JP7147341B2 - METHOD FOR MANUFACTURING MEMBRANE ARTICLE, AND HOLDER - Google Patents

Description

TECHNICAL FIELD The present invention relates to a method for manufacturing a film-coated article and a holder.

As disclosed in Japanese Unexamined Patent Application Publication No. 2002-100001, as a holder for holding a substrate, there is known a configuration including a carrier having a concave portion on which the substrate is placed and a pressing plate for pressing the substrate. A magnet is embedded in the retainer carrier to attract the hold-down plate.

JP 2010-232414 A

When a plate-shaped work such as a substrate is held using a presser plate as in the above-described conventional technique, and a functional film is formed on one side of the work, for example, the functional film is formed on the entire one side of the work. Film formation is not possible, and the work may be damaged due to contact between the work and the pressing plate.

The present invention has been made in view of these circumstances, and its object is to manufacture a film-coated article capable of suitably holding a ferromagnetic plate-like work and forming a functional film on the work. The object is to provide a method and a retainer.

A method for manufacturing a film-coated article that solves the above-mentioned problems is a method for manufacturing a film-coated article comprising the step of forming a functional film on a ferromagnetic plate-shaped work held by a holder. The holder includes a support member that supports at least a portion of the first main surface of the work, and a magnet that attracts the work to the support member. The functional film is formed on the second major surface opposite to the surface.

According to this method, the work can be held by attracting the first main surface of the work to the support member by the magnet, so that the functional film can be formed on the entire second main surface of the work. . Moreover, since a member that contacts the second main surface of the work can be omitted, it is possible to prevent the second main surface of the work from being scratched.

In the method for manufacturing a film-coated article described above, it is preferable that the holder includes a plurality of magnets corresponding to the plurality of works, and holds the plurality of works.
According to this method, functional films can be formed on a plurality of works in one step.

In the above method for manufacturing a film-coated article, it is preferable that the shape of the magnet is a plate having a main surface facing the first main surface of the workpiece.
According to this method, for example, the work can be stably attracted to the support member.

In the method for manufacturing a film-coated article, it is preferable that the magnet has an outer shape that is the same as or smaller than the outer shape of the work in plan view.
According to this method, the work can be easily held by aligning the center of the work with the center of the magnet in plan view. As a result, the work for holding the workpiece at the predetermined position can be performed smoothly.

In the method for manufacturing a film-coated article described above, it is preferable that the holder further includes an attachment member for attaching the magnet, and the support member is attached to the attachment member.
According to this method, the relative positions of the support member and the magnet can be determined by the mounting member.

In the method for manufacturing a film-coated article described above, it is preferable that the attachment member of the holder has ferromagnetism, and the magnet is attached to the attachment member by magnetic force.
According to this method, for example, the magnets of the holder can be easily arranged. Also, for example, it is possible to easily change the arrangement of the magnets in the holder or to change the magnets to magnets of different sizes.

In the above method for manufacturing a film-coated article, it is preferable that the attachment member of the holder has a spacer portion that regulates the distance between the magnet and the support member.
According to this method, the distance between the work supported by the support member and the magnet can be set by setting the dimensions of the spacer portion.

In the method for manufacturing a film-attached article, the support member of the holder may have a through hole, and the opening edge of the through hole may support at least a part of the peripheral edge of the first main surface of the workpiece. preferable.

According to this method, by reducing the contact area between the first main surface of the work and the support member, it is possible to suppress the occurrence of scratches on the first main surface of the work.
In the method for manufacturing a film-coated article described above, it is preferable that the holder further includes a positioning member that positions the workpiece placed on the support member.

According to this method, the work can be easily arranged in correspondence with the magnets of the holder.
A holder for solving the above problems is a holder for holding a ferromagnetic plate-like work, the holder comprising: a support member for supporting at least part of a first main surface of the work; and a magnet that attracts the work to the support member, and is used in the step of forming a functional film on the second main surface of the work opposite to the first main surface.

ADVANTAGE OF THE INVENTION According to this invention, the plate-shaped workpiece|work which has ferromagnetism can be hold|maintained suitably, and a functional film can be formed into a workpiece|work on a workpiece|work.

