JP7366789B2 - Optical device, exposure device, and article manufacturing method - Google Patents

Description

The present invention relates to an optical device, an exposure device, and a method of manufacturing an article.

Conventionally, it has been known that in optical devices, when an optical element absorbs a portion of light and generates heat, the refractive index of the gas surrounding the optical element changes with temperature, which may change the optical performance. .
Additionally, there is a risk that the optical performance may change if the lens barrel in which the optical element is housed is deformed by the surrounding heat, or if the optical element vibrates due to vibrations that occur outside or inside the device. Are known.

Patent Document 1 discloses that by supplying temperature regulating gas into the lens barrel in which optical elements are housed and providing a rib structure on the wall surface of the lens barrel, changes in optical performance are suppressed and the rigidity of the lens barrel is increased. discloses an exposure apparatus.

Japanese Patent Application Publication No. 2015-95503

As disclosed in Patent Document 1, in order to suppress changes in optical performance and increase the rigidity of the lens barrel, if a temperature control gas flow path and a rib structure are provided in the lens barrel, the device becomes large. It turns into
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an optical device that is compact while suppressing changes in optical performance and increasing the rigidity of a lens barrel.

An optical device according to the present invention includes an optical element, an outer wall, an inner wall, and a rib provided between the outer wall and the inner wall and coupled to at least one of the outer wall and the inner wall, and a lens barrel that houses the optical element. In the lens barrel, a flow path for gas supplied from the gas supply means is defined between the outer wall and the inner wall, and an optical element storage space in which the optical element is stored is defined inside the inner wall, The gas passes through the flow path and the optical element storage space , and the rib is characterized in that an opening through which the gas passes is formed .

According to the present invention, it is possible to provide a compact optical device while suppressing changes in optical performance and increasing the rigidity of the lens barrel.

FIG. 1 is a schematic side view of an exposure apparatus including an optical device according to a first embodiment. FIG. 1 is a partial cross-sectional view of an exposure apparatus including an optical device according to a first embodiment, viewed from above. FIG. 7 is a partial cross-sectional view of an exposure apparatus including an optical device according to a second embodiment, viewed from above. FIG. 7 is a partially sectional view of an exposure apparatus including an optical device according to a third embodiment, viewed from above. FIG. 7 is a partial cross-sectional view of an exposure apparatus including an optical device according to a fourth embodiment, viewed from above.

The optical device according to the present embodiment will be described in detail below based on the accompanying drawings. Note that the drawings shown below are drawn on a different scale from the actual scale in order to facilitate understanding of the present embodiment.
Further, this embodiment is not limited to the following embodiments, and the following merely shows specific examples that are advantageous for implementing this embodiment.
Furthermore, not all combinations of features described in the following embodiments are essential for solving the problems of this embodiment.

Conventionally, changes in pattern images due to temperature changes have been known as one of the issues in achieving higher definition in exposure apparatuses. Specifically, when exposure processing is performed for a long time, the temperature of the optical element, the optical element holding member, and the surrounding space increases as the optical element absorbs a portion of the exposure light.
As the temperature rises, the refractive index of the surrounding gas changes, resulting in deformation of the pattern image formed on the substrate.

In order to suppress such deformation of the pattern image, it is required to make the heat generation of the optical element uniform and to suppress the temperature change of the surrounding gas.
Therefore, in exposure apparatuses, temperature changes in the optical element and the gas in the exposure optical path are suppressed by supplying temperature-controlled gas to the lens barrel in which the optical element is housed.

Furthermore, since the pattern image formed on the substrate is also deformed due to thermal deformation of the lens barrel itself, it is also required to suppress temperature changes in the lens barrel.
For this reason, in exposure apparatuses, a rib structure is provided on the wall surface of the lens barrel to increase the rigidity of the lens barrel.
In addition, by providing a heat insulating material between each rib structure provided on the wall surface of the lens barrel, it is possible to suppress the absorption of heat from the outside of the lens barrel, thereby suppressing thermal deformation of the lens barrel. It is being done.

Another known problem in increasing the definition of exposure apparatuses is that pattern images change due to the influence of vibrations occurring outside or inside the exposure apparatus.
Specifically, if the optical element vibrates due to vibrations generated outside or inside the exposure apparatus for some reason, the pattern image changes.
For this reason, in exposure apparatuses, rigidity has been increased by improving the method of fixing optical elements to the lens barrel, making the walls of the lens barrel thicker, or providing more ribs.

