JP7098071B2 - Deterioration determination device, threshold determination device, threshold determination method, and threshold determination program - Google Patents

Description

The present invention relates to a deterioration determination device for determining deterioration of processing equipment, a threshold value determination device, a threshold value determination method, and a threshold value determination program.

Processing equipment such as Numerical Control (NC) processing machines may fail due to deterioration of components such as equipment or parts. Therefore, Patent Document 1 proposes a deterioration detection technique, which is a technique for detecting deterioration of a component component based on a measured value output from a sensor attached to a processing facility.

Japanese Unexamined Patent Publication No. 2016-0941414

However, in the technique described in Patent Document 1, a table is used to assign the measured value output from the sensor to the rank value for quantifying the degree of deterioration, and the table is manually set in advance. There is a need to. Therefore, in the technique described in Patent Document 1, it takes time and effort to set in advance for determining deterioration.

The present invention has been made in view of the above, and an object of the present invention is to obtain a deterioration determination device that can save the trouble of presetting for deterioration determination.

In order to solve the above-mentioned problems and achieve the object, the deterioration determination device of the present invention includes an acquisition unit, a selection unit, a determination unit, and a deterioration determination unit. The acquisition unit acquires time-series measurement data including a plurality of measured values output from a sensor that detects the state of the processing equipment during the period in which the processing equipment is processing the workpiece. The selection unit is included in a plurality of ranges obtained by dividing a numerical range from the minimum value to the maximum value among a plurality of measurement values included in the time-series measurement data acquired by the acquisition unit in the threshold value determination mode for determining the threshold value. Select the range with the largest number of measured values as the extraction range. The determination unit determines the threshold value based on the extraction range selected by the selection unit or a plurality of measured values included in the extraction range. The deterioration determination unit determines the deterioration of the processing equipment based on the time-series measurement data acquired by the acquisition unit and the threshold value determined by the determination unit in the deterioration determination mode for determining the deterioration of the processing equipment.

According to the present invention, there is an effect that the time and effort required for presetting for deterioration determination can be omitted.

The figure which shows an example of the structure of the deterioration determination apparatus which concerns on Embodiment 1 of this invention. The figure which shows the relationship between the extraction numerical value range and extraction time range selected by the deterioration determination apparatus which concerns on Embodiment 1 and the determination threshold value determined by a deterioration determination apparatus. The figure which shows the specific configuration example of the deterioration determination apparatus which concerns on Embodiment 1. The figure for demonstrating the division processing of the maximum numerical range by the division processing part which concerns on Embodiment 1. The figure which shows an example of the change of the measured value output from a sensor in one cycle period which concerns on Embodiment 1. A graph in which the maximum numerical range shown in FIG. 5 is divided into 18 and the number of measured values included in each range is plotted. A flowchart showing an example of processing by the processing unit of the deterioration determination device according to the first embodiment. A flowchart showing an example of the threshold value determination process by the processing unit of the deterioration determination device according to the first embodiment. A flowchart showing an example of the determination target section determination process by the processing unit of the deterioration determination device according to the first embodiment. A flowchart showing an example of extraction numerical range selection processing by the processing unit of the deterioration determination device according to the first embodiment. A flowchart showing an example of deterioration determination processing by the processing unit of the deterioration determination device according to the first embodiment. A flowchart showing an example of the determination process by the deterioration determination unit of the deterioration determination device according to the first embodiment. The figure which shows an example of the hardware composition of the deterioration determination apparatus which concerns on Embodiment 1. The figure which shows an example of the structure of the deterioration determination apparatus which concerns on Embodiment 2 of this invention. The figure which shows an example of the extraction numerical value range and the extraction time range selected by the deterioration determination apparatus which concerns on Embodiment 2. A flowchart showing an example of the threshold value determination process by the processing unit of the deterioration determination device according to the second embodiment. The figure which shows an example of the structure of the deterioration determination apparatus which concerns on Embodiment 3 of this invention. A flowchart showing an example of a comparison value determination process by the processing unit of the deterioration determination device according to the third embodiment. A flowchart showing an example of a comparison range selection process by the deterioration determination unit of the deterioration determination device according to the third embodiment. A flowchart showing an example of the determination process by the deterioration determination unit of the deterioration determination device according to the third embodiment.

Hereinafter, the deterioration determination device, the threshold value determination device, the threshold value determination method, and the threshold value determination program according to the embodiment of the present invention will be described in detail with reference to the drawings. The present invention is not limited to this embodiment.

Embodiment 1.
FIG. 1 is a diagram showing an example of the configuration of the deterioration determination device according to the first embodiment of the present invention. As shown in FIG. 1, the deterioration determination device 1 according to the first embodiment is based on time-series measurement data including a plurality of measurement values having different measurement times output from a sensor 3 for detecting the state of the processing equipment 2. , Deterioration of the equipment or parts constituting the processing equipment 2 is determined.

The processing equipment 2 is, for example, a numerically controlled processing machine that performs turning, milling, drilling, and the like on a work piece. In the following, the processing equipment 2 will be described as being a numerically controlled processing machine, but the processing equipment 2 is not limited to the numerically controlled processing machine and may be a processing equipment other than the numerically controlled processing machine.

The sensor 3 is, for example, a current sensor that repeatedly measures the instantaneous value of the current flowing through the servomotor of the processing equipment 2 at a preset cycle, and time-series measurement data including a plurality of instantaneous values of the repeatedly measured current as measured values. Is output.

The deterioration determination device 1 includes an acquisition unit 10, a processing unit 11, a communication unit 12, and a display unit 13. The processing unit 11 includes a data analysis unit 30 and a deterioration determination unit 31.

The acquisition unit 10 acquires time-series measurement data output from the sensor 3 during a period in which the processing equipment 2 is processing a workpiece (not shown). Further, the acquisition unit 10 acquires operation data indicating the start or end of the machining process for the workpiece from the machining equipment 2. Hereinafter, the processing process for the workpiece by the processing equipment 2 is simply referred to as the processing process or the processing process of the processing equipment 2.

When the operation mode is the threshold value determination mode, the data analysis unit 30 uses the threshold value for determining the deterioration of the processing equipment 2 based on the time-series measurement data acquired by the acquisition unit 10 during one cycle of the processing. The determination threshold value is determined. The threshold value determination mode is an operation mode for determining a determination threshold value. Further, the data analysis unit 30 determines the start and end of the machining process based on the operation data acquired by the acquisition unit 10.

The period of one cycle of the processing process is the period from the start of the processing process on the workpiece to the completion of the processing process. When the processing equipment 2 performs a plurality of processing processes on the workpiece, the data analysis unit 30 determines a determination threshold value for each processing process and determines the start and end of the processing process for each processing process. Hereinafter, the period of one cycle of processing may be described as one cycle period.

The data analysis unit 30 includes a selection unit 40 and a determination unit 50. The selection unit 40 has a plurality of maximum numerical range which is a numerical range from the minimum value to the maximum value among the plurality of measurement values included in the time series measurement data acquired by the acquisition unit 10 in one cycle period in the threshold value determination mode. It is divided into ranges, and the range with the largest number of measured values included in the divided ranges is selected as the extraction numerical range. The extraction numerical range is an example of the extraction range.

For example, in the processing equipment 2, it is assumed that the processing of the workpiece is performed by a cutting tool rotated by a servomotor. In this case, at the moment when the cutting tool rotated by the servomotor comes into contact with the workpiece, a relatively large current flows through the servomotor in a short time due to the kinetic energy of the cutting tool. After that, during the period in which the workpiece is cut with the cutting tool, the fluctuation of the load applied to the cutting tool is small, and the current value of the current flowing through the servomotor continues to be in a small change state.

