JP7204610B2 - Method for manufacturing anisotropically conductive sheet - Google Patents

Description

The present invention relates to a method for manufacturing an anisotropically conductive sheet.

2. Description of the Related Art Conventionally, in order to connect electronic devices, a sheet-like press-fit connector (hereinafter referred to as an anisotropic conductive sheet) for connecting fine electrodes has been used. In general, an anisotropically conductive sheet has a plurality of conductive parts and an insulating part that insulates the conductive parts from each other, is arranged between a connection terminal of a first device and a connection terminal of a second device, and electrically connects them. connected to each other. As a method for producing an anisotropically conductive sheet, Patent Document 1 discloses a method for manufacturing an anisotropically conductive sheet. A method of cutting at a predetermined width parallel to the substrate surface and across the metal line is disclosed.

As a combination of the first device and the second device, there is an example in which the first device is a product such as a circuit board or a semiconductor device, and the second device is an inspection electronic device for inspecting the product. The metal terminals (terminal electrodes) of the product are not limited to being placed on a flat surface, but they are placed deep in the recesses of the resin mold body, such as mating type mechanical connectors (male and female connectors, Micro-CN). It may also be a recessed electrode placed in place. In the latter case, the anisotropically conductive sheet that electrically connects the product and the inspection electronic device is required to have protruding electrodes with a height that can reach the recessed electrodes of the product. Patent Document 2 discloses a method for manufacturing an anisotropically conductive sheet having a plurality of projections constituting such projecting electrodes.

JP-A-6-251848 JP 2014-175148 A

In the manufacturing method of Patent Document 2, there is a problem that it is difficult to keep the pitch between the protrusions forming the projecting electrodes constant. Specifically, the pitch between a plurality of protrusions arranged in the plane direction of the main surface (connecting surface) of the anisotropically conductive sheet may gradually deviate from one end of the sheet body to the other end. there were. The problem is that the sheet body is a film laminate in which two different resin films are repeated at a predetermined pitch from one end to the other end. In other words, when the first resin film constitutes the concave portion (flat portion) and the second resin film constitutes the convex portion, if there is variation in the thickness of each resin film, the thickness of each resin film may vary from one end to the other end of the sheet body. , the thickness variation accumulates, causing a pitch deviation between the concave portion and the convex portion.

The present invention provides an anisotropically conductive sheet manufacturing method capable of forming convex portions at desired positions on the main surface of the anisotropically conductive sheet with high accuracy.

[1] Preparing a metal-wire-penetrating sheet comprising an elastomer sheet and a plurality of metal wires penetrating from one side of the elastomer sheet to the other side,
A step A1 of forming a resist layer on at least part of one surface of the metal wire penetrating sheet;
By laser processing the surface layer of the metal wire penetrating sheet on the side where the resist layer is provided, an irradiation portion is formed by excavating the surface layer in a thickness direction in a desired pattern, and the plurality of metal wires are formed in the irradiation portion. A step B1 of exposing a part of
Step C1 of forming one or more recesses corresponding to the desired pattern on the one surface by removing the exposed plurality of metal lines;
By removing the resist layer remaining on the one surface,
comprising the elastomer sheet and a plurality of metal wires penetrating from one surface of the elastomer sheet to the other surface;
A method for manufacturing an anisotropically conductive sheet, comprising a step D1 of obtaining an anisotropically conductive sheet in which the recesses and protrusions other than the recesses are formed on the one surface.
[2] Laser processing the surface layer of the protrusions in the anisotropically conductive sheet obtained in the step D1 to remove the elastomer forming the surface layer and remove the plurality of metal wires contained in the surface layer. The method for producing an anisotropically conductive sheet according to [1], further comprising a step E of protruding the tip portion.
[3] preparing a sheet through which a metal wire penetrates, comprising an elastomer sheet and a plurality of metal wires penetrating from one surface of the elastomer sheet to the other surface;
At least part of the surface layer of one surface of the metal wire-penetrating sheet is laser-processed to remove the elastomer forming the surface layer, and the tips of the plurality of metal wires contained in the surface layer are protruded. a step Z of obtaining a metal wire exposed sheet;
Step A2 of forming a resist layer including the tip of the protruded metal wire on the one surface of the metal wire exposed sheet;
By laser processing the surface layer of the metal wire exposing sheet on the side where the resist layer is provided, an irradiation portion is formed by excavating the surface layer in a thickness direction in a desired pattern, and the plurality of metals are formed on the irradiation portion. exposing a portion of the line B2;
Step C2 of forming one or more recesses corresponding to the desired pattern on the one surface by removing the exposed plurality of metal lines;
By removing the resist layer remaining on the one surface,
comprising the elastomer sheet and a plurality of metal wires penetrating from one surface of the elastomer sheet to the other surface;
An anisotropically conductive sheet in which the recesses and protrusions formed of portions other than the recesses are formed on the one surface, and tip portions of the plurality of metal wires protrude from at least a part of the surface layer of the protrusions. A method for producing an anisotropically conductive sheet, comprising a step D2 of obtaining

