JP7198738B2 - sensor holder - Google Patents

Description

TECHNICAL FIELD The present invention relates to a sensor holder that brings a sensing surface of a sensor into close contact with a surface to be measured.

In a production factory, in an inspection process for inspecting the presence or absence of anomalies in products before shipment, there are cases in which the presence or absence of anomalies is determined by measuring the vibration of a product under trial operation. A vibration sensor that measures vibration by bringing a flat sensing surface into close contact with the surface to be measured is used for such vibration measurement. For example, Patent Literature 1 discloses a technique of supporting a vibration sensor via an elastic body and pressing the sensing surface of the vibration sensor against the surface to be measured so that the sensing surface is brought into close contact with the surface to be measured.

JP-A-8-201159

However, in the method of Patent Document 1, when the sensing surface is pressed against the surface to be measured, the elastic body is compressed and elastically deformed. Therefore, when the compressed portion is formed in a biased manner, the restoring force of the elastic body acts biasedly on the sensing surface, and the sensor may not be properly arranged on the measurement target surface. Such problems are not limited to sensors that detect vibration, but are common to sensors that have a sensing surface in close contact with the surface to be measured.

SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and an object of the present invention is to provide a sensor holder capable of appropriately arranging a sensor with respect to a surface to be measured.

A sensor holder for solving the above-described problems is a sensor holder that brings a sensing surface of a sensor into close contact with a surface to be measured, and includes a sensor holding portion that holds the sensor, and the sensor holding portion that is tilted about a first direction. a link mechanism that freely supports the sensor holder and tiltably supports the sensor holder about a second direction that is different from the first direction.

According to the above configuration, the sensor holding portion is tiltably supported with the first direction as an axis and the second direction as an axis, so that the sensor held by the sensor holding portion is brought into contact with the measurement target surface. The sensor can be tilted so that it follows the surface to be measured when brought into contact. As a result, the sensor can be appropriately arranged with respect to the surface to be measured.

In the sensor holder configured as described above, the first direction and the second direction are preferably orthogonal to each other. According to the above configuration, since the first direction and the second direction are perpendicular to each other, the attitude of the sensor holding portion embodied by the inclination about the first direction and the inclination about the second direction can be changed. It can increase the degree of freedom. As a result, the sensor can be arranged more appropriately with respect to the surface to be measured.

In the sensor holder configured as described above, the link mechanism includes a first link mechanism that is connected to the sensor holding portion and supports the sensor holding portion so as to be tiltable about the first direction, and is connected to the first link mechanism. and a second link mechanism that tiltably supports the sensor holding portion about the second direction via the first link mechanism.

According to the above configuration, the mechanism for tilting the sensor holder about the first direction and the mechanism for tilting the sensor holder about the second direction are separate mechanisms. degree of freedom can be increased. Thereby, for example, the degree of freedom regarding mechanical strength in each link mechanism can be improved.

In the sensor holder configured as described above, the first link mechanism includes the sensor holding portion as a shortest link, a pair of first links having tip end portions connected to the sensor holding portion as a swing link, and the pair of first links. and the second link mechanism is a pair of second levers having a shortest link and a distal end connected to the joint. It is preferable that the link is a rocking link and the base portion to which the base end portions of the pair of second links are connected is a stationary link.

By implementing the first link mechanism with a dual lever mechanism as in the above configuration, the tilt axis of the sensor held by the sensor holder is arranged at a position close to the sensor by the first link mechanism when the sensor is tilted. be able to. In addition, since the second link mechanism is implemented by the dual lever mechanism, the tilt axis when the sensor is tilted by the second link mechanism can be arranged at a position close to the sensor. As a result, the amount of swinging of the swing link is smaller than the amount of tilting of the sensor, so that the displacement of the sensor due to the tilting is reduced in the first direction and the second direction. As a result, it is possible to improve the accuracy of the contact position between the surface to be measured and the sensor.

In the sensor holder configured as described above, when the pair of first links is the first swing link portion and the pair of second links is the second swing link portion, the first link mechanism includes the sensor holding portion and It has a pair of said first rocking link parts arranged oppositely in said first direction so as to sandwich each of said joint parts, and said second link mechanism sandwiches each of said joint part and said base part. It is preferable to have a pair of said 2nd rocking|swiveling link parts opposingly arranged by said 2nd direction so that it may carry out.