Since the selection unit 40 selects the range having the largest number of measured values included in the plurality of ranges obtained by dividing the maximum numerical range as the extracted numerical range, the numerical values in which the number of measured values is concentrated in the maximum numerical range. The range is selected as the extraction numeric range. In the above example, the numerical range in which the distribution of the measured values is concentrated in the maximum numerical range includes a plurality of measured values output from the sensor 3 with little change in the current value of the current flowing through the servomotor. Is done.

Further, the selection unit 40 extracts the time range in which the measured value exists in the extraction numerical value range in one cycle period as the extraction time range. In the above example, the extraction time range is a period in which the change in the current flowing through the servomotor is small. The selection unit 40 can also extract a time range in which the measured value exists in the extraction numerical value range and the measured values are continuous in the extraction numerical value range in one cycle period as the extraction time range.

The determination unit 50 determines the determination threshold value based on the extraction numerical value range selected by the selection unit 40 in the threshold value determination mode. For example, the determination unit 50 determines the maximum value of the extraction numerical value range selected by the selection unit 40 as the determination threshold value.

FIG. 2 is a diagram showing the relationship between the extraction numerical value range and the extraction time range selected by the deterioration determination device according to the first embodiment and the determination threshold value determined by the deterioration determination device. In FIG. 2, the vertical axis indicates the magnitude of the measured value, and the horizontal axis indicates the time. Further, in FIG. 2, the time t10 is the time when the processing of the processing equipment 2 is started, and the time t20 is the time when the processing of the processing equipment 2 is completed.

In the example shown in FIG. 2, in one cycle period, the numerical range in which the distribution number of the measured values is concentrated is selected as the extracted numerical range by the selection unit 40, and the maximum value of the selected extracted numerical range is determined by the determination unit 50. It is determined as a judgment threshold.

The deterioration determination unit 31 shown in FIG. 1 is based on time-series measurement data including a plurality of measurement values output from the sensor 3 and a determination unit 50 when the operation mode is the deterioration determination mode for determining the deterioration of the processing equipment 2. Deterioration of the processing equipment 2 is determined based on the determined determination threshold value.

For example, the deterioration determination unit 31 is a plurality of measurement values included in the time-series measurement data acquired by the acquisition unit 10 in the deterioration determination mode, and is a plurality of measurement values included in the extraction time range selected by the selection unit 40. And the judgment threshold. The deterioration determination unit 31 determines whether or not the number of measured values exceeding the determination threshold value exceeds a preset number. The preset number is, for example, m times the number of measured values exceeding the determination threshold value when the processing equipment 2 is normal. m is, for example, a number exceeding 1.

For example, when machining is performed by a cutting tool rotated by a servomotor, when the cutting tool or the servomotor deteriorates, the current required to drive the servomotor increases. Therefore, as the cutting tool or servomotor deteriorates, the measured value also increases in the extraction time range, and the number of times the determination threshold value is exceeded increases. When the number of measured values exceeding the determination threshold value exceeds a preset number, the deterioration determination unit 31 determines that the cutting tool or servomotor constituting the processing equipment 2 has deteriorated.

When the deterioration determination unit 31 determines that the processing equipment 2 has deteriorated, the deterioration determination unit 31 transmits information indicating that the processing equipment 2 has deteriorated from the communication unit 12 to the terminal device 4 via the network. Or, it can be displayed on the display unit 13. The terminal device 4 is a terminal device owned by the manager of the processing equipment 2, and is, for example, a laptop computer or a tablet.

As described above, the deterioration determination device 1 is time-series measurement data including a plurality of measured values output from the sensor 3 that detects the state of the processing equipment 2 during the period in which the processing equipment 2 is processing the workpiece. The determination threshold is automatically determined based on. Therefore, the deterioration determination device 1 does not require the person to set the determination threshold value by trial and error while looking at the data output from the sensor 3, and can save the trouble of pre-setting for the deterioration determination.

Further, since the deterioration determination device 1 determines the determination threshold value and determines the deterioration from the numerical range in which the distribution of the measured values is concentrated in the maximum numerical range, for example, the change in the measured value output from the sensor 3 is small. The determination threshold can be determined and the deterioration can be determined using the measured value of the state. Thereby, the deterioration of the processing equipment 2 can be accurately determined. The determination threshold value may be determined based on the measured value suitable for determining the deterioration of the processing equipment 2 in one cycle period, and the measured value used for the determination threshold value is not limited to the above-mentioned example.

The data analysis unit 30 of the deterioration determination device 1 can also determine different determination threshold values for each of a plurality of periods in one cycle period. Further, the data analysis unit 30 can also determine the determination threshold value by the above-mentioned processing by using the measured values of only a part of the one cycle period. The determination method of each determination threshold value and the deterioration determination method based on each determination threshold value can be performed by the same processing as the above-mentioned determination threshold value determination method and deterioration determination method based on the determination threshold value.

Hereinafter, the configuration of the deterioration determination device 1 will be described more specifically. FIG. 3 is a diagram showing a specific configuration example of the deterioration determination device according to the first embodiment. As shown in FIG. 3, the acquisition unit 10 includes a time-series data acquisition unit 21 and an operation data acquisition unit 22.

The time-series data acquisition unit 21 acquires time-series measurement data output from the sensor 3 in the threshold value determination mode. The time-series measurement data includes a plurality of measurement values having different measurement times output from the sensor 3 in one cycle period in the threshold value determination mode. Further, the time-series data acquisition unit 21 acquires the time-series measurement data output from the sensor 3 in the deterioration determination mode. The time-series measurement data includes a plurality of measurement values having different measurement times output from the sensor 3 in one cycle period in the deterioration determination mode.

The operation data acquisition unit 22 acquires the above-mentioned operation data from the processing equipment 2. The operation data output from the processing equipment 2 includes, for example, operation start data output at the start timing of the processing process and operation end data output at the end timing of the processing process.

The time-series measurement data may be data including information indicating the time when each of the plurality of measured values is measured, in addition to the plurality of measured values output from the sensor 3 in one cycle period. Further, the operation start data may be data including information indicating the start time of the machining process, and the operation end data may be data including information indicating the end time of the machining process. In this case, the time-series measurement data does not have to be output from the sensor 3 at the timing synchronized with the processing by the processing equipment 2.

Further, in the following, the sensor 3 will be described as being a current sensor provided in the servo motor of the processing equipment 2, but the sensor 3 is not limited to the current sensor provided in the servo motor of the processing equipment 2. Any sensor may be used as long as it measures the electrical characteristics whose size changes according to the deterioration of the components of the processing equipment 2. For example, if the voltage, power, current phase, voltage phase, etc. supplied to the components of the processing equipment 2 change due to deterioration of the components of the processing equipment 2, the sensor 3 has a voltage, power, current phase, or voltage. It may be a sensor that measures the phase or the like.

As shown in FIG. 3, the selection unit 40 in the data analysis unit 30 includes a division processing unit 41, a first calculation unit 42, a second calculation unit 43, a satisfaction determination unit 44, and a mode determination unit 45. A time range extraction unit 46 is provided.

The division processing unit 41 divides the maximum numerical range by the number of divisions k based on the time-series measurement data acquired by the acquisition unit 10 in one cycle period in the threshold value determination mode. k is an integer of 2 or more. The maximum numerical range is a numerical range from the minimum value to the maximum value among a plurality of measurement values included in the time-series measurement data acquired by the acquisition unit 10 in one cycle period. The division processing unit 41 determines, for example, a division range in which the number of measured values is concentrated among a plurality of division ranges obtained by dividing the maximum numerical range as a determination target range.

