JP7068656B2 - Inspection method of wavelength conversion member and its inspection device - Google Patents

Description

The present invention relates to an inspection method for a wavelength conversion member and an inspection device thereof.

It is known that the phosphor-containing glass member can be obtained, for example, by pressurizing or molding a mixture of glass powder and inorganic phosphor powder and firing it. For example, blue light emitted from a blue light source is white. It is used as a wavelength conversion member (emission color conversion member) for converting into light. Here, for example, when the phosphor-containing glass member has a function of absorbing a part of the blue light emitted from the blue light source by the phosphor and converting it into yellow light, the white light is converted by the phosphor. It is obtained by synthesizing the yellow light and the remaining blue light emitted from the blue light source.

This type of phosphor-containing glass member may contain internal defects such as bubbles and foreign substances. Further, when the phosphor-containing glass member contains a diffusing material separately from the fluorescent material for the purpose of improving the diffusivity of light, the diffusing material does not disperse properly and forms aggregates. It may be an internal defect. The presence of internal defects such as bubbles, foreign substances, and agglomerates of diffusing materials may lead to a decrease in luminous efficiency, a variation in luminous color, and a decrease in the strength of the phosphor-containing glass member.

Therefore, in Patent Document 1, the fluorescent substance-containing glass member is irradiated with the inspection light from the irradiation unit, and the fluorescent substance in the fluorescent substance-containing glass member is made to emit light by the inspection light while the image pickup unit is used for imaging. It is disclosed to inspect for defects in body-containing glass members. Here, Patent Document 1 discloses that light having a wavelength of 300 to 495 nm included in the excitation (absorption) wavelength range of the phosphor is used as the inspection light in order to cause the phosphor to emit light.

Japanese Unexamined Patent Publication No. 2013-164371

As disclosed in Patent Document 1, when the fluorophore in the fluorophore-containing glass member is excited, the fluorophore emits yellow light with absorption of blue light emitted from a light source, for example. Due to the absorption of this blue light, the portion corresponding to the phosphor becomes dark, and when the captured image is binarized or the like, it is observed as a black image. On the other hand, internal defects such as bubbles, foreign substances, and agglomerates of diffusing materials are also observed as black images when the captured image is binarized, although the shape of the image may be different. Therefore, when the phosphor is excited to emit light, both the phosphor and the internal defect are observed as a black image, so that it becomes difficult to distinguish between the non-defect fluorescent material and the internal defect, and the inspection accuracy of the internal defect is improved. There is a problem of deterioration.

Such a problem may occur in a wavelength conversion member other than the phosphor-containing glass member as long as it is a wavelength conversion member having a phosphor.

An object of the present invention is to improve the inspection accuracy of internal defects of a wavelength conversion member having a phosphor.

The present invention, which was devised to solve the above problems, is a method for inspecting a wavelength conversion member for inspecting an internal defect of a wavelength conversion member having a phosphor, and has a wavelength of 495 nm from an irradiation unit to the wavelength conversion member. It is characterized in that the wavelength conversion member is imaged by the image pickup unit while irradiating with super inspection light. That is, the fluorophore (for example, inorganic fluorophore powder) used for the wavelength conversion member often has an excitation band or an excitation peak at a wavelength of 495 nm or less. Therefore, if the inspection light having a wavelength of more than 495 nm is used as in the above configuration, the phosphor has very little or no excitation (absorption). In such a state where the excitation in the phosphor is substantially not generated, the inspection light is transmitted without being substantially absorbed by the phosphor, and the portion corresponding to the phosphor is dark and difficult to be imaged. Therefore, the fluorescent substance does not interfere with the inspection, and it is possible to accurately inspect the internal defects of the wavelength conversion member.

Here, the "wavelength conversion member having a phosphor" may be a single member consisting only of a layer having a phosphor, or a composite member formed by laminating a layer having a phosphor and another layer. May be there. The term "layer having a fluorescent substance" refers to the case where a fluorescent substance is contained in a part of the layer (for example, when the fluorescent substance is dispersed inside the layer), the entire layer is fluorescent. It includes the case where it is composed of only a body (for example, the case where the entire layer is composed of a single crystal or a polycrystal of a fluorescent substance). Also, the term "layer" shall include the concepts of both membranes and plates.

