JP7035902B2 - Measurement system, measurement method, and measurement program - Google Patents

Description

It relates to a measurement system, a measurement method, and a measurement program for measuring each of a plurality of measurement parts.

In the field of FA (Factory Automation), a measurement system that measures the shape of a measurement target is known.

As a measurement system for measuring the shape of a measurement target, for example, Japanese Patent Application Laid-Open No. 2016-48195 (Patent Document 1) identifies the position and orientation of the work from an image obtained by imaging the work to be measured, and the work. Disclosed is a technique for obtaining a measured value of height by relatively moving a displacement meter and a work based on the position and orientation of the master image and a measurement point designated with respect to the master image.

Japanese Unexamined Patent Publication No. 2016-48195

However, the measurement system disclosed in Patent Document 1 measures a measurement point in an image obtained by imaging a measurement target with a sensor such as a displacement meter, and changes the image pickup area of the camera to cover a wide range. Not enough consideration was given to making measurements.

It is an object of the present invention to provide a measurement system, a measurement device, and a measurement method suitable for performing a wide range of measurement by changing the measurable range.

According to an example of the present disclosure, a measurement system for measuring each of a plurality of measurement portions is provided. The measurement system includes an image pickup unit, a sensor, a base unit in which the image pickup unit and the sensor are arranged, a change mechanism that changes the relative position between the base unit and the measurement target, an image pickup unit and an image pickup unit with respect to the traveling direction of the base unit. The adjustment mechanism that adjusts the positional relationship of the sensor, the position determining means that determines the measurement position to be measured by the sensor based on the image of the measurement part captured by the image pickup unit, and the position of the image pickup unit with respect to the traveling direction of the base unit. Each of the plurality of measurement parts is passed through the imaging field of view of the imaging unit while being in front of the sensor, and the measurement position determined by the position determining means for each of the plurality of measurement parts passes through the measurement range of the sensor. Including control means for controlling the change mechanism and the adjustment mechanism.

According to this disclosure, the measurement position of the sensor is determined based on the image captured by the image pickup unit located in front of the traveling direction of the base unit, and the measurement range of the sensor is measured according to the determined measurement position. The change mechanism and adjustment mechanism are controlled so that Therefore, after the measurement part is first imaged by the image pickup unit, the sensor passes over the measurement part imaged by the image pickup unit, so that the sensor passes over the measurement part before the image pickup unit. , You can reduce the loss of time and amount of movement. As a result, a measurement system suitable for performing a wide range of measurements by changing the measurable range is provided.

In the above disclosure, the adjusting mechanism may be a rotating mechanism that rotates the base portion.
According to this disclosure, the positional relationship between the image pickup unit and the sensor can be adjusted by a simple mechanism of rotation, so that the adjustment is easy.

In the above disclosure, in the measurement system, for at least one measurement portion among the plurality of measurement portions, even if a plurality of measurement positions are predetermined with respect to the position of the image feature obtained by imaging the measurement portion. good. The position determining means may determine each of the plurality of measurement positions with respect to the position of the image feature by specifying the position of the image feature based on the image of the measurement portion.

According to this disclosure, a plurality of measurement positions are predetermined for one measurement portion, and each of the plurality of measurement positions is determined by one imaging, so that the number of imaging times can be reduced, and as a result, the number of imagings can be reduced. The overall measurement time can be shortened.

In the above disclosure, the sensor may be a displacement sensor.
In the above disclosure, a reference path including the displacement of the changing mechanism and the displacement of the adjusting mechanism associated with the displacement of the changing mechanism may be predetermined. The control means controls the change mechanism and the adjustment mechanism along the reference path so that each of the plurality of measurement portions passes through the imaging field of view of the imaging unit, and the position of each of the plurality of measurement portions is determined. The reference path may be modified so that the measurement position determined by the means passes through the measurement range of the sensor.

According to this disclosure, since the reference route is predetermined, the processing of the entire measurement system can be simplified, and as a result, the processing load in the measurement system can be reduced.

In the above disclosure, the control means may correct the displacement of the adjusting mechanism for each of the plurality of measuring portions without correcting the displacement of the changing mechanism in the reference path.

According to this disclosure, since only the displacement of the adjustment mechanism is corrected, the number of correction targets is small, the processing of the entire measurement system can be simplified, and as a result, the processing load in the measurement system can be reduced.

In the above disclosure, the position-determining means may further include an acquisition means for acquiring the position deviation value of the measurement portion with respect to the reference position determined according to the reference path based on the image of the measurement portion. The measurement system further includes a determination means for determining whether or not the misalignment value acquired by the acquisition means exceeds a predetermined allowable value, and a notification means for notifying the user of the determination result of the determination means. But it may be.

According to this disclosure, it is possible to notify the user when the positional deviation of the measurement portion with respect to the reference position is large and the correction amount of the reference path is large, and it is possible to provide a user-friendly measurement system.

According to another example of the present disclosure, a measurement method for measuring each of a plurality of measurement portions is provided. In this measurement method, the image pickup unit and the sensor are arranged on the base unit, and the relative position between the base unit and the measurement target can be changed, so that the positional relationship between the image pickup unit and the sensor with respect to the traveling direction of the base unit can be changed. It is configured to be adjustable. The measurement method consists of a first step in which the measurement portion passes through the image pickup field of view of the image pickup unit while the position of the image pickup unit is in front of the sensor with respect to the traveling direction of the base unit, and in the first step, the measurement portion is in the image pickup field of view. The second step of determining the measurement position to be measured by the sensor based on the image of the measurement portion obtained when passing through the second step, and the third step in which the measurement position determined in the second step passes through the measurement range of the sensor. The steps from the first step to the third step are performed for each of the plurality of measurement portions including the step of.

According to this disclosure, the measurement position of the sensor is determined based on the image captured by the image pickup unit located in front of the traveling direction of the base unit, and the measurement range of the sensor is measured according to the determined measurement position. The change mechanism and adjustment mechanism are controlled so that Therefore, after the measurement part is first imaged by the image pickup unit, the sensor passes over the measurement part imaged by the image pickup unit, so that the sensor passes over the measurement part before the image pickup unit. , You can reduce the loss of time and amount of movement. As a result, a measurement method suitable for performing a wide range of measurement by changing the measurable range is provided.

According to another example of the present disclosure, a measurement program for measuring each of a plurality of measurement portions is provided. In this measurement program, the image pickup unit and the sensor are arranged on the base unit, and the relative position between the base unit and the measurement target can be changed by the change mechanism. The positional relationship can be adjusted by the adjustment mechanism. The measurement program controls the computer to control the change mechanism and the adjustment mechanism so that the measurement portion passes through the imaging field of view of the imaging unit while the position of the imaging unit with respect to the traveling direction of the base unit is in front of the sensor. The change mechanism and adjustment so that the measurement position measured by the sensor, which is determined based on the image of the measurement part obtained when the measurement part passes through the imaging field of view in the step and the first step, passes through the measurement range of the sensor. The second step of controlling the mechanism is executed for each of the plurality of measurement portions.

According to this disclosure, the measurement position of the sensor is determined based on the image captured by the image pickup unit located in front of the traveling direction of the base unit, and the measurement range of the sensor is measured according to the determined measurement position. The change mechanism and adjustment mechanism are controlled so that Therefore, after the measurement part is first imaged by the image pickup unit, the sensor passes over the measurement part imaged by the image pickup unit, so that the sensor passes over the measurement part before the image pickup unit. , You can reduce the loss of time and amount of movement. As a result, a measurement program suitable for performing a wide range of measurements by changing the measurable range is provided.

According to an example of the present disclosure, a measurement system, a measurement device, and a measurement method suitable for performing a wide range of measurement by changing the measurable range are provided.

The above and other objects, features, aspects and advantages of the present disclosure will become apparent from the following detailed description of the invention as understood in connection with the accompanying drawings.

It is a figure which shows typically the application scene of the measurement system which concerns on this embodiment. It is a schematic diagram which shows the whole structure of the measurement system which concerns on this embodiment. It is a figure which shows the reference path. It is a figure which shows the outline of the correction method of a reference path. It is a flowchart which shows an example of the flow of the measurement process of a measurement system. It is a figure for demonstrating the method of specifying a measurement position. It is a figure for demonstrating the correction method of a reference path and a measurement condition. It is a schematic diagram which shows the hardware composition of an image processing apparatus. It is a schematic diagram which shows an example of the hardware configuration of a controller. It is a schematic diagram which shows an example of the hardware configuration of PLC. It is a figure which shows an example of the functional structure of the measurement system which functions in the correction of a route. It is a figure which shows an example of the functional composition of the measurement system which functions at the time of measurement and at the time of controlling a movement mechanism and a rotation mechanism along a path. It is a figure which shows an example of the functional structure of a setting apparatus 70. It is a figure which shows the measurement system which concerns on the modification. It is a figure which shows the measurement system which concerns on the modification. It is a figure which shows the measurement system which concerns on the modification. It is a figure which shows the measurement system which concerns on the modification. It is a figure for demonstrating the adjustment mechanism which concerns on a modification.

Hereinafter, embodiments according to the present invention will be described with reference to the drawings. In the following description, the same parts and components are designated by the same reference numerals. Their names and functions are the same. Therefore, the detailed description of these will not be repeated. In addition, each embodiment and each modification described below may be selectively combined as appropriate.

§1 Application example An example of a situation in which the present invention is applied will be described with reference to FIG. FIG. 1 is a diagram schematically showing an application scene of the measurement system 1a according to the present embodiment. The measurement system 1a is used to measure each of the plurality of measurement portions. A plurality of measurement portions may be set for one work, or may be set for a measurement target composed of a set of a plurality of works. In the example shown in FIG. 1, one work is set as a measurement target, and a plurality of measurement portions are set on the work.