FIG. 4 is a diagram for explaining the division processing of the maximum numerical range by the division processing unit according to the first embodiment. In FIG. 4, the time t10 to t20 is one cycle period, and the maximum numerical value range is the range from the minimum measured value x _min to the maximum measured value x _max . The minimum measured value x _min is the minimum value among a plurality of measured values included in the time-series measurement data acquired by the acquisition unit 10 in one cycle period. The maximum measured value x _max is the maximum value among a plurality of measured values included in the time-series measurement data acquired by the acquisition unit 10 in one cycle period. In the example shown in FIG. 4, the measurement output from the sensor 3 The value is the current value of the current flowing through the motor of the processing equipment 2.

In the example shown in FIG. 4, the maximum numerical range is divided into six division ranges by the division processing unit 41, and the number of measured values included in the third division range from the top in FIG. 4 is the largest. In this case, the division processing unit 41 determines the third division range from the top in FIG. 4 as the determination target range.

Based on a plurality of measured values included in the determination target range, the first calculation unit 42 uses, for example, the following equations (1) and the following equations (2) to calculate the average value μ of the measured values in the determination target range and the standard. Calculate the deviation σ. In the following equations (1) and (2), "x _i " indicates the measured value included in the determination target range, and "n" indicates the number of measured values included in the determination target range.

The second calculation unit 43 is a first value x _a obtained by subtracting a value corresponding to the standard deviation σ from the mean value μ and a second value obtained by adding a value corresponding to the standard deviation σ from the mean value μ. Calculate x _b . The value corresponding to the standard deviation σ is, for example, a value h times the standard deviation σ. h is, for example, in the range of 0.5 to 1.5.

The satisfaction determination unit 44 determines whether or not the distribution of a plurality of measured values included in the determination target range satisfies a preset condition. For example, the satisfaction determination unit 44 calculates the median AR _mid of the determination target range. When the determination target range is the third division range from the top in FIG. 4, the median AR _mid is a value _obtained by subtracting the minimum measured value x _min3 from the maximum measured value x max3 and dividing by 2.

The satisfaction determination unit 44 determines whether or not the median AR _mid is equal to or greater than the first value x _a and equal to or less than the second value x _b . When the median AR _mid is equal to or greater than the first value x _a and equal to or less than the second value x _b , the satisfaction determination unit 44 determines that the distribution of a plurality of measured values included in the determination target range satisfies a preset condition. Then, the judgment target range is selected as the extraction numerical range.

When the median AR _mid is not equal to or greater than the first value x _a and not less than or equal to the second value x _b , the range in which many measured values are distributed in the determination target range is largely deviated from the median AR _mid , so that the satisfaction determination unit 44 Does not select the judgment target range as the extraction numerical range.

The mode range determination unit 45 divides the maximum numerical range into a plurality of ranges with a number of divisions p larger than the number of divisions k of the division range, and is a measurement value which is the number of measurement values included in each of the plurality of divided ranges. Calculate the number. p is an integer larger than k. The mode range determination unit 45 determines the range having the largest number of measured values among the plurality of divided ranges as the mode range.

When the median AR _mid is equal to or greater than the first value x _a and equal to or less than the second value x _b , the mode determination unit 44 determines that the mode range determined by the mode determination unit 45 is the first value x _a or more and the first value x a or less. It can be determined whether or not the value is 2 x _b or less. When the mode is equal to or greater than the first value x _a and equal to or less than the second value x _b , the satisfaction determination unit 44 determines that the distribution of a plurality of measured values included in the determination target range satisfies a preset condition. Then, the judgment target range is selected as the extraction numerical range.

When the mode range is 1st value x _a or more and 2nd value x _b or less, it is estimated that the distribution of the measured values in the determination target range includes two or more peaks. When the mode range is equal to or greater than the first value x _a and equal to or less than the second value x _b , the determination target range is not selected as the extraction numerical range.

When the satisfaction determination unit 44 determines that the distribution of a plurality of measured values included in the determination target range does not satisfy the preset conditions, the division processing unit 41 increases the number of divisions k of the numerical range to the maximum. Divide the numerical range again. The first calculation unit 42, the second calculation unit 43, the satisfaction determination unit 44, and the mode range determination unit 45 repeatedly perform the above-mentioned processing on the division range re-divided by the division processing unit 41. As a result, the selection unit 40 can accurately extract the division range in which the number of measured values is concentrated among the plurality of division ranges as the extraction numerical value range. The division range in which the number of measured values is concentrated is a range in which the change in the measured values is small and the number of measured values is large. The number of divisions k may be a fixed value.

FIG. 5 is a diagram showing an example of a change in the measured value output from the sensor in one cycle period according to the first embodiment. The measured value shown in FIG. 5 is a current value flowing through a motor for driving a cutting tool for processing a workpiece in the processing equipment 2. In the example shown in FIG. 5, the current suddenly increases at the beginning of the processing, and after the current suddenly increases, the current decreases sharply, and a period in which the change in the current is small appears. During the period when the change in current is small, the change in the measured value is small. In such a case, the deterioration determination device 1 selects the extraction numerical value range as follows, for example, by using the mode range of the measured value.

FIG. 6 is a graph obtained by dividing the maximum numerical range shown in FIG. 5 into 18 and plotting the number of measured values included in each range. In the example shown in FIG. 6, the measured value in the range of 6000 [A] to 8000 [A] is the mode. For example, the range from 6000 [A] to 8000 [A] is included in the determination target range, and the mode range from 6000 [A] to 8000 [A] is the first value x _a or more and the second. It is assumed that the value is x _b or less. In this case, it is determined that the distribution of a plurality of measured values included in the determination target range satisfies a preset condition, and the determination target range is selected as the extraction numerical value range. As a result, the deterioration determination device 1 can accurately extract the division range in which the number of measured values is concentrated as the extraction numerical value range.

The determination unit 50 determines the determination threshold value based on the extraction numerical value range selected by the selection unit 40 in the threshold value determination mode. For example, when the measured value increases with the deterioration of the processing equipment 2, the determination unit 50 determines the maximum value of the extraction numerical value range as the determination threshold value. Further, when the measured value becomes smaller due to the deterioration of the processing equipment 2, the determination unit 50 determines the minimum value of the extraction numerical value range as the determination threshold value.

Further, the determination unit 50 can also determine the determination threshold value based on a plurality of measured values included in the extraction numerical value range. For example, when the measured value increases with the deterioration of the processing equipment 2, the determination unit 50 determines a value obtained by multiplying the average value μ of a plurality of measured values included in the extraction numerical value range by m as a determination threshold value. m is an integer greater than 1. When the measured value becomes smaller due to the deterioration of the processing equipment 2, the determination unit 50 determines the value obtained by multiplying the average value μ of the plurality of measured values included in the extraction numerical value range by 1 / m as the determination threshold value.

Next, a flowchart of processing by the processing unit 11 of the deterioration determination device 1 will be described. FIG. 7 is a flowchart showing an example of processing by the processing unit of the deterioration determination device according to the first embodiment. The process shown in FIG. 7 is repeatedly executed by the processing unit 11 of the deterioration determination device 1.

As shown in FIG. 7, the processing unit 11 of the deterioration determination device 1 determines whether or not the operation mode is the threshold value determination mode (step S10). The operation mode is set in the processing unit 11 of the deterioration determination device 1 by, for example, input to an input unit (not shown) or a setting button (not shown).

