JP7314679B2 - Directional swing measurement method and device for optical sensor unit using line chart - Google Patents

Description

The present invention relates to a technique for measuring directional fluctuation of an optical sensor unit incorporating an imaging optical system and an optical sensor.

In recent years, as the resolution of optical sensors has greatly improved, minute vibrations transmitted to optical sensors have become a major factor in degrading optical performance. In order to reduce the deterioration of optical performance in consideration of the influence of such vibrations, it is necessary to measure the vibration characteristics of the optical sensor with high accuracy.

As a method for measuring vibration characteristics of an object to be measured, for example, Patent Document 1 discloses a plane vibration measurement method using an area sensor. More specifically, while vibrating the reference mirror and the measurement object at different frequencies, an area sensor captures an interference image of reflected light from the reference mirror and reflected light from the measurement object. A two-dimensional vibration characteristic distribution of the measurement object can be obtained by measuring the temporal change of the captured interference image.

Further, Japanese Patent Laid-Open No. 2002-200000 discloses a method for detecting vibration of an optical device using a line sensor. According to Patent Document 2, a line sensor for distance measurement measures horizontal shake, and a line sensor arranged in a direction perpendicular to the line sensor for distance measurement measures vertical shake.

JP 2017-003397 A JP 2001-165622 A

However, the method of measuring vibration characteristics using an area sensor cannot be applied to an optical sensor unit in which only a line sensor is mounted as an optical sensor. In order to apply it, it is necessary to separately provide an area sensor for measurement in the optical sensor unit. Since the area sensor for measurement is installed in addition to the line sensor as the original optical sensor, not only does the weight of the optical sensor unit increase, but also the degree of freedom in design is greatly restricted in order to secure the installation space for the area sensor. Moreover, if the area sensor for measurement is removed after the measurement, the vibration characteristics of the optical sensor unit change depending on the presence or absence of the area sensor, so accurate vibration characteristics cannot be measured in the first place.

Further, in the shake detection method using the line sensor originally installed, it is necessary to detect the shake in the vertical direction with the original line sensor and to detect the shake in the horizontal direction with the line sensor provided separately. That is, two line sensors are required to detect two-dimensional shake. Therefore, this method cannot be applied to an optical sensor unit equipped with a unidirectional line sensor as an optical sensor. In order to apply it, it is necessary to separately provide line sensors for measurement in different directions in the optical sensor unit. Installation of such a line sensor not only increases the weight of the optical sensor unit, but also limits the degree of freedom in design due to the need for an installation space. Moreover, if the measurement line sensor is removed after measurement, accurate measurement cannot be performed as described above.

Usually, an optical sensor unit mounted on a satellite incorporates a unidirectional line sensor as an optical sensor and an imaging optical system composed of a plurality of reflecting mirrors for forming an imaged image thereon. On a satellite, vibrations generated by other equipment are transmitted to the optical sensor unit through the satellite body, so as described above, it is necessary to accurately measure the vibration characteristics of the single optical sensor unit mounted on the satellite. Moreover, in order to be mounted on a satellite, it is required to be as small and light as possible. As described above, the measurement method according to the background art described above cannot accurately measure the vibration characteristics of the optical sensor unit alone while satisfying the requirements for miniaturization and weight reduction.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a method and apparatus for measuring the directional fluctuation of an optical sensor unit incorporating an imaging optical system and a line sensor based only on the output signal of the line sensor.

本発明の第一の態様によれば、結像光学系と第一方向に画素が配列されたラインセンサとを組み込んだ光学センサユニットの指向揺れを測定する方法は、ラインチャートのライン画像が前記結像光学系を通して前記ラインセンサ上に結像するように、前記ラインチャートを前記光学センサユニットに対向して配置し、加振手段が前記光学センサユニットを振動させ、測定手段が、前記ラインセンサに直交する第二方向の第一ライン画像のセンサ出力値の変化から前記第一ライン画像の揺れを検出し、前記ラインセンサの前記第一方向から所定角度だけ傾斜した第二ライン画像のセンサ出力値の変化から前記第二ライン画像の揺れを検出し、前記第一ライン画像の揺れから前記光学センサユニットの前記第一方向の揺れを測定し、前記第二ライン画像の揺れから前記光学センサユニットの前記第二方向の揺れを測定し、前記第二ライン画像の傾斜角度が０°より大きく４５°より小さい角度に設定されたことを特徴とする。
According to a second aspect of the present invention, a method for measuring orientational fluctuation of an optical sensor unit incorporating an imaging optical system and a line sensor having pixels arranged in a first direction comprises: arranging the line chart so as to face the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system; vibrating means vibrating the optical sensor unit; and the fluctuation of the first line image and the fluctuation of the second line image are simultaneously detected from the change in the sensor output value, the fluctuation of the optical sensor unit in the first direction is measured from the fluctuation of the first line image, and the fluctuation of the optical sensor unit in the second direction is measured by correcting the fluctuation of the second line image using the fluctuation of the first line image.
本発明の第三の態様によれば、結像光学系と第一方向に画素が配列されたラインセンサとを組み込んだ光学センサユニットの指向揺れを測定する装置は、ラインチャートのライン画像が前記結像光学系を通して前記ラインセンサ上に結像するように、前記ラインチャートを前記光学センサユニットに対向して配置し、前記光学センサユニットへ振動を与える加振手段と、前記ラインセンサに直交する第二方向の第一ライン画像のセンサ出力値の変化から前記第一ライン画像の揺れを検出し、前記ラインセンサの前記第一方向から所定角度だけ傾斜した第二ライン画像のセンサ出力値の変化から前記第二ライン画像の揺れを検出し、前記第一ライン画像の揺れから前記光学センサユニットの前記第一方向の揺れを測定し、前記第二ライン画像の揺れから前記光学センサユニットの前記第二方向の揺れを測定する測定手段と、を有し、前記第二ライン画像の傾斜角度が０°より大きく４５°より小さい角度に設定されたことを特徴とする。
According to a fourth aspect of the present invention, there is provided an apparatus for measuring directional swing of an optical sensor unit incorporating an imaging optical system and a line sensor having pixels arranged in a first direction, comprising vibrating means for applying vibration to the optical sensor unit by arranging the line chart to face the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system, and a first line image in a second direction orthogonal to the line sensor and a second line image inclined by a predetermined angle from the first direction of the line sensor. measuring means for simultaneously detecting the shake of the first line image and the shake of the second line image from changes in sensor output values, measuring the shake of the optical sensor unit in the first direction from the shake of the first line image, and measuring the shake of the optical sensor unit in the second direction by correcting the shake of the second line image using the shake of the first line image.

