JP7284944B2 - Vapor chamber and electronics - Google Patents

Description

The present invention relates to vapor chambers, electronic devices and metal sheets for vapor chambers.

Devices that generate heat, such as central processing units (CPUs) used in mobile terminals such as mobile terminals and tablet terminals, are cooled by heat-radiating members such as heat pipes (see, for example, Patent Document 1). In recent years, in order to reduce the thickness of mobile terminals and the like, there is a demand for reducing the thickness of heat-dissipating members, and the development of vapor chambers that can be made thinner than heat pipes is underway. A working fluid is sealed in the vapor chamber, and the working fluid absorbs the heat of the device and releases it to the outside, thereby cooling the device.

More specifically, the working fluid in the vapor chamber receives heat from the device at the portion (evaporation section) close to the device and evaporates into vapor, and then the vapor moves to a position away from the vaporization section. It cools down and condenses into a liquid. Inside the vapor chamber, a capillary structure (wick) is provided as a liquid flow path, and the liquid working fluid passes through this liquid flow path and is transported to the evaporator, where it is again transported to the evaporator. Evaporate under heat. In this way, the working fluid circulates in the vapor chamber while repeating phase changes, that is, evaporation and condensation, thereby transferring the heat of the device and increasing the heat radiation efficiency.

JP 2016-50682 A

By the way, in Patent Document 1, a wick is arranged along the outer circumference of the sheet body. Therefore, even if the steam condenses into working fluid at any point in the steam passage, the working fluid can be returned to the heat receiving portion by the capillary force of the wick. However, in Patent Document 1, since the wick is not continuously formed near the injection port (liquid injection nozzle), especially at the outer peripheral portion of the sheet body near the injection port, there is a hindrance to the return of the working fluid. There is a risk of injury.

SUMMARY OF THE INVENTION The present invention has been made in consideration of such points, and provides a vapor chamber, an electronic device, and a metal sheet for a vapor chamber, which are capable of circulating hydraulic fluid over the entire outer peripheral portion of the metal sheet. for the purpose.

The present invention
A vapor chamber containing a hydraulic fluid,
a first metal sheet;
a second metal sheet laminated to the first metal sheet;
At least one of the first metal sheet and the second metal sheet is formed with a vapor flow path through which the vapor of the working fluid passes,
At least one of the first metal sheet and the second metal sheet is formed with a liquid flow path through which the liquid working liquid passes,
a first peripheral liquid flow path through which the liquid working liquid passes is formed in the first metal sheet along the peripheral edge of the first metal sheet;
the vapor chamber, wherein the first peripheral liquid flow path is formed along the entire circumference of the first metal sheet;
I will provide a.

In addition, in the vapor chamber described above,
a second peripheral liquid flow path through which the liquid working liquid passes is formed in the second metal sheet along the peripheral edge of the second metal sheet;
at least a portion of the first peripheral liquid flow path and at least a portion of the second peripheral liquid flow path overlap each other;
You may do so.

Also, in the vapor chamber described above,
The width of the first peripheral liquid channel portion and the width of the second peripheral liquid channel portion are different from each other,
You may do so.

Also, in the vapor chamber described above,
The second metal sheet has an injection flow channel recess that communicates with the steam flow channel through a conductive portion, and the second peripheral liquid flow channel is formed in the second metal sheet except for the conductive portion. Formed over the entire periphery,
You may do so.

Also, in the vapor chamber described above,
The first peripheral liquid flow path portion has a plurality of main grooves extending parallel to each other, and a connecting groove connecting the main grooves adjacent to each other,
You may do so.

Also, in the vapor chamber described above,
A convex portion is formed so as to be surrounded by the main groove and the communication groove, and a plurality of the convex portions are arranged in a zigzag pattern in a plan view,
You may do so.

Also, in the vapor chamber described above,
wherein the second metal sheet is provided on the first metal sheet;
You may do so.

Also, in the vapor chamber described above,
further comprising a third metal sheet interposed between the first metal sheet and the second metal sheet;
the steam channel portion is formed in the second metal sheet,
the liquid flow path portion is formed in the first metal sheet,
The third metal sheet is provided with a communicating portion that communicates the vapor channel portion and the liquid channel portion,
You may do so.

The present invention also provides a vapor chamber containing a hydraulic fluid,
a first metal sheet;
a second metal sheet laminated to the first metal sheet;
a third metal sheet interposed between the first metal sheet and the second metal sheet;
The third metal sheet includes a first surface provided on the side of the first metal sheet and a second surface provided on the side of the second metal sheet,
At least one of the first surface and the second surface of the third metal sheet is formed with a vapor channel portion through which the vapor of the working fluid passes,
At least one of the first surface and the second surface of the third metal sheet is formed with a liquid flow path portion through which the liquid working fluid passes,
a third peripheral liquid flow path through which the liquid working liquid passes is formed on the first surface of the third metal sheet along the peripheral edge of the third metal sheet;
the vapor chamber, wherein the third peripheral liquid flow path is formed along the entire circumference of the third metal sheet;
I will provide a.

In addition, the present invention
a housing;
a device contained within the housing;
an electronic device, comprising: a vapor chamber as described above, in thermal contact with said device;
I will provide a.

In addition, the present invention
A vapor chamber metal sheet for a vapor chamber containing a working fluid,
a first surface;
a second surface provided on the opposite side of the first surface,
a first peripheral liquid flow path through which the liquid working fluid passes is formed on the first surface along the peripheral edge of the first surface;
the vapor chamber metal sheet, wherein the first peripheral liquid flow path portion is formed along the entire circumference of the first surface;
I will provide a.

According to the present invention, the hydraulic fluid can be circulated over the entire outer peripheral portion of the metal sheet.

FIG. 1 is a schematic perspective view illustrating an electronic device according to a first embodiment of the invention. FIG. 2 is a top view showing the vapor chamber according to the first embodiment of the invention. 3 is a cross-sectional view taken along the line AA showing the vapor chamber of FIG. 2. FIG. 4 is a top view of the lower metal sheet of the vapor chamber of FIG. 2; FIG. 5 is a bottom view of the upper metal sheet of the vapor chamber of FIG. 2; FIG. 6 is an enlarged top view showing the liquid flow path and the peripheral liquid flow path of the vapor chamber of FIG. 4. FIG. FIG. 7 is a cross-sectional view showing the addition of an upper metal sheet to the BB line cross-section of FIG. FIG. 8 is an enlarged top view showing a modified example of the liquid channel portion and the peripheral liquid channel portion of FIG. FIG. 9 is an enlarged top view showing another modified example of the liquid channel portion and the peripheral liquid channel portion of FIG. FIGS. 10A to 10C are diagrams showing the manufacturing method (first half) of the vapor chamber according to the first embodiment of the present invention. FIGS. 11(a) to 11(c) are diagrams showing the second half of the vapor chamber manufacturing method according to the first embodiment of the present invention. FIG. 12 is a diagram showing a modified example (modified example 1) of the vapor chamber of FIG. 13 is a diagram showing another modification (modification 2) of the vapor chamber of FIG. 2. FIG. 14 is a diagram showing another modification (modification 3) of the vapor chamber of FIG. 3. FIG. 15 is a diagram showing another modification (modification 4) of the vapor chamber of FIG. 3. FIG. 16 is a diagram showing another modification (modification 5) of the vapor chamber of FIG. 2. FIG. 17 is a diagram showing another modification (modification 6) of the vapor chamber of FIG. 2. FIG. 18 is a diagram showing another modification (modification 7) of the vapor chamber of FIG. 2. FIG. FIG. 19 is a cross-sectional view showing a vapor chamber according to a second embodiment of the invention. 20 is a bottom view of the upper metal sheet of FIG. 19; FIG. 21 is a top view of the intermediate metal sheet of FIG. 19; FIG. 22 is a bottom view of the intermediate metal sheet of FIG. 19; FIG. FIG. 23 is a cross-sectional view showing a vapor chamber according to a third embodiment of the invention. 24 is a top view of the intermediate metal sheet of FIG. 23; FIG. 25 is a bottom view of the intermediate metal sheet of FIG. 23; FIG. 26 is a top view of the lower metal sheet of FIG. 23; FIG. 27 is a cross-sectional view showing a modification of the vapor chamber of FIG. 23. FIG.

An embodiment of the present invention will be described below with reference to the drawings. In the drawings attached to this specification, for the convenience of illustration and ease of understanding, the scale, length-to-width ratio, etc. are appropriately changed and exaggerated from those of the real thing.

Also used herein are terms specifying shapes and geometric conditions and physical properties and degrees thereof, e.g. The values of , etc. shall be interpreted to include the range in which similar functions can be expected without being bound by a strict meaning. Furthermore, in the drawings, for the sake of clarity, the shapes of multiple parts that can be expected to have similar functions are regularly described, but the functions are expected without being bound by a strict meaning. The shapes of the portions may differ from each other to the extent possible. In addition, in the drawings, the boundary lines indicating the joint surfaces of members are shown as simple straight lines for convenience, but they are not bound by strict straight lines, and desired joint performance can be expected. The shape of the boundary line is arbitrary as long as it is possible.

(First embodiment)
A vapor chamber, an electronic device, and a metal sheet for a vapor chamber according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 18. FIG. The vapor chamber 1 according to the present embodiment is a device mounted on the electronic equipment E in order to cool the device D as a heating element housed in the electronic equipment E. As shown in FIG. Examples of device D include central processing units (CPUs) used in mobile terminals such as mobile terminals and tablet terminals, light emitting diodes (LEDs), and electronic devices (cooled devices) that generate heat such as power semiconductors. be done.

First, a tablet terminal will be described as an example of an electronic device E on which the vapor chamber 1 according to the present embodiment is mounted. As shown in FIG. 1 , the electronic device E (tablet terminal) includes a housing H, a device D housed in the housing H, and a vapor chamber 1 . In the electronic device E shown in FIG. 1, a touch panel display TD is provided on the front surface of the housing H. As shown in FIG. The vapor chamber 1 is housed within the housing H and placed in thermal contact with the device D. As shown in FIG. This allows the vapor chamber 1 to receive the heat generated by the device D when the electronic equipment E is used. The heat received by the vapor chamber 1 is released to the outside of the vapor chamber 1 via the working fluid 2, which will be described later. In this way device D is effectively cooled. If the electronic device E is a tablet terminal, the device D corresponds to a central processing unit or the like.

Next, the vapor chamber 1 in this embodiment will be described. The vapor chamber 1 has a sealed space 3 in which a working fluid 2 is sealed, and the phase change of the working fluid 2 in the sealed space 3 effectively cools the device D of the electronic equipment E described above. It is designed to

The vapor chamber 1 is generally formed in the shape of a thin flat plate. Although the planar shape of the vapor chamber 1 is arbitrary, it may be rectangular as shown in FIG. In this case, the vapor chamber 1 has four straight outer edges 1a, 1b with out-of-plane contours. Of these, two outer edges 1a are formed along a first direction X described later, and the remaining two outer edges 1b are formed along a second direction Y described later. The planar shape of the vapor chamber 1 may be, for example, a rectangle with one side of 1 cm and the other side of 3 cm, or a square with one side of 15 cm, and the planar dimensions of the vapor chamber 1 are arbitrary. . Moreover, the planar shape of the vapor chamber 1 is not limited to a rectangular shape, and may be any shape such as a circular shape, an elliptical shape, an L shape, a T shape, or the like.

As shown in FIGS. 2 and 3, the vapor chamber 1 includes a lower metal sheet 10 (first metal sheet or second metal sheet, vapor chamber metal sheet) and an upper metal sheet laminated on the lower metal sheet 10. a sheet (second metal sheet or first metal sheet, vapor chamber metal sheet); In this embodiment, upper metal sheet 20 is provided on lower metal sheet 10 . The lower metal sheet 10 has an upper surface 10a (first surface) and a lower surface 10b (second surface) provided opposite to the upper surface 10a. The upper metal sheet 20 has a lower surface 20a (the surface on the side of the lower metal sheet 10) superimposed on the upper surface 10a (the surface on the side of the upper metal sheet 20) of the lower metal sheet 10, and a surface opposite to the lower surface 20a. and a provided upper surface 20b. A device D, which is an object to be cooled, is attached to the lower surface 10b of the lower metal sheet 10 (in particular, the lower surface of the evaporator 11, which will be described later).

Between the lower metal sheet 10 and the upper metal sheet 20, a sealed space 3 is formed in which the hydraulic fluid 2 is enclosed. In the present embodiment, the sealed space 3 mainly includes a vapor passage portion 80 (a lower vapor passage recess 12 and an upper vapor passage recess 21, which will be described later) through which vapor of the working fluid 2 mainly passes, and has a liquid flow path portion 30 and peripheral liquid flow path portions 18 and 27 through which the liquid flow passes. Examples of the working liquid 2 include pure water, ethanol, methanol, acetone, and the like.

