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JP7337997B2 - Measuring device and component mounter - Google Patents
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JP7337997B2 - Measuring device and component mounter - Google Patents

Measuring device and component mounter Download PDF

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JP7337997B2
JP7337997B2 JP2022080379A JP2022080379A JP7337997B2 JP 7337997 B2 JP7337997 B2 JP 7337997B2 JP 2022080379 A JP2022080379 A JP 2022080379A JP 2022080379 A JP2022080379 A JP 2022080379A JP 7337997 B2 JP7337997 B2 JP 7337997B2
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light
measured
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angle
tilting
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JP2022107020A (en
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賢司 下坂
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Operations Research (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Description

本明細書は、測定対象の厚み寸法、厚み方向への変形量、厚み方向への傾き角度のいずれかを測定する測定装置及び部品実装機に関する技術を開示したものである。 This specification discloses a technology related to a measuring device and a mounter for measuring any one of the thickness dimension, the amount of deformation in the thickness direction, and the angle of inclination in the thickness direction of an object to be measured.

例えば、回路基板に実装する電子部品の中には、部品ボディの2辺又は4辺に複数のリードが列設されたリード付き電子部品がある。このようなリード付きの電子部品では、一部のリードに曲がり(変形)があると、当該電子部品のリードを回路基板のパッドに半田付けする際に、一部のリードが回路基板のパッドに十分に密着せず、接続不良の原因となる場合がある。 For example, among electronic components mounted on a circuit board, there is an electronic component with leads in which a plurality of leads are arranged along two or four sides of a component body. In such an electronic component with leads, if some of the leads are bent (deformed), when the leads of the electronic component are soldered to the pads of the circuit board, some of the leads will not fit to the pads of the circuit board. It may not be in close contact and may cause poor connection.

そこで、リードの曲がりを検出する方法が特許文献1(特開平1-260349号公報)で提案されている。この検出方法は、図8に示すように、投光器51から平行レーザ光52を受光器53に向けて照射すると共に、電子部品のリード54の列を平行レーザ光52の幅内に位置させる。更に、投光器51と受光器53の位置を、平行レーザ光52をリード54の列に対して斜め下方から照射する斜め下方照射位置と、斜め上方から照射する斜め上方照射位置とに切り替え可能に構成し、事前に、標準的なサンプル部品の曲がりの無いリード54の列を平行レーザ光52の幅内に位置させて、斜め下方照射位置に位置する投光器51から平行レーザ光52をリード54の列に対して斜め下方から照射して、平行レーザ光52のうちのリード54の列で遮光されない部分の光を受光器53で受光して、その受光量の検出値を標準値として記憶装置に記憶しておく。同様に、斜め上方照射位置に移動させた投光器51から平行レーザ光52をリード54の列に対して斜め上方から照射したときの受光器53の受光量を検出して、その検出値を標準値として記憶装置に記憶しておく。その後、生産中は、検査対象となる電子部品のリード54の列を平行レーザ光52の幅内に位置させて、上述したリード54の曲がりの無い標準的なサンプル部品の場合と同様の手順で、斜め下方照射位置と斜め上方照射位置の2箇所で受光器53の受光量を検出し、その受光量の検出値をメモリに記憶された標準値と比較して、両者の差が許容誤差範囲内であるか否かで、リード54の曲がりが無いか有るかを判定するようにしている。 Therefore, a method for detecting lead bending is proposed in Patent Document 1 (Japanese Unexamined Patent Publication No. 1-260349). In this detection method, as shown in FIG. 8, a parallel laser beam 52 is emitted from a light projector 51 toward a light receiver 53, and a row of leads 54 of electronic components is positioned within the width of the parallel laser beam 52. As shown in FIG. Further, the positions of the light projector 51 and the light receiver 53 can be switched between an obliquely downward irradiation position in which the parallel laser beam 52 is irradiated onto the rows of leads 54 from obliquely downward and an obliquely upward irradiation position in which the parallel laser beams 52 are irradiated obliquely upward. Then, a row of leads 54 without bending of a standard sample part is positioned within the width of the parallel laser beam 52 in advance, and the parallel laser beam 52 is emitted from the projector 51 positioned at the obliquely downward irradiation position to the row of the leads 54. is irradiated obliquely from below, the part of the parallel laser beam 52 which is not blocked by the row of leads 54 is received by the light receiver 53, and the detected value of the amount of received light is stored in the storage device as a standard value. Keep Similarly, the amount of light received by the light receiver 53 is detected when the parallel laser beam 52 is irradiated onto the row of leads 54 obliquely from above from the projector 51 moved to the oblique upper irradiation position, and the detected value is the standard value. is stored in the storage device as After that, during production, the row of leads 54 of the electronic component to be inspected is positioned within the width of the parallel laser beam 52, and the same procedure as in the case of a standard sample component without bending of the leads 54 described above is performed. , the amount of light received by the light receiver 53 is detected at two positions, the obliquely downward irradiation position and the obliquely upward irradiation position, and the detected value of the amount of received light is compared with the standard value stored in the memory, and the difference between the two falls within the allowable error range. Whether or not the lead 54 is bent is determined by whether the lead 54 is inside or not.

特開平1-260349号公報JP-A-1-260349

上記特許文献1のリード曲がり検出装置を部品実装機に搭載して、生産中に部品供給装置から供給される電子部品のリードの曲がりの有無を検査することが考えられるが、次のような問題がある。 It is conceivable to install the lead bending detection device of the above-mentioned Patent Document 1 in a component mounting machine and inspect the presence or absence of bending of the leads of electronic components supplied from the component supply device during production, but the following problems arise. There is

部品実装機では、生産中に部品供給装置から供給される電子部品を吸着ノズルで吸着して、その電子部品のリード54の列を平行レーザ光52の幅内に位置させることになる。生産中に、吸着ノズルに吸着した電子部品のリード54の列が必ずしも正確に水平になるとは限らず、少し傾くことがあるが、平行レーザ光52の幅内に位置させたリード54の列が傾いていると、平行レーザ光52のうちのリード54の列で遮光された部分の幅が変化して受光器53の受光量が変化してしまう。このため、リード54の列が傾いていると、曲がりの無いリード54の列であっても、曲がりの有るリード54の列と同様の受光器53の受光量となってしまうことがあり、それによって、リード54の曲がりの有無を誤判定してしまうことがあり、リード54の曲がりの検出信頼性に問題がある。 In the component mounter, an electronic component supplied from a component supply device during production is sucked by a suction nozzle, and the row of leads 54 of the electronic component is positioned within the width of the parallel laser beam 52 . During production, the row of the leads 54 of the electronic component sucked by the suction nozzle is not necessarily exactly horizontal, and may be slightly tilted. If tilted, the width of the portion of the parallel laser beam 52 blocked by the row of leads 54 will change, and the amount of light received by the light receiver 53 will change. Therefore, if the row of the leads 54 is inclined, even if the row of the leads 54 is not bent, the amount of light received by the light receiver 53 may be the same as that of the row of the leads 54 that are bent. As a result, the presence or absence of bending of the lead 54 may be erroneously determined, and there is a problem in the reliability of detecting the bending of the lead 54 .

