JP7308718B2 - Wireless sensor device and wireless sensor system - Google Patents

Description

TECHNICAL FIELD The present disclosure relates to a wireless sensor device and a wireless sensor system that measure the temperature and the like of a liquid or the like in a container.

Conventionally, a sensor device is known in which an external control board and a sensor element arranged in a container are connected by a communication cable, and communication such as data communication is performed between the sensor element and the external control board. . As a conventional sensor device, for example, a sensor device for measuring the temperature and pH of a culture medium in a cell culture vessel is known. In this sensor device, power supply to the sensor element and communication are performed by wire (see, for example, Patent Document 1).

JP 2016-163594 A

However, for example, in the prior art described in Patent Document 1, when a sensor element is arranged in a cell culture vessel, communication such as power supply and data communication is performed using a communication cable. The cable must be wired over the cell culture vessel, and the communication cable interferes with observation of the inside of the cell culture vessel. In addition, if the communication cable comes into contact with the culture solution, or if dust or the like adhered to the communication cable falls into the culture solution, the culture solution may be contaminated.

Therefore, there is a demand for a sensor device that can easily observe the inside of a container such as a cell culture container and can measure the temperature without contaminating an object to be measured such as a culture solution contained in the container. It is

A wireless sensor device according to an embodiment of the present disclosure includes:
a substrate;
a sensor unit provided on a substrate and comprising at least one sensor element;
A wireless sensor device comprising a container that houses the substrate and the object to be measured,
The substrate is provided so as to be in contact with the bottom surface of the container,
The wireless communication antenna is provided on the side of the substrate on which the sensor unit is arranged,
A plurality of insulating layers are formed as thin films on the substrate,
The sensor section and the wireless communication antenna are formed of thin films between the plurality of insulating layers .

A wireless sensor device of the present disclosure includes a sensor unit and a wireless communication antenna electrically connected to the sensor unit. This eliminates the need for a communication cable, and the sensor unit measures the temperature, pH, etc. of a liquid or other object to be measured contained in the container. can be observed. In addition, it is possible to prevent the object to be measured from being contaminated by the communication cable coming into contact with the object to be measured or by the dust adhered to the communication cable dropping onto the object to be measured.

Further, in the wireless sensor device of the present disclosure, when the substrate is provided so as to be in contact with the bottom surface of the container, the substrate is stably supported in the container, so it is possible to reduce the influence on the object to be measured in the container. becomes. In addition, when an external control device that performs wireless communication and wireless power supply to the wireless sensor device is installed outside the bottom side of the container, the distance between the wireless sensor device and the external control device is reduced. Power supply can be reliably performed.

Further, the wireless sensor device of the present disclosure is suitable for isostatic growth of cells when the substrate is disk-shaped, for example, a cell culture plate, a cell culture flask, or a cell culture dish. can be suitably used for a container having a circular housing space in the above.

Further, in the wireless sensor device of the present disclosure, when the wireless communication antenna is provided on the side of the substrate on which the sensor section is arranged, the substrate and the wireless communication antenna can be formed in a structure that is as thin as possible. As a result, it is possible to provide a wireless sensor device excellent in mass productivity at a low manufacturing cost.

Further, in the wireless sensor device of the present disclosure, when the wireless communication antenna is provided on the side opposite to the side of the substrate on which the sensor section is arranged, for example, the side of the substrate on which the sensor section is arranged is the side of the object to be measured, The side of the substrate on which the wireless communication antenna is arranged can be the side facing the outside of the container. As a result, the wireless communication antenna can be arranged close to the transmitting wireless antenna of the external control device provided outside the container. This suppresses the attenuation of signals such as power supply signals, control signals, and measurement signals (data signals) that are transmitted and received between the transmitting radio antenna and the radio communication antenna, and reduces noise in the signals. Antenna makes it possible to receive signals with high reception strength.

Therefore, according to the wireless sensor device of the present disclosure, by having the configuration as described above, the communication cable does not obstruct the field of view for observing the inside of the container, and the object to be measured in the container can be easily detected at a low manufacturing cost. Measurement becomes possible. In addition, it is possible to prevent the object to be measured from being contaminated by the communication cable coming into contact with the object to be measured or the dust adhered to the communication cable dropping onto the object to be measured.