According to the present invention, the directional fluctuation of an optical sensor unit in which an imaging optical system and a line sensor are incorporated can be measured based only on the output signal of the line sensor.

FIG. 1 is a partially broken side configuration diagram of a vibrating device in a pointing shake measuring device according to an embodiment of the present invention. 2 is a plan view of the vibrating device in FIG. 1. FIG. FIG. 3 is a diagram schematically showing the relationship between the horizontal shake of the formed image of the line chart and the sensor output change thereof in the pointing shake measuring method according to the first embodiment of the present invention. FIG. 4 is a lateral edge profile diagram showing temporal variations in edge pixel positions due to lateral vibration of the formed image shown in FIG. FIG. 5 is a diagram schematically showing the relationship between the vertical shake of the formed image of the line chart and the sensor output change thereof in the pointing shake measuring method according to the first embodiment. FIG. 6 is a graph showing an example of changes in the sensitivity of roll (X)/pitch (Y) with respect to the inclination angle θ of the line chart in FIG. FIG. 7 is a table showing an example of a change in the rolling (X) sensitivity with respect to the inclination angle θ of the line chart in FIG. 5 and an example of the influence of the rolling on the pitching sensitivity. FIG. 8 is a block diagram showing a schematic configuration of the pointing shake measuring device according to the first embodiment. FIG. 9 is a flow chart showing the operation of the pointing shake measuring device shown in FIG. FIG. 10 is a diagram schematically showing an example of a line chart and its formed image in the vibration characteristic measuring method according to the second embodiment of the present invention. FIG. 11 is a block diagram showing a schematic configuration of a pointing shake measuring device according to the second embodiment. FIG. 12 is a flow chart showing the operation of the pointing shake measuring device shown in FIG.

<Overview of Embodiment>
According to the embodiment of the present invention, the line chart image is read by the line sensor while vibrating the optical sensor unit as a finished product in which the imaging optical system and the line sensor are incorporated, and the directional fluctuation characteristics of the optical sensor unit can be measured using only the line sensor output. More specifically, a vertical line image of a line chart orthogonal to the line sensor and an oblique line image of a line chart inclined by a predetermined angle with respect to the line sensor are used to detect the vibration of these line images, thereby measuring the two-dimensional vibration direction component with desired accuracy. Therefore, without using an optical sensor only for measuring vibration characteristics, the vibration characteristics can be measured only from the output of the line sensor, which is the original optical sensor. There is no need to disassemble the optical sensor unit as a finished product, and no extra parts are required.

According to the first embodiment of the present invention, a single line chart is used. A lateral fluctuation component is obtained from a change in a line sensor output signal when a line image of one line is orthogonal to the line sensor, and a longitudinal fluctuation component is obtained with a desired precision from a change in the line sensor output signal when the line image of one line is tilted at a small angle with respect to the line sensor. The change in the line sensor output due to the tilted line image includes not only the vertical shake component but also the horizontal shake component, but by reducing the tilt angle, the ratio of the horizontal shake component can be sufficiently reduced, and the vertical shake component can be obtained with the required accuracy.

According to the second embodiment of the present invention, a line chart with two lines deviated from the right angle by a predetermined angle is used. One line image is arranged orthogonally at a predetermined pixel portion of the line sensor, and the other line image is arranged at another pixel portion of the line sensor with a slight angle of inclination. Horizontal and vertical vibration components are obtained from changes in the line sensor output signal due to these line images. As described above, the shake component obtained from the tilted line image includes not only the vertical shake component but also the horizontal shake component. According to the second embodiment, by correcting the line sensor output from the tilted line image with the line sensor output from the vertical line image, it is possible to accurately calculate the vertical shake component.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the constituent elements described in the following embodiments are merely examples, and the technical scope of the present invention is not limited to them. First, FIGS. 1 and 2 illustrate the configuration of an apparatus used in an embodiment of the present invention.