As described above, in order to increase the precision of exposure equipment, temperature adjustment is required in the lens barrel in which the optical elements are housed in order to suppress temperature changes in the optical elements in the lens barrel, the gas in the optical path space, and the lens barrel itself. It is currently being carried out to supply the same gas.
In addition, in order to suppress the influence of vibrations occurring outside or inside the exposure apparatus, efforts are being made to increase the rigidity of the lens barrel.

However, if the walls of the lens barrel are made thicker or the number of ribs is increased in order to increase the rigidity of the lens barrel, there will not be enough space in the lens barrel to install air supply ports and ducts for air conditioning, and the temperature control of the lens barrel will become difficult. It becomes difficult to achieve both rigidity and stiffness.
Therefore, in the optical device according to the present embodiment, by adopting the configuration shown below, the rigidity of the lens barrel is ensured, and the optical device in the lens barrel, the gas in the optical path space, and the temperature change of the lens barrel itself are Achieved miniaturization while suppressing This embodiment is particularly effective in an exposure apparatus in which the space between the projection optical system and the plate stage is narrow.

[First embodiment]
FIG. 1 shows a schematic side view of an exposure apparatus 100 including an optical device according to the first embodiment.
In the following description, the vertical direction perpendicular to the photosensitive surface of the glass plate 105 will be referred to as the Z direction, and the two directions perpendicular to each other within the photosensitive surface of the glass plate 105 will be referred to as the X direction and the Y direction, respectively.

The exposure apparatus 100 applies a pattern of an original (reticle or mask) to a photosensitive substrate (on which a resist layer is formed) through a projection optical system in a lithography process that is a manufacturing process of semiconductor devices, liquid crystal display devices, etc. This is a device that transfers images onto a wafer, glass plate, etc.).
In addition, there is a demand for finer line widths in semiconductor devices, liquid crystal display devices, etc., and the exposure equipment used to manufacture them also needs to have higher definition.

The exposure apparatus 100 includes an illumination optical system 101, a mask stage 103, optical elements 104a and 104b (a first optical element and a second optical element) as a projection optical system, and a plate stage 106.

In the exposure apparatus 100, a mask 102 held on a mask stage 103 is irradiated with exposure light from an illumination optical system 101 having a light source.
The exposure light that has passed through the mask 102 is reflected five times in total by an optical element 104b that is a trapezoidal mirror, an optical element 104a that is a concave mirror, a convex mirror (not shown), an optical element 104a, and an optical element 104b. reach the top.
In this way, the image of the pattern formed on the mask 102 is projected (transferred) onto the photosensitive material coated on the glass plate 105 held on the plate stage 106 via the optical elements 104a and 104b.
In the exposure apparatus 100, the mask stage 103 on which the mask 102 is placed and the plate stage 106 on which the glass plate 105 is placed are scanned in synchronization with each other along the Y direction.

As shown in FIG. 1, optical elements 104a and 104b as a projection optical system are housed in a lens barrel 107.
Note that the optical device according to this embodiment includes an optical element including optical elements 104a and 104b, and a lens barrel 107.

FIG. 2 shows a partial cross-sectional view of the exposure apparatus 100 including the optical device according to the present embodiment, viewed from above.

As shown in FIG. 2, in the optical device according to this embodiment, an air conditioner 205 (gas supply means) is used to control the temperature environment between the gas inside the lens barrel 107 and the optical elements 104a and 104b. Gas is supplied at an appropriate temperature and humidity.

Further, as shown in FIG. 2, in the optical device according to the present embodiment, the lens barrel 107 has an outer wall 201, an inner wall 204, and reinforces the rigidity of the lens barrel 107 coupled to the outer wall 201 and the inner wall 204. It is provided with ribs 202 for
Furthermore, an opening is formed in the rib 202 through which gas supplied from the air conditioner 205 passes. Note that the rib 202 only needs to be coupled (fixed, connected) to at least one of the outer wall 201 and the inner wall 204.

In the XY section, a closed space serving as a flow path L for gas supplied from the air conditioner 205 is defined by both side surfaces of the outer wall 201 in the X direction, the ribs 202, and the inner wall 204. In other words, in the optical device according to this embodiment, a flow path L for gas supplied from the air conditioner 205 is defined between the outer wall 201 and the inner wall 204.
As shown in FIG. 2, in the optical device according to this embodiment, the flow path L extends in the Y direction, and in the XY cross section perpendicular to the Z direction, the optical elements 104a and 104b It is provided on both sides with the

In the XY section, a space S (optical element storage space) in which optical elements 104a and 104b as a projection optical system are housed is defined by both Y-direction end faces of the outer wall 201 and the inner wall 204.
In other words, in the optical device according to this embodiment, a space S is defined inside the inner wall 204 in which the optical elements 104a and 104b are housed.

