JP7364596B2 - electrostatic transducer - Google Patents

Description

The present invention relates to an electrostatic transducer .

In recent years, electrostatic transducers having a heater function have become known. For example, Patent Documents 1 and 2 describe steering wheels that include a heater and an electrostatic sensor that detects when the driver's hand is released. The steering wheel described in Patent Document 1 is manufactured by winding a heater wire in a coil around the outer periphery of the axis of the steering wheel, and arranging an electrostatic sensor on the outer periphery of the heater wire.

Japanese Patent Application Publication No. 2014-190856 Special table 2016-527657 publication

The manufacturing method described in Patent Document 1, in which a heater wire is attached to a base material such as the shaft of a steering wheel, and then an electrostatic sheet is attached thereto requires a large number of manufacturing steps. That is, a process of attaching the heater wire and a process of attaching the electrostatic sheet are required. Furthermore, if the base material mounting surface on which the heater wires and electrostatic sheet are attached is a curved surface like the axis of a steering wheel, or if it is not a simple flat surface but has a complex shape, the above two steps are required. This requires a large number of manufacturing steps. Therefore, it is required to reduce the number of manufacturing steps.

Further, when the transducer includes a flexible base material, a heater attached to the base material, and an electrostatic sensor, it is also required to reduce the number of manufacturing steps. Further, even when the transducer is configured to include a heater and an electrostatic sensor without including a base material, it is required to reduce the number of manufacturing steps.

Furthermore, in recent years, as an environmental measure, there has been a demand for suppression of volatile organic compound (VOC) emissions. Therefore, it is required not to use a volatile adhesive, and it is also required not to use an organic solvent.

One of the objects of the present invention is to provide an electrostatic transducer having a heater function that can be manufactured without using volatile adhesives and organic solvents and can reduce the number of manufacturing steps.

The first aspect of the present invention is
An electrostatic transducer formed in a sheet shape and having a flexible heater function,
An electrode sheet formed into a sheet shape and containing a thermoplastic material and a conductive filler;
a heater formed into a sheet shape of heater wires and disposed opposite to the electrode sheet;
It is formed into a sheet shape, is made of a thermoplastic material having a higher softening point than the thermoplastic material of the electrode sheet, and has the heater wires constituting the heater embedded therein, and one surface is made of a thermoplastic material having a higher softening point than the thermoplastic material of the electrode sheet. an insulating layer joined to the electrode sheet by fusion;
The electrostatic transducer has a heater function.
The second aspect of the present invention is
An electrostatic transducer formed in a sheet shape and having a flexible heater function,
An electrode sheet formed into a sheet shape and containing a thermoplastic material and a conductive filler;
a heater formed into a sheet shape of heater wires and disposed opposite to the electrode sheet;
an insulating layer formed in a sheet shape, made of a non-thermoplastic material, in which the heater wires constituting the heater are embedded, and one surface of which is joined to the electrode sheet by fusion of the thermoplastic material of the electrode sheet; and,
The electrostatic transducer has a heater function.
The third aspect of the present invention is
An electrostatic transducer formed in a sheet shape and having a flexible heater function,
An electrode sheet formed into a sheet shape and containing a thermoplastic material and a conductive filler;
a heater formed into a sheet shape of heater wires and disposed opposite to the electrode sheet;
It is formed into a sheet shape, is made of a non-woven fabric or a woven fabric of a non-thermoplastic material, has the heater wire constituting the heater embedded therein, and has one surface joined to the electrode sheet by fusing the thermoplastic material of the electrode sheet. an insulating layer,
The electrostatic transducer has a heater function.
The fourth aspect of the present invention is
An electrostatic transducer formed in a sheet shape and having a flexible heater function,
An electrode sheet formed into a sheet shape of conductive cloth,
a heater formed into a sheet shape of heater wires and disposed opposite to the electrode sheet;
an insulating layer formed in a sheet shape, made of a thermoplastic material, embedding the heater wire constituting the heater, and having one surface joined to the electrode sheet by its own fusion;
The electrostatic transducer has a heater function.

Since each of the above-mentioned constituent members of the electrostatic transducer having a heater function is formed in a sheet shape, the electrode sheet, insulating layer, and heater that constitute the electrostatic transducer are integrally formed in a sheet shape as a whole. . Therefore, whether the electrostatic transducer includes a base material or not, it is possible to reduce the number of manufacturing steps for the electrostatic transducer.

In addition, since the above-mentioned constituent members of the electrostatic transducer having a heater function are integrally formed, when the above-mentioned constituent members of the electrostatic transducer are attached to the mounting surface of the base material, the mounting process to the mounting surface is not necessary. It can be done in one step. Therefore, the number of manufacturing steps can be reduced. Furthermore, since the mounting process can be performed in one step on the mounting surface, the more complex the shape of the mounting surface is, the more effective the reduction in manufacturing man-hours is. Also when attaching the constituent members of the electrostatic transducer to a flexible base material, the number of manufacturing steps can be reduced.

1 is a sectional view of the basic configuration of a transducer 1. FIG. FIG. 2 is a perspective view showing a heater 12. FIG. FIG. 3 is a cross-sectional view showing electrostatic sheets 10a of first to third examples. FIG. 3 is a cross-sectional view showing electrostatic sheets 10a of first to third examples. It is a sectional view showing electrostatic sheet 10b of a fourth example. It is a sectional view showing electrostatic sheet 10b of a fourth example. It is a sectional view showing electrostatic sheet 10c of a fifth example. It is a top view which shows the electrode sheet 11c in the electrostatic sheet 10c of the fifth example. It is a figure for demonstrating the manufacturing method of the electrostatic sheet 10c of a fifth example. 1 is a cross-sectional view showing a first example of a transducer 100. FIG. FIG. 3 is a cross-sectional view showing a second example of a transducer 200. FIG. 7 is a cross-sectional view showing a third example of a transducer 300. It is a sectional view showing transducer 400 of a fourth example. It is a figure for explaining the manufacturing method of the transducer 400 of a fourth example. It is a sectional view showing a transducer 500 of a fifth example. It is a figure for explaining the manufacturing method of the transducer 500 of a fifth example. It is a sectional view showing transducer 600 of a sixth example. It is a figure for explaining the manufacturing method of the transducer 600 of a sixth example.

(1. Applicable target)
An electrostatic transducer (hereinafter referred to as a "transducer") includes an electrostatic sheet having a heater function. The transducer includes, for example, a base material and the electrostatic sheet attached to the mounting surface of the base material. The base material is any member made of metal, resin, or other materials.

In addition, the mounting surface of the base material may be formed into a three-dimensional shape such as a curved surface, a composite plane (shape formed by multiple planes), a composite shape of a plane and a curved surface, or the surface of the base material may be a single surface. It may be formed into a planar shape. When the base material is made of a flexible material, the electrostatic sheet can also be attached to the mounting surface of the base material. Further, the transducer can also be used as a single electrostatic sheet without a base material.

The electrostatic sheet is arranged on the mounting surface (surface) of the base material. The electrostatic sheet is generally flexible. Soft means having flexibility and being able to stretch in the plane direction. Therefore, even if the mounting surface of the base material has a three-dimensional shape, the electrostatic sheet can be attached along the mounting surface of the base material. In particular, by attaching the electrostatic sheet to the attachment surface of the base material while stretching it in the plane direction, it is possible to suppress the generation of wrinkles in the electrostatic sheet.

An electrostatic sheet can function as an actuator or a sensor by utilizing changes in capacitance between a pair of electrodes. The electrostatic sheet only needs to include at least one of the pair of electrodes, and is not limited to a configuration that includes the pair of electrodes. Of course, the electrostatic sheet may include a pair of electrodes.

The electrostatic sheet can function as an actuator that generates vibrations, sounds, etc. by utilizing changes in capacitance between electrodes. In addition, the electrostatic sheet can function as a sensor that detects external pushing force, etc., or as a sensor that detects the contact or approach of a conductor with potential, by utilizing changes in capacitance between electrodes. .

When the electrostatic sheet functions as an actuator, by applying a voltage to the electrodes, the dielectric material is deformed according to the potential between the electrodes, and vibrations are generated as the dielectric material deforms. When the electrostatic sheet functions as a sensor that detects pushing force, the dielectric material deforms due to input of external pushing force, vibration, sound, etc. (hereinafter referred to as external pushing force, etc.). As a result, the capacitance between the electrodes changes, and by detecting a voltage according to the capacitance between the electrodes, an external pushing force or the like is detected. In addition, when an electrostatic sheet functions as a sensor that detects contact or approach, the capacitance between the electrodes changes due to the contact or approach of a conductor with potential, and the capacitance between the electrodes changes. Contact or approach of the conductor is detected by detecting the corresponding voltage.

The transducer can be applied to, for example, the surface of a pointing device such as a mouse or joystick, or the surface of a vehicle component. Vehicle parts include steering wheels, doorknobs, shift levers, armrests, door trims, center trims, center consoles, etc. In many cases, the base material is made of a non-flexible material such as metal or resin. In other words, the transducer can apply heat to the subject in addition to detecting the condition (operation, etc.) of the subject and applying vibration to the subject.

Further, the transducer may be arranged on the surface side of the seat surface or the surface side of the backrest surface. In this case, the transducer may be configured such that an electrostatic sheet having a heater function is attached to a base material made of a flexible material such as a resin film. Further, the transducer may be constructed of an electrostatic sheet having a heater function without having a base material.

(2. Basic configuration of transducer 1)
An example of the basic configuration of the transducer 1 will be described with reference to FIGS. 1 and 2. As shown in FIG. 1, the transducer 1 includes an electrostatic sheet 10 having a heater function. The electrostatic sheet 10 is formed into a sheet shape as a whole and is flexible. Here, "soft" means having flexibility and being able to stretch in the plane direction.

