JP7145597B2 - Ozone generator and excimer lamp lighting method - Google Patents

Description

TECHNICAL FIELD The present invention relates to an ozone generator, and more particularly to adjustment of the ozone generation amount (ozone concentration).

The ozone generator generates ozone by irradiating an object containing oxygen (for example, air) with ultraviolet rays. Organic substances are decomposed by the oxidizing power of ozone, and sterilization (sterilization, sterilization) and deodorization (deodorization) can be performed. It is possible to configure it as an ultraviolet irradiation device or the like for cleaning the surface of the substrate. Also, an excimer lamp can be applied as an ultraviolet irradiation lamp (see, for example, Patent Document 1).

The required ozone generation amount (ozone concentration) varies depending on the usage environment and the like. In the ozone generator, the illuminance of the UV irradiation lamp is changed according to a determined ozone production amount (ozone concentration) to adjust the UV irradiation amount. For example, based on the measured ozone concentration, the input voltage of the ultraviolet irradiation lamp is controlled so as to maintain the required ozone generation amount (see Patent Document 2).

JP 2014-226605 A Japanese Patent Application Laid-Open No. 2002-079203

Since excimer lamps have a narrow range in which the UV illuminance can be changed by voltage adjustment, an ozone generator using an excimer lamp has a wider range in which the amount of ozone generated can be changed compared to an ozone generator using plasma discharge (silent discharge). Limited. For example, in an ozone generator using an excimer lamp, even if the input voltage to the excimer lamp is controlled, it may not be possible to operate the device at an ozone concentration suitable for the usage environment, which limits the usage environment. be.

Therefore, there is a need for an ozone generator equipped with an excimer lamp that can change the amount of ozone generated according to the usage environment.

INDUSTRIAL APPLICABILITY The ozone generator of the present invention can be applied to deodorization, deodorization, sterilization, sterilization, substrate surface cleaning, and other devices that utilize the oxidizing power of ozone. It comprises a lamp, an excimer lamp for generating high-concentration ozone that generates a relatively large amount of ozone, and a housing that accommodates the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone.

Here, the "excimer lamp for generating low-concentration ozone" and the "excimer lamp for generating high-concentration ozone" are relatively low in terms of the amount of ozone generated when the device is operated under a predetermined environment. Concentrated ozone, excimer lamps for high-concentration ozone. The amount of ozone generated is related to the UV irradiation area, UV intensity, etc., and various characteristics and factors such as differences in lamp configuration/structure, lamp placement environment (configuration around the lamp), etc. It is possible to associate and define an "excimer lamp for generating high-concentration ozone" within the apparatus.

For example, different discharge distances produce different amounts of ozone. Therefore, it is possible to define an excimer lamp with a relatively short discharge distance as a "low-concentration ozone generating excimer lamp" and an excimer lamp with a relatively long discharge distance as an "high-concentration ozone generating excimer lamp". Since the amount of ozone generated differs depending on the discharge space area, an excimer lamp with a relatively small discharge space area is called an excimer lamp for generating low-concentration ozone, and an excimer lamp with a relatively long discharge space distance is called an excimer lamp. excimer lamp for generating high-concentration ozone".

Also, from the viewpoint of voltage control, it is possible to define "excimer lamps for generating low-concentration ozone" and "excimer lamps for generating high-concentration ozone". For example, when the ozone generation amount of one excimer lamp is smaller than the minimum ozone generation amount of the other excimer lamp that can be controlled by voltage control, one excimer lamp is designated as the "excimer lamp for generating high-concentration ozone" and the other excimer lamp is Excimer lamps can be defined as "excimer lamps for generating low-concentration ozone".

Furthermore, it is also possible to define "excimer lamps for generating low-concentration ozone" and "excimer lamps for generating high-concentration ozone" according to differences in usage environments such as standards. For example, an excimer lamp intended to be used in a manned environment is called an excimer lamp for generating low-concentration ozone, and an excimer lamp intended to be used in a closed space or an unmanned environment is called an excimer lamp for generating high-concentration ozone. can be defined as "lamp".

Alternatively, an excimer lamp with an ozone generation amount corresponding to the ozone concentration allowed in a manned environment stipulated by governments, standards bodies, etc., is an excimer lamp for generating low-concentration ozone, and effective treatment by oxidizing power can be realized. An excimer lamp with an ozone generation amount corresponding to a moderate ozone concentration can be defined as an "excimer lamp for generating high-concentration ozone."

