JP7334495B2 - Abnormality detection device, abnormality detection method, and abnormality detection program - Google Patents

Description

The present invention relates to an abnormality detection device, an abnormality detection method, and an abnormality detection program.

In manufacturing lines for industrial products, a pressure booster is used to boost the pressure of a fluid supplied from upstream and supply it downstream. By introducing a pressure booster upstream of the high-pressure equipment on the air line in the production line, it is possible to supply high-pressure fluid to the high-pressure equipment while maintaining the rest of the air line at a low pressure.

FIG. 7 is a diagram schematically showing an example of a production line including a pressure booster. The production line shown in FIG. 7 has an air line 102 through which gas (for example, air) is sent out from a compressor 101 at a pressure of 0.3 MPa. The air line 102 is branched into a plurality of branches, each of which is connected to a device that requires a pressure of 0.3 MPa or less. An air tank and a pressure booster 100 are interposed in one of the branch lines of the air line 102, and a device 103 requiring a higher pressure (for example, 0.6 MPa) is connected to its downstream side. The pressure booster 100 is connected upstream of the air tank in the branch line. The pressure booster 100 increases the pressure of the 0.3 MPa gas supplied from the upstream to 0.6 MPa and supplies it downstream. The high-pressure gas increased in pressure to 0.6 MPa is supplied to the device 103 through the air tank and used to operate the device 103 .

FIG. 8 is a diagram schematically showing a cross section of the pressure booster 100. As shown in FIG. The pressure increasing device 100 includes a pressure increasing valve 111 having a packing 110 , and pressurizes (increases) the gas supplied from the upstream of the pressure increasing device 100 by the pressure increasing valve 111 .

Regarding the technology of using a pressure booster in the production line, when the gas pressure on the downstream side of the pressure booster is lower than the gas pressure on the upstream side, the pressure booster is avoided and the pressure on the upstream side of the pressure booster is reduced. There is known a technique for opening a bypass passage that connects a downstream side and a downstream side (see, for example, Patent Document 1).

JP-A-2002-144429

In the production line described above, an abnormality may occur in the pressure booster 100 . For example, if the packing 110 wears in the pressure intensifying device 100, gas leakage may occur inside the pressure intensifying device 100, resulting in insufficient gas pressure increase. If such an abnormality occurs in the pressure booster 100, the equipment connected to the air line described above and driven by the pressure of the supplied gas may malfunction, thereby interrupting production on the production line. Sometimes. However, no technique for detecting an abnormality in the pressure booster 100 is known. Therefore, there is a demand for an effective technique for detecting an abnormality in the pressure booster.

An object of one aspect of the present invention is to detect an abnormality in a pressure intensifier regardless of fluctuations in the flow rate on the downstream side of the pressure intensifier or the pressure on the upstream side of the pressure intensifier.

An abnormality detection device according to one aspect of the present invention is a pressure booster that increases the pressure of a fluid supplied from upstream and supplies it downstream, at least at the first flow rate of the fluid upstream and the second flow rate of the fluid at the downstream and an abnormality detection unit that detects an abnormality of the pressure booster based on the relationship between the first flow rate and the second flow rate.

The abnormality detection method according to the above aspect obtains at least a first flow rate of the fluid upstream and a second flow rate of the fluid downstream of a pressure booster that increases the pressure of the fluid supplied from upstream and supplies it to the downstream. and an abnormality detection step of detecting an abnormality in the pressure booster based on the relationship between the first flow rate and the second flow rate.

The abnormality detection program according to the one aspect is an abnormality detection program for causing a computer to function as the abnormality detection device, and causes the computer to function as the acquisition unit and the abnormality detection unit.

An intensifier malfunction can usually be detected from the fluid downstream of the intensifier. In this case, if there is an abnormality in the supply of fluid on the upstream side, the abnormality may be reflected in the supply of fluid on the downstream side, and may be determined to be an abnormality in the pressure booster. In the above configuration, an abnormality in the pressure intensifying device is detected based not only on the second flow rate of the fluid on the downstream side of the pressure intensifying device, but also on the relationship between the first flow rate and the second flow rate of the fluid on the upstream side. Therefore, according to the above configuration, it is possible to detect an abnormality in the pressure increasing device regardless of fluctuations in the pressure on the upstream side of the pressure increasing device.

Also, the first flow rate and the second flow rate are determined not only by the amount of fluid used downstream of the pressure booster, but also by the amount of fluid used by other devices connected in parallel to the pressure booster. When the second flow rate fluctuates due to an abnormality in the pressure intensifier, the abnormality in the pressure intensifier is detected as a deviation of the second flow rate from the first flow rate corresponding to the second flow rate. Therefore, according to the above configuration, it is possible to detect an abnormality in the pressure intensifier regardless of fluctuations in the flow rate on the downstream side of the pressure intensifier.

In the abnormality detection device according to the one aspect described above, the abnormality detection section may detect the abnormality of the pressure increasing device based on a ratio of the second flow rate to the first flow rate. According to this configuration, the threshold value of the ratio of the second flow rate to the first flow rate can be set to a predetermined value, which is more effective from the viewpoint of easily detecting an abnormality in the pressure booster.

Alternatively, in the abnormality detection device according to the above aspect, the abnormality detection unit detects the pressure in the pressure increase device based on the relationship between the first flow rate and the second flow rate when the first flow rate is within a predetermined range. Anomalies may be detected. According to this configuration, by setting the range of the first flow rate in which the change in the second flow rate due to the abnormality of the pressure intensifier becomes more remarkable as the predetermined range, the difference between the first flow rate and the second flow rate in such a predetermined range. Abnormalities in the pressure booster can be detected based on the relationship. Therefore, this configuration is much more effective from the viewpoint of accurately detecting an abnormality in the pressure booster.

In the abnormality detection device according to the above aspect, the acquisition unit further acquires the first pressure of the fluid upstream and the second pressure of the fluid downstream, and the abnormality detection unit further acquires the first flow rate, An abnormality of the pressure booster may be detected based on the relationship between the first pressure, the second flow rate and the second pressure. According to this configuration, in detecting an abnormality in the pressure intensifying device, the state of the fluid after pressure increase is more accurate than when the state of the fluid after pressure increase is represented only by the first flow rate and the second flow rate. can be expressed as Therefore, the above configuration is much more effective from the viewpoint of precisely detecting an abnormality in the pressure booster.

