JP7108516B2 - Sheet pasting method - Google Patents

Description

The present invention relates to a sheet sticking method.

Conventionally, there is known a sheet attaching method in which an adherend is supported by a frame member via a first sheet and a second sheet to form an integrated object (see, for example, Patent Document 1).

JP 2007-165363 A

However, in the conventional mounting method (sheet sticking method) described in Patent Document 1, the die bonding sheet portion DS (first sheet) undergoes predetermined deformation such as shrinkage deformation and expansion deformation due to the application of predetermined energy. When the wafer W (adherend) is supported by the ring frame RF (frame member) via the first sheet and the dicing tape DT (second sheet), an integrated body is formed. and applying a predetermined energy to change the first sheet into a predetermined state, the deformation of the first sheet deforms the wrinkles WV in the second sheet as shown in FIG. 1(C). An inconvenience occurs.

An object of the present invention is to employ a first sheet that changes into a predetermined state with a predetermined deformation when a predetermined energy is applied, and the adherend is attached to the frame member via the first sheet and the second sheet. To provide a sheet pasting method in which a second sheet is formed as an integrated body supported by a second sheet, and wrinkles are not formed in a second sheet even when a predetermined energy is applied to change the first sheet to a predetermined state. That's what it is.

The present invention employs the configurations described in the claims.

According to the present invention, in consideration of the fact that the first sheet undergoes a predetermined deformation due to the application of predetermined energy, the first sheet having a shape that does not protrude from one surface of the adherend is prepared in the first sheet preparation step. is prepared, and in the first attaching step, the first sheet is attached to one surface of the adherend so that the first sheet does not protrude from one surface of the adherend. Adopted is one that changes to a predetermined state with a predetermined deformation when a predetermined energy is applied, and the adherend is supported by the frame member via the first sheet and the second sheet to form an integrated body, Even if a given energy is applied to change the first sheet to a given state, wrinkles are not formed in the second sheet.

(A) to (C) are explanatory diagrams of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings.
Note that the X-axis, Y-axis, and Z-axis in this embodiment are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Furthermore, in the present embodiment, when viewed from the front in FIG. 1 parallel to the Y-axis, when the direction is indicated without designating the drawing, "up" is the direction of the arrow of the Z-axis and "down". is the opposite direction, "left" is the arrow direction of the X axis, "right" is the opposite direction, "front" is the direction parallel to the Y axis in FIG. 1, and "rear" is the opposite direction.

The sheet sticking method of the present invention can be implemented, for example, by the following sheet sticking apparatus EA.
That is, the sheet sticking apparatus EA performs a first sheet preparation step of preparing a first sheet AS1 that changes, or hardens, to a predetermined state by applying heat as a predetermined energy, and also performs a first sheet preparation step of preparing the first sheet AS1. A first attaching means 10 for performing a first attaching step of attaching a first sheet AS1 to one surface WK1 and a second sheet preparing step of preparing a second sheet AS2 are performed, and a The second sheet AS2 is attached to the first sheet AS1 and the ring frame RF as a frame member, and the adherend WK is supported by the ring frame RF via the first sheet AS1 and the second sheet AS2. It comprises a second sticking means 20 for performing a second sticking step of forming, and an energy applying means 30 for performing an energy applying step of applying heat to the integrated object UP to harden the first sheet AS1. and near the transport means 40 that carries out the transport process of transporting the ring frame RF.
The first sheet AS1 employs a sheet that hardens with a predetermined deformation, that is, shrinkage deformation, when heat is applied.
Also, the adherend WK is assumed to have a rigidity that does not deform with the contraction deformation of the first sheet AS1. Rigidity is a property of an object that resists deformation against external forces such as compression, displacement, and torsion.