Moreover, the wireless sensor device of the present disclosure can be mass-produced at low cost and can be suitably implemented as a disposable product. For example, when a wireless sensor device is placed in a culture solution for cell culture, the sensor part of the wireless sensor device and the metal part of the wireless communication antenna are corroded by the acidified culture solution as cell proliferation progresses. , metal ions may dissolve in the culture solution and contaminate the culture solution. In that case, the wireless sensor device can be taken out and disposed of once the number of cells proliferates reaches a predetermined number. The predetermined proliferation number may be the number of cells per unit area, such as per 1 mm ² or per 1 cm ² . The predetermined growth number may also be the number of cells per unit volume, such as per mm ³ , per cm ³ , and the like. For example, it can be about 1,000 to 100,000 per unit area and about 100 to 100,000 per unit volume. In addition, there is a risk that components, cells, etc. of the object to be measured adhere to the wireless sensor device, degrading the performance of the wireless sensor device. In that case, when the sensitivity of the wireless sensor device becomes equal to or less than a predetermined sensitivity, the wireless sensor device can be taken out and discarded. Therefore, when the wireless sensor device is implemented as a disposable product, it is possible to save the trouble of cleaning and sterilizing the wireless sensor device and prevent contaminants from entering the object to be measured such as the culture solution.

1A and 1B are a cross-sectional view and a block diagram schematically showing the configuration of a wireless sensor device according to an embodiment of the present disclosure; FIG. 2 is a block circuit diagram showing the electrical configuration of the wireless sensor device; FIG. 1 is a cross-sectional view of a wireless sensor device according to an embodiment of the present disclosure; FIG. 1 is a cross-sectional view of a wireless sensor device according to an embodiment of the present disclosure; FIG.

A wireless sensor device according to an embodiment of the present invention will be described below with reference to the drawings.

<Wireless sensor device>
FIG. 1 is a cross-sectional view and block diagram schematically showing the configuration of a wireless sensor device 100 of the first embodiment, and FIG. 2 is a block circuit diagram showing the electrical configuration of the wireless sensor device 100. As shown in FIG. The wireless sensor device 100 of the present embodiment includes a substrate 10, a sensor section 20 provided on the substrate 10 and having at least one sensor element, and a sensor for wireless communication electrically connected to the sensor section 20. An antenna 30, and a container 40 containing the substrate 10 and the object to be measured are provided. The sensor unit 20 and the wireless communication antenna 30 are electrically connected to each other.

The substrate 10 is made of an electrically insulating material such as glass, plastic, ceramics, or the like, and is a plate-like body having a square or circular shape in plan view. Further, the substrate 10 preferably has translucency so that the inside of the container 40 can be easily observed from the outside. However, when the substrate 10 is arranged on the bottom surface inside the container 40, the inside of the container 40 can be observed from the upper part of the outside, so the substrate 10 may be colored in a color such as black or brown.

The sensor unit 20 and the wireless communication antenna 30 are arranged on the substrate 10. A CVD (Chemical It may be directly formed and arranged by a thin film formation method such as the Vapor Deposition method. Further, on the first or second surface of the substrate 10, an inorganic insulating layer made of silicon oxide (SiO ₂ ), silicon nitride (Si ₃ N ₄ ), etc., and an organic insulating layer made of acrylic resin, polycarbonate, etc. are formed. An insulating layer may be formed and arranged by a thin film formation method such as a CVD (Chemical Vapor Deposition) method, and the sensor section 20 and the wireless communication antenna 30 may be arranged on the insulating layer. In that case, connection conductors such as electrodes, wiring, and through holes that constitute the sensor unit 20 and the wireless communication antenna 30 are provided on the first surface and the second surface of the substrate 10, on the insulating layer, and between the plurality of insulating layers. A circuit or the like can be arranged. As a result, the sensor section 20, the wireless communication antenna 30, other circuits, and the like can be integrated and arranged on the substrate 10, and the area of the substrate 10 can be reduced. In addition, when electrodes, wiring, connecting conductors such as through holes, circuits, etc. are arranged between a plurality of insulating layers, even if the object to be measured is corrosive such as an acidic culture solution, The wireless sensor device 100 can be arranged in a highly corrosion-resistant manner.

