JP7198580B2 - Three-dimensional measuring device and movement control method - Google Patents

Description

The present invention relates to a three-dimensional measuring device and a movement control method.

2. Description of the Related Art A three-dimensional measuring apparatus is used to measure the coordinates of a workpiece, which is an object to be measured placed on a base, using a probe. For example, the probe is moved in three orthogonal axial directions in the measurement space by a moving mechanism, and scans and measures the workpiece while contacting the workpiece.

JP 2012-2715 A

In order to improve the measurement efficiency of the three-dimensional measuring apparatus, measures to increase the moving speed of the probe are being studied.
However, increasing the moving speed of the probe increases the vibration of the probe. If the vibration of the probe is large, for example, the probe may erroneously collide with the workpiece, or it may be erroneously detected that the probe has touched the workpiece when it is not actually in contact with the workpiece.

Therefore, the present invention has been made in view of these points, and it is an object of the present invention to suppress the influence of vibration during movement of the probe while improving the measurement efficiency of the probe.

In a first aspect of the present invention, there is provided a probe for measuring a workpiece, a moving mechanism for moving the probe, an imaging unit for imaging a measurement space including the workpiece and generating a captured image, and the captured image. based on, in the measurement space, a first region in which the maximum movable speed of the probe by the moving mechanism is a first speed, and a second speed in which the maximum movable speed of the probe is higher than the first speed. a region determination unit that determines a second region that is further away from the workpiece than the first region; and when the position of the probe is included in the first region, the a control unit that moves a probe and moves the probe at a speed equal to or lower than the second speed when the position of the probe is included in the second region.

Further, the control unit executes detection processing for detecting whether or not the magnitude of vibration of the probe is greater than a predetermined value for stopping the probe when the position of the probe is included in the first region. However, when the position of the probe is included in the second area, the detection process may not be executed.

Further, when the position of the probe is included in the second area, the control unit may move the probe at the second speed and not execute the detection process.

Further, the area determination unit determines the inside of a position at a predetermined distance from the surface of the work as the first area, and determines the outside of the position at a predetermined distance from the surface of the work as the second area. may be

Further, the area determination unit may determine the inside of a rectangular parallelepiped including the workpiece as the first area, and the outside of the rectangular parallelepiped as the second area.
Also, the area determination unit may determine a plurality of the first areas.

Further, the area determining section may change the boundary position between the first area and the second area between the time the probe approaches the work and the time the probe moves away from the work.

Further, the area determination unit may determine the boundary position while the probe approaches the work to be a position farther from the work than the boundary position while the probe moves away from the work. .

Further, the imaging unit includes a first imaging unit that generates a first captured image by capturing an image of the measurement space from above, and a second image capturing unit that generates a second captured image by capturing an image of the measurement space from the side. and a section, wherein the region determination section may determine the first region and the second region based on the first captured image and the second captured image.

In a second aspect of the present invention, a step of photographing a measurement space including a workpiece to be measured by a probe to generate a captured image; and moving the probe in the measurement space by a moving mechanism based on the captured image. A first region in which the maximum possible speed is a first speed, and a second region in which the maximum movable speed of the probe is a second speed higher than the first speed and which is farther from the work than the first region. and moving the probe at a speed equal to or less than the first speed when the position of the probe is included in the first region, and the position of the probe is included in the second region. and moving the probe at a speed equal to or lower than the second speed when the probe is present.

ADVANTAGE OF THE INVENTION According to this invention, it is effective in suppressing the influence by the vibration at the time of a probe's movement, improving the measurement efficiency by a probe.

1 is a schematic diagram for explaining a schematic configuration of a three-dimensional measuring device 1 according to one embodiment of the present invention; FIG. 2 is a block diagram for explaining an example of the configuration of a control device 7; FIG. 4 is a schematic diagram for explaining an example of position detection of a workpiece W; FIG. It is a schematic diagram for demonstrating 1st area|region R1 and 2nd area|region R2. FIG. 4 is a schematic diagram for explaining a case where there are a plurality of first regions R1; 4 is a schematic diagram for explaining the relationship between the moving direction of the probe 30 and the boundary position between the first region R1 and the second region R2. FIG. 4 is a flowchart for explaining an example of movement control of the probe 30;

<Configuration of three-dimensional measuring device>
A configuration of a three-dimensional measuring apparatus according to one embodiment of the present invention will be described with reference to FIGS. 1 and 2. FIG.

