JP7333741B2 - processing equipment - Google Patents

Description

The present invention relates to a processing apparatus that processes a workpiece while supplying a processing fluid.

2. Description of the Related Art There is known a processing apparatus that holds various workpieces such as semiconductor wafers, resin package substrates, glass substrates, and ceramic substrates on a chuck table and cuts them with a cutting blade while supplying a machining fluid (see, for example, Patent Document 1). ). Also known is a processing apparatus that grinds a workpiece held by a chuck table with a grinding wheel while supplying a processing fluid.

JP-A-2009-027030

In the processing equipment, when the workpiece held on the chuck table is taken out after processing, it is desired to remove the processing liquid by blowing air with an air gun or the like to remove the processing liquid, but the air is supplied only spotwise. , there is a problem that it takes time to remove the working fluid. In particular, in the case of a processing apparatus that does not have a cleaning mechanism or a drying mechanism in the processing apparatus, it is necessary to remove the processing liquid for each workpiece, which is a hidden and painful task. Therefore, a configuration was devised to install an air curtain in the partition between the processing area and the loading/unloading area. There were issues such as whether there was

SUMMARY OF THE INVENTION The present invention has been made in view of such problems, and an object thereof is to provide a machining apparatus capable of completely removing the machining liquid even if the machining apparatus is of a compact type.

In order to solve the above-described problems and achieve the object, the processing apparatus of the present invention includes a chuck table that holds a workpiece on a holding surface, is positioned in a loading/unloading area and a machining area, and holds the workpiece on the chuck table. a machining unit for machining the workpiece while supplying machining fluid to the workpiece; a shielding cover covering the chuck table and the machining unit; A slide door that opens and closes the opening when the workpiece is carried in and out of the chuck table positioned in the loading/unloading area, and the machining liquid that is adhered to the workpiece held on the chuck table by air injection and a draining unit for removing the , the sliding door slides in a direction parallel to the holding surface of the chuck table to open and close, and the draining unit is fixed to the slide door and positioned in the loading/unloading area. It also has an air curtain for injecting air onto the workpiece while sliding along the holding surface of the chuck table.

An air supply path communicating with the air curtain may be provided with an on-off valve, and an operation part for opening and closing the on-off valve may be arranged in a handle portion to be gripped when opening and closing the slide door.

The present invention can completely remove the working liquid even with a compact machine model.

FIG. 1 is a perspective view showing a configuration example of a processing device according to an embodiment. FIG. 2 is a cross-sectional view showing a configuration example of a processing unit of the processing apparatus of FIG. 3 is a top view showing one state of the shielding cover and the slide door of the processing apparatus of FIG. 1. FIG. 4 is a top view showing another state of the shielding cover and the slide door of the processing apparatus of FIG. 1. FIG. 5 is a sectional view showing a draining unit of the processing apparatus of FIG. 1. FIG.

A form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in configuration can be made without departing from the gist of the present invention.

[Embodiment]
A processing apparatus 1 according to an embodiment of the present invention will be described based on the drawings. FIG. 1 is a perspective view showing a configuration example of a processing device 1 according to an embodiment. FIG. 2 is a cross-sectional view showing a configuration example of the processing unit 20 of the processing apparatus 1 of FIG. A processing device 1 according to the embodiment is a cutting device that cuts a workpiece 100 while supplying a processing fluid 24 (see FIG. 2). The processing device 1 is not limited to this in the present invention, and may be a grinding device that grinds the workpiece 100 with a grinding wheel while supplying a working fluid (grinding fluid).

In the embodiment, the workpiece 100 to be cut by the processing apparatus 1 is, as shown in FIG. Wafers such as optical device wafers. A workpiece 100 has devices 103 formed in regions partitioned by a plurality of division lines 102 formed in a grid pattern on a flat surface 101 . The workpiece 100 has an adhesive tape 105 adhered to the back surface 104 of the back side of the front surface 101 , and an annular frame 106 is attached to the outer edge of the adhesive tape 105 . Note that the workpiece 100 is not limited to this in the present invention, and may be a rectangular resin package substrate having a plurality of resin-sealed devices, a glass substrate, a ceramic substrate, or the like.