The sensor section 20 has at least one sensor element provided on the substrate 10 . The sensor elements may comprise at least one of pH sensor elements, temperature sensor elements, electrical resistance sensor elements and imaging sensor elements. Furthermore, the sensor section 20 may include a pressure sensor element, a magnetic sensor element, a humidity sensor element, a chromaticity sensor element, an illuminance sensor element, and the like.

The wireless communication antenna 30 may be realized by, for example, a loop antenna or a dipole antenna. Substrate 10 also includes RFID chip 70 , sensor controller 71 and sensor reader 72 . The RFID chip 70 can identify and supply power to each of the plurality of sensor units 20 and bi-directionally communicate control signals and detection signals. Further, the wireless communication antenna 30 may also serve as a power supply signal receiving antenna for receiving a power supply signal for supplying power to the RFID chip 70, the sensor control unit 71 and the sensor reading unit 72 as the drive control unit. In this case, the wireless sensor device 100 can be continuously used as long as the performance is not degraded due to contamination or the like. Further, in this case, the wireless communication antenna 30 is preferably a loop antenna whose antenna length can be easily adjusted and whose reception sensitivity is high.

In order to supply electric power to the sensor control section 71 and the sensor reading section 72 as drive control sections, for example, a configuration as shown in FIG. 2 may be employed. That is, a power storage unit such as a capacitor is connected in parallel to the power line connecting the RFID chip 70 and the sensor control unit 71, and the power supply signal is charged from the wireless communication antenna 30 that has received the power supply signal to the power storage unit. In addition, electric power can be supplied to the sensor control unit 71 and the sensor reading unit 72 by discharging the charge of the storage unit periodically or as required.

The sensor section 20 has an element section 73 having the sensor elements described above, a sensor control section 71 for controlling each sensor element, and a sensor reading section 72 for reading a detection signal output from each sensor element.

The container 40 is, for example, a petri dish, a flask, a multiwell plate, or the like. The shape, size, and the like of the container 40 are not particularly limited, but in general, any container having one or more suitable spaces for cell growth may be used. For example, a petri dish has a width or diameter of several cm to several tens of centimeters and a height of several mm to several cm, and a flask has a width or diameter of several centimeters to several tens of centimeters and a height of 5 cm to several centimeters. It is about 10 cm, and in the case of a multiwell plate, the width or diameter is about several centimeters to several tens of centimeters, and the height is about 0.5 cm to several centimeters. The container 40 is made of an optically transparent material such as plastic or glass so that the inside can be observed from the outside.

In the multi-well plate, the plan view shape of one well is a circle, a quadrangle such as a square, or a polygon such as a pentagon or a hexagon. A circular shape is suitable for isostatic growth of cells, and has the advantage of facilitating cell growth. A hexagon is a shape suitable for close-packed arrangement of wells, and is advantageous for miniaturization of multiwell plates.

Thus, the container 40 has a role of containing a liquid, such as a culture solution. More specifically, the container 40 can be a commercially available cell culture container, such as a cell culture plate, cell culture flask or cell culture dish. These cell culture vessels are provided with lids and may be realized by injection molding of transparent resin.

It is preferable that the container 40 has a plurality of storage portions having a cylindrical shape, an inverted partial conical shape, or the like for storing the culture medium as a liquid. The container 40 has the wireless sensor device 100 attached to its inside or outside without containing cells and culture medium, and may then be supplied with cells and culture medium, or containing cells and culture medium. The wireless sensor device 100 may be attached in this state. The container 40 can be used after the wireless sensor device 100 is removed when the cells are sufficiently grown, and after the cells and culture medium are collected, washed, and sterilized, the wireless sensor device 100 is attached again. .

The cell type is not particularly limited, and may be animal cells, plant cells, yeast cells, bacterial cells, and the like. Animal cells include muscle cells, visceral cells such as liver, blood cells such as lymphocytes, monocytes and granulocytes, nerve cells, immune cells, iPS cells (induced pluripotent stem cells), and the like.

