JP7353938B2 - Component mounter, nozzle blow pressure calibration method - Google Patents

Description

The present invention relates to a technique for supplying positive pressure to a plurality of nozzles arranged circumferentially in a so-called rotary mounting head.

Patent Document 1 describes a rotary mounting head that includes a plurality of nozzles arranged in a circumferential manner. This mounting head attracts components to the nozzle by supplying negative pressure to the nozzle. Furthermore, when mounting a component on a board, positive pressure is supplied to the nozzle to separate the component from the nozzle. Specifically, as shown in FIG. 41, the air supply source and the nozzle are connected to each other, and a variable throttle valve is provided in the connection path between the air supply source and the nozzle. Then, positive pressure corresponding to the opening degree of the throttle valve is supplied to the nozzle.

Patent No. 3802955

Incidentally, the rotary head can be constructed by arranging a nozzle holder that holds a plurality of circumferentially arranged nozzles in a hollow portion provided in a housing. In such a configuration, the nozzle holder is provided with a plurality of positive pressure communication passages corresponding to a plurality of nozzles, while the housing is provided with a predetermined number of positive pressure communication passages corresponding to a predetermined number (for example, two) of working positions. The introduction hole passes through it. Of the plurality of positive pressure communication passages, the opening of the positive pressure communication passage corresponding to the nozzle located at the working position faces the opening of the positive pressure introduction hole, and the nozzle at the working position communicates with the positive pressure input hole of the housing. do. Thereby, positive pressure can be supplied to the nozzle from the positive pressure introduction hole through the positive pressure communication path of the nozzle holder.

Incidentally, in the rotary head having the above configuration, the nozzle holder may be arranged eccentrically with respect to the hollow part of the housing. In such a case, the size of the gap between the inner wall of the housing and the outer wall of the nozzle holder differs depending on the positive pressure introduction hole, so the amount of gas leaking from the gap is different for each positive pressure introduction hole, and each nozzle The flow rate and pressure of the gas ejected varies. As a result, it was difficult to achieve gas jetting from all nozzles suitable for removing parts.

To solve this problem, for example, the throttle valve shown in Patent Document 1 can be used. However, if such a throttle valve is provided for each nozzle, the number of components increases and costs increase. In this respect, Patent Document 1 has room for improvement.

The present invention has been made in view of the above-mentioned problems, and aims to provide a technology that enables a nozzle to eject gas suitable for detaching parts while suppressing an increase in the number of components and costs.

The component mounting machine according to the present invention has a main body surrounding a hollow part, and L positive pressure introduction holes provided corresponding to L work positions (L is an integer of 2 or more), and has a positive pressure introduction hole. A housing having an introduction hole penetrating the main body and opening into the hollow part, and M pieces arranged in a circumferential manner (M is from L to A nozzle holder that holds a nozzle (a large integer), a positive pressure source that outputs positive pressure, and a nozzle holder that is provided corresponding to L positive pressure introduction holes, and connects each corresponding positive pressure introduction hole and positive pressure source. an adjustment unit that adjusts the difference between the L positive pressure introduction paths and the target value of one of the pressure and flow rate of gas flowing into the positive pressure introduction holes from the positive pressure introduction paths; The nozzle holder is provided with M positive pressure communication passages corresponding to the M nozzles, and by rotating the nozzle holder, L of the M nozzles can be moved to working positions. The L nozzles located at the L positions are switched, and among the M positive pressure communication paths, the openings of the L positive pressure communication paths corresponding to the L nozzles located at the L working positions become L positive pressure introduction holes. L nozzles and L positive pressure input holes communicate with each other, facing the opening.

In the present invention (component mounting machine) configured in this way, a nozzle holder that holds M nozzles arranged circumferentially is arranged in a hollow part provided in the housing. The nozzle holder is provided with M positive pressure communication passages corresponding to M nozzles, while the housing is provided with L positive pressure communication passages corresponding to L working positions (L is an integer smaller than M, 2 or more). The positive pressure introduction hole penetrates through it. Among the M positive pressure communication passages, the openings of the L positive pressure communication passages corresponding to the L nozzles located at the L working positions are opposed to the openings of the L positive pressure introduction holes, The L nozzles at the position communicate with the L positive pressure input holes of the housing. Thereby, positive pressure can be supplied from the L positive pressure introduction holes to the L nozzles via the L positive pressure communication passages of the nozzle holder.

Further, in the present invention, the adjustment section adjusts the difference between the target values of one of the pressure and flow rate of the gas flowing into the positive pressure introduction hole from the positive pressure introduction path among the L positive pressure introduction holes. Therefore, even if the nozzle holder is placed eccentrically with respect to the hollow part of the housing and the size of the gap between the inner wall of the housing and the outer wall of the nozzle holder differs depending on each positive pressure introduction hole, the jet from each nozzle By adjusting the flow rate and pressure of the gas to be released, it is possible to realize the jetting of gas from the nozzle that is suitable for separating the parts. Furthermore, since the adjustment unit adjusts the difference in target values not for all M nozzles but for L nozzles out of M nozzles, it requires fewer components. An adjustment section can be configured. Thus, in the present invention, it is possible to eject gas suitable for detaching components from the nozzle while suppressing an increase in the number of components and costs.

Furthermore, among the L positive pressure introduction holes, the gap between the inner wall of the main body in which one positive pressure introduction hole is provided and the nozzle holder is the same as that between the inner wall of the main body in which the other positive pressure introduction hole is provided and the nozzle. The adjustment part is narrower than the gap between the holder and the component mounter so that the target value of the gas flowing into one positive pressure introduction hole is smaller than the target value of the gas flowing into the other positive pressure introduction hole. may be configured. In such a configuration, there is a gap between the inner wall of the main body and the nozzle holder in which any one of the L positive pressure introduction holes is provided, and another gap different from the one positive pressure introduction hole. Depending on the difference in the gap between the inner wall of the main body where the positive pressure introduction hole is provided and the nozzle holder, the target value of gas flowing into one positive pressure introduction hole will flow into the other positive pressure introduction hole. It is set smaller than the target value for gas. As a result, the flow rates and pressures of the gas ejected from the L nozzles located at the L work positions can be made equal, and the nozzles can eject gas suitable for removing the parts.

Note that the difference in the gap between the main body and the nozzle holder includes a difference caused by tolerance and a difference caused intentionally. In the latter case, the gap between the inner wall of the main body where one positive pressure introduction hole is provided and the nozzle holder is equal to the gap between the inner wall of the main body where the other positive pressure introduction hole is provided and the nozzle holder. The body and nozzle holder are designed to be narrower.

Further, the component mounting machine may be configured such that L is 2. In such a configuration, the adjustment of the difference between the target values is performed by limiting the target to two nozzles. Therefore, an increase in the number of components and costs can be more reliably suppressed.

Further, the adjustment section has a control mechanism that reduces the target value using a control valve, and the control mechanism is configured to control one of the L positive pressure introduction paths that connects the positive pressure source and one positive pressure introduction hole. Compared to the target value of the gas that is provided only in the positive pressure introduction route and flows from the positive pressure source to the one positive pressure introduction route, the target value of the gas that flows from the first positive pressure introduction route to the positive pressure introduction hole is The component mounter may be configured so that the target value of the gas flowing into one positive pressure introduction hole is made smaller than the target value of the gas flowing into the other positive pressure introduction hole by reducing the value using the control valve. good. In such a configuration, the difference between the two positive pressure introduction holes in one of the target values of the pressure and flow rate of the gas flowing into the positive pressure introduction hole from the positive pressure introduction path can be adjusted by a single control valve. can. Therefore, an increase in the number of components and cost can be suppressed to a minimum.

Further, the control mechanism has a gas discharge path branching from the first positive pressure introduction path, the control valve is a flow rate adjustment valve that adjusts the flow rate of gas flowing through the gas discharge path, and the adjustment section includes a flow rate adjustment valve. By opening the opening and discharging gas from one positive pressure introduction path via the gas discharge path, the flow rate of gas flowing into one positive pressure introduction hole is made lower than the flow rate of gas flowing into the other positive pressure introduction hole. The component mounter may be configured to be smaller. With this configuration, the difference in the flow rate of gas flowing into the positive pressure introduction hole from the positive pressure introduction path between the two positive pressure introduction holes can be adjusted by a single flow rate adjustment valve. Therefore, an increase in the number of components and cost can be suppressed to a minimum.

Further, the control valve is a pressure reducing valve provided in the first positive pressure introduction path, and the adjustment section reduces the positive pressure output from the positive pressure source with the pressure reducing valve, and then introduces the positive pressure into the first positive pressure introduction hole. The component mounter may be configured to make the pressure of the gas flowing into one positive pressure introduction hole smaller than the pressure of the gas flowing into the other positive pressure introduction hole. With this configuration, the difference in the pressure of gas flowing into the positive pressure introduction hole from the positive pressure introduction path between the two positive pressure introduction holes can be adjusted by a single pressure reducing valve. Therefore, an increase in the number of components and cost can be suppressed to a minimum.

