JP7078899B2 - Water- and oil-repellent structure - Google Patents
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本発明は、撥水撥油構造体に係り、更に詳細には、撥水性金属化合物を備えた高耐久の撥水撥油構造体に関する。 The present invention relates to a water-repellent oil-repellent structure, and more particularly to a highly durable water-repellent oil-repellent structure provided with a water-repellent metal compound.
従来、フッ素系オイルやシリコン系オイルなどの撥水材料を多孔質膜に含浸させた撥水性構造体が知られている。上記撥水性構造体は、多孔質膜の内部から撥水材料が染み出して撥水性が維持される。 Conventionally, a water-repellent structure in which a porous membrane is impregnated with a water-repellent material such as a fluorine-based oil or a silicon-based oil is known. In the water-repellent structure, the water-repellent material exudes from the inside of the porous membrane to maintain water repellency.
しかし、撥水材料を含浸させた撥水性構造体では、汚れなどを拭き取る際に受ける磨耗などによって撥水材料が枯渇するため耐久性が低い。 However, the water-repellent structure impregnated with the water-repellent material has low durability because the water-repellent material is depleted due to wear and the like received when wiping off dirt and the like.
特許文献1には、熱可塑性樹脂などで形成した微細突起の表面をセラミック材料で被覆することで、微細突起と該微細突起の表面を被覆するセラミック材料とが相俟って撥水性を発現し、上記微細突起の摩耗及び損傷を防止して、耐摩耗性を向上させた撥水フィルムが記載されている。
In
しかしながら、上記微細突起の表面がセラミック材料で被覆された撥水フィルムにあっては、水以外のオイルなどの液体を撥くことができず、オイルなどが微細突起の間に浸入して微細突起間の空気を追い出すため、撥油性を発現しないだけでなく撥水性が低下してしまう。 However, in the water-repellent film in which the surface of the fine protrusions is coated with a ceramic material, liquids such as oil other than water cannot be repelled, and the oil or the like infiltrates between the fine protrusions to make the fine protrusions. Since the air in between is expelled, not only the oil repellency is not exhibited, but also the water repellency is lowered.
本発明は、このような従来技術の有する課題に鑑みてなされたものであり、その目的とするところは、オイルなどの液体が微細突起間に浸入することを防止し、長期に亘り撥水撥油性を発現できる耐摩耗性に優れた撥水撥油構造体を提供することにある。 The present invention has been made in view of the problems of the prior art, and an object of the present invention is to prevent a liquid such as oil from infiltrating between fine protrusions and to repel water for a long period of time. It is an object of the present invention to provide a water-repellent oil-repellent structure having excellent wear resistance capable of exhibiting oiliness.
本発明者は、上記目的を達成すべく鋭意検討を重ねた結果、撥水性金属化合物で形成された微細突起構造の微細突起の側面に撥油性の表面改質膜を形成することで、上記微細突起間へのオイルの浸入を防止できることを見出し、本発明を完成するに至った。 As a result of diligent studies to achieve the above object, the present inventor has formed an oil-repellent surface-modified film on the side surface of the fine protrusions having a fine protrusion structure formed of a water-repellent metal compound. We have found that it is possible to prevent oil from entering between the protrusions, and have completed the present invention.
即ち、本発明の撥水撥油構造体は、微細突起構造を有する撥水性金属化合物を備える。
そして、上記撥水性金属化合物が、金属酸化物及び/又は金属窒化物であり、
上記金属酸化物及び金属窒化物を構成する金属元素が、ジルコニウム、ハフニウム及び希土類元素から成る群から選ばれた少なくとも一種の金属元素であり、
上記微細突起構造が、錐台形又は柱状であり、その微細突起の側面に撥油性の表面改質膜を有し、上記微細突起の頂点部分で上記表面改質膜から上記撥水性金属化合物が突出して露出したことを特徴とする。
That is, the water-repellent oil-repellent structure of the present invention comprises a water-repellent metal compound having a fine protrusion structure.
The water-repellent metal compound is a metal oxide and / or a metal nitride.
The metal element constituting the metal oxide and the metal nitride is at least one kind of metal element selected from the group consisting of zirconium, hafnium and rare earth elements.
The fine protrusion structure is a cone trapezoid or a columnar shape, has an oil-repellent surface-modified film on the side surface of the fine protrusion, and the water-repellent metal compound protrudes from the surface-modified film at the apex portion of the fine protrusion. It is characterized by being exposed.