The measurement system 1a includes an image pickup unit 66a, a sensor 68a, a base unit 62a, an adjustment mechanism 64a, a change mechanism 8a, a position determining means 14, and a control means 17.

The image pickup unit 66a and the sensor 68a are provided on the base unit 62a. The change mechanism 8a changes the relative position between the base portion 62a and the work W. For example, the change mechanism 8a includes an XY stage for moving the work W as shown in FIG. 1, a robot for moving the base portion 62a, and the like.

The adjusting mechanism 64a adjusts the positional relationship between the imaging unit 66a and the sensor 68a with respect to the traveling direction of the base unit 62a. For example, the adjustment mechanism 64a is a rotation mechanism that rotates the base portion 62a. The adjustment mechanism 64a is not limited to the rotation mechanism as long as the positional relationship between the image pickup unit 66a and the sensor 68a with respect to the traveling direction of the base unit 62a can be adjusted.

The position determining means 14 determines the measurement position p based on the image of the measurement portion P captured by the image pickup unit 66a. For example, the measurement position p may be determined from the image of the measurement portion P by setting the measurement position p in advance in association with the position of the measurement portion P, or the measurement conditions may be set in advance and the measurement conditions may be set. The measurement position p may be determined by specifying the position to be satisfied.

The control means 17 controls the change mechanism 8a and the adjustment mechanism 64a. Specifically, the control means 17 adjusts the image pickup unit 66a to be in front and the sensor 68a to be behind with respect to the traveling direction of the base portion 62a, and each of the plurality of measurement portions adjusts the image pickup range of the image pickup unit 66a. Let it pass. Further, for each of the plurality of measurement portions, the control means 17 causes the measurement position p determined by the position determination means 14 to pass through the measurement range of the sensor 68a.

That is, in the measurement system 1a, the measurement position of the sensor 68a is determined by the image pickup unit 66a located in front of the traveling direction of the base unit 62a, and the sensor 68a located behind in the traveling direction of the base unit 62a. The change mechanism 8a and the adjustment mechanism 64a are controlled so as to pass over the measurement position p whose position has been determined. Since the image pickup unit 66a is controlled to be forward and the sensor 68a is to be rearward with respect to the traveling direction of the base portion 62a, the accurate measurement position is specified by the image pickup unit 66a, and then the specified measurement position is displayed. The position can be adjusted so that the sensor 68a passes through. Further, since the sensor 68a passes over the measurement part imaged by the image pickup unit 66a after the measurement part is imaged by the image pickup unit 66a, the sensor 68a passes over the measurement part before the image pickup unit 66a. Compared to, the loss of time and amount of movement can be reduced.

§2 Specific Example Hereinafter, as a more specific application example of the present invention, a more detailed configuration and processing of the measurement system 1 according to the present embodiment will be described.

<A. Overall configuration of measurement system>
FIG. 2 is a schematic diagram showing the overall configuration of the measurement system 1 according to the present embodiment. The measurement system 1 can be used, for example, to measure each of a plurality of measurement portions on the work W which is an object. Here, the "measurement" includes a measurement for the purpose of inspection, and includes a measurement in which the final output is a measured value and a measurement in which the final output is, for example, only the pass / fail of the inspection.

The measurement system 1 includes a measurement device 6, a moving mechanism 8, a PLC (Programmable Logic Controller) 100 that functions as a control device for controlling the measuring device 6 and the moving mechanism 8, a controller 200, a servo driver 300, and an image. It includes a processing device 400 and a driver unit 500.

The measuring device 6 is electrically connected to each of the controller 200, the servo driver 300, and the image processing device 400. The moving mechanism 8 is electrically connected to the driver unit 500. The PLC 100 is connected to each of the controller 200, the servo driver 300, the image processing device 400, and the driver unit 500 via the network NW. The network NW is, for example, a field network. As an example, EtherCAT (registered trademark), EtherNet / IP (registered trademark), and the like are adopted for the network NW.

In the present embodiment, the measurement system 1 is composed of seven devices, but may be composed of six or less, or eight or more. For example, two or more electrically connected devices may be configured as one device. Further, two or more devices connected via the network NW may be connected to each other via an internal bus to form one device.

The measuring device 6 includes a rotating body 62, a rotating mechanism 64, a camera 66, and a displacement sensor 68. The rotating body 62 is an example of the base portion of the present invention, and the camera 66 and the displacement sensor 68 are attached to the rotating body 62.

The rotation mechanism 64 changes the positional relationship between the camera 66 and the displacement sensor 68 with respect to the traveling direction of the rotating body 62 by rotating the rotating body 62. The rotation mechanism 64 is, for example, a servomotor composed of a rotary motor, and rotationally drives the rotating body 62 around an axis parallel to the Z axis. The rotation mechanism 64 is an example of the adjustment mechanism of the present invention. The adjusting mechanism is not limited to the rotating mechanism 64 shown in FIG. 2, as long as the positional relationship between the camera 66 and the displacement sensor 68 with respect to the traveling direction of the rotating body 62 can be changed.

The camera 66 is an image pickup unit that captures each of the measurement portions set on the work W. The displacement sensor 68 is a sensor that measures each of the measurement portions set on the work W.

The moving mechanism 8 is an example of the changing mechanism of the present invention, and by moving the work W, the relative position between the work W and the measuring device 6 is changed. The moving mechanism 8 is, for example, an XY stage capable of giving the work W a translational movement in the horizontal direction. The changing mechanism is not limited to the moving mechanism 8 shown in FIG. 2 as long as the relative position between the work W and the rotating body 62 can be changed, for example, a mechanism for moving the rotating body 62 by a robot or the like, or rotation. It may be a mechanism for moving each of the body 62 and the work W.

The moving mechanism 8 includes an X stage 82X, a Y stage 82Y, and servomotors 84X and 84Y. Each of the servo motors 84X and 84Y is composed of a rotary motor. The servomotor 84X drives the X stage 82X in translation along the X-axis direction. The servomotor 84Y drives the Y stage 82Y in translation along the Y-axis direction.

The PLC 100 controls a controller 200, a servo driver 300, an image processing device 400, and a driver unit 500. Specifically, the PLC 100 causes the camera 66 to sequentially image each of the plurality of measurement portions on the work W, and causes the displacement sensor 68 to measure the measurement position specified based on the image captured by the camera 66.

The controller 200 outputs the measurement result by controlling the displacement sensor 68 according to the measurement command sent from the PLC 100. The output destination may be the PLC 100 or the display unit 232 (see FIG. 9) connected to the controller 200.

The servo driver 300 performs feedback control to the rotation mechanism 64 so that the rotation amount of the rotating body 62 approaches the rotation command sent from the PLC 100.

The image processing device 400 controls the camera 66 in response to a command from the PLC 100, performs various image processing based on the image sent from the camera 66, and sends the processing result to the PLC 100.

The driver unit 500 performs feedback control to the moving mechanism 8 in response to a command from the PLC 100. The driver unit 500 includes servo drivers 500X and 500Y. The servo driver 500X performs feedback control on the servomotor 84X so that the movement amount of the Y stage 82X approaches the movement command. The servo driver 500Y performs feedback control on the servomotor 84Y so that the movement amount of the Y stage 82Y approaches the movement command.

The PLC 100 controls the servo driver 300 and the driver unit 500 so that the camera 66 is in the front and the displacement sensor 68 is in the rear with respect to the traveling direction of the rotating body 62, and at least a part of the measurement portion on the work W is the camera 66. The image processing device 400 is controlled so as to output an image pickup instruction at a timing included in the image pickup field of view. The image processing device 400 and the PLC 100 determine the measurement position of the displacement sensor 68 based on the image captured by the camera 66.

The PLC 100 controls the servo driver 300 and the driver unit 500 so that the determined measurement position passes within the measurement range of the displacement sensor 68, and outputs a measurement instruction at the timing when the measurement position is included in the measurement range of the displacement sensor 68. The controller 200 is controlled so as to do so.

That is, in the measurement system 1, the measurement position of the displacement sensor 68 is determined by the camera 66 located in front of the traveling direction of the rotating body 62, and the displacement sensor 68 located behind in the traveling direction of the rotating body 62. The relative position between the displacement sensor 68 and the work W is adjusted so that the position of the displacement sensor 68 passes over the determined measurement position.

In the present embodiment, a reference path for sequentially imaging a plurality of measurement portions set on the work W is set in advance while maintaining the position of the camera 66 in front of the displacement sensor 68 with respect to the traveling direction of the rotating body 62. It has been decided. The reference path is a change in the relative position between the rotating body 62 and the work W, and a change in the positional relationship between the camera 66 and the displacement sensor 68 with respect to the traveling direction of the rotating body 62 associated with the change in the relative position. including. More specifically, the reference path includes the movement amount of the movement mechanism 8 and the displacement amount of the rotation mechanism 64 associated with the movement amount of the movement mechanism 8. In the measurement system 1, the relative position between the camera 66 and the work W is changed along the reference path, and each time the measurement position is specified based on the image of the measurement portion captured by the camera 66, the displacement is performed. The reference path is appropriately modified so that the measurement position passes through the measurement range of the sensor 68. The "measurement portion" is a portion of the camera 66 located in the front that specifies the measurement position of the displacement sensor 68 located in the rear, and may be continuously set on the work W. , May be discontinuous.