The first pasting means 10 uses the first raw material RS1 in which the first sheet base material BS1 is temporarily adhered to the first release sheet RL1 as the first sheet preparation step, and the first sheet base material BS1 is attached with a closed loop shape. A first cut CU1 is formed, a first sheet AS1 is formed and prepared in an area partitioned by the first cut CU1, and a first unnecessary sheet US1 is formed in an area other than the first sheet AS1. A first cutting step is performed.
That is, the first pasting means 10 forms the first cut CU1 in the support roller 11 that supports the first material RS1, the guide roller 12 that guides the first material RS1, and the first sheet substrate BS1. During automatic operation of the cutting means 13, the peeling roller 14 around which the first unnecessary sheet US1 is wound, and the sheet sticking apparatus EA, the first unnecessary sheet US1 existing between the peeling roller 14 is constantly Unnecessary sheet collecting roller 15 as collecting means for collecting the first unnecessary sheet US1 by applying a predetermined tension, and the first release sheet RL1 is folded back by the peeling edge 16A to form the first release sheet RL1 to the first sheet AS1. a peeling plate 16 as a peeling means for peeling the adherend WK, a pressing roller 17 as a pressing means for pressing and sticking the first sheet AS1 to one surface WK1 of the adherend WK, and a rotating motor 18A as a driving device. While the driving roller 18 supported by the output shaft (not shown) sandwiching the first release sheet RL1 with the pinch roller 18B and the output shaft of the drive device (not shown) is automatically operated, A collecting roller 19 as a collecting means for collecting the first release sheet RL1 by constantly applying a predetermined tension to the first release sheet RL1 existing between the pinch roller 18B and the entire first sticking means 10 is moved back and forth. A direct-acting motor (not shown) is provided as a driving device for moving in a direction.
The cutting means 13 includes a die-cut roller 13C supported by an output shaft 13B of a rotating motor 13A as a driving device, a cutting blade 13E as a flat loop-shaped cutting member supported by its circumferential surface 13D, and a die-cut roller. An anvil roller 13F rotating synchronously with 13C is provided.

The second pasting means 20 uses the second raw material RS2 in which the second sheet base material BS2 is temporarily adhered to the second release sheet RL2 as the second sheet preparation step, and the second sheet base material BS2 is formed with a closed loop shape. A second cut CU2 is formed, a second sheet AS2 is formed in an area partitioned by the second cut CU2, and a second unnecessary sheet US2 is formed in an area other than the second sheet AS2. A second cutting step is performed.
That is, the second sticking means 20 forms a support roller 21 that supports the second material RS2, a guide roller 22 that guides the second material RS2, and a second cut CU2 in the second sheet base material BS2. During the automatic operation of the cutting means 23, the peeling roller 24 around which the second unnecessary sheet US2 is wound, and the sheet sticking apparatus EA, the second unnecessary sheet US2 existing between the peeling roller 24 is constantly Unnecessary sheet collecting roller 25 as a collecting means for collecting the second unnecessary sheet US2 by applying a predetermined tension, and the second release sheet RL2 is folded back by the peeling edge 26A to form the second release sheet RL2 to the second sheet AS2. a peeling plate 26 as a peeling means for peeling the first sheet AS1 stuck to the adherend WK and a pressing roller 27 as a pressing means for pressing and sticking the second sheet AS2 against the ring frame RF and the first sheet AS1; A drive roller 28 which is supported by an output shaft (not shown) of a rotation motor 28A as a device and sandwiches the second release sheet RL2 with a pinch roller 28B, and an output shaft of a drive device (not shown), which is used to automatically rotate the sheet sticking device EA. A collecting roller 29 as a collecting means for collecting the second release sheet RL2 by constantly applying a predetermined tension to the second release sheet RL2 existing between the pinch roller 28B and the pinch roller 28B during operation. ing.
The cutting means 23 includes a die-cut roller 23C supported by an output shaft 23B of a rotary motor 23A as a drive device, a cutting blade 23E as a flat loop-shaped cutting member supported by its circumferential surface 23D, and a die-cut roller. 23C and an anvil roller 23F that rotates synchronously.

The energy imparting means 30 includes a body case 31 capable of storing a plurality of integrated objects UP, and a case lid 32 which is supported by an output shaft 32B of a direct-acting motor 32A as a driving device and capable of opening and closing an opening 31A of the body case 31. , a heating means 33 such as a coil heater or a heat pipe serving as an energy generation source supported by the bottom surface 31B of the main body case 31 and the top surface 32C of the case lid 32, respectively.