A plurality of low-concentration ozone generation lamps and high-concentration ozone generation lamps defined by various conditions and factors in this way may be arranged in plurality. You can place them one by one. Moreover, when preparing a plurality, the number may be different.

In the present invention, it is possible to selectively turn on the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone disposed in the housing, and one of the excimer lamps can be turned on according to the usage environment. can be done. For example, either one of the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone is lit continuously, that is, lit continuously for a predetermined period.

Various arrangement configurations are possible for the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone. For example, an excimer lamp for generating low-concentration ozone and an excimer lamp for generating high-concentration ozone can be arranged along the air flow path. Also, considering that they are arranged along a common air flow path, the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone can be arranged in a lamp housing compartment partitioned within the housing. can.

In this case, the excimer lamp for generating low-concentration ozone is arranged such that the distance between the excimer lamp for generating low-concentration ozone and the inner wall of the lamp housing chamber is smaller than the distance between the excimer lamp for generating low-concentration ozone and the inner wall of the lamp housing chamber. can be placed.

The excimer lamp for generating low-concentration ozone can have various lamp configurations. The electrodes can be configured as excimer lamps in line contact with the discharge vessel for generating low-concentration ozone. For example, the discharge gas is a rare gas defined within the range of 0.1 kPa to 30 kPa, and the outer diameter of the low-concentration ozone generating discharge vessel is defined within the range of 3 mm to 10 mm.

On the other hand, the excimer lamp for generating low-concentration ozone can also have various lamp configurations. An excimer lamp can be constructed with an inner electrode disposed along.

An excimer lamp lighting method according to another aspect of the present invention includes an excimer lamp for generating low-concentration ozone, which generates a relatively small amount of ozone, and a high-concentration ozone-generating excimer lamp, which generates a relatively large amount of ozone. Either one of the excimer lamps for generating concentrated ozone is turned on.

ADVANTAGE OF THE INVENTION According to this invention, the ozone generator provided with the excimer lamp which can change the generation amount of ozone according to a use environment can be provided.

It is a schematic internal block diagram of an ozone generator. 1 is a schematic side view of an excimer lamp for generating low-concentration ozone; FIG. 1 is a schematic front view of an excimer lamp for generating low-concentration ozone, viewed from the end side; FIG. FIG. 5 is a schematic cross-sectional view of an excimer lamp for generating low-concentration ozone along line A-A' in FIG. 4; 1 is a schematic side view of an excimer lamp for generating high-concentration ozone; FIG. 1 is a schematic side view of an excimer lamp for generating low-concentration ozone; FIG. 1 is a schematic front view of an excimer lamp for generating low-concentration ozone, viewed from the end side; FIG. FIG. 9 is a schematic cross-sectional view of an excimer lamp for generating low-concentration ozone along line A-A' in FIG. 8;

Hereinafter, an ozone generator that is an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic internal configuration diagram of an ozone generator.

The ozone generator 1 is configured as a deodorizer here. Excimer lamps 100 and 200 (see FIG. 2) for irradiating ultraviolet rays are provided inside the housing 10 . The housing 10 has an opening 10T for releasing ozone in the ceiling surface 10U at the upper end of the side surface 10S. On the other hand, an opening 10B for inhaling an object containing oxygen such as air (hereinafter referred to as air) is provided in the bottom surface 10N of the housing. Here, the opening 10T and the opening 10B are formed to face each other around the axis of the housing 10 with substantially the same size.

A lamp housing chamber 30 for housing the excimer lamps 100 and 200 is defined inside the housing 10 , and a blower fan 50 is provided below the lamp housing chamber 30 . By rotating the blower fan 50, an air flow path is formed in the housing 10 such that the air taken in from the opening 10B passes through the lamp storage chamber 30 and is discharged to the outside of the housing 10 from the opening 10T. is formed.

A lamp housing chamber 30 for housing the excimer lamps 100 and 200 is defined inside the housing 10 , and air flows into the lamp housing chamber 30 by a blower fan 50 . When the excimer lamps 100 and 200 are turned on and emit ultraviolet rays (here, 172 nm), the air flowing through the lamp storage chamber 30 is irradiated with the ultraviolet rays. Ozone generated by the ultraviolet irradiation is emitted to the outside of the device from the opening 10T.

