JP7330872B2 - FILTER INSPECTION SYSTEM AND FILTER INSPECTION METHOD IN PARTICLE ANALYZER - Google Patents

Description

The present invention relates to technology of a filter inspection system and a filter inspection method in a particle analyzer.

2. Description of the Related Art In the fields of optics, environment, and the like, analysis of fine particles attached to an object to be inspected is performed. In particular, in the field of environment, there is a demand for an analyzer capable of measuring deposits quickly and in real time and with high sensitivity in order to grasp the state of environmental pollution. Further, in the industrial field, for the purpose of production process management and quality control, there is a demand for an analyzer capable of rapidly measuring, in real time, the adhering substances adhering to industrial products and measuring them with high sensitivity. In the field of security, devices are used to analyze whether fine particles adhering to passengers' hands or baggage are dangerous substances at airports or the like.

There is also a need for a device that analyzes not only adhering particles but also atmospheric particles. For example, it is important to analyze the components of fine particles such as PM2.5, which is a problem of air pollution.

Patent Document 1 describes, "Providing a method for analyzing particles in real time while continuously collecting and concentrating them. The gas and/or particles of the substance to be detected adhering to the authentication object 2 are stripped by an air flow from the air supply unit 5. Then, the separated sample is sucked, concentrated and collected by the particle collection unit 10, ions of the sample are generated by the ion source unit 21, and mass-analyzed by the mass analysis unit 23. Detection is performed from the obtained mass spectrum. By determining the presence or absence of a mass spectrum derived from the target substance and displaying the result on the display unit 27, the detection target substance adhering to the authentication target 2 is continuously detected in real time, rapidly, and with low false alarms. and analytical methods are disclosed (see abstract).

Further, for example, Patent Document 2 describes "an authentication unit that authenticates an object, an air supply unit that generates jet airflows from at least two different directions with respect to the object, and gas and/or fine particles separated from the object. an intake unit for sucking the gas and/or fine particles separated from the object; a flow control unit for controlling the injection airflow of the air supply unit and the suction of the intake unit; the sucked gas and /or a microparticle collection unit that concentrates and collects a substance to be detected contained in microparticles, an analysis unit that analyzes the substance to be detected that is introduced from the microparticle collection unit, and a result of analysis by the analysis unit and an analysis determination control unit that determines the presence or absence of the substance to be detected” (see abstract).

WO2012/063796 WO2016/027320

The techniques described in Patent Literatures 1 and 2 also use a cyclone as a particulate concentrator/collector, and a heated primary filter is arranged at the end of the cyclone. The cyclone separates the inhaled gas from the particulates, and the particulates fall to the bottom of the cyclone. Falling particles are gasified in the heated primary filter, and this gas is introduced into the gas analyzer.

A secondary filter is installed between the primary filter and the gas analyzer to prevent dust that has passed through the primary filter or dust that has fallen during replacement of the primary filter from entering the gas analyzer. Hereinafter, the first-order filter and the second-order filter are collectively referred to as filters. When such a system is operated for a long period of time or when a large amount of particulates are collected, particulates may accumulate on the primary and secondary filters as described above.

When fine particles accumulate on the primary filter, the following problems occur. In other words, even if new particles fall on the primary filter, there is a problem that the heat is not transmitted and they are not vaporized, or the vaporized gas is adsorbed on the accumulated particles and does not reach the gas analyzer. Also, when fine particles are deposited on the secondary filter, the deposit is not sufficiently heated, and the molecules vaporized by the primary filter are adsorbed on the deposit on the secondary filter and do not reach the gas analyzer. As described above, cleaning or replacement of these filters requires disassembly of the apparatus, and analysis must be stopped during cleaning. In addition, when fine particles accumulate on the filter, pressure loss occurs in the filter, so the accumulation can be detected by the pressure value measured by the pressure gauge connected to the gas analyzer. Improvements are needed in determining whether deposition occurs in the

The present invention has been made in view of such a background, and an object of the present invention is to realize appropriate filter replacement.

In order to solve the above-described problems, the present invention provides a heated first filter unit, a suction unit connected to the downstream side of the first filter unit via a gas pipe to perform suction, and the first filter unit. A filter inspection gas is introduced between at least one second filter unit provided between one filter unit and the suction unit, and between the first filter unit and the second filter unit. Based on the first pressure value measured by the filter inspection gas introduction section, the first pressure measurement section installed downstream of the second filter section, and the first pressure measurement section, the a control unit that controls the filter inspection gas introduction unit; and a storage unit that stores a first threshold that is a predetermined threshold, wherein the control unit controls the first filter unit and the second and a non-filter inspection mode, which is a mode other than the filter inspection mode . The flow rate of the filter inspection gas is increased compared to when the non-filter inspection mode is performed, and the flow rate of the filter inspection gas is set to be equal to or higher than the flow rate flowing from the first filter section toward the suction section. and the suction flow rate by the suction unit is increased more than in the non-filter inspection mode, and the first pressure value measured by the first pressure measurement unit is the first pressure value stored in the storage unit. is lower than the threshold value, the output unit outputs an alarm prompting replacement of at least the second filter unit.
Other solutions will be described as appropriate in the embodiments.

According to the present invention, appropriate filter replacement can be realized.

1 is a schematic diagram of a particle analysis system in a first embodiment; FIG. FIG. 4 is a diagram showing signal intensity obtained by a gas analyzer when RDX fine particles, which are one type of explosive, are introduced into a cyclone collecting section. FIG. 10 is a diagram showing a gas flow state in the particle analyzer when the flow rate of the filter inspection gas introduced from the filter inspection gas introduction device is 0 L/min. FIG. 4 is a diagram showing a gas flow state in the particle analyzer when the flow rate of the filter inspection gas introduced from the filter inspection gas introduction device is 1 L/min. It shows the measured value of the pressure sensor when the flow rate of the filter inspection gas from the filter inspection gas introduction device is 0 L/min. It is a measured value of the pressure sensor when the flow rate of the filter inspection gas from the filter inspection gas introduction device is 1 L/min. 4 is a flow chart showing a procedure of filter inspection in the particle analysis system of the first embodiment; It is a figure which shows the modification of 1st Embodiment. It is a figure which shows the flow condition of the gas in 2nd Embodiment. 3 is a flow chart showing the procedure of filter inspection in the particle analysis system of the third embodiment of the first embodiment. FIG. 11 is a flow chart showing the procedure of filter inspection in the particle analysis system of the fourth embodiment; FIG. It is a figure which shows the structure of the microparticles|fine-particles analysis system in 5th Embodiment. FIG. 12 is a flow chart showing the procedure of filter inspection in the particle analyzer of the fifth embodiment; FIG. FIG. 12 is a flow chart showing a procedure of filter inspection in the particle analysis system of the sixth embodiment; FIG. FIG. 16 is a flow chart showing a procedure of filter inspection in the particle analysis system of the seventh embodiment; FIG. FIG. 13 is a flow chart showing a procedure of filter inspection in the particle analysis system of the eighth embodiment; FIG. FIG. 10 is a diagram showing the hardware configuration of a control device in the first to eighth embodiments; FIG.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, modes for carrying out the present invention (referred to as "embodiments") will be described with reference to the accompanying drawings. In addition, in this embodiment, specific examples according to the principle of the present invention are shown, but these are for understanding the present invention, and are never used to interpret the present invention in a limited manner. not a thing Modifications by combining or replacing the embodiments described below with known techniques are also included in the scope of the present invention. In addition, in all the drawings for describing the embodiments, the same reference numerals are given to the elements having the same functions, and the repeated description thereof will be omitted.