上記課題を解決するために、測定対象の厚み寸法、厚み方向への変形量、厚み方向への傾き角度のいずれかを測定する測定装置において、前記測定対象の厚み寸法よりも幅広な平行光を前記測定対象に対して照射する投光部と、前記投光部から照射された平行光のうちの前記測定対象で遮光されない部分の光を受光する受光部と、前記受光部の受光状態に基づいて前記平行光のうちの前記測定対象で遮光された部分の幅を測定する測定制御部と、前記投光部と前記受光部とを所定の位置関係で固定したベース部と、前記ベース部を傾動させることで前記平行光の照射角度を変化させる傾動機構部と、前記測定対象の厚みが前記平行光の幅内に収まる位置で前記測定対象を一定の姿勢に保持する保持部とを備え、前記測定制御部は、前記傾動機構部により前記ベース部を傾動させることで前記平行光の照射角度を変化させながら前記平行光のうちの前記測定対象で遮光された部分の幅の測定値が増減するのを観測してその測定値の最小値を求め、その測定値の最小値に基づいて前記測定対象の厚み寸法又は厚み方向への変形量を測定し、或は、前記測定値が最小となったときの前記ベース部の傾き角度に基づいて前記測定対象の厚み方向への傾き角度を測定する、測定装置であって、前記ベース部は、基台に軸を介して傾動可能に支持され、前記傾動機構部は、前記基台に設けられたモータと、前記モータにより回転されるカムと、前記カムに対して前記ベース部側に設けられたカムフォロアと、前記モータと一体に回転する第1のギアと、前記第1のギアと噛み合い前記カムと一体に回転する第2のギアとを備え、前記モータ、前記カム、前記カムフォロア、前記第1のギア及び前記第2のギアは、前記ベース部に対して前記投光部及び前記受光部とは反対側に設けられ、前記第1のギアと前記第2のギアは、前記投光部と前記受光部が並ぶ方向に並んで配置され、前記カムの回転により前記カムフォロアを前記ベース部の傾動方向に往復動させることで前記ベース部を前記軸を支点にして往復傾動させるようにしたものである。 In order to solve the above problems, a measuring device for measuring any one of the thickness dimension of an object to be measured, the amount of deformation in the thickness direction, and the angle of inclination in the thickness direction, is provided with a parallel light that is wider than the thickness dimension of the object to be measured. a light projecting unit that irradiates the object to be measured, a light receiving unit that receives a part of the parallel light emitted from the light projecting unit that is not blocked by the object to be measured, and a light receiving state of the light receiving unit a measurement control section for measuring the width of a portion of the parallel light that is blocked by the measurement target; a base section for fixing the light projecting section and the light receiving section in a predetermined positional relationship; and the base section. a tilting mechanism that changes the irradiation angle of the parallel light by tilting; The measurement control unit tilts the base unit using the tilting mechanism unit to increase or decrease the measured value of the width of the portion of the parallel light that is blocked by the measurement target while changing the irradiation angle of the parallel light. Observe that the measured value is the minimum value, and measure the thickness dimension or the amount of deformation in the thickness direction of the measurement object based on the minimum value of the measured value, or the measured value is the minimum A measuring device for measuring the tilt angle in the thickness direction of the measurement object based on the tilt angle of the base portion when the base portion is tilted, wherein the base portion is tiltably supported by a base via a shaft. , the tilting mechanism includes a motor provided on the base, a cam rotated by the motor, a cam follower provided on the side of the base with respect to the cam, and a second tilt mechanism rotating integrally with the motor. 1 gear and a second gear that meshes with the first gear and rotates integrally with the cam, wherein the motor, the cam, the cam follower, the first gear and the second gear are The light projecting part and the light receiving part are provided on the opposite side of the base part, and the first gear and the second gear are arranged side by side in the direction in which the light projecting part and the light receiving part are arranged. The rotation of the cam reciprocates the cam follower in the tilting direction of the base portion, thereby tilting the base portion reciprocally about the shaft .

この構成では、投光部から測定対象に向けて照射する平行光の照射角度を変化させながら、その平行光のうちの測定対象で遮光された部分の幅の測定値が増減するのを観測して、その測定値の最小値を求める。この際、測定対象が傾いていても、平行光の照射角度が測定対象の傾き角度と一致したときに、平行光のうちの測定対象で遮光された部分の幅の測定値が最小となる。従って、当該測定値の最小値に基づいて測定対象の厚み寸法又は厚み方向への変形量を測定したり、或は、当該測定値が最小となったときのベース部の傾き角度に基づいて測定対象の厚み方向への傾き角度を測定するようにすれば、測定対象が傾いていても、その傾きの影響を受けずに、測定対象の厚み寸法、厚み方向への変形量、厚み方向への傾き角度を精度良く測定することができる。 With this configuration, while changing the irradiation angle of the parallel light emitted from the light projecting unit toward the measurement target, it is observed that the measured value of the width of the portion of the parallel light that is shielded from the measurement target increases or decreases. and find the minimum value of the measured values. At this time, even if the object to be measured is tilted, when the irradiation angle of the parallel light coincides with the inclination angle of the object to be measured, the measured value of the width of the portion of the parallel light that is blocked by the object to be measured is the smallest. Therefore, the thickness dimension or the amount of deformation in the thickness direction of the object to be measured is measured based on the minimum value of the measured values, or the inclination angle of the base portion when the measured value is the minimum is measured. By measuring the tilt angle of the object in the thickness direction, even if the object is tilted, the thickness dimension, the amount of deformation in the thickness direction, and the amount of deformation in the thickness direction can be obtained without being affected by the tilt. The tilt angle can be measured with high precision.

図1は一実施例を示す測定装置の斜視図である。FIG. 1 is a perspective view of a measuring device showing one embodiment. 図2は測定装置の正面図である。FIG. 2 is a front view of the measuring device. 図3は測定装置の上面図である。FIG. 3 is a top view of the measuring device. 図4は傾動機構部を含む主要部の背面図である。FIG. 4 is a rear view of the main parts including the tilting mechanism. 図5は平行レーザ光の照射方向に対してリード列が少し傾いているときの受光部の受光状態を説明する図である。FIG. 5 is a diagram for explaining the light receiving state of the light receiving portion when the lead row is slightly inclined with respect to the irradiation direction of the parallel laser light. 図6はベース部の傾動により平行レーザ光の照射角度がリード列の傾き角度と一致したときの受光部の受光状態を説明する図である。FIG. 6 is a diagram for explaining the light receiving state of the light receiving section when the irradiation angle of the parallel laser light coincides with the tilt angle of the lead row due to the tilting of the base section. 図7は測定装置を搭載した部品実装機の制御系の構成を示すブロック図である。FIG. 7 is a block diagram showing the configuration of the control system of a mounter equipped with a measuring device. 図8は特許文献1のリード曲がり検出方法を説明する図である。FIG. 8 is a diagram for explaining the lead bending detection method of Patent Document 1. As shown in FIG.

