlled by the control unit 45.

FIG. 7 is an operation explanatory view of the ultraviolet irradiation device 18 according to the embodiment. FIG. 7A is an operation explanatory diagram of the substrate tip irradiation control. FIG. 7B is an operation explanatory diagram of the irradiation control at both ends of the substrate. FIG. 7C is an operation explanatory view of the substrate rear end irradiation control. FIG. 7D is an operation explanatory diagram of the extinguishing control.
In FIG. 7, among the components of the ultraviolet irradiation device 18, the components other than the irradiation unit 20 are not shown.

The ultraviolet irradiation method according to the present embodiment includes an irradiation step, a moving step, a detection step and a control step.
In the irradiation step, the substrate 6 is irradiated with ultraviolet rays.
In the moving step, the substrate 6 and the irradiation unit 20 are relatively moved. In the moving process, the substrate 6 is conveyed. In the moving step, the irradiation unit 20 is in a fixed position.
In the detection step, the relative position between the substrate 6 and the irradiation unit 20 is detected. In the detection step, the position of the substrate 6 in the first direction V1 is detected while the irradiation unit 20 is in a fixed position.
In the control step, the irradiation unit 20 is controlled so that the outer peripheral portion of the substrate 6 is irradiated with ultraviolet rays based on the detection result of the detection unit.

As shown in FIG. 7, the control step includes a substrate tip irradiation control step, a substrate both end irradiation control step, a substrate rear end irradiation control step, and a light-off control step.

As shown in FIG. 7A, in the substrate tip irradiation control step, when the tip portion of the substrate 6 in the first direction V1 (hereinafter, also simply referred to as “the substrate tip portion”) overlaps the irradiation region 24 of the irradiation unit 20. , The irradiation unit 20 is turned on as a whole. Here, the tip portion of the substrate corresponds to the downstream end portion of the substrate 6 in the transport direction.
For example, in the substrate tip irradiation control step, when it is determined that the substrate tip is vertically below the irradiation unit 20 based on the detection result of the relative position detection unit 40 (see FIG. 2), a plurality of ultraviolet LED elements 22 (see FIG. 2). (See FIG. 6) is turned on as a whole.
After the substrate tip irradiation control step, the process proceeds to the substrate end-end irradiation control step.

As shown in FIG. 7B, in the substrate irradiation control step, both ends of the substrate are displaced from the irradiation region 24, and both ends of the substrate 6 in the second direction V2 (hereinafter, also simply referred to as “both ends of the substrate”) are. When it overlaps with the irradiation region 24, the portion of the irradiation unit 20 that is separated from both ends of the substrate is turned off, and the portion of the irradiation unit 20 that overlaps both ends of the substrate is turned on.
For example, in the substrate irradiation control step, when it is determined that both ends of the substrate are vertically below the irradiation unit 20 based on the detection result of the relative position detection unit 40 (see FIG. 2), a plurality of ultraviolet LED elements 22 (see FIG. 2). Of those (see FIG. 6), those located at the center of the irradiation unit 20 in the second direction V2 are turned off, and those located at both ends of the irradiation unit 20 in the second direction V2 are turned on. For example, when the orthogonal portion 24b (see FIG. 5) and both ends of the substrate overlap in a top view, the orthogonal portion 24b (see FIG. 5) of the plurality of ultraviolet LED elements 22 (see FIG. 6) in the irradiation control step at both ends of the substrate. Light only those located in.
After the irradiation control step at both ends of the substrate, the process proceeds to the irradiation control step at the rear end of the substrate.

As shown in FIG. 7C, in the substrate rear end irradiation control step, when the rear end portion of the substrate 6 in the first direction V1 (hereinafter, also simply referred to as “board rear end portion”) overlaps with the irradiation region 24, The irradiation unit 20 is turned on as a whole. Here, the rear end portion of the substrate corresponds to the upstream end portion of the substrate 6 in the transport direction.
For example, in the substrate rear end irradiation control step, when it is determined that the substrate rear end portion is vertically below the irradiation unit 20 based on the detection result of the relative position detection unit 40 (see FIG. 2), a plurality of ultraviolet LED elements 22 (see FIG. 6) is turned on as a whole.
After the irradiation control step at the rear end of the substrate, the process proceeds to the extinguishing control step.

