JP7018193B2 - Alignment stage - Google Patents

Description

The present invention relates to an alignment stage for adjusting the position of a work.

The alignment stage is used as an ultra-precision device that adjusts the position of a work with an accuracy of micron or less in a manufacturing process for performing microfabrication such as nanoimprint on a work such as a semiconductor wafer or a liquid crystal panel. Conventionally, the alignment stage is arranged between the base, the table on which the work is placed, and the base and the table, and the table is placed with three degrees of freedom in the X-axis direction, the Y-axis direction, and the θ rotation direction with respect to the base. It is provided with a feed mechanism unit that supports it in a movable manner, and for example, the position of the work is adjusted by moving the table by the feed mechanism unit while checking the work position on the table with a camera or the like. A rolling element is interposed in the feed mechanism portion so that the fine movement of the table can be smoothly performed.

Japanese Unexamined Patent Publication No. 2013-197559

By the way, after the position of the work is adjusted by the alignment stage, the work on the alignment stage is pressed by the processing machine for processing. The pressing force during machining of the work is also applied to the alignment stage. In recent years, there has been an increasing demand for applying a large pressure to the work on the alignment stage during work machining due to the increase in size of the work, integration of manufacturing processes, and further improvement in machining accuracy. In order to meet this demand, the feed mechanism of the alignment stage needs to have a structure that can withstand a large pressing force. However, in order to make precise and fine movements when adjusting the position of the work in the alignment stage, a small rolling element of the feed mechanism is used, but in such a feed mechanism, a large load ( Pressurization) cannot be tolerated, and if a large pressurization is applied, it may be damaged or deformed. In order for the feed mechanism to have a structure that can withstand a large pressing force, it is necessary to make the rolling elements large, but this causes a problem that it cannot adapt to precise and fine movements when adjusting the work position.

INDUSTRIAL APPLICABILITY The present invention has been made in view of the above circumstances, and provides an alignment stage in which a feed mechanism unit is suitable for precise and fine movements, and a large pressing force can be tolerated during workpiece processing. The purpose is to do.

The alignment stage of the present invention is
A base, a table placed above the base, a work plate supported by the table and on which the work is placed, and a table provided between the base and the table, and the table is oriented in the X-axis direction and the Y-axis with respect to the base. An alignment unit equipped with a feed mechanism that movably supports with three degrees of freedom in the direction and the θ rotation direction, and
The base installed below the base and
It is provided between the base and the base, and is equipped with a transport mechanism that transports the alignment unit to the base.
The table and base have an opening in the center that faces the work plate.
Between the work plate and the base, a movement restricting body that is inserted through the openings of the table and the base to limit the downward movement of the work plate is arranged.

According to the present invention, when a pressing force during machining is applied to the work from above, the work plate on which the work is placed is restricted from moving downward by the movement restrictor, so that the work plate applied to the work plate is machined. The pressure of time will be received by the base through the movement restrictor. Therefore, the pressing force at the time of machining the work hardly acts on the table that supports the work plate. Therefore, the pressing force at the time of machining the work hardly acts on the feed mechanism portion which is arranged between the table and the base and supports the table. As a result, when machining the work, a large pressure can be applied to the work without applying a large pressure to the feed mechanism portion. Further, since the pressing force at the time of machining the work is hardly applied to the feed mechanism portion, a small rolling element or the like in the feed mechanism portion with a small load tolerance can be used. Therefore, the feed mechanism unit can be configured to adjust the work position so as to be suitable for fine and precise movement.

In the alignment stage of the above invention
The movement restricting body is composed of a block member having a length corresponding to the height from the upper surface of the base to the lower surface of the work plate.
It is assumed that the upper surface of the block member is fixed to the lower surface of the work plate, and a slight gap is provided between the lower surface of the block member and the upper surface of the base so as not to hinder the movement of the table by the feed mechanism portion. I can .

