JP7272640B2 - Work mounting device and work bonding system - Google Patents

Description

The present invention relates to a workpiece mounting device and a workpiece bonding system.

Conventionally, there has been known a work bonding apparatus that bonds a second work such as a film to a first work such as a substrate. For example, the work bonding apparatus described in Patent Document 1 includes a movable chamber body having a diaphragm film covering a pneumatic recess, a fixed chamber body positioned opposite the movable chamber body and to which a first work is mounted, Prepare. The diaphragm membrane is formed with a plurality of vent holes through which air can flow. Therefore, by applying a vacuum pressure to the pneumatic recess, the vacuum pressure acts on the second work via the air vent, and the second work is attracted to the diaphragm film. Then, the vacuum chamber space surrounded by the movable chamber body and the fixed chamber body is evacuated. From this state, the internal space of the pneumatic recess is rapidly pressurized from the vacuum state to the atmospheric pressure, whereby the diaphragm membrane expands toward the first work and the second work is pressed against the first work. Thereby, the second work is bonded to the first work.

Japanese Unexamined Patent Application Publication No. 2010-49048

In the configuration of Patent Literature 1, the vacuum chamber space is evacuated in a state where the second work is adsorbed to the diaphragm film by the vacuum pressure in the pneumatic recess. As a result, when the pressure difference between the inside of the pneumatic recess and the space of the vacuum chamber becomes small, the force of attraction of the second work to the diaphragm film becomes small, and the second work may be separated from the diaphragm film. In order to suppress this separation of the second work, the inventor is considering providing a slightly adhesive sheet between the second work and the diaphragm film. Here, the slightly adhesive sheet exerts an adhesive force corresponding to the force pressed from the second work toward the diaphragm film, that is, the compressive force. Therefore, when the second work is attached to the diaphragm film via the slightly adhesive sheet, if the second work is pressed against the diaphragm film with an uneven force in the plane direction, the adhesive force between the second work and the diaphragm film will be affected. Variation occurs. That is, between the second work and the diaphragm film, a portion with strong adhesive force and a portion with weak adhesive force are generated. This variation in adhesive strength may lead to deterioration in the quality of bonding between the second work and the first work. Therefore, it is required that the second work (attachment work) be attached to the diaphragm film with uniform adhesive force in the planar direction.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a work mounting device and a work bonding system that can mount a work to be mounted on a mounting surface with uniform adhesive force in the surface direction. and

In order to achieve the above object, a workpiece mounting device according to a first aspect of the present invention includes a base having a pressurizing chamber, a base mounted to the base so as to close the pressurizing chamber, and the pressurizing chamber. and a mounting sheet formed of an elastic material on which a mounting work is placed on the opposite side of the mounting sheet. The mounted workpiece is pressed against the mounting surface via the slightly adhesive material so that the slightly adhesive material exists between the surfaces, and the mounting sheet is in contact with the pressurizing chamber. A first diaphragm membrane is provided at a position and expands by being pressurized in the pressurizing chamber, and the mounting work is installed on the surface opposite to the pressurizing chamber, and the base is positioned above the first diaphragm membrane. A second diaphragm that is superimposed on the first diaphragm film at a position far from the second diaphragm and is elastically deformed by being pushed by the expanding first diaphragm film so as to press the mounting work against the mounting surface via the slightly adhesive material. a membrane, wherein the second diaphragm membrane has a vacuum chamber that opens to a surface on which the mounting work is installed and is evacuated to adsorb the installed work to the second diaphragm membrane; have.

In order to achieve the above object, a work bonding system according to a second aspect of the present invention is a work bonding system comprising a work mounting device and a work bonding device, wherein the work The mounting device includes a base having a pressurizing chamber, and is mounted on the base so as to close the pressurizing chamber. and a mounting sheet, wherein the mounting sheet is installed so that a slightly adhesive material exists between the mounting work and the mounting surface when the pressure chamber is pressurized and expanded. The attached workpiece is pressed against the attachment surface via the slightly adhesive material, and the workpiece bonding device attaches the attachment workpiece attached to the attachment surface by the workpiece attachment device to the workpiece to be bonded. In addition, the workpiece bonding device includes a diaphragm chamber having a closed diaphragm space, and is attached to the diaphragm chamber so as to close the closed diaphragm space of the diaphragm chamber, is formed of an elastic material, and presses the closed diaphragm space. It has a bonded diaphragm film that expands with pressure, and the mounting surface on which the mounted work is mounted by the work mounting device, and the mounted work is elastically deformed by being pushed by the expanding bonded diaphragm film. towards the workpiece to be bonded.