As shown in FIG. 7D, in the extinguishing control step, when the rear end portion of the substrate is out of the irradiation region 24, the irradiation unit 20 is turned off as a whole.
For example, in the extinguishing control step, when it is determined that the entire substrate 6 is not vertically below the irradiation unit 20 based on the detection result of the relative position detection unit 40 (see FIG. 2), a plurality of ultraviolet LED elements 22 (FIG. 6). (See) is turned off as a whole.

By going through the above steps, the outer peripheral portion of the resist material applied to the substrate 6 can be selectively cured.

The ultraviolet irradiation method of the embodiment further includes a step of measuring the integrated light amount and a step of detecting the surface height.
In the integrated light amount measuring step, the integrated light amount of ultraviolet rays from the irradiation unit 20 is measured.
In the control step, the irradiation unit 20 and the transfer mechanism 30 are controlled based on the measurement result of the integrated light amount.
For example, when the integrated light amount is larger than the light amount threshold value, at least one of the following (1) and (2) is controlled in the control step.
(1) The irradiation unit 20 is controlled to make the ultraviolet intensity lower than the reference intensity.
(2) The transfer mechanism 30 is controlled to make the transfer speed of the substrate 6 faster than the reference speed.
For example, when the integrated light amount is smaller than the light amount threshold value, at least one of the following (3) and (4) is controlled in the control step.
(3) The irradiation unit 20 is controlled to make the ultraviolet intensity higher than the reference intensity.
(4) The transfer mechanism 30 is controlled to make the transfer speed of the substrate 6 slower than the reference speed.
For example, the integrated light amount measuring step is always performed at least during the irradiation step.

In the surface height detection process, the surface height of the substrate is detected.
In the control step, the irradiation unit 20 and the transfer mechanism 30 are controlled based on the detection result of the height of the substrate surface.
For example, when the substrate surface height is larger than the height threshold value, the control step performs the same controls (3) and (4) as when the integrated light amount is smaller than the light amount threshold value.
For example, when the substrate surface height is smaller than the height threshold value, the control step performs the same controls (1) and (2) as when the integrated light amount is larger than the light amount threshold value.

As described above, the ultraviolet irradiation device 18 of the present embodiment has a transport mechanism that allows the substrate 6 to be relatively movable between the irradiation unit 20 including the ultraviolet LED element 22 capable of irradiating the substrate 6 with ultraviolet rays and the substrate 6 and the irradiation unit 20. Based on the detection results of the relative position detecting unit 40 capable of detecting the relative position between the 30 and the substrate 6 and the irradiation unit 20, and the detection result of the relative position detecting unit 40, the outer peripheral portion of the substrate 6 is irradiated so as to be irradiated with ultraviolet rays. A control unit 45 that controls the unit 20 is included.

According to this configuration, since the outer peripheral portion of the substrate 6 is irradiated with ultraviolet rays, the outer peripheral portion of the resist material coated on the substrate 6 can be cured by the ultraviolet rays. In addition, the outer peripheral portion of the substrate 6 can be irradiated with ultraviolet rays while the substrate 6 and the irradiation unit 20 are relatively moved. Therefore, it is possible to suppress dripping of the resist material from the substrate 6 and shorten the tact time.
In addition, by curing the outer peripheral portion of the resist material coated on the substrate 6 with ultraviolet rays, even when a large substrate 6 is used or the substrate 6 is moved after coating, the substrate 6 of the resist material is used. It is possible to suppress dripping from.
In addition, by additionally exposing only the outer peripheral portion of the substrate 6, it can also be used for applications such as removal of resist residue on the outer peripheral portion (normal peripheral exposure application). In addition, the tact time can be shortened by exposing a large substrate while moving.
By the way, when irradiating the substrate 6 with ultraviolet rays, it is conceivable to use a metal halide lamp or a mercury lamp. However, in the case of a metal halide lamp or a mercury lamp, it may take several tens of minutes for the lamp to stabilize after lighting, and the life of the lamp is short, so that it may not be possible to continuously turn on and off the lamp.
On the other hand, when the outer peripheral portion of the substrate 6 is irradiated with ultraviolet rays using a metal halide lamp or a mercury lamp, it is conceivable to maintain the lighting state of the lamp. However, maintaining the lighting state of the lamp is not preferable in order to secure the life.
On the other hand, according to this configuration, by including the ultraviolet LED element 22, it is possible to stabilize immediately after lighting and extend the life as compared with the case where a metal halide lamp or a mercury lamp is used. , Can be turned on and off instantly and continuously. In addition, by controlling the irradiation unit 20 based on the detection result of the relative position detection unit 40, it is possible to control the lighting and extinguishing of the ultraviolet LED element 22 in consideration of the relative position between the substrate 6 and the irradiation unit 20. can. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate 6 with ultraviolet rays with energy saving.
In addition, the ultraviolet irradiation device 48 and the substrate transfer mechanism 49 in the second light irradiation unit 16 have the same configuration as the ultraviolet irradiation device 18 and the substrate transfer mechanism 19 in the first light irradiation unit 12, so that the first light irradiation The work of the second light irradiation unit 16 can be performed by the same unit as the unit 12, and the same effect can be obtained.

