JP7214550B2 - drying equipment - Google Patents

Description

The present application relates to a drying apparatus.

2. Description of the Related Art Conventionally, there has been proposed a batch-type substrate drying apparatus that performs a drying process on a plurality of substrates at once (for example, Patent Document 1). The plurality of substrates are transported to the substrate drying apparatus while being accommodated in the carrier. The substrate drying apparatus includes a carrier receiver within the drying chamber that receives and supports a carrier containing a plurality of substrates.

An exhaust port is provided at the bottom of the drying chamber. Also within the drying chamber are a top blower, a heater, and a side blower. The upper blowout part is provided above the carrier and blows dry air toward the carrier. The heater is provided between the upper blowing part and the carrier and has air permeability. The heater heats the drying air passing through it. The side blowing part is provided on the side of the carrier and blows drying air toward the carrier.

The drying air that has passed through the heater and the drying air that is blown out from the side blowers pass between the substrates in the carrier. Thereby, the substrate can be dried. The drying air that has passed between the plurality of substrates passes through the carrier receiver, part of which is exhausted from the exhaust port, and the remaining part of which circulates again to the upper part of the drying chamber.

Since this substrate drying apparatus does not use isopropyl alcohol (IPA), the environmental load is small, and it is possible to dry substrates for which IPA cannot be used.

JP 2008-244276 A

In Patent Literature 1, the drying air merges from a plurality of directions, which may cause turbulence and the like. As a result, there is a possibility that the mist of the cleaning liquid may rise up and adhere to the substrate, or the particles may rise up and adhere to the substrate.

Accordingly, an object of the present application is to provide a technique capable of suppressing attachment of mist or particles to a substrate.

A first aspect of a drying apparatus is a drying apparatus for drying a plurality of substrates, comprising: a housing; a mounting section on which a carrier housing the plurality of substrates is mounted inside the housing; a gas supply unit having an air supply port provided above the plurality of substrates placed on the mounting unit, and supplying a drying gas from the air supply port toward the plurality of substrates; and a gas discharge portion having an exhaust port provided below the mounting portion and discharging the gas to the outside from the exhaust port, the gas discharge portion rectifying the flow of the gas. It has a rectifying structure, a plurality of the exhaust ports are provided and open upward, and a plurality of the gas discharge portions each having the exhaust port are arranged two-dimensionally in a plan view. an exhaust pipe, a suction portion, a main pipe connected to the suction portion, and a gas-liquid separation portion partitioned by an upper surface, a lower surface, and a side surface, and the air between the plurality of exhaust pipes and the main pipe A liquid separator is provided .

A second aspect of the drying apparatus is the drying apparatus according to the first aspect, wherein the gas discharge section has, as the straightening structure, an exhaust side straightening plate for straightening the gas.

A third aspect of the drying apparatus is the drying apparatus according to the first or second aspect, wherein the plurality of exhaust pipes are arranged at regular intervals .

A fourth aspect of the drying device is the drying device according to any one of the first to third aspects, wherein the gas discharge part is provided in at least one of the plurality of exhaust pipes, and the gas further includes a flow rate adjustment unit that adjusts the flow rate of

A fifth aspect of the drying device is the drying device according to the fourth aspect, wherein at least one of the plurality of exhaust pipes is not provided with the flow rate adjusting section.

A sixth aspect of the drying apparatus is the drying apparatus according to any one of the first to fifth aspects, wherein the gas-liquid separator separates the fluid flowing from the plurality of exhaust pipes into gas and liquid. The main pipe includes an exhaust main pipe for discharging the gas from the gas-liquid separation unit to the outside, and the gas discharge unit includes a drain pipe for discharging the liquid from the gas-liquid separation unit to the outside wherein the plurality of exhaust pipes are connected to the upper surface of the gas-liquid separator, and the main exhaust pipe is connected to a central portion of the lower surface of the gas-liquid separator.

A seventh aspect of the drying device is the drying device according to the fourth or fifth aspect, wherein the gas-liquid separation section separates gas and liquid from the fluid flowing in from the plurality of exhaust pipes , and The main pipe includes an exhaust main pipe for discharging the gas from the gas-liquid separation unit to the outside, the gas discharge unit includes a drain pipe for discharging the liquid from the gas-liquid separation unit to the outside, and the plurality of The exhaust pipe is connected to the upper surface of the gas-liquid separation section, and the main exhaust pipe is connected to the side surface of the gas-liquid separation section.

An eighth aspect of the drying apparatus is the drying apparatus according to any one of the first to seventh aspects, wherein the air supply port of the gas supply unit and the plurality of substrates are provided inside the housing. and a supply-side straightening plate for straightening the flow of the gas.

A ninth aspect of the drying device is the drying device according to any one of the first to eighth aspects, wherein a plurality of the air supply ports are provided, and the gas supply unit extends along the horizontal direction. A bar nozzle having said air inlets arranged side by side is included.

A tenth aspect of the drying device is the drying device according to any one of the first to ninth aspects, wherein the carrier is placed on the carrier in an inclined posture.

An eleventh aspect of the drying apparatus is the drying apparatus according to the tenth aspect, wherein the mounting section mounts the carrier in a tilted posture in two directions different from each other.

A twelfth aspect of the drying device is the drying device according to any one of the first to eleventh aspects, further comprising a heating section attached to an outer wall surface of the housing.

A thirteenth aspect of the drying device is the drying device according to the twelfth aspect, wherein the heating unit includes a plurality of belt-shaped rubber heaters surrounding the housing, and the plurality of rubber heaters are arranged in the vertical direction.

A fourteenth aspect of the drying apparatus is the drying apparatus according to any one of the first to thirteenth aspects, wherein the temperature sensor provided inside the housing and the temperature of the temperature sensor A control unit for controlling opening/closing of the opening/closing member of the housing is further provided.

A fifteenth aspect of the drying device is the drying device according to any one of the first to fourteenth aspects, wherein the housing is a closed housing.
A sixteenth aspect of the drying apparatus is the drying apparatus according to any one of the first to fifteenth aspects, wherein the carrier holds the plurality of substrates in a posture in which the thickness direction of each substrate is along the horizontal direction. store.
A seventeenth aspect of the drying device is a drying device for drying a plurality of substrates, comprising: a housing; a gas supply unit having an air supply port provided above the plurality of substrates placed on the mounting unit, and supplying a drying gas from the air supply port toward the plurality of substrates; and a gas discharge portion having an exhaust port provided below the mounting portion and discharging the gas to the outside from the exhaust port, the gas discharge portion rectifying the flow of the gas. a rectifying structure, wherein a plurality of the exhaust ports are provided and open upward; the gas discharge unit includes, as the rectifying structure, a plurality of exhaust pipes each having the exhaust port; The exhaust ports of the pipes are two-dimensionally distributed in plan view, and the gas discharge section is a gas-liquid separation section that separates gas and liquid from the fluid flowing in from the plurality of exhaust pipes. and an exhaust main pipe for discharging the gas from the gas-liquid separation unit to the outside, and a drain pipe for discharging the liquid from the gas-liquid separation unit to the outside, wherein the plurality of exhaust pipes are connected to the gas-liquid It is connected to the upper surface of the separation section, and the exhaust main pipe is connected to the central portion of the lower surface of the gas-liquid separation section.

According to the first , third and sixteenth aspects of the drying apparatus, the gas flow can be straightened on the exhaust side. This can reduce the possibility of mist or particles flying up and adhering to the substrate. Moreover, the plurality of two-dimensionally arranged exhaust ports can function in the same manner as the rectifying plate. Therefore, the gas flow on the exhaust side can be rectified.

According to the second aspect of the drying apparatus, the gas flow on the exhaust side can be easily rectified.

According to the fourth aspect of the drying device, it is possible to reduce variations in the flow velocity of the gas flowing through the plurality of exhaust pipes. In other words, the gas flow on the exhaust side can be further rectified.

According to the fifth aspect of the drying apparatus, manufacturing costs can be reduced.