The conveying means 40 is supported by a slider 41A of a linear motor 41 as a drive device, and includes a holding table 42 having a holding surface 42A that can be held by suction by a decompression means (holding means) (not shown) such as a decompression pump or a vacuum ejector. ing.

The sheet sticking method of the present invention using the above sheet sticking apparatus EA will be described.
First, a user of the sheet sticking device EA (hereinafter simply referred to as "user") moves the sheet sticking device EA in which the members are arranged at the initial positions indicated by the solid lines in FIG. After setting the first and second raw sheets RS1 and RS2 in the apparatus, a signal for starting the operation is inputted through an operation means (not shown) such as an operation panel or a personal computer. Then, the first and second pasting means 10, 20 drive the rotary motors 13A, 18A and 23A, 28A to rotate the die-cut rollers 13C, 23C to apply the first and second sheet base materials BS1, BS2 to the first and second sheet base materials BS1, BS2. , second cuts CU1 and CU2 are formed to form the first and second sheets AS1 and AS2 and the first and second unnecessary sheets US1 and US2, while feeding the first and second raw sheets RS1 and RS2. .

Here, in the first sheet preparing step, considering that the first sheet AS1 is contracted and deformed by applying heat in the energy applying step, the first sheet AS1 is shaped so as not to protrude from the one surface WK1 of the adherend WK. A first sheet AS1 is formed and prepared (same hereafter). Specifically, in the case of the first sheet AS1 having a shape protruding from the one surface WK1 of the adherend WK, when heat is applied by the energy applying means 30, the first sheet AS1 as shown in FIG. Due to shrinkage deformation of AS1, wrinkles WV are formed in the second sheet AS2. Therefore, in this embodiment, when one surface WK1 of the adherend WK is circular with a diameter of 300 mm, the first sticking means 10 forms a circular first sheet AS1 with a diameter of 299 mm. Next, as shown in FIG. 1A, when the leading end portions of the leading first and second sheets AS1 and AS2 in the delivery direction are peeled off by the peeling edges 16A and 26A of the peeling plates 16 and 26 for a predetermined length, 1. The second pasting means 10, 20 stop driving the rotary motors 13A, 18A and 23A, 28A.

Thereafter, a user or a conveying means (not shown) such as an articulated robot or a belt conveyor holds the adherend WK so that it is placed in the opening RF1 of the ring frame RF as shown in FIG. When placed on top, the conveying means 40 drives the decompressing means (not shown) to start holding the ring frame RF and the adherend WK on the holding surface 42A by suction. Next, the conveying means 40 drives the linear motor 41 to move the holding table 42 to the left, and when the adherend WK reaches a predetermined position with respect to the peeling plate 16, the first applying means 10 rotates the rotating motor 13A. , 18A are driven to form a new cut CU1 in the first sheet base material BS1, and the first material sheet RS1 is delivered in accordance with the moving speed of the holding table . 1, the first sheet AS1 is separated from the first release sheet RL1, and the first sheet AS1 separated from the first release sheet RL1 is adhered by the pressure roller 17. It is pressed and attached to the body WK.

Here, in the first attaching step, considering that the first sheet AS1 is contracted and deformed by applying heat in the energy applying step, the first sheet AS1 should not protrude from the one surface WK1 of the adherend WK. , the first sheet AS1 is attached to one surface WK1 of the adherend WK. Specifically, when the first sheet AS1 is attached in a state where the first sheet AS1 protrudes from one surface WK1 of the adherend WK, when heat is applied by the energy applying means 30, as shown in FIG. In addition, wrinkles WV are formed in the second sheet AS2 due to shrinkage deformation of the first sheet AS1. Therefore, in the present embodiment, the outer edge of the circular first sheet AS1 with a diameter of 299 mm is positioned within a range of 0 mm to 1 mm from the outer edge position of the circular one surface WK1 with a diameter of 300 mm. The first sheet AS1 is attached to one surface WK1 of the adherend WK so as to be positioned. At this time, the first sticking means 10 drives a linear motion motor (not shown) to move the entire first sticking means 10 in the front-rear direction, thereby moving the first sheet AS1 in the front-rear direction with respect to one surface WK1 of the adherend WK. Along with adjusting the position, the driving start timing of the rotary motors 13A and 18A is adjusted with respect to the holding table 42 that is moving leftward, and the horizontal direction of the first sheet AS1 with respect to one surface WK1 of the adherend WK is adjusted. Adjust the position. Then, when the leading edge of the first sheet AS1 next to the leading first sheet AS1 in the delivery direction is peeled off by the peeling edge 16A of the peeling plate 16 for a predetermined length, the first pasting means 10 rotates the rotation motor 13A, Stop driving 18A.

