JP7093654B2 - Actuator - Google Patents

Description

The present invention relates to an actuator, particularly an actuator having a configuration in which a moving portion is energized.

A MEMS mirror with rotation of a movable portion having a reflective surface is known. For example, in an actuator of an electromagnetically driven or piezoelectrically driven MEMS mirror, electrical energy supplied to a driving component such as a coil or a piezoelectric element is converted into physical motion.

For example, Patent Document 1 describes a movable mirror portion having a rotating mirror, a magnetic field generating means for generating a predetermined magnetic field, a drive coil arranged in the rotating mirror portion, and an energizing means for energizing the drive coil. A camera shake correction device using a MEMS mirror including the above is disclosed.

Japanese Unexamined Patent Publication No. 2008-242207

In the above-mentioned MEMS mirror, when the wiring for supplying the current to the drive coil is provided on the torsion bar, the torsion bar is twisted when the rotating mirror is rotated, and the wiring is connected with the twist of the torsion bar. One example of the problem is that a force is applied and the wiring is easily broken.

The present invention has been made in view of the above points, and one of the objects of the present invention is to provide an actuator having high wiring durability and long life.

The invention according to claim 1 is provided between the fixing member, a swinging portion oscillatingly connected to the fixing member via a torsion bar, and the fixing member and the swinging portion. It is characterized by having a feeding terminal and a wire for electrically connecting the feeding terminal and the swinging portion.

The invention according to claim 14 has a fixing member, a swinging portion swingably connected to the fixing member, one end connected to the fixing member, and the other end connected to the swinging portion. The power supply is provided at a position where the distance from the torsion bar connecting the fixing member and the swinging portion and the portion where the other end is connected to the swinging portion is shorter than the length of the torsion bar. It is characterized by having a terminal and a wire for electrically connecting the power feeding terminal and the swinging portion.

It is a top view of the actuator which concerns on Example 1. FIG. It is sectional drawing along the 2-2 line of the actuator which concerns on Example 1. FIG. It is sectional drawing which follows the 3-3 line of the actuator which concerns on Example 1. FIG. It is a top view of the actuator which concerns on Example 2. FIG. It is sectional drawing which follows the 5-5 line of the actuator which concerns on Example 2. FIG. It is a top view of the actuator which concerns on the modification of Example 2. FIG.

Examples of the present invention will be described in detail below. A MEMS mirror using the actuator of the present invention will be described. In the following description and the accompanying drawings, the same reference numerals are given to substantially the same or equivalent parts.

A configuration example of the MEMS mirror 10 according to the first embodiment will be described with reference to the attached drawings. FIG. 1 is a schematic top view of the MEMS mirror 10. The fixed substrate 11 is a plate-shaped substrate having a rectangular upper surface 11S.

The fixed frame 13 is a flat plate-shaped frame having a rectangular outer shape, and is held on the fixed substrate 11. In FIG. 1, the center line passing through the center of one side of the outer shape of the fixed frame 13 is defined as the first axis AX, and the center line passing through the center of the other side perpendicular to the one side of the fixed frame 13 is defined as the first axis AX. This will be described as the second axis AY. Further, the intersection of the first axis AX and the second axis AY will be described as the central CA.

Each of the expansion unit 15A, the expansion unit 15B, the expansion unit 15C and the expansion unit 15D (hereinafter, these are also simply collectively referred to as the expansion unit 15) is an end in the direction along the first axis AX inside the fixed frame 13. It is a flat plate-shaped portion extending from the portion portion toward the first axis AX in the second axis AY direction. That is, four expansion portions 15A-15D extend from the fixed frame 13.

The expansion portion 15 has a rectangular shape when viewed from above, and has a beam structure in which one end is fixed to the fixed frame 13 and the other end, that is, the tip 15E is a free end.

The expansion portions 15A and 15B are provided at positions symmetrical with respect to the first axis AX. Similarly, the expansion portions 15C and 15D are provided at positions symmetrical with respect to the first axis AX. Further, the expansion portions 15A and 15D are provided at positions line-symmetrical with respect to the second axis AY. The expansion portions 15B and 15C are provided at positions line-symmetrical with respect to the second axis AY.

