JP7106866B2 - EFEM and EFEM gas replacement method - Google Patents

Description

The present invention relates to a load port device for taking out wafers from a transfer container in a semiconductor factory.

2. Description of the Related Art In a semiconductor manufacturing process, a wafer transfer container called a FOUP, a FOSB, or the like is used to transfer wafers between processing apparatuses. Further, a load port device is used when transferring wafers from such a wafer transfer container to the processing chamber. The load port device has a door that engages with the lid of the wafer transfer container and opens and closes the device opening, and a door driving section that drives the door.

In the load port device, the door must be properly positioned in the closed position so that the door reliably closes the device opening and reliably engages with the lid of the wafer transfer container. As a technology to prevent the door from taking an inappropriate posture in the closed position, for example, a technology is available in which a leaf spring is used to fix the door to a post, and the leaf spring is elastically deformed to suppress the inclination of the door. Proposed.

JP 2015-50417 A

However, in the conventional load port device, the force for closing the lid and the device opening becomes uneven due to uneven deformation of the leaf spring, which causes a problem of impeding reliable opening and closing operations of the lid and the device opening. there is In addition, due to the deformation of the leaf spring, it becomes difficult to precisely adjust the pressing force applied from the door when closing the lid or the device opening. A problem that the apparatus becomes large-scale can occur.

SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and provides a load port device capable of suitably adjusting the attitude of the door, and a method of connecting wafer transport containers using such a load port device.

A load port device according to the present invention includes:
a frame having a device opening;
a door detachably engaged with the lid of the wafer transfer container to open and close the lid and the device opening;
a movable arm portion connected to the door, and the door moves between a closed position in which the door closes the device opening and an open position in which the door opens the device opening via the movable arm portion; a door driving unit for moving the door;
a door adjuster provided at a connection position between the door and the movable arm for adjusting the posture of the door.

Since the load port device according to the present invention has the door adjustment section provided at the connection position with the movable arm section, the position of the door is adjusted by the door driving section so that the door is appropriately positioned at the closed position. can do. By adjusting the attitude of the door by means of the door adjusting section, it is possible to perform more delicate positional adjustment than in the case of adjusting the attitude of the door by the driving amount of the door driving section. In addition, since the door adjustment section is provided at a connection position close to the door, it is possible to adjust the position of the door from the outside through the device opening during maintenance, etc., without entering the mini-environment where the load port device is installed. Since the adjustment can be performed, the load port device according to the present invention is excellent in maintainability.

Further, for example, the connection position where the door adjusting portion is provided may be arranged on the inner surface of the door, which is the inner surface of the door.

Since the connecting position is on the inner surface of the door, it is possible to simplify the structure of the door adjuster. In addition, if the connection position is on the inner surface of the door, maintenance is easy because access is easy through the opening of the device. However, the connection position where the door adjusting portion is provided may be arranged at a position away from the inner surface of the door via a joint or the like.

Further, the connecting position where the door adjusting portion is provided may be arranged so as to overlap with the center of gravity of the door when viewed from the horizontal direction on the inner surface of the door.

By arranging the connecting position so as to overlap with the position of the center of gravity of the door, the support of the door by the arm is stabilized, so that the posture of the door can be easily adjusted by the door adjusting section.

Further, for example, the door adjustment section may have an inclination adjustment mechanism that adjusts an inclination of the door in the closed position.

The door adjustment unit has an inclination adjustment mechanism, so that when the door is positioned at the closed position, the inclination of the door can be adjusted so that the device opening can be properly closed or the lid of the wafer transport container can be properly engaged. can do.

Further, for example, the door adjustment unit may have a relay plate sandwiched between the inner surface of the door and the movable arm unit,
The tilt adjustment mechanism may include a spacer capable of adjusting a width of a gap between the door and the movable arm, and a tilt adjustment fixing screw penetrating the spacer and fixing the spacer.

Such a tilt adjustment mechanism can easily and accurately adjust the tilt of the door.

Further, for example, the door adjustment section has a position adjustment mechanism that adjusts the position of the door in the closed position.