According to the sixth and seventeenth aspects of the drying apparatus, since the main exhaust pipe is connected to the central portion of the lower surface of the gas-liquid separation section, variations in the distance between the main exhaust pipe and each of the plurality of exhaust pipes can be reduced. can be reduced. Therefore, variations in gas flow velocity can be reduced. That is, the gas flow can be further rectified on the exhaust side.

According to the seventh aspect of the drying apparatus, since the main exhaust pipe is connected to the side surface of the gas-liquid separation section, the distance between the main exhaust pipe and each of the plurality of exhaust pipes varies greatly. However, since the plurality of exhaust pipes are provided with the flow rate adjusting units, it is possible to reduce variations in gas flow velocity. That is, it is possible to properly rectify the gas flow on the exhaust side.

According to the eighth aspect of the drying apparatus, it is possible to rectify the gas flow even on the supply side, so that the possibility of mist or particles flying up and adhering to the substrate can be further reduced.

According to the ninth aspect of the drying apparatus, it is possible to reduce variations in gas flow velocity distribution on the supply side. In other words, gas flow can be rectified. Therefore, it is possible to further reduce the possibility that mist or particles will rise up and adhere to the substrate.

According to the tenth aspect of the drying apparatus, at least part of the processing liquid remaining on the upper end surface of the carrier can be dropped.

According to the eleventh aspect of the drying apparatus, it is possible to increase the amount of treatment liquid falling from the upper end surface of the carrier.

According to the twelfth aspect of the drying apparatus, the internal temperature of the housing can be improved.

According to the thirteenth aspect of the drying apparatus, the entire internal space of the housing can be heated.

According to the fourteenth aspect of the drying apparatus, the opening and closing of the opening/closing member is controlled according to the internal temperature of the housing. Therefore, the opening/closing member can be opened to carry in the carrier only when the internal temperature is high, for example. According to this, it is possible to avoid poor drying due to the carrier being carried in with the internal temperature being low.

According to the fifteenth aspect of the drying apparatus, outside air is less likely to flow into the housing. Therefore, it is possible to suppress a decrease in the internal temperature of the housing, and it is possible to suppress the entry of particles into the interior of the housing.

It is a figure which shows roughly an example of a structure of a drying apparatus. FIG. 4 is a perspective view schematically showing an example of a configuration of a gas discharge section; FIG. 10 is a perspective view schematically showing another example of the configuration of the gas discharge section; FIG. 10 is a perspective view schematically showing another example of the configuration of the gas discharge section; It is a perspective view which shows roughly an example of a structure of the upper part of a drying apparatus. It is a perspective view which shows roughly another example of a structure of the upper part of a drying apparatus. It is a figure which shows roughly another example of a structure of a drying apparatus. It is a figure which shows roughly an example of a structure of a mounting part. It is a figure which shows roughly another example of a structure of a drying apparatus. It is a perspective view which shows roughly another example of a structure of a drying apparatus. It is a figure which shows roughly another example of a structure of a drying apparatus. 4 is a flow chart showing an example of the operation of the drying device when carrying in/out a carrier.

Embodiments will be described below with reference to the attached drawings. Note that the drawings are shown schematically, and for convenience of explanation, the configuration may be omitted or simplified as appropriate. Also, the mutual relationship between the sizes and positions of the configurations shown in the drawings is not necessarily described accurately, and can be changed as appropriate.

First embodiment.
<Configuration of drying device>
FIG. 1 is a diagram schematically showing an example of the configuration of a drying device 1. As shown in FIG. The drying device 1 is also called a drying bath. This drying apparatus 1 is a batch-type drying apparatus capable of collectively performing a drying process on a plurality of substrates W1. The substrate W1 is, for example, a semiconductor substrate and has a substantially disk shape. The drying apparatus 1 can collectively dry a plurality of substrates W1 such as 25 or 50 substrates.

A plurality of substrates W1 are housed in a predetermined carrier 90, and this carrier 90 is carried into the drying apparatus 1 by a transport device (not shown). The carrier 90 accommodates the plurality of substrates W1 in a posture in which the thickness direction of each substrate W1 is substantially along the horizontal direction. A plurality of substrates W1 are stored side by side in the thickness direction inside the carrier 90 at intervals. Hereinafter, the direction in which the plurality of substrates W1 are arranged is also referred to as the front-rear direction, and the direction perpendicular to the front-rear direction and the vertical direction is also referred to as the left-right direction.

When the carrier 90 is loaded into the drying apparatus 1, the processing liquid is attached to the plurality of substrates W1 and the carrier 90. As shown in FIG. The processing liquid is pure water, for example. This processing liquid adheres to the substrate W1 and the carrier 90 in a step prior to the drying apparatus 1. FIG. As a specific example of the process, a batch-type cleaning process for a plurality of substrates W1 can be exemplified. In this cleaning process, the carrier 90 housing a plurality of substrates W1 is immersed in pure water stored in a storage tank. As a result, the plurality of substrates W1 can be cleaned with pure water all at once. Pure water adheres to the plurality of substrates W1 and the carrier 90 when the carrier 90 is lifted out of the pure water, and it is desired to dry these. Therefore, the carrier device carries the carrier 90 into the drying device 1 .

Referring to FIG. 1 , drying apparatus 1 includes housing 10 , mounting section 20 , gas supply section 30 , gas discharge section 40 and control section 50 .

The enclosure 10, also called a chamber, defines a processing space within it. In the example of FIG. 1 , the housing 10 includes a housing body 11 and an opening/closing member 12 . The housing body 11 is, for example, a box-shaped member that opens upward, and the opening/closing member 12 is provided so as to close the opening of the housing body 11 . In the example of FIG. 1 , the opening/closing member 12 has a substantially plate-like shape, and one end of the opening/closing member 12 is connected to the housing body 11 via a hinge portion 13 . The opening/closing member 12 can be opened around the hinge portion 13 . The housing main body 11 is opened by opening the opening/closing member 12 . Here, a drive section (for example, a motor) (not shown) that drives rotation of the hinge section 13 is provided, and the drive section is controlled by the control section 50 . In other words, the controller 50 controls opening and closing of the opening/closing member 12 .

An external transport device carries the carrier 90 containing a plurality of undried substrates W1 into the inside of the housing 10 through the opening of the housing body 11 . The drying apparatus 1 closes the opening/closing member 12, and in this state, performs the drying process on the plurality of substrates W1. After the drying process is completed, the drying device 1 opens the opening/closing member 12 again. The conveying device carries out the carrier 90 from the inside of the housing 10 to the outside through the opening of the housing main body 11 . As a result, the dried substrate W<b>1 and carrier 90 are unloaded from the drying device 1 .

Note that the opening/closing member 12 and the housing body 11 may each be provided with a locking structure (not shown). The opening/closing member 12 is locked by engaging the locking structures with each other when the opening/closing member 12 is closed. Locking/unlocking of this locking structure is controlled by the controller 50 .

The mounting section 20 is provided inside the housing 10 and mounts the carrier 90 thereon. In the example of FIG. 1 , the mounting section 20 includes a mounting plate 21 and a surrounding section 22 . The enclosing part 22 has a cylindrical shape, and is arranged with its hollow shaft extending in the vertical direction. The enclosing part 22 has, for example, a substantially rectangular shape surrounding the hollow part in plan view (that is, when viewed along the vertical direction). One side of the enclosing part 22 in a plan view extends, for example, in the front-rear direction.

The mounting plate 21 is provided in a posture in which its thickness direction is along the vertical direction. The mounting plate 21 has air permeability, and connects a space above itself and a space below itself. For example, the mounting plate 21 may have a mesh shape. The peripheral edge of the mounting plate 21 has a substantially rectangular shape and is connected to the inner peripheral surface of the enclosing portion 22 .

In the example of FIG. 1, with the carrier 90 placed on the mounting plate 21, the upper end of the enclosing portion 22 is positioned higher than the upper end of the substrate W1. That is, the enclosure 22 surrounds the multiple substrates W1 and the carrier 90 .

The gas supply unit 30 has an air supply port 31a provided above the mounting unit 20, and supplies drying gas toward the mounting unit 20 from the air supply port 31a. As the drying gas, an inert gas such as nitrogen or argon can be used. The inert gas here means a gas having low reactivity with the substrate W1. The temperature of the drying gas is high, for example, the temperature of the gas at the air supply port 31a is 90° C. or higher.