<Device configuration>
As illustrated in FIGS. 1 and 2, the optical sensor unit 100 is an object to be measured for vibration characteristics, and includes a line sensor 101 and an imaging optical system M1 therein as a final product. The imaging optical system M1 may be an optical system that forms an image on the light receiving surface of the line sensor 101 from parallel light (arrow) incident from below. The imaging optical system M1 can be configured by combining optical elements such as a plurality of reflecting mirrors or lenses, for example. In FIG. 1, for simplification, a plurality of optical elements are collectively illustrated as an imaging optical system M1.

The optical sensor unit 100 is fixed to the upper portion of a vibrating frame 200 of a vibrating device, and is given vibration at a predetermined frequency and in a predetermined direction by a vibrator 201 . A lower end of the excitation frame 200 is attached to a vibration isolation table 300 , and a light source 301 is provided in the central portion of the vibration isolation table 300 . A line chart 302 is arranged on a light source 301 of an anti-vibration table 300, and a collimator 303 is arranged thereon. Therefore, although the optical sensor unit 100 fixed to the vibration frame 200 is vibrated by the vibrator 201, the light source 301, the line chart 302 and the collimator 303 mounted on the anti-vibration table 300 do not vibrate.

The line chart 302 may be a transparent plate on which one or two light-shielding lines are formed, or a light-shielding plate on which one or two light-transmitting lines are formed. Alternatively, a transmissive display panel, such as a liquid crystal panel, which can electrically display a desired line pattern can be used. Also, the line chart 302 may be an opaque plate on which lines are printed.

Irradiation light from the light source 301 enters the collimator 303 through the line chart 302 and enters the optical sensor unit 100 as parallel light indicated by an arrow. A line image of the line chart 302 is formed on the light-receiving surface of the line sensor 101 by the incidence of this parallel light on the imaging optical system M1. A line image on the line sensor 101 can be set in a desired direction according to the line direction of the line chart 302 . The line image of the line chart 302 oscillates with respect to the line sensor 101 of the optical sensor unit 100 when the vibrator 201 vibrates the vibration frame 200 . Since the line image of the line chart 302 should be formed on the line sensor 101, the light emitted from the light source 301 does not need to pass through the line chart 302, and may be reflected by the line chart 302 and enter the imaging optical system M1.

As described above, in the optical sensor unit 100, the imaging optical system M1 composed of a plurality of optical elements and the line sensor 101 are arranged. These optical elements and the line sensor 101 have different masses and are arranged at respective positions within the optical sensor unit 100 . Therefore, the optical sensor unit 101 has unique vibration characteristics as an assembly. According to the embodiment described below, the pointing shake measuring device 400 inputs the output signal of the line sensor 101 while the optical sensor unit 101 is vibrated, and measures the pointing shake of the optical sensor unit 100 based only on the sensor output. This makes it possible to evaluate the vibration characteristics only with the output of the line sensor 101 .

Hereinafter, for the sake of convenience, the longitudinal direction of the line sensor 101 (horizontal direction in the drawing) will be referred to as the horizontal direction (X direction), and the direction perpendicular to the line sensor 101 (vertical direction in the drawing) will be referred to as the vertical direction (Y direction).

1. First Embodiment 1.1) Detection of Horizontal Shaking As illustrated in FIG. 3, a vertical line image 302x orthogonal to the longitudinal direction of the line sensor 101 is formed on the line sensor 101 by a line chart 302 in a predetermined direction. As a result, the sensor output profile 102 of the line sensor 101 has a shape in which the output level changes greatly at pixels near the edge of the vertical line image 302x.

The vertical line image 302x is shaken horizontally and vertically by driving the vibrator 201 as described above. As can be seen from FIG. 3, vertical fluctuations of the vertical line image 302x are not reflected in changes in the sensor output, but horizontal fluctuations appear as temporal changes in the edge pixel position P _edge of the sensor output profile 102. FIG. Fourier analysis of the lateral edge profile, which plots the edge pixel location P _edge over time, as illustrated in FIG. 4, provides a measure of the frequency and amplitude of the roll.

1.2) Detection of Vertical Shaking As illustrated in FIG. 5, by rotating the line chart 302 by a predetermined angle, an inclined line image 302y slightly inclined with respect to the longitudinal direction of the line sensor 101 is formed on the line sensor 101. As a result, the sensor output profile 103 of the line sensor 101 has a shape in which the output level changes more slowly than the profile 102 at pixels near the edge of the inclined line image 302y. Since the slanted line image 302 y crosses the line sensor 101 diagonally, the shape change shown in the profile 103 appears in some pixel output of the line sensor 101 .

Note that the line image and the line sensor 101 must not be completely parallel. The first reason is that it is not easy to align the edge portion of the line image within the pixel width of the line sensor 101 . Secondly, since the image signal obtained from the parallel line image is intermediate between white and black over all pixels, it is not possible to distinguish the portion where the sensor output value changes greatly, that is, the edge. On the other hand, by tilting the line image 302y by a small angle as in the present embodiment, a portion where white changes to black appears in some pixel range of the line sensor, making it easier to specify the edge from the sensor output value.