A power supply controller 40 having a DC power supply is arranged in the ozone generator 1, and is connected to the excimer lamps 100 and 200 via conductors (not shown). The power control unit 40 selectively and continuously lights the excimer lamps 100 and 200 according to the user's lighting operation. However, continuous lighting means that the lamp is kept on without being turned off for a certain period of time.

The excimer lamp 100 and the excimer lamp 200 of the present embodiment have a difference in ozone generation amount (ozone concentration), and are composed of different types of excimer lamps having different configurations such as lamp size, discharge distance, discharge space area, and electrode arrangement. ing. The excimer lamp 100 is configured as an excimer lamp that generates ozone in a relatively small amount and at a low concentration. The excimer lamp 200 generates relatively more ozone than the excimer lamp 100, and is configured as an excimer lamp that generates ozone at a high concentration. Hereinafter, the excimer lamp 100 is referred to as "low-concentration ozone generating excimer lamp", and the excimer lamp 200 is referred to as "high-concentration ozone generating excimer lamp".

The excimer lamp 100 for generating low-concentration ozone and the excimer lamp 200 for generating high-concentration ozone are arranged parallel to each other so that their lamp axes are along the central axis X of the housing 10 . Here, the lamp storage chamber 30 is partitioned so as to form a symmetrical internal space with respect to the central axis X of the housing 10 . Therefore, the air (ozone) flows inside the lamp storage chamber 30 along the central axis X of the housing 10, which is the center of the air flow path, and the lamp storage chamber 30 becomes an ozone generation space by ultraviolet irradiation. ing.

The excimer lamp 200 for generating high-concentration ozone is arranged on the central axis X side of the lamp housing chamber 30 compared to the excimer lamp 100 for generating low-concentration ozone in the lamp housing chamber 30 . That is, it is arranged near the center of the channel. On the other hand, the excimer lamp 100 for generating low-concentration ozone is arranged closer to the inner wall 30K of the lamp storage chamber (inner wall side of the housing) than the excimer lamp for generating high-concentration ozone. That is, the distance between the low-concentration ozone generating excimer lamp 100 and the lamp housing inner wall 30K is smaller than the distance between the high-concentration ozone generating excimer lamp and the lamp housing inner wall 30K. Therefore, the excimer lamp 200 for generating high-concentration ozone irradiates almost the entire interior of the lamp housing with ultraviolet rays, while the excimer lamp 100 for generating low-concentration ozone irradiates ultraviolet rays in a limited area.

The excimer lamp 200 for generating high-concentration ozone is a lamp capable of generating ozone at a level at which deodorization can be performed quickly and effectively. h or more, and the ozone concentration is set to 10 ppm or more at a position 30 cm away from the ozone discharge opening 10T. The high-concentration ozone generating excimer lamp 200 is normally used in an environment where there are no people around (unmanned environment).

On the other hand, the excimer lamp 100 for generating low-concentration ozone generates 3 mg/h of ozone by irradiating with ultraviolet rays, and the ozone concentration is 0.01 to 0.10 ppm or less at a position 30 cm away from the opening 10T for releasing ozone. be. For example, the ozone concentration is 0.06 ppm or less as specified by the Ministry of the Environment's "environmental standard concentration of photochemical oxidants", or the ozone concentration is 0.05 ppm (average) or less as specified by the Japan Air Cleaning Association. The excimer lamp 100 for ozone generation is lit. The excimer lamp 100 for generating low-concentration ozone is normally used in an environment where people are present (manned environment).

FIG. 2 is a schematic side view of the excimer lamp 100 for generating low-concentration ozone. FIG. 3 is a schematic front view of the excimer lamp 100 for generating low-concentration ozone as viewed from the end side. FIG. 4 is a schematic cross-sectional view of the excimer lamp 100 for generating low-concentration ozone along line A-A' in FIG. The configuration of the excimer lamp 100 for generating low-concentration ozone will be described below with reference to FIGS.

The excimer lamp 100 for generating low-concentration ozone includes a cylindrical discharge vessel 120 formed of a dielectric material such as quartz glass and having a discharge space 100S formed therein. 130, 140 are provided. The pair of electrodes 130 and 140 extend over substantially the entire discharge vessel 120 along the axial direction XX of the discharge vessel, and have different polarities. As shown in FIG. 3, the pair of electrodes 130 and 40 have the same shape, are arranged opposite each other in the radial direction, and are in line contact with the discharge vessel 120 .