Further, the component mounting machine may be configured such that M is 5 times or more than L. With this configuration, the number of nozzles (=L) that performs adjustment of the difference in target values can be limited to one-fifth or less of the total number of nozzles (=M). Therefore, an increase in the number of components and costs can be more reliably suppressed.

The nozzle blow pressure calibration method according to the present invention includes a main body surrounding a hollow part, and L positive pressure introduction holes provided corresponding to L work positions (L is an integer of 2 or more). , the positive pressure introduction holes are arranged in a circumferential manner and held in a nozzle holder arranged in the hollow part so as to be rotatable around a predetermined center of rotation, relative to the housing in which the positive pressure introduction holes pass through the main body and open into the hollow part. Among the M nozzles (M is an integer larger than L), L nozzles are positioned at L working positions, and L positive pressure introduction holes are provided corresponding to the respective positive pressure introduction holes. The pressure and flow rate of the gas flowing into the positive pressure introduction hole while allowing gas to flow into the L positive pressure introduction holes from the L positive pressure introduction paths that connect the pressure introduction hole and a positive pressure source that outputs positive pressure. The process of changing the difference between the L positive pressure introduction holes in one target value of The openings of the L positive pressure communication passages corresponding to the L nozzles located at the positions face the openings of the L positive pressure introduction holes, and the L nozzles communicate with the L positive pressure input holes. This includes a step of detecting the blow pressure of gas ejected from the L nozzles, and a step of setting the difference in target values between the L positive pressure introduction holes based on the blow pressure.

In the present invention (nozzle blow pressure calibration method) configured as described above, while gas is flowing from the L positive pressure introduction holes provided in the housing to the L nozzles at the working position, the gas is flowed into the positive pressure introduction holes. The difference in one of the target values of the pressure and flow rate of the inflowing gas between the L positive pressure introduction holes is changed. While changing the target value difference in this way, the blow pressure of the gas ejected from the L nozzles is detected, and the target value difference between the L positive pressure introduction holes is set based on this blow pressure. Therefore, in component mounting, the work position can be adjusted by adjusting the target value of the gas supplied to the L positive pressure introduction holes according to the difference in the target value set in the nozzle blow pressure calibration method. The blowing pressures of gas ejected from L nozzles can be made equal. In other words, it is sufficient to adjust the difference in target values by targeting L nozzles out of M nozzles instead of all M nozzles. Blow pressure can be adjusted. Thus, in the present invention, it is possible to eject gas suitable for detaching components from the nozzle while suppressing an increase in the number of components and costs.

As described above, according to the present invention, it is possible to eject gas suitable for detaching components from a nozzle while suppressing an increase in the number of components and costs.

FIG. 1 is a partial plan view schematically showing a component mounting machine according to the present invention. FIG. 2 is a perspective view showing the external configuration of a rotary head. FIG. 3 is a partially enlarged perspective view of the rotary head of FIG. 2; FIG. 3 is a perspective view showing the internal configuration of the rotary head shown in FIG. 2; 3 is a sectional view showing a cross section of the rotary head of FIG. 2. FIG. FIG. 3 is a partially enlarged cross-sectional view of the rotary head of FIG. 2; FIG. 3 is a diagram schematically showing a first example of a positive pressure supply mechanism that supplies positive pressure to a rotary head. 8 is a flowchart showing a first example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. 7; 8 is a flowchart showing a second example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. 7; The figure which shows typically the 2nd example of the positive pressure supply mechanism which supplies positive pressure to a rotary head. 11 is a flowchart showing a first example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. 10; 11 is a flowchart showing a second example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. 10. The figure which shows typically the 3rd example of the positive pressure supply mechanism which supplies positive pressure to a rotary head. The figure which shows typically the 4th example of the positive pressure supply mechanism which supplies positive pressure to a rotary head.

FIG. 1 is a partial plan view schematically showing a component mounting machine according to the present invention. In this figure and the following figures, the X direction, Y direction, and Z direction, which are perpendicular to each other, are shown as appropriate. Here, the X direction and the Y direction are horizontal directions, and the Z direction is a vertical direction. As shown in FIG. 1, the component mounting machine 1 includes a pair of conveyors 12, 12 provided on a base 11. Then, the component mounter 1 mounts components on the board B carried by the conveyor 12 from the upstream side in the X direction (board transport direction) to the mounting processing position (the position of the board B in FIG. 1). The completed board B is carried out from the mounting processing position to the downstream side in the X direction by the conveyor 12.

The component mounter 1 is provided with a pair of Y-axis rails 21, 21 extending in the Y direction, a Y-axis ball screw 22 extending in the Y-direction, and a Y-axis motor My that rotationally drives the Y-axis ball screw 22. An extending X-axis rail 23 is supported by a pair of Y-axis rails 21, 21 so as to be movable in the Y direction, and is fixed to a nut of a Y-axis ball screw 22. An X-axis ball screw 24 extending in the X direction and an X-axis motor Mx that rotationally drives the X-axis ball screw 24 are attached to the X-axis rail 23, so that the rotary head 3 can move on the X-axis rail 23 in the X direction. It is fixed to the nut of the X-axis ball screw 24 while being supported by the X-axis ball screw 24. Therefore, the Y-axis motor My can rotate the Y-axis ball screw 22 to move the rotary head 3 in the Y direction, or the X-axis motor Mx can rotate the X-axis ball screw 24 to move the rotary head 3 in the X direction. can.

On each side of the pair of conveyors 12, 12 in the Y direction, two component supply sections 28 are lined up in the X direction. A plurality of tape feeders 281 are removably attached to each component supply unit 28 in line with the pitch P in the X direction. A reel wound with tape containing parts E (chip electronic parts) at predetermined intervals is arranged. Then, the tape feeder 281 supplies the component E to the component supply position at the tip of the substrate B side by intermittently feeding the tape toward the substrate B side.

The rotary head 3 suctions and mounts the component E using a nozzle N (FIGS. 4 and 5). That is, the rotary head 3 moves above the tape feeder 281 and picks up the component E supplied by the tape feeder 281. Specifically, the rotary head 3 sucks the component E by lowering the nozzle N until it comes into contact with the component E, and then raising the nozzle N while generating negative pressure within the nozzle N. Subsequently, the rotary head 3 moves above the board B at the mounting processing position and mounts the component E on the board B. Specifically, the rotary head 3 mounts the component E by lowering the nozzle N until the component E contacts the substrate B and then generating positive pressure within the nozzle N. After mounting the component E, the rotary head 3 raises the nozzle N.

2 is a perspective view showing the external structure of the rotary head, FIG. 3 is a partially enlarged perspective view of the rotary head shown in FIG. 2, and FIG. 4 is a perspective view showing the internal structure of the rotary head shown in FIG. FIG. 5 is a sectional view showing a cross section of the rotary head of FIG. 2, and FIG. 6 is a partially enlarged sectional view of the rotary head of FIG. 2.

The rotary head 3 includes a main rod 31 extending parallel to the Z direction, and a shaft holder 32 supported at the lower end of the main rod 31. The main rod 31 and the shaft holder 32 are rotatably supported around a rotation axis Ca that passes through their centers and is parallel to the Z direction, and rotates under the driving force of a rotary motor (not shown).

As shown in FIG. 6, the rotary head 3 has a housing 36 that surrounds the shaft holder 32 from the side (horizontal direction). The housing 36 includes a housing body 361 and a hollow portion 362 formed inside the housing body 361 and passing through the housing body 361 in the Z direction. The inner circumferential surface of the housing main body 361 (in other words, the outer circumferential surface of the hollow portion 362) and the outer circumferential surface of the housing main body 361 have a cylindrical shape having a common center at a straight line parallel to the Z direction. The housing main body 361 has an annular shape when viewed from above. On the other hand, the outer peripheral wall of the shaft holder 32 has a cylindrical shape centered on the rotation axis Ca. At this time, the diameter of the cylindrical shape of the shaft holder 32 is slightly shorter than the diameter of the cylindrical shape of the hollow part 362, and the shaft holder 32 fits into the hollow part 362. The shaft holder 32 thus disposed within the hollow portion 362 is rotatable relative to the housing body 361 around the rotation axis Ca.

This shaft holder 32 has M shaft insertion holes 321 arranged circumferentially around the rotation axis Ca at equal angles (20 degrees). Here, M is an integer of 3 or more corresponding to the number of nozzles N attached to the rotary head 3, and in this example, M=18. The shaft insertion hole 321 penetrates in the Z direction, and the nozzle shaft 33 is supported by the shaft holder 32 while being inserted into the shaft insertion hole 321. In this way, the 18 nozzle shafts 33 supported by the shaft holder 32 are arranged circumferentially around the rotation axis Ca at equal angles (20 degrees). Therefore, when the shaft holder 32 rotates around the rotation axis Ca, the 18 nozzle shafts 33 rotate together around the rotation axis Ca.