In the abnormality detection device according to the above aspect, the abnormality detection unit detects the ratio of the second pressure to the first pressure and the first pressure to the first pressure when the ratio of the second pressure to the first pressure is within a predetermined range. Abnormalities in the pressure booster may be detected based on the relationship between the ratio of the second flow rate to the flow rate. According to this configuration, it is possible to detect an abnormality in the pressure intensifying device based on the linear correlation relationship between the two ratios, which is more effective from the viewpoint of accurately and simply detecting an abnormality in the pressure intensifying device. be.

In the abnormality detection device according to the above aspect, the predetermined range is a range in which (the second pressure/the first pressure) is greater than 1 and is less than the maximum pressure ratio of the fluid by the pressure booster. good too. This configuration is more effective from the viewpoint of early discovery of an abnormality in the pressure booster.

Alternatively, in the abnormality detection device according to the above aspect, the abnormality detection unit detects the ratio of the first flow rate to the first pressure and the Abnormalities in the pressure booster may be detected based on a relationship between the ratio of the second flow rate to the second pressure. According to this configuration, it is possible to express the state of the fluid when the pressure intensifying device is normal by using a predetermined formula using the flow rate and the pressure, and it is possible to determine abnormality using the formula. be. Therefore, the above configuration is much more effective from the viewpoint of accurately and precisely detecting an abnormality in the pressure booster.

ADVANTAGE OF THE INVENTION According to one aspect of the present invention, it is possible to detect an abnormality in a pressure intensifying device regardless of fluctuations in the flow rate on the downstream side of the pressure intensifying device or the pressure on the upstream side of the pressure intensifying device.

FIG. 1 is a diagram schematically showing an example of an application scene of an abnormality detection device according to Embodiment 1 of the present invention. FIG. 2 is a diagram showing an example of the relationship between the first flow rate and the second flow rate when the first flow rate is within a predetermined range in the pressure booster according to Embodiment 1 of the present invention. FIG. 3 is a diagram showing an example of the relationship between the pressure increasing operation time and the ratio of the second flow rate to the first flow rate in the pressure increasing device of Embodiment 2 of the present invention. FIG. 4 is a diagram schematically showing an example of an application scene of the abnormality detection device according to Embodiment 3 of the present invention. FIG. 5 shows the ratio of the first flow rate to the first pressure and the second flow rate to the second pressure when the ratio of the first flow rate to the first pressure is within a predetermined range for the pressure intensifier according to Embodiment 3 of the present invention. is a diagram showing an example of the relationship between the ratio of . FIG. 6 shows the ratio of the second pressure to the first pressure and the second flow rate to the first flow rate when the ratio of the second pressure to the first pressure is within a predetermined range for the pressure intensifier according to Embodiment 4 of the present invention. is a diagram showing an example of the relationship between the ratio of . FIG. 7 is a diagram schematically showing an example of a production line including a pressure booster. FIG. 8 is a diagram schematically showing a cross section of an example of a pressure booster.

Hereinafter, an embodiment (hereinafter also referred to as "this embodiment") according to one aspect of the present invention will be described based on the drawings.

[Embodiment 1]
§1 Application Example The abnormality detection device according to the present embodiment can be applied, for example, to a fluid utilization system having a pressure booster that boosts the pressure of fluid and a device that operates using the pressurized fluid. Examples of such fluid utilization systems include, but are not limited to, the manufacturing lines described above.

By applying the abnormality detection device according to the present embodiment to the above-described fluid utilization system, it is possible to detect an abnormality in the pressure increasing device. Here, in this specification, the term "abnormality" refers to a state in which the pressure of the gas supplied to the pressure booster cannot be increased to a predetermined value by the pressure booster. More specifically, the abnormality is, for example, a gas leak (so-called air leak) in the pressure booster, and an example of the cause is a slide provided in the pressure booster valve provided in the pressure booster. Deterioration (e.g. wear) of piston packings is included. In the following embodiments, an abnormality in the pressure booster will be specifically described as a fluid leak in the pressure booster.

The fluid whose pressure is increased by the pressure increasing device is, for example, gas, and in the present embodiment, air is used from the viewpoint of ease of use.

Further, in the following embodiments, the side of the pressure intensifier that supplies air to the pressure intensifier is also referred to as the upstream side of the pressure intensifier, and the side from which the pressure intensifier discharges air. is also called the downstream side of the pressure booster. The air flow rate on the upstream side of the pressure booster is also called the first flow rate (Q1), the air flow rate on the downstream side is called the second flow rate (Q2), and the air pressure on the upstream side of the pressure booster is called the first pressure. (P1), the pressure of the air on the downstream side is also called the second pressure (P2).

Note that in the fluid utilization system, both the first flow rate and the second flow rate are usually determined mainly according to the amount of fluid used in equipment that uses the fluid on the downstream side of the pressure booster. Among such fluctuations in usage amount, the first flow rate and first pressure, and the second flow rate and second pressure all fluctuate within a certain range. Therefore, none of the first flow rate, the first pressure, the second flow rate, and the second pressure is usually constant even when the pressure intensifier 1 is operated under constant conditions, and fluctuates within a certain range.

Abnormality detection in this embodiment will be described in more detail below. Hereinafter, the abnormality detection device in this embodiment and the fluid utilization system to which it is applied are collectively referred to as an "abnormality detection system."

In this embodiment, an abnormality in the pressure booster is detected based on the relationship between the first flow rate and the second flow rate. The "relationship between the first flow rate and the second flow rate", which is the basis for detecting an abnormality, may be any relationship that can express the second flow rate using the first flow rate, for example, in a predetermined range including the first flow rate It may be the relationship between the first flow rate and the second flow rate, or the relationship including the ratio between the first flow rate and the second flow rate.