Next, when the holding table 42 continues to move to the left by the conveying means 40 and the ring frame RF reaches a predetermined position with respect to the peeling plate 26, the second sticking means 20 drives the rotating motors 23A and 28A, While forming a new second cut CU2 in the second sheet base material BS2, the second raw material RS2 is delivered in accordance with the moving speed of the holding table . 1, the second sheet AS2 is peeled off from the second release sheet RL2, and the second sheet AS2 peeled off from the second release sheet RL2 is pushed into the ring frame by the pressure rollers 27. RF and the first sheet AS1 are pressed and adhered to form a unitary body UP. After that, when the leading end of the second sheet AS2 next to the leading second sheet AS2 in the delivery direction is peeled off by the peeling edge 26A of the peeling plate 26 by a predetermined length, the second pasting means 20 rotates the rotation motor 23A, 28A is stopped.

Next, when the entire second sheet AS2 is attached to the ring frame RF and the first sheet AS1, and the holding table 42 supporting the integrated object UP reaches a predetermined position on the left side of the pressing roller 27, the conveying means 40 is moved by the linear motor 41. is stopped, the depressurizing means (not shown) is stopped, and the holding surface 42A releases the ring frame RF and the adherend WK from being sucked and held. After the user or a conveying means (not shown) holds the integrated object UP and stores the integrated object UP in the main body case 31, the conveying means 40 drives the linear motor 41 to move the holding table 42 to the initial position. bring back. Next, the above operation is repeated, and when a predetermined number of integrated objects UP are accommodated in the main body case 31, the energy imparting means 30 drives the direct-acting motor 32A, and the case lid 32 is opened as shown in FIG. to close the opening 31A of the main body case 31. After that, the energy imparting means 30 drives the heating means 33 to impart heat to the integrated object UP at a prescribed temperature for a prescribed period of time. It is driven to release the opening 31A of the main body case 31 .

Here, the first sheet AS1 is cured when heat is applied at a predetermined temperature for a predetermined time. Specifically, the elastic modulus before curing, which was about 3 GPa (gigapascals), changes to an elastic modulus of about 10 GPa after curing. At this time, the first sheet AS1 tries to harden with shrinkage deformation, but since the adherend WK has such rigidity that it does not deform with the shrinkage deformation of the first sheet AS1, the first sheet AS1 is prevented by the rigidity of the adherend WK, and wrinkles WV are not formed in the second sheet AS2. Next, the user or a transport means (not shown) takes out the integrated product UP stored in the main body case 31, transports the integrated product UP to the next process, and the same operation as described above is repeated thereafter.

According to the embodiment as described above, considering that the first sheet AS1 is contracted and deformed by the application of heat, in the first sheet preparation step, the first sheet AS1 is formed in a shape that does not protrude from the one surface WK1 of the adherend WK. is prepared, and in the first attaching step, the first sheet AS1 is attached to one surface WK1 of the adherend WK so that the first sheet AS1 does not protrude from the one surface WK1 of the adherend WK. Since the AS1 is attached, the first sheet AS1 is one that shrinks and hardens when heat is applied, and the adherend WK is supported by the ring frame RF via the first sheet AS1 and the second sheet AS2. Even if heat is applied to form the integrated body UP and harden the first sheet AS1, wrinkles are not formed in the second sheet AS2.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions or steps described for those means and steps. The process is not limited at all. For example, in the energy application step, if it is possible to apply energy to the integrated object and change the first sheet to a predetermined state, it is within the technical scope in light of the common general technical knowledge at the time of filing. It is not limited in any way (other means and steps are the same).