According to the above configuration, by increasing the mechanical strength of the first link mechanism, it is possible to reduce the mechanical load acting on each first link when the sensor holding portion is tilted, and the measurement target surface The force associated with the inclination of the sensor holding portion following the angle is easily transmitted to the second link mechanism. In addition, by increasing the mechanical strength of the second link mechanism, it is possible to reduce the mechanical load acting on each second link when the sensor holding portion is tilted.

In the sensor holder configured as described above, each of the sensor holding portion, the joint portion, and the base portion has a wiring through-hole in which a wire connected to the sensor held by the sensor holding portion is arranged. The wiring through hole of the sensor holding portion and the wiring through hole of the joint portion are arranged to face each other, and the wiring through hole of the joint portion and the wiring through hole of the base portion are arranged to face each other. Good.

According to the above configuration, it is possible to increase the convenience of attaching the sensor and protect the wiring connected to the sensor, thereby reducing troubles during inspection.

FIG. 4 is a diagram showing the schematic configuration of one embodiment of the sensor holder, and is a perspective view of the sensor holder in the standby state as seen from the −Z direction. FIG. 10 is a perspective view of the sensor holder viewed from the +Z direction in the standby state of the sensor holder; - An exploded perspective view of the sensor holder viewed from the Z direction. - A side view showing the standby state of the sensor holder as seen from the X direction. - A side view showing a standby state of the sensor holder as seen from the Y direction. - A side view showing the sensor holder viewed from the X direction, (a) a diagram showing a state in which the sensor holder is tilted with respect to the Y direction, and (b) when the sensor holder is tilted with respect to the Y direction. The figure which shows the vicinity of the sensing surface of. - A side view showing the sensor holder as seen from the Y direction, (a) a diagram showing a state in which the sensor holder is tilted with respect to the X direction, and (b) when the sensor holder is tilted with respect to the X direction. The figure which shows the vicinity of the sensing surface of.

One embodiment of the sensor holder will be described with reference to FIGS. 1-7.
As shown in FIG. 1, the sensor holder 10 includes a sensor holding portion 12 that holds the sensor 11, and a sensor holding portion 12 that supports the sensor holding portion 12 so that it can be tilted about the X direction, which is the first direction, and a second direction perpendicular to the X direction. and a link mechanism 13 that supports the sensor holding portion 12 so as to be tiltable about the Y direction, which is two directions. The link mechanism 13 is composed of a first link mechanism 15 and a second link mechanism 16 that are connected via a joint portion 14 . The first link mechanism 15 supports the sensor holder 12 so as to be tiltable about the X direction. The second link mechanism 16 supports the sensor holder 12 tiltably about the Y direction by supporting the first link mechanism 15 tiltably about the Y direction. The sensor holder 10 has a moving mechanism 17 that movably supports the link mechanism 13 in the Z direction perpendicular to the X and Y directions. The Z direction is the direction in which the sensor holder 12 approaches or separates from the measurement target surface 18 of the measurement target. The +Z direction is an approaching direction that brings the sensor holder 12 closer to the surface 18 to be measured, and the -Z direction is a separation direction that separates the sensor holder 12 from the surface 18 to be measured. The sensor holder 10 measures the sensor 11 by moving the link mechanism 13 in the +Z direction with the movement mechanism 17 when the sensor 11 held by the sensor holder 12 is arranged in the -Z direction of the measurement target surface 18. It is brought into close contact with the target surface 18 .

In FIG. 1, +X and -X indicate a pair of opposing directions in the X direction, and +Y and -Y indicate a pair of opposing directions in the Y direction. X, Y, and Z shown in FIGS. 2-7 correspond to X, Y, and Z shown in FIG. 1 to 5, the sensor holder 10 is assumed to be in a standby state.

(sensor 11)
As shown in FIG. 2, the sensor 11 is, for example, a vibration sensor that detects vibrations of the surface 18 to be measured. The sensor 11 has a sensor base 20 , a sensor main body 21 and a connector 22 . The sensor base 20 has a sensing surface 23 which is an end surface located in the +Z direction and contacts the surface 18 to be measured. The sensor base 20 incorporates a piezo element (not shown) that applies pressure according to the vibration of the measurement target surface 18 when the vibration of the measurement target surface 18 is transmitted through the sensing surface 23 . The sensor main body 21 is positioned in the −Z direction with respect to the sensor base 20 . The sensor main body 21 is a part held by the sensor holding portion 12 . The sensor main body 21 extends in the Z direction, and its outer peripheral surface is set as a holding surface held by the sensor holding portion 12 . The connector 22 is positioned in the −Z direction with respect to the sensor main body 21 . The connector 22 extends in the Z direction and has a smaller diameter than the sensor main body 21 . Electrical signal lines (not shown) for transmitting electrical signals from the sensor 11 are routed in the internal spaces of the sensor main body 21 and the connector 22 .