以下、本明細書に開示した一実施例を図面を用いて説明する。 An embodiment disclosed in this specification will be described below with reference to the drawings.

まず、図1乃至図6を用いて測定装置10の構成を説明する。 First, the configuration of the measuring device 10 will be described with reference to FIGS. 1 to 6. FIG.

測定装置10の基台11には、部品実装機40(図7参照)に取付固定するための取付フレーム12が設けられている。基台11上には、板状のベース部13が配置され、そのベース部13の上面には、投光部14と受光部15とが所定の位置関係で固定されている。 A base 11 of the measuring device 10 is provided with a mounting frame 12 for mounting and fixing to a component mounter 40 (see FIG. 7). A plate-shaped base portion 13 is arranged on the base 11, and a light projecting portion 14 and a light receiving portion 15 are fixed on the upper surface of the base portion 13 in a predetermined positional relationship.

図示はしないが、投光部14は、レーザ光源で発生したレーザ光を特殊レンズで上下方向に所定の幅をもつ平行レーザ光16に変換してベース部13の上面と平行な方向に出力する。この投光部14の平行レーザ光出力方向には、平行レーザ光16の光路を直角に屈曲させるミラー、プリズム等の光路屈曲部材17が配置されている。平行レーザ光16の上下方向の幅は、測定対象の厚み寸法(上下方向寸法)よりも幅広となるように設定されている。本実施例では、測定対象は、電子部品のリード42の列(図5及び図6参照)である。 Although not shown, the light projection unit 14 converts laser light generated by a laser light source into a parallel laser light 16 having a predetermined width in the vertical direction using a special lens, and outputs the parallel laser light 16 in a direction parallel to the upper surface of the base unit 13. . An optical path bending member 17 such as a mirror or a prism that bends the optical path of the parallel laser beam 16 at right angles is arranged in the output direction of the parallel laser beam of the light projecting portion 14 . The vertical width of the parallel laser beam 16 is set to be wider than the thickness dimension (vertical dimension) of the object to be measured. In this embodiment, the object to be measured is a row of leads 42 of an electronic component (see FIGS. 5 and 6).

一方、受光部15の受光面前方には、投光部14の光路屈曲部材17で直角に屈曲された平行レーザ光16の光路を直角に屈曲させるミラー、プリズム等の光路屈曲部材18が配置され、この光路屈曲部材18で直角に屈曲された平行レーザ光16が受光部15で受光される。これにより、投光部14と受光部15との間の平行レーザ光16の光路は、2つの光路屈曲部材17,18でП状に屈曲され、且つ、投光部14の光路屈曲部材17と受光部15の光路屈曲部材18との間を通る平行レーザ光16の光路がベース部13の上面と平行になるように設定されている。2つの光路屈曲部材17,18間の平行レーザ光16に測定対象を挿入して測定対象の厚み寸法又は厚み方向への変形量(曲がり量)を測定するようになっている。 On the other hand, in front of the light-receiving surface of the light-receiving unit 15, an optical-path bending member 18 such as a mirror, a prism, or the like, which bends the optical path of the parallel laser beam 16 perpendicularly bent by the optical-path bending member 17 of the light-projecting unit 14 is arranged. , the parallel laser beam 16 bent at right angles by the optical path bending member 18 is received by the light receiving portion 15 . As a result, the optical path of the parallel laser beam 16 between the light projecting portion 14 and the light receiving portion 15 is bent in a .psi. The optical path of the parallel laser beam 16 passing between the light receiving portion 15 and the optical path bending member 18 is set to be parallel to the upper surface of the base portion 13 . An object to be measured is inserted into the parallel laser beam 16 between the two optical path bending members 17 and 18 to measure the thickness dimension of the object to be measured or the amount of deformation (amount of bending) in the thickness direction.

受光部15は、受光素子として、CCD、CMOS等の一次元イメージセンサ素子を用いて、平行レーザ光16のうちの測定対象で遮光された部分の幅とその位置の両方を測定できるように構成しても良い。或は、受光部15は、受光する平行レーザ光16をレンズで集光してフォトダイオード等の受光素子で受光し、平行レーザ光16のうちの測定対象で遮光された部分の幅に応じて受光素子の受光量が減少するという特性を利用して、その受光量を検出して、その受光量の検出値から平行レーザ光16のうちの測定対象で遮光された部分の幅を測定するように構成しても良い。 The light receiving unit 15 uses a one-dimensional image sensor element such as a CCD or CMOS as a light receiving element, and is configured to be able to measure both the width and the position of the portion of the parallel laser beam 16 that is blocked by the measurement target. You can Alternatively, the light receiving unit 15 collects the received parallel laser beam 16 with a lens and receives it with a light receiving element such as a photodiode. Utilizing the characteristic that the amount of light received by the light receiving element decreases, the amount of light received is detected, and the width of the portion of the parallel laser beam 16 that is shielded from the measurement target is measured from the detected amount of light received. can be configured to

投光部14と受光部15とを固定したベース部13の下面側には、支持基板21が例えば4箇所の角度調節部22を介して取付けられている。各角度調節部22は、ボルトとナット等により構成され、作業者が各角度調節部22をスパナ等の工具で調節することで、支持基板21に対するベース部13の角度を調節できるようになっている。ベース部13と支持基板21は、基台11に軸23(図4参照)を介して上下方向に一体に傾動可能に支持されている。 A support substrate 21 is attached to the lower surface of the base portion 13 to which the light projecting portion 14 and the light receiving portion 15 are fixed via, for example, four angle adjusting portions 22 . Each angle adjusting portion 22 is configured by a bolt and a nut or the like, and an operator can adjust the angle of the base portion 13 with respect to the support substrate 21 by adjusting each angle adjusting portion 22 with a tool such as a wrench. there is The base portion 13 and the support substrate 21 are supported by the base 11 via a shaft 23 (see FIG. 4) so as to be vertically tiltable together.