The electrostatic sheet 10 is attached to the mounting surface of the above-mentioned base material (not shown in FIG. 1). As shown in FIG. 1, the electrostatic sheet 10 includes at least an electrode sheet 11, a heater 12, and an insulating layer 13. The electrostatic sheet 10 may include configurations other than the electrode sheet 11, the heater 12, and the insulating layer 13.

The electrode sheet 11 has electrical conductivity. Furthermore, the electrode sheet 11 is flexible. The electrode sheet 11 is made of, for example, a conductive elastomer, conductive cloth, or metal foil.

A case in which the electrode sheet 11 is formed of a conductive elastomer will be described in detail. In this case, the electrode sheet 11 is formed of an elastomer containing a conductive filler. That is, the electrode sheet 11 is formed by using an elastomer as a base material and containing a conductive filler.

The electrode sheet 11 is made of, for example, a thermoplastic elastomer. The electrode sheet 11 may be formed from the thermoplastic elastomer itself, or may be formed from an elastomer that is crosslinked by heating the thermoplastic elastomer as a raw material.

Here, the electrode sheet 11 can be selected from one or more elastomers such as styrene, olefin, vinyl chloride, urethane, ester, and amide. For example, examples of the styrene elastomer include SBS, SEBS, and SEPS. Examples of the olefin elastomer include EEA, EMA, EMMA, and a copolymer of ethylene and α-olefin (ethylene-octene copolymer).

The electrode sheet 11 may contain rubber or resin other than thermoplastic elastomer. For example, when rubber such as ethylene-propylene rubber (EPM, EPDM) is included, the flexibility of the electrode sheet 11 is improved. From the viewpoint of improving the flexibility of the electrode sheet 11, the electrode sheet 11 may contain a flexibility imparting component such as a plasticizer.

Further, a case in which the electrode sheet 11 is formed of conductive cloth will be described in detail. The conductive cloth is a woven or nonwoven fabric made of conductive fibers. Here, the conductive fiber is formed by coating the surface of a flexible fiber with a conductive material. The conductive fiber is formed, for example, by plating the surface of a resin fiber such as polyethylene with copper, nickel, or the like.

A case in which the electrode sheet 11 is formed of metal foil will be described in detail. The metal foil has a plurality of through holes, similar to the conductive cloth. Therefore, the electrode sheet 11 has flexibility and can be expanded in the plane direction as the through holes are deformed. The metal foil only needs to be a conductive metal material, and for example, copper foil, aluminum foil, etc. can be used.

As shown in FIG. 2, the heater 12 is formed into a sheet-like (plane-like) shape using heater wires. Heater 12 is arranged to face one surface of electrode sheet 11 . The heater wire is made of a metal alloy material, such as nickel chromium, iron chromium, or the like.

The insulating layer 13 is formed in a sheet shape and is sandwiched between at least the electrode sheet 11 and the heater 12. The insulating layer 13 may be formed to cover both surfaces of the heater 12 (the upper and lower surfaces in FIG. 1). Note that FIG. 1 shows a case where the insulating layer 13 covers both sides of the heater 12.

The insulating layer 13 is made of a flexible material. The insulating layer 13 is made of, for example, a thermoplastic material, particularly a thermoplastic elastomer. Further, the insulating layer 13 can also be made of a non-thermoplastic elastomer foam material, nonwoven fabric, woven fabric, or the like. The insulating layer 13 can also function as a dielectric layer in the electrostatic sheet 10.

The electrostatic sheet 10 further includes an electrode fusing layer 14. The electrode fusion layer 14 is formed of a fusion material. The electrode fusion layer 14 joins the electrode sheet 11 and the insulating layer 13 by fusion (thermal fusion) of the electrode fusion layer 14 itself. Here, the electrode fusion layer 14 may be configured as a part of the electrode sheet 11 or may be configured as a part of the insulating layer 13. Further, the electrode fusion layer 14 may be configured as a part of the electrode sheet 11 and as a part of the insulating layer 13. Further, the electrode fusion layer 14 may be joined to the electrode sheet 11 and the insulating layer 13 as a separate member.

A method of manufacturing the basic configuration of the transducer 1 described above will be described. A laminate in which the electrode sheet 11, the insulating layer 13, and the heater 12, which are the constituent elements of the electrostatic sheet 10, are laminated in this order is prepared (preparation step). Here, at this point, the insulating layer 13 may be integrally formed with the heater 12 in advance, or may be separate from the electrode sheet 11 and the heater 12.

Subsequently, the laminate is heated and pressurized (heating and pressurizing step). Then, the electrode sheet 11 and the insulating layer 13 are bonded to each other by the electrode fusion layer 14 . As described above, the electrode fusion layer 14 is either a part of the electrode sheet 11, a part of the insulating layer 13, or a material different from the electrode sheet 11 and the insulating layer 13. In this way, the electrostatic sheet 10 is manufactured. Subsequently, the electrostatic sheet 10 is attached to a base material (not shown). If no base material is present, the transducer 1 is completed by manufacturing the electrostatic sheet 10.

(3. Effects of the basic configuration of transducer 1)
The electrostatic sheet 10 constituting the transducer 1 is integrally formed into a sheet shape as a whole. Therefore, regardless of whether the transducer 1 includes a base material or does not include a base material, it is possible to reduce the number of manufacturing steps for the transducer 1.

In addition, since the constituent members 11, 12, 13 of the transducer 1 are integrally formed, when the constituent members 11, 12, 13 of the transducer 1 are attached to the mounting surface of the base material, the mounting to the mounting surface is difficult. The process can be one step. Therefore, the number of manufacturing steps can be reduced. Furthermore, since the mounting process can be performed in one step on the mounting surface, the more complex the shape of the mounting surface is, the more effective the reduction in manufacturing man-hours is. Also when attaching the constituent members 11, 12, 13 of the transducer 1 to a flexible base material, the number of manufacturing steps can be reduced.

Further, the electrode sheet 11 and the insulating layer 13 are bonded using a fusing material that can be softened by heat. Therefore, the electrostatic sheet 10 having a heater function can be manufactured without using a volatile adhesive or an organic solvent. In other words, an environmentally friendly transducer 1 can be manufactured.

Further, when the electrode fusing layer 14 is formed of a portion of the electrode sheet 11 or a portion of the insulating layer 13, a dedicated member is not required as the electrode fusing layer 14. As a result, it is possible to achieve further cost reduction.

(4. Example of electrostatic sheet 10)
The electrostatic sheet 10 of the basic configuration of the transducer 1 described above will be described using a plurality of examples.

(4-1. Electrostatic sheet 10a of first example)
The structure of the electrostatic sheet 10a of the first example will be explained with reference to FIGS. 3 and 4. The electrode sheet 11a constituting the electrostatic sheet 10a is formed including a thermoplastic material. For example, the electrode sheet 11a is made of thermoplastic elastomer. That is, the electrode sheet 11a can be softened and fused to a mating member by heating and pressurizing.

The insulating layer 13a is made of a thermoplastic material, for example a thermoplastic elastomer. The thermoplastic material of the insulating layer 13a has a higher softening point than the thermoplastic material of the electrode sheet 11a. Furthermore, as shown in FIG. 3, the insulating layer 13a has irregularities on the surface to be bonded to the electrode sheet 11a. For example, by forming an uneven surface on a mold for molding the insulating layer 13a, it is possible to form an uneven surface on the bonding surface of the insulating layer 13a with the electrode sheet 11a.

As shown in FIG. 4, an electrostatic sheet 10a is manufactured by laminating an electrode sheet 11a and an insulating layer 13a and applying heat and pressure to the laminate. Here, the electrode sheet 11a is made of a thermoplastic material having a lower softening point than the insulating layer 13a. Therefore, by heating and pressurizing the laminate, the thermoplastic material of the electrode sheet 11a softens first and enters the recessed portion of the insulating layer 13a.

Then, a portion of the electrode sheet 11a functions as an electrode fusion layer 14 that joins the electrode sheet 11a and the uneven surface of the insulating layer 13a by fusing itself. In particular, a portion of the electrode sheet 11a enters the recessed portion of the insulating layer 13a, thereby exerting an anchor effect and increasing the bonding force between the electrode sheet 11a and the insulating layer 13a.

(4-2. Electrostatic sheet 10a of second example)
In the electrostatic sheet 10a of the first example, the insulating layer 13a is made of a thermoplastic material, but a non-thermoplastic material may also be used. In this case, when the laminate is heated and pressurized, the thermoplastic material of the electrode sheet 11a naturally softens before the insulating layer 13a.

(4-3. Third example electrostatic sheet 10a)
The insulating layer 13a is a nonwoven or woven fabric made of fibers of a non-thermoplastic material. Since the nonwoven fabric or fabric is made of fibers, it has irregularities at least on the surface of the insulating layer 13a that is bonded to the electrode sheet 11a, as shown in FIG. Specifically, the bonding surface of the insulating layer 13a has irregularities formed by fibers and spaces between the fibers. That is, the insulating layer 13a has an uneven surface in which the fibers are convex portions and the spaces between adjacent fibers are concave portions.

Then, similarly to the first example, as shown in FIG. 4, the electrostatic sheet 10a is manufactured by laminating the electrode sheet 11a and the insulating layer 13a and heating and pressurizing the laminate. That is, by heating and pressurizing the laminate, the thermoplastic material of the electrode sheet 11a is softened and enters the recessed portion of the insulating layer 13a. Then, a portion of the electrode sheet 11a functions as an electrode fusion layer 14 that joins the electrode sheet 11a and the uneven surface of the insulating layer 13a by fusing itself.

(4-4. Fourth example electrostatic sheet 10b)
The structure of the electrostatic sheet 10b of the fourth example will be explained with reference to FIGS. 5 and 6. The electrode sheet 11a constituting the electrostatic sheet 10b is formed containing a thermoplastic material, as in the first example.