The piezoelectric element 16 is provided on the upper surface of each of the expansion portions 15. The piezoelectric element 16 includes a flat plate-shaped piezoelectric body that is provided along the upper surface of the expansion portion 15 and that bends and deforms when a voltage is applied, and an electrode. The piezoelectric element 16 is configured such that the unfixed end portion 15E of the expansion portion 15 is displaced in a direction perpendicular to the surface of the expansion portion 15 as the piezoelectric body bends. The displacement of the expansion unit 15 is controlled by controlling the voltage applied to each of the piezoelectric elements 16.

The terminal holding member 17 is a structural portion extending from the fixed frame 13 toward the center CA along the first axis AX. As shown in FIG. 1, the terminal holding member 17 extends to a position closer to the center CA than the expansion portion 15 in the direction of the first axis AX.

The power feeding terminal 18 is a terminal provided on the terminal holding member 17, and is preferably provided at a position along the first axis AX. FIG. 1 shows an example in which the feeding terminal 18 is provided on the first shaft AX. As shown in FIG. 1, the power feeding terminal 18 is provided at the tip end portion of the terminal holding member 17, and is provided at a position closer to the center CA than the expansion portion 15 in the direction of the first axis AX.

The torsion bar 19A, the torsion bar 19B, the torsion bar 19C, and the torsion bar 19D (hereinafter, simply collectively referred to as the torsion bar 19) are structural portions extending from each of the expansion portions 15.

The torsion bar 19A extends from the end portion 15E of the expansion portion 15A toward the inside of the fixed frame 13 along the direction of the first axis AX. The torsion bar 19B extends from the end portion 15E of the expansion portion 15B toward the inside of the fixed frame 13 along the first axis AX direction. The torsion bar 19C extends from the end portion 15E of the expansion portion 15C toward the inside of the fixed frame 13 along the first axis AX direction. The torsion bar 19D extends from the end portion 15E of the expansion portion 15D toward the inside of the fixed frame 13 along the first axis AX direction.

That is, one end of each of the torsion bars 19 is connected to the end portion 15E of the expansion portion 15. The terminal holding member 17 extends between the torsion bars 19A and 19B and the torsion bars 19C and 19D provided at positions line-symmetrical with respect to the first axis AX.

The swing frame 21 is a flat plate-shaped frame provided inside the fixed frame 13. As shown in FIG. 1, the swing frame 21 has a rectangular outer shape and is connected to the other end of the torsion bar 19 at each of a set of sides parallel to the second axis AY direction. ..

More specifically, the swing frame 21 is connected to the torsion bars 19A and 19B on one side parallel to the second axis AY direction and on the other side parallel to the second axis AY direction. It is connected to 19C and 19D. Therefore, the swing frame 21 is held by being connected to the fixed frame 13 by the torsion bar 19 via the expansion portion 15. That is, the torsion bar 19 connects the expansion portion 15 and the swing frame 21. In other words, each of the torsion bars 19 has one end connected to the end portion 15E of the expansion portion 15 and the other end connected to the swing frame 21.

Therefore, when the expansion portion 15 is displaced due to the bending of the piezoelectric element 16, the torsion bar 19 is also displaced due to the displacement. As a result, the swing frame 21 swings around the first axis AX. That is, the swing frame 21 is swingably connected to the fixed frame 13. The expansion unit 15 and the piezoelectric element 16 function as a driving member.

In this embodiment, the expansion portions 15A and 15D are simultaneously displaced in the same direction, and the expansion portions 15B and 15C are controlled to be simultaneously displaced in the same direction at different timings from the expansion portions 15A and 15D. Since the swing frame 21 as the swing portion is swingably connected to the fixed frame 13 as the fixing member, when the expansion portions 15A-15D are controlled in this way, the swing frame 21 becomes , Swings around the first axis AX.

The terminal 22 is a terminal provided on the swing frame 21 at a position along the first axis AX.

The torsion bar 23 is a pair of structural portions extending from the inside of the swing frame 21. As shown in FIG. 1, the torsion bar 23 extends from the inside of a set of sides parallel to the first axis AX of the swing frame 21 toward the center CA along the second axis AY. ing. That is, one end of each of the torsion bars 23 is connected to the swing frame 21.

The rocking plate 25 is a flat plate-shaped structure provided inside the rocking frame 21. As shown in FIG. 1, the rocking plate 25 has a rectangular shape when viewed from above. The rocking plate 25 is connected to the other end of the torsion bar 23 at a set of sides parallel to the first axis AX. That is, the rocking plate 25 is connected to the rocking frame 21 by a torsion bar 23.