As shown in FIG. 2, a temperature sensor 206 is provided within the flow path L defined by the outer wall 201, the ribs 202, and the inner wall 204.
Then, the gas whose temperature is adjusted by the air conditioner 205 passes through the air supply duct 207 (supply flow path) so that the gas passing through the flow path L has a predetermined temperature based on the detection result of the temperature sensor 206. It is supplied to the flow path L from 108.

After passing through the opening formed in the rib 202, the gas supplied to the flow path L reaches the outlet 208 leading to the space S in which the optical elements 104a and 104b are housed. Note that when the rib 202 is coupled to one of the outer wall 201 and the inner wall 204, the gas supplied to the flow path L can also pass through the space on the other side of the rib 202.
Here, the air outlet 208 uses a resistor such as a mesh or punched metal to suppress the distribution of wind speed.

The gas supplied to the space S through the outlet 208 that communicates the flow path L and the space S with each other controls the temperature of the gas in the space S and the optical elements 104a and 104b. Thereafter, the gas is exhausted from the exhaust port 109, passes through the exhaust duct 209 (exhaust channel), and is recovered by the air conditioner 205.
Note that the air outlet 208 may be provided with a louver that can set the direction in which the gas travels, such as directing the gas toward the optical elements 104a and 104b or toward the optical path between the optical elements 104a and 104b.
Further, as shown in FIG. 2, in the optical device according to the present embodiment, the air outlet 208 connects the optical element 104a and the optical element in the Z direction and the Y direction perpendicular to the X direction perpendicular to the air outlet 208. 104b. That is, the air outlet 208 is provided between the optical element 104a and the optical element 104b in the Y direction in which the flow path L extends.

The recovered gas is then adjusted to an appropriate temperature in the air conditioner 205 and then supplied to the lens barrel 107 again.
In this way, in the optical device according to the present embodiment, gas is circulated in a closed manner so as to control the temperature inside the lens barrel 107 by the air conditioner 205.
Here, since the magnitude of heat exchange between the gas supplied from the air conditioner 205 and the lens barrel 107 depends on the surface area of the flow path L, the flow path L is It should be designed according to the temperature.

As described above, in the optical device according to the present embodiment, there is a space in the lens barrel 107 for providing the rib 202 and the inner wall 204, and a space for the flow path L of gas supplied from the air conditioner 205 to the lens barrel 107. Both can be used in a common space.
This ensures the rigidity of the lens barrel 107, controls the temperature of the optical elements 104a and 104b inside the lens barrel 107, and the gas in the space S in which they are housed, and achieves miniaturization of the lens barrel 107. be able to.

Further, in the exposure apparatus 100 including the optical device according to the present embodiment as described above, the optical performance of the lens barrel 107 changes due to thermal deformation occurring in the lens barrel 107 due to temperature rise during exposure processing. It is required to suppress temperature changes.
Therefore, in the exposure apparatus 100 including the optical device according to the present embodiment, the gas supplied from the air conditioner 205 passes through the flow path L defined by the outer wall 201, the rib 202, and the inner wall 204 of the lens barrel 107. Heat exchange occurs between the lens barrel 107 and the supplied gas.

At this time, the heat accumulated in the lens barrel 107 due to the exposure process is transferred to the supplied gas, so that it is possible to suppress a rise in temperature of the lens barrel 107.
Thereby, it is possible to provide a highly stable exposure apparatus 100 that can suppress changes in optical performance even when heat is generated during exposure processing.

At this time, the temperature of the gas supplied from the air conditioner 205 increases as it receives heat from the lens barrel 107.
Therefore, since the gas whose temperature has increased is recovered by the air conditioner 205, it is possible to suppress the output of the heater of the air conditioner 205, and the power consumption of the air conditioner 205 can be suppressed.

