JP7224232B2 - Synchronous linear motor and method for manufacturing synchronous linear motor - Google Patents

Description

The present application relates to a synchronous linear motor and a method for manufacturing a synchronous linear motor.

2. Description of the Related Art In recent years, there has been an increasing demand for high-speed, high-accuracy positioning functions and the like for actuators used in table feeders of machine tools and transfer equipment in semiconductor manufacturing equipment. For this reason, linear motors are often used in machine tools, semiconductor manufacturing equipment, and the like.

A linear motor drives the device directly without going through a transmission. Therefore, there is no decrease in rigidity due to backlash of the ball screw, compared to a drive system that combines a rotary servomotor and a ball screw and converts the rotary mechanism into linear motion. Therefore, the linear motor has high responsiveness, high speed, and high acceleration to the above combination, and is capable of highly accurate positioning.

A conventional linear motor has a stator and a mover that faces the stator with a certain gap therebetween and moves relative to the stator. The mover is constructed by winding a coil around each tooth of a core made of a magnetic material. The stator has an iron core made of a magnetic material and permanent magnets magnetized in the air gap direction, and the permanent magnets are arranged at a constant distance along the movement direction of the mover.

Also, the magnetization directions of adjacent permanent magnets are different from each other. Conveyance equipment having a linear motor as described above tends to increase in cost because the number of permanent magnets increases as the moving distance of the mover increases.

JP 2009-195104 A

The linear motor disclosed in Patent Document 1 includes a mover configured by winding a coil around a split core, and a stator configured by an iron core having salient poles. Further, in order to suppress an increase in cost, the permanent magnets, which were conventionally arranged in the stator, are arranged in the teeth of the split core of the mover. Auxiliary split cores on which permanent magnets are arranged and coils are not wound are arranged on both end sides in the moving direction of the mover.

Furthermore, the shape of the permanent magnet arranged in the auxiliary split core differs from the shape of the permanent magnet arranged in the split core around which the coil is wound. Also, the length of the gap between the auxiliary split core and the stator is different from the length of the gap between the split core around which the coil is wound and the stator. These configurations reduce the cogging thrust generated between the permanent magnet and the core of the mover.

However, there is still a problem that cogging thrust is generated due to variations in the magnetic pole pitch caused by the dimensional accuracy and assembly accuracy of the split cores that constitute the mover.

The present application discloses a technique for solving the above problems, and a synchronous linear motor capable of reducing the cogging thrust caused by the dimensional accuracy and assembly accuracy of the core, and a method for manufacturing the synchronous linear motor. intended to provide

The synchronous linear motor disclosed in the present application is
a stator having a base and a plurality of salient poles made of a magnetic material projecting upward from the upper surface of the base at equal intervals in the longitudinal direction of the base;
a first half core back having a first half core back; first half teeth protruding from the first half core back toward the stator; a second half core back; a plurality of split cores coupled in the longitudinal direction, each comprising a second half split core having a second half split tooth projecting from the split core back toward the stator;
a permanent magnet sandwiched between the first half-core and the second half-core;
a mover having coils wound around respective teeth composed of the first half tooth and the second half tooth,
the first half-split core and the second half-split core are asymmetric with respect to the permanent magnet as an axis of symmetry;
Of the two adjacent split cores, the adjacent first half core and second half core have contact surfaces that are parallel to the base and contact each other.

Further, the method for manufacturing a synchronous linear motor disclosed in the present application includes:
A coupling step of coupling the plurality of split cores in the longitudinal direction while adjusting the magnetic pole pitch of the permanent magnets to be equal in the longitudinal direction.

According to the synchronous linear motor and the method for manufacturing the synchronous linear motor disclosed in the present application, the magnetic pole pitch can be adjusted within the range where the contact surfaces of the adjacent split cores abut to assemble the mover. A synchronous linear motor with reduced cogging thrust caused by variations can be provided.