These cells may be tissue-derived primary cells or subcultured cells. By introducing several types of genes into somatic cells such as human skin and culturing them, iPS cells can differentiate into cells of various tissues and organs like ES cells (embryonic stem cells). Cells are endowed with pluripotency and self-renewal ability that can be maintained even after division and proliferation, that is, the ability to proliferate almost infinitely.

The wireless sensor device 100 of this embodiment can be suitably used for managing the number of proliferating iPS cells with high proliferative ability. Furthermore, the cells may be prokaryotic cells such as E. coli cells, or eukaryotic cells such as animal cells or plant cells. The cells may be, for example, normal cells, or abnormal cells such as tumor cells, or artificially produced cells such as transgenic cells. Cells may also be cells that are cultured as part of a living tissue. Cell culture may be adherent culture or suspension culture.

The object to be measured may be a culture medium for cell culture, and the culture medium may be a liquid such as culture solution, a semi-solid such as gel, jelly, or agar, or a solid. The liquid may be, for example, a buffer solution, a culture medium, or a commercially available cell culture medium can be used, which is selected according to the cells used. The culture medium provides a growth environment for the culture target in the culture of biological tissues such as microorganisms and cells, and includes carbon sources such as glucose, nitrogen sources such as peptone and ammonium sulfate, amino acids, vitamins, phosphates, and the like. It is a source of nutrients such as inorganic salts. It also provides a scaffold (foundation for proliferation) necessary for cell proliferation. Specifically, the culture medium includes a liquid medium consisting of a liquid containing the above nutrients necessary for cell culture, or a solid medium obtained by adding agar, gelatin, or the like to the liquid and solidifying it. The culture medium may also be, for example, Dulbecco's Modified Eagle's Medium when culturing mammalian cells. The culture medium may further contain components necessary for culturing cells, and may contain, for example, bovine serum albumin, growth factors, amino acids, antibiotics, and the like.

The substrate 10 may be provided inside the container 40 , and preferably may be provided so as to contact the bottom surface of the container 40 . This makes it possible to reduce the influence of the substrate 10 on the object to be measured in the container 40 . Further, when the external control device 82 that performs wireless communication and wireless power supply to the wireless sensor device 100 is installed outside the bottom side of the container 40, the distance between the wireless sensor device 100 and the external control device 82 becomes small. , wireless communication and wireless power supply can be reliably performed.

The substrate 10 may be placed outside or inside the container 40 with a size and shape that does not protrude from the container 40, but preferably has a disc shape. This makes it suitable for use inside a circular shaped container suitable for isostatic growth of cells, such as a cell culture plate, cell culture flask or cell culture dish. Further, when the wireless communication antenna 30 is arranged on the substrate 10 as a spiral loop antenna, the wireless communication antenna 30 can be easily arranged by reducing the area of the substrate 10 .

With such a configuration, the substrate 10 includes the sensor section 20 and the wireless communication antenna 30 electrically connected to the sensor section 20 . This eliminates the need for a communication cable, and the sensor unit 20 measures, for example, the temperature and pH of the liquid contained in the container 40, and observes the inside of the container 40 from the outside without being obstructed by the communication cable. can be observed by a person.

Further, since the substrate 10 is provided so as to be in contact with the bottom surface of the container 40, the substrate 10 is stably supported within the container 40, and the bottom surface of the substrate 10 is not in contact with the object to be measured. It is possible to reduce the influence of contamination, etc., on the object to be measured such as liquid. Further, when the external control device 82 is provided outside the container 40 on the bottom side, the wireless communication antenna 30 can be arranged close to the transmitting wireless antenna 52 of the external control device 82. . As a result, the attenuation of signals such as power supply signals, control signals, and data signals transmitted and received between the transmitting radio antenna 52 and the radio communication antenna 30 is suppressed, and the noise in the signals is reduced. It is possible to receive signals with high reception strength. Further, a first adsorption member made of a magnet, a magnetic layer, an adhesive layer such as a silicone resin layer, etc. is arranged on at least a part of the second surface (the surface on the container 40 side) of the substrate 10, and the first adsorption member is arranged on the bottom surface of the container 40 A second attraction member comprising a magnet, a magnetic layer, an adhesive layer such as a silicone resin layer, or the like may be arranged at a portion corresponding to the first attraction member. In this case, the positional fixation of the substrate 10 with respect to the container 40 is ensured, and even if the container 40 vibrates when the container 40 is transported, it is possible to prevent the substrate 10 from being displaced.

