JP7014697B2 - Liquid slit nozzle - Google Patents

Description

The present invention relates to a liquid slit nozzle suitable for use when applying a liquid having a relatively high viscosity, such as applying a liquid agent to the surface of a road.

Conventionally, as a slit nozzle for applying a treatment liquid to the surface of an object, for example, Patent Documents 1 and 2 as shown below exist.

Patent No. 4619139 Patent No. 4315787

The slit nozzle of Patent Document 1 is a slit nozzle in which a slit-shaped discharge port that opens downward is formed in a state where two nozzle halves are combined, and is applied to one of the two nozzle halves. A first reservoir of liquid is formed, and a second reservoir shallower than the first reservoir is formed on the lower side continuous with the first reservoir with reference to the thickness direction of the nozzle half body, and this second reservoir is formed. A flat surface is provided on the lower side continuous with the portion to form an orifice having a slit-shaped discharge port at the lower end between the nozzle half body and the other nozzle half body, and the first storage portion is located at the center portion in the width direction of the nozzle half body. The part that communicates with the formed coating liquid supply hole is the highest, and it is formed in a chevron shape so that both ends are low, and the lower side of the second reservoir is the lowest in the central part in the width direction of the nozzle half body and goes to both ends. A V-shaped inclined surface is formed, and the starting points at both ends of the V-shaped inclined surface are such that the amount of the coating liquid flowing down is the largest when the lower side of the second storage portion is straightened. It is configured.

In Patent Document 1, as shown in FIGS. 1 and 2, a coating liquid supply hole 6 is provided in the center of the upper surface of the slit nozzle, an air bleeding hole 7 is provided, and a first storage portion 4 and a second are provided inside. 2 A storage unit 5 is provided so as to spray from the slit-shaped discharge port 10 at the lower end.

Further, as shown in FIG. 3, a V-shaped inclined surface 8 is formed in the lower part of the second storage portion 5, and as shown in FIG. 6, the flow amount distribution of the coating liquid is distributed at both ends in the length direction. The structure is as follows.

The device having the slit nozzle of Patent Document 2 includes a holding table for holding the substrate, a slit nozzle for discharging a predetermined processing liquid, and a moving means for moving the slit nozzle in a substantially horizontal direction along the surface of the substrate. The slit nozzle is provided with a treatment liquid supply means for supplying the predetermined treatment liquid from a predetermined treatment liquid supply source.
The predetermined treatment is performed by discharging the predetermined treatment liquid filled inside the slit nozzle while causing the slit nozzle to scan the surface of the substrate by moving the slit nozzle in the substantially horizontal direction. A substrate processing device that applies a liquid to a substrate, and in the slit nozzle.
The treatment liquid supply means is connected, and a supply port for supplying the predetermined treatment liquid to the manifold of the slit nozzle is provided at at least one side end portion of both side ends in the longitudinal direction of the manifold. Ori,
A discharge port for discharging the gas existing inside the slit nozzle and the treatment liquid mixed with the gas to the outside of the slit nozzle is provided at the upper end portion of the manifold, and the discharge port is larger than the supply port. Installed in a high position,
The discharge path connected to the discharge port and
A detection means that is arranged in the middle of the discharge path and detects the filling state and the gas mixing state of the treatment liquid in the discharge path.
A determination means for determining the filling degree of the predetermined treatment liquid in the slit nozzle and determining the mixing degree of gas in the predetermined treatment liquid.
Further prepare
The discharge path has an optically transparent U-shaped bent portion, includes a sensing portion including an apex portion in which the bent portion is directed upward, and is provided from the slit nozzle. The apex portion is provided so as to be located at the highest position up to the sensing portion.
The detection means is arranged in the vicinity of the bent portion, emits a first light beam to the apex portion, and emits a second light beam obtained from the apex portion by irradiating the first light beam. Is to receive light
The determination means is configured to determine the filling degree and the mixing degree of the gas based on the fluctuation of the light intensity of the second light beam received by the detection means.