The insulating layer 13b is made of a non-thermoplastic foam material. As shown in FIG. 5, the insulating layer 13b has irregularities formed by bubbles on at least the surface. Of course, the insulating layer 13b has recesses (bubbles) inside.

Then, as in the first example, as shown in FIG. 6, the electrostatic sheet 10a is manufactured by laminating the electrode sheet 11a and the insulating layer 13b and heating and pressurizing the laminate. That is, by heating and pressurizing the laminate, the thermoplastic material of the electrode sheet 11a softens and enters the recessed portion of the insulating layer 13b. Then, a portion of the electrode sheet 11a functions as an electrode fusion layer 14 that joins the electrode sheet 11a and the uneven surface of the insulating layer 13b by fusing itself.

(4-5. Electrostatic sheet 10c of fifth example)
The structure of the electrostatic sheet 10c of the fifth example will be explained with reference to FIGS. 7 and 8. As shown in FIG. 7, the electrostatic sheet 10 includes at least an electrode sheet 11c, a heater 12, an insulating layer 13c, an electrode fusing layer 14c, and a heater fusing layer 15c. The electrode sheet 11c has conductivity, flexibility, and elasticity in the plane direction. As shown in FIG. 8, the electrode sheet 11c is, for example, a conductive cloth.

The insulating layer 13c is made of, for example, a thermoplastic material, particularly a thermoplastic elastomer. The electrode fusion layer 14c may be configured as a part of the insulating layer 13c, or may be bonded to the insulating layer 13c as a separate member.

The heater fusing layer 15c is made of a fusing material. The heater fusion layer 15c joins the heater 12 and the insulating layer 13c by fusion (thermal fusion) of the heater fusion layer 15c itself. In particular, the heater 12 is embedded in the insulating layer 13c and bonded by the heater fusion layer 15c. The heater fusion layer 15c may be configured as a part of the insulating layer 13c, or may be bonded to the insulating layer 13c as a separate member.

For example, the heater fusing layer 15c is made of a thermoplastic material that is a fusing material, and is configured as a part of the insulating layer 13c. In this case, the heater fusion layer 15c as a part of the insulating layer 13c joins the heater 12 and the insulating layer 13c by its own fusion.

A method for manufacturing the electrostatic sheet 10c will be described with reference to FIG. 9. Here, it is assumed that the material of the insulating layer 13c is a thermoplastic material. A laminate is prepared in which the electrode sheet 11c, the first material 13c1 of the insulating layer 13c, the heater 12, and the second material 13c2 of the insulating layer 13c are laminated in this order (preparation step). Subsequently, the laminate is heated and pressurized (heating and pressing step). Then, the first material 13c1 of the insulating layer 13c softens, functions as a fusion material, and joins to the electrode sheet 11c. The portion fused to the electrode sheet 11c becomes the electrode fusion layer 14c.

Further, the first material 13c1 and the second material 13c2 of the insulating layer 13c are softened and function as a fusion material, and are bonded to the heater 12. The portion fused to the heater 12 becomes the heater fused layer 15c. Then, the first material 13c1 and the second material 13c2 of the insulating layer 13c are integrated to form the insulating layer 13c. Furthermore, the heater 12 is embedded in the insulating layer 13c. In this way, the electrostatic sheet 10c of the transducer 1 is manufactured.

The insulating layer 13c is made of a thermoplastic material, and the electrode fusing layer 14c and the heater fusing layer 15c are configured as part of the insulating layer 13c. Therefore, special members are not required as the electrode fusing layer 14c and the heater fusing layer 15c. As a result, it is possible to achieve further cost reduction.

In addition, when the electrode fusion layer 14c and the heater fusion layer 15c are arranged as separate members from the insulating layer 13c, the electrode sheet 11c, the material of the electrode fusion layer 14c, the insulating layer 13c, the heater fusion layer A laminate in which the material 15c and the heater 12 are stacked in this order is prepared (preparation step). Subsequently, the laminate is heated and pressurized (heating and pressing step). Then, the material of the electrode fusion layer 14c softens and functions as a fusion material to bond the electrode sheet 11c and the insulating layer 13c. Further, the material of the heater fusion layer 15c is softened and functions as a fusion material to bond the heater 12 and the insulating layer 13c.

(5. Example of transducer 1)
A transducer 1 having the basic configuration of the transducer 1 described above but also including other elements will be described using a plurality of examples. In particular, the electrostatic sheet 10 of the transducer 1 has a configuration including a pair of electrode sheets.

(5-1. First example transducer 100)
The configuration of a first example transducer 100 will be described with reference to FIG. 10. The transducer 100 includes an electrostatic sheet 110 having a heater function. The electrostatic sheet 110 is generally flexible. The electrostatic sheet 110 has a configuration using any one of the electrostatic sheets 10a, 10b of the first to fourth examples. In this example, parts having the same configuration as those of the electrostatic sheets 10a and 10b are designated by the same reference numerals, and detailed description thereof will be omitted.

The electrostatic sheet 110 includes at least a first electrode sheet 116, a second electrode sheet 11a, a heater 12, an interelectrode insulating layer 117, back side insulating layers 13a, 13b, and back side fusion layers 14a, 14b. The first electrode sheet 116 has the same configuration as the electrode sheet 11a in any one of the electrostatic sheets 10a, 10b of the first to fourth examples. The first electrode sheet 116 is arranged on the surface layer side.

The second electrode sheet 11a corresponds to a portion of the electrostatic sheet 10a, 10b of any one of the first to fourth examples that functions as the electrode sheet 11a. The second electrode sheet 11a is arranged opposite to the back surface of the first electrode sheet 116. The heater 12 corresponds to a portion of the electrostatic sheet 10a, 10b of any one of the first to fourth examples that functions as the heater 12. The heater 12 is arranged opposite to the back surface of the second electrode sheet 11a.

The interelectrode insulating layer 117 is formed in a sheet shape and is sandwiched between the first electrode sheet 116 and the second electrode sheet 11a. The interelectrode insulating layer 117 is made of an elastically deformable material. The interelectrode insulating layer 117 is made of, for example, a thermoplastic material, particularly a thermoplastic elastomer. Further, the interelectrode insulating layer 117 can also be made of a non-thermoplastic elastomer foam material, nonwoven fabric, or the like. The interelectrode insulating layer 117 functions as a dielectric layer in the electrostatic sheet.

The back side insulating layers 13a and 13b are formed in a sheet shape and are sandwiched between the second electrode sheet 11a and the heater 12. The back side insulating layers 13a, 13b correspond to the portions of the electrostatic sheets 10a, 10b of any one of the first to fourth examples that function as the insulating layers 13a, 13b. The back side insulating layers 13a and 13b are made of the same material as the interelectrode insulating layer 117. By forming both from the same type of material, cost reduction can be achieved.

The back side fusion layers 14a and 14b are formed of a fusion material. The back side fusion layers 14a, 14b are portions that bond the second electrode sheet 11a and the back side insulating layers 13a, 13b and function as the electrode fusion layers 14a, 14b in the electrostatic sheets 10a, 10b of the first example. corresponds to

A method of manufacturing the first example of transducer 100 will be described. The first electrode sheet 116, the interelectrode insulating layer 117, and the second electrode sheet 11a are integrally formed in a laminated state in advance (preparation step). Further, the heater 12 and the back side insulating layers 13a and 13b are integrally formed in advance (preparation step). Then, a laminate is prepared in which the members formed integrally are laminated (preparation step).

Subsequently, the laminate is heated and pressurized (heating and pressing step). Then, the second electrode sheet 11a is softened and fused to the uneven surfaces of the back side insulating layers 13a and 13b. In other words, a portion of the second electrode sheet 11a forms the back side fusion layers 14a and 14b. In this way, the electrostatic sheet 110 of the first example transducer 100 is manufactured.

According to the transducer 100 of the first example, the first electrode sheet 116, the second electrode sheet 11a, and the interelectrode insulating layer 117 are located closer to the surface than the heater 12. In other words, the heater 12 is not located between the first electrode sheet 116 and the second electrode sheet 11a and closer to the surface than the first electrode sheet 116. As a result, it is possible to suppress the influence of the heater 12 on the detection performance or drive performance, so that high detection performance or drive performance can be exhibited.

Even if the heater 12 is located on the back side of the second electrode sheet 11a, it can sufficiently function as a heater by making the interelectrode insulating layer 117 of a material with good thermal conductivity. Here, if the back side insulating layers 13a and 13b that are in direct contact with the heater 12 are formed of a material with good thermal conductivity, the heat will diffuse before the heat gets high enough, and sufficient heat will be transferred to the surface layer. difficult to convey. Therefore, by making the back side insulating layers 13a and 13b of a material that does not have good thermal conductivity to some extent, heat can be effectively transferred to the surface layer. In particular, when the back side insulating layers 13a and 13b are made of a foamed material, a nonwoven fabric, a woven fabric, etc. in which pores are formed, heat can be more effectively transmitted to the surface layer.

(5-2. Second example transducer 200)
The configuration of a second example of transducer 200 will be described with reference to FIG. 11. The transducer 200 includes an electrostatic sheet 210 having a heater function. The electrostatic sheet 110 is generally flexible. The electrostatic sheet 210 has a configuration using any one of the electrostatic sheets 10a, 10b of the first to fourth examples. In this example, parts having the same configuration as those of the electrostatic sheets 10a and 10b are designated by the same reference numerals, and detailed description thereof will be omitted.

The electrostatic sheet 210 includes at least the first electrode sheet 11a, the heater 12, the second electrode sheet 216, the first insulating layer 213a (13a, 13b), the second insulating layer 213b (13a, 13b), and the first electrode fusion. It includes layers 14a and 14b and a second electrode fusion layer 217.