<B. Reference route>
FIG. 3 is a diagram showing a reference route. Although the position of the work W is actually changed by the moving mechanism 8, the position of the rotating body 62 is fixed. Therefore, in order to simplify the explanation, the rotating body 62 is placed on the XY plane above the work W. It is expressed as if it is moving above. In FIG. 3, the solid line is the path L1 showing the change in the relative position between the rotation center O of the rotating body 62 and the work W when the movement mechanism ₈ is controlled according to the reference path. The broken line is the path L2 indicating the change in the relative position between the displacement sensor 68 and the work W when the movement mechanism ₈ and the rotation mechanism 64 are controlled according to the reference path. In addition, in _FIG . ₃ , for convenience, the overlap of the route L1 and the route L2 is eliminated and expressed. Further, in FIG. 3, for convenience, the camera 66 is represented by a quadrangle, and the displacement sensor 68 is represented by a triangle. Further, the measurement position p, the rotating body 62, the camera 66, and the displacement sensor 68 are partially omitted for convenience. Further, in FIG. 3, it is assumed that the first measurement portion P ₁ to the sixth measurement portion P ₆ are set as the measurement portion P.

The reference path is generated, for example, based on the design appearance of the work W. The generation of the reference path determines how the moving mechanism 8 and the rotating mechanism 64 move over time. At this time, the reference path is generated assuming that the work W starts measurement from a predetermined reference state. Here, the reference state is a concept including a relative position between the work W and the rotating body 62 and the posture of the work W with respect to the rotating body 62.

At the time of actual measurement, the measurement of the work W does not always start from the reference state, and the work W is not always as designed. Therefore, even if the movement mechanism 8 and the rotation mechanism 64 are controlled according to the reference path, as shown in FIG. 3, depending on the deviation from the reference state and the deviation between the installed work W and the design value of the work W. The measurement range of the displacement sensor 68 does not pass on the measurement position p of the measurement portion P. Even if the movement mechanism 8 and the rotation mechanism 64 are controlled according to the reference path, it is assumed that each of the plurality of measurement portions P passes through the imaging range of the camera 66. Here, the fact that the measurement portion P passes through the imaging range means that the camera 66 can image a characteristic portion for specifying the position of the measurement portion P. The imaging range of the camera 66 is wider than the measurement range of the displacement sensor 68.

<C. Correction of reference route>
As shown in FIG. 3, even if the movement mechanism 8 and the rotation mechanism 64 are controlled according to the reference path, the displacement sensor 68 does not pass on the measurement position p of the measurement portion P. A method of modifying the reference route will be described with reference to FIG. FIG. 4 is a diagram showing an outline of a method of modifying a reference route.

Here, the case where the rotating body 62 passes over the first measurement portion P1 will be described as an example. In FIG. 4, the movement of the rotating body 62, the path of the rotation center O, and the path of the displacement sensor 68 are shown separately. Further, in FIG. 4, the path when the movement mechanism 8 and the rotation mechanism 64 are controlled according to the reference path is shown by a broken line, and the corrected path is shown by a solid line.

As shown in FIG. 4, the reference path is corrected by modifying the path of the displacement sensor 68 without changing the path of the rotation center O of the rotating body 62. More specifically, the measurement system 1 in the present embodiment corrects the reference path by changing the temporal movement of the rotation mechanism 64 without changing the temporal movement of the moving mechanism 8 from the time of setting.

The moving mechanism 8 is a mechanism that changes the relative position between the work W and the measuring device 6, whereas the rotating mechanism 64 determines the positional relationship between the camera 66 and the displacement sensor 68 with respect to the traveling direction of the rotating body 62. It is a mechanism to change. That is, the reference path is corrected by changing the movement of the rotation mechanism 64 over time without changing the movement of the movement mechanism 8 over time, that is, the path of the relative position between the work W and the measuring device 6. This means that the reference path is corrected by adjusting the change in the positional relationship between the camera 66 and the displacement sensor 68 with respect to the traveling direction of the rotating body 62 without changing.

In this way, the reference path can be obtained by adjusting only the change in the positional relationship between the camera 66 and the displacement sensor 68 with respect to the traveling direction of the rotating body 62 without changing the path of the relative position between the work W and the measuring device 6. Since the correction is made, the number of correction targets is small, the processing can be simplified, and as a result, the processing load required for the correction can be reduced. More specifically, the calculation required for correction can be simplified. In particular, in the present embodiment, since the reference path is corrected by adjusting only the movement of the rotation mechanism 64 that rotates the rotating body 62, it is sufficient to calculate only one variable called the rotation amount of the rotating body 62. , The calculation required for correction can be further simplified.

<D. Measurement flow>
An example of the flow of the measurement process of the measurement system 1 of the present embodiment will be described with reference to FIG. FIG. 5 is a flowchart showing an example of the flow of the measurement process of the measurement system 1.

The measurement process is a process started based on the fact that the work W is installed on the moving mechanism 8.

In step S1, the PLC 100 controls the moving mechanism 8 and the rotating mechanism 64 according to the set path. The set route is the corrected route when the reference route is modified, and is the reference route when the reference route is not modified.

In step S2, the PLC 100 determines whether or not the imaging conditions of the camera 66 are satisfied. The imaging condition is, for example, that the measurement portion P is located in the imaging range of the camera 66. The amount of movement of the movement mechanism 8 and the amount of rotation of the rotation mechanism 64 when the measurement portion P is located in the imaging range of the camera 66 are predetermined according to a reference path. That is, the imaging condition in the present embodiment is established when the movement amount of the movement mechanism 8 reaches a predetermined target amount and the rotation amount of the rotation mechanism 64 reaches a predetermined target amount.

In step S3, the camera 66 images the measurement portion P according to the image pickup command output from the image processing device 400 based on the image pickup instruction from the PLC 100. At this time, the PLC 100 may output an instruction for stopping the moving mechanism 8 and the rotating mechanism 64.

In step S4, the PLC 100 identifies the measurement position p based on the image captured by the camera 66. The measurement position p is predetermined, for example, in association with the position and posture of the measurement portion P. The image processing device 400 identifies the position and orientation of the measurement portion P from the image captured by the camera 66 by using known pattern matching, and outputs the image to the PLC 100. The PLC 100 specifies the measurement position p from the position and posture of the output measurement portion P. When the shape of the measurement portion P is a shape like a circle that is symmetrical vertically and horizontally, it is not necessary to specify the posture.

In step S5, the PLC 100 modifies the reference path based on the identified measurement position p. Specifically, the PLC 100 modifies the reference path so that the specified measurement position p passes within the measurement range of the displacement sensor 68. Thereby, the movement amount of the movement mechanism 8 and the rotation amount of the rotation mechanism 64 when the specified measurement position p is located within the measurement range of the displacement sensor 68 are specified. In step S5, the PLC 100 may not modify the path after the measurement range of the displacement sensor 68 has passed on the measurement position p. That is, after the measurement range of the displacement sensor 68 has passed on the measurement position p, the movement mechanism 8 and the rotation mechanism 64 are controlled according to the reference path.

In step S6, the PLC 100 determines whether or not the measurement conditions are satisfied. The measurement condition is that the specified measurement position p is located within the measurement range of the displacement sensor 68. More specifically, in step S5, the movement amount of the movement mechanism 8 and the rotation amount of the rotation mechanism 64 when the specified measurement position p is located within the measurement range of the displacement sensor 68 are specified, so that the measurement is performed. The condition is satisfied when the movement amount of the movement mechanism 8 and the rotation amount of the rotation mechanism 64 reach the values specified in step S5.

In step S7, the displacement sensor 68 makes a measurement. The controller 200 receives the signal from the displacement sensor 68 and calculates the measurement result. At this time, the PLC 100 may output an instruction for stopping the moving mechanism 8 and the rotating mechanism 64.

In step S8, the PLC 100 determines whether or not the measurement of all the set measurement portions is completed. The processes from step S2 to step S8 are repeated until it is determined that the measurement of all the set measurement portions is completed, and when it is determined that the measurement of all the set measurement portions is completed, the process is repeated. The measurement process is completed.

<E. Specifying the measurement position>
The PLC 100 and the image processing device 400 specify the measurement position p based on the image captured by the camera 66. FIG. 6 is a diagram for explaining a method of specifying the measurement position p. The image processing device 400 first identifies the position and orientation of the measurement portion P by using known pattern matching. More specifically, the position and posture of the measurement portion P (referred to as "measured position posture SP _m ") are specified by specifying the position and posture of the image feature predetermined for each measurement portion P. be able to. In FIG. 6, the two line segments are the image features of the measurement portion P.

Next, the PLC 100 calculates the amount of misalignment of the measured portion from the actually measured position / posture SP _m . Specifically, the measured position / posture SP _m measured based on the actually captured image and the measurement portion P (referred to as “reference measurement portion P _t ”) obtained under the conditions at the time of setting the reference path. The amount of misalignment is calculated by comparing the position and posture (referred to as "reference position posture SP _t ").

More specifically, the PLC 100 can specify the movement amount of the movement mechanism 8 and the rotation amount of the rotation mechanism 64 when the actually measured position / posture SP _m is acquired. Under the conditions at the time of setting the reference path, the position and posture of the measurement portion when the movement mechanism 8 and the rotation mechanism 64 are controlled by the specified movement amount and rotation amount correspond to the reference position posture SP _t . The PLC 100 acquires the reference position / posture SP _t , and obtains the position deviation amount ΔP from the reference position / posture SP _t according to the equation (1). The reference position / posture SP _t is an example of a reference position determined according to the reference path of the present invention.

The measurement position is predetermined in association with the position of the measurement portion P. In the example shown in FIG. 6, a plurality of measurement positions p are set for one measurement portion P. The measurement position with respect to the reference measurement portion P _t is defined as the reference position sp _t (x _t , y _t ), and the actual measurement position with respect to the measurement portion P is defined as the actual measurement position sp _m (x _m , y _m ).

The measured position sp _m can be calculated by reflecting the misalignment amount ΔP in the reference position sp _t . Specifically, it is calculated based on the equation (2).