図4に示すように、測定装置10には、ベース部13を傾動させることで平行レーザ光16の照射角度を変化させる傾動機構部25が設けられている。この傾動機構部25は、基台11に設けられたモータ26と、このモータ26により回転される偏心カム、楕円カム等のカム27と、ベース部13の支持基板21に設けられたカムフォロア28とを備え、カム27の回転によりカムフォロア28をベース部13の傾動方向である上下方向に往復動させることでベース部13を軸23を支点にして上下方向に往復傾動させるようになっている。モータ26とカム27との間の回転伝達系は、モータ26の回転軸に嵌着された第1のギア30と、カム27と一体に回転する第2のギア31とを噛み合わせて構成されている。図4に示すように、軸23、モータ26、カム27、カムフォロア28、第1のギア30及び第2のギア31は、ベース部13に対して投光部14及び受光部15とは反対側に設けられている。モータ26は、回転角を検出するエンコーダ等の回転角センサを備えたステッピングモータ、サーボモータ等であり、測定動作時には、回転角センサの出力信号に基づいてカム27を1回転させてベース部13を傾動前の角度から上下方向に1往復傾動させて傾動前の角度に戻して停止させるようになっている。 As shown in FIG. 4, the measuring device 10 is provided with a tilting mechanism section 25 that changes the irradiation angle of the parallel laser beam 16 by tilting the base section 13 . The tilting mechanism 25 includes a motor 26 provided on the base 11 , a cam 27 such as an eccentric cam or an elliptical cam rotated by the motor 26 , and a cam follower 28 provided on the support substrate 21 of the base 13 . The rotation of the cam 27 causes the cam follower 28 to reciprocate in the vertical direction, which is the tilting direction of the base portion 13, thereby tilting the base portion 13 in the vertical direction reciprocally about the shaft 23 as a fulcrum. A rotation transmission system between the motor 26 and the cam 27 is constructed by meshing a first gear 30 fitted to the rotating shaft of the motor 26 and a second gear 31 rotating integrally with the cam 27. ing. As shown in FIG. 4, the shaft 23, the motor 26, the cam 27, the cam follower 28, the first gear 30 and the second gear 31 are arranged on the opposite side of the base portion 13 from the light projecting portion 14 and the light receiving portion 15. is provided in The motor 26 is a stepping motor, a servo motor, or the like having a rotation angle sensor such as an encoder for detecting a rotation angle. is vertically tilted one reciprocating motion from the angle before tilting, returned to the angle before tilting, and stopped.

測定装置10には、平行レーザ光16と一定の位置関係が維持される部位に上方から画像認識可能な基準位置部34(図1参照)が設けられている。本実施例では、平行レーザ光16と一定の位置関係が維持される部位である、投光部14側の光路屈曲部材17の上面側の所定位置と受光部15側の光路屈曲部材18の上面側の所定位置の2箇所に基準位置部34が設けられ、2つの光路屈曲部材17,18間の平行レーザ光16のXY方向(水平方向)の向きを特定できるようになっている。 The measurement device 10 is provided with a reference position portion 34 (see FIG. 1) whose image can be recognized from above at a portion where a constant positional relationship with the parallel laser beam 16 is maintained. In this embodiment, a predetermined position on the upper surface side of the optical path bending member 17 on the light projecting unit 14 side and the upper surface of the optical path bending member 18 on the light receiving unit 15 side, which are portions where a constant positional relationship with the parallel laser beam 16 is maintained, Reference position portions 34 are provided at two predetermined positions on the side so that the orientation of the parallel laser beam 16 between the two optical path bending members 17 and 18 in the XY direction (horizontal direction) can be specified.

受光部15、受光部15及び傾動機構部25のモータ26の動作を制御する測定制御部35(図7参照)は、マイクロコンピュータ等により構成され、傾動機構部25によりベース部13を上下方向に傾動させることで平行レーザ光16の照射角度を変化させながら平行レーザ光16のうちの測定対象で遮光された部分の幅の測定値が増減するのを観測してその測定値の最小値を求め、その測定値の最小値に基づいて測定対象の厚み寸法又は厚み方向への変形量を測定するようにしている。 A measurement control unit 35 (see FIG. 7) that controls the operation of the light receiving unit 15, the light receiving unit 15, and the motor 26 of the tilt mechanism unit 25 is composed of a microcomputer or the like. While changing the irradiation angle of the parallel laser beam 16 by tilting, the measured value of the width of the portion of the parallel laser beam 16 that is shielded from the object to be measured increases or decreases, and the minimum value of the measured value is obtained. , the thickness dimension or the amount of deformation in the thickness direction of the object to be measured is measured based on the minimum value of the measured values.

以上のように構成した測定装置10は、部品実装機40(図7参照)の所定位置に着脱可能に取り付けられる。部品実装機40には、回路基板に実装する各種電子部品を供給するテープフィーダ、トレイフィーダ、スティックフィーダ等の部品供給装置41が交換可能にセットされている。部品供給装置41から供給される電子部品の中には、部品ボディの2辺又は4辺に複数のリード42が列設されたリード付き電子部品が含まれる。 The measuring apparatus 10 configured as described above is detachably attached to a predetermined position of the component mounter 40 (see FIG. 7). The component mounter 40 is replaceably set with a component feeder 41 such as a tape feeder, a tray feeder, a stick feeder, etc. for feeding various electronic components to be mounted on a circuit board. Electronic components supplied from the component supply device 41 include electronic components with leads in which a plurality of leads 42 are arranged along two or four sides of a component body.

部品実装機40は、回路基板を搬送するコンベア43と、部品供給装置41が供給する電子部品をピックアップして保持する吸着ノズル又はチャック等の保持部(図示せず)を交換可能に取り付けた実装ヘッド(図示せず)と、この実装ヘッドをXY方向(前後左右方向)とZ方向(上下方向)に移動させる実装ヘッド移動装置44と、保持部でピックアップして保持した電子部品を下方から撮像する部品撮像用カメラ45と、回路基板の基準位置マーク等を上方から撮像するマーク撮像用カメラ46とを備えている。部品撮像用カメラ45は、部品実装機40の所定位置に上向きに固定されている。マーク撮像用カメラ46は、実装ヘッド側に下向きに取り付けられ、実装ヘッド移動装置44によって実装ヘッドと一体的に移動する。部品実装機40内における測定装置10の位置は、実装ヘッドの保持部の移動可能範囲内に測定装置10の平行レーザ光16が位置するように設定されている。 The component mounter 40 includes a conveyor 43 that conveys a circuit board and a holding unit (not shown) such as a suction nozzle or chuck that picks up and holds electronic components supplied by a component supply device 41. A head (not shown), a mounting head moving device 44 that moves the mounting head in the XY directions (front, back, left, and right) and the Z direction (up and down), and an electronic component picked up and held by the holding portion are imaged from below. and a mark imaging camera 46 for imaging the reference position mark of the circuit board from above. The component imaging camera 45 is fixed upward at a predetermined position of the component mounter 40 . The mark imaging camera 46 is attached downward on the mounting head side, and is moved integrally with the mounting head by the mounting head moving device 44 . The position of the measuring device 10 in the component mounter 40 is set so that the parallel laser beam 16 of the measuring device 10 is positioned within the movable range of the holding portion of the mounting head.