In the first and second attaching steps, the first and second unnecessary sheets US1 and US2 may not be peeled from the first and second release sheets RL1 and RL2, and the first and second sheets AS1 and AS2 may be supported. When collecting the first and second release sheets AS1 and AS2, the first and second sheets AS1 and AS2 may be supported, for example, in a fan-folded state without being wound. For example, it may be collected by fan-folding or chopping with a shredder or the like without winding, or may be simply accumulated and collected without winding or fan-folding, By forming the first and second cuts CU1 and CU2 in the entire short width direction in the first and second sheet base materials BS1 and BS2, the regions partitioned by the first and second cuts CU1 and CU2 may be the first and second sheets AS1 and AS2, and the other areas may be the first and second unnecessary sheets US1 and US2, without or while moving the first and second original sheets RS1 and RS2. The cutting member may be moved to form the first and second cuts CU1 and CU2 in the first and second sheet base materials BS1 and BS2. A so-called flat blade may be adopted as a cutting member that moves away from and approaches, cutting blades 13E and 23E that are detachable or non-detachable with respect to the die-cut rollers 13C and 23C may be adopted, and pressure rollers 17 and 27 may be adopted. may be separated from and approached the adherend WK to prevent the adherend WK from being stressed or damaged. The first and second sheets AS1 and AS2 are held by a holding member supported by a shaft and capable of being held by suction by a decompression means (not shown) such as a decompression pump and a vacuum ejector, and the first and second sheets held by the holding member. AS1 and AS2 may be pressed and attached to the adherend WK.
In the first attaching step, the position of one surface WK1 of the adherend WK moving to the left and the position of the first sheet AS1 that is fed out are detected by imaging means such as a camera or a projector, an optical sensor, or an ultrasonic sensor. It is detected by detection means such as various sensors such as a sound wave sensor, and based on the detection result of the detection means, the first pasting means 10 drives a linear motor (not shown), and the timing to start driving the rotary motors 13A and 18A. may be adjusted so that the first sheet AS1 does not protrude from the one surface WK1 of the adherend WK. When the position of the one surface WK1 of the adherend WK that is moving leftward is constant, the detection means may not detect the position of the one surface WK1 of the adherend WK. When the position of the first sheet AS1 that is fed out is constant, the detection means does not need to detect the position of the first sheet AS1, and the position of the one surface WK1 of the adherend WK that is moving leftward may be detected. When the position and the position of the first sheet AS1 to be fed out are constant, the detection means does not need to detect the position of the one surface WK1 of the adherend WK and the position of the first sheet AS1.

The first sheet preparing step does not have to be performed by the first attaching means 10. For example, the first raw sheet RS1 in which the first sheet AS1 having a predetermined shape is preliminarily temporarily attached to the first release sheet RL1 is adopted. Alternatively, in this case, the first cutting step may not be performed. Also in this case, considering that the first sheet AS1 is contracted and deformed by the application of heat in the energy application step, the first sheet AS1 having a shape that does not protrude from the one surface WK1 of the adherend WK is taken into consideration. A sheet AS1 is prepared.
The second sheet preparation step does not have to be performed by the second attaching means 20. For example, the second raw sheet RS2 in which the second release sheet AS2 having a predetermined shape is temporarily attached in advance to the second release sheet RL2 is adopted. Alternatively, in this case, the second cutting step may not be performed.

The energy applying step may be performed using one or more energy generating sources, or may be performed without the main body case 31 or the case lid 32, or the energy generating source may be the first sheet. Energy may be applied to the entire first sheet AS1 by partially applying energy to the first sheet AS1 and relatively moving the energy generation source and the first sheet AS1, or energy may be applied to the entire first sheet AS1 at once. may be applied, and the time and amount of energy for irradiating the first sheet AS1 with energy may be arbitrarily determined in consideration of the characteristics, properties, properties, material, composition, configuration, etc. of the first sheet AS1. can be used as predetermined energy, such as ultraviolet rays, infrared rays, visible rays, sound waves, X-rays, or gamma rays, heat such as hot water or hot air, or negative heat such as cold water or cold wind. It can be arbitrarily determined in consideration of the characteristics, properties, properties, material, composition, configuration, etc. of the first sheet AS1, and a predetermined concentration means such as a light collecting plate and a collecting plate can be used. Energy may be concentrated on the first sheet AS1, or the energy may be generated by an LED (Light Emitting Diode) lamp, a high pressure mercury lamp, a low pressure mercury lamp, a metal halide lamp, a xenon lamp, a halogen lamp, or the like. , may be applied to the first sheet AS1, or an appropriate combination thereof may be used to generate energy and apply it to the first sheet AS1. It is not necessary to carry out in the sheet sticking method.