The inclined line image 302y is swayed horizontally and vertically by driving the vibrator 201 as described above. As can be seen from FIG. 5, the fluctuation of the inclined line image 302y appears as a temporal change in the edge pixel position P _edge of the sensor output profile 103, but the change in the edge pixel position of this profile 103 reflects both vertical and horizontal fluctuations. However, if the tilt angle .theta. is sufficiently small, the lateral swing component can be substantially ignored, as will be explained below. Therefore, by detecting the temporal change in the edge pixel position P _edge of the sensor output profile 103 at a sufficiently small tilt angle θ, it is possible to measure the vertical swing characteristics of the optical sensor unit 100 with sufficient accuracy. Details will be described below.

6 and 7 show simulated results of pitch sensitivity, roll sensitivity, and the impact of roll sensitivity on pitch sensitivity. Here, it is assumed that the tilted line image 302y crosses one pixel of the line sensor 101 in the horizontal direction, and that vertical and horizontal vibrations occur at the same magnitude.

As illustrated in FIG. 6, as the angle θ of the slanted line image 302y increases from 0 to 45°, the lateral shake sensitivity increases. This is evident from the fact that as the inclined line image 302y shown in FIG. 5 rises in the vertical direction (θ increases), the change in sensor output with respect to the pixel position increases, and the horizontal shake sensitivity increases. On the other hand, the vertical shake sensitivity hardly changes. In other words, the change in sensor pixel output due to horizontal shake depends on the tilt angle θ, whereas the change in sensor pixel output due to vertical shake is only approximately proportional to the amplitude of the shake and does not depend on the tilt angle θ.

Therefore, as exemplified in FIG. 7, it is possible to set the inclination angle .theta. to reduce the influence of lateral vibration to a desired level or less. For example, if the tilt angle θ is set to be greater than 0° and 6° or less, the degree of influence of rolling on changes in sensor output can be reduced to 10% or less, and if the tilt angle θ is set to be greater than 0° to 3° or less, the degree of influence of rolling to changes in sensor output can be reduced to 5% or less. In other words, by setting a desired tilt angle θ, it is possible to measure the longitudinal sway with accuracy corresponding to the tilt angle θ. For example, if the time change of the edge pixel position P _edge of the sensor output profile 103 is detected at θ=3°, the vertical swing of the optical sensor unit 100 can be measured with an uncertainty of 5% or less.

Although the inclination angle θ depends on the required measurement accuracy, it is generally desirable to set the angle of inclination θ to be greater than 0° and less than or equal to 6° at which the uncertainty becomes 10% or less.

Thus, Fourier analysis of the longitudinal edge profile plotted with edge pixel locations P _edge over time provides a measure of pitch frequency and amplitude.

1.3) Orientational fluctuation measuring device As illustrated in FIG. 8, the orientational fluctuation measuring device 400 according to the present embodiment stores sensor pixel output data input from the line sensor 101 in time series as the sensor output profile 102 or 103 in the storage unit 401 depending on whether the line image of the line chart 302 is the vertical line image 302x or the inclined line image 302y.

The edge detection unit 402 detects edges from the sensor output profile 102 and outputs the edge position information to the storage unit 403 in time series, whereby the storage unit 403 stores the lateral edge profile. Further, the edge detection unit 402 detects edges from the sensor output profile 103 and outputs the edge position information to the storage unit 404 in time series, whereby the storage unit 404 stores vertical edge profiles.

A directional shake evaluation unit 405 calculates the frequency and amplitude of horizontal and vertical shakes by performing Fourier analysis on the horizontal and vertical edge profiles.

The controller 406 controls the edge detection section 402 , the orientation fluctuation evaluation section 405 and the storage sections 401 , 403 and 404 to measure the orientation fluctuation. Note that the controller 406 can also perform various controls such as drive control of the vibration exciter 201 and display control of the line chart 302 .

Note that the orientation fluctuation measurement function of orientation fluctuation measurement device 400 can also be realized by executing a program stored in program memory 407 by a processor such as a CPU (Central Processing Unit) (not shown). Hereinafter, referring to FIG. 9, the orientation fluctuation measurement method according to the present embodiment will be described in detail, taking as an example the case where the orientation fluctuation measurement device 400 controls the vibrator 201. FIG.

1.4) Measurement of Directional Shake In FIG. 9, first, after setting the line chart 302 in the direction for measuring the lateral shake shown in FIG. Subsequently, orientation fluctuation measuring apparatus 400 irradiates line chart 302 with light source 301 and drives vibrator 201 (operation S503). 2 is formed on the line sensor 101, and the line image 302x swings laterally with respect to the line sensor 101 as the optical sensor unit 100 vibrates.

With the line image 302x horizontally swinging on the line sensor 101, the pointing fluctuation measuring apparatus 400 inputs the sensor output data of the line sensor 101 at predetermined intervals, thereby storing the sensor output profile 102 in the storage unit 401 in chronological order (operation S504). Subsequently, the edge detection unit 402 generates a lateral edge profile indicating the variation of the edge portion over time from the sensor output profile 102, and stores it in the storage unit 403 (Operation S505).