部品実装機40の制御部47は、1台又は複数台のコンピュータにより構成され、部品実装機40の上述した各機能の動作を制御する。この部品実装機40の制御部47は、部品供給装置41から供給される電子部品がリード付き電子部品である場合には、当該電子部品を実装ヘッドの保持部でピックアップして測定装置10側へ移動させると共に、マーク撮像用カメラ46で測定装置10の基準位置部34を撮像して画像認識することで当該基準位置部34の位置を基準にして測定装置10の2つの光路屈曲部材17,18間の平行レーザ光16の位置を測定し、その測定値に基づいて実装ヘッドを平行レーザ光16の上方へ移動させて、当該実装ヘッドの保持部に保持された電子部品の測定対象であるリード42の列を平行レーザ光16の幅内に収めて一定の角度に保持した状態(つまり測定装置10のベース部13が傾動してもリード42の列が傾動しないように一定の角度に保持した状態)で、部品実装機40の制御部47から測定装置10の測定制御部35へ測定実行指令信号を送信して、次のようにしてリード42の厚み寸法又は厚み方向への変形量を測定する。 The control unit 47 of the component mounter 40 is composed of one or more computers, and controls the operation of each function of the component mounter 40 described above. When the electronic component supplied from the component supply device 41 is an electronic component with leads, the control unit 47 of the component mounter 40 picks up the electronic component with the holding portion of the mounting head and transfers it to the measuring device 10 side. In addition to moving, the reference position portion 34 of the measuring device 10 is imaged by the mark imaging camera 46 and the image is recognized. Measure the position of the parallel laser beam 16 between the leads, move the mounting head above the parallel laser beam 16 based on the measured value, and measure the lead of the electronic component held by the holding portion of the mounting head. 42 are held within the width of the parallel laser beam 16 and held at a constant angle (i.e., even if the base portion 13 of the measuring device 10 tilts, the rows of the leads 42 are held at a constant angle so as not to tilt). state), a measurement execution command signal is transmitted from the control unit 47 of the mounter 40 to the measurement control unit 35 of the measuring apparatus 10, and the thickness dimension or the amount of deformation in the thickness direction of the lead 42 is measured as follows. do.

測定装置10の測定制御部35は、部品実装機40の制御部47から測定実行指令信号を受信すると、投光部14から平行レーザ光16を出力すると共に、傾動機構部25のモータ26を起動してカム27を1回転させてベース部13を軸23を支点にして傾動前の角度から上下方向に1往復傾動させることで、平行レーザ光16を傾動前の角度から上下方向に1往復傾動させて傾動前の角度に戻して停止させる。これにより、測定制御部35は、図5から図6に示すように、平行レーザ光16の照射角度を変化させながら受光部15の受光信号を取り込んで平行レーザ光16のうちのリード42の列で遮光された部分の幅の測定値が増減するのを観測してその測定値の最小値を求め、その測定値の最小値に基づいてリード42の厚み寸法又は厚み方向への変形量を測定する。 When the measurement execution command signal is received from the control unit 47 of the component mounter 40, the measurement control unit 35 of the measuring apparatus 10 outputs the parallel laser beam 16 from the light projecting unit 14 and activates the motor 26 of the tilting mechanism unit 25. Then, the cam 27 is rotated once, and the base portion 13 is vertically tilted one reciprocating motion from the angle before tilting with the shaft 23 as a fulcrum. to return to the angle before tilting and stop. 5 and 6, the measurement control unit 35 acquires the light reception signal of the light receiving unit 15 while changing the irradiation angle of the parallel laser beam 16, and detects the row of the leads 42 in the parallel laser beam 16. Observe the increase or decrease in the measured value of the width of the light-shielded portion, obtain the minimum value of the measured value, and measure the thickness dimension or the amount of deformation in the thickness direction of the lead 42 based on the minimum value of the measured value. do.

例えば、曲がりの無いリード42の列であっても、図5に示すように、平行レーザ光16の照射方向(光軸)に対してリード42の列が傾いている場合には、平行レーザ光16のうちのリード42の列で遮光された部分の幅がリード42の列の傾き角度に応じて大きくなるが、図6に示すように、平行レーザ光16の照射方向(光軸)の傾き角度がリード42の列の傾き角度と一致すると、平行レーザ光16のうちのリード42の列で遮光された部分の幅が最小となる。従って、測定制御部35は、平行レーザ光16を傾動前の角度から上下方向に1往復傾動させて、平行レーザ光16のうちのリード42の列で遮光された部分の幅の測定値が増減するのを観測してその測定値の最小値を求め、その測定値の最小値に基づいてリード42の厚み寸法(又は厚み方向への変形量)を測定し、その測定値がリード42の厚み寸法の許容誤差範囲内に収まっていれば、リード42の列が正常(リード42の厚み寸法が許容誤差範囲内で且つリード42の曲がり無し)と判定し、一方、当該測定値がリード42の厚み寸法の許容誤差範囲を外れていれば、リード42の列が異常(リード42の曲がり有り又はリード42の厚み寸法が不適正)と判定する。このリード42の列の正常/異常の判定結果は、測定制御部35から部品実装機40の制御部47へ送信される。 For example, even if the row of leads 42 does not bend, as shown in FIG. 16, the width of the portion shielded by the row of the leads 42 increases according to the inclination angle of the row of the leads 42. However, as shown in FIG. When the angle coincides with the inclination angle of the row of leads 42, the width of the portion of the parallel laser beam 16 blocked by the row of leads 42 is minimized. Therefore, the measurement control unit 35 tilts the parallel laser beam 16 one reciprocating motion in the vertical direction from the angle before tilting, and the measured value of the width of the portion of the parallel laser beam 16 blocked by the row of the leads 42 increases or decreases. The thickness of the lead 42 (or the amount of deformation in the thickness direction) of the lead 42 is measured based on the minimum value of the measured value, and the measured value is the thickness of the lead 42. If the dimensions are within the allowable error range, the row of the leads 42 is determined to be normal (the thickness dimension of the leads 42 is within the allowable error range and the leads 42 are not bent). If the thickness is out of the allowable error range, it is determined that the row of the leads 42 is abnormal (the leads 42 are bent or the thickness of the leads 42 is inappropriate). The determination result of normality/abnormality of the row of leads 42 is transmitted from the measurement control section 35 to the control section 47 of the component mounter 40 .