[First embodiment]
First, a first embodiment of the present invention will be described with reference to FIGS. 1 to 6. FIG. In the following description, where the flow rate is described in L/min, it is a converted value under atmospheric pressure of 1 atm.

(Particle analysis system 1)
FIG. 1 is a schematic diagram of a particle analysis system 1 according to the first embodiment.
The particle analysis system 1 has a particle analyzer 100 and a control device 200 to which an alarm device 201 and a storage device 202 are connected.
The control device 200 acquires a pressure value from the pressure sensor 131 of the particle analyzer 100 and controls the filter inspection gas introduction device 101 and the suction device 114 . The control device 200 also functions as a particle analysis processing device. Further, the storage device 202 stores threshold values Pt1, Pt2 and the like used for pressure comparison, which will be described later. Then, when the filter 120 needs to be replaced, the controller 200 issues an alarm from the alarm device 201 .

The particle analyzer 100 has a cyclone collecting section 111 , a heater 112 , a primary filter 121 , a secondary filter 122 , a filter inspection gas introduction device 101 , and a gas analyzer 130 . The cyclone collecting portion 111 has a fine particle suction port 111A, and the gas outside the cyclone collecting portion 111 is sucked through the fine particle suction port 111A by the suction of the suction device 114 connected to the cyclone collecting portion 111 . The following methods are conceivable as a method for obtaining an inspection object (not shown).

(Z1) By bringing the inspection object closer to the particle suction port 111A, the particles M adhering to the inspection object are sucked into the cyclone collecting section 111 .
(Z2) As in Patent Literatures 1 and 2, it is conceivable that a particle acquisition device (not shown) having an air nozzle (not shown) is installed upstream of the particle suction port 111A. In such a case, the gas is jetted from the air nozzle to blow the gas onto the inspection object to separate the fine particles M, and the separated fine particles M are sucked from the fine particle suction port 111A.

Since the concentration of the separated fine particles M in the air is very low, it is difficult to perform analysis by the gas analyzer 130 as it is. Therefore, the concentration of the separated fine particles M is increased by the cyclone collecting section 11 provided between the gas analyzer 130 and the fine particle suction port 111A. By doing so, analysis by the gas analyzer 130 can be performed.

The cyclone collecting section 111 separates and concentrates the fine particles M sucked together with the airflow. A mass spectrometer and an ion mobility spectrometer, which are typical gas analyzers 130, can generally suck only a sample flow rate of 1 L/min or less. For example, assume that the fine particles M are separated by injecting gas from an air nozzle at a flow rate of 40 L/min. If the gas analyzer 130 aspirates only 1 L/min of the airflow of 40 L/min, the inspection sensitivity becomes 1/40.

Therefore, as described above, the cyclone collection unit 111 installed between the fine particle suction port 111A and the gas analyzer 130 separates and concentrates the deposits. The cyclone collecting part 111 is capable of collecting a sample with a certain particle size and density or more to the lower part of the cyclone collecting part 111 by using centrifugal force. For example, under certain conditions, fine particles M having a particle size of 1 μm or more rotate inside the cyclone collecting portion 111 and are separated to the outer peripheral side inside the cyclone collecting portion 111 by centrifugal force. The radius of rotation decreases toward the bottom of the cyclone collecting section 111 . The separated fine particles M settle to the lower end of the cyclone collecting section 11 (arrow A1). Fine particles M other than that (particle size less than 1 μm) are discharged from suction pipe 117 by suction device 114 together with the airflow (arrow A2). The minimum particle size (separation limit particle size) of the fine particles M separated from the airflow by the rotational motion varies depending on the configuration of the cyclone collecting section 111 and the suction flow rate of the intake device 114 .

For example, since explosive fine particles, which are dangerous substances, usually have a particle size of about 5 to 100 μm, it is preferable to collect the fine particles M having this particle size. Chemical agents, harmful substances, dangerous substances, combustible substances, biological agents, viruses, bacteria, genes, environmental substances, etc. can be detected as long as they are attached to the object to be inspected, in addition to explosive fine particles. good.

The fine particles M collected in the lower part of the cyclone collecting part 111 settle to the heater 112 as they are. The heater 112 is equipped with a primary filter 121 . The fine particles M that have settled are collected by the primary filter 121 and heated by the heater 112 to be vaporized. Vaporized fine particles M pass through the secondary filter 122 and are introduced into the gas analyzer 130 . The secondary filter 122 has the role of preventing the fine particles M that have passed through the primary filter 121 from being introduced into the gas analyzer 130 . Hereinafter, the primary filter 121 and the secondary filter 122 are collectively referred to as a filter 120 as appropriate.

Also, the primary filter 121 may be removed from the particle analyzer 100 in order to clean or replace the primary filter 121 . At this time, the secondary filter 122 prevents the fine particles M accumulated inside the primary filter 121 and the cyclone collecting section 111 from dropping and being introduced into the gas analyzer 130 . The heater 112 heats the fine particles M at 200° C., for example. The temperature of the heater 112 may be a temperature at which the particles M to be collected can be vaporized, and may vary depending on the components of the particles M to be inspected.

The primary filter 121 and the secondary filter 122 may have a filtration accuracy capable of capturing fine particles M having a particle size of 1 μm or more. For example, as the primary filter 121 and the secondary filter 122, a stainless filter or the like having a filtration accuracy of 1 to 50 μm is used. The diameters and filtering accuracies of the primary filter 121 and the secondary filter 122 do not necessarily have to be the same.

The gas pipe 115 connecting the heater 112 and the secondary filter 122 and the gas pipe 116 connecting the secondary filter 122 and the gas analyzer 130 are also heated. This is to prevent molecules vaporized by the heater 112 from adhering to the inner wall of the gas pipe 115 .

As the gas analyzer 130, for example, a linear ion trap mass spectrometer or the like is used. As the gas analyzer 130, a quadrupole ion trap mass spectrometer, a quadrupole filter mass spectrometer, a triple quadrupole mass spectrometer, a time-of-flight mass spectrometer, a magnetic field mass spectrometer, etc. are applied. may Furthermore, an ion mobility analyzer or the like may be used as the gas analyzer 130 . Also, as the gas analyzer 130, a device in which an ion mobility analyzer and a mass spectrometer are connected can be used. A device using various light sources such as fluorescence, infrared rays, and ultraviolet rays may be used as the gas analyzer 130 . Alternatively, a semiconductor sensor may be used as gas analyzer 130 . In other words, the gas analyzer 130 may be anything as long as it can analyze gasified samples.