The permanent magnet 27 is arranged outside the fixed frame 13 on the upper surface 11S of the fixed substrate 11. The permanent magnet 27 is a pair of magnet pieces arranged on the first axis AX and provided so as to face each other with the rocking plate 25 interposed therebetween. Further, the two magnet pieces constituting the permanent magnet 27 are arranged so that portions showing opposite polarities face each other.

The coil 29 is a metal wiring routed along the outer circumference of the rocking plate 25. When a current flows through the coil 29, a force is applied to the rocking plate 25 around the second axis AY due to the interaction between the current and the magnetic field generated by the two magnet pieces of the permanent magnet 27.

Since the rocking plate 25 is swingably connected to the rocking frame 21 in the rocking frame 21, when a force around the second axis AY is applied to the rocking plate 25, the rocking plate 25 becomes the second. It swings around the axis AY of 2, that is, with the second axis AY as the swing axis. That is, the coil 29 functions as a rocking plate drive coil that swings the rocking plate 25.

The light reflecting film 31 is a circular metal thin film provided on the rocking plate 25. The light reflecting film 31 reflects the light irradiated to the MEMS mirror 10. When the rocking plate 25 swings, the direction in which the light reflecting film 31 faces changes. Therefore, the light reflecting film 31 reflects light in different directions according to the shaking of the rocking plate 25.

The metal wiring 33 is a metal wiring provided on the swing frame 21. One end of the metal wiring 33 is connected to the coil 29, and the other end is connected to the terminal 22. The coil 29 and the metal wiring 33 may be continuous metal wiring.

The wire 35 is a wire made of gold, aluminum, or the like, one end of which is connected to the feeding terminal 18 and the other end of which is connected to the terminal 22. That is, the wire 35 electrically connects the swing frame 21 and the feeding terminal 18. Further, the wire 35 is arranged along the first axis AX.

The control unit 40 is a power supply control device including a central processing unit (CPU) and a storage device such as an HDD (Hard Disk Drive) capable of erasing / writing data. The control unit 40 generates a drive signal for swinging the swing frame 21 and the swing plate 25.

The control unit 40 is connected to the metal wirings CX and CY. The metal wiring CX is electrically connected to each of the piezoelectric elements 16 on the extension portion 15. The control unit 40 supplies a drive signal that displaces each of the expansion units 15 to the piezoelectric element 16 via the metal wiring CX.

The metal wiring CY is electrically connected to the power feeding terminal 18. The control unit 40 supplies a drive signal for swinging the rocking plate 25 to the coil 29 via the metal wiring CY, the feeding terminal 18, the wire 35, and the metal wiring 33.

For example, a signal such as a sine wave, a triangular wave, or a sawtooth wave can be used as the drive signal. For example, when the drive signal supplied to the metal wiring CX is set to a sine wave having a frequency that causes the swing frame 21 to resonate, the swing frame 21 swings while resonating around the first axis AX. Further, for example, when the drive signal supplied to the metal wiring CY is set to a sine wave having a frequency that resonates the rocking plate 25, the rocking plate 25 swings while resonating around the second axis AY. do.

Alternatively, by using the drive signal as a signal such as a triangular wave having a frequency at which the rocking plate 25 or the rocking frame 21 does not resonate, the rocking plate 25 or the rocking frame 21 swings without resonating.

Then, the light is accompanied by the swing of the swing plate 25 due to the swing of the swing frame 21 centered on the first axis AX and the swing of the swing plate 25 centered on the second axis AY. The direction in which the reflective film 31 faces changes. Therefore, the MEMS mirror 10 can emit light while changing the direction of reflection of the light applied to the light reflecting film 31 by the light reflecting film 31 as the swinging portion 25 swings.

FIG. 2 is a cross-sectional view taken along the line 2-2 of FIG. As shown in FIG. 2, the fixed substrate 11 has a protruding portion 11P protruding from the upper surface 11S which is one surface of the fixed substrate 11. The protruding portion 11P has a rectangular cross-sectional shape, and has a frame shape with the side surface of the protruding portion 11P as a side surface. The fixed frame 13 is provided so as to be placed on the protruding portion 11P of the fixed substrate 11. Therefore, the protruding portion 11P has a shape along the outer edge of the fixed frame 13.