Further, since the transport mechanism 30 can transport the substrate 6, the substrate 6 can be transported in a state where the irradiation unit 20 is in a fixed position, so that an extra drive system for moving the irradiation unit 20 is required. However, the relative movement between the substrate 6 and the irradiation unit 20 can be simply performed.

Further, the irradiation unit 20 includes a plurality of ultraviolet LED elements 22 arranged along the first direction V1 and the second direction V2, respectively, to obtain the following effects.
According to this configuration, it is possible to selectively control the lighting and extinguishing of a plurality of ultraviolet LED elements 22 arranged along each of the first direction V1 and the second direction V2. Therefore, as compared with the case where the lighting state of the plurality of ultraviolet LED elements 22 is maintained, the ultraviolet irradiation to the outer peripheral portion of the substrate 6 can be efficiently performed with energy saving. For example, by performing the relative movement between the substrate 6 and the irradiation unit 20 only once (passing the substrate 6 under the irradiation unit 20 only once), all the ends of the substrate 6 are exposed at one time. It is efficient because it can be used.

Further, when the irradiation region 24 of the irradiation unit 20 is larger than the length of the moving portion in the second direction V2, the following effects are obtained.
By the way, when the irradiation region 24 of the irradiation unit 20 is smaller than the length of the moving portion in the second direction V2, the relative movement between the substrate 6 and the irradiation unit 20 is performed a plurality of times when the outer peripheral portion of the substrate 6 is irradiated with ultraviolet rays. There is a need to do. On the other hand, according to this configuration, the irradiation region 24 of the irradiation unit 20 is larger than the length L2 of the transport mechanism 30 in the second direction V2, so that when the outer peripheral portion of the substrate 6 is irradiated with ultraviolet rays, the substrate is irradiated. It suffices to perform one relative movement between 6 and the irradiation unit 20. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate 6 with ultraviolet rays with further energy saving.

Further, since the irradiation unit 20 includes the first irradiation unit 21a and the second irradiation unit 21b adjacent to the first direction V1, the ultraviolet LED element 22 is turned on and off for each of the first irradiation unit 21a and the second irradiation unit 21b. Can be controlled. Therefore, as compared with the case where the lighting and extinguishing of the ultraviolet LED element 22 are controlled as the entire irradiation unit 20, the ultraviolet irradiation to the outer peripheral portion of the substrate 6 can be efficiently performed with energy saving.

Further, the irradiation region 24 of the irradiation unit 20 has an I-shape extending in the second direction V2, so that the following effects can be obtained.
By the way, when the irradiation region 24 of the irradiation unit 20 has only the linear portion 24a extending in the second direction V2, it is possible that the installation area of the ultraviolet LED element 22 cannot be sufficiently secured at the end portion in the second direction V2. There is sex. On the other hand, according to this configuration, the irradiation region 24 of the irradiation unit 20 has an I-shape extending in the second direction V2, so that both ends of the second direction V2 become the first direction V1. The installation area of the ultraviolet LED element 22 can be secured. Therefore, as compared with the case where the irradiation region 24 of the irradiation unit 20 has only the linear portion 24a extending in the second direction V2, the ultraviolet irradiation to the outer peripheral portion of the substrate 6 can be efficiently performed with energy saving.