1 is a perspective view of a synchronous linear motor according to Embodiment 1; FIG. 2 is a cross-sectional view perpendicular to the stacking direction of the synchronous linear motor according to the first embodiment; FIG. 4 is a diagram showing a manufacturing flow of the mover according to Embodiment 1; FIG. 4 is a side view of the mover in the middle of manufacturing according to Embodiment 1. FIG. FIG. 10 is a cross-sectional view perpendicular to the stacking direction of the mover of the synchronous linear motor according to the second embodiment; FIG. 10 is a diagram showing a manufacturing flow of the mover according to Embodiment 2; FIG. 11 is a side view of the mover in the middle of manufacturing according to the second embodiment; FIG. 11 is a cross-sectional view perpendicular to the stacking direction of the mover of the synchronous linear motor according to Embodiment 3; FIG. 10 is a diagram showing a manufacturing flow of the mover according to Embodiment 3; FIG. 11 is a side view of a mover in the middle of manufacturing according to Embodiment 3; FIG. 12 is a cross-sectional view perpendicular to the stacking direction of the mover of the synchronous linear motor according to Embodiment 4; FIG. 12 is a diagram showing a manufacturing flow of the mover according to Embodiment 4; FIG. 11 is a side view of a mover in the middle of manufacturing according to Embodiment 4; FIG. 11 is a perspective view of a mover of a synchronous linear motor according to Embodiment 5; FIG. 14 is a cross-sectional view perpendicular to the stacking direction of the mover of the synchronous linear motor according to Embodiment 6;

Embodiment 1.
A synchronous linear motor and a method for manufacturing the synchronous linear motor according to the present embodiment will be described below with reference to the drawings.
FIG. 1 is a perspective view of a synchronous linear motor 100 according to Embodiment 1. FIG.
FIG. 2 is a cross-sectional view perpendicular to the stacking direction B of the synchronous linear motor 100. As shown in FIG.
A synchronous linear motor 100 includes a mover 40 and a stator 3 . The synchronous linear motor 100 is a wound magnet mover type synchronous linear motor in which both the coil 6 and the permanent magnet 5 as windings are arranged in the mover 40 .
In FIG. 1 , the longitudinal direction A is the longitudinal direction of the mover 40 and the stator 3 . A stacking direction B indicates a stacking direction of a plurality of electromagnetic steel sheets that constitute the mover 40, and is a direction perpendicular to the longitudinal direction A described above. The vertical direction C is the vertical direction of the mover 40 during use. The longitudinal direction A, stacking direction B, and vertical direction C are directions perpendicular to each other.

A mover 40 of the synchronous linear motor 100 is supported by a slider (not shown) or the like. Therefore, as shown in FIG. 2, the mover 40 can move in the longitudinal direction A on the stator 3 through the gap g.

The mover 40 is composed of six split cores 4 , six permanent magnets 5 , and six coils 6 that are aligned in the longitudinal direction A and coupled together. The split core 4 further comprises a first half split core 4a and a second half split core 4b arranged in the longitudinal direction A. As shown in FIG. The first half core 4a has a first half core back 41a and first half teeth 42a projecting from the first half core back 41a toward the stator 3 side. Similarly, the second half core 4b has a second half core back 41b and second half teeth 42b projecting from the second half core back 41b toward the stator 3 side. The core back 41 is a combination of the first half split core back 41a and the second half split core back 41b, and the teeth 42 is a combination of the first half split teeth 42a and the second half split teeth 42b. is.

A permanent magnet 5 is sandwiched between the first half core 4a and the second half core 4b. The first half core 4a and the second half core 4b are each formed by stacking a plurality of magnetic steel sheets in the stacking direction B. As shown in FIG.

The first half core back 41a and the second half core back 41b have an asymmetrical shape with the permanent magnet 5 as the axis of symmetry. On the other hand, the first half-split tooth 42a and the second half-split tooth 42b have symmetrical shapes with the permanent magnet 5 as the axis of symmetry.

The length of the permanent magnets 5 in the vertical direction C is shorter than the length of the split cores 4 in the vertical direction C, and the lower ends 42 d of the teeth 42 protrude downward from the lower ends 5 d of the permanent magnets 5 . On the other hand, the upper end portion 41u of the core back 41 and the upper end portion 5u of the permanent magnet 5 are flush with each other. The magnetization directions 12 of the six permanent magnets 5 are along the longitudinal direction A. As shown in FIG. The permanent magnets 5 arranged between the adjacent split cores 4 are magnetized so that the magnetic poles facing each other have the same polarity. That is, the magnetic poles of the permanent magnet 5 are formed on both end faces in the longitudinal direction A of the permanent magnet 5, the magnetic pole on one end face in the longitudinal direction A has N pole, and the magnetic pole on the other end face on the opposite side is , S pole.