The lower metal sheet 10 and the upper metal sheet 20 are bonded by diffusion bonding, which will be described later. 2 and 3 show an example in which both the lower metal sheet 10 and the upper metal sheet 20 are formed in a rectangular shape in a plan view, but they are not limited to this. Here, the plane view is a direction perpendicular to the surface of the vapor chamber 1 that receives heat from the device D (the lower surface 10b of the lower metal sheet 10) and the surface that releases the received heat (the upper surface 20b of the upper metal sheet 20). 2, which corresponds to, for example, the vapor chamber 1 viewed from above (see FIG. 2) or from below.

When the vapor chamber 1 is installed in a mobile terminal, the vertical relationship between the lower metal sheet 10 and the upper metal sheet 20 may be disrupted depending on the orientation of the mobile terminal.
However, in this embodiment, for the sake of convenience, the metal sheet that receives heat from the device D is referred to as lower metal sheet 10, the metal sheet that releases the heat received is referred to as upper metal sheet 20, and lower metal sheet 10 is referred to as The description will be made under the condition that they are arranged on the lower side and the upper metal sheet 20 is arranged on the upper side.

As shown in FIG. 2 , the vapor chamber 1 further includes an injection part 4 at one of the pair of ends in the first direction X for injecting the working fluid 2 into the sealed space 3 . The injection part 4 includes a lower injection projection 16 projecting from the end surface of the lower metal sheet 10 (the surface corresponding to the outer edge 1b in FIG. 2) and an end surface of the upper metal sheet 20 (the surface corresponding to the outer edge 1b in FIG. 2). and an upper injection projection 25 projecting from the surface). Among them, the lower injection flow channel recess 17 is formed on the upper surface of the lower injection projection 16 (the surface corresponding to the upper surface 10a of the lower metal sheet 10), and the lower surface of the upper injection projection 25 (the lower surface of the upper metal sheet 20) is formed. 20a), an upper injection channel concave portion 26 is formed. The lower injection channel recess 17 communicates with the lower steam channel recess 12 , and the upper injection channel recess 26 communicates with the upper steam channel recess 21 . The lower injection channel recess 17 and the upper injection channel recess 26 integrally form an injection channel for the working fluid 2 when the lower metal sheet 10 and the upper metal sheet 20 are joined. The working fluid 2 is injected into the sealed space 3 through the injection channel. In the present embodiment, an example in which the injection part 4 is provided at one of a pair of ends of the vapor chamber 1 in the first direction X is shown, but the present invention is limited to this. can be placed in any position. Moreover, two or more injection parts 4 may be provided.

As shown in FIG. 4, the lower metal sheet 10 includes an evaporator 11 in which the working fluid 2 evaporates to generate steam, and a lower steam channel provided on the upper surface 10a and formed in a rectangular shape in plan view. and a concave portion 12 (first steam flow path portion). Of these, the lower steam flow passage concave portion 12 constitutes a part of the sealed space 3 described above, and is mainly configured so that the steam generated in the evaporating portion 11 passes therethrough.

The evaporating section 11 is arranged in the lower steam channel recess 12, and the steam in the lower steam channel recess 12 diffuses away from the evaporating section 11, and most of the steam is relatively It is transported towards the cooler periphery. The evaporating portion 11 is a portion where the working fluid 2 in the sealed space 3 evaporates by receiving heat from the device D attached to the lower surface 10b of the lower metal sheet 10 . Therefore, the term evaporating portion 11 is not limited to the portion overlapping the device D, but is used as a concept including the portion where the working fluid 2 can evaporate even if it does not overlap the device D. Here, the evaporator 11 can be provided anywhere on the lower metal sheet 10, but FIGS. 2 and 4 show an example in which it is provided in the center of the lower metal sheet 10. . In this case, the operation of the vapor chamber 1 can be stabilized regardless of the attitude of the mobile terminal in which the vapor chamber 1 is installed.

In the present embodiment, as shown in FIGS. 3 and 4, in the lower steam channel recessed portion 12 of the lower metal sheet 10, from the bottom surface 12a (described later) of the lower steam channel recessed portion 12 to the upper side (bottom surface 12a). A plurality of lower flow path wall portions 13 (first flow path projections) projecting in a direction perpendicular to the direction of the flow path are provided. In the present embodiment, an example in which the lower flow path wall portion 13 extends in an elongated shape along the first direction X (longitudinal direction, horizontal direction in FIG. 4) of the vapor chamber 1 is shown. The lower channel wall portion 13 includes an upper surface 13a (contact surface, projecting end surface) that abuts on a lower surface 22a of an upper channel wall portion 22, which will be described later. The upper surface 13a is a surface that is not etched in an etching process, which will be described later, and is formed on the same plane as the upper surface 10a of the lower metal sheet 10. As shown in FIG. In addition, the respective lower flow path wall portions 13 are arranged in parallel with each other at regular intervals.

As shown in FIGS. 3 and 4 , the lower steam passage recess 12 includes a plurality of lower steam passages 81 (first steam passages) partitioned by the lower passage walls 13 . The lower steam passages 81 are elongated along the first direction X and arranged parallel to each other. Both ends of each lower steam passage 81 communicate with a lower connecting steam passage 82 extending in the second direction Y in an elongated shape, and each lower steam passage 81 communicates through the lower connecting steam passage 82. are in communication with each other. In this way, the vapor of the working fluid 2 flows around each lower flow passage wall portion 13 (the lower steam passage 81 and the lower connecting vapor passage 82), and reaches the peripheral portion of the lower steam flow passage concave portion 12. It is configured to transport steam and prevents obstruction of the flow of steam. In addition, in FIG. 3, the cross-sectional shape (the cross section in the second direction Y) of the lower steam passage 81 of the lower steam passage concave portion 12 is rectangular. However, it is not limited to this, and the cross-sectional shape of the lower steam passage 81 may be curved, semicircular, or V-shaped, for example, so that the vapor of the working fluid 2 can be diffused. Preferably optional. The same applies to the lower connecting steam passage 82 . A width (dimension in the second direction Y) w7 of the lower steam passage 81 corresponds to an interval between the lower flow passage walls 13 to be described later. The same applies to the width (dimension in the first direction X) of the lower connecting steam passage 82 .

As described above, each lower steam passage 81 communicates with each other via the lower connecting steam passage 82 . This allows the vapor of the working fluid 2 to travel between the lower vapor passages 81 . Therefore, the vapor of the working fluid 2 can be diffused further.

The lower channel wall portion 13 is arranged so as to overlap a corresponding upper channel wall portion 22 (described later) of the upper metal sheet 20 in a plan view, thereby improving the mechanical strength of the vapor chamber 1. . The lower steam passage 81 is formed so as to overlap a corresponding upper steam passage 83 (described later) in plan view. Similarly, the lower communicating steam passage 82 is formed so as to overlap a corresponding upper communicating steam passage 84 (described later) in plan view.

The width w0 of the lower channel wall portion 13 is, for example, 0.05 mm to 30 mm, preferably 0.05 mm to 2.0 mm. 05 mm to 30 mm, preferably 0.05 mm to 2.0 mm. Here, the width w0 is the dimension of the lower flow path wall 13 in the second direction Y orthogonal to the first direction X of the lower flow path wall 13, and is the dimension of the upper surface 10a of the lower metal sheet 10. , which corresponds to the vertical dimension in FIG. 4, for example. Further, the height of the lower flow path wall portion 13 (in other words, the maximum depth of the lower steam flow path concave portion 12) h0 (see FIG. 3) is smaller than the thickness T1 of the lower metal sheet 10 by at least 10 μm or more. is preferred. If the remainder obtained by subtracting h0 from T1 is set to 10 μm or more, it is possible to prevent the lower steam flow passage concave portion 12 from being damaged due to insufficient strength. The thickness of the vapor chamber 1 may be between 0.1 mm and 2.0 mm, and the thickness T1 of the lower metal sheet 10 and the thickness T2 of the upper metal sheet 20 may be equal. For example, when the thickness of the vapor chamber 1 is 0.5 mm and T1 and T2 are the same, h0 is preferably 200 μm.

As shown in FIGS. 3 and 4, the lower metal sheet 10 has a lower peripheral wall 14 at its peripheral edge. The lower peripheral wall 14 is formed so as to surround the sealed space 3 , particularly the lower steam channel recess 12 , and defines the sealed space 3 . Lower alignment holes 15 for positioning the lower metal sheet 10 and the upper metal sheet 20 are provided at the four corners of the lower peripheral wall 14 in plan view.

In addition, an annular lower peripheral liquid channel portion 18 (first peripheral liquid channel portion or second 2 peripheral liquid flow path portions) are formed. The lower peripheral liquid channel portion 18 is formed along the peripheral edge of the lower metal sheet 10 in the inner portion of the lower peripheral wall 14 in plan view. The lower peripheral liquid channel portion 18 is formed so as to surround the sealed space 3 , especially the lower steam channel concave portion 12 . That is, in plan view, the lower steam passage 81 or the lower connecting steam passage 82 of the lower steam passage concave portion 12 is interposed between the liquid passage portion 30 and the lower peripheral liquid passage portion 18 . , the liquid channel portion 30 and the lower peripheral liquid channel portion 18 are separated. In addition, the lower peripheral liquid flow path portion 18 has a rectangular annular shape in plan view, and each side thereof is parallel to the first direction X or the second direction Y. As shown in FIG.

As shown in FIG. 4 , the lower peripheral liquid flow path portion 18 is formed over the entire circumference of the lower metal sheet 10 . That is, the lower peripheral liquid flow path portion 18 is formed continuously along all four sides of the rectangular lower metal sheet 10 . In addition, the lower peripheral liquid channel portion 18 is formed so as to cross the injection channel for the working liquid 2 formed by the lower injection channel recess 17 , and also in the vicinity of the lower injection channel recess 17 . The hydraulic fluid 2 can be circulated. In FIG. 4, the lower injection channel concave portion 17 enters halfway in the width direction (first direction X) of the lower peripheral liquid channel portion 18, but the present invention is not limited to this. The concave portion 17 does not have to enter the lower peripheral liquid flow path portion 18 .

The lower peripheral liquid channel portion 18 is formed in a portion (inner portion) of the annular lower peripheral wall 14 that protrudes upward (in a direction perpendicular to the bottom surface 12a) from the bottom surface 12a of the lower steam channel recess 12. It is The lower peripheral wall 14 has an upper surface 14a that contacts a lower surface 23a of an upper peripheral wall 23, which will be described later. The upper surface 14a is a surface that is not etched in an etching process, which will be described later, and is formed on the same plane as the upper surface 10a of the lower metal sheet 10. As shown in FIG.

The width w7 of the lower peripheral liquid channel portion 18 is, for example, 0.03 mm to 30 mm, preferably 0.03 mm to 2.0 mm. Here, the width w7 means the dimension in the direction perpendicular to the longitudinal direction of the lower peripheral liquid channel portion 18 in plan view. The width w7 means the dimension in the second direction Y in the portion parallel to the first direction X of the lower peripheral liquid channel portion 18, and the width w7 means the dimension in the first direction X in the portion parallel to the second direction Y. I mean dimensions. Moreover, the height of the lower peripheral edge wall 14 is the same as the height of the lower channel wall portion 13, and is preferably 10 μm to 200 μm.

In the present embodiment, the upper metal sheet 20 is different from the lower metal sheet 10 in that the liquid channel portion 30 described later is not provided and the configuration of the upper peripheral liquid channel portion 27 is different. . The configuration of the upper metal sheet 20 will be described in more detail below.

As shown in FIGS. 3 and 5, the upper metal sheet 20 has an upper steam channel concave portion 21 (second steam channel portion) provided on the lower surface 20a. The upper vapor passage concave portion 21 constitutes a part of the sealed space 3 and is mainly configured to diffuse and cool the vapor generated in the evaporating portion 11 . More specifically, the steam in the upper steam passage concave portion 21 diffuses away from the evaporating portion 11, and most of the steam is transported toward the relatively low-temperature peripheral portion. Further, as shown in FIG. 3, on the upper surface 20b of the upper metal sheet 20 is arranged a housing member Ha that constitutes a part of a housing of a mobile terminal or the like. As a result, the steam in the upper steam passage concave portion 21 is cooled by the outside air through the upper metal sheet 20 and the housing member Ha.

In the present embodiment, as shown in FIGS. 2, 3 and 5, in the upper steam channel recess 21 of the upper metal sheet 20, from the bottom surface 21a of the upper steam channel recess 21 downward (perpendicular to the bottom surface 21a) direction) are provided. In the present embodiment, an example in which the upper flow path wall portion 22 extends in an elongated shape along the first direction X (horizontal direction in FIG. 5) of the vapor chamber 1 is shown. The upper channel wall portion 22 has a flat lower surface 22a (contact surface, protruding end face). Moreover, each upper flow-path wall part 22 is spaced apart by equal intervals, and is mutually arrange|positioned in parallel.