In the example of FIG. 1 , the gas supply section 30 includes a nozzle 31 , an air supply pipe 32 , an air supply valve 33 , a heating section 34 and a gas supply source 35 . The nozzle 31 is provided above the mounting portion 20 inside the housing 10 . In the example of FIG. 1, a pair of nozzles 31 are provided, facing each other in the horizontal direction. In other words, the pair of nozzles 31 are provided at substantially the same height position.

In the example of FIG. 1, the pair of nozzles 31 are positioned on opposite sides of a reference line Q1 extending vertically through the centers of the plurality of substrates W1 when viewed in the front-rear direction. As a specific example, the pair of nozzles 31 are provided at positions substantially symmetrical with respect to the reference line Q1.

Each nozzle 31 has an air supply port 31a. Each nozzle 31 may be, for example, a bar nozzle having a plurality of air supply openings 31a. In the example of FIG. 1, the nozzle 31 is a bar nozzle having a substantially cylindrical shape. For example, the nozzle 31 extends along the front-rear direction, and the plurality of air supply ports 31a are arranged side by side along the front-rear direction. The opening axis of each air supply port 31a is set to extend obliquely downward toward the substrate W1. Each nozzle 31 discharges gas obliquely downward from the air supply port 31a toward the substrate W1.

The nozzle 31 is connected to a gas supply source 35 via an air supply line 32 . A gas supply source 35 supplies an inert gas to the air supply pipe 32 as a drying gas. The heating unit 34 is provided in the middle of the air supply pipe 32 and heats the gas flowing inside the air supply pipe 32 . The heating section 34 is controlled by the control section 50 . The temperature of the gas at the exit of the heating unit 34 is, for example, about 200[°C]. The temperature of the gas decreases as it flows through the air supply pipe 32 and reaches, for example, about 100 [° C.] at the air supply port 31 a of the nozzle 31 .

The air supply valve 33 is provided in the middle of the air supply pipe 32 and switches opening and closing of the flow path inside the air supply pipe 32 . The air supply valve 33 is controlled by the controller 50 . When the air supply valve 33 opens the flow path of the air supply pipe 32 , the gas from the gas supply source 35 flows through the flow path inside the air supply pipe 32 and is discharged from the air supply port 31 a of the nozzle 31 . The air supply valve 33 may be capable of adjusting the gas flow rate. The gas flow rate is set to, for example, about 200 [L/min].

The high-temperature gas discharged from the air supply port 31a of each nozzle 31 flows toward the substrate W1. Since the inner space of the carrier 90 is open to both the upper and lower sides, the gas passes from the upper side of the carrier 90 to the lower side of the carrier 90 via the space between the plurality of substrates W1. The gas that has passed through the inside of the carrier 90 subsequently passes through the mounting plate 21 of the mounting section 20 .

The gas exhaust part 40 has an exhaust port (not shown in FIG. 1) provided below the mounting plate 21, and exhausts the gas inside the housing 10 to the outside through the exhaust port. The gas exhaust section 40 has an exhaust main pipe 46 and a suction section 48 . Gas that has flowed in from the exhaust port in the housing 10 flows through the flow path inside the exhaust main pipe 46 . The suction part 48 is provided in the middle of the exhaust main pipe 46, sucks the gas inside the housing 10, and exhausts it to the outside. The suction unit 48 includes, for example, a suction pump. The suction unit 48 is controlled by the control unit 50 . In the example of FIG. 1, the gas exhaust 40 also includes a drain pipe 47 (described below).

Further, the gas discharge part 40 has a straightening structure 41 that straightens the flow of gas. A specific example of the rectifying structure 41 will be detailed later.

The control unit 50 can control the drying apparatus 1 in an integrated manner. For example, the control unit 50 can control the opening/closing member 12 , the gas supply valve 33 of the gas supply unit 30 , the heating unit 34 and the suction unit 48 .

The hardware configuration of the control unit 50 is similar to that of a general computer. That is, the control unit 50 includes a CPU (Central Processing Unit) that performs various arithmetic processing, a ROM (Read Only Memory) that is a read-only memory that stores basic programs, and a RAM that is a readable and writable memory that stores various information ( Random Access Memory) and a magnetic disk for storing control software and data. Each operating mechanism of the drying device 1 is controlled by the control unit 50 by the CPU of the control unit 50 executing a predetermined processing program. A part or all of the functions of the control unit 50 may be realized by a dedicated hardware circuit.

<Outline of the operation of the drying device>
Next, the operation of the drying device 1 will be outlined. First, the control unit 50 controls the gas supply unit 30 and the gas discharge unit 40 to supply high-temperature gas from the upper air supply port 31 a in the housing 10 and to supply the gas from the lower exhaust port in the housing 10 . is exhausted to the outside. Since high-temperature gas is supplied into the housing 10, the internal temperature of the housing 10 rises. When the internal temperature of the housing 10 rises sufficiently, the control section 50 controls the driving section of the opening/closing member 12 to open the opening/closing member 12 . Next, the external transport device carries the carrier 90 containing a plurality of undried substrates W1 into the housing 10 and places them on the mounting plate 21 . Next, the control section 50 controls the driving section of the opening/closing member 12 to close the opening/closing member 12 . Note that the control unit 50 may stop the air supply by the gas supply unit 30 and the exhaust by the gas discharge unit 40 while the opening/closing member 12 is open.

In the housing 10, the high-temperature gas discharged from the air supply port 31a passes through the inside of the carrier 90 along the vertical direction. That is, the gas flows vertically through the spaces between the substrates W1 and passes through the carrier 90 . The gas that has passed through the inside of the carrier 90 passes through the mounting plate 21 and is exhausted to the outside of the housing 10 by the gas exhaust section 40 .

The high-temperature drying gas can evaporate or blow off the processing liquid adhering to the substrate W1 and carrier 90 . Thereby, substrate W1 and carrier 90 can be dried.

Moreover, in the drying apparatus 1 , the gas discharge section 40 has the rectifying structure 41 . Therefore, the gas flow is straightened on the downstream side (exhaust side) of the substrate W1. Since the flow of gas is spatially continuous, if the flow of gas is rectified on the downstream side of the substrate W1, the flow of gas can also be adjusted in the vicinity of the substrate W1 on the upstream side. That is, the gas flow in the vicinity of the substrate W1 and on the downstream side of the substrate W1 can be brought closer to a laminar flow, or can be made a laminar flow. Furthermore, in other words, the variation in the flow velocity distribution of the gas in plan view can be reduced particularly in the vicinity of the substrate W1 and on the downstream side of the substrate W1.

According to this, even if the processing liquid (for example, the rinse liquid) adhering to the substrate W1 or the carrier 90 is blown away and becomes mist, the possibility that the mist rises up and adheres to the substrate W1 again can be reduced. can be done. Alternatively, even if particles enter the interior of the housing 10, the possibility of the particles flying up and adhering to the substrate W1 can be reduced.

<Rectification structure of gas discharge part>
Next, a specific example of the rectifying structure 41 will be described. FIG. 2 is a perspective view schematically showing an example of a specific internal configuration of the gas discharge section 40. As shown in FIG. FIG. 2 transparently shows the inside of the housing 10 . The gas exhaust part 40 has an exhaust port 42a, and exhausts the gas inside the housing 10 to the outside from the exhaust port 42a. In the example of FIG. 2, the exhaust port 42a is provided on the bottom surface of the housing 10. As shown in FIG.

In the example of FIG. 2 , the gas discharge section 40 includes a straightening plate (exhaust side straightening plate) 44 as the straightening structure 41 . The straightening plate 44 is provided above the exhaust port 42a. More specifically, the current plate 44 is provided at a position facing the mounting portion 20 in the vertical direction between the mounting portion 20 (not shown in FIG. 2) and the exhaust port 42a. The rectifying plate 44 has a plate-like shape, and is provided in a posture in which the thickness direction thereof extends along the vertical direction. In the example of FIG. 2 , the peripheral edge of the straightening plate 44 in plan view has a substantially rectangular shape, and the peripheral edge of the straightening plate 44 is in contact with the inner peripheral side surface of the housing 10 .