§2 Configuration Example FIG. 1 is a diagram schematically showing an example of an application scene (that is, an abnormality detection system) of the abnormality detection device according to the first embodiment of the present invention. The abnormality detection system 10 includes, as shown in FIG. and a downstream arrangement 5 . A compressor and branch pipes connected thereto, for example, are arranged upstream of the pressure booster 1 , and one of the branch pipes is connected to the pressure booster 1 .

The pressure booster 1 can employ a conventionally well-known configuration of a pressure booster that can increase the pressure of air supplied from upstream and supply it downstream. A pipe is connected to the downstream side of the pressure intensifier 1, and a device that uses the air pressure-increased by the pressure intensifier 1 is connected to the pipe.

In Embodiment 1, a downstream configuration 5 is provided as equipment connected downstream of the pressure intensifier 1 .

The downstream configuration 5 has an air tank 51, a regulator 52, a solenoid valve 53, and an air using device 54 in this order from the pressure booster 1 side. The air tank 51 stores air pressurized to a desired pressure by the pressure booster 1 (hereinafter, the pressurized air is also referred to as “high pressure air”). The regulator 52 adjusts the pressure of high-pressure air supplied from the air tank 51 to the air-using equipment 54 . The solenoid valve 53 opens or closes the passage of high-pressure air that connects the regulator 52 and the air-using device 54 according to a signal from the controller 33, for example. The air tank 51, the regulator 52, and the solenoid valve 53 can each employ a conventionally known configuration.

The air-using device 54 is a device that uses high-pressure air, such as a device that operates with high-pressure air. Examples of air-using equipment 54 include air cylinders and air chucks.

The downstream configuration 5 is not limited to the configuration described above, and may be configured to be supplied with high-pressure air. may contain.

In the abnormality detection system 10 , the first flow sensor 21 is arranged upstream of the pressure intensifier 1 , and the second flow sensor 22 is arranged downstream of the pressure intensifier 1 . A first flow rate sensor 21 measures the flow rate of air supplied to the pressure intensifier 1 . A second flow sensor 22 measures the flow rate of the pressurized air discharged from the pressure intensifier 1 .

The first flow rate sensor 21 is usually arranged in the vicinity of the upstream side of the pressure intensifier 1, but the position of the first flow rate sensor 21 is appropriately set within a range in which the flow rate of the air flowing into the pressure intensifier 1 can be substantially detected. can be determined by Similarly, the second flow sensor 22 is typically located near the downstream side of the intensifier 1, but the position of the second flow sensor 22 substantially detects the flow rate of air pressurized by the intensifier 1. It may be determined as appropriate within a possible range. For example, the position of the first flow rate sensor 21 is on the upstream side of the pressure intensifier 1, and is connected in series with the pressure intensifier 1 by piping, to other equipment that changes the flow rate of air, or to a branch pipe. Any position in the pipeline is acceptable. In addition, the position of the second flow rate sensor 22 may be any position on the downstream side of the pressure intensifier 1 in the pipe to the other equipment or branch pipe connected in series with the pressure intensifier 1 by the pipe. .

For the first flow sensor 21 and the second flow sensor 22, known flow sensors capable of detecting the flow rate of the fluid (air in this embodiment) used in the fluid utilization system can be used. The first flow rate sensor 21 and the second flow rate sensor 22 may be the same sensor or different sensors as long as they can detect the flow rate of air. The first flow sensor 21 and the second flow sensor 22 may be devices that constantly detect the flow rate of air, or devices that detect the flow rate of gas at predetermined time intervals or when a predetermined operation is received. may The first flow rate sensor 21 and the second flow rate sensor 22 are respectively connected to the control device 3, and the flow rate measurement values (flow rate values) measured by the first flow rate sensor 21 and the second flow rate sensor 22 are sent to the control device 3 is output.

The control device 3 is, for example, a PLC (Programmable Logic Controller) and has a data acquisition section 31 (acquisition section), an abnormality detection section 32 and a control section 33 .

The data acquisition unit 31 acquires flow values output by the first flow sensor 21 and the second flow sensor 22 . The flow rate value acquired by the first flow rate sensor 21 is the first flow rate described above, and the flow rate value acquired by the second flow rate sensor 22 is the second flow rate described above.

The abnormality detection unit 32 detects an abnormality of the pressure intensifier 1 (leakage of high-pressure air inside the pressure intensifier 1) based on the relationship between the first flow rate and the second flow rate acquired by the data acquisition unit 31 . A method for detecting leakage of high-pressure air by the abnormality detection unit 32 will be specifically described later.

Also, the abnormality detection unit 32 outputs a signal indicating the detection result. The output signal is input to the control section 33 and the monitor 4 .

The controller 33 may control the solenoid valve 53 of the downstream structure 5 based on the output signal of the abnormality detector 32 . For example, when a leak of high-pressure air is detected in the pressure intensifier 1 , the controller 33 closes the solenoid valve 53 . As a result, the supply of high-pressure air to the air-using device 54 is stopped, and malfunction of the air-using device 54 due to insufficient pressure of the high-pressure air is prevented.

The monitor 4 displays whether or not leakage of high-pressure air in the pressure intensifier 1 is detected based on the output signal of the abnormality detection section 32 . The results displayed on the monitor 4 can be checked by a user such as an administrator of the fluid utilization system. The display method may be any method that can display the abnormality of the pressure intensifier 1, and a conventionally known method can be adopted.

§3 Operation example [Description of logic for detecting anomalies]
The logic by which the abnormality detection system 10 detects an abnormality will be described below. FIG. 2 is a diagram showing an example of the relationship between the first flow rate and the second flow rate (Q2 (L/min)) when the first flow rate (Q1 (L/min)) in the pressure intensifier 1 is within a predetermined range. be.

The graph of FIG. 2 shows part of the behavior of the first flow rate and the second flow rate when the air pressure-increased by the pressure intensifier 1 is stored in the air tank 51 . As the high-pressure air is supplied from the pressure booster 1 to the air tank 51, the second flow rate decreases, and accordingly the first flow rate also decreases. Therefore, in the process of supplying high-pressure air from the pressure booster 1 to the air tank 51, the second flow rate corresponding to the first flow rate is plotted from the upper right to the lower left of the graph of FIG. In the air pressure increasing operation by the pressure intensifier 1, for example, the first flow rate fluctuates from 200 L/min to 0 L/min, and the second flow rate fluctuates from 120 L/min to 0 L/min. FIG. 2 shows, as a part thereof, the range of the first flow rate from 150 L/min to 0 L/min.