As shown in FIGS. 3 and 5 , the upper steam passage recess 21 includes a plurality of upper steam passages 83 (second steam passages) partitioned by the upper passage walls 22 . The upper steam passages 83 are elongated along the first direction X and arranged parallel to each other. Both ends of each upper steam passage 83 communicate with an upper communicating steam passage 84 elongated along the second direction Y, and each upper steam passage 83 communicates via the upper communicating steam passage 84. there is In this manner, the vapor of the working fluid 2 flows around each upper flow path wall portion 22 (the upper steam passage 83 and the upper connecting vapor passage 84), and the vapor flows toward the peripheral edge portion of the upper steam flow passage concave portion 21. It is configured to be transported and restrains the vapor flow from being obstructed. In addition, in FIG. 3, the cross-sectional shape (the cross section in the second direction Y) of the upper steam passage 83 of the upper steam passage concave portion 21 is rectangular. However, it is not limited to this, and the cross-sectional shape of the upper vapor passage 83 may be curved, semicircular, or V-shaped, for example, as long as the vapor of the working fluid 2 can be diffused. Optional. The cross-sectional shape of the upper connecting steam passage 84 is also the same. The width of the upper steam passage 83 (dimension in the second direction Y) and the width of the upper connecting steam passage 84 are the same as the width of the lower steam passage 81 and the width of the lower connecting steam passage 82, as shown in FIG. may be different.

As described above, each upper steam passage 83 communicates with each other via the upper connecting steam passage 84 . This allows the vapor of the working fluid 2 to travel between the upper vapor passages 83 . Therefore, the vapor of the working fluid 2 can be diffused further.

The upper channel wall portion 22 is arranged so as to overlap the corresponding lower channel wall portion 13 of the lower metal sheet 10 in a plan view, thereby improving the mechanical strength of the vapor chamber 1 . Also, the upper steam passage 83 is formed so as to overlap the corresponding lower steam passage 81 in plan view. Similarly, the upper communicating steam passage 84 is formed so as to overlap the corresponding lower communicating steam passage 82 in plan view.

The width and height of the upper channel wall portion 22 are preferably the same as the width w0 and height h0 of the lower channel wall portion 13 described above, respectively. Here, the bottom surface 21a of the upper steam channel recess 21 can be called a ceiling surface in the vertical arrangement relationship between the lower metal sheet 10 and the upper metal sheet 20 as shown in FIG. Since it corresponds to the inner surface of the recess 21, it is referred to as the bottom surface 21a in this specification.

As shown in FIGS. 3 and 5, the upper metal sheet 20 has an upper peripheral wall 23 at its peripheral edge. The upper peripheral wall 23 is formed so as to surround the sealed space 3 , particularly the upper steam channel recess 21 , and defines the sealed space 3 . Further, upper alignment holes 24 for positioning the lower metal sheet 10 and the upper metal sheet 20 are provided at the four corners of the upper peripheral wall 23 in plan view. That is, each upper alignment hole 24 is arranged so as to overlap with each lower alignment hole 15 described above at the time of temporary fixing, which will be described later, so that the lower metal sheet 10 and the upper metal sheet 20 can be positioned. .

As shown in FIGS. 3 and 5, an annular upper peripheral liquid channel portion 27 (second A peripheral liquid flow path portion or a first peripheral liquid flow path portion) is formed. The upper peripheral liquid channel portion 27 is formed along the peripheral edge of the upper metal sheet 20 in the inner portion of the upper peripheral wall 23 in plan view. The upper peripheral liquid channel portion 27 is formed so as to surround the sealed space 3 , especially the upper steam channel concave portion 21 . That is, in plan view, the upper steam passage 83 or the upper connecting steam passage 84 of the upper steam passage concave portion 21 is interposed between the liquid passage portion 30 and the upper peripheral liquid passage portion 27. The portion 30 and the upper peripheral liquid flow path portion 27 are separated. Further, the upper peripheral liquid flow path portion 27 has a rectangular annular shape in plan view, and each side thereof is parallel to the first direction X or the second direction Y. As shown in FIG.

As shown in FIG. 5 , the upper peripheral liquid channel portion 27 is formed over the entire peripheral edge of the upper metal sheet 20 except for the conducting portion 28 that connects the upper injection channel recess 26 and the upper steam channel recess 21 . ing. That is, the upper peripheral liquid channel portion 27 is partially interrupted by the conducting portion 28 for injecting the working liquid 2 from the upper injection channel concave portion 26 . For this reason, in the sealing step described later, the working fluid 2 can be injected from the upper injection channel recess 26 into the upper vapor channel recess 21 via the conducting portion 28 . On the other hand, since the upper peripheral liquid flow path portion 27 is formed over the entire peripheral edge of the upper metal sheet 20 except for the conducting portion 28 , the working fluid 2 flows to the evaporating portion 11 side over substantially the entire peripheral edge of the upper metal sheet 20 . Reflux is possible.

The upper peripheral liquid channel portion 27 is formed in a portion (inner portion) of the annular upper peripheral wall 23 that protrudes downward (in a direction perpendicular to the bottom surface 21a) from the bottom surface 21a of the upper vapor channel recess 21. . The upper peripheral wall 23 has a lower surface 23 a that contacts the upper surface 14 a of the lower peripheral wall 14 .
The lower surface 23a is a surface that is not etched in an etching process, which will be described later, and is formed on the same plane as the lower surface 20a of the upper metal sheet 20. As shown in FIG.

The width w8 of the upper peripheral liquid channel portion 27 is, for example, 0.02 mm to 20 mm, preferably 0.02 mm to 1.5 mm. Here, the width w8 means the dimension in the direction perpendicular to the longitudinal direction of the upper peripheral liquid channel portion 27 in plan view. The width w8 means the dimension in the second direction Y in the portion parallel to the first direction X of the upper peripheral liquid channel portion 27, and the width w8 means the dimension in the first direction X in the portion parallel to the second direction Y. means Moreover, the height of the upper peripheral edge wall 23 is the same as the height of the upper channel wall portion 22, and is preferably 10 μm to 200 μm.

Further, as shown in FIGS. 3 to 5, the width w7 of the lower peripheral liquid channel portion 18 of the lower metal sheet 10 is wider than the width w8 of the upper peripheral liquid channel portion 27 of the upper metal sheet 20. (w7>w8). Specifically, the width w7 of the lower peripheral liquid channel portion 18 is wider than the width w8 of the upper peripheral liquid channel portion 27 over the entire peripheral edge except for the conducting portion 28 . The difference (w7-w8) between the width w7 of the lower peripheral liquid channel portion 18 and the width w8 of the upper peripheral liquid channel portion 27 may be 0.01 mm to 1 mm. The lower peripheral liquid channel portion 18 protrudes inward from the upper peripheral liquid channel portion 27 in a plan view. It is opposed to the upper vapor channel concave portion 21 without contacting the liquid channel portion 27 . On the other hand, the outer peripheral edge of the lower peripheral liquid flow path portion 18 is arranged at the same position as the outer peripheral edge of the upper peripheral liquid flow path portion 27 in plan view. In this way, the vapor of the working fluid 2 in the upper vapor passage concave portion 21 can directly condense in the inner portion 18a of the lower peripheral liquid passage portion 18 protruding toward the upper vapor passage concave portion 21, Condensation and circulation of the working fluid 2 can be stably performed. Note that the width w8 of the upper peripheral liquid channel portion 27 is not limited to this, and the width w8 of the upper peripheral liquid channel portion 27 may be the same as the width w7 of the lower peripheral liquid channel portion 18. It may be wider than the width w7 of the peripheral liquid flow path portion 18 .

In addition, in the present embodiment, a portion of the lower peripheral liquid flow channel portion 18 of the lower metal sheet 10 and a portion of the upper peripheral liquid flow channel portion 27 of the upper metal sheet 20 overlap each other in plan view. ing.
Specifically, the lower peripheral liquid channel portion 18 and the upper peripheral liquid channel portion 27 overlap each other except for the inner portion 18 a of the lower peripheral liquid channel portion 18 and the conducting portion 28 . As a result, the working liquid 2 can be efficiently circulated by the lower peripheral liquid channel portion 18 and the upper peripheral liquid channel portion 27 .

Such lower metal sheet 10 and upper metal sheet 20 are permanently bonded together, preferably by diffusion bonding. More specifically, as shown in FIG. 3, the upper surface 14a of the lower peripheral wall 14 of the lower metal sheet 10 and the lower surface 23a of the upper peripheral wall 23 of the upper metal sheet 20 are in contact with each other. 14 and the upper peripheral wall 23 are joined together. Thereby, a sealed space 3 in which the hydraulic fluid 2 is sealed is formed between the lower metal sheet 10 and the upper metal sheet 20 . In addition, the working fluid 2 can be effectively condensed and circulated between the lower peripheral liquid channel portion 18 and the upper peripheral liquid channel portion 27 at the peripheral edges of the metal sheets 10 and 20 . Furthermore, the upper surface 13a of the lower flow path wall portion 13 of the lower metal sheet 10 and the lower surface 22a of the upper flow path wall portion 22 of the upper metal sheet 20 abut against each lower flow path wall portion 13. The upper channel wall portion 22 is joined to each other. This improves the mechanical strength of the vapor chamber 1 . In particular, since the lower channel wall portion 13 and the upper channel wall portion 22 according to the present embodiment are arranged at regular intervals, the mechanical strength at each position of the vapor chamber 1 can be made uniform. Note that the lower metal sheet 10 and the upper metal sheet 20 may be joined by other methods such as brazing instead of diffusion joining as long as they can be joined permanently. The term "permanently joined" is not limited to a strict meaning, and the upper surface 10a of the lower metal sheet 10 is attached to the upper surface 10a of the lower metal sheet 10 to the extent that the sealing of the sealed space 3 can be maintained during the operation of the vapor chamber 1. and the lower surface 20a of the upper metal sheet 20 are bonded to the extent that the bonding can be maintained.

Next, the configurations of the liquid flow path section 30 and the peripheral liquid flow path sections 18 and 27 will be described in more detail with reference to FIGS. 6 and 7. FIG.

6 is an enlarged plan view of the liquid channel portion 30 and the peripheral liquid channel portions 18 and 27, and FIG. 7 is a sectional view of the liquid channel portion 30 and the peripheral liquid channel portions 18 and 27. FIG. In the present embodiment, the case where the liquid flow path portion 30, the lower peripheral liquid flow path portion 18, and the upper peripheral liquid flow path portion 27 have the same shape will be described as an example. The shape of the side peripheral liquid channel portion 18 and the upper peripheral liquid channel portion 27 may be different from each other.

As described above, the upper surface 10a of the lower metal sheet 10 (more specifically, the upper surface 13a of each lower flow path wall portion 13) is provided with the liquid flow path portion 30 through which the liquid working fluid 2 passes. there is In addition, along the peripheries of the metal sheets 10 and 20, there are provided peripheral liquid flow path sections 18 and 27 through which the liquid working liquid 2 passes respectively. The liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27 form part of the above-described sealed space 3 and communicate with the lower steam flow path recess 12 and the upper steam flow path recess 21 . Note that the liquid flow path portion 30 is not limited to being provided on all the lower flow path wall portions 13 . For example, there may be a lower channel wall portion 13 in which the liquid channel portion 30 is not provided.

As shown in FIG. 6, each of the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27 includes a plurality of main flow grooves 31 extending parallel to each other and connecting grooves 32 connecting the main flow grooves 31 adjacent to each other. have. In portions of the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27 that are parallel to the first direction X, the main flow groove 31 extends along the main flow direction of the working fluid 2 (in this case, the first direction X). ing. In addition, the communication grooves 32 extend along a direction perpendicular to the mainstream direction of the hydraulic fluid 2 (in this case, the second direction Y), so that the hydraulic fluid 2 can travel between the adjacent main grooves 31 . It's becoming The liquid working fluid 2 passes through the main groove 31 and the communication groove 32 respectively. The main groove 31 and the communication groove 32 mainly serve to transport the working fluid 2 condensed from the steam generated in the evaporator 11 toward the evaporator 11 . In FIG. 6, both the lower peripheral liquid flow channel portion 18 and the upper peripheral liquid flow channel portion 27 are shown for convenience. The path portion 27 overlaps with each other in the vertical direction. Portions of the peripheral liquid flow path portions 18 and 27 that are parallel to the second direction Y extend along the mainstream direction of the working liquid 2 (in this case, the second direction Y). The communication groove 32 extends along the first direction X. As shown in FIG.

