JP7149249B2 - Transfer module, cutting device, and method for manufacturing cut product - Google Patents

Description

TECHNICAL FIELD The present invention relates to a transfer module, a cutting apparatus equipped with the transfer module, and a method for manufacturing a cut product.

Lead frames, substrates, and the like on which chips are mounted are generally used as electronic components by being resin-sealed. Conventionally, after manufacturing a package substrate by collectively encapsulating a board on which multiple chips are mounted and wired, the package substrate is cut (individualized) to manufacture multiple cut products (electronic components). Cutting devices for cutting are known (see, for example, Patent Documents 1 and 2).

The cutting device described in Patent Document 1 includes a holding table that sucks and holds a package substrate with a holding tape, a cutting blade that cuts the package substrate on the holding table into a plurality of pieces to be cut, and a plurality of pieces to be cut on the holding table. and suction recovery means for sucking and conveying the . In this suction collecting means, the compressed air supplied to the tubular member sucks the plurality of cut articles, peels them off from the holding tape, and spirals the cut articles along the inner wall surface of the cyclone vessel arranged on the outlet side of the tubular member. Collect it in the storage box while dropping it.

The cutting device described in Patent Document 2 includes a suction source for sucking the package substrate from below the holding table, a cutting blade for cutting the package substrate on the holding table into a plurality of pieces, and a plurality of pieces on the holding table. a suction unit that sucks and conveys the cut product with a suction head arranged above. After shutting off the negative pressure of the suction source, a negative pressure is applied to the suction head of the suction unit to suck a plurality of cut products, and the cut products are transported on the flow of gas or liquid.

JP 2014-220459 A JP 2017-152442 A

In the conventional cutting apparatus, it becomes difficult to convey a cut product having a size of less than 2 mm square, for example. As in the cutting device described in Patent Document 1, when a plurality of cut products are separated from a holding tape by a suction force, if the suction force is too weak, the cut products will remain unconveyable, and if the suction force is too strong, the cut products will be removed. There is a risk of damage. Also, in the cutting device described in Patent Document 2, when the suction head is used for suction, if the suction force is too weak, cut products that cannot be conveyed remain, and if the suction force is too strong, the cut products may be damaged.

Therefore, there is a demand for a transfer module, a cutting apparatus, and a method for manufacturing a cut product that can reliably transfer a plurality of cut products.

A transfer module according to the present invention is characterized by a moving body arranged on a cutting table and movable while being in contact with a plurality of cut products formed by cutting package substrates, and a driving mechanism for driving the moving body. and a transfer mechanism for transferring a plurality of the cut articles, wherein the cut articles in contact with the moving body are moved away from the cutting table by the rotation of the moving body.

A feature of the cutting apparatus according to the present invention is that it includes the transfer module, a cutting mechanism for cutting the cut product, and a cleaning mechanism for cleaning the cut product transferred by the transfer mechanism.

A feature of the method for manufacturing a cut product according to the present invention is that the cut product is manufactured using the cutting device.

ADVANTAGE OF THE INVENTION According to this invention, the conveyance module which can convey a several cut article reliably, a cutting apparatus, and the manufacturing method of a cut article are provided.

It is a schematic diagram which shows a cutting device. Fig. 3 is a schematic diagram showing a transport module; Fig. 2 is a schematic perspective view showing a cleaning module; FIG. 4 is a cross-sectional view taken along line IV-IV of FIG. 3; It is a schematic diagram showing a state where the movable block is moved to the transport start position. It is the schematic which shows the state which is transferring the cutting|disconnection goods. It is a schematic diagram showing a state where the movable block has been moved to the transfer end position. FIG. 4 is a cross-sectional view showing a state in which a container of the cleaning module is moved; FIG. 4 is a plan view showing a state in which the container of the cleaning module is moved; FIG. 4 is a schematic perspective view showing an inversion mechanism of the cleaning module; FIG. 11 is a schematic diagram showing a transfer module according to another embodiment 1; FIG. 11 is a schematic diagram showing a state of conveying a cut product according to another embodiment 1; FIG. 11 is a schematic diagram showing a transfer module according to another embodiment 2; FIG. 10 is an explanatory diagram of a liquid flow principle according to another embodiment 2; FIG. 11 is a schematic diagram showing a state of conveying a cut product according to another embodiment 2;

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a transfer module, a cutting device, and a method for manufacturing a cut product according to the present invention will be described below with reference to the drawings. However, without being limited to the following embodiments, various modifications are possible without departing from the scope of the invention.

[Device configuration]
Molding objects such as lead frames and substrates on which chips are mounted are used as electronic components by resin sealing. Techniques for resin-sealing molding objects include a compression method and a transfer method. In the compression method, for example, after supplying a liquid or granular resin onto the release film, the release film is placed in the cavity of the mold, and the molding object is immersed in the resin on the release film. It is a method of inserting and resin-molding. In the transfer method, for example, an object to be molded is placed in a mold cavity, a resin tablet is supplied to the pot of the mold, heated and melted, and then the molten resin is supplied to the cavity to perform resin molding.

Compression-type and transfer-type resin molding machines are equipment for manufacturing package substrates such as MAP (molded array packaging), which collectively resin-seal substrates on which multiple chips are mounted and wired, from the viewpoint of manufacturing efficiency. is sometimes used. After the package substrate is manufactured by this apparatus, it is cut (individualized) by a cutting apparatus, and the formed cut product is used as an electronic component after undergoing a quality inspection. The cutting apparatus transports, cleans, and dries a plurality of cut products formed by cutting the package substrate. Therefore, the present embodiment provides a transfer module, a cutting device, and a method for manufacturing a cut product that can reliably transfer a plurality of cut products. In the following description, a package substrate on which a plurality of semiconductor chips are mounted is described as an example of an object to be cut, and the direction of gravity is sometimes described as the bottom, and the direction opposite to the direction of gravity is described as the top.