In the graph of FIG. 2, the solid line indicates the relationship between the first flow rate and the second flow rate when there is no leak. A solid line represents a model in which the intensifier 1 operates normally. The model is also called "no leak".

As indicated by the solid line in FIG. 2, in the leak-free model, the first flow rate and the second flow rate have a high linear correlation. A straight line represented by a dashed line in FIG. 2 is a straight line represented by the reference formula. The straight line is a straight line that substantially touches the solid line (no leak) in FIG. 2 at its lower side. The reference formula represents, for example, a straight line parallel to a straight line represented by a linear function formula obtained by simple regression analysis with the second flow rate as the objective variable and the first flow rate as the explanatory variable.

For example, the broken line in FIG. Find the linear function formula by analysis. Then, the straight line represented by the linear function is translated to a position contacting the solid line (no leak) in FIG. 2 from below. By expressing the straight line after the translation by an equation, the above reference equation is obtained.

A one-dot chain line and a two-dot chain line both indicate the relationship between the first flow rate and the second flow rate when there is a leak. A one-dot chain line represents a model of a slight leak (for example, a leak of the amount of L1) in the pressure intensifier 1. For example, a three-way valve interposed in the piping between the pressure intensifier 1 and the air tank 51 It is represented by plotting the second flow rate at the first flow rate when opened by the opening. The leak model represented by the dashed-dotted line is also called "leak 1".

The two-dot chain line represents a model of a severe leak in the pressure intensifier 1 (for example, a leak of 2 × L1 amount). is represented by plotting the second flow rate at The leak model represented by the two-dot chain line is also called “leak 2”.

Leakage of high-pressure air in the pressure intensifier 1 usually increases as the pressure on the downstream side (air tank 51) of the pressure intensifier 1 increases. As is clear from the comparison of no leak, leak 1, and leak 2 in FIG. 2, the greater the leak, the greater the individual difference between the first flow rate and the second flow rate with respect to the case of no leak.

On the other hand, the dashed line in FIG. 2 substantially indicates the lower limit value of the second flow rate of the pressure intensifier 1 operating normally within the range shown in FIG. On the other hand, as described above, the difference in the second flow rate when there is a leak in the pressure intensifier 1 is greater than when there is no leak, the greater the amount of leak. Therefore, within a predetermined range (0 to 150 L/min, for example) shown in FIG. 2, the dashed line in FIG. Therefore, the calculated value of the second flow rate obtained by substituting the first flow rate into the above-described reference formula can be the threshold value for determining the presence or absence of leakage. By detecting the presence or absence of leakage based on such a threshold value, it is possible to accurately and easily detect leakage from the pressure intensifier 1 .

[Example of anomaly detection method]
In this embodiment, the abnormality detection method is executed, for example, as follows. The reference formula indicated by the dashed line in FIG. 2 can be used in the abnormality detection system 10, and is stored in, for example, a storage unit (not shown).

The data acquisition unit 31 acquires the first flow rate from the first flow rate sensor 21 and the second flow rate from the second flow rate sensor 22, respectively.

The abnormality detection unit 32 substitutes the first flow rate into the above-described reference formula, calculates the calculated value of the second flow rate, and acquires the threshold value. Then, it is determined whether or not the measured value of the second flow rate is less than the threshold.

When determining that the measured value of the second flow rate is equal to or greater than the threshold, the abnormality detection unit 32 does not detect leak in the pressure intensifier 1, and the control device 3 terminates the leak detection process.

If it is determined that the measured value of the second flow rate is less than the threshold, the abnormality detection section 32 sends a signal to the monitor 4 and the control section 33 to inform the leak in the pressure intensifier 1 . The monitor 4 receives the signal and displays that the leak in the pressure intensifier 1 has been detected. Thereby, the user can be prompted to replace or inspect the pressure intensifier 1 .

[Effect]
As described above, the first flow rate and the second flow rate also fluctuate within a certain range due to normal operation of the intensifier 1 in the abnormality detection system 10 . The first flow rate and the second flow rate fluctuate, particularly due to fluctuations in the amount of air used in the air-using device 54 . Therefore, when trying to determine the leak of the pressure intensifier 1 only by the second flow rate, the leak is detected based on the flow rate that fluctuates due to the normal operation of the air-using device 54 even though no leak has occurred. there is a possibility.

However, in this embodiment, the abnormality detection unit 32 detects leakage of high-pressure air in the pressure intensifier 1 based on the relationship between the first flow rate and the second flow rate within a predetermined range of the first flow rate. Within a predetermined range of the first flow rate, there is a clear difference between the relationship between the first flow rate and the second flow rate when there is no leak, and the relationship between the first flow rate and the second flow rate when a leak occurs. The predetermined range of the first flow rate can be appropriately determined within a range in which such a difference is detected in the first flow rate. , can be

Therefore, erroneous detection of leakage can be prevented. Therefore, regardless of fluctuations in the pressure of the first flow rate or fluctuations in the amount of high-pressure air demanded by the air-using equipment 54, leaks in the intensifier 1 can be accurately detected. Moreover, such accurate leak detection can be implemented with a simple configuration of two flow sensors.

Further, according to the present embodiment, it is possible to detect an abnormality in the pressure intensifier 1, which is the cause of the trouble, before the production line is stopped due to an abnormality in the pressure intensifier 1. FIG. Therefore, it is possible to prevent loss due to stoppage of the production line as described above.

Furthermore, according to the present embodiment, leakage of the pressure intensifier 1 is detected from the state of the pressure intensifier 1 during normal use, so that the abnormality detection system 10 manages the pressure intensifier 1 by "condition monitoring maintenance." is possible. Therefore, it is possible to reduce inspection man-hours in managing the pressure intensifier 1 as compared with the case where the pressure intensifier 1 is managed by "regular maintenance (scheduled (standard) maintenance)". In addition, since the pressure intensifier 1 can be managed by condition monitoring maintenance, the pressure intensifier 1 can be repaired appropriately according to detection of a leak in the pressure intensifier 1 . As a result, the intensifier 1 can be used for a longer period of time.