In the above configuration, it is preferable to dispose the irradiation unit and the imaging unit so as to face each other with the wavelength conversion member interposed therebetween, and to dispose a diaphragm member that blocks a part of the inspection light between the irradiation unit and the wavelength conversion member. By doing so, the diaphragm member irradiates the inspection light only in a narrow range in the wavelength conversion member. Therefore, the inspection light does not hit the phosphor or diffusing material located far from the defect, and unnecessary scattered light from an unspecified direction that interferes with the inspection is less likely to occur in the wavelength conversion member, resulting in internal defects. Inspection accuracy is further improved.

When arranging the diaphragm member, it is preferable that the diaphragm member has a slit-shaped diaphragm opening. By doing so, while preventing the generation of unnecessary scattered light in the wavelength conversion member, the inspection target area that can be inspected at one time can be expanded as compared with the case where the aperture opening is circular, so that the inspection efficiency can be increased. Can be raised.

When the diaphragm member is provided, the distance between the diaphragm member and the wavelength conversion member may be 1 mm or less, 0.8 mm or less, 0.5 mm or less, 0.3 mm or less, 0.15 mm or less, 0.1 mm or less. preferable. Here, it is assumed that the distance between the diaphragm member and the wavelength conversion member includes zero. In this way, the diaphragm member can be brought close to or in contact with the wavelength conversion member. Therefore, the wavelength conversion member is irradiated with the inspection light that has passed through the diaphragm member before it is greatly spread by diffraction, and the effect of the diaphragm member can be enhanced.

When the diaphragm member is provided, the wavelength conversion member is placed on the upper surface of the support member capable of transmitting inspection light with the irradiation unit, the image pickup unit, and the diaphragm member arranged in a fixed position, and the diaphragm member is placed on the lower surface of the support member. The wavelength conversion member may be moved together with the support member while being in contact with each other. By doing so, by moving the wavelength conversion member in a state of being placed on the upper surface of the support member, the irradiation region and the imaging region of the inspection light are scanned in the wavelength conversion member. Therefore, even when the wavelength conversion member is thin or small, the wavelength conversion member can be easily handled. Further, since the diaphragm member is in contact with the lower surface of the support member, the wavelength conversion member is irradiated with the inspection light that has passed through the diaphragm member before it is greatly spread by diffraction, and the effect of the diaphragm member can be enhanced. Here, the thickness of the support member (when the thickness of the support member differs in the plane, for example, the thickness of the portion of the support member in contact with the wavelength conversion member) is, for example, 500 μm or less, 350 μm or less, 200 μm or less, 100 μm or less. , 85 μm or less is preferable.

In the above configuration, it is preferable that the wavelength conversion member is a phosphor-containing glass member containing a phosphor in the glass.

The present invention, which was devised to solve the above problems, is an inspection device for a wavelength conversion member for inspecting an internal defect of a wavelength conversion member having a phosphor, and inspects the wavelength conversion member for a wavelength of more than 495 nm. It is characterized by including an irradiation unit that irradiates light and an image pickup unit that captures an image of a wavelength conversion member irradiated with inspection light. According to such a configuration, the same function and effect as the corresponding configuration described above can be obtained.

According to the present invention as described above, it is possible to improve the inspection accuracy of internal defects of the wavelength conversion member having a phosphor.

It is a vertical sectional view which shows the inspection apparatus of the wavelength conversion member which concerns on embodiment. It is a top view which shows the fluorescent substance-containing glass plate placed on the support member. It is a top view which shows the diaphragm member. This is an example of a processed image of a segment of a phosphor-containing glass plate. This is an example of a processed image of a segment of a phosphor-containing glass plate. This is an example of a processed image of a segment of a phosphor-containing glass plate. This is an example of a processed image of a segment of a phosphor-containing glass plate.

The inspection method of the wavelength conversion member and the inspection apparatus thereof according to the present embodiment will be described with reference to the drawings. In the following, as the wavelength conversion member, a phosphor-containing glass plate made of a glass layer containing a phosphor in glass will be exemplified.

As shown in FIG. 1, the inspection apparatus takes an image of the irradiation unit 1 that irradiates the fluorescent substance-containing glass plate G in the horizontal position with the inspection light L and the phosphor-containing glass plate G irradiated with the inspection light L. It is provided with an image pickup unit 2 to perform image processing, and an image processing unit 3 to process an image captured by the phosphor-containing glass plate G captured by the image pickup unit 2.

The phosphor-containing glass plate G is obtained, for example, by pressurizing or molding a mixture containing glass powder and inorganic phosphor powder and firing it, and a part of the wavelength of the incident light is another wavelength. Has the function of converting to.