Here, the excimer lamp 100 for generating low-concentration ozone is configured as an excimer lamp having a small-diameter discharge vessel. can be set in the range of 10 mm to 30 mm.

The discharge space 100S is filled with a xenon gas of 0.1 kPa to 30 kPa (more preferably 7 kPa to 20 kPa). The pair of electrodes 130 and 140 is connected to a pair of conducting wires (not shown) connected to the power control unit 40, and a high frequency (1 kHz to 500 kHz) voltage ( 5 kV to 10 kV) is applied. The discharge vessel 120 is held by a pair of electrodes 130 and 140, but may be held by a holding member (not shown).

As shown in FIG. 3, the pair of electrodes 130 and 140 are configured as flat electrodes and held by holding members (not shown). Further, the pair of electrodes 130, 140 are in line contact with the outer peripheral surface 120S of the discharge vessel 120 at the contact portion L, and are arranged symmetrically with respect to the symmetry axis AA' line passing through the axial direction XX of the discharge vessel 120. there is A gap 150 is formed in a portion where the discharge vessel 120 and the pair of electrodes 130 and 140 are not in contact. Although the thick portion of the discharge vessel 120 is omitted in FIG. 4, the thickness can be set within a range of 0.2 to 4 mm (for example, 1.5 mm).

When a voltage is applied to the pair of electrodes 130 and 140, a dielectric barrier discharge is generated within the discharge vessel 120, and ultraviolet rays are radiated to the outside of the discharge vessel 120. FIG. Since the electric field concentrates on the contact portion L and local strong discharge CC (see FIG. 4) occurs near the contact portion L in the discharge vessel 120, the illuminance of the ultraviolet rays emitted near the contact portion L is high. On the other hand, near the center between the electrodes 130 and 140, the illuminance of the emitted ultraviolet rays is low (the discharge is weak).

As a result, as shown in FIG. 4, a weak discharge occurs in the spatial region near the central axis XX, while a strong discharge CC occurs in the spatial region near the contact portion L in contact with the pair of electrodes 130 and 140. occurs. Within the discharge vessel 120, the discharge state is different between the spatial region near the electrodes 130 and 140 and the spatial region near the center between the electrodes 130 and 140, and the discharge occurs on both sides of the discharge vessel 120 (electrode side), a localized discharge will occur within the discharge vessel 120 .

FIG. 5 is a schematic side view of the excimer lamp 200 for generating high-concentration ozone. The excimer lamp 200 for generating high-concentration ozone includes a discharge vessel 220 made of a dielectric material such as quartz glass and having a circular cross section. enclosed as. The filling pressure of the discharge gas is set to, for example, 5 kPa to 150 kPa.

Inside the discharge vessel 220, one sheet of foil electrode 230 extending like a strip along the axis XY is arranged. The foil electrode 230 is covered with a columnar dielectric 250 having a substantially circular cross section and is embedded in the dielectric 250 without being exposed to the discharge space.

The foil electrode 230 is coaxially arranged with its center position in the width direction aligned with the center position of the dielectric 250 . Also, the dielectric 250 is arranged coaxially with respect to the discharge vessel 220 . The foil electrode 230 is therefore arranged coaxially with respect to the discharge vessel 220 and symmetrically with respect to the axis XY.

The external electrode 240 provided on the outer surface of the discharge vessel 220 has a configuration in which a plurality of electrode portions are arranged in a mesh shape, and are arranged spirally along the axis XY at predetermined intervals. A conductor 270 connected to the end of the foil electrode 230 and a conductor (not shown) connected to the external electrode 240 are connected to the power control unit 40, and a voltage (5 kV to 20 kV) with a frequency of 5 kHz to 100 kHz is applied to the foil electrode. 230 and the external electrode 240 .

The axial length W2 of the discharge vessel 220 is defined here between 220 mm and 300 mm. On the other hand, the wall thickness of the discharge vessel 220 is set to 0.5 mm to 2.0 mm here. Also, the inner diameter of the discharge vessel 220 is set to 8 mm to 30 mm here. The thickness of the foil electrode 230 is defined here between 0.01 μm and 0.1 μm. On the other hand, the width of the foil electrode 230 is set to 1.5 mm to 5.0 mm here.