It should be noted that the "relationship between the first flow rate and the second flow rate" in the above may be any relationship that allows the second flow rate to be expressed with reference to the first flow rate. In this embodiment, the abnormality detection unit 32 detects leaks in the pressure intensifier 1 based on the linear correlation relationship between the first flow rate and the second flow rate when the first flow rate is in the range of 0 to 150 L/min. do. This configuration is much more effective from the viewpoint of easily and accurately detecting leakage of high-pressure air in the pressure intensifier 1 .

§4 Modifications This embodiment may include improvements or modifications as appropriate within the scope in which the effects of this embodiment can be obtained.

For example, the reference formula can be a formula representing a straight line passing through any position below the solid line in FIG. As described above, the first flow rate and the second flow rate fluctuate even when the pressure intensifier 1 is operating normally. Considering such a fluctuation range, the straight line represented by the reference formula may be set at a position farther apart than the solid line in FIG. In this case, a further improvement in the accuracy of leak detection in the pressure intensifier 1 is expected.

Further, even outside the above-described predetermined range, leakage from the pressure intensifier 1 may be detected based on the above-described reference formula. In this detection method, a large amount of leakage occurs on the downstream side of the pressure intensifier 1, such as breakage of the pressure intensifier 1 or a large amount of high-pressure air leaking from the connection between the pressure intensifier 1 and the piping downstream of the pressure intensifier 1. expected to be detectable.

Furthermore, the abnormality detection system may further include an alarm device, and the alarm device may issue an alarm when the abnormality detection unit 32 detects a leak. This configuration is much more effective from the viewpoint of quickly and reliably notifying the administrator of the fluid utilization system of the leak. Also, in the case of having an alarm device, the control device 3 does not have to close the solenoid valve 53 . In this case, it is possible to quickly notify the administrator of the abnormality in the pressure booster 1 without stopping the production of products on the production line.

[Embodiment 2]
Other embodiments of the invention are described below. For convenience of description, members having the same functions as those of the members described in the above embodiments are denoted by the same reference numerals, and description thereof will not be repeated. The configuration of this embodiment is substantially the same as that of the first embodiment described above, except that the logic for detecting an abnormality is different.

[Description of logic for detecting anomalies]
FIG. 3 is a diagram showing an example of the relationship between the pressure increasing operation time and the ratio (Q2/Q1) of the second flow rate to the first flow rate in the pressure intensifier 1 of this embodiment. FIG. 3 is a diagram plotting Q2/Q1 according to the elapsed time of the pressure increasing operation of the pressure intensifier 1 for each of the models of no leak, leak 1, and leak 2 described above. In FIG. 3, in the range from immediately after the operation of the intensifier 1 to 500 seconds, no leak is plotted with white diamonds, leak 1 is plotted with white circles, and leak 2 is plotted with crosses.

As shown in FIG. 3, Q2/Q1 is distributed substantially flat in the absence of leakage. For both leak 1 and leak 2, Q2/Q1 remains flat until about 250 seconds as in the case of no leak, but after 250 seconds it clearly increases. This increase is significant, for example increasing quadratically.

The dashed line in FIG. 3 is a straight line tangent to the highest plot of Q2/Q1 with no leakage. That is, it represents a slightly higher value than the maximum value of Q2/Q1 without leakage. The formula represented by the dashed line in FIG. 3 is the reference formula in this embodiment. As in the first embodiment, the reference formula can be set based on previously obtained measured values of the intensifier 1 in the abnormality detection system 10 during normal operation.

As shown in FIG. 3, Q2/Q1 for Leak 1 and Leak 2 is above the reference equation, eg, in the range of 350 seconds to 500 seconds. Therefore, Q2/Q1 (for example, Q2/Q1=17) in the reference formula can be a threshold value indicating the presence or absence of leakage within the range of 350 seconds to 500 seconds.

[Example of anomaly detection method]
In this embodiment, the abnormality detection method is executed, for example, as follows. In this embodiment, acquisition of the first flow rate and the second flow rate is the same as in the first embodiment described above.

The abnormality detection unit 32 calculates Q2/Q1 from the measured values of Q1 and Q2 acquired by the data acquisition unit 31, and Q2/Q1 based on the measured values exceeds the Q2/Q1 threshold indicated by the dashed line in FIG. Determine whether or not When the measured Q2/Q1 is equal to or less than the threshold, the abnormality detection unit 32 does not detect leakage, and the control device 3 terminates the abnormality detection process.

When it is determined that Q2/Q1 based on actual measurements exceeds the threshold, abnormality detection unit 32 transmits a signal notifying leak in pressure intensifier 1 to monitor 4 and control unit 33 . Thereafter, the operation of the solenoid valve 53 by the control unit 33 and the display of leak detection on the monitor 4 are the same as in the first embodiment.

[Effect]
In this embodiment, the abnormality detection unit 32 detects leakage of the intensifier 1 based on Q2/Q1. As described above, in the present embodiment, similarly to the first embodiment, the abnormality detection unit 32 detects an abnormality of leakage of high-pressure air in the pressure intensifier 1 based on the relationship between the first flow rate and the second flow rate. In this embodiment, as the pressure increasing operation by the pressure intensifier 1 progresses, leaks can be detected easily and more accurately. In addition, it is expected that a large amount of leakage, such as breakage of the pressure intensifier 1 or poor connection with downstream piping, will always be detected.

[Modification]
The present embodiment may include improvements or modifications as appropriate within the scope in which the effects of the present embodiment can be obtained. For example, in the present embodiment, the reference expression for the threshold value is set based on the maximum value of Q2/Q1 during normal operation of the pressure intensifier 1, but the present invention is not limited to this. For example, the reference formula may be a formula that approximately expresses the relationship between the elapsed operating time of the intensifier 1 and the substantial maximum value of Q2/Q1 without leakage. Examples of this reference formula include a linear function formula and a quadratic function formula representing a linear relationship. By setting the reference formula in this way, it is expected that the accuracy of leak detection in this embodiment will be further improved.