FIG. 3 is a diagram showing a cross section along line 3-3 in FIG. As shown in FIG. 3, the piezoelectric element 16 is configured such that the lower electrode 16A, the piezoelectric body 16B, and the upper electrode 16C are laminated in this order on the expansion portion 15. As shown in FIG. 3, the end portion 15E of the expansion portion 15 is a free end.

When a voltage is applied between the lower electrode 16A and the upper electrode 16C, the piezoelectric body 16B is deformed and the expansion portion 15 bends, and moves in the vertical direction, that is, in the direction perpendicular to the surface of the expansion portion 15. As a result, the end portion 15E of the expansion portion 15 is displaced.

Referring to FIG. 1 again, as described above, the terminal holding member 17 extends along the first axis AX. The terminal 22 and the power feeding terminal 18 are provided on the first shaft AX. The wire 35 is arranged along the first axis AX.

The position where the power feeding terminal 18 is provided has a shorter distance from the terminal 22 than an arbitrary position on the fixed frame 13. Therefore, the power feeding terminal 18 provided on the terminal holding member 17 is closer to the terminal 22 than, for example, when it is provided on the fixed frame 13.

Further, as described above, the terminal holding member 17 extends between the torsion bars 19A and 19B and the torsion bars 19C and 19D provided at positions symmetrical with respect to the first axis AX. There is. A power feeding terminal 18 is provided at the tip of the extended portion. Therefore, the power feeding terminal 18 is provided on the terminal holding member 17 at a position close to the terminal 22. The power feeding terminal 18 is provided at a position where the distance from the terminal 22 is shorter than the length of the torsion bar 19.

When the swing frame 21 swings around the first shaft AX, only the terminal 22 rotates on the first swing shaft AX with almost no change in the distance and position between the terminal 22 and the feeding terminal 18. .. Changes in the wire 35, such as expansion and contraction, twisting, and pulling, caused by the rotation are slight. Therefore, the wire 35 is hardly subjected to a force that causes disconnection. Therefore, the swing of the swing frame 21 does not reduce the durability of the wire 35, and the possibility of breakage is low.

In this embodiment, an example in which the terminal holding member 17 extends from the fixed frame 13 has been described, but the present invention is not limited to this. The terminal holding member 17 does not have to extend from the fixed frame 13. For example, the tip of the structural portion protruding from the fixed substrate 11 may be provided so as to be located at or near the position along the first axis AX. That is, the terminal holding member 17 may extend from the fixed substrate 11, the fixed frame 13, or another member that does not swing.

Further, the example in which the terminal holding member 17 extends along the first axis AX has been described, but the present invention is not limited to this. For example, the terminal holding member 17 may be provided so as to extend in a direction intersecting the first axis AX.

Further, an example in which the power feeding terminal 18 is provided on the first shaft AX has been described, but the present invention is not limited to this. The power feeding terminal 18 is a region between or between the fixed frame 13 as a fixing member and the swinging frame 21 as a swinging portion, and is located close to the swinging frame 21 and is located on the swinging frame 21. It suffices if it is provided at a position where the positional relationship with the terminal 22 does not change so much even if it is shaken.

Further, an example in which the rocking plate 25 swings due to the electromagnetic force generated by the coil 29 and the permanent magnet 27 when the rocking plate 25 swings about the second axis AY has been described. However, the rocking plate 25 swings due to the piezoelectric element. It may be configured to move. The swing frame 21 may be provided with an expansion portion including a piezoelectric element, and wiring for supplying power to the piezoelectric element may be connected by a feeding terminal 18 and a wire 35.

The fixed frame 13, the swing frame 21, and the swing plate 25 may be integrally formed.

As described above, according to the MEMS mirror 10 of the present embodiment, when the wiring for supplying the current to the coil 29 is provided, the feeding terminal 18 and the wire 35 may be provided along the first axis AX. can. By providing the feeding terminal 18 on the terminal holding member 17 extending along the first axis AX, the wire 35 can be arranged along the first axis AX.

Therefore, it is possible to provide an actuator having high wiring durability and long life without applying a force that reduces the durability of the wire 35 due to the swing of the rocking plate 21.