As the glass powder, for example, ZnO-B ₂ O ₃ -SiO ₂ glass powder and SiO ₂ -B ₂ O ₃ -RO glass powder (R is selected from the group consisting of Mg, Ca, Sr and Ba). At least one), SiO ₂ -TIO _{2-Nb 2 O 5} -R'2 O-based glass powder ( _R'is at least one selected from the group consisting of Li, Na and K) and SnO-P ₂ O ₅ series. A type of glass powder selected from the group consisting of glass powder is used.

Inorganic phosphor powders include oxides (including garnet-based powders such as YAG powder), nitrides, oxynitrides, sulfides, acid sulfides, halides (halophosphate powders, etc.) and aluminates. At least one kind of inorganic phosphor powder selected from the group is used. Specifically, as the inorganic phosphor powder that emits yellow fluorescence when irradiated with blue excitation light, (Y, Gd) ₃ (Al, Ga) ₅ O ₁₂ : Ce, La ₃ Si ₆ N ₁₁ : Ce, Examples thereof include Ca-α-sialon: Eu, Li ₂ SrSiO ₄ : Eu and the like. Inorganic phosphor powder generally has an excited band or an excited peak in the ultraviolet to 495 nm.

As shown in FIGS. 1 and 2, in the present embodiment, the phosphor-containing glass plate G to be inspected is divided into a plurality of rectangular segments G1, and a predetermined gap S is formed between the segments G1. It is formed. The phosphor-containing glass plate G is placed on the support member 4. The support member 4 includes a metal frame member 5 and an adhesive transparent film (here, a film capable of transmitting inspection light) attached to the frame member 5, for example, a transparent UV film 6. ing. Each segment G1 of the phosphor-containing glass plate G is attached to a transparent film. The gap S between the segments G1 is formed by stretching the transparent UV film 6 from a state where there is no gap between the segments G1. The stretched state of the transparent UV film 6 is maintained by holding the peripheral edge portion of the transparent UV film by the frame member 5. The phosphor-containing glass plate G may have no gap S between the segments G1 or may be a single glass plate that is not divided into the segments G1. A piece of glass plate may be divided by cutting such as dicing. Further, the support member 4 may be omitted as appropriate.

As shown in FIG. 1, the phosphor-containing glass plate G is mounted on a movable mechanism that moves in the X-axis direction, for example, a belt conveyor 7. The belt conveyor 7 supports the peripheral edge of the frame member 5 of the support member 4, for example, both ends in the Y-axis direction (direction orthogonal to the paper surface), and the phosphor-containing glass plate G moves in the X-axis direction together with the support member 4. It is possible.

The irradiation unit 1 and the image pickup unit 2 are arranged so as to face each other on the same axis (for example, an axis extending in the Z-axis direction) with the phosphor-containing glass plate G interposed therebetween. In the present embodiment, the irradiation unit 1 is arranged at a fixed position on the lower side of the phosphor-containing glass plate G, and the image pickup unit 2 is arranged at a fixed position on the upper side of the phosphor-containing glass plate G.

As the irradiation unit 1, for example, a light source such as a halogen lamp or a semiconductor laser (LD) can be used, but in the present embodiment, a line light source in which light emitting diodes (LEDs) are arranged in the Y-axis direction is used. The inspection light L emitted from the irradiation unit 1 irradiates the phosphor-containing glass plate G from the lower surface side of the phosphor-containing glass plate G.

The wavelength of the inspection light L emitted from the irradiation unit 1 is more than 495 nm, preferably 520 nm or more, 550 nm or more, 600 nm or more, and 900 nm or less, 850 nm or less, 800 nm or less, 750 nm or less, 700 nm or less. preferable. The reason for setting such a wavelength is to make the excitation (absorption) in the phosphor in the phosphor-containing glass plate G extremely small or nonexistent. The inspection light L may be infrared light, but it may be visible light from the viewpoint of increasing the amount of light of the irradiation unit 1 and the sensitivity of the image pickup unit 2 and shortening the exposure time (inspection time). preferable.

The image pickup unit 2 is composed of, for example, a CCD camera, and is arranged at a position where the phosphor-containing glass plate G can be imaged from above in the vertical direction. As the image pickup unit 2, it is preferable to use an area camera or a line camera that includes the full width W1 of the phosphor-containing glass plate G in the Y-axis direction in the image pickup region. In the present embodiment, the imaging region of the imaging unit 2 is formed over the entire width W1 of the phosphor-containing glass plate G in the Y-axis direction. Further, the inspection light L emitted from the irradiation unit 1 is also irradiated to the region corresponding to the imaging region (the entire width W1 of the phosphor-containing glass plate G). By doing so, it is possible to inspect all the segments G1 contained in the phosphor-containing glass plate G simply by moving the phosphor-containing glass plate G together with the support member 4 in the X-axis direction on the belt conveyor 7. ..