A plurality of through holes 44 a are formed in the current plate 44 . A plurality of through-holes 44a pass through the current plate 44 in the thickness direction. In the example of FIG. 2, each through-hole 44a has a substantially circular shape in plan view. The diameter of the through hole 44a is set to, for example, about 1 to 5 [mm]. The plurality of through holes 44a are two-dimensionally arranged in plan view. The term "two-dimensional arrangement" as used herein means that a plurality of objects to be arranged are not arranged only along one axis but are arranged in a planarly distributed manner. In the example of FIG. 2, the plurality of through holes 44a are arranged in a matrix. Although 4×7 through-holes 44a are provided in FIG. 2, the number of through-holes 44a can be changed as appropriate.

The drying gas that has passed through the inside of the carrier 90 and the mounting plate 21 passes through the through holes 44a of the straightening plate 44 and is discharged to the outside through the exhaust port 42a. The flow of the gas can be rectified by passing the gas through the plurality of through-holes 44a. In other words, it is possible to reduce variations in gas flow velocity distribution in plan view.

In the example of FIG. 2 , the gas discharge section 40 includes multiple exhaust pipes 42 and multiple flow rate adjustment sections 43 . The plurality of exhaust pipes 42 and the plurality of flow rate adjusting units 43 also function as a rectifying structure 41 as described later. Further, the gas discharge section 40 includes a gas-liquid separation section 45 , an exhaust main pipe 46 and a liquid discharge pipe 47 .

One end of each exhaust pipe 42 opens upward as an exhaust port 42 a on the bottom surface of the housing 10 . That is, in the example of FIG. 2, a plurality of exhaust ports 42a are provided. At least one or more exhaust ports 42a among the plurality of exhaust ports 42a are provided at positions facing the mounting portion 20 in the vertical direction.

In the example of FIG. 2, the plurality of exhaust ports 42a are two-dimensionally arranged in plan view. In the example of FIG. 2, the area of the exhaust port 42a in a plan view is larger than the area of the through hole 44a of the current plate 44. In the example of FIG. Further, in the example of FIG. 2, the number of exhaust pipes 42 (that is, the number of exhaust ports 42a) is smaller than the number of through holes 44a of the rectifying plate 44. As shown in FIG. As a specific example, in FIG. 2, the number of exhaust pipes 42 is five. In the example of FIG. 2, the exhaust port 42a of one exhaust pipe 42 vertically faces the substantially central portion of the current plate 44. In the example of FIG. The exhaust ports 42a of the remaining four exhaust pipes 42 vertically face the four corners of the current plate 44, respectively. The number and layout of the exhaust ports 42a can be changed as appropriate.

A flow rate adjusting section 43 is provided in the middle of the exhaust pipe 42 . The flow rate adjusting unit 43 can adjust the flow rate of the gas flowing inside the exhaust pipe 42 . The flow rate adjusting unit 43 is, for example, a damper. A damper can be regarded as a kind of valve.

The gas-liquid separator 45 is connected to the other ends (hereinafter referred to as connection ends 42b) of the plurality of exhaust pipes 42, and separates gas and moisture from the fluid flowing from the plurality of exhaust pipes 42. FIG. In the example of FIG. 2 , the gas-liquid separator 45 is provided below the housing 10 at a position facing the housing 10 in the vertical direction. The gas-liquid separator 45 has an upper surface 45a, a lower surface 45b, and a side surface 45c. The upper surface 45a and the lower surface 45b face each other in the vertical direction, and the side surface 45c connects the peripheral edge of the upper surface 45a and the peripheral edge of the lower surface 45b. In the example of FIG. 2, since the gas-liquid separation section 45 has a substantially rectangular parallelepiped shape, the upper surface 45a and the lower surface 45b have a substantially rectangular shape. In the example of FIG. 2 , the connection ends 42 b of the plurality of exhaust pipes 42 are connected to the upper surface 45 a of the gas-liquid separator 45 .

One end of the exhaust main pipe 46 (hereinafter referred to as a connection end 46a) is connected to the gas-liquid separation section 45 and discharges the gas introduced from the gas-liquid separation section 45 to the outside. In the example of FIG. 2 , the connection end 46 a of the exhaust main pipe 46 is connected to the side surface 45 c of the gas-liquid separator 45 .

One end of the drain pipe 47 is connected to the gas-liquid separation section 45 and discharges the liquid flowing in from the gas-liquid separation section 45 to the outside. In the example of FIG. 2 , one end of the drain pipe 47 is connected to the lower surface 45 b of the gas-liquid separator 45 .

In the example of FIG. 2, the connection end 42b of the exhaust pipe 42 is connected to the upper surface 45a of the gas-liquid separation section 45, and the connection end 46a of the main exhaust pipe 46 is connected to the side surface 45c of the gas-liquid separation section 45, as described above. ing. In this structure, the distance D between the connection end 42b of the exhaust pipe 42 and the connection end 46a of the exhaust main pipe 46 varies among the plurality of exhaust pipes 42. As shown in FIG. That is, the difference between the distance D between the exhaust pipe 42 closest to the exhaust main pipe 46 and the exhaust main pipe 46 and the distance D between the exhaust pipe 42 furthest from the exhaust main pipe 46 and the exhaust main pipe 46 increases.

Therefore, if the flow rate adjustment unit 43 does not control the flow rate of the gas, the flow velocity of the gas flowing inside the exhaust pipe 42 closest to the main exhaust pipe 46 is the flow velocity of the gas flowing inside the exhaust pipe 42 furthest from the main exhaust pipe 46. becomes larger than This may increase the variability of the gas flow velocity distribution.

However, in the example of FIG. 2, each exhaust pipe 42 is provided with a flow rate adjusting section 43 . The flow rate adjusting unit 43 adjusts the flow rate of each gas so that the variation in the flow velocity of the gas flowing through each exhaust pipe 42 is smaller than a predetermined reference value. Therefore, variations in the flow velocity distribution of the gas flowing through the lower space (exhaust side) in the housing 10 can be reduced with higher accuracy. In other words, the gas flow can be rectified with higher accuracy on the exhaust side.

In addition, in the example of FIG. 2, although the flow rate adjusting units 43 are provided in all of the plurality of exhaust pipes 42, the present invention is not necessarily limited to this. If at least one exhaust pipe 42 is provided with the flow rate adjusting portion 43 , variations in the flow velocity distribution can be reduced compared to the case where none of the exhaust pipes 42 are provided with the flow rate adjusting portion 43 . By using the exhaust pipe 42 that does not have the flow rate adjusting portion 43, the manufacturing cost can be reduced. As a more specific example, the flow rate adjusting section 43 may not be provided for the exhaust pipe 42 that is the farthest from the main exhaust pipe 46 . Thereby, the manufacturing cost can be reduced. Moreover, in this case, by adjusting the flow rate of the gas in the other exhaust pipes 42, variations in the flow velocity of the gas in all the exhaust pipes 42 can be reduced. That is, it is possible to reduce variations in flow velocity distribution while reducing manufacturing costs.

In addition, in the example of FIG. 2, when the gas can be sufficiently rectified by the plurality of exhaust pipes 42 and the flow rate adjusting units 43, the rectifying plate 44 may not be provided. Conversely, when the gas can be sufficiently rectified by the rectifying plate 44, the number of exhaust pipes 42 may be one, and the flow rate adjusting section 43 may not be provided.

FIG. 3 is a perspective view schematically showing another example of the internal configuration of the gas discharge section 40. As shown in FIG. The example of FIG. 3 also transparently shows the inside of the housing 10 . The gas exhaust part 40 includes a plurality of exhaust pipes 42 as a straightening structure 41 . However, none of the plurality of exhaust pipes 42 is provided with the flow rate adjusting section 43 . 2, the gas discharge section 40 includes a gas-liquid separation section 45, an exhaust main pipe 46, and a liquid discharge pipe 47. As shown in FIG.