In addition, a plurality of convex portions 33 are arranged in a zigzag pattern in plan view in the liquid flow channel portion 30 and the peripheral liquid flow channel portions 18 and 27 . Each convex portion 33 is formed so as to be surrounded by the main groove 31 and the communication groove 32, respectively. In FIG. 6, the plurality of protrusions 33 have the same shape, and each protrusion 33 is formed in a rectangular shape so that the first direction X is the longitudinal direction in plan view. In the present embodiment, the arrangement pitch of the projections 33 along the mainstream direction of the hydraulic fluid 2 (the first direction X in this case) is constant. That is, the plurality of protrusions 33 are arranged at regular intervals in the first direction X, and the protrusions 33 adjacent to each other in the second direction Y are separated from each other by approximately half the length of the protrusions 33 in the first direction X. They are staggered.

The width (dimension in the second direction Y) w1 of the main groove 31 is preferably larger than the width (dimension in the second direction Y) w2 of the protrusion 33 . In this case, the ratio of the main flow groove 31 to the upper surface 13a of the lower flow path wall 13, the upper surface 14a of the lower peripheral wall 14, and the lower surface 23a of the upper peripheral wall 23 can be increased. Therefore, the channel density of the main grooves 31 in the lower channel wall portion 13, the lower peripheral wall 14, and the upper peripheral wall 23 can be increased, and the transport function of the liquid working fluid 2 can be improved. For example, the width w1 of the main groove 31 may be 20 μm to 200 μm, and the width w2 of the protrusion 33 may be 20 μm to 180 μm.

The depth h1 of the mainstream groove 31 is preferably smaller than the height h0 of the lower flow path wall portion 13 (see FIG. 3). In this case, the capillary action of the mainstream groove 31 can be enhanced. For example, the depth h1 of the mainstream groove 31 is preferably about half the height h0 of the lower flow path wall portion 13, and may be 5 μm to 200 μm.

Also, the width (dimension in the first direction X) w3 of the communication groove 32 is preferably smaller than the width w1 of the main groove 31 . As a result, while the liquid working fluid 2 is being transported toward the evaporating portion 11 in each main groove 31, the working fluid 2 can be suppressed from flowing into the communication groove 32, and the transport function of the working fluid 2 can be improved. can be done. On the other hand, when dryout occurs in one of the main grooves 31, the hydraulic fluid 2 can be moved from the adjacent main groove 31 through the corresponding communication groove 32, and the dryout can be quickly eliminated. , the function of transporting the hydraulic fluid 2 can be ensured.
That is, the communication groove 32 can perform its function even if the width w1 of the main groove 31 is smaller than the width w1 of the main groove 31 as long as the adjacent main grooves 31 can be communicated with each other. The width w3 of such a communication groove 32 may be 50 μm, for example.

The depth (not shown) of the communication groove 32 may be shallower than the depth of the main groove 31 depending on its width w3. For example, the depth of the communication groove 32 may be 10 μm to 200 μm. Moreover, the cross-sectional shape of the main groove 31 is not particularly limited, and may be rectangular, C-shaped, semicircular, semi-elliptical, curved, or V-shaped, for example. The cross-sectional shape of the communication groove 32 is also the same.

As shown in FIG. 7 , the liquid channel portion 30 is formed on the upper surface 13 a of the lower channel wall portion 13 of the lower metal sheet 10 . On the other hand, in the present embodiment, the lower surface 22a of the upper flow path wall portion 22 of the upper metal sheet 20 is formed flat. Thereby, each mainstream groove 31 of the liquid flow path portion 30 is covered with the flat lower surface 22a. In this case, as shown in FIG. 7, the pair of side walls 35 and 36 of the main flow channel 31 extending in the first direction X and the lower surface 22a of the upper channel wall portion 22 form a pair of right-angled or acute-angled corners 37. can be formed, and the capillary action at this corner 37 can be enhanced.

Further, the upper surface 14a of the lower peripheral wall 14 and the lower surface 23a of the upper peripheral wall 23 are in contact with each other. 27 overlap each other. In this case, in the region where the peripheral liquid flow path portions 18 and 27 overlap, the main groove 31, the communication groove 32 and the convex portion 33 of the lower peripheral liquid flow path portion 18 correspond to the main flow of the upper peripheral liquid flow path portion 27, respectively. It overlaps with the groove 31 , the communication groove 32 and the protrusion 33 . That is, the main groove 31, the communication groove 32, and the convex portion 33 of the lower peripheral liquid flow channel portion 18 are arranged mirror-symmetrically with the main groove 31, the communication groove 32, and the convex portion 33 of the upper peripheral liquid flow channel portion 27, respectively. ing. By arranging the main groove 31 of the lower peripheral liquid flow path portion 18 and the main groove 31 of the upper peripheral liquid flow path portion 27 so as to face each other, the main grooves in the lower peripheral wall 14 and the upper peripheral wall 23 The cross-sectional area of 31 increases, and the transport function of the liquid hydraulic fluid 2 can be improved.
However, the present invention is not limited to this, and at least a portion of the main groove 31, the communication groove 32, and the convex portion 33 of the lower peripheral liquid flow channel portion 18 may correspond to the main groove 31, the communication groove 32, and the convex portion 33 of the upper peripheral liquid flow channel portion 27. It may be displaced from at least part of the portion 33 .

In this embodiment, the liquid flow path portion 30 is formed only in the lower metal sheet 10 .
Also, the vapor channel recesses 12, 21 and the peripheral liquid channel parts 18, 27 are formed in both the lower metal sheet 10 and the upper metal sheet 20, respectively. However, the liquid channel portion 30, the vapor channel recesses 12 and 21, and the peripheral liquid channel portions 18 and 27 are formed in at least one of the lower metal sheet 10 and the upper metal sheet 20, respectively. It is sufficient if it is formed.

The shapes of the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27 of the lower metal sheet 10 are not limited to those described above.

For example, as shown in FIG. 8, the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27 have a plurality of main grooves 31 extending parallel to each other and elongated shapes formed between the main grooves 31 adjacent to each other. and a convex portion 33A. In this case, each convex portion 33A extends over substantially the entire longitudinal direction of the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27 along the mainstream direction of the hydraulic fluid 2 (in this case, the first direction X). ing. As a result, the liquid working fluid 2 can be efficiently transported toward the evaporation portion 11 in each main groove 31 . Although not shown, a communication groove is provided in a part of the convex portion 33A so that each main flow groove 31 communicates with the lower steam flow channel concave portion 12 or the upper steam flow channel concave portion 21 through this communication groove. can be

Alternatively, as shown in FIG. 9, the liquid channel portion 30 and the peripheral liquid channel portions 18, 27 have capillary structure members 39 filled in recesses 38 formed in the metal sheets 10, 20, respectively. may The capillary structure member 39 is a member for causing the liquid working fluid 2 to flow toward the evaporation portion 11 by capillary action, and is configured separately from the metal sheets 10 and 20 .
Examples of such a capillary structure member 39 include metal mesh, metal powder, metal non-woven fabric, and the like.

The material used for the lower metal sheet 10 and the upper metal sheet 20 is not particularly limited as long as it has good thermal conductivity. For example, it is preferable to use copper (oxygen-free copper) or a copper alloy. is. In this case, the thermal conductivity of the lower metal sheet 10 and the upper metal sheet 20 can be increased, and the heat radiation efficiency of the vapor chamber 1 can be increased. Also, the thickness of the vapor chamber 1 may be 0.1 mm to 2.0 mm. FIG. 3 shows the case where the thickness T1 of the lower metal sheet 10 and the thickness T2 of the upper metal sheet 20 are equal. The thickness T2 of the metal sheet 20 may be unequal. The overall size of the vapor chamber 1 (the overall size of the metal sheets 10 and 20) is about 1 cm×3 cm to about 15 cm square.

Next, the operation of this embodiment having such a configuration will be described. Here, first, the manufacturing method of the vapor chamber 1 will be described with reference to FIGS. 10(a) to (c) and FIGS. Simplify. 10(a) to (c) and FIGS. 11(a) to (c) show cross sections similar to the cross section of FIG.

First, as shown in FIG. 10(a), a flat metal material sheet M is prepared as a preparatory step.

Subsequently, as shown in FIG. 11B, a resist film 41 is formed on each of the upper surface Ma and the lower surface Mb of the metal material sheet M by photolithography. The resist film 41 formed on the upper surface Ma of the metal material sheet M has a pattern shape corresponding to the lower flow path wall portion 13 and the lower peripheral edge wall 14 .

Next, as shown in FIG. 11(c), the metal material sheet M is half-etched to form the lower steam flow channel recess 12 that constitutes a part of the sealed space 3. Next, as shown in FIG. As a result, portions of the upper surface Ma of the metal material sheet M corresponding to the resist openings 41a of the resist film 41 are half-etched. After that, the resist film 41 is removed from the metal material sheet M. Then, as shown in FIG. As a result, as shown in FIG. 11(c), the lower steam channel recess 12, the lower channel wall 13 and the lower peripheral wall 14 are formed. At the same time, by half-etching, the liquid flow path section 30 is formed in the lower flow path wall section 13 and the lower peripheral liquid flow path section 18 is formed in the lower peripheral edge wall 14 . In the resist openings 41a, portions corresponding to the main grooves 31 and the connecting grooves 32 of the liquid flow path section 30 and the lower peripheral liquid flow path section 18 have narrow widths, so that the etchant does not flow around much. Therefore, the depths of the main groove 31 and the communication groove 32 are formed shallower than the depth of the lower steam flow path concave portion 12 . At this time, the lower injection channel recesses 17 shown in FIGS. 2 and 4 are also formed at the same time, and the lower metal sheet 10 having a predetermined contour shape as shown in FIG. 4 is obtained.

The term "half-etching" means etching for etching the material to be etched halfway in its thickness direction to form a concave portion that does not penetrate the material to be etched. Therefore, the depth of the recess formed by half-etching is not limited to half the thickness of the material to be etched. The thickness of the material to be etched after half-etching is, for example, 30% to 70%, preferably 40% to 60%, of the thickness of the material to be etched before half-etching.
As the etchant, for example, an iron chloride-based etchant such as an aqueous ferric chloride solution or a copper chloride-based etchant such as an aqueous copper chloride solution can be used.

First, the metal material sheet M is half-etched to form the lower vapor flow path concave portion 12 (first half-etching process), and then the metal material sheet M is subjected to another etching process (second half-etching process). The channel portion 30 and the peripheral liquid channel portions 18 and 27 may be formed.

On the other hand, although not shown, in the same manner as the lower metal sheet 10, the upper metal sheet 20 is half-etched from the lower surface 20a to form the upper steam channel concave portion 21, the upper channel wall portion 22 and the upper peripheral edge wall 23. be. At the same time, the upper peripheral liquid flow path portion 27 is formed in the upper peripheral wall 23 by half-etching. Thus, the upper metal sheet 20 described above is obtained.

Next, as shown in FIG. 11( a ), as a temporary fixing step, the lower metal sheet 10 having the lower steam channel recessed portion 12 and the upper metal sheet 20 having the upper steam channel recessed portion 21 are opposed to each other. temporarily.

In this case, first, using the lower alignment hole 15 (see FIGS. 2 and 4) of the lower metal sheet 10 and the upper alignment hole 24 (see FIGS. 2 and 5) of the upper metal sheet 20, the lower A metal sheet 10 and an upper metal sheet 20 are positioned. Subsequently, the lower metal sheet 10 and the upper metal sheet 20 are fixed. The fixing method is not particularly limited, but for example, the lower metal sheet 10 and the upper metal sheet 20 are fixed by performing resistance welding on the lower metal sheet 10 and the upper metal sheet 20. may In this case, as shown in FIG. 11(a), it is preferable to use electrode rods 40 to perform spot resistance welding. Laser welding may be performed instead of resistance welding. Alternatively, the lower metal sheet 10 and the upper metal sheet 20 may be ultrasonically bonded and fixed by irradiating ultrasonic waves. Furthermore, although an adhesive may be used, it is preferable to use an adhesive that does not have an organic component or has a small amount of an organic component. Thus, the lower metal sheet 10 and the upper metal sheet 20 are fixed in a positioned state.