According to the present invention, in the work mounting device and the work bonding system, the work to be mounted can be mounted on the mounting surface with uniform adhesive force in the surface direction.

1 is a schematic diagram of a work bonding system according to an embodiment of the present invention; FIG. (a) is an enlarged view of the area A of FIG. 1, and (b) is an enlarged view of a part of (a). (a) according to one embodiment of the present invention is a schematic diagram of a workpiece mounting device, (b) is an enlarged view in which a part of (a) is enlarged. FIG. 4 is a schematic diagram of the workpiece mounting device when the mounting sheet according to one embodiment of the present invention is inflated. (a) to (e) according to one embodiment of the present invention are schematic diagrams showing each step of a workpiece mounting process. 4 is a flowchart showing workpiece mounting processing according to one embodiment of the present invention. (a) to (d) according to one embodiment of the present invention are schematic diagrams showing each step of a work bonding process.

An embodiment of a work bonding apparatus and a work bonding system according to the present invention will be described with reference to the drawings.
As shown in FIG. 1, a work bonding system 1 includes a work bonding device 10 that bonds a second work W2, which is an example of a work to be bonded, to a first work W1, which is an example of a mounting work. and a workpiece mounting device 80 for mounting the second workpiece W2 on the apparatus 10 .

First, the workpiece bonding device 10 will be described.
As shown in FIG. 1, the workpiece bonding apparatus 10 is a two-layer vacuum chamber type apparatus for bonding the second workpiece W2 to the first workpiece W1. The workpiece bonding apparatus 10 includes an upper chamber 21, a lower chamber 31, a diaphragm unit 20, a control section 40, a vacuum pump 41, a chamber driving section 42, an alignment camera 60, and switching valves 43a and 43b. , an open valve 43c, and a switching valve 43d shown in FIG.

As shown in FIG. 1, the lower chamber 31 is box-shaped and opens toward the upper chamber 21 . The lower chamber 31 has a work support 32 fixed to its inner bottom surface. The upper surface of the work support table 32 has a curved work setting surface 32a that is convex in the X direction toward the Z direction. A curved plate-shaped first work W1 is mounted on the work setting surface 32a of the work support table 32. As shown in FIG.

The upper chamber 21 is box-shaped and opens toward the lower chamber 31 . The upper chamber 21 opens and closes with respect to the lower chamber 31 by the chamber driving section 42 . When the upper chamber 21 is closed with respect to the lower chamber 31 , a sealed inner chamber space 31 a is formed between the upper chamber 21 and the lower chamber 31 . An upper plate 21u of the upper chamber 21 is formed with a shaft through hole 21h through which a drive shaft 29, which will be described later, passes. The shaft through hole 21h has a diameter larger than that of the drive shaft 29 so that the drive shaft 29 can move in the X direction and the Y direction.

The diaphragm unit 20 includes a bonding sheet 23, a diaphragm chamber 26, a drive shaft 29, a shaft drive portion 27, a bellows portion 28a, a drive portion support plate 28b, and a support column portion 28c. The lamination sheet 23 has a lamination diaphragm film 22 and a work stage 25 which are laminated in the thickness direction.
The diaphragm chamber 26 is located in the chamber inner space 31 a and has a box shape opening toward the work support base 32 .
As shown in FIG. 2A, the outer peripheral edge of the bonded diaphragm membrane 22 is fixed to the end face of the diaphragm chamber 26 on the opening side. A closed diaphragm space 26 a in a diaphragm chamber 26 is sealed by the bonded diaphragm film 22 . The bonded diaphragm membrane 22 is made of an elastic material, such as a superelastic material such as rubber, which is elastically deformed when the closed diaphragm space 26a of the diaphragm chamber 26 is pressurized.

As shown in FIG. 2A, the work stage 25 is superimposed on the lamination diaphragm film 22 at a position closer to the work support base 32 than the lamination diaphragm film 22 is. The outer peripheral edge of the work stage 25 is fixed to the end face of the diaphragm chamber 26 on the opening side. The work stage 25 can be retrofitted to an existing bonding apparatus. The work stage 25 is pushed in a direction approaching the work support base 32 by the expansion of the lamination diaphragm film 22, thereby laminating the second work W2 to the first work W1.

