JP7187880B2 - Control device - Google Patents

Description

The present invention relates to control devices.

In recent years, the development of μ-TAS (Micro-Total Analysis Systems) aimed at increasing the speed, efficiency, and integration of tests in the field of in-vitro diagnostics, and the miniaturization of examination equipment has attracted attention. Active research is underway worldwide.

μ-TAS is superior to conventional inspection instruments in that it can measure and analyze a small amount of sample, is portable, and is disposable at low cost.
Furthermore, it is attracting attention as a highly useful method when using expensive reagents or when testing a large number of samples in small quantities.

A device comprising a loop-shaped channel and a pump arranged on the channel has been reported as a component of μ-TAS (Non-Patent Document 1). In this device, multiple solutions are injected into the loop-shaped channel and the pump is operated to mix the multiple solutions within the loop-shaped channel.

Jong Wook Hong, Vincent Studer, Giao Hang, W French Anderson and Stephen R Quake, Nature Biotechnology 22, 435 - 439 (2004)

According to a first aspect of the present invention, there is provided a control device for controlling fluid flowing through a flow channel in a fluid device, wherein the fluid device comprises a partition valve capable of switching the flow of the fluid, and and a plurality of pipelines connected to the compartment valves, and a plurality of solenoid valves respectively arranged in the plurality of pipelines, wherein the plurality of solenoid valves A pressure supply unit that opens and closes the partition valves by controlling the opening and closing and the pressure of the gas applied to the plurality of pipe lines, a drive unit that generates rotational power, and the drive unit and the pump valve that are in contact with each other. a pump drive unit having a pressing member capable of pressing the pump valve and mechanically controlling positional movement of the pressing member in accordance with driving of the drive unit; and a detection unit arranged nearby to electrically detect a detection target contained in the fluid .

FIG. 1 is a schematic cross-sectional view of a fluidic device according to one embodiment. FIG. 2 is a plan view of the fluidic device 1 of one embodiment. FIG. 3 is a perspective view of the control device of one embodiment. FIG. 4 is an exploded perspective view of the structure of the control device of one embodiment. FIG. 5 is a schematic diagram of a pressure supply unit of one embodiment. FIG. 6 is a bottom view of the pusher pin unit and cam of one embodiment. FIG. 7 is a cross-sectional view of one embodiment of a pump drive unit. FIG. 8 is a schematic cross-sectional view of the pump drive unit of one embodiment. FIG. 9 is a schematic diagram of a temperature control unit of Modification 1. FIG. FIG. 10 is a schematic diagram of a temperature control unit of modification 2. FIG. 11 is a bottom view of a pump drive unit of Modification 3. FIG. 12 is a schematic cross-sectional view of the pump drive unit taken along line XII-XII in FIG. 11. FIG. FIG. 13 is a schematic diagram showing part of a pressure supply unit of Modification 4. FIG.

Hereinafter, an embodiment of a control device according to an embodiment will be described with reference to the drawings. In addition, in the drawings used in the following explanation, in order to make the features easier to understand, the characteristic portions may be enlarged for convenience, and the dimensional ratios of each component may not necessarily be the same as the actual ones. do not have.

<Fluid device>
First, the fluidic device 1 controlled by the controller 2 of this embodiment will be described with reference to FIGS. 1 and 2. FIG.
FIG. 1 is a schematic cross-sectional view of a fluidic device 1 of this embodiment. FIG. 2 is a plan view schematically showing the fluidic device 1. FIG. In FIG. 2, the first substrate 6 is assumed to be transparent, and each part arranged below the first substrate 6 is shown in a transparent state. Note that FIG. 1 is only a schematic diagram, and is not a cross-sectional view of a specific portion in FIG.

The fluidic device 1 of this embodiment includes a device that detects a sample substance, which is a detection target contained in a specimen sample, by an immune reaction, an enzymatic reaction, or the like. Sample substances are, for example, biomolecules such as nucleic acids, DNA, RNA, peptides, proteins and extracellular endoplasmic reticulum.

As shown in FIG. 1, the fluidic device 1 includes a substrate 5, a plurality of compartment valves V, and a plurality of pump valves Pe. A plurality of pump valves Pe constitute a pump P in the channel. Also, the plurality of partition valves V are classified into a metering valve Vq, an introduction valve Vi, and a discharge valve Vo (see FIG. 2).

The base material 5 has three substrates (a first substrate 6, a second substrate 9 and a third substrate 8) laminated in the plate thickness direction. The first substrate 6, the third substrate 8 and the second substrate 9 are made of resin material. Examples of the resin material forming the first substrate 6, the third substrate 8, and the second substrate 9 include polypropylene, polycarbonate, and the like. In addition, materials constituting the first substrate 6, the third substrate 8 and the second substrate 9 are not limited.

In the following description, the first substrate 6, the third substrate 8 and the second substrate 9 are arranged along a horizontal plane, the first substrate 6 is arranged above the second substrate 9, and the third substrate 8 is arranged on the second substrate. It will be described as being arranged below the substrate 9 . The first substrate 6, the second substrate 9, and the third substrate 8 may also be called the upper plate 6, the substrate 9, and the lower plate 8, respectively. However, this defines the horizontal direction and the vertical direction only for convenience of explanation, and does not limit the orientation of the fluidic device 1 according to the present embodiment when it is used.

The first substrate 6, the second substrate 9 and the third substrate 8 are plate members extending in the horizontal direction. The first substrate 6, the second substrate 9 and the third substrate 8 are laminated in this order along the vertical direction.
In the following description, the direction in which the first substrate 6, the second substrate 9 and the third substrate 8 are stacked is simply called the stacking direction. In this embodiment, the stacking direction is the vertical direction. Further, in the present embodiment, the stacking direction is the thickness direction of the substrates (the first substrate 6, the second substrate 9 and the third substrate 8).

The lower surface of the first substrate 6 is opposed to and in contact with the upper surface of the second substrate 9 in the stacking direction, and is joined to each other by joining means such as adhesion. Similarly, the upper surface of the third substrate 8 is opposed to and in contact with the lower surface of the second substrate 9 in the stacking direction, and is joined to each other by joining means such as adhesion.

The base material 5 is formed by laminating three substrates (a first substrate 6, a second substrate 9 and a third substrate 8) and has a plate shape. Therefore, the fluidic device 1 is plate-like. The fluidic device 1 has a first surface 1a and a second surface 1b facing the plate thickness direction (that is, the stacking direction of the three substrates). The first surface 1 a is the upper surface of the first substrate 6 . Also, the second surface 1 b is the lower surface of the third substrate 8 .

The substrate 5 is provided with a reservoir 29 , a flow path 11 , a waste liquid tank 7 , an air hole 35 and a supply hole 39 .

The reservoir 29 is a tubular space surrounded by the inner wall surface of the groove 9 b provided on the lower surface of the second substrate 9 and the third substrate 8 . A plurality of reservoirs 29 are provided in the substrate 5 of the present embodiment. That is, the reservoir 29 is configured by covering the groove 9 b provided in the second substrate 9 with the third substrate 8 . A fluid (solution) S is accommodated in the reservoir 29 . Multiple reservoirs 29 contain fluid independently of each other. One end of the reservoir 29 is connected to a supply hole 39 that supplies the fluid in the reservoir 29 to the channel. Also, although illustration is omitted, the other end of the reservoir 29 is connected to an injection hole for injecting fluid into the reservoir 29 .

A fluid flows through the channel 11 . The channel 11 is a tubular space surrounded by the first substrate 6 and the inner wall surface of the groove 9 a provided on the upper surface of the second substrate 9 . That is, the flow path 11 is configured by covering the groove portion 9 a provided in the second substrate 9 with the first substrate 6 .
Each part of the flow path 11 will be described in detail later with reference to FIG.