A case where the mass spectrometer is used as the gas analyzer 130 will be described below. The control device 200 analyzes the mass spectrum measured by the gas analyzer 130, and identifies the components of the fine particles M and specifies their concentrations from the mass spectrum. Storage device 202 pre-stores a database of dangerous goods. In this database, specified threshold values for identifying the components of dangerous substances and determining their concentrations are set. If the concentration of the detected component exceeds the specified threshold value, the control device 200 makes a positive determination. Not only the mass spectrometer but also other gas analyzers 130 such as an ion mobility spectrometer can analyze the fine particles M by collating with the database stored in the storage device 202 . Note that the pressure sensor 131 will be described later.

In this way, the particle analyzer 100 can automatically perform a series of analysis sequences in real time, including collecting the collected particles M with the cyclone collecting unit 111, heating and vaporizing them, and analyzing them with the gas analyzer 130. . Here, the problem with the particle analyzer 100 is that a large amount of particles M are sucked at once or operated for a long period of time. The problem is that the fine particles M are deposited on the inner wall of the portion 111 and the secondary filter 122 . For example, when fine particles M accumulate on the primary filter 121, even if new fine particles M fall on them, heat is not transmitted and they do not evaporate, or even if they evaporate, the fine particles M accumulated on the primary filter 121 are inspected. Adsorption of target molecules may occur. Similarly, if fine particles M are deposited on the secondary filter 122 , inspection target molecules that have flowed in from the primary filter 121 will be adsorbed by the sediment on the secondary filter 122 .

In such a state, inspection target molecules will not be introduced into the gas analyzer 130 , causing a decrease in the sensitivity of the particle analyzer 100 .

FIG. 2 is a diagram showing the signal intensity obtained by the gas analyzer 130 when RDX fine particles, which are one type of explosive, are introduced into the cyclone collector 111. FIG.
FIG. 2 compares the case where the secondary filter 122 is normal (symbol H1) and the case where deposits accumulate and the conductance (conduction state) is lowered (symbol H2). When sediment accumulates, the RDX gas vaporized in the primary filter 121 is adsorbed on the sediment on the secondary filter 122, so the sensitivity is lowered as indicated by symbol H2. The lines shown above the symbols H1 and H2 indicate standard deviations.

Returning to the description of FIG.
Thus, any buildup on filter 120 reduces the conductance of filter 120 . Here, the gas analyzer 130 is equipped with a pressure sensor 131 . For example, when a mass spectrometer using an atmospheric pressure ion source is used as the gas analyzer 130 , the pressure sensor 131 is installed in the ion source 132 connected to the gas pipe 115 . A decrease in conductance in filter 120 can be detected as a decrease in pressure obtained by pressure sensor 131 . However, the pressure is affected by both primary filter 121 and secondary filter 122 . Therefore, with the conventional technology, it is impossible to determine in which filter 120 the conductance drop has occurred. Note that the symbol M1 will be described later.

[Operation of filter inspection gas introduction device 101]
In view of the problems described above, the filter inspection gas introduction device 101 is provided in the gas pipe 115 in this embodiment. The filter inspection gas introduction device 101 introduces a filter inspection gas into the gas pipe 115 .
FIG. 3A is a diagram showing a gas flow state in the particle analyzer 100 when the flow rate of the filter inspection gas introduced from the filter inspection gas introduction device 101 is 0 L/min. FIG. 3B is a diagram showing the gas flow state in the particle analyzer 100 when the flow rate of the filter inspection gas introduced from the filter inspection gas introduction device 101 is 1 L/min.
Here, in this embodiment, the filter inspection gas introduction device 101 is installed in order to determine in which of the primary filter 121 and the secondary filter 122 the conductance drop has occurred. For example, assume that the particle analyzer 100 is in the following state (see FIG. 3A).

(Y1) The intake device 114 is stopped. Therefore, the cyclone collecting part 111 does not suck gas.
(Y2) The gas analyzer 130 sucks gas at Q=1 L/min.
(Y3) The flow rate Q1 of supply of the filter inspection gas by the filter inspection gas introduction device 101 is 0 L/min. Here, the conductances of the primary filter 121 and the secondary filter 122 are combined in series to obtain the relational expression shown in Equation (1) below. Equation (2) is derived from Equation (1).

Q={(C1+C2)/(C1・C2)} ⁻¹・(P−P1) (1)
P1=P−Q·{(C1+C2)/(C1·C2)} (2)

Here, Q is the flow rate sucked by the gas analyzer 130 and P1 is the measured value of the pressure sensor 131 in the gas analyzer 130 . Also, C1 is the conductance of the primary filter 121 and C2 is the conductance of the secondary filter 122 . And P is the upstream pressure of the primary filter 121 . If the intake device 114 is stopped, P is the atmospheric pressure (=1 atm).

Here, it is assumed that the suction flow rate Q of the gas analyzer 130 is constant. As can be seen from equation (2), pressure P1 measured by pressure sensor 131 is affected by both conductor C1 of primary filter 121 and conductor C2 of secondary filter 122 . That is, even if the pressure P1 measured by the pressure sensor 131 changes, it is unknown whether the conductance of the secondary filter 122 has changed.

On the other hand, from the situation shown in FIG. 3A, the filter inspection gas is introduced from the filter inspection gas introduction device 101 at a flow rate Q1=1 L/min, for example (see FIG. 3B). That is, Q1=Q. At this time, the introduction amount of the filter inspection gas introduced from the filter inspection gas introduction device 101 matches the suction flow rate of the gas analyzer 130 . Therefore, in the gas pipe 115, the flow rate (Q2 in FIG. 3B) on the upstream side of the filter inspection gas introduction device 101 is 0 L/min. Assuming that the measured value of the pressure sensor 131 of the gas analyzer 130 at this time is P1, the following relational expression (3) holds. Equation (4) is derived from Equation (3).

Q=C2(PP1) (3)
P1=P-(Q/C2) (4)

If the flow rate of the filter inspection gas introduced from the filter inspection gas introduction device 101 and the suction flow rate by the gas analyzer 130 match, the gas from the cyclone collection unit 111 does not pass through the primary filter 121 (Fig. 3B Q2 = 0 L/min). Therefore, the pressure loss of the primary filter 121 no longer affects the pressure P1. Therefore, the pressure P1 changes depending on the state of the secondary filter 122. FIG.