Specifically, the work stage 25 includes a stage portion 25a to which the second work W2 is mounted by the work mounting device 80, and a stage support portion 25b that elastically supports the stage portion 25a to the diaphragm chamber .
The stage portion 25a is formed in a plate shape having an area larger than that of the second work W2. The stage portion 25a is formed of a material or shape that is less elastically deformable than the bonded diaphragm film 22 against an external force and is elastically deformable along the curved surface of the first work W1. For example, the stage portion 25a is made of resin such as vinyl chloride having a higher elastic modulus than the bonded diaphragm film 22, or metal.
As shown in FIG. 2(b), the second work W2 is attached to the lower surface of the stage portion 25a via the slightly adhesive sheet 25c. Since the stage portion 25a is less deformable than the bonded diaphragm film 22, it is easy to mount the second work W2. A lower surface of the stage portion 25a is a mounting surface on which the second work W2 is mounted. The slightly adhesive sheet 25c is a double-sided adhesive tape that adheres releasably. The slightly tacky sheet 25c has an adhesive force strong enough to prevent the second work W2 from falling off from the stage portion 25a due to its own weight, and also allows the first work W1 and the first work W1 to adhere to each other. It has a weaker adhesive force than the adhesive force between the two works W2. The slightly adhesive sheet 25c includes, for example, a substrate made of a resin film or the like, and reusable slightly adhesive layers made of a silicon-based compound, a urethane-based compound, or the like, which are formed on both sides of the substrate. The slightly tacky sheet 25c has the property that when it is compressed with a strong force between the stage portion 25a and the second work W2, the adhesive force becomes strong, and when it is compressed with a weak force, the adhesive force becomes weak.

As shown in FIG. 2(b), a vacuum chamber 25h is formed in the stage portion 25a. The vacuum chamber 25h has a plurality of opening holes that open to the surface of the stage portion 25a on which the second work W2 is mounted. When the vacuum chamber 25h is evacuated by the vacuum pump 41, the second work W2 is attracted to the lower surface of the stage portion 25a.
As shown in FIG. 2A, the stage support portion 25b is positioned between the end face of the diaphragm chamber 26 on the opening side and the stage portion 25a. The outer peripheral edge of the stage support portion 25b is fixed to the end face of the diaphragm chamber 26 on the opening side by a metal fitting (not shown). The stage support portion 25b is an elastic body, and is formed of a material or shape that is more easily deformed by an external force than the stage portion 25a. For example, the stage support portion 25b is made of a superelastic material such as rubber or a resin such as vinyl chloride. The stage support portion 25b is pushed by the bonded diaphragm film 22 and elastically deforms more than the stage portion 25a. The stage portion 25a may be fixed to the stage support portion 25b via bolts, an adhesive, or the like, or may be insert-molded to the stage support portion 25b.
Note that the stage support portion 25b is not limited to this example, and may be made of the same material as the stage portion 25a and may be thinner than the stage portion 25a.

As shown in FIG. 1, the drive shaft 29 connects between the diaphragm chamber 26 and the shaft drive portion 27 and has a cylindrical shape extending along the Z direction. The drive shaft 29 passes through the shaft through hole 21 h of the upper chamber 21 . A lower end of the drive shaft 29 is fixed in a connection hole 26 h of the upper plate of the diaphragm chamber 26 . As a result, the internal space 29 a of the drive shaft 29 is connected to the closed diaphragm space 26 a of the diaphragm chamber 26 .

The drive unit support plate 28b is positioned outside the upper chamber 21 and provided at a position facing the shaft through hole 21h in the Z direction. The support column portion 28 c supports the driving portion support plate 28 b on the upper surface of the upper chamber 21 . The bellows portion 28a has a cylindrical shape surrounding the driving shaft 29 and extends between the upper surface of the upper chamber 21 and the lower surface of the driving portion support plate 28b. The bellows portion 28a blocks the connection of the chamber inner space 31a to the external space via the axial hole 21h, thereby improving the degree of vacuum in the chamber inner space 31a.

The shaft drive unit 27 moves the drive shaft 29 in the X, Y, and Z directions under the control of the control unit 40, and rotates the drive shaft 29 about the axis in the θ direction. The shaft drive unit 27 can move or rotate the diaphragm chamber 26 to a desired position and orientation with respect to the first workpiece W1.

As shown in FIG. 1 , the chamber driving section 42 moves the upper chamber 21 toward or away from the lower chamber 31 under the control of the control section 40 . The chamber driving part 42 is, for example, a hydraulically or pneumatically operated cylinder.