Each nozzle shaft 33 has a lifting rod 331 extending in the Z direction and a spline shaft 332 attached to the shaft holder 32. The spline shaft 332 is attached to the shaft holder 32 while being inserted into the shaft insertion hole 321. The spline shaft 332 is provided with a rod insertion hole penetrating in the Z direction, and the elevating rod 331 is inserted into the rod insertion hole. Further, the nozzle shaft 33 has a coil spring 333 fitted onto the lifting rod 331, and the coil spring 333 urges the lifting rod 331 upward with respect to the spline shaft 332. In this way, the lifting rod 331 is supported by the spline shaft 332 and the coil spring 333 so as to be able to rise and fall. The lower end of the lifting rod 331 is located below the shaft holder 32, and the nozzle N is attached to the lower end.

The nozzle shaft 33 is supported by the shaft holder 32 so as to be rotatable about a rotation axis Cb that coincides with the center line of the nozzle shaft 33. Specifically, the spline shaft 332 of the nozzle shaft 33 is rotatable about the rotation axis Cb with respect to the shaft holder 32. This spline shaft 332 restrains the elevating rod 331 in the rotational direction about the rotation axis Cb, and the spline shaft 332 and the elevating rod 331 rotate integrally about the rotation axis Cb. This spline shaft 332 has a driven gear 332b centered on the rotation axis Cb above the shaft holder 32, and rotates with the lifting rod 331 in accordance with the torque applied to the driven gear 332b.

In this configuration, the 18 nozzle shafts 33 rotate about their respective rotation axes Cb when torque is applied to each driven gear 332b. On the other hand, the rotary head 3 has a drive gear 34 that drives and rotates 18 nozzle shafts 33. The drive gear 34 is arranged above the shaft holder 32 with the rotation axis Ca as the center. This drive gear 34 is externally fitted onto the main rod 31 via a bearing 35, and rotates around a rotation axis Ca when receiving a driving force from a rotary motor (not shown). On the other hand, the 18 driven gears 332b provided on the 18 nozzle shafts 33 are arranged circumferentially along the periphery of the drive gear 34, and mesh with the drive gear 34 from the outside. Therefore, the 18 driven gears 332b are driven by the rotation of the drive gear 34, and the 18 nozzle shafts 33 rotate about their respective rotation axes Cb.

Furthermore, by rotating the main rod 31, the rotary head 3 can rotate the 18 nozzle shafts 33 along with the shaft holder 32 around the rotation axis Ca. On the other hand, the rotary head 3 is provided at a rotation angle of 180 degrees around the rotation axis Ca, and has L working positions Sl and Sr arranged at a pitch P in the X direction. Here, L is an integer less than M and greater than or equal to 2, which corresponds to the number of work positions, and in this example, L=2. Therefore, of the 18 nozzle shafts 33 (in other words, the 18 nozzles N), the rotary head 3 connects the two nozzle shafts 33 located at the two working positions Sl and Sr to the 18 nozzles. It can be switched by rotating the shaft 33. Note that when L is larger than 2, the intervals between the L work positions are not 180 degrees but change according to the value of L. For example, when L=3, it is preferable to set the interval between the three working positions to 120 degrees (360 degrees/3).

Furthermore, among the 18 nozzle shafts 33, the two nozzle shafts 33 located at the two working positions Sl and Sr can be selectively raised and lowered. That is, the rotary head 3 has two lifting mechanisms 51 corresponding to the two working positions Sl and Sr. Since the configurations of the two lifting mechanisms 51 are common, only one lifting mechanism 51 corresponding to the work position Sl will be described here.

The elevating mechanism 51 includes a cam follower 52 that faces from above the upper end of the elevating rod 331 of the nozzle shaft 33 located at the working position Sl, and an elevating member 53 that raises and lowers the cam follower 52. By driving in the direction, the cam follower 52 is raised and lowered along with the raising and lowering member 53. When the cam follower 52 is located at the height shown in FIG. 5, the cam follower 52 is spaced upward from the lifting rod 331 of the nozzle shaft 33 at the working position Sl. As a result, in the working position Sl, the lifting rod 331 is located at the highest point according to the upward biasing force of the coil spring 333, and the nozzle N attached to the lifting rod 331 is located in the raised position. On the other hand, when the cam follower 52 descends from the height shown in FIG. 5, the cam follower 52 contacts the lifting rod 331 of the nozzle shaft 33 from above and pushes down the lifting rod 331 against the biasing force of the coil spring 333. As a result, at the working position Sl, the lifting rod 331 is lowered from the highest point, and the nozzle N attached to the lifting rod 331 is located at a lowered position lower than the raised position.

The rotary head 3 sucks the component E with the nozzle N by supplying negative pressure to the nozzle N located in the lowered position at the work positions Sl and Sr. Incidentally, as mentioned above, the two working positions Sl and Sr and the two tape feeders 281 are lined up in the X direction with the same pitch P, so the two nozzles located at the two working positions Sl and Sr N can pick up parts E from two tape feeders 281 at the same time. Further, the rotary head 3 supplies positive pressure to the nozzle N located at the lowered position at the work positions Sl and Sr, thereby detaching the component E from the nozzle N downward and mounting it on the substrate B. Next, a configuration for supplying negative pressure and positive pressure to the nozzle N will be explained.

The rotary head 3 has 18 pressure switching mechanisms 4 corresponding to the 18 nozzle shafts 33. The 18 pressure switching mechanisms 4 are attached to the shaft holder 32 and rotate around the rotation axis Ca along with the shaft holder 32. These 18 pressure switching mechanisms 4 are arranged circumferentially at equal angles (20 degrees) around the rotation axis Ca on the outside of the 18 nozzle shafts 33, and each pressure switching mechanism 4 is connected to a corresponding nozzle. The pressure supplied to the nozzle N attached to the lower end of the shaft 33 is switched between negative pressure and positive pressure.

The pressure switching mechanism 4 includes a valve spool 41 extending in the Z direction and a sleeve 42 that accommodates the valve spool 41. The sleeve 42 has a flange 421 at its upper end, and the flange 421 of the sleeve 42 inserted into a mounting hole 322 that opens upward in the shaft holder 32 engages with the upper surface of the shaft holder 32 . In this way, the sleeve 42 is supported by the shaft holder 32. The valve spool 41 is inserted into a housing hole that opens upward in the sleeve 42 and is movable in the Z direction with respect to the sleeve 42 . This valve spool 41 has an engaging portion 411 at its upper end portion. Then, a cam follower of a lifting mechanism, which will be described later, moves up and down while engaging with the engaging portion 411, so that the valve spool 41 moves up and down, and the pressure supplied to the nozzle N is switched.

Specifically, as shown in FIG. 6, the sleeve 42 has a negative pressure input port 42a into which negative pressure is input, and a positive pressure input port 42b into which positive pressure is input. The inside of the sleeve 42 is formed hollow and communicates with the nozzle N attached to the lower end of the corresponding nozzle shaft 33. Therefore, the negative pressure input into the sleeve 42 from the negative pressure input port 42a and the positive pressure input into the sleeve 42 from the positive pressure input port 42b are supplied to the nozzle N, respectively.

On the other hand, a negative pressure supply path 31a extending in the Z direction is provided inside the main rod 31, and 18 pressure switching mechanisms corresponding to the 18 pressure switching mechanisms 4 are provided inside the shaft holder 32. A negative pressure branch path 32a is provided. The 18 negative pressure branch paths 32a are provided radially around the rotation axis Ca, and communicate the negative pressure input port 42a of the corresponding pressure switching mechanism 4 with the negative pressure supply path 31a. Therefore, negative pressure is supplied to the negative pressure input ports 42a of the 18 sleeves 42 from the negative pressure supply path 31a via the corresponding negative pressure branch paths 32a.

Further, inside the shaft holder 32, 18 positive pressure input holes 32b corresponding to the 18 pressure switching mechanisms 4 are provided. Each positive pressure input hole 32b extends horizontally between the positive pressure input port 42b of the sleeve 42 of the corresponding pressure switching mechanism 4 and the outer peripheral surface of the shaft holder 32, and is opened at the outer peripheral surface of the shaft holder 32. do. On the other hand, the rotary head 3 has two pressure switching positions Cl and Cr corresponding to the two working positions Sl and Sr, and the housing body 361 of the housing 36 has two pressure switching positions Cl and Cr. Corresponding to this, two positive pressure introduction holes Hl and Hr penetrate in the horizontal direction and open to the hollow part 362. Of the 18 pressure switching mechanisms 4, the two pressure switching mechanisms 4 located at the two pressure switching positions Cl and Cr (in other words, the nozzle shafts 33 located at the two working positions Sl and Sr) The positive pressure input ports 42b of the two pressure switching mechanisms 4) corresponding to the positive pressure input holes 32b face and communicate with the positive pressure introduction holes Hl and Hr.

Further, the rotary head 3 has two positive pressure introduction pipes 61r and 61l (positive pressure introduction paths) corresponding to the two positive pressure introduction holes Hl and Hr, respectively. are connected to the corresponding positive pressure introduction holes Hl and Hr, and supply positive pressure to the positive pressure introduction holes Hl and Hr. In this way, the positive pressure supplied to the positive pressure introduction holes Hl, Hr is supplied to the positive pressure input port 42b of the pressure switching mechanism 4 located at the pressure switching positions Cl, Cr.