The processing apparatus 1 includes a chuck table 10, a processing unit 20, a shielding cover 30, a slide door 40, and a draining unit 50, as shown in FIG. The processing apparatus 1 has two areas inside the shielding cover 30: a loading/unloading area 3 for loading and unloading the workpiece 100 to and from the chuck table 10, and a processing area 4 for cutting the workpiece 100 by the processing unit 20. forming an area. A plate-like partition 5 is provided inside the shielding cover 30 to separate the carrying-in/out area 3 and the processing area 4 . The partition 5 is formed with a notch 6 through which the chuck table 10 passes.

Chuck table 10 holds workpiece 100 . The chuck table 10 has a flat holding surface 11 for holding the workpiece 100 formed on the upper surface thereof, and has a disk-shaped suction portion made of porous ceramic or the like having a large number of porous holes. It is disk-shaped with a frame that is fitted into and fixed to the recess of the body. The holding surface 11 is formed parallel to the horizontal XY plane. The chuck table 10 is movable in the X-axis direction, which is one horizontal direction, by an X-axis moving unit (not shown), and is rotatable by a rotary drive source (not shown). The chuck table 10 has a suction portion connected to a vacuum suction source (not shown) through a vacuum suction path (not shown), and sucks and holds the workpiece 100 on the entire holding surface 11 . A plurality of clamping portions 12 for clamping the annular frame 106 are provided around the chuck table 10, as shown in FIG.

The chuck table 10 is moved along the X-axis direction by the X-axis movement unit to pass through the notch 6 of the partition 5 and move between the carrying-in/out area 3 and the machining area 4 . The chuck table 10 is positioned in the loading/unloading area 3 and the machining area 4 by such movement by the X-axis movement unit.

The processing unit 20 is provided within the processing area 4 . As shown in FIG. 2 , the machining unit 20 forms cutting grooves 200 by machining the workpiece 100 held on the chuck table 10 positioned in the machining area 4 along the dividing line 102 . The machining unit 20 includes a cutting blade 21, a spindle 22, and a machining liquid supply section 23, as shown in FIG. The cutting blade 21 is rotated about an axis parallel to the Y-axis to cut the workpiece 100 held on the chuck table 10 . The spindle 22 is provided along the Y-axis direction, which is another horizontal direction and is perpendicular to the X-axis direction, and supports the cutting blade 21 at its tip so as to be rotatable around the axis. The spindle 22 is rotationally driven around the Y-axis. The machining unit 20 is provided so as to be movable in the Y-axis direction by a Y-axis movement unit (not shown) with respect to the workpiece 100 held on the chuck table 10, and can be moved in the XY plane by a Z-axis movement unit (not shown). is movably provided in the Z-axis direction perpendicular to and parallel to the vertical direction. The machining fluid supply unit 23 supplies machining fluid 24 supplied from a machining fluid supply source (not shown) to the side of the cutting edge of the cutting blade 21 . The working fluid 24 is cutting water in the embodiment, such as pure water.

The processing device 1 further includes a camera 60 as shown in FIG. The camera 60 is provided within the loading/unloading area 3 . The camera 60 includes an imaging element that captures an image of the workpiece 100 loaded and held on the chuck table 10 positioned in the loading/unloading area 3 . The imaging device is, for example, a CCD (Charge-Coupled Device) imaging device or a CMOS (Complementary MOS) imaging device. Camera 60 detects the position of workpiece 100 on holding surface 11 by imaging workpiece 100 .

The processing apparatus 1 further includes a control unit 70 that controls each component, as shown in FIG. The control unit 70 controls each component of the processing device 1 to cause the processing device 1 to perform each operation related to cutting of the workpiece 100 .

Control unit 70 includes a computer system in an embodiment. The control unit 70 includes an arithmetic processing unit having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as ROM (read only memory) or RAM (random access memory), and an input/output interface device. and The arithmetic processing unit performs arithmetic processing according to a computer program stored in the storage device, and outputs control signals for controlling the processing device 1 to each component of the processing device 1 via the input/output interface device. do.