尚、測定制御部35から平行レーザ光16のうちのリード42の列で遮光された部分の幅の測定値を部品実装機40の制御部47へ送信して、部品実装機40の制御部47が当該測定値の最小値を求めて、当該測定値の最小値に基づいてリード42の厚み寸法(又は厚み方向への変形量)を測定し、その測定値がリード42の厚み寸法の許容誤差範囲内に収まっているか否かで、リード42の列の正常/異常を判定するようにしても良い。或は、測定制御部35で測定値の最小値を求める処理まで行い、測定制御部35から当該測定値の最小値を部品実装機40の制御部47へ送信して、部品実装機40の制御部47で当該測定値の最小値から求めたリード42の厚み寸法(又は厚み方向への変形量)の測定値がリード42の厚み寸法の許容誤差範囲内に収まっているか否かで、リード42の列の正常/異常を判定するようにしても良い。 The measurement control unit 35 transmits the measured value of the width of the portion of the parallel laser beam 16 that is blocked by the row of the leads 42 to the control unit 47 of the component mounter 40 . obtains the minimum value of the measured values, measures the thickness dimension (or the amount of deformation in the thickness direction) of the lead 42 based on the minimum value of the measured values, and the measured value is the allowable error of the thickness dimension of the lead 42 The normality/abnormality of the row of leads 42 may be determined based on whether or not they are within the range. Alternatively, the measurement control unit 35 performs processing up to obtaining the minimum value of the measured values, and the measurement control unit 35 transmits the minimum value of the measured values to the control unit 47 of the component mounter 40 to control the component mounter 40. Based on whether or not the measured value of the thickness dimension (or the amount of deformation in the thickness direction) of the lead 42 obtained from the minimum value of the measured values in the section 47 falls within the allowable error range of the thickness dimension of the lead 42, the lead 42 The normality/abnormality of the column may be determined.

電子部品の各辺のリード42の列毎に、上述した方法でリード42の列の正常/異常を判定する。その結果、部品実装機40の制御部47は、電子部品のいずれかの辺のリード42の列に異常有りと判定した場合には、実装ヘッドを所定の廃棄場所の上方へ移動させて当該電子部品を当該所定の廃棄場所に廃棄する。 For each row of leads 42 on each side of the electronic component, normality/abnormality of the row of leads 42 is determined by the method described above. As a result, when the controller 47 of the component mounter 40 determines that there is an abnormality in the row of the leads 42 on any side of the electronic component, the controller 47 moves the mounting head above a predetermined disposal site to dispose of the electronic component. Dispose of the parts at the predetermined disposal site.

一方、部品実装機40の制御部47は、電子部品の全てのリード42の列が正常であると判定した場合には、実装ヘッドを部品撮像用カメラ45の上方に移動させて、実装ヘッドの保持部に保持されている電子部品を部品撮像用カメラ45で撮像して画像認識することで、当該電子部品の位置や角度のずれ量を計測して、実装ヘッドを回路基板の上方へ移動させ、当該電子部品の位置や角度のずれ量を補正して、当該電子部品のリード42を回路基板のランドに半田付けする。 On the other hand, when the control unit 47 of the component mounter 40 determines that all the rows of the leads 42 of the electronic component are normal, it moves the mounting head above the component imaging camera 45 to move the mounting head. By capturing an image of the electronic component held by the holding portion with the component imaging camera 45 and recognizing the image, the amount of deviation of the position and angle of the electronic component is measured, and the mounting head is moved above the circuit board. Then, the lead 42 of the electronic component is soldered to the land of the circuit board after correcting the deviation amount of the position and angle of the electronic component.

以上説明した本実施例によれば、測定装置10の傾動機構部25によって平行レーザ光16の照射角度を変化させながら受光部15の受光信号を取り込んで平行レーザ光16のうちのリード42の列で遮光された部分の幅の測定値が増減するのを観測してその測定値の最小値を求め、その測定値の最小値に基づいてリード42の厚み寸法(又は厚み方向への変形量)を測定するようにしたので、平行レーザ光16の光軸に対してリード42の列が傾いていても、その傾きの影響を受けずに、リード42の厚み寸法又は厚み方向への変形量を精度良く測定することができる。 According to the present embodiment described above, the tilting mechanism 25 of the measuring apparatus 10 changes the irradiation angle of the parallel laser beam 16 while the light receiving signal of the light receiving unit 15 is taken in and the row of the leads 42 of the parallel laser beam 16 is detected. Observe that the measured value of the width of the light-shielded portion increases or decreases, obtain the minimum value of the measured value, and based on the minimum value of the measured value, the thickness dimension (or the amount of deformation in the thickness direction) of the lead 42 Therefore, even if the row of the leads 42 is tilted with respect to the optical axis of the parallel laser beam 16, the thickness dimension or the amount of deformation in the thickness direction of the leads 42 can be measured without being affected by the tilt. Accurate measurement is possible.

尚、本実施例では、測定対象を電子部品のリード42の列としたが、電子部品のボディ部分の所定部位としても良い。 In this embodiment, the array of leads 42 of the electronic component is measured, but a predetermined portion of the body of the electronic component may be measured.

また、本実施例では、測定装置10を部品実装機40に取り付けて使用するようにしたが、部品実装機40以外の機器に使用しても良い。従って、測定対象は、電子部品の所定部位に限定されず、電子部品以外の物品を測定対象としても良い。 Also, in this embodiment, the measuring device 10 is attached to the component mounter 40 and used, but it may be used for devices other than the component mounter 40. FIG. Therefore, the object to be measured is not limited to a predetermined portion of the electronic component, and an article other than the electronic component may be the object to be measured.

測定装置10の平行レーザ光16の照射方向もほぼ水平方向に限定されず、上下方向等、ほぼ水平方向以外の方向であっても良い。一般に、測定対象の厚み方向は、平行レーザ光の幅方向(照射方向に対して直角方向)である。 The irradiation direction of the parallel laser beam 16 of the measuring device 10 is not limited to the substantially horizontal direction, and may be a direction other than the substantially horizontal direction such as the vertical direction. In general, the thickness direction of the object to be measured is the width direction of the parallel laser light (perpendicular to the irradiation direction).

また、平行レーザ光16のうちのリード42の列で遮光された部分の幅の測定値が増減するのを観測してその測定値が最小となったときのベース部13の傾き角度(平行レーザ光16の照射角度)に基づいて測定対象の厚み方向への傾き角度を測定するようにしても良い。この際、ベース部13の傾き角度(平行レーザ光16の照射角度)の測定方法は、傾動機構部25のモータ26の回転角を検出するエンコーダ等の回転角センサの出力信号に基づいてベース部13の傾き角度を測定するようにしても良いし、或は、ベース部13の傾き角度を検出するセンサを設けても良い。 In addition, the inclination angle of the base portion 13 (parallel laser The angle of inclination in the thickness direction of the object to be measured may be measured based on the irradiation angle of the light 16). At this time, the tilt angle of the base portion 13 (irradiation angle of the parallel laser beam 16) is measured based on the output signal of a rotation angle sensor such as an encoder that detects the rotation angle of the motor 26 of the tilting mechanism portion 25. Alternatively, a sensor for detecting the inclination angle of the base portion 13 may be provided.

また、本実施例では、投光部14と受光部15との間の平行レーザ光16の光路を2つの光路屈曲部材17,18でП状に屈曲させる構成としたが、光路屈曲部材17,18を無くして、投光部14と受光部15とを対向させて投光部14と受光部15との間の平行レーザ光の光路が一直線となるように構成しても良い。 In this embodiment, the optical path of the parallel laser beam 16 between the light projecting portion 14 and the light receiving portion 15 is bent in a .psi.-shape by the two optical path bending members 17 and 18. 18 may be omitted, and the light projecting portion 14 and the light receiving portion 15 may be opposed to each other so that the optical path of the parallel laser light between the light projecting portion 14 and the light receiving portion 15 is a straight line.