Further, the transport mechanism 30 includes a plurality of rollers 31 arranged with a gap 31h in the first direction V1, and the relative position detection unit 40 is arranged in the gap 31h between two adjacent rollers 31. The ultraviolet irradiation device 18 can be downsized as compared with the case where the relative position detection unit 40 is arranged outside the roller 31 in the second direction V2.

Further, the relative position detection unit 40 includes the first sensor 40a and the second sensor 40b arranged at intervals in the first direction V1, so that the relative position detection unit 40 includes the detection results of the first sensor 40a and the second sensor 40b. The relative movement speed in the first direction V1 can be obtained.

Further, in the control unit 45, when the substrate tip portion overlaps the irradiation region 24 of the irradiation unit 20, the substrate tip portion is the irradiation region after the substrate tip irradiation control for lighting the irradiation unit 20 as a whole and the substrate tip irradiation control. When both ends of the substrate overlap with the irradiation area 24 due to deviation from 24, the portion of the irradiation section 20 that is detached from both ends of the substrate is turned off, and the portion of the irradiation section 20 that overlaps both ends of the substrate is turned on. When the rear end of the substrate overlaps the irradiation region 24 after irradiation control at both ends of the substrate, the rear end of the substrate is the irradiation region after the irradiation control of the rear end of the substrate that lights the irradiation unit 20 as a whole and the irradiation control of the rear end of the substrate. When it deviates from 24, the following effect is obtained by performing the extinguishing control of turning off the irradiation unit 20 as a whole.
According to this configuration, the irradiation unit 20 is turned on and off in consideration of the relative positions of the substrate 6 and the irradiation unit 20 for each of the substrate tip irradiation control, the substrate both ends irradiation control, the substrate rear end irradiation control, and the extinguishing control. Can be controlled. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate 6 with energy saving as compared with the case where the irradiation control of the substrate 6 is performed collectively.

Further, the integrated light amount measuring unit 41 capable of measuring the integrated light amount of the ultraviolet rays from the irradiation unit 20 is further included, and the control unit controls the irradiation unit 20 and the transport mechanism 30 based on the measurement result of the integrated light amount measuring unit 41. This has the following effects.
According to this configuration, it is possible to control the lighting and extinguishing of the ultraviolet LED element 22 by adding the integrated amount of ultraviolet rays from the irradiation unit 20, and to control the relative movement between the substrate 6 and the irradiation unit 20. .. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate 6 with ultraviolet rays with energy saving.

Further, the surface height detecting unit 42 capable of detecting the height of the substrate surface is further included, and the control unit 45 controls the irradiation unit 20 and the transport mechanism 30 based on the detection result of the surface height detecting unit 42. So, it has the following effects.
According to this configuration, it is possible to control the lighting and extinguishing of the ultraviolet LED element 22 in consideration of the height of the substrate surface, and to control the relative movement between the substrate 6 and the irradiation unit 20. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate 6 with ultraviolet rays with energy saving.

The ultraviolet irradiation method of the present embodiment includes an irradiation unit 20 including an ultraviolet LED element 22 capable of irradiating the substrate 6 with ultraviolet rays, a transport mechanism 30 capable of relatively moving the substrate 6 and the irradiation unit 20, and the substrate 6. It is an ultraviolet irradiation method using an overall movement detection unit 40 capable of detecting a relative position with the irradiation unit 20, and the irradiation step of irradiating the substrate 6 with ultraviolet rays and the substrate 6 and the irradiation unit 20 are relatively relative to each other. Based on the moving step of moving, the detection step of detecting the relative position between the substrate 6 and the irradiation unit 20, and the detection result of the relative position detection unit 40, the irradiation unit so that the outer peripheral portion of the substrate 6 is irradiated with ultraviolet rays. A control step for controlling 20 is included.