According to the method for producing an anisotropically conductive sheet of the present invention, the projections can be arranged at desired positions on the connecting surface of the anisotropically conductive sheet with high accuracy. As a result, an anisotropically conductive sheet that can be stably connected to a device having recessed electrodes is obtained.

3 is a top view showing one surface 1a of a metal wire penetrating sheet 8; FIG. FIG. 2 is a cross-sectional view of the metal wire-penetrating sheet 8 cut along line II-II of FIG. 1 ; 3 is a cross-sectional view of a metal wire-penetrating sheet 8 provided with a resist layer 3. FIG. FIG. 3 is a cross-sectional view of a metal wire-penetrating sheet 8 on which an irradiation portion S is formed; 1 is a cross-sectional view of an anisotropically conductive sheet 10 in which concave portions 4 and convex portions 5 are formed and a resist layer 3 remains on one surface 1a side. FIG. 1 is a cross-sectional view of an anisotropically conductive sheet 10 obtained by the manufacturing method of the first embodiment of the present invention; FIG. 4 is a cross-sectional view of a metal wire exposed sheet 9. FIG. 3 is a cross-sectional view of a metal wire exposing sheet 9 provided with a resist layer 3. FIG. FIG. 3 is a cross-sectional view of a metal wire exposure sheet 9 on which an irradiation portion S is formed; FIG. 2 is a cross-sectional view of an anisotropically conductive sheet 20 having concave portions 4 and convex portions 5 formed thereon and a resist layer 3 remaining on one surface 1a side. FIG. 3 is a cross-sectional view of an anisotropically conductive sheet 20 obtained by the manufacturing method of the second embodiment of the present invention;

<<Method for producing anisotropically conductive sheet; first aspect>>
A first aspect of the present invention is a method for producing an anisotropically conductive sheet, including at least the following Step A1, Step B1, Step C1 and Step D1.
Step A1 is a step of forming a resist layer on at least part of one surface of the metal wire-penetrating sheet prepared.
In the step B1, the surface layer of the metal wire-penetrating sheet on which the resist layer is provided is laser-processed to form an irradiation portion by excavating the surface layer in a thickness direction in a desired pattern. This is a step of exposing a portion of the plurality of metal lines.
Step C1 is a step of forming one or more recesses corresponding to the desired pattern on the one surface by removing the exposed plurality of metal lines.
Step D1 is a step of obtaining an anisotropically conductive sheet by removing the resist layer remaining on the one surface.

The anisotropically conductive sheet obtained in step D1 includes the elastomer sheet and a plurality of metal wires passing through the elastomer sheet from one surface to the other surface, and the one surface has the recesses. and a convex portion formed of a portion other than the concave portion. A desired pattern is formed by the concave portion and the convex portion. The convex portion has one or more of the metal wires passing through the elastomer sheet in the thickness direction.
An example of an embodiment will be described below with reference to the drawings.

<Step A1>
[Metal wire penetrating sheet]
The metal wire-penetrating sheet used in this step comprises an elastomer sheet and a plurality of metal wires penetrating from one side of the elastomer sheet to the other side. An example of such a metal wire penetrating sheet is an anisotropically conductive sheet having at least one flat surface, which is manufactured by a conventional method such as that disclosed in Patent Document 1.

