JP7256042B2 - Diaphragm member - Google Patents
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- JP7256042B2 JP7256042B2 JP2019052952A JP2019052952A JP7256042B2 JP 7256042 B2 JP7256042 B2 JP 7256042B2 JP 2019052952 A JP2019052952 A JP 2019052952A JP 2019052952 A JP2019052952 A JP 2019052952A JP 7256042 B2 JP7256042 B2 JP 7256042B2
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- 229920005989 resin Polymers 0.000 claims description 6
- 239000011347 resin Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 230000004308 accommodation Effects 0.000 claims description 3
- 238000009713 electroplating Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000007747 plating Methods 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- -1 polyethylene terephthalate Polymers 0.000 description 3
- 239000004800 polyvinyl chloride Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 2
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 2
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000012982 microporous membrane Substances 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000007666 vacuum forming Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/002—Cell separation, e.g. membranes, diaphragms
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Electroplating Methods And Accessories (AREA)
- Diaphragms And Bellows (AREA)
Description
本発明は、電解めっき装置に使用する隔膜部材に関する。 The present invention relates to a diaphragm member used in an electrolytic plating apparatus.
プリント基板や半導体ウエハ基板等の表面に配線等の形成する技術として電解めっきが知られている。
これら電解めっきには、例えば、「電極を収容するケース体と、当該ケース体の前面側開口部に着脱自在に取り付けられる保護フレームとの間に隔膜が挟装された電着塗装用隔膜セルにおいて、前記ケース体の前面側開口部の側縁に沿って突設されたフランジ部と、当該フランジ部に対して着脱自在に重着されるフランジ枠単体との間に隔膜が挟持され、前記保護フレームが前記フランジ枠単体を介して前記ケース体に取り付けられる電着塗装用隔膜セルが開示されている(特許文献１の実用新案登録請求の範囲)。
Electroplating is known as a technique for forming wiring and the like on the surface of printed circuit boards, semiconductor wafer substrates, and the like.
For these electrolytic plating, for example, "in a diaphragm cell for electrodeposition coating in which a diaphragm is sandwiched between a case body containing an electrode and a protective frame detachably attached to the front side opening of the case body, A diaphragm is sandwiched between a flange protruding along the side edge of the front opening of the case body and a single flange frame detachably superimposed on the flange. A diaphragm cell for electrodeposition coating is disclosed in which a frame is attached to the case body via the flange frame alone (claims of the utility model registration of Patent Document 1).
しかしながら、特許文献１に記載の隔膜部材は、「隔膜に水張強度を保持させるために頑丈な構造にすることが要求され」、大重量のものが多い（第２頁第８～１０）。したがって、当該隔膜部材を電解めっき液から回収するにはクレーン等の回収装置が必要となる。
本発明は、上記問題を解決するためになされたものであり、軽量で扱いやすく、かつ、ケース体、隔膜等の損傷の少ない隔膜部材を提供することを目的とする。
However, the diaphragm member described in Patent Document 1 is "required to have a sturdy structure in order to maintain the hydraulic strength of the diaphragm", and many of them are heavy (page 2, 8-10). Therefore, a recovery device such as a crane is required to recover the diaphragm member from the electrolytic plating solution.
SUMMARY OF THE INVENTION An object of the present invention is to provide a diaphragm member which is lightweight, easy to handle, and causes less damage to the case body, diaphragm, and the like.
上記の目的を達成するために、本発明の隔膜部材は、電極を収容する可撓性を有するケース体と、前記電極を収容する収容口を有して、前記ケース体に着脱自在に取り付けられる隔膜と、前記隔膜の収容口側以外の三辺を前記ケース体に支持する枠体と、を備える。 In order to achieve the above object, the diaphragm member of the present invention has a flexible case body for housing electrodes and a housing opening for housing the electrodes, and is detachably attached to the case body. A diaphragm and a frame supporting three sides of the diaphragm other than the housing port side on the case body are provided.
この構成によればケース体が可撓性を有するから、引き上げ時にかかる水圧による応力を変形により吸収することができるので、従来よりもヒビが生じにくい。よって、ケース体の板厚を薄くでき、重量が小さくできる。 According to this structure, since the case body has flexibility, it can absorb the stress due to the water pressure applied when it is lifted up by deformation, so that cracks are less likely to occur than in the conventional case. Therefore, the plate thickness of the case body can be reduced, and the weight can be reduced.