A configuration example of the MEMS mirror 50 according to the second embodiment will be described with reference to FIGS. 4 and 5. In FIGS. 4 and 5, substantially the same or equivalent portions as in the case of the MEMS mirror 10 of the first embodiment are designated by the same reference numerals. Hereinafter, a part of the description of the same configuration as that of the MEMS mirror 10 of the first embodiment will be omitted, and a different configuration will be described.

FIG. 4 is a schematic top view of the MEMS mirror 50. The fixed substrate 11 is a plate-shaped substrate having a rectangular upper surface 11S.

The fixed frame 13 is a flat plate-shaped frame having a rectangular outer shape, and is held on the fixed substrate 11. In FIG. 4, the center line passing through the center of one side of the outer shape of the fixed frame 13 is defined as the first axis AX, and the center line passing through the center of the other side perpendicular to the one side of the fixed frame 13 is defined as the first axis AX. This will be described as the second axis AY. Further, the intersection of the first axis AX and the second axis AY will be described as the central CA.

The terminal holding member 57A, the terminal holding member 57B, the terminal holding member 57C, and the terminal holding member 57D (hereinafter, also simply collectively referred to as the terminal holding member 57) are oriented along the second axis AX inside the fixed frame 13. It is a flat plate-shaped portion extending from the end portion in the above toward the first axis AX in the direction of the second axis AY, that is, in the direction intersecting the first axis AX. That is, four terminal holding members 57 extend from the fixed frame 13.

The terminal holding members 57A and 57B are provided at positions symmetrical with respect to the first axis AX. Similarly, the terminal holding members 57C and 57D are provided at positions line-symmetrical with respect to the first axis AX. Each of the terminal holding members 57 extends to a position close to the first axis AX.

The power feeding terminal 58A is a terminal provided on the terminal holding member 57A. The power supply terminal 58B is a terminal provided on the terminal holding member 57B. The power feeding terminals 58A and 58B are provided at the tip portions of the terminal holding member 57A and the terminal holding member 57B.

The power supply terminal 59C is a terminal provided on the terminal holding member 57C. The power supply terminal 59D is a terminal provided on the terminal holding member 57D. The power feeding terminals 59C and 59D are provided at the tip portions of the terminal holding member 57C and the terminal holding member 57D.

The torsion bar 60 is a pair of structural portions extending from the inside of the fixed frame 13. As shown in FIG. 4, the torsion bar 60 extends from the inside of a set of sides parallel to the second axis AY of the fixed frame 13 toward the center CA along the first axis AX. There is. That is, one end of each of the torsion bars 60 is connected to the fixed frame 13.

The swing frame 61 is a flat plate-shaped frame provided inside the fixed frame 13. As shown in FIG. 4, the swing frame 61 has a rectangular outer shape and is connected to the other end of the torsion bar 60 at each of a set of sides parallel to the second axis AY direction. .. Therefore, the swing frame 61 is held by being connected to the fixed frame 13 by the torsion bar 60. That is, the torsion bar 60 connects the fixed frame 13 and the swing frame 61.

The permanent magnet 63 is arranged outside the fixed frame 13 on the upper surface 11S of the fixed substrate 11. The permanent magnet 63 is a pair of magnet pieces arranged on the second axis AY and provided so as to face each other with the swing frame 61 interposed therebetween. Further, the two magnet pieces constituting the permanent magnet 63 are arranged so that portions showing opposite polarities face each other.

The coil 65 is a metal wiring routed along the outer circumference of the swing frame 61. When a current flows through the coil 65, a force around the first axis AX is applied to the swing frame 61 due to the interaction between the current and the magnetic field generated by the two magnet pieces of the permanent magnet 63.

When a force around the first shaft AX is applied to the swing frame 61, the swing frame 61 swings around the first shaft AX, that is, with the first shaft AX as the swing shaft. The coil 65 functions as a swinging portion drive coil that swings the swinging frame 61 as a swinging portion.

The terminal 66A and the terminal 66B are a pair of terminals provided on the swing frame 61. The terminal 66A is provided in the vicinity of the terminal holding member 57A in the vicinity of the first shaft AX. The terminal 66B is provided in the vicinity of the terminal holding member 57B in the vicinity of the first shaft AX. A coil 65 is connected to the terminal 66A and the terminal 66B.