The image data of the phosphor-containing glass plate G imaged by the image pickup unit 2 is input to the image processing unit 3, and the image processing unit 3 performs appropriate image processing such as binarization. In this embodiment, the luminance value is adjusted by gamma correction. The processed image of the phosphor-containing glass plate G image-processed by the image processing unit 3 is displayed on a display (not shown), and bubbles (voids), foreign substances (organic fuel shells, etc.), and diffusion are displayed from the displayed processed image. It is possible to determine the presence / absence, size, and type of internal defects in the phosphor-containing glass plate G such as aggregates of materials. Alternatively, an arithmetic process for extracting information (size, etc.) of various defects from the processed image, a storage function for storing allowable reference values such as the size of various defects, and information (size, etc.) for various defects extracted by the calculation. ) And the permissible reference value to determine the quality of the defect in the image processing unit 3, and the image processing unit 3 automatically determines the quality of the defect in the phosphor-containing glass plate G. It may be.

In the present embodiment, a diaphragm member 8 that blocks a part of the inspection light L emitted from the irradiation unit 1 is further arranged at a fixed position on the lower surface side of the phosphor-containing glass plate G. As shown in FIGS. 1 and 3, the diaphragm member 8 has a plate shape and has a slit-shaped diaphragm opening 8a elongated in the Y-axis direction at a central portion. The drawing member 8 is in contact with the transparent UV film 6 of the supporting member 4, and when the phosphor-containing glass plate G is moved together with the supporting member 4 in the X-axis direction by the belt conveyor 7, the upper surface of the drawing member 8 is exposed to transparent UV. The film 6 is designed to slide. A slight gap may be formed between the transparent UV film 6 and the drawing member 8. Further, the diaphragm member 8 does not have to be arranged.

The drawing member 8 is formed of, for example, a resin plate, a metal plate, or the like. The diaphragm member 8 is preferably colored (for example, black) in order to block the inspection light L other than the diaphragm opening 8a.

The size of the drawing member 8 preferably has a dimension in the X-axis direction of 1/4 or more, more preferably 1/3 or more of the dimension of the phosphor-containing glass plate G in the X-axis direction. It is more preferably / 2 or more. More specifically, the dimension of the diaphragm member 8 in the X-axis direction is preferably 2 mm or more, and more preferably 4 mm or more. It is preferable that the dimension of the drawing member 8 in the Y-axis direction is larger than the total width W1 of the phosphor-containing glass plate G. The slit-shaped aperture opening 8a is preferably longer than the total width W1 of the phosphor-containing glass plate G. It is preferable that the inspection light L emitted from the irradiation unit 1 is irradiated only within the range of the diaphragm member 8. That is, it is preferable that the inspection light L is not irradiated to the phosphor-containing glass plate G from the front side of the aperture member 8 in the X-axis direction and the rear side of the rear end.

The width (dimension in the X-axis direction) W2 of the aperture opening 8a is preferably 10 μm or more, 30 μm or more, 50 μm or more, and preferably 300 μm or less, 200 μm or less, 150 μm or less, 100 μm or less. As the width W2 of the aperture opening 8a becomes smaller, the amount of light of the inspection light L transmitted through the aperture opening 8a decreases, but the contrast between the defect in the phosphor-containing glass plate G and other portions tends to improve. be.

The thickness of the drawing member 8 is preferably 0.1 mm or more, 0.2 mm or more, 0.5 mm or more and 1 mm or more, and preferably 2 mm or less and 1.5 mm or less. It is preferable that the thickness of the diaphragm member 8 is as thin as possible so as to appropriately block the inspection light L.

The distance S2 between the drawing member 8 and the phosphor-containing glass plate G is preferably 1 mm or less, 0.8 mm or less, 0.5 mm or less, 0.3 mm or less, 0.15 mm or less, and 0.1 mm or less. .. The diaphragm member 8 should be as close as possible to the phosphor-containing glass plate G. When the diaphragm member 8 is brought into contact with the lower surface of the transparent UV film 6, the interval S2 corresponds to the thickness of the transparent UV film 6. When the support member 4 is omitted, zero is the closest contact to the interval S2. In that case, for example, the end portion of the phosphor-containing glass plate G is gripped and supported.