A schematic diagram of the cutting device D is shown in FIG. The cutting device D in the present embodiment is configured separately from the resin molding device E, receives the package substrate S that has been resin-sealed by the resin molding device E, and cuts, cleans, and dries the package substrate S. to manufacture a plurality of cut products Sa. The manufactured cut product Sa is used as an electronic component after undergoing a predetermined quality inspection.

The cutting device D has a cutting module 1 , a cleaning module 2 and a controller 3 . The cutting module 1 and the cleaning module 2 can be installed or removed independently. The cutting device D also has a transfer module 4 between the cutting module 1 and the cleaning module 2 . The control unit 3 is composed of a program stored in hardware such as an HDD or a memory as software for controlling the operation of the cutting device D, and is executed by the CPU of the computer. In other words, the controller 3 controls the operations of the cutting module 1 , the cleaning module 2 and the transfer module 4 .

The cutting module 1 has a receiving part 11 and a cutting mechanism 12 . The number of receiving units 11 and cutting mechanisms 12 may be one or two or more, and is not particularly limited.

The receiving unit 11 receives a package substrate S having a rectangular shape in plan view as an object to be cut from the resin molding apparatus E. As shown in FIG. The received package substrate S is placed on the prestage 11a. The cutting mechanism 12 includes two cutting transport mechanisms 12a for transporting the package substrate S, two cutting tables 12b arranged on the cutting transport mechanisms 12a, and two cutting sections 12c. The transfer mechanism 12a for cutting is configured to be movable in the Y direction and rotatable in the θ direction while the package substrate S is fixed on the cutting table 12b. Although the drive source for the cutting transfer mechanism 12a and the cutting portion 12c is not particularly limited, for example, an electric motor such as a servomotor can be used.

On the cutting table 12b, the package substrate S received from the receiving section 11 is fixed by air suction or the like with the resin-sealed side facing downward. The cutting section 12c includes a spindle section 12c1 and a rotating blade 12c2, and cuts the package substrate S fixed to the cutting table 12b by the rotating blade 12c2. A groove is formed in the upper surface of the cutting table 12b, that is, the fixed surface to which the package substrate S is fixed so that the rotating blade 12c2 can enter. The rotating blade 12c2 is fixed to the rotating shaft of the spindle portion 12c1, is movable in the X direction and the Z direction, and is rotatable at high speed. The cutting transfer mechanism 12a moves and rotates in the Y and θ directions, and the rotating blade 12c2 moves in the X and Z directions, thereby adjusting the relative position between the rotating blade 12c2 and the package substrate S. While repeating this relative position adjustment, the rotary blade 12c2 cuts the package substrate S so as to penetrate from the upper surface to the lower surface, thereby forming a plurality of cut products Sa that are rectangular in plan view. At this time, cutting may be performed while supplying cutting water to the contact portion between the rotary blade 12c2 and the package substrate S. The relative position may be adjusted by moving either the cutting transfer mechanism 12a or the rotary blade 12c2. In addition, the two cutting parts 12c can be positioned so that the spindle part 12c1 is linear and the rotating blades 12c2 are opposed to each other, and the distance between the two rotating blades 12c2 is variable, so that the two cutting parts 12c can be cut in the X direction. It can be moved to any upper part of the table 12b.

The cleaning module 2 has a cleaning mechanism 2A, a fluid supply/discharge mechanism 2B, and a recovery box 2C that is rectangular in plan view. The cleaning mechanism 2A contains a plurality of cut articles Sa together with a cleaning liquid such as water in a container 21, and rotates the container 21 to generate a liquid flow to clean the plurality of cut articles Sa. The fluid supply/discharge mechanism 2B includes a gas supply/discharge pump (not shown) that supplies compressed air into the container 21 of the cleaning mechanism 2A or sucks and discharges air in a flexible tube 47a, which will be described later. . Further, the fluid supply/drainage mechanism 2B can supply the cleaning liquid into the container 21 from a water supply source (for example, water supply, pure water supply pipe in the factory). Details of the cleaning module 2 will be described later.

As shown in FIG. 2, the transfer module 4 is arranged on the cutting table 12b of the cutting mechanism 12, and includes a moving body 44 that can move while being in contact with a plurality of cut products Sa formed by cutting the package substrate S. , a movable box B for supporting the moving body 44, a driving mechanism 46 for driving the moving body 44, and a transfer mechanism 47 for transferring a plurality of cut products Sa.

The moving body 44 includes a rotating shaft 44a1, a rotating body 44a fixed to the rotating shaft 44a1, and a plurality of protrusions 44b protruding radially outward from the periphery of the rotating body 44a. The plurality of protruding portions 44b are made of a resin material such as nylon or PBT (polybutylene terephthalate) that does not easily deform when coming into contact with the cut product Sa and separates it from the cutting table 12b, and does not damage the cut product Sa. The moving body 44 may have a brush-like configuration in which a plurality of resin projections 44b having a diameter of 0.10 mm to 0.13 mm are arranged.

The movable box B is a housing that supports the rotating shaft 44a1 via bearings (not shown) or the like, and a flexible tube 47a of a transfer mechanism 47, which will be described later, is fixed to the top. The movable box B is configured to be slidable in the X and Z directions by a slide drive mechanism 46b, which will be described later.

The drive mechanism 46 has a rotation drive mechanism 46a that rotates the moving body 44 around the rotation shaft 44a1, and a slide drive mechanism 46b that slides the movable box B in the X and Z directions. The rotation drive mechanism 46a rotates the front of the moving body 44 in a rotation direction R (counterclockwise in FIG. 2) that crosses upward with respect to the traveling direction (+X direction). That is, the moving body 44 has the same rotation tangential direction at the position closest to the cutting table 12b in the rotating state as the moving direction. A drive source of the drive mechanism 46 is composed of an electric motor such as a servomotor, an air cylinder, or the like.