The open valve 43c is opened under the control of the control unit 40 to set the chamber inner space 31a to atmospheric pressure.
The switching valve 43 a is provided in a flow path 45 a that connects between the vacuum pump 41 and the diaphragm closed space 26 a of the diaphragm chamber 26 . Under the control of the control unit 40, the switching valve 43a switches between a conductive state in which the flow path 45a is conductive, a blocked state in which the flow path 45a is blocked, and an open state in which the flow path 45a is open to the atmosphere.
The switching valve 43b is provided in a flow path 45b connecting between the vacuum pump 41 and the chamber internal space 31a. Under the control of the control unit 40, the switching valve 43b switches between a conductive state in which the flow path 45b is fluidly connected and a blocked state in which the flow path 45b is fluidly blocked.
As shown in FIG. 2(a), the switching valve 43d is provided in a channel 45c connecting between the vacuum pump 41 and the vacuum chamber 25h of the stage portion 25a shown in FIG. 2(b). Under the control of the control unit 40, the switching valve 43d switches between a conductive state in which the flow path 45c is fluidly connected and a blocked state in which the flow path 45c is fluidly disconnected.
The vacuum pump 41 operates under the control of the control unit 40, and according to the states of the switching valves 43a, 43b, and 43d, at least one of the diaphragm closed space 26a, the chamber internal space 31a, and the vacuum chamber 25h of the stage support unit 25b. to a vacuum state.

As shown in FIG. 1, the positioning camera 60 photographs the first work W1 placed on the work setting surface 32a and the second work W2 mounted on the bonding sheet 23, and transmits the photographed data to the control unit 40. Output. The alignment camera 60 includes, for example, four cameras for photographing diagonal corners of the first work W1 and the second work W2.

The control unit 40 controls the shaft driving unit 27, the vacuum pump 41, the switching valves 43a, 43b, 43d, and the opening valve 43c, and based on the photographed data from the alignment camera 60, the positions of the first workpiece W1 and the second workpiece W2 are controlled. Measure the deviation. The control unit 40 includes a CPU (Central Processing Unit) that executes processing such as workpiece bonding processing, a ROM (Read Only Memory) that stores an operation program of the CPU, and a RAM (Random Access Memory) that is used as a work area for the CPU. Memory), etc.

Next, the workpiece mounting device 80 will be described.
As shown in FIG. 3A, the workpiece mounting device 80 includes a base 85, a mounting sheet 83 composed of a first diaphragm film 81 and a second diaphragm film 82, a vacuum pump 86, a pressurizing part 87, A control unit 88 and a drive unit 89 are provided.
The base 85 has, for example, a rectangular or square plate shape. A concave pressure chamber 85h is formed in the surface of the base 85 on which the mounting sheet 83 is mounted. The pressurizing chambers 85h are formed in a lattice pattern by grooves extending in the X and Y directions. The pressurizing chamber 85h is pressurized by the pressurizing section 87 .
The first diaphragm film 81 is formed in a sheet shape covering the entire surface of the base 85 on which the pressurizing chamber 85h is formed, and is fixed to the peripheral portion of the base 85 . As shown in FIG. 4, the first diaphragm film 81 is made of an elastic material, such as a superelastic material such as rubber, or a resin such as vinyl chloride, which elastically deforms into a convex shape when the inside of the pressure chamber 85h is pressurized. Become.

The second diaphragm film 82 is formed in the same sheet shape as the first diaphragm film 81 and overlaps the first diaphragm film 81 so as to sandwich the first diaphragm film 81 with the base 85 . A peripheral portion of the second diaphragm film 82 is fixed to a peripheral portion of the first diaphragm film 81 . A second workpiece W2 is placed on a suction surface 82a (upper surface in FIG. 3A) of the second diaphragm film 82 opposite to the first diaphragm film 81. As shown in FIG.
As shown in FIG. 3B, a vacuum chamber 82h is formed in the second diaphragm film 82. As shown in FIG. The vacuum chamber 82h has a plurality of opening holes that open to the surface of the second diaphragm film 82 on which the second workpiece W2 is mounted. When the vacuum chamber 82h is evacuated by the vacuum pump 86, the second workpiece W2 is attracted to the attraction surface 82a of the second diaphragm film 82 as indicated by the arrow in FIG. 3(b). The second diaphragm film 82 is formed of the same material and shape as the first diaphragm film 81, except that it has a vacuum chamber 82h. As shown in FIG. 4, the second diaphragm film 82 is pushed by the first diaphragm film 81, which expands in a convex shape, and expands in a convex shape, and moves the second work W2 onto the stage portion 25a via the slightly adhesive sheet 25c. Press down. Thereby, the second work W2 is mounted on the lower surface of the stage portion 25a.