The supply holes 39 are provided in the second substrate 9 . The supply hole 39 penetrates the second substrate 9 in the plate thickness direction. The supply hole 39 connects the reservoir 29 and the channel 11 . The fluid stored in the reservoir 29 is supplied to the channel 11 through the supply holes 39 .

A waste liquid tank 7 is provided on the substrate 5 to dispose of the fluid in the channel 11 . The waste liquid tank 7 is connected to the channel 11 . The waste liquid tank 7 is configured in a space surrounded by the inner wall surface of the recess 7c provided on the upper surface side of the second substrate 9 and the first substrate 6 covering the upward opening of the recess 7c. As shown in FIG. 2, the substrate 5 of this embodiment is provided with two waste liquid tanks 7 . The two waste liquid tanks 7 are connected to each other via a connecting channel 7a.

As shown in FIG. 1, air holes 35 are provided in the first substrate 6 . The air hole 35 is positioned directly above one of the waste liquid tanks 7 . The air hole 35 connects the waste liquid tank 7 to the outside. The waste liquid tank 7 is opened to the outside through an air hole 35 .

Next, the channel 11 will be described more specifically.
As shown in FIG. 2, the flow path 11 includes two circulation flow paths 10 (a first circulation flow path 10A and a second circulation flow path 10B), a plurality of introduction flow paths 12, and a plurality of discharge flow paths 13. ,including.

The first circulation flow path 10A and the second circulation flow path 10B are each configured in a loop shape when viewed from the stacking direction. The first circulation flow path 10A and the second circulation flow path 10B share a part of the flow path (shared flow path 10c). That is, the shared channel 10c is part of the first circulation channel 10A and part of the second circulation channel 10B. The first circulation flow path 10A and the second circulation flow path 10B are switched to each other by opening and closing the partition valve V. As shown in FIG.

An intra-channel pump P is arranged in the shared channel 10c.
The in-channel pump P pumps the fluid in the channel 11 . The in-channel pump P is composed of three pump valves Pe arranged side by side in the channel.

The in-channel pump P pressure-feeds the liquid in the circulation channel 10 by sequentially opening and closing the three pump valves Pe. The number of pump valves Pe constituting the in-channel pump P may be three or more, and may be four or more. Since the in-channel pump P is provided in the shared channel 10c, it is possible to circulate the fluid in the first circulation channel 10A and the second circulation channel 10B.

The pump valve Pe is made of an elastic material that deforms under pressure. Examples of the elastic material forming the pump valve Pe include thermoplastic elastomers such as polyolefin-based elastomers, styrene-based elastomers, and polyester-based elastomers.

As shown in FIG. 1, the pump valve Pe is fixed in a first fixing hole 6a provided in the first substrate 6. As shown in FIG. The first fixing hole 6a penetrates the first substrate 6 in the vertical direction. The pump valve Pe is exposed on the first surface 1 a of the fluidic device 1 . The pump valve Pe is formed by two-color molding together with the first substrate 6, for example. The pump valve Pe is recessed downward when stress is applied from above. As a result, the pump valve Pe narrows or closes the flow path 11 .

The plurality of pump valves Pe are arranged at intervals in an annular zone centered on an axis C extending in the stacking direction. For example, as shown in FIG. 2, the plurality of pump valves Pe are arranged at intervals on the same circumference around the axis C extending in the stacking direction. A part of the flow path 11 is formed as a V-shaped path in plan view so as to connect the pump valves Pe adjacent to each other.

In this embodiment, three pump valves Pe are arranged in a staggered manner on the same circumference around the axis C in a plan view, but this arrangement is merely an example. In this embodiment, the reason why the three pump valves Pe are arranged in a zigzag pattern is that the shaft portions 62a (see FIG. 6) of the pusher pins 62 that press the pump valves Pe are arranged in a zigzag pattern in plan view. be. As will be described later in Modified Example 3 (FIG. 11, etc.), when the shaft portions 62a, 362a of the pusher pins 62, 362 are arranged linearly in a plan view, the plurality of pump valves Pe are aligned accordingly. are arranged in a straight line in plan view. Also, when the pusher pins are arranged in other configurations, the plurality of valve pumps are arranged according to the arrangement.

A primary capturing section 25 is arranged in the shared channel 10c.
The primary capture section 25 is provided to transfer the detection target in the fluid from the first circulation flow path 10A to the second circulation flow path 10B. The detection target extracted in the first circulation flow path 10A is temporarily captured by the primary capturing section 25 . Further, it is mixed with another solution (fluid) in the second circulation flow path 10B and processed in the processing section 20 described later.

A plurality of metering valves Vq are provided in the paths of the first circulation flow path 10A and the second circulation flow path 10B. The metering valve Vq partitions the first circulation channel 10A and the second circulation channel 10B. Thereby, the first circulation flow path 10A and the second circulation flow path 10B are divided into a plurality of areas so as to have a predetermined volume. The metering valve Vq is opened when the fluid in the circulation channel 10 is circulated by the pump P in the channel.

An introduction channel 12 and a discharge channel 13 are connected to regions defined by the metering valve Vq, respectively. Fluid is introduced from the reservoir 29 through the introduction channel 12 into the area defined by the metering valve Vq. Also, the fluid within the area partitioned by the constant quantity valve Vq is discharged to the waste liquid tank 7 via the discharge channel 13 .

A processing section 20 is provided in the path of the second circulation flow path 10B. That is, the processing section 20 is provided in the channel 11 . The processing unit 20 of this embodiment is a detection unit that detects a detection target in the fluid. The processing unit 20 of the present embodiment electrochemically detects a detection target. The processing section 20 has a first electrode 21 , a second electrode 22 and a third electrode 23 . The first electrode 21, the second electrode 22 and the third electrode 23 may be carbon electrodes formed by screen printing, or metal electrodes formed by a film forming method such as sputtering.

The function of the processing unit 20 is not limited as long as it is in contact with the fluid flowing through the channel 11 and performs some processing on the fluid. Examples of the processing that the processing unit 20 performs on the fluid include capture processing, detection processing, heat processing, antigen-antibody reaction, cross-linking of nucleic acids, interaction of biomolecules, and the like. Examples of the processing unit 20 include a DNA array chip, an electric field sensor, a heater, an element for performing chromatography, and the like. Alternatively, the processing unit 20 may optically detect the detection target using a camera. Furthermore, the processing unit 20 may be a GMR sensor (Giant Magneto Resistive Sensor) that magnetically detects a detection target.

The introduction channel 12 is a channel for introducing fluid into the circulation channel 10 . The introduction channel 12 is connected to the supply hole 39 on one end side. Also, the introduction channel 12 is connected to the circulation channel 10 on the other end side. An introduction valve Vi is provided at the boundary between the introduction channel 12 and the circulation channel 10 and in the path of the introduction channel 12 . The introduction valve Vi is opened when the fluid is introduced into the circulation channel through the introduction channel 12 .

The discharge channel 13 is a channel for discharging the fluid in the circulation channel 10 to the waste liquid tank 7 . The discharge channel 13 is connected to the waste liquid tank 7 at one end side. Also, the discharge channel 13 is connected to the circulation channel 10 on the other end side. A discharge valve Vo is provided at the boundary between the circulation channel 10 and the discharge channel 13 . The discharge valve Vo is opened when fluid is introduced into the circulation flow path 10 via the discharge flow path 13 .

The partition valve V has substantially the same structure as the pump valve Pe. The partition valve V is made of an elastic material that deforms under pressure. As the elastic material constituting the partition valve V, similar to the pump valve Pe, for example, a thermoplastic elastomer such as a polyolefin-based elastomer, a styrene-based elastomer, and a polyester-based elastomer can be exemplified.