本発明によれば撥水性金属化合物で形成された微細突起構造の微細突起の側面に撥油性の表面改質膜を形成することとしたため、長期に亘り撥水撥油性を発現する耐摩耗性が優れた撥水撥油構造体を提供することができる。 According to the present invention, since an oil-repellent surface-modified film is formed on the side surface of the fine protrusions of the fine protrusion structure formed of the water-repellent metal compound, the wear resistance that exhibits the water-repellent and oil-repellent properties for a long period of time can be obtained. It is possible to provide an excellent water-repellent and oil-repellent structure.
<撥水撥油構造体>
本発明の撥水撥油構造体について詳細に説明する。
上記撥水撥油構造体は、撥水性金属化合物から成る微細突起構造を有し、上記微細突起構造が、その微細突起の少なくとも側面に撥油性の表面改質膜を有し、かつ上記微細突起の頂点部分で上記撥水性金属化合物が露出している。
<Water- and oil-repellent structure>
The water-repellent and oil-repellent structure of the present invention will be described in detail.
The water-repellent and oil-repellent structure has a fine protrusion structure made of a water-repellent metal compound, and the fine protrusion structure has an oil-repellent surface-modified film on at least a side surface of the fine protrusion, and the fine protrusion The water-repellent metal compound is exposed at the apex portion of the above.
上記撥水性金属化合物は、無機物から成る撥水材料であり、樹脂などの有機材料に比して硬質で耐摩耗が高い。 The water-repellent metal compound is a water-repellent material made of an inorganic substance, and is harder and has higher wear resistance than an organic material such as a resin.
上記撥水性金属化合物で形成した微細突起構造は、摩滅し難くその形状が維持され、撥水性金属化合物自体の撥水性と微細突起間に保持された空気とが相俟って、長期に亘り撥水性を発現する。 The fine protrusion structure formed of the water-repellent metal compound is hard to wear and maintains its shape, and the water repellency of the water-repellent metal compound itself and the air held between the fine protrusions combine to repel the water for a long period of time. Expresses aqueous.
しかし、上記撥水性金属化合物の撥水性は、上記撥水性金属化合物の電子配置が、水と相互作用する4f軌道が外側の5s2p6軌道の電子にシールドされていることなどによると考えられており、上記撥水性金属化合物はオイルなどの有機液体に濡れてしまう。 However, the water repellency of the water-repellent metal compound is considered to be due to the fact that the electron arrangement of the water-repellent metal compound is such that the 4f orbital interacting with water is shielded by the electrons of the outer 5s2p6 orbital. The water-repellent metal compound gets wet with an organic liquid such as oil.
すると、オイルは微細突起間に入り込んで空気を追い出し、微細突起構造の表面を平滑化し撥水性をも低下させる。 Then, the oil enters between the fine protrusions and expels air, smoothes the surface of the fine protrusion structure, and also reduces the water repellency.
本発明の撥水撥油構造体は、微細突起構造の微細突起側面に撥油性の表面改質膜を有するため、撥油性を発現してオイルが微細突起間に入り込むことが防止され、微細突起間に空気を保持するため、長期に亘り撥水撥油性を発現する。 Since the water-repellent oil-repellent structure of the present invention has an oil-repellent surface modification film on the side surface of the fine protrusions of the fine protrusion structure, it exhibits oil repellency and prevents oil from entering between the fine protrusions. Since it retains air between them, it exhibits water and oil repellency for a long period of time.
また、本発明の撥水撥油構造体は、上記微細突起の頂点部分で上記撥水性金属化合物が露出している。 Further, in the water-repellent and oil-repellent structure of the present invention, the water-repellent metal compound is exposed at the apex portion of the fine protrusion.
表面改質膜を形成する後述するフッ化炭素系材料は、紫外線に曝されることでフッ素ラジカルを発生し、酸化アルミや酸化鉄等の土壌中に含まれる酸化金属が付着すると、上記フッ素ラジカルと酸化金属の酸素とが置き換わってフッ化アルミ等のハロゲン化金属が生じる。 The fluorocarbon-based material that forms the surface modification film, which will be described later, generates fluorine radicals when exposed to ultraviolet rays, and when metal oxides contained in the soil such as aluminum oxide and iron oxide adhere to the fluorine radicals, the above-mentioned fluorine radicals are formed. And oxygen of the metal oxide are replaced to form a metal halide such as aluminum fluoride.