The sheet 8 pierced with metal wires illustrated in FIGS. 1 and 2 includes an elastomer sheet 1 and a plurality of metal wires 2 penetrating from one surface 1a of the sheet 1 toward the other surface 1b.
FIG. 1 shows one side of the metal wire-penetrating sheet 8 . The thickness direction of the metal wire penetrating sheet 8 is the depth direction of the paper perpendicular to the X direction and the Y direction. The other main surface of the metal wire-penetrating sheet 8 is the surface opposite to the one surface and has the same configuration as the one surface. The metal wire-penetrating sheet 8 has a conductive portion composed of a plurality of metal wires 2 and an insulating portion other than the conductive portion, and forms a sea-island structure in which the conductive portion is an island portion and the insulating portion is a sea portion. Each metal wire is independent of each other and is kept insulated from each other by an insulating portion. Each metal wire 2 forms a wiring penetrating from one surface 1a to the other surface 1b. The length direction of each metal wire 2 may be perpendicular to one surface and the other principal surface, or may be inclined.

The metal wire penetrating sheet 8 is a square sheet, and the horizontal direction of the main surface is the X direction, the vertical direction of the main surface is the Y direction, and the direction perpendicular to the main surface (the thickness direction of the sheet) is the Z direction.
The shape of the metal wire-penetrating sheet 8 in plan view is not limited to a square, and may be rectangular, circular, elliptical, polygonal, or any other shape.
The length×width size of the metal wire-penetrating sheet 8 is not particularly limited, and can be, for example, 0.5 cm×0.5 cm to 5 cm×5 cm.
The thickness of the metal wire penetrating sheet 8 can be, for example, 25 μm or more and 750 μm or less.
The form, size, thickness, etc. of the metal wire-penetrating sheet 8 are appropriately set according to the shape of the electronic device connected to each main surface and the arrangement of the terminals.

The end face of each metal wire 2 is exposed on one surface 1a and the other surface 1b, respectively, and each metal wire 2 is arranged at a constant pitch in the X direction and the Y direction.
The pitch in the X direction is, for example, approximately 40 μm to 100 μm, and can be narrowed to approximately 20 μm to 30 μm.
The pitch in the Y direction is, for example, about 40 μm to 100 μm, and can be narrowed down to about 10 μm to 30 μm.
The wiring density of the metal wires 2 on one surface of the metal wire penetrating sheet 8 can be, for example, 100 to 5000 wires/mm ² .
The pitch and wiring density are obtained from the center-to-center distance between adjacent end surfaces of the metal wires 2 exposed on each main surface, and can be measured by a known magnifying observation means such as a measuring microscope.

The size of the end face exposed on each principal surface of each metal wire is the diameter of the smallest circle containing the end face. The diameter is, for example, preferably 1 μm to 100 μm, more preferably 3 μm to 50 μm, more preferably 5 μm to 25 μm, from the viewpoint of reducing the resistance of the metal wire and the viewpoint of corresponding to the narrow pitch of the terminals in the electronic device to be connected. preferable.
The diameter can be measured by a known magnifying observation means such as a measuring microscope.

The arrangement of the metal wires 2 on each main surface of the metal wire penetrating sheet 8 is a two-dimensional array of X columns×Y rows. The arrangement of the metal wires 2 is not limited to this example, and any arrangement pattern may be adopted. In X columns×Y rows, for example, X and Y can each independently be an arbitrary integer from 10 to 1,000. The arrangement pattern may be a two-dimensional array, a zigzag pattern, any other pattern, or a random arrangement.

The number of metal wires arranged in the metal wire-penetrating sheet 8 is not particularly limited, and can be, for example, about 10 to 10,000.
The wire diameter of each metal wire can be, for example, 5 μm to 50 μm. It is preferable that the metal wires have the same wire diameter.
A material of the metal wire is a known metal. Specific examples include brass, copper, silver, gold, platinum, palladium, tungsten, beryllium copper, phosphor bronze, and nickel-titanium alloys. The metal material forming each metal wire may be the same as or different from each other.

The metal wire 2 may have a core wire and a covering layer covering the outer circumference of the core wire. One layer may be sufficient as a coating layer, and two or more layers may be sufficient as it. Materials for the coating layer include, for example, gold, silver, nickel, and copper. It is preferable that the material of the core wire and the material of the covering layer are different from each other. The diameter of the metal wire is the diameter including the coating layer.