When the processing unit 11 determines that the operation mode is the threshold value determination mode (step S10: Yes), the processing unit 11 performs the threshold value determination process (step S11). The threshold value determination process in step S11 is the process of steps S20 to S26 shown in FIG. 8, which will be described later.

When the processing of step S11 is completed, or when it is determined that the operation mode is not the threshold value determination mode (step S10: No), the processing unit 11 determines whether or not the operation mode is the deterioration determination mode (step). S12).

When the processing unit 11 determines that the operation mode is the deterioration determination mode (step S12: Yes), the processing unit 11 performs deterioration determination processing (step S13). The deterioration determination process in step S13 is the process of steps S50 and S51 shown in FIG. 11, which will be described later. When the process of step S13 is completed, or when it is determined that the operation mode is not the deterioration determination mode (step S12: No), the processing unit 11 ends the process shown in FIG. 7.

FIG. 8 is a flowchart showing an example of the threshold value determination process by the processing unit of the deterioration determination device according to the first embodiment. As shown in FIG. 8, the processing unit 11 of the deterioration determination device 1 determines whether or not the processing by the processing equipment 2 is started (step S20). In step S20, when the processing unit 11 acquires the operation start data from the processing equipment 2 by the acquisition unit 10, the processing unit 11 determines that the processing is started by the processing equipment 2.

When the processing unit 11 of the deterioration determination device 1 determines that the processing is started by the processing equipment 2 (step S20: Yes), the processing unit 11 acquires the measured value from the sensor 3 via the acquisition unit 10 (step S21). Next, the processing unit 11 determines whether or not the processing by the processing equipment 2 is completed (step S22). In step S22, when the operation completion data is acquired from the processing equipment 2 by the acquisition unit 10, the processing unit 11 determines that the processing by the processing equipment 2 is completed.

When the processing unit 11 determines that the processing by the processing equipment 2 has not been completed (step S22: No), the processing unit 11 proceeds to step S21 and obtains the acquisition unit 10 until it is determined that the processing by the processing equipment 2 is completed. The measured value is repeatedly acquired from the sensor 3 via the sensor 3. As a result, the processing unit 11 acquires time-series measurement data including a plurality of measurement values output from the sensor 3 during one cycle of the machining process in the threshold value determination mode. When the processing unit 11 determines that the processing by the processing equipment 2 is completed (step S22: Yes), the processing unit 11 performs the determination target section determination process (step S23). The determination target section determination process in step S23 is the process of steps S30 to S32 shown in FIG. 9, which will be described later.

When the processing unit 11 finishes the determination target section determination process in step S23, the process unit 11 performs the extraction numerical range selection process (step S24). The extraction numerical range selection process in step S24 is the process of steps S40 to S47 shown in FIG. 10, which will be described later.

Next, the processing unit 11 extracts a time range in which a plurality of measured values included in the extraction numerical value range selected by the extraction numerical value range selection process exists as an extraction time range (step S25). Further, the processing unit 11 performs a threshold value determination process for determining a determination threshold value based on the extraction numerical value range selected by the extraction numerical value range selection process (step S26).

In step S26, the determination unit 50 of the processing unit 11 determines, for example, the maximum value of the extraction numerical value range as a determination threshold value or m times the average value μ when the measured value becomes large due to deterioration of the processing equipment 2. The determined value can be determined as a determination threshold value. Further, the determination unit 50 of the processing unit 11 determines, for example, the minimum value of the extraction numerical value range as a determination threshold value when the measured value becomes small due to deterioration of the processing equipment 2, or the average value μ is multiplied by 1 / m. The determined value can be determined as a determination threshold value.

The processing unit 11 ends the processing shown in FIG. 8 when the processing in step S26 is completed or when the processing unit 11 determines that the processing is not started by the processing equipment 2 (step S20: No).

FIG. 9 is a flowchart showing an example of the determination target section determination process by the processing unit of the deterioration determination device according to the first embodiment. As shown in FIG. 9, the division processing unit 41 of the processing unit 11 in the deterioration determination device 1 divides the maximum numerical range by the number of divisions k to generate k division ranges (step S30).

Next, the division processing unit 41 of the processing unit 11 counts the number of measured values included in each division range (step S31), and determines the division range having the largest number of existing measured values among the k division ranges. The determination target range is determined (step S32), and the process shown in FIG. 9 is terminated.

FIG. 10 is a flowchart showing an example of extraction numerical range selection processing by the processing unit of the deterioration determination device according to the first embodiment. As shown in FIG. 10, the first calculation unit 42 of the processing unit 11 calculates the average value μ and the standard deviation σ of the measured values included in the determination target range based on the plurality of measured values included in the determination target range. (Step S40), and the median AR _mid of the determination target range is calculated (step S41).

Next, the second calculation unit 43 of the processing unit 11 calculates the first value x _a and the second value x _b based on the mean value μ and the standard deviation σ calculated by the first calculation unit 42 (. Step S42). The first value x _a is a value obtained by subtracting a value corresponding to the standard deviation σ from the mean value μ, and the second value x _b is a value obtained by adding a value corresponding to the standard deviation σ from the mean value μ. The value obtained.

Next, the mode determination unit 45 of the processing unit 11 divides the maximum numerical range with a division number p larger than the division number k to generate p division ranges (step S43). The mode range determination unit 45 calculates the number of measured values included in each of the p divided ranges, and determines the divided range having the largest number of measured values as the most frequent range (step S44). The number of divisions p may be a fixed value or a value directly proportional to the number of divisions k.

Next, the satisfaction determination unit 44 of the processing unit 11 determines whether or not the median AR _mid is equal to or greater than the first value x _a and equal to or less than the second value x _b (step S45). When the sufficiency determination unit 44 determines that the median AR _mid is equal to or greater than the first value x _a and equal to or less than the second value x _b (step S45: Yes), the mode range is the first value x _a or more and the second value. It is determined whether or not the value is not less than or equal to x _b (step S46).

When the mode determination range 44 determines that the mode is equal to or greater than the first value x _a and equal to or less than the second value x _b (step S46: Yes), the satisfaction determination unit 44 selects the determination target range as the extraction numerical range (step S47). ..

When the processing unit 11 determines that the median AR _mid is not equal to or more than the first value x _a and not less than or equal to the second value x _b when the processing of step S47 is completed (step S45: No), the mode is the first. When it is determined that the value is not 1 value x _a or more and the second value x _b or less (step S46: No), the process shown in FIG. 10 is terminated.

FIG. 11 is a flowchart showing an example of deterioration determination processing by the processing unit of the deterioration determination device according to the first embodiment. As shown in FIG. 11, the deterioration determination unit 31 of the processing unit 11 in the deterioration determination device 1 determines whether or not the determination threshold value has been set (step S50). When the deterioration determination unit 31 determines that the determination threshold value has already been set (step S50: Yes), the deterioration determination unit 31 performs a determination process (step S51). The determination process in step S51 is the process of steps S60 to S66 shown in FIG. 12, which will be described later.

The deterioration determination unit 31 ends the process shown in FIG. 11 when the process of step S51 is completed or when it is determined that the determination threshold value has not been set (step S50: No).

FIG. 12 is a flowchart showing an example of the determination process by the deterioration determination unit of the deterioration determination device according to the first embodiment. As shown in FIG. 12, the deterioration determination unit 31 determines whether or not the processing by the processing equipment 2 is started (step S60). In step S60, the deterioration determination unit 31 determines that the processing is started by the processing equipment 2 when the operation start data is acquired from the processing equipment 2 by the acquisition unit 10.