上記ハロゲン化金属は、強いルイス酸であり、フッ化炭素系材料の分子構造中に含まれるエーテル結合を攻撃し、フッ化炭素系材料の分子鎖を切断する触媒として作用する。 The metal halide is a strong Lewis acid that attacks the ether bonds contained in the molecular structure of the fluorocarbon-based material and acts as a catalyst for breaking the molecular chain of the fluorocarbon-based material.
そして、フッ化炭素系材料の分子鎖が切断されると、切断された分子鎖の末端に水酸基が生成され、表面改質膜自体の撥水性が低下し、微細突起間に水が入り込みやすくなって撥水撥油構造体の撥水性を急激に低下させる。 When the molecular chain of the fluorocarbon-based material is cleaved, a hydroxyl group is generated at the end of the cleaved molecular chain, the water repellency of the surface modification film itself decreases, and water easily enters between the fine protrusions. The water repellency of the water repellent and oil repellent structure is sharply reduced.
上記微細突起構造の微細突起の頂点部分は、汚れと最も接触し易い箇所であり、この部分が表面改質膜で被覆されずに撥水性金属化合物が露出していることで、表面改質膜と汚れとの長期的な接触が防止され、頂点部分に表面改質膜の劣化に起因する水酸基が生成されることなく長期に亘り撥水撥油性が維持される。 The apex portion of the fine protrusion of the fine protrusion structure is the part most likely to come into contact with dirt, and this part is not covered with the surface modification film and the water-repellent metal compound is exposed, so that the surface modification film is exposed. Long-term contact between the metal and dirt is prevented, and water repellency and oil repellency are maintained for a long period of time without forming hydroxyl groups due to deterioration of the surface modification film at the apex portion.
上記表面改質膜の膜厚は、2nm以上50nm以下であることが好ましく、5nm以上20nm以下であることがより好ましい。 The film thickness of the surface modification film is preferably 2 nm or more and 50 nm or less, and more preferably 5 nm or more and 20 nm or less.
表面改質膜の膜厚が2nm未満では、微細突起間にオイルが浸入し易くなることがあり、50nmを超えると、表面改質膜が汚れと接触し易くなることがあり、また、微細突起間の間隔が狭くなって突起間に空気を保持し難くなることがある。
上記表面改質膜の膜厚は、断面SEM像により測定できる。
If the film thickness of the surface-modified film is less than 2 nm, oil may easily infiltrate between the fine protrusions, and if it exceeds 50 nm, the surface-modified film may easily come into contact with dirt, and the fine protrusions may be present. It may be difficult to hold air between the protrusions due to the narrowing of the space between them.
The film thickness of the surface modification film can be measured by a cross-sectional SEM image.
上記微細突起の頂点部分で露出する撥水性金属化合物の高さ(h)は、15nm以上25nm以下であることが好ましい。撥水性金属化合物が表面改質膜から上記範囲で突出していることで、表面改質膜が汚れと接触し難く、かつ微細突起間へのオイルの浸入を防止できる。 The height (h) of the water-repellent metal compound exposed at the apex portion of the fine protrusion is preferably 15 nm or more and 25 nm or less. Since the water-repellent metal compound protrudes from the surface-modified film in the above range, the surface-modified film is less likely to come into contact with dirt, and oil can be prevented from entering between the fine protrusions.
上記微細突起の形状としては、円錐や角錐などの錐体状、円錐台や角錐台などの錐台状、円柱や角柱などの柱状などを挙げることができる。 Examples of the shape of the fine protrusions include a cone such as a cone and a pyramid, a frustum such as a frustum and a pyramid, and a column such as a cylinder and a prism.
上記微細突起構造のピッチ(P)は、5nm以上380nm以下であることが好ましく、50nm以上200nm以下であることがより好ましい。 The pitch (P) of the fine protrusion structure is preferably 5 nm or more and 380 nm or less, and more preferably 50 nm or more and 200 nm or less.
微細突起構造のピッチが5nm未満では、表面改質膜を形成することが困難であり、380nmを超えると レイリー散乱等によりヘイズ値が大きくなったり、全光線透過率が低下したりすることがある。 If the pitch of the fine protrusion structure is less than 5 nm, it is difficult to form a surface-modified film, and if it exceeds 380 nm, the haze value may increase due to Rayleigh scattering or the like, or the total light transmittance may decrease. ..