According to this method, since the outer peripheral portion of the substrate 6 is irradiated with ultraviolet rays, the outer peripheral portion of the resist material coated on the substrate 6 can be cured by the ultraviolet rays. In addition, the outer peripheral portion of the substrate 6 can be irradiated with ultraviolet rays while the substrate 6 and the irradiation unit 20 are relatively moved. Therefore, it is possible to suppress dripping of the resist material from the substrate 6 and shorten the tact time.
In addition, by curing the outer peripheral portion of the resist material coated on the substrate 6 with ultraviolet rays, even when a large substrate 6 is used or the substrate 6 is moved after coating, the substrate 6 of the resist material is used. It is possible to suppress dripping from.
In addition, by additionally exposing only the outer peripheral portion of the substrate 6, it can also be used for applications such as removal of resist residue on the outer peripheral portion (normal peripheral exposure application). In addition, the tact time can be shortened by exposing a large substrate while moving.
In addition, by including the ultraviolet LED element 22, it is possible to stabilize the lamp immediately after lighting and extend the life of the lamp as compared with the case of using a metal halide lamp or a mercury lamp, so that the lamp can be turned on and off instantly. It can be done continuously. In addition, by controlling the irradiation unit 20 based on the detection result of the relative position detection unit 40, it is possible to control the lighting and extinguishing of the ultraviolet LED element 22 in consideration of the relative position between the substrate 6 and the irradiation unit 20. can. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate 6 with ultraviolet rays with energy saving.
In addition, the ultraviolet irradiation device 48 and the substrate transfer mechanism 49 in the second light irradiation unit 16 have the same configuration as the ultraviolet irradiation device 18 and the substrate transfer mechanism 19 in the first light irradiation unit 12, so that the first light irradiation The work of the second light irradiation unit 16 can be performed by the same unit as the unit 12, and the same effect can be obtained.

Further, in the moving step, by transporting the substrate 6, the substrate 6 can be transported in a state where the irradiation unit 20 is in a fixed position, so that an extra step for moving the irradiation unit 20 is not required. The relative movement between the substrate 6 and the irradiation unit 20 can be simply performed.

Further, in the control step, when the tip portion of the substrate overlaps the irradiation region 24 of the irradiation unit 20, the tip portion of the substrate is irradiated after the substrate tip irradiation control step of lighting the irradiation unit 20 as a whole and the substrate tip irradiation control step. When both ends of the substrate overlap the irradiation region 24 and are out of the region 24, the portion of the irradiation unit 20 that is out of the two ends of the substrate is turned off, and the portion of the irradiation unit 20 that overlaps both ends of the substrate is turned on. After the substrate rear end irradiation control step, when the substrate rear end overlaps with the irradiation region 24, the substrate rear end irradiation control step of lighting the irradiation unit 20 as a whole, the substrate rear end irradiation control step, and the substrate rear A turn-off control step of turning off the irradiation unit 20 as a whole when the end portion deviates from the irradiation region 24 is included.
According to this method, the irradiation unit 20 takes into account the relative positions of the substrate 6 and the irradiation unit 20 in each of the substrate tip irradiation control step, the substrate both ends irradiation control step, the substrate rear end irradiation control step, and the extinguishing control step. It is possible to control the lighting and extinguishing of. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate 6 with energy saving as compared with the case where the irradiation control of the substrate 6 is performed collectively.

Further, a step of measuring the integrated light amount of ultraviolet rays from the irradiation unit 20 is further included, and in the control step, the irradiation unit 20 and the transport mechanism 30 are controlled based on the measurement result of the integrated light amount to be as follows. It works.
According to this method, it is possible to control the lighting and extinguishing of the ultraviolet LED element 22 by adding the integrated amount of ultraviolet rays from the irradiation unit 20, and to control the relative movement between the substrate 6 and the irradiation unit 20. .. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate 6 with ultraviolet rays with energy saving.

Further, a surface height detecting step of detecting the height of the surface of the substrate 6 is further included, and in the control step, the irradiation unit 20 and the transport mechanism 30 are controlled based on the detection result of the height of the surface of the substrate 6. So, it has the following effects.
According to this method, it is possible to control the lighting and extinguishing of the ultraviolet LED element 22 in consideration of the height of the surface of the substrate 6, and to control the relative movement between the substrate 6 and the irradiation unit 20. Therefore, it is possible to efficiently irradiate the outer peripheral portion of the substrate 6 with ultraviolet rays with energy saving.