According to this , when the pressing force at the time of machining the work is applied to the work plate from above, the downward movement of the table supporting the work plate is the distance until the lower surface of the block member abuts on the upper surface of the base, that is, the above-mentioned slight amount. It will be limited to the range of the gap . Therefore, the feed mechanism that supports the table is subjected to the pressing force at the time of machining the work by the amount of movement of the slight gap, but no larger pressing force is applied. Therefore, when machining the work, it is possible to apply a large pressure to the work without applying a large pressure to the feed mechanism portion.

In the alignment stage of the above invention
The movement restricting body may be provided with a spherical bearing.

According to this , when the work is machined, the inclination of the work plate due to the pressurization from the processing machine is automatically corrected by the spherical bearing. Therefore, even in a work having a large area, the pressing force at the time of machining the work can be applied evenly.

In the alignment stage of the above invention
The work plate can be supported by a guide mechanism that allows it to move downwards on the table.

According to this , since the work plate can be moved downward independently of the table, the pressing force applied to the work plate from above during machining of the work does not act on the table, but is used as a base or through a movement restrictor. It is received by the base. Therefore, it is possible to more reliably prevent the pressing force during machining of the work from acting on the feed mechanism arranged between the table and the base and supporting the table.

As described above, according to the alignment stage according to the present invention, it is possible to apply a large pressing force to the work without applying a large pressing force to the feed mechanism portion at the time of machining the work.
Further, since almost no pressing force is applied to the feed mechanism portion during machining of the work, the feed mechanism portion can be configured to be suitable for precise and fine movement.

It is a figure which shows the alignment stage of Embodiment 1, the figure (a) is a top view, and the figure (b) is a partial sectional view. It is a figure which shows the feed mechanism part in the alignment stage of Embodiment 1, FIG. ) Is a top view. It is a partial cross-sectional view of the transfer mechanism and the processing machine in the alignment stage of Embodiment 1 as seen from the X-axis direction. It is a figure for demonstrating the operation of the block body in the alignment stage of Embodiment 1, FIG. It is a partial cross-sectional view when it is in a work processing place. It is a figure for demonstrating the operation of the block body in the alignment stage of Embodiment 2, FIG. 2A is a partial cross section when an alignment unit is in a work arrangement place, and FIG. It is a partial cross-sectional view when it is in the processing place. It is a figure for demonstrating the operation of a block body in the alignment stage of Embodiment 3, FIG. It is a partial cross-sectional view when it is in a work processing place.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The alignment stage according to the present invention is, for example, a work of a semiconductor wafer or the like in a nanoimprint manufacturing process in which a resist is applied onto a semiconductor wafer and pressure-pressed by a mold such as a glass mask to transfer a nano-order precision pattern. The position of the work is adjusted before machining, and after the work position is adjusted, the work on the alignment stage is pressurized by a machining machine to perform machining. The present invention is not limited to the nanoimprint, and can be used in various manufacturing processes such as cutting, pressing, etc., in which a pressing force is applied to a work, and the work is not limited to a semiconductor wafer and is a liquid crystal. Various workpieces such as panels, tapes, films, and printed circuit boards can be targeted.

(Embodiment 1)
As shown in FIG. 1, the alignment stage 1A according to the first embodiment is provided with a block member 2A as a movement restricting body that restricts the downward movement of the work plate 13 in the alignment unit 10. The block member 2A will be described later.

The alignment unit 10 is a component that adjusts the position of the work W, and is mainly supported by a rectangular base 11, a rectangular table 12 arranged above the base 11, and a table 12. A rectangular workpiece 13 on which the work W is placed is provided between the base 11 and the table 12, and the table 12 has three degrees of freedom in the X-axis direction, the Y-axis direction, and the θ rotation direction with respect to the base 11. It has a feed mechanism unit 3 that supports the feed mechanism so as to be movable. The work plate 13 is supported on the table 12 by legs 14 standing at the four corners of the rectangular table 12.

The feed mechanism unit 3 includes a guide unit 30 that makes the table 12 movable in the X-axis direction and the Y-axis direction and can rotate θ on the XY plane, and a ball screw portion 40 that moves the guide unit 30 in the uniaxial direction. It is equipped with.