The terminal 67C and the terminal 67D are a pair of terminals provided on the swing frame 61. The terminal 67C is provided in the vicinity of the terminal holding member 57C in the vicinity of the first shaft AX. The terminal 67D is provided in the vicinity of the terminal holding member 57D in the vicinity of the first shaft AX.

The torsion bar 23 is a pair of structural portions extending from the inside of the swing frame 61. As shown in FIG. 4, the torsion bar 23 extends from the inside of a set of sides parallel to the first axis AX of the swing frame 61 toward the center CA along the second axis AY. ing. That is, one end of each of the torsion bars 23 is connected to the swing frame 61.

The rocking plate 25 is a flat plate-like structure provided inside the rocking frame 61. As shown in FIG. 4, the rocking plate 25 has a rectangular shape when viewed from above. The rocking plate 25 is connected to the other end of the torsion bar 23 at a set of sides parallel to the first axis AX.

The permanent magnet 27 is arranged outside the fixed frame 13 on the fixed substrate 11. The permanent magnet 27 is a pair of magnet pieces arranged on the first axis AX and provided so as to face each other with the rocking plate 25 interposed therebetween. Further, the two magnet pieces constituting the permanent magnet 27 are arranged so that portions showing opposite polarities face each other.

The coil 29 is a metal wiring routed along the outer circumference of the rocking plate 25. When a current flows through the coil 29, a force is applied to the rocking plate 25 around the second axis AY due to the interaction between the current and the magnetic field generated by the two magnet pieces of the permanent magnet 27.

When a force around the second shaft AY is applied to the rocking plate 25, the rocking plate 25 swings around the second shaft AY, that is, with the second shaft AY as the swing shaft.

The light reflecting film 31 is a circular metal thin film provided on the rocking plate 25. The light reflecting film 31 reflects the light irradiated to the MEMS mirror 10. When the rocking plate 25 swings, the direction in which the light reflecting film 31 faces changes. Therefore, the light reflecting film 31 reflects light in different directions according to the shaking of the rocking plate 25.

The metal wiring 33 is a metal wiring provided on the swing frame 61. One end of the metal wiring 33 is connected to the coil 29, and the other end is connected to the terminal 67. The coil 29 and the metal wiring 33 may be continuous metal wiring.

The wire 69A and the wire 69B are wires such as gold and aluminum. One end of the wire 69A is connected to the feeding terminal 58A on the terminal holding member 57A, and the other end is connected to the terminal 66A on the swing frame 61. One end of the wire 69B is connected to the feeding terminal 58B on the terminal holding member 57B, and the other end is connected to the terminal 66B on the swing frame 61. That is, the wire 69A electrically connects the swing frame 61 and the feeding terminal 58A. Further, the wire 69B electrically connects the swing frame 61 and the feeding terminal 58B.

The wire 71C and the wire 71D are wires such as gold and aluminum. One end of the wire 71C is connected to the feeding terminal 59C on the terminal holding member 57C, and the other end is connected to the terminal 67C on the swing frame 61. One end of the wire 71D is connected to the feeding terminal 59D on the terminal holding member 57D, and the other end is connected to the terminal 67D on the swing frame 61. That is, the wire 71C electrically connects the swing frame 61 and the feeding terminal 59C. Further, the wire 71D electrically connects the swing frame 61 and the feeding terminal 59D.

The control unit 75 is a power supply control device including a CPU and a storage device such as an HDD capable of erasing / writing data. The control unit 75 generates a drive signal for swinging the swing frame 61 and the swing plate 25.

The control unit 75 is connected to the metal wirings CX and CY. The metal wiring CX is electrically connected to the terminals 58A and 58B. The control unit 75 supplies the coil 65 with a drive signal for swinging the swing frame 61 via the metal wiring CX, terminals 58A and 58B, wires 69A and 69B, and terminals 66A and 66B.

The metal wiring CY is electrically connected to the feeding terminals 59C and 59D. The control unit 40 supplies the coil 29 with a drive signal for swinging the rocking plate 25 via the metal wiring CY, the feeding terminals 59C and 59D, the wires 71C and 71D, the terminals 67C and 67D, and the metal wiring 33.

For example, as the drive signal, a signal such as a sine wave, a triangular wave, or a sawtooth wave can be used as in the case of the first embodiment. For example, when the drive signal supplied to the metal wiring CX is set to a sine wave having a frequency that causes the swing frame 61 to resonate, the swing frame 61 swings while resonating around the first axis AX.