In this configuration, when the valve spool 41 of the pressure switching mechanism 4 located at the pressure switching positions Cl and Cr is positioned at the negative pressure supply position ha, the valve spool 41 opens the negative pressure input port 42a and opens the positive pressure input port 42b. Close. As a result, the negative pressure supply path 31a communicates with the nozzles N at the working positions Sl and Sr through the inside of the sleeve 42, and negative pressure is supplied to these nozzles N. Furthermore, when the valve spool 41 of the pressure switching mechanism 4 located at the pressure switching positions Cl and Cr is positioned at the positive pressure supply position hb lower than the negative pressure supply position ha, the valve spool 41 closes the negative pressure input port 42a and Open the press input port 42b. As a result, the positive pressure introduction holes Hl and Hr communicate with the nozzles N at the working positions Sl and Sr through the inside of the sleeve 42, and positive pressure is supplied to these nozzles N.

The rotary head 3 has two lifting mechanisms 55 corresponding to the two pressure switching positions Cl and Cr, and each lifting mechanism 55 has a corresponding one of the two pressure switching positions Cl and Cr. The valve spool 41 of the pressure switching mechanism 4 located at is raised and lowered between a negative pressure supply position ha and a positive pressure supply position hb. Since the configurations of the two lifting mechanisms 55 are common, only one lifting mechanism 55 corresponding to the pressure switching position Cl will be described here.

The elevating mechanism 55 has a cam follower 56 that faces the engaging portion 411 of the valve spool 41 of the pressure switching mechanism 4 located at the pressure switching position Cl. This engaging portion 411 has a pair of opposing portions 412 arranged one above the other, and in the Z direction, the cam follower 56 is located between these opposing portions 412 and faces each of the upper and lower opposing portions 412 . Further, the elevating mechanism 55 includes an elevating member 57 that raises and lowers the cam follower 56, and by driving the elevating member 57 in the Z direction by a linear motor, the cam follower 56 is raised and lowered together with the elevating member 57.

That is, when the cam follower 56 is raised, the cam follower 56 pushes up the upper facing part 412 from below, and the valve spool 41 is positioned at the negative pressure supply position ha. Further, when the cam follower 56 is lowered, the cam follower 56 pushes down the lower facing part 412 of the pair of facing parts 412 from above, and positions the valve spool 41 at the positive pressure supply position hb.

Next, a mechanism for supplying positive pressure to the two positive pressure introduction holes Hl and Hr opened in the housing body 361 of the rotary head 3 in the component mounter 1 will be described using FIG. 7. Here, FIG. 7 is a diagram schematically showing a first example of a positive pressure supply mechanism that supplies positive pressure to the rotary head. In the following explanation, the two valve spools 41 at the pressure switching positions Cr and Cl are located at the positive pressure supply position Hb, and the two nozzles N at the working positions Sl and Sr are located at the positive pressure introduction hole, respectively. It is assumed that Hl and Hr are connected to each other.

As shown in FIG. 7, the positive pressure supply mechanism 6 provided in the component mounter 1 has the above-mentioned positive pressure supply mechanism 6 connected to two positive pressure introduction holes Hl and Hr that open on the outer peripheral surface of the housing body 361 of the rotary head 3, respectively. It has two positive pressure introduction pipes 61l and 61r. Further, the positive pressure supply mechanism 6 has a positive pressure source 62 that outputs positive pressure, and the two positive pressure introduction pipes 61l and 61r are connected to the common positive pressure source 62 and the positive pressure introduction pipes connected to each other. It extends between the holes Hl and Hr.

Since the configurations for these positive pressure introduction pipes 61l and 61r are common, the configuration for one positive pressure introduction pipe 61l will be explained. An on-off valve 63 is inserted into the positive pressure introduction pipe 61l between the positive pressure source 62 and the positive pressure introduction hole Hl. Therefore, by opening the on-off valve 63, the positive pressure source 62 and the positive pressure introduction hole Hl are communicated with each other through the positive pressure introduction pipe 61l, and positive pressure can be supplied to the positive pressure introduction hole Hl. On the other hand, by closing the on-off valve 63, the positive pressure source 62 and the positive pressure introduction hole Hl can be cut off, and the supply of positive pressure to the positive pressure introduction hole Hl can be stopped. Note that the explanation will be given here assuming that the on-off valve 63 is open.

Further, a gas exhaust mechanism 64 is provided for the positive pressure introduction pipe 61l. The gas discharge mechanism 64 includes a gas discharge pipe 641 that branches from the positive pressure introduction pipe 61l between the on-off valve 63 and the positive pressure introduction hole Hl, and a flow rate adjustment valve 642 attached to the gas discharge pipe 641. . This flow rate adjustment valve 642 adjusts the flow rate of gas (air) discharged from the gas discharge pipe 641 to the outside. Therefore, when the flow rate adjustment valve 642 opens, a part of the gas flowing from the positive pressure source 62 to the positive pressure introduction hole Hl via the positive pressure introduction pipe 61l is transferred to the positive pressure through the gas discharge pipe 641 and the flow rate adjustment valve 642. It is discharged from the introduction pipe 61l. Further, the flow rate of gas discharged from the positive pressure introduction pipe 61l increases as the opening degree of the flow rate adjustment valve 642 is increased. As a result, as the opening degree of the flow rate adjustment valve 642 is increased, the flow rate of gas discharged from the positive pressure introduction pipe 61l via the gas discharge pipe 641 and the flow rate adjustment valve 642 increases, and the positive pressure introduction hole The flow rate of gas flowing into Hl is reduced.

As described above, the shaft holder 32 is located inside the housing body 361 (hollow portion 362) where the positive pressure introduction hole Hl opens. This shaft holder 32 is provided with 18 positive pressure communication passages T corresponding to the 18 nozzles N, each consisting of the above-mentioned positive pressure input hole 32b and sleeve 42, and each positive pressure communication passage T is It communicates with the corresponding nozzle N. Of the 18 nozzles N, the opening Oi of the positive pressure communication path T that communicates with the nozzle N located at the working position Sl is horizontally opposed to the opening Oo of the positive pressure introduction hole Hl. It communicates with the nozzle N located at the working position Sl. As a result, the positive pressure supplied from the positive pressure source 62 to the positive pressure introduction hole Hl via the positive pressure introduction pipe 61l is supplied to the nozzle N located at the working position Sl.

Similarly, among the 18 nozzles N, the opening Oi of the positive pressure communication path T communicating with the nozzle N located at the working position Sr faces the opening Oo of the positive pressure introduction hole Hr from the horizontal direction, and the positive pressure introduction hole Hr The nozzle N located at the working position Sr communicates with the nozzle N located at the working position Sr. As a result, the positive pressure supplied from the positive pressure source 62 to the positive pressure introduction hole Hr via the positive pressure introduction pipe 61r is supplied to the nozzle N located at the working position Sr.

By the way, in the example of FIG. 7, as a result of the center line of the cylindrical shape of the hollow part 362 and the rotation axis Ca of the shaft holder 32 being misaligned, for example, the center line of the cylindrical shape of the hollow part 362 is As a result of the rotation axis Ca being slightly shifted to the left in FIG. The clearance Δr between the inner circumferential surface of the housing body 361 and the outer circumferential surface of the shaft holder 32 is narrower than the gap Δr. In such a case, the flow rate of air flowing into the hollow part 362 from the positive pressure introduction hole Hr and escaping from the gap Δr is greater than the flow rate of the air flowing into the hollow part 362 from the positive pressure introduction hole Hl escaping from the gap Δl. Therefore, if the flow rate and positive pressure of the gas supplied to the positive pressure introduction holes Hl and Hr are the same, the blow pressure of the gas ejected from the nozzle N at the working position Sr will be higher than that from the nozzle N at the working position Sr. The blow pressure of the ejected gas becomes smaller. As a result of such variations in blow pressure, a situation may occur in which the nozzle N with a high blow pressure blows away the component E, while the component E is not accurately removed from the nozzle N with a low blow pressure. As described above, it may be difficult to eject appropriate gas to each nozzle N without blowing away the part E while reliably separating the part E from the nozzle N.

Therefore, the positive pressure supply mechanism 6 makes the opening degree of the flow rate adjustment valve 642 provided for the positive pressure introduction pipe 61l larger than the opening degree of the flow rate adjustment valve 642 provided for the positive pressure introduction pipe 61r. As a result, the flow rate of gas discharged from the positive pressure introduction pipe 61l via the gas discharge pipe 641 is made larger than the flow rate (including zero) of gas discharged from the positive pressure introduction pipe 61r via the gas discharge pipe 641. That is, between these flow rates, so that the flow rate of gas flowing into the positive pressure introduction hole Hl from the positive pressure introduction pipe 61l is smaller than the flow rate of gas flowing into the positive pressure introduction hole Hr from the positive pressure introduction pipe 61r. The difference is set. This suppresses the difference between the blow pressure of the gas ejected from the nozzle N located at the work position Sl and the blow pressure of the gas ejected from the nozzle N located at the work position Sr.