When the deterioration determination unit 31 determines that the processing is started by the processing equipment 2 (step S60: Yes), the deterioration determination unit 31 acquires the measured value from the sensor 3 via the acquisition unit 10 (step S61). Next, the deterioration determination unit 31 determines whether or not the processing by the processing equipment 2 is completed (step S62). In step S62, when the operation completion data is acquired from the processing equipment 2 by the acquisition unit 10, the processing unit 11 determines that the processing by the processing equipment 2 is completed.

When the deterioration determination unit 31 determines that the processing by the processing equipment has not been completed (step S62: No), the process proceeds to step S61, and the acquisition unit 10 continues until it is determined that the processing by the processing equipment 2 is completed. The measured value is repeatedly acquired from the sensor 3 via the sensor 3. As a result, the deterioration determination unit 31 acquires time-series measurement data including a plurality of measurement values output from the sensor 3 during one cycle of the machining process in the threshold value determination mode. When the deterioration determination unit 31 determines that the processing by the processing equipment 2 is completed (step S62: Yes), the deterioration determination unit 31 determines a plurality of measurement values included in the extraction time range among the plurality of measurement values included in the time series measurement data. Extract (step S63).

Next, the deterioration determination unit 31 compares the plurality of measured values extracted in step S63 with the determination threshold value (step S64), and determines whether or not the number of times the threshold value is exceeded is equal to or greater than the preset number of times. Determination (step S65). The number of times the threshold value is exceeded indicates the number of measured values that exceed the determination threshold value among a plurality of measured values. When it is determined that the number of times the threshold value is exceeded is equal to or greater than the set number of times (step S65: Yes), the deterioration determination unit 31 outputs deterioration information which is information indicating deterioration of the processing equipment 2 (step S66). For example, as a method of outputting deterioration information by the deterioration determination unit 31, there is a display of deterioration information on the display unit 13 or transmission of deterioration information to the terminal device 4 via the communication unit 12.

The deterioration determination unit 31 determines that the processing of step S66 is completed, that the processing is not started by the processing equipment 2 (step S60: No), or that the number of times the threshold value is exceeded is not equal to or greater than the set number of times (step S60: No). Step S65: No), the process shown in FIG. 12 is terminated.

FIG. 13 is a diagram showing an example of the hardware configuration of the deterioration determination device according to the first embodiment. As shown in FIG. 13, the deterioration determination device 1 includes a computer including a processor 101, a memory 102, a communication device 103, an interface circuit 104, and a display device 105.

The processor 101, the memory 102, the communication device 103, the interface circuit 104, and the display device 105 can transmit and receive data to and from each other by, for example, the bus 106. The communication unit 12 is realized by the communication device 103. The display unit 13 is realized by the display device 105. The processor 101 executes the functions of the data analysis unit 30 and the deterioration determination unit 31 by reading and executing the program stored in the memory 102. The processor 101 is, for example, an example of a processing circuit, and includes one or more of a CPU (Central Processing Unit), a DSP (Digital Signal Processor), and a system LSI (Large Scale Integration).

The memory 102 includes one or more of RAM (Random Access Memory), ROM (Read Only Memory), flash memory, EPROM (Erasable Programmable Read Only Memory), and EEPROM (registered trademark) (Electrically Erasable Programmable Read Only Memory). include. Further, the memory 102 includes a recording medium in which a computer-readable program is recorded. Such recording media include one or more of non-volatile or volatile semiconductor memories, magnetic discs, flexible memories, optical discs, compact discs, and DVDs (Digital Versatile Discs). The deterioration determination device 1 may include an integrated circuit such as an ASIC (Application Specific Integrated Circuit) and an FPGA (Field Programmable Gate Array).

The deterioration determination device 1 according to the first embodiment includes an acquisition unit 10, a selection unit 40, a determination unit 50, and a deterioration determination unit 31. The acquisition unit 10 acquires time-series measurement data including a plurality of measurement values output from the sensor 3 that detects the state of the processing equipment 2 during the period in which the processing equipment 2 is processing the workpiece. The selection unit 40 divides the maximum numerical range, which is a numerical range from the minimum value to the maximum value, among a plurality of measurement values included in the time-series measurement data acquired by the acquisition unit 10 in the threshold determination mode for determining the determination threshold. The range with the largest number of measured values included is selected as the extraction numerical range. The maximum numerical range is an example of a numerical range, and the extracted numerical range is an example of an extracted range. In the threshold value determination mode, the determination unit 50 determines the determination threshold value based on the extraction numerical value range selected by the selection unit 40 or a plurality of measured values included in the extraction numerical value range. The determination threshold is an example of the threshold. The deterioration determination unit 31 determines the deterioration of the processing equipment 2 based on the time-series measurement data acquired by the acquisition unit 10 in the deterioration determination mode for determining the deterioration of the processing equipment 2 and the determination threshold value determined by the determination unit 50. judge. As a result, the deterioration determination device 1 can save the trouble of presetting for deterioration determination.

Further, the selection unit 40 sets the division range having the largest number of measured values included in the plurality of division ranges obtained by dividing the maximum numerical range as the determination target range, and distributes the plurality of measurement values included in the determination target range in advance. When the set condition is satisfied, the selection process is performed to select the judgment target range as the extraction numerical range, and when the distribution of multiple measured values included in the judgment target range does not satisfy the preset condition, the maximum numerical range is satisfied. The number of divisions k is increased and the selection process is repeated. Thereby, the deterioration determination device 1 can appropriately select the extraction numerical value range for determining the determination threshold value.

Further, the selection unit 40 includes a first calculation unit 42, a second calculation unit 43, and a satisfaction determination unit 44. The first calculation unit 42 calculates the average value μ and the standard deviation σ of a plurality of measured values included in the determination target range. The second calculation unit 43 is a first value x _a obtained by subtracting a value corresponding to the standard deviation σ from the mean value μ and a second value obtained by adding a value corresponding to the standard deviation σ from the mean value μ. Calculate x _b . The satisfaction determination unit 44 determines whether or not the median AR _mid of the determination target range is equal to or greater than the first value x _a and equal to or less than the second value x _b , and the median AR _mid of the determination target range is the first value x. When it is _a or more and the second value x _b or less, it is determined that the distribution of a plurality of measured values included in the determination target range satisfies a preset condition. Thereby, the deterioration determination device 1 can more appropriately select the extraction numerical value range for determining the determination threshold value.

Further, the selection unit 40 divides the maximum numerical range into a plurality of ranges with a number of divisions p larger than the number of divisions k of the division range, calculates the number of measured values included in each of the plurality of divided ranges, and a plurality. The mode range determination unit 45 for determining the range having the largest number of measured values as the mode range is provided. The sufficiency determination unit 44 distributes a plurality of measured values included in the determination target range when the mode determined by the mode determination unit 45 is the first value x _a or more and the second value x _b or less. Is determined to satisfy the preset condition. As a result, the deterioration determination device 1 can reduce the possibility that the determination target range in which the distribution of the measured values includes two or more peaks is selected as the extraction numerical value range, and determines the determination threshold value. It is possible to select the extraction numerical range for this purpose more appropriately.