The first electrode sheet 11a has the same configuration as the electrode sheet 11a in any one of the electrostatic sheets 10a, 10b of the first to fourth examples. The first electrode sheet 11a is arranged on the surface layer side. The heater 12 is arranged to face the back surface of the first electrode sheet 11a.

The second electrode sheet 216 has the same configuration as the first electrode sheet 11a. The second electrode sheet 216 is arranged opposite to the back side of the heater 12 . That is, the heater 12 is interposed between the first electrode sheet 11a and the second electrode sheet 216.

The first insulating layer 213a is formed in a sheet shape and is sandwiched between the first electrode sheet 11a and the heater 12. The first insulating layer 213a functions as a part of the insulating layers 13a, 13b in the electrostatic sheets 10a, 10b of any one of the first to fourth examples. The second insulating layer 213b is formed into a sheet shape and is sandwiched between the heater 12 and the second electrode sheet 216. The second insulating layer 213b functions as another part of the insulating layers 13a, 13b in the electrostatic sheets 10a, 10b of the first to fourth examples. That is, the first insulating layer 213a and the second insulating layer 213b are formed of the same kind of material.

The first electrode fusion layers 14a and 14b are formed of a fusion material. The first electrode fusion layers 14a and 14b bond the first electrode sheet 11a and the first insulating layer 213a. The first electrode fusing layers 14a, 14b function as the electrode fusing layers 14a, 14b in the electrostatic sheets 10a, 10b of any one of the first to fourth examples. The second electrode fusion layer 217 is formed of a fusion material. The second electrode fusion layer 217 joins the second electrode sheet 216 and the second insulating layer 213b. The second electrode fusion layer 217 has the same configuration as the first electrode fusion layers 14a and 14b.

A method of manufacturing the second example of transducer 200 will be described. The first insulating layer 213a, the heater 12, and the second insulating layer 213b are integrally formed in advance. Then, a laminate is prepared in which the first electrode sheet 11a, the above-mentioned integral molded product, and the second electrode sheet 216 are laminated in this order (preparation step).

Subsequently, the laminate is heated and pressurized (heating and pressing step). Then, the first electrode sheet 11a is softened and fused to the uneven surface of the first insulating layer 213a. In other words, a portion of the first electrode sheet 11a forms the first electrode fusion layers 14a and 14b. Further, the second electrode sheet 216 is softened and fused to the uneven surface of the second insulating layer 213b. That is, a portion of the second electrode sheet 216 forms the second electrode fusion layer 217. In this way, the electrostatic sheet 210 of the second example transducer 200 is manufactured.

According to the second example of transducer 200, heater 12 is sandwiched between first electrode sheet 11a and second electrode sheet 216. Therefore, the thickness of the electrostatic sheet 210 can be reduced. Therefore, a small electrostatic sheet 210 can be manufactured.

(5-3. Third example transducer 300)
The configuration of a third example of transducer 300 will be described with reference to FIG. 12. The transducer 300 includes an electrostatic sheet 310 having a heater function. The electrostatic sheet 310 is generally flexible. The electrostatic sheet 310 has a configuration using any one of the electrostatic sheets 10a, 10b of the first to fourth examples. In this example, parts having the same configuration as those of the electrostatic sheets 10a and 10b are given the same reference numerals and detailed explanations are omitted.

The electrostatic sheet 310 includes at least the heater 12, the first electrode sheet 11a, the second electrode sheet 316, the front side insulating layers 13a and 13b, the interelectrode insulating layer 317, and the front side fusion layers 14a and 14b. The first electrode sheet 11a has the same configuration as the electrode sheet 11a in any one of the electrostatic sheets 10a, 10b of the first to fourth examples. The first electrode sheet 116 is arranged on the surface layer side.

The heater 12 is arranged on the surface layer side. The heater 12 corresponds to a portion of the electrostatic sheet 10a, 10b of any one of the first to fourth examples that functions as the heater 12.

The first electrode sheet 11a is arranged to face the back surface of the heater 12. The first electrode sheet 11a corresponds to a portion of the electrostatic sheet 10a, 10b of any one of the first to fourth examples that functions as the electrode sheet 11a. The second electrode sheet 316 is arranged opposite to the back surface of the first electrode sheet 11a. The second electrode sheet 316 has the same configuration as the first electrode sheet 11a.

The front side insulating layers 13a and 13b are formed in a sheet shape and are sandwiched between the heater 12 and the first electrode sheet 11a. The front side insulating layers 13a, 13b correspond to the portions of the electrostatic sheets 10a, 10b of any one of the first to fourth examples that function as the insulating layers 13a, 13b.

The interelectrode insulating layer 317 is formed in a sheet shape and is sandwiched between the first electrode sheet 11a and the second electrode sheet 316. The interelectrode insulating layer 317 is made of an elastically deformable material. The interelectrode insulating layer 317 is made of, for example, a thermoplastic material, particularly a thermoplastic elastomer. Further, the interelectrode insulating layer 317 can also be made of a non-thermoplastic elastomer foam material, nonwoven fabric, or the like. The interelectrode insulating layer 317 functions as a dielectric layer in the electrostatic sheet.

Here, the front side insulating layers 13a, 13b and the interelectrode insulating layer 317 are formed of different materials. Specifically, the front side insulating layers 13a and 13b are formed of a material having higher thermal conductivity than the interelectrode insulating layer 317. Since the portion from the heater 12 to the surface layer is formed of a material with high thermal conductivity, the surface layer of the electrostatic sheet 310 can effectively exhibit a heater function. On the other hand, the interelectrode insulating layer 317 does not need to be made of a material with high thermal conductivity. By forming the interelectrode insulating layer 317 using a material that effectively functions as a dielectric, the detection performance or drive performance of the electrostatic sheet 310 can be improved.

A method of manufacturing a third example of transducer 300 will be described. The first electrode sheet 11a, the interelectrode insulating layer 317, and the second electrode sheet 316 are integrally formed in a laminated state in advance (preparation step). Furthermore, the heater 12 and the front side insulating layers 13a and 13b are integrally formed in advance (preparation step). Then, a laminate is prepared in which the members formed integrally are laminated (preparation step).

Subsequently, the laminate is heated and pressurized (heating and pressing step). Then, the first electrode sheet 11a is softened and fused to the uneven surfaces of the front side insulating layers 13a and 13b. In other words, a portion of the first electrode sheet 11a forms the front side fusion layers 14a and 14b. In this way, the electrostatic sheet 310 of the third example transducer 300 is manufactured.

(5-4. Fourth example transducer 400)
(5-4-1. Configuration of transducer 400 of fourth example)
The configuration of a fourth example of transducer 400 will be described with reference to FIG. 13. Transducer 400 includes a base material 430 and an electrostatic sheet 410 attached to the mounting surface of base material 430.

The electrostatic sheet 410 has a heater function. The electrostatic sheet 410 is generally flexible. The electrostatic sheet 410 has a configuration using the electrostatic sheet 10c of the fifth example. In this example, parts having the same configuration as the electrostatic sheet 10c of the fifth example are given the same reference numerals and detailed explanations are omitted.

The electrostatic sheet 410 includes at least a first electrode sheet 416, a second electrode sheet 11c, a heater 12, an interelectrode insulating layer 417, a back side insulating layer 13c, an interelectrode first fusion layer 418, and an interelectrode second fusion bond. It includes a layer 419, a back side fusion layer 14c, and a heater fusion layer 15c. In this example, the electrostatic sheet 410 further includes a surface protection layer 420, a protective adhesive layer 421, and a base adhesive layer 422. However, the electrostatic sheet 410 can also be configured without the surface protection layer 420, the protective adhesive layer 421, and the base adhesive layer 422.

The first electrode sheet 416 has the same configuration as the electrode sheet 11c in the electrostatic sheet 10c of the fifth example. The first electrode sheet 416 is arranged on the surface layer side. The second electrode sheet 11c corresponds to the portion functioning as the electrode sheet 11c in the electrostatic sheet 10c of the fifth example. The second electrode sheet 11c is arranged opposite to the back surface of the first electrode sheet 416. The heater 12 corresponds to a portion that functions as the heater 12 in the electrostatic sheet 10c of the fifth example. The heater 12 is arranged to face the back surface of the second electrode sheet 11c.

The interelectrode insulating layer 417 is formed in a sheet shape and is sandwiched between the first electrode sheet 416 and the second electrode sheet 11c. The interelectrode insulating layer 417 is made of an elastically deformable material. The interelectrode insulating layer 417 is made of, for example, a thermoplastic material, particularly a thermoplastic elastomer. Further, the interelectrode insulating layer 417 can also be made of a non-thermoplastic elastomer foam material, nonwoven fabric, or the like. Interelectrode insulating layer 417 functions as a dielectric layer in the electrostatic sheet.

The back side insulating layer 13c is formed in a sheet shape and is sandwiched between the second electrode sheet 11c and the heater 12. The back side insulating layer 13c corresponds to a portion functioning as the insulating layer 13c in the electrostatic sheet 10c of the fifth example. The back side insulating layer 13c is made of the same material as the interelectrode insulating layer 417. By forming both from the same type of material, cost reduction can be achieved.

The interelectrode first fusion layer 418 is formed of a fusion material. That is, the interelectrode first fusion layer 418 exhibits bonding strength by being subjected to heat treatment. For example, the interelectrode first fusion layer 418 exhibits bonding force by being heated and pressurized. The inter-electrode first fusion layer 418 bonds the first electrode sheet 416 and the inter-electrode insulating layer 417. The inter-electrode first fusion layer 418 may be configured as a part of the inter-electrode insulating layer 417, or may be bonded to the inter-electrode insulating layer 417 as a separate member.