It should be noted that the various shapes and combinations of the constituent members shown in the above-mentioned example are examples, and can be variously changed based on design requirements and the like.
For example, in the above embodiment, an example including a transport mechanism 30 capable of transporting the substrate 6 in the first direction V1 has been described, but the present invention is not limited to this. For example, a moving mechanism that can move the irradiation unit 20 in the first direction V1 may be provided. For example, the irradiation unit 20 may be moved in the first direction V1 while the substrate 6 is in a fixed position. That is, it suffices to provide a moving portion capable of relatively moving the substrate 6 and the irradiation portion 20 in the first direction V1.

In the above embodiment, an example in which the irradiation unit 20 includes a plurality of ultraviolet LED elements 22 arranged along the first direction V1 and the second direction V2 has been described, but the present invention is not limited to this. For example, even if the irradiation unit 20 includes a plurality of ultraviolet LED elements 22 arranged along a third direction intersecting the first direction V1 and arranged along a fourth direction intersecting the third direction. good.

In the above embodiment, an example in which the irradiation unit 20 includes the first irradiation unit 21a and the second irradiation unit 21b adjacent to the first direction V1 has been described, but the present invention is not limited to this. For example, the irradiation unit 21 may include a plurality of three or more irradiation units 21 adjacent to the first direction V1. Alternatively, only one irradiation unit 21 may be provided in the first direction V1.

In the above embodiment, an example in which the irradiation region 24 of the irradiation unit 20 has an I-shape extending in the second direction V2 has been described, but the present invention is not limited to this. For example, the irradiation region 24 of the irradiation unit 20 may have only the linear portion 24a extending in the second direction V2.

In the above embodiment, an example in which the transport mechanism 30 is a roller conveyor has been described, but the present invention is not limited to this. For example, the transport mechanism 30 may be a belt conveyor or a robot arm.

In the above embodiment, an example in which the relative position detection unit 40 is arranged in the gap 31h between two adjacent rollers 31 in a top view has been described, but the present invention is not limited to this. For example, the relative position detection unit 40 may be arranged at a position overlapping the roller 31 in a top view. For example, the relative position detection unit 40 may have a detection surface that is inclined with respect to the vertical direction. The relative position detecting unit 40 may be arranged so as to be able to detect the position of the substrate 6 from below the two adjacent rollers 31 via the gap 31h.

In the above embodiment, an example in which the relative position detection unit 40 includes the first sensor 40a and the second sensor 40b arranged at intervals in the first direction V1 has been described, but the present invention is not limited to this. For example, the relative position detection unit 40 may include three or more sensors arranged at intervals in the first direction V1. Alternatively, the relative position detection unit 40 may include only one sensor.

In the above embodiment, the example in which the ultraviolet irradiation device 18 includes the integrated light amount measuring unit 41 and the surface height detecting unit 42 has been described, but the present invention is not limited to this. For example, the ultraviolet irradiation device 18 may not include at least one of the integrated light amount measuring unit 41 and the surface height detecting unit 42.

In the above embodiment, an example including a transport mechanism 30 capable of moving the substrate 6 in the first direction V1 has been described, but the present invention is not limited to this. For example, it may be provided with an elevating mechanism capable of moving at least one of the substrate 6 and the irradiation unit 20 in the vertical direction. For example, the elevating mechanism may include an elevating pin capable of elevating and lowering the substrate 6. For example, the elevating mechanism may include a slider that can move the connecting beam portion 25b up and down with respect to the pair of gate pillar portions 25a.

In the above embodiment, in the substrate tip irradiation control step, when the substrate tip portion overlaps with the irradiation region 24, an example of lighting the irradiation unit 20 as a whole has been described, but the present invention is not limited to this. For example, in the substrate tip irradiation control step, either the first irradiation unit 21a or the second irradiation unit 21b of the irradiation unit 20 may be turned on.