The metal wire 2 may be a hollow metal tube composed of the coating layer.

The shape of the cross section in the direction perpendicular to the length direction of the metal wire 2 is not particularly limited, and examples thereof include substantially circular, substantially elliptical, substantially rectangular, and other polygonal shapes. A substantially circular or substantially elliptical shape is preferable from the viewpoint of obtaining a stable connection. The diameter of the metal wire 2 is the diameter of the smallest circle containing the cross section.

As used herein, the “minimum circle diameter” is the average value of the diameters of the minimum circles including each cross section of 30 measurement objects measured using a magnifying observation means such as a measuring microscope.

Examples of elastomers constituting the elastomer sheet 1 include thermosetting elastomers such as urethane rubber, isoprene rubber, ethylene-propylene rubber, natural rubber, ethylene-propylene diene rubber, styrene-butadiene rubber, acrylonitrile-butadiene rubber, and silicone rubber; urethane-based, ester-based, styrene-based, olefin-based, butadiene-based, or fluorine-based thermoplastic elastomers; or composites thereof. Among these, silicone rubber is preferable because it has tackiness, low compression set, high heat resistance, and excellent weather resistance and cold resistance.

The elastomer sheet 1 preferably contains a light absorbing agent that efficiently absorbs the laser light used in the post-process.
Examples of light absorbing agents include carbon-based materials such as carbon black, acetylene black, and fullerene. Carbon-based materials efficiently absorb infrared laser light such as YAG laser. The light absorbing agent is not limited to carbon-based materials, and iron oxide and the like can be used.
The number of light absorbing agents contained in the elastomer sheet 1 may be one, or two or more.
The content of the light-absorbing agent contained in the elastomer sheet 1 is appropriately adjusted in consideration of laser irradiation conditions, required etching depth, ensuring insulation, etc. For example, 0.1% of the total mass of the elastomer sheet. It can be up to 20% by mass.
Also, if a carbon dioxide laser is used, an elastomer sheet containing no light absorbing agent can be easily excavated.

The elastomer sheet 1 contains known additives for adding rubber sheets, such as a catalyst that promotes rubber polymerization, a cross-linking agent that promotes cross-linking between rubbers, an antioxidant, a dye, a pigment, a filler, a leveling agent, and the like. may

[Formation of resist layer]
As exemplified in FIG. 3, the resist layer 3 formed on one surface 1a of the elastomer sheet 1 is made of a resin that can be removed by laser processing in a post-process and can withstand the etching treatment of the metal wires 2 in a post-process. It is preferable that
The thickness of the resist layer 3 to be formed is not particularly limited, and can be, for example, 5 μm to 50 μm.

On the one surface 1a of the elastomer sheet 1, the region where the resist layer 3 is formed may include the region where the projections are formed in a post-process, and may be the entire surface or a desired pattern. good. The resist layer 3 in FIG. 3 is formed on the entire surface 1a of the elastomer sheet 1. As shown in FIG.

The method of forming the resist layer 3 on one side 1a of the elastomer sheet 1 is not particularly limited. A known method such as a resist forming method used in lithography is applied.
Examples of resist inks include compositions containing photocurable resins or thermosetting resins. Examples of methods for printing the resist ink include screen printing, gravure printing, offset printing, inkjet printing, and the like.

<Step B1>
In this step, a laser beam is irradiated from one surface 1a on which the resist layer 3 is formed, and a part of the elastomer sheet 1 is excavated in the thickness direction. At this time, if there is a resist layer 3 directly above the part of the elastomer sheet 1, the resist layer 3 is also removed by laser processing.
A region (irradiated portion S) to be excavated by laser processing corresponds to a concave portion (a portion other than the convex portion) on one side of the anisotropically conductive sheet to be manufactured, and can be arbitrarily designated.

In the irradiation section S illustrated in FIG. 4, the resist layer 3 and part of the elastomer sheet 1 are excavated in the thickness direction by laser processing, and part of the metal wire 2 (part on the side of one surface 1a) is cut. Exposed. In the non-irradiated portion where laser processing is not performed, one surface 1a of the elastomer sheet 1 and the resist layer 3 directly thereon maintain their original state.