Further, at least part of at least one of the second surface of the substrate 10 (the surface on the bottom side of the container 40) and the bottom surface of the container 40 is coated with an adhesive layer such as a silicone resin (silicone rubber) layer, or a plastic tape. An adhesive member made of a double-sided tape or the like formed by coating or printing an adhesive on both sides of the tape may be arranged. In this case as well, the same effect as described above can be obtained. Furthermore, the adhesive member preferably has translucency. This makes it easier to observe the inside of the container from the outside. The adhesive force of the silicone resin includes the effect that the silicone resin having a fine network structure bites into the fine irregularities on the surface of the adherend, and the adsorption force due to molecular contact such as intermolecular force and van der Waals force. caused by In addition, the adhesive is suitable in that it has a high effect of biting into fine irregularities on the surface of the adherend.

Moreover, the first adsorption member, the second adsorption member, and the adhesive member are preferably arranged in a portion that does not overlap at least one of the wireless communication antenna 30 and the transmission wireless antenna 52 . In this case, attenuation of signals such as power supply signals, control signals, and data signals transmitted and received between the transmission radio antenna 52 and the radio communication antenna 30 is suppressed, and noise mixture in the signals is reduced. Antenna 30 enables signals to be received with high reception strength. More preferably, the first adsorption member, the second adsorption member, and the adhesive member are arranged at portions that do not overlap with both the wireless communication antenna 30 and the transmission wireless antenna 52 .

In addition, since the substrate 10 is disk-shaped, a housing space having a circular shape in a plan view suitable for, for example, a cell culture plate, a cell culture flask, or a cell culture dish, or the like, is suitable for the growth of cells. can be suitably used in a container 40 having a Further, the substrate 10 may have a shape similar to a disk shape such as an elliptical plate shape or an oval plate shape. In this case, the same effect as when the substrate 10 is disc-shaped is obtained. The shape of the container 40 suitable for housing the disk-shaped substrate 10 is preferably a cylindrical shape or an inverted partial conical shape suitable for isostatic growth of cells. In particular, the inverted partial conical container 40 is good in that it is suitable for three-dimensional and isotropic growth of cells.

Further, in the wireless sensor device 100 of the present disclosure, when the wireless communication antenna 30 is provided on the side of the substrate 10 on which the sensor unit 20 is arranged, the substrate 10 and the wireless communication antenna 30 are formed in a structure that is as thin as possible. It is possible to provide the wireless sensor device 100 with low manufacturing cost and excellent mass productivity.

Further, in the wireless sensor device 100 of the present disclosure, when the wireless communication antenna 30 is provided on the side of the substrate 10 opposite to the side on which the sensor section 20 is arranged, for example, the side of the substrate 10 on which the sensor section 20 is arranged is The side of the substrate 10 on which the wireless communication antenna 30 is arranged can be the side facing the outside of the container 40 . As a result, the wireless communication antenna 30 can be arranged close to the transmitting wireless antenna 52 of the external control device 82 provided outside the container 40 . As a result, the attenuation of signals such as power supply signals, control signals, and data signals transmitted and received between the transmitting radio antenna 52 and the radio communication antenna 30 is suppressed, and the noise in the signals is reduced. It is possible to receive signals with high reception strength.

The wireless sensor device 100 of the present disclosure may perform wireless communication and wireless power supply with the transmission wireless antenna 52 provided in the external control device 82 . The external control device 82 further includes a control section 62 and a power supply section 74 . This constitutes a wireless sensor system.