As shown in FIG. 1 , the partition valves V (quantitative quantity valve Vq, introduction valve Vi, discharge valve Vo) are fixed to second fixing holes 6 b provided in the first substrate 6 . The second fixing hole 6b penetrates the first substrate 6 in the vertical direction. The partition valve V is exposed on the first surface 1 a of the fluidic device 1 . The partition valve V is two-color molded together with the first substrate 6 . The partition valve V is deformed into a convex shape in the direction from the first substrate 6 side to the second substrate 9 side by applying pressure from the first substrate 6 side. That is, the partition valve V is recessed downward when a positive pressure is applied from above. The pressure applied to the partition valve V does not come into direct contact with the elastic material of the partition valve V, but applies the power of fluid such as pneumatic pressure or hydraulic pressure. The partition valve V is elastically deformed using the pressure and expansion force of the supplied fluid as an energy source. Thereby, the partition valve V blocks the flow path 11 and partitions the flow path 11 .

(Procedure for supplying fluid from the reservoir to the channel)
Next, a procedure for supplying the fluid S from the reservoir 29 to the channel 11 in the fluidic device 1 will be described. Note that the control of the fluidic device 1 described below is performed by the control device 2 described later.

As shown in FIG. 1, the reservoir 29 is filled with fluid S in advance. The control device 2 introduces the fluid S in the reservoir 29 into one section (hereinafter referred to as a fixed quantity section 18 ) partitioned by the fixed quantity valve Vq in the circulation flow path 10 . At this time, the controller 2 opens and closes the partition valve V of the circulation channel 10 to guide the fluid S to the desired quantitative partition 18 . Here, the case of introducing the fluid into the quantitative section 18 in the first circulation flow path 10A shown in FIG. 2 will be described.

First, the control device 2 closes a pair of metering valves Vq located on both sides of the metering section 18 in the length direction. Further, the control device 2 opens the discharge valve Vo of the discharge channel 13 connected to the quantitative section 18 and closes the discharge valve Vo. The control device 2 also opens the introduction valve Vi of the introduction channel 12 connected to the quantification section 18 . Next, the controller 2 sucks the inside of the waste liquid tank 7 through the air hole 35 under negative pressure. As a result, the control device 2 allows the fluid S in the reservoir 29 (see FIG. 1) to move to the channel 11 side through the supply hole 39 .

(Procedure for mixing fluids in flow path)
Next, a procedure for mixing the fluids supplied to the flow paths of the fluidic device 1 will be described with reference to FIG. Note that the control of the fluidic device 1 described below is performed by the control device 2 described later.

First, in a state in which the fluid is introduced into the circulation flow path 10 as described above, the control device 2 closes the discharge valve Vo and the introduction valve Vi and opens the metering valve Vq. Further, the control device 2 drives the intra-channel pump P to pressure-feed and circulate the fluid in the circulation channel 10 . The fluid circulating in the circulation channel 10 has a slow flow velocity around the wall surface and a high flow velocity at the center of the flow channel due to the interaction (friction) between the flow channel wall surface and the fluid in the flow channel. As a result, there is distribution in the flow velocity of the fluid, which promotes mixing and reaction of the fluid. After passing through such steps, the control device 2 detects the object to be detected in the fluid in the processing section 20 .

<Control device>
FIG. 3 is a perspective view of a control device 2 that controls the fluidic device 1 described above.
The controller 2 controls the flow of fluid within the fluidic device 1 . The controller 2 also controls the temperature of the fluid within the fluidic device 1 . Further, the control device 2 controls the processing section 20 of the fluidic device 1 to detect the detection target.

In the following description, each part of the control device 2 will be described with the vertical direction defined based on the direction in which the fluidic device 1 is housed in the control device 2 . The vertical direction (upper side and lower side) and the horizontal direction in this specification are examples of postures when using the control device 2 of the present embodiment, and do not limit the posture during use of the control device 2. .

The control device 2 has a case 2a, a structural portion 2b, and a control portion 2c. The case 2a accommodates the structural portion 2b and the control portion 2c. Further, the fluidic device 1 is accommodated inside the structural portion 2b.

The case 2a is substantially rectangular parallelepiped. The case 2a has a rectangular shape when viewed from above and below. The case 2a has a side surface 2aa facing in the horizontal direction. A handle 2ab is provided on the side surface 2aa. A worker who uses the control device 2 can carry the control device 2 by gripping the handle 2ab.
Although not shown in FIG. 3, the case 2a has an upper cover that covers the structural portion 2b and the control portion 2c.

The control unit 2c has an operation panel 2ca, a control board (not shown) that controls each part of the control device 2, and a battery pack (not shown) as a power supply for the control device 2.
The operation panel 2ca is exposed to the outside through a window provided in an upper cover (not shown) of the case 2a. The operation panel is a liquid crystal panel that displays inspection results by the control device 2 . Further, the operation panel 2ca is a so-called touch panel. The control device 2 is operated by an operator's operation via the operation panel 2ca.

FIG. 4 is an exploded perspective view of the structural portion 2b. In addition, in each figure including FIG. 4, the illustration of the shape of a gear for power transmission is omitted.

The structural part 2b includes an accommodation part 40 that accommodates the fluidic device 1, a pressure supply unit 50 that supplies pressure to the partition valve V of the fluidic device 1, and a pump drive unit 60 that drives the pump P in the channel of the fluidic device 1. and a temperature adjustment unit 80 that adjusts the temperature of the fluidic device 1 . That is, the control device 2 has an accommodation section 40 , a pressure supply unit 50 , a pump drive unit 60 and a temperature adjustment unit 80 . Although not shown in FIG. 4, the structural section 2b has a detection unit for detecting a detection target in the processing section 20 of the fluidic device 1. As shown in FIG.

(Accommodation part)
The storage section 40 has a storage tray 41 and a loading unit 42 .
The accommodation tray 41 accommodates the fluidic device 1 . The fluidic device 1 is stored in the storage tray 41 with the partition valve V and the pump valve Pe facing upward. The storage tray 41 is driven by the loading unit 42 .

The loading unit 42 has a horizontal drive section that drives the storage tray 41 in the horizontal direction and a vertical drive section that drives the storage tray 41 up and down.

The horizontal drive section of the loading unit 42 moves the storage tray 41 horizontally from the inside to the outside of the case 2a or from the outside to the inside of the case 2a. The accommodation tray 41 moved to the outside of the case 2a horizontally protrudes from the side surface 2aa of the case 2a to expose the upper surface. The operator mounts the fluidic device 1 on the storage tray 41 with the storage tray 41 exposed. Further, the fluid device 1 is housed inside the case 2a by moving the housing tray 41 inward by the horizontal driving section.

The vertical drive section of the loading unit 42 moves upward the storage tray 41 on which the fluidic device 1 is mounted and located inside the case 2a. Thereby, the loading unit 42 presses the fluid device 1 against the pipeline member 57 of the pressure supply unit 50 .

(Temperature control unit)
The temperature control unit 80 is mainly plate-shaped. The temperature adjustment unit 80 is provided in the accommodation section 40 . More specifically, the temperature adjustment unit 80 is arranged on the entire upper surface of the storage tray 41 . The temperature adjustment unit 80 is interposed between the upper surface of the storage tray 41 and the fluidic device 1 mounted on the storage tray 41 .

The temperature control unit 80 is configured by stacking a plate-like upper plate, a film heater, and a heat insulating sheet in this order in the vertical direction. The heat generated by the film heater is evened out in the upper plate and transferred to the fluidic device. Further, the temperature adjustment unit 80 may have a temperature sensor that measures the temperature of the processing section 20 and a heater control board that supplies current to the film heater.