After the temporary fixing, as shown in FIG. 11B, the lower metal sheet 10 and the upper metal sheet 20 are permanently joined by diffusion bonding as a permanent joining step. In diffusion bonding, the lower metal sheet 10 and the upper metal sheet 20 to be bonded are brought into close contact, and pressure is applied in a controlled atmosphere such as vacuum or inert gas in a direction to bring the metal sheets 10 and 20 into close contact. It is a method of bonding by heating together and utilizing diffusion of atoms occurring on the bonding surface. Diffusion bonding heats the materials of the lower metal sheet 10 and the upper metal sheet 20 to a temperature close to the melting point, but below the melting point, thereby avoiding melting and deformation of each metal sheet 10,20. More specifically, the upper surface 14a of the lower peripheral wall 14 of the lower metal sheet 10 and the lower surface 23a of the upper peripheral wall 23 of the upper metal sheet 20 are diffusion-bonded as bonding surfaces. Thereby, the sealed space 3 is formed between the lower metal sheet 10 and the upper metal sheet 20 by the lower peripheral wall 14 and the upper peripheral wall 23 . In addition, the lower injection channel recess 17 (see FIGS. 2 and 4) and the upper injection channel recess 26 (see FIGS. 2 and 5) form an injection channel for the hydraulic fluid 2 communicating with the sealed space 3. be done. Further, the upper surface 13a of the lower flow path wall portion 13 of the lower metal sheet 10 and the lower surface 22a of the upper flow path wall portion 22 of the upper metal sheet 20 are diffusion-bonded as bonding surfaces to form the vapor chamber 1. Improves mechanical strength. The liquid flow path portion 30 formed on the upper surface 13 a of the lower flow path wall portion 13 remains as a flow path for the liquid working fluid 2 .

After the permanent bonding, as shown in FIG. 11(c), the working fluid 2 is injected into the sealed space 3 from the injection part 4 (see FIG. 2) as a sealing step. At this time, first, the sealed space 3 is evacuated to reduce the pressure (for example, 5 Pa or less, preferably 1 Pa or less), and then the working fluid 2 is injected into the sealed space 3 . At the time of injection, the working liquid 2 passes through the injection channel formed by the lower injection channel recess 17 and the upper injection channel recess 26 and the conducting portion 28 . For example, the amount of the working liquid 2 enclosed may be 10% to 40% of the total area of the sealed space 3, depending on the configuration of the liquid flow path section 30 inside the vapor chamber 1. FIG.

After injection of the working liquid 2, the above-mentioned injection channel is sealed. In this case, for example, the injection section 4 may be irradiated with a laser to partially melt the injection section 4 to seal the injection channel. Alternatively, the injection part 4 may be closed by caulking to seal the sealed space 3 . As a result, communication between the sealed space 3 and the outside air is cut off, and the hydraulic fluid 2 is enclosed in the sealed space 3 . Thus, the hydraulic fluid 2 in the sealed space 3 is prevented from leaking to the outside.

As described above, the vapor chamber 1 according to the present embodiment is obtained.

In addition, in the present embodiment, an example in which the vapor chamber 1 is mainly manufactured by etching has been described. However, it is not limited to this, and may be manufactured by a 3D printer. For example, the vapor chamber 1 may be 3D printed all at once, or each metal sheet 10, 20 may be 3D printed separately and then joined.

Next, a method of operating the vapor chamber 1, that is, a method of cooling the device D will be described.

The vapor chamber 1 obtained as described above is installed in a housing of a mobile terminal or the like, and a device D such as a CPU, which is an object to be cooled, is attached to the lower surface 10b of the lower metal sheet 10 . Since the amount of the working fluid 2 injected into the sealed space 3 is small, the liquid working fluid 2 in the sealed space 3 is pushed by the surface tension of the wall surface of the sealed space 3, i.e., the lower steam flow path concave portion 12. It adheres to the wall surface, the wall surface of the upper vapor channel recess 21 , the wall surfaces of the liquid channel portion 30 and the peripheral liquid channel portions 18 and 27 .

When the device D heats up in this state, the working fluid 2 existing in the evaporating portion 11 of the lower steam flow channel concave portion 12 receives heat from the device D. As shown in FIG. The received heat is absorbed as latent heat, and the working fluid 2 evaporates (vaporizes) to generate vapor of the working fluid 2 . Most of the generated steam diffuses inside the lower steam passage concave portion 12 and the upper steam passage concave portion 21 that constitute the sealed space 3 (see solid line arrows in FIG. 4). The vapor in the upper vapor passage concave portion 21 and the lower vapor passage concave portion 12 leaves the evaporating portion 11, and most of the vapor is transported to the peripheral edge portion of the vapor chamber 1 where the temperature is relatively low. The diffused vapor dissipates heat to the lower metal sheet 10 and the upper metal sheet 20 and is cooled. The heat received by the lower metal sheet 10 and the upper metal sheet 20 from the steam is transferred to the outside air through the housing member Ha (see FIG. 3).

By radiating heat to the lower metal sheet 10 and the upper metal sheet 20, the vapor loses the latent heat absorbed in the evaporator 11 and condenses. The condensed and liquefied working fluid 2 adheres to the wall surface of the lower steam channel recess 12 or the wall surface of the upper steam channel recess 21 . Here, since the working fluid 2 continues to evaporate in the evaporating portion 11 , the working fluid 2 in the portion other than the evaporating portion 11 out of the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27 is (see dashed arrow in FIG. 4). As a result, the liquid working fluid 2 adhering to the wall surface of the lower steam flow channel recess 12 and the wall surface of the upper steam flow channel recess 21 moves toward the liquid flow channel portion 30 and the peripheral liquid flow channel portions 18 and 27. , into the liquid channel portion 30 and the peripheral liquid channel portions 18 and 27 . Therefore, the working fluid 2 filled in the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27 is propelled toward the evaporator portion 11 by the capillary action of the main flow grooves 31, smoothly transported to

By the way, in this embodiment, peripheral liquid flow path portions 18 and 27 are formed along the peripheral edges of the metal sheets 10 and 20, respectively. Therefore, the working fluid 2 condensed and liquefied at the peripheral edges of the metal sheets 10 and 20 circulates through the peripheral fluid flow paths 18 and 27 due to capillary action and is transported toward the evaporator 11 . In particular, the lower peripheral liquid channel portion 18 is formed continuously over the entire circumference of the lower metal sheet 10 . Therefore, the liquid working fluid 2 smoothly flows along the entire peripheral edge of the lower metal sheet 10 through the lower peripheral liquid channel portion 18 without being blocked in the vicinity of the lower injection channel concave portion 17. It is transported towards the evaporation section 11 . The upper peripheral liquid channel portion 27 is interrupted by the conducting portion 28, but the lower peripheral liquid channel portion 18 is also formed in a portion facing the conducting portion 28, so that the upper peripheral liquid channel portion 27 promotes circumferential flow.

The working fluid 2 that has reached the evaporator 11 receives heat from the device D again and evaporates. In this way, the working fluid 2 circulates in the vapor chamber 1 while repeating phase changes, that is, evaporation and condensation, thereby transferring heat from the device D and releasing it. As a result, device D is cooled.

As described above, according to the present embodiment, since the lower peripheral liquid flow path portion 18 is formed over the entire peripheral edge of the lower metal sheet 10, the lower peripheral liquid flow path is formed near the lower injection flow path concave portion 17, for example. It is possible to prevent the flow path portion 18 from becoming discontinuous. Therefore, interruption of the capillary force can be prevented. As a result, it is possible to prevent the circulation of the hydraulic fluid 2 from being hindered at the outer peripheral portion of the vapor chamber 1 , and to smoothly circulate the hydraulic fluid 2 over the entire outer peripheral portion of the vapor chamber 1 . As a result, the condensation and circulation of the working fluid 2 in the outer peripheral portion of the vapor chamber 1 are stabilized, and the heat transport capability of the vapor chamber 1 can be improved.

Further, according to the present embodiment, since the lower peripheral liquid channel portion 18 is formed over the entire peripheral edge of the lower metal sheet 10, the lower injection channel recess 17 and the lower steam channel recess 12 are formed. A lower peripheral liquid channel portion 18 can be interposed between them. Therefore, it is possible to prevent water from accumulating in the conductive portion 28 . That is, when the lower injection channel recessed portion 17 is directly connected to the lower steam channel recessed portion 12, the lower injection channel recessed portion 17 (in particular, the lower side of the lower injection channel recessed portion 17 There is a risk that water will accumulate in the steam flow path concave portion 12 side) and the conducting portion 28 and freeze. In this case, the lower metal sheet 10 or the upper metal sheet 20 may expand and deform or break. However, in the present embodiment, it is possible to prevent water from accumulating in the conducting portion 28, so that such deformation and tearing of the metal sheet 10 can be prevented. Therefore, quality can be improved.

Further, according to the present embodiment, the upper peripheral liquid channel portion 27 is formed along the peripheral edge of the upper metal sheet 20, and at least a portion of the lower peripheral liquid channel portion 18 and the upper peripheral liquid channel portion 27 are formed. overlap each other. For this reason, a wide liquid flow path for returning the working fluid 2 is formed in the portion where the upper peripheral liquid flow path portion 27 and the lower peripheral liquid flow path portion 18 are overlapped. Circulation of the liquid 2 can be performed efficiently.

Further, according to the present embodiment, the width w7 of the lower peripheral liquid channel portion 18 is wider than the width w8 of the upper peripheral liquid channel portion 27. As shown in FIG. As a result, the inner portion 18a of the lower peripheral liquid channel portion 18 that protrudes from the upper peripheral liquid channel portion 27 faces the upper steam channel concave portion 21, and the inner side of the protruding lower peripheral liquid channel portion 18 is formed. Condensation and reflux of the hydraulic fluid 2 are ensured by the portion 18a.

Furthermore, according to the present embodiment, the peripheral liquid flow path portions 18 and 27 have a plurality of main flow grooves 31 extending parallel to each other and connecting grooves 32 connecting the main flow grooves 31 adjacent to each other. .
As a result, the liquid working fluid 2 is prevented from flowing between the main grooves 31 adjacent to each other, and the occurrence of dryout in the main grooves 31 is suppressed. Therefore, the working fluid 2 in each main groove 31 is imparted with a capillary action, and the working fluid 2 is smoothly transported toward the evaporating portion 11 .

Furthermore, according to the present embodiment, a plurality of protrusions 33 are arranged in a zigzag pattern in plan view in the peripheral liquid flow path portions 18 and 27 . As a result, the capillary action acting on the hydraulic fluid 2 in the main groove 31 can be made uniform in the width direction of the main groove 31 . That is, since the plurality of protrusions 33 are arranged in a zigzag pattern in plan view, the communication grooves 32 are alternately connected to both sides of the main groove 31 . Therefore, unlike the case where the communication grooves 32 are connected to the same positions on both sides of the main grooves 31 , it is possible to prevent the communication grooves 32 from losing the capillary action in the direction toward the evaporator 11 . Therefore, at the intersection of the main groove 31 and the communication groove 32 , it is possible to prevent the capillary action from being reduced, and to continuously apply the capillary action to the working fluid 2 heading toward the evaporator 11 .

Further, since the inside of the sealed space 3 is depressurized as described above, the lower metal sheet 10 and the upper metal sheet 20 receive pressure from the outside air in a direction of recessing inward in the thickness direction. Here, if the communication grooves 32 are connected to the same positions on both sides in the longitudinal direction of each main groove 31, the lower metal sheet 10 and the upper metal sheet 20 are arranged along the direction parallel to the communication grooves 32. It is conceivable that it is recessed inward in the thickness direction. In this case, the channel cross-sectional area of each main groove 31 becomes small, and the channel resistance of the working fluid 2 may increase. On the other hand, in the present embodiment, a plurality of protrusions 33 are arranged in a zigzag pattern in plan view in the liquid flow path section 30 and the peripheral liquid flow path sections 18 and 27 . As a result, even if the lower metal sheet 10 and the upper metal sheet 20 are dented inward in the thickness direction along the communication groove 32, the dent is prevented from crossing the main groove 31, thereby preventing the main groove 31 from crossing. A cross-sectional area of the flow path can be ensured, and obstruction of the flow of the hydraulic fluid 2 is suppressed.

Next, each modification of the vapor chamber will be described with reference to FIGS. 12 to 15. FIG. 12 to 15, the same parts as those in FIGS. 1 to 11 are denoted by the same reference numerals, and detailed description thereof is omitted.

(Modification 1)
FIG. 12 shows a vapor chamber 1A according to a modified example (modified example 1). In the vapor chamber 1A shown in FIG. 12, unlike the present embodiment shown in FIGS. 1 to 11, the lower injection protrusion 16 of the lower metal sheet 10 does not have the lower injection passage recess 17 formed therein. .
In this case, when the working fluid 2 is injected from the injection part 4 into the sealed space 3 in the sealing step (see FIG. 11(c)), it is possible to prevent the injection of the working fluid 2 from being hindered by the lower peripheral liquid flow path part 18. It is possible to inject the working fluid 2 smoothly.