In the example of FIG. 3, an exhaust port 42a, which is one end of each exhaust pipe 42, opens upward on the bottom surface of the housing 10, as in FIG. The plurality of exhaust ports 42a are two-dimensionally arranged in plan view, and are arranged in a matrix in the example of FIG. Each exhaust port 42a has, for example, a substantially circular shape in plan view, and its diameter can be set to, for example, about 20 to 50 [mm]. Although the number of exhaust ports 42a can be set arbitrarily, it is set to nine or more, for example. A connection end 42 b of each exhaust pipe 42 is connected to, for example, an upper surface 45 a of the gas-liquid separator 45 .

In the example of FIG. 3 , the connection end 46 a of the exhaust main pipe 46 is connected to the lower surface 45 b of the gas-liquid separator 45 . The connection end 46 a of the exhaust main pipe 46 may be connected to the central portion of the lower surface of the gas-liquid separation section 45 , for example. According to this, the connection end 46a of the exhaust main pipe 46 is closest to the connection end 42b of the exhaust pipe 42 located relatively in the center among the plurality of exhaust pipes 42 . Therefore, variations in the distance D between the connection end 46a of the exhaust main pipe 46 and the connection end 42b of the exhaust pipe 42 among the plurality of exhaust pipes 42 are reduced compared to the embodiment of FIG.

Therefore, it is possible to reduce variations in the flow velocity of the gas inside the exhaust pipe 42 due to the gas being sucked into the main exhaust pipe 46 . Moreover, according to this structure, since ten or more exhaust ports 42a are arranged two-dimensionally, the plurality of exhaust pipes 42 can function as rectifying plates. Therefore, this structure can also rectify the gas flow in the lower space (exhaust side) inside the housing 10 . In other words, it is possible to reduce variations in gas flow velocity distribution in plan view.

FIG. 4 is a perspective view schematically showing another example of the internal configuration of the gas discharge section 40. As shown in FIG. In the example of FIG. 4, a lower portion 14 of the housing 10 located below the mounting portion 20 (hereinafter referred to as a lower housing portion) 14 has a shape that tapers toward the bottom surface of the housing 10. there is Here, the opening area of the housing lower part 14 will be introduced and explained. The opening area referred to here means the area surrounded by the inner peripheral side surface of the lower housing portion 14 in a horizontal cross section. The housing lower portion 14 has a shape whose opening area decreases toward the bottom surface of the housing 10 .

The gas exhaust section 40 includes an exhaust pipe 42 , a gas-liquid separator 45 , an exhaust main pipe 46 , a liquid drain pipe 47 and a baffle plate 49 .

An exhaust port 42 a of the exhaust pipe 42 opens upward at the bottom surface of the housing 10 . The exhaust port 42a is provided, for example, at a position facing the mounting section 20 in the vertical direction. A connection end 42 b of the exhaust pipe 42 is connected to the gas-liquid separator 45 . The main exhaust pipe 46 and the drain pipe 47 are connected to the gas-liquid separator 45 .

The baffle plate 49 is provided above the exhaust port 42a and faces the exhaust port 42a in the vertical direction. This baffle plate 49 is provided between the mounting portion 20 and the bottom surface of the housing 10 . The baffle plate 49 has a plate-like shape, and is arranged with its thickness direction along the vertical direction. The baffle plate 49 has, for example, a substantially circular shape in plan view. The area of the baffle plate 49 in plan view may be larger than the area of the exhaust port 42a.

The shape of the housing lower portion 14 facilitates guiding the gas to the exhaust port 42a. On the other hand, if the baffle plate 49 is not provided, the flow velocity of the gas near the center axis extending along the vertical direction through the center of the exhaust port 42a becomes higher than the flow velocity of the gas far from the center axis. . However, in the example of FIG. 4, since the baffle plate 49 is provided, the gas on the central axis side collides with the upper surface of the baffle plate 49, goes around the periphery of the baffle plate 49, and flows to the exhaust port 42a. According to this, the flow velocity of the gas on the central axis side decreases. Therefore, it is possible to reduce variations in the flow velocity distribution in plan view. In other words, the gas flow can be rectified in the lower space (exhaust side) inside the housing 10 .

In this structure, the rectifying structure 41 of the gas discharge section 40 is substantially constituted by the shape of the housing lower portion 14 , the baffle plate 49 and the exhaust pipe 42 .

3 and 4 may also be provided with a rectifying plate 44 if necessary.

<Rectification on supply side>
Next, the gas flow in the upper space (supply side) inside the housing 10 will be described. In the example of FIG. 1, the gas supply unit 30 includes two nozzles 31, and the two nozzles 31 are horizontally adjacent to each other. According to this, compared with the case where the single nozzle 31 discharges the gas toward the substrate W1, variations in the flow velocity distribution of the gas in plan view can be reduced.

Further, in the above example, the nozzle 31 is a bar nozzle extending along the front-rear direction. The nozzle 31 has a plurality of air supply ports 31a arranged along the front-rear direction. This also makes it possible to reduce variations in gas flow velocity distribution in a plan view.

As described above, in the example of FIG. 1, the gas flow can be rectified even in the upper space (supply side) inside the housing 10 . Since the gas flow is spatially continuous, if the gas flow is rectified above and below the substrate W1, the gas flow can be rectified throughout the housing 10 . In other words, variations in gas flow velocity distribution in plan view can be reduced throughout the housing 10 .

Therefore, even if the processing liquid adhering to the substrate W1 or the carrier 90 is blown off and turned into mist, the possibility that the mist rises up and adheres to the substrate W1 again can be further reduced. Alternatively, even if particles enter the interior of the housing 10, the possibility of the particles flying up and adhering to the substrate W1 can be further reduced.

Nozzles (that is, air supply ports) for supplying the drying gas may not be provided in a region adjacent to the carrier 90 in the horizontal direction (for example, the left-right direction). This is because if such a nozzle is provided, the gas discharged from the nozzle toward the substrate W1 collides with the gas supplied from the nozzle 31 above the substrate W1, which may cause turbulence in the airflow. be.

FIG. 5 is a perspective view schematically showing an example of the configuration of the upper part of the drying device 1. As shown in FIG. The example of FIG. 5 also transparently shows the inside of the housing 10 . In the example of FIG. 5, the drying device 1 further includes a rectifying plate (supply-side rectifying plate) 38 . The straightening plate 38 is provided below the air supply port 31 a of the gas supply section 30 . More specifically, the straightening plate 38 is provided at a position facing the mounting section 20 in the vertical direction between the air supply port 31a and the mounting section 20 . The configuration of the straightening plate 38 is similar to that of the straightening plate 44 .

In the example of FIG. 5, the gas supply section 30 has a single nozzle 31 . The nozzle 31 is provided at a position facing the substantially central portion of the current plate 38 in the vertical direction. An air supply port 31 a is formed at the lower end of the nozzle 31 . The nozzle 31 discharges the drying gas downward from the air supply port 31a. The nozzle 31 may discharge the gas so that the gas spreads substantially isotropically in plan view.

The gas discharged from the nozzle 31 of the gas supply unit 30 passes through the through holes 38a of the current plate 38 and flows toward the plurality of substrates W1. As a result, the gas flow can be rectified even in the upper space (supply side) inside the housing 10 . Therefore, the flow of gas can be rectified throughout the housing 10 .

It should be noted that the current plate 38 may be provided in the embodiment of FIG. 1 as well.

<Placement section>
Next, the surrounding portion 22 of the mounting portion 20 will be described. In the example described above, the upper end of the enclosure 22 is positioned higher than the upper ends of the substrates W1, and the enclosure 22 surrounds the plurality of substrates W1 and the carrier 90. FIG. According to this, for example, even if the gas bounces off the inner peripheral side surface of the housing 10 and flows toward the substrate W1, the gas bounces off the outer peripheral surface of the enclosure 22 and flows outside the enclosure 22 . That is, it is possible to prevent the gas from flowing from the outside of the enclosing part 22 to the inside of the enclosing part 22 . According to this, the turbulence of the airflow in the enclosure 22, that is, the turbulence of the airflow in the vicinity of the plurality of substrates W1 can be suppressed.