As shown in FIG. 2, the guide portion 30 is assembled with a lower guide block 31, a middle guide block 32, an upper guide block 33, and a bearing 34, and the lower guide block 31 is attached to the upper surface of the base 11. The bearing 34 is attached to the lower surface of the table 12. With reference to FIG. 2A, a convex first rail portion 35a extending in one horizontal direction is formed on the upper surface of the lower guide block 31, and a lower guide block 31 is formed on the lower surface of the middle guide block 32. A concave first rail groove portion 36a fitted to the first rail portion 35a is formed. A first cage 37a for holding the rolling element 38 is disposed between the first rail portion 35a and the first rail groove portion 36a. As a result, the middle guide block 32 can slide in one horizontal direction (for example, the X-axis direction) along the first rail portion 35a of the upper guide block 33. Further, referring to FIG. 2B, a convex second rail portion 35b extending in the other horizontal direction orthogonal to the first rail groove portion 36a on the lower surface is formed on the upper surface of the middle guide block 32, and the upper guide is formed. A concave second rail groove portion 36b fitted to the second rail portion 35b of the middle guide block 32 is formed on the lower surface of the block 33. A second cage 37b for holding the rolling element 38 is also disposed between the second rail portion 35b and the second rail groove portion 36b. As a result, the upper guide block 33 can slide in the other horizontal direction (for example, the Y-axis direction) along the second rail portion 35b of the middle guide block 32. Further, with reference to FIG. 2C, the bearing 34 has a rolling element 39 arranged in a circular shape. The bearing 34 allows the table 12 to rotate θ on a horizontal plane (on an XY plane). As described above, the guide portion 30 is configured to allow the table 12 to move with three degrees of freedom in the X-axis direction, the Y-axis direction, and the θ rotation direction.

The ball screw portion 40 is arranged parallel to the side of the guide portion 30, and is screwed into the screw portion 41 extending parallel to the length direction of the convex first rail portion 35a of the lower guide block 31 and the screw portion 41. The nut portion 42 combined and connected to the middle guide block 32, the bearing portion 43 arranged on the base end portion side of the screw portion 41, and the base end portion and the joint 44 of the screw portion 41 protruding from the bearing portion 43. It has a motor 45 to which a motor shaft is connected by. The motor 45 and the bearing portion 43 are installed and fixed to the base 11. Further, although not shown, the bearing portion 43 holds a rolling element. As a result, the nut portion 42 is moved along the length direction of the screw portion 41 by driving the motor 45 of the ball screw portion 40 to rotate the screw portion 41, and the movement of the nut portion 42 causes the middle stage of the guide portion 30. The guide block 32 is slid and moved along the first rail portion 35a of the lower guide block 31.

The feed mechanism portion 3 including the guide portion 30 and the ball screw portion 40 is arranged at three corners of the four corners of the rectangular table 12 (see FIG. 1A). The ball screw portion 40 is arranged so that the screw portion 41 faces one corner side of the table 12 and the motor 45 faces the other corner side on one side of the table 12. Then, two feed mechanism portions 3 arranged on the diagonals of the corresponding two sides form an X-direction linear motion guide (3X) for moving the table 12 in the X-axis direction, and one side of the other two opposite sides. One feed mechanism 3 arranged at the corner of the side constitutes a Y-direction linear motion guide (3Y) for moving the table 12 in the Y-axis direction, and an X-direction linear motion guide (3X) and a Y-direction linear motion guide (3X). The bearing 34 in 3Y) constitutes a θ rotation guide (34θ) that allows the table 12 to rotate in the θ direction on the XY plane.