The transfer mechanism 47 includes a flexible tube 47a (an example of a suction path) through which the gas and liquid flow together with the workpiece Sa, and a plurality of electrodes on the cutting table 12b by the driving force of the gas supply/discharge pump included in the fluid supply/discharge mechanism 2B. It has a vacuum mechanism 29 for sucking the cut product Sa and a liquid supply mechanism 43 for supplying a liquid such as water to the flexible tube 47a. One end 47b of the flexible tube 47a is connected to the liquid supply mechanism 43 for supplying a liquid such as water, and the other end 47c of the flexible tube 47a communicates with the inside of the container 21 . One end of the vacuum mechanism 29 is connected to the gas supply/discharge pump provided in the fluid supply/discharge mechanism 2B and the gas supply/discharge pump so as to be able to exhaust air, and the other end is connected to the bottom walls of the outer cylinder 28a and the intermediate cylinder T, which will be described later. and a vacuum tube 29a. A vacuum pipe 29a of the vacuum mechanism 29 is provided with an opening/closing valve Vf composed of an electromagnetic valve or the like. A plurality of cut products Sa that have come into contact with the projecting portion 44b of the moving body 44 and are separated from the cutting table 12b are subjected to negative pressure acting on the flexible tube 47a by the vacuum mechanism 29, and flow into the flexible tube 47a, where the liquid is It is transferred to the container 21 by the liquid flow from the supply mechanism 43 .

The cleaning mechanism 2A of the cleaning module 2 will be described in detail below with reference to FIGS. 3 and 4. FIG.

The cleaning mechanism 2A of the cleaning module 2 includes a container 21 that houses a plurality of cut products Sa formed by cutting the package substrate S, a rotation mechanism 22 that rotates the container 21, and a supply that supplies cleaning liquid into the container 21. A liquid mechanism 23, a liquid drainage mechanism 24 for discharging the cleaning liquid in the container 21, an air supply mechanism 25 for supplying compressed air into the container 21, an exhaust mechanism 26 for discharging the air in the container 21, and the container 21. It has a rotation reversing mechanism 27 for rotating and reversing. Further, the cleaning mechanism 2A may have a drain mechanism 28 for draining the cleaning liquid containing fine dust such as chips that has climbed over the intermediate tube T described later when the water level in the container 21 exceeds a predetermined level.

The container 21 is arranged at a predetermined angle with respect to the direction of gravity. This predetermined angle is set within the range of 5° to 50°, preferably 10° to 40°, more preferably 20° to 30°. The container 21 has a bottomed cylindrical inner cylinder 21b having a conical bottom wall and an outer cylinder 28a arranged on the outer peripheral side of the inner cylinder 21b. 28a is configured to be integrally rotatable. An inner surface of the bottom wall of the inner cylinder 21b is formed with an inclined surface 21b1 that is inclined toward the direction of gravity as it approaches the center (rotating shaft 22b of the rotating mechanism 22).

An intermediate tube T is non-rotatably fixed between the inner tube 21b and the outer tube 28a. In the inner cylinder 21b, from a position (predetermined water level) on the side wall slightly higher than the upper end surface of the intermediate cylinder T to the bottom wall, fine dust such as chips can pass, but a large number of fine particles having a size that does not allow the cut product Sa to pass. A hole 21c is formed. That is, the inner tube 21b has a mesh structure from the side wall near the upper end surface of the intermediate tube T to the bottom wall. The inner cylinder 21b is formed with an annular flange 21d extending radially outward in an annular shape, and a plurality of inclined projections 21d1 having inclined surfaces as viewed in the rotation direction are formed on the lower surface of the annular flange 21d. (See enlarged view in FIG. 3). The bottom wall of the intermediate tube T is formed in a truncated cone shape to which the drain pipe 24a of the drain mechanism 24 is fixed. The outer cylinder 28a drains the cleaning liquid containing fine dust such as chips that has climbed over the upper end surface (top) of the intermediate cylinder T through the fine holes 21c of the inner cylinder 21b when the water level inside the container 21 exceeds a predetermined level. It is configured as a drain mechanism 28 . The bottom wall of the outer cylinder 28a has a truncated cone shape in which an inner tube 28a1 protrudes and is rotatably inserted relative to a drain tube 28b that discharges the cleaning liquid to a drainage destination (for example, a sewage system or a drainage pipe in a factory). (See FIG. 4). In addition, a plurality of inclined projections 28a2 having inclined surfaces that come into contact with the inclined surfaces of the inclined projections 21d1 of the inner cylinder 21b in the rotational direction protrude from the outer surface of the upper end of the outer cylinder 28a (see FIG. 3). (See enlarged view).

The cleaning module 2 is provided with a lid 30 for closing the upper opening of the inner cylinder 21b, and is provided with a lid moving mechanism 31 configured by an air cylinder or the like for moving the lid 30 up and down. A flexible tube 47 a of the transfer module 4 , a liquid supply tube 23 a of the liquid supply mechanism 23 , and an air supply tube 25 a of the air supply mechanism 25 are fixed to the lid 30 . With the lid 30 in close contact with the inner cylinder 21b, a plurality of cut products Sa are supplied by liquid flow from the flexible tube 47a into the inner cylinder 21b, and cleaning liquid is supplied from the liquid supply pipe 23a into the inner cylinder 21b. . At this time, since a large number of fine holes 21c are formed in the inner cylinder 21b, the cleaning liquid in the inner cylinder 21b flows out into the intermediate cylinder T, but the cut product Sa does not pass through the fine holes 21c. In this embodiment, since a plurality of cut products Sa are supplied into the inner cylinder 21b by the liquid flow, it is possible to prevent the problem that the cut products Sa adhere and remain inside the flexible tube 47a.

The rotating mechanism 22 includes an electric motor 22a that rotates the inner cylinder 21b and the outer cylinder 28a around a rotating shaft 22b, and the above-described inclined projections 21d1 of the inner cylinder 21b and the inclined projections 28a2 of the outer cylinder 28a. When the outer cylinder 28a is rotated by the driving force of the electric motor 22a, the inclined projections 28a2 of the outer cylinder 28a come into contact with the inclined projections 21d1 of the inner cylinder 21b, and the inner cylinder 21b also rotates integrally. The rotating mechanism 22 rotates the inner cylinder 21b and the outer cylinder 28a to generate a liquid flow inside the mesh-structured inner cylinder 21b. washed.