In the conveying step, the first and second attaching means 10 and 20 are moved to attach the first and second sheets AS1 and AS2 to the adherend WK without or while moving the adherend WK. Alternatively, the holding table 42 may not adsorb and hold the adherend WK, the ring frame RF, or the like, and when the conveying step is performed by another device, the sheet attaching method of the present invention does not need to be performed. good too.

The shape of one surface WK1 of the adherend WK may be a circular shape of 300 mm or more, or may be a circular shape of less than 300 mm. A circular first sheet AS1 having a diameter of 300 mm may be prepared for one surface WK1 of the circular adherend WK, or a circular first sheet AS1 having a diameter of 299.5 mm or 280 mm or less having a diameter of 300 mm or less may be prepared. A single sheet AS1 may be prepared, or a first sheet AS1 having a non-circular shape such as a triangle, a polygonal shape larger than a quadrangle, or an ellipse may be prepared.
The shape of the one surface WK1 of the adherend WK may be a shape other than a circle, such as a triangle, a polygon having a quadrangle or more, or an ellipse. The shape of the first sheet AS1 may be a shape other than a circle, such as a triangle, a polygon with more than a square, or an ellipse. Alternatively, a pentagonal first sheet AS1 may be prepared for one surface WK1 of the ellipse.
The predetermined deformation of the first sheet AS1 by application of energy may be any deformation such as expansion deformation, expansion deformation, contraction deformation, contraction deformation, undulating deformation, strain deformation, and the like.
The change of the first sheet AS1 to a predetermined state due to the application of energy is, for example, a change in which the hardness or strength of the first sheet increases or decreases, or a change in which the volume or volume of the first sheet increases. change such as decrease, change such as increase or decrease in adhesive strength of the first sheet to the adherend, change such as change in color of the first sheet, change in temperature of the first sheet as increase or decrease. Any change, such as a change in which the first sheet is softened or melted, may be used.
As an example of the first sheet that changes to a predetermined state with a predetermined deformation upon application of energy, for example, the application of heat or infrared rays as predetermined energy causes an expansion deformation, expansion deformation, or the like, and the volume increases. Those whose volume decreases due to contraction deformation or contraction deformation due to the application of cold air or refrigerant as a predetermined energy, expansion deformation, contraction deformation, expansion deformation due to the application of ultraviolet rays as a predetermined energy , shrinking deformation, undulating deformation, strain deformation, etc., resulting in a decrease in adhesive strength to the adherend or color fading, or expansion deformation or expansion deformation due to the application of infrared rays or ultrasonic waves as predetermined energy. However, any material can be used as long as it changes to a predetermined state with a predetermined deformation when energy is applied.
The frame member may or may not be annular, and may be of any shape.
The sheet sticking method of the present invention may be performed manually or by an apparatus other than the sheet sticking apparatus EA.

The material, type, shape, etc. of the first and second sheets AS1, AS2 and the adherend WK in the present invention are not particularly limited. For example, the first and second sheets AS1 and AS2 may be adhesive forms such as pressure-sensitive adhesive and heat-sensitive adhesive. The first and second sheets AS1 and AS2 may be bonded by an appropriate method such as providing heating means such as an appropriate coil heater or heat pipe for heating the first and second sheets AS1 and AS2. Further, such first and second sheets AS1 and AS2 may be, for example, a single layer having only an adhesive layer, a sheet having an intermediate layer between the base material and the adhesive layer, or a cover layer on the upper surface of the base material. It may be a so-called double-sided adhesive sheet that can separate the substrate from the adhesive layer. It may be one having an intermediate layer, or one having a single layer or multiple layers without an intermediate layer. Examples of the adherend WK include food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards and optical discs, glass plates, steel plates, pottery, wood plates, resins, and the like. It may be a single substance, or a composite formed by two or more of them, and may be a member or article of any shape. Note that the first and second sheets AS1 and AS2 may be read in terms of functionality and usage, such as information recording labels, decorative labels, protective sheets, dicing tapes, die attach films, die bonding tapes, and recording layers. Any sheet such as a formed resin sheet, a film, a tape, or the like may be used.