Patent Document 2 is a large-scale facility as a whole. Further, as shown in FIGS. 3 and 4 of Patent Document 2, the structure is such that the supply ports 46a and 46b are provided at the end portions of the slit nozzle 4 in the length direction. In addition, an air bleeding 47 for the gas mixed in the supply liquid supplied to the inside is provided, and the gap 41a in the slit nozzle is linear and sprayed from the lower end portion.

The above-mentioned patent documents 1 and 2 have a more complicated structure than the product of the present invention described later.

Further, as shown in FIG. 7, the spray from the lower end of the slit nozzle does not spread due to the contracted flow, resulting in a tapered spray. Therefore, even if the spray nozzles are connected in order to increase the length, there is a problem that the spray between the connections is interrupted, unevenness occurs, and continuous spray cannot be obtained.

The present invention has been proposed in view of the above, and an object thereof is that a wide range can be sprayed even when used alone, and a spray nozzle is connected to a long length in order to spray a wider range. However, it is an object of the present invention to provide a liquid spray nozzle having a simple structure with no interruption of spraying between connections and reduced maintenance.

The liquid slit nozzle according to the first aspect of the present invention is a plate-shaped and horizontally long first plate 2 having a predetermined thickness and a first plate 2 facing and being joined to the inner surface 2a of the first plate 2. With 2 plates 3
A hole-shaped inflow portion 5a for supplying the liquid agent to the inside is formed in the central portion of the second plate 3, and a concave shape for storing the liquid agent from the inflow portion 5a is formed on the inner surface 2a of the first plate 2. A reservoir 2b is formed, and the reservoir 2b has a shape in which a substantially dogleg shape is arranged sideways along the length direction of the first plate 2, and is inclined from the central portion toward each end portion c. It has a tapered upper side a and a tapered lower side b that is located below the upper side a and is gently inclined from the upper side a, and the end portions c of the upper side a and the lower side b are connected and The width of the storage portion 2b is narrow from the central portion toward each end portion c, the depth of the storage portion 2b is formed shallow toward each end portion c, and the end portion c is formed from the end portion c to the first. , A tapered portion 2d extending toward the end 4a of the orifice 4 formed at the tip between the second plates 2 and 3 and guiding the liquid to flow toward the end 4a was formed. It is a feature.
The present invention according to claim 2 is the liquid slit nozzle according to claim 1, which has a circular cross section forming a flow path 8 under the storage portion 2b formed on the inner surface 2a of the first plate 2. The protrusion 9 is projected at appropriate intervals, and a protrusion 2c for forming an orifice is formed below the protrusion 9.

According to the present invention of claim 1, a storage portion 2b for flowing a liquid agent toward the orifice 4 is formed on the inner surface 2a of the first plate 2, and the shape of the storage portion 2b is narrowed toward the end portion c. The tapered portion 2d is formed so that the central portion of the storage portion 2b is deepest and shallow toward the end portion c, and the liquid agent flowing to the end portion c is guided to the orifice end portion 4a. Therefore, the liquid agent can be discharged from the orifice 4 while maintaining the fluid velocity, and the spray S from the orifice 4 can be spread and sprayed without shrinking. In this case, the spray can be spread even for high-viscosity liquids. Therefore, even if the liquid slit nozzles are connected in the length direction, the spray is not interrupted at the connected portion and can be sprayed uniformly over the entire area. In addition, this reduces liquid accumulation and accumulation, which dramatically reduces maintenance.
According to the second aspect of the present invention, a protrusion 9 for forming a flow path is provided on the inner surface 2a of the first plate 2 between the inner surface 2a and the inner surface of the second plate 3 facing each other, and below the protrusion 9 for forming a flow path. Since the protrusion 2c for forming the orifice is formed, the gap of the orifice 4 becomes constant, and it is not necessary to adjust the dimensions of the orifice 4 at the time of assembly.

The external perspective view of the slit nozzle for liquids which concerns on one Example of this invention. Same as above vertical cross-sectional view. Explanatory view of the outer surface side of one of the plates constituting the liquid slit nozzle as viewed from a plane. Perspective view of the left half of the other plate. The perspective view of the same right half. Explanatory drawing which shows the spray state in the product of this invention. Explanatory drawing which shows the spray state in a conventional product.

Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings.