For example, the inter-electrode first fusion layer 418 is made of a thermoplastic material that is a fusion material, and is configured as a part of the inter-electrode insulating layer 417. In this case, the inter-electrode first fusion layer 418 as a part of the inter-electrode insulating layer 417 joins the first electrode sheet 416 and the inter-electrode insulating layer 417 by fusion (thermal fusion).

The interelectrode second fusion layer 419 is formed of a fusion material. The second inter-electrode fusion layer 419 is similar to the first inter-electrode fusion layer 418. The inter-electrode second fusion layer 419 joins the inter-electrode insulating layer 417 and the second electrode sheet 11c. The inter-electrode second fusion layer 419 may be configured as a part of the inter-electrode insulating layer 417, or may be bonded to the inter-electrode insulating layer 417 as a separate member.

For example, the inter-electrode second fusion layer 419 is made of a thermoplastic material that is a fusion material, and is configured as a part of the inter-electrode insulating layer 417. In this case, the inter-electrode second fusion layer 419 as a part of the inter-electrode insulating layer 417 joins the inter-electrode insulating layer 417 and the second electrode sheet 11c by fusion (thermal fusion).

The back side fusion layer 14c is formed of a fusion material. The back side fusion layer 14c joins the second electrode sheet 11c and the back side insulating layer 13c, and corresponds to a portion functioning as the electrode fusion layer 14c in the electrostatic sheet 10c of the fifth example.

The heater fusing layer 15c is made of a fusing material. The heater fusing layer 15c joins the back side insulating layer 13c and the heater 12, and corresponds to a portion functioning as the heater fusing layer 15c in the electrostatic sheet 10c of the fifth example. In particular, the heater 12 is bonded to the back side of the second electrode sheet 11c by the heater fusion layer 15c while being embedded in the back side insulating layer 13c.

The surface protection layer 420 is formed into a sheet shape and covers the surface side of the first electrode sheet 416. The surface protection layer 420 may be formed from a thermoplastic material, in particular a thermoplastic elastomer. The surface protection layer 420 may be formed from a part of the material of the interelectrode insulating layer 417, or may be formed as a separate member from the interelectrode insulating layer 417. Furthermore, instead of the thermoplastic material, the surface protection layer 420 may be made of a resin insulating sheet having an adhesive layer or an adhesive layer.

The protective fusing layer 421 is formed of a fusing material. The protective adhesion layer 421 joins the first electrode sheet 416 and the surface protection layer 420. The protective adhesion layer 421 may be configured as a part of the surface protection layer 420 or may be bonded to the surface protection layer 420 as a separate member. Further, the protective fusion layer 421 may be formed of a portion of the material of the interelectrode insulating layer 417. However, if the surface protection layer 420 is an insulating sheet, the protective adhesion layer 421 is not necessary.

The base material fusion layer 422 is formed of a fusion material and joins the back side insulating layer 13c and the mounting surface of the base material 430. The base material fusion layer 422 may be configured as a part of the back side insulating layer 13c, or may be bonded to the back side insulating layer 13c as a separate member.

(5-4-2. Manufacturing method of transducer 400 of fourth example)
A method of manufacturing the electrostatic sheet 410 constituting the transducer 400 of the fourth example will be described with reference to FIG. 14. Here, it is assumed that the material 417a of the interelectrode insulating layer 417 and the materials 13c1 and 13c2 of the back side insulating layer 13c are made of thermoplastic material.

The first electrode sheet 416, the material 417a of the interelectrode insulating layer 417, the second electrode sheet 11c, the first material 13c1 of the back side insulating layer 13c, the heater 12, and the second material 13c2 of the back side insulating layer 13c were laminated in this order. Prepare a laminate (preparation step). Subsequently, the laminate is heated and pressurized (heating and pressing step).

Then, the material 417a of the interelectrode insulating layer 417 softens and functions as a fusion material, and is bonded to the first electrode sheet 416. The portion fused to the first electrode sheet 416 becomes an inter-electrode first fused layer 418. Furthermore, the material 417a of the interelectrode insulating layer 417 passes through the through-hole of the first electrode sheet 416 and moves to the surface layer side of the first electrode sheet 416. In this way, the surface protection layer 420 is formed from the material 417a of the interelectrode insulating layer 417. Then, the portion fused to the surface protection layer 420 and the first electrode sheet 416 becomes the protective fusion layer 421.

Furthermore, the material 417a of the interelectrode insulating layer 417 is softened and functions as a fusion material, and is bonded to the second electrode sheet 11c. The portion fused to the second electrode sheet 11c becomes the interelectrode second fused layer 419. Furthermore, the material 417a of the interelectrode insulating layer 417 passes through the through-hole of the second electrode sheet 11c and moves to the back side of the second electrode sheet 11c. Then, the material 417a that has moved to the back side of the second electrode sheet 11c is joined to the first material 13c1 of the back side insulating layer 13c. Further, the first material 13c1 of the back side insulating layer 13c is softened and functions as a fusion material, and is bonded to the back side of the second electrode sheet 11c. That is, a part of the material 417a of the interelectrode insulating layer 417 and a part of the first material 13c1 of the back side insulating layer 13c become the back side fusion layer 14c.

In addition, the first material 13c1 and the second material 13c2 of the back side insulating layer 13c are softened, function as a fusion material, and are bonded to the heater 12. The portion fused to the heater 12 becomes the heater fused layer 15c. Then, the first material 13c1 and the second material 13c2 of the back side insulating layer 13c are integrated to form the back side insulating layer 13c. Furthermore, the heater 12 is embedded in the back side insulating layer 13c. In this way, electrostatic sheet 410 of transducer 400 is manufactured.

Further, when attaching the electrostatic sheet 410 to the base material 430, the base material fusing layer 422 can be formed by heating the back side insulating layer 13c and applying pressure to the base material 430. In this way, transducer 400 is manufactured.

By the way, in the above manufacturing method, the surface protection layer 420 is formed of the material 417a of the interelectrode insulating layer 417, but an insulating sheet made of a resin different from the material 417a of the interelectrode insulating layer 417 may be used. You can also do it.

In addition to the above manufacturing method, the following method can also be used. A first laminate in which the first electrode sheet 416, the material 417a of the interelectrode insulating layer 417, and the second electrode sheet 11c are laminated in this order is prepared (first laminate preparation step), and the first laminate is heated and heated. By pressing, a first molded body is molded (first molded body forming step). Then, a second laminate is prepared in which the first material 13c1 of the back side insulating layer 13c, the heater 12, and the second material 13c2 of the back side insulating layer 13c are laminated in this order (second laminate preparation step). A second molded body is formed by heating and pressurizing the laminate (second molded body forming step).

Then, a final laminate in which the first molded body and the second molded body are laminated is prepared (final laminate preparation step), and the electrostatic sheet 410 is manufactured by heating and pressurizing the final laminate ( final heating and pressing process).

(5-4-3. Effect)
According to the transducer 400 of the fourth example, the first electrode sheet 416, the second electrode sheet 11c, and the interelectrode insulating layer 417 are located closer to the surface than the heater 12. In other words, the heater 12 is not located between the first electrode sheet 416 and the second electrode sheet 11c and closer to the surface than the first electrode sheet 416. As a result, it is possible to suppress the influence of the heater 12 on the detection performance or drive performance, so that high detection performance or drive performance can be exhibited. Even if the heater 12 is located on the back side of the second electrode sheet 11c, it can sufficiently function as a heater by making the interelectrode insulating layer 417 and the back side insulating layer 13c of materials with good thermal conductivity. can do.

(5-5. Fifth example transducer 500)
(5-5-1. Configuration of transducer 500 of fifth example)
The configuration of a fifth example of transducer 500 will be described with reference to FIG. 15. Transducer 500 includes a base material 530 and an electrostatic sheet 510 attached to the mounting surface of base material 530.

The electrostatic sheet 510 has a heater function. The electrostatic sheet 510 is generally flexible. The electrostatic sheet 510 has a configuration using the electrostatic sheet 10c of the fifth example. Therefore, in this example, parts having the same configuration as the electrostatic sheet 10c of the fifth example are given the same reference numerals and detailed explanations are omitted.

The electrostatic sheet 510 includes at least the first electrode sheet 11c, the heater 12, the second electrode sheet 516, the first insulating layer 513a, the second insulating layer 513b, the first electrode fusing layer 14c, and the first heater fusing layer 515a. , a second heater fusing layer 515b, and a second electrode fusing layer 517. In this example, the electrostatic sheet 510 further includes a surface protection layer 518, a protective adhesive layer 519, and a base adhesive layer 520. However, the electrostatic sheet 510 can also be configured without the surface protection layer 518, the protective adhesive layer 519, and the base adhesive layer 520.

The first electrode sheet 11c is arranged on the surface layer side. The first electrode sheet 11c corresponds to the portion functioning as the electrode sheet 11c in the electrostatic sheet 10c of the fifth example. The heater 12 is arranged opposite to the back surface of the first electrode sheet 11c. The heater 12 corresponds to a portion that functions as the heater 12 in the electrostatic sheet 10c of the fifth example.

The second electrode sheet 516 has the same configuration as the first electrode sheet 11c. The second electrode sheet 516 is arranged facing the back side of the heater 12. That is, the heater 12 is interposed between the first electrode sheet 11c and the second electrode sheet 516.

The first insulating layer 513a is formed in a sheet shape and is sandwiched between the first electrode sheet 11c and the heater 12. The first insulating layer 513a functions as a part of the insulating layer 13c in the electrostatic sheet 10c of the fifth example. The second insulating layer 513b is formed into a sheet shape and is sandwiched between the heater 12 and the second electrode sheet 516. The second insulating layer 513b functions as another part of the insulating layer 13c in the electrostatic sheet 10c of the fifth example. That is, the first insulating layer 513a and the second insulating layer 513b are formed of the same kind of material.