In the above embodiment, in the substrate rear end irradiation control step, when the substrate rear end portion overlaps with the irradiation region 24, an example of lighting the irradiation unit 20 as a whole has been described, but the present invention is not limited to this. For example, in the irradiation control step at the rear end of the substrate, either the first irradiation unit 21a or the second irradiation unit 21b of the irradiation unit 20 may be turned on.

In the above embodiment, an example of setting the wavelength band of the ultraviolet LED element 22 to about 365 nm has been described, but the present invention is not limited to this. For example, the wavelength band of the ultraviolet LED element 22 may be set according to the material used for improving the curing effect (curing by ultraviolet irradiation). For example, the wavelength band of the ultraviolet LED element 22 may be set to about 375 nm or about 405 nm, or may be set in the range of 185 nm to 254 nm.

In the above embodiment, an example in which a rectangular glass substrate having a G8 size is used as the substrate 6 has been described, but the present invention is not limited to this. For example, a glass substrate smaller than the G8 size may be used as the substrate 6. For example, as the substrate 6, a substrate having a shape other than a rectangular shape such as a circle may be used. For example, the present invention can be applied to the exposure of the outer peripheral portion of a semiconductor wafer by performing finer control in the control process.

In the above embodiment, an example of irradiating the outer peripheral portion of the substrate 6 with ultraviolet rays has been described, but the present invention is not limited to this. For example, the entire surface of the substrate 6 may be irradiated with ultraviolet rays. For example, the present invention can be applied not only to peripheral exposure but also to full exposure.

In addition, each component described as an embodiment or a modification thereof in the above can be appropriately combined within the range which does not deviate from the gist of the present invention, and some of the components among the plurality of combined components are combined. Can be avoided as appropriate.

6 ... Substrate 18, 48 ... Ultraviolet irradiation device 20 ... Irradiation unit 21 ... Irradiation unit 21a ... First irradiation unit 21b ... Second irradiation unit 22 ... Ultraviolet LED element 24 ... Irradiation area 30 ... Conveyance mechanism (moving part) 31 ... Roller 31h ... Gap 40 ... Relative position detection unit (detection unit) 40a ... First sensor 40b ... Second sensor 41 ... Integrated light amount measurement unit 42 ... Surface height detection unit 45 ... Control unit L2 ... Length of transport mechanism in the second direction (Length of moving part in the direction orthogonal to the relative moving direction) V1 ... First direction (relative moving direction) V2 ... Second direction (direction orthogonal to the relative moving direction)

Claims (15)