(Sensor holding portion 12)
The sensor holder 12 will be described with reference to FIGS. 1 to 4. FIG. As shown in FIGS. 1 to 4, the sensor holding portion 12 includes a sensor attachment portion 30 to which the sensor 11 is attached, and a first tip connection portion to which the tip portion of the first link 52 constituting the first link mechanism 15 is connected. 31. The sensor mounting portion 30 and the first tip connecting portion 31 are integrally connected.

As shown in FIG. 2, the sensor mounting portion 30 is a clamping mechanism with a slot to which the sensor 11 is fixed by clamping the sensor body 21 of the sensor 11 . The sensor mounting portion 30 is formed in a substantially cylindrical shape as a whole. The sensor mounting portion 30 has a mounting hole 32 extending in the Z direction around the central axis C of the sensor holder 10 extending in the Z direction. The sensor mounting portion 30 has an insertion hole 39 and a female screw portion 40 (see FIG. 4) that are arranged opposite to each other with a gap 36 interposed therebetween.

As shown in FIGS. 2 and 3, the first tip connecting portion 31 extends in the Z direction around the central axis C of the sensor holder 10 at the −Z direction position of the mounting hole 32 formed in the sensor mounting portion 30. A wiring through hole 45 is formed (see FIG. 3). The wiring through-hole 45 forms a space in the first tip connecting portion 31 in which an electric signal line for transmitting an electric signal from the sensor 11 is routed.

As shown in FIGS. 2 to 4, the first tip connecting portion 31 has a pair of first tip support holes 48 extending along the X direction and having openings in a +X direction end face 46 and a −X direction end face 47 . have. The pair of first tip support holes 48 are formed at positions symmetrical with respect to the central axis C of the sensor holder 10 when the sensor holder 10 is viewed from the -X direction in FIG. The pair of first tip support holes 48 are formed with a center-to-center distance of a first tip pitch P1A. The first tip connecting portion 31 supports the tip portion of the first link 52 that constitutes the first link mechanism 15 .

In the mounting process of the sensor 11, the connector 22 and the sensor main body 21 of the sensor 11 are inserted into the mounting hole 32 of the sensor holding portion 12 from the +Z direction. The sensor main body 21 is clamped by tightening the clamp bolt. Thereby, the sensor 11 is attached to the sensor holding portion 12 . The sensor 11 is held in the sensor holder 10 in the standby state so that the normal direction passing through the center position 23C of the sensing surface 23 overlaps the central axis C of the sensor holder 10 .

(First link mechanism 15)
The first link mechanism 15 will be described with reference to FIGS. The first link mechanism 15 is a link mechanism including the first tip connecting portion 31 of the sensor holding portion 12 . The first link mechanism 15 has a pair of first swing link portions 50 arranged opposite in the X direction, and a first base end connecting portion 51 located in the -Z direction with respect to the first distal end connecting portion 31. there is

As shown in FIGS. 1 and 3, the pair of first swing link portions 50 sandwiches the first distal end connecting portion 31 and the first proximal end connecting portion 51 in the X direction. Each of the pair of first swing link portions 50 is composed of a pair of first links 52 .

As shown in FIG. 3 , the first link 52 is connected to the first tip connecting portion 31 via the first tip rotation shaft portion 53 at the first tip portion 52A, which is the end portion on the +Z direction side. The first tip rotation shaft portion 53 is a rotation shaft portion extending in the X direction, and is rotatably supported in a first tip rotation shaft hole (not shown) formed in the first tip portion 52A. A portion 53A of the first tip rotation shaft portion 53 protruding from the first link 52 toward the first tip connection portion 31 is supported in the first tip support hole 48 of the first tip connection portion 31 .

As shown in FIG. 3, the first link 52 is connected to the first base end connecting portion 51 via the first base end rotating shaft portion 54 at the first base end portion 52B, which is the end portion on the -Z direction side. ing. The first proximal rotation shaft portion 54 is a rotation shaft portion extending in the X direction, and is rotatably supported in a first proximal rotation shaft hole (not shown) formed in the first proximal end portion 52B of the first link 52. It is A portion 54</b>A of the first proximal rotation shaft portion 54 protruding from the first link 52 toward the first proximal connecting portion 51 is supported by the first proximal support hole 63 of the first proximal connecting portion 51 . A first link length L1, which is the distance between the rotation center 56A of the first tip end portion 52A and the rotation center 56B of the first base end portion 52B, is, for example, greater than the first tip pitch P1A, The length is set to be smaller than the proximal end pitch P1B.