The door adjustment unit has a position adjustment mechanism, so that when the door is positioned at the closed position, the door is adjusted so that the device opening can be properly closed or the door can be properly engaged with the lid of the wafer transport container. can do.

Further, for example, the door adjustment unit may have a relay plate sandwiched between the inner surface of the door and the movable arm unit,
The relay plate may have a guide portion that guides relative positional movement of the door with respect to the movable arm.

A door driving unit having such a relay plate can easily perform accurate position adjustment of the door. Further, since the door drive section has the relay plate, the tilt adjustment mechanism of the door can be realized with a simple configuration.

A method for connecting a wafer transport container by a load port device according to the present invention includes:
Using any of the load port devices described above,
a step of adjusting the attitude of the door by driving the door adjustment unit;
engaging the door in the closed position with the lid of the wafer carrier;
positioning the door at the open position by the door driving unit, opening the lid of the wafer transfer container, and allowing the wafer transfer container and the device opening to communicate with each other;
I do.

According to the connection method of the wafer transfer method, since the door is driven while the posture of the door is accurately adjusted, an operation error of the device occurs when the wafer transfer container is connected to the device opening. can be prevented.

FIG. 1 is a conceptual diagram showing a state where a door is in a closed position in a load port device according to one embodiment of the present invention. FIG. 2 is a conceptual diagram showing a state where the door is in the open position in the load port device according to one embodiment of the present invention. FIG. 3 is a partially enlarged view showing the periphery of the inner surface of the door in the load port device shown in FIG. FIG. 4 is a partial cross-sectional view taken along line IV--IV shown in FIG. FIG. 5 is an enlarged cross-sectional view enlarging a part of the door adjusting portion shown in FIG. 4 . FIG. 6 is a partial cross-sectional view taken along line VI-VI shown in FIG.

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below based on embodiments shown in the drawings.
1 and 2 are partial cross-sectional views showing a load port device 10 according to an embodiment of the present invention. FIG. 1 shows a state in which the door 30 is at the closed position P1 in the load port device 10. FIG. 2 shows a state in which the door 30 is in the open position P2. The load port device 10 is used as an interface device for connecting the FOUP 70 and the minienvironment 80 when the wafer 74 is taken out from the FOUP 70, which is a wafer transfer container, in a semiconductor factory, for example. It is installed on the wall of the EFEM (Equipment Front End Module) to be formed.

The hoop 70 has a substantially rectangular outer shape and accommodates a plurality of wafers 74 inside. A main opening (see FIG. 2) for taking out the wafer 74 is formed in one side of the hoop 70 . The hoop 70 has a lid 72 for closing the main opening 73 , and the lid 72 of the hoop 70 is opened and closed by the door 30 and the door driver 40 of the load port device 10 . It should be noted that the wafer transfer container with which the door 30 of the load port device 10 opens and closes is not limited to the FOUP 70, and may be another wafer transfer container conforming to the SEMI standard such as Fosby (FOSB). Non-compliant wafer carriers may also be used.

As shown in FIG. 1, the load port device 10 has a mounting table 15, a frame 20, a door 30, a door driving section 40, a door adjusting section 50, and the like. As shown in FIG. 1, a FOUP 70 is mounted on the mounting table 15 . The mounting table 15 has a moving table (not shown) on which the FOUP 70 is placed. Move between positions (not shown). When the lid 72 of the FOUP 70 is opened and the wafer 74 in the FOUP 70 is taken out, the load port device 10 places the moving table at the dock position where the FOUP 70 contacts the frame 20 . When transferring the FOUP 70 to a transport means such as OHT (Overhead Hoist Transfer), the load port device 10 arranges the moving table at the undock position where the FOUP 70 is separated from the frame 20 .

The frame 20 is a frame-shaped member that protrudes upward from the end of the mounting table 15 and has an apparatus opening 22 that is a through hole to which the hoop 70 is connected. The apparatus opening 22 provides an entrance and exit for moving wafers 74 between the hoop 70 and a mini-environment 80 formed within the EFEM.