The excimer lamp 100 for generating low-concentration ozone shown in FIGS. 2 to 4 and the excimer lamp 200 for generating high-concentration ozone shown in FIG. They are different in terms of, for example, a small amount of ozone (low concentration) and a large amount of ozone (high concentration). In particular, the excimer lamp 100 for generating low-concentration ozone is smaller in size than the excimer lamp 200 for generating high-concentration ozone.

The discharge distance of the excimer lamp 200 for generating high-concentration ozone, that is, the distance DD2 (see FIG. 5) between the dielectric 250 and the inner diameter of the discharge vessel 220 is the discharge distance DD1 (see FIG. 2) of the excimer lamp 100 for generating low-concentration ozone. ). Further, the axial length W2 (see FIG. 5) of the discharge vessel 220 of the excimer lamp 200 for generating high-concentration ozone is equal to the axial length W1 (see FIG. 2) of the discharge vessel 120 of the excimer lamp 100 for generating low-concentration ozone. ). Therefore, the discharge space area of discharge vessel 220 is larger than the discharge space area of discharge vessel 120 .

Furthermore, the excimer lamp 100 for generating low-concentration ozone is configured such that the pair of electrodes 130 and 140 partially block the ultraviolet radiation, and a weak discharge (fine discharge) is generated by local discharge. On the other hand, in the excimer lamp 200 for generating high-concentration ozone, the influence of the foil electrode 230 blocking ultraviolet rays is small, and ultraviolet rays are radiated over the entire periphery of the discharge vessel 220 .

By arranging the low-concentration ozone generating excimer lamp 100 for generating low-concentration ozone and the high-concentration ozone generating excimer lamp 200 for generating high-concentration ozone in the lamp storage chamber 30 in this way, the conventional excimer lamp can be used. It is possible to adjust the amount of ozone generated (ozone concentration), which could not be realized with a single lamp structure.

Due to the structure of the excimer lamp, even if the input voltage is adjusted to change the amount of UV irradiation, the rate of change in the amount of ozone generated is limited to several tens of percent at most. density) cannot be changed. For example, in the case of the excimer lamp 200 for generating high-concentration ozone, the ozone generation amount (ozone concentration) can only be increased or decreased at a rate of 30%.

The excimer lamp 100 for generating low-concentration ozone can generate ozone less than the minimum amount of ozone that can be generated by adjusting the voltage of the excimer lamp 200 for generating high-concentration ozone. Conversely, the excimer lamp 200 for generating high-concentration ozone can achieve an ozone generation amount (ozone concentration) that cannot be achieved by adjusting the voltage of the excimer lamp 100 for generating low-concentration ozone.

Such selective lighting of the excimer lamp 100 for generating low-concentration ozone and the excimer lamp 200 for generating high-concentration ozone makes it possible to generate ozone over a range of low concentration to high concentration. The ozone concentration required in a manned environment and the ozone concentration required for rapid and effective deodorization in an unmanned environment differ greatly in value, and one excimer lamp is used to operate in both environments. I can't. By selectively using the excimer lamp 100 for generating low-concentration ozone and the excimer lamp 200 for generating high-concentration ozone, it is possible to adapt to both usage environments. In addition, since both excimer lamps are lit continuously rather than blinking, the supply voltage is constant and the amount of ozone generated is stable.

Since the excimer lamp 100 for generating low-concentration ozone and the excimer lamp 200 for generating high-concentration ozone are arranged in the same lamp storage chamber 30, the air flowing through the same flow path is irradiated with ultraviolet rays, and the blower fan 50, etc. can be used as it is in the conventional device. On the other hand, since the power control unit 40 and the like are arranged in a separate partitioned area by the lamp storage chamber 30, ultraviolet irradiation can be avoided as much as possible. The electrodes 130 and 140 of the excimer lamp 100 for generating low-concentration ozone block ultraviolet irradiation when the excimer lamp 200 for generating high-concentration ozone is lit. It is possible to reduce the influence of the excimer lamp 100 for generating low-concentration ozone.

In addition, while the excimer lamp 200 for generating high-concentration ozone is arranged near the central axis X of the housing 10, that is, near the center of the flow path, the excimer lamp 100 for generating low-concentration ozone is closer to the lamp housing room wall 10K. placed in place. As a result, the ultraviolet irradiation area of the air flowing in the lamp storage chamber 30 differs between the lamps, and the difference in the amount of ozone generated increases.