4A and 4B are diagrams showing measured values of the pressure sensor 131 when deposits are generated in the primary filter 121 and the secondary filter 122 and the conductance is lowered. FIG. 4A shows measured values of the pressure sensor 131 when the flow rate of the filter inspection gas from the filter inspection gas introduction device 101 is 0 L/min. FIG. 4B shows measured values of the pressure sensor 131 when the flow rate of the filter inspection gas from the filter inspection gas introduction device 101 is 1 L/min.

As shown in FIG. 4A, no matter which of the primary filter 121 and the secondary filter 122 has deposition, and even if both have deposition, the pressure P1 will be higher than the normal case where there is no deposition on either. is declining. This is because the pressure P1 changes when the conductance of either the primary filter 121 or the secondary filter 122 changes, as shown in equation (2). Under this condition, it cannot be judged whether or not the secondary filter 122 has accumulated when P1 has decreased.

On the other hand, in FIG. 4B, regardless of the presence or absence of deposition on the primary filter 121, the pressure P1 decreases when deposition occurs on the secondary filter 122. In FIG. As shown in equation (4), when 1 L/min of filter inspection gas is introduced from the filter inspection gas introduction device 101, the pressure P1 is determined by the conductance of the secondary filter 122. Because.

In this way, in a state in which the suction device 114 is stopped, the suction flow rate Q of the gas analyzer 130 and the introduction flow rate Q1 of the filter inspection gas introduction device 101 are made to match, so that the primary filter 121 to the pressure sensor 131 can obscure the effects of Therefore, by comparing the pressure P 1 before and after the filter inspection gas is introduced by the filter inspection gas introduction device 101 , it is possible to determine whether or not the fine particles M are deposited on at least the primary filter 121 .

The particle analyzer 100 in this embodiment has two states, an analysis mode and a filter inspection mode. is characterized by changing It is not always necessary to set the amount of the filter inspection gas introduced from the filter inspection gas introduction device 101 to 0 L/min in the analysis mode. For example, the filter inspection gas may be introduced into the gas pipe 115 at about 0.1 L/min from the filter inspection gas introduction device 101 in the analysis mode.

In this case, as shown in FIG. 1, the filter inspection gas introduction device 101 may introduce the analysis support substance M1 into the gas pipe 151 in addition to the role of filter inspection. The analysis support substance M1 is an internal standard substance, a dopant that increases the sensitivity of the gas analyzer 130, or the like. When the gas analyzer 130 is a mass spectrometer, the accuracy of the mass-to-charge ratio, which is the horizontal axis of the mass spectrum obtained as data, is important. If the output of the internal voltage of the gas analyzer 130 changes due to a temperature rise of the gas analyzer 130 or the like, the measured mass-to-charge ratio will deviate. In order to correct this deviation, an internal standard substance is generally introduced into the gas analyzer 130 at a constant concentration. Since the mass-to-charge ratio at which the internal standard substance is measured is known, the deviation can be corrected using that value as the reference value. Also, the introduction of the internal standard substance is important in terms of ensuring the soundness of the particle analyzer 100 . Here, an internal standard substance or a dopant may be used as the filter inspection gas. Alternatively, an internal standard substance or a dopant may be used in the analysis mode, and a filter inspection gas different from the internal standard substance or dopant may be used in the filter inspection mode.

The particle analyzer 100 in this embodiment can be operated unattended. Therefore, a function for automatically determining whether the sensitivity of the particle analyzer 100 is lowered is required. By always introducing a constant amount of the internal standard substance, the control device 200 can grasp the sensitivity state based on the gas analysis result of the substance.

If both positive and negative ions are being analyzed, it is advisable to introduce internal standards for both positive and negative ions. For example, 10,6-Tribromoresorcinol, 5-Bromo, 2-Chlorophenol, 4,4'-Dimethylbenzophenone and the like may be introduced. Considering the improvement of sensitivity, it is preferable to introduce an organic acid such as lactic acid when, for example, an explosive is an object to be inspected. By doing so, in the ionization stage of the gas analyzer 130, lactic acid is first ionized, lactate ions are added to the explosive, and are measured by the gas analyzer 130 as explosive ions of the lactate adduct. Become. In this manner, the internal standard substance and the dopant can be introduced from the filter inspection gas introduction device 101 at a rate of about 0.1 L/min in the analysis mode, and the introduction flow rate can be increased in the filter inspection mode.
The introduction of the analysis support substance M1 (internal standard substance, dopant) can be omitted.

(flowchart)
FIG. 5 is a flow chart showing the procedure of filter inspection in the particle analysis system 1 of the first embodiment.
Here, it is assumed that a mass spectrometer is used as the gas analyzer 130 and the suction flow rate of the gas analyzer 130 is 1 L/min. A pressure sensor 131 is installed in an ion source 132 of a gas analyzer 130 (mass spectrometer) and monitors the pressure of the ion source 132 . The filter inspection gas introduction device 101 is used not only for filter inspection but also as an internal standard substance gas introduction mechanism, and introduces the internal standard substance gas at a flow rate of 0.1 L/min in the analysis mode.

First, the particle analyzer 100 is operating in analysis mode (S101). In the analysis mode, the suction device 114 is in operation, and the fine particles M are collected by the cyclone phenomenon. In step S101, the analysis support substance M1 (internal standard substance or dopant) is introduced from the filter inspection gas introduction device 101 into the gas pipe 115 at 0.1 L/min. Here, as described above, the introduction of the analysis support substance M1 (internal standard substance, dopant) can be omitted.
In the analysis mode, the control device 200 constantly monitors the pressure P1 in the ion source 132, and continuously determines whether the pressure P1 is equal to or lower than the preset threshold value Pt1 (S102). ). The determination in step S102 is called a first check.
If the pressure P1 is greater than the threshold value Pt1 (S102→No), the control device 200 returns the process to step S101 to monitor the pressure P1 in the analysis mode.
When the monitored pressure P1 becomes equal to or less than the threshold value Pt1 (S102→Yes), the control device 200 causes the mode of the particle analyzer 100 to transition from the analysis mode to the filter inspection mode (S103).

After transitioning to the filter inspection mode, the control device 200 stops the intake device 114 (S104). By doing so, the pressure upstream from the primary filter 121 can be regarded as atmospheric pressure (1 atm). In this state, the control device 200 increases the introduction flow rate of the filter inspection gas from the filter inspection gas introduction device 101 from 0.1 L/min to 1 L/min (S105).
Then, the control device 200 determines whether or not the pressure P1 after executing step S105 is equal to or less than the threshold value Pt2 (S106). The determination in step S106 is called a second check. Note that the threshold Pt1 and the threshold Pt2 are values determined by the primary filter 121 and the secondary filter 122, and Pt1>Pt2.

If the pressure P1 is equal to or less than the threshold value Pt2 (S106→Yes), a decrease in the conductance of at least the secondary filter 122 is suspected. A notification is issued from the device 201 (S107).
On the other hand, if the pressure P1 is greater than the threshold value Pt2 (S106→No), it is suspected that the conductance of only the primary filter 121 has decreased. (S108).