Further, the selection unit 40 extracts a time range in which the extraction numerical value range exists in the period of one cycle of the processing process for the workpiece by the processing equipment 2. The deterioration determination unit 31 is a plurality of measurement values and determination units included in the extraction time range extracted by the selection unit 40 among the plurality of measurement values included in the time-series measurement data acquired by the acquisition unit 10 in the deterioration determination mode. Deterioration of the processing equipment 2 is determined based on the threshold value determined by 50. As a result, the deterioration determination device 1 can more appropriately select the measured value for comparison with the determination threshold value in the deterioration determination mode, and can accurately determine the deterioration of the processing equipment 2.

Embodiment 2.
The deterioration determination device according to the second embodiment is different from the first embodiment in that the extraction time range is selected from the result of excluding the measurement values in a specific time range from the plurality of measurement values included in the time series measurement data. It is different from the deterioration determination device 1. Hereinafter, the components having the same functions as those of the first embodiment are designated by the same reference numerals and the description thereof will be omitted, and the differences from the deterioration determination device 1 according to the first embodiment will be mainly described.

FIG. 14 is a diagram showing an example of the configuration of the deterioration determination device according to the second embodiment of the present invention. As shown in FIG. 14, the deterioration determination device 1A according to the second embodiment is different from the deterioration determination device 1 in that it includes a processing unit 11A having a data analysis unit 30A instead of the data analysis unit 30.

The data analysis unit 30A is different from the data analysis unit 30 in that the selection unit 40A having the time range extraction unit 46A is provided in place of the selection unit 40 having the time range extraction unit 46. The time range extraction unit 46A selects an extraction time range from the result of excluding the measurement value of a specific time range from the plurality of measurement values included in the time series measurement data.

FIG. 15 is a diagram showing an example of an extraction numerical value range and an extraction time range selected by the deterioration determination device according to the second embodiment. In FIG. 15, the vertical axis indicates the magnitude of the measured value, and the horizontal axis indicates the time.

In FIG. 15, the time t10 is the time when the processing of the processing equipment 2 is started, and the time t20 is the time when the processing of the processing equipment 2 is completed. Further, the period from the time t10 to the time t11 is a period in which the measured value suddenly increases. Hereinafter, the length of time from time t10 to time t11 is referred to as a period T1. Further, a period q times the period T1 is referred to as a period T2. Although q is 2, it may be a value other than 2.

The time range extraction unit 46A excludes the time from the start of the processing of the processing equipment 2 to the elapse of the period T2, which is twice the period T1, in one cycle period as a specific time range. Then, the time range extraction unit 46A extracts the time range in which the measured value exists in the extraction numerical value range from the time range from the time t12 to the time t20 as the extraction time range. In the example shown in FIG. 15, the time range extraction unit 46A extracts the period from time t12 to time t13 as the extraction time range. As a result, the time range extraction unit 46A can accurately extract the measured value in a state where the change in the measured value output from the sensor 3 is small.

FIG. 16 is a flowchart showing an example of the threshold value determination process by the processing unit of the deterioration determination device according to the second embodiment. Since the processing of steps S70 to S74 and S77 shown in FIG. 16 is the same as the processing of steps S20 to S24 and S26 shown in FIG. 8, the description thereof will be omitted.

As shown in FIG. 16, the time range extraction unit 46A excludes a specific time range from one cycle period of the processing process (step S75). The specific time range is, for example, the time range from time t10 to time t12 shown in FIG.

Next, the time range extraction unit 46A extracts the time range of a plurality of measured values included in the extraction numerical value range from the time range excluding the specific time range in one cycle period of the processing process as the extraction time range (). Step S76). In step S76, the time range extraction unit 46A extracts, for example, the time range from the time t12 to the time t13 shown in FIG. 15 as the extraction time range.

The example of the hardware configuration of the deterioration determination device 1A according to the second embodiment is the same as the hardware configuration of the deterioration determination device 1 shown in FIG. The processor 101 can execute the functions of the data analysis unit 30A and the deterioration determination unit 31 by reading and executing the program stored in the memory 102.

As described above, the selection unit 40A of the deterioration determination device 1A according to the second embodiment extracts the numerical value range from the result of excluding the measurement value in the specific time range from the plurality of measurement values included in the time series measurement data. select. As a result, the deterioration determination device 1A can more appropriately select the measured value for comparison with the determination threshold value in the deterioration determination mode, and can accurately determine the deterioration of the processing equipment 2.

Embodiment 3.
The deterioration determination device according to the third embodiment is different from the deterioration determination device 1A according to the second embodiment in that the deterioration determination method in the deterioration determination mode is different. In the following, the components having the same functions as those of the second embodiment are designated by the same reference numerals and the description thereof will be omitted, and the differences from the deterioration determination device 1A according to the second embodiment will be mainly described.

FIG. 17 is a diagram showing an example of the configuration of the deterioration determination device according to the third embodiment of the present invention. As shown in FIG. 17, the deterioration determination device 1B according to the third embodiment is different from the deterioration determination device 1A in that it includes a processing unit 11B having a deterioration determination unit 31B instead of the deterioration determination unit 31.

The deterioration determination unit 31B includes a range selection unit 51, a comparison value determination unit 52, and a determination processing unit 53. The range selection unit 51 is a measurement included in a plurality of ranges obtained by dividing a numerical range from the minimum value to the maximum value among a plurality of measurement values included in the time-series measurement data acquired by the acquisition unit 10 in the deterioration determination mode. Select the range with the largest number of values as the comparison range. The range selection unit 51 selects the comparison range by, for example, the same process as the process in which the data analysis unit 30 or the data analysis unit 30A selects the extraction numerical range.

The comparison value determination unit 52 determines the comparison value by a determination method corresponding to the comparison value determination mode selected from the plurality of comparison value determination modes. The plurality of comparison value determination modes include, for example, a first comparison value determination mode and a second comparison value determination mode. The comparison value determination mode is set in the deterioration determination unit 31B by, for example, input to an input unit (not shown) or a setting button (not shown).

The comparison value determination unit 52 determines a comparison value, which is a value to be compared with the determination threshold value, based on the comparison range selected by the range selection unit 51 or a plurality of measured values included in the comparison range. For example, when the measured value becomes large due to deterioration of the processing equipment 2, the comparison value determining unit 52 determines the maximum value in the comparison range as the comparison value. Further, when the measured value becomes small due to deterioration of the processing equipment 2, for example, the comparison value determining unit 52 determines the minimum value in the comparison range as the comparison value.

Further, when the measured value becomes large due to the deterioration of the processing equipment 2, the comparison value determining unit 52 determines as the comparison value a value obtained by multiplying the average value μ'of a plurality of measured values included in the comparison range by m'. .. m'is a value larger than 1 but smaller than m. Further, when the measured value becomes smaller due to the deterioration of the processing equipment 2, the comparison value determining unit 52 sets the value obtained by multiplying the average value μ'of the plurality of measured values included in the comparison range by 1 / m'as the comparison value. decide.

Further, when the second comparison value determination mode is selected as the comparison value determination mode, the comparison value determination unit 52 calculates and calculates the average value μ and the standard deviation σ of a plurality of measured values included in the comparison range. The comparison value is calculated by subtracting or adding the value corresponding to the standard deviation σ calculated from the average value μ. Hereinafter, in order to distinguish the mean value μ and the standard deviation σ calculated by the comparison value determination unit 52 from the mean value μ and the standard deviation σ calculated by the data analysis units 30 and 30A, the mean value μ'and the standard deviation σ are used. Described as σ'.

The comparison value determination unit 52 includes a calculation processing unit 61 and a comparison value calculation unit 62. When the second comparison value determination mode is selected as the comparison value determination mode, the calculation processing unit 61 calculates the average value μ'and the standard deviation σ'of a plurality of measured values included in the comparison range.