As described above, according to the present embodiment, in the ozone generator 1, the excimer lamp 100 for generating low-concentration ozone that generates ozone with an ozone concentration in the range of 0.05 to 0.10 ppm and ozone with an ozone concentration of 10 ppm or more are provided. An excimer lamp 200 for generating high-concentration ozone is arranged in the lamp storage chamber 30 inside the housing 10 . The excimer lamp 100 for generating low-concentration ozone or the excimer lamp 200 for generating high-concentration ozone is continuously lit by the user's lighting operation.

Next, the ozone generator of the second embodiment will be described with reference to FIGS. 6 to 8. FIG. The second embodiment differs from the first embodiment in the configuration of the excimer lamp for generating low-concentration ozone. Other configurations are the same.

FIG. 6 is a schematic side view of an excimer lamp for generating low-concentration ozone. FIG. 7 is a schematic front view of the excimer lamp for generating low-concentration ozone, viewed from the end side. FIG. 8 is a schematic cross-sectional view of an excimer lamp for generating low-concentration ozone along line A-A' in FIG.

The excimer lamp 100' includes a cylindrical discharge vessel 120' that forms a discharge space 100S' inside and is made of quartz glass or the like. A pair of electrodes 130' and 140' having different polarities are arranged on both ends 120T1' and 120T2' of the discharge vessel 120'. The excimer lamp 100' is configured here as a compact excimer lamp, the axial length W3 of the discharge vessel being in the range from 10 mm to 30 mm, and the outer diameter D' of the discharge vessel 120' being in the range from 3 mm to 10 mm. , the axial distance (inter-electrode distance H) between the pair of electrodes 130' and 140' can be set in the range of 2 mm to 15 mm.

The discharge space 100S' of the discharge vessel 120' is filled with xenon gas of 0.1 kPa to 30 kPa (more preferably 7 kPa to 20 kPa). A pair of electrodes 130′ and 140′ are connected to a pair of conducting wires (not shown) connected to the power supply control unit 40, and a high frequency (1 kHz to 500 kHz) high voltage (5 kV to 10 kV) is applied to the pair of electrodes 130′ and 140′. It is applied between the electrodes 130', 140'. The discharge vessel 120' and electrodes 130' and 140' are held by holding members (not shown).

As shown in FIG. 7, the pair of electrodes 130' and 140' are configured as cylindrical electrodes that are in close contact with each other along the entire circumferential surface 120S' of the discharge vessel 120' so as to transmit light. It is composed of curved electrode members with no gaps. The pair of electrodes 130' and 140' are arranged opposite to each other along the axial direction XX of the discharge vessel, and have different polarities with respect to the axial direction XX. Although the thick portion of the discharge vessel 120' is omitted in FIG. 7, the thickness can be set within the range of 0.2 mm to 4 mm.

When a high frequency high voltage is applied to the pair of electrodes 130' and 140' in the same manner as in the first embodiment, a dielectric barrier discharge is generated within the discharge vessel 120', and ultraviolet rays are directed to the outside of the discharge vessel 120'. be radiated. In this embodiment, the pair of electrodes 130' and 140' are arranged to face each other along the axial direction X with the central portion of the discharge vessel 120' interposed therebetween, thereby causing localized discharge within the discharge vessel 20. .

As shown in FIG. 9, in the vicinity of the central portion of the discharge vessel 120', a weak discharge occurs in a narrow area (only in the vicinity of the central axis of the discharge vessel). On the other hand, in the space area covered by the pair of electrodes 130' and 140', a strong discharge CC is generated in the wide area (entire radial direction of the discharge vessel). Within the discharge vessel 120', the discharge state is different between the spatial regions near the electrodes 130' and 140' and the spatial region near the center, and the discharge is biased toward both ends of the discharge vessel 120'. A localized discharge will thereby occur within the discharge vessel 120'.

The excimer lamps 100, 100' for generating low-concentration ozone and the excimer lamps 200, 200' for generating high-concentration ozone described in the first and second embodiments are excimers capable of realizing low-concentration ozone generation and high-concentration ozone generation. It is an example of a lamp and is not limited to this. Also, the number of excimer lamps for generating high-concentration ozone and excimer lamps for generating low-concentration ozone is not limited to one, and each may be composed of a plurality of lamps. For example, the ozone concentration range may be divided more finely, and an excimer lamp for generating high-concentration ozone and an excimer lamp for generating low-concentration ozone may be selectively turned on according to the divided range.