また、隣接する微細突起と微細突起との間の隙間は、上記ピッチの1/10以上1/2であることが好ましい。微細突起間に上記範囲の隙間に空気を保持することで撥水撥油性が向上する。 Further, the gap between the adjacent fine protrusions is preferably 1/10 or more and 1/2 of the pitch. Water repellency and oil repellency are improved by holding air in the gaps in the above range between the fine protrusions.
上記微細突起の高さ(H)は、50~400nmであることが好ましい。
微細突起の高さが50nm未満では、撥水撥油性が充分発現し難くなることがあり、400nmを超えると微細突起の強度が低くなり易くなることがあり、またゾルゲル法などの撥水性金属化合物膜の製造方法によっては、作製時の体積収縮によってクラックが発生し易くなることがある。
The height (H) of the fine protrusions is preferably 50 to 400 nm.
If the height of the fine protrusions is less than 50 nm, it may be difficult to sufficiently develop water repellency and oil repellency, and if it exceeds 400 nm, the strength of the fine protrusions may be likely to decrease, and a water-repellent metal compound such as a sol-gel method may be used. Depending on the method for producing the film, cracks may easily occur due to volume shrinkage during production.
また、微細突起の形状が柱状である場合、その直径(D)は、50nm以上100nm以下であることが好ましい。 When the shape of the fine protrusion is columnar, the diameter (D) is preferably 50 nm or more and 100 nm or less.
上記撥水性金属化合物としては、水の接触角が95°以上である金属酸化物や金属窒化物を使用でき、上記金属酸化物及び金属窒化物の金属元素としては、ジルコニウム、ハフニウム、及び希土類元素を挙げることができる。 As the water-repellent metal compound, a metal oxide or a metal nitride having a water contact angle of 95 ° or more can be used, and as the metal element of the metal oxide or the metal nitride, zirconium, hafnium, and a rare earth element can be used. Can be mentioned.
上記撥油性の表面改質膜としては、表面エネルギーが小さなフッ化炭素系材料を使用することができ、例えば、パーフルオロポリエーテルや、パーフルオロドデシルシランなどを挙げることができる。 As the oil-repellent surface modification film, a fluorocarbon-based material having a small surface energy can be used, and examples thereof include perfluoropolyether and perfluorododecylsilane.
本発明の撥水撥油構造体は、自動車部品や光学部品に好適に使用できる。
上記自動車部品としては、フロントウィンドウ、リヤウィンドウ、サイドウィンドウなど大面積のガラスウィンドウの他、ライトカバー、メーターパネル、ミラー、カメラレンズなどを挙げることができる。
The water- and oil-repellent structure of the present invention can be suitably used for automobile parts and optical parts.
Examples of the automobile parts include a large-area glass window such as a front window, a rear window, and a side window, as well as a light cover, an instrument panel, a mirror, and a camera lens.
<撥水撥油構造体の作製>
上記撥水撥油構造体は、基材上に形成した撥水性金属化合物の膜を微細突起構造にした後、フッ化炭素系材料の表面改質膜を形成し、微細突起の頂点部分の表面改質膜を除去することで作製できる。
<Making a water- and oil-repellent structure>
In the water-repellent and oil-repellent structure, a film of a water-repellent metal compound formed on a substrate is formed into a fine protrusion structure, and then a surface-modified film of a fluorocarbon-based material is formed, and the surface of the apex portion of the fine protrusion is formed. It can be produced by removing the modified film.
上記撥水性金属化合物の膜は、金属アルコキシドを加水分解、脱水縮合反応させるゾル‐ゲル法や、スパッタリング、蒸着などによって形成できる。また、微細突起構造は、フォトリソグラフィー、ウェットエッチング、金属アルコキシドのゾルゲル反応溶液に有機系の相分離剤を加え相分離し焼成する方法、シリカガラス材料中にホウ素などの添加物を加え800℃以上に加熱し相分離させホウ素を酸で溶出させる方法などにより形成できる。 The film of the water-repellent metal compound can be formed by a sol-gel method in which a metal alkoxide is hydrolyzed and dehydrated and condensed, a sputtering method, a vapor deposition or the like. The fine protrusion structure can be obtained by photolithography, wet etching, a method of adding an organic phase separator to a solgel reaction solution of metal alkoxide, phase separation and firing, and adding an additive such as boron to the silica glass material at 800 ° C or higher. It can be formed by a method such as heating the glass to phase separation and eluting boron with an acid.