FIG. 1 is a schematic diagram for explaining a schematic configuration of a three-dimensional measuring device 1 according to one embodiment. FIG. 2 is a block diagram for explaining an example of the configuration of the control device 7. As shown in FIG. The three-dimensional measuring device 1 has a measuring device main body 2 and a control device 7, as shown in FIG.

The measuring instrument main body 2 has a base 10, a moving mechanism 20, a probe 30, and an imaging section 40, as shown in FIGS. The measuring machine main body 2 measures a workpiece, which is an object to be measured placed on a base 10 , by a probe 30 that is moved by a moving mechanism 20 .

The base 10 has a mounting surface 11 on which a workpiece is mounted. A space above the mounting surface 11 forms a measurement space for measuring the workpiece. A guide portion 12 is provided along the Y-axis direction on one end side of the base 10 in the X-axis direction. The guide portion 12 guides the movement of the moving mechanism 20 (specifically, the column 22 of the moving mechanism 20) in the Y-axis direction.

The moving mechanism 20 is provided on the base 10 and is a mechanism for moving the probe 30 within the measurement space. The moving mechanism 20 holds the probe 30 and moves it in the X-, Y-, and Z-axis directions within the measurement space. The moving mechanism 20 has a column 22, a beam 23, a slider 24, a ram 25, and a driving section 29 (see FIG. 2).

The column 22 is erected on the guide portion 12 and is movable on the guide portion 12 along the Y-axis direction.
The beam 23 is provided so as to extend in the X-axis direction and moves together with the column 22 in the Y-axis direction. One longitudinal end of the beam 23 is supported by the column 22 , and the other longitudinal end of the beam 23 is supported by the column 26 .

The slider 24 is supported by the beam 23 and is movable on the beam 23 along the X-axis direction.
The ram 25 is inserted inside the slider 24 and moves along with the slider 24 in the X-axis direction. Also, the ram 25 is movable in the slider 24 along the Z-axis direction.
The drive unit 29 has a drive source such as a motor, and moves the column 22 , beam 23 , slider 24 and ram 25 .

The probe 30 is a probe for measuring the work placed on the base 10 . For example, the probe 30 scans and measures the three-dimensional position of the work by moving while contacting the work. The probe 30 outputs measurement results to the control device 7 .

The imaging unit 40 captures the measurement space including the workpiece on the base 10 to generate a captured image. Note that the imaging unit 40 may photograph the measurement space so as to include not only the workpiece but also the probe 30 . The imaging unit 40 outputs the generated captured image to the control device 7 .

The imaging unit 40 includes a first imaging unit 41 that generates a first captured image by capturing an image of the measurement space from above, and a second imaging unit 42 that generates a second captured image by capturing an image of the measurement space from the side. , has The first imaging section 41 is provided on the bottom surface of the beam 23, and the second imaging section 42 is provided on the side surface of the column 22 as shown in FIG.

The control device 7 controls the operation of the measuring instrument body 2 . The control device 7 executes, for example, movement control of the probe 30 by the movement mechanism 20 and arithmetic processing such as workpiece shape analysis based on the measurement result of the probe 30 . The control device 7 has a storage section 70 and a control section 80, as shown in FIG.

The storage unit 70 includes, for example, ROM (Read Only Memory) and RAM (Random Access Memory). The storage unit 70 stores programs and various data for the control unit 80 to execute.

The control unit 80 is, for example, a CPU (Central Processing Unit). The control section 80 controls the operation of the measuring instrument main body 2 by executing a program stored in the storage section 70 . The control section 80 functions as a position detection section 82 , an area determination section 83 , a movement control section 84 and a vibration detection section 85 .

The position detection section 82 detects the position of the workpiece on the base 10 based on the captured image generated by the imaging section 40 . Specifically, the position detection unit 82 detects the position of the workpiece in the measurement space based on the first captured image generated by the first imaging unit 41 and the second captured image generated by the second imaging unit 42. . Note that the position detection unit 82 can also detect the position of the probe 30 in the measurement space in addition to the workpiece. For example, the position detector 82 may detect the position of the probe 30 during movement in the measurement space.