The first electrode fusion layer 14c is made of a fusion material. The first electrode fusion layer 14c joins the first electrode sheet 11c and the first insulating layer 513a. The first electrode fusion layer 14c may be configured as a part of the first insulating layer 513a, or may be bonded to the first insulating layer 513a as a separate member.

The first heater fusing layer 515a is formed of a fusing material. The first heater fusion layer 515a bonds the first insulating layer 513a and the heater 12. That is, the first heater fusion layer 515a is a part that is fused to the surface side of the heater 12. The first heater fusion layer 515a may be configured as a part of the first insulating layer 513a, or may be bonded to the first insulating layer 513a as a separate member.

The second heater fusion layer 515b is made of a fusion material. The second heater fusion layer 515b bonds the heater 12 and the second insulating layer 513b. That is, the second heater fusion layer 515b is a part that is fused to the back side of the heater 12. The second heater fusion layer 515b may be configured as a part of the second insulating layer 513b, or may be bonded to the second insulating layer 513b as a separate member.

The first heater fusion layer 515a and the second heater fusion layer 515b function as the heater fusion layer 15c in the electrostatic sheet 10c of the fifth example. The heater 12 is embedded in the first insulating layer 513a and the second insulating layer 513b between the first electrode sheet 11c and the second electrode sheet 516, and the heater 12 is embedded in the first heater fusion layer 515a and the second insulating layer 513b. They are bonded by a heater fusion layer 515b.

The second electrode fusion layer 517 is formed of a fusion material. The second electrode fusion layer 517 joins the second insulating layer 513b and the second electrode sheet 516. The second electrode fusion layer 517 may be configured as a part of the second insulating layer 513b, or may be bonded to the second insulating layer 513b as a separate member.

The surface protection layer 518 is formed in a sheet shape and covers the front surface side of the first electrode sheet 11c. The surface protective layer 518 may be formed from a thermoplastic material, in particular a thermoplastic elastomer. The surface protection layer 518 may be formed from a part of the material of the first insulating layer 513a, or may be formed as a separate member from the first insulating layer 513a. Furthermore, instead of the thermoplastic material, the surface protection layer 518 may be made of a resin insulating sheet having an adhesive layer or an adhesive layer.

The protective fusing layer 519 is configured similarly to the protective fusing layer 421 in the transducer 400 of the fourth example. The base material fusion layer 520 is formed of a fusion material and joins the second insulating layer 513b and the mounting surface of the base material 530. The base material fusion layer 520 may be configured as a part of the second insulating layer 513b, or may be bonded to the second insulating layer 513b as a separate member.

(5-5-2. Manufacturing method of transducer 500 of fifth example)
A method for manufacturing a fifth example of transducer 500 will be described with reference to FIG. 16. Here, it is assumed that the material 13c1 of the first insulating layer 513a and the material 13c2 of the second insulating layer 513b are made of thermoplastic material.

A laminate is prepared in which the first electrode sheet 11c, the material 13c1 of the first insulating layer 513a, the heater 12, the material 13c2 of the second insulating layer 513b, and the second electrode sheet 516 are laminated in this order (preparation step). Subsequently, the laminate is heated and pressurized (heating and pressing step).

Then, the material 13c1 of the first insulating layer 513a is softened, functions as a fusion material, and is bonded to the first electrode sheet 11c. The portion fused to the first electrode sheet 11c becomes the first electrode fusion layer 14c. Furthermore, the material 13c1 of the first insulating layer 513a passes through the through holes of the first electrode sheet 11c to form a surface protection layer 518 and a protective fusion layer 519. In this respect, it is similar to the surface protective layer 420 and protective adhesive layer 421 in the transducer 400 of the fourth example.

Furthermore, the material 13c1 of the first insulating layer 513a and the material 13c2 of the second insulating layer 513b are softened, function as a fusion material, and are bonded to the heater 12. The parts fused to the heater 12 become the first heater fusion layer 515a and the second heater fusion layer 515b. Then, the material 13c1 of the first insulating layer 513a and the material 13c2 of the second insulating layer 513b are integrated to form the insulating layer 13c. Furthermore, the heater 12 is embedded in the insulating layer 13c.

Furthermore, the material 13c2 of the second insulating layer 513b is softened, functions as a fusion material, and is bonded to the second electrode sheet 516. The portion fused to the second electrode sheet 516 becomes the second electrode fusion layer 517. Furthermore, the material 13c2 of the second insulating layer 513b passes through the through-hole of the second electrode sheet 516 and moves to the back side of the second electrode sheet 516. Then, the material 13c2 that has moved to the back side of the second electrode sheet 516 is joined to the back side of the second electrode sheet 516. In other words, the material 13c2 of the second insulating layer 513b becomes the base material fusion layer 520. In this way, electrostatic sheet 510 of transducer 500 is manufactured.

Here, the base material fusion layer 520 is formed by heating the base material fusion layer 520 and applying pressure to the base material 530 when attaching the electrostatic sheet 510 to the base material 530. 520 is fused to the base material 530. In this way, transducer 500 is manufactured.

In addition to the above manufacturing method, the following method can also be used. By preparing a first laminate in which the first insulating layer 513a, the heater 12, and the second insulating layer 513b are stacked in this order (first laminate preparation step), and heating and pressurizing the first laminate, A first molded body is molded (first molded body molding step).

Next, a second laminate in which the first electrode sheet 11c, the first molded body, and the second electrode sheet 516 are laminated in this order is prepared (second laminate preparation step), and the second laminate is heated and heated. By pressing, the electrostatic sheet 510 of the transducer 500 is manufactured (heating and pressing process).

(5-5-3. Effect)
According to the transducer 500 of the fifth example, the heater 12 is sandwiched between the first electrode sheet 11c and the second electrode sheet 516. Therefore, the thickness of the electrostatic sheet 510 can be reduced. Therefore, a small electrostatic sheet 510 can be manufactured.

(5-6. Sixth example transducer 600)
(5-6-1. Configuration of transducer 600 of sixth example)
The configuration of a sixth example of transducer 600 will be described with reference to FIG. 17. Transducer 600 includes a base material 630 and an electrostatic sheet 610 attached to the mounting surface of base material 630.

In the electrostatic sheet 410 of the transducer 400 of the fourth example, the heater 12 is arranged on the back side of the second electrode sheet 11c, whereas in the electrostatic sheet 610 of this example, the heater 12 is arranged on the back side of the first electrode sheet 11c. The two differ in that they are placed on the surface side.

The electrostatic sheet 610 of this example has a heater function and is flexible as a whole. Further, the electrostatic sheet 610 has a configuration using the electrostatic sheet 10c of the fifth example. In this example, parts having the same configuration as the electrostatic sheet 10c of the fifth example are given the same reference numerals and detailed explanations are omitted.

The electrostatic sheet 610 includes at least the heater 12, the first electrode sheet 11c, the second electrode sheet 616, the front side insulating layer 13c, the interelectrode insulating layer 617, the heater fusion layer 15c, the front side fusion layer 14c, and between the electrodes. A first fusion layer 618 and an interelectrode second fusion layer 619 are provided. In this example, the electrostatic sheet 610 further includes a base material fusing layer 620.

The heater 12 is arranged on the surface layer side. The heater 12 corresponds to a portion that functions as the heater 12 in the electrostatic sheet 10c of the fifth example.

The first electrode sheet 11c is arranged to face the back surface of the heater 12. The first electrode sheet 11c corresponds to the portion functioning as the electrode sheet 11c in the electrostatic sheet 10c of the fifth example. The second electrode sheet 616 is arranged opposite to the back surface of the first electrode sheet 11c. The second electrode sheet 616 has the same configuration as the first electrode sheet 11c.

The front side insulating layer 13c is formed in a sheet shape and is sandwiched between the heater 12 and the first electrode sheet 11c. The front side insulating layer 13c corresponds to a portion functioning as the insulating layer 13c in the electrostatic sheet 10c of the fifth example.

The interelectrode insulating layer 617 is formed in a sheet shape and is sandwiched between the first electrode sheet 11c and the second electrode sheet 616. The interelectrode insulating layer 617 is made of an elastically deformable material. The interelectrode insulating layer 617 is made of, for example, a thermoplastic material, particularly a thermoplastic elastomer. Further, the interelectrode insulating layer 617 can also be made of a non-thermoplastic elastomer foam material, nonwoven fabric, or the like. Interelectrode insulating layer 617 functions as a dielectric layer in the electrostatic sheet.

Here, the front side insulating layer 13c and the interelectrode insulating layer 617 are formed of different materials. Specifically, the front side insulating layer 13c is formed of a material having higher thermal conductivity than the interelectrode insulating layer 617. Since the portion from the heater 12 to the surface layer is formed of a material with high thermal conductivity, the surface layer of the electrostatic sheet 610 can effectively exhibit a heater function. On the other hand, the interelectrode insulating layer 617 does not need to be made of a material with high thermal conductivity. By forming the interelectrode insulating layer 617 using a material that effectively functions as a dielectric, the detection performance or driving performance of the electrostatic sheet 610 can be improved.

The heater fusion layer 15c is made of a fusion material and joins the heater 12 and the front side insulating layer 13c. The heater fusing layer 15c corresponds to a portion of the electrostatic sheet 10c of the fifth example that functions as the heater fusing layer 15c. In particular, the heater 12 is embedded in the front-side insulating layer 13c on the front side of the first electrode sheet 11c and is bonded to the heater fusion layer 15c.

The front side fusion layer 14c is formed of a fusion material and joins the front side insulating layer 13c and the first electrode sheet 11c. The front-side fusion layer 14c corresponds to a portion functioning as the electrode fusion layer 14c in the electrostatic sheet 10c of the fifth example.