<Sealed housing>
Next, the housing 10 will be further described. This housing 10 may be a closed housing. In this case, the opening/closing member 12 and the housing body 11 are airtightly sealed. For example, a sealing member such as an O-ring is provided between the opening/closing member 12 and the housing body 11 .

According to this, outside air hardly flows into the inside of the housing 10 in the drying process. Therefore, turbulence of the airflow inside the housing 10 caused by the inflow of outside air can be suppressed. Therefore, it is possible to further reduce the possibility that mist or particles will rise up and adhere to the substrate W1.

Also, the temperature of the outside air is lower than the internal temperature of the housing 10 . Therefore, when low-temperature outside air flows into the housing 10, the internal temperature of the housing 10 is lowered. On the other hand, if the housing 10 is a sealed housing, it is possible to suppress the decrease in the internal temperature caused by the inflow of low-temperature outside air. Therefore, it is possible to suppress the drying failure or the extension of the drying time due to the decrease in the internal temperature.

Also, if outside air flows into the housing 10 , there is a possibility that external particles will enter the housing 10 . On the other hand, if the housing 10 is a closed housing, it is possible to reduce particles entering the housing 10 from the outside.

<Arrangement of air supply pipe>
FIG. 6 is a perspective view schematically showing an example of the configuration of the upper part of the drying device 1. As shown in FIG. The opening/closing member 12 has a plate-like shape, and a pair of nozzles 31 of the gas supply section 30 are attached to the lower surface thereof. The lengths of the pair of nozzles 31 in the front-rear direction are substantially equal. The air supply pipe 32 of the gas supply unit 30 includes pipes 321-324. A pipe 321 connects ends on one side (rear side) of the pair of nozzles 31 inside the housing 10 , and a pipe 322 connects ends on the other side (front side) of the pair of nozzles 31 inside the housing 10 . connect the parts. The pipe 321 and the pipe 322 extend along the left-right direction.

The pipe 323 passes through the opening/closing member 12 along its thickness direction, and one end thereof is connected to the central portion of the pipe 321 in the left-right direction. The pipe 324 passes through the opening/closing member 12 along its thickness direction, and one end thereof is connected to the central portion of the pipe 322 in the left-right direction.

The gas flowing inside the pipe 323 flows into the central portion of the pipe 321 , branches from the central portion, and flows inside the pipe 321 toward the rear ends of the pair of nozzles 31 . The gas flowing through the pipe 324 flows into the central portion of the pipe 322 , branches from the central portion, and flows inside the pipe 322 toward the front ends of the pair of nozzles 31 . Each nozzle 31 discharges the gas that has flowed in from both ends thereof from an air supply port 31a (not shown in FIG. 6).

As described above, the air supply pipe 32 is connected to the nozzle 31 through the opening/closing member 12 in its thickness direction. Therefore, the air supply pipe 32 is not interposed between the opening/closing member 12 and the housing body 11 . Therefore, it is easy to seal between the opening/closing member 12 and the housing body 11 .

5, the air supply pipe 32 passes through the opening/closing member 12 in the thickness direction thereof, so that it is not interposed between the opening/closing member 12 and the housing body 11. As shown in FIG. Therefore, even in the mode of FIG. 5, it is easy to seal between the opening/closing member 12 and the housing body 11 .

Second embodiment.
FIG. 7 is a diagram schematically showing an example of the configuration of the drying apparatus 1A, and FIG. 8 is an enlarged diagram showing the configuration of the mounting section 20 of the drying apparatus 1A. 7 shows the configuration of the drying apparatus 1A viewed along the front-rear direction, and FIG. 8 shows the configuration of the placing section 20 viewed along the left-right direction.

The drying device 1A has the same configuration as the drying device 1 except for the configuration of the mounting section 20. As shown in FIG. In the drying apparatus 1A, the mounting section 20 supports the carrier 90 in an inclined posture. In the examples of FIGS. 7 and 8, a step 211 and a step 212 are formed on the upper surface of the mounting plate 21 of the mounting section 20. As shown in FIG. Members forming the steps 211 and 212 are fixed to the upper surface of the mounting plate 21 . The height of step 211 is different from the height of step 212 .

The carrier 90 is made of fluorine resin, for example, and includes a carrier body 91 and supporting legs 92 . The carrier main body 91 is a member that accommodates a plurality of substrates W1. The carrier body 91 is open upward, and the plurality of substrates W1 are inserted into the carrier body 91 from above. The carrier main body 91 also opens downward. However, the carrier main body 91 supports the plurality of substrates W1, and the plurality of substrates W1 will not drop from the lower opening of the carrier main body 91. FIG.

The support leg 92 extends downward from the lower end of the carrier body 91 . In the example of FIG. 7, a pair of support legs 92 are provided and are spaced apart in the left-right direction. Hereinafter, when distinguishing between the one support leg 92 and the other support leg 92, the one support leg 92 is referred to as the support leg 92a, and the other support leg 92 is referred to as the support leg 92b. In the example of FIG. 7, the support leg 92a is positioned on the left side and the support leg 92b is positioned on the right side. In the example of FIG. 8 , the support leg 92 extends along the front-rear direction, and its length in the front-rear direction is substantially equal to the length of the carrier body 91 .

The step 211 and the step 212 are provided corresponding to the support leg 92b, for example. The step 211 and the step 212 are arranged side by side with a space therebetween in the front-rear direction. The step 211 is provided on the front side of the step 212 . The front end of the support leg 92 b rests on the step 211 and the rear end rests on the step 212 . Since the height of the step 211 is different from the height of the step 212, the carrier 90 is mounted on the mounting plate 21 in an inclined posture when viewed along the horizontal direction. In the example of FIG. 8, the step 211 is lower than the step 212, so the carrier 90 is placed in an inclined posture in which the front upper end is lower than the rear upper end. The tilt angle of the carrier 90 viewed along the left-right direction (that is, the tilt angle with respect to the front-rear direction) is set to, for example, several degrees (eg, 1.2 degrees).

The support leg 92a is mounted on the mounting plate 21 at a position where neither the step 211 nor the step 212 is provided. Therefore, the carrier 90 is mounted on the mounting plate 21 in an inclined posture even when viewed along the front-rear direction. Specifically, the carrier 90 is placed in an inclined posture such that the left upper end is lower than the right upper end. The tilt angle of the carrier 90 viewed along the front-rear direction (that is, the tilt angle with respect to the left-right direction) is set to, for example, several degrees (eg, 6 degrees).

As described above, in the examples of FIGS. 7 and 8, the carrier 90 is mounted on the mounting plate 21 of the mounting section 20 in a posture inclined in two different directions.

Before describing the effect of this mounting posture, an example of the shape of the carrier main body 91 will be described first. The carrier body 91 has a front wall portion 911 , a rear wall portion 912 , and side wall portions 913 and 914 . The front wall portion 911 and the rear wall portion 912 face each other in the front-rear direction. In the example of FIG. 7, side wall 913 connects the left end of front wall 911 and the left end of rear wall 912, and side wall 914 connects the right end of front wall 911 to the rear wall. The right end of the portion 912 is connected. A space surrounded by the front wall portion 911 , the rear wall portion 912 , the side wall portion 913 and the side wall portion 914 corresponds to the internal space of the carrier 90 .

In a state in which the carrier 90 is placed without being inclined, the upper end surface 913a of the side wall portion 913 and the upper end surface 914a of the side wall portion 914 extend along the front-rear direction. In the drying apparatus 1A, the carrier 90 is placed in an inclined posture when viewed in the left-right direction, so in this state, the upper end surface 913a of the side wall portion 913 and the upper end surface 914a of the side wall portion 914 are also inclined (Fig. 8). Therefore, the processing liquid remaining on the upper end surface 913a flows over the upper end surface 913a along the slope, and part of it falls from the upper end surface 913a. Although the remaining part of the processing liquid remains on the upper end surface 913a, the thickness of the processing liquid remaining on the trajectory of the flow becomes thin. According to this, the contact area between the processing liquid and the surrounding air can be increased, and the evaporation of the processing liquid can be promoted. The same applies to the upper end surface 914a.