The depth of excavation in one surface 1a of the elastomer sheet 1 corresponds to the height of the projections (depth of the recesses) on one surface of the anisotropically conductive sheet to be manufactured. 0.5 to 50% of the height. Specifically, it can be, for example, 5 μm to 500 μm.

[Laser light]
The type of laser beam that excavates the surface of the elastomer sheet 1 is not particularly limited as long as it easily etches the elastomer in the irradiated portion. is mentioned.

<Step C1>
In this step, the metal wire 2 exposed to the irradiated portion S is removed, and one or more concave portions corresponding to the irradiated portion S formed in a desired pattern are formed.
A plurality of concave portions 4 and a plurality of convex portions 5 formed of areas other than the concave portions 4 are formed on one surface 1a of the elastomer sheet 1 illustrated in FIG.

The method for removing the metal wire 2 is not particularly limited. ) is brought into contact with the wet etching. Among these, wet etching is preferable from the viewpoint that the elastomer forming the recesses and protrusions is hardly eroded and the shapes of the recesses and protrusions can be maintained with high precision.

As a specific wet etching method, for example, one surface 1a of the elastomer sheet 1 on which the irradiated portions S are formed is immersed in a solution to dissolve the metal wires 2 exposed to the irradiated portions S. Of the concave portions 4 and convex portions 5 formed in the solution, the surfaces (top surfaces) of the convex portions 5 are covered with the resist layer 3, so that the solution reaches the metal wires 2 in the convex portions 5. does not penetrate. As a result, as shown in FIG. 5, the portion of the metal wire 2 exposed in the concave portion 4 is removed, and the metal wire 2 in the convex portion 5 is maintained.

<Step D1>
In this step, as illustrated in FIG. 6, by removing the resist layer 3 remaining on one surface 1a of the elastomer sheet 1 and covering the top surfaces 5a of the projections 5, the desired anisotropic conductivity is achieved. A sex sheet 10 is obtained.

As a method for removing the resist layer 3, from the viewpoint of maintaining the shapes of the concave portions 4 and the convex portions 5, a dissolving solution that dissolves the resist layer 3 or a stripping solution that reduces the adhesiveness of the resist layer 3 to the convex portions 5 is used. , the method of immersing one surface 1a of the elastomer sheet 1 is preferred.
The dissolving solution and stripping solution are appropriately selected according to the type of resin forming the resist layer 3, and examples thereof include an alkaline aqueous solution containing an organic amine compound.
The desired anisotropically conductive sheet 10 is obtained through the above steps. Subsequently, the ends of the metal wires 2 may be exposed on the surfaces of the convex portions 5 of the anisotropically conductive sheet 10 by the following step E.

<Process E>
In this step, the surface layer of the projections 5 in the anisotropically conductive sheet 10 obtained in step D1 is laser-processed to project the tips 2a of the plurality of metal wires 2 onto the surface layer of the projections 5 .
The method of laser processing can be performed in the same manner as in step B1.
The protruding length of the metal wire 2 protruding from the surface layer of the projection 5 after laser processing can be, for example, 5 μm to 100 μm. Since the tip 2a of the metal wire 2 protrudes, it can be easily connected to the recessed electrode with a smaller amount of pressure.

<<Method for producing anisotropically conductive sheet; second aspect>>
A second aspect of the present invention is a method for producing an anisotropically conductive sheet, including at least the following step Z, step A2, step B2, step C2 and step D2.
In step Z, the surface layer of at least a part of one surface of the prepared metal wire-penetrated sheet is laser-processed to remove the elastomer forming the surface layer, and the tips of the plurality of metal wires included in the surface layer are removed. It is a step of obtaining a metal wire exposing sheet with a protruded part.
Step A2 is a step of forming a resist layer including the tip portions of the protruded metal wires on the one surface of the metal wire exposed sheet.
In step B2, the surface layer of the metal wire exposing sheet on which the resist layer is provided is laser-processed to form an irradiation portion in a desired pattern by excavating the surface layer in the thickness direction. exposing a portion of the plurality of metal lines;
Step C2 is a step of forming one or more recesses corresponding to the desired pattern on the one surface by removing the exposed plurality of metal lines.
Step D2 is a step of obtaining an anisotropically conductive sheet by removing the resist layer remaining on the one surface.