(Modification 2)
FIG. 13 shows a vapor chamber 1B according to another modification (modification 2). In the vapor chamber 1B shown in FIG. 13, unlike the present embodiment shown in FIGS. 1 to 11, the lower injection protrusion 16 of the lower metal sheet 10 does not have the lower injection passage recess 17 formed therein. . Further, the upper peripheral liquid flow path portion 27 is not formed in the upper metal sheet 20 . Note that the width of the lower peripheral liquid flow path portion 18 of the lower metal sheet 10 may be narrower than in the case of the form shown in FIG. In this case, since it is not necessary to laminate the micro-shaped peripheral liquid flow path portions 18 and 27 so as to face each other, it is not necessary to increase the alignment accuracy of the metal sheets 10 and 20 .

(Modification 3)
FIG. 14 shows a vapor chamber 1C according to another modification (modification 3). In the vapor chamber 1C shown in FIG. 14, unlike the present embodiment shown in FIGS. It is provided on the upper surface 10 a of the metal sheet 10 . Further, the area of the upper surface 10 a where the liquid flow path portion 30 is formed is formed not only in the area facing the upper flow path wall portion 22 but also in the area facing the upper steam flow path concave portion 21 . In this case, the number of main grooves 31 constituting the liquid flow path portion 30 can be increased, and the function of transporting the liquid working fluid 2 can be improved. However, the area in which the liquid flow path portion 30 is formed is not limited to the area shown in FIG.

(Modification 4)
FIG. 15 shows a vapor chamber 1D according to a modified example (modified example 4). In the vapor chamber 1D shown in FIG. 15, unlike the present embodiment shown in FIGS. 1 to 11, the lower metal sheet 10 does not have the lower vapor flow path concave portion 12. As shown in FIG. A liquid flow path portion 30 is provided on the upper surface 10 a of the lower metal sheet 10 . Furthermore, the upper metal sheet 20 is not formed with the upper flow channel wall portion 22 , and is formed with one upper steam flow channel concave portion 21 so as to face substantially the entire liquid flow channel portion 30 . In this case, the cross-sectional area of the upper steam flow passage concave portion 21 can be widened, and the steam of the working fluid 2 can be transported efficiently.

(Modification 5)
FIG. 16 shows a vapor chamber 1E according to a modified example (modified example 5). In the vapor chamber 1E shown in FIG. 16, unlike the present embodiment shown in FIGS. are formed radially in plan view. That is, the lower channel wall portion 13 has a center portion 13b that is substantially circular in plan view and a plurality of radial portions 13c radially extending from the center portion 13b. Similarly, the upper flow path wall portion 22 has a central portion 22b that is substantially circular in plan view, and a plurality of radial portions 22c radially extending from the central portion 22b. The liquid channel portion 30 is formed in the lower channel wall portion 13 and not formed in the upper channel wall portion 22 . In this case, since the lower channel wall portion 13 is radially formed, the liquid working fluid 2 can be efficiently transported to the evaporating portion 11 side. In FIG. 16, the liquid flow path portions (the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27) are indicated by oblique lines (the same applies to FIGS. 17 and 18 described later).

(Modification 6)
FIG. 17 shows a vapor chamber 1F according to one modification (modification 6). In the vapor chamber 1F shown in FIG. 17, unlike the present embodiment shown in FIGS. 1 to 11, the lower injection protrusion 16 of the lower metal sheet 10 is not formed with the lower injection passage recess 17. .
Further, the upper peripheral liquid flow path portion 27 is not formed in the upper metal sheet 20 . Further, the lower channel wall portion 13 of the lower metal sheet 10 is composed of a plurality of block portions 13d having a substantially triangular or substantially trapezoidal shape in plan view. Similarly, the upper flow path wall portion 22 of the upper metal sheet 20 is composed of a plurality of block portions 22d each having a substantially triangular or substantially trapezoidal shape in plan view. In addition, the steam passage of the lower steam passage concave portion 12 is formed between the block portions 13d and 13d of the lower passage wall portion 13, and the upper steam passage is formed between the block portions 22d and 22d of the upper passage wall portion 22. A steam passage of the channel recess 21 is formed. The liquid channel portion 30 is formed in the lower channel wall portion 13 and not formed in the upper channel wall portion 22 . In this case, a large area of the liquid flow path portion 30 of the lower flow path wall portion 13 is ensured, so that the liquid working fluid 2 can be efficiently transported to the evaporating portion 11 side.

(Modification 7)
FIG. 18 shows a vapor chamber 1G according to one modification (modification 7). In the vapor chamber 1G shown in FIG. 18, unlike the present embodiment shown in FIGS. It is composed of four comb-teeth-like portions 13e. Each comb tooth-shaped portion 13e of the lower channel wall portion 13 has a base portion 13f extending in the first direction X and a plurality of comb portions 13g extending in the second direction Y while being connected to the base portion 13f. Similarly, the upper flow path wall portion 22 of the upper metal sheet 20 is composed of a plurality of (in this case, four) comb-teeth-shaped portions 22e having a substantially comb-teeth shape in plan view. Each comb tooth-shaped portion 22e of the upper channel wall portion 22 has a base portion 22f extending in the first direction X and a plurality of comb portions 22g extending in the second direction Y while being connected to the base portion 22f. The liquid channel portion 30 is formed on both the lower channel wall portion 13 and the upper channel wall portion 22 . In this case, the liquid working fluid 2 gathers from the comb portions 13g and 22g toward the base portions 13f and 22f, and then flows toward the evaporation portion 11 side via the base portions 13f and 22f. Therefore, the liquid working fluid 2 can be efficiently transported to the evaporator 11 side.

(Second embodiment)
Next, a vapor chamber, an electronic device, and a vapor chamber metal sheet according to a second embodiment of the present invention will be described with reference to FIGS. 19 to 22. FIG.

In the second embodiment shown in FIGS. 19 to 22, an intermediate metal sheet is interposed between the lower metal sheet and the upper metal sheet, the upper metal sheet is formed with the steam flow path, and the lower metal sheet The main difference is that the liquid flow path is formed in the sheet, and the intermediate metal sheet is provided with a communication section that connects the vapor flow path and the liquid flow path. 18 is substantially the same as the first embodiment. 19 to 22, the same parts as those in the first embodiment shown in FIGS. 1 to 18 are denoted by the same reference numerals, and detailed description thereof will be omitted.

As shown in FIG. 19, in the present embodiment, an intermediate metal sheet 70 (third metal sheet) is provided between the lower metal sheet 10 (first metal sheet) and the upper metal sheet 20 (second metal sheet). ) is interposed. That is, in the vapor chamber 1 according to the present embodiment, the lower metal sheet 10, the intermediate metal sheet 70 and the upper metal sheet 20 are laminated in this order. An intermediate metal sheet 70 is provided on the lower metal sheet 10 and an upper metal sheet 20 is provided on the intermediate metal sheet 70 . In addition, in FIG. 19, illustration of the hydraulic fluid 2 is omitted in order to clarify the drawing. The same applies to FIGS. 23 and 27, which will be described later.

The intermediate metal sheet 70 has a lower surface 70a (first surface) provided on the side of the lower metal sheet 10 and an upper surface 70b (first surface) provided on the side opposite to the lower surface 70a and provided on the side of the upper metal sheet 20 (first surface). 2 sides) and Of these, the lower surface 70 a is overlaid on the upper surface 10 a of the lower metal sheet 10 , and the upper surface 70 b is overlaid on the lower surface 20 a of the upper metal sheet 20 .
The lower metal sheet 10 and the intermediate metal sheet 70 are bonded by diffusion bonding, and the intermediate metal sheet 70 and the upper metal sheet 20 are bonded by diffusion bonding. Intermediate metal sheet 70 may be formed of the same material as lower metal sheet 10 and upper metal sheet 20 . The thickness of the intermediate metal sheet 70 is, for example, 10 μm to 300 μm.

The sealed space 3 is formed between the lower metal sheet 10 and the upper metal sheet 20 , and a part of the sealed space 3 is also formed in the intermediate metal sheet 70 . In the present embodiment, the sealed space 3 has a vapor channel portion 80 through which mainly the vapor of the working fluid 2 passes, and a liquid channel portion 30 through which mainly the liquid working fluid 2 passes. The vapor channel portion 80 and the liquid channel portion 30 communicate with each other so that the working fluid 2 can be circulated. The steam channel portion 80 has a lower steam channel recess portion 12 (first steam channel portion) and an upper steam channel recess portion 21 (second steam channel portion).

The lower metal sheet 10 including the lower steam channel concave portion 12 and the liquid channel portion 30 can have the same configuration as the lower metal sheet 10 in the first embodiment shown in FIGS. 1 to 18. . Therefore, detailed description is omitted here.

As shown in FIGS. 19 and 20, in this embodiment, the upper metal sheet 20 is not provided with the liquid flow path section 30 . Further, the upper metal sheet 20 has an upper steam channel concave portion 21 (second steam channel portion) similar to that of the first embodiment. An upper flow path wall portion 22 (second flow path projecting portion) similar to that of the first embodiment is provided in the upper steam flow path concave portion 21 .

As shown in FIGS. 19, 21 and 22, the intermediate metal sheet 70 is provided with a communicating portion 71 that communicates between the liquid channel portion 30 and the upper steam channel concave portion 21 . More specifically, the communication portion 71 communicates the liquid flow path portion 30 and the upper steam flow path recessed portion 21 via the lower steam flow path recessed portion 12 .
Communicating portion 71 is formed to extend from upper surface 70 b of intermediate metal sheet 70 to lower surface 70 a and penetrate intermediate metal sheet 70 . The communicating portion 71 forms part of the sealed space 3 described above. As a result, the liquid working fluid 2 produced by condensing the vapor of the working fluid 2 in the upper steam flow path concave portion 21 passes through the communicating portion 71 and flows through the liquid flow path portion 30 and the lower peripheral liquid flow path portion. It is configured to enter 18 mainstream grooves 31 . On the other hand, the vapor of the working fluid 2 evaporated in the evaporating portion 11 is not only diffused in the lower vapor passage concave portion 12, but can also diffuse into the upper vapor passage concave portion 21 through the communicating portion 71. there is

As shown in FIGS. 21 and 22, the intermediate metal sheet 70 has a frame body portion 73 formed in a rectangular frame shape in a plan view, and a plurality of land portions 74 provided in the frame body portion 73. are doing. The frame portion 73 and the land portion 74 are portions where the material of the intermediate metal sheet 70 remains without being etched when the intermediate metal sheet 70 is etched. The land portions 74 extend in an elongated shape along the first direction X, and a plurality of the land portions 74 are arranged within the communication portion 71 . The land portions 74 are supported by each other and by the frame portion 73 via a support portion (not shown). The support portion is formed so as to prevent obstruction of the vapor flow of the hydraulic fluid 2 flowing through the intermediate communication passage 77, which will be described later. For example, the support portion may be partially formed in the intermediate communicating passage 77 and the intermediate communicating passage 78 in plan view.

The communicating portion 71 includes a plurality of intermediate communicating passages 77 partitioned by land portions 74 .
The intermediate communication paths 77 are elongated along the first direction X and arranged parallel to each other. Both ends of each intermediate communication passage 77 communicate with an intermediate communication passage 78 elongated in the second direction Y, and each intermediate communication passage 77 communicates through the intermediate communication passage 78. there is In addition, in FIG. 19, the shape of the cross section (the cross section in the second direction Y) of the intermediate communication passage 77 is rectangular. However, it is not limited to this, and the cross-sectional shape of the intermediate communication passage 77 may be, for example, curved, semicircular, or V-shaped, as long as the vapor of the working fluid 2 can be diffused. Optional. The intermediate communication passage 78 is also the same.

The land portion 74 is arranged so as to overlap the corresponding upper channel wall portion 22 and lower channel wall portion 13 in a plan view, thereby improving the mechanical strength of the vapor chamber 1 . In addition, the intermediate communication passage 77 is formed so as to overlap the corresponding lower steam passage 81 and upper steam passage 83 in plan view. Similarly, the intermediate communicating passage 78 is formed so as to overlap the corresponding lower communicating steam passage 82 and upper communicating steam passage 84 in plan view.

As shown in FIGS. 21 and 22, the width w5 (dimension in the second direction Y) of the land portion 74 of the intermediate metal sheet 70 is, for example, 50 μm to 2000 μm when the maximum dimension in the range from the upper surface 70b to the lower surface 70a. may be The width w6 (dimension in the second direction Y) of the intermediate communication path 77 may be, for example, 50 μm to 2000 μm when the minimum dimension in the range from the upper surface 70b to the lower surface 70a. The same applies to the width (dimension in the first direction X) of the intermediate communication passage 78 .