In FIG. 5, when the pressure P1 is equal to or greater than the threshold value Pt2 in the second check, the primary filter 121 should always be replaced, but this need not always be the case. Conductances C1 and C2 of the primary filter 121 and the secondary filter 122 at the time of inspection can be calculated from equations (1) to (4) using the pressure P1 used for the first check and the second check. At this time, if the conductance C1 of the primary filter 121 is sufficiently large, the primary filter 121 need not be replaced.

FIG. 6 is a diagram showing a modification of the first embodiment.
According to the particle analyzer 100 of the first embodiment, the conductance of both the primary filter 121 and the secondary filter 122 can be calculated. For example, the second check may be performed periodically instead of performing the second check only when the pressure P1 monitored in the first check is equal to or less than the threshold value Pt1 as shown in FIG. As a result, the pressure P1 has a change in conductance over time as shown in FIG. The control device 200 can also estimate the predicted replacement time D1 (broken line L2) from the actual change in conductance (solid line L1) and inform the user of the estimated replacement time D1.

In the first embodiment, the internal pressure of the gas analyzer 130, specifically the pressure in the ion source 132 of the mass spectrometer or ion mobility spectrometer, is measured as the pressure P1 used for filter inspection. However, the pressure P1 used for filter inspection is not limited to this, and a value obtained by measuring the downstream side of the secondary filter 122 may be used. For example, the pressure in the gas pipe 116 connecting the secondary filter 122 and the gas analyzer 130 may be measured.

In the first embodiment, even if "Yes" is determined in the second check, "primary filter 121: deposit, secondary filter 122: deposit" and "primary filter 121: no deposit, secondary filter 122 : There is deposition". Here, generally, the primary filter 121 can be easily replaced by the user. However, the secondary filter 122 is difficult to replace by the user and is replaced by a dealer. Therefore, it is important for the user to know when to replace the secondary filter 122 . A "Yes" determination in the second check indicates that at least the secondary filter 122 has deposits, regardless of the state of the primary filter 121 . Therefore, the user can request the dealer when the second check results in "Yes". Thus, according to the first embodiment, the user can at least know when to replace the secondary filter 122 . As a result, appropriate replacement of the filter 120 can be realized.

Further, by using the pressure sensor 131 provided in the ion source 132 of the gas analyzer 130, there is no need to install a new pressure sensor 131. FIG. In the filter inspection mode, the air intake device 114 is stopped, so that the upstream pressure of the primary filter 121 can be considered as the atmospheric pressure. Therefore, the introduction flow rate Q1 of the filter inspection gas and the suction flow rate Q of the gas analyzer 130 can be easily matched. Furthermore, in the first embodiment, the first check is performed, and when the result of the first check is "Yes", the mode is changed to the filter inspection mode. By doing so, it is possible to prevent unnecessary filter inspection from being performed.

[Second embodiment]
FIG. 7 is a diagram showing gas flow conditions in the second embodiment.
In the first embodiment, the suction flow rate Q of the gas analyzer 130 and the introduction flow rate Q1 of the filter inspection gas introduction device 101 are matched, so that the pressure P1 is expressed by the formula (4). ing. However, these flow rates do not have to match perfectly. In FIG. 7, in the flow situation of the first embodiment, the suction flow rate Q of the gas analyzer 130 and the introduction flow rate Q1 of the filter inspection gas introduction device 101 match when Q2=0, and when Q1=Q, Equivalent to. Here, Q1 and Q2 are the same as in formulas (1) to (4). On the other hand, consider the case where neither Q1 nor Q2 is 0 L/min. If Px is the pressure between the primary filter 121 and the secondary filter 122, the following relational expressions (11) and (12) are obtained. Note that P, P1, Q, C1 and C2 in the following formulas (11) to (13) are the same as in formulas (1) to (4).

Q=Q1+Q2=C2(Px-P1) (11)
Q2=C1(P−Px) (12)

Eliminating Px from equations (11) and (12) yields the following equation (13).

Q=C2(P-P1)-(C2/C1)Q2 (13)

It can be seen that equation (13) becomes equation (3) when Q2 is zero. When judging the conductance C2 of the secondary filter 122 with the pressure P1, the larger the flow rate of Q1, the larger the error. Therefore, it is not always necessary to set Q2 to 0 L/min, but it is desirable to make determinations under conditions that make Q2 as small as possible. It is desirable that at least Q1 is greater than Q2.

Thus, even if the introduction flow rate Q1 of the filter inspection gas and the suction flow rate Q of the gas analyzer 130 do not match, the same effect as in the first embodiment can be obtained.

[Third Embodiment]
FIG. 8 is a flow chart showing the procedure of filter inspection in the particle analysis system 1 of the first embodiment of the third embodiment.
In the flowchart shown in FIG. 8, unlike the first embodiment, the control device 200 increases the introduction flow rate Q1 of the filter inspection gas to 2 L/min in the filter inspection mode (S105a). After that, the controller 200 also increases the suction flow rate Q of the gas analyzer 130 from 1 L/min in the analysis mode to 2 L/min (S201). After that, the control device 200 performs a second check. As shown in equation (4), the monitored pressure P1 decreases as the conductance C2 of the secondary filter 122 increases and as the flow rate Q decreases. If the amount of decrease in the conductance C2 of the secondary filter 122 is small, the decrease in the pressure P1 may not be detected if the resolution of the pressure sensor 131 is low. In order to increase the pressure change, it is desirable to increase the suction flow rate Q by the gas analyzer 130 . Since the gas analyzer 130 has an optimum suction flow rate in the analysis mode, in this embodiment, the suction flow rate is changed appropriately between the analysis mode and the filter inspection mode. In addition, each flow rate is not restricted to these values.

According to the third embodiment, even if the suction flow rate by the gas analyzer 130 changes during the filter inspection mode, the same effect as in the first embodiment can be obtained.

[Fourth Embodiment]
FIG. 9 is a flow chart showing the procedure of filter inspection in the particle analysis system 1 of the fourth embodiment.
In the fourth embodiment, the cleaning process (S301) of the primary filter 121 is performed after the first check (S102) with respect to the flowchart shown in FIG. 5, and then the third check (S302) is performed. As the cleaning process performed in step S301, for example, an air nozzle (not shown) is installed in the cyclone collecting part 111 or the heater 112, and the deposit on the primary filter 121 is cleaned by injecting high-speed gas to the primary filter 121. A possible method is to blow away the

After that, the control device 200 performs a third check (S302). The content of the third check is the same as the content of the first check.
In the third check, if the pressure P1 has recovered to a value greater than the threshold value Pt1 (S302→No), the control device 200 returns the process to step S101 and transitions to the analysis mode again. On the other hand, in the third check, if the pressure P1 remains below the threshold value Pt1 and does not recover after washing (S302→Yes), the primary filter 121 was not completely washed, or the conductance of the secondary filter 122 has decreased. Since it cannot be determined whether or not the control device 200 is on, the control device 200 transitions to the filter inspection mode of step S103.