Next, an example of this inspection method using the inspection device having the above configuration will be described.

First, as shown in FIG. 1, a support member 4 having a fluorescent substance-containing glass plate G attached to the upper surface of a transparent UV film 6 is placed on a belt conveyor 7 by an operator or a robot. In the present embodiment, the frame member 5 is located on the upper surface side of the transparent UV film 6 in this mounted state.

After that, the phosphor-containing glass plate G is moved in the X-axis direction together with the support member 4 by the belt conveyor 7. As a result, all the segments G1 of the phosphor-containing glass plate G are sequentially irradiated with the inspection light L emitted from the irradiation unit 1 and passing through the aperture opening (slit) 8a of the aperture member 8. At this time, the lower surface of the transparent UV film 6 slides while touching the upper surface of the diaphragm member 8 arranged at a fixed position, but since the frame member 5 is located on the upper surface side of the transparent UV film 6, the frame member 5 and the drawing member 8 do not interfere with each other.

Due to such movement of the phosphor-containing glass plate G in the X-axis direction, the irradiation range of the inspection light L and the image pickup range of the image pickup unit 2 move in order, and finally all the segments G1 of the phosphor-containing glass plate G. The captured image of the above is sent to the image processing unit 3. The image processing unit 3 performs image processing on each captured image, and inspects internal defects such as bubbles, foreign substances, and agglomerates of a diffusing material in each segment G1 based on each processed image.

Since the wavelength of the inspection light L is more than 495 nm (for example, red light), the phosphor in the segment G1 has very little or no excitation (absorption). In such a state where the excitation in the phosphor is substantially not generated, the inspection light L is transmitted without being substantially absorbed by the phosphor, and the portion corresponding to the phosphor is dark and difficult to be imaged. Therefore, the fluorescent substance does not interfere with the inspection, and it is possible to accurately detect internal defects such as bubbles, foreign substances, and agglomerates of the diffusing material.

Specifically, when a bubble is contained in the segment G1, since the bubble is a sphere, the processed image, as shown in FIG. 4, is caused by the refraction or scattering of the inspection light L at the interface of the bubble. The portion corresponding to the interface of the bubble is observed as a ring image P1 exhibiting black color. Further, although an example of the processed image is omitted, when the segment G1 contains a black foreign substance such as a charcoal that does not transmit light, the black foreign substance absorbs light and the portion corresponding to the black foreign substance is black. When an image is observed and the agglomerates of the diffusing material are contained in the segment G1, strong scattering occurs in the agglomerates, the inspection light L is attenuated, and a black image is observed in the portion corresponding to the agglomerates. As shown in FIG. 5, when the wavelength of the inspection light L is less than 495 nm (for example, blue light), excitation (absorption) occurs in the phosphor in the segment G1, and a black image is generated in the portion corresponding to the phosphor. P2 is observed and interferes with the inspection of internal defects such as the ring image P1 corresponding to the bubbles.

Further, in the present embodiment, since the inspection light L is irradiated to the segment G1 through the diaphragm opening 8a of the diaphragm member 8, the inspection light L is irradiated only in a narrow range corresponding to the inspection position. Therefore, the inspection light L does not hit the phosphor particles and the diffusing material located at a position away from the defect, and unnecessary scattered light from an unspecified direction that interferes with the inspection is less likely to occur in the segment G1. As a result, when the diaphragm member 8 is arranged as shown in FIG. 6, for example, the ring image P1 corresponding to the bubble is clearly observed in the processed image, but as shown in FIG. 7, the diaphragm member 8 is observed. If not arranged, the ring image P1 corresponding to the bubbles may be unclearly observed in the processed image. Therefore, if the diaphragm member 8 is arranged, the detection accuracy of internal defects is further improved.

The present invention is not limited to the configuration of the above embodiment, and is not limited to the above-mentioned action and effect. The present invention can be modified in various ways without departing from the gist of the present invention.

In the above embodiment, the case where the defect inspection is performed while feeding the phosphor-containing glass plate G in a horizontal posture (preferably a horizontal posture) has been described, but the posture of the phosphor-containing glass plate G is not particularly limited. For example, the defect may be inspected while feeding the phosphor-containing glass plate G in a vertical posture (preferably a vertical posture).