In order to move the table 12 in the X-axis direction by the feed mechanism unit 3, each motor 45 of the two X-direction linear motion guides (3X) is rotated to move each nut portion 42 in the same direction in the X-axis direction. As a result, each guide portion 30 moves in the same direction in the X-axis direction, and the table 12 is moved in the X-axis direction. To move the table 12 in the Y-axis direction, the motor 45 of one Y-direction linear motion guide (3Y) is rotated to move the nut portion 42 in the Y-axis direction, so that each guide portion 30 moves in the Y-axis direction. The table 12 is moved in the Y-axis direction by moving in the same direction. In order to rotate the table 12 by θ, each motor 45 of the two X-direction linear motion guides (3X) is rotated to move each nut portion 42 in opposite directions in the X-axis direction, and one Y-direction linear motion is performed. By rotating the motor 45 of the guide (3Y) to move the nut portion 42 in the Y-axis direction, the three bearings 34 constituting the θ rotation guide (34θ) allow θ rotation, and the table 12 is placed on the XY plane. Is rotated in the θ direction.

With reference to FIGS. 3 and 4, the alignment stage 1A is provided with a transfer mechanism 5 for moving the alignment unit 10 from the work placement location P1 to the work processing location P2. The transport mechanism 5 is installed and fixed on a base F installed below the base 11. The transport mechanism 5 is attached to a pair of guide rails 51a and 51b extending in one horizontal direction (for example, in the X-axis direction) and two guide rails 51a and 51b so as to be travelable, and is attached to the lower surface of the rectangular base 11. It has four sliders 52 provided at the four corners and a ball screw mechanism portion 53 for moving the two sliders 52 provided on one of the guide rails 51a. The ball screw mechanism portion 53 includes a screw shaft 54 into which the slider 52 is screwed, and a motor 55 for rotating the screw shaft 54. As a result, the alignment unit 10 can be moved along the guide rails 51a and 51b by rotating the screw shaft 54 to move the slider 52. The transfer mechanism 5 reciprocates the alignment unit 10 between the work placement location P1 and the work processing location P2.

At the work placement location P1, the alignment stage 1A confirms a predetermined alignment mark attached to the work W by a camera (not shown) in which the work W is placed on the work plate 13 and the work W is installed above. At the same time, the feed mechanism unit 3 moves the table 12 in the XYθ direction to adjust the position of the work W. After the work position is adjusted, the alignment unit 10 is transported from the work placement location P1 to the work processing location P2 by the transport mechanism 5. A processing machine M such as a nanoimprint apparatus is arranged at the work processing place P2. The processing machine M has a moving plate 81 having a processing tool 8 attached to the lower surface and a post 82 that supports the moving plate 81 so as to be vertically movable, and moves the moving plate 81 at an upper position downward during workpiece processing. .. At the work processing place P2, the work W on the work plate 13 is pressurized by the processing tool 8 of the processing machine M to perform processing.

In this way, the machining of the work W is performed on the alignment stage 1A. At this time, when a pressing force is applied to the work W on the work plate 13 by the processing machine M, the pressing force at the time of machining the work is also applied to the alignment stage 1A. In the alignment stage 1A, small rolling elements 38, 39, etc. of the feed mechanism unit 3 are used in order to precisely and finely adjust the position of the work W, but such a feed mechanism unit 3 has a large size. The load (pressurization) cannot be tolerated, and if a large pressurization is applied, it may be damaged or deformed. In order for the feed mechanism portion 3 to have a structure that can withstand a large pressing force, it is necessary to make the rolling elements 38, 39, etc. large, but this causes a problem that it cannot be adapted to precise and fine movements when adjusting the work position. Therefore, in the alignment stage 1A of the first embodiment, a block member (movement restricting body) that restricts the downward movement of the work plate 13 when a pressing force during machining is applied to the work W placed on the work plate 13 from above. ) 2A is provided.

With reference to FIGS. 1 and 3, the table 12 of the alignment stage 1A is provided with a rectangular opening 121 facing the work plate 13 in the center. The shape of the opening 121 is not limited to a quadrangle, and may be any shape such as another polygonal shape, a circular shape, an elliptical shape, or the like. The block member 2A is inserted between the opening 121 of the table 12 and arranged between the work plate 13 and the base 11. The block member 2A is made of a square columnar member having a height substantially the same as the height from the upper surface of the base 11 to the lower surface of the work plate 13, and is formed of, for example, a material such as metal or plastic. The upper surface shape of the block member 2A is not limited to a quadrangle as in the opening 121, but may be any shape such as another polygonal shape, a circular shape, an elliptical shape, or the like.