As shown in FIG. 1, the door 30 of the load port device 10 opens and closes the device opening 22 . The door 30 has a substantially flat plate-like outer shape similar to or slightly larger than the device opening 22 . The door 30 has a lid engaging portion 31 as shown in FIG. It is detachably engaged with the lid 72 of the placed hoop 70 . Door 30 opens and closes lid 72 and apparatus opening 22 by moving in engagement with lid 72, as shown in FIGS.

The door drive unit 40 of the load port device 10 has a closed position P1 where the door 30 closes the device opening 22 as shown in FIG. 1 and an open position P2 where the door 30 opens the device opening 22 as shown in FIG. In between, the door 30 is moved. The door driving section 40 has a movable arm section 42 connected to the door 30 . The movable arm portion 42 is fixed to the door 30 and moves together with the door 30 .

The door driving section 40 moves the door 30 via the movable arm section 42 . That is, as shown in FIGS. 1 and 2, the door driving section 40 includes a vertical movement mechanism 46 for vertically moving the movable arm section 42 and the door 30, and a vertical movement mechanism 46 for horizontally moving the movable arm section 42 and the door 30. It has a horizontal movement mechanism 48 . The vertical movement mechanism 46 and the horizontal movement mechanism 48 are not particularly limited as long as they are mechanisms for moving an object in a predetermined direction, and examples thereof include air cylinders and motors.

As shown in FIG. 1, when the apparatus opening 22 is opened from the state where the door 30 is at the closed position P1, first, the horizontal movement mechanism 48 of the door driving section 40 moves the door 30 in the positive direction of the Y axis, and the door 30 is closed. is drawn into the mini-environment 80. Further, the vertical movement mechanism 46 of the door drive unit 40 moves the door 30 in the negative direction of the Z axis, and moves the door 30 downward to the open position P2 so as not to interfere with the operation of taking out the wafer 74 from the FOUP 70. . In this manner, the door driving section 40 moves the door 30 between the closed position P1 and the open position P2. However, the door drive unit 40 is not limited to the mechanism shown in FIGS. For example, the door driving section 40 may have a rotating movement mechanism for rotating the movable arm section 42 and the door 30 instead of or in addition to the vertical movement mechanism 46 and the horizontal movement mechanism 48. .

As shown in FIGS. 1 and 2 , a door adjusting portion 50 for adjusting the attitude of the door 30 is provided at the connecting position C1 between the door 30 and the movable arm portion 42 . The door adjustment unit 50 adjusts the attitude of the door 30 by changing the relative position and inclination between the movable arm unit 42 and the door 30 . The door adjustment unit 50 particularly adjusts the attitude of the door 30 in the closed position P1 as shown in FIG. As a result, although the moving table has moved to the dock position where the hoop 70 contacts the frame 20, an engagement error where the door 30 cannot be engaged with the lid 72, or even if the door 30 is moved to the closed position P1 Regardless, it is possible to prevent an operation error of the load port device 10 such as a closing error in which the lid 72 or the device opening 22 cannot be closed.

FIG. 3 is a partially enlarged view showing the door inner surface 30a, which is the inner surface of the door 30, and the door adjusting portion 50 arranged on the door inner surface 30a. The door inner surface 30 a is the surface of the flat door 30 on the side of the mini-environment 80 , and is the opposite surface of the door outer surface 30 facing the lid 72 of the hoop 70 . The connection position C1 where the door adjusting portion 50 is provided is arranged so as to overlap the center-of-gravity position 32 of the door 30 when viewed from the Y-axis direction, which is the horizontal direction.

The door adjustment unit 50 has an inclination adjustment mechanism 51 that adjusts the inclination of the door 30 at the closed position P1 (FIG. 1) and a position adjustment mechanism 61 that adjusts the position of the door 30 at the closed position P1 (FIG. 1). Further, the door adjusting portion 50 has a relay plate 66 sandwiched between the door inner surface 30 a and the movable arm portion 42 . As shown in FIGS. 3 and 4 , the relay plate 66 is fixed to the movable arm section 42 by connecting screws 82 , 83 , 84 . The structure of the relay plate 66 will be detailed later.