その他、本発明は、上記実施例に限定されず、例えば、傾動機構部25の構成を変更したり、レーザ光以外の種類の平行光を用いても良い等、要旨を逸脱しない範囲内で種々変更して実施できることは言うまでもない。 In addition, the present invention is not limited to the above-described embodiments, and various modifications may be made without departing from the scope of the invention, such as by changing the configuration of the tilting mechanism 25, or by using a type of parallel light other than laser light. Needless to say, it can be changed and implemented.

10…測定装置、11…基台、13…ベース部、14…投光部、15…受光部、16…平行レーザ光(平行光)、17,18…光路屈曲部材、21…支持基板、22…角度調節部、23…軸、25…傾動機構部、26…モータ、27…カム、28…カムフォロア、34…基準位置部、35…測定制御部、40…部品実装機、41…部品供給装置、42…リード(測定対象)、44…実装ヘッド移動装置、46…マーク撮像用カメラ、47…部品実装機の制御部 DESCRIPTION OF SYMBOLS 10... Measuring apparatus 11... Base 13... Base part 14... Light-projecting part 15... Light-receiving part 16... Parallel laser beam (parallel light) 17, 18... Optical path bending member 21... Support substrate 22 ... Angle adjusting section 23 ... Shaft 25 ... Tilting mechanism section 26 ... Motor 27 ... Cam 28 ... Cam follower 34 ... Reference position section 35 ... Measurement control section 40 ... Component mounter 41 ... Component supply device , 42... Lead (measurement object), 44... Mounting head moving device, 46... Mark imaging camera, 47... Control section of component mounter

Claims (8)