In the wireless sensor system of the present disclosure, the container 40 includes a plurality of housing units that respectively house the objects to be measured and the wireless sensor devices 100 , and the external control device 82 simultaneously controls the plurality of wireless sensor devices 100 . may be configured to perform wireless power supply and/or wireless communication. In this case, the time required for drive control of the wireless sensor device 100, acquisition of measurement data, etc. is greatly reduced, and efficient operation becomes possible. When wireless power supply and wireless communication are simultaneously performed for a plurality of wireless sensor devices 100, wireless power supply and wireless communication may be performed at the same time. In this case, for example, a radio communication signal such as a drive control signal is superimposed on a radio power supply signal, which is an AC signal having a constant amplitude and frequency, to generate a composite signal, which is transmitted from the transmission radio antenna 52, and is transmitted from the radio communication antenna. The composite signal received by 30 is demultiplexed by the drive control unit to be separated into a wireless power supply signal and a wireless communication signal, which can be used respectively. Further, wireless power supply and wireless communication may be performed in a time-division manner within an extremely short time that can be regarded as almost simultaneous, for example, within a time of about 10 μsec (microseconds) to 1000 μsec. Wireless power supply and wireless communication are performed by causing radio waves (electromagnetic waves) emitted from the transmission wireless antenna 52 of the external control device 82 to generate an induced current in the wireless communication antenna 30 by electromagnetic induction. Radio communication in the opposite direction to the above is performed by causing the radio wave (electromagnetic wave) transmitted from the radio communication antenna 30 to generate an induced current by electromagnetic induction in the transmission radio antenna 52 of the external control device 82 .

(First embodiment)
FIG. 3 is a cross-sectional view showing a schematic configuration of the wireless sensor device 101 of the first embodiment. In addition, the same reference numerals are given to the parts corresponding to those of the above-described embodiment, and redundant explanations are omitted. The wireless sensor device 101 of this embodiment includes a wireless communication antenna 31 . This wireless communication antenna 31 is provided on the side of the substrate 11 on which the sensor section 21 is arranged. That is, the wireless communication antenna 31 is provided on the first surface (upper surface) 11 a of the substrate 11 . The wireless sensor device 101 is arranged in contact with the inner bottom surface of the container 41 . With this configuration, the thickness of the wireless sensor device 101 including the substrate 11, the sensor section 21, and the wireless communication antenna 31 can be made extremely thin, approximately several tens of micrometers to several thousand micrometers. Further, since the sensor section 21 and the wireless communication antenna 31 can be formed at once on the first surface 11a of the substrate 11 by the same thin film forming process, the manufacturing process can be simplified. As a result, it is possible to provide the wireless sensor device 101 with low manufacturing cost and excellent mass productivity. In addition, since the thickness of the wireless sensor device 101 is extremely thin, the depth of the object to be measured such as the culture solution contained in the container 41 can be made shallow (the volume of the object to be measured can be reduced). There is also the effect of being able to reduce the

(Second embodiment)
FIG. 4 is a cross-sectional view showing a schematic configuration of the wireless sensor device 102 of the second embodiment. In addition, the same reference numerals are given to the parts corresponding to those of the above-described embodiment, and redundant explanations are omitted. The wireless sensor device 102 of this embodiment is provided on the opposite side of the substrate 12 to the side on which the sensor section 22 is arranged. That is, the wireless communication antenna 32 is provided on the second surface (lower surface) 12 b of the substrate 12 . The wireless sensor device 102 is placed in contact with the inner bottom surface of the container 42 .

By adopting such a configuration, the wireless communication antenna 32 is positioned at a distance of several mm to 10 mm from the transmitting wireless antenna 52 of the external control device 82 provided outside the container 42 on the bottom side. It is possible to place the antennas close to each other with a short inter-antenna distance X. As a result, the attenuation of the power and signals transmitted from the transmission radio antenna 52 is suppressed, the noise is reduced, and the radio communication antenna 32 can receive signals with high reception strength.