In the formula (1), T () represents a conversion formula corresponding to the translational movement, and is determined based on the position shift amount ΔX of the X coordinate and the position shift amount ΔY of the Y coordinate. Further, R () indicates a conversion formula corresponding to rotational movement, and is determined based on the amount of positional deviation Δθ in the rotational direction. In addition, T () and R () can be obtained from the equation (3). That is, R () and T () are calculated based on the reference position / attitude SP _t and the actually measured position / attitude SP _m .

As described above, the PLC 100 and the image processing device 400 specify the actually measured position sp _m based on the image captured by the camera 66. The image processing device 400 may specify the actually measured position sp _m based on the image captured by the camera 66. In this case, the image processing device 400 receives information on the movement amount of the movement mechanism 8 and the rotation amount of the rotation mechanism 64 when the measured position / posture SP _m of the measurement portion P is acquired from the PLC 100.

<F. Correction of reference route>
The PLC 100 modifies the reference path so that the measurement position p passes within the measurement range of the displacement sensor 68. FIG. 7 is a diagram for explaining a method of modifying the reference route.

The solid line passing through the center of FIG. ₇ represents the path L1 through which the rotation center O of the rotating body 62 passes. As described above, in the present embodiment, the reference path is corrected by rotating the rotating body 62 without correcting the path through which the rotation center O of the rotating body 62 passes, and the measurement position p is displaced. It is made to pass within the measurement range of the sensor 68.

Specifically, since the path through which the rotation center O of the rotating body 62 passes is not modified, the path L1 in the camera 66 coordinates can be represented by _a function of the camera coordinates (y = f (x)). Further, since the displacement sensor 68 is fixed to the rotating body 62, it rotates about the rotation center O. Assuming that the distance between the displacement sensor 68 and the center of rotation O is the radius R, the PLC ₁₀₀ measures the measurement position based on the distance r obtained by converting the radius R into a pixel value in the image, the path L1, and the specified measurement position p. The position C (x _c , y _c ) of the rotation center O when the displacement sensor 68 passes on p, and the rotation angle θ _s can be obtained.

Specifically, the PLC 100 obtains an intersection of a circle having a radius r centered on the measurement position p and a straight line of y = f (x) representing the path L ₁ , and with respect to the traveling direction of the rotating body 62. The position C (x _c , y _c ) is calculated by setting the restriction that the position is located in front of the measurement position p. The PLC 100 calculates the rotation angle θ _s based on the calculated position C (x _c , y _c ), the measured position sp _m (x _m , y _m ), and the radius r.

The PLC 100 controls the rotation mechanism 64 so that the rotation angle of the rotating body 62 becomes θ _s by the time the rotation center O of the rotating body 62 passes the position C (x _c , y _c ). Further, in the PLC 100, the measurement condition is satisfied when the rotation center O of the rotating body 62 passes through the position C (x _c , y _c ) and when the rotation angle of the rotating body 62 becomes θ _s . As a matter of fact, a measurement command is output to the controller 200. The measurement command includes information on the position C (x _c , y _c ), and the controller 200 outputs the measurement result based on the signals from the displacement sensor 68 at the position C (x _c , y _c ) and the position C. Calculate and output.

<G. Hardware configuration>
Next, the hardware configurations of the various devices constituting the measurement system 1 for realizing the measurement described above will be described.

(G1. Hardware configuration of image processing device)
FIG. 8 is a schematic diagram showing a hardware configuration of the image processing apparatus 400. The image processing device 400 includes a processor 402 such as a CPU (Central Processing Unit) and an MPU (Micro-Processing Unit), a RAM (Random Access Memory) 404, a display controller 406, a system controller 408, and I / O (Input). Output) Includes a controller 410, a hard disk 412, a camera interface 414, a controller interface 418, a communication interface 420, and a memory card interface 422. Each of these parts is connected to each other so as to be capable of data communication, centering on the system controller 408.

The processor 402 realizes the desired arithmetic processing by exchanging programs (codes) and the like with the system controller 408 and executing them in a predetermined order.

The system controller 408 is connected to the processor 402, RAM 404, display controller 406, and I / O controller 410 via buses, and exchanges data with each unit and processes the entire image processing device 400. Control.

The RAM 404 is typically a volatile storage device such as a DRAM (Dynamic Random Access Memory), and is a program read from a hard disk 412, an image (image data) acquired by a camera 66, and a process for the image. Holds results and work data.

The display controller 406 is connected to the display unit 432, and outputs signals for displaying various information to the display unit 432 according to an internal command from the system controller 408.

The I / O controller 410 controls data exchange with a recording medium or an external device connected to the image processing device 400. More specifically, the I / O controller 410 is connected to the hard disk 412, the camera interface 414, the input interface 416, the controller interface 418, the communication interface 420, and the memory card interface 422.

The hard disk 412 is an example of a storage device and includes an image processing program 440 and a project file 442 executed by the processor 402. The storage device is not limited to a non-volatile magnetic storage device such as a hard disk 412, but may be a semiconductor storage device such as a flash memory, or an optical storage device such as a DVD-RAM (Digital Versatile Disk Random Access Memory). There may be.

The image processing program 440 is a program for executing a process for acquiring an image according to an image pickup command from the PLC 100 and a process for performing pattern matching. More specifically, the image processing program 440 executes processing for specifying the position and orientation of the measurement portion P according to the setting conditions stored in the project file 442. The image processing program 440 may be provided by being incorporated into a part of another program. In that case, the image processing program 440 itself executes predetermined processing in cooperation with other programs. That is, the image processing program 440 may be in a form incorporated in such another program. Alternatively, a part or all of the functions provided by executing the image processing program 440 may be implemented as a dedicated hardware circuit.

The camera interface 414 corresponds to an input unit that receives image data generated by photographing the work W, and mediates data transmission between the camera 66 and the processor 402. More specifically, the camera interface 414 can be connected to one or more cameras 66, and a shooting instruction is output from the processor 402 to the camera 66 via the camera interface 414. As a result, the camera 66 captures the subject and outputs the generated image to the processor 402 via the camera interface 414.

The input interface 416 mediates data transmission between the processor 402 and an input device such as a keyboard 434, a mouse, a touch panel, and a dedicated console.

The controller interface 418 mediates data transmission between the PLC 100 and the processor 402. More specifically, the controller interface 418 transmits information related to the state of the production line controlled by the PLC 100, information related to the work W, an image pickup command, and the like to the processor 402.

The communication interface 420 mediates data transmission between the processor 402 and other personal computers, server devices, and the like (not shown). The communication interface 420 typically comprises Ethernet (registered trademark), USB (Universal Serial Bus), or the like.

The memory card interface 422 mediates data transmission between the processor 402 and the memory card 436, which is a recording medium. The memory card 436 is distributed in a state in which an image processing program 440 or the like executed by the image processing device 400 is stored, and the memory card interface 422 reads these programs from the memory card 436. The memory card 436 can be used from a general-purpose semiconductor storage device such as SD (Secure Digital), a magnetic recording medium such as a flexible disk, an optical recording medium such as a CD-ROM (Compact Disk Read Only Memory), or the like. Become. Alternatively, a program downloaded from a distribution server or the like may be installed in the image processing device 400 via the communication interface 420.

(G2. Hardware configuration of controller 200)
With reference to FIG. 9, the hardware configuration of the controller 200 that controls the displacement sensor 68 will be described. FIG. 9 is a schematic diagram showing an example of the hardware configuration of the controller 200.

The controller 200 includes a processor 202 such as a CPU (Central Processing Unit) and an MPU (Micro-Processing Unit), a RAM (Random Access Memory) 204, a display controller 206, a system controller 208, and I / O (Input Output). It includes a controller 210, a hard disk 212, a sensor interface 214, a controller interface 218, a communication interface 220, and a memory card interface 222. Each of these parts is connected to each other so as to be capable of data communication, centering on the system controller 208.

The processor 202 realizes the desired arithmetic processing by exchanging programs (codes) and the like with the system controller 208 and executing them in a predetermined order.

The system controller 208 is connected to the processor 202, RAM 204, display controller 206, and I / O controller 210 via a bus, and exchanges data with each unit and processes the entire image processing device 400. Control.

The RAM 204 is typically a volatile storage device such as a DRAM (Dynamic Random Access Memory), with respect to a program read from a hard disk 212, an image (image data) acquired by a displacement sensor 68, and an image. Holds processing results and work data.

The display controller 206 is connected to the display unit 232, and outputs signals for displaying various information to the display unit 232 according to an internal command from the system controller 208.

The I / O controller 210 controls data exchange with a recording medium or an external device connected to the controller 200. More specifically, the I / O controller 210 is connected to the hard disk 212, the sensor interface 214, the input interface 216, the controller interface 218, the communication interface 220, and the memory card interface 222.

The hard disk 212 is an example of a storage device and includes a measurement program 240 executed by the processor 202. The storage device is not limited to a non-volatile magnetic storage device such as a hard disk 212, but may be a semiconductor storage device such as a flash memory, or an optical storage device such as a DVD-RAM (Digital Versatile Disk Random Access Memory). There may be.

The measurement program 240 outputs a process of acquiring a signal from the displacement sensor 68 according to a measurement command from the PLC 100, a process of calculating a measurement result for the measurement portion P based on the acquired signal, and a process of calculating the calculated measurement result. It is a program for executing processing. The measurement program 240 may be provided by being incorporated into a part of another program. In that case, the measurement program 240 itself executes a predetermined process in cooperation with another program. That is, the measurement program 240 may be in a form incorporated in such another program. Alternatively, a part or all of the functions provided by executing the measurement program 240 may be implemented as a dedicated hardware circuit.