As shown in FIG. 3 , the position adjustment mechanism 61 has a position adjustment screw 63 attached to the door 30 . The position adjusting mechanism 61 is composed of a position adjusting screw 63, a relay plate 66, and a guide groove 30aa formed in the door inner surface 30a. The guide groove 30aa extends along the horizontal X-axis direction and opens in the positive Y-axis direction toward which the door inner surface 30a faces. As shown in FIG. 6, which is a cross-sectional view of FIG. 3, the relay plate 66 has a guide protrusion 67 as a guide portion that guides relative positional movement of the door 30 with respect to the movable arm portion 42. As shown in FIG. The guide projection 67 engages with the guide groove 30aa of the door inner surface 30a. The relay plate 66 can move horizontally relative to the door 30 by guiding the guide projections 67 along the guide grooves 30aa.

The position adjusting screw 63 shown in FIG. 3 has a position screw body 63b screwed into a screw hole formed in the door inner surface 30a, and a cam 63a eccentric to the position screw body 63b. The outer peripheral surface of the cam 63 a contacts the side surface of the relay plate 66 . Therefore, by turning the position adjusting screw 63 to rotate the cam 63a, the distance from the contact position between the cam 63a and the relay plate 66 to the position screw main body 63b changes. The relative position between the fixed movable arm portion 42 and the door 30 changes. Thus, the position adjusting mechanism 61 adjusts the position of the door 30 by rotating the position adjusting screw 63 .

The relay plate 66 is fixed to the door 30 by the two fixing screws 68 and 69 and the tilt adjusting fixing screw 53 included in the two tilt adjusting screws 52 and 56 shown in FIG. The horizontal fixed position of the relay plate 66 by 68, 69 and 53 is provided with a margin for position adjustment. That is, as shown in cross-sectional views of FIGS. 4 and 5, the inner diameter of the through-hole of the relay plate 66 through which the fixing screw 68 passes and the inner diameter of the spacer 54 through which the tilt adjusting fixing screw 53 passes are equal to the fixing screw 68 passing through. is larger than the outer diameter of the tilt adjustment fixing screw 53 by a certain degree. In this way, the fixing structure between the movable arm portion 42 and the door 30 via the relay plate 66 enables position adjustment by the position adjustment mechanism 61 .

As shown in FIG. 3 , the tilt adjusting mechanism 51 has two tilt adjusting screws 52 and 56 . The tilt adjusting screws 52 and 56 are arranged side by side along the Z-axis direction. The tilt adjusting mechanism 51 is composed of these two tilt adjusting screws 52 and 56 and the relay plate 66 . As shown in FIG. 4, which is a cross section in the X-axis direction, the relay plate 66 has a thick portion 66b arranged at one end in the horizontal direction (end in the positive direction of the X-axis) and a thick portion 66b at the other end in the horizontal direction. It is disposed at the end (the end in the negative direction of the X-axis) and has a thin portion 66a that is thinner than the thick portion 66b.

The thick portion 66b is formed with a through hole through which a fixing screw 68 passes, and the thick portion 66b contacts the door inner surface 30a. On the other hand, the thin portion 66a, in which the threaded through-holes for screwing the inclination adjusting screws 52, 56 are formed, is formed with a notch on the surface facing the door inner surface 30a, as shown in FIGS. 5, a gap G1 is formed between the thin portion 66a and the door inner surface 30a.

As shown in FIG. 5 , the tilt adjusting screw 52 has a spacer 54 composed of a threaded sleeve, a tilt adjusting fixing screw 53 and a holding screw 55 . A threaded groove (male screw) is formed on the outer periphery of the shaft of the spacer 54 , and the spacer 54 is screwed into a threaded through hole 66 aa (female screw) formed in the thin portion 66 a of the relay plate 66 . The spacer 54 penetrates the thin portion 66a, and the tip of the spacer 54 contacts the door inner surface 30a. By adjusting the screwing amount of the spacer 54 with respect to the relay plate 66, the amount by which the spacer 54 projects from the relay plate 66 toward the door inner surface 30a (Y-axis negative direction side) changes. Thereby, the spacer 54 adjusts the width of the gap G<b>1 between the door 30 and the relay plate 66 and adjusts the inclination of the door 30 with respect to the movable arm portion 42 .