In the above embodiment, a case where the defect inspection position is changed while moving the phosphor-containing glass plate G in the X-axis direction while the irradiation unit 1, the image pickup unit 2 and the diaphragm member 8 are arranged at fixed positions will be described. However, it is not limited to such a movement mode. For example, the fluorophore-containing glass plate G is placed on a movable table or the like that is movable in the XY-axis direction (or XYZ-axis direction), and the fluorophore-containing glass plate G is moved in the X-axis direction and the Y-axis direction to cause defects. The inspection position may be changed. In this case, the diaphragm opening 8a of the diaphragm member 8 may be, for example, a hole shape (for example, a perfect circle or an ellipse). Further, it suffices if there is a relative movement between the inspection optical system including the irradiation unit 1, the image pickup unit 2, and the diaphragm member 8 and the phosphor-containing glass plate G. That is, the inspection optical system may be moved with the phosphor-containing glass plate G arranged at a fixed position, or both the phosphor-containing glass plate G and the inspection optical system may be moved.

In the above embodiment, the inspection device and the inspection method for the fluorescent substance-containing glass plate G as the inspection target have been described, but the present inspection device and the main inspection method have a wavelength having a translucency other than the fluorescent substance-containing glass plate G. It can also be applied to conversion members. Here, examples of the wavelength conversion member other than the phosphor-containing glass plate G include polycrystalline YAG ceramics, phosphor-containing ceramics, phosphor-containing resin, glass plate and phosphor-containing layer (for example, phosphor-containing resin layer). Examples include a composite member with.

1 Irradiation unit 2 Imaging unit 3 Image processing unit 4 Support member 5 Frame member 6 Transparent UV film 7 Belt conveyor 8 Aperture member 8a Aperture opening G Fluorescent material-containing glass plate (wavelength conversion member)
G1 segment L inspection light

Claims (8)

A method for inspecting internal defects of a wavelength conversion member having a phosphor having an excitation band or an excitation peak at a wavelength of 495 nm or less .
The irradiation unit and the imaging unit are arranged so as to face each other via the wavelength conversion member, and a diaphragm member that blocks a part of the inspection light emitted from the irradiation unit is arranged between the irradiation unit and the wavelength conversion member. In the state of
A wavelength conversion member characterized in that the wavelength conversion member is imaged by the image pickup unit while irradiating the wavelength conversion member with the inspection light having a wavelength of more than 495 nm from the irradiation unit via the diaphragm member . Inspection methods. The method for inspecting a wavelength conversion member according to claim 1 , wherein the diaphragm member has a slit-shaped diaphragm opening. The method for inspecting a wavelength conversion member according to claim 1 or 2 , wherein the distance between the diaphragm member and the wavelength conversion member is 1 mm or less. The wavelength conversion member is placed on the upper surface of the support member through which the inspection light can be transmitted, and the diaphragm member is in contact with the lower surface of the support member.
Any of claims 1 to 3, wherein the first system including the irradiation unit, the image pickup unit, and the diaphragm member is relatively moved with respect to the second system including the support member and the wavelength conversion member. The method for inspecting a wavelength conversion member according to item 1. With the irradiation unit, the imaging unit, and the diaphragm member arranged in a fixed position, the wavelength conversion member is placed on the upper surface of the support member, and the diaphragm member is brought into contact with the lower surface of the support member. The method for inspecting a wavelength conversion member according to claim 4 , wherein the wavelength conversion member is moved together with the support member. The method for inspecting a wavelength conversion member according to any one of claims 1 to 5, wherein the wavelength conversion member is a phosphor-containing glass member containing the phosphor in glass. A device for inspecting internal defects of a wavelength conversion member having a phosphor having an excitation band or an excitation peak at a wavelength of 495 nm or less .
An irradiation unit that irradiates the wavelength conversion member with inspection light having a wavelength of more than 495 nm, and an irradiation unit.
An image pickup unit that is arranged to face the irradiation unit via the wavelength conversion member and images the wavelength conversion member irradiated with the inspection light .
An inspection device for a wavelength conversion member, which is arranged between the irradiation unit and the wavelength conversion member and includes a diaphragm member that blocks a part of the inspection light . A support member having an upper surface on which the wavelength conversion member is placed and a lower surface with which the diaphragm member is in contact and capable of transmitting the inspection light, and a support member.
It is further provided with a relative movement mechanism for relatively moving the first system including the irradiation unit, the image pickup unit, and the diaphragm member with respect to the second system including the support member and the wavelength conversion member. The wavelength conversion member according to claim 7.

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