前記ケース体の前記隔膜を取り付ける取付部は、前記ケース体の壁部が折り返された折返構造を有し、前記折り返された部分の壁部は、前記電極を収容する収容空間まで延在していてもよい。 The mounting portion for mounting the diaphragm of the case body has a folded structure in which the wall portion of the case body is folded, and the wall portion of the folded portion extends to the accommodation space for accommodating the electrode. may
この構成によれば、ケース体の背面に連なる部分（図３における折返構造の上側の側面）の端部からヒビが生じても、隔膜に接する部分（図２における折返構造の下側の側面）にはヒビが生じにくく、この部分でケース体と隔膜とを固定し、電極収容空間を維持することができる。 According to this configuration, even if a crack occurs at the end of the portion (the upper side surface of the folded structure in FIG. 3) that continues to the back surface of the case body, the portion that contacts the diaphragm (the lower side surface of the folded structure in FIG. 2) Since cracks are unlikely to occur in the portion, the case body and the diaphragm can be fixed at this portion and the electrode housing space can be maintained.
前記折返構造の前記収容空間まで延在する壁部には、前記電極の方向に突出する突起が設けられていてもよい。 A wall portion of the folded structure extending to the accommodation space may be provided with a projection projecting in the direction of the electrode.
この構成によれば、水圧の内外差による応力が発生しても、前記突起が前記の応力を吸収することによって、延在する壁部の先端部の移動を抑制することができるので、隔膜の損傷を防止する効果がある。 According to this configuration, even if a stress is generated due to a difference in water pressure between the inside and outside, the protrusion absorbs the stress, thereby suppressing the movement of the leading end of the extending wall. It has the effect of preventing damage.
前記折返構造の２つの側面を長手方向につなぐ側面の端部には、前記側面の長手方向に沿って点線状の凹部が設けられていてもよい。 An edge portion of a side surface connecting two side surfaces of the folded structure in the longitudinal direction may be provided with a dotted concave portion along the longitudinal direction of the side surface.
この構成によれば、背面に連なる側面側の端部にヒビが入っても、点線に沿ってそのヒビを長手方向に伝播させることによって、隔膜に近い側面側の端部までヒビが伝播することを抑制できる。 According to this configuration, even if a crack appears in the end of the side surface connected to the back surface, the crack propagates to the end of the side surface near the diaphragm by propagating the crack in the longitudinal direction along the dotted line. can be suppressed.
本発明により、軽量で扱いやすくかつ、ケース体、隔膜等の損傷の少ない隔膜部材を提供することができる。 According to the present invention, it is possible to provide a diaphragm member that is lightweight and easy to handle, and that causes less damage to the case body, diaphragm, and the like.
本発明の第一の実施形態に係る隔膜部材を図１に示す。
第一の実施形態に係る隔膜部材は、可撓性を有するケース体と、電極を収容する収容口を有して、ケース体に着脱自在に取り付けられた隔膜と、前記隔膜の収容口側以外の三辺を前記ケース体に支持する枠体とを備え、収容口が開口した電極収容空間を形成している。
前記隔膜は、枠体を用いて、取付部にボルト締めすることにより取り付けることができる。
本発明において、「可撓性を有するケース体」とは、鉄等の金属以外の材料であって、弾性変形する材料で構成されたものをいう。より好ましくは可撓性樹脂ケースである。
FIG. 1 shows a diaphragm member according to a first embodiment of the present invention.
A diaphragm member according to the first embodiment includes a flexible case body, a housing opening for housing an electrode, a diaphragm detachably attached to the case body, and a diaphragm member other than the housing opening side of the diaphragm. and a frame supporting three sides of the case body to form an electrode housing space with an opening.
The diaphragm can be attached by bolting to the attachment portion using a frame.
In the present invention, the "flexible case" refers to a material other than metal such as iron, which is elastically deformable. A flexible resin case is more preferable.