測定対象の厚み寸法、厚み方向への変形量、厚み方向への傾き角度のいずれかを測定する測定装置において、
前記測定対象の厚み寸法よりも幅広な平行光を前記測定対象に対して照射する投光部と、
前記投光部から照射された平行光のうちの前記測定対象で遮光されない部分の光を受光する受光部と、
前記受光部の受光状態に基づいて前記平行光のうちの前記測定対象で遮光された部分の幅を測定する測定制御部と、
前記投光部と前記受光部とを所定の位置関係で固定したベース部と、
前記ベース部を傾動させることで前記平行光の照射角度を変化させる傾動機構部と、
前記測定対象の厚みが前記平行光の幅内に収まる位置で前記測定対象を一定の姿勢に保持する保持部と
を備え、
前記測定制御部は、前記傾動機構部により前記ベース部を傾動させることで前記平行光の照射角度を変化させながら前記平行光のうちの前記測定対象で遮光された部分の幅の測定値が増減するのを観測してその測定値の最小値を求め、その測定値の最小値に基づいて前記測定対象の厚み寸法又は厚み方向への変形量を測定し、或は、前記測定値が最小となったときの前記ベース部の傾き角度に基づいて前記測定対象の厚み方向への傾き角度を測定する、測定装置であって、
前記ベース部は、基台に軸を介して傾動可能に支持され、
前記傾動機構部は、前記基台に設けられたモータと、前記モータにより回転されるカムと、前記カムに対して前記ベース部側に設けられたカムフォロアと、前記モータと一体に回転する第1のギアと、前記第1のギアと噛み合い前記カムと一体に回転する第2のギアとを備え、
前記モータ、前記カム、前記カムフォロア、前記第1のギア及び前記第2のギアは、前記ベース部に対して前記投光部及び前記受光部とは反対側に設けられ、
前記第1のギアと前記第2のギアは、前記投光部と前記受光部が並ぶ方向に並んで配置され、
前記カムの回転により前記カムフォロアを前記ベース部の傾動方向に往復動させることで前記ベース部を前記軸を支点にして往復傾動させる、測定装置。
In a measuring device that measures any of the thickness dimension of the object to be measured, the amount of deformation in the thickness direction, and the angle of inclination in the thickness direction,
a light projecting unit that irradiates the object to be measured with parallel light wider than the thickness dimension of the object to be measured;
a light-receiving unit that receives a portion of the parallel light emitted from the light-projecting unit that is not shielded by the measurement object;
a measurement control unit that measures the width of a portion of the parallel light that is blocked by the measurement target based on the light receiving state of the light receiving unit;
a base portion fixing the light projecting portion and the light receiving portion in a predetermined positional relationship;
a tilting mechanism that changes an irradiation angle of the parallel light by tilting the base;
a holding unit that holds the object to be measured in a fixed posture at a position where the thickness of the object to be measured falls within the width of the parallel light;
The measurement control unit tilts the base unit using the tilting mechanism unit to increase or decrease the measured value of the width of the portion of the parallel light that is blocked by the measurement object while changing the irradiation angle of the parallel light. Observe that the measured value is the minimum value, and measure the thickness dimension or the amount of deformation in the thickness direction of the measurement object based on the minimum value of the measured value, or the measured value is the minimum A measuring device that measures the tilt angle in the thickness direction of the measurement object based on the tilt angle of the base portion when the
the base portion is tiltably supported by a base through a shaft;
The tilting mechanism includes a motor provided on the base, a cam rotated by the motor, a cam follower provided on the side of the base with respect to the cam, and a first tilt mechanism rotating integrally with the motor. and a second gear that meshes with the first gear and rotates integrally with the cam,
the motor, the cam, the cam follower, the first gear and the second gear are provided on the opposite side of the base portion from the light projecting portion and the light receiving portion;
the first gear and the second gear are arranged side by side in a direction in which the light projecting section and the light receiving section are arranged;
The measuring device according to claim 1, wherein the rotation of the cam causes the cam follower to reciprocate in the tilting direction of the base, thereby tilting the base in a reciprocating manner about the shaft.
前記軸は、前記ベース部に対して前記投光部及び前記受光部とは反対側に設けられ
前記ベース部の前記投光部及び前記受光部が配置される側から見たときに、前記モータ、前記カム、前記カムフォロア、前記第1のギア、前記第2のギア及び前記軸は、前記投光部から前記受光部までの幅に収まるように配置されている、請求項1に記載の測定装置。
the shaft is provided on the opposite side of the base portion from the light projecting portion and the light receiving portion ;
When viewed from the side of the base portion on which the light projecting portion and the light receiving portion are arranged, the motor, the cam, the cam follower, the first gear, the second gear, and the shaft The measuring device according to claim 1 , arranged so as to fit within the width from the light section to the light receiving section .
前記投光部の前記平行光の出力方向には、前記平行光の光路を直角に屈曲させる第1の光路屈曲部材が配置され、a first optical path bending member that bends the optical path of the parallel light at right angles is disposed in the output direction of the parallel light from the light projecting unit;
前記受光部の受光面前方には、前記第1の光路屈曲部材で直角に屈曲された前記平行光の光路を直角に屈曲させる第2の光路屈曲部材が配置されている、請求項1又は2に記載の測定装置。3. A second optical path bending member is arranged in front of the light receiving surface of the light receiving unit to perpendicularly bend the optical path of the parallel light that has been bent at right angles by the first optical path bending member. The measuring device according to .
前記測定制御部は、前記測定値の最小値を求める際に前記ベース部を傾動前の角度から1往復傾動させて前記傾動前の角度に戻して停止させる、請求項1乃至3のいずれかに記載の測定装置。 4. The measurement control unit according to any one of claims 1 to 3, wherein when obtaining the minimum value of the measured values, the base unit is tilted one reciprocating motion from an angle before tilting, returned to the angle before tilting, and then stopped. Measurement device as described. 前記ベース部の傾動前の角度を調節する角度調節部を備える、請求項1乃至のいずれかに記載の測定装置。 5. The measuring device according to any one of claims 1 to 4 , further comprising an angle adjuster for adjusting an angle of said base before tilting. 請求項1乃至のいずれかに記載の測定装置を搭載した部品実装機であって、
前記保持部は、実装ヘッドに取り付けられた吸着ノズル又はチャックであり、
前記測定装置は、前記ベース部の傾動前に前記平行光の照射方向が水平方向で且つ前記平行光の幅方向が上下方向となるように搭載され、
前記測定対象は、前記吸着ノズル又は前記チャックに保持された電子部品の所定部位であり、
前記測定制御部は、前記移動装置により前記実装ヘッドを前記平行光の上方へ移動させて前記吸着ノズル又は前記チャックに保持された電子部品の所定部位を前記平行光の幅内に収めて一定の角度に保持した状態で、前記傾動機構部により前記ベース部を傾動させることで前記電子部品の所定部位の厚み寸法、厚み方向への変形量、厚み方向への傾き角度のいずれかを測定する、部品実装機。
A component mounter equipped with the measuring device according to any one of claims 1 to 5 ,
The holding part is a suction nozzle or chuck attached to the mounting head,
The measuring device is mounted so that the irradiation direction of the parallel light is the horizontal direction and the width direction of the parallel light is the vertical direction before the base portion is tilted,
The object to be measured is a predetermined portion of the electronic component held by the suction nozzle or the chuck,
The measurement control unit moves the mounting head above the parallel light by the moving device to fit a predetermined portion of the electronic component held by the suction nozzle or the chuck within the width of the parallel light. By tilting the base portion by the tilting mechanism portion while holding the electronic component at an angle, any one of the thickness dimension, the amount of deformation in the thickness direction, and the angle of inclination in the thickness direction of the predetermined portion of the electronic component is measured. Component mounting machine.
前記測定対象は、前記電子部品のリード列である、請求項に記載の部品実装機。 7. The component mounter according to claim 6 , wherein said object to be measured is a lead row of said electronic component. 前記測定制御部で測定した前記電子部品の所定部位の測定値が許容誤差範囲から外れていると判定した場合には、前記実装ヘッドを所定の廃棄場所の上方へ移動させて当該電子部品を当該所定の廃棄場所に廃棄する、請求項又はに記載の部品実装機。 When it is determined that the measurement value of the predetermined portion of the electronic component measured by the measurement control unit is out of the allowable error range, the mounting head is moved above a predetermined disposal site to remove the electronic component. 8. The mounter according to claim 6 or 7 , which disposes at a predetermined disposal site.
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Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS631041A (en) * 1986-06-20 1988-01-06 Seiko Epson Corp Semiconductor leg bending inspection device
JPH0432532U (en) * 1990-07-11 1992-03-17
US5278634A (en) * 1991-02-22 1994-01-11 Cyberoptics Corporation High precision component alignment sensor system
JPH0563396A (en) * 1991-09-02 1993-03-12 Tdk Corp Method and apparatus for insertion of electronic component
JPH05299891A (en) * 1992-04-24 1993-11-12 Matsushita Electric Ind Co Ltd Electronic component pickup error detection method
JP2746810B2 (en) * 1993-02-25 1998-05-06 ジューキ株式会社 Method for measuring the inclination and position of a component sucked by a suction nozzle
JP3320815B2 (en) * 1993-02-26 2002-09-03 ヤマハ発動機株式会社 Electronic component inspection method and device
JPH07122896A (en) * 1993-10-26 1995-05-12 Yamatake Honeywell Co Ltd Position and orientation measuring method and device for electronic parts
US6118538A (en) 1995-01-13 2000-09-12 Cyberoptics Corporation Method and apparatus for electronic component lead measurement using light based sensors on a component placement machine
JP3417773B2 (en) * 1995-11-28 2003-06-16 ヤマハ発動機株式会社 Chip component position detection method
JPH09229638A (en) * 1996-02-26 1997-09-05 Daido Steel Co Ltd Method and apparatus for measuring thickness and inclination angle of rectangular section material
JPH1062126A (en) * 1996-08-13 1998-03-06 Omron Corp Dimension measuring device
KR100238269B1 (en) * 1996-09-24 2000-01-15 윤종용 Coplanarity measurment apparatus for IC package lead fin
JPH1144508A (en) * 1997-07-24 1999-02-16 Genichi Tagata Component mounting method and device
JP3957839B2 (en) * 1997-10-22 2007-08-15 協立電機株式会社 Non-contact positioning method and apparatus for chip parts
DE19823942C1 (en) * 1998-05-28 1999-10-07 Siemens Ag Coplanarity testing method e.g. for row of contacts of SMD
JP4428794B2 (en) * 1999-12-08 2010-03-10 富士機械製造株式会社 Electrical component position detection method and electrical circuit assembly method
JP2003106809A (en) * 2001-09-28 2003-04-09 Anritsu Corp Displacement measuring system
CN101091426B (en) * 2005-03-29 2011-05-18 松下电器产业株式会社 Component shape drawing method and component mounting method
JP5140973B2 (en) * 2006-09-14 2013-02-13 カシオ計算機株式会社 Measuring surface tilt measuring device, projector and measuring surface tilt measuring method
JP4999502B2 (en) * 2007-03-12 2012-08-15 ヤマハ発動機株式会社 Component transfer device and surface mounter
JP2011191221A (en) * 2010-03-16 2011-09-29 Sanyo Electric Co Ltd Object detection device and information acquisition device
KR101158323B1 (en) * 2010-10-14 2012-06-26 주식회사 고영테크놀러지 Method for inspecting substrate
CN103308007B (en) * 2013-05-24 2016-01-20 华南理工大学 The IC pin coplanarity measuring system of higher order reflection and grating image and method
CN106604628B (en) * 2015-10-20 2019-07-12 泰科电子(上海)有限公司 System for determining the installation condition of the pin of electric connector
JP6447728B2 (en) * 2016-04-12 2019-01-09 新日鐵住金株式会社 Inspected object imaging apparatus, inspected object imaging method, surface inspection apparatus, and surface inspection method

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