The liquid supply mechanism 23 includes a liquid supply pipe 23a having one end connected to a water supply or a pure water supply pipe in the factory and the other end connected to the lid 30 . The drainage mechanism 24 includes a drainage pipe 24a having one end connected to a sewage system or a drainage pipe in the factory and the other end connected to the bottom wall of the intermediate cylinder T. As shown in FIG. The liquid supply pipe 23a of the liquid supply mechanism 23 and the liquid drain pipe 24a of the liquid drain mechanism 24 are provided with an open/close valve Va and an open/close valve Vb, respectively, which are electromagnetic valves or the like.

The air supply mechanism 25 includes a gas supply/discharge pump provided in the fluid supply/discharge mechanism 2B; contains. The exhaust mechanism 26 includes an exhaust pipe 26a having one end connected to the outside air and the other end connected to the bottom walls of the intermediate tube T and the outer tube 28a via a branch portion 20a. The air supply pipe 25a of the air supply mechanism 25 and the exhaust pipe 26a of the exhaust mechanism 26 are provided with an opening/closing valve Vc and an opening/closing valve Vd, which are constituted by electromagnetic valves or the like, respectively. It should be noted that the air supply mechanism 25 does not need to include a gas supply/exhaust pump, and may be configured so that compressed air or the like can be introduced into the air supply pipe 25a. may be connected to one end of the through a solenoid valve.

The rotation reversing mechanism 27 includes a chuck mechanism 27a that operates a clamp member 27a1 that clamps the inner cylinder 21b, an inner cylinder vertical mechanism 27d that vertically moves the inner cylinder 21b clamped by the clamp member 27a1, and a rotation shaft 27b1. It includes a rotating mechanism 27b for rotating the inner cylinder 21b and an inner cylinder reversing mechanism 27c for rotating the inner cylinder 21b around a reversing shaft 27c1 to turn it upside down. A drive source for the rotation reversing mechanism 27 is composed of an electric motor, an air cylinder, or the like.

The drain mechanism 28 includes an outer cylinder 28a and a drain pipe 28b having one end connected to a sewer or factory drain pipe and the other end connected to the bottom wall of the outer cylinder 28a. One end of the vacuum mechanism 29 is connected to the gas supply/discharge pump provided in the fluid supply/discharge mechanism 2B and the gas supply/discharge pump so that the vacuum mechanism 29 can exhaust air. and a vacuum tube 29a connected to the wall. The drain pipe 28b of the drain mechanism 28 and the vacuum pipe 29a of the vacuum mechanism 29 are provided with an opening/closing valve Ve and an opening/closing valve Vf, respectively, which are electromagnetic valves or the like. The drain pipe 28b described above joins the drain pipe 24a at the branch portion 20a and extends downward, and the exhaust pipe 26a and the vacuum pipe 29a join the drain pipe 28b at the branch portion 20a and extend upward. ing. With this configuration, the liquid flows down through the drain pipe 24a and the drain pipe 28b, and the gas flows through the exhaust pipe 26a and the vacuum pipe 29a. The branching portion 20a in this embodiment is positioned above the upper end surface of the intermediate cylinder T (the highest water level 20b above the upper end surface of the intermediate cylinder T). The cleaning liquid that has crossed over the end face does not flow into the exhaust pipe 26a and the vacuum pipe 29a due to the head difference between the branch portion 20a and the highest water level 20b in the container 21 . In addition, when the open/close valve Vb of the drainage mechanism 24 is in the closed state during cleaning of the cut product Sa, the cleaning liquid remaining in the drainage pipe 24a has a water head difference between the branch portion 20a and the maximum water level 20b in the container 21. Therefore, it does not flow into the exhaust pipe 26a and the vacuum pipe 29a. Even if the cleaning liquid remaining in the drain pipe 24a reaches the water level of the branch portion 20a, it is drained from the drain pipe 28b connected to the branch portion 20a. It should be noted that the vacuum mechanism 29 does not need to include a gas supply/exhaust pump as long as the inside of the outer cylinder 28a is not made to have a negative pressure. An exhaust duct in the factory may be connected to one end of the vacuum pipe 29a.

[Manufacturing method of cut product]
A method for manufacturing the cut product Sa will be described with reference to FIGS. 1 to 11. FIG.

As shown in FIG. 1, the package substrate S resin-molded by the resin molding apparatus E is transported to the receiving section 11, and the package substrate S is placed on the pre-stage 11a. Next, the transfer mechanism 12a for cutting fixes the package substrate S as the object to be cut received from the receiving section 11 to the cutting table 12b with the resin-sealed side facing downward, and transfers it to the cutting section 12c. Then, the relative position between the package substrate S and the rotary blade 12c2 is adjusted by the cutting transfer mechanism 12a and the cutting portion 12c, and the package substrate S is cut by the rotary blade 12c2 so as to penetrate from the upper surface to the lower surface. , a plurality of cut products Sa each having a rectangular shape in plan view are formed (cutting step).