(Pressure application unit)
The pressure supply unit 50 opens and closes the partition valve V of the fluidic device 1 accommodated in the accommodation portion 40 by supplying pressure to or canceling the supply of pressure.

FIG. 5 is a schematic diagram of the pressure supply unit 50. As shown in FIG.
The pressure supply unit 50 includes a positive pressure pump (pressure application pump) 53, a negative pressure pump 54, a pipeline member 57, a plurality of positive pressure solenoid valves (solenoid valves) 55, and a negative pressure solenoid valve 56. have.

The positive pressure pump 53 and the negative pressure pump 54 each have a motor, a syringe portion, and a plunger portion that reciprocates in the syringe by the motor. The positive pressure pump 53 generates positive pressure by increasing the pressure inside the syringe through the reciprocating motion of the plunger. On the other hand, the negative pressure pump 54 generates negative pressure by lowering the pressure inside the syringe due to the reciprocating motion of the plunger. The positive pressure pump 53 is connected to a plurality of positive pressure solenoid valves 55 . On the other hand, the negative pressure pump 54 is connected to a negative pressure electromagnetic valve 56 .

The pipeline member 57 has a positive pressure pipeline 58 that connects the positive pressure pump 53 to the partition valve V of the fluidic device 1 and a negative pressure pipeline 59 that connects the negative pressure pump 54 to the air hole 35 of the fluidic device 1 . be provided. That is, the pressure supply unit 50 has a positive pressure pipeline 58 and a negative pressure pipeline 59 .

As shown in FIG. 4, the pipeline member 57 has a plate shape extending in the horizontal direction. The conduit member 57 is positioned directly above the fluidic device 1 housed in the housing portion 40 . The lower surface of the conduit member 57 is pressed against the upper surface of the fluidic device 1 . As a result, the partition valve V of the fluidic device 1 is in close contact with the lower surface of the conduit member 57 .

The conduit member 57 is provided with a window portion 57a penetrating vertically. The window portion 57a has a rectangular shape when viewed from the axial direction. The window portion 57a is positioned directly above the in-channel pump P of the fluidic device 1 accommodated in the accommodation portion, and exposes the in-channel pump P to the upper side. A pusher pin unit 61 of a pump drive unit 60, which will be described later, is inserted into the window portion 57a from above.

The pipeline member 57 has a first pipeline substrate 51 and a second pipeline substrate 52 stacked along the vertical direction. The first pipeline substrate 51 is positioned above the second pipeline substrate 52 . The first duct substrate 51 and the second duct substrate 52 are in contact with each other on the surfaces facing each other and are fixed to each other.

A plurality of grooves are provided on the upper surface of the second conduit substrate 52 . The upper opening of the groove is covered with the lower surface of the first conduit substrate 51 . A tubular positive pressure pipeline (pipeline) 58 and a negative pressure pipeline 59 are formed in a space surrounded by the inner wall surface of the concave groove and the first pipeline substrate 51 . In this embodiment, only one of the plurality of grooves constitutes the negative pressure pipeline 59 and the other plurality of grooves constitutes the positive pressure pipeline 58 .

As shown in FIG. 5, positive pressure electromagnetic valves 55 are arranged in the paths of the plurality of positive pressure pipes 58, respectively. One ends of the plurality of positive pressure pipes 58 are connected to the positive pressure pump 53 . The other ends of the plurality of positive pressure pipes 58 are opened to the lower surface of the second pipe substrate 52 respectively. The openings at the other ends of the plurality of positive pressure ducts 58 are positioned directly above different partition valves V of the fluidic device 1, respectively. That is, the plurality of positive pressure pipes 58 connect the positive pressure pump 53 and the partition valve V, respectively.

A negative pressure electromagnetic valve 56 is arranged in the path of the negative pressure pipe 59 . One end of the negative pressure pipe 59 is connected to the negative pressure pump 54 . Further, the other end of the negative pressure conduit 59 opens to the lower surface of the second conduit substrate 52 . The other end of the negative pressure conduit 59 is connected to the air hole 35 of the fluidic device 1 . That is, the negative pressure pipe 59 connects the negative pressure pump 54 and the air hole 35 respectively.

As shown in FIG. 4 , a plurality of positive pressure electromagnetic valves 55 and one negative pressure electromagnetic valve 56 are positioned below the pipeline member 57 and fixed to the pipeline member 57 . Some of the negative pressure solenoid valve 56 and the plurality of positive pressure solenoid valves 55 are positioned on one side in the horizontal direction of the fluid device 1 when viewed from the top and bottom direction, and the other plurality of positive pressure solenoid valves 55 are positioned on one side of the fluid device 1 . located on the other side in the horizontal direction.

According to this embodiment, the plurality of positive pressure solenoid valves 55 are arranged on opposite sides of the fluidic device 1 in one direction in the horizontal plane. As a result, the distance between each compartment valve V of the fluidic device 1 and the positive pressure electromagnetic valve 55 that controls the opening and closing of the compartment valve V can be made closer. As a result, the path of the positive pressure conduit 58 can be shortened and the amount of compressed air used can be reduced. Moreover, the pressure loss in the positive pressure pipeline 58 can be reduced.

The plurality of positive pressure electromagnetic valves 55 and negative pressure electromagnetic valves 56 overlap the fluidic device 1 in the vertical direction (that is, the plate thickness direction of the fluidic device 1). That is, in the plate thickness direction of the fluidic device 1 , the positions of the plurality of positive pressure electromagnetic valves 55 and the negative pressure electromagnetic valves 56 overlap with the position of the fluidic device 1 . Therefore, according to the present embodiment, the control device 2 can be prevented from being enlarged in the vertical direction, and the size reduction of the control device 2 can be realized.

The positive pressure solenoid valve 55 is positioned between the positive pressure pump 53 and the positive pressure pipe line 58 to connect them. The positive pressure solenoid valve 55 can switch between an ON mode and an OFF mode.

The positive pressure electromagnetic valve 55 applies the positive pressure generated in the positive pressure pump 53 to the inside of the positive pressure pipe line 58 in the ON mode. By applying a positive pressure to the interior of the positive pressure pipeline 58, the partition valve V of the fluidic device 1 connected to the positive pressure pipeline 58 deforms downward. Therefore, in the ON mode of the positive pressure electromagnetic valve 55, the partition valve V closes the flow path 11 (see FIG. 1) of the fluidic device 1. FIG. That is, the pressure supply unit 50 applies pressure to the partition valve V to deform the partition valve V and partition the flow path 11 .

In the OFF mode, the positive pressure electromagnetic valve 55 dams up the positive pressure generated in the positive pressure pump 53, does not apply positive pressure to the positive pressure pipe 58 side, and opens the inside of the positive pressure pipe 58 to atmospheric pressure. do. In a state where the inside of the positive pressure pipe 58 is open to the atmospheric pressure, the partition valve V is not deformed. Therefore, in the OFF mode of the positive pressure electromagnetic valve 55, the partition valve V opens the flow path 11 of the fluidic device 1 without blocking it.

One of the plurality of positive pressure solenoid valves 55 is a main positive pressure solenoid valve 55A. That is, the plurality of positive pressure electromagnetic valves 55 include the main positive pressure electromagnetic valve 55A. The main positive pressure solenoid valve 55A is arranged between the positive pressure pump 53 and the other positive pressure solenoid valves 55 . Between the main positive pressure solenoid valve 55A and the other positive pressure solenoid valves 55, the positive pressure pipe line 58 branches and connects to the respective positive pressure solenoid valves 55. As shown in FIG.