As shown in FIG. 3 , the first base end connecting portion 51 constitutes the joint portion 14 . The joint portion 14 includes a first proximal connecting portion 51 and a second distal connecting portion 65 ( Details will be described later). The joint portion 14 is a through hole penetrating the first proximal end connecting portion 51 and the second distal end connecting portion 65 at a position in the -Z direction with respect to the wiring through hole 45 formed in the first distal end connecting portion 31. A wiring through-hole 60 extending in the Z direction around the central axis C of the sensor holder 10 is formed. The wiring through-hole 60 is preferably a hole larger than the wiring through-hole 45 . With such a configuration, the degree of freedom regarding the wiring route of the electric signal line inside the first link mechanism 15 is increased, so that the mechanical load on the electric signal line due to the operation of the link mechanism 13 can be suppressed. .

As shown in FIGS. 3 and 4, the first base end connecting portion 51 has openings in a +X direction end face 61 and a -X direction end face 62, and extends along the X direction. It has holes 63 . The pair of first base end support holes 63 are formed at positions symmetrical with respect to the central axis C of the sensor holder 10 when the sensor holder 10 is viewed from the -X direction in FIG. The pair of first proximal end support holes 63 are formed at a first proximal end pitch P1B in which the center-to-center distance is greater than the first distal end pitch P1A. A first base end rotary shaft portion 54 rotatably supported by a first base end portion 52B of a first link 52 has a portion 54A protruding from the first link 52 toward a first base end connecting portion 51 as a first base end portion 52B. It is supported by the first proximal support hole 63 of the proximal connecting portion 51 .

As shown in FIG. 4, the first tip pitch P1A and the first base pitch P1B correspond to the rotation center 56A of the first tip portion 52A and the first tip pitch P1B in plan view from the -X direction of the sensor holder 10 in the standby state. A first imaginary intersection point Pi1, which is an intersection point of a first imaginary line 64 connecting the rotation center 56B of the base end portion 52B, is set so as to overlap the sensing surface 23 . Note that “overlapping” here does not mean that the first imaginary intersection point Pi1 is positioned on the surface of the sensing surface 23, but simply means that they overlap in plan view from the −X direction.

As shown in FIG. 4 , in the first link mechanism 15 having the above-described configuration, in a plan view of the sensor holder 10 from the X direction, the first end connecting portion 31 of the sensor holding portion 12 is the shortest link, and the pair of first links 52 is a rocking link, and the first base end connecting portion 51 of the joint portion 14 is a stationary link, which is a four-link mechanism. In the first link mechanism 15, the first link 52 swings according to the inclination of the sensor holding portion 12 with respect to the Y direction.

(Second link mechanism 16)
The second link mechanism 16 will be described with reference to FIGS. The second link mechanism 16 is a link mechanism that supports the first link mechanism 15 . The second link mechanism 16 includes a second tip connecting portion 65 that constitutes the joint portion 14, a pair of second swing link portions 70 that are arranged to face each other in the Y direction, and a -Z direction with respect to the second tip connecting portion 65. and a base portion 71 positioned thereon.

As shown in FIG. 3 , the wiring through-hole 60 described above is formed in the second tip connecting portion 65 that constitutes the joint portion 14 .
As shown in FIGS. 3 and 5, the second tip connecting portion 65 has a pair of second tip support holes 68 extending along the Y direction and having openings in a +Y direction end face 66 and a −Y direction end face 67 . have. The pair of second tip support holes 68 are formed at positions symmetrical with respect to the central axis C of the sensor holder 10 when the sensor holder 10 is viewed from the -Y direction in FIG. The pair of second tip support holes 68 are formed with a center-to-center distance of a second tip pitch P2A. The second tip pitch P2A is, for example, larger than the first tip pitch P1A and smaller than the first base pitch P1B. The second tip connecting portion 65 supports a second tip portion 72</b>A that is the +Z direction side end portion of the second link 72 that constitutes the second swing link portion 70 .

As shown in FIGS. 1 and 3, the pair of second swing link portions 70 sandwich the second distal end connecting portion 65 of the joint portion 14 and the second proximal end connecting portion 71B of the base portion 71 in the Y direction. ing. Each of the pair of second swing link portions 70 is composed of a pair of second links 72 .