As shown in FIG. 5, the shaft portion of the tilt adjustment fixing screw 53 passes through the spacer 54, and the tip of the tilt adjustment fixing screw 53 is screwed into a screw hole formed in the door inner surface 30a. The tilt adjustment fixing screw 53 fixes the spacer 54 and the relay plate 66 to the door 30 . The hold screw 55 is screwed into a screw groove formed on the outer periphery of the spacer 54 to prevent loosening of the spacer 54 and the tilt adjustment fixing screw 53 .

The tilt adjusting screw 56 shown in FIG. 3 also has the same structure as the tilt adjusting screw 52 shown in FIGS.

A method of adjusting the posture of the door 30 by the door adjusting section 50 will be described below. The adjustment of the attitude of the door 30 is performed when the load port device 10 is assembled to the EFEM or when the load port device 10 is maintained. The posture of the door 30 is adjusted by arranging the door 30 at the open position P2 as shown in FIG. 2, or by arranging the door 30 at a position between the closed position P1 and the open position P2. Further, the adjustment is performed while the FOUP 70 is not mounted on the mounting table 15 .

The posture of the door 30 can be adjusted by manual operation by an operator. Since the door adjustment unit 50 is provided at the connection position C1 between the door 30 and the movable arm unit 42, compared to the case where the adjustment mechanism is arranged inside the door drive unit 40, for example, the operator can The attitude of the door 30 can be easily adjusted.

When adjusting both the position and tilt of the door 30, first, loosen the fixing screws 68, 69 and the tilt adjusting screws 52, 56 (the tilt adjusting fixing screw 53 of the tilt adjusting screw) shown in FIG. to unlock. Next, by rotating the position adjustment screw 63 of the position adjustment mechanism 61, the relative positions of the relay plate 66 and the movable arm portion 42 fixed to the relay plate 66 and the door 30 are changed, and the position of the door 30 is adjusted. I do. After the position of the door 30 is determined, the position adjustment screw 63 and the fixing screws 68 and 69 are tightened to fix the relay plate 66 and the door 30 . Since the driving position of the movable arm portion 42 is determined by the vertical movement mechanism 46 and the horizontal movement mechanism 48, by adjusting the relative position between the movable arm portion 42 and the door 30, the position of the door 30 at the closed position P1 can be adjusted. You can adjust the position.

After the position adjustment described above, the inclination of the door 30 is adjusted. To adjust the tilt of the door 30, the spacers 54 of the tilt adjusting screws 52 and 56 shown in FIG. 3 are rotated, and as shown in FIG. The inclination of the door 30 is adjusted by adjusting the width of the gap G1 with the relay plate 66. - 特許庁After the attitude of the door 30 is determined, the holding screw 55 and the tilt adjustment fixing screw 53 are tightened to complete the adjustment. It should be noted that the two fixing screws 68 and 69 shown in FIG. 3 need not be loosened during the tilt adjustment of the door 30.

Since the load port device having such a door adjustment unit 50 can suitably adjust the attitude of the door 30, an engagement error where the door 30 cannot be engaged with the lid 72 and movement of the door 30 to the closed position P1 can be prevented. It is possible to prevent operation errors of the load port device 10, such as a closing error in which the lid 72 and the device opening 22 cannot be closed even if the load port device 10 is closed. Further, the door adjusting section 50 can adjust the posture of the door 30 with high accuracy by using the tilt adjusting mechanism 51 and the position adjusting mechanism 61 .

Further, the door adjustment unit 50 can adjust the attitude of the door 30 accurately and easily by the relay plate 66 shown in FIGS. 3 to 5, so the load port device 10 is excellent in maintainability.