The inter-electrode first fusion layer 618 is formed of a fusion material and joins the first electrode sheet 11c and the inter-electrode insulating layer 617. The inter-electrode first fusion layer 618 may be configured as a part of the inter-electrode insulating layer 617, or may be bonded to the inter-electrode insulating layer 617 as a separate member. The inter-electrode first fusion layer 618 corresponds to the inter-electrode first fusion layer 418 in the transducer 400 of the fourth example.

The inter-electrode second fusion layer 619 is formed of a fusion material and joins the inter-electrode insulating layer 617 and the second electrode sheet 616. The inter-electrode second fusion layer 619 may be configured as a part of the inter-electrode insulating layer 617, or may be bonded to the inter-electrode insulating layer 617 as a separate member. The inter-electrode second fusion layer 619 corresponds to the inter-electrode second fusion layer 419 in the transducer 400 of the fourth example.

The base material fusion layer 620 is formed of a fusion material and joins the interelectrode insulating layer 617 and the mounting surface of the base material 630. The base material fusion layer 620 may be configured as a part of the interelectrode insulating layer 617, or may be bonded to the interelectrode insulating layer 617 as a separate member.

(5-6-2. Manufacturing method of transducer 600 of sixth example)
A method of manufacturing a sixth example of transducer 600 will be described with reference to FIG. 18. Here, it is assumed that the materials 13c1 and 13c2 of the front side insulating layer 13c and the material 617a of the interelectrode insulating layer 617 are made of a thermoplastic material.

The first material 13c1 of the front side insulating layer 13c, the heater 12, the second material 13c2 of the front side insulating layer 13c, the first electrode sheet 11c, the material 617a of the interelectrode insulating layer 617, and the second electrode sheet 616 were laminated in this order. Prepare a laminate (preparation step). Subsequently, the laminate is heated and pressurized (heating and pressing step).

Then, the first material 13c1 and the second material 13c2 of the front side insulating layer 13c are softened, function as a fusion material, and are bonded to the heater 12. The portion fused to the heater 12 becomes the heater fused layer 15c. Then, the first material 13c1 and the second material 13c2 of the surface-side insulating layer 13c are integrated to form the surface-side insulating layer 13c. Furthermore, the heater 12 is embedded in the front side insulating layer 13c.

The material 617a of the interelectrode insulating layer 617 is softened and functions as a fusion material, and is bonded to the first electrode sheet 11c. The portion fused to the first electrode sheet 11c becomes an inter-electrode first fused layer 618. Furthermore, the material 617a of the interelectrode insulating layer 617 passes through the through-hole of the first electrode sheet 11c and moves to the surface layer side of the first electrode sheet 11c. Then, the material 617a that has moved to the front side of the first electrode sheet 11c is joined to the second material 13c2 of the front side insulating layer 13c. Further, the second material 13c2 of the front side insulating layer 13c is softened and functions as a fusion material, and is bonded to the front side of the first electrode sheet 11c. That is, a part of the material 617a of the interelectrode insulating layer 617 and a part of the second material 13c2 of the front-side insulating layer 13c become the front-side fusion layer 14c.

Furthermore, the material 617a of the interelectrode insulating layer 617 is softened and functions as a fusion material, and is bonded to the second electrode sheet 616. The portion fused to the second electrode sheet 616 becomes an inter-electrode second fused layer 619. Furthermore, the material 617a of the interelectrode insulating layer 617 passes through the through-hole of the second electrode sheet 616 and moves to the back side of the second electrode sheet 616. Then, the material 617a that has moved to the back side of the second electrode sheet 616 is joined to the back side of the second electrode sheet 616. In other words, the material 617a of the interelectrode insulating layer 617 becomes the base material fusion layer 620. In this way, electrostatic sheet 610 of transducer 600 is manufactured.

Here, the base material fusion layer 620 is formed by heating the base material fusion layer 620 and applying pressure to the base material 630 when attaching the electrostatic sheet 610 to the base material 630. 620 is fused to the base material 630. In this way, transducer 600 is manufactured.

In addition to the above manufacturing method, the following method can also be used. A first laminate in which the first electrode sheet 11c, the material 617a of the interelectrode insulating layer 617, and the second electrode sheet 616 are laminated in this order is prepared (first laminate preparation step), and the first laminate is heated and heated. By pressing, a first molded body is molded (first molded body forming step). Then, a second laminate is prepared in which the first material 13c1 of the front side insulating layer 13c, the heater 12, and the second material 13c2 of the front side insulating layer 13c are laminated in this order (second laminate preparation step). A second molded body is formed by heating and pressurizing the laminate (second molded body forming step).

Then, a final laminate in which the first molded body and the second molded body are laminated is prepared (final laminate preparation step), and the electrostatic sheet 610 is manufactured by heating and pressurizing the final laminate ( final heating and pressing process).

(5-6-3. Effect)
According to the transducer 600 of the sixth example, the heater 12 is arranged on the surface layer. Therefore, the transducer 600 can have a high heating function. In particular, by using different materials for the front side insulating layer 13c and the interelectrode insulating layer 617, it is possible to achieve both high heater function and high detection performance or drive performance.

(Basic configuration of transducer 1)
1: Transducer, 10: Electrostatic sheet, 11: Electrode sheet, 12: Heater, 13: Insulating layer, 14: Electrode fusion layer (electrostatic sheet 10a of the first to third examples)
1: transducer, 10a: electrostatic sheet, 11a: electrode sheet, 12: heater, 13a: insulating layer, 14a: electrode fusion layer (electrostatic sheet 10b of fourth example)
1: transducer, 10b: electrostatic sheet, 11a: electrode sheet, 12: heater, 13b: insulating layer, 14b: electrode fusion layer (electrostatic sheet 10c of fifth example)
1: Transducer, 10c: Electrostatic sheet, 11c: Electrode sheet, 12: Heater, 13c: Insulating layer, 13c1: First material, 13c2: Second material, 14c: Electrode fusing layer, 15c: Heater fusing layer ( First example transducer 100)
100: Transducer, 110: Electrostatic sheet, 116: First electrode sheet, 11a: Second electrode sheet, 12: Heater, 117: Interelectrode insulating layer, 13a, 13b: Back side insulating layer, 14a, 14b: Back side Fusion layer (second example transducer 200)
200: Transducer, 210: Electrostatic sheet, 11a: First electrode sheet, 12: Heater, 216: Second electrode sheet, 213a: First insulating layer, 213b: Second insulating layer, 14a, 14b: First electrode fusion Adhering layer, 217: second electrode fusion layer (transducer 300 of third example)
300: Transducer, 310: Electrostatic sheet, 12: Heater, 11a: First electrode sheet, 316: Second electrode sheet, 13a, 13b: Front side insulating layer, 317: Interelectrode insulating layer, 14a, 14b: Front side Fusion layer (transducer 400 of fourth example)
400: Transducer, 410: Electrostatic sheet, 416: First electrode sheet, 11c: Second electrode sheet, 12: Heater, 417: Interelectrode insulating layer, 13c: Back side insulating layer, 418: First fusion between electrodes Layer, 419: second fusion layer between electrodes, 14c: back side fusion layer, 15c: heater fusion layer, 430: base material (transducer 500 of fifth example)
500: Transducer, 510: Electrostatic sheet, 11c: First electrode sheet, 12: Heater, 516: Second electrode sheet, 513a: First insulating layer, 513b: Second insulating layer, 14c: First electrode fusion layer , 515a: first heater fusion layer, 515b: second heater fusion layer, 517: second electrode fusion layer, 530: base material (transducer 600 of the sixth example)
600: Transducer, 610: Electrostatic sheet, 12: Heater, 11c: First electrode sheet, 616: Second electrode sheet, 13c: Front side insulating layer, 617: Interelectrode insulating layer, 15c: Heater fusion layer, 14c : Surface side fusion layer, 618: First fusion layer between electrodes, 619: Second fusion layer between electrodes, 630: Base material

Claims (23)