上記基材としては、透明な板ガラスなどを使用することができる。
上記基材のヘイズ値は0.1%以下であることが好ましく、全光線透過率は93%以上であることが好ましい。基材の全光線透過率及びヘイズ値が上記範囲にあることで、自動車部品や光学部品等に要求される透明性が得られる。
As the base material, transparent flat glass or the like can be used.
The haze value of the base material is preferably 0.1% or less, and the total light transmittance is preferably 93% or more. When the total light transmittance and the haze value of the base material are within the above ranges, the transparency required for automobile parts, optical parts and the like can be obtained.
以下、本発明を実施例により詳細に説明するが、本発明は下記実施例に限定されるものではない。 Hereinafter, the present invention will be described in detail with reference to Examples, but the present invention is not limited to the following Examples.
[実施例1]
(微細突起構造の形成)
ピッチ200nm、高さ220nmの円錐形状が六方細密構造で配置されたシリコン金型に、5%ポリビニルアルコール水溶液をキャストし、水分乾燥後、剥離して反転型を作製した。
[Example 1]
(Formation of fine protrusion structure)
A 5% polyvinyl alcohol aqueous solution was cast into a silicon mold in which a conical shape having a pitch of 200 nm and a height of 220 nm was arranged in a hexagonal fine structure, dried with water, and then peeled off to prepare an inverted mold.
アルゴンを充填したグローブボックス内で、この反転型にガドリニウムアルコキシドを塗布し、塗布面をガラスで挟み、グローブボックスから取り出して、外気に24時間放置し、ガドリニウムアルコキシド膜を仮硬化させた。 Gadolinium alkoxide was applied to this inverted mold in a glove box filled with argon, the coated surface was sandwiched between glasses, taken out of the glove box, and left in the open air for 24 hours to temporarily cure the gadolinium alkoxide film.
次に、仮硬化させたガドリニウムアルコキシド膜を500℃の電気炉内で焼成し、ガドリニウムアルコキシドの脱水反応を促進させると共に、ポリビニルアルコールの反転型を焼失させ、酸化ガドリニウム(Gd2O3)膜を作製した。 Next, the temporarily cured gadolinium alkoxide film is fired in an electric furnace at 500 ° C. to promote the dehydration reaction of the gadolinium alkoxide and to burn out the inverted form of polyvinyl alcohol to form the gadolinium oxide (Gd 2 O 3 ) film. Made.
この酸化ガドリニウム(Gd2O3)膜は、ガドリニウムアルコキシドの脱水反応による収縮し、ピッチ200nm、高さ200nmの微細突起構造を有していた。
また、平滑な酸化ガドリニウム(Gd2O3)膜の水接触角は101°であった。
This gadolinium oxide (Gd 2 O 3 ) film shrank due to the dehydration reaction of gadolinium alkoxide and had a fine protrusion structure having a pitch of 200 nm and a height of 200 nm.
The water contact angle of the smooth gadolinium oxide (Gd 2 O 3 ) film was 101 °.
(表面改質膜の形成)
上記酸化ガドリニウム(Gd2O3)膜を、パーフルオロエーテル(フロロサーフFG5020)中に48時間浸漬し、1mm/sの速さで酸化ガドリニウム(Gd2O3)膜を引き上げた後、100℃、湿度60%の恒温槽で1hr反応させ、超音波洗浄して、膜厚が10nmの表面改質膜を形成した。
(Formation of surface modification film)
The above-mentioned gadolinium oxide (Gd 2 O 3 ) film was immersed in perfluoroether (Fluorosurf FG5020) for 48 hours, and the gadolinium oxide (Gd 2 O 3 ) film was pulled up at a rate of 1 mm / s. The reaction was carried out for 1 hr in a constant temperature bath having a humidity of 60% and ultrasonically washed to form a surface-modified film having a film thickness of 10 nm.
次いで、微細突起先端部分の余剰な表面改質膜を大気圧プラズマにより除去し、酸化ガドリニウム(Gd2O3)を表面改質膜から20nm突出させ、撥水撥油構造体を得た。 Next, the excess surface-modified film at the tip of the fine protrusion was removed by atmospheric pressure plasma, and gadolinium oxide (Gd 2 O 3 ) was projected from the surface-modified film by 20 nm to obtain a water-repellent and oil-repellent structure.