Coils 6 are intensively wound around the teeth 42 of the split core 4 via an insulating member (not shown). Adjacent laminations of the magnetic steel sheets forming the split core 4 are held and joined by adhesive or by caulking by pressing in a mold. The six split cores 4 are arranged along the longitudinal direction A to constitute a mover core made of a magnetic material as a whole.

Of the two adjacent split cores 4, the first split core back 41a of one split core 4 and the second split core back 41b of the other split core 4 are in contact with each other along the longitudinal direction A. It has contact surfaces 41at and 41bt. Adjacent split cores 4 are integrated by fixing the contact surfaces 41at and 41bt to each other by a connecting means such as welding within the range where the contact surfaces 41at and 41bt contact each other.

The stator 3 is formed by laminating a plurality of electromagnetic steel sheets in the lamination direction B. As shown in FIG. The stator 3 has a required length along the longitudinal direction A of the mover 40 according to its application. A plurality of stator blocks 30 may be connected and arranged along the longitudinal direction A as shown in FIG. Adjacent laminations of the electromagnetic steel sheets forming the stator 3 are held and connected by adhesive, caulking by pressing in a mold, or fastening by fastening members such as rivets and bolts. However, the structures of the first half-split core 4a, the second half-split core 4b, and the stator 3 are not limited to the laminated core, but are an integrated structure made of magnetic steel or an assembly type made of magnetic steel. structure can be used.

As described above, the stator 3 includes a base portion 31 that serves as a pedestal and a plurality of salient poles 32 made of a magnetic material that protrude upward from the base portion 31 . The plurality of salient poles 32 are spaced apart from each other at predetermined intervals along the longitudinal direction A of the mover 40 .

As shown in FIG. 2, the lower ends 42d of the teeth 42 of the mover 40 are arranged to face the salient poles 32 with a gap g therebetween. Here, the gap g represents the shortest distance between the mover 40 and the stator 3.

The first half-split core 4a, the second half-split core 4b, and the permanent magnet 5 are joined at their respective interfaces by a joining means such as an adhesive or double-sided tape. Alternatively, the coil 6 is wound while positioning and holding the first half core 4a, the second half core 4b, and the permanent magnet 5 with a jig or the like without being coupled at their boundary surfaces. They may be mutually held and fixed by the tension of the coils 6 .

Next, a method for manufacturing the mover 40 of the synchronous linear motor 100 will be described.
FIG. 3 is a diagram showing a manufacturing flow of the mover 40. As shown in FIG.
FIG. 4 is a side view of the mover 40 during manufacture.
The manufacturing method will be described step by step below.
First, the first half core 4a and the second half core 4b are formed by pressing using a mold (not shown) and a press machine (not shown) (step S001: first and second half core manufacturing steps). .

Next, using a split core assembly jig (not shown), the permanent magnet 5, the first half split core 4a, and the second half split core 4b are positioned on the core back surface side while the permanent magnet 5 and the first half split are assembled. The core 4a and the second half core 4b are joined with an adhesive or the like to assemble the split core 4 (step S002: split core assembling step).

Next, the coil 6 is wound around the teeth 42 of the split core 4 by a winding machine (not shown) (step S003: coil winding step).

Next, as shown in FIG. 4, the plurality of split cores 4 around which the coils 6 are wound are positioned using a plate-shaped mover positioning jig 13. Next, as shown in FIG. On one surface of the plate-shaped mover positioning jig 13, a plurality of convex portions 13p (third convex portions in the claims) are provided at equal intervals at the same intervals as the magnetic pole pitch of the manufactured mover. there is As described above, the lower ends 42d of the teeth 42 protrude below the lower ends 5d of the permanent magnets 5, so that the lower end faces of the teeth 42 have recesses 42r below the lower ends 5d of the permanent magnets 5. (The third recess in the claims) is formed.