従来の隔膜部材は、機械的強度を高めるために、ケース体に用いる材料は剛性の高い金属又は硬質プラスチック等である。このような材料では隔膜部材を電解槽から回収する際、図７に示す矢印方向に水圧が加わり、ケース体の隔膜を取り付けた部分の端部からヒビが入りやすい。このヒビがボルト孔まで達すると、ケース体が隔膜から外れ、ケース体が中の電極とともにめっき液中へ落下する恐れがある。したがって、ケース体の強度を増すために板厚が大きくなり、重量が大きく扱いにくいものになる。
これに対して、図１に示す本発明の第一の実施形態に係る隔膜部材では、ケース体が可撓性であるから、前記水圧による応力を変形により吸収することができるので、従来よりもヒビが生じにくい。よってケース体の板厚を薄くでき、重量が小さくできる。
In order to increase the mechanical strength of the conventional diaphragm member, the material used for the case body is highly rigid metal, hard plastic, or the like. With such a material, when the diaphragm member is recovered from the electrolytic cell, water pressure is applied in the direction of the arrow shown in FIG. If this crack reaches the bolt hole, the case may come off from the diaphragm and drop into the plating solution together with the electrode inside. Therefore, in order to increase the strength of the case body, the plate thickness becomes large, and the weight becomes heavy and difficult to handle.
On the other hand, in the diaphragm member according to the first embodiment of the present invention shown in FIG. 1, since the case body is flexible, the stress due to the water pressure can be absorbed by deformation. Cracks are less likely to occur. Therefore, the plate thickness of the case body can be reduced, and the weight can be reduced.
図２は、本発明の第二の実施形態に係る隔膜部材の分解斜視図を示す。
この実施形態では、前記ケース体の前記隔膜を取り付ける取付部は、前記ケース体の壁部が折り返された折返構造を有し、前記折り返された部分の壁部は、前記の電極収容空間まで延在している。前記折返構造は、２つの側面とその２つの側面を長手方向につなぐ側面の端部を備えていることが好ましい。
第二の実施形態によると、ケース体の取付部が、折返構造により二重構造になっているので、背面に連なる部分（図３における折返構造の上側の側面）の端部からヒビが生じても、隔膜に近い部分（図３における折返構造の下側の側面）にはヒビが生じにくく、この部分でケース体と隔膜とを固定し、電極収容空間を維持することができる。したがって、ケース体が隔膜から外れ、該ケース体と中の電極がめっき液中へ落下するという事故を防止することができる。
さらに、前記折返構造の電極収容空間まで延在する壁部の部分は、電極の支持部としても機能するから、より落下の危険を抑えることができる。
FIG. 2 shows an exploded perspective view of a diaphragm member according to a second embodiment of the present invention.
In this embodiment, the mounting portion for mounting the diaphragm of the case body has a folded structure in which the wall portion of the case body is folded, and the wall portion of the folded portion extends to the electrode accommodating space. exist. Preferably, the folded structure comprises two sides and ends of the sides longitudinally joining the two sides.
According to the second embodiment, since the mounting portion of the case body has a double structure with the folded structure, a crack is generated from the end of the portion (upper side surface of the folded structure in FIG. 3) connected to the back surface. Also, cracks are less likely to occur in the portion near the diaphragm (the lower side surface of the folded structure in FIG. 3), and the case body and the diaphragm can be fixed at this portion to maintain the electrode housing space. Therefore, it is possible to prevent an accident in which the case body comes off from the diaphragm and the case body and the electrode therein fall into the plating solution.
Furthermore, the portion of the wall extending to the electrode housing space of the folded structure also functions as a supporting portion for the electrode, so that the risk of falling can be further suppressed.
図４は、本発明の第三の実施形態に係る隔膜部材の横断面図を示す。
この実施形態では、前記折返構造の電極収容空間まで延在する壁部に、電極方向に突出する突起が設けられている。
前記延在する壁部の先端部は固定されておらず、可撓性であるので、水圧の内外差による応力に応じて隔膜とこすれ合うように移動し、隔膜を傷つけてしまう恐れがある。
この実施形態における前記突起は、前記の応力を吸収することによって、延在する壁部の先端部の移動を抑制することができるので、隔膜の損傷を防止する効果がある。
FIG. 4 shows a cross-sectional view of a diaphragm member according to a third embodiment of the invention.
In this embodiment, the wall portion extending to the electrode accommodating space of the folded structure is provided with a projection projecting in the direction of the electrode.