As shown in FIG. 3, the second link 72 is connected to the second tip connecting portion 65 via the second tip rotation shaft portion 73 at the second tip portion 72A. The second tip rotation shaft portion 73 is a rotation shaft portion extending in the Y direction, and is rotatably supported in a second tip rotation shaft hole (not shown) formed in the second tip portion 72A. A portion 73A of the second tip rotation shaft portion 73 protruding from the second link 72 toward the second tip connection portion 65 is supported in the second tip support hole 68 of the second tip connection portion 65 .

As shown in FIG. 3, the second link 72 connects the second proximal end connecting portion of the base portion 71 via the second proximal rotating shaft portion 74 at the second proximal end portion 72B, which is the end portion in the -Z direction. 71B. The second base end rotating shaft portion 74 is a rotating shaft portion extending in the Y direction, and is rotatably supported in a second base end rotating shaft hole (not shown) formed in the second base end portion 72B. A portion 74A of the second base end rotation shaft portion 74 protruding from the second link 72 toward the second base end connection portion 71B is supported by the second base end connection portion 71B.

As shown in FIG. 3 , the base portion 71 is a member that serves as a base when the link mechanism 13 is connected to the moving mechanism 17 . The base portion 71 is formed with a wiring through hole 75 which is a circular hole extending in the Z direction about the central axis C of the sensor holder 10 in the −Z direction with respect to the wiring through hole 60 formed in the joint portion 14 . there is The wiring through-hole 75 has a hole diameter substantially equal to that of the wiring through-hole 60 .

As shown in FIGS. 3 and 5, the base portion 71 has a pair of second base end support holes 78 extending along the Y direction and having openings in a +Y direction end face 76 and a −Y direction end face 77 . It has it in the 2 base end connection part 71B. The pair of second tip support holes 68 are formed at positions symmetrical with respect to the central axis C of the sensor holder 10 when the sensor holder 10 is viewed from the -Y direction in FIG. The pair of second proximal end support holes 78 are formed with a center-to-center distance of a second proximal end pitch P2B. The second proximal pitch P2B is, for example, larger than the second distal pitch P2A and smaller than the first proximal pitch P1B. The second base end rotary shaft portion 74 rotatably supported by the second base end portion 72B has a portion 74A protruding from the second link 72 toward the second base end connection portion 71B. is supported in the second base end support hole 78 of the . A second link length L2, which is the distance between the rotation center 79A of the second distal end portion 72A and the rotation center 79B of the second proximal end portion 72B, is, for example, greater than the second distal end pitch P2A, The length is set to be smaller than the proximal end pitch P2B.

As shown in FIG. 5, the second tip pitch P2A and the second base pitch P2B correspond to the rotation center 79A of the second tip portion 72A and the second tip pitch P2B in plan view from the -Y direction of the sensor holder 10 in the standby state. A second imaginary intersection point Pi<b>2 , which is an intersection point of a second imaginary line 80 connecting the center of rotation 79</b>B of the base end portion 72</b>B, is set so as to overlap the sensing surface 23 . Note that “overlapping” here does not mean that the second imaginary intersection point Pi2 is positioned on the surface of the sensing surface 23, but simply means that they overlap in plan view from the −Y direction.

As shown in FIG. 5, in the second link mechanism 16 configured as described above, in a plan view of the sensor holder 10 from the -Y direction, the second end connecting portion 65 of the joint portion 14 is the shortest link, and the pair of second links It is a double lever mechanism which is a four-link mechanism in which 72 is a rocking link and the second base end connecting portion 71B is a stationary link. In the second link mechanism 16, the second link 72 swings via the first link mechanism 15 according to the inclination of the sensor holding portion 12 with respect to the X direction.

An operation mode of the sensor holder 10 described above will be described with reference to FIGS. 6 and 7. FIG.
The sensor holder 10 has the sensor 11 arranged in the −Z direction with respect to the measurement target surface 18 and is moved in the +Z direction by the moving mechanism 17 . At this time, the sensor holder 10 is in the standby state shown in FIG. Then, when the sensing surface 23 contacts the surface 18 to be measured, the link mechanism 13 operates when the sensing surface 23 is inclined along the inclination of the surface 18 to be measured.

As shown in FIG. 6A, when the surface 18 to be measured is inclined by an angle θy with respect to the Y direction, the first link mechanism 15 is arranged so that the sensing surface 23 follows the inclination of the surface 18 to be measured. The first link 52 swings to incline the sensor holder 10 by an angle θy with respect to the Y direction.