FIG. 3 is a schematic diagram for explaining an example of position detection of the workpiece W. As shown in FIG. 3A shows the first captured image G1 of the first imaging section 41, and FIG. 3B shows the second captured image G2 of the second imaging section 42. As shown in FIG. The position detection unit 82 detects the position of the workpiece W on the XY plane of the measurement space from the first captured image G1. The position detection unit 82 also detects the height of the workpiece W in the Z direction of the measurement space from the second captured image G2. Thereby, the position detection unit 82 can accurately identify the position of the workpiece W in the measurement space.

Based on the captured image, the region determination unit 83 determines a first region R1 in which the maximum movable speed of the probe 30 by the moving mechanism 20 in the measurement space is the speed V1 (first speed) and a maximum movable speed of the probe 30 in the measurement space. A second region R2 having a speed V2 (second speed) higher than the speed V1 is determined. That is, the area determination unit 83 determines the spatial area based on the position of the workpiece W in the measurement space detected by the position detection unit 82 from the captured images (specifically, the first captured image G1 and the second captured image G2). determine a first region R1 and a second region R2. In other words, the region determining section 83 divides the measurement space into the first region R1 and the second region R2.

FIG. 4 is a schematic diagram for explaining the first region R1 and the second region R2. In FIG. 4, only the center W1 of the workpiece is shown for convenience of explanation. The first region R1 is here a rectangular parallelepiped region surrounded by broken lines in FIG. The second region R2 is a region surrounded by a dashed line in FIG. 4 and outside the first region R1. That is, the second region R2 is a spatial region obtained by excluding the first region R1 from the measurement space, and is farther from the workpiece than the first region R1.
For example, when the probe 30 scans and measures the work, the first region R1 is a region where there is a high possibility that the probe 30 moves around the work. This is an area where there is no risk of collision with the In other words, the first region R1 is a region that requires precision because it is related to measurement, and the second region R2 is a region that does not require precision. Further, since the probe 30 moves at high speed in the second region R2, the movement time of the probe 30 can be shortened, so that the measurement efficiency can be enhanced.

The region determination unit 83 identifies the position and shape of the workpiece W from the first captured image G1 and the second captured image G2, and determines the first region R1 and the second region R2. For example, the region determination unit 83 determines the inside of the position at a predetermined distance from the surface of the work W as the first region R1, and the outside of the position at the predetermined distance from the surface of the work W as the second region R2. good too. Further, the area determination unit 83 may determine the inside of the rectangular parallelepiped including the workpiece W as the first area R1 and the outside of the rectangular parallelepiped as the second area R2. Thereby, the optimum first region R1 and second region R2 according to the shape of the workpiece W can be determined.

FIG. 5 is a schematic diagram for explaining a case where there are a plurality of first regions R1. For example, when there are a plurality of workpieces on the base 10, the region determining section 83 may determine a plurality of first regions R1. That is, when a plurality of works are included in the captured image, the area determination unit 83 determines the area corresponding to each work as the first area R1. Note that the sizes of the plurality of first regions R1 may differ according to the sizes of the corresponding workpieces.

If the measuring instrument main body 2 is provided with a rack for supporting the replacement probe 30, the area determination unit 83 may also determine the area around the rack as the first area R1. This prevents the probes 30 from erroneously colliding with the rack when approaching the rack for probe replacement.

The region determining portion 83 may change the boundary position between the first region R1 and the second region R2. For example, the area determination unit 83 changes the boundary position between the first area R1 and the second area R2 between when the probe 30 approaches the work and when the probe 30 moves away from the work. Specifically, the area determination unit 83 determines the boundary position while the probe 30 approaches the work to be a position farther from the work than the boundary position while the probe 30 moves away from the work.

FIG. 6 is a schematic diagram for explaining the relationship between the moving direction of the probe 30 and the boundary position between the first region R1 and the second region R2. In addition, in FIG. 6, for convenience of explanation, only the center position W1 of the work is shown, and the shape of the work is omitted. A boundary position B1 (position indicated by a broken line) shown in FIG. 6(a) is a position when the probe 30 approaches the work side in the second region R2, and a boundary position B2 (position indicated by a broken line) shown in FIG. The position shown) is the position when the probe 30 leaves the workpiece in the first region R1.
The boundary position B1 shown in FIG. 6(a) is farther from the boundary position B2 shown in FIG. 6(b) when viewed from the work center W1. As a result, when the probe 30 approaches the work, it is possible to prevent the probe 30 from erroneously colliding with the work until the probe 30 stops. Further, when the probe 30 is separated from the work, the possibility of the probe 30 colliding with the work is low, so the moving speed of the probe 30 can be increased immediately by setting the boundary position B2 near the work.