In the embodiment configured as described above, the shaft holder 32 (nozzle holder) that holds the 18 (M) nozzles N arranged in a circumferential manner is arranged in the hollow part 362 provided in the housing 36. be done. The shaft holder 32 is provided with 18 positive pressure communication paths T corresponding to the 18 nozzles N, while the housing 36 is provided with 2 positive pressure communication paths T corresponding to the 2 (L) working positions Sl and Sr. The positive pressure introduction holes Hl and Hr penetrate through it. Of the 18 positive pressure communication passages T, the openings Oi of the two positive pressure communication passages T corresponding to the two nozzles N located at the two working positions Sl and Sr are the two positive pressure introduction holes Hl. , Hr, the two nozzles N at the working positions Sl and Sr communicate with the two positive pressure introduction holes Hl and Hr of the housing 36. Thereby, positive pressure can be supplied to the two nozzles N from the two positive pressure introduction holes Hl and Hr via the two positive pressure communication passages T of the shaft holder 32.

In addition, in this embodiment (first example in FIG. 7), two (L) flow rates of gas flowing from the positive pressure introduction pipes 61l and 61r (positive pressure introduction path) to the positive pressure introduction holes Hl and Hr. The difference between the positive pressure introduction holes Hl and Hr is adjusted by the positive pressure supply mechanism 6 (adjustment section). Therefore, the shaft holder 32 is arranged eccentrically with respect to the hollow part 362 of the housing 36, and the sizes of the gaps Δl and Δr between the inner circumferential surface of the housing 36 and the outer circumferential surface of the shaft holder 32 are determined by each positive pressure introduced. Even if the holes Hl and Hr are different, the flow rate of the gas ejected from each nozzle N can be made the same, and the gas ejected from the nozzle N suitable for detaching the component E can be realized. Moreover, the positive pressure supply mechanism 6 does not adjust the difference in gas flow rate to all 18 (M) nozzles N, but to the working positions Sl and Sr of the 18 nozzles N. Since it is sufficient to target the two (L) nozzles N, the positive pressure supply mechanism 6 can be configured with fewer components. In this manner, in this embodiment, it is possible to eject gas suitable for detaching the component E from the nozzle N while suppressing an increase in the number of components and cost.

That is, in this embodiment, attention is paid to the fact that two working positions Sl and Sr are provided, and the adjustment of the gas flow rate difference is applied to the two nozzles N at the two working positions Sl and Sr. be carried out in a limited manner. Therefore, an increase in the number of components and costs can be more reliably suppressed.

Also, of the two positive pressure introduction holes Hl and Hr, the gap Δl between the inner wall of the housing body 361 on the side of one positive pressure introduction hole Hl and the shaft holder 32 is larger than that on the side of the other positive pressure introduction hole Hr. It is narrower than the gap Δr between the inner wall of the housing body 361 and the shaft holder 32. Correspondingly, the positive pressure supply mechanism 6 makes the flow rate of gas flowing into one positive pressure introduction hole Hl smaller than the flow rate of gas flowing into the other positive pressure introduction hole Hr. That is, depending on the difference between these gaps Δl and Δr, the flow rate of gas flowing into one positive pressure introduction hole Hl is set to be smaller than the flow rate of gas flowing into the other positive pressure introduction hole Hr. As a result, the flow rates of the gas ejected from the two nozzles N located at the two working positions Sl and Sr can be matched, and the nozzle N can eject gas suitable for detaching the part E. .

Further, the number of nozzles N (=M) is five times or more the number of nozzles (=L) at work positions Sl and Sr. With this configuration, the number of nozzles N (=L) that performs adjustment of the difference in gas flow rates can be limited to one-fifth or less of the total number of nozzles N (=M). Therefore, an increase in the number of components and costs can be more reliably suppressed.

FIG. 8 is a flowchart showing a first example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. This nozzle blow pressure calibration method is executed, for example, by an operator before the component mounting machine 1 starts mounting components.

In step S101, nozzles N are positioned at each of the work positions Sl and Sr, and gas is ejected from the two nozzles N at the work positions Sl and Sr. This step S101 is to prevent steps S102 and subsequent steps from being executed in a state where none of the nozzles N is located at the work positions Sl and Sr. may be located at the working positions Sl and Sr. Further, if the nozzle N is located at each of the work positions Sl and Sr before the nozzle blow pressure calibration method is started, it is assumed that step S101 has been executed and completed at the start of the method.

In step S102, each of the two flow rate adjustment valves 642 of the positive pressure supply mechanism 6 is fully closed (that is, the opening degree is set to zero). Then, the blow pressure (wind pressure) of the gas ejected from the nozzle N at the work position Sl and the blow pressure of the gas ejected from the nozzle N at the work position Sr are detected, respectively (step S103). For example, a detector (not shown) is provided in the two positive pressure communication paths T corresponding to the two nozzles N located at the two working positions Sl and Sr, and the detection in step S103 is performed by this detector. be done.

Based on the detection result, in step S104, a positive pressure communication path (positive pressure communication An opening operation is started to gradually open the flow rate regulating valve 642 connected to one of the paths 61l and 61r. Here, since the gap Δl is narrower than the gap Δr, the blow pressure of the nozzle N at the work position Sl is higher than the blow pressure of the nozzle N at the work position Sr. Therefore, an opening operation is started for the flow rate regulating valve 642 connected to the positive pressure introduction pipe 61l communicating with the nozzle N at the working position Sl.

With the start and execution of this opening operation, the flow rate of gas discharged from the positive pressure introduction pipe 61l via the gas discharge pipe 641 and the flow rate adjustment valve 642 increases, and the flow rate of gas discharged from the positive pressure introduction pipe 61l through the positive pressure introduction hole increases. The flow rate of gas flowing into Hl is reduced. As a result, the flow rate of the gas ejected from the nozzle N at the working position Sl decreases, and the blow pressure of the gas ejected from the nozzle N at the working position Sl and the blowing pressure of the gas ejected from the nozzle N at the working position Sr decrease. The difference in pressure (difference in blow pressure) is reduced. Therefore, in step S105, while monitoring this blow pressure difference, it is confirmed whether it is within an allowable range. Then, when the blow pressure difference falls within the allowable range ("YES" in step S105), the flow rate adjustment provided in the gas exhaust pipe 641 connected to the positive pressure introduction pipe 61l communicating with the nozzle N at the working position Sl The opening operation for valve 642 is stopped (step S106). As a result, the opening degree of each flow rate adjustment valve 642 is set to the opening degree at the time when the opening operation is stopped.

In this nozzle blow pressure calibration method, gas is caused to flow into the two nozzles N at the working positions Sl and Sr from the two (L) positive pressure introduction holes Hl and Hr provided in the housing 36 (step S101 , S102), and the difference in the flow rate of gas flowing into the positive pressure introduction holes Hl, Hr between the two positive pressure introduction holes Hl, Hr is changed (step S104). While changing the difference in gas flow rate in this way, the blow pressure of the gas ejected from the two nozzles is detected (steps S104, S105), and the difference in gas flow rate between the two positive pressure introduction holes Hl and Hr is detected. is set based on this blow pressure (steps S105, S106). Therefore, during component mounting, the flow rate of gas supplied to the two positive pressure introduction holes Hl and Hr is adjusted so that a difference in the gas flow rate set by this nozzle blow pressure calibration method occurs. , the blowing pressures of the gas ejected from the two nozzles N at the working positions Sl and Sr can be made equal. In other words, it is sufficient to adjust the difference in gas flow rate by targeting two nozzles N among the 18 nozzles, instead of targeting all 18 (M) nozzles N. , the blowing pressures of the nozzles N can be made uniform with a small number of components. In this way, it is possible to eject gas suitable for detaching the component E from the nozzle N while suppressing an increase in the number of components and cost.

FIG. 9 is a flowchart showing a second example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. This nozzle blow pressure calibration method is executed, for example, by an operator before the component mounting machine 1 starts mounting components.

In step S201, nozzles N are positioned at each of the work positions Sl and Sr. In step S202, each of the two flow rate regulating valves 642 of the positive pressure supply mechanism 6 is fully opened (that is, the opening degree is maximized). Then, the blow pressure of the gas ejected from the nozzle N at the work position Sl and the blow pressure of the gas ejected from the nozzle N at the work position Sr are detected, respectively (step S203).

Based on the detection result, in step S204, a positive pressure communication path (positive pressure communication A closing operation is started to gradually close the flow rate regulating valve 642 connected to one of the paths 61l and 61r. Here, since the gap Δr is wider than the gap Δl, the blow pressure of the nozzle N at the work position Sr is lower than the blow pressure of the nozzle N at the work position Sl. Therefore, a closing operation is started for the flow rate regulating valve 642 connected to the positive pressure introduction pipe 61r communicating with the nozzle N at the working position Sr.