Although the load port device according to the present invention has been described above with reference to the embodiments, the present invention is not limited to the above-described embodiments, and it goes without saying that other embodiments are included. For example, in a load port device according to another embodiment, the door adjustment section has an adjustment drive section that drives the tilt adjustment screws 52 and 56 shown in FIG. The adjustment drive section has, for example, a motor for rotating the spacer 54 and the tilt adjustment fixing screw 53 shown in FIG. The control section of such a load port device detects the inclination of the cover 72 of the FOUP 70 placed on the mounting table 15 shown in FIG. and adjust the inclination of the door 30 so that the door 30 can engage the lid 72 in the closed position P1.

For example, in a load port device in which the door adjustment unit has an adjustment drive unit, the control unit drives the door adjustment unit to adjust the posture of the door 30, and as shown in FIG. and a step of engaging the lid 72 of the hoop 70 with the lid 72 of the hoop 70, and as shown in FIG. and communicating with the opening 22 . In such a load port device 10, even if the lid 72 of the FOUP 70 on which it is placed is attached with a slight inclination, an engagement error or the like occurs in which the door 30 cannot engage with the lid 72. can be prevented.

DESCRIPTION OF SYMBOLS 10... Load port apparatus 15... Mounting base 20... Frame 22... Apparatus opening 30... Door 30a... Door inner surface 30b... Door outer surface 30aa... Guide groove 31... Lid engagement part 32... Gravity center position 40... Door drive part 42... Movable arm Part 46... Vertical movement mechanism 48... Horizontal movement mechanism 50... Door adjustment part 51... Inclination adjustment mechanism 52, 56... Inclination adjustment screw 53... Inclination adjustment fixing screw 54... Spacer 55... Holding screw 61... Position adjustment mechanism 63... Position adjustment Screw 63a... Cam 63b... Position screw body 66... Relay plate 66a... Thin portion 66aa... Threaded through hole 67... Guide projection 68, 69... Fixing screw 70... Hoop 72... Lid 73... Main opening 74... Wafer 80... Mini Environment 82, 83, 84 ... Connection screw P1 ... Closed position P2 ... Open position C1 ... Connection position G1 ... Gap

Claims (8)

a frame having a device opening;
a door detachably engaged with the lid of the wafer transfer container to open and close the lid and the device opening;
a movable arm portion connected to the door, and the door moves between a closed position in which the door closes the device opening and an open position in which the door opens the device opening via the movable arm portion; a door driving unit for moving the door;
a door adjustment unit provided at a connection position between the door and the movable arm unit for adjusting the posture of the door ;
The door adjustment portion is sandwiched between the inner surface of the door and the movable arm portion, one end of which contacts the inner surface of the door, and a gap between the other end and the inner surface of the door. having a relay plate formed,
The load port device , wherein the door adjusting section has an inclination adjusting mechanism for adjusting the inclination of the door by adjusting the width of the gap . 2. The load port device according to claim 1, wherein the connection position where the door adjusting portion is provided is arranged on the inner surface of the door, and the posture of the door can be adjusted by an operator's operation . 3. The load port device according to claim 2, wherein the connecting position where the door adjusting portion is provided is arranged so as to overlap with the center of gravity of the door when viewed from the horizontal direction on the inner surface of the door. The load port device according to any one of claims 1 to 3, wherein the tilt adjustment mechanism adjusts the tilt of the door at the closed position. The tilt adjusting mechanism has a spacer capable of adjusting the width of the gap between the door and the relay plate, and a tilt adjusting fixing screw passing through the spacer and fixing the spacer. 4. The load port device according to any one of 4 to 4. The load port device according to any one of claims 1 to 5, wherein the door adjusting section has a position adjusting mechanism for adjusting the position of the door in the closed position. The load port device according to any one of claims 1 to 6, wherein the relay plate has a guide portion that guides relative positional movement of the door with respect to the movable arm. A method for connecting a wafer transport container by the load port device according to any one of claims 1 to 7 ,
a step of adjusting the attitude of the door by driving the door adjustment unit;
engaging the door in the closed position with the lid of the wafer carrier;
positioning the door at the open position by the door driving unit, opening the lid of the wafer transfer container, and allowing the wafer transfer container and the device opening to communicate with each other;
A method of connecting a wafer transport container by a load port device having

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