The sensor interface 214 corresponds to an input unit that receives a signal from the displacement sensor 68 and an output unit that outputs a measurement instruction to the displacement sensor 68, and mediates data transmission between the displacement sensor 68 and the processor 202. More specifically, the sensor interface 214 can be connected to one or more displacement sensors 68, and a measurement instruction is output from the processor 202 to the displacement sensor 68 via the sensor interface 214. As a result, light is projected from the light projecting unit 61 of the displacement sensor 68 toward the measurement position p, and a signal from the light receiving unit 63 that receives the light reflected at the measurement position p is sent to the processor 202 via the sensor interface 214. It is output.

The input interface 216 mediates data transmission between the processor 202 and an input device such as a keyboard 234, a mouse, a touch panel, and a dedicated console.

The controller interface 218 mediates data transmission between the PLC 100 and the processor 202. More specifically, the controller interface 218 transmits information related to the state of the production line controlled by the PLC 100, information related to the work W, an imaging command, and the like to the processor 202.

The communication interface 220 mediates data transmission between the processor 202 and other personal computers, server devices, and the like (not shown). The communication interface 220 typically comprises Ethernet (registered trademark), USB (Universal Serial Bus), or the like.

The memory card interface 222 mediates data transmission between the processor 202 and the memory card 236, which is a recording medium. The memory card 236 is distributed in a state in which the measurement program 240 or the like executed by the controller 200 is stored, and the memory card interface 222 reads these programs from the memory card 236. The memory card 236 is derived from a general-purpose semiconductor storage device such as SD (Secure Digital), a magnetic recording medium such as a flexible disk, an optical recording medium such as a CD-ROM (Compact Disk Read Only Memory), and the like. Become. Alternatively, a program downloaded from a distribution server or the like may be installed in the image processing device 400 via the communication interface 420.

(G3. Hardware configuration of PLC100)
The hardware configuration of the PLC 100 will be described with reference to FIG. FIG. 10 is a schematic diagram showing an example of the hardware configuration of the PLC 100.

The PLC 100 includes a chipset 112, a processor 114, a non-volatile memory 116, a main memory 118, a system clock 120, a memory card interface 122, a communication interface 128, an internal bus controller 130, and a fieldbus controller 138. including. The chipset 112 and the other components are each coupled via various buses.

The processor 114 and chipset 112 typically have a configuration that follows a general purpose computer architecture. That is, the processor 114 interprets and executes the instruction code sequentially supplied from the chipset 112 according to the internal clock. The chipset 112 exchanges internal data with various connected components and generates instruction codes necessary for the processor 114. The system clock 120 generates a system clock having a predetermined period and outputs the system clock to the processor 114. The chipset 112 has a function of caching data and the like obtained as a result of executing arithmetic processing on the processor 114.

The PLC 100 has a non-volatile memory 116 and a main memory 118 as storage means. The non-volatile memory 116 non-volatilely holds an OS, a system program, a user program 140, log information, and the like. The main memory 118 is a volatile storage area, holds various programs to be executed by the processor 114, and is also used as a working memory when executing various programs.

The user program 140 is a program created by the user, and is sent from an external personal computer for setting connected via the communication interface 128, or distributed in a state of being stored in the memory card 124.

The PLC 100 has a communication interface 128, an internal bus controller 130, and a fieldbus controller 138 as communication means. These communication circuits transmit and receive data.

The communication interface 128 exchanges data with the controller 200 and the image processing device 400. As an example, the PLC 100 outputs an image pickup instruction to the image processing device 400 via the communication interface 128. Alternatively, the PLC 100 receives the measurement result regarding the position and orientation of the measurement portion P from the image processing device 400 via the communication interface 128. Further, the PLC 100 outputs a measurement instruction to the controller 200 via the communication interface 128.

The internal bus controller 130 controls the exchange of data via the internal bus 126. More specifically, the internal bus controller 130 includes a DMA (Dynamic Memory Access) control circuit 132, an internal bus control circuit 134, and a buffer memory 136.

The memory card interface 122 connects a memory card 124 that can be attached to and detached from the PLC 100 and a processor 114.

The fieldbus controller 138 is a communication interface for connecting to a field network. The PLC 100 is connected to the servo driver 300 and the driver unit 500 via the fieldbus controller 138.

<H. Function configuration>
The entire function of the measurement system 1 of the present embodiment will be described with reference to FIGS. 11 and 12. FIG. 11 is a diagram showing an example of the functional configuration of the measurement system 1 that functions in the modification of the route. FIG. 12 is a diagram showing an example of the functional configuration of the measurement system 1 that functions at the time of measurement and at the time of controlling the movement mechanism and the rotation mechanism along the path. The various functions of the PLC 100 are realized by executing the user program 140. Various functions of the image processing apparatus 400 are realized by executing processing according to the image processing program 440 and the project file 442.

(H1. Correction of route)
The image processing device 400 includes an image pickup control unit 42, a position / attitude measurement unit 44, and model image data 46.

The model image data 46 is data included in the project file 442 and is generated by making settings for generating a reference route. The model image data 46 is image data showing image features predetermined for each measurement portion P. The model image data 46 is stored in association with a measurement number for identifying each of the plurality of measurement portions P.

The image processing apparatus 400 measures the position and posture of the measurement portion P based on the image pickup command sent from the PLC 100 and the measurement number of the measurement portion P included in the image pickup field, and the actual measurement position and posture shown in FIG. Obtain SP _m .

Specifically, the image pickup control unit 42 instructs the camera 66 to take an image according to an image pickup command from the PLC 100.

The position / attitude measurement unit 44 compares the image data obtained by the camera 66 taking an image according to the image pickup instruction from the image pickup control unit 42 with the model image data 46 corresponding to the measurement number sent from the PLC 100. , The position and posture of the measurement portion P are measured, and the measured position and posture SP _m are obtained. The measured position / posture SP _m measured by the position / posture measuring unit 44 is transmitted to the PLC 100.

The PLC 100 includes an image pickup condition determination unit 12, an image pickup condition data 182, a position / attitude acquisition unit 142, a position / attitude data 184, a position shift amount calculation unit 144, a measurement position calculation unit 146, and a measurement position data 186. The measurement point calculation unit 162, the route data 190, the rotation angle calculation unit 164, the movement amount calculation unit 166, the trajectory correction unit 168, the measurement condition correction unit 170, and the measurement condition data 196 are provided.

The PLC 100 acquires an encoder value from each servo driver 300, 500X, 500Y for each control cycle. Each of the moving mechanism 8 and the rotating mechanism 64 is provided with an encoder for each servomotor. The encoder generates a pulse signal according to the movement amount of the servo motor, and measures the movement amount as an encoder value. That is, the encoder value from the servo driver 300 corresponds to the amount of rotational movement from the initial position of the rotating body 62. The encoder value from the servo driver 500X corresponds to the translational movement amount from the initial position of the X stage 84X. The encoder value from the servo driver 500Y corresponds to the translational movement amount from the initial position of the Y stage 84Y.

The imaging condition data 182 is data indicating imaging conditions, is information obtained by generating a reference path, and is stored for each measurement portion P. The imaging condition is, for example, a combination of the rotational movement amount of the rotating body 62 when the measurement portion P is located in the imaging range of the camera 66, the translational movement amount of the X stage 84X, and the translational movement amount of the Y stage 84Y. .. The imaging condition data 182 is composed of a combination of a measurement number for identifying the measurement portion P and an imaging condition of the measurement portion P indicated by the measurement number.

The imaging condition determination unit 12 determines whether or not the imaging condition is satisfied based on the encoder value acquired for each control cycle and the imaging condition data 182. When the image pickup condition determination unit 12 determines that the image pickup condition is satisfied, the image pickup condition determination unit 12 sends an image pickup command to the image pickup control unit 42 and sets the measurement number of the measurement unit P corresponding to the established image pickup condition to the position / attitude measurement unit 44. Send to.

The position / attitude acquisition unit 142 is a measurement unit obtained under the conditions at the time of setting the reference path based on the relative position between the camera 66 and the moving mechanism 8 at the time of imaging of the camera 66 and the position / attitude data 184. Acquire the position and posture of P. Specifically, the position / posture acquisition unit 142 acquires the reference position / attitude SP _t shown in FIG.

The relative position between the camera 66 and the moving mechanism 8 at the time of imaging of the camera 66 is the camera position, and is estimated by the imaging condition determination unit 12 based on the encoder value at the timing when the camera 66 images the measurement portion P.

The position / posture data 184 is data showing the relationship between the camera position and the reference position / posture SP _t , and is based on the data showing the surface of the work W used when setting the reference path and the installation position of the work W at the time of setting. Can be obtained.

The position / attitude acquisition unit 142 acquires the reference position / attitude SP _t corresponding to the camera position estimated by the image pickup condition determination unit 12 from the position / attitude data 184.

The position shift amount calculation unit 144 is based on the actually measured position / posture SP _m obtained from the position / posture measurement unit 44 and the reference position / posture SP _t acquired by the position / posture acquisition unit 142 according to the above equation (1). The misalignment amount ΔP is calculated.

The measurement position calculation unit 146 is based on the measurement position data 186 showing the correspondence relationship between the reference measurement portion P _t and the reference position sp _t and the position shift amount ΔP according to the above equation (2), and the actual measurement position sp _m . Is calculated. The measurement position data 186 is data in which the measurement portion P and the camera coordinate value (sp _t ) of the measurement position p set for the measurement portion P are associated with each other, and is indicated by the measurement number and the measurement number. It is data that is composed of a combination with the reference position _sp corresponding to the measurement portion and is generated when the measurement conditions are set. The measurement position calculation unit 146 acquires the reference position sp _t corresponding to the measurement number from the measurement position data 186 based on the measurement number of the measurement portion P to be measured, and the position with respect to the acquired reference position _sp . The measured position sp _m is calculated by reflecting the deviation amount ΔP.