Here, each split core 4 is arranged so that the surface 42r1 of each recess 42r of each split core 4 in one direction of the longitudinal direction A contacts the surface of each protrusion 13p in the other direction of the longitudinal direction A. Along the longitudinal direction A, they are positioned and arranged on the mover positioning jig 13 . As a result, the permanent magnets 5 can be arranged so that the magnetic pole pitches are equal. Positioning of the teeth 42 in the vertical direction C is performed by bringing the lower ends 42 d of the teeth 42 into contact with the upper surface 13 u of the mover positioning jig 13 . Once positioned, the respective split cores 4 are fixed by the fixing jig 15 so as not to move (step S004: split core placement step).

Next, the split cores 4 around which the coils 6 are wound are joined together by joining means such as welding to assemble the mover 40 (step S005: joining step). In FIG. 4, the parts marked with a circle Y are welded together.
Next, the permanent magnet 5 is magnetized from the upper surface, the bottom surface, or both directions by a magnetizing device (not shown) (step S006: magnetizing step).

Note that the split cores 4 may be assembled using the permanent magnets 5 magnetized in advance, in which case the magnetization step of step S006 is performed before step S002.

According to the synchronous linear motor and the method for manufacturing the synchronous linear motor according to the first embodiment, the magnetic pole pitch can be adjusted within the range where the contact surfaces of the adjacent split cores abut to assemble the mover. Therefore, the permanent magnets 5 provided on the split cores 4 can be moved in the longitudinal direction without being affected by the dimensional accuracy of the first half split core 4a, the second half split core 4b, and the permanent magnets 5, and the assembly accuracy of the split cores 4. Since they can be arranged at equal pitches along A, it is possible to provide the synchronous linear motor 100 with reduced cogging thrust caused by variations in the pitch of the magnetic poles. Further, each split core is arranged in the longitudinal direction A so that the surface of each concave portion 42r of each split core 4 in one direction in the longitudinal direction A abuts the surface of each convex portion 13p in the other direction in the longitudinal direction A. Since the positioning can be performed on the mover positioning jig 13 along the , the positioning of each split core 4 can be facilitated.

Embodiment 2.
A synchronous linear motor and a method for manufacturing the synchronous linear motor according to the second embodiment will be described below with reference to the drawings, focusing on differences from the first embodiment.
FIG. 5 is a cross-sectional view of the mover 240 of the synchronous linear motor, and is a cross-sectional view perpendicular to the stacking direction B of the electromagnetic steel plates of each split core 4. As shown in FIG.

The difference between the mover 40 described in the first embodiment and the mover 240 according to the present embodiment is the positional relationship of the recesses provided on the end face of the mover 40 . In Embodiment 1, since the lower end portions 42d of the teeth 42 protrude further downward than the lower end portions 5d of the permanent magnets 5, recesses are formed under the lower end surfaces of the teeth 42 and the lower end portions 5d of the permanent magnets 5. 42r was formed. In the present embodiment, the length of the permanent magnet 5 in the vertical direction C is shorter than the length of the split core 4 in the vertical direction C, and the upper end portion 41 u of the core back 41 is longer than the upper end portion 5 u of the permanent magnet 5 . protruding upwards. Accordingly, a recess 241r (third recess in the scope of claims) is formed in the upper end portion 41u of the core back 41 .

Next, a method for manufacturing the mover 240 will be described.
FIG. 6 is a diagram showing a manufacturing flow of the mover 240. As shown in FIG.
FIG. 7 is a side view of the mover 240 during manufacturing.
The manufacturing method will be described step by step below.
First, the first half core 4a and the second half core 4b are formed by pressing using a mold (not shown) and a press machine (not shown) (step S001: first and second half core manufacturing steps). .

Next, using a split core assembly jig (not shown), the permanent magnet 5, the first half split core 4a, and the second half split core 4b are positioned on the core back surface side while the permanent magnet 5 and the first half split are assembled. The core 4a and the second half core 4b are joined with an adhesive or the like to assemble the split core 4 (step S002: split core assembling step).

Next, the coil 6 is wound around the teeth 42 of the split core 4 by a winding machine (not shown) (step S003: coil winding step).