The main positive pressure solenoid valve 55A is a solenoid valve that switches whether to apply the positive pressure applied from the positive pressure pump 53 to all the other positive pressure solenoid valves 55 or not. Therefore, by setting the main positive pressure solenoid valve 55A to the ON mode, positive pressure is applied to all the other positive pressure solenoid valves 55A. Further, by setting the main positive pressure solenoid valve 55A to the OFF mode, application of positive pressure to all the other positive pressure solenoid valves 55 is stopped.

The negative pressure electromagnetic valve 56 is positioned between the negative pressure pump 54 and the negative pressure pipe line 59 to connect them. The negative pressure solenoid valve 56 can switch between an ON mode and an OFF mode.

The negative pressure electromagnetic valve 56 applies the negative pressure generated in the negative pressure pump 54 to the negative pressure pipe 59 in the ON mode. By applying negative pressure to the negative pressure conduit 59 , air is sucked from the air holes 35 of the fluidic device 1 connected to the negative pressure conduit 59 . Therefore, in the ON mode of the negative pressure solenoid valve 56 , a negative pressure is applied to the channel 11 of the fluidic device 1 and fluid is introduced from the reservoir 29 into the channel 11 .

In the OFF mode, the negative pressure solenoid valve 56 dams up the negative pressure generated in the negative pressure pump 54, does not apply negative pressure to the negative pressure pipe 59 side, and opens the air hole 35 to the atmospheric pressure.

According to this embodiment, by switching the ON mode and the OFF mode of the positive pressure electromagnetic valve 55, opening and closing of the partition valve V of the fluidic device 1 can be controlled, and the configuration of the flow path 11 can be changed. Further, according to the present embodiment, the fluid can be introduced from the reservoir 29 of the fluidic device 1 into the channel 11 by switching the negative pressure electromagnetic valve 56 between the ON mode and the OFF mode. As a result, the fluid introduced from the reservoir 29 into the channel 11 can be guided to a preferred region of the channel 11 .

(pump drive unit)
The pump drive unit 60 drives the in-channel pump P of the fluidic device 1 accommodated in the accommodation section 40 , and pumps the fluid in the channel 11 of the fluidic device 1 with the in-channel pump P.

As shown in FIG. 4 , the pump drive unit 60 has a pusher pin unit 61 , a cam 66 , a cam drive motor 67 , a power transmission section 68 and a support plate 69 . The support plate 69 supports the pusher pin unit 61 , the cam 66 , the cam drive motor 67 and the power transmission section 68 . The support plate 69 is fixed to the pipeline member 57 of the pressure supply unit 50 .

The cam drive motor 67 is a motor that generates power to rotate the cam 66 . The cam drive motor 67 is positioned below the support plate 69 . Therefore, the cam drive motor 67 is arranged to protrude downward with respect to the support plate 69 .

The cam drive motor 67 overlaps the fluidic device 1 in the vertical direction (that is, the plate thickness direction of the fluidic device 1). That is, the position of the cam drive motor 67 and the position of the fluid device 1 overlap each other in the plate thickness direction of the fluid device 1 . Therefore, the control device 2 can be prevented from being enlarged in the vertical direction, and the size reduction of the control device 2 can be realized.

A rotating shaft 67a of the cam drive motor 67 extends vertically. The rotary shaft 67a penetrates the support plate 69 and protrudes above the support plate 69 . A pinion gear 67b is fixed to the upper end of the rotating shaft 67a. The pinion gear 67b is positioned above the support plate 69 and is rotated by the power of the cam drive motor 67 around a rotation center axis extending in the vertical direction.

The power transmission portion 68 transmits the power of the cam drive motor 67 to the cam 66 . The power transmission section 68 has a first gear 68a, a second gear 68b and a third gear 68c. The first gear 68a, the second gear 68b and the third gear 68c are plate-shaped and extend in the horizontal direction. The first gear 68a, the second gear 68b, and the third gear 68c rotate around different gear shafts extending in the vertical direction (that is, the plate thickness direction of the fluidic device 1).

The first gear 68a and the pinion gear 67b of the cam drive motor 67 mesh with each other. The first gear 68a and the second gear 68b mesh with each other. The second gear 68b and the third gear 68c mesh with each other. Furthermore, the third gear 68c and the cam 66 mesh with each other. Therefore, the power of the cam drive motor 67 is transmitted to the cam 66 via the first gear 68a, the second gear 68b and the third gear 68c.

According to this embodiment, a power transmission portion 68 is provided between the cam drive motor 67 and the cam 66 . As a result, the cam 66 and the cam drive motor 67 can be arranged apart from each other. The fluid device 1 is arranged directly below the cam 66 . By arranging the cam drive motor 67 and the cam 66 apart, the fluid device 1 and the cam drive motor 67 can be arranged so as to overlap each other in the vertical direction. As a result, the control device 2 can be downsized in the vertical direction.

According to this embodiment, the power transmission section 68 has a plurality of gears (first gear 68a, second gear 68b and third gear 68c) that rotate around a gear shaft extending in the vertical direction. According to this embodiment, since a plurality of gears are arranged along the same plane, the size of the control device 2 can be reduced in the vertical direction.
Although the power transmission portion 68 of the present embodiment transmits power using a gear mechanism, the power transmission portion 68 may transmit power using another transmission mechanism such as a belt mechanism.

6 is a bottom view of the pusher pin unit 61 and the cam 66. FIG. FIG. 7 is a cross-sectional view of pump drive unit 60 along axis C of cam 66 . 6, illustration of the support plate 69 is omitted.

The pusher pin unit 61 has three pusher pins (pressing members) 62 , three springs 65 , three small balls 64 and a pin holder 63 . That is, pump drive unit 60 has pusher pin 62 , spring 65 , small ball 64 and pin holder 63 .

As shown in FIG. 7, the pin holder 63 is fixed to the lower surface of the support plate 69. As shown in FIG. The pin holder 63 is provided with three stepped holes 63a penetrating vertically. The stepped hole 63a has a step surface 63aa facing upward. The stepped hole 63a has a larger diameter above the step surface 63aa than below the step surface. Pusher pin 62 and spring 65 are accommodated in stepped hole 63a. Thereby, the pin holder 63 holds the pusher pin 62 and the spring 65 .

The pusher pin 62 has a shaft shape extending in the vertical direction.
As shown in FIG. 6, the three pusher pins 62 are arranged at intervals on the same circumference around the axis C when viewed from above and below. The three pusher pins 62 respectively overlap the pump valves Pe of the fluidic device 1 housed in the housing portion 40 when viewed from above and below. That is, the pump valves Pe are arranged directly below the three pusher pins 62, respectively.

As shown in FIG. 7, the pusher pin 62 has a shaft portion 62a and a flange portion 62b extending radially outward from the upper end of the shaft portion 62a. A lower end of the pusher pin 62 is formed in a hemispherical shape. Further, the upper end surface of the pusher pin 62 is provided with a concave portion 62c in which a part of the small ball 64 is accommodated.

The pusher pin 62 is accommodated in a stepped hole 63 a of the pin holder 63 . The flange portion 62b of the pusher pin 62 is located above the step surface 63aa. The diameter of the flange portion 62b is smaller than the upper diameter of the step surface 63aa of the stepped hole 63a and larger than the lower diameter of the step surface 63aa. Also, the diameter of the shaft portion is smaller than the diameter of the lower side of the step surface 63aa of the stepped hole 63a. The diameter of the shaft portion 62 a is smaller than the diameter of the pump valve Pe of the fluidic device 1 . The pusher pin 62 is vertically movable while being accommodated in the stepped hole 63a.