The processing apparatus 1 further includes a display unit 71 and an input unit 73, as shown in FIG. Both the display unit 71 and the input unit 73 are connected to the arithmetic processing device of the control unit 70 via the input/output interface device of the control unit 70 . The display unit 71 displays images and the like of the state of each operation related to cutting. The display unit 71 is configured by a liquid crystal display device or the like in the embodiment. The input unit 73 is used when the operator inputs and registers processing conditions and the like of the processing unit 20 . In the embodiment, the input unit 73 is configured by at least one of a touch panel provided on the display unit 71, buttons, a keyboard, and the like.

3 is a top view showing one state of the shielding cover 30 and the slide door 40 of the processing apparatus 1 of FIG. 1. FIG. 4 is a top view showing another state of the shielding cover 30 and the slide door 40 of the processing apparatus 1 of FIG. 1. FIG. FIG. 5 is a cross-sectional view showing the draining unit 50 of the processing apparatus 1 of FIG. 3 to 5 omit the clamp portion 12 of the chuck table 10 and the adhesive tape 105 and annular frame 106 of the workpiece 100. FIG.

The shielding cover 30 covers the chuck table 10 and the processing unit 20, as shown in FIGS. The shielding cover 30 is provided with an opening 31 that allows passage of the workpiece 100 in front of the loading/unloading area 3 .

As shown in FIGS. 1, 3 and 4, the slide door 40 is provided on the shielding cover 30 so as to be slidable in parallel with the holding surface 11. As shown in FIG. The slide door 40 slides with respect to the shielding cover 30 between a position where at least part of the opening 31 is opened and a position where the opening 31 is closed. The slide door 40 slides in a direction parallel to the holding surface 11 of the chuck table 10 to open and close the opening 31 when the workpiece 100 is loaded/unloaded to/from the chuck table 10 positioned in the loading/unloading area 3 . In the embodiment, the slide door 40 is connected at both ends in the vertical direction to both ends in the vertical direction of the opening 31 of the shielding cover 30 so as to be movable parallel to the X-axis direction.

One end (right side in FIGS. 1, 3 and 4) of the sliding door 40 in the X-axis direction is on the same side of the opening 31 of the shielding cover 30 (right side in FIGS. 1, 3 and 4). closing the opening 31, as shown in FIG. One end of the slide door 40 in the X-axis direction is separated from the side end on the same side of the opening 31 of the shielding cover 30 to the left in FIGS. Then, the opening 31 is at least partially opened. One end of the slide door 40 in the X-axis direction is further spaced to the left in FIGS. The opening 31 is opened to the maximum by being closest to the side edge of the middle left side).

The slide door 40 includes a front plate 41, side plates 42, a handle portion 43, and an operation portion 44, as shown in FIGS. The front plate 41 is a plate on the front side of the slide door 40 and covers the front side of the opening 31 when the slide door 40 closes the opening 31 . The side plate 42 is provided at one end of the front plate 41 in the X-axis direction so as to be substantially orthogonal to the front plate 41 . The side plate 42 passes in front of and below the camera 60 when the slide door 40 is opened and closed. The side plate 42 is formed extending in the Y-axis direction. The side plate 42 has a length in the Y-axis direction longer than the diameter of the holding surface 11 of the chuck table 10, and both ends of the side plate 42 protrude from both ends of the holding surface 11 of the chuck table 10 in the Y-axis direction. The side plate 42 slides the slide door 40 from the position where the opening 31 is closed to the position where the opening 31 is opened to the maximum, so that the entire surface of the holding surface 11 of the chuck table 10 is X-shaped as shown in FIG. Move to scan in the axial direction.

The handle portion 43 is provided on the front side of the front plate 41 . The handle portion 43 generally faces the side plate 42 in the Y-axis direction. The handle portion 43 is gripped by the operator when opening and closing the slide door 40 . The operation part 44 is arranged on the handle part 43 and can be pressed down while holding the handle part 43 by the operator. As shown in FIG. 5, the operating portion 44 is connected to an on-off valve 53 provided in an air supply path 52 communicating with an air curtain 51 of a draining unit 50, which will be described later. The operation unit 44 closes the on-off valve 53 when the operator does not press it, and opens the on-off valve 53 when the operator presses it.