In the MEMS mirror 50, with the swing of the swing plate 25 due to the swing of the swing frame 61 centered on the first axis AX and the swing of the swing plate 25 centered on the second axis AY. Therefore, the direction in which the light reflecting film 31 is directed changes, and when the light reflecting film 31 is irradiated with light, the emission direction of the light reflected by the light reflecting film 31 is changed with the shaking of the swinging portion 25. It can be emitted while.

FIG. 5 is a cross-sectional view taken along the line 5-5 of FIG. As shown in FIG. 5, the fixed substrate 11 has a protruding portion 11P protruding from the upper surface 11S, which is one surface of the fixed substrate 11. The fixed frame 13 is provided so as to be placed on the protruding portion 11P of the fixed substrate 11.

Referring to FIG. 4 again, as described above, the terminal holding members 57A and 57B extend to a position close to the first axis AX. Further, the feeding terminals 58A and 58B are provided at the tip portions of the terminal holding members 57A and 57B. The terminal 66A and the terminal 66B are provided close to the first shaft AX. Therefore, the wires 69A and 69B are arranged in close proximity to the first axis AX.

Further, as described above, the terminal holding members 57C and 57D extend to positions close to the first axis AX. Further, the feeding terminals 59C and 59D are provided at the tip portions of the terminal holding members 57C and 57D. The terminal 67C and the terminal 67D are provided close to the first shaft AX. Therefore, the wires 71C and 71D are arranged in close proximity to the first axis AX.

Therefore, when the swing frame 61 swings around the first shaft AX, the terminals 66A and 66B, the terminals 67C and 67D rotate in the vicinity of the first swing shaft AX, but the feeding terminal 58A and the terminal 66A The change in the distance between the power supply terminal 58B and the terminal 66B, the power supply terminal 59C and the terminal 67C, and the power supply terminal 59D and the terminal 67D is slight. Therefore, the wires 69A and 69B and the wires 71C and 71D are hardly subjected to a force that causes disconnection. Therefore, the durability of the wires 69A and 69B and the wires 71C and 71D is unlikely to decrease due to the swing of the swing frame 61.

As described above, according to the MEMS mirror 50 of the present embodiment, when the wiring for supplying the current to the coil 29 and the coil 65 is provided, the feeding terminal connected to the control unit 75 is attached to the tip of the terminal holding member. By providing and connecting the power feeding terminal and the terminal on the swing frame 61 with a wire, it is possible to secure an electrical connection to the coil 29 and the coil 65 in the vicinity of the first swing shaft AX. ..

Since the tip of the terminal holding member 57A-57D extends to the vicinity of the first swing shaft AX, the wires 69A, 69B, 71C and 71D are connected in the vicinity of the first swing shaft AX. ..

Therefore, it is difficult to apply a force that causes these disconnections to the wires 69A, 69B, 71C, and 71D due to the swing of the swing frame 61, and it is possible to provide an actuator having high wiring durability and a long life.

[Modification example]
FIG. 6 is a top view showing a MEMS mirror 80 which is a modification of the MEMS mirror 50 of the second embodiment. The MEMS mirror 80 is different from the MEMS mirror 50 in that it has a terminal holding member 81, a feeding terminal 82, and a wire 83, and the other points are similarly configured.

The terminal holding member 81 as the swinging portion terminal holding member is located inside the swinging frame 61 in a direction intersecting the second swinging shaft AY from the end portion in the direction along the first shaft AX. It is a structural part extending in the axis AX direction of 1. A pair of terminal holding members 81 are provided at positions line-symmetrical with respect to the second axis AY.

The power supply terminal 82 as the swinging portion power supply terminal is a terminal provided on the terminal holding member 81. The power feeding terminal 82 is provided at the tip end portion of the terminal holding member 81, and is close to the second shaft AY. A metal wiring 33 is connected to the power feeding terminal 82.

The wire 83 as the swinging portion wire is a wire that connects the feeding terminal 82 and the terminal 29A provided at the end of the coil 29 and located in the vicinity of the second axis AY. The wire 83 is arranged in the vicinity of the second axis AY.