On the other hand, even excimer lamps with the same or similar lamp configuration (kind) are arranged as high-concentration ozone generation excimer lamps and low-concentration ozone generation excimer lamps if there is a relative difference in the amount of ozone generated. It is also possible to For example, it becomes possible to operate with different ozone concentrations in both manned and unmanned environments. In this case, it is sufficient to make the ozone generation amount different by making the above-described lamp placement locations more conspicuous.

The lamp storage chamber 30 does not have to be symmetrical with respect to the central axis X of the housing 10, and the excimer lamp for generating high-concentration ozone and the excimer lamp for generating low-concentration ozone are arranged in separate lamp storage chambers. It may be configured to Furthermore, a configuration in which the lamp storage chamber is not specially partitioned (the entire internal space of the housing may be the lamp storage chamber) may be employed. The shape of the housing can also be configured in a square shape or a rectangular shape other than a cylindrical shape.

As for the excimer lamp 100 for generating low-concentration ozone and the excimer lamp 200 for generating high-concentration ozone, not only one of them but also both of them may be continuously lit. This makes it possible to adjust the ozone concentration over a wider range. Further, automatic control may be performed so that lighting is automatically switched when a predetermined condition is reached.

In the first and second embodiments, the excimer lamps 100 and 100' for generating low-concentration ozone and the excimer lamps 200 and 200' for generating high-concentration ozone are driven by a predetermined voltage. It may be modified. For example, an ozone concentration measuring device may be provided to adjust the voltage value of each excimer lamp.

In this embodiment, the ozone generator 1 is configured as a deodorizer, but it can also be applied to an ultraviolet irradiation device for cleaning the surface of a substrate and the like. The present invention can be applied to general equipment that performs processing using the oxidative power of ozone, such as deodorization.

REFERENCE SIGNS LIST 1 Ozone generator 10 Housing 30 Lamp storage chamber 40 Power control unit 100 Low-concentration ozone generation lamp 200 High-concentration ozone generation lamp

Claims (16)