Next, the transport module 4 transports the plurality of cut products Sa formed by being cut by the cutting mechanism 12 to the container 21 of the cleaning mechanism 2A (transporting step). As shown in FIG. 5, the slide driving mechanism 46b slides the movable box B in the X direction and the Z direction, and the projection 44b of the moving body 44 is positioned at one end (the end in the -X direction) of the cutting table 12b. Adjust to the position where it touches the product Sa. Next, as shown in FIG. 6, the vacuum mechanism 29 for sucking the plurality of cut products Sa and the liquid supply mechanism 43 for supplying a liquid such as water to the flexible tube 47a are driven and rotated. The mechanism 46a rotates the front of the moving body 44 in a rotation direction R (counterclockwise in FIG. 6) that crosses upward with respect to the direction of travel (+X direction). As a result, the plurality of cut products Sa come into contact with the projecting portion 44b of the moving body 44 and are pulled away from the cutting table 12b, sucked into the flexible tube 47a by the vacuum mechanism 29, and together with the liquid supplied by the liquid supply mechanism 43. be transported. Next, the movable box B is advanced (moved in the +X direction) by the slide drive mechanism 46b while the projecting portion 44b of the moving body 44 is in contact with the cut product Sa. At this time, the projecting portion 44b of the moving body 44 rotated by the rotation drive mechanism 46a comes into contact with the next workpiece Sa to be separated from the cutting table 12b. The separation of the cut product Sa from the cutting table 12b and the suction by the vacuum mechanism 29 are repeated. Then, as shown in FIG. 7, the protruding portion 44b of the moving body 44 advances to the other end (+X direction end) of the cutting table 12b, and finally all the cut products Sa are accommodated in the container 21. FIG. In this transfer process, the opening/closing valves Va to Ve of the liquid supply mechanism 23, the liquid discharge mechanism 24, the air supply mechanism 25, the exhaust mechanism 26, and the drain mechanism 28 are closed, and the rotation mechanism 22 is kept in the non-driving state. 29 is opened (see FIG. 3). After the projecting portion 44b of the moving body 44 advances to the other end of the cutting table 12b, the sliding movement of the movable box B in the X direction by the slide drive mechanism 46b is stopped, and the movable box B is raised in the Z direction. 5 to the position shown in FIG. 5, and the conveying operation of the cut product Sa by the above-described rotation of the moving body 44 and movement in the +X direction may be repeated a plurality of times.

As described above, in this embodiment, when the transport mechanism 47 transports the cut product Sa, the moving body 44 that moves while being in contact with the cut product Sa separates the cut product Sa from the cutting table 12b. As a result, even if the size of the cut product Sa becomes small, if the cut product Sa separated by the moving body 44 is transferred by the transfer mechanism 47, a plurality of the cut products Sa can be produced without complicating the transfer module 4. can be reliably transported. That is, in the present embodiment, it is difficult for the negative pressure to degrade the cut product Sa from the cutting table 12b or damage the cut product Sa, as in the conventional art.

Next, as shown in FIG. 4, the cleaning mechanism 2A supplies the cleaning liquid into the container 21 (the inner cylinder 21b) by the liquid supply mechanism 23, so that the plurality of cut products Sa are separated from the container 21 (the inner cylinder 21b) together with the cleaning liquid. The cleaning liquid is contained inside the intermediate tube T and exists inside the intermediate tube T through the fine holes 21c. Then, the rotating mechanism 22 rotates the container 21 (the inner cylinder 21b and the outer cylinder 28a) to wash the plurality of cut products Sa (washing step). At this time, while the opening/closing valves Vb and Vc of the liquid discharge mechanism 24 and the air supply mechanism 25 are kept closed, the opening/closing valve Vf of the vacuum mechanism 29 is closed to drive the rotation mechanism 22, and the liquid supply mechanism 23 and the exhaust mechanism are closed. 26 and the opening/closing valves Va, Vd, and Ve of the drain mechanism 28 are opened (see FIG. 3). The cleaning liquid containing fine dust such as chips that has climbed over the upper end surface of the intermediate tube T through the fine holes 21c of the inner tube 21b is drained by the drain mechanism 28, and the air in the inner tube 21b is discharged by the exhaust mechanism 26. exhausted.

Next, after the plurality of cut products Sa are washed by the washing process, the washing liquid containing fine dust such as chips is discharged by the liquid discharge mechanism 24 and the drain mechanism 28, and the gas is supplied to the inner cylinder 21b of the container 21 by the air supply mechanism 25. While supplying, the rotating mechanism 22 rotates the container 21 (the inner cylinder 21b and the outer cylinder 28a) to dry the plurality of cut products Sa (drying step). At this time, the open/close valve Vf of the vacuum mechanism 29 is kept closed, the open/close valves Vd and Ve of the exhaust mechanism 26 and the drain mechanism 28 are kept open, and the liquid supply mechanism 23 is opened/closed while the rotation mechanism 22 is being driven. The valve Va is closed, and the open/close valves Vb and Vc of the drainage mechanism 24 and the air supply mechanism 25 are opened (see FIG. 3).

Next, the opening/closing valves Vb to Ve of the liquid discharge mechanism 24, the air supply mechanism 25, the exhaust mechanism 26, and the drain mechanism 28 are closed to stop the driving of the rotation mechanism 22. A plurality of cut products Sa are taken out by moving and upside down (taking-out step). This extraction process will be described with reference to FIGS. 8 to 10. FIG.

As shown in FIG. 8, the lid 30 is lifted by the lid moving mechanism 31, and the inner cylinder 21b is lifted by the inner cylinder lifting mechanism 27d while the inner cylinder 21b is clamped by the clamp member 27a1 of the chuck mechanism 27a. The tube 21b is separated from the intermediate tube T. Next, as shown in FIG. 9, the rotation mechanism 27b rotates the inner cylinder 21b around the rotation shaft 27b1 to move it above the collection box 2C. Next, as shown in FIG. 10, the inner cylinder 21b is turned upside down around the turning shaft 27c1 by the inner cylinder reversing mechanism 27c, and the plurality of cut products Sa stored in the inner cylinder 21b are dropped into the collection box 2C and taken out. . Then, the washed and dried cut product Sa stored in the collection box 2C is collected. Since the cut product Sa is taken out with the inner cylinder 21b of the container 21 turned upside down in this manner, the cut product Sa can be reliably collected.

[Another embodiment]
Hereinafter, members similar to those of the above-described embodiment will be described using the same terms and symbols for easy understanding.

<1> As shown in FIGS. 11 and 12, the transfer mechanism 47 has a storage portion 45b that stores a plurality of cut products Sa, and moves the storage portion 45b that stores the plurality of cut products Sa to the container 21. Alternatively, a plurality of cut products Sa may be transferred from the storage portion 45b to the container 21 . More specifically, the transfer mechanism 47 in this embodiment is arranged on the cutting table 12b of the cutting mechanism 12, and is a moving body that can move while being in contact with a plurality of cut products Sa formed by cutting the package substrate S. 44 , a movable box Bb that supports the moving body 44 , a storage section 45 that can store a plurality of cut products Sa, and a drive mechanism 46 that drives the moving body 44 . The moving body 44, storage section 45b and drive mechanism 46 are configured as an integrated unit within the movable box Bb.