The drive unit 89 can move the base 85 in the X, Y, and Z directions under the control of the control unit 88, and rotate the base 85 in the α direction about the rotation axis Ax extending in the Y direction. It is a possible articulated robot arm.

The vacuum pump 86 operates under the control of the control unit 40 to evacuate the vacuum chamber 82h of the second diaphragm membrane 82 connected via the flow path 86a. The pressurizing section 87 operates under the control of the control section 40 and pressurizes the pressurizing chamber 85h of the base 85 connected via the flow path 87a.
The control section 88 controls the vacuum pump 86 , the pressure section 87 and the drive section 89 . The control unit 88 includes a CPU that executes processing such as work mounting processing, a ROM that stores an operating program for the CPU, and a RAM that is used as a work area for the CPU.
Note that the control unit 88 includes, as functional blocks, a workpiece adsorption processing unit that executes processing related to steps S101 and S102 in FIG. and

Next, the work mounting process executed by the control section 88 of the work mounting device 80 will be described with reference to the flowchart of FIG. At the start of this work mounting process, the second work W2 is placed on the upper surface of the table 90, as shown in FIG. 5(a).
First, the control unit 88 rotates the base 85 in the direction α through the drive unit 89 so that the mounting sheet 83 faces downward in the Z direction, and moves the base 85 in the X direction, the Y direction, and the Z direction. The mounting sheet 83 is made to face the second work W2 on the upper surface of the table 90 (step S101).

Then, the controller 88 operates the vacuum pump 86 to bring the vacuum chamber 82h into a vacuum state, thereby causing the second work W2 to be adsorbed to the adsorption surface 82a of the mounting sheet 83 (step S102).
Next, the control unit 88 separates the base 85 from the table 90 via the drive unit 89 in a state in which the second work W2 is adsorbed to the mounting sheet 83, and the mounting sheet 83 faces upward in the Z direction. The base 85 is rotated 180 degrees in the α direction (step S103). Then, the controller 88 moves the base 85 between the upper chamber 21 and the lower chamber 31 as shown in FIG. Next, the mounting sheet 83 with the second work W2 mounted thereon is made to face the bonding sheet 23 of the work bonding apparatus 10 (step S104).

Next, the control unit 88 stops the operation of the vacuum pump 86 to cancel the state in which the second work W2 is attached to the mounting sheet 83 (step S105), and closes the pressurizing chamber 85h via the pressurizing unit 87. By applying pressure, the attachment sheet 83 is expanded as shown in FIGS. 4 and 5(d) (step S106). As a result, the mounting sheet 83 presses the second work W2 toward the lower surface of the stage portion 25a with a uniform force in the surface direction (XY plane direction). A slightly adhesive sheet 25c shown in FIG. 4 is provided in advance on the surface of the second work W2 that comes into contact with the stage portion 25a . Therefore, the second work W2 is adhered to the stage portion 25a through the slightly adhesive sheet 25c with an adhesive force that is uniform in the surface direction of the second work W2.
Then, the control unit 88 stops the operation of the pressurizing unit 87, restores the mounting sheet 83 to its original non-expanded state (step S107), and moves the base 85 via the driving unit 89. 5(e), the mounting sheet 83 is separated from the stage portion 25a to which the second work W2 is adhered, and the base 85 is retracted from between the upper chamber 21 and the lower chamber 31 (step S108). With the above, the work mounting process is completed.
Simultaneously with step S106 or before or after step S106, as shown in FIGS. 25 h of vacuum chambers are made into a vacuum state by operating. As a result, the second work W2 is attracted to the stage portion 25a by vacuum in addition to the adhesive force of the slightly adhesive sheet 25c.