With the start and execution of such a closing operation, the flow rate of gas discharged from the positive pressure introduction pipe 61r via the gas discharge pipe 641 and the flow rate adjustment valve 642 decreases, and the flow rate of gas discharged from the positive pressure introduction pipe 61r through the positive pressure introduction hole The flow rate of gas flowing into Hr increases. As a result, the flow rate of the gas ejected from the nozzle N at the working position Sr increases, and the blow pressure of the gas ejected from the nozzle N at the working position Sr and the blowing pressure of the gas ejected from the nozzle N at the working position Sl increase. The difference in pressure (difference in blow pressure) is reduced. Therefore, in step S205, while monitoring this blow pressure difference, it is confirmed whether it is within an allowable range. When the blow pressure difference falls within the allowable range ("YES" in step S205), the closing operation for the flow rate adjustment valve 642 provided in the positive pressure introduction pipe 61r communicating with the nozzle N at the working position Sr is stopped. (Step S206). As a result, the opening degree of each flow rate adjustment valve 642 is set to the opening degree at the time when the closing operation is stopped.

In this nozzle blow pressure calibration method, gas is caused to flow into the two nozzles N at the working positions Sl and Sr from the two (L) positive pressure introduction holes Hl and Hr provided in the housing 36 (step S201 , S202), and the difference in the flow rate of gas flowing into the positive pressure introduction holes Hl, Hr is changed between the two positive pressure introduction holes Hl, Hr (step S204). In this way, while changing the difference in gas flow rate, the blow pressure of the gas ejected from the two nozzles is detected (steps S204, S205), and the difference in gas flow rate between the two positive pressure introduction holes Hl and Hr is detected. is set based on this blow pressure (steps S205, S206). Therefore, during component mounting, the flow rate of gas supplied to the two positive pressure introduction holes Hl and Hr is adjusted so that a difference in the gas flow rate set by this nozzle blow pressure calibration method occurs. , the blowing pressures of the gas ejected from the two nozzles N at the working positions Sl and Sr can be made equal. In other words, it is sufficient to adjust the difference in gas flow rate by targeting two nozzles N among the 18 nozzles, instead of targeting all 18 (M) nozzles N. , the blowing pressures of the nozzles N can be made uniform with a small number of components. In this way, it is possible to eject gas suitable for detaching the component E from the nozzle N while suppressing an increase in the number of components and cost.

FIG. 10 is a diagram schematically showing a second example of a positive pressure supply mechanism that supplies positive pressure to the rotary head. The difference between the second example in FIG. 10 and the first example in FIG. 7 is that a pressure reducing valve 65 (regulator) is provided in each of the positive pressure introduction pipes 61l and 61r instead of the gas exhaust mechanism 64. Here, the explanation will focus on the differences from the first example, and the common points with the first example will be given corresponding symbols and the explanation will be omitted as appropriate. Further, as in the first example, since the configurations for the positive pressure introduction pipes 61l and 61r are common, the configuration for one positive pressure introduction pipe 61l will be described.

That is, in the second example, a pressure reducing valve 65 is provided between the positive pressure source 62 and the on-off valve 63 for the positive pressure introduction pipe 61l. This pressure reducing valve 65 outputs a reduced output pressure of the positive pressure output from the positive pressure source 62 to the opening/closing valve 63 side (in other words, to the positive pressure introduction hole Hl side). Furthermore, the amount of pressure reduction by the pressure reducing valve 65, in other words, the output pressure, can be changed and set. Therefore, as the output pressure of the pressure reducing valve 65 decreases, the positive pressure of the gas flowing into the positive pressure introduction hole Hl from the positive pressure introduction pipe 61l decreases.

Also, in the example of FIG. 10, similarly to the example of FIG. It is narrower than the gap Δr between the inner peripheral surface of the housing body 361 on the Hr side and the outer peripheral surface of the shaft holder 32. Therefore, it may be difficult to eject appropriate gas to each nozzle N without blowing away the part E while reliably separating the part E from the nozzle N.

Therefore, the positive pressure supply mechanism 6 sets the output pressure of the pressure reducing valve 65 provided for the positive pressure introduction pipe 61l lower than the output pressure of the pressure reducing valve 65 provided for the positive pressure introduction pipe 61r (in other words, By setting a large amount of pressure reduction), the positive pressure of the gas flowing into the positive pressure introduction hole Hl from the positive pressure introduction pipe 61l becomes greater than the positive pressure of the gas flowing into the positive pressure introduction hole Hr from the positive pressure introduction pipe 61r. A difference is set between these positive pressures to be less than the pressure. This suppresses the difference between the blow pressure of the gas ejected from the nozzle N located at the work position Sl and the blow pressure of the gas ejected from the nozzle N located at the work position Sr.

As described above, in this embodiment (second example in FIG. 10), the positive pressure of the gas flowing from the positive pressure introduction pipes 61l and 61r (positive pressure introduction path) to the positive pressure introduction holes Hl and Hr is The difference between the (L) positive pressure introduction holes Hl and Hr is adjusted by the positive pressure supply mechanism 6 (adjustment section). Therefore, the shaft holder 32 is arranged eccentrically with respect to the hollow part 362 of the housing 36, and the sizes of the gaps Δl and Δr between the inner circumferential surface of the housing 36 and the outer circumferential surface of the shaft holder 32 are determined by each positive pressure introduced. Even if the holes Hl and Hr are different, the positive pressure of the gas ejected from each nozzle N can be made the same, and the gas ejected from the nozzle N suitable for detaching the component E can be realized. Moreover, the positive pressure supply mechanism 6 does not adjust the difference in the positive pressure of gas to all 18 (M) nozzles N, but to the working position Sl of the 18 nozzles N, Since it is sufficient to target two (L) nozzles N of Sr, the positive pressure supply mechanism 6 can be configured with a small number of components. In this manner, in this embodiment, it is possible to eject gas suitable for detaching the component E from the nozzle N while suppressing an increase in the number of components and cost.

That is, in this embodiment, attention is paid to the fact that two working positions Sl and Sr are provided, and the adjustment of the positive pressure difference of the gas is applied to the two nozzles N at the two working positions Sl and Sr. be carried out in a limited manner. Therefore, an increase in the number of components and costs can be more reliably suppressed.

Also, of the two positive pressure introduction holes Hl and Hr, the gap Δl between the inner wall of the housing body 361 on the side of one positive pressure introduction hole Hl and the shaft holder 32 is larger than that on the side of the other positive pressure introduction hole Hr. It is narrower than the gap Δr between the inner wall of the housing body 361 and the shaft holder 32. Corresponding to this, the positive pressure supply mechanism 6 makes the positive pressure of the gas flowing into one positive pressure introduction hole Hl smaller than the positive pressure of the gas flowing into the other positive pressure introduction hole Hr. That is, depending on the difference between these gaps Δl and Δr, the positive pressure of the gas flowing into one positive pressure introduction hole Hl is set to be smaller than the positive pressure of the gas flowing into the other positive pressure introduction hole Hr. . As a result, the positive pressures of the gas ejected from the two nozzles N located at the two working positions Sl and Sr can be made equal, and the nozzle N can eject gas suitable for detaching the part E. .

Further, the number of nozzles N (=M) is five times or more the number of nozzles (=L) at work positions Sl and Sr. With this configuration, the number of nozzles N (=L) that perform adjustment of the difference in positive pressure of gas can be limited to one-fifth or less of the total number of nozzles N (=M). Therefore, an increase in the number of components and costs can be more reliably suppressed.

FIG. 11 is a flowchart showing a first example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. This nozzle blow pressure calibration method is executed, for example, by an operator before the component mounting machine 1 starts mounting components.

In step S301, nozzles N are positioned at each of the work positions Sl and Sr. In step S302, the output pressure of each of the two pressure reducing valves 65 of the positive pressure supply mechanism 6 is set to the maximum (that is, the amount of pressure reduction is set to the minimum). Then, the blow pressure of the gas ejected from the nozzle N at the work position Sl and the blow pressure of the gas ejected from the nozzle N at the work position Sr are detected, respectively (step S303).

Based on the detection result, in step S304, a positive pressure communication path (positive pressure communication The output pressure of the pressure reducing valve 65 provided in one of the paths 61l and 61r starts to decrease. Here, since the gap Δl is narrower than the gap Δr, the blow pressure of the nozzle N at the work position Sl is higher than the blow pressure of the nozzle N at the work position Sr. Therefore, the output pressure of the pressure reducing valve 65 provided in the positive pressure introduction pipe 61l communicating with the nozzle N at the working position Sl is gradually reduced.

As the output pressure of the pressure reducing valve 65 decreases, the positive pressure of the gas flowing into the positive pressure introduction hole Hl from the positive pressure introduction pipe 61l decreases. As a result, the positive pressure of the gas ejected from the nozzle N at the working position Sl decreases, and the blow pressure of the gas ejected from the nozzle N at the working position Sl and the blow pressure of the gas ejected from the nozzle N at the working position Sr decrease. The difference in blow pressure (difference in blow pressure) is reduced. Therefore, in step S305, while monitoring this blow pressure difference, it is confirmed whether it is within an allowable range. Then, when the blow pressure difference falls within the allowable range ("YES" in step S305), the decrease in the output pressure of the pressure reducing valve 65 provided in the positive pressure introduction pipe 61l communicating with the nozzle N at the working position Sl stops. (step S306). As a result, the output pressure of each pressure reducing valve 65 is set to the output pressure at the time when the decrease in the output pressure is stopped.