The moving body 44 supports a rotating body 44a that rotates around a rotating shaft 44a1, a plurality of protrusions 44b that protrude radially outward from the periphery of the rotating body 44a, and the rotating shaft 44a1, and allows the rotating body 44a to slide. and a guiding groove 44c. The plurality of protruding portions 44b are made of a resin material such as nylon or PBT (polybutylene terephthalate) that does not easily deform when coming into contact with the cut product Sa and separates it from the cutting table 12b, and does not damage the cut product Sa. A slide driving mechanism 46b, which will be described later, allows the moving body 44 to move forward or backward along the guide groove 44c on the cutting table 12b.

The movable box Bb is a housing that supports the rotating shaft 44a1 via bearings (not shown) and the like, and the housing portion 45b is fixed. The movable box Bb is configured to be slidable in the X and Z directions by a slide drive mechanism 46b, which will be described later.

The drive mechanism 46 includes a rotation drive mechanism 46a that rotates the movable body 44, and a slide drive mechanism that slides the movable box Bb in the X and Z directions and slides the movable body 44 along the surface of the cutting table 12b. 46b and . The rotation drive mechanism 46a rotates the front of the moving body 44 in a rotation direction R (counterclockwise in FIG. 11) that crosses upward with respect to the traveling direction (+X direction). The slide drive mechanism 46b slides the moving body 44 (rotating shaft 44a1) along the guide groove 44c. A drive source of the drive mechanism 46 is composed of an electric motor such as a servomotor.

As a method for conveying the cut product Sa, as shown in FIG. 11, the movable box Bb is slid in the X direction and the Z direction by the slide drive mechanism 46b, and the projecting portion 44b of the moving body 44 is moved to one end (-X direction) of the cutting table 12b. direction end) is adjusted to a position where it contacts the cut product Sa. Then, a plurality of cut products Sa formed by cutting the package substrate S are brought into contact with the protruding portion 44b of the moving body 44 rotated by the rotation drive mechanism 46a and separated from the cutting table 12b. Next, the protruding portion 44b of the moving body 44 is moved forward by the slide driving mechanism 46b while being in contact with the cut product Sa, and the cut product Sa is pushed out toward the storage portion 45b. At this time, the projecting portion 44b of the moving body 44 rotated by the rotation drive mechanism 46a comes into contact with the next workpiece Sa to be separated from the cutting table 12b. Separation and pushing out of the cut product Sa on the cutting table 12b are repeated until all the cut products Sa are finally stored in the storage unit 45b. Also in this embodiment, the operation of conveying the cut product Sa by rotating the moving body 44 and moving it in the +X direction may be repeated a plurality of times.

Next, as shown in FIG. 12, the transfer module 4 moves the movable box Bb (storage section 45b in which a plurality of cut products Sa are stored) so that the opening of the container 21 is below the storage section 45b. It is moved to the vicinity of the container 21 of 2A. Next, the transport module 4 tilts and vibrates the movable box Bb to drop the plurality of cut products Sa into the container 21 . In this way, if the cut products Sa are stored in the storage part 45b before being transferred to the container 21, it is only necessary to move the storage part 45b in which the plurality of cut products Sa are stored, and the transport efficiency can be improved. Moreover, by tilting and vibrating the movable box Bb, it is possible to store a plurality of cut products Sa in the container 21 at once. Poor recovery and damage to the cut product Sa are less likely to occur. 11 and 12 differs from the description of the transport and storage of the cut product Sa after cutting in the above-described embodiment. That is, the plurality of cut products Sa are not accommodated inside the container 21 from the other end 47c of the flexible tube 47a, but the plurality of cut products Sa are accommodated directly inside the container 21 from the movable box Bb of the transfer mechanism 47. It will be.

<2> As shown in FIGS. 13 to 15, the transfer mechanism 47 has a liquid flow path 48a through which liquid such as water flows, and transfers the cut product Sa to the inner cylinder 21b in the liquid flow path 48a. Also good. More specifically, the transfer mechanism 47 in this embodiment is arranged on the cutting table 12b of the cutting mechanism 12, and is a moving body that can move while being in contact with a plurality of cut products Sa formed by cutting the package substrate S. 44, a movable box Ba that supports the moving body 44, a storage section 45a capable of storing a plurality of cut products Sa, a driving mechanism 46 that drives the moving body 44, and a flexible tube. A liquid flow path 48a for transferring the cut product Sa by circulating liquid in the liquid flow path 48a, a supply path 48b for supplying liquid to the inside of the movable box Ba, and a liquid supply mechanism 49 for supplying liquid to the liquid flow path 48a and the supply path 48b. and have The moving body 44, storage section 45a, liquid flow path 48a, supply path 48b, and drive mechanism 46 are configured as an integral unit within the movable box Ba.

The moving body 44 supports a rotating body 44a that rotates around a rotating shaft 44a1, a plurality of protrusions 44b that protrude radially outward from the periphery of the rotating body 44a, and the rotating shaft 44a1, and allows the rotating body 44a to slide. and a guiding groove 44c. The plurality of protruding portions 44b are made of a resin material such as nylon or PBT (polybutylene terephthalate) that does not easily deform when coming into contact with the cut product Sa and separates it from the cutting table 12b, and does not damage the cut product Sa. A slide driving mechanism 46b, which will be described later, allows the moving body 44 to move forward or backward along the guide groove 44c on the cutting table 12b.

The movable box Ba is a housing that supports the rotating shaft 44a1 via bearings (not shown) and the like, and the housing portion 45a is fixed. Further, the movable box Ba supports a liquid flow path 48a so as to be switchable between a closed state and an open state within the storage portion 45a. The movable box Ba is configured to be slidable in the X and Z directions by a slide drive mechanism 46b, which will be described later.