The work bonding apparatus 10 performs a work bonding process after the work mounting process described above.
In this work bonding process, the control unit 40 of the work bonding apparatus 10 causes the alignment camera 60 to enter between the first work W1 and the second work W2, as shown in FIG. The first work W1 and the second work W2 are photographed, and the positional deviation between the first work W1 and the second work W2 before bonding is measured. Then, the control unit 40 moves the diaphragm chamber 26 in the X direction and the Y direction and rotates it in the θ direction via the shaft driving unit 27 so as to eliminate the measured positional deviation. 2 Align the workpiece W2.
Next, as shown in FIG. 7(b), the control unit 40 closes the upper chamber 21 with respect to the lower chamber 31 via the chamber driving unit 42, and then brings the switching valves 43a and 43b into a conductive state to create a vacuum. By operating the pump 41, the chamber inner space 31a and the diaphragm closed space 26a are brought into a vacuum state. When the chamber inner space 31a is in a vacuum state, although the adsorption force due to the vacuum acting between the second work W2 and the stage portion 25a is reduced, the second work W2 is held on the stage by the adhesive force of the slightly adhesive sheet 25c. The state of being adhered to the portion 25a is maintained.
Then, the control unit 40 moves the diaphragm chamber 26 in the Z direction via the shaft driving unit 27 so as to approach the first workpiece W1. Then, the switching valve 43d is switched to the shut-off state to shut off the adsorption force due to the vacuum acting between the second work W2 and the stage portion 25a, and the switching valve 43a is switched to the open state to increase the diaphragm closed space 26a to the atmospheric pressure. pressurize. As a result, the bonded diaphragm film 22 expands toward the first work W1, presses the second work W2 toward the first work W1 via the work stage 25, and presses the second work W2 against the first work W1. to paste together. An adhesive such as sheet-like OCA (Optical Clear Adhesive) or liquid-like OCR (Optical Clear Resin) is provided on the bonding surface of either the first work W1 or the second work W2. The adhesive force between the first work W1 and the second work W2 is greater than the adhesive force between the second work W2 and the slightly adhesive sheet 25c of the stage portion 25a.

Finally, the controller 40 sets the chamber inner space 31a to atmospheric pressure by opening the release valve 43c, and opens the upper chamber 21 with respect to the lower chamber 31 as shown in FIG. to move the diaphragm chamber 26 away from the second work W2 in the Z direction. As a result, the second work W2 is peeled off from the stage portion 25a, and the first work W1 and the second work W2 that are stuck together can be removed from the lower chamber 31. As shown in FIG.
With the above, the work bonding process is completed.
The first work W1 is, for example, a liquid crystal substrate, a plasma display substrate, a solar cell module substrate, or the like. The second work W2 is, for example, various functional films such as antistatic and antireflection films.

(effect)
According to the embodiment described above, the following effects are obtained.
(1) The work mounting device 80 includes a base 85 having a pressurizing chamber 85h, and an example of a work mounted on the base 85 so as to close the pressurizing chamber 85h and on the surface opposite to the pressurizing chamber 85h. and a mounting sheet 83 formed of an elastic material on which the second work W2 is set. When the pressure chamber 85h is pressurized and expanded, the mounting sheet 83 moves the placed second work W2 onto the stage portion, which is an example of a surface to be mounted, via the slightly adhesive sheet 25c, which is an example of a slightly adhesive material. It is pressed against the lower surface of 25a.
As a comparative example, if the adhesive force between the second work W2 and the stage portion 25a in the XY plane direction is uneven, when the second work W2 is bonded to the first work W1, the first work W1 and the second work W1 are in contact with each other. Air tends to enter between the works W2, and the quality of bonding between the first work W1 and the second work W2 deteriorates. In this respect, according to the above configuration, the mounting sheet 83 in the work mounting device 80 expands, so that the second work W2 is mounted on the stage portion with a uniform adhesive force in the surface direction of the second work W2 via the slightly adhesive sheet 25c. 25a. Since the second work W2 is bonded to the first work W1 from this state, it is difficult for air to enter between the first work W1 and the second work W2, and the bonding quality of the first work W1 and the second work W2 is improved. can be enhanced.

(2) The mounting sheet 83 is provided at a position in contact with the pressurizing chamber 85h, and is attached to the first diaphragm film 81, which expands when the pressurizing chamber 85h is pressurized, and the adsorption surface 82a on the side opposite to the pressurizing chamber 85h. A second work W2 is placed on the first diaphragm film 81 at a position farther from the base 85 than the first diaphragm film 81, and pushed by the expanding first diaphragm film 81 to move the second work W2 to the stage portion. and a second diaphragm membrane 82 elastically deformed so as to press against the lower surface of 25a. The second diaphragm film 82 has a vacuum chamber 82h that opens to the surface on which the second work W2 is placed and is evacuated so that the second work W2 placed thereon is attracted to the second diaphragm film 82 .
According to this configuration, the second diaphragm film 82 holds the second work W2 by evacuating the vacuum chamber 82h. As a result, the workpiece mounting device 80 has the function of mounting the second workpiece W2 on the lower surface of the stage portion 25a by expanding the mounting sheet 83, and in addition, the mounting sheet 83 is mounted by evacuating the vacuum chamber 82h. It has a function of holding the second work W2 through the In addition, since the second work W2 is pulled by the vacuum against the suction surface 82a of the second diaphragm film 82, wrinkling of the second work W2 is suppressed.
Further, even if the first diaphragm film 81 undulates when expanding, the second diaphragm film 82 is interposed between the first diaphragm film 81 and the second work W2. Therefore, it is difficult for the influence of the undulation of the first diaphragm film 81 to reach the second work W2 directly, and the undulation of the second work W2 mounted on the stage portion 25a is suppressed.