As shown in FIG. 6B, at this time, the center position 23C of the sensing surface 23 slightly moves to a position P11 on the +Y direction side with respect to the center axis C of the sensor holder 10. As shown in FIG. On the other hand, for example, when the sensing surface 23 is tilted by an angle θy about the middle point 56C (see FIG. 4) of the rotation centers 56A of the pair of first tip portions 52A, the center position 23C of the sensing surface 23 is shifted to the middle point 56C. is a position on an arc 56E (see FIG. 4) centered on and moves to position P12 on the +Y direction side of position P11. That is, the first link mechanism 15 can reduce the amount of deviation of the central position 23C with respect to the central axis C when the sensing surface 23 is tilted by the angle θy with respect to the Y direction.

As shown in FIG. 7A, when the surface 18 to be measured is inclined by an angle θx with respect to the X direction, the second link mechanism 16 is arranged such that the sensing surface 23 follows the inclination of the surface 18 to be measured. The second link 72 swings to incline the sensor holder 10 by an angle θx with respect to the X direction.

As shown in FIG. 7B, at this time, the center position 23C of the sensing surface 23 moves slightly to the position P21 in the -X direction with respect to the center axis C of the sensor holder 10. As shown in FIG. On the other hand, for example, when the sensing surface 23 is tilted by an angle θx around the middle point 79C (see FIG. 5) of the rotation centers 79A of the pair of second tip portions 72A, the center position 23C of the sensing surface 23 is the middle point 79C. , and moves to a position P22 having a large amount of deviation in the +X direction with respect to the central axis C. As shown in FIG. That is, the second link mechanism 16 can reduce the deviation amount of the central position 23C with respect to the central axis C when the sensing surface 23 is tilted by the angle θx with respect to the X direction.

The action and effect of this embodiment will be described.
(1) The sensor holder 10 supports the sensor holder 12 so as to be tiltable with the X direction as the axis and the Y direction as the axis. Therefore, when the sensor 11 held by the sensor holding portion 12 is brought into contact with the surface 18 to be measured, the sensor 11 can be tilted so as to follow the surface 18 to be measured. As a result, the sensor 11 can be appropriately arranged with respect to the surface 18 to be measured.

For example, in a configuration in which the sensor 11 is supported via an elastic body, when the elastic body is elastically deformed according to the inclination of the measurement target surface 18 , a restoring force of the elastic body acts on the sensing surface 23 . At this time, if the compressed portion of the elastic body is biased, the restoring force of the elastic body acts biasedly on the sensing surface 23, and the measurement error of the sensor 11 increases. Such measurement errors are particularly large in vibration sensors using piezoelectric elements. In this regard, in the sensor holder 10 , the link mechanism 13 operates according to the inclination of the sensing surface 23 . Therefore, the above-described elastic deformation of the elastic body does not occur, and unnecessary force does not act on the sensing surface 23 . Thus, in the sensor holder 10, the measurement error can be reduced by properly arranging the sensor 11. FIG.

(2) The sensor holder 10 supports the sensor holder 12 so as to be tiltable about the X direction and the Y direction that are orthogonal to each other. As a result, the degree of freedom regarding the inclination of the sensor holding portion 12 can be increased. As a result, the sensor 11 can be arranged more appropriately with respect to the surface 18 to be measured.

(3) The link mechanism 13 is composed of the first link mechanism 15 and the second link mechanism 16 . That is, the link mechanism 13 is composed of separate mechanisms for tilting the sensor holding portion 12 about the X direction and for tilting the sensor holding portion 12 about the Y direction. Thereby, the degree of freedom of the structure of the first and second link mechanisms 15 and 16 can be increased. As a result, for example, the degree of freedom regarding mechanical strength in each of the first and second link mechanisms 15 and 16 can be improved.

(4) Since the first link mechanism 15 is a double-lever mechanism with the first base end connecting portion 51 as the shortest link, the tilt axis when the sensor holding portion 12 tilts in the Y direction is aligned with the sensing surface 23. can be placed in close proximity. As a result, the amount of inclination of the first tip connecting portion 31 , that is, the sensor holding portion 12 can be increased with respect to the amount of swinging of the first link 52 . In other words, the swing amount of the first link 52 can be made smaller than the tilt amount of the sensor holding portion 12 . As a result, even if the sensing surface 23 is inclined with respect to the Y direction when it is brought into close contact with the surface 18 to be measured, the amount of deviation of the sensing surface 23 in the Y direction can be reduced.