[Embodiment 3]
Other embodiments of the invention are described below. For convenience of description, members having the same functions as those of the members described in the above embodiments are denoted by the same reference numerals, and description thereof will not be repeated.

[Configuration example of anomaly detection system]
FIG. 4 is a diagram schematically showing an example of an application scene (abnormality detection system) of the abnormality detection device according to this embodiment. As shown in FIG. 4, the abnormality detection system 10a is the same as the abnormality detection system 10 described above, except that it further has a first pressure sensor 23 on the upstream side of the pressure intensifier 1 and a second pressure sensor 24 on the downstream side. have a configuration. A first pressure sensor 23 measures the pressure of the gas supplied to the pressure intensifier 1 . A second pressure sensor 24 measures the pressure of the pressurized gas discharged from the pressure intensifier 1 .

The first pressure sensor 23 is normally arranged in the vicinity of the upstream side of the pressure intensifier 1, but the position of the first pressure sensor 23 is appropriately set within a range where the pressure of the air flowing into the pressure intensifier 1 can be substantially detected. can be determined by Similarly, the second pressure sensor 24 is typically located near the downstream side of the intensifier 1, but the position of the second pressure sensor 24 substantially detects the pressure of the gas intensified by the intensifier 1. It may be determined as appropriate within a possible range. For example, the position of the first pressure sensor 23 is upstream of the pressure intensifier 1 and is connected in series with the pressure intensifier 1 by a pipe, any other equipment that changes the pressure of the air, or any other device in the pipe to the branch pipe. It can be a position. Further, the position of the second pressure sensor 24 may be any position on the downstream side of the pressure intensifier 1 in the pipe to the other equipment or branch pipe connected in series with the pressure intensifier 1 by the pipe. .

For the first pressure sensor 23 and the second pressure sensor 24, known pressure sensors capable of detecting the pressure of the fluid (air in this embodiment) used in the fluid utilization system can be used. The first pressure sensor 23 and the second pressure sensor 24 may be the same sensor or different sensors as long as they can detect air pressure. The first pressure sensor 23 and the second pressure sensor 24 may be devices that constantly detect gas pressure, or devices that detect gas pressure at predetermined time intervals or when a predetermined operation is received. may The first pressure sensor 23 and the second pressure sensor 24 are respectively connected to the control device 3, and the measured pressure values (pressure values) measured by the first pressure sensor 23 and the second pressure sensor 24 are sent to the control device 3 is output. The measurement of the first pressure sensor 23 is the first pressure and the measurement of the second pressure sensor 24 is the second pressure.

[Description of logic for detecting anomalies]
FIG. 5 shows the ratio of Q1/P1 and the second flow rate to the second pressure (Q2 /P2). For the same reason as in the graph of FIG. 2, Q2/P2 corresponding to Q1/P1 is plotted from the upper right to the lower left of the graph of FIG. As in FIG. 2, the solid line in FIG. 5 indicates the case of no leak, the one-dot chain line indicates the case of leak 1, and the two-dot chain line indicates the case of leak 2, respectively. The units of Q1/P1 and Q2/P2 are both "×10 ⁻³ L/(min·Pa)".

In the operation of increasing the pressure of air by the pressure intensifier 1, Q1/P1 varies from 0.5 to 0, for example, and Q2/P2 varies from 0.25 to 0, for example. FIG. 5 shows a range of Q1/P1 from 0.4 to 0 as part thereof.

In FIG. 5, Q2/P2 increases quadratically with increasing Q1/P1 in the case of no leak (solid line), leak 1 (one-dot chain line), and leak 2 (two-dot chain line). are doing. Therefore, in the range shown in FIG. 5, the relationship between Q1/P1 and Q2/P2 can be approximately represented by an appropriate quadratic function.

A dashed line in FIG. 5 is a curve represented by the reference formula. This curve is a curve that touches the solid line (no leak) at its lower side in the range shown in FIG. The reference formula is, for example, a quadratic function formula representing a curve obtained by translating a curve approximating the solid line in FIG. 5 in FIG. The reference formula is obtained, for example, by the following method. That is, a measurement value during normal operation of the intensifier 1 in the abnormality detection system 10a is obtained in advance, Q2/P2 and Q1/P1 are calculated, and two parameters are obtained using Q2/P2 as the objective variable and Q1/P1 as the explanatory variable. A quadratic function formula is obtained by the following regression processing. Then, the curve represented by the quadratic function equation is translated to a position in contact with the solid line from below in FIG. 5, and the curve after the translation is represented by the equation. Q2/P2 calculated from the above reference equation can be a threshold in leak detection.

[Example of anomaly detection method]
In this embodiment, the abnormality detection method is executed, for example, as follows. In this embodiment, acquisition of the first flow rate and the second flow rate is the same as in the first embodiment described above.

The data acquisition unit 31 acquires the first pressure P1 from the first pressure sensor 23 and the second pressure P2 from the second pressure sensor 24 in addition to the first flow rate Q1 and the second flow rate Q2.

Abnormality detection unit 32 detects leakage of intensifier 1 based on the relationship between Q1, P1, Q2 and P2. The relationship may be any relationship that can express Q2 by referring to P1, P2, or Q1. P2 is calculated respectively. Then, the abnormality detection unit 32 substitutes Q1/P1 based on the measured value into the aforementioned reference expression to calculate the threshold value of Q2/P2. Then, the abnormality detection unit 32 detects leakage by determining whether Q2/P2 based on the measured value exceeds the threshold.

When it is determined that Q2/P2 based on the measured value exceeds the threshold, the abnormality detection unit 32 does not detect leakage, and the control device 3 terminates the abnormality detection process.

When it is determined that Q2/P2 based on the actual measurement value is less than the threshold, the abnormality detection section 32 sends a signal to the monitor 4 and the control section 33 to inform the leak in the pressure intensifier 1 . Thereafter, the operation of the solenoid valve 53 by the control unit 33 and the display of leak detection on the monitor 4 are the same as in the first embodiment.