(3) The workpiece mounting device 80 includes a drive unit 89 that moves the base 85 in the X direction, Y direction, Z direction, and α direction, a vacuum pump 86 that evacuates the vacuum chamber 82h of the second diaphragm film 82, and a base. After moving the base 85 via the driving unit 89 so that the second diaphragm film 82 faces the second work W2 placed on the table 90 and the pressure unit 87 that pressurizes the pressure chamber 85h of the table 90, , the vacuum chamber 82h of the second diaphragm film 82 is evacuated via the vacuum pump 86, thereby causing the second work W2 to be attracted to the attraction surface 82a of the second diaphragm film 82, which is related to steps S101 and S102 of the control unit 88. The base 85 is moved via the drive section 89 so that the work adsorption processing section, which is a functional block, and the second work W2 adsorbed by the second diaphragm film 82 face the lower surface of the stage section 25a of the bonding sheet 23. After that, the mounting sheet 83 is expanded by pressurizing the pressurizing chamber 85h via the pressurizing section 87, and the second work W2 is pressed against the lower surface of the stage section 25a. and a workpiece mounting processing unit.
According to this configuration, the work mounting device 80 can continuously bond the second work W2 to the lower surface of the stage portion 25a after lifting the second work W2.

(4) The work bonding system 1 includes a work mounting device 80, and the work bonding device 10 that bonds the second work W2 mounted by the work mounting device 80 to the first work W1, which is an example of a work to be bonded. , provided. The workpiece bonding apparatus 10 includes a diaphragm chamber 26 having a closed diaphragm space 26a, and is attached to the diaphragm chamber 26 so as to close the closed diaphragm space 26a of the diaphragm chamber 26. It has a bonded diaphragm film 22 that expands with pressure and a mounting surface to which the second work W2 is mounted by the work mounting device 80. The expanded bonded diaphragm film 22 pushes and elastically deforms the second work W2. and a work stage 25 for pushing the work W2 toward the first work W1.
According to this configuration, even if the bonded diaphragm film 22 undulates when expanded, the work stage 25 is interposed between the bonded diaphragm film 22 and the second work W2. Therefore, the influence of the undulation of the bonded diaphragm film 22 does not easily reach the second work W2, and deterioration in the quality of bonding between the first work W1 and the second work W2 is suppressed. Therefore, in the work bonding system 1, the work mounting device 80 adheres the second work W2 to the work stage 25 with a uniform force, and the work stage 25 is positioned between the bonding diaphragm film 22 and the second work W2. Both of the intervention improve the bonding quality of the first work W1 and the second work W2.

In addition, this invention is not limited by the above embodiment and drawing. Modifications (including deletion of components) can be made as appropriate without changing the gist of the present invention. An example of modification will be described below.

(Modification)
In the above-described embodiment, the chamber driving section 42 moves the upper chamber 21, but it is not limited to this, and the lower chamber 31 may be moved.

In the above embodiment, the mounting sheet 83 includes the first diaphragm film 81 and the second diaphragm film 82, but either one of the first diaphragm film 81 and the second diaphragm film 82 may be omitted. .

In the above-described embodiment, the lamination sheet 23 that is not elastically deformed is provided along the XY plane. may have been In this case, the drive unit 89 may rotate the base 85 in the α direction about the rotation axis Ax so that the attachment sheet 83 is parallel to the bonding sheet 23 . As a result, regardless of the orientation of the bonding sheet 23, the workpiece mounting device 80 can mount the second workpiece W2 on the bonding sheet 23 with uniform adhesive strength.

In the above embodiment, the internal space 29a of the drive shaft 29 is part of the flow path connecting the diaphragm closed space 26a and the vacuum pump 41. good.

In the above-described embodiment, the workpiece setting surface 32a may have a planar shape along the XY plane, and the first workpiece W1 may have a flat plate shape.

In the above embodiment, the work stage 25 of the bonding sheet 23 may be omitted, and the bonding diaphragm film 22 may directly press the second work W2 toward the first work W1.