The spring 65 is a coil spring spirally extending in the vertical direction. The spring 65 is accommodated in the stepped hole 63a of the pin holder 63 in a compressed state. The upper end of the spring 65 contacts the lower surface of the flange portion 62b of the pusher pin 62. As shown in FIG. Also, the lower end of the spring 65 contacts the stepped surface 63aa of the stepped hole 63a. A spring 65 exerts an upward stress on the pusher pin 62 . The pusher pin 62 is thereby pressed against the bottom surface 66ab of the cam 66 .

A small ball 64 is housed in the recess of the pusher pin 62 . The lower end of ball 64 contacts pusher pin 62 . Also, the upper end of the small ball 64 contacts the lower end surface of the cam 66 . Ball 64 is interposed between pusher pin 62 and lower surface 66ab of cam 66 .

The cam 66 has a cam body (disc portion) 66a and a camshaft 66b inserted and fixed in the center of the cam body 66a. The camshaft 66b is a shaft centered on an axis C extending in the vertical direction (thickness direction of the fluidic device 1). The camshaft 66b is rotatably supported with respect to the support plate 69. As shown in FIG. That is, the cam 66 is rotatable about the axis C with respect to the support plate 69 .

The cam body 66a has a substantially circular flat plate shape when viewed from the axial direction. The cam main body 66 a is located directly above the pusher pin unit 61 . Further, the cam body 66a is positioned above the fluid device 1 housed in the housing portion 40 (that is, on the side of the first surface 1a). The cam body 66a is a gear having a plurality of tooth flanks 66aa formed on its outer periphery. The driving force of the cam drive motor 67 transmitted through the power transmission portion 68 is transmitted to the tooth surface 66aa of the cam body 66a. As a result, the cam body 66a rotates about the axis C. As shown in FIG.

As shown in FIG. 7, the cam body 66a has a lower surface (facing surface) 66ab. A lower surface 66ab of the cam body 66a contacts the ball 64. As shown in FIG. A lower surface 66ab of the cam body 66a faces the first surface 1a of the fluid device 1 in the vertical direction. A pusher pin unit 61 is interposed between the lower surface 66ab of the cam body 66a and the first surface 1a of the fluid device 1 .

As shown in FIG. 6, the lower surface 66ab of the cam body 66a has a pair of protrusions 66c arranged along the circumferential direction of the axis C and a pair of valleys positioned between the pair of protrusions 66c in the circumferential direction. 66d and are provided. That is, the cam body 66a has a pair of protrusions 66c and a pair of valleys 66d that are alternately arranged along the circumferential direction of the axis C. As shown in FIG.

The convex portion 66c protrudes toward the fluidic device 1 side with respect to the valley portion 66d. The convex portion 66c has an arc shape extending in the circumferential direction around the axis C. As shown in FIG. A lower surface of the projection 66c is a flat surface extending in the horizontal direction. An end portion ca on one side in the circumferential direction of the convex portion 66c is provided with a slope 66ca whose protrusion height gradually decreases toward the one side in the circumferential direction. Similarly, a slope 66ca whose protrusion height gradually decreases toward the other side in the circumferential direction is provided at the end portion on the other side in the circumferential direction of the convex portion 66c.

The lower surface 66ab of the cam body 66a contacts the small ball 64 at the convex portion 66c or the valley portion 66d. A convex portion 66 c or a valley portion 66 d of the cam body 66 a applies a downward force to the pusher pin 62 via the small ball 64 .

8 is a schematic cross-sectional view of the pump drive unit 60 and the fluidic device 1 deployed around the axis C. FIG.
When the cam 66 rotates around the axis C, the convex portion 66c and the valley portion 66d located directly above the pusher pin 62 are alternately switched. As a result, the pusher pin 62 periodically reciprocates vertically. That is, the cam 66 drives the pusher pin 62 vertically.

When the convex portion 66 c of the cam 66 is positioned directly above the pusher pin 62 , the convex portion 66 c contacts the pusher pin 62 and applies a downward force to the pusher pin 62 . When a downward force is applied to the pusher pin 62, the lower end of the pusher pin 62 contacts the pump valve Pe and deforms the pump valve Pe downward. That is, the pusher pin 62 contacts the in-channel pump P and deforms the in-channel pump. When the pump valve Pe is deformed downward, the pump valve Pe closes the flow path 11 .

When the valley portion 66d of the cam 66 is positioned directly above the pusher pin 62, the pusher pin 62 is pushed upward by the spring 65 and separated from the pump valve Pe. As a result, the deformation of the pump valve Pe is released, and the pump valve Pe opens the flow path 11 .

When the three pusher pins 62 each reciprocate in the vertical direction, the three pump valves Pe arranged along the length direction of the flow path 11 sequentially move along the length direction of the flow path 11. The opening and closing of the are repeated. As a result, the in-channel pump P pressure-feeds the fluid in the channel 11 .

According to this embodiment, the plurality of pusher pins 62 are arranged on the same circumference around the axis C in plan view. The three pusher pins 62 are stressed by a cam 66 rotating about axis C. By arranging the plurality of pusher pins 62 on the same circumference centered on the axis C, the reaction force received by the cam 66 from each pusher pin 62 becomes equal, and the rotation of the cam 66 can be stabilized. The operation of the in-channel pump P can be stabilized. Further, by arranging the plurality of pusher pins 62 on the same circumference centered on the axis C, the diameter of the cam 66 can be reduced, and as a result, the control device 2 can be miniaturized. In addition, since each pusher pin 62 can be arranged close to the axis C, the torque of the cam 66 required to operate the pusher pin 62 can be reduced. As a result, the cam drive motor 67 that drives the cam 66 can be downsized, and power consumption can be suppressed.

The control device 2 of this embodiment includes a pressure supply unit 50 that opens and closes the partition valve V, and a pump drive unit 60 that drives the pump P in the channel. The pressure supply unit 50 applies pressure to the partition valve V to open and close the partition valve V. FIG. On the other hand, the pump drive unit 60 drives the in-channel pump P by bringing the pusher pin 62 into contact with the pump valve Pe and mechanically applying pressure. That is, according to this embodiment, the partition valve V is driven by air pressure, and the in-channel pump P is mechanically driven.

In the control of the fluidic device 1, the opening/closing timing of the partition valve V is complicated. Such complicated opening and closing of the partition valve V can be easily performed by controlling the positive pressure electromagnetic valve 55 to apply positive pressure to the partition valve V. FIG. However, when the valve is opened and closed by applying a positive pressure to the valve, a pressure releasing sound is generated when the valve is opened. Therefore, the opening and closing of the valve by positive pressure is suitable for opening and closing a valve that does not open and close frequently, such as the partition valve V, but it is not suitable for controlling the pump valve Pe that opens and closes continuously from the viewpoint of quietness. is. Further, when the detection target is electrically detected in the processing unit 20 of the fluidic device 1, if a positive pressure is used to open and close the pump valve Pe, electrical noise when driving the solenoid valve affects the detection in the processing unit 20. There is a risk of giving Furthermore, if positive pressure is used to open and close the pump valve Pe, a large amount of compressed air is consumed depending on the drive frequency, and a larger pump is required to accommodate this.

In driving the in-channel pump P, the opening and closing of the pump valve Pe is regular and frequently performed continuously. Therefore, as shown in the present embodiment, it is preferable to use the pump drive unit 60 that applies mechanical pressure to open and close the pump valve Pe.

According to this embodiment, driving by applying a positive pressure is adopted as a method of driving the partition valve V, and driving by applying a mechanical pressure is adopted as a method of driving the pump P in the channel. This improves the quietness of the control device 2 when driving the pump in the flow path, suppresses the generation of electrical noise, and suppresses the consumption of compressed air. It can be performed.