The comparison value calculation unit 62 calculates the comparison value by subtracting or adding the value corresponding to the standard deviation σ'calculated by the calculation processing unit 61 from the average value μ'calculated by the calculation processing unit 61. The value corresponding to the standard deviation σ'is, for example, a value obtained by multiplying the standard deviation σ'by h'. h'is, for example, in the range of 0.5 to 1.5. For example, when the measured value increases with the deterioration of the processing equipment 2, the comparison value determining unit 52 determines as a comparison value a value obtained by adding a value corresponding to the standard deviation σ'from the average value μ'. Further, when the measured value becomes smaller due to the deterioration of the processing equipment 2, the comparison value determining unit 52 determines as a comparison value a value obtained by subtracting a value corresponding to the standard deviation σ'from the average value μ'.

The determination processing unit 53 determines the deterioration of the processing equipment 2 based on the comparison result between the comparison value determined by the comparison value determination unit 52 and the determination threshold value. For example, the determination processing unit 53 determines when the comparison value determined in the first comparison value determination mode is the maximum value or the minimum value of the comparison range, and when the comparison value becomes w times the determination threshold value, the processing equipment 2 Is determined to have deteriorated. w is a value larger than 1 when the measured value becomes large due to deterioration of the processing equipment 2, and is, for example, 1.2. Further, w is a value smaller than 1 when the measured value becomes smaller due to deterioration of the processing equipment 2, and is, for example, 0.8.

Further, it is assumed that the comparison value determined in the first comparison value determination mode is a value based on the average value μ'. In this case, the determination processing unit 53 deteriorates the processing equipment 2 when the measured value becomes large due to the deterioration of the processing equipment 2 and the comparison value determined in the second comparison value determination mode is larger than the determination threshold value. It is determined that it is. Further, in the determination processing unit 53, when the measured value becomes small due to the deterioration of the processing equipment 2, the processing equipment 2 deteriorates when the comparison value determined in the second comparison value determination mode is smaller than the determination threshold value. It is determined that there is.

FIG. 18 is a flowchart showing an example of the comparison value determination process by the processing unit of the deterioration determination device according to the third embodiment. Since the processing of steps S80 to S82 shown in FIG. 18 is the same as the processing of steps S60 to S62 shown in FIG. 12, the description thereof will be omitted.

As shown in FIG. 18, when the deterioration determination unit 31B determines that the processing by the processing equipment 2 is completed (step S82: Yes), the deterioration determination unit 31B performs the determination target section determination process (step S83). The determination target section determination process in step S83 is the same process as the process of steps S30 to S32 shown in FIG.

When the deterioration determination unit 31B finishes the determination target section determination process in step S83, the deterioration determination unit 31B performs the comparison range selection process (step S84). The comparison range selection process in step S84 is the process of steps S90 to S97 shown in FIG. 19, which will be described later.

Next, the deterioration determination unit 31B performs a threshold value determination process for determining the comparison value based on the comparison range selected by the range selection unit 51 or a plurality of measured values included in the comparison range (step S85), and FIG. The process shown in is terminated. The determination process in step S85 is the process of steps S100 to S102 shown in FIG. 20, which will be described later.

FIG. 19 is a flowchart showing an example of the comparison range selection process by the deterioration determination unit of the deterioration determination device according to the third embodiment. In the processing of steps S90 to S97 shown in FIG. 19, in the processing of steps S40 to S47 shown in FIG. 10, the average value μ, the standard deviation σ, the first value x _a , and the second value x _b are set to the average value μ'. , Standard deviation σ', first value x _a ', and second value x _b '.

Specifically, the deterioration determination unit 31B calculates the average value μ'and the standard deviation σ'of the measurement values included in the determination target range based on the plurality of measurement values included in the determination target range (step S90). , The median AR _mid of the determination target range is calculated (step S91).

Next, the deterioration determination unit 31B calculates the first value x _{a'and the second value x b '} (step S92). The first value x _a'is a value obtained by subtracting the value corresponding to the standard deviation σ'from the mean value μ', and the second value x _b'is a value obtained by subtracting the value corresponding to the standard deviation σ'from the mean value μ'. It is a value obtained by adding the above values.

Next, the deterioration determination unit 31B divides the maximum numerical range by a division number p larger than the division number k to generate p division ranges (step S93). Further, the deterioration determination unit 31B calculates the number of measured values included in each of the p division ranges, and determines the division range having the maximum number of measured values as the mode (step S94).

Next, the deterioration determination unit 31B determines whether or not the median AR _mid is equal to or greater than the first value x _{a'and equal to or less than the second value x b '} (step S95). When the deterioration determination unit 31B determines that the median AR _mid is equal to or greater than the first value x _{a'and equal to or less than the second value x b '} (step S95: Yes), the mode range is equal to or greater than the first value x _a '. Moreover, it is determined whether or not it is equal to or less than the second value x _b '(step S96).

When the deterioration determination unit 31B determines that the mode range is equal to or greater than the first value x _{a'and equal to or less than the second value x b '} (step S96: Yes), the deterioration determination unit 31B selects the determination target range as the comparison range (step S97). ). When the deterioration determination unit 31B determines that the median AR _mid is not equal to or more than the first value x _a'and not less than or equal to the second value x _b'when the process of step S97 is completed (step S95: No), it is the mode. When it is determined that the range is not equal to or more than the first value x _{a'and not less than or equal to the second value x b '} (step S96: No), the process shown in FIG. 19 is terminated.

FIG. 20 is a flowchart showing an example of the determination process by the deterioration determination unit of the deterioration determination device according to the third embodiment. As shown in FIG. 20, the deterioration determination unit 31B determines whether or not the first comparison value determination mode is selected as the comparison value determination mode (step S100).

When the deterioration determination unit 31B determines that the first comparison value determination mode is selected (step S100: Yes), the deterioration determination unit 31B determines the maximum value or the minimum value of the comparison range as the comparison value (step S101). Further, when the deterioration determination unit 31B determines that the first comparison value determination mode is not selected (step S100: No), the deterioration determination unit 31B determines a value based on the mean value μ'and the standard deviation σ'as a comparison value (step). S102). The deterioration determination unit 31B ends the process shown in FIG. 20 when the process of step S101 is completed or when the process of step S102 is completed.

The hardware configuration example of the deterioration determination device 1B according to the third embodiment is the same as the hardware configuration of the deterioration determination device 1 shown in FIG. The processor 101 can execute the functions of the data analysis unit 30A and the deterioration determination unit 31B by reading and executing the program stored in the memory 102.

As described above, the deterioration determination unit 31B of the deterioration determination device 1B according to the third embodiment includes a range selection unit 51, a comparison value determination unit 52, and a determination processing unit 53. The range selection unit 51 is a measurement included in a plurality of ranges obtained by dividing a numerical range from the minimum value to the maximum value among a plurality of measurement values included in the time-series measurement data acquired by the acquisition unit 10 in the deterioration determination mode. Select the range with the largest number of values as the comparison range. The comparison value determination unit 52 determines a comparison value, which is a value to be compared with the determination threshold value, based on the comparison range selected by the range selection unit 51 or a plurality of measured values included in the comparison range. The determination processing unit 53 determines the deterioration of the processing equipment 2 based on the comparison result between the comparison value determined by the comparison value determination unit 52 and the determination threshold value. As a result, the deterioration determination device 1B can accurately determine the deterioration of the processing equipment 2.