[実施例2]
金属アルコキシドをジルコニウムアルコキシドに替える他は、実施例1と同様にして、酸化ジルコニウム(Zr2O3)膜上に表面改質膜を形成し、表面改質膜から20nm突出させて撥水撥油構造体を得た。
また、平滑な酸化ジルコニウム(Zr2O3)膜の水接触角は103°であった。
[Example 2]
A surface-modified film is formed on the zirconium oxide ( Zr2O3 ) film in the same manner as in Example 1 except that the metal alkoxide is replaced with zirconium alkoxide, and the surface-modified film is projected by 20 nm to repel water and oil. Obtained a structure.
The water contact angle of the smooth zirconium oxide (Zr 2 O 3 ) film was 103 °.
[実施例3]
(微細突起構造の形成)
ガラス基材上に、スパッタリングにより、膜厚が500nmの酸化ホルミウム(Ho2O3)膜を形成し、フォトレジストを塗布し、電子線で直径70nm、ドット間のピッチ200nmのフォトレジスト膜を形成した。
[Example 3]
(Formation of fine protrusion structure)
A holmium oxide (Ho 2 O 3 ) film having a film thickness of 500 nm is formed on a glass substrate by sputtering, a photoresist is applied, and a photoresist film having a diameter of 70 nm and a pitch of 200 nm between dots is formed by an electron beam. did.
フォトレジスト膜を形成した酸化ホルミウム(Ho2O3)膜を、誘導結合型高周波プラズマ(ICP)装置中で、C4F8ガスを用いて20mTorrの圧力でプラズマガスエッチングを行い、直径70nm、高さ200nm、ピッチ200nmのピラー状の微細突起を有する酸化ホルミウム(Ho2O3)膜を得た。
また、平滑な酸化ホルミウム(Ho2O3)膜の水接触角は105°であった。
The holmium oxide (Ho 2 O 3 ) film on which the photoresist film was formed was subjected to plasma gas etching at a pressure of 20 mTorr using C4F8 gas in an inductively coupled high frequency plasma ( ICP) device, and the diameter was 70 nm. A holmium oxide (Ho 2 O 3 ) film having pillar-like fine protrusions having a height of 200 nm and a pitch of 200 nm was obtained.
The water contact angle of the smooth holmium oxide (Ho 2 O 3 ) film was 105 °.
(表面改質膜の形成)
あらかじめ加熱還流させたテトラエトキシパーフルオロドデシルシラン5%液に、酸化ホルミウム(Ho2O3)膜を2時間浸漬し、1mm/sの速さでサンプルを引き上げた後、100℃、湿度60%の恒温槽で1hr反応させ、超音波洗浄し、膜厚が2nmの表面改質膜を形成した。
(Formation of surface modification film)
A holmium oxide (Ho 2 O 3 ) membrane was immersed in a 5% solution of tetraethoxyperfluorododecylsilane that had been heated to reflux in advance for 2 hours, the sample was pulled up at a speed of 1 mm / s, and then the temperature was 100 ° C. and the humidity was 60%. After 1 hr reaction in a constant temperature bath, ultrasonic cleaning was performed to form a surface-modified film having a film thickness of 2 nm.
次いで、微細突起先端部分の余剰な表面改質膜を大気圧プラズマにより除去し、酸化ホルミウム(Ho2O3)を表面改質膜から20nm突出させ、撥水撥油構造体を得た。 Next, the excess surface-modified film at the tip of the fine protrusion was removed by atmospheric pressure plasma, and holmium oxide (Ho 2 O 3 ) was projected from the surface-modified film by 20 nm to obtain a water-repellent and oil-repellent structure.
[実施例4]
スパッタリングにより、膜厚が500nmの酸化イットリウム(Y2O3)膜を形成する他は、実施例3と同様にして、酸化イットリウム(Y2O3)膜上に表面改質膜を形成し、表面改質膜から20nm突出させて撥水撥油構造体を得た。
また、平滑な酸イットリウム(Y2O3)膜の水接触角は100°であった。
[Example 4]
A surface - modified film was formed on the yttrium oxide ( Y2O3) film in the same manner as in Example 3 except that the yttrium oxide (Y2O3) film having a film thickness of 500 nm was formed by sputtering. A water- and oil-repellent structure was obtained by projecting 20 nm from the surface modification film.