It is a top view showing a holder and a work in an embodiment. FIG. 2 is a cross-sectional view taken along line AA of FIG. 1; 2 is an end view along line BB of FIG. 1; FIG. FIG. 2 is an end view along line CC of FIG. 1; (a) is a cross-sectional view for explaining a film formation process, (b) is a schematic diagram showing a film-coated article, and (c) is an explanatory diagram for explaining an example of the film formation process. . It is a sectional view showing a modification of a holder. FIG. 11 is a partial cross-sectional view showing a modification of the holder; It is a sectional view showing a modification of a holder. (a) to (d) are explanatory diagrams for explaining the relationship between a modification of the work magnet and the work.

Hereinafter, embodiments of a manufacturing method of a film-attached article and a holder will be described with reference to the drawings. In the drawings, for convenience of explanation, part of the configuration may be exaggerated or simplified. Also, the dimensional ratio of each part may differ from the actual one.

As shown in FIGS. 1 to 4, a holder 11 for holding a plate-shaped workpiece W having magnetism, particularly ferromagnetism, includes a support member 12 for supporting at least a portion of the first main surface Wa of the workpiece W, and a work magnet 13 for attracting the work W to the support member 12 . The holder 11 is used in a step of forming a functional film on the second main surface Wb of the workpiece W opposite to the first main surface Wa.

The holder 11 includes a plurality of work magnets 13 corresponding to a plurality of works W, and is configured to hold a plurality of works W. As shown in FIG. Each work magnet 13 is shaped like a plate having a first main surface 13a facing the first main surface Wa of the work W. As shown in FIG.

The work magnet 13 has the same outer shape as the work W in plan view, and the holder 11 holds the work W so that the center of the work W coincides with the center of the work magnet 13 in plan view. keeping. Although the shape of the workpiece W in the present embodiment is a quadrangular shape in a plan view, the shape may be a polygonal shape other than the quadrangular shape, a circular shape, or the like. Even if the outer shape of the work magnet 13 is partially changed, for example, by chamfering the four corners or providing a notch in a part, the function of attracting the work W is not impaired and the entire work magnet 13 can be held in place. , the outer shape of the workpiece magnet 13 is understood to be the same outer shape as the outer shape of the work W if the outer shape is substantially the same as the outer shape of the work W.

A permanent magnet can be used as the work magnet 13 . Permanent magnets include, for example, neodymium magnets, samarium-cobalt magnets, and ferrite magnets. An electromagnet can also be used as the work magnet 13 . The magnetic flux density of the work magnet 13 is preferably 0.1 T or more.

As shown in FIGS. 2 to 4, the holder 11 of this embodiment further includes mounting members 14 for mounting the work magnets 13. As shown in FIGS. Preferably, the mounting member 14 has ferromagnetism, and each work magnet 13 is mounted on the mounting member 14 by magnetic force. That is, each work magnet 13 is attached by arranging the second main surface 13b on the side opposite to the first main surface 13a so as to overlap the mounting member 14 . At least the mounting surface of the mounting member 14 on which the workpiece magnet 13 is mounted should be made of a ferromagnetic material. If the mounting member 14 is made of a material other than a ferromagnetic material, for example, the workpiece magnet 13 may be attached to the mounting member 14 using an adhesive layer.

The mounting member 14 of the holder 11 has a mounting base portion 14a and a spacer portion 14b protruding from the mounting base portion 14a. The support member 12 is arranged so as to overlap the tip surface of the spacer portion 14b of the mounting member 14 . A space between the magnet and the support member 12 is regulated by the spacer portion 14b.

The support member 12 of the holder 11 has a plurality of through holes 12a. As shown in FIG. 4, the support member 12 is configured to support at least a portion of the peripheral edge of the first main surface Wa of the workpiece W at the opening edges of the through holes 12a. The support member 12 of the present embodiment is configured to support the four corners of the first main surface Wa of the work W, which is rectangular in plan view. Alternatively, the workpiece W may be supported over the entire peripheral edge of the first main surface Wa.