Next, as shown in FIG. 7, a plurality of split cores 4 wound with coils 6 are arranged in a row on a flat fixing jig 15 with the tips of teeth 42 directed downward. After that, the plate-shaped mover positioning jig 13 used in the first embodiment is turned upside down, and the plurality of convex portions 13p are inserted into the respective concave portions 241r, and the mover positioning jig 13 is moved longitudinally. Move in one direction, direction A. As a result, the surface of each concave portion 241r of each split core 4 in one direction in the longitudinal direction A contacts the surface of each convex portion 13p in the other direction in the longitudinal direction A, so that the permanent magnets 5 are arranged at equal magnetic pole pitches. They can be arranged so as to be spaced apart (step S204: divided core arrangement step).

Next, the split cores 4 around which the coils 6 are wound are joined together by joining means such as welding to assemble the mover 240 (step S005: joining step). Next, the permanent magnet 5 is magnetized from the upper surface, the bottom surface, or both directions by a magnetizing device (not shown) (step S006: magnetizing step).

According to the synchronous linear motor and the method for manufacturing the synchronous linear motor according to the second embodiment, the same effects as those of the first embodiment are obtained.

Embodiment 3.
A synchronous linear motor and a method for manufacturing the synchronous linear motor according to the third embodiment will be described below with reference to the drawings, focusing on differences from the first and second embodiments.
FIG. 8 is a cross-sectional view of the mover 340 of the synchronous linear motor, and is a cross-sectional view perpendicular to the stacking direction B of the electromagnetic steel plates of each split core 4 .

In the movers 40 and 240 described in Embodiments 1 and 2, the length of the permanent magnet 5 in the vertical direction C is set shorter than the length of the split core 4 in the vertical direction C, and the end surface of the split core 4 has a concave portion 42r. , 241r are provided, and each split core 4 is positioned using these concave portions. In the third embodiment, the length of the permanent magnet 305 in the vertical direction C is longer than the length of the split core 4 in the vertical direction C, and the lower end 305d of the permanent magnet 305 is lower than the lower end 42d of the teeth 42 . is made to protrude. A surface 305d1 of the lower end portion 305d of the permanent magnet 305 in one direction in the longitudinal direction A is placed on the surface in the other direction of the longitudinal direction A of a plurality of convex portions 13p provided on the upper surface of the mover positioning jig 13 at regular intervals. By bringing them into contact with each other, the positions of the permanent magnets 305 are positioned at equal intervals.

Next, a method for manufacturing the mover 340 will be described.
FIG. 9 is a diagram showing a manufacturing flow of the mover 340. As shown in FIG.
FIG. 10 is a side view of mover 340 during manufacture.
The manufacturing method will be described step by step below.
First, the first half core 4a and the second half core 4b are formed by pressing using a mold (not shown) and a press machine (not shown) (step S001: first and second half core manufacturing steps). .

Next, using a split core assembly jig (not shown), permanent magnet 305, first half split core 4a, and second half split core 4b are positioned on the core back surface side while permanent magnet 305 and first half split core are assembled. The core 4a and the second half core 4b are joined with an adhesive or the like to assemble the split core 4 (step S002: split core assembling step). At this time, the lower ends 305d of the permanent magnets 305 protrude below the lower ends 42d of the teeth 42. As shown in FIG.

Next, the coil 6 is wound around the teeth 42 of the split core 4 by a winding machine (not shown) (step S003: coil winding step).

Next, as shown in FIG. 10, the plurality of split cores 4 around which the coils 6 are wound are positioned using the mover positioning jig 13 . A plurality of convex portions 13p are provided at regular intervals on the upper surface of the plate-like mover positioning jig 13 . The projecting length of the convex portion 13 p is longer than the projecting length of the lower end portion 305 d of the permanent magnet 305 projecting from the teeth 42 .

Here, the split cores 4 are arranged so that the surfaces 305d1 of the lower ends 305d of the permanent magnets 305 in one direction of the longitudinal direction A contact the surfaces of the protrusions 13p in the other direction of the longitudinal direction A. Position and line up along the longitudinal direction A. As a result, the permanent magnets 305 can be arranged so that the magnetic pole pitches are equal. Positioning of the teeth 42 in the vertical direction C is performed by bringing the lower ends 42d of the teeth 42 into contact with the upper surfaces 13pu of the protrusions 13p. Once positioned, the respective split cores 4 are fixed by the fixing jig 15 so as not to move (step S304: split core placement step).