Subsequently, as shown in FIG. 5, the line chart 302 is set so that the line image 302y is inclined at a predetermined angle θ with respect to the line sensor 101 (operation S506). The tilt angle θ is set to a sufficiently small value so as to obtain sufficient pitch detection accuracy, as described above. The pointing shake measuring apparatus 400 illuminates the line chart 302 with the light source 301 and drives the vibrator 201, as in the operation S503. As a result, the inclined line image 302y swings horizontally/vertically on the line sensor 101, as shown in FIG. In this rocking state, pointing shake measuring apparatus 400 receives sensor output data from line sensor 101 at predetermined intervals, and stores sensor output profile 103 in time series in storage unit 401 (operation S507). Next, from the sensor output profile 103, the edge detection unit 402 generates a vertical edge profile indicating variations in edge portions over time, and stores it in the storage unit 404 (operation S508).

The directional fluctuation evaluation unit 405 evaluates each directional fluctuation using the edge profile thus obtained (operation S509). The pointing shake measuring device 400 repeats the above operations S503 to S509 while changing the vibration mode such as the vibration frequency to measure the vibration characteristics of the optical sensor unit 100. FIG.

1.5) Effect As described above, according to the first embodiment of the present invention, the horizontal vibration component is obtained from the vibration of the vertical line image 302x, and the vertical vibration component is obtained with desired accuracy from the vibration of the inclined line image 302y that is tilted by a small angle θ with respect to the line sensor. Therefore, by preparing the line chart 302 , it is possible to measure the vibration characteristics of the optical sensor unit 100 using only the output signal of the line sensor as the optical sensor mounted on the optical sensor unit 100 . That is, since it is not necessary to provide a sensor for measuring vibration characteristics in the optical sensor unit 100, it is possible to achieve a reduction in size and weight, and to measure the directional fluctuation with desired accuracy.

2. Second Embodiment In a directional shake measuring apparatus according to a second embodiment of the present invention, a line chart having two lines corresponding to two line directions shown in FIGS. 3 and 5 is used, and the horizontal shake detected based on the inclined line image is corrected using the horizontal shake, thereby simultaneously and accurately measuring the horizontal shake and the vertical shake.

2.1) Shaking Correction As illustrated in FIG. 10, the line chart 302 used in the second embodiment of the present invention has two lines 601 and 602, and the lines 601 and 602 intersect at a predetermined angle θ from the right angle. When this line chart 302 is imaged on the line sensor 101 in the optical sensor unit 100, a vertical line image 601x corresponding to the line 601 and an inclined line image 602y corresponding to the line 602 intersect at different pixel portions of the line sensor 101, respectively.

The output signal of the line sensor 101 at the crossing portion of the vertical line image 601x is similar to the sensor output profile 102 illustrated in FIG. 3, and the output signal of the line sensor 101 at the crossing portion of the inclined line image 602y is similar to the sensor output profile 103 illustrated in FIG. Therefore, the same method as in the first embodiment can be used to simultaneously measure lateral sway and longitudinal sway.

Furthermore, since the sensor output profiles 102 and 103 can be simultaneously obtained from the signals read out from the line sensor 101 at once, in the second embodiment, fluctuations in the sensor output profile 103 due to the slanted line image 602y can be corrected with the lateral shake accurately obtained from the sensor output profile 102. Details will be described below.

As described with reference to FIGS. 5 and 6, the change (wobble) in the edge pixel position of the sensor output profile 103 reflects both vertical and horizontal shake. In contrast, the change in edge pixel position of the sensor output profile 102 accurately represents the lateral swing. Therefore, by removing the horizontal shake component from the shake of the sensor output profile 103, it is possible to accurately calculate the vertical shake.

2.2) Directional fluctuation measuring device As illustrated in FIG. 11, a directional fluctuation measuring device 700 according to the present embodiment stores each pixel portion of the sensor pixel output data input from the line sensor 101 as the sensor output profile 102 or 103 in the storage unit 701 depending on whether it is the pixel portion of the vertical line image 601x or the pixel portion of the inclined line image 602y.

The edge detection unit 702 detects edges from the sensor output profile 102 and outputs the edge position information of the lateral shake to the storage unit 703 in chronological order. Thereby, the horizontal edge profile is stored in the storage unit 703 . Further, the edge detection unit 702 detects edges from the sensor output profile 103 and outputs edge information including vertical/horizontal shake to the pitch calculation unit 704 in time series.

The pitch calculation unit 704 inputs the edge position information of the lateral sway obtained from the sensor output profile 102 in time series, and simultaneously inputs the edge position information of the longitudinal/lateral sway obtained from the sensor output profile 103 in time series. As described above, the edge position information for horizontal shake and the edge position information for vertical/horizontal shake are caused by the same shake. Therefore, the pitch calculation unit 704 can calculate the edge position information of only the vertical swing by subtracting the edge position component of the horizontal swing from the edge position of the vertical/horizontal swing. A longitudinal edge profile is stored in the storage unit 705 by inputting the edge position information of only the vertical shake from the pitch calculation unit 704 .

A directional shake evaluation unit 706 measures the frequency and amplitude of horizontal and vertical shakes by performing Fourier analysis on each edge profile.

The controller 707 controls the edge detection section 702 , the pitch calculation section 704 , the orientation fluctuation evaluation section 706 and the storage sections 701 , 703 and 704 to measure the orientation fluctuation. Note that the controller 707 can also perform various controls such as driving control of the vibration exciter 201 and display control of the line chart 302 .