[Effect]
In this embodiment, the data acquisition unit 31 further acquires P1 and P2 in addition to Q1 and Q2. Then, the abnormality detection unit 32 detects leakage of the intensifier 1 based on the relationship between Q1, P1, Q2 and P2. According to this configuration, the leakage of the intensifier 1 is detected based on the relationship further including P1 and P2 among the relationships between Q1 and Q2. In this way, since the relationship that is the basis of leak detection includes not only the flow rate but also the pressure, the amount of high-pressure air in the pressure intensifier 1 is reduced compared to the case where only the flow rate is used as a variable as in the first and second embodiments. A more accurate representation of the state is possible. Therefore, it is more effective from the viewpoint of performing leak detection more precisely.

In particular, in the present embodiment, the abnormality detection unit 32 detects a quadratic function of Q1/P1 and Q2/P2 when Q1/P1 is within the predetermined range (for example, 0 to 0.4 shown in FIG. 5). A leak in the intensifier 1 is detected based on the curve correlation relationship. By expressing the state of the air related to the pressure intensifier 1 with the relationship between Q1/P1 and Q2/P2, the state of the high-pressure air when there is no leak can be expressed by a quadratic function formula having a high correlation. can. Therefore, it is possible to more accurately determine the presence or absence of a leak based on the reference formula derived from the state of no leak. Therefore, this embodiment is even more effective from the viewpoint of accurately detecting leaks.

[Modification]
The present embodiment may include improvements or modifications as appropriate within the scope in which the effects of the present embodiment can be obtained. For example, in the present embodiment, the reference formula is expressed as a quadratic function formula, but the reference formula may be a combination of two or more linear function formulas. For example, in the graph of FIG. 5, the predetermined range of Q1/P1 is divided into two ranges of 0 to 0.3 and 0.3 to 0.4. A linear function formula may be derived by regression processing, and a reference formula that can serve as a threshold value may be appropriately set from these linear function formulas in the same manner as in the first embodiment. In this way, by setting the reference formula with a plurality of formulas corresponding to a plurality of ranges, even when the second flow rate and the second atmospheric pressure fluctuate more complicatedly in the pressure intensifier 1, more appropriate It is expected that it will be possible to detect leaks based on thresholds.

[Embodiment 4]
Other embodiments of the invention are described below. For convenience of description, members having the same functions as those of the members described in the above embodiments are denoted by the same reference numerals, and description thereof will not be repeated. The configuration of this embodiment is substantially the same as that of the above-described third embodiment, except that the logic for detecting anomalies is different.

[Description of logic for detecting anomalies]
FIG. 6 shows the pressure intensifier 1 of this embodiment when the ratio of the second pressure to the first pressure (P2/P1) is within a predetermined range, P2/P1 and the ratio of the second flow rate to the first flow rate (Q2 /Q1) is a diagram showing an example of the relationship. As in FIG. 2, the solid line in FIG. 6 represents the case of no leak, the one-dot chain line the case of leak 1, and the two-dot chain line the case of leak 2, respectively. In FIG. 6, P2/P1 ranges from 0.9 to 2.0.

The maximum value of P2/P1 is the maximum pressure ratio of intensifier 1. In this embodiment, the maximum pressure ratio of 1 of the intensifier is 2.0. That is, the pressure booster 1 is a device capable of increasing the pressure of the air supplied to the pressure booster 1 up to 2.0 times.

As shown in FIG. 6, in the case of no leak (solid line), when P2/P1 is greater than 1.9, there is a large drop in the vicinity of the maximum pressure ratio. It decreases linearly and slightly. Further, in the case of leak 1 (one-dot chain line), the decrease is linear up to P2/P1 of 1.9 and more than in the case of no leak, and when P2/P1 is greater than 1.85, the decrease is large. Are depressed. In the case of leak 2 (double-dot chain line), it decreases linearly up to P2/P1 of 1.9 and more significantly than in the case of leak 1, and when P2/P1 is greater than 1.8, it decreases significantly. Are depressed.

As shown in FIG. 6, no leak, leak 1, and leak 2 have a high linear correlation within a predetermined range of P2/P1, although their slopes are different. The predetermined range in the present embodiment can be appropriately determined within a range in which the above-described correlation appears between models with no leak and models with leak. For example, in the present embodiment, the predetermined range may be appropriately determined from a range in which P2/P1 is greater than 1 and less than the maximum pressure ratio (2.0) of the pressure intensifier 1 . For example, from the viewpoint of enhancing the correlation between the models, the upper limit of the above predetermined range is an appropriate value less than the maximum pressure ratio, such as 0.98 times the maximum pressure ratio, or 0.95 times the maximum pressure ratio. can be set to any value. In this embodiment, for example, the range indicated by the dotted line in FIG. 6, that is, the range between P2/P1 between 1.05 and 1.85 (0.925 times the maximum pressure ratio).

In FIG. 6, the dashed line represents the reference formula in this embodiment. The reference formula is a formula representing a straight line substantially in contact with the solid line in FIG. 6 on the lower side. The straight line represented by the reference formula is, for example, parallel to the straight line represented by the linear function formula obtained by simple regression processing of P2/P1 and Q2/Q1 when there is no leakage within the predetermined range (solid line). Q2/Q1 calculated from the reference equation represents a substantial lower limit of Q2/Q1 when there is no leak, and can be a threshold value for leak detection. Similar to the first embodiment, the reference expression can be set based on previously obtained measured values of the intensifier 1 in the abnormality detection system 10a during normal operation.

[Example of anomaly detection method]
In this embodiment, the abnormality detection method is executed, for example, as follows. In this embodiment, obtaining the first and second flow rates and the first and second pressures is the same as in the third embodiment described above.

The abnormality detection unit 32 calculates P2/P1 and Q2/Q1 based on the measured values acquired by the data acquisition unit 31, respectively. Then, the abnormality detection unit 32 substitutes P2/P1 based on the actual measurement value into the aforementioned reference expression to calculate the threshold value of Q2/Q1. Then, the abnormality detection unit 32 determines whether Q2/Q1 based on the measured value is less than the threshold.