(5) Since the second link mechanism 16 is a double-lever mechanism with the joint portion 14 as the shortest link, the tilt axis when the sensor holding portion 12 tilts in the X direction is arranged at a position close to the sensing surface 23. can do. This makes it possible to increase the amount of inclination of the second end connecting portion 65 , that is, the amount of inclination of the first link mechanism 15 with respect to the amount of swing of the second link 72 . In other words, the swing amount of the second link 72 can be made smaller than the tilt amount of the first link mechanism 15 (sensor holding portion 12). As a result, even if the sensing surface 23 is tilted in the Y direction when it is brought into close contact with the surface 18 to be measured, the amount of deviation of the sensing surface 23 in the X direction can be reduced.

(6) Due to the above (4) and (5), the sensor holder 10 can arrange the sensor 11 with higher accuracy. As a mechanism for holding the sensor 11 so as to be tiltable about the X-direction tilt axis and the Y-direction tilt axis, for example, a gimbal mechanism can be used. However, if the X-direction tilt axis and the Y-direction tilt axis are set near the sensing surface 23 in the gimbal mechanism, the peripheral structure of the sensor becomes complicated and large. Therefore, it is likely to interfere with the surrounding members of the measurement target surface 18 , making it difficult to measure the narrow measurement target surface 18 . In this regard, in the sensor holder 10 having the structure described above, since the peripheral structure of the sensor 11 is simplified, interference with peripheral members of the measurement target surface 18 is less likely to occur. As a result, the degree of freedom in setting the measurement target surface 18 can be increased.

(7) The first link mechanism 15 has the first rocking link portion 50 arranged opposite to the sensor holding portion 12 and the joint portion 14 in the X direction so as to sandwich the joint portion 14 therebetween. With such a configuration, the mechanical strength of the first link mechanism 15 is increased, so that the mechanical load acting on each first link 52 when the sensing surface 23 is tilted can be reduced.

(8) Since the first link mechanism 15 has the pair of first swing link portions 50, the rigidity of the first link mechanism 15 is increased. Therefore, the force associated with the inclination of the sensing surface 23 following the measurement target surface 18 is easily transmitted to the second link mechanism 16 via the first link mechanism 15, and the force acts as a force to operate the second link mechanism 16. easier to do.

For example, in a configuration in which the sensor holding portion 12 is supported in a cantilever manner by one of the pair of first swing link portions 50, when the sensor holding portion 12 is tilted so as to follow the surface 18 to be measured, A force associated with the inclination acts as a moment on the connecting portion between the first link 52 and the sensor holding portion 12 . Therefore, it is difficult for the force associated with the inclination to act as the force for operating the second link mechanism 16 . In this regard, in the sensor holder 10 , the sensor holding portion 12 is sandwiched between the pair of first swing link portions 50 . Therefore, the force associated with the inclination of the sensor holding portion 12 about the Y direction is easily transmitted to the second link mechanism 16 via the first link mechanism 15 . As a result, the force associated with the inclination tends to act as the force for operating the second link mechanism 16 .

(9) Similarly, the second link mechanism 16 is arranged to face each other in the Y direction so as to sandwich the second distal connecting portion 65 of the joint portion 14 and the second proximal connecting portion 71B of the base portion 71 . It has two rocking links 70 . With such a configuration, the mechanical strength of the second link mechanism 16 is increased, so that the mechanical load acting on each second link 72 when the sensing surface 23 is tilted can be reduced.

(10) The sensor holder 10 has wiring through holes 45, 60, 75 extending in the Z direction. With such a configuration, the electric signal line connected to the sensor 11 can be routed in the internal space of the sensor holder 10 . As a result, the electric signal line is protected and troubles during inspection can be reduced.

This embodiment can be implemented with the following modifications. This embodiment and the following modified examples can be implemented in combination with each other within a technically consistent range.
- The sensor holder 10 may have a configuration in which electric signal lines are routed in the external space of the sensor holder 10 .

- The structure of the first link mechanism 15 is not limited to the structure in which the pair of first swing link portions 50 support the sensor holding portion 12 . For example, the first link mechanism 15 may be composed of a pair of first links 52 that support the central portion of the sensor holding portion 12 in the Y direction.

- The 1st link mechanism 15 is not restricted to the double lever mechanism which makes the 1st front-end|tip connection part 31 the shortest link. For example, the first link mechanism 15 may have a configuration in which the first tip pitch P1A is larger than the first base pitch P1B in plan view of the sensor holder 10 in the X direction.