As shown in FIGS. 2 to 4, the holder 11 further includes a positioning member 15 that positions the workpiece W placed on the support member 12. As shown in FIG. The positioning member 15 has a shape surrounding the work W in plan view. The positioning member 15 of this embodiment has a through hole 15a, and is configured such that the workpiece W is arranged in the through hole 15a. The positioning member 15 positions the work W by bringing the side surface Wc between the first main surface Wa and the second main surface Wb of the work W into contact with the inner surface of the through hole 15a. The positioning member 15 is not limited to the configuration in which the work W is arranged in the through hole 15a, but may be configured such that the through hole 15a is changed to a notch portion and the work W is arranged in this notch portion. can also

As shown in FIG. 2, the support member 12 and the positioning member 15 of the holder 11 are attached to the attachment member 14 . The support member 12 and the positioning member 15 in the holder 11 of this embodiment are attached to the attachment member 14 having ferromagnetism by the attachment magnet 16 arranged on the positioning member 15 . By using the mounting magnet 16 in this way, the mounting position can be adjusted and the support member 12 and the positioning member 15 can be easily replaced. The material of the support member 12 and the material of the positioning member 15 may be a ferromagnetic material, or may be a material other than a ferromagnetic material. If a material other than a ferromagnetic material is used as the material of the mounting member 14, the supporting member 12 and the positioning member 15 can be attached to the mounting member 14 using, for example, an adhesive layer or fasteners without using the mounting magnet 16. Just install it.

Next, a method for manufacturing a film-attached article will be described.
The method for manufacturing a film-coated article includes a step of forming a functional film on the workpiece W in a state in which the plate-like workpiece W having ferromagnetism is held by the holder 11 described above. In order to hold the work W on the holder 11 , the work W is placed on the support member 12 so that the first main surface Wa of the work W overlaps a predetermined position of the support member 12 . At this time, the work W is held on the support member 12 by being attracted to the support member 12 by the work magnet 13 .

In the method for manufacturing a film-coated article, a functional film is formed on the second main surface Wb of the workpiece W opposite to the first main surface Wa. The entire second main surface Wb of the workpiece W held by the holder 11 is exposed. Therefore, the functional film can be formed on the entire second main surface Wb of the workpiece W. As shown in FIG.

Examples of the work W include a work made of a ferromagnetic material such as ferromagnetic stainless steel, and a work having a substrate made of a material other than the ferromagnetic material and a ferromagnetic film on the substrate. Specifically, a garnet single crystal substrate for an isolator is mentioned. When the work W is a plate-like work, the dimensions of the plate-like work are, for example, 5 to 20 mm in length, 5 to 20 mm in width, and 0.1 to 1 mm in thickness.

In the process of forming a functional film, for example, a sputtering method, a PVD (Physical Vapor Deposition) method such as a vacuum deposition method, a CVD (Chemical Vapor Deposition) method, a spray, a coating method such as spin coating, etc. Well-known film formation law can be used.

Examples of functional films include films having predetermined optical properties (dielectric films, etc.), films having predetermined mechanical properties, films having predetermined chemical properties, and films having predetermined colors. be done. A film-forming material for forming a functional film may be an inorganic material or an organic material. Specific examples of functional films include ITO films, silica films, tantalum oxide films, titanium oxide films, aluminum oxide films, and fluoride films. The thickness of the functional film is, for example, within the range of 0.01 to 0.5 μm for each layer.

5(a) and 5(b) show, as an example of a method for manufacturing a film-coated article, a functional film (for example, an antireflection film) is formed by a vacuum deposition method using ion assist or ion plating. shows how to do it.

As shown in FIG. 5(a), in the method for manufacturing a film-coated article, the holder 11 holding the work W is arranged so that the second main surface Wb of the work W faces downward, and the direction indicated by the white arrow is used as the film formation direction. That is, the film material forming the functional film is placed below the second main surface Wb, and the film material is evaporated. Thereby, the film material is deposited on the second main surface Wb of the workpiece W, and the functional film F is formed. The film-coated article 17 thus obtained has a work W and a functional film F laminated on the second main surface Wb of the work W, as shown in FIG. 5(b).