Note that the orientation fluctuation measurement function of orientation fluctuation measurement apparatus 700 can also be realized by executing a program stored in program memory 708 by a processor such as a CPU (Central Processing Unit) (not shown). Hereinafter, referring to FIG. 12, the orientation fluctuation measurement method according to the present embodiment will be described in detail, taking as an example the case where the orientation fluctuation measurement device 700 controls the vibrator 201. FIG.

2.3) Measurement of Orientational Swing Referring to FIG. 12, first, after setting the line chart 302 shown in FIG. 10 (operation S801), the orientational oscillation measurement apparatus 700 initially sets the vibration frequency, vibration direction, etc. of the vibrator 201 (operation S802). Subsequently, the pointing fluctuation measuring apparatus 700 illuminates the line chart 302 with the light source 301 and drives the vibrator 201 (Operation S803). 10 are formed on the line sensor 101, and the line images 601x and 602y oscillate with respect to the line sensor 101 as the optical sensor unit 100 vibrates.

With the line images 601x and 602y swinging on the line sensor 101, the orientation fluctuation measuring apparatus 700 inputs the sensor output data of the line sensor 101 at predetermined intervals, thereby simultaneously storing the sensor output profiles 102 and 103 in the storage unit 701 (operation S804). Subsequently, the edge detection unit 702 generates a horizontal edge profile indicating the variation of the edge portion over time from the sensor output profile 102, and stores it in the storage unit 703 (operation S805). At the same time, the pitch calculator 704 subtracts the horizontal swing component from the edge fluctuation obtained from the sensor output profile 103 to calculate the vertical swing component (operation S806). Thus, a vertical edge profile indicating vertical edge variation is stored in the storage unit 705 (operation S807).

The directional fluctuation evaluation unit 706 evaluates each directional fluctuation using the edge profile thus acquired (operation S808). The directional shake measuring device 700 repeats the above operations S803 to S808 while changing the vibration mode such as the vibration frequency to measure the vibration characteristics of the optical sensor unit 100. FIG.

2.4) Effect As described above, according to the second embodiment of the present invention, the horizontal vibration component is obtained from the vibration of the vertical line image 601x, and at the same time, the vertical vibration component is obtained by correcting the vibration of the inclined line image 602y, which is tilted by a small angle θ with respect to the line sensor 101, with the horizontal vibration component. Therefore, by preparing the line chart 302 , it is possible to measure the vibration characteristics of the optical sensor unit 100 using only the output signal of the line sensor as the optical sensor mounted on the optical sensor unit 100 . That is, since it is not necessary to provide a sensor for measuring vibration characteristics in the optical sensor unit 100, it is possible to achieve a reduction in size and weight, and to measure the directional fluctuation with desired accuracy.