Since the tip portion of the extending wall portion is not fixed and is flexible, it may move so as to rub against the diaphragm in response to the stress caused by the difference in water pressure between the inside and the outside, and may damage the diaphragm.
By absorbing the stress, the protrusions in this embodiment can suppress the movement of the tip of the extending wall, thereby preventing damage to the diaphragm.
図５は、本発明の第四の実施形態に係る隔膜部材において、ケース体の折返構造の側面の端部を図３のＡ’－Ａ方向から見た図である。上側が背面に連なる側面側であり、下側が隔膜に近い側面側である。前述のとおり、ケース体の背面に連なる側面側の端部にはヒビが入りやすいため、長期の使用に伴って、前記のヒビが背面に連なる側面側の端部から、隔膜に近い側面側の端部まで連続してしまう恐れがある。
そこで、この実施形態においては、前記折返構造の側面の端部に、長手方向に沿って点線状の凹部が設けられている。
この点線状の凹部によって、背面に連なる側面側の端部にヒビが入っても、点線に沿ってそのヒビを長手方向に伝播させることによって、隔膜に近い側面側の端部までヒビが伝播することを抑制できる。したがって、隔膜取り付けの確実性をより高めることができる。
FIG. 5 is a view of the end portion of the side surface of the folding structure of the case body in the diaphragm member according to the fourth embodiment of the present invention, viewed from the A'-A direction of FIG. The upper side is the side surface that continues to the rear surface, and the lower side is the side surface that is close to the diaphragm. As mentioned above, since cracks are likely to occur at the side edges of the case body that are connected to the back surface, the cracks will spread from the side edge areas that are connected to the back surface to the side surfaces close to the diaphragm as the case is used for a long period of time. There is a risk that it will continue to the end.
Therefore, in this embodiment, a dotted concave portion is provided along the longitudinal direction at the end portion of the side surface of the folded structure.
Due to this dotted line-shaped recess, even if a crack appears in the end of the side surface connected to the back surface, the crack is propagated in the longitudinal direction along the dotted line, so that the crack propagates to the end of the side surface close to the diaphragm. can be suppressed. Therefore, the certainty of attachment of the diaphragm can be further enhanced.
なお、本発明は上記の実施形態に限定されず、公知技術に基づく変更又は付加をされた実施形態を含むことは勿論である。
例えば、ケース体と隔膜の取付部は、図３に示すように１枚の枠体を介してボルト締めされてもよいし、図４に示すように２枚の枠体で挟んでボルト締めされてもよい。さらに、図６に示すように３枚の枠体を用いてボルト締めされてもよい。
また、図示はしていないが、隔膜の高さをケース体の高さより低い位置までとし、隔膜全体がめっき液に浸された状態で電解めっきを行うことにより、めっき液面上での析出物の発生を防止することもできる。
It goes without saying that the present invention is not limited to the above-described embodiments, and includes embodiments modified or added based on known techniques.
For example, the mounting portion of the case body and the diaphragm may be bolted via one frame as shown in FIG. 3, or sandwiched between two frames and bolted as shown in FIG. may Furthermore, as shown in FIG. 6, it may be bolted using three frames.
In addition, although not shown, the height of the diaphragm is set to a position lower than the height of the case body, and the entire diaphragm is immersed in the plating solution, and electrolytic plating is performed. can also be prevented from occurring.
ケース体に用いる可撓性樹脂としては、例えば、ポリ塩化ビニル（ＰＶＣ）、ポリエチレンテレフタレート（ＰＥＴ）、ポリプロピレン（ＰＰ）、アクリロニトリル－ブタジエン－スチレン共重合体（ＡＢＳ）等を用いることができる。
ケース体は、真空成形や圧空成形で成形されることが好ましい。収容する電極構造に合わせてブリスター成形することがより好ましい。成形品の厚みは０．３ｍｍ～２．０ｍｍが好ましく、０．４ｍｍ～１．０ｍｍがより好ましく、隔膜部材の軽量化、薄型化、いわゆるソフトケース化が可能となる。
Examples of flexible resins used for the case include polyvinyl chloride (PVC), polyethylene terephthalate (PET), polypropylene (PP), acrylonitrile-butadiene-styrene copolymer (ABS), and the like.