As described above, according to the wireless sensor device of the present disclosure, it is possible to easily measure an object to be measured such as a liquid in a container at a low manufacturing cost without obstructing the field of view for observation of the container by a communication cable. Become. Moreover, the wireless sensor device of the present disclosure can be mass-produced at a low manufacturing cost and can be suitably implemented as a disposable product. When implemented as a disposable product, it is possible to omit the labor of cleaning and sterilizing the wireless sensor device and prevent contaminants from entering the object to be measured such as the culture solution.

Although the present disclosure has been described in detail above, the present disclosure is not limited to the above-described embodiments, and various modifications and improvements are possible without departing from the gist of the present disclosure. For example, the wireless sensor device may be arranged in contact with the outer surface of the bottom side of the container, in which case the antenna for wireless communication is connected to the transmitting wireless antenna of the external control device provided outside the bottom side of the container. It is possible to arrange them closer to each other. As a result, the attenuation of the power and signals transmitted from the transmitting radio antenna is further suppressed, and the mixing of noise into them is further reduced, making it possible to receive signals with higher reception strength by the radio communication antenna. In addition, for example, since the wireless sensor device does not come into contact with a corrosive object to be measured such as an acidic culture solution, the durability of the wireless sensor device is increased and the life of the wireless sensor device is increased. Also, for example, the wireless sensor device may be arranged on the inner side of the container, in which case it is easier to observe (monitor) the inside of the container from above and below the transparent container. In addition, the substrate may have a protective layer made of silicon oxide (SiO ₂ ), silicon nitride (Si ₃ N ₄ ), or the like on its side surface. In this case, when the side surface of the substrate comes into contact with the inner surface of the container, etc., the side surface of the substrate, particularly the corners of the substrate, can be prevented from being damaged such as abrasion and chipping, and the object to be measured such as the culture solution in the container can be prevented. It is possible to prevent unwanted substances such as fragments of the substrate from entering. Furthermore, the protective layer disposed on the side surface of the substrate may have extensions extending to at least one of the first surface and the second surface of the substrate. This improves the effect of protecting the corners of the substrate. In addition, the insulating layer disposed on at least one of the first surface and the second surface of the substrate may extend to the side surface of the substrate to serve as a protective layer, in which case the corners of the substrate are also protected. The effect of doing is improved.

Reference Signs List 10, 11, 12 substrate 20, 21, 22 sensor unit 30, 31, 32 wireless communication antenna 40, 41, 42 container 100, 101, 102 wireless sensor device

Claims (9)

a substrate;
a sensor unit provided on the substrate and comprising at least one sensor element;
a wireless communication antenna provided on the substrate and electrically connected to the sensor unit;
A wireless sensor device comprising a container that houses the substrate and the object to be measured,
The substrate is provided so as to be in contact with the bottom surface of the container,
The wireless communication antenna is provided on the side of the substrate on which the sensor unit is arranged,
A plurality of insulating layers are formed as thin films on the substrate,
The wireless sensor device , wherein the sensor section and the wireless communication antenna are formed of thin films between the plurality of insulating layers . The wireless sensor device according to claim 1 , wherein the substrate is disc-shaped. The sensor unit includes a drive control unit for the sensor element,
3. The wireless sensor device according to claim 1 , wherein said wireless communication antenna also serves as a feeding signal receiving antenna for receiving a feeding signal for supplying power to said drive control unit. The wireless sensor device according to any one of claims 1 to 3 , wherein said sensor element includes at least one of a pH sensor element, a temperature sensor element, an electrical resistance sensor element and an imaging sensor element. The wireless sensor device according to any one of claims 1 to 4 , wherein the object to be measured is a culture medium for cell culture. The wireless sensor device according to claim 1, wherein the sensor section and the wireless communication antenna are formed by a CVD method. The wireless sensor device according to claim 1, wherein the sensor section and the wireless communication antenna are formed by the same thin film forming process. The wireless sensor device according to any one of claims 1 to 7 ;
an external control device that performs wireless power feeding and wireless communication with the wireless sensor device;
A wireless sensor system comprising: The container includes a plurality of storage units that respectively store the object to be measured and the wireless sensor device,
9. The wireless sensor system according to claim 8 , wherein said external control device performs wireless power feeding and/or wireless communication with said plurality of wireless sensor devices simultaneously.

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