Here, as shown in FIG. 5(c), the electrically neutral film material (M) spreads over the second main surface Wb of the workpiece W in a linear trajectory from the evaporation source toward the second main surface Wb. However, the trajectory of ions such as oxygen ions (O ⁺ ), for example, is bent by being subjected to the Lorentz force indicated by the dashed arrow in FIG. Further, the magnetic flux density of the work magnet 13 is higher at the outer peripheral portion of the work magnet 13 than at the center of the work magnet 13 . In this embodiment, the workpiece magnet 13 has the same outline as the workpiece W in plan view, and the holder 11 is arranged so that the center of the workpiece W coincides with the center of the workpiece magnet 13 in plan view. A workpiece W is held. In this case, the trajectory of the ions described above becomes a trajectory toward the outer peripheral portion of the second main surface Wb of the work W by receiving the Lorentz force. It is possible to form the functional film F denser than the central portion of the second main surface Wb.

Next, the operation and effects of this embodiment will be described.
(1) The manufacturing method of the film-coated article 17 includes a step of forming a functional film F on the workpiece W while holding the ferromagnetic plate-like workpiece W on the holder 11 . The holder 11 used in the manufacturing method of the film-coated article 17 includes a support member 12 that supports at least a portion of the first main surface Wa of the work W, and a work magnet 13 that attracts the work W to the support member 12. there is In the manufacturing method of the film-coated article 17, the functional film F is formed on the second main surface Wb of the workpiece W opposite to the first main surface Wa.

According to this method, the work W can be held by attracting the first main surface Wa of the work W to the support member 12 by the work magnet 13, so that the entire second main surface Wb of the work W can be coated with the functional film. It becomes possible to form a film of F. Moreover, since a member that contacts the second main surface Wb of the work W can be omitted, the second main surface Wb of the work W can be prevented from being scratched. Therefore, the plate-shaped work W having ferromagnetism can be suitably held and the functional film F can be formed on the work W.

(2) It is preferable that the holder 11 used in the manufacturing method of the film-coated article 17 has a plurality of workpiece magnets 13 corresponding to the plurality of workpieces W and holds the plurality of workpieces W. In this case, since the functional film F can be formed on a plurality of works W in one process, the productivity of the film-coated article 17 can be improved.

(3) In the method for manufacturing the film-coated article 17, the workpiece magnet 13 is preferably shaped like a plate having a main surface (first main surface 13a) facing the first main surface Wa of the workpiece W. In this case, for example, the work W can be stably attracted to the support member 12 .

(4) The magnetic force of the work magnet 13 used in the manufacturing method of the film-coated article 17 becomes stronger at the periphery of the work magnet 13 . Here, when the outer shape of the work magnet 13 is larger than the outer shape of the work W in plan view, the work W is held by the holder 11 so that the center of the work W is aligned with the center of the work magnet 13 in plan view. Even if it tries, there is a possibility that the work W may not be able to be held smoothly because the work W is attracted toward the peripheral edge of the work magnet 13 .

The work magnet 13 used in the manufacturing method of the film-coated article 17 of the present embodiment has the same outer shape as the work W in plan view. In this case, the workpiece W can be easily held by aligning the center of the workpiece W with the center of the workpiece magnet 13 in plan view. As a result, the operation of holding the workpiece W at a predetermined position can be performed smoothly. Therefore, it becomes possible to improve the productivity of the article 17 with a film.

(5) In the present embodiment, the work magnet 13 has the same outer shape as the work W in plan view, and the holder 11 is positioned such that the center of the work W is positioned with respect to the center of the work magnet 13 in plan view. The workpiece W is held so as to match. In this case, it is possible to form a denser functional film F in the outer peripheral portion of the second main surface Wb of the work W than in the central portion of the second main surface Wb of the work W.

For example, when the functional film F is an antireflection film (dielectric multilayer film), a film having a larger refractive index than the central portion of the second main surface Wb is formed on the outer peripheral portion of the second main surface Wb of the workpiece W. can do. Further, for example, by forming the functional film F denser than the central portion of the second main surface Wb on the outer peripheral portion of the second main surface Wb of the work W, the strength of the peripheral portion of the functional film F increases. As a result of being enhanced, the functional film F becomes difficult to separate from the workpiece W.