The upper surface of the block member 2A is fixed to the lower surface of the work plate 13, and a slight gap d is provided between the lower surface of the block member 2A and the upper surface of the base 11. When no pressing force is applied to the work plate 13 from above, the lower surface of the block member 2A is not in contact with the upper surface of the base 11. Therefore, by providing this gap d, the block member 2A hinders the operation of moving the table 12 supporting the work plate 13 by the feed mechanism unit 3 when adjusting the work position before machining the work at the work placement location P1. There is no such thing. Further, by setting the gap d between the lower surface of the block member 2A and the upper surface of the base 11 to be a slight gap d, for example, about 5 to 20 μm, dust or the like can enter the gap d and the table by the feed mechanism unit 3 can be used. It does not hinder the movement of twelve.
The gap d may be filled with a lubricant such as grease.

As shown in FIG. 4, the alignment unit 10 is conveyed from the work arrangement location P1 (FIG. 4 (a)) to the work processing location P2 (FIG. 4 (b)) by the transfer mechanism 5, and the processing machine M is conveyed at the work processing location P2. The processing tool 8 such as the mold of No. 1 is pressed against the work W on the work plate 13 from above to process the work W. The work plate 13 and the table 12 that supports the work plate 13 sink due to the pressure applied from above during the work processing. However, the downward movement of the table 12 is limited to the distance until the lower surface of the block member 2A abuts on the upper surface of the base 11, that is, the range of the slight gap d. When the lower surface of the block member 2A abuts on the upper surface of the base 11, the pressing force during work processing is received by the base 11 through the block member 2A. Therefore, the table 12 supporting the work plate 13 is applied during work processing. There is almost no pressure. That is, the feed mechanism 3 that supports the table 12 is subjected to the pressing force during the work processing by the amount of movement of the slight gap d, but no larger pressing force is applied. Therefore, the processing machine M can apply a large pressing force to the work W without applying a large pressing force to the feed mechanism portion 3 during the machining of the work. Further, since the feed mechanism unit 3 is not subjected to a load (pressurization) at the time of machining the work, the rolling elements 38, 39 and the like in the feed mechanism unit 3 can be small ones having a small load tolerance. Therefore, the feed mechanism unit 3 can have a configuration suitable for fine and precise movement of the work position adjustment.

Further, the block member 2 supports the work plate 13 from below when the work W is machined, and can appropriately act on the work W without varying the pressing force at the time of machining. Machining accuracy can be performed with high accuracy. In this case, if the width of the upper surface of the block member 2A is substantially equal to or larger than the size of the work W placed on the work plate 13, the pressing force by the processing tool 8 of the processing machine M is applied. The work W can be spread substantially evenly over the entire surface of the work W, and the work W can be reliably machined with high precision by the processing machine M.

From the above, according to the alignment stage 1A of the first embodiment, a large pressing force can be applied to the work W at the time of machining the work, and yet the feed mechanism unit 3 has a configuration suitable for precise and fine movement. be able to.

When the processing of the work W is completed and the processing tool 8 of the processing machine M separates from the work W, the work plate 13 and the table 12 are returned to their original height positions from the downwardly subducted state due to the elasticity of each component. Return. Therefore, the block member 2A also returns and moves upward, and a predetermined gap d is formed again between the lower surface of the block member 2A and the upper surface of the base 11.