When the rocking plate 25 swings around the second swing shaft AY, the terminal 29A rotates around the second swing shaft AY, but the terminal 29A and the feeding terminal 82 are close to each other. , The variation in the distance between the terminal 29A and the feeding terminal 82 is slight. Therefore, the wire 83 is hardly subjected to a force that causes disconnection. Therefore, the durability of the wire 83 is unlikely to be lowered by the swing around the second swing shaft AY of the swing plate 25.

The terminal holding member 81, the feeding terminal 82, and the wire 83 in the modified example may be provided in the region between the rocking plate 25 and the rocking frame 21 in the MEMS mirror 10 of the first embodiment. Further, the above-mentioned configurations of the terminal holding member, the expansion portion, the piezoelectric element, the swing frame, the swing plate, the coil and the like can be appropriately combined.

The above configuration is applicable to actuators in various devices in addition to MEMS mirrors.

The configuration in the above-described embodiment is merely an example, and can be appropriately selected and changed depending on the intended use and the like.

10, 50 MEMS Mirror 11 Fixed substrate 13 Fixed frame 15 Expansion part 16 Piezoelectric element 17, 69, 73, 83 Terminal holding member 18, 57A-D Power supply terminal 19, 23, 60 Torsion bar 21, 61 Swing frame 25 Swing Plate 31 Light reflective film 27, 63 Permanent magnet 29, 65 Coil 33 Metal wiring 35, 69A, 69B, 71C, 71D Wire 40, 75 Control unit

Claims (15)

With fixing members
An oscillating portion oscillatingly connected to the fixing member,
A torsion bar having one end connected to the fixing member and the other end connected to the swinging portion to swingably connect the fixing member and the swinging portion.
A power supply terminal provided between the fixing member and the swinging portion,
An actuator having a wire having one end connected to the feeding terminal and the other end connected to the swing portion . The swinging portion is provided so as to be swingable around a swinging shaft.
The actuator according to claim 1, wherein the wire is connected to the swing portion on the swing shaft or in the vicinity of the swing shaft. The actuator according to claim 2, further comprising a terminal holding member provided in a region between the fixing member and the swinging portion to hold the feeding terminal. The actuator according to claim 3, wherein the terminal holding member extends from the fixing member. The actuator according to claim 3 or 4, wherein the terminal holding member is provided so as to extend in a direction along the swing axis. Two members provided with the swing shaft interposed therebetween, one end of which is connected to the fixing member and the other end of which is connected to the swing portion to connect the fixing member and the swing portion. Including the torsion bar of
The actuator according to any one of claims 3 to 5, wherein the terminal holding member is provided between the two torsion bars. It has a drive member that swings the swinging portion via the torsion bar by bending and deforming by a piezoelectric element.
The actuator according to any one of claims 3 to 6, wherein the terminal holding member is provided between the driving member and the swinging portion in the plane direction. The actuator according to claim 3 or 4, wherein the terminal holding member is provided so as to extend in a direction intersecting the swing axis. 1. 8. The actuator according to any one of 8. An oscillating part feeding terminal provided between the oscillating frame and the oscillating plate,
The actuator according to claim 9, further comprising a swinging portion wire for electrically connecting the swinging portion feeding terminal and the swinging plate . A claim comprising a swinging portion terminal holding member extending from the swinging frame and provided in a region between the swinging frame and the swinging plate to hold the swinging portion feeding terminal. Item 10. The actuator according to item 10. The actuator according to any one of claims 1 to 5 and claims 8 to 11, wherein the swing portion is provided with a swing portion drive coil that swings the swing portion. The actuator according to any one of claims 9 to 11, wherein the rocking plate is provided with a rocking plate drive coil that swings the rocking plate. With fixing members
An oscillating portion oscillatingly connected to the fixing member,
A torsion bar having one end connected to the fixing member and the other end connected to the swinging portion to connect the fixing member and the swinging portion.
A power supply terminal provided at a position where the distance from the position where the other end is connected to the swing portion is shorter than the length of the torsion bar.
An actuator having a wire for electrically connecting the feeding terminal and the swinging portion. With fixing members
An oscillating portion oscillatingly connected to the fixing member,
A terminal holding member extending from the fixing member and provided in the region between the fixing member and the swinging portion,
A power supply terminal held by the terminal holding member between the fixing member and the swinging portion,
An actuator characterized by having a wire for electrically connecting the feeding terminal and the swinging portion.

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