The drive mechanism 46 includes a rotation drive mechanism 46a that rotates the movable body 44, and a slide drive mechanism that slides the movable box Ba in the X and Z directions and slides the movable body 44 along the surface of the cutting table 12b. 46b. The rotation drive mechanism 46a rotates the front of the moving body 44 in a rotation direction R (counterclockwise in FIG. 13) that crosses upward with respect to the traveling direction (+X direction). The slide drive mechanism 46b slides the moving body 44 (rotating shaft 44a1) along the guide groove 44c. The driving mechanism 46 also has a switching mechanism 46c that switches the liquid flow path 48a between a closed state and an open state. A drive source of the drive mechanism 46 is composed of an electric motor such as a servomotor.

As a method for transporting the cut product Sa, as shown in FIG. 13, the movable box Ba is slid in the X direction and the Z direction by the slide drive mechanism 46b, and the projecting portion 44b of the moving body 44 is moved to one end (-X direction) of the cutting table 12b. direction end) is adjusted to a position where it contacts the cut product Sa. Then, as shown in FIG. 14, the liquid supply mechanism 49 supplies the liquid into the movable box Ba, and the switching mechanism 46c switches the liquid flow path 48a to the closed state so that the liquid flows into the liquid flow path 48a due to the siphon effect. to store Next, as shown in FIGS. 13 and 14, the liquid flow path 48a is switched to the open state by the switching mechanism 46c, and the plurality of cut products Sa formed by cutting the package substrate S are rotated by the rotation driving mechanism 46a. It is brought into contact with the projecting portion 44b of the movable body 44 and separated from the cutting table 12b. Next, as shown in FIG. 15, the moving body 44 is advanced by the slide drive mechanism 46b while the projecting portion 44b is in contact with the cut product Sa, and the cut product Sa is directed toward the storage unit 45 along with the liquid flow from the liquid supply mechanism 49. push out. At this time, the projecting portion 44b of the moving body 44 rotated by the rotation drive mechanism 46a comes into contact with the next workpiece Sa to be separated from the cutting table 12b. The cut product Sa pushed out into the storage section 45 is transferred to the container 21 by the liquid flow in the liquid flow path 48a. Then, the protruding portion 44b of the moving body 44 advances to the other end (the end in the +X direction) of the cutting table 12b, and finally all the cut products Sa are accommodated in the container 21. FIG. Also in this embodiment, the operation of conveying the cut product Sa by rotating the moving body 44 and moving it in the +X direction may be repeated a plurality of times.

<3> In the embodiment described above, the intermediate tube T is provided inside the container 21, but the intermediate tube T may be omitted. In this case, the drain pipe 24a of the drain mechanism 24 is connected to the inner cylinder 21b. Alternatively, the intermediate cylinder T and the outer cylinder 28a may be omitted, the container 21 may be configured only by the inner cylinder 21b, and the supply amount of the cleaning liquid may be controlled by the liquid supply mechanism 23 and the liquid discharge mechanism 24. FIG.

<4> In the above-described embodiment, the inner cylinder 21b of the container 21 is rotated and reversed by the rotation reversing mechanism 27 to drop the plurality of cut products Sa. For example, the cut product Sa in the container 21 may be taken out.

<5> In the transport module 4 in the above-described embodiment, the liquid supply mechanism 43 is connected to one end 47b of the flexible tube 47a to transport the plurality of cut products Sa by the liquid flow, but the liquid supply mechanism 43 is omitted. Alternatively, the plurality of cut products Sa may be conveyed only by suction by the vacuum mechanism 29 .

<6> In the embodiment described above, the inner cylinder 21b and the outer cylinder 28a of the container 21 are rotated by the rotation mechanism 22, but only the inner cylinder 21b of the container 21 may be rotated, or the inner cylinder 21b of the container 21 may and the intermediate tube T may be rotated, and the rotation target is not particularly limited.

<7> In the above-described embodiment, one end of the liquid supply pipe 23a is connected to the water supply or the pure water supply pipe in the factory, and one end of the drain pipe 24a and the drain pipe 28b is connected to the sewage system or the drain pipe in the factory. Alternatively, a washing liquid tank may be provided in the fluid supply/discharge mechanism 2B, and one ends of the liquid supply pipe 23a, the drain pipe 24a and the drain pipe 28b may be connected to the washing liquid tank to circulate the washing liquid. In this case, it is preferable to provide the liquid supply pipe 23a or the liquid discharge pipe 24a and the drain pipe 28b with a filtering mechanism for filtering the washing liquid.

<8> The container 21 may be in an upright posture along the direction of gravity instead of being inclined with respect to the direction of gravity. Also, the bottom wall of the inner cylinder 21b may be formed flat without providing the inclined surface 21b1.

<9> The moving body 44 is provided with a plurality of projecting portions 44b that project around the rotating body 44a. Alternatively, the moving body 44 may be composed only of the rotating body 44a.

[Outline of the above embodiment]
An overview of the transfer module 4, the cutting device D, and the method for manufacturing the cut product Sa described in the above embodiment will be described below.

(1) The characteristic configuration of the transfer module 4 includes a movable body 44 which is arranged on the cutting table 12b and which can move while being in contact with a plurality of cut products Sa formed by cutting the package substrate S, and the movable body 44. A drive mechanism 46 for driving and a transfer mechanism 47 for transferring a plurality of cut products Sa are provided. at the point.

According to this configuration, when the transport mechanism 47 transports the workpiece Sa, the workpiece Sa is separated from the cutting table 12b by the rotation of the moving body 44 that moves while being in contact with the workpiece Sa. As a result, even if the size of the cut product Sa becomes small, if the cut product Sa separated by the moving body 44 is transferred by the transfer mechanism 47, a plurality of the cut products Sa can be produced without complicating the transfer module 4. can be reliably transported. Moreover, by rotating the moving body 44, it is easy to control the separation of the workpiece Sa from the cutting table 12b.

That is, in this configuration, it is difficult for the negative pressure to cause a failure in peeling off the cut product Sa from the cutting table 12b or damage to the cut product Sa, as in the conventional art. In this way, it is possible to provide the transport module 4 capable of reliably transporting a plurality of cut products Sa.