An irradiation unit containing an ultraviolet LED element capable of irradiating the substrate with ultraviolet rays,
A moving part that can move relatively between the substrate and the irradiation part,
A detection unit that can detect the relative position between the substrate and the irradiation unit,
A control unit that controls the irradiation unit so that the ultraviolet rays are irradiated to the outer peripheral portion of the substrate based on the detection result of the detection unit is included.
The irradiation region of the irradiation unit has an I-shape extending in a direction orthogonal to the relative movement direction between the substrate and the irradiation unit.
Ultraviolet irradiation device. The ultraviolet irradiation device according to claim 1, wherein the moving unit is capable of transporting the substrate. The irradiation unit includes a plurality of the ultraviolet LED elements arranged along the relative movement direction between the substrate and the irradiation unit and arranged along the direction orthogonal to the relative movement direction, claim 1 or 2. The ultraviolet irradiation device described in. The ultraviolet ray according to any one of claims 1 to 3, wherein the irradiation region of the irradiation unit is larger than the length of the portion on which the substrate can be mounted in a direction orthogonal to the relative moving direction between the substrate and the irradiation unit. Irradiation device. The ultraviolet irradiation device according to any one of claims 1 to 4, wherein the irradiation unit includes a first irradiation unit and a second irradiation unit adjacent to each other in a relative moving direction between the substrate and the irradiation unit. The moving portion includes a plurality of rollers arranged with a gap in the relative moving direction between the substrate and the irradiation portion.
The ultraviolet irradiation device according to any one of claims 1 to 5 , wherein the detection unit is arranged in the gap between two adjacent rollers. The ultraviolet irradiation device according to any one of claims 1 to 6 , wherein the detection unit includes a first sensor and a second sensor arranged at intervals in a relative moving direction between the substrate and the irradiation unit. The control unit
When the tip of the substrate in the relative movement direction between the substrate and the irradiation portion overlaps the irradiation region of the irradiation portion, the substrate tip irradiation control for lighting the irradiation portion as a whole and
After the substrate tip irradiation control, when the tip portion of the substrate deviates from the irradiation region and both ends of the substrate overlap the irradiation region in the direction orthogonal to the relative moving direction, the substrate of the irradiation portion. Substrate both ends irradiation control that turns off the parts that are separated from both ends and lights the part of the irradiation part that overlaps both ends of the substrate.
After the irradiation control at both ends of the substrate, when the rear end portion of the substrate in the relative moving direction overlaps the irradiation region, the irradiation control at the rear end of the substrate that lights the irradiation portion as a whole is used.
The item according to any one of claims 1 to 7 , wherein after the irradiation control at the rear end of the substrate, when the rear end portion of the substrate is out of the irradiation region, the irradiation unit is turned off as a whole. The ultraviolet irradiation device described. Further including an integrated light amount measuring unit capable of measuring the integrated light amount of ultraviolet rays from the irradiation unit.
The ultraviolet irradiation device according to any one of claims 1 to 8 , wherein the control unit controls at least one of the irradiation unit and the moving unit based on the measurement result of the integrated light amount measuring unit. Further including a surface height detecting unit capable of detecting the height of the surface of the substrate.
The ultraviolet irradiation device according to any one of claims 1 to 9 , wherein the control unit controls at least one of the irradiation unit and the moving unit based on the detection result of the surface height detection unit. An irradiation unit containing an ultraviolet LED element capable of irradiating the substrate with ultraviolet rays,
A moving part that can move relatively between the substrate and the irradiation part,
An ultraviolet irradiation method using a detection unit capable of detecting the relative position between the substrate and the irradiation unit.
The irradiation step of irradiating the substrate with ultraviolet rays and
A moving step of relatively moving the substrate and the irradiation unit,
A detection step for detecting the relative position between the substrate and the irradiation unit,
A control step of controlling the irradiation unit so that the ultraviolet rays are irradiated to the outer peripheral portion of the substrate based on the detection result of the detection unit is included.
The irradiation region of the irradiation unit has an I-shape extending in a direction orthogonal to the relative movement direction between the substrate and the irradiation unit.
Ultraviolet irradiation method. The ultraviolet irradiation method according to claim 11 , wherein in the moving step, the substrate is conveyed. The control step is
When the tip portion of the substrate in the relative movement direction between the substrate and the irradiation portion overlaps the irradiation region of the irradiation portion, the substrate tip irradiation control step of lighting the irradiation portion as a whole and the substrate tip irradiation control step.
After the substrate tip irradiation control step, when the tip of the substrate deviates from the irradiation region and both ends of the substrate overlap the irradiation region in the direction orthogonal to the relative moving direction, the substrate of the irradiation portions is the substrate. A substrate end-to-end irradiation control step of turning off the parts that are separated from both ends of the substrate and turning on the portion of the irradiation part that overlaps with both ends of the substrate.
After the irradiation control step at both ends of the substrate, when the rear end portion of the substrate in the relative moving direction overlaps the irradiation region, the irradiation control step at the rear end of the substrate for lighting the irradiation portion as a whole.
The ultraviolet ray according to claim 11 or 12 , further comprising a turn-off control step of turning off the irradiation portion as a whole when the rear end portion of the substrate deviates from the irradiation region after the substrate rear end irradiation control step. Irradiation method. Further including an integrated light amount measuring step of measuring the integrated light amount of ultraviolet rays from the irradiation unit.
The ultraviolet irradiation method according to any one of claims 11 to 13 , wherein in the control step, at least one of the irradiation unit and the moving unit is controlled based on the measurement result of the integrated light amount. Further including a surface height detection step of detecting the height of the surface of the substrate, the present invention includes.
The ultraviolet irradiation method according to any one of claims 11 to 14 , wherein in the control step, at least one of the irradiation unit and the moving unit is controlled based on the detection result of the height of the surface of the substrate.

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