FIG. 1 shows an external perspective view of a liquid slit nozzle 1 according to an embodiment of the present invention. In the illustrated state, the liquid slit nozzle 1 has a substantially plate-shaped first plate 2 that is long in the lateral direction and has a predetermined thickness, and has substantially the same shape integrated with the first plate. The second plate 3 of the above is provided. In the illustrated state, the liquid slit nozzle 1 is shown diagonally, but it can be seen that the orifice 4 is formed at the V-shaped tip portions of the first and second plates 2 and 3. It is illustrated as. The orifice 4 is formed over the entire first and second length directions.

In FIG. 1, 5 is a hole for supplying a liquid agent formed in a substantially central portion of the second plate 3, 6 is a fixing screw inserted from the outer surface side of the second plate 3, and 7 is another member (7). It is a mounting hole to (not shown).

FIG. 2 shows a side cross section of the central portion of the integrated first and second plates 2 and 3 in the length direction.
In the integration, the inner surface 2a of the first plate 2 and the inner surface 3a of the second plate 3 are joined facing each other, and the tip of the fixing screw 6 inserted from the second plate 3 side is first. It is screwed and connected to the fixing screw receiving portion 6a on the plate 2 side. The hole 5 provided in the substantially central portion of the second plate 3 becomes the inflow portion 5a of the liquid agent in the second plate 3, and the liquid agent is supplied to the inside.
The inflow portion 5a communicates with the concave storage portion 2b formed on the inner surface 2a side of the first plate. The concave storage portion 2b has the deepest central portion. Then, the liquid agent that has entered the storage portion 2b from the inflow portion 5a is sprayed to the outside from the orifice 4 through the flow path 8.

The flow path 8 is formed by a protrusion 9 having a substantially circular cross section, which is projected at an appropriate position on the lower portion of the inner surface 2a of the first plate 2 at appropriate intervals along the length direction. That is, the tip surface of the protrusion 9 is joined to the inner surface 3a of the second plate 3 arranged so as to face each other, and the flow path 8 is formed.

The protruding dimension of the protrusion 9 is arbitrarily determined depending on the purpose and application of the liquid slit nozzle 1, and the gap width of the flow path 8 is set. The protrusion 9 may be provided on the inner surface 3a side of the second plate 3.

The gap of the orifice 4 is narrower than the gap of the flow path 8. The gap of the orifice 4 is formed by arranging the protrusions 2c formed in the lower part of the inner surface of the first plate 2 in close proximity to the inner surface 3a of the second plate 3 arranged so as to face each other. As a result, the clearance of the orifice 4 becomes constant, so that it is not necessary to adjust the dimensions of the orifice 4 at the time of assembly.

FIG. 3 is a front view of the outer surface of the second plate 3. As described above, a hole 5 or the like for supplying the liquid agent is provided in the substantially central portion of the second plate 3.

The first plate 2 is bonded to the inner surface side of the second plate 3, and the liquid agent supplied via the inflow portion 5a is supplied to the concave storage portion 2b formed on the second plate 2 side.

The storage portion 2b has a shape in which a substantially dogleg shape is arranged sideways along the length direction of the first plate 2, and the upper side a inclined in a tapered shape from the central portion toward each end portion c. It is formed by a lower side b that is located on the lower side of the upper side a and is gently inclined with respect to the upper side a, and the upper side a and the end portion c of the lower side b are connected in an arc shape. The upper side a is tapered downward toward the end c, and the width of the upper side a and the lower side b gradually narrows toward the end c. Further, the concave depth of the storage portion 2b is formed so that the flow path depth gradually becomes shallower toward the end portion c.

FIG. 4 shows a perspective view of a part of the left half of the first plate 2 and FIG. 5 shows a part of the right half of the first plate 2.

Below both sides of the inner surface of the first plate 2, stepped taper portions 2d for spray diffusion are formed. Each tapered portion 2d is a stepped portion cut in a concave shape toward the inside, the upper end portion thereof is located at the end portion c of the storage portion 2b, and the lower end portion protrudes into the lower portion of the inner surface of the first plate 2. It is located above the provided protrusion 2c for forming an orifice, and serves as a guide for flowing the liquid liquid flowing from the central portion of the storage portion 2b toward the end portion c toward the end portion 4a of the orifice 4.