In this nozzle blow pressure calibration method, gas is caused to flow into the two nozzles N at the working positions Sl and Sr from the two (L) positive pressure introduction holes Hl and Hr provided in the housing 36 (step S301 , S302), and the difference in the positive pressure of the gas flowing into the positive pressure introduction holes Hl, Hr is changed between the two positive pressure introduction holes Hl, Hr (step S304). In this way, while changing the difference in the positive pressure of the gas, the blow pressure of the gas ejected from the two nozzles is detected (steps S304, S305), and the positive pressure of the gas between the two positive pressure introduction holes Hl and Hr is detected. The difference between the two is set based on this blow pressure (steps S305 and S306). Therefore, during component mounting, the positive pressure of the gas supplied to the two positive pressure introduction holes Hl and Hr is adjusted so that a difference in the positive pressure of the gas set by this nozzle blow pressure calibration method occurs. Therefore, the blowing pressures of the gas ejected from the two nozzles N at the working positions Sl and Sr can be made equal. In other words, it is sufficient to adjust the difference in the positive pressure of the gas not by targeting all 18 (M) nozzles N but by targeting two nozzles N among the 18 nozzles. Therefore, the blow pressures of the nozzles N can be made uniform with a small number of components. In this way, it is possible to eject gas suitable for detaching the component E from the nozzle N while suppressing an increase in the number of components and cost.

FIG. 12 is a flowchart showing a second example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. This nozzle blow pressure calibration method is executed, for example, by an operator before the component mounting machine 1 starts mounting components.

In step S401, nozzles N are positioned at each of the work positions Sl and Sr. In step S402, the output pressure of each of the two pressure reducing valves 65 of the positive pressure supply mechanism 6 is set to the minimum (that is, the amount of pressure reduction is set to the maximum). Then, the blow pressure of the gas ejected from the nozzle N at the work position Sl and the blow pressure of the gas ejected from the nozzle N at the work position Sr are detected, respectively (step S403).

Based on the detection result, in step S404, a positive pressure communication path (positive pressure communication The output pressure of the pressure reducing valve 65 provided in one of the paths 61l and 61r starts to increase. Here, since the gap Δr is wider than the gap Δl, the blow pressure of the nozzle N at the work position Sr is lower than the blow pressure of the nozzle N at the work position Sl. Therefore, the output pressure of the pressure reducing valve 65 provided in the positive pressure introduction pipe 61r communicating with the nozzle N at the working position Sr is gradually increased.

As the output pressure of the pressure reducing valve 65 increases, the positive pressure of the gas flowing into the positive pressure introduction hole Hr from the positive pressure introduction pipe 61r increases. As a result, the positive pressure of the gas ejected from the nozzle N at the working position Sr increases, and the blow pressure of the gas ejected from the nozzle N at the working position Sr and the gas ejected from the nozzle N at the working position Sl increase. The difference in blow pressure (difference in blow pressure) is reduced. Therefore, in step S405, this blow pressure difference is monitored to see if it falls within an allowable range. Then, when the blow pressure difference falls within the allowable range ("YES" in step S405), the increase in the output pressure of the pressure reducing valve 65 provided in the positive pressure introduction pipe 61r communicating with the nozzle N at the working position Sr is stopped. (Step S406). As a result, the output pressure of each pressure reducing valve 65 is set to the output pressure at the time when the decrease in the output pressure is stopped.

In this nozzle blow pressure calibration method, gas is caused to flow into the two nozzles N at the working positions Sl and Sr from the two (L) positive pressure introduction holes Hl and Hr provided in the housing 36 (step S401 , S402), and the difference in the positive pressure of the gas flowing into the positive pressure introduction holes Hl, Hr is changed between the two positive pressure introduction holes Hl, Hr (step S404). In this way, while changing the difference in the positive pressure of the gas, the blow pressure of the gas ejected from the two nozzles is detected (steps S404, S405), and the positive pressure of the gas between the two positive pressure introduction holes Hl and Hr is detected. The difference between the two is set based on this blow pressure (steps S405 and S406). Therefore, during component mounting, the positive pressure of the gas supplied to the two positive pressure introduction holes Hl and Hr is adjusted so that a difference in the positive pressure of the gas set by this nozzle blow pressure calibration method occurs. Therefore, the blowing pressures of the gas ejected from the two nozzles N at the working positions Sl and Sr can be made equal. In other words, it is sufficient to adjust the difference in the positive pressure of the gas not by targeting all 18 (M) nozzles N but by targeting two nozzles N among the 18 nozzles. Therefore, the blow pressures of the nozzles N can be made uniform with a small number of components. In this way, it is possible to eject gas suitable for detaching the component E from the nozzle N while suppressing an increase in the number of components and cost.

FIG. 13 is a diagram schematically showing a third example of a positive pressure supply mechanism that supplies positive pressure to the rotary head. The third example in FIG. 13 differs from the first example in FIG. 7 in that the gas exhaust mechanism 64 provided for the positive pressure introduction pipe 61r is removed, and is the same as the first example in FIG. 7 in other respects. do. Therefore, the explanation will focus on the differences from the first example, and the common points with the first example will be given corresponding symbols and the explanation will be omitted as appropriate.

In other words, in the third example of FIG. 13, only the positive pressure introduction pipe 61l connected to the positive pressure introduction hole Hl, which has narrower clearances Δl and Δr with respect to the shaft holder 32, among the positive pressure introduction holes Hl and Hr. A gas exhaust mechanism 64 is provided, but the gas exhaust mechanism 64 is not provided for the positive pressure introduction pipe 61r connected to the wider positive pressure introduction hole Hr.

Then, the positive pressure supply mechanism 6 discharges gas from the positive pressure introduction pipe 61l via the gas discharge pipe 641 by opening the flow rate adjustment valve 642 provided for the positive pressure introduction pipe 61l. Thereby, the flow rate of gas flowing into the positive pressure introduction hole Hl from the positive pressure introduction pipe 61l is smaller than the flow rate of gas flowing into the positive pressure introduction hole Hr from the positive pressure introduction pipe 61r. The difference is set. As a result, the difference between the blow pressure of the gas ejected from the nozzle N located at the work position Sl and the blow pressure of the gas ejected from the nozzle N located at the work position Sr is suppressed.

That is, the positive pressure supply mechanism 6 includes a gas discharge mechanism 64 that reduces the flow rate using a flow rate adjustment valve 642 (control valve). The gas discharge mechanism 64 connects the positive pressure source 62 and the positive pressure introduction hole Hl (one positive pressure introduction hole) among the two (L) positive pressure introduction pipes 61l and 61r (positive pressure introduction paths). Compared to the flow rate of gas flowing into the positive pressure introduction pipe 61l from the positive pressure source 62, the positive pressure introduction hole Hl is provided only in the positive pressure introduction pipe 61l (one positive pressure introduction path). A flow rate adjustment valve 642 reduces the flow rate of gas flowing into the air. This makes the flow rate of gas flowing into the positive pressure introduction hole Hl smaller than the flow rate of gas flowing into the positive pressure introduction hole Hr. In this configuration, the difference in the flow rate of gas flowing from the positive pressure introduction pipes 61l, 61r into the positive pressure introduction holes Hl, Hr between the two positive pressure introduction pipes 61l, 61r is controlled by the single flow rate adjustment valve 642. Can be adjusted. Therefore, an increase in the number of components and cost can be suppressed to a minimum.

FIG. 14 is a diagram schematically showing a fourth example of a positive pressure supply mechanism that supplies positive pressure to the rotary head. The fourth example in FIG. 14 differs from the second example in FIG. 10 in that the pressure reducing valve 65 provided for the positive pressure introduction pipe 61r is removed, and is the same as the second example in FIG. 10 in other respects. . Therefore, the explanation will focus on the differences from the second example, and the common points with the second example will be given corresponding symbols and the explanation will be omitted as appropriate.

In other words, in the fourth example of FIG. 14, only the positive pressure introduction pipe 61l connected to the positive pressure introduction hole Hl, which has the narrower clearances Δl and Δr with respect to the shaft holder 32, among the positive pressure introduction holes Hl and Hr. A pressure reducing valve 65 is provided, but the pressure reducing valve 65 is not provided for the positive pressure introducing pipe 61r connected to the wider positive pressure introducing hole Hr.

Then, the positive pressure supply mechanism 6 supplies an output pressure obtained by reducing the positive pressure output from the positive pressure source 62 to the positive pressure introduction hole Hl by a pressure reducing valve 65 provided for the positive pressure introduction pipe 61l. As a result, these positive pressures are adjusted so that the positive pressure of the gas flowing into the positive pressure introduction hole Hl from the positive pressure introduction pipe 61l is smaller than the positive pressure of the gas flowing into the positive pressure introduction hole Hr from the positive pressure introduction pipe 61r. A difference is set between the pressures. As a result, the difference between the blow pressure of the gas ejected from the nozzle N located at the work position Sl and the blow pressure of the gas ejected from the nozzle N located at the work position Sr is suppressed.