The movement control section 84 controls movement of the probe 30 by the moving mechanism 20 . In this embodiment, the movement control unit 84 controls the movement speed of the probe 30 according to the regions (the first region R1 and the second region R2) where the probe 30 is located. For example, when the position of the probe 30 is included in the first region R1, the movement control section 84 moves the probe 30 at a speed equal to or lower than the speed V1. On the other hand, when the position of probe 30 is included in second region R2, movement control unit 84 moves probe 30 at a speed equal to or lower than speed V2. In particular, the movement control unit 84 can improve the measurement efficiency by moving the probe 30 at a speed V2 in the second region R2.

The movement control unit 84 forcibly stops the probe 30 when the vibration of the moving probe 30 is large. Specifically, the movement control unit 84 forcibly stops the probe 30 when the magnitude of vibration of the probe 30 is greater than a predetermined value for stopping the moving probe 30 . As a result, it is possible to prevent the probe 30 from colliding with the workpiece or the like due to the large vibration of the probe 30 .

The vibration detector 85 performs detection processing to detect whether or not the magnitude of vibration of the probe 30 is greater than a predetermined value for stopping the probe 30 . The vibration detector 85 obtains the magnitude of vibration from, for example, the amount of displacement of the probe 30 during movement. When the vibration detector 85 detects that the magnitude of vibration of the probe 30 is greater than a predetermined value, the movement controller 84 stops the probe 30 during movement.

The vibration detection unit 85 performs the above detection processing when the position of the probe 30 is included in the first region R1, and performs the above detection processing when the position of the probe 30 is included in the second region R2. do not. For example, while the probe 30 is moving at high speed in the second region R2 at the speed V2, the vibration detection unit 85 does not execute the detection process.
When the probe 30 is moving in the second region R2 at the speed V2, there is a possibility that the magnitude of vibration of the probe 30 will be larger than the predetermined value. However, by not executing the detection process, the probe 30 does not forcibly stop even if the magnitude of the vibration is larger than the predetermined value, and the high-speed movement of the probe 30 is continued. On the other hand, even if the probe 30 vibrates while it is moving in the second region R2, there is no danger of colliding with the workpiece W. Therefore, there is no particular disadvantage even if the probe 30 does not stop when the vibration of the probe 30 increases.

<Probe movement control>
Movement control of the probe 30 will be described with reference to FIG.

FIG. 7 is a flowchart for explaining an example of movement control of the probe 30. As shown in FIG. The processing shown in FIG. 7 is realized by executing a program stored in the storage unit 70 by the control unit 80 of the control device 7 .

In the flow chart of FIG. 7, it is assumed that the measurement person instructs to start measuring the workpiece W, and the probe 30 starts moving from the standby position by the moving mechanism 20, for example. First, the image capturing unit 40 captures an image of the measurement space including the workpiece W on the base 10 to generate a captured image (step S102). Specifically, the first imaging unit 41 generates the first captured image G1, and the second imaging unit 42 generates the second captured image G2.

Next, the position detection unit 82 of the control unit 80 detects the position of the workpiece W in the measurement space from the captured images (the first captured image G1 and the second captured image G2) generated by the imaging unit 40 (step S104). . Specifically, the position detector 82 detects the position of the workpiece W in the X, Y, and Z axial directions of the measurement space, as shown in FIG.

Next, based on the position of the workpiece W detected by the position detection unit 82, the region determination unit 83 determines the first region R1 and the second region R2 in which the maximum movable speed of the probe 30 differs in the measurement space (step S106). For example, as shown in FIG. 4, the area determination unit 83 determines a rectangular parallelepiped first area R1 and a second area R2 surrounding the first area R1.

Next, the position detector 82 detects whether the probe 30 is positioned in the first region R1 (step S108). Then, when the probe 30 is located in the first region R1 in step S108 (Yes), the movement control unit 84 moves the probe 30 at a speed equal to or lower than the speed V1 (step S110).