The communicating portion 71 may be formed by etching from the upper surface 70b of the intermediate metal sheet 70. As shown in FIG. In this case, the intermediate communication passage 77 of the communication portion 71 may be curved in a shape that expands toward the lower surface 70a. Alternatively, the communicating portion 71 may be etched from the lower surface 70a of the intermediate metal sheet 70, and in this case, the intermediate communicating path 77 may be curved in a shape that expands toward the upper surface 70b. Furthermore, the communicating portion 71 may be formed by half-etching from the lower surface 70a and half-etching from the upper surface 70b. In this case, the shape or size of the portion of the communicating portion 71 on the upper surface 70b side and the portion on the lower surface 70a side may be different.

21 and 22, the intermediate metal sheet 70 is provided with intermediate alignment holes 72 for positioning the metal sheets 10, 20, 70. As shown in FIGS. That is, each intermediate alignment hole 72 is arranged so as to overlap each of the lower alignment holes 15 and the upper alignment holes 24, respectively, when temporarily fixed, so that the metal sheets 10, 20, 70 can be positioned. .

As shown in FIG. 22 , a ring-shaped intermediate peripheral liquid channel portion 79 (third peripheral liquid channel portion) through which the liquid working fluid 2 passes is formed on the lower surface 70 a of the intermediate metal sheet 70 . The intermediate peripheral liquid flow path portion 79 is formed along the peripheral edge of the intermediate metal sheet 70 in the inner portion of the frame portion 73 in plan view. The intermediate peripheral liquid channel portion 79 is formed so as to surround the sealed space 3 , especially the communication portion 71 . That is, in plan view, the intermediate communicating passage 77 or the intermediate communicating communicating passage 78 of the communicating portion 71 is interposed between the land portion 74 and the intermediate peripheral liquid flow path portion 79 . In addition, the intermediate peripheral liquid flow path portion 79 has a rectangular annular shape in plan view, and each side thereof is parallel to the first direction X or the second direction Y. As shown in FIG.

As shown in FIG. 22, the intermediate peripheral liquid channel portion 79 is formed over the entire peripheral edge of the intermediate metal sheet 70 except for the conducting portion 90 that connects the intermediate injection channel portion 76 and the communicating portion 71, which will be described later. there is That is, the intermediate peripheral liquid channel portion 79 is partially interrupted by a conducting portion 90 (similar to the conducting portion 28 of the first embodiment) that injects the working liquid 2 from the intermediate injection channel portion 76 .
Therefore, in the enclosing step, the working fluid 2 can be injected from the intermediate injection channel portion 76 into the communicating portion 71 via the conducting portion 90 . On the other hand, since the intermediate peripheral liquid flow path portion 79 is formed over the entire peripheral edge of the intermediate metal sheet 70 except for the conducting portion 90 , the working fluid 2 flows to the evaporating portion 11 side over substantially the entire peripheral edge of the intermediate metal sheet 70 . Reflux is possible.

The width w9 of the intermediate peripheral liquid channel portion 79 may be the same as the width w8 of the upper peripheral liquid channel portion 27 of the first embodiment. As shown in FIGS. 4 and 22, the width w7 of the lower peripheral liquid flow path portion 18 of the lower metal sheet 10 is equal to that of the intermediate peripheral liquid flow of the intermediate metal sheet 70, as in the first embodiment. It may be wider than the width w9 of the path portion 79 (w7>w9).

In addition, in the present embodiment, a portion of the lower peripheral liquid channel portion 18 of the lower metal sheet 10 and a portion of the intermediate peripheral liquid channel portion 79 of the intermediate metal sheet 70 overlap each other in plan view. ing.
Specifically, the lower peripheral liquid channel portion 18 and the intermediate peripheral liquid channel portion 79 overlap each other except for the inner portion 18 a of the lower peripheral liquid channel portion 18 and the conducting portion 90 . As a result, the working fluid 2 can be efficiently circulated by the lower peripheral liquid channel portion 18 and the intermediate peripheral liquid channel portion 79 .

As shown in FIG. 21, the upper surface 70b of the intermediate metal sheet 70 is not formed with a peripheral liquid flow channel portion, and as shown in FIG. part is not formed. However, it is not limited to this. A peripheral liquid channel portion is formed in the same manner as the peripheral liquid channel portion 79, and a peripheral liquid channel portion is formed in the lower surface 20a of the upper metal sheet 20 in the same manner as the lower peripheral liquid channel portion 18. good too. In this case, the liquid flow path section 30 may be provided on the lower surface 20 a of the upper metal sheet 20 .

In addition, in this embodiment, the injection part 4 may be formed in the same manner as the injection part 4 of the first embodiment shown in FIGS. 1 to 18 . That is, as shown in FIG. 3, the lower metal sheet 10 has a lower injection projection 16, and a lower injection channel recess (injection channel recess) 17 is formed on the upper surface of the lower injection projection 16. ing. However, as shown in FIG. 20, although the upper metal sheet 20 has the upper injection protrusion 25, the lower surface of the upper injection protrusion 25 is formed in a flat shape without forming a recess. ing.

As shown in FIGS. 21 and 22, the intermediate metal sheet 70 has intermediate injection projections 75 projecting laterally from the end faces. As shown in FIG. 22 , an intermediate injection channel portion 76 is formed in a concave shape on the lower surface of the intermediate injection projection portion 75 . As shown in FIG. 21, the upper surface of the intermediate injection protrusion 75 is formed in a flat shape without forming a recess. The lower injection channel recess 17 and the intermediate injection channel portion 76 integrally form an injection channel for the working liquid 2 when the lower metal sheet 10 and the intermediate metal sheet 70 are joined together. When the lower metal sheet 10, the upper metal sheet 20 and the intermediate metal sheet 70 are joined, each injection projection 16, 25, 75 is adapted to overlap one another. The intermediate injection protrusion 75 can be formed in the same manner as the upper injection protrusion 25 of the first embodiment.

The intermediate injection channel portion 76 is not limited to being formed in a concave shape. For example, the intermediate injection channel portion 76 may be formed to extend from the lower surface 70 a to the upper surface 70 b of the intermediate metal sheet 70 and penetrate the intermediate metal sheet 70 .

However, it is not limited to this. For example, in addition to the lower injection channel recess 17 or instead of the lower injection channel recess 17 , an injection channel recess (injection channel recess) may be formed in the lower surface of the upper injection protrusion 25 . In this case, the upper surface of the intermediate injection projection 75 may also have an injection channel recess. Alternatively, instead of such an injection part 4, an injection hole may be provided in the lower metal sheet 10 or the upper metal sheet 20, and the hydraulic fluid 2 may be injected through this injection hole.

Further, in the vapor chamber 1 according to the present embodiment, the lower vapor channel recess 12 and the liquid channel portion 30 of the lower metal sheet 10 and the upper steam channel recess 21 of the upper metal sheet 20 are arranged as shown in FIGS. It can be formed in the same manner as the first embodiment shown in 18 . Also, the communicating portion 71 of the intermediate metal sheet 70 can be formed by etching. After that, the lower metal sheet 10 and the upper metal sheet 20 are joined via the intermediate metal sheet 70 . That is, the lower metal sheet 10 and the intermediate metal sheet 70 are diffusion-bonded, and the upper metal sheet 20 and the intermediate metal sheet 70 are diffusion-bonded. A sealed space 3 is thereby formed. Alternatively, the lower metal sheet 10, the intermediate metal sheet 70, and the upper metal sheet 20 may be diffusion-bonded together.

As described above, according to the present embodiment, the intermediate metal sheet 70 is interposed between the lower metal sheet 10 and the upper metal sheet 20, and the upper steam flow path concave portion 21 is provided in the lower surface 20a of the upper metal sheet 20. , the upper surface 10 a of the lower metal sheet 10 is provided with a liquid flow path portion 30 . The intermediate metal sheet 70 is provided with a communicating portion 71 that communicates the upper vapor channel concave portion 21 and the liquid channel portion 30 . As a result, even when the vapor chamber 1 is composed of the three metal sheets 10, 20, and 70, the working fluid 2 is recirculated in the vapor chamber 1 while repeating phase changes within the sealed space 3. , the heat of device D can be transferred and radiated. In addition, since the upper vapor passage concave portion 21 of the upper metal sheet 20 is widely communicated, the vapor of the working fluid 2 can be diffused smoothly, and the heat transport efficiency can be improved.

Moreover, according to the present embodiment, as in the first embodiment shown in FIGS. For example, it is possible to prevent the lower peripheral liquid channel portion 18 from becoming discontinuous in the vicinity of the lower injection channel concave portion 17 . Therefore, interruption of the capillary force can be prevented. As a result, it is possible to prevent the circulation of the hydraulic fluid 2 from being hindered at the outer peripheral portion of the vapor chamber 1 , and to smoothly circulate the hydraulic fluid 2 over the entire outer peripheral portion of the vapor chamber 1 . As a result, the condensation and circulation of the working fluid 2 in the outer peripheral portion of the vapor chamber 1 are stabilized, and the heat transport capability of the vapor chamber 1 can be improved.

Note that the example shown in FIG. 19 shows an example in which the cross-sectional shape of the lower steam channel recessed portion 12 and the cross-sectional shape of the upper steam channel recessed portion 21 are formed in a rectangular shape. However, it is not limited to this, and the cross-sectional shape of the steam flow passage recesses 12 and 21 may be formed in a curved shape. The same applies to the main groove 31 and the connecting groove 32 of the liquid flow path portion 30 .

Moreover, in the present embodiment described above, an example in which one intermediate metal sheet 70 is interposed between the lower metal sheet 10 and the upper metal sheet 20 has been described. However, the invention is not limited to this, and two or more intermediate metal sheets 70 may be interposed between the lower metal sheet 10 and the upper metal sheet 20 .

(Third Embodiment)
Next, a vapor chamber, an electronic device, and a vapor chamber metal sheet according to a third embodiment of the present invention will be described with reference to FIGS. 23 to 27. FIG.

In the third embodiment shown in FIGS. 23 to 27, an intermediate metal sheet is interposed between the lower metal sheet and the upper metal sheet, the vapor flow path section is provided on the upper surface of the intermediate metal sheet, The main difference is that the liquid channel portion and the intermediate peripheral liquid channel portion are provided on the lower surface of the intermediate metal sheet, and the intermediate peripheral liquid channel portion is formed along the entire circumference of the intermediate metal sheet. The configuration is substantially the same as that of the second embodiment shown in FIGS. 19-22. 23 to 27, the same parts as those in the second embodiment shown in FIGS. 19 to 22 are denoted by the same reference numerals, and detailed description thereof will be omitted.

As shown in FIG. 2 , in the present embodiment, the steam channel portion 80 is provided on the upper surface 70 b of the intermediate metal sheet 70 . In other words, the vapor channel portion 80 according to the present embodiment is formed to extend from the upper surface 70 b of the intermediate metal sheet 70 to the lower surface 70 a and penetrate the intermediate metal sheet 70 . The liquid channel portion 30 is provided on the lower surface 70 a of the intermediate metal sheet 70 . Therefore, the intermediate metal sheet 70 according to this embodiment is sometimes called a wick sheet. The vapor channel portion 80 and the liquid channel portion 30 communicate with each other so that the working fluid 2 can be circulated.

As shown in FIGS. 24 and 25, the intermediate metal sheet 70 includes a frame body portion 73 formed in a rectangular frame shape in a plan view, and a frame body portion 73 provided in the frame body portion 73, as in the second embodiment. and a plurality of land portions 74 . A support portion (not shown) that supports the land portion 74 is formed so as to prevent obstruction of the steam flow of the working fluid 2 flowing in the intermediate steam passage 85, which will be described later. For example, the support portion may be formed in a part of the range extending from the upper surface 70b to the lower surface 70a of the intermediate metal sheet 70 in the vertical direction in FIG.

The steam passage portion 80 includes a plurality of intermediate steam passages 85 (third steam passages, steam passages) partitioned by land portions 74 . The intermediate steam passages 85 are elongated along the first direction X and arranged parallel to each other. Both ends of each intermediate steam passage 85 communicate with an intermediate communicating steam passage 86 elongated along the second direction Y, and each intermediate steam passage 85 communicates via the intermediate communicating steam passage 86. there is In this manner, the vapor of the working fluid 2 flows around each land portion 74 (intermediate vapor passage 85 and intermediate connecting vapor passage 86) so that the vapor is transported toward the peripheral portion of the vapor passage portion 80. It is configured to prevent the flow of steam from being obstructed. In addition, in FIG. 23, the shape of the cross section (the cross section in the second direction Y) of the intermediate steam passage 85 is rectangular. However, it is not limited to this, and the cross-sectional shape of the intermediate vapor passage 85 may be, for example, curved, semicircular, or V-shaped, as long as the vapor of the working fluid 2 can be diffused. Optional. The intermediate connecting steam passage 86 is also the same. The intermediate steam passage 85 and the intermediate communicating steam passage 86 can be formed by etching in the same manner as the intermediate communicating passage 77 and the intermediate communicating communicating passage 78 in the second embodiment shown in FIGS. 77 and the intermediate connecting channel 78 can have a similar cross-sectional shape. The width of the intermediate steam passage 85 and the width of the intermediate communicating steam passage 86 can be made the same as the width w6 of the intermediate communicating passage 77 .