The measurement point calculation unit 162 calculates the position C (x _c , y _c ) of the rotation center O when the displacement sensor 68 passes over the measurement position p. The measurement point calculation unit 162 has a position C in the camera coordinate system based on the actual measurement position _spm calculated by the measurement position calculation unit 146 and the translational movement data 192 indicating the path through which the rotation center O of the rotating body 62 passes. Calculate (x _c , y _c ).

The path data 190 is data including a change in the relative position between the work W and the rotating body 62 and a change in the relative position between the work W and the displacement sensor 68. Specifically, the path data 190 includes translational movement data 192 showing the movement of the movement mechanism 8 over time and rotation movement data 194 showing the movement of the rotation mechanism 64 over time.

The translational movement data 192 corresponds to data indicating a change in the relative position between the work W and the rotating body 62, in other words, it can be said to be a path in which the rotation center O of the rotating body 62 moves on the work W, and is shown in FIG. _Corresponds to route L1.

The measurement point calculation unit 162 represents the path L1 as _a function (y = f (x)) of the camera coordinate system based on the translational movement data 192, and has a circle with _a radius r centered on the measurement position p and the path L1. The position C is calculated by finding the intersection with.

The rotation angle calculation unit 164 includes a position C calculated by the measurement point calculation unit 162, _a function (y = f (x)) of the camera coordinate system of the path L1 represented based on the translational movement data 192, and an actual measurement position. The rotation angle θ _s is calculated based on sp _m .

The movement amount calculation unit 166 has a translational movement amount (ΔX, ΔY) of the movement mechanism 8 when the rotation center O is located on the position C of the camera coordinate system, and a rotation movement amount of the rotation mechanism 64 having a rotation angle θ _s . (Δθ) and is calculated.

The orbit correction unit 168 corrects the rotational movement data 194 in association with the translational movement data 192 so that the rotational movement amount (Δθ) is reached by the time the translational movement amount (ΔX, ΔY) obtained by the movement amount calculation unit 166 is reached. do.

The measurement condition correction unit 170 corrects the measurement condition data 196 indicating the measurement condition of the displacement sensor 68. Specifically, the measurement condition correction unit 170 sets one measurement condition when the translational movement amount (ΔX, ΔY) obtained by the movement amount calculation unit 166 is reached and the rotational movement amount (Δθ) is reached. ..

As a result, the movement of the rotation mechanism 64 over time and the measurement conditions of the displacement sensor 68 are corrected.

The PLC 100 may further include a determination unit 176. The determination unit 176 determines whether or not the misalignment amount ΔP calculated by the misalignment amount calculation unit 144 exceeds a predetermined allowable value. Here, the predetermined allowable value is a value indicating a range that can be accommodated only by rotating the rotating body 62 and adjusting the relative position between the displacement sensor 68 and the work W, for example. Specifically, when the amount of misalignment is equal to or greater than the value corresponding to the distance R between the displacement sensor 68 and the rotation center O of the rotating body 62, the displacement sensor 68 is measured even if the rotating body 62 is rotated. The measurement position p cannot be positioned within the range.

The determination unit 176 outputs the determination result to the notification unit 178 in order to notify the user of the determination result when the misalignment amount ΔP exceeds a predetermined allowable value. The notification unit 178 can notify the user by various methods such as notification by display, notification by lamp, notification by sound, or notification by outputting a stop signal to stop processing. You may notify by any method.

In the present embodiment, the position / posture measurement unit 44, the position shift amount calculation unit 144, and the measurement position calculation unit 146, which are shown in FIG. 11, realize the function of the position determination means of the present invention. In the present embodiment, the function of the position-determining means is realized by the image processing device 400 and the PLC 100, but may be realized only by the PLC 100, or is realized only by the image processing device 400. It may be one, or it may be realized by three or more devices including other devices.

(H2. Control of movement mechanism and rotation mechanism)
With reference to FIG. 12, the functional configuration of the measurement system 1 that functions when controlling the moving mechanism 8 and the rotating mechanism 64 along the path will be described. The PLC 100 includes a target movement amount designation unit 174.

The target movement amount designation unit 174 designates the target movement amount according to the route data 190. The path data 190 is information for sequentially capturing each of the plurality of measurement portions P by the camera 66 and allowing each of the measurement positions p to pass within the measurement range of the displacement sensor 68, as described above. It is corrected as appropriate every time the measurement part is imaged.

The target movement amount designation unit 174 is the target movement amount MVX, MVY, MVθ of each of the servo drivers 300, 500X, 500Y based on the encoder value sent from each of the servo drivers 300, 500X, 500Y and the route data 190. Is calculated, and a move command is issued to each servo driver 300, 500X, 500Y.

(H3. Measurement by displacement sensor)
With reference to FIG. 12, the functional configuration of the measurement system 1 that functions when measuring with the displacement sensor 68 will be described.

The PLC 100 includes a measurement condition determination unit 172. The measurement condition determination unit 172 determines whether or not the measurement condition is satisfied based on the encoder value acquired for each control cycle and the measurement condition data 196. The measurement condition data 196 is data indicating the measurement conditions, and is the translational movement amount (ΔX, ΔY) and the rotational movement amount (Δθ) when the measurement position and the measurement range of the displacement sensor 68 are located at the measurement position. Consists of combinations. The measurement condition determination unit 172 determines whether or not the movement amount calculated from the encoder value reaches the translational movement amount (ΔX, ΔY) and the rotational movement amount (Δθ) indicated by the measurement condition data 196, and reaches. If it is determined to be present, a measurement instruction is issued to the controller 200.

The controller 200 controls the displacement sensor 68 according to the measurement instruction and obtains the measurement result. The measurement instruction includes the position information of the measurement position p. By measuring the plurality of measurement positions p, the controller 200 can obtain the shape of the portion designated by the plurality of measurement positions p.

<I. Reference route setting>
The measurement system 1 may further include a setting device 70 for setting a reference path, imaging conditions, and a measurement position corresponding to each measurement portion. FIG. 13 is a diagram showing an example of the functional configuration of the setting device 70.

The setting device 70 includes a display unit 71, a storage unit 72, a measurement position determination unit 73, a model image generation unit 74, a route generation unit 75, a movement amount determination unit 76, an imaging condition determination unit 77, and a position. A posture information generation unit 78 and a measurement condition determination unit 79 are provided. The display unit 71 is, for example, a touch panel. The storage unit 72 is, for example, an auxiliary storage device such as a hard disk drive or a solid state drive, and includes a measurement position determination unit 73, a model image generation unit 74, a route generation unit 75, a movement amount determination unit 76, and imaging conditions. A processing program executed by the determination unit 77, the position / attitude information generation unit 78, and the measurement condition determination unit 79, data indicating information regarding setting of a designated route, data obtained by executing the processing program, and the like. Remember.

The measurement position determination unit 73 reads the three-dimensional design data (for example, CAD (Computer-Aided Design) data) indicating the design surface of the work W stored in the storage unit 72, and displays the work W on the display unit 71. A schematic diagram showing the appearance of is displayed. The measurement position determination unit 73 determines the measurement positions corresponding to the plurality of measurement portions and the measurement portions on the work W according to the user input, and generates the measurement position data 186 indicating the correspondence relationship between the measurement portions and the measurement positions.

The model image generation unit 74 generates model image data 46 by storing a model image indicating a measurement portion determined by the measurement position determination unit 73 according to a user's input in association with each measurement portion.

The path generation unit 75 generates a path such that each of the plurality of measurement positions determined by the measurement position determination unit 73 passes within the measurement range of the displacement sensor 68. The route generation unit 75 may input a line connecting each of the measurement positions by the user himself / herself and generate a route according to the input, or may automatically generate a route satisfying a predetermined condition. .. Predetermined conditions include, for example, the shortest route length.

Based on the path generated by the path generation unit 75, the movement amount determination unit 76 determines the displacement of the translational movement amount that can realize the generated path and the displacement of the rotational movement amount associated with the displacement of the translational movement amount. By doing so, the route data 190 is generated.

The imaging condition determination unit 77 is a measurement unit based on the displacement of the translational movement amount determined by the movement amount determination unit 76, the displacement of the rotational movement amount associated with the displacement of the translational movement amount, and the position of the measurement unit. Specifies the combination of the translational movement amount and the rotational movement amount when the camera 66 is located in the imaging range of the camera 66. The imaging condition determination unit 77 determines the combination of the specified translational movement amount and rotational movement amount as the imaging condition, and generates the imaging condition data 182.

The position / posture information generation unit 78 specifies the position and posture of the measurement portion when the measurement portion is imaged under the imaging conditions determined by the imaging condition determination unit 77, and generates the position / posture data 184. Since the relative position between the camera 66 and the work W is specified based on the translational movement amount and the rotational movement amount, the relationship between the translational movement amount, the rotational movement amount, and the position and posture of the measurement portion in the camera coordinate system. Therefore, the relationship may be set as position / attitude data 184.

The measurement condition determination unit 79 determines the displacement of the translational movement amount determined by the movement amount determination unit 76, the displacement of the rotational movement amount associated with the displacement of the translational movement amount, and the measurement position, for each measurement position. The translational movement amount and the rotational movement amount when the measurement position is located within the measurement range of the displacement sensor 68 are specified. The measurement condition determination unit 79 generates measurement condition data 196 using the relationship between the translational movement amount and the rotational movement amount specified for each measurement position as measurement conditions.

Each data (measurement position data 186, model image data 46, path data 190, imaging condition data 182, position / attitude data 184, measurement condition data 196) generated by the setting device 70 is sent to the PLC 100. The PLC 100 sends the model image data 46 to the image processing device 400.