3. Additional Notes Some or all of the embodiments and examples described above can also be described as the following additional notes, but are not limited to these.
(Appendix 1)
A method for measuring pointing swing of an optical sensor unit incorporating an imaging optical system and a line sensor having pixels arranged in a first direction, comprising:
arranging the line chart to face the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system;
a vibrating means vibrating the optical sensor unit;
measuring means detects fluctuation of the first line image from a change in sensor output value of the first line image in a second direction orthogonal to the line sensor;
detecting fluctuation of the second line image from a change in the sensor output value of the second line image inclined by a predetermined angle from the first direction of the line sensor;
measuring the shake of the optical sensor unit in the first direction from the shake of the first line image;
measuring the shake of the optical sensor unit in the second direction from the shake of the second line image;
A pointing fluctuation measuring method, wherein an inclination angle of the second line image is set to be larger than 0° and smaller than a maximum angle at which the second line image crosses the pixels in the first direction.
(Appendix 2)
2. The pointing shake measuring method according to appendix 1, wherein the inclination angle of the second line image is set to 6 degrees or less.
(Appendix 3)
A method for measuring pointing swing of an optical sensor unit incorporating an imaging optical system and a line sensor having pixels arranged in a first direction, comprising:
arranging the line chart to face the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system;
a vibrating means vibrating the optical sensor unit;
measuring means simultaneously detects the fluctuation of the first line image and the fluctuation of the second line image from changes in sensor output values between a first line image in a second direction perpendicular to the line sensor and a second line image inclined by a predetermined angle from the first direction of the line sensor;
measuring the shake of the optical sensor unit in the first direction from the shake of the first line image;
measuring the shake of the optical sensor unit in the second direction by correcting the shake of the second line image using the shake of the first line image;
A directional shake measuring method characterized by:
(Appendix 4)
3. The pointing fluctuation measuring method according to claim 3, wherein the tilt angle of the second line image is set to be larger than 0° and smaller than the maximum angle at which the second line image crosses the pixels in the first direction.
(Appendix 5)
A device for measuring pointing swing of an optical sensor unit incorporating an imaging optical system and a line sensor in which pixels are arranged in a first direction,
vibrating means for arranging the line chart to face the optical sensor unit and applying vibration to the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system;
measuring means for detecting fluctuation of the first line image from a change in sensor output value of a first line image in a second direction perpendicular to the line sensor, detecting fluctuation of the second line image from a change in sensor output value of a second line image inclined by a predetermined angle from the first direction of the line sensor, measuring fluctuation of the optical sensor unit in the first direction from the fluctuation of the first line image, and measuring fluctuation of the optical sensor unit in the second direction from the fluctuation of the second line image;
wherein the inclination angle of the second line image is set to be larger than 0° and smaller than the maximum angle at which the second line image crosses the pixels in the first direction.
(Appendix 6)
6. The directional fluctuation measuring device according to appendix 5, wherein the inclination angle of the second line image is set to 6 degrees or less.
(Appendix 7)
A device for measuring pointing swing of an optical sensor unit incorporating an imaging optical system and a line sensor in which pixels are arranged in a first direction,
vibrating means for arranging the line chart to face the optical sensor unit and applying vibration to the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system;
measuring means for simultaneously detecting shake of the first line image and shake of the second line image from changes in sensor output values of a first line image in a second direction perpendicular to the line sensor and a second line image inclined by a predetermined angle from the first direction of the line sensor, measuring shake of the optical sensor unit in the first direction from the shake of the first line image, and measuring shake of the optical sensor unit in the second direction by correcting the shake of the second line image using the shake of the first line image;
A directional shake measuring device characterized by:
(Appendix 8)
8. The orientation fluctuation measuring apparatus according to claim 7, wherein the tilt angle of the second line image is set to be larger than 0° and smaller than the maximum angle at which the second line image crosses the pixels in the first direction.
(Appendix 9)
A program for causing a computer to function as a measuring device for directional fluctuation of an optical sensor unit incorporating an imaging optical system and a line sensor having pixels arranged in a first direction,
vibrating means for vibrating the optical sensor unit by arranging the line chart to face the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system;
measuring means detects fluctuation of the first line image from a change in sensor output value of the first line image in a second direction orthogonal to the line sensor;
detecting fluctuation of the second line image from a change in the sensor output value of the second line image inclined by a predetermined angle from the first direction of the line sensor;
measuring the shake of the optical sensor unit in the first direction from the shake of the first line image;
measuring the swing of the optical sensor unit in the second direction from the swing of the second line image;
functioning said computer as
The program, wherein the inclination angle of the second line image is set to be larger than 0° and smaller than the maximum angle at which the second line image crosses the pixels in the first direction.
(Appendix 10)
A program for causing a computer to function as a measuring device for directional fluctuation of an optical sensor unit incorporating an imaging optical system and a line sensor having pixels arranged in a first direction,
vibrating means for vibrating the optical sensor unit by arranging the line chart to face the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system;
measuring means simultaneously detects the fluctuation of the first line image and the fluctuation of the second line image from changes in sensor output values between a first line image in a second direction orthogonal to the line sensor and a second line image inclined by a predetermined angle from the first direction of the line sensor;
measuring the shake of the optical sensor unit in the first direction from the shake of the first line image;
measuring the shake of the optical sensor unit in the second direction by correcting the shake of the second line image using the shake of the first line image;
A program characterized by causing the computer to function as
(Appendix 11)
A method for measuring pointing swing of an optical sensor unit incorporating an imaging optical system and a line sensor having pixels arranged in a first direction, comprising:
disposing the line chart facing the optical sensor unit so that a line image of the line chart having at least one line is formed on the line sensor through the imaging optical system;
a vibrating means vibrating the optical sensor unit;
edge detection means for detecting edges of a first line image in a second direction orthogonal to the line sensor to obtain a first profile indicating the fluctuation of the first line image, detecting edges of the second line image inclined by a predetermined angle from the first direction of the line sensor to obtain a second profile indicating the fluctuation of the second line image;
measuring means measures the sway of the optical sensor unit in the first direction from the first profile and the sway of the optical sensor unit in the second direction from the second profile;
A pointing fluctuation measuring method, wherein an inclination angle of the second line image is set to an angle larger than 0° and smaller than a maximum angle at which the second line image crosses the pixels in the first direction.
(Appendix 12)
A method for measuring orientation swing of an optical sensor unit incorporating an imaging optical system and a line sensor having pixels arranged in a first direction, comprising:
disposing the line chart facing the optical sensor unit so that a line image of the line chart having at least one line is formed on the line sensor through the imaging optical system;
a vibrating means vibrating the optical sensor unit;
edge detection means for detecting edges of a first line image in a second direction orthogonal to the line sensor to obtain a first profile indicating the fluctuation of the first line image, detecting edges of the second line image inclined by a predetermined angle from the first direction of the line sensor to obtain a second profile indicating the fluctuation of the second line image;
measuring means measures the sway of the optical sensor unit in the first direction from the first profile, corrects the edge pixel position of the second line image by the edge pixel position of the first line, and measures the sway of the optical sensor unit in the second direction;
A directional shake measuring method characterized by:

INDUSTRIAL APPLICABILITY The present invention can be applied to a vibration characteristic measuring device for an optical sensor unit such as an optical telescope mounted on a satellite.