(6) It is preferable that the holder 11 used in the manufacturing method of the film-coated article 17 further includes a mounting member 14 for mounting the workpiece magnet 13 , and the support member 12 is mounted on the mounting member 14 . In this case, the mounting member 14 can determine the relative positions of the support member 12 and the magnet.

(7) It is preferable that the attachment member 14 of the holder 11 used in the manufacturing method of the film-coated article 17 has ferromagnetism, and the workpiece magnet 13 is attached to the attachment member 14 by magnetic force. In this case, for example, the workpiece magnet 13 can be easily arranged. Further, for example, it is possible to easily change the arrangement of the work magnets 13 or to change the work magnets 13 to different sizes.

(8) The attachment member 14 of the holder 11 used in the manufacturing method of the film-coated article 17 has a spacer portion 14b that regulates the distance between the work magnet 13 and the support member 12. As shown in FIG. In this case, the distance between the workpiece W supported by the support member 12 and the workpiece magnet 13 can be set by setting the dimensions of the spacer portion 14b. Thereby, the attracting force of the work W by the work magnet 13 that attracts the work W to the support member 12 can be easily set.

(9) It is preferable that the support member 12 of the holder 11 has a through hole 12a, and at least a part of the peripheral edge of the first main surface Wa of the work W is supported by the opening edge of the through hole 12a of the support member 12. . In this case, by reducing the contact area between the first main surface Wa of the work W and the support member 12, the occurrence of scratches on the first main surface Wa of the work W can be suppressed.

(10) Preferably, the holder 11 further includes a positioning member 15 that positions the work W by coming into contact with the side surface Wc between the first main surface Wa and the second main surface Wb of the work W. In this case, the work W can be easily arranged corresponding to the work magnet 13 . In addition, in the step of forming the functional film F, it is possible to prevent the film forming material from entering the first main surface Wa side from the side surface Wc of the work W with which the positioning member 15 is in contact. Therefore, it is possible to suppress the formation of the functional film F on the portion (the first main surface Wa) where the formation of the functional film F is unnecessary.

(Change example)
This embodiment can be implemented with the following modifications. This embodiment and the following modified examples can be implemented in combination with each other within a technically consistent range.

- In the holder 11, the positioning member 15 can be omitted.
- In the holder 11, the positioning member 15 can also be configured integrally with the support member 12. As shown in FIG.

- As shown in FIG. 6, in the holder 11, the through holes 12a of the support member 12 may be omitted, and the entire first main surface Wa of the workpiece W may be supported by the support member 12. As shown in FIG.
・In the mounting member 14 of the holder 11, the mounting base portion 14a and the spacer portion 14b may be integrally molded. may be formed.

- As shown in FIG. 7, in the holder 11, the mounting member 14 can be omitted. In this case, the workpiece magnet 13 may be directly attached to the support member 12 . It is also possible to omit the spacer portion 14b of the mounting member 14 and to configure the mounting member 14 only from the mounting base portion 14a.

- As shown in FIG. 8, the workpiece magnets 13 of the holder 11 may be configured integrally without being divided so as to correspond to a plurality of workpieces W. As shown in FIG.
- As shown in FIG. 9A, the holder 11 may be changed to include a work magnet 13 having an outer shape larger than the outer shape of the work W in plan view. When the holder 11 holds the workpiece W so that the center of the workpiece W coincides with the center of the workpiece magnet 13 in plan view, the uniformity of the magnetic flux density on the second main surface Wb of the workpiece W increases. relatively high. Therefore, when the functional film F is formed, the ions linearly reach the second main surface Wb of the work W, so that the second main surface Wb of the work W has a highly uniform functional film. It becomes possible to form a protective film F. For example, when the functional film F is an antireflection film, the difference between the refractive index of the film laminated on the second main surface Wb of the workpiece W and the refractive index of the film formed at the center of the second main surface Wb is can be made smaller.