<J. Action / effect>
As described above, in the measurement system 1 of the present embodiment, each of the plurality of measurement portions is imaged and obtained by imaging the camera 66 so as to be located in front of the traveling direction of the rotating body 62. The measurement position to be measured by the displacement sensor 68 is determined based on the image, and the rotation mechanism 64 and the movement mechanism 8 are controlled so that the measurement range of the displacement sensor 68 passes over the determined measurement position. Therefore, the camera 66 is controlled to be forward and the displacement sensor 68 is controlled to be rearward with respect to the traveling direction of the rotating body 62. Therefore, after the accurate measurement position is specified by the camera 66, the measured position is on the specified measurement position. The position can be adjusted so that the displacement sensor 68 passes through. Further, since the displacement sensor 68 passes over the measurement portion imaged by the camera 66 after the measurement portion is imaged by the camera 66, the displacement sensor 68 passes over the measurement portion before the camera 66. In comparison, the loss of time and amount of movement can be reduced.

Further, in the present embodiment, a rotation mechanism 64 for rotating the rotating body 62 is used as an adjusting mechanism for adjusting the positional relationship between the camera 66 and the displacement sensor 68 with respect to the traveling direction of the rotating body 62. As a result, the positional relationship between the camera 66 and the displacement sensor 68 can be adjusted by a simple mechanism of rotation, so that the adjustment can be easily performed.

Further, in the present embodiment, as shown in FIG. 6, a plurality of measurement positions are set for one measurement portion, and by specifying the position of one measurement portion, the corresponding plurality of measurement positions are set. Each of the is specified. As a result, the number of imagings can be reduced, and as a result, the overall measurement time can be shortened.

Further, in the present embodiment, the reference route is predetermined and is modified every time the measurement position is specified. Therefore, the processing of the entire measurement system can be simplified as compared with the case where the reference route is not predetermined, and as a result, the processing load in the measurement system can be reduced.

Further, in the present embodiment, only the displacement amount of the rotation mechanism 64 (rotational movement data 194) is corrected. Therefore, there are few correction targets, and the processing of the entire measurement system can be simplified, and as a result, the processing load in the measurement system can be reduced.

Further, in the present embodiment, it is determined whether or not the misalignment amount ΔP exceeds a predetermined allowable value, and the determination result is notified to the user. Therefore, it is possible to notify the user when the positional deviation of the measurement portion with respect to the reference position is large and the correction amount of the reference path is large, and it is possible to provide a user-friendly measurement system.

<K. Modification example of the method of passing the measurement range of the displacement sensor>
In the present embodiment, of the rotational movement data 194 and the translational movement data 192, only the translational movement data 192 is modified so that the measurement range of the displacement sensor 68 passes over the measurement position. Of the rotational movement data 194 and the translational movement data 192, any of the data may be modified, or only the translational movement data 192 may be modified.

Further, in the present embodiment, the trajectory correction unit 168 corrects the rotational movement data 194 so that the rotational movement amount (Δθ) is reached by the time the translational movement amount (ΔX, ΔY) obtained by the movement amount calculation unit 166 is reached. I did. As a correction method, the time until the translational movement amount is reached may be adjusted, or the time until the rotational movement amount is reached may be adjusted.

Further, in the present embodiment, the reference path is set in advance, the measurement position is specified based on the image captured by the camera 66, and the reference path is appropriately modified so that the measurement range of the displacement sensor 68 is set on the measurement position. I tried to pass. It is not necessary to set the reference route in advance. Specifically, a feature image of the measurement portion is set, the movement mechanism 8 and the rotation mechanism 64 are controlled so as to search for the feature image, and the measurement position is specified each time the feature image is located in the imaging field of view of the camera 66. At the same time, a trajectory may be generated such that the measurement range of the displacement sensor 68 passes over the specified measurement position.

<L. Modification example of measurement system 1>
14 to 17 are diagrams showing a measurement system according to a modified example. The measurement system 1b shown in FIG. 14 differs from the measurement system 1 shown in FIG. 2 in that the relative position between the measurement device 6 and the work W is changed by the robot 52. The robot 52 is controlled by the robot controller 50, and the robot controller 50 controls the robot 52 according to an instruction from the PLC 100.

Further, as a method of changing the relative position between the measuring device 6 and the work W by the robot 52, a method of fixing the work W and moving the measuring device 6 by the robot 52 as shown in FIG. 14 and a method of moving the measuring device 6 by the robot 52 are shown in FIG. As shown, a method of fixing the measuring device 6 and moving the work W by the robot 52 can be mentioned.

Further, as shown in FIG. 16, as a method of changing the relative position between the measuring device 6 and the work W, the measuring device 6 is moved by the robot 52 and the work W is placed on the rotary table 91. You may. That is, the relative position between the measuring device 6 and the work W may be changed by moving both the measuring device 6 and the work W. The rotary table 91 rotates according to the instruction of the robot controller 50. Thereby, the relative position between the work W and the measuring device 6 can be easily changed.

The robot 52 may be a robot other than the vertical articulated robot. For example, as shown in FIG. 17, the Cartesian robot 52a may be used. Further, it may be another robot such as a horizontal articulated robot.

<M. Modification example of adjustment mechanism>
FIG. 18 is a diagram for explaining an adjustment mechanism according to a modified example. In this embodiment, an example is shown in which the positional relationship between the displacement sensor 68 and the camera 66 with respect to the traveling direction of the measuring device 6 is adjusted by the rotation mechanism 64. For example, as shown in FIG. 18, a displacement sensor 68b is installed at the center of rotation of the rotating body 62b, a plurality of cameras 66b are arranged around the displacement sensor 68b, and one of the plurality of cameras 66b is arranged according to the traveling direction. By taking an image with the camera 66b of the above, the measurement portion may be taken with the camera 66b before the displacement sensor 68b. The camera may be installed in the center of the rotating body, and a plurality of displacement sensors may be provided.

Further, as a method of selecting and using one displacement sensor or camera from a plurality of displacement sensors or a plurality of cameras, not only mechanical switching but also optical switching may be performed.

<N. Sensor modification example>
In the present embodiment, a displacement sensor 68 that measures a measurement point designated as a sensor is given as an example. The sensor may be a displacement sensor that measures an arbitrary measurement point on a designated line, or may have a narrower measurement range than an image pickup unit that captures an image for specifying a measurement position. For example, it may be an image sensor. For example, the image sensor is an image sensor having a narrow field of view and a high resolution as compared with the image pickup unit. Further, the sensor is not limited to a sensor for inspecting the appearance, but may be a temperature sensor, a hardness tester, an ultrasonic sensor, or the like.

<O. Other usage examples>
Further, the measurement system in the present embodiment is a system in which one work is set as a measurement target, a plurality of measurement parts are set on the work, and the set measurement parts are sequentially imaged and measured. .. Although an example in which one work is a measurement target has been given, a set of a plurality of works may be set as a measurement target, and a plurality of measurement portions may be set for a measurement target composed of a set of a plurality of works. More specifically, for a measurement target in which each of the plurality of works is arranged at a predetermined position, the position where each work is arranged may be set as a measurement portion, and the work itself may be used as a feature image. Although the position and posture of each arranged work may be different for each work, the position and posture of the work can be specified by the imaging unit, and the position of the sensor can be adjusted according to the specified position and posture.

Further, in the measurement system of the present embodiment, the measurement position is predetermined, but only the measurement portion is predetermined, and the position that satisfies the predetermined measurement condition is set to the image captured by the imaging unit. It may be specified based on the above, and a position satisfying the measurement condition may be set as the measurement position. For example, the visual inspection may be performed with low accuracy based on the image captured by the imaging unit, the position picked up by the visual inspection may be set as the measurement position, and the visual inspection may be performed with high accuracy by the sensor. More specifically, the camera detects scratches and dents, the position of the scratches and dents is specified, and then the depth of the scratches and dents at the specified position is detected by the displacement sensor, and the detected depth is A measurement system may be provided as an application for determining whether or not the inspection criteria are satisfied. In such a measurement system, it is possible to accurately determine whether or not the defect is present.

§3 Addendum As described above, the present embodiment and modified examples disclose the following technical ideas.

<Structure 1>
It is a measurement system (1,1a, 1b) for measuring each of a plurality of measurement parts.
Imaging units (66, 66a, 66b) and
Sensors (68, 68a, 68b) and
The image pickup unit, the base unit (64, 64a) in which the sensor is arranged, and the base unit (64, 64a).
A change mechanism (8,8a) that changes the relative position between the base and the measurement target,
An adjustment mechanism (64, 64a) that adjusts the positional relationship between the image pickup unit and the sensor with respect to the traveling direction of the base unit.
Position-determining means (14,44,144,146) for determining the measurement position to be measured by the sensor based on the image of the measurement portion captured by the image pickup unit, and
Each of the plurality of measurement portions is passed through the imaging field of view of the image pickup unit while the position of the image pickup unit is in front of the sensor with respect to the traveling direction of the base unit, and each of the plurality of measurement portions is described. A measurement system including a control means (174) that controls the change mechanism and the adjustment mechanism so that the measurement position determined by the position determining means passes through the measurement range of the sensor.

<Structure 2>
The measurement system according to configuration 1, wherein the adjustment mechanism is a rotation mechanism (64) that rotates the base portion.

<Structure 3>
For at least one measurement portion among the plurality of measurement portions, the plurality of measurement positions are predetermined with respect to the position of the image feature obtained by imaging the measurement portion.
The position-determining means according to the configuration 1 or 2, wherein the position-determining means determines each of the plurality of measurement positions with respect to the position of the image feature by specifying the position of the image feature based on the image of the measurement portion. Measurement system.