As shown in FIG. 25 , the liquid flow path portion 30 is provided on the land portion 74 on the lower surface 70 a of the intermediate metal sheet 70 . That is, the liquid flow path portion 30 is provided on the lower surface of the land portion 74 . Further, an intermediate peripheral liquid channel portion 79 (third peripheral liquid channel portion) is provided on the lower surface of the frame body portion 73 . The intermediate peripheral liquid channel portion 79 can be formed in the same manner as the lower peripheral liquid channel portion 18 of the first embodiment. That is, the intermediate peripheral liquid channel portion 79 is formed along the entire circumference of the intermediate metal sheet 70 , and the intermediate peripheral liquid channel portion 79 is interrupted along all four sides of the rectangular intermediate metal sheet 70 . formed without The intermediate peripheral liquid channel portion 79 is formed so as to cross the injection channel for the working fluid 2 formed by the intermediate injection channel portion 76 , and the working fluid 2 is also formed in the vicinity of the intermediate injection channel portion 76 . can be circulated. Note that in FIG. 25, the intermediate injection channel portion 76 enters halfway in the width direction (first direction X) of the intermediate peripheral liquid channel portion 79, but the intermediate injection channel portion 76 is not limited to this. It does not have to enter the intermediate peripheral liquid channel portion 79 .

As shown in FIGS. 23 and 26, the upper surface 10a of the lower metal sheet 10 in the present embodiment is provided with the lower vapor channel recesses 12 similar to those in the first embodiment, but the liquid The flow path part 30 is not provided. However, a lower peripheral liquid channel portion 18 is provided on the upper surface 10a. The lower peripheral liquid channel portion 18 shown in FIG. 26 can be formed in the same manner as the upper peripheral liquid channel portion 27 of the first embodiment. The thickness of the lower metal sheet 10 according to this embodiment can be the same as the thickness of the lower metal sheet 10 of the first embodiment.

As shown in FIG. 23 , the lower surface 20 a of the upper metal sheet 20 is not provided with the upper steam channel recess 21 and neither is the liquid channel portion 30 . The lower surface 20a is flat. The thickness of the upper metal sheet 20 according to this embodiment is, for example, 8 μm to 100 μm.

Further, in the vapor chamber 1 according to the present embodiment, the vapor channel portion 80 and the liquid channel portion 30 of the intermediate metal sheet 70 can be formed by etching. After that, the lower metal sheet 10 and the upper metal sheet 20 are joined via the intermediate metal sheet 70 . That is, the lower metal sheet 10 and the intermediate metal sheet 70 are diffusion-bonded, and the upper metal sheet 20 and the intermediate metal sheet 70 are diffusion-bonded. A sealed space 3 is thereby formed.
Alternatively, the lower metal sheet 10, the intermediate metal sheet 70, and the upper metal sheet 20 may be diffusion-bonded together.

In the present embodiment, an intermediate injection channel portion 76 (injection channel portion) is formed in a concave shape on the lower surface of the intermediate injection projection portion 75 that constitutes the injection portion 4 . In FIG. 26, the intermediate injection channel portion 76 enters halfway in the width direction (the first direction X) of the intermediate peripheral liquid channel portion 79. However, the intermediate injection channel portion 76 is not limited thereto. It does not have to enter the intermediate peripheral liquid channel portion 79 . A lower injection channel recess 17 is formed on the upper surface of the lower injection projection 16 . However, in the present embodiment, the lower injection channel recess 17 communicates with the lower steam channel recess 12 . The lower injection channel recess 17 and the intermediate injection channel portion 76 integrally form an injection channel for the working liquid 2 when the lower metal sheet 10 and the intermediate metal sheet 70 are joined together.

As described above, according to the present embodiment, the intermediate metal sheet 70 is interposed between the lower metal sheet 10 and the upper metal sheet 20, and the upper surface 70b of the intermediate metal sheet 70 is provided with the steam flow path section 80, The liquid flow path portion 30 is provided on the lower surface 70 a of the intermediate metal sheet 70 . As a result, even when the vapor chamber 1 is composed of the three metal sheets 10, 20, and 70, the working fluid 2 is recirculated in the vapor chamber 1 while repeating phase changes within the sealed space 3. , the heat of device D can be transferred and radiated.

Further, according to this embodiment, as in the first embodiment shown in FIGS. It is possible to prevent the intermediate peripheral liquid channel portion 79 from becoming discontinuous near the lower injection channel concave portion 17 . Therefore, interruption of the capillary force can be prevented. As a result, it is possible to prevent the circulation of the hydraulic fluid 2 from being hindered at the outer peripheral portion of the vapor chamber 1 , and to smoothly circulate the hydraulic fluid 2 over the entire outer peripheral portion of the vapor chamber 1 . As a result, the condensation and circulation of the working fluid 2 in the outer peripheral portion of the vapor chamber 1 are stabilized, and the heat transport capability of the vapor chamber 1 can be improved.

Further, according to the present embodiment, the steam channel portion 80 extends from the upper surface 70b of the intermediate metal sheet 70 to the lower surface 70a. As a result, the channel resistance of the steam channel portion 80 can be reduced. Therefore, the liquid working fluid 2 produced by condensing the vapor of the working fluid 2 in the vapor passage portion 80 can smoothly enter the main groove 31 of the liquid passage portion 30 . On the other hand, the vapor of the working fluid 2 evaporated in the evaporating section 11 can be smoothly diffused to the vapor flow path section 80 .

In the present embodiment described above, an example in which the liquid flow path portion 30 is provided on the lower surface 70a of the intermediate metal sheet 70 has been described. However, the invention is not limited to this, and as shown in FIG. 27, the liquid flow path section 30 may be provided not only on the lower surface 70a but also on the upper surface 70b. In this case, it is possible to increase the number of flow paths for transporting the liquid working fluid 2 to the evaporating part 11 or to a portion of the intermediate metal sheet 70 close to the evaporating part 11, so that the transport efficiency of the liquid working fluid 2 can be improved. . Therefore, the heat transport efficiency of the vapor chamber 1 can be improved. In this case, the upper peripheral liquid channel portion 27 may be provided on the lower surface 20 a of the upper metal sheet 20 , and the upper injection channel concave portion 26 may be formed on the lower surface of the upper injection projection portion 25 . Further, an intermediate peripheral liquid channel portion 79 may be provided on the upper surface 70 b of the intermediate metal sheet 70 , and an intermediate injection channel portion 76 may be formed on the upper surface of the intermediate injection projection portion 75 .

Further, in the present embodiment described above, an example in which steam channel portion 80 is formed to extend from upper surface 70b of intermediate metal sheet 70 to lower surface 70a has been described. However, the steam channel portion 80 is not limited to this, and the steam channel portion 80 may be formed like the lower steam channel recess 12 shown in FIGS. 1 to 18 or the upper steam channel recess shown in FIGS. 21, the upper surface 70b of the intermediate metal sheet 70 may be formed in a concave shape. In this case, the intermediate metal sheet 70 may be provided with a communication hole (not shown) that communicates the vapor channel portion 80 with the liquid channel portion 30 .

Moreover, in the present embodiment described above, an example in which one intermediate metal sheet 70 is interposed between the lower metal sheet 10 and the upper metal sheet 20 has been described. However, the present invention is not limited to this, and another metal sheet (not shown) may be interposed between the lower metal sheet 10 and the intermediate metal sheet 70. Another metal sheet (not shown) may be interposed between them.

The present invention is not limited to the above-described embodiments and modifications as they are, and can be embodied by modifying constituent elements without departing from the scope of the invention at the stage of implementation. Further, various inventions can be formed by appropriate combinations of the plurality of constituent elements disclosed in each of the above embodiments and modifications. Some components may be deleted from all the components shown in each embodiment and each modification. Further, in each of the above-described embodiments and modifications, the configuration of the lower metal sheet 10 and the configuration of the upper metal sheet 20 may be interchanged.

1 vapor chamber 2 hydraulic fluid 10 lower metal sheet 12 lower steam channel recess 18 lower peripheral liquid channel portion 20 upper metal sheet 21 upper vapor channel recess 27 upper peripheral liquid channel portion 28 conducting portion 30 liquid channel Part 31 Main groove 32 Communication groove 33 Convex part 70 Intermediate metal sheet 70a Lower surface 70b Upper surface 71 Communication part 79 Intermediate peripheral liquid flow path part 90 Conducting part

Claims (9)

A vapor chamber containing a hydraulic fluid,
a first metal sheet;
a second metal sheet laminated to the first metal sheet;
the second metal sheet is formed with a vapor passage portion through which the vapor of the working fluid passes;
At least one of the first metal sheet and the second metal sheet is formed with a liquid flow path through which the liquid working liquid passes,
a first peripheral liquid flow path through which the liquid working liquid passes is formed in the first metal sheet along the peripheral edge of the first metal sheet;
a second peripheral liquid flow path through which the liquid working liquid passes is formed in the second metal sheet along the peripheral edge of the second metal sheet;
at least a portion of the first peripheral liquid channel portion and at least a portion of the second peripheral liquid channel portion overlap each other;
The vapor chamber, wherein the first peripheral liquid channel portion includes an inner portion facing the vapor channel portion and protruding inwardly of the second peripheral liquid channel portion. 2. The vapor chamber according to claim 1, wherein the width of said first peripheral liquid channel portion and the width of said second peripheral liquid channel portion are different from each other. the second metal sheet has an injection channel recess that communicates with the steam channel through a conducting portion;
3. The vapor chamber according to claim 1, wherein said second peripheral liquid channel portion is formed over the entire peripheral edge of said second metal sheet except for said conductive portion. The vapor according to any one of claims 1 to 3, wherein the first peripheral liquid flow path portion has a plurality of main grooves extending parallel to each other, and a communication groove connecting the main grooves adjacent to each other. chamber. 5. The vapor chamber according to claim 4, wherein a convex portion is formed so as to be surrounded by the main groove and the communication groove, and a plurality of the convex portions are arranged in a zigzag pattern in plan view. 6. A vapor chamber as claimed in any preceding claim, wherein the second metal sheet is provided on the first metal sheet. A vapor chamber containing a hydraulic fluid,
a first metal sheet;
a second metal sheet laminated to the first metal sheet;
a third metal sheet interposed between the first metal sheet and the second metal sheet;
The third metal sheet includes a first surface provided on the side of the first metal sheet and a second surface provided on the side of the second metal sheet,
the second metal sheet is formed with a vapor passage portion through which the vapor of the working fluid passes;
a liquid flow path through which the liquid working fluid passes is formed in the first metal sheet;
the third metal sheet is provided with a communicating portion that communicates the vapor channel portion and the liquid channel portion;
a first peripheral liquid flow path through which the liquid working liquid passes is formed in the first metal sheet along the peripheral edge of the first metal sheet;
a third peripheral liquid flow path through which the liquid working liquid passes is formed on the first surface of the third metal sheet along the peripheral edge of the third metal sheet;
at least a portion of the first peripheral liquid channel portion and at least a portion of the third peripheral liquid channel portion overlap each other;
The vapor chamber, wherein the first peripheral liquid channel portion includes an inner portion that protrudes inward from the third peripheral liquid channel portion and faces the vapor channel portion via the communicating portion. A vapor chamber containing a hydraulic fluid,
a first metal sheet;
a second metal sheet laminated to the first metal sheet;
a third metal sheet interposed between the first metal sheet and the second metal sheet;
The third metal sheet includes a first surface provided on the side of the first metal sheet and a second surface provided on the side of the second metal sheet,
a vapor passage portion through which the vapor of the working fluid passes is formed in the first metal sheet;
At least one of the first surface and the second surface of the third metal sheet is formed with a liquid flow path portion through which the liquid working fluid passes,
a first peripheral liquid flow path through which the liquid working liquid passes is formed in the first metal sheet along the peripheral edge of the first metal sheet;
a third peripheral liquid flow path through which the liquid working liquid passes is formed on the first surface of the third metal sheet along the peripheral edge of the third metal sheet;
at least a portion of the first peripheral liquid channel portion and at least a portion of the third peripheral liquid channel portion overlap each other;
The vapor chamber, wherein the third peripheral liquid flow path section includes an inner portion facing the vapor flow path section and protruding inwardly of the first peripheral liquid flow path section. a housing;
a device contained within the housing;
and a vapor chamber according to any one of claims 1 to 8, in thermal contact with said device.

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