An upper end surface 911a of the front wall portion 911 has a substantially U-shaped shape that opens upward. In a state in which the carrier 90 is placed without being tilted, the U-shaped center portion (bottom portion) of the upper end surface 911a extends along the left-right direction. In the drying apparatus 1A, the carrier 90 is placed in an inclined posture when viewed along the front-rear direction, so in this state, the central portion of the upper end surface 911a is also inclined. Therefore, the processing liquid remaining on the central portion of the upper end face 911a flows along the slope of the central portion. As a result, part of the treatment liquid drops from the central portion of the upper end surface 911a. Further, the processing liquid remaining on the central portion of the upper end surface 911a gathers at one end (the left end in the example of FIG. 7) of the central portion.

When the drying apparatus 1A completes the drying process, the carrier 90 is carried out, and the next undried carrier 90 is carried into the drying apparatus 1A. After that, the drying device 1A sequentially dries the substrate W1 and the carrier 90 by the same operation. Thus, a plurality of carriers 90 are carried into the drying apparatus 1A. When the drying apparatus 1A is carried in, the amount and position of the processing liquid remaining in each carrier 90 varies.

However, when the carrier 90 is placed on the placing plate 21 of the placing section 20 in the drying apparatus 1A, the carrier 90 is placed in an inclined posture as described above. As a result, part of the processing liquid on the central portion of the upper end surface 911a of the carrier 90 drops, while the remaining portion gathers at one end of the central portion. Therefore, the positions remaining on the central portion of the upper end surface 911a can be made more uniform among the plurality of carriers 90. FIG. According to this, it is possible to reduce non-uniform drying among the plurality of carriers 90 .

The upper end surface of the rear wall portion 912 of the carrier 90 may also have a substantially U-shaped shape opening upward. In this case, the processing liquid remaining on the upper end surface of the rear wall portion 912 is the same as the processing liquid remaining on the upper end surface 911 a of the front wall portion 911 .

7 and 8, the upper end surfaces 913a and 914a of the side wall portions 913 and 914 extend linearly along the direction in which the processing liquid flows, whereas the upper end surface 911a of the front wall portion 911 extends in the direction in which the processing liquid flows. has a substantially U-shaped shape. Therefore, the processing liquid on the upper end surface 911a of the front wall portion 911 is less likely to drop than the processing liquid on the upper end surfaces 913a and 914a of the side wall portions 913 and 914. FIG. Therefore, the tilt angle of the carrier 90 viewed along the front-rear direction may be set higher than the tilt angle of the carrier 90 viewed along the left-right direction. As a result, the processing liquid can be dropped more effectively while the carrier 90 is placed more stably.

Third embodiment.
FIG. 9 is a diagram schematically showing an example of the configuration of the drying device 1B, and FIG. 10 is a perspective view schematically showing an example of the configuration of the drying device 1B. The drying device 1B has the same configuration as the drying device 1 except for the presence or absence of the heating unit 60. As shown in FIG. The heating unit 60 is attached to the outer wall surface of the housing 10 and heats the internal space of the housing 10 through the housing 10 . The heating section 60 is controlled by the control section 50 .

The heating unit 60 includes a plurality of rubber heaters 61, for example. In the examples of FIGS. 9 and 10, each rubber heater 61 has a belt-like shape. The rubber heater 61 includes a flexible strip-shaped insulating material and a resistance wire for heat generation routed inside the insulating material. In the example of FIG. 10, the rubber heater 61 surrounds the side wall of the housing body 11 from the outside. The rubber heater 61 is preferably in close contact with the outer peripheral surface of the side wall of the housing body 11 . Thereby, heat can be efficiently transmitted to the housing main body 11 .

In the examples of FIGS. 9 and 10, a plurality of rubber heaters 61 are provided side by side at intervals along the vertical direction. At least one rubber heater 61 is preferably provided at a height position surrounding the substrate W1. Thereby, the rubber heater 61 can heat the inner space of the housing 10, particularly the peripheral edge of the substrate W1. At least one other rubber heater 61 may be provided above the substrate W1, and at least one other rubber heater 61 may be provided below the substrate W1. If the rubber heaters 61 are provided above and below the substrate W1 in this manner, the peripheral space of the substrate W1 to be dried can be effectively heated.

In a state in which the opening/closing member 12 is closed and the gas supply unit 30 is not supplying high-temperature gas, the heating unit 60 raises the internal temperature of the housing 10 to, for example, 60 degrees or higher (for example, about 70 degrees). do.

When the carrier 90 is unloaded, the opening operation of the opening/closing member 12 allows low-temperature outside air to flow into the housing 10 . If the heating unit 60 were not provided, the internal temperature of the housing 10 would drop to about 50 degrees or less when the carrier 90 was unloaded. On the other hand, when the heating unit 60 heats the internal space of the housing 10, the internal temperature of the housing 10 drops to about 70 degrees when the carrier 90 is unloaded. That is, the heating unit 60 can suppress a decrease in the internal temperature of the housing 10 when the carrier 90 is unloaded.

Therefore, when the next undried carrier 90 is carried in and the opening/closing member 12 is closed, the internal temperature of the housing 10 rises from a relatively high value (for example, about 70 degrees). As a result, the time required to reach a suitable temperature during the drying process can be shortened. In other words, it is possible to improve the throughput of the drying process.

Moreover, the heating unit 60 is not provided inside the housing 10 but is provided outside the housing 10 . According to this, even if particles (for example, peeling of an insulating material) are generated due to the heating unit 60, the particles adhere to the substrate W1 inside the housing 10 because the generation location is outside the housing 10. Unlikely. That is, compared with the case where the heating unit 60 is provided inside the housing 10, the possibility of particles adhering to the substrate W1 can be reduced.

FIG. 11 is a diagram schematically showing an example of the configuration of the drying device 1C. The drying device 1C has the same configuration as the drying device 1B except for the presence or absence of the temperature sensor 70. As shown in FIG.

A temperature sensor 70 measures the internal temperature of the housing 10 . In the example of FIG. 11, the temperature sensor 70 is provided inside the housing 10, and as a more specific example, the temperature sensor 70 is provided at a position adjacent to the mounting section 20 in the horizontal direction. Thereby, the temperature sensor 70 can measure the internal temperature in the vicinity of the plurality of substrates W1. Note that the temperature sensor 70 may be provided inside the enclosure 22 . According to this, it is possible to measure the internal temperature in the vicinity of a plurality of substrates W1. The temperature sensor 70 outputs measurement information indicating the measured internal temperature to the control unit 50 .

A plurality of temperature sensors 70 may be provided. The control unit 50 may calculate the internal temperature of the housing 10 by averaging the internal temperature of each position based on the measurement information input from the plurality of temperature sensors 70 .

Based on the internal temperature measured by the temperature sensor 70 , the control unit 50 determines whether to permit/prohibit introduction of the next carrier 90 . The control unit 50 opens the opening/closing member 12 when the carrying-in of the carrier 90 is permitted, and closes the opening/closing member 12 when the carrying-in of the carrier 90 is prohibited. That is, the controller 50 controls opening and closing of the opening/closing member 12 based on the internal temperature measured by the temperature sensor 70 .

FIG. 12 is a flow chart showing an example of the operation of the drying device 1C. FIG. 12 shows an example of the operation of the control section 50 when the carrier 90 is carried in and out. This series of processes is executed when the drying device 1C finishes drying the carrier 90 . First, in step S<b>1 , the control section 50 controls the driving section of the opening/closing member 12 to open the opening/closing member 12 . As a result, low-temperature outside air flows into the housing 10, and the internal temperature of the housing 10 decreases. Next, in step S2, the external conveying device carries out the dried carrier 90 to the outside of the drying device 1C.

Next, in step S3, the control unit 50 determines whether the internal temperature of the housing 10 measured by the temperature sensor 70 is equal to or higher than the first target value. When the internal temperature is equal to or higher than the first target value, the external transport device carries the next carrier 90 inside the drying device 1C in step S7. That is, when the internal temperature of the housing 10 is equal to or higher than the first target value, the internal temperature is sufficiently high, so the controller 50 permits the loading of the next carrier 90 and performs the drying process.