The draining unit 50 includes an air curtain 51, an air supply path 52, and an on-off valve 53, as shown in FIG. The draining unit 50 is fixed to the slide door 40. - 特許庁Therefore, the draining unit 50 can be installed even in a compact model of the processing apparatus 1 . The air curtain 51 is provided on the side plate 42 of the slide door 40 so as to extend in the Y-axis direction in the same manner as the side plate 42 and directed downward. Therefore, the air curtain 51 generally faces the handle portion 43 and the operation portion 44 in the Y-axis direction. The air curtain 51 is positioned in the carry-in/out area 3 by moving the side plate 42 so as to scan the entire surface of the holding surface 11 of the chuck table 10 in the X-axis direction as the slide door 40 is slid to open and close. Air 55 is injected to the entire surface of the workpiece 100 while sliding along the holding surface 11 of the chuck table 10 . The air supply path 52 communicates with the air curtain 51 and supplies air 55 to the air curtain 51 . A part of the air supply path 52 is formed inside the side plate 42 of the slide door 40 . The air supply path 52 has an on-off valve 53 .

The processing apparatus 1 according to the embodiment is a compact type processing apparatus in which the air curtain 51 cannot be arranged at the lower end of the partition 5 .

The operation of the processing device 1 according to the embodiment will be described below. First, the operator of the processing apparatus 1 grips the handle portion 43 and slides the slide door 40 to open the opening 31 . The workpiece 100 is carried in and placed, and the slide door 40 is slid to close the opening 31 . After that, the processing apparatus 1 suction-holds the workpiece 100 placed on the holding surface 11 by the chuck table 10 , and detects the position of the workpiece 100 on the holding surface 11 by the camera 60 . After that, the processing apparatus 1 moves the chuck table 10 holding the workpiece 100 by suction from the loading/unloading area 3 to the processing area 4 by the X-axis movement unit.

As shown in FIG. 2, the processing apparatus 1 supplies a processing fluid 24 from a processing unit 20 to a workpiece 100 on a chuck table 10 positioned in a processing area 4, while moving an X-axis movement unit, a rotation drive source, The chuck table 10 and the machining unit 20 are relatively moved along the dividing line 102 by the Y-axis moving unit and the Z-axis moving unit, and the machining unit 20 cuts the dividing line 102 of the workpiece 100. A cutting groove 200 is formed. After finishing the cutting of the workpiece 100 by the machining unit 20, the machining apparatus 1 uses the X-axis movement unit to machine the chuck table 10 sucking and holding the workpiece 100 having the cutting grooves 200 formed thereon. It is moved from the area 4 to the loading/unloading area 3 .

After positioning the chuck table 10 sucking and holding the workpiece 100 after processing in the carry-in/out area 3, the operator of the processing apparatus 1 grasps the handle portion 43 and pushes down the operation portion 44 to open the slide door 40. Slide to open the opening 31 . In the processing apparatus 1, when the operator slides the slide door 40 while pressing the operation unit 44, the air curtain 51 is positioned in the carry-in/out area 3 in accordance with the slide of the slide door 40. By injecting air 55 onto the workpiece 100 after machining while sliding along the holding surface 11 of 10, the machining liquid 24 adhering to the surface 101 of the workpiece 100 after machining is removed.

After that, if the machining fluid 24 adhering to the surface 101 of the workpiece 100 after machining remains, the operator of the machining apparatus 1 waits until the remaining machining fluid 24 is completely removed. repeats the sliding operation of the sliding door 40 while pressing the operating portion 44, and repeats the injection of the air 55 by the air curtain 51 to the workpiece 100 after machining.

The operator of the processing apparatus 1 removes all the processing liquid 24 from the surface 101 of the workpiece 100 after processing, and then slides the slide door 40 to open the opening 31 . After that, the processing apparatus 1 cancels suction holding of the workpiece 100 on the holding surface 11 by the chuck table 10 . An operator of the processing apparatus 1 unloads the processed workpiece 100 from the holding surface 11 of the chuck table 10 positioned in the loading/unloading area 3 through the opening 31 .

After unloading the workpiece 100 after processing, the operator of the processing apparatus 1 slides the slide door 40 while pressing the operation unit 44 to hold the chuck table 10 positioned in the loading/unloading area 3. The working fluid 24 adhering to the surface 11 can be removed.