an excimer lamp for generating low-concentration ozone that generates a relatively small amount of ozone;
an excimer lamp for generating high-concentration ozone, which generates a relatively large amount of ozone;
a housing for housing the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone;
the discharge space area of the excimer lamp for generating low-concentration ozone is smaller than the discharge space area of the excimer lamp for generating high-concentration ozone;
An ozone generator, wherein the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone are selectively turned on. 2. The ozone generator according to claim 1, wherein either one of said excimer lamp for generating low-concentration ozone and said excimer lamp for generating high-concentration ozone is lit continuously. 3. The ozone generator according to claim 1 or 2, wherein said excimer lamp for generating low-concentration ozone and said excimer lamp for generating high-concentration ozone are arranged in a lamp housing compartment defined in said housing. Device. In the low-concentration ozone generating excimer lamp, the distance between the low-concentration ozone generating excimer lamp and the inner wall of the lamp housing chamber is smaller than the distance between the high-concentration ozone generating excimer lamp and the inner wall of the lamp housing chamber. 4. The ozone generator according to claim 3, characterized in that it is arranged such that an excimer lamp for generating low-concentration ozone that generates a relatively small amount of ozone;
an excimer lamp for generating high-concentration ozone, which generates a relatively large amount of ozone;
a housing for housing the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone;
The amount of ozone generated by the excimer lamp for generating low-concentration ozone is smaller than the minimum amount of ozone generated by the excimer lamp for generating high-concentration ozone that can be controlled by voltage control,
An ozone generator, wherein the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone are selectively turned on. an excimer lamp for generating low-concentration ozone that generates a relatively small amount of ozone;
an excimer lamp for generating high-concentration ozone, which generates a relatively large amount of ozone;
a housing for housing the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone;
the discharge distance of the excimer lamp for generating low-concentration ozone is shorter than the discharge distance of the excimer lamp for generating high-concentration ozone,
An ozone generator, wherein the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone are selectively turned on. an excimer lamp for generating low-concentration ozone that generates a relatively small amount of ozone;
an excimer lamp for generating high-concentration ozone, which generates a relatively large amount of ozone;
a housing for housing the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone;
the length in the lamp axis direction of the excimer lamp for generating low-concentration ozone is shorter than the length in the lamp axis direction of the excimer lamp for generating high-concentration ozone;
An ozone generator, wherein the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone are selectively turned on. The excimer lamp for generating low-concentration ozone comprises a pair of electrodes facing each other along the axial direction or radial direction of the discharge vessel for generating low-concentration ozone in which the discharge gas is sealed,
8. The ozone generator according to any one of claims 1 to 7, wherein said pair of electrodes are in line contact with said discharge vessel for generating low-concentration ozone. The discharge gas is a rare gas defined within a range of 0.1 kPa to 30 kPa,
9. The ozone generator according to claim 8, wherein the outer diameter of said discharge vessel for generating low-concentration ozone is in the range of 3 mm to 10 mm. 10. The ozone generator according to any one of claims 1 to 9, wherein said excimer lamp for generating low-concentration ozone and said excimer lamp for generating high-concentration ozone are arranged along an air flow path. Device. Either a low-concentration ozone-generating excimer lamp, which generates a relatively small amount of ozone, or a high-concentration ozone-generating excimer lamp, which generates a relatively large amount of ozone, is selectively placed in the housing of the ozone generator. An excimer lamp lighting method for lighting a
An excimer lamp lighting method, wherein the discharge space area of the excimer lamp for generating low-concentration ozone is smaller than the discharge space area of the excimer lamp for generating high-concentration ozone. an excimer lamp for generating low-concentration ozone that generates a relatively small amount of ozone;
an excimer lamp for generating high-concentration ozone, which generates a relatively large amount of ozone;
a housing for housing the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone;
The excimer lamp for generating low-concentration ozone is configured to be used in a manned environment, and the excimer lamp has an ozone concentration in the range of 0.01 ppm or more and 0.10 ppm or less at a position 30 cm away from the ozone release opening. and
The excimer lamp for generating high-concentration ozone is configured to be used in an unmanned environment, and is an excimer lamp having an ozone concentration of 10 ppm or more at a position 30 cm away from an opening for releasing ozone,
An ozone generator, wherein the excimer lamp for generating low-concentration ozone and the excimer lamp for generating high-concentration ozone are selectively turned on. Either a low-concentration ozone-generating excimer lamp, which generates a relatively small amount of ozone, or a high-concentration ozone-generating excimer lamp, which generates a relatively large amount of ozone, is selectively placed in the housing of the ozone generator. An excimer lamp lighting method for lighting a
An excimer lamp lighting method, wherein the amount of ozone generated by the excimer lamp for generating low-concentration ozone is smaller than the minimum amount of ozone generated by the excimer lamp for generating high-concentration ozone that can be controlled by voltage control. Either one of a low-concentration ozone-generating excimer lamp with a relatively small amount of ozone generation and a high-concentration ozone-generating excimer lamp with a relatively large amount of ozone, which are arranged in the housing of the ozone generator, is turned on. An excimer lamp lighting method comprising:
An excimer lamp lighting method, wherein the discharge distance of the excimer lamp for generating low-concentration ozone is shorter than the discharge distance of the excimer lamp for generating high-concentration ozone. Either a low-concentration ozone-generating excimer lamp, which generates a relatively small amount of ozone, or a high-concentration ozone-generating excimer lamp, which generates a relatively large amount of ozone, is selectively placed in the housing of the ozone generator. An excimer lamp lighting method for lighting a
An excimer lamp lighting method, wherein the length in the lamp axis direction of the excimer lamp for generating low-concentration ozone is shorter than the length in the lamp axis direction of the excimer lamp for generating high-concentration ozone. Either a low-concentration ozone-generating excimer lamp, which generates a relatively small amount of ozone, or a high-concentration ozone-generating excimer lamp, which generates a relatively large amount of ozone, is selectively placed in the housing of the ozone generator. An excimer lamp lighting method for lighting a
The excimer lamp for generating low-concentration ozone is configured to be used in a manned environment, and the excimer lamp has an ozone concentration in the range of 0.01 ppm or more and 0.10 ppm or less at a position 30 cm away from the ozone release opening. and
The excimer lamp for generating high-concentration ozone is configured to be used in an unmanned environment, and is characterized by being an excimer lamp having an ozone concentration of 10 ppm or more at a position 30 cm away from an opening for releasing ozone. Excimer lamp lighting method.

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