According to the fourth embodiment, when "Yes" is detected in the first check, deposition of fine particles M on the primary filter 121 is suspected, and the primary filter 121 is first cleaned. After that, a third check similar to the first check is performed, and if "Yes" is still detected, deposition of fine particles M on the secondary filter 122 is suspected, so that the filter inspection mode is entered. By doing so, the number of times of transition to the filter inspection mode can be reduced, and the stop time of gas analysis by the gas analyzer 130 can be reduced.

[Fifth embodiment]
FIG. 10 is a diagram showing the configuration of a particle analysis system 1a according to the fifth embodiment, and FIG. 11 is a flow chart showing the procedure of filter inspection in the particle analysis apparatus 100a according to the fifth embodiment.
In the fifth embodiment, an internal pressure sensor 141 that measures the internal pressure of the cyclone collecting section 111 is connected to the suction pipe 117 of the cyclone collecting section 111 . In the above-described embodiments, the filter inspection is performed after the intake device 114 is stopped. I've been thinking However, in the fifth embodiment, since the internal pressure of the cyclone collecting section 111 can be measured, it is not necessary to stop the intake device 114 . If the intake device 114 is not stopped, the internal pressure P of the cyclone trapping section 111 becomes Pcyc, which is not the atmospheric pressure. Therefore, P=Pcyc in formulas (1) to (4) and formulas (11) to (13) of the fifth embodiment. Here, Pcyc is the measured value of the internal pressure sensor 141 .

In addition, in the flowchart shown in FIG. 11, the process of "stop the intake device 114" in step S104 is omitted from the flowchart shown in FIG. is omitted.

According to the fifth embodiment, the time required for stopping and restarting the intake device 114 is eliminated, and the filter inspection time can be shortened.

[Sixth Embodiment]
Conductance C2 at the time of inspection of secondary filter 122 can be calculated based on measured pressure P1 and equations (3) and (4). By applying the calculated conductance C2 of the secondary filter 122 to the equations (1) and (2), the conductance C1 of the primary filter 121 at the time of inspection can also be calculated. According to this technique, one pressure sensor 131 can calculate both the conductance C1 of the primary filter 121 and the conductance C2 of the secondary filter 122 . If the conductance of both filters 120 in a normal state is measured in advance, the control device 200 can determine whether replacement is necessary based on the conductance value at the time of inspection.

FIG. 12 is a flow chart showing the procedure of filter inspection in the particle analysis system 1 of the sixth embodiment.
In the flowchart shown in FIG. 12, after the second check in step S106, the control device 200 determines whether or not the calculated conductance C2 of the secondary filter 122 is less than the preset threshold value Ct2 ( S401). The determination in step S401 is called a fourth check. Here, the control device 200 calculates the conductance C2 of the secondary filter 122 based on the pressure P1 acquired before step S106 and the equation (4).

Then, when the conductance C2 of the secondary filter 122 is equal to or greater than the threshold value Ct2 (S401→No), the control device 200 executes the process of step S108.
If the conductance C2 of the secondary filter 122 is less than the threshold value Ct2 (S401→Yes), the control device 200 issues an alarm (replacement alarm) from the alarm device 201 indicating that the secondary filter 122 should be replaced. (S107a). Here, in step S107 of FIG. 5, a replacement alarm is issued to the effect that at least the secondary filter 122 should be replaced. On the other hand, in step S107a of FIG. 12, a replacement alarm is issued only for the secondary filter 122. FIG. Other processing is the same as the processing in FIG.

In step S401, the control device 200 may determine whether or not the conductance C1 of the primary filter 121 is greater than a preset threshold value Ct1.

Thus, according to the sixth embodiment, it is possible to clearly indicate whether or not the secondary filter 122 needs to be replaced. Note that the replacement determination threshold may be set by conductance, or may be set by the pressure measured by the pressure sensor 131 .

[Seventh Embodiment]
In the embodiments described so far, the first check and the second chuck are one-step threshold determination, but the present invention is not limited to this, and multi-step threshold determination may be performed. For example, two thresholds are set, and if the measured pressure P1 is equal to or less than the first threshold, the control device 200 issues a caution alarm for a decrease in the conductance of the filter 120, and does not necessarily require replacement. It doesn't have to be. Then, when the measured pressure P1 is equal to or less than the second threshold, the control device 200 issues an alarm (replacement alarm) prompting the replacement of the filter 120, and replaces or cleans the filter 120. A setting may be made such that the analysis mode cannot be returned until the conductance is restored to a normal level. Having multiple thresholds is effective for both the first check and the second check.

FIG. 13 is a flow chart showing the procedure of filter inspection in the particle analysis system 1 of the seventh embodiment.
In the flowchart shown in FIG. 13, after step S101, the control device 200 determines whether the pressure P1 is equal to or less than a preset threshold value Pt11 (S501). The determination processing in step S501 is called a fifth check.
Then, if the pressure P1 is greater than the threshold value Pt11 (S501→No), the control device 200 returns the process to step S101.
When the pressure P1 is equal to or less than the threshold value Pt11 (S501→Yes), the control device 200 determines whether the pressure P1 is equal to or less than a preset threshold value Pt12 (S502). The determination processing in step S502 is called a sixth check. Here, Pt11>Pt12.
Then, if the pressure P1 is greater than the threshold value Pt12 (S502→No), the control device 200 issues a caution alarm (S503), and returns the process to step S101. The caution alarm warns that the time to replace the filter 120 is approaching. Here, regardless of the primary filter 121 or the secondary filter 122, a warning is issued that the time to replace the filter 120 is approaching.
If the pressure P1 is equal to or less than the threshold value Pt12 (S502→Yes), the control device 200 advances the process to step S103.

Further, after step S105, the control device 200 determines whether or not the pressure P1 is equal to or less than a preset threshold value Pt21 (S511). The determination processing in step S511 is called a seventh check.
Then, if the pressure P1 is greater than the threshold value Pt21 (S511→No), the control device 200 issues a caution alarm (S512), and proceeds to step S108. The caution alarm warns that the time for replacement of the secondary filter 122 may be approaching.
When the pressure P1 is equal to or less than the threshold value Pt21 (S511→Yes), the control device 200 determines whether the pressure P1 is equal to or less than a preset threshold value Pt22 (S513). The determination processing in step S513 is called an eighth check. Here, Pt21>Pt22.
Then, if the pressure P1 is greater than the threshold value Pt22 (S512→No), the control device 200 advances the process to step S108.
If the pressure P1 is equal to or less than the threshold value Pt22 (S512→Yes), the control device 200 advances the process to step S107.
Other processing is the same as the processing shown in FIG.

In the process of FIG. 13, either the process of steps S501 to S503 or the process of steps S511 to S513 may be omitted.
Further, in the process of FIG. 13, threshold determination is performed in two stages, but determination may be performed in three or more stages.