<Structure 4>
The measurement system according to any one of configurations 1 to 3, wherein the sensor is a displacement sensor (68).

<Structure 5>
A reference path consisting of the displacement of the change mechanism and the displacement of the adjustment mechanism associated with the displacement of the change mechanism is predetermined.
The control means controls the change mechanism and the adjustment mechanism along the reference path so that each of the plurality of measurement portions passes through the image pickup field of view of the image pickup unit, and the plurality of measurement portions. For each of the above, the reference path is modified so that the measurement position determined by the position-determining means passes through the measurement range of the sensor (168), according to any one of configurations 1 to 4. Measurement system.

<Structure 6>
The measurement system according to configuration 5, wherein the control means corrects the displacement of the adjustment mechanism in each of the plurality of measurement portions without correcting the displacement of the change mechanism in the reference path.

<Structure 7>
The position-determining means further includes an acquisition means (144) for acquiring a position deviation value of the measurement portion with respect to a reference position determined according to the reference path based on an image of the measurement portion.
A determination means (176) for determining whether or not the misalignment value acquired by the acquisition means exceeds a predetermined allowable value, and
The measurement system according to the configuration 5 or 6, further comprising a notification means (178) for notifying the user of the determination result of the determination means.

<Structure 8>
It is a measurement method for measuring each of multiple measurement parts.
The image pickup unit (66, 66a, 66b) and the sensor (68, 68a, 68b) are arranged in the base unit (64, 64a), and the relative position between the base unit and the measurement target can be changed. The positional relationship between the image pickup unit and the sensor with respect to the traveling direction of the base unit can be adjusted.
The first step (S2) in which the measurement portion passes through the imaging field of view of the imaging unit while the position of the imaging unit with respect to the traveling direction of the base unit is in front of the sensor.
The second step (S4) of determining the measurement position to be measured by the sensor based on the image of the measurement portion obtained when the measurement portion passes through the imaging field of view in the first step.
A third step (S6) in which the measurement position determined in the second step passes through the measurement range of the sensor is provided.
A measurement method in which steps from the first step to the third step are performed for each of the plurality of measurement portions.

<Structure 9>
A measurement program (140) for measuring each of a plurality of measurement parts.
The image pickup unit (66, 66a, 66b) and the sensor (68, 68a, 68b) are arranged in the base unit (64, 64a), and the relative position between the base unit and the measurement target is changed by the mechanism (8, It can be changed by 8a), and the positional relationship between the image pickup unit and the sensor with respect to the traveling direction of the base unit can be adjusted by the adjustment mechanism (64, 64a).
The measurement program is applied to the computer.
A first method of controlling the change mechanism and the adjustment mechanism so that the measurement portion passes through the image pickup field of view of the image pickup unit while the position of the image pickup unit with respect to the traveling direction of the base portion is in front of the sensor. Steps (S1 to S3) and
The measurement position measured by the sensor, which is determined based on the image of the measurement portion obtained when the measurement portion passes through the imaging field of view in the first step, passes through the measurement range of the sensor. A measurement program for executing a second step (S1, S4 to S6) for controlling the change mechanism and the adjustment mechanism for each of the plurality of measurement portions.

It should be considered that the embodiments disclosed this time are exemplary in all respects and not restrictive. The scope of the present invention is shown by the scope of claims rather than the above description, and is intended to include all modifications within the meaning and scope equivalent to the scope of claims.

1,1a, 1b measurement system, 6 measurement device, 8 movement mechanism, 8a change mechanism, 12 image pickup condition determination unit, 14 position determination means, 17 control means, 42 image pickup control unit, 44 position / attitude measurement unit, 46 model image Data, 50 robot controller, 52 robot, 52a orthogonal robot, 61 floodlight, 62, 62b rotating body, 62a base, 63 light receiving unit, 64 rotating mechanism, 64a adjustment mechanism, 66, 66b camera, 66a imaging unit, 68 , 68b displacement sensor, 68a sensor, 70 setting device, 71,232,432 display unit, 72 storage unit, 73 measurement position determination unit, 74 model image generation unit, 75 route generation unit, 76 movement amount determination unit, 77 imaging conditions Determination unit, 78 position / attitude information generation unit, 79 measurement condition determination unit, 82XX stage, 82YY stage, 84X, 84Y servo motor, 91 rotary table, 100 PLC, 112 chipset, 114,202,402 processor, 116 Non-volatile memory, 118 main memory, 120 system clock, 122,222,422 memory card interface, 124,236,436 memory card, 126 internal bus, 128,220,420 communication interface, 130 internal bus controller, 132 control circuit, 134 Internal bus control circuit, 136 Buffer memory, 138 Field bus controller, 140 User program, 142 Position / attitude acquisition unit, 144 Position deviation amount calculation unit, 146 Measurement position calculation unit, 162 Measurement point calculation unit, 164 Rotation angle calculation unit 166 Movement amount calculation unit, 168 Orbit correction unit, 170 Measurement condition correction unit, 172 Measurement condition judgment unit, 174 Target movement amount designation unit, 176 Judgment unit, 178 Notification unit, 182 Imaging condition data, 184 Position / attitude data, 186 measurement position data, 190 route data, 192 translational movement data, 194 rotation movement data, 196 measurement condition data, 200 controller, 210,410 I / O controller, 204,404 RAM, 206,406 display controller, 208,408 system Controller, 212,412 hard disk, 214 Sensor interface, 216,416 input interface, 218,418 controller interface, 234,434 keyboard, 240 measurement program, 300,500X, 500Y servo driver, 400 image processor, 414 camera interface, 440 image processing program, 442 project file, 500 driver unit, W work.

Claims (9)

It is a measurement system for measuring each of multiple measurement parts.
Image pickup unit and
With the sensor
The image pickup unit, the base unit on which the sensor is arranged, and the base unit.
A change mechanism that changes the relative position between the base and the measurement target,
An adjustment mechanism that adjusts the positional relationship between the image pickup unit and the sensor with respect to the relative movement direction of the base unit with respect to the measurement target .
A position-fixing means for determining a measurement position to be measured by the sensor based on an image of the measurement portion captured by the image pickup unit.
While making the position of the image pickup unit in front of the sensor with respect to the relative movement direction of the base unit with respect to the measurement target , each of the plurality of measurement portions is passed through the image pickup field of view of the image pickup unit, and the plurality of measurement portions are passed through the imaging field of view of the image pickup unit. A measurement system including a control means for controlling the change mechanism and the adjustment mechanism so that the measurement position determined by the position determination means for each of the measurement portions of the sensor passes through the measurement range of the sensor. The measurement system according to claim 1, wherein the adjustment mechanism is a rotation mechanism that rotates the base portion. For at least one measurement portion among the plurality of measurement portions, the plurality of measurement positions are predetermined with respect to the position of the image feature obtained by imaging the measurement portion.
The position determining means according to claim 1 or 2, wherein the position determining means determines each of the plurality of measurement positions with respect to the position of the image feature by specifying the position of the image feature based on the image of the measurement portion. Described measurement system. The measurement system according to any one of claims 1 to 3, wherein the sensor is a displacement sensor. A reference path consisting of the displacement of the change mechanism and the displacement of the adjustment mechanism associated with the displacement of the change mechanism is predetermined.
The control means controls the change mechanism and the adjustment mechanism along the reference path so that each of the plurality of measurement portions passes through the image pickup field of view of the image pickup unit, and the plurality of measurement portions. The present invention according to any one of claims 1 to 4, wherein the reference path is modified so that the measurement position determined by the position-determining means passes through the measurement range of the sensor. Measurement system. The measurement system according to claim 5, wherein the control means corrects the displacement of the adjustment mechanism in each of the plurality of measurement portions without correcting the displacement of the change mechanism in the reference path. The position-determining means further includes an acquisition means for acquiring a position deviation value of the measurement portion with respect to a reference position determined according to the reference path based on an image of the measurement portion.
A determination means for determining whether or not the misalignment value acquired by the acquisition means exceeds a predetermined allowable value, and
The measurement system according to claim 5 or 6, further comprising a notification means for notifying the user of the determination result of the determination means. It is a measurement method for measuring each of multiple measurement parts.
The image pickup unit and the sensor are arranged on the base unit, and the relative positions of the base unit and the measurement target can be changed. It is configured so that the positional relationship of the sensors can be adjusted.
A first step in which the measurement portion passes through the imaging field of view of the imaging unit while the position of the imaging unit with respect to the relative movement direction of the base unit with respect to the measurement target is in front of the sensor.
The second step of determining the measurement position to be measured by the sensor based on the image of the measurement portion obtained when the measurement portion passes through the imaging field of view in the first step.
A third step in which the measurement position determined in the second step passes through the measurement range of the sensor is provided.
A measurement method in which steps from the first step to the third step are performed for each of the plurality of measurement portions. It is a measurement program for measuring each of multiple measurement parts.
The image pickup unit and the sensor are arranged on the base unit, and the relative position between the base unit and the measurement target can be changed by the change mechanism, and the image pickup with respect to the relative movement direction of the base unit with respect to the measurement target. The positional relationship between the unit and the sensor can be adjusted by the adjustment mechanism.
The measurement program is applied to the computer.
The change mechanism and the adjustment so that the measurement portion passes through the imaging field of view of the imaging unit while the position of the imaging unit with respect to the relative movement direction of the base unit with respect to the measurement target is in front of the sensor. The first step to control the mechanism and
The measurement position measured by the sensor, which is determined based on the image of the measurement portion obtained when the measurement portion passes through the imaging field of view in the first step, passes through the measurement range of the sensor. A measurement program that causes each of the plurality of measurement portions to execute a change mechanism and a second step of controlling the adjustment mechanism.

Images