Next, the vibration detection unit 85 executes detection processing for detecting whether or not the magnitude of vibration of the probe 30 is greater than a predetermined value (step S112). When the magnitude of vibration of the probe 30 moving at the speed V1 is equal to or less than the predetermined value in step S112 (No), the movement control unit 84 continues the movement of the probe 30 (step S114), take measurements.

On the other hand, if the magnitude of vibration of the probe 30 moving at the speed V1 is greater than the predetermined value in step S112 (Yes), the movement control unit 84 forcibly stops the moving probe 30 (step S116 ).

When the probe 30 is positioned in the second region R2 in step S108 (No), the movement control unit 84 moves the probe 30 at a speed equal to or lower than the speed V2 (step S118). That is, the movement control unit 84 moves the probe 30 at a speed higher than the speed V1 and lower than or equal to the speed V2. For example, the movement control section 84 moves the probe 30 at the speed V2 within the second region R2.

After steps S114 to S118, if the region where the probe 30 is located has changed (for example, changed from the first region R1 to the second region R2) (step S120: Yes), the control unit 80 performs the above-described step S108 The processing of to S118 is repeated. That is, until the measurement of the work W by the probe 30 is completed, the moving speed of the probe 30 is controlled according to the region (first region R1 or second region R2) where the moving probe 30 is located. At this time, as described above, the boundary position between the first region R1 and the second region R2 may be changed according to the moving direction of the probe 30 (see FIG. 6).

<Effects of this embodiment>
In the above-described embodiment, the three-dimensional measuring apparatus 1 uses the first region R1 in which the maximum movable speed of the probe 30 is the speed V1 (first speed) based on the captured image of the measurement space including the workpiece W. A second region R2 where the maximum possible speed is a speed V2 (second speed) higher than the speed V1 and is away from the workpiece W is determined. When the moving probe 30 is positioned in the first region R1, the three-dimensional measuring apparatus 1 moves the probe 30 at a speed V1 or less, and when the probe 30 is positioned in the second region R2, moves the probe 30 at a speed V2 or less. Let
As a result, when the probe 30 is positioned in the first region R, the probe 30 moves at a speed equal to or lower than the speed V1. can be prevented. When the probe 30 is positioned in the second region R2, the movement time is shortened by moving at a speed equal to or lower than the speed V2 (a speed greater than the speed V1), while the probe 30 moving in the second region R2 is There is no possibility that the probe 30 will collide with the work W even if the vibration increases.

Further, in the embodiment described above, vibration detection by the vibration detection unit 85 is not performed when the probe 30 moves in the second region R2. As a result, for example, even if the probe 30 moves at high speed and the vibration increases, the probe 30 will not be forcibly stopped. Therefore, the movement time of the probe 30 moving in the second region R2 is shortened, and the measurement efficiency is improved.

In the above description, the probe 30 performs scanning measurement while contacting the workpiece W, but the present invention is not limited to this. For example, the probe 30 may measure the workpiece W in a non-contact state.

Further, in the above description, the moving mechanism 20 has a portal structure as shown in FIG. 1, but it is not limited to this. The moving mechanism 20 may have another structure as long as the probe 30 can be moved.

Although the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments, and various modifications and changes are possible within the scope of the gist thereof. be. For example, specific embodiments of device distribution/integration are not limited to the above-described embodiments. can be done. In addition, new embodiments resulting from arbitrary combinations of multiple embodiments are also included in the embodiments of the present invention. The effect of the new embodiment caused by the combination has the effect of the original embodiment.

1 three-dimensional measuring device 20 moving mechanism 30 probe 40 imaging unit 41 first imaging unit 42 second imaging unit 80 control unit 82 position detection unit 83 area determination unit 84 movement control unit 85 vibration detection unit G1 first captured image G2 second Captured image R1 First area R2 Second area W Work