(2) The moving body 44 may have a rotating body 44a fixed to the rotating shaft 44a1 and a plurality of protrusions 44b protruding radially outward from the periphery of the rotating body 44a.

By providing a plurality of protrusions 44b on the moving body 44 as in this configuration, the plurality of protrusions 44b can be brought into contact with the workpiece Sa to be reliably separated from the cutting table 12b.

(3) The rotating tangential direction of the moving body 44 at the position closest to the cutting table 12b in the rotating state may be the same as the moving direction.

In the moving body 44 in this configuration, the rotation tangential direction at the position closest to the cutting table 12b in the rotating state is the same as the movement direction. In other words, since the front of the moving body 44 is rotated in the rotation direction R that crosses the moving direction upward, the cut product Sa is separated forward in the moving direction while the moving body 44 is moving. As a result, the moving body 44 can separate and push out the cut product Sa at the same time. Further, as described above, the fixed surface of the cutting table 12b for fixing the package substrate S is formed with grooves so that the rotary blade 12c2 can enter. In this configuration, since the moving body 44 is rotated in the rotation direction R, even if the moving body 44 advances forward, the cut product Sa is less likely to be caught in the groove, and the cut product Sa can be easily separated.

(4) The transfer mechanism 47 has a flexible tube 47a (suction path) to which a negative pressure acts, and transfers the cut product Sa that has come into contact with the moving body 44 and is separated from the cutting table 12b within the flexible tube 47a. You can

By transferring the cut product Sa within the flexible tube 47a as in this configuration, scattering of the cut product Sa can be prevented.

(5) The transfer mechanism 47 has a storage portion 45b that stores the cut product Sa that has come into contact with the moving body 44 and is separated from the cutting table 12b. good.

By transferring the storage portion 45b that stores the cut product Sa as in this configuration, the cut product Sa can be prevented from scattering.

(6) The transfer mechanism 47 has a liquid flow path 48a through which liquid flows, and may transfer the cut product Sa, which has come into contact with the moving body 44 and is separated from the cutting table 12b, within the liquid flow path 48a.

If the cut product Sa is transferred within the liquid flow path 48a as in this configuration, the cut product Sa can be prevented from scattering, and the liquid flow acts as a buffer between the cut products Sa, thereby preventing damage to the cut product Sa. .

(7) The characteristic configuration of the cutting device D includes the transfer module 4 according to any one of the above (1) to (6), the cutting mechanism 12 for cutting the cut product Sa, and the cut product transferred by the transfer mechanism 47. and a cleaning mechanism 2A for cleaning Sa.

In this configuration, since the plurality of cut products Sa are transferred to the cleaning mechanism 2A by the transfer mechanism 47 described above, the plurality of cut products Sa can be reliably transferred.

(8) A feature of the method for manufacturing the cut product Sa is that the cut product Sa is manufactured using the cutting device D described in (7) above.

In this method, since a plurality of cut products Sa are manufactured by the above-described cutting device D, manufacturing efficiency can be improved.

It should be noted that the configurations disclosed in the above-described embodiments (including other embodiments, the same shall apply hereinafter) can be applied in combination with configurations disclosed in other embodiments unless there is a contradiction. Moreover, the embodiments disclosed in this specification are merely examples, and the embodiments of the present invention are not limited thereto, and can be modified as appropriate without departing from the scope of the present invention.

INDUSTRIAL APPLICABILITY The present invention can be applied to a transfer module, a cutting apparatus equipped with the transfer module, and a method of manufacturing a cut product, and is particularly effective when the size of the cut product is less than 2 mm square.

Reference Signs List 1: cutting module 2: cleaning module 2A: cleaning mechanism 3: control unit 4: transfer module 12: cutting mechanism 12b: cutting table 21: container 22: rotation mechanism 23: liquid supply mechanism 24: drainage mechanism 25: air supply mechanism 26 : Exhaust mechanism 27 : Rotating reversing mechanism 28 : Drain mechanism 29 : Vacuum mechanism 43 : Liquid supply mechanism 44 : Moving body 44a : Rotating body 44a1 : Rotating shaft 44b : Protruding part 45b : Storage part 46 : Driving mechanism 47 : Transfer Mechanism 47a: flexible tube (suction path)
48a: liquid flow path D: cutting device E: resin molding device S: package substrate Sa: cut product

Claims (8)

a movable body arranged on a cutting table and movable while being in contact with a plurality of cut products formed by cutting the package substrate;
a driving mechanism for driving the moving body;
a transport mechanism for transporting the plurality of cut products,
The transfer mechanism is a transfer module that separates and transfers the cut product in contact with the moving body from the cutting table by rotation of the moving body. 2. The transport module according to claim 1, wherein the moving body has a rotating body fixed to a rotating shaft and a plurality of protrusions protruding radially outward from the periphery of the rotating body. 3. The transfer module according to claim 1, wherein the moving body has the same rotation tangential direction at a position closest to the cutting table in a rotating state as the moving direction. 4. The transfer mechanism according to any one of claims 1 to 3, wherein the transfer mechanism has a suction path to which a negative pressure acts, and transfers the cut product separated from the cutting table in contact with the moving body within the suction path. 3. Transfer module as described above. 4. The transfer mechanism according to any one of claims 1 to 3, wherein the transfer mechanism has a storage section for storing the cut product separated from the cutting table in contact with the moving body, and transports the storage section containing the cut product. A transport module according to any one of the preceding claims. 4. The transfer mechanism according to any one of claims 1 to 3, wherein the transfer mechanism has a liquid flow path through which liquid flows, and transfers the cut product separated from the cutting table in contact with the moving body within the liquid flow path. A transport module according to claim 1. a transfer module according to any one of claims 1 to 6;
a cutting mechanism for cutting the cut product;
and a cleaning mechanism for cleaning the cut article transferred by the transfer mechanism. A method for manufacturing a cut product using the cutting device according to claim 7 to manufacture the cut product.

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