(Modification 1 (temperature adjustment unit))
FIG. 9 is a schematic diagram of a temperature adjustment unit 180 of Modification 1 that can be employed in the control device 2. As shown in FIG.
In addition, the same code|symbol is attached|subjected about the component of the same aspect as the above-mentioned embodiment, and the description is abbreviate|omitted.

The temperature adjustment unit 180 adjusts the temperature of the processing section 20 by heating the processing section 20 of the fluidic device 1 housed in the housing section 40 . The temperature adjustment unit 180 has a heater 181 , a heat medium 182 , a heat medium circulation flow path 183 , a heat medium pump 184 , and a temperature sensor 185 .

A heat medium 182 flows inside the heat medium circulation channel 183 . The heat medium circulation channel 183 extends in a loop shape. That is, the heat medium circulation flow path 183 circulates the heat medium 182 . A heater 181 and a heat medium pump 184 are provided in the heat medium circulation flow path 183 . The heater 181 heats the heat medium 182 flowing through the heat medium circulation channel 183 . The heat medium pump 184 pressure-feeds the heat medium 182 in the heat medium circulation flow path 183 .

The measurement part 185a of the heat medium circulation channel 183 contacts the lower surface of the fluidic device 1 (the second surface 1b shown in FIG. 1). A portion of the heat medium circulation channel 183 overlaps the processing section 20 when viewed from the vertical direction (thickness direction of the fluidic device 1). Thereby, the heat of the heat medium in the heat medium circulation flow path 183 can be effectively transferred to the processing section 20, and the temperature of the processing section 20 can be easily increased.
Note that the heat medium circulation channel 183 may indirectly contact the lower surface of the fluidic device 1 via a member having high thermal conductivity.

The temperature sensor 185 has a measuring section 185a. The temperature sensor 185 measures the temperature at the measuring section 185a. The measurement part 185a contacts the bottom surface of the fluidic device 1 (the second surface 1b shown in FIG. 1). In addition, the measurement section 185a overlaps the processing section 20 when viewed from the vertical direction (thickness direction of the fluidic device 1). Thereby, the temperature sensor 185 measures the temperature of the processing section 20 . The heater 181 heats the heat medium 182 according to the temperature measured by the temperature sensor 185 .

The fluidic device 1 performs some processing (for example, detection of a detection target) on the fluid in the flow path 11 in the processing unit 20 . Therefore, in the control device 2 , a device for processing in the processing section 20 is arranged near the processing section 20 of the fluidic device 1 . As an example, in the control device 2 , a probe that applies a voltage to the processing section 20 is arranged near the processing section 20 . On the other hand, in the processing in the processing section 20, it is required to set the processing section 20 to a proper temperature for the processing. However, the space for arranging a heater for heating the processing section 20 is limited in the vicinity of the processing section 20 .

According to this embodiment, the heater 181 is arranged apart from the processing section 20 , and the heat of the heater 181 is transferred to the processing section 20 via the heat medium 182 flowing through the heat medium circulation flow path 183 . As a result, in the control device 2 , the processing section 20 can be effectively cooled using a narrow space in the vicinity of the processing section 20 .

(Modification 2 (temperature adjustment unit))
FIG. 10 is a schematic diagram of a temperature adjustment unit 280 of Modification 2 that can be employed in the control device 2. As shown in FIG.
In addition, the same code|symbol is attached|subjected about the component of the same aspect as the above-mentioned embodiment, and the description is abbreviate|omitted.

The temperature adjustment unit 280 adjusts the temperature of the processing section 20 by heating the processing section 20 of the fluidic device 1 housed in the housing section 40 . The temperature adjustment unit 280 has a heater 281 , a heat medium 282 , a heat medium circulation flow path 283 , a heat medium pump 284 and a temperature sensor 185 . Note that the temperature sensor 185 has a configuration similar to that of the first modification described above.

The heater 281 contacts the lower surface of the fluidic device 1 (the second surface 1b shown in FIG. 1). The heater 281 overlaps the second circulation flow path 10B of the fluidic device 1 when viewed from the vertical direction (thickness direction of the fluidic device 1). That is, the heater 281 is positioned directly below the second circulation flow path 10B of the fluidic device 1. As shown in FIG. Therefore, the heater 281 can increase the temperature of the fluid by applying heat to the fluid flowing through the second circulation flow path 10B.
Note that the heater 281 may indirectly contact the lower surface of the fluidic device 1 via a member with high thermal conductivity.

In this modified example, the fluid flowing through the second circulation flow path 10B functions as the heat medium 282 . That is, the heat medium 282 of the temperature adjustment unit 280 of this modified example is the fluid inside the fluidic device 1 .

In this modification, the second circulation flow path 10B functions as the heat medium circulation flow path 283. That is, the heat medium circulation channel 283 of the temperature adjustment unit 280 of this modified example is part of the channel 11 of the fluidic device 1 .

The fluid flowing through the second circulation flow path 10B is pressure-fed by the pump P in the flow path. As described above, the second circulation flow path 10B functions as the heat medium circulation flow path 283 in this modification. Therefore, in the temperature adjustment unit 280 of this modified example, the in-channel pump P functions as a heat medium pump 284 .

A processing section 20 is arranged in the path of the second circulation flow path 10B. That is, part of the heat medium circulation channel 283 of this modified example overlaps the processing section 20 when viewed from the vertical direction (the plate thickness direction of the fluidic device 1). The fluid flowing through the second circulation flow path 10B directly heats the processing section 20 . The heater 281 heats the fluid inside the second circulation flow path 10B according to the temperature measured by the temperature sensor 185 .

According to this modification, the configuration of the fluidic device 1 is used as the heat medium 282 , the heat medium circulation flow path 283 , and the heat medium pump 284 . Therefore, it is not necessary to separately provide a heating medium, a heating medium circulation channel, and a heating medium pump in the control device 2, and the control device 2 can be downsized. Moreover, in this modification, the heat medium 282 directly contacts the processing section 20 . Therefore, according to the temperature adjustment unit 280 of this modification, the processing section 20 can be quickly heated to a desired temperature with low power consumption.

(Modification 3 (pump drive unit))
FIG. 11 is a bottom view of a pump drive unit 360 of Modified Example 3 that can be employed in the control device 2. FIG. FIG. 11 is a diagram corresponding to FIG. 6 in the above embodiment. 12 is a cross-sectional view of the pump drive unit 360 taken along line XII-XII in FIG. 11. As shown in FIG.
In addition, the same code|symbol is attached|subjected about the component of the same aspect as the above-mentioned embodiment, and the description is abbreviate|omitted.

Pump drive unit 360 has pusher pin unit 361 and cam 66 . Also, the pump drive unit 360 has a cam drive motor 67, a power transmission section 68, and a support plate 69 (not shown in FIGS. 11 and 12), as in the above-described embodiments.

The pusher pin unit 361 includes two first pusher pins (pressing members) 62, one second pusher pin (pressing member) 362, three springs 65, three small balls 64, and a pin holder. 363 and . The first pusher pin 62 has the same configuration as the pusher pin 62 of the above-described embodiment.

The pin holder 363 is provided with two first stepped holes 63a and one second stepped hole 363a. The first stepped hole 63a and the second stepped hole 363a penetrate vertically.

A first pusher pin 62 and a spring 65 are accommodated in the two first stepped holes 63a, respectively. The first stepped hole 63a has the same configuration as the stepped hole 63a provided in the pin holder 63 of the above-described embodiment.

As shown in FIG. 12, the second pusher pin 362 and the spring 65 are accommodated in the second stepped hole 363a. The second stepped hole 363a has a first step surface 363aa and a second step surface 363ab. The first step surface 363aa and the second step surface 363ab face upward. The lower end of the spring 65 is supported on the first step surface 363aa. The second step surface 363ab is located above the first step surface 363aa. The second step surface 363ab extends along the radial direction. The second step surface 363ab is provided to suppress interference with the flange portion 362b of the second pusher pin 362. As shown in FIG.