When it is determined that Q2/Q1 based on the actual measurement value is equal to or greater than the threshold, the abnormality detection section 32 does not detect leakage, and the control device 3 terminates the abnormality detection process. When it is determined that Q2/Q1 based on the actual measurement value is less than the threshold, the abnormality detection section 32 transmits a signal to the monitor 4 and the control section 33 to inform the leak in the pressure intensifier 1 . Thereafter, the operation of the solenoid valve 53 by the control unit 33 and the display of leak detection on the monitor 4 are the same as in the first embodiment.

[Effect]
In the present embodiment, the abnormality detection unit 32 detects leakage of the intensifier 1 based on the linear correlation relationship between P2/P1 and Q2/Q1 when P2/P1 is within a predetermined range. According to this configuration, it is possible to detect the presence or absence of a leak in the pressure intensifier 1 using a linear function expression, which is effective from the viewpoint of more easily and precisely detecting a leak.

Further, in this embodiment, for example, the maximum pressure ratio of air by the pressure intensifier 1 is 2.0, and the predetermined range is greater than 1 and less than the maximum pressure ratio (2.0) of the pressure intensifier 1. range, for example 1.05 to 1.85. That is, when the pressure is increased by the pressure intensifier 1, the leak can be precisely detected from around the time when the second pressure is increased to about the first pressure. Therefore, the present embodiment is more effective from the viewpoint of early detection of leaks in the pressure intensifier 1 .

[Modification]
The present embodiment may include improvements or modifications as appropriate within the scope in which the effects of the present embodiment can be obtained. For example, in this embodiment, the predetermined range may be a higher range. For example, the lower limit of the predetermined range may be P2/P1 equal to or greater than 1.4. By increasing the lower limit, it is possible to reduce the possibility of detecting fluctuations in the first pressure and the second pressure during normal operation of the pressure intensifier 1 as a leak, thereby further increasing the accuracy of leak detection. There is expected.

[Example of realization by software]
The control blocks of the control device 3 (especially the data acquisition unit 31, the abnormality detection unit 32 and the control unit 33) may be realized by logic circuits (hardware) formed in an integrated circuit (IC chip) or the like, or by software. may be realized by

In the latter case, the control device 3 is provided with a computer that executes instructions of a program, which is software that implements each function. This computer includes, for example, one or more processors, and a computer-readable recording medium storing the program. In the computer, the processor reads the program from the recording medium and executes it, thereby achieving the object of the present invention. As the processor, for example, a CPU (Central Processing Unit) can be used.

As the recording medium, a "non-temporary tangible medium" such as a ROM (Read Only Memory), a tape, a disk, a card, a semiconductor memory, a programmable logic circuit, or the like can be used. In addition, a RAM (Random Access Memory) for developing the above program may be further provided.

Also, the program may be supplied to the computer via any transmission medium (communication network, broadcast wave, etc.) capable of transmitting the program. Note that one aspect of the present invention can also be implemented in the form of a data signal embedded in a carrier wave in which the program is embodied by electronic transmission.

The present invention is not limited to the above-described embodiments, but can be modified in various ways within the scope of the claims, and can be obtained by appropriately combining technical means disclosed in different embodiments. is also included in the technical scope of the present invention.

1 pressure booster (pressure booster)
3 Control device (abnormality detection device)
4 Monitor 5 Downstream Configuration 10, 10a Abnormality Detection System 21 First Flow Sensor 22 Second Flow Sensor 23 First Pressure Sensor 24 Second Pressure Sensor 31 Data Acquisition Unit (Acquisition Unit)
32 Abnormality detector 33 Control unit 51 Air tank 52 Regulator 53 Solenoid valve 54 Equipment using air 100 Pressure booster 101 Compressor 102 Air line 103 Equipment 110 Packing 111 Pressure booster valve

Claims (9)

an obtaining unit that obtains at least a first flow rate of the fluid upstream and a second flow rate of the fluid downstream of a pressure booster that increases the pressure of the fluid supplied from upstream and supplies it downstream;
an abnormality detection unit configured to detect an abnormality of leakage of the fluid in the pressure increasing device based on the relationship between the first flow rate and the second flow rate. 2. The abnormality detection device according to claim 1, wherein said abnormality detection section detects abnormality of said pressure booster based on a ratio of said second flow rate to said first flow rate. The abnormality according to claim 1, wherein the abnormality detection unit detects abnormality of the pressure booster based on a relationship between the first flow rate and the second flow rate when the first flow rate is within a predetermined range. detection device. the acquisition unit further acquires a first pressure of the fluid upstream and a second pressure of the fluid downstream;
2. The abnormality detection device according to claim 1, wherein said abnormality detection section detects abnormality of said pressure booster based on a relationship between said first flow rate, said first pressure, said second flow rate and said second pressure. The abnormality detection unit detects a difference between the ratio of the second pressure to the first pressure and the ratio of the second flow rate to the first flow rate when the ratio of the second pressure to the first pressure is within a predetermined range. 5. The abnormality detection device according to claim 4, wherein abnormality of said pressure booster is detected based on the relationship. The abnormality detection unit detects a difference between the ratio of the first flow rate to the first pressure and the ratio of the second flow rate to the second pressure when the ratio of the first flow rate to the first pressure is within a predetermined range. 5. The abnormality detection device according to claim 4, wherein abnormality of said pressure booster is detected based on the relationship. 6. The abnormality detection device according to claim 5, wherein the predetermined range is a range in which (the second pressure/the first pressure) is greater than 1 and less than the maximum pressure ratio of the fluid by the pressure booster. an acquiring step of acquiring at least a first flow rate of the fluid upstream and a second flow rate of the fluid downstream of a pressure booster that boosts the pressure of the fluid supplied from upstream and supplies it downstream;
an abnormality detection step of detecting an abnormality of leakage of the fluid in the pressure booster based on the relationship between the first flow rate and the second flow rate. An abnormality detection program for causing a computer to function as the abnormality detection device according to claim 1,
An anomaly detection program for causing a computer to function as the acquisition unit and the anomaly detection unit.

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