The drive device in the above embodiment includes a rotating motor, a linear motor, a linear motor, a single-axis robot, an electric device such as a multi-joint robot having two or more joints, an air cylinder, a hydraulic cylinder, and a rodless robot. Actuators such as cylinders and rotary cylinders can be used, and a direct or indirect combination thereof can also be used.
In the above embodiments, when a rotating member such as a roller is employed, a drive device for rotating the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be made of deformable material such as rubber or resin. It may be composed of a member, the surface of the rotating member or the rotating member itself may be composed of a member that does not deform, or other members such as a shaft or a blade that rotates or does not rotate instead of the roller. Alternatively, if a pressing means such as a pressing roller or a pressing head or a pressing member that presses an object to be pressed is adopted, a roller, a round bar, a blade can be used instead of or in combination with the above examples A member such as material, rubber, resin, sponge, etc. may be adopted, or a configuration in which pressure is applied by blowing gas such as air or gas may be adopted. It may be configured with a member that does not deform. A member such as a plate-shaped member, a round bar, or a roller may be adopted instead of or in combination with the object, and the object to be peeled may be configured with a deformable member such as rubber or resin, or may be deformed. It may be composed of a member that does not support, or if a member that supports (holds) a supported member (held member) such as a supporting (holding) means or a supporting (holding) member is adopted, a mechanical chuck or a chuck cylinder A structure that supports (holds) the supported member by gripping means such as, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving equipment, etc. may be adopted, or if a cutting means or cutting member that cuts the member to be cut or forms a cut or a cutting line in the member to be cut is adopted, instead of the above examples Alternatively, a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, spraying of gas or liquid, etc. is used for cutting, or cutting is performed by combining appropriate driving equipment. It is also possible to cut by moving the object to be cut.

AS1... First sheet AS2... Second sheet BS1... First sheet base material BS2... Second sheet base material CU1... First cut CU2... Second cut RF... Ring frame (frame member)
RL1... First release sheet RL2... Second release sheet RS1... First raw fabric RS2... Second raw fabric UP... Integral object WK... Adherend

Claims (3)

a first sheet preparing step of preparing a first sheet that changes into a predetermined state by applying predetermined energy;
a second sheet preparing step of preparing a second sheet;
a first attaching step of attaching the first sheet to one surface of an adherend;
The second sheet is attached to the first sheet and the frame member attached to the adherend, and the adherend is supported by the frame member via the first sheet and the second sheet to form an integral body. a second attaching step of forming;
an energy application step of applying the energy to the integral body to change the first sheet into a predetermined state;
The first sheet changes to a predetermined state with a predetermined deformation due to the application of the energy,
In the first sheet preparation step, considering that the first sheet undergoes the predetermined deformation by applying the energy in the energy applying step, the first sheet does not protrude from one surface of the adherend. Prepare the first sheet of the shape,
In the first attaching step, considering that the first sheet undergoes the predetermined deformation by applying the energy in the energy applying step, (2) a sheet sticking method, characterized in that the first sheet is stuck to one surface of the adherend; In the first sheet preparation step, a first raw material in which a first sheet base material is temporarily attached to a first release sheet is used, a closed loop-shaped first cut is formed in the first sheet base material, and the first cut is formed in the first sheet base material. 2. The method of sticking a sheet according to claim 1, wherein the first cutting step of forming and preparing the first sheet in a region partitioned by one notch is performed. In the second sheet preparation step, a second raw material in which a second sheet base material is temporarily attached to a second release sheet is used, a closed loop-shaped second cut is formed in the second sheet base material, and the second cut is formed in the second sheet base material. 3. The method of sticking a sheet according to claim 1, wherein a second cutting step of forming and preparing the second sheet in a region partitioned by two cuts is performed.

Images