As described above, in the optical device according to the present embodiment, gas supplied from the air conditioner 205 to the lens barrel 107 via the air supply port 108 is supplied to the outer wall 201 in the lens barrel 107, the rib 202 in which the opening is formed, and It passes through the flow path L defined by the inner wall 204. Thereafter, the gas flows into the space S from the outlet 208 and, after passing through the space S, is exhausted from the exhaust port 109 and is recovered by the air conditioner 205.
As a result, the rigidity of the lens barrel 107 is ensured using the rib 202 and the inner wall 204, while suppressing temperature changes in the optical elements 104a and 104b in the lens barrel 107, the gas in the optical path space, and the lens barrel 107 itself. Achieved miniaturization of optical equipment.

In the optical device according to the present embodiment, air outlets 208 are provided on both sides of the space S of the lens barrel 107 in the X direction, and an exhaust port 109 is provided at one end in the Y direction. The positions and numbers of the exhaust ports 208 and 109 are not limited to these. In particular, the positions of the air outlet 208 and the exhaust port 109 change depending on the shape of the lens barrel 107 and the arrangement of the optical elements 104a and 104b.
Further, in the optical device according to the present embodiment, the air supply port 108 is provided so that the flow path L and the air supply duct 207 communicate with each other, and the exhaust port is provided so that the space S and the exhaust duct 209 communicate with each other. 109 is provided, but is not limited to this.
That is, the air supply port 108 may be provided so that the space S and the air supply duct 207 communicate with each other, while the exhaust port 109 may be provided so that the flow path L and the exhaust duct 209 communicate with each other.
After the gas supplied from the air conditioner 205 to the lens barrel 107 via the air supply port 108 passes through the space S, it flows into the flow path L from the air outlet 208, and then the gas passes through the flow path L. Afterwards, the air may be exhausted from the exhaust port 109.

[Second embodiment]
FIG. 3 shows a partial cross-sectional view of an exposure apparatus 200 including an optical device according to the second embodiment, viewed from above.
Note that the optical device according to this embodiment has the same configuration as the optical device according to the first embodiment except that the structure of the lens barrel 107 is different, so the same members are given the same numbers. The explanation will be omitted.

As described in the first embodiment, since the gas supplied from the air conditioner 205 passes through the flow path L defined by the outer wall 201, ribs 202, and inner wall 204 of the lens barrel 107, the lens barrel 107 and the supplied gas Heat exchange takes place between the two.
At this time, the larger the surface area of the lens barrel 107 with which the supply gas comes into contact, the greater the amount of heat exchange between the lens barrel 107 and the supply gas.

Therefore, in the optical device according to the present embodiment, the lens barrel 107 is designed so that the surface area of the lens barrel 107 with which the supplied gas comes into contact is increased, that is, the flow path L is lengthened.
Specifically, as shown in FIG. 3, between the outer wall 201 and the inner wall 204, a first rib 202a and a second rib 202b, each having openings formed at different positions, are arranged in the Y direction. They are arranged so that they are arranged alternately along the line.

In other words, in the optical device according to the present embodiment, the first rib 202a and the second rib each have openings formed at different positions in the X direction perpendicular to the flow path L in the XY cross section perpendicular to the vertical direction. 202b are arranged so as to be alternately arranged along the flow path L. Thereby, the gas supplied to the flow path L flows through the flow path L in a meandering zigzag manner.
Note that in the optical device according to this embodiment, the first rib 202a has an opening formed at the center in the X direction, while the second rib 202b has an opening formed at the end on the side of the inner wall 204 in the X direction. However, it is not limited to this.

As described above, in the optical device according to the present embodiment, the gas supplied from the air conditioner 205 to the lens barrel 107 passes through the outer wall 201 in the lens barrel 107, the first rib 202a in which the opening is formed, and the second rib. 202b, and the flow path L defined by the inner wall 204. Thereafter, the gas flows into the space S from the outlet 208 and, after passing through the space S, is exhausted from the exhaust port 109 and is recovered by the air conditioner 205.
This ensures the rigidity of the lens barrel 107 using the first rib 202a, the second rib 202b, and the inner wall 204, and also protects the optical elements 104a and 104b inside the lens barrel 107, the gas in the optical path space, and the lens barrel 107 itself. This achieves miniaturization of the optical device while suppressing temperature changes.

In addition, in the optical device according to this embodiment, by designing the lens barrel 107, specifically the flow path L as described above, the supplied gas flows in a meandering zigzag manner within the XY cross section. Path L becomes longer. Therefore, the surface area of the lens barrel 107 that comes into contact with the supply gas can be increased.
This increases the amount of heat exchange between the lens barrel 107 and the supplied gas, making it possible to suppress the temperature rise in the lens barrel 107 more efficiently.
Further, by increasing the amount of heat exchange between the lens barrel 107 and the supplied gas, the output of the heater of the air conditioner 205, that is, the power consumption of the air conditioner 205 can be further suppressed.