The case body is preferably formed by vacuum forming or pressure forming. It is more preferable to form a blister according to the electrode structure to be accommodated. The thickness of the molded product is preferably from 0.3 mm to 2.0 mm, more preferably from 0.4 mm to 1.0 mm.
以下、本発明の実施例を示す。
（実施例１）
ポリエチレンテレフタレート樹脂（ＰＥＴ）製の不織布よりなる基材にポリフッ化ビニリデン樹脂よりなる膜材をコーティングした微多孔膜（隔膜）を作製した。
可撓性を有するポリ塩化ビニル樹脂（ＰＶＣ）を、電極の形状に合わせた電極収容空間と、前記電極収容空間から延在する取付部とを有するように真空成形（ブリスター成形）してケース体を作製した。
ステンレス材を用いて、枠体を作製した。
前記枠体と前記取付部の間に前記隔膜を挟み、ボルト締めにより固定し、実施例１に係る隔膜部材を作製した。
Examples of the present invention are shown below.
(Example 1)
A microporous membrane (diaphragm) was prepared by coating a substrate made of polyethylene terephthalate resin (PET) nonwoven fabric with a membrane material made of polyvinylidene fluoride resin.
A flexible polyvinyl chloride resin (PVC) is vacuum-formed (blister-molded) so as to have an electrode housing space matching the shape of the electrode and a mounting portion extending from the electrode housing space. was made.
A frame was produced using a stainless steel material.
The diaphragm member according to Example 1 was manufactured by sandwiching the diaphragm between the frame and the mounting portion and fixing them by bolting.
（実施例２）
前記取付部を折返構造とし、折り返された部分の壁部を前記電極収容空間まで延在させてケース体を作製した以外は、実施例１と同様にして実施例２に係る隔膜部材を作製した。
(Example 2)
A diaphragm member according to Example 2 was produced in the same manner as in Example 1, except that the mounting portion had a folded structure and the wall portion of the folded portion was extended to the electrode housing space to fabricate a case body. .
（実施例３）
前記ケース体の電極収容空間まで延在する壁部に、電極方向に向かって約１ｍｍ突出する突起を形成した以外は、実施例２と同様にして実施例３に係る隔膜部材を作製した。
(Example 3)
A diaphragm member according to Example 3 was produced in the same manner as in Example 2, except that a projection projecting about 1 mm toward the electrode was formed on the wall portion of the case extending to the electrode housing space.
（比較例）
ケース体を硬質プラスチックとした以外は、実施例１と同様にして比較例に係る隔膜部材を作製した。
(Comparative example)
A diaphragm member according to a comparative example was produced in the same manner as in Example 1, except that the case body was made of hard plastic.
実施例１～３に係る隔膜部材は、いずれも比較例より耐久性が優れていた。 The diaphragm members according to Examples 1 to 3 were all superior in durability to the comparative example.
本発明に係る隔膜部材は、軽量化が可能であり、かつ、ケース体と隔膜とを確実に取り付けることができるので、めっき液中へのケース体や電極の落下を抑制することができる。また、隔膜の損傷を抑制することができる。したがって、プリント基板や半導体ウエハへの配線形成をはじめ、あらゆる電解めっきに用いることができる。
Since the diaphragm member according to the present invention can be made lighter and can securely attach the case body and the diaphragm, it is possible to prevent the case body and the electrode from falling into the plating solution. Moreover, damage to the diaphragm can be suppressed. Therefore, it can be used for all kinds of electrolytic plating, including wiring formation on printed circuit boards and semiconductor wafers.
Claims (4)
前記電極を収容する収容口を有して、前記ケース体に着脱自在に取り付けられる隔膜と、
前記隔膜の収容口側以外の三辺を前記ケース体に支持する枠体と、を備える
隔膜部材。 a flexible case housing an electrode and made of a flexible resin capable of absorbing stress due to water pressure applied when the electrode is lifted ;
a diaphragm having a housing opening for housing the electrode and detachably attached to the case body;
A diaphragm member comprising: a frame supporting three sides of the diaphragm other than the housing port side on the case body.