Claims (9)

a probe for measuring a workpiece in a non-contact state ;
a moving mechanism for moving the probe;
an imaging unit that captures a measurement space including the workpiece and generates a captured image;
Based on the captured image, in the measurement space, a first region in which the maximum movable speed of the probe by the moving mechanism is a first speed, and a second region in which the maximum movable speed of the probe is higher than the first speed. a region determination unit that determines a second region that is a speed and is further away from the work than the first region;
When the position of the probe is included in the first region, the probe is moved at a speed equal to or lower than the first speed, and when the position of the probe is included in the second region, the second a control unit that moves the probe at a speed equal to or less than two speeds;
with
The control unit
executing detection processing for detecting whether or not the magnitude of vibration of the probe during movement is greater than a predetermined value for stopping the probe when the position of the probe is included in the first region;
A three-dimensional measuring apparatus that does not execute the detection process when the position of the probe is included in the second area. a probe for measuring a workpiece;
a moving mechanism for moving the probe;
an imaging unit that captures a measurement space including the workpiece and generates a captured image;
Based on the captured image, in the measurement space, a first region in which the maximum movable speed of the probe by the moving mechanism is a first speed, and a second region in which the maximum movable speed of the probe is higher than the first speed. a region determination unit that determines a second region that is a speed and is further away from the work than the first region;
When the position of the probe is included in the first region, the probe is moved at a speed equal to or lower than the first speed, and when the position of the probe is included in the second region, the second a control unit that moves the probe at a speed equal to or less than two speeds;
with
The control unit
executing detection processing for detecting whether or not the magnitude of vibration of the probe during movement is greater than a predetermined value for stopping the probe when the position of the probe is included in the first region;
not executing the detection process when the position of the probe is included in the second region;
The area determination unit sets the boundary position between the first area and the second area while the probe approaches the work to be further away from the work than the boundary position while the probe leaves the work. A three-dimensional measuring device that determines a position . When the position of the probe is included in the second region, the control unit moves the probe at the second speed and does not perform the detection process.
The three-dimensional measuring device according to claim 1 or 2 . The area determination unit determines the inside of a position at a predetermined distance from the surface of the work as the first area, and determines the outside of the position at a predetermined distance from the surface of the work as the second area.
The three-dimensional measuring device according to any one of claims 1 to 3 . The area determination unit determines the inside of a rectangular parallelepiped containing the workpiece as the first area, and determines the outside of the rectangular parallelepiped as the second area.
The three-dimensional measuring device according to any one of claims 1 to 4 . The region determination unit determines a plurality of the first regions,
The three-dimensional measuring device according to any one of claims 1 to 5 . The imaging unit is
a first imaging unit that generates a first captured image by capturing an image of the measurement space from above;
a second imaging unit configured to generate a second captured image by capturing an image of the measurement space from the side;
has
The region determination unit determines the first region and the second region based on the first captured image and the second captured image,
The three-dimensional measuring device according to any one of claims 1 to 6 . a step of capturing a measurement space including a workpiece to be measured in a non-contact state by a probe of a three-dimensional measuring device to generate a captured image;
Based on the captured image, in the measurement space, a first region in which the maximum movable speed of the probe by a moving mechanism is a first speed, and a second speed in which the maximum movable speed of the probe is higher than the first speed. and a step of determining a second area farther from the workpiece than the first area;
When the position of the probe is included in the first region, the probe is moved at a speed equal to or lower than the first speed, and when the position of the probe is included in the second region, the second moving the probe at no more than two speeds;
executing a detection process for detecting whether the magnitude of vibration of the probe during movement is greater than a predetermined value for stopping the probe when the position of the probe is included in the first region;
a step of not executing the detection process when the position of the probe is included in the second area;
A movement control method comprising: capturing a measurement space including a workpiece to be measured by a probe of a three-dimensional measuring device to generate a captured image;
Based on the captured image, in the measurement space, a first region in which the maximum movable speed of the probe by a moving mechanism is a first speed, and a second speed in which the maximum movable speed of the probe is higher than the first speed. and a step of determining a second area farther from the workpiece than the first area;
When the position of the probe is included in the first region, the probe is moved at a speed equal to or lower than the first speed, and when the position of the probe is included in the second region, the second moving the probe at no more than two speeds;
executing a detection process for detecting whether the magnitude of vibration of the probe during movement is greater than a predetermined value for stopping the probe when the position of the probe is included in the first region;
a step of not executing the detection process when the position of the probe is included in the second area;
with
In the step of determining the first area and the second area, a boundary position between the first area and the second area while the probe approaches the work is defined as the boundary while the probe moves away from the work. A movement control method that determines a position farther from the workpiece than the position.

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