On the other hand, when the internal temperature is less than the first target value, the control section 50 controls the driving section of the opening/closing member 12 to close the opening/closing member 12 in step S4. When the opening/closing member 12 is closed, the internal temperature of the housing 10 rises due to heating by the heating unit 60 and discharge of high-temperature gas from the air supply port 31a. In other words, when the internal temperature is low, it takes a long time to reach the temperature suitable for drying, and there is a possibility that the drying failure may occur. The opening/closing member 12 is closed to raise the internal temperature.

Next, in step S5, the controller 50 determines whether the internal temperature of the housing 10 measured by the temperature sensor 70 is equal to or higher than the second target value. A 2nd target value is a value more than a 1st target value. When the internal temperature of housing 10 is less than the second target value, controller 50 executes step S5 again. When the internal temperature of the housing 10 is equal to or higher than the second target value, the control section 50 controls the driving section of the opening/closing member 12 to open the opening/closing member 12 in step S6. Next, in step S7, the external transport device carries the next carrier 90 inside the drying device 1C.

As described above, according to the drying apparatus 1C, only when the internal temperature of the housing 10 measured by the temperature sensor 70 is high, the carrier 90 is carried into the drying apparatus 1C and the drying process is performed. Therefore, the plurality of substrates W1 and carrier 90 can be dried more reliably by the drying process.

Moreover, since the heating unit 60 is provided in the drying apparatus 1C, it is possible to reduce the possibility that the internal temperature of the housing 10 becomes less than the first target value at the time of step S3. Even if the internal temperature of the housing 10 becomes less than the first target value at the time of step S3, the time from closing the opening/closing member 12 until the internal temperature of the housing 10 becomes equal to or higher than the second target value is can be shortened.

Although the substrate processing apparatus has been shown and described in detail, the above description is illustrative in all aspects and not restrictive. Therefore, the substrate processing apparatus can be appropriately modified or omitted from the embodiments within the scope of the disclosure. Also, the above-described embodiments can be appropriately combined.

REFERENCE SIGNS LIST 1 drying device 10 housing 12 opening/closing member 14 lower housing portion 20 mounting section 30 gas supply section 31 bar nozzle (nozzle)
31a Air supply port 38 Air supply side straightening plate (rectifying plate)
40 Gas discharge part 41 Straightening structure 42 Exhaust pipe 42a Exhaust port 43 Flow rate adjustment part 44 Exhaust side straightening plate (rectifying plate)
45 gas-liquid separation unit 46 exhaust main pipe 47 drain pipe 49 baffle plate 50 control unit 60 heating unit 61 rubber heater 70 temperature sensor 90 carrier W1 substrate

Claims (17)

A drying device for drying a plurality of substrates,
a housing;
a carrier on which the plurality of substrates are accommodated is placed inside the housing;
a gas supply unit having an air supply port provided above the plurality of substrates placed on the mounting unit, and supplying a drying gas from the air supply port toward the plurality of substrates; ,
a gas discharge part having an exhaust port provided below the mounting part and exhausting the gas to the outside from the exhaust port;
The gas discharge part has a rectifying structure that rectifies the flow of the gas ,
A plurality of the exhaust ports are provided and open upward,
The gas discharge part is
a plurality of exhaust pipes each having the exhaust port and arranged two-dimensionally in a plan view;
a suction unit;
a main pipe connected to the suction unit;
a gas-liquid separation section partitioned by an upper surface, a lower surface, and a side surface;
including
The drying device , wherein the gas-liquid separator is arranged between the plurality of exhaust pipes and the main pipe . A drying apparatus according to claim 1,
The drying device, wherein the gas discharge section has an exhaust-side straightening plate for straightening the gas as the straightening structure. A drying apparatus according to claim 1 or claim 2,
The drying apparatus, wherein the plurality of exhaust pipes are arranged at regular intervals. The drying apparatus according to any one of claims 1 to 3 ,
The drying device, wherein the gas discharge part further includes a flow rate adjustment part that is provided in at least one of the plurality of exhaust pipes and that adjusts the flow rate of the gas. A drying apparatus according to claim 4,
The drying device, wherein at least one of the plurality of exhaust pipes is not provided with the flow rate adjusting section. The drying apparatus according to any one of claims 1 to 5,
The gas-liquid separator separates gas and liquid from the fluid flowing in from the plurality of exhaust pipes ,
The main pipe includes an exhaust main pipe for discharging the gas from the gas-liquid separation unit to the outside,
The gas discharge unit includes a drain pipe for discharging the liquid from the gas-liquid separation unit to the outside,
The plurality of exhaust pipes are connected to the upper surface of the gas-liquid separation unit,
The drying device, wherein the exhaust main pipe is connected to a central portion of the lower surface of the gas-liquid separation section. The drying apparatus according to claim 4 or claim 5,
The gas-liquid separator separates gas and liquid from the fluid flowing from the plurality of exhaust pipes ,
The main pipe includes an exhaust main pipe for discharging the gas from the gas-liquid separation unit to the outside,
The gas discharge unit includes a drain pipe for discharging the liquid from the gas-liquid separation unit to the outside,
The plurality of exhaust pipes are connected to the upper surface of the gas-liquid separation unit,
The drying device, wherein the exhaust main pipe is connected to the side surface of the gas-liquid separation unit.
drying equipment. A drying apparatus according to any one of claims 1 to 7 ,
The drying apparatus further includes a supply-side straightening plate provided between the air supply port of the gas supply unit and the plurality of substrates inside the housing to straighten the flow of the gas. A drying apparatus according to any one of claims 1 to 8 ,
A plurality of the air supply ports are provided,
The drying device, wherein the gas supply unit includes bar nozzles having the air supply ports arranged in a horizontal direction. A drying apparatus according to any one of claims 1 to 9 ,
The drying device, wherein the carrier is placed in an inclined posture on the carrier. A drying apparatus according to claim 10 ,
The drying device, wherein the mounting section mounts the carrier in an inclined posture in two directions different from each other. A drying apparatus according to any one of claims 1 to 11 ,
A drying apparatus further comprising a heating unit attached to an outer wall surface of the housing. 13. A drying apparatus according to claim 12 ,
The heating unit includes a plurality of rubber heaters having a belt-like shape and surrounding the housing,
The drying device, wherein the plurality of rubber heaters are arranged in a vertical direction. A drying apparatus according to any one of claims 1 to 13 ,
a temperature sensor provided inside the housing;
A drying apparatus, further comprising a control unit that controls opening and closing of the opening/closing member of the housing based on the temperature of the temperature sensor. A drying apparatus according to any one of claims 1 to 14 ,
The drying device, wherein the housing is a closed housing. A drying apparatus according to any one of claims 1 to 15,
The drying device, wherein the carrier stores the plurality of substrates in a posture in which the thickness direction of each substrate is along the horizontal direction. A drying device for drying a plurality of substrates,
a housing;
a carrier on which the plurality of substrates are accommodated is placed inside the housing;
a gas supply unit having an air supply port provided above the plurality of substrates placed on the mounting unit, and supplying a drying gas from the air supply port toward the plurality of substrates; ,
a gas discharge unit having an exhaust port provided below the mounting unit and discharging the gas to the outside from the exhaust port;
with
The gas discharge part has a rectifying structure that rectifies the flow of the gas,
A plurality of the exhaust ports are provided and open upward,
The gas discharge unit includes a plurality of exhaust pipes each having the exhaust port as the rectifying structure,
The exhaust ports of the plurality of exhaust pipes are two-dimensionally dispersed and arranged in a plan view,
The gas discharge part is
a gas-liquid separation unit for separating gas and liquid from the fluid flowing in from the plurality of exhaust pipes;
an exhaust main pipe for discharging the gas from the gas-liquid separation unit to the outside;
a drainage pipe for discharging the liquid from the gas-liquid separation unit to the outside;
including
The plurality of exhaust pipes are connected to the upper surface of the gas-liquid separation unit,
The drying device, wherein the exhaust main pipe is connected to a central portion of the lower surface of the gas-liquid separation section.

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