The water contact angle of the smooth yttrium acid ( Y2O3 ) film was 100 °.
[実施例5]
(微細突起構造の形成)
金属アルコキシドをハフニウムアルコキシドに替える他は、実施例1と同様にして、酸化ハフニウム(Hf2O3)膜を形成した。
また、平滑な酸化ハフニウム(Hf2O3)の水接触角は97°であった。
[Example 5]
(Formation of fine protrusion structure)
A hafnium oxide (Hf 2 O 3 ) film was formed in the same manner as in Example 1 except that the metal alkoxide was replaced with hafnium alkoxide.
The water contact angle of smooth hafnium oxide (Hf 2 O 3 ) was 97 °.
(表面改質膜の形成)
上記酸化ハフニウム(Hf2O3)膜に、パーフルオロポリエーテル(オプツールDAX:ダイキン製)を真空チャンバー中で100℃、50Torrで1時間蒸着させ、膜厚45nmの表面改質膜を形成した。
(Formation of surface modification film)
Perfluoropolyether (Optur DAX: manufactured by Daikin) was vapor-deposited on the hafnium oxide (Hf 2 O 3 ) film at 100 ° C. and 50 Torr for 1 hour in a vacuum chamber to form a surface modification film having a film thickness of 45 nm.
次いで、微細突起先端部分の余剰な表面改質膜を大気圧プラズマにより除去し、酸化ハフニウム(Hf2O3)を表面改質膜から20nm突出させ、撥水撥油構造体を得た。 Next, the excess surface-modified film at the tip of the fine protrusion was removed by atmospheric pressure plasma, and hafnium oxide (Hf 2 O 3 ) was projected from the surface-modified film by 20 nm to obtain a water-repellent and oil-repellent structure.
[比較例1]
(微細突起構造の形成)
ポリエチレンテレフタレート(PET)基材の片面に紫外線硬化モノマー(架橋アクリル)を塗布した後、上記紫外線硬化モノマーに微細突起を形成するための金型を押し当て、上記基材側から紫外線を照射して紫外線硬化モノマーを硬化させ、ピッチ200nm高さ200nmの円錐形状をした微細突起構造を形成した。
[Comparative Example 1]
(Formation of fine protrusion structure)
After applying an ultraviolet curable monomer (crosslinked acrylic) to one side of a polyethylene terephthalate (PET) substrate, a mold for forming fine protrusions is pressed against the ultraviolet curable monomer, and ultraviolet rays are irradiated from the substrate side. The ultraviolet curable monomer was cured to form a conical fine protrusion structure having a pitch of 200 nm and a height of 200 nm.
金型から基材を剥離し、微細突起構造の表面にスパッタリング法で、厚さ10nmの酸化ハフニウム(Hf2O3)膜を形成して撥水撥油構造体を得た。 The base material was peeled off from the mold, and a hafnium oxide (Hf 2 O 3 ) film having a thickness of 10 nm was formed on the surface of the fine protrusion structure by a sputtering method to obtain a water-repellent and oil-repellent structure.
[比較例2]
(微細突起構造の形成)
比較例1と同様にして、ポリエチレンテレフタレート(PET)基材上にメチルメタクリレートの微細突起構造を形成した。
[Comparative Example 2]
(Formation of fine protrusion structure)
In the same manner as in Comparative Example 1, a fine protrusion structure of methyl methacrylate was formed on a polyethylene terephthalate (PET) substrate.
(表面改質膜の形成)
表面改質膜の形成
微細突起頂点部分の表面改質膜を除去しない他は、実施例1と同様にして表面改質膜を形成し、撥水撥油構造体を得た。
(Formation of surface modification film)
Formation of surface-modified film A surface-modified film was formed in the same manner as in Example 1 except that the surface-modified film at the apex of the fine protrusion was not removed, and a water-repellent and oil-repellent structure was obtained.
<評価>
上記実施例1~5、比較例1,2の撥水撥油構造体を以下の方法で評価した。
評価結果を表1に示す。
<Evaluation>
The water- and oil-repellent structures of Examples 1 to 5 and Comparative Examples 1 and 2 were evaluated by the following methods.
The evaluation results are shown in Table 1.