Next, the split cores 4 around which the coils are wound are joined together by joining means such as welding to assemble the mover 340 (step S005: joining step). Next, the permanent magnet 305 is magnetized from the upper surface, the bottom surface, or both directions by a magnetizing device (not shown) (step S006: magnetizing step).

Note that split cores 4 may be assembled using permanent magnets that are magnetized in advance, as in the first and second embodiments.

According to the synchronous linear motor and the method for manufacturing the synchronous linear motor according to the third embodiment, the same effects as those of the first and second embodiments are obtained.

Embodiment 4.
A synchronous linear motor and a method of manufacturing the synchronous linear motor according to the fourth embodiment will be described below with reference to the drawings, focusing on differences from the third embodiment.
FIG. 11 is a cross-sectional view of the mover 440 of the synchronous linear motor, and is a cross-sectional view perpendicular to the stacking direction B of the electromagnetic steel plates of each split core 4 .

In the third embodiment, the length of the permanent magnet 305 in the vertical direction C is longer than the length of the split core 4 in the vertical direction C, and the lower end 305d of the permanent magnet 305 protrudes below the lower end 42d of the tooth 42. However, in the present embodiment, the length of the permanent magnet 305 in the vertical direction C is made longer than the length of the split core 4 in the vertical direction C, and the upper end portion 305u of the permanent magnet 305 is located at the upper end of the core back 41. It protrudes upward from the portion 41u.

Next, a method for manufacturing the mover 440 will be described.
FIG. 12 is a diagram showing a manufacturing flow of the mover 440. As shown in FIG.
FIG. 13 is a side view of mover 440 during manufacture.
The manufacturing method will be described step by step below.
First, the first half core 4a and the second half core 4b are formed by pressing using a mold (not shown) and a press machine (not shown) (step S001: first and second half core manufacturing steps). .

Next, using a split core assembly jig (not shown), permanent magnet 305, first half split core 4a, and second half split core 4b are positioned on the core back surface side while permanent magnet 305 and first half split core are assembled. The core 4a and the second half core 4b are joined with an adhesive or the like to assemble the split core 4 (step S002: split core assembling step).

Next, the coil 6 is wound around the teeth 42 of the split core 4 by a winding machine (not shown) (step S003: coil winding step).

Next, as shown in FIG. 13, a plurality of split cores 4 wound with coils 6 are temporarily arranged in a line on a flat fixing jig 15 with the tips of the teeth 42 directed downward. Next, the plate-like mover positioning jig 13 used in Embodiment 3 is turned upside down and placed on the plurality of split cores 4 arranged in a line. At this time, each split core 4 is longitudinally aligned so that the surface of each upper end portion 305u of the permanent magnet 305 in one direction of the longitudinal direction A contacts the surface of each convex portion 13p in the other direction of the longitudinal direction A. Position and line up along direction A. As a result, the permanent magnets 305 can be arranged so that the magnetic pole pitches are equal. Positioning of the teeth 42 in the vertical direction C is performed by bringing the lower ends 42 d of the teeth 42 into contact with the upper surface of the fixing jig 15 . Once positioned, each split core 4 is fixed by the mover positioning jig 13 and the fixing jig 15 so as not to move (step S404: split core placement step).

Next, the split cores 4 around which the coils 6 are wound are joined together by joining means such as welding to assemble the mover 40 (step S005: joining step). Next, the permanent magnet 305 is magnetized from the upper surface, the bottom surface, or both directions by a magnetizing device (not shown) (step S006: magnetizing step).

According to the synchronous linear motor and the method for manufacturing the synchronous linear motor according to the fourth embodiment, the same effects as those of the first to third embodiments are obtained.