The anisotropically conductive sheet obtained in step D2 includes the elastomer sheet and a plurality of metal wires passing through the elastomer sheet from one surface to the other surface, and the concave portion is formed on the one surface. and a convex portion formed of a portion other than the concave portion. A desired pattern is formed by the concave portion and the convex portion. The protrusion has one or more metal wires passing through the elastomer sheet in the thickness direction, and the tip of the metal wire protrudes from at least a part of the surface layer of the protrusion.
An example of an embodiment will be described below with reference to the drawings.

<Process Z>
The metal-wire-penetrating sheet used in this step is the same as the metal-wire-penetrating sheet described in step A1, so the description is omitted here.
In this step, as exemplified in FIG. 7, at least a part of the surface layer of one surface 1a of the elastomer sheet 1 constituting the metal wire piercing sheet 8 is laser-processed to remove the elastomer forming the surface layer, A metal wire exposed sheet 9 is obtained in which the tip portions 2a of the plurality of metal wires 2 included in the surface layer are projected.

The area to be laser-processed preferably includes portions corresponding to the projections of the target anisotropically conductive sheet, and may be the entire surface or a desired pattern.
In the example of FIG. 7 , tip portions 2 a of metal wires 2 protrude from the entire surface 1 a of elastomer sheet 1 .

The method of laser processing can be performed by the same method as the above-mentioned process B1.
The projection length of the plurality of metal wires 2 projecting from the surface of the metal wire exposed sheet after laser processing can be, for example, 5 μm to 100 μm.
Here, the protruding length of the metal wire 2 is obtained by observing the metal wire exposing sheet 9 with a measuring microscope or the like and measuring the lengths of ten or more tip portions 2a and obtaining the average value.

<Step A2>
In this step, as illustrated in FIG. 8, a resist layer 3 is formed on one surface 1a of the metal wire exposed sheet 9 where the tip portions 2a of the metal wires 2 are exposed. The formed resist layer 3 includes the tip 2a of the metal wire 2 exposed on one surface 1a.
The thickness of the resist layer 3 is preferably such that the entire tip 2a of the metal wire 2 is included.
Since the type of resin constituting the resist layer 3 and the method of forming the resist layer 3 are the same as those in the above-described step A1, description thereof will be omitted here.

<Step B2>
In this step, a laser beam is irradiated from one surface 1a on which the resist layer 3 is formed, and the surface layer of the metal wire exposed sheet 9 is excavated in the thickness direction. At this time, if there is a resist layer 3 directly above the surface layer, the resist layer 3 is also removed by laser processing.
A region (irradiated portion S) to be excavated by laser processing corresponds to a concave portion (a portion other than the convex portion) on one side of the anisotropically conductive sheet to be manufactured, and can be arbitrarily designated.

In the irradiated portion S illustrated in FIG. 9 , the resist layer 3 and a portion of the elastomer sheet 1 are excavated in the thickness direction by laser processing, and a portion of the metal wire 2 (a portion on the one side 1a side) is cut. Exposed. In the non-irradiated portion where laser processing is not performed, one surface 1a of the elastomer sheet 1 and the resist layer 3 directly thereon maintain their original state.

The depth of excavation in one surface 1a of the metal wire exposed sheet 9 corresponds to the height of the protrusions (the depth of the recesses) of one surface of the anisotropically conductive sheet to be manufactured. It can be 0.5 to 50% of the thickness of 1. Specifically, it can be, for example, 5 μm to 500 μm.

Since the laser beam used in this step is the same as in step B1 described above, the description thereof is omitted here.

<Step C2>
In this step, the metal wire 2 exposed to the irradiated portion S is removed, and one or more concave portions corresponding to the irradiated portion S formed in a desired pattern are formed.
A plurality of concave portions 4 and a plurality of convex portions 5 formed of regions other than the concave portions 4 are formed on one surface 1a of the elastomer sheet 1 illustrated in FIG.

Since the method of removing the metal wire 2 is the same as the above-described step C1, the explanation thereof is omitted here.