An electrostatic transducer formed in a sheet shape and having a flexible heater function,
An electrode sheet formed into a sheet shape and containing a thermoplastic material and a conductive filler ;
a heater formed into a sheet shape of heater wires and disposed opposite to the electrode sheet;
It is formed into a sheet shape, is made of a thermoplastic material having a higher softening point than the thermoplastic material of the electrode sheet, and has the heater wires constituting the heater embedded therein, and one surface is made of a thermoplastic material having a higher softening point than the thermoplastic material of the electrode sheet. an insulating layer joined to the electrode sheet by fusion ;
An electrostatic transducer with a heater function. The one surface of the insulating layer has unevenness,
The electrostatic transducer having a heater function according to claim 1 , wherein the electrode sheet is joined to the uneven surface of the insulating layer by fusing a thermoplastic material of the electrode sheet while entering a recess in the insulating layer. . An electrostatic transducer formed in a sheet shape and having a flexible heater function,
An electrode sheet formed into a sheet shape and containing a thermoplastic material and a conductive filler ;
a heater formed into a sheet shape of heater wires and disposed opposite to the electrode sheet;
an insulating layer formed in a sheet shape, made of a non-thermoplastic material, in which the heater wires constituting the heater are embedded, and one surface of which is joined to the electrode sheet by fusion of the thermoplastic material of the electrode sheet; and,
An electrostatic transducer with a heater function. The one surface of the insulating layer has unevenness,
4. The electrostatic transducer having a heater function according to claim 3 , wherein the electrode sheet is joined to the uneven surface of the insulating layer by fusing a thermoplastic material of the electrode sheet while entering a recess in the insulating layer. . The insulating layer is formed of a non-thermoplastic foam material, and has irregularities formed by air bubbles on the surface ,
The electrode sheet has a heater function according to claim 4, wherein the electrode sheet is joined to the uneven surface of the insulating layer by fusing the thermoplastic material of the electrode sheet while entering the recess on the surface of the insulating layer . Electrostatic transducer. An electrostatic transducer formed in a sheet shape and having a flexible heater function,
An electrode sheet formed into a sheet shape and containing a thermoplastic material and a conductive filler ;
a heater formed into a sheet shape of heater wires and disposed opposite to the electrode sheet;
It is formed into a sheet shape, is made of a non-woven fabric or a woven fabric of a non-thermoplastic material, has the heater wire constituting the heater embedded therein, and has one surface joined to the electrode sheet by fusing the thermoplastic material of the electrode sheet. an insulating layer,
An electrostatic transducer with a heater function. The insulating layer is formed of a non-woven fabric or a woven fabric of a non-thermoplastic material, and has irregularities formed by fibers and spaces between the fibers ,
7. The electrode sheet is joined to the uneven surface of the insulating layer by fusion of the thermoplastic material of the electrode sheet while entering a recess which is a space between fibers of the insulating layer. Electrostatic transducer with heater function. An electrostatic transducer formed in a sheet shape and having a flexible heater function,
An electrode sheet formed into a sheet shape of conductive cloth ,
a heater formed into a sheet shape of heater wires and disposed opposite to the electrode sheet;
an insulating layer formed in a sheet shape, made of a thermoplastic material, embedding the heater wire constituting the heater, and having one surface joined to the electrode sheet by its own fusion;
An electrostatic transducer with a heater function. 9. The electrostatic transducer having a heater function according to claim 8 , wherein the insulating layer is bonded to the heater wire constituting the heater by fusing itself. moreover,
a surface-side electrode sheet formed in a sheet shape, containing a thermoplastic material and a conductive filler, and having the electrode sheet facing each other on the back side;
It is formed in a sheet shape and is made of a thermoplastic material of the surface-side electrode sheet and a thermoplastic material having a higher softening point than the thermoplastic material of the electrode sheet, and the back surface of the surface-side electrode sheet and the surface of the electrode sheet sandwiched between, the front surface is joined to the surface electrode sheet by fusion of the thermoplastic material of the surface electrode sheet, and the back surface is joined to the electrode sheet by fusion of the thermoplastic material of the electrode sheet. an interelectrode insulating layer;
Equipped with
The electrostatic transducer having a heater function according to claim 1 or 2 , wherein the heater is disposed opposite to the back side of the electrode sheet . moreover,
a surface-side electrode sheet formed in a sheet shape, containing a thermoplastic material and a conductive filler, and having the electrode sheet facing each other on the back side;
It is formed into a sheet shape, made of a non-thermoplastic material, and is sandwiched between the back surface of the surface-side electrode sheet and the surface of the electrode sheet , and the surface is formed by fusing the thermoplastic material of the surface-side electrode sheet . an interelectrode insulating layer that is joined to the front side electrode sheet and whose back side is joined to the electrode sheet by fusion of a thermoplastic material of the electrode sheet;
Equipped with
6. The electrostatic transducer having a heater function according to claim 3 , wherein the heater is disposed opposite to the back side of the electrode sheet . moreover,
a surface-side electrode sheet formed in a sheet shape, containing a thermoplastic material and a conductive filler, and having the electrode sheet facing each other on the back side;
It is formed into a sheet shape, made of a non-woven fabric or a woven fabric made of a non-thermoplastic material, and is sandwiched between the back surface of the surface - side electrode sheet and the surface of the electrode sheet , and the surface is made of a thermoplastic material of the surface-side electrode sheet. an interelectrode insulating layer that is joined to the front electrode sheet by fusion, and whose back surface is joined to the electrode sheet by fusion of a thermoplastic material of the electrode sheet;
Equipped with
The electrostatic transducer having a heater function according to claim 6 or 7 , wherein the heater is arranged opposite to the back side of the electrode sheet . moreover,
a surface-side electrode sheet formed in a sheet shape of conductive cloth, and the electrode sheet is disposed on the back side facing each other ;
It is formed into a sheet shape, is made of a thermoplastic material, is sandwiched between the back surface of the front electrode sheet and the front surface of the electrode sheet, the front surface is joined to the surface electrode sheet by its own fusion, and the back surface is an interelectrode insulating layer joined to the electrode sheet by its own fusion ;
Equipped with
The electrostatic transducer having a heater function according to claim 8 or 9 , wherein the heater is disposed facing the back side of the electrode sheet . 14. The electrostatic transducer having a heater function according to claim 10 , wherein the interelectrode insulating layer and the insulating layer are formed of the same kind of material. The electrode sheet is arranged on the surface layer side,
The heater is arranged opposite to the back surface of the electrode sheet ,
moreover,
a back-layer electrode sheet formed in a sheet shape, containing a thermoplastic material and a conductive filler, and disposed opposite to the back surface of the heater ;
The insulating layer is formed of a thermoplastic material having a higher softening point than the thermoplastic material of the back electrode sheet, and the other surface is formed on the back layer side by fusing the thermoplastic material of the back electrode sheet. An electrostatic transducer having a heater function according to claim 1 or 2 , which is bonded to an electrode sheet . The electrode sheet is arranged on the surface layer side,
The heater is arranged opposite to the back surface of the electrode sheet ,
moreover,
a back-layer electrode sheet formed in a sheet shape, containing a thermoplastic material and a conductive filler, and disposed opposite to the back surface of the heater ;
Any one of claims 3 to 5, wherein the insulating layer is formed of a non-thermoplastic material, and the other surface is joined to the back electrode sheet by fusing the thermoplastic material of the back electrode sheet. An electrostatic transducer having a heater function according to item 1 . The electrode sheet is arranged on the surface layer side,
The heater is arranged opposite to the back surface of the electrode sheet ,
moreover,
a back-layer electrode sheet formed in a sheet shape, containing a thermoplastic material and a conductive filler, and disposed opposite to the back surface of the heater ;
7. The insulating layer is formed of a non-woven fabric or a woven fabric made of a non-thermoplastic material, and the other surface is joined to the back electrode sheet by fusing the thermoplastic material of the back electrode sheet. 7. An electrostatic transducer having a heater function as described in 7 . The electrode sheet is arranged on the surface layer side,
The heater is arranged opposite to the back surface of the electrode sheet ,
moreover,
a back layer side electrode sheet formed in a sheet shape from conductive cloth and disposed opposite to the back surface of the heater ;
10. The electrostatic transducer having a heater function according to claim 8 , wherein the insulating layer is formed of a thermoplastic material, and the other surface is joined to the back electrode sheet by fusion. The heater is arranged on the surface layer side ,
The electrode sheet is arranged opposite to the back surface of the heater,
moreover,
a back-layer electrode sheet formed in a sheet shape, containing a thermoplastic material and a conductive filler, and disposed opposite to the back surface of the electrode sheet;
It is formed in a sheet shape and is made of a thermoplastic material having a higher softening point than the thermoplastic material of the electrode sheet and the thermoplastic material of the back electrode sheet, and the back surface of the electrode sheet and the back electrode sheet are The front side is joined to the electrode sheet by fusion of the thermoplastic material of the electrode sheet, and the back side is joined to the back side electrode sheet by fusion of the thermoplastic material of the back side electrode sheet. an interelectrode insulating layer bonded to the
An electrostatic transducer having a heater function according to claim 1 or 2 . The heater is arranged on the surface layer side ,
The electrode sheet is arranged opposite to the back surface of the heater,
moreover,
a back-layer electrode sheet formed in a sheet shape, containing a thermoplastic material and a conductive filler, and disposed opposite to the back surface of the electrode sheet;
It is formed into a sheet shape and made of a non-thermoplastic material, and is sandwiched between the back surface of the electrode sheet and the surface of the back layer side electrode sheet , and the surface is formed by fusing the thermoplastic material of the electrode sheet to form the electrode. an interelectrode insulating layer that is joined to the sheet and whose back surface is joined to the back electrode sheet by fusion of a thermoplastic material of the back electrode sheet;
An electrostatic transducer having a heater function according to any one of claims 3 to 5 . The heater is arranged on the surface layer side ,
The electrode sheet is arranged opposite to the back surface of the heater,
moreover,
a back-layer electrode sheet formed in a sheet shape, containing a thermoplastic material and a conductive filler, and disposed opposite to the back surface of the electrode sheet;
It is formed into a sheet shape, made of a non-woven fabric or a woven fabric made of a non-thermoplastic material, and is sandwiched between the back surface of the electrode sheet and the surface of the back electrode sheet , and the surface is made of a fused thermoplastic material of the electrode sheet. an interelectrode insulating layer that is joined to the electrode sheet by bonding, and whose back surface is joined to the back electrode sheet by fusing a thermoplastic material of the back electrode sheet;
An electrostatic transducer having a heater function according to claim 6 or 7 . The heater is arranged on the surface layer side ,
The electrode sheet is arranged opposite to the back surface of the heater,
moreover,
a back layer side electrode sheet formed into a sheet shape of conductive cloth and disposed opposite to the back surface of the electrode sheet;
The electrode sheet is formed into a sheet shape, is made of a thermoplastic material, is sandwiched between the back surface of the electrode sheet and the surface of the back side electrode sheet , and the surface is formed by fusing the thermoplastic material of the electrode sheet to form the electrode sheet. an interelectrode insulating layer, the back surface of which is joined to the back electrode sheet by fusion of the thermoplastic material of the back electrode sheet;
An electrostatic transducer having a heater function according to claim 8 or 9 . The insulating layer and the interelectrode insulating layer are formed of different materials,
23. The electrostatic transducer having a heater function according to claim 19 , wherein the insulating layer is formed of a material having higher thermal conductivity than the interelectrode insulating layer.

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