In the first embodiment, the upper surface of the block member 2A is fixed to the lower surface of the work plate 13 and a slight gap d is provided between the lower surface and the upper surface of the base 11. However, as a modification of the block member 2A, The lower surface may be fixed to the upper surface of the base 11, and the slight gap d may be provided between the upper surface of the block member 2A and the lower surface of the work plate 13. In the case of this modification, when the pressing force at the time of machining the work is applied to the work plate 13 from above, the downward movement of the table 12 supporting the work plate 13 is until the lower surface of the work plate 13 comes into contact with the upper surface of the block member 2A. The distance is limited to the range of the slight gap d, and the same effect as that of the first embodiment is exhibited. Further, in the case of this modification, since the block member 2A is fixed to the base 11 instead of the work plate 13, the weight load of the block member 2A is not applied to the table 12 that supports the work plate 13. Therefore, since the feed mechanism 3 that supports the table 12 does not receive the weight load of the block member 2A, the feed mechanism unit 3 can smoothly move the table 12 when adjusting the work position.

(Embodiment 2)
As shown in FIG. 5, in the alignment stage 1B of the second embodiment, not only the table 12 but also the base 11 is provided with a quadrangular opening 111 facing the work plate 13 in the center. The block member (movement restricting body) 2B that restricts the downward movement of the work plate 13 is arranged between the work plate 13 and the base F by inserting the openings 121 and 111 of the table 12 and the base 11. .. The block member 2B is composed of a square columnar member having substantially the same height as the height from the upper surface of the base F to the lower surface of the work plate 13, and the upper surface is fixed to the lower surface of the work plate 13 to form the lower surface and the upper surface of the base F. A slight gap (for example, 5 to 20 μm) d is provided between them. When no pressing force is applied to the work plate 13 from above, the lower surface of the block member 2B is not in contact with the upper surface of the base F.

According to the alignment stage 1B of the second embodiment, when the pressing force at the time of machining the work is applied to the work plate 13 from above, the lower surface of the block member 2B moves downward to the upper surface of the base F when the work plate 13 and the table 12 move downward. It is limited to the distance to contact, that is, the range of the slight gap d. When the lower surface of the block member 2B abuts on the upper surface of the base F, the pressing force during work processing is received by the base F through the block member 2B, so that the table 12 supporting the work plate 13 is used during work processing. The pressing force of is almost ineffective. That is, even in the second embodiment, the feed mechanism 3 that supports the table 12 is subjected to the pressing force at the time of machining the work by the movement of the slight gap d, but no larger pressing force is applied. , The same action and effect as in the first embodiment are exhibited. The other configurations and effects in the second embodiment are the same as those in the first embodiment.

(Embodiment 3)
As shown in FIG. 6, in the alignment stage 1C of the third embodiment, the spherical bearing 6 is provided on the bottom surface of the block member 2C in the second embodiment. The spherical bearing 6 has a race portion 61 having an annular concave surface on the inner peripheral surface, and a spherical shaft body 62 arranged on the annular concave surface of the race portion 61 and having a part of the outer peripheral surface cut into a flat surface. The spherical bearing 6 is held in a holding hole 21 provided on the bottom surface of the block member 2C so that the flat surface portion 63 of the spherical shaft body 62 faces outward. The flat surface portion 63 of the spherical bearing 6 is provided with a slight gap (for example, 5 to 20 μm) d facing the upper surface of the base F. A gap (for example, 1 to 3 mm) d1 larger than a slight gap d between the flat surface portion 63 of the spherical bearing 6 and the upper surface of the base F is provided between the bottom surface of the block member 2C and the upper surface of the base F. ing.

In this way, by providing the spherical bearing 6 on the block member 2C, the inclination of the work plate 13 due to the pressurization from the processing machine M is automatically corrected by the spherical bearing 6 at the time of processing the work, and the processing tool 8 of the processing machine M is used. The machined surface and the upper surface of the work plate 13 can be kept parallel. Therefore, even if the work W has a large area, the pressing force at the time of machining the work can be applied evenly, and the machining accuracy can be performed with high accuracy.
The spherical bearing 6 may be provided on the upper surface of the block member 2C, and the spherical bearing 6 may be interposed between the work plate 13 and the block member 2C.