(耐久性)
キャンバス布で所定回数往復摺動後、全自動接触角計(Drop Master:協和界面科学株式会社製)を用い、水の接触角とオレイン酸の接触角を測定した。
(durability)
After sliding back and forth a predetermined number of times on a canvas cloth, the contact angle of water and the contact angle of oleic acid were measured using a fully automatic contact angle meter (Drop Master: manufactured by Kyowa Interface Science Co., Ltd.).
(透明性)
ヘイズ・透過率計を用いてJIS K 7136に準拠し、ヘイズメーター(株式会社村上色彩技術研究所製)を用いてヘイズ値及び全光線透過率を測定した。
(transparency)
The haze value and total light transmittance were measured using a haze meter (manufactured by Murakami Color Technology Laboratory Co., Ltd.) in accordance with JIS K 7136 using a haze / transmittance meter.
(耐候性)
南向きに傾斜角度45°で地上から1mの高さに6か月間撥水撥油構造体を固定して、屋外暴露試験を実施した。
屋外暴露後の撥水撥油構造体を、固定したままサンプル表面に10μLの水滴を付着させた。
○:水滴が転落した。
×:水滴が付着した。
(Weatherability)
An outdoor exposure test was carried out by fixing the water- and oil-repellent structure to a height of 1 m from the ground at an inclination angle of 45 ° toward the south for 6 months.
The water- and oil-repellent structure after outdoor exposure was fixed, and 10 μL of water droplets were attached to the sample surface.
◯: Water droplets have fallen.
X: Water droplets adhered.
上記結果から、実施例1~5の撥水撥油構造体は、長期に亘り撥水撥油性を発現できることがわかる。
特に、微細突起の頂点部分が表面改質膜で被覆された比較例2は耐候性が低く、微細突起の頂点部分で撥水性金属化合物が露出していることで、表面改質膜の劣化による撥水性の低下を防止できることが確認された。
From the above results, it can be seen that the water- and oil-repellent structures of Examples 1 to 5 can exhibit water- and oil-repellent properties for a long period of time.
In particular, Comparative Example 2 in which the apex portion of the fine protrusions is covered with the surface-modified film has low weather resistance, and the water-repellent metal compound is exposed at the apex portion of the fine protrusions, resulting in deterioration of the surface-modified film. It was confirmed that the decrease in water repellency could be prevented.
また、微細突起構造が樹脂である比較例2は、摩耗後の水及びオレイン酸の接触角が低下していることから、微細突起構造を撥水性金属化合物で形成することで耐摩耗性が向上し、微細突起間の隙間に空気を保持できることがわかる。
さらに、表面改質膜の膜厚が10nmである実施例1、2は、実施例3~5に比して摩耗後の水の接触角が大きく高耐久であることがわかる。
Further, in Comparative Example 2 in which the fine protrusion structure is a resin, the contact angle between water and oleic acid after wear is lowered, so that the wear resistance is improved by forming the fine protrusion structure with a water-repellent metal compound. It can be seen that air can be retained in the gaps between the fine protrusions.
Further, it can be seen that in Examples 1 and 2 in which the film thickness of the surface modification film is 10 nm, the contact angle of water after wear is large and the durability is high as compared with Examples 3 to 5.
1 微細突起(撥水性金属化合物)
2 表面改質膜
1 Fine protrusions (water-repellent metal compound)
2 Surface modification film
Claims (5)
上記撥水性金属化合物が、金属酸化物及び/又は金属窒化物であり、
上記金属酸化物及び金属窒化物を構成する金属元素が、ジルコニウム、ハフニウム及び希土類元素から成る群から選ばれた少なくとも一種の金属元素であり、
上記微細突起構造が、錐台形又は柱状であり、その微細突起の側面に撥油性の表面改質膜を有し、上記微細突起の頂点部分で上記表面改質膜から上記撥水性金属化合物が突出して露出したことを特徴とする撥水撥油構造体。 Equipped with a water-repellent metal compound having a fine protrusion structure,
The water-repellent metal compound is a metal oxide and / or a metal nitride.
The metal element constituting the metal oxide and the metal nitride is at least one kind of metal element selected from the group consisting of zirconium, hafnium and rare earth elements.
The fine protrusion structure is a cone trapezoid or a columnar shape, has an oil-repellent surface-modified film on the side surface of the fine protrusion, and the water-repellent metal compound protrudes from the surface-modified film at the apex portion of the fine protrusion. A water- and oil-repellent structure characterized by being exposed.
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