Further, the comparison value determination unit 52 includes a calculation processing unit 61 and a comparison value calculation unit 62. The calculation processing unit 61 calculates the average value μ'and the standard deviation σ'of a plurality of measured values included in the comparison range. The comparison value calculation unit 62 calculates the comparison value by subtracting or adding the value corresponding to the standard deviation σ'calculated by the calculation processing unit 61 from the average value μ'calculated by the calculation processing unit 61. As a result, the deterioration determination device 1B can accurately determine the deterioration of the processing equipment 2.

The configuration shown in the above embodiments shows an example of the contents of the present invention, can be combined with another known technique, and is one of the configurations as long as it does not deviate from the gist of the present invention. It is also possible to omit or change the part.

1,1A, 1B Deterioration judgment device, 2 Processing equipment, 3 Sensors, 4 Terminal devices, 10 Acquisition section, 11, 11A, 11B Processing section, 12 Communication section, 13 Display section, 21 Time series data acquisition section, 22 Operation data Acquisition unit, 30,30A data analysis unit, 31,31B deterioration determination unit, 40,40A selection unit, 41 division processing unit, 42 first calculation unit, 43 second calculation unit, 44 satisfaction determination unit, 45 most frequent range determination Unit, 46, 46A Time range extraction unit, 50 determination unit, 51 range selection unit, 52 comparison value determination unit, 53 judgment processing unit, 61 calculation processing unit, 62 comparison value calculation unit.

Claims (12)

An acquisition unit that acquires time-series measurement data including a plurality of measurement values output from a sensor that detects the state of the processing equipment during the period when the processing equipment is processing the workpiece.
Measurement included in a plurality of ranges obtained by dividing a numerical range from the minimum value to the maximum value among the plurality of measurement values included in the time-series measurement data acquired by the acquisition unit in the threshold value determination mode for determining the threshold value. A selection unit that selects the range with the largest number of values as the extraction range,
A determination unit that determines the threshold value based on the extraction range selected by the selection unit or a plurality of measured values included in the extraction range.
Deterioration determination unit for determining deterioration of the processing equipment based on the time-series measurement data acquired by the acquisition unit and the threshold value determined by the determination unit in the deterioration determination mode for determining the deterioration of the processing equipment. A deterioration determination device characterized by being provided with. The selection unit is
The division range having the largest number of measured values included in the plurality of divided ranges obtained by dividing the numerical range is set as the judgment target range, and the condition in which the distribution of the plurality of measured values included in the determination target range is preset is satisfied. If this is the case, a selection process is performed to select the determination target range as the extraction range, and if the distribution of a plurality of measured values included in the determination target range does not satisfy the preset conditions, the number of divisions of the numerical range is performed. The deterioration determination device according to claim 1, wherein the selection process is repeated in an increasing manner. The selection unit is
The first calculation unit that calculates the average value and standard deviation of a plurality of measured values included in the determination target range, and
A second calculation unit that calculates a first value obtained by adding a value corresponding to the standard deviation from the average value and a second value obtained by subtracting a value corresponding to the standard deviation from the average value. ,
When it is determined whether or not the median value of the determination target range is the first value or more and the second value or less, and the median value of the determination target range is the first value or more and the second value or less. The deterioration determination device according to claim 2, further comprising a satisfaction determination unit that determines that the distribution of a plurality of measured values included in the determination target range satisfies the preset condition. The selection unit is
The numerical range is divided into a plurality of ranges by a number of divisions larger than the number of divisions of the division range, the number of measured values included in each of the divided ranges is calculated, and the measurement is performed among the plurality of ranges. It is equipped with a mode range determination unit that determines the range with the largest number of values as the mode range.
The sufficiency determination unit
When the mode determined by the mode determination unit is equal to or greater than the first value and equal to or less than the second value, the distribution of a plurality of measured values included in the determination target range is preset. The deterioration determination device according to claim 3, wherein it is determined that the conditions are satisfied. The selection unit is
The invention according to any one of claims 1 to 4, wherein the extraction range is selected from the result of excluding the measurement values in a specific time range from the plurality of measurement values included in the time-series measurement data. Deterioration judgment device. The selection unit is
The time range in which the extraction range exists is extracted from the period of one cycle of the processing of the workpiece by the processing equipment.
The deterioration determination unit is
In the deterioration determination mode, among the plurality of measurement values included in the time-series measurement data acquired by the acquisition unit, the plurality of measurement values included in the time range extracted by the selection unit are determined by the determination unit. The deterioration determination device according to any one of claims 1 to 5, wherein the deterioration of the processing equipment is determined based on the threshold value. The deterioration determination unit is
The number of measured values included in the plurality of ranges obtained by dividing the numerical range from the minimum value to the maximum value among the plurality of measured values included in the time-series measurement data acquired by the acquisition unit in the deterioration determination mode. A range selection unit that selects the range with the largest number of comparisons as a comparison range,
A comparison value determining unit that determines a comparison value that is a value to be compared with the threshold value based on the comparison range selected by the range selection unit or a plurality of measured values included in the comparison range.
Any of claims 1 to 5, further comprising a determination processing unit for determining deterioration of the processing equipment based on a comparison result between the comparison value and the threshold value determined by the comparison value determination unit. The deterioration determination device according to one. The comparison value determination unit is
A calculation processing unit that calculates the average value and standard deviation of a plurality of measured values included in the comparison range, and
It is provided with a comparison value calculation unit that calculates the comparison value by subtracting or adding a value corresponding to the standard deviation calculated by the calculation processing unit from the average value calculated by the calculation processing unit. 7. The deterioration determination device according to claim 7. The processing equipment is
A cutting tool for cutting the workpiece and a motor for rotating the cutting tool are included.
The measured value of the sensor is
The deterioration determination device according to any one of claims 1 to 8, wherein the value is a value of a current flowing through the motor. An acquisition unit that acquires time-series measurement data including a plurality of measurement values output from a sensor that detects the state of the processing equipment during the period when the processing equipment is processing the workpiece.
The range in which the number of measured values included is the largest among the plurality of ranges obtained by dividing the numerical range from the minimum value to the maximum value among the plurality of measured values included in the time-series measurement data acquired by the acquisition unit. The selection part to be selected as the extraction range and
It is characterized by comprising a determination unit for determining a threshold value for determining deterioration of the processing equipment based on the extraction range selected by the selection unit or a plurality of measured values included in the extraction range. Threshold determination device. It is a thresholding method performed by a computer.
An acquisition step of acquiring time-series measurement data including a plurality of measurement values output from a sensor that detects the state of the processing equipment during the period when the processing equipment is processing the workpiece.
The range in which the number of measured values included is the largest among the plurality of ranges obtained by dividing the numerical range from the minimum value to the maximum value among the plurality of measured values included in the time-series measurement data acquired in the acquisition step. The selection step to select as the extraction range and
It is characterized by including a determination step of determining a threshold value for determining deterioration of the processing equipment based on the extraction range selected in the selection step or a plurality of measured values included in the extraction range. Threshold determination method. An acquisition step of acquiring time-series measurement data including a plurality of measurement values output from a sensor that detects the state of the processing equipment during the period when the processing equipment is processing the workpiece.
The range in which the number of measured values included is the largest among the plurality of ranges obtained by dividing the numerical range from the minimum value to the maximum value among the plurality of measured values included in the time-series measurement data acquired in the acquisition step. The selection step to select as the extraction range and
To have a computer execute a determination step of determining a threshold value for determining deterioration of the processing equipment based on the extraction range selected in the selection step or a plurality of measured values included in the extraction range. A featured threshold determination program.

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