100 Optical sensor unit 101 Line sensor 102 Sensor output profile 103 Center output profile 200 Vibration frame 201 Vibrator 300 Anti-vibration table 301 Light source 302 Line chart 302x Vertical line image 302y Inclined line image 303 Collimators 400, 700 Orientation fluctuation measuring devices 401, 701 Storage units 402, 702 Edge detection units 403, 4 04, 703, 705 Storage units 405, 706 Directional shake evaluation units 406, 707 Controllers 407, 708 Program memories 601, 602 Lines 601x Vertical direction line images 602y Inclination line images 704 Pitch calculation units

Claims (10)

A method for measuring pointing swing of an optical sensor unit incorporating an imaging optical system and a line sensor having pixels arranged in a first direction, comprising:
arranging the line chart to face the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system;
a vibrating means vibrating the optical sensor unit;
measuring means detects fluctuation of the first line image from a change in sensor output value of the first line image in a second direction orthogonal to the line sensor;
detecting fluctuation of the second line image from a change in the sensor output value of the second line image inclined by a predetermined angle from the first direction of the line sensor;
measuring the shake of the optical sensor unit in the first direction from the shake of the first line image;
measuring the shake of the optical sensor unit in the second direction from the shake of the second line image;
A pointing shake measuring method, wherein the inclination angle of the second line image is set to an angle larger than 0° and smaller than 45° . 2. The method of claim 1, wherein the tilt angle of the second line image is set to 6[deg.] or less. A method for measuring pointing swing of an optical sensor unit incorporating an imaging optical system and a line sensor having pixels arranged in a first direction, comprising:
arranging the line chart to face the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system;
a vibrating means vibrating the optical sensor unit;
measuring means simultaneously detects the fluctuation of the first line image and the fluctuation of the second line image from changes in sensor output values between a first line image in a second direction perpendicular to the line sensor and a second line image inclined by a predetermined angle from the first direction of the line sensor;
measuring the shake of the optical sensor unit in the first direction from the shake of the first line image;
measuring the shake of the optical sensor unit in the second direction by correcting the shake of the second line image using the shake of the first line image;
A directional shake measuring method characterized by: 4. The method according to claim 3, wherein the inclination angle of the second line image is set to an angle larger than 0[deg.] and smaller than 45[deg .]. A device for measuring pointing swing of an optical sensor unit incorporating an imaging optical system and a line sensor in which pixels are arranged in a first direction,
vibrating means for arranging the line chart to face the optical sensor unit and applying vibration to the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system;
measuring means for detecting fluctuation of the first line image from a change in sensor output value of a first line image in a second direction perpendicular to the line sensor, detecting fluctuation of the second line image from a change in sensor output value of a second line image inclined by a predetermined angle from the first direction of the line sensor, measuring fluctuation of the optical sensor unit in the first direction from the fluctuation of the first line image, and measuring fluctuation of the optical sensor unit in the second direction from the fluctuation of the second line image;
, wherein the inclination angle of the second line image is set to an angle larger than 0° and smaller than 45° . 6. The directional shake measuring apparatus according to claim 5, wherein the inclination angle of the second line image is set to 6 degrees or less. A device for measuring pointing swing of an optical sensor unit incorporating an imaging optical system and a line sensor in which pixels are arranged in a first direction,
vibrating means for arranging the line chart to face the optical sensor unit and applying vibration to the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system;
measuring means for simultaneously detecting shake of the first line image and shake of the second line image from changes in sensor output values of a first line image in a second direction perpendicular to the line sensor and a second line image inclined by a predetermined angle from the first direction of the line sensor, measuring shake of the optical sensor unit in the first direction from the shake of the first line image, and measuring shake of the optical sensor unit in the second direction by correcting the shake of the second line image using the shake of the first line image;
A directional shake measuring device characterized by: 8. The directional fluctuation measuring device according to claim 7, wherein the inclination angle of the second line image is set to an angle larger than 0[deg.] and smaller than 45[deg.] . A program for causing a computer to function as a measuring device for directional fluctuation of an optical sensor unit incorporating an imaging optical system and a line sensor having pixels arranged in a first direction,
vibrating means for vibrating the optical sensor unit by arranging the line chart to face the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system;
measuring means detects fluctuation of the first line image from a change in sensor output value of the first line image in a second direction orthogonal to the line sensor;
detecting fluctuation of the second line image from a change in the sensor output value of the second line image inclined by a predetermined angle from the first direction of the line sensor;
measuring the shake of the optical sensor unit in the first direction from the shake of the first line image;
measuring the swing of the optical sensor unit in the second direction from the swing of the second line image;
functioning said computer as
A program, wherein the inclination angle of the second line image is set to an angle larger than 0° and smaller than 45° . A program for causing a computer to function as a measuring device for directional fluctuation of an optical sensor unit incorporating an imaging optical system and a line sensor having pixels arranged in a first direction,
vibrating means for vibrating the optical sensor unit by arranging the line chart to face the optical sensor unit so that a line image of the line chart is formed on the line sensor through the imaging optical system;
measuring means simultaneously detects the fluctuation of the first line image and the fluctuation of the second line image from changes in sensor output values between a first line image in a second direction perpendicular to the line sensor and a second line image inclined by a predetermined angle from the first direction of the line sensor;
measuring the shake of the optical sensor unit in the first direction from the shake of the first line image;
measuring the shake of the optical sensor unit in the second direction by correcting the shake of the second line image using the shake of the first line image;
A program characterized by causing the computer to function as

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