According to the seventh embodiment, before the replacement of the filter 120 is warned, the user is alerted to the replacement of the filter 120, so the user can prepare for the replacement of the filter 120 in advance.

[Eighth Embodiment]
Moreover, both the primary filter 121 and the secondary filter 122 may have instrumental differences. Therefore, it is desirable to change the thresholds Pt1 and Pt2 each time the filter 120 is replaced with a new one. Therefore, when the filter 120 is replaced, it is preferable to shift to the filter inspection mode, grasp the conductance in a new state, and reset the threshold value based on the value.
FIG. 14 is a flow chart showing the procedure of filter inspection in the particle analysis system 1 of the eighth embodiment.
First, the filter 120 is replaced (S601). Here, the filter 120 to be replaced is either one of the primary filter 121 and secondary filter 122 .
After that, the particle analyzer 100 is operated in the analysis mode (S602), and the control device 200 acquires the pressure P1 measured by the pressure sensor 131 (S603).
Next, the control device 200 transitions the particle analyzer 100 to the filter inspection mode (S611).
Then, the control device 200 stops the intake device 114 (S612), and increases the flow rate of the filter inspection gas introduced from the filter inspection gas introduction device 101 from 0.1 L/min to 1 L/min (S613). The processing of steps S612 and S613 is the same as the processing of steps S104 and S105 in FIG.

Next, the control device 200 acquires the pressure P1 measured by the pressure sensor 131 (S614).
Then, the control device 200 calculates the conductances C1 and C2 based on the pressure P1 obtained in steps S603 and S614 and the equations (1) to (4) (S615).
Next, the control device 200 calculates threshold values Pt1 and Pt2 used for pressure determination based on the calculated conductances C1 and C2 (S621), and stores them in the storage device 202 (S622) to update the threshold values Pt1 and Pt2. do. Here, both the thresholds Pt1 and Pt2 are calculated and updated, but in practice, the threshold for the replaced filter 120 may be updated.

According to the eighth embodiment, it is possible to use a threshold that reflects the instrumental difference of the filter 120 before and after replacement.
Although the eighth embodiment is based on the first embodiment, it can also be applied to the second to seventh embodiments.

[Hardware configuration]
FIG. 15 is a diagram showing the hardware configuration of the control device 200 in the first to eighth embodiments.
The control device 200 has a memory 211 , a CPU (Central Processing Unit) 212 and a communication device 213 .
A program stored in the storage device 202 shown in FIG. 1 is loaded into the memory 211 . Then, the CPU 212 executes the program loaded in the memory 211 . The communication device 213 also acquires the pressure P1 from the pressure sensor 131 and transmits instructions to the filter inspection gas introduction device 101 and the intake device 114 .

A display device (not shown) connected to the control device 200 may display an alarm for replacement of the filter 120 (replacement alarm), an estimated replacement time, and the like. Alternatively, the controller 200 and the particle analyzer 100 may be connected via a network so that the particle analyzer 100 can be monitored from the outside.

The present invention is not limited to the above-described embodiments, and includes various modifications. For example, the above-described embodiments have been described in detail in order to explain the present invention in an easy-to-understand manner, and are not necessarily limited to those having all the configurations described. Also, part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment. Moreover, it is possible to add, delete, or replace a part of the configuration of each embodiment with another configuration.

Further, each configuration, function, control device 200, alarm device 201, storage device 202, and the like described above may be implemented in hardware by designing a part or all of them, for example, in an integrated circuit. Moreover, as shown in FIG. 15, each configuration, function, etc. described above may be realized by software by a processor such as the CPU 212 interpreting and executing a program for realizing each function. Information such as programs, tables, files, etc. that realize each function is stored in a hard disk (HD), or stored in a memory 211, a recording device such as a solid state drive (SSD), or an integrated circuit (IC) card. Alternatively, it can be stored in a recording medium such as an SD (Secure Digital) card, a DVD (Digital Versatile Disc), or the like.
Further, in each embodiment, control lines and information lines are those considered necessary for explanation, and not all control lines and information lines are necessarily shown on the product. In fact, it can be considered that almost all configurations are interconnected.

1, 1a particle analysis system (filter inspection system)
100, 100a Particle analyzer 101 Filter inspection gas introduction device (filter inspection gas introduction unit)
111 cyclone collecting unit 114 intake device (cyclone intake unit)
115, 116 gas pipe 121 primary filter (first filter section)
122 secondary filter (second filter section)
130 gas analyzer (suction unit)
131 pressure sensor (first pressure measuring unit)
132 ion source 141 internal pressure sensor (second pressure measuring unit)
200 control device (control unit)
201 alarm device (output unit)
202 storage device (storage unit; stores first threshold and second threshold)
Q1 flow rate (flow rate of gas for filter analysis)
M1 analysis support substance (internal standard substance, dopant)
S101 analysis mode (non-filter inspection mode)
S103 Filter inspection mode S105 Filter inspection gas flow rate 0.1 L/min→1 L/min (filter inspection gas flow rate changing step)
S107 Alarm notification (alarm output step)
S201 Gas analyzer flow rate 1 L/min → 2 L/min (suction flow rate increase step)

Claims (12)