Embodiment 5.
A synchronous linear motor and a method of manufacturing the synchronous linear motor according to the fifth embodiment will be described below with reference to the drawings, focusing on the differences from the first to third embodiments.
14 is a perspective view of the mover 540. FIG.
In Embodiments 1 to 4, the method of positioning in the longitudinal direction A and the vertical direction C using separate jigs has been described. In this embodiment, a configuration for positioning in the stacking direction B by the configuration of split cores will be described.

One first half split core back 541a of the adjacent split cores 504 protrudes in one direction in the longitudinal direction A and has a protrusion 541ap (first protrusion in the claims) extending in the vertical direction. The second half split core back 541b of the other split core 504 is recessed in one direction in the longitudinal direction A, extends in the vertical direction C, and engages with the protrusion 541ap described above. one recess). The protrusions and recesses for positioning the stacking direction B are not limited to the example shown in FIG. 14, and may be provided at a plurality of locations. Since other configurations are the same as those of the first embodiment, description thereof is omitted.

According to the synchronous linear motor and the method for manufacturing the synchronous linear motor according to the fifth embodiment, the adjacent split cores 504 are engaged with each other by the convex portion 541ap and the concave portion 541br, and are moved in the longitudinal direction A while being slid in the longitudinal direction A. The mover can be assembled by adjusting the magnetic pole pitch. Therefore, the adjacent split cores 504 are not displaced in the stacking direction B, and a synchronous linear motor having better assembly workability than the first to third embodiments can be provided.

Embodiment 6.
A synchronous linear motor and a method of manufacturing a synchronous linear motor according to the sixth embodiment will be described below with reference to the drawings, focusing on differences from the fifth embodiment.
FIG. 15 is a cross-sectional view of the mover 640 of the synchronous linear motor, and is a cross-sectional view perpendicular to the stacking direction B of the electromagnetic steel sheets of each split core 604. As shown in FIG.

In the fifth embodiment, the configuration of positioning the adjacent split cores 504 in the stacking direction B according to the configuration of the split cores 504 has been described. In this embodiment, a configuration for positioning in the vertical direction C by the configuration of split cores will be described.

One first half split core back 641a of the adjacent split cores 604 is recessed in one direction of the longitudinal direction A and has a recess 641ar (second recess in the claims) extending in the stacking direction B. The second half split core back 641b of the other split core 604 protrudes in one direction in the longitudinal direction A and extends in the stacking direction to engage with the recess 641ar. part). Since other configurations are the same as those of the first embodiment, description thereof is omitted. The protrusions and recesses for positioning in the vertical direction C are not limited to the example shown in FIG. 15, and may be provided at a plurality of locations.

According to the synchronous linear motor and the method for manufacturing the synchronous linear motor according to the sixth embodiment, the adjacent split cores 604 are engaged with each other by the protrusions 641bp and the recesses 641ar, and the magnetic poles in the longitudinal direction A are formed while sliding in the longitudinal direction A. The mover can be assembled by adjusting the pitch. Therefore, the split core 604 is not displaced in the vertical direction C, and a synchronous linear motor having superior assembly workability compared to the first to fourth embodiments can be provided.

While this application describes various exemplary embodiments and examples, various features, aspects, and functions described in one or more embodiments may not apply to particular embodiments. can be applied to the embodiments singly or in various combinations.
Therefore, countless modifications not illustrated are envisioned within the scope of the technology disclosed in the present application. For example, modification, addition or omission of at least one component, extraction of at least one component, and combination with components of other embodiments shall be included.

100 synchronous linear motor, 3 stator, 31 base, 32 salient poles,
4,504,604 split core, 4a first half split core, 4b second half split core,
40,240,340,440,540,640 mover, 41 core back,
41a, 541a, 641a first half split core back,
41b, 541b, 641b second half split core back,
41at, 41bt contact surface, 41u upper end portion, 42 teeth,
42a first half-split tooth, 42b second half-split tooth, 42d bottom end,
42r, 241r, 541br, 641ar concave portion, 541ap, 641bp convex portion,
5, 305 permanent magnet, 5d, 305d lower end, 5u, 305u upper end,
6 coil, 12 magnetization direction, 13 mover positioning jig, 13p projection,
13pu, 13u upper surface, 15 fixing jig, A longitudinal direction, B stacking direction,
C vertical direction, Y ○ mark, g gap.