That is, the positive pressure supply mechanism 6 reduces the positive pressure using the pressure reducing valve 65 (control valve, control mechanism). The pressure reducing valve 65 connects the positive pressure source 62 and the positive pressure introduction hole Hl (one positive pressure introduction hole) among the two (L) positive pressure introduction pipes 61l and 61r (positive pressure introduction paths). Compared to the positive pressure of gas that is provided only in the positive pressure introduction pipe 61l (one positive pressure introduction path) and flows into the positive pressure introduction pipe 61l from the positive pressure source 62, the positive pressure introduction hole Hl from the positive pressure introduction pipe 61l is A pressure reducing valve 65 reduces the positive pressure of the gas flowing into the air. This makes the positive pressure of the gas flowing into the positive pressure introduction hole Hl smaller than the positive pressure of the gas flowing into the positive pressure introduction hole Hr. In this configuration, the difference in the positive pressure of gas flowing from the positive pressure introduction pipes 61l, 61r into the positive pressure introduction holes Hl, Hr between the two positive pressure introduction pipes 61l, 61r can be adjusted by the single pressure reducing valve 65. Can be adjusted. Therefore, an increase in the number of components and cost can be suppressed to a minimum.

In this way, in the above embodiment, the component mounter 1 corresponds to an example of the "component mounter" of the present invention, the shaft holder 32 corresponds to an example of the "nozzle holder" of the present invention, and the housing 36 corresponds to an example of the "nozzle holder" of the present invention. This corresponds to an example of a "housing", the housing main body 361 corresponds to an example of the "main body" of the present invention, the hollow part 362 corresponds to an example of the "hollow part" of the present invention, the positive pressure introduction pipe 61l and the positive pressure Each of the introduction pipes 61r corresponds to an example of the "positive pressure introduction path" of the present invention, the positive pressure source 62 corresponds to an example of the "positive pressure source" of the present invention, and the gas discharge mechanism 64 corresponds to an example of the "adjustment path" of the present invention. The gas discharge pipe 641 corresponds to an example of a "gas discharge path" of the present invention, and the flow rate adjustment valve 642 corresponds to an example of a "control valve" and a "flow rate adjustment valve" of the present invention. This corresponds to an example, and the pressure reducing valve 65 corresponds to an example of the "adjusting section", "control mechanism", "control valve", and "pressure reducing valve" of the present invention, and the positive pressure introduction hole Hl and the positive pressure introduction hole Hr are Each corresponds to an example of the "positive pressure introduction hole" of the present invention, the nozzle N corresponds to an example of the "nozzle" of the present invention, the opening Oi corresponds to an example of the "opening" of the present invention, and the opening Oo corresponds to an example of the "opening" of the present invention. This corresponds to an example of the "opening" of the invention, the working position Sl and the working position Sr each correspond to an example of the "working position" of the invention, and the positive pressure communication path T corresponds to an example of the "positive pressure communication path" of the invention. However, the gap Δl corresponds to an example of the "gap" of the present invention, and the gap Δr corresponds to an example of the "gap" of the present invention.

Note that the present invention is not limited to the above-described embodiments, and various changes can be made to the above-described embodiments without departing from the spirit thereof. For example, the number of nozzles N (=M) is not limited to 18.

Furthermore, the number of work positions Sl and Sr (=L) is not limited to two, but may be three or more.

Further, the configuration of the positive pressure supply mechanism 6 may be omitted as appropriate. For example, it is not necessarily necessary to provide the on-off valve 63.

Further, the location where the gas exhaust mechanism 64 or the pressure reducing valve 65 is provided is not limited to the above example.

1...Component mounting machine 32...Shaft holder (nozzle holder)
36...Housing 361...Housing body (main body)
362...Hollow part 61l...Positive pressure introduction pipe (positive pressure introduction route)
61r...Positive pressure introduction pipe (positive pressure introduction route)
62...Positive pressure source 64...Gas discharge mechanism (adjustment section, control mechanism)
641...Gas exhaust pipe (gas exhaust route)
642...Flow rate adjustment valve (control valve, flow rate adjustment valve)
65...Pressure reducing valve (adjustment section, control mechanism, control valve, pressure reducing valve)
Hl...Positive pressure introduction hole Hr...Positive pressure introduction hole N...Nozzle Oi...Opening Oo...Opening Sl...Working position Sr...Working position T...Positive pressure communication path Δl...Gap Δr...Gap

Claims (8)

A main body surrounding a hollow part, and L positive pressure introduction holes provided corresponding to L working positions (L is an integer of 2 or more), the positive pressure introduction holes penetrating the main body. a housing that opens into the hollow portion;
a nozzle holder that is arranged in the hollow part to be rotatable with respect to the housing around a predetermined rotation center and holds M nozzles (M is an integer larger than L) arranged in a circumferential manner;
a positive pressure source that outputs positive pressure;
L positive pressure introduction paths provided corresponding to the L positive pressure introduction holes and connecting the respective corresponding positive pressure introduction holes and the positive pressure source;
an adjustment unit that adjusts a difference between the L positive pressure introduction holes in one of the target values of the pressure and flow rate of the gas flowing from the positive pressure introduction path into the positive pressure introduction hole;
The nozzle holder is provided with M positive pressure communication passages corresponding to the M nozzles,
By rotating the nozzle holder, among the M nozzles, L nozzles located at the L working positions are switched;
Among the M positive pressure communication passages, openings of the L positive pressure communication passages corresponding to the L nozzles located at the L working positions are opposed to openings of the L positive pressure introduction holes. , a component mounting machine in which the L nozzles and the L positive pressure input holes communicate with each other. A gap between the inner wall of the main body in which one of the L positive pressure introduction holes is provided and the nozzle holder is the inner wall of the main body in which the other positive pressure introduction hole is provided. narrower than the gap between and the nozzle holder,
The component mounter according to claim 1, wherein the adjustment section makes the target value of the gas flowing into the one positive pressure introduction hole smaller than the target value of the gas flowing into the other positive pressure introduction hole. 3. The component mounting machine according to claim 2, wherein L is 2. The adjustment unit has a control mechanism that reduces the target value by a control valve,
The control mechanism is provided only in one positive pressure introduction path that connects the positive pressure source and the one positive pressure introduction hole among the L positive pressure introduction paths, and is configured to connect the positive pressure source to the one positive pressure introduction hole. By using the control valve to reduce the target value of the gas flowing into the positive pressure introduction hole from the one positive pressure introduction path compared to the target value of the gas flowing into the positive pressure introduction path, 4. The component mounting machine according to claim 3, wherein the target value of the gas flowing into one positive pressure introduction hole is smaller than the target value of the gas flowing into the other positive pressure introduction hole. The control mechanism has a gas exhaust path branching from the first positive pressure introduction path,
The control valve is a flow rate adjustment valve that adjusts the flow rate of gas flowing through the gas discharge path,
The adjustment section adjusts the flow rate of gas flowing into the first positive pressure introduction hole by opening the flow rate adjustment valve and discharging gas from the first positive pressure introduction path via the gas discharge path. 5. The component mounter according to claim 4, wherein the flow rate is smaller than that of the gas flowing into the other positive pressure introduction holes. The control valve is a pressure reducing valve provided in the first positive pressure introduction path,
The adjustment unit reduces the pressure of the positive pressure output from the positive pressure source using the pressure reducing valve, and then supplies the reduced pressure to the first positive pressure introduction hole, thereby adjusting the amount of gas flowing into the first positive pressure introduction hole. 5. The component mounting machine according to claim 4, wherein the pressure is lower than the pressure of the gas flowing into the other positive pressure introduction hole. 7. The component mounting machine according to claim 1, wherein M is 5 times or more than L. A main body surrounding a hollow part, and L positive pressure introduction holes provided corresponding to L working positions (L is an integer of 2 or more), the positive pressure introduction holes penetrating the main body. M nozzles arranged in a circumferential manner (M is smaller than positioning L nozzles among the nozzles (a large integer) at the L working positions;
The L positive pressure is supplied from L positive pressure introduction paths that are provided corresponding to the L positive pressure introduction holes and connect the corresponding positive pressure introduction holes and a positive pressure source that outputs positive pressure. changing the difference between the L positive pressure introduction holes in one of the target values of the pressure and flow rate of the gas flowing into the positive pressure introduction holes while allowing gas to flow into the introduction holes;
Openings of L positive pressure communication passages corresponding to the L nozzles located at the L working positions among the M positive pressure communication passages provided in the nozzle holder corresponding to the M nozzles. is opposed to the openings of the L positive pressure introduction holes, and the L nozzles and the L positive pressure input holes communicate with each other, thereby controlling the blow pressure of the gas ejected from the L nozzles. a step of detecting;
A nozzle blow pressure calibration method comprising: setting a difference in the target value between the L positive pressure introduction holes based on the blow pressure.

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