a heated first filter section;
a suction unit that is connected to the downstream side of the first filter unit via a gas pipe and performs suction;
at least one second filter unit provided between the first filter unit and the suction unit;
a filter inspection gas introduction section for introducing a filter inspection gas between the first filter section and the second filter section;
a first pressure measurement unit installed downstream of the second filter unit;
a control unit that controls the filter inspection gas introduction unit based on the first pressure value measured by the first pressure measurement unit;
a storage unit that stores a first threshold that is a predetermined threshold;
has
The control unit
Execute a filter inspection mode for inspecting continuity in the first filter unit and the second filter unit, and a non-filter inspection mode that is a mode other than the filter inspection mode,
During the filter inspection mode,
The flow rate of the filter inspection gas introduced from the filter inspection gas introducing portion is increased more than when the non-filter inspection mode is performed, and the flow rate of the filter inspection gas is increased to the first filter. is equal to or greater than the flow rate flowing from the part toward the suction part,
increasing the suction flow rate by the suction unit than in the non-filter inspection mode;
When the first pressure value measured by the first pressure measurement unit is lower than the first threshold value stored in the storage unit, the output unit prompts replacement of at least the second filter unit. A filter inspection system in a particle analyzer, characterized by outputting an alarm. a heated first filter section;
a suction unit that is connected to the downstream side of the first filter unit via a gas pipe and performs suction;
at least one second filter unit provided between the first filter unit and the suction unit;
a filter inspection gas introduction section for introducing a filter inspection gas between the first filter section and the second filter section;
a first pressure measurement unit installed downstream of the second filter unit;
a control unit that controls the filter inspection gas introduction unit based on the first pressure value measured by the first pressure measurement unit;
a storage unit that stores a first threshold that is a predetermined threshold;
has
The upstream of the first filter unit is connected to a cyclone collection unit,
A cyclone suction unit connected to the cyclone collection unit is controlled by the control unit,
The control unit
Execute a filter inspection mode for inspecting continuity in the first filter unit and the second filter unit, and a non-filter inspection mode that is a mode other than the filter inspection mode,
During the filter inspection mode,
stopping the cyclone intake,
The flow rate of the filter inspection gas introduced from the filter inspection gas introducing portion is increased more than when the non-filter inspection mode is performed, and the flow rate of the filter inspection gas is increased to the first filter. is equal to or greater than the flow rate flowing from the part toward the suction part,
When the first pressure value measured by the first pressure measurement unit is lower than the first threshold value stored in the storage unit, the output unit prompts replacement of at least the second filter unit. A filter inspection system in a particle analyzer, characterized by outputting an alarm. a heated first filter section;
a suction unit that is connected to the downstream side of the first filter unit via a gas pipe and performs suction;
at least one second filter unit provided between the first filter unit and the suction unit;
a filter inspection gas introduction section for introducing a filter inspection gas between the first filter section and the second filter section;
a first pressure measurement unit installed downstream of the second filter unit;
a second pressure measuring unit for measuring the internal pressure of the cyclone collection unit connected upstream of the first filter unit;
a control unit that controls the filter inspection gas introduction unit based on the first pressure value measured by the first pressure measurement unit;
a storage unit that stores a first threshold that is a predetermined threshold;
has
The control unit
Execute a filter inspection mode for inspecting continuity in the first filter unit and the second filter unit, and a non-filter inspection mode that is a mode other than the filter inspection mode,
During the filter inspection mode,
The flow rate of the filter inspection gas introduced from the filter inspection gas introducing portion is increased more than when the non-filter inspection mode is performed, and the flow rate of the filter inspection gas is increased to the first filter. is equal to or greater than the flow rate flowing from the part toward the suction part,
Based on the second pressure value measured by the second pressure measurement unit and the first pressure value measured by the first pressure measurement unit, the first pressure value is the A filter inspection system for a particle analyzer, wherein an alarm prompting replacement of at least the second filter unit is output from an output unit when the threshold value is lower than the first threshold value stored in a storage unit. a heated first filter section;
a suction unit that is connected to the downstream side of the first filter unit via a gas pipe and performs suction;
at least one second filter unit provided between the first filter unit and the suction unit;
a filter inspection gas introduction section for introducing a filter inspection gas between the first filter section and the second filter section;
a first pressure measurement unit installed downstream of the second filter unit;
a control unit that controls the filter inspection gas introduction unit based on the first pressure value measured by the first pressure measurement unit;
a storage unit that stores a first threshold that is a predetermined threshold and a second threshold that is different from the first threshold and has a value larger than the first threshold;
has
The control unit
Execute a filter inspection mode for inspecting continuity in the first filter unit and the second filter unit, and a non-filter inspection mode that is a mode other than the filter inspection mode,
In the non-filter inspection mode, when the first pressure value is equal to or less than the second threshold value, cleaning of the first filter unit is performed,
After the cleaning of the first filter unit is completed, if the first pressure value is equal to or less than the second threshold value, transition to the filter inspection mode,
During the filter inspection mode,
The flow rate of the filter inspection gas introduced from the filter inspection gas introducing portion is increased more than when the non-filter inspection mode is performed, and the flow rate of the filter inspection gas is increased to the first filter. is equal to or greater than the flow rate flowing from the part toward the suction part,
When the first pressure value measured by the first pressure measurement unit is lower than the first threshold value stored in the storage unit, the output unit prompts replacement of at least the second filter unit. A filter inspection system in a particle analyzer, characterized by outputting an alarm. The control unit
In the filter inspection mode, the flow rate of the filter inspection gas is controlled so that the flow rate of the filter inspection gas introduced from the filter inspection gas introducing portion matches the suction flow rate of the suction portion. The filter inspection system in the particle analyzer according to any one of claims 1 to 4 . The suction unit is a gas analyzer,
The first pressure measurement unit is
The filter inspection system for a particle analyzer according to any one of claims 1 to 4, wherein the filter inspection system is connected to an ion source of the gas analyzer. The filter inspection gas introduction section includes:
7. The filter inspection system for a particle analyzer according to claim 6 , wherein at least one of an internal standard substance and a dopant is introduced into said gas pipe. The storage unit stores a second threshold that is different from the first threshold and has a value larger than the first threshold, and the control unit is configured to:
4. The filter inspection mode is changed to the filter inspection mode when the first pressure value is equal to or less than the second threshold in the non-filter inspection mode. A filter inspection system in the particle analyzer according to 1. The control unit
5. The filter inspection system in the particle analyzer according to any one of claims 1 to 4, wherein the replacement time is predicted based on the change in conductance of the filter with time calculated in the filter inspection mode. . The control unit
Based on the first pressure value measured by the first pressure measurement unit, the flow rate sucked by the suction unit, and the pressure value upstream of the first filter unit, the first filter calculating at least one of the conductance of the section and the conductance of the second filter section;
2. Based on at least one of the calculated conductance of the first filter section and the calculated conductance of the second filter section, the conduction state of the second filter section is determined. 5. A filter inspection system in a particle analyzer according to any one of claims 4 to 7 . The control unit
When the filter is replaced, the mode is changed to the filter inspection mode, the conductance of the replaced one of the first filter unit and the second filter unit is calculated, and the calculated value is stored in the storage unit. 5. The filter inspection system in the particle analyzer according to any one of claims 1 to 4, wherein the threshold value is updated. a heated first filter section;
a suction unit that is connected to the downstream side of the first filter unit via a gas pipe and performs suction;
at least one second filter unit provided between the first filter unit and the suction unit;
a filter inspection gas introduction section for introducing a filter inspection gas between the first filter section and the second filter section;
a first pressure measurement unit installed downstream of the second filter unit;
a control unit that controls the filter inspection gas introduction unit based on the first pressure value measured by the first pressure measurement unit;
a storage unit that stores a first threshold that is a predetermined threshold;
has
The control unit
Execute a filter inspection mode for inspecting continuity in the first filter unit and the second filter unit, and a non-filter inspection mode that is a mode other than the filter inspection mode,
During the filter inspection mode,
The flow rate of the filter inspection gas introduced from the filter inspection gas introducing portion is increased from that when the non-filter inspection mode is performed, and flows from the first filter portion toward the suction portion. a step of changing the flow rate of the filter inspection gas to be equal to or higher than the flow rate;
a suction flow rate increasing step for increasing the suction flow rate by the suction unit compared to that in the non-filter inspection mode;
When the first pressure value measured by the first pressure measurement unit is lower than the first threshold value stored in the storage unit, the output unit prompts replacement of at least the second filter unit. and an alarm output step of outputting an alarm.

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