In operation, as shown by an arrow in FIG. 3, the liquid liquid supplied from the inflow portion 5a to the storage portion 2b flows from the lower side b of the storage portion 2b to the orifice 4 side, and a part of the liquid agent is at the end portion c of the storage portion 2b. Flow towards. In this case, since the storage portion 2b is formed in a tapered shape and is narrow and inclined toward the end portion c, the fluid as the liquid agent is discharged while maintaining the fluid velocity of the liquid agent, and the spray S is Sa. As shown in, it can be sprayed to the outside in a spread state without shrinking, and even if it is used alone, it can spray a wider range than the conventional one.

Since the liquid can be sprayed uniformly over the entire area of the orifice 4 and the speed reduction of the liquid can be reduced to the end 4a, the liquid does not collect and accumulate. This reduction in liquid pool dramatically reduces the frequency of maintenance.

Further, since the spray S does not shrink and spreads outward, even if a plurality of liquid slit nozzles 1 are connected in the length direction by an appropriate connecting means for lengthening, the spray S is long without interruption between the connections. It can be sprayed continuously and evenly over.

Since the depth of the storage portion 2b is also gradually shallower toward the end portion c, the width is gradually narrowed toward the end portion c, and the liquid agent is discharged while maintaining the fluid velocity. Can be done.

FIG. 6 is a conceptual diagram showing the state of the spray S of the product of the present invention. A spray state with a slit length of 100 mm, a slit width of 0.5 mm, and a water pressure of 0.03 MPa is shown. Unlike the conventional product shown in FIG. 7, the spray is in an expanded state without shrinking.

The present invention is not limited to coating liquids for road construction, but can be applied to a wide range of fields such as food coating, electronics industry, development, etching, chemical coating, cleaning rinses, pigments, glaze coating, cleaning, and coating. It is also particularly suitable for the use of relatively highly viscous liquids.

Examples of high-viscosity liquids include chocolates in the food industry, developers used in the electronics industry, etching liquids, moisture-proof coating liquids, and other adhesives. When such a liquid agent uses a conventional nozzle, the spray does not spread due to a particularly contracted flow, but according to the present invention, the spray can be spread.

1 Liquid slit nozzle 2 1st plate 2a Inner surface of 1st plate 2b Storage part 2c Protrusion 2d Tapered part 3 2nd plate 3a Inner surface of 2nd plate 4 Orifice 4a Orifice end 5 Hole 5a Inflow part 6 Fixing screw 6a Fixing screw receiving part 7 Mounting hole 8 Flow path 9 Protrusion

Claims (2)

A plate-shaped and horizontally long first plate 2 having a predetermined thickness and a second plate 3 facing and being joined to the inner surface 2a of the first plate 2 are provided.
A hole-shaped inflow portion 5a for supplying the liquid agent to the inside is formed in the central portion of the second plate 3, and a concave shape for storing the liquid agent from the inflow portion 5a is formed on the inner surface 2a of the first plate 2. A reservoir 2b is formed, and the reservoir 2b has a shape in which a substantially dogleg shape is arranged sideways along the length direction of the first plate 2, and is inclined from the central portion toward each end portion c. It has a tapered upper side a and a tapered lower side b that is located below the upper side a and is gently inclined from the upper side a, and the end portions c of the upper side a and the lower side b are connected and The width of the storage portion 2b is narrow from the central portion toward each end portion c, the depth of the storage portion 2b is formed shallow toward each end portion c, and each end portion c is formed from the end portion c to the first. , A tapered portion 2d extending toward the end 4a of the orifice 4 formed at the tip between the second plates 2 and 3 and guiding the liquid to flow toward the end 4a was formed. Characterized slit nozzle for liquid. In the liquid slit nozzle according to claim 1, a protrusion 9 having a circular cross section forming a flow path 8 is projected at appropriate intervals below the storage portion 2b formed on the inner surface 2a of the first plate 2. A slit nozzle for liquid, characterized in that a protrusion 2c for forming an orifice is formed at the lower portion thereof.

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