前記折り返された部分の壁部は、前記電極を収容する電極収容空間まで延在する請求項１に記載の隔膜部材。 The mounting portion for mounting the diaphragm of the case body has a folded structure in which the wall portion of the case body is folded,
2. The diaphragm member according to claim 1, wherein the wall portion of the folded portion extends to an electrode accommodation space that accommodates the electrode.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
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| JP2019052952A JP7256042B2 (en) | 2019-03-20 | 2019-03-20 | Diaphragm member |
| CN202010016802.7A CN111719175A (en) | 2019-03-20 | 2020-01-07 | Diaphragm member |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2019052952A JP7256042B2 (en) | 2019-03-20 | 2019-03-20 | Diaphragm member |
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| JP7256042B2 true JP7256042B2 (en) | 2023-04-11 |
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| CN (1) | CN111719175A (en) |
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| JP7615585B2 (en) * | 2020-09-25 | 2025-01-17 | 株式会社大阪ソーダ | Electrolyzer |
| JP6876349B1 (en) * | 2020-11-11 | 2021-05-26 | 有限会社サンコーテクニカ | Septal electrode case and diaphragm electrode structure |
| CN114807992B (en) * | 2021-01-18 | 2024-07-05 | 庄政霖 | Two-tank type electrolytic tank |
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| WO2004108995A1 (en) | 2003-06-03 | 2004-12-16 | Taskem Inc. | Zinc and zinc-alloy electroplating |
| CN104562162A (en) | 2013-10-21 | 2015-04-29 | 欣兴电子股份有限公司 | Diaphragm device |
| WO2018031591A1 (en) | 2016-08-08 | 2018-02-15 | The Texas A&M University System | Electrochemically expanded materials and reactor and method for producing the same |
| JP2018024928A (en) | 2016-08-12 | 2018-02-15 | 株式会社ユアサメンブレンシステム | Diaphragm member |
| CN208055494U (en) | 2018-04-12 | 2018-11-06 | 河南理工大学 | A kind of electro-deposition anode basket |
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| JPS5632536Y2 (en) * | 1977-07-18 | 1981-08-03 | ||
| JPS637170U (en) * | 1986-06-30 | 1988-01-18 | ||
| JPH057242Y2 (en) * | 1988-03-09 | 1993-02-24 | ||
| JPH0529504Y2 (en) * | 1988-11-22 | 1993-07-28 | ||
| KR100190347B1 (en) * | 1990-01-30 | 1999-06-01 | 이시카와 개스킷 가부시키가이샤 | Steel sheet laminated gasket |
| DE4003516C2 (en) * | 1990-02-06 | 1994-06-23 | Heraeus Elektrochemie | Electrode element for electrolytic purposes and its use |
| JP2517787B2 (en) * | 1990-08-15 | 1996-07-24 | 株式会社アルメックス | Anode structure of plating equipment |
| US5744013A (en) * | 1996-12-12 | 1998-04-28 | Mitsubishi Semiconductor America, Inc. | Anode basket for controlling plating thickness distribution |
| JPH1130629A (en) * | 1997-07-14 | 1999-02-02 | Hokuriku Electric Ind Co Ltd | Acceleration sensor and manufacture thereof |
| JP6285199B2 (en) * | 2014-02-10 | 2018-02-28 | 株式会社荏原製作所 | Anode holder and plating apparatus |
| WO2017149991A1 (en) * | 2016-02-29 | 2017-09-08 | パナソニックＩｐマネジメント株式会社 | Stacked nonaqueous electrolyte secondary battery |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004108995A1 (en) | 2003-06-03 | 2004-12-16 | Taskem Inc. | Zinc and zinc-alloy electroplating |
| CN104562162A (en) | 2013-10-21 | 2015-04-29 | 欣兴电子股份有限公司 | Diaphragm device |
| WO2018031591A1 (en) | 2016-08-08 | 2018-02-15 | The Texas A&M University System | Electrochemically expanded materials and reactor and method for producing the same |
| JP2018024928A (en) | 2016-08-12 | 2018-02-15 | 株式会社ユアサメンブレンシステム | Diaphragm member |
| CN208055494U (en) | 2018-04-12 | 2018-11-06 | 河南理工大学 | A kind of electro-deposition anode basket |
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| CN111719175A (en) | 2020-09-29 |
| JP2020152960A (en) | 2020-09-24 |
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