In each of the above embodiments, the curved first workpiece W1 is placed in the lower chamber 31, and the diaphragm unit 20 is provided on the upper chamber 21 side. The (upper and lower) directions may be opposite. Specifically, the curved second work W2 may be placed on the work support table of the upper chamber, and the diaphragm unit may be provided on the lower chamber side.

DESCRIPTION OF SYMBOLS 1... Work bonding system 10... Work bonding apparatus 20... Diaphragm unit 21... Upper chamber 21h... Shaft through hole 21u... Upper plate 22... Laminated diaphragm membrane 23... Laminated sheet 25... Work stage 25a Stage section 25b Stage support section 25c Slightly adhesive sheet 25h, 82h Vacuum chamber 26 Diaphragm chamber 26a Diaphragm closed space 26h Connection hole 27 Axis driving section 28a ... bellows portion 28b... drive portion support plate 28c... support column portion 29... drive shaft 29a... inner space 31... lower chamber 31a... chamber inner space 32... work support base 32a... work installation surface, DESCRIPTION OF SYMBOLS 40, 88... Control part, 41, 86... Vacuum pump, 42... Chamber drive part, 43a, 43b, 43d... Switch valve, 43c... Release valve, 45a, 45b, 45c, 86a, 87a... Flow path, 60... Position Laminated camera 80 Work mounting device 81 First diaphragm film 82 Second diaphragm film 82 a Adsorption surface 83 Mounting sheet 85 Base 85 h Pressure chamber 87 Pressure part 89... drive section, 90... table, W1... first work, W2... second work, Ax... rotating shaft

Claims (3)

a base having a pressurizing chamber;
a mounting sheet that is mounted on the base so as to block the pressure chamber, has a mounting work on the surface opposite to the pressure chamber, and is formed of an elastic material;
When the pressure chamber is pressurized and expanded, the mounting sheet is arranged such that a slightly adhesive material exists between the mounting work and the surface to be mounted . pressed against the mounting surface via an adhesive material ;
The mounting sheet is
a first diaphragm membrane provided at a position in contact with the pressurizing chamber and expanding when the pressurizing chamber is pressurized;
The mounting work is installed on the surface opposite to the pressurizing chamber, is superimposed on the first diaphragm membrane at a position farther from the base than the first diaphragm membrane, and is pressed against the expanding first diaphragm membrane. a second diaphragm film that is elastically deformed so as to press the mounting work against the mounting surface via the slightly adhesive material,
The second diaphragm membrane has a vacuum chamber that opens to a surface on which the mounting work is installed and is evacuated to adsorb the installed work to the second diaphragm membrane,
Workpiece mounting device. a driving unit that moves the base;
a vacuum pump that evacuates the vacuum chamber of the second diaphragm membrane;
a pressurizing unit that pressurizes the pressurizing chamber of the base;
After moving the base through the driving unit so that the second diaphragm membrane faces the mounting work placed on the table, the vacuum chamber of the second diaphragm membrane is evacuated through the vacuum pump. a workpiece adsorption processing unit that causes the second diaphragm membrane to adsorb the mounted workpiece by setting the
After the base is moved via the drive section so that the mounting work adsorbed by the second diaphragm film faces the mounting surface, the pressure chamber is pressurized via the pressure section. By doing so, the mounting sheet is expanded, and the mounting work is pressed against the mounting surface via the slightly adhesive material so that the slightly adhesive material exists between the mounting work and the mounting surface. a workpiece mounting processing unit;
The workpiece mounting device according to claim 1 . A workpiece bonding system comprising a workpiece mounting device and a workpiece bonding device,
The workpiece mounting device is
a base having a pressurizing chamber;
a mounting sheet that is mounted on the base so as to block the pressure chamber, has a mounting work on the surface opposite to the pressure chamber, and is formed of an elastic material;
When the pressure chamber is pressurized and expanded, the mounting sheet is arranged such that a slightly adhesive material exists between the mounting work and the surface to be mounted. pressed against the mounting surface via an adhesive material;
The work bonding device bonds the mounting work mounted on the mounting surface by the work mounting device to the work to be bonded,
The work bonding device is
a diaphragm chamber having a closed diaphragm space;
a bonded diaphragm membrane that is attached to the diaphragm chamber so as to close the closed diaphragm space of the diaphragm chamber, is formed of an elastic material, and expands as the closed diaphragm space is pressurized;
A workpiece having the mounting surface to which the mounting work is mounted by the work mounting device, and elastically deformed by being pushed by the expanding lamination diaphragm film to push the mounting work toward the lamination work. comprising a stage and
Work bonding system.

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