The second pusher pin 362 has a shaft shape extending in the vertical direction. The second pusher pin 362 has a shaft portion 362a and a flange portion 362b provided at the upper end of the shaft portion 362a. A lower end of the shaft portion 362a is formed in a hemispherical shape. The lower end of the shaft portion 362a vertically faces the pump valve Pe.

A flange portion 362b of the second pusher pin 362 extends radially outward from the upper end of the shaft portion 362a. The flange portion 362b has an extension portion 362ba that elongates radially inward of the axis C. As shown in FIG. A concave portion 362c in which the small ball 64 is accommodated is provided on the upper end surface of the extension portion 362ba.

As shown in FIG. 11, the three small balls 64 held by the two first pusher pins 62 and one second pusher pin 362 are centered on the axis C when viewed from above and below. They are spaced apart on the same circumference. The two first pusher pins 62 and the one second pusher pin 362 are driven in the axial direction by applying stress from the convex portion 66c provided on the cam 66 through the small balls 64, respectively.

As the first pusher pin 62 and the second pusher pin 362 are driven, the shaft portion 62a of the first pusher pin 62 and the shaft portion 362a of the second pusher pin 362 press the pump valve Pe to Drive the valve Pe.

In this modification, the shaft portion 62a of the two first pusher pins 62 and the shaft portion 362a of the second pusher pin 362 are linearly arranged in plan view. Therefore, according to this modification, the three pump valves Pe of the fluidic device 1 can be arranged linearly. As a result, the channel of the fluidic device 1 passing through the in-channel pump P can be made linear, and the flow of the fluid flowing through the channel can be made smooth.

In this modified example, by providing an extension portion 362ba extending in the radial direction of the axis C in the second pusher pin 362, the shaft portions 62a, 362a of the pusher pins 62, 362 are arranged linearly in plan view. explained. In this manner, by providing the portion (the extension portion 362ba of the present modification) where the pusher pin extends in the radial direction of the axis C, the shaft portion of the pusher pin can be freely arranged in plan view. By adopting such a configuration, it is possible to increase the degree of freedom in arranging the plurality of pump valves Pe according to restrictions on the shape of the flow path of the fluidic device.

(Modification 4 (pressure supply unit))
FIG. 13 is a schematic diagram showing part of a pressure supply unit 450 of Modification 4 that can be employed in the control device 2. As shown in FIG. Note that FIG. 13 shows a simplified configuration of the fluidic device 1 .
A pressure supply unit 450 of this modified example differs from the above-described embodiment mainly in the configuration of a positive pressure pipeline (pipeline) 458 . In addition, the same code|symbol is attached|subjected about the component of the same aspect as the above-mentioned embodiment, and the description is abbreviate|omitted.

The positive pressure pipe 458 of this modified example connects the positive pressure pump 53, the positive pressure pump 53, and the partition valve V, as in the above-described embodiment. A positive pressure electromagnetic valve 55 is arranged in the path of the positive pressure pipe 458 .

The positive pressure pipe 458 of this modification includes a main passage 458a extending from the positive pressure solenoid valve 55, and a plurality of (three in this modification) branch passages 458b branched from the main passage 458a and respectively connected to different partition valves V. , has The positive pressure solenoid valve 55 applies the positive pressure generated in the positive pressure pump 53 to the inside of the positive pressure pipe 458 in the ON mode. As a result, a positive pressure is equally applied to the branch passages 458b of the positive pressure pipe 458, and the plurality of partition valves V connected to the branch passages 458b are deformed downward.

According to this modification, since the positive pressure pipeline 458 branches and connects to a plurality of partition valves V, it is possible to simultaneously control opening and closing of the plurality of partition valves V using one positive pressure electromagnetic valve 55. . That is, by connecting a positive pressure pipeline 458 having a plurality of branch paths 458b to a plurality of partition valves V that are operated in synchronism, the number of positive pressure electromagnetic valves 55 provided in the control device 2 can be reduced. can. According to this modification, an inexpensive control device 2 can be provided.

The embodiments of the present invention and their modifications have been described above, but each configuration and combination thereof in the embodiments and modifications are examples, and additions of configurations, Omissions, substitutions and other changes are possible. Moreover, the present invention is not limited by the embodiments.

DESCRIPTION OF SYMBOLS 1... Fluid device 1a... 1st surface 1b... 2nd surface 2... Control device 10... Circulation flow path 11... Flow path 20... Processing part 50, 450... Pressure supply unit 53... Positive pressure Pump (pressure application pump) 55 Positive pressure solenoid valve (solenoid valve) 58, 458 Positive pressure pipeline (pipe line) 60, 360 Pump drive unit 62, 362 Pusher pin (pressing member) 66... Cam 66a... Cam main body (disc portion) 66c... Convex portion 67... Cam drive motor 68... Power transmission part 80, 180, 280... Temperature control unit 181, 281... Heater 182, 282... Heat medium 183, 283... Heat medium circulation channel C... Axis line P... Pump in channel Pe... Pump valve S... Fluid V... Partition valve

Claims (10)

A control device for controlling a fluid flowing through a channel in a fluidic device,
The fluidic device has a partition valve capable of switching the flow of the fluid, and a pump valve that transfers the fluid in the flow path,
It has a plurality of pipelines connected to the compartment valves and a plurality of solenoid valves respectively arranged in the plurality of pipelines, and opening and closing of the plurality of solenoid valves and gas pressure applied to the plurality of pipelines. a pressure supply unit that opens and closes the partition valve under the control of
and a pressing member capable of pressing the pump valve by coming into contact with the driving portion and the pump valve, and moving the position of the pressing member in accordance with the driving of the driving portion. a mechanically controlled pump drive unit;
a detection unit disposed closer to the pump drive unit than the plurality of electromagnetic valves and electrically detecting a detection target contained in the fluid;
comprising
Control device. The fluidic device has a plurality of valves as the pump valves,
The pump drive unit is
a plurality of the pressing members each contacting the valve on one end side;
2. The control device according to claim 1, comprising a plurality of said pressing members and cams contacting with the other ends of said pressing members. The cam has a convex portion or a concave portion on a contact surface with the pressing member, and converts rotational driving of the driving portion into axial driving of the pressing member.
3. A control device according to claim 2. The convex portion or the concave portion is a pair of convex portions or concave portions arranged along the circumferential direction of the axis of the cam,
4. A control device according to claim 3. In the axial direction of the pressing member, the position of the driving section and the position of the fluidic device overlap with each other,
5. A control device according to claim 4. The pump drive unit has a power transmission section that transmits power of the drive section to the cam,
The power transmission unit has a plurality of gears rotating around a gear shaft extending in the axial direction of the pressing member ,
A control device according to any one of claims 3 to 5. The pressure supply unit is connected to the plurality of pipelines via a plurality of branch paths branched from one main path having one solenoid valve,
A control device according to any one of claims 1 to 6. The fluidic device has a processing unit that is provided in the flow path and that is in contact with the fluid to process the fluid,
The control device according to any one of claims 1 to 7, wherein the processing section is the detection section that detects a detection target in fluid in the fluidic device. Positions of the plurality of solenoid valves and positions of the fluidic device overlap each other in the axial direction of the pressing member,
A control device according to any one of claims 1 to 8. a temperature adjustment unit that heats the fluid in the flow path;
The temperature adjustment unit is
a heater;
a heat medium heated by the heater;
The control device according to any one of claims 1 to 9, further comprising a heating medium circulation channel for circulating the heating medium.

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