<Step D2>
In this step, as illustrated in FIG. 11, the resist layer 3 remaining on one surface 1a of the elastomer sheet 1 and covering the top surfaces 5a of the projections 5 is removed to achieve the desired anisotropic conductivity. A sex sheet 20 is obtained.

Since the method of removing the resist layer 3 is the same as that of the aforementioned step D1, the explanation thereof is omitted here.

In the method for manufacturing an anisotropically conductive sheet of the present invention described above, the recesses and protrusions can be formed at desired positions with high accuracy by laser processing.

<<How to use the anisotropically conductive sheet>>
An anisotropically conductive sheet manufactured according to the present invention comprises an elastomer sheet 1 and a plurality of metal wires passing through the elastomer sheet 1 in the thickness direction. has a convex portion of At least one metal wire is included in the protrusion, and the tip of the metal wire is exposed on the surface (top surface) of the protrusion.
The above anisotropically conductive sheet can be used in the same manner as known press-contact type connectors. In particular, it is suitable for connecting the projections of the anisotropically conductive sheet to the recessed electrodes of the electronic device to be connected. Specifically, for example, it can be applied not only to inspection applications for conducting continuity tests of terminals of electronic devices, but also to mounting applications for connecting a plurality of electronic devices provided in electronic equipment.

REFERENCE SIGNS LIST 1 Elastomer sheet 1a One surface 1b The other surface 2 Metal wire 3 Resist layer 4 Concave portion 5 Convex portion 5a Top surface of convex portion 8 Metal wire penetrating sheet , 9... Metal wire exposure sheet, 10... Anisotropic conductive sheet, 20... Anisotropic conductive sheet, S... Irradiation part

Claims (3)

preparing a metal wire-penetrating sheet comprising an elastomer sheet and a plurality of metal wires penetrating from one surface of the elastomer sheet to the other surface;
A step A1 of forming a resist layer on at least part of one surface of the metal wire penetrating sheet;
By laser processing the surface layer of the metal wire penetrating sheet on the side where the resist layer is provided, an irradiation portion is formed by excavating the surface layer in a thickness direction in a desired pattern, and the plurality of metal wires are formed in the irradiation portion. A step B1 of exposing a part of
Step C1 of forming one or more recesses corresponding to the desired pattern on the one surface by removing the exposed plurality of metal lines;
By removing the resist layer remaining on the one surface,
comprising the elastomer sheet and a plurality of metal wires penetrating from one surface of the elastomer sheet to the other surface;
A method for manufacturing an anisotropically conductive sheet, comprising a step D1 of obtaining an anisotropically conductive sheet in which the recesses and protrusions other than the recesses are formed on the one surface. The surface layer of the protrusions in the anisotropically conductive sheet obtained in step D1 is subjected to laser processing to remove the elastomer forming the surface layer, and the tip portions of the plurality of metal wires included in the surface layer are removed. 2. The method for producing an anisotropically conductive sheet according to claim 1, further comprising a projecting step E. preparing a metal wire-penetrating sheet comprising an elastomer sheet and a plurality of metal wires penetrating from one surface of the elastomer sheet to the other surface;
At least part of the surface layer of one surface of the metal wire-penetrating sheet is laser-processed to remove the elastomer forming the surface layer, and the tips of the plurality of metal wires contained in the surface layer are protruded. a step Z of obtaining a metal wire exposed sheet;
Step A2 of forming a resist layer including the tip of the protruded metal wire on the one surface of the metal wire exposed sheet;
By laser processing the surface layer of the metal wire exposing sheet on the side where the resist layer is provided, an irradiation portion is formed by excavating the surface layer in a thickness direction in a desired pattern, and the plurality of metals are formed on the irradiation portion. exposing a portion of the line B2;
Step C2 of forming one or more recesses corresponding to the desired pattern on the one surface by removing the exposed plurality of metal lines;
By removing the resist layer remaining on the one surface,
comprising the elastomer sheet and a plurality of metal wires penetrating from one surface of the elastomer sheet to the other surface;
An anisotropically conductive sheet in which the recesses and protrusions formed of portions other than the recesses are formed on the one surface, and tip portions of the plurality of metal wires protrude from at least a part of the surface layer of the protrusions. A method for producing an anisotropically conductive sheet, comprising a step D2 of obtaining

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