Further, in the third embodiment, the work plate 13 is supported on the table 12 so as to be movable downward by the guide mechanisms 7 erected at the four corners of the table 12. The guide mechanism 7 supports the table 12 in an upwardly urged state and is configured to be movable downward within the range of the upward urging. For example, the sleeve is externally fitted to the shaft and the sleeve is moved from the bottom to the top. Various mechanisms such as a linear motion mechanism that is urged by a spring and a cylinder mechanism can be adopted.

The guide mechanism 7 allows the work plate 13 to move downward independently of the table 12. As a result, when the pressing force at the time of machining the work is applied to the work plate 13 from above, only the work plate 13 moves downward with almost no load applied to the table 12. Therefore, the pressing force at the time of machining the work is received by the base F through the block member 2C without acting on the table 12. Therefore, it is possible to more reliably prevent the pressing force during machining of the work from acting on the feed mechanism 3 arranged between the table 12 and the base 11. Other configurations and effects in the third embodiment are the same as those in the first and second embodiments.
The spherical bearing 6 and / or the guide mechanism 7 can also be applied to the one of the first embodiment.

The present invention is not limited to each of the above embodiments, and various modifications can be made within the scope of the claims and the equivalent range.
The transfer mechanism 5 not only moves the work from the work placement place P1 to the work processing place P2 where pressure machining is performed on the work W, but also causes a place other than the work processing place P2, for example, the work placement place P1 and the work processing place P2. During the period, it can be configured to move and stop from the work processing place P2 to the place of the post-process, the waiting place before the work arrangement place P1, and the work W can be attached / detached to the work W at each moving place. On the other hand, various operations such as application of liquid, heating, and inspection may be performed.
In the present invention, the transport mechanism 5 is an arbitrary requirement, and the present invention can be applied even in a manufacturing process that does not have the transport mechanism 5.

1A, 1B, 1C Alignment stage 2A, 2B, 2C Block member (movement restrictor)
3 Feed mechanism 5 Transport mechanism 6 Spherical bearing 7 Guide mechanism 8 Machining tool 10 Alignment unit 11 Base 12 Table 13 Work plate 14 Strut 21 Holding hole 30 Guide part 31 Lower guide block 32 Middle guide block 33 Upper guide block 34 Bearing 35a 1st Rail part 35b 2nd rail part 36a 1st rail groove part 36b 2nd rail groove part 37 Cage 38, 39 Rolling element 40 Ball screw part 41 Thread part 42 Nut part 43 Bearing part 44 Joint 45 Motor 51 Guide rail 52 Slider 53 Ball screw mechanism part 54 Screw shaft 55 Motor 61 Race portion 62 Spherical shaft body 81 Moving plate 82 Post 111 Opening 121 Opening d Gap F Base M Machining machine P1 Work placement location P2 Work machining location W Work

Claims (4)

A base, a table placed above the base, a work plate supported by the table and on which the work is placed, and a table provided between the base and the table, and the table is oriented in the X-axis direction and the Y-axis with respect to the base. An alignment unit equipped with a feed mechanism that is movable and supported with three degrees of freedom in the direction and the θ rotation direction.
The base installed below the base and
It is provided between the base and the base, and is equipped with a transport mechanism that transports the alignment unit to the base.
The table and base have an opening in the center that faces the work plate.
An alignment stage in which a movement restrictor is arranged between the work plate and the base so as to be inserted through an opening of the table and the base to limit the downward movement of the work plate. In the alignment stage according to claim 1 ,
The movement restricting body is composed of a block member having a length corresponding to the height from the upper surface of the base to the lower surface of the work plate.
An alignment stage in which the upper surface of the block member is fixed to the lower surface of the work plate, and a slight gap is provided between the lower surface of the block member and the upper surface of the base so as not to hinder the movement of the table by the feed mechanism. In the alignment stage according to claim 1 or 2 .
An alignment stage equipped with spherical bearings on the movement control body. In the alignment stage according to any one of claims 1 to 3 ,
The work plate is an alignment stage supported by a guide mechanism that allows it to move downwards on the table.

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