- As shown in FIG. 9(b), a holder 11 in which a plurality of work magnets 13 smaller than the outer shape of the work W in plan view are arranged along the first main surface Wa of the work W may be used. In this holder 11, when the workpiece W is held within the area where the workpiece magnet 13 is arranged in plan view, the uniformity of the magnetic flux density on the second main surface Wb of the workpiece W is relatively high. Become. In the workpiece W held by this holder 11, the uniformity of the magnetic flux density on the second main surface Wb is relatively high. Therefore, when the functional film F is formed, the ions linearly reach the second main surface Wb of the work W, so that the second main surface Wb of the work W has a highly uniform functional film. It becomes possible to form a protective film F.

- As shown in FIG. 9(c), the holder 11 may be changed to include a work magnet 13 having an outer shape smaller than the outer shape of the work W in plan view. In this case, it is possible to obtain the same effects as those described in section (4) above. When the holder 11 holds the workpiece W so that the center of the workpiece W coincides with the center of the workpiece magnet 13 in plan view, the uniformity of the magnetic flux density on the second main surface Wb of the workpiece W increases. relatively high. Therefore, when the functional film F is formed, the ions linearly reach the second main surface Wb of the work W, so that the second main surface Wb of the work W has a highly uniform functional film. It becomes possible to form a protective film F.

・As shown in FIG. 9(d), a holder 11 in which a plurality of work magnets 13 having the same outer shape as the work W in plan view are arranged along the first main surface Wa of the work W is used. good too. In this holder 11, when the workpiece W is held within the area where the workpiece magnet 13 is arranged in plan view, the uniformity of the magnetic flux density on the second main surface Wb of the workpiece W is relatively high. Become. Therefore, when the functional film F is formed, the ions linearly reach the second main surface Wb of the work W, so that the second main surface Wb of the work W has a highly uniform functional film. It becomes possible to form a protective film F.

- In the holder 11, the shape of the workpiece magnet 13 may be a cylindrical shape, a solid columnar shape, or the like.
- The holder 11 can also be configured to hold one workpiece W.

DESCRIPTION OF SYMBOLS 11... Holder, 12... Supporting member, 12a... Through hole, 13... Work magnet, 14... Mounting member, 14b... Spacer part, 15... Positioning member, 17... Film-attached article, F... Functional film, W... Work, Wa... 1st main surface, Wb... 2nd main surface.

Claims (10)

A method for manufacturing a film-coated article, comprising a step of forming a functional film on a ferromagnetic plate-shaped work held by a holder, comprising:
The holder includes a support member that supports a portion of the first main surface of the work, and a magnet that attracts the work to the support member,
The first main surface of the workpiece and the magnet face each other with a space therebetween,
A method of manufacturing a film-coated article, wherein the functional film is formed on a second main surface of the workpiece opposite to the first main surface. 2. The method of manufacturing a film-coated article according to claim 1, wherein the holder includes a plurality of magnets corresponding to the plurality of works, and holds the plurality of works. 3. The method of manufacturing a film-coated article according to claim 1, wherein the shape of the magnet is a plate having a main surface facing the first main surface of the workpiece. 4. The method of manufacturing a film-coated article according to claim 3, wherein the magnet has an outer shape that is the same as or smaller than the outer shape of the work in plan view. The holder further comprises a mounting member for mounting the magnet,
5. The method of manufacturing a film-coated article according to any one of claims 1 to 4, wherein the support member is attached to the attachment member. 6. The method of manufacturing a film-coated article according to claim 5, wherein the attachment member of the holder has ferromagnetism, and the magnet is attached to the attachment member by magnetic force. 7. The method of manufacturing a film-coated article according to claim 5, wherein the attachment member of the holder has a spacer portion that regulates the distance between the magnet and the support member. 1 to 4, wherein the support member of the holder has a through hole, and supports at least a part of the peripheral edge of the first main surface of the work by the opening edge of the through hole. 8. A method for producing a film-coated article according to any one of 7. 9. The method for manufacturing a film-coated article according to claim 1, wherein the holder further comprises a positioning member for positioning the workpiece placed on the support member. A holder for holding a ferromagnetic plate-like workpiece,
The holder includes a support member that supports a portion of the first main surface of the workpiece;
a magnet that attracts the workpiece to the support member;
The first main surface of the workpiece and the magnet face each other with a space therebetween,
A holder characterized by being used in a step of forming a functional film on a second main surface opposite to the first main surface of the workpiece.

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