The processing apparatus 1 according to the embodiment having the above configuration is positioned in the carry-in/out area 3 by the air curtain 51 of the draining unit 50 fixed to the slide door 40 as the slide door 40 is slid. By injecting air 55 onto the workpiece 100 while sliding along the holding surface 11 of the chuck table 10, the machining liquid 24 adhering to the surface 101 of the workpiece 100 after machining is removed. For this reason, the processing device 1 according to the embodiment has the effect that the draining unit 50 can be attached to the slide door 40 even in a compact model of the processing device 1 . Further, the processing apparatus 1 according to the embodiment repeats the sliding operation of the slide door 40 while pressing the simple operation portion 44 until the remaining processing liquid 24 is completely removed. Since the injection of the air 55 to the workpiece 100 can be easily repeated as many times as desired, there is an effect that the machining fluid 24 can be completely removed reliably and easily.

Further, since the processing apparatus 1 according to the embodiment hardly requires any new operation by the operator for the injection of the air 55 by the air curtain 51, the operator's operation is efficient. Moreover, since the processing apparatus 1 according to the embodiment allows the operator to freely change the sliding speed of the slide door 40, the sliding speed of the air curtain 51 that injects the air 55 can be freely changed.

Further, in the processing apparatus 1 according to the embodiment, the air supply path 52 communicating with the air curtain 51 is provided with an on-off valve 53, and the handle portion 43 that is gripped when opening and closing the slide door 40 is provided with an operation portion 44 for opening and closing the on-off valve 53. is placed. Therefore, the processing apparatus 1 according to the embodiment has the effect that the operation of injecting the air 55 over the entire surface 101 of the workpiece 100 after processing can be repeated more easily.

In addition, the processing apparatus 1 according to the embodiment automatically causes the processed workpiece 100 to pass through the air curtain 51 and injects the air 55 until the operator comes to the unloading operation of the processed workpiece 100. Therefore, the workpiece 100 after machining on the holding surface 11 of the chuck table 10 is placed in the loading/unloading area 3, which is a closed area with the opening 31 closed, so that the surface 101 and the like are not machined. It remains wet with the liquid 24 . For this reason, in the processing apparatus 1 according to the embodiment, the working liquid 24 evaporates and the surface 101 of the processed workpiece 100 and the like evaporate until the operator comes to carry out the unloading operation of the processed workpiece 100. It is possible to prevent contaminants from sticking and becoming difficult to remove.

In addition, in the processing apparatus 1 according to the embodiment, since the handle portion 43 and the operation portion 44 and the air curtain 51 that injects the air 55 generally face each other in the Y-axis direction, the operator presses down the operation portion 44. Since the air curtain 51 jets the air 55 toward a position generally behind the hand that slides the slide door 40, the operator can intuitively recognize the jetting position of the air 55. - 特許庁

In addition, this invention is not limited to the said embodiment. That is, various modifications can be made without departing from the gist of the present invention.

REFERENCE SIGNS LIST 1 processing device 3 loading/unloading area 4 processing area 10 chuck table 11 holding surface 20 processing unit 24 processing fluid 30 shielding cover 31 opening 40 slide door 43 handle 44 operation unit 50 draining unit 51 air curtain 52 air supply path 53 on-off valve 55 Air 100 Workpiece

Claims (2)

a chuck table that holds the workpiece on the holding surface and is positioned in the loading/unloading area and the machining area;
a machining unit for machining while supplying machining fluid to the workpiece held on the chuck table;
a shielding cover that covers the chuck table and the processing unit;
a slide door provided in an opening of the shielding cover that allows passage of the workpiece, and opening and closing the opening when the workpiece is carried in and out of the chuck table positioned in the loading/unloading area;
a draining unit for ejecting air onto the workpiece held by the chuck table to remove the adhering machining fluid,
The slide door opens and closes by sliding in a direction parallel to the holding surface of the chuck table,
The draining unit is fixed to the slide door and has an air curtain that injects air onto the workpiece while sliding along the holding surface of the chuck table positioned in the carry-in/out area. 2. The processing apparatus according to claim 1, wherein the air supply path communicating with the air curtain is provided with an on-off valve, and an operating portion for opening and closing the on-off valve is arranged in the handle portion to be gripped when opening and closing the slide door.

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