Claims (13)

a stator having a base and a plurality of salient poles made of a magnetic material projecting upward from the upper surface of the base at equal intervals in the longitudinal direction of the base;
a first half core back having a first half core back; first half teeth protruding from the first half core back toward the stator; a second half core back; a plurality of split cores coupled in the longitudinal direction, each comprising a second half split core having a second half split tooth projecting from the split core back toward the stator;
a permanent magnet sandwiched between the first half-core and the second half-core;
a mover having coils wound around respective teeth composed of the first half tooth and the second half tooth,
the first half-split core and the second half-split core are asymmetric with respect to the permanent magnet as an axis of symmetry;
The synchronous linear motor, wherein the adjacent first half split core and the second half split core of the two adjacent split cores have contact surfaces that are parallel to the base and contact each other. 2. The synchronous linear motor according to claim 1, wherein the vertical length of said permanent magnet is different from the vertical length of said split core. 3. The synchronous linear motor according to claim 2, wherein the vertical length of said permanent magnet is shorter than the vertical length of said split core. 3. The synchronous linear motor according to claim 2, wherein the vertical length of the permanent magnet is longer than the vertical length of the split core. 4. The synchronous linear motor according to claim 3, wherein the lower ends of said teeth protrude below the lower ends of said permanent magnets. 4. The synchronous linear motor according to claim 3, wherein the upper end of the core-back consisting of the first half-split core-back and the second half-split core-back protrudes above the top of the permanent magnet. 5. The synchronous linear motor according to claim 4, wherein the lower ends of the permanent magnets project downward from the lower ends of the teeth. 5. The synchronous linear motor according to claim 4, wherein the upper end of said permanent magnet protrudes above a core-back consisting of said first half-split core-back and said second half-split core-back. The first half core back of one of the adjacent split cores protrudes in one direction in the longitudinal direction and has a first protrusion extending in the vertical direction, and the second half of the adjacent split core in the other direction of the split core. 9. The synchronous linear gear according to any one of claims 1 to 8, wherein the half-split core-back is recessed in one of the longitudinal directions, extends vertically, and has a first concave portion that engages with the first convex portion. motor. The first half core back of one of the adjacent split cores protrudes in one direction in the longitudinal direction and has a second protrusion extending in the stacking direction of the split cores, and the other direction of the adjacent split cores. 9. The second half split core-back of is recessed in one of the longitudinal directions, extends in the stacking direction, and has a second recess that engages with the second protrusion. A synchronous linear motor as described in . 2. The method of manufacturing a synchronous linear motor according to claim 1, further comprising a connecting step of connecting the plurality of split cores in the longitudinal direction while adjusting the magnetic pole pitch of the permanent magnets to be equal intervals in the longitudinal direction. manufacturing method. A method for manufacturing a synchronous linear motor according to claim 3, claim 5, or claim 6,
a joining step of joining the plurality of split cores in the longitudinal direction while adjusting the magnetic pole pitch of the permanent magnets to be equal intervals in the longitudinal direction;
On one surface of the plate-shaped mover positioning jig, a plurality of third protrusions are provided at equal intervals at the same intervals as the magnetic pole pitch of the mover to be manufactured,
Before the bonding step,
The one longitudinal surface of the third concave portion formed between the first half-split core and the second half-split core is aligned with the other longitudinal surface of the third convex portion. A method for manufacturing a synchronous linear motor, comprising a split core arrangement step of positioning the plurality of split cores in the longitudinal direction by bringing them into contact with each other. A method for manufacturing a synchronous linear motor according to claim 4, claim 7, or claim 8,
a joining step of joining the plurality of split cores in the longitudinal direction while adjusting the magnetic pole pitch of the permanent magnets to be equal intervals in the longitudinal direction;
On one surface of the plate-shaped mover positioning jig, a plurality of third protrusions are provided at equal intervals at the same intervals as the magnetic pole pitch of the mover to be manufactured,
Before the bonding step,
a split core arranging step of positioning the plurality of split cores in the longitudinal direction by bringing the surface of the third protrusion in one longitudinal direction into contact with the surface of each permanent magnet in the other longitudinal direction; A method for manufacturing a synchronous linear motor comprising:

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