- The configuration of the second link mechanism 16 is not limited to the configuration in which the pair of second swing link portions 70 support the first link mechanism 15 . For example, the second linkage 16 may consist of a pair of second links 72 that support the central portion of the stationary link of the first linkage 15 in the X direction.

- The 2nd link mechanism 16 is not restricted to the double lever mechanism which makes the 2nd tip connection part 65 the shortest link. For example, the second link mechanism 16 may have a configuration in which the second tip pitch P2A is larger than the second base pitch P2B in plan view of the sensor holder 10 in the Y direction.

- It is most preferable that the tilting axis formed by the first link mechanism 15 and the tilting axis formed by the second link mechanism 16 are perpendicular to each other, but they are not limited to being perpendicular to each other.
The sensor 11 is not limited to a vibration sensor, and may be any sensor that performs measurement by bringing the sensing surface 23 into close contact with the measurement target surface 18 .

The sensor holding portion 12 may have a configuration in which the sensor 11 is fixed such that the normal direction passing through the center position 23C of the sensing surface 23 overlaps with the central axis C of the sensor holder 10 . Therefore, the sensor holding part 12 is not limited to a clamp mechanism with a slot, and the sensor 11 may be fixed by a V block, three claws, a power lock, or the like.

C... Central axis 10... Sensor holder 11... Sensor 12... Sensor holding part 13... Link mechanism 14... Joint part 15... First link mechanism 16... Second link mechanism 17... Moving mechanism 18 Surface to be measured 20 Sensor base 21 Sensor body 22 Connector 23 Sensing surface 23C Center position 30 Sensor mounting portion 31 First tip connecting portion 32 Mounting hole 36 Gap 39... Insertion hole 40... Female screw part 45... Wiring through hole 46, 47... End face 48... First tip support hole 50... First rocking link part 51... First base end connecting part , 52... first link, 52A... first distal end portion, 52B... first proximal end portion, 53... first distal end rotary shaft portion, 53A, 54A... portion, 54... first proximal rotary shaft portion, 56A, 56B Center of rotation 56C Middle point 60 Wiring through hole 61, 62 End face 63 First base end support hole 64 First virtual line 65 Second tip connecting portion 66, 67 End surface 68...Second tip support hole 70...Second rocking link part 71...Base part 71B...Second base end connecting part 72...Second link 72A...Second tip part 72B...Second Base end portion 73 Second base end rotation shaft portion 73A, 74A Portion 74 Second base end rotation shaft portion 75 Wiring through hole 76, 77 End surface 78 Second base end support hole , 79A, 79B... rotation center, 79C... middle point, 80... second virtual line.

Claims (6)

A sensor holder that brings the sensing surface of the sensor into close contact with the surface to be measured,
a sensor holder that holds the sensor;
a link mechanism that tiltably supports the sensor holder about a first direction and tiltably supports the sensor holder about a second direction that is different from the first direction. The sensor holder according to claim 1, wherein the first direction and the second direction are orthogonal to each other. The link mechanism is
a first link mechanism that is connected to the sensor holding portion and supports the sensor holding portion so as to be tiltable about the first direction;
3. The second link mechanism according to claim 1 or 2, which is connected to said first link mechanism and supports said sensor holding portion so as to be tiltable about said second direction via said first link mechanism. sensor holder. The first link mechanism is
The sensor holding portion is the shortest link, the pair of first links having distal end portions connected to the sensor holding portion is the swing link, and the joint portion to which the base end portions of the pair of first links are connected is the stationary link. It is a double-lever mechanism that
The second link mechanism is
The joint portion is the shortest link, the pair of second links having the tip end portions connected to the joint portion is the rocking link, and the base portion to which the base end portions of the pair of second links are connected is the stationary link. 4. The sensor holder of claim 3, which is a lever mechanism. When the pair of first links is the first rocking link portion and the pair of second links is the second rocking link portion,
The first link mechanism is
a pair of first swing link portions arranged opposite to each other in the first direction so as to sandwich the sensor holding portion and the joint portion;
The second link mechanism is
5. The sensor holder according to claim 4, further comprising a pair of said second swing link portions facing each other in said second direction so as to sandwich said joint portion and said base portion. each of the sensor holding portion, the joint portion, and the base portion has a wiring through-hole in which a wire connected to the sensor held by the sensor holding portion is arranged;
The wiring through hole of the sensor holding portion and the wiring through hole of the joint portion are arranged to face each other, and the wiring through hole of the joint portion and the wiring through hole of the base portion are arranged to face each other. 6. The sensor holder according to 4 or 5.

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