[Third embodiment]
FIG. 4 shows a partial sectional view of an exposure apparatus 300 including an optical device according to the third embodiment, viewed from above.
Note that the optical device according to the present embodiment has the same configuration as the optical device according to the first embodiment, except that the control unit 305 is provided and the structure of the lens barrel 107 is different. The explanation will be omitted.

As shown in FIG. 4, in the optical device according to this embodiment, a flow path defined by an outer wall 201, a rib 202, and an inner wall 204 is divided by a dividing member 308. As a result, a relatively long channel L1 (first channel) (having a large surface area) and a relatively short channel L2 (second channel) (having a small surface area) are provided.
Switching valves 301 and 302 (switching means) are provided at the confluence point of the flow paths L1 and L2, that is, at both ends of the dividing member 308 in the Y direction.

At this time, if the temperature of the lens barrel 107 has increased significantly, specifically, if it is higher than a predetermined temperature, the control unit 305 causes the gas supplied by the air conditioner 205 to pass through the flow path L1. Controls switching valves 301 and 302.
On the other hand, if the temperature of the lens barrel 107 has not increased significantly, specifically, if it is below a predetermined temperature, the control unit 305 switches the gas supplied by the air conditioner 205 to pass through the flow path L2. Controls valves 301 and 302.
Here, in the optical device according to this embodiment, a temperature sensor 306 is provided to measure the temperature of the lens barrel 107.

That is, the optical device according to this embodiment is provided with a dividing member 308 that divides the flow path into a flow path L1 and a flow path L2 having different lengths.
At the confluence point of the flow path L1 and the flow path L2, switching valves 301 and 302 are provided to switch the flow paths so that the gas travels through one of the flow paths L1 and L2.
Then, the control unit 305 controls the switching valves 301 and 302 based on the detection result of the temperature sensor 306 that detects the temperature of the lens barrel 107.

At this time, when the supply gas is passed through the flow path L1, a large pressure loss occurs within the flow path L1, so it is necessary to increase the output of the fan in the air conditioner 205.
On the other hand, in the flow path L1, the surface area of the lens barrel 107 with which the supplied gas comes into contact is larger than in the flow path L2, so the amount of heat exchange between the lens barrel 107 and the supplied gas increases, and the temperature of the lens barrel 107 increases. It becomes possible to suppress the increase more efficiently.

As described above, in the optical device according to the present embodiment, gas supplied from the air conditioner 205 to the lens barrel 107 via the air supply port 108 is supplied to the outer wall 201 in the lens barrel 107, the rib 202 in which the opening is formed, and It passes through the flow path L1 or L2 defined by the inner wall 204. Thereafter, the gas flows into the space S from the outlet 208 and, after passing through the space S, is exhausted from the exhaust port 109 and is recovered by the air conditioner 205.
As a result, the rigidity of the lens barrel 107 is ensured using the rib 202 and the inner wall 204, while suppressing temperature changes in the optical elements 104a and 104b in the lens barrel 107, the gas in the optical path space, and the lens barrel 107 itself. Achieved miniaturization of optical equipment.

In addition, in the optical device according to the present embodiment, the temperature rise in the lens barrel 107 can be suppressed by switching the flow paths L1 and L2, which are provided by the dividing member 308 and have different lengths from each other, according to the temperature of the lens barrel 107. It can be suppressed more efficiently.

Note that in the optical device according to the present embodiment, the flow path is switched depending on the temperature of the lens barrel 107, but the present invention is not limited to this. For example, if the temperature of the lens barrel 107 can be estimated from the operating time of the optical device, the flow path may be switched when the operating time of the lens barrel 107 has elapsed for a predetermined time.
Further, in the optical device according to the present embodiment, the flow path defined by the outer wall 201, the rib 202, and the inner wall 204 is divided into two flow paths L1 and L2, but the present invention is not limited to this, and the flow path is divided into three or more flow paths. I don't mind if you do.
Further, in the optical device according to the present embodiment, the switching valves 301 and 302 are provided at both ends of the dividing member 308 in the Y direction, but the present invention is not limited to this. You may also set

[Fourth embodiment]
FIG. 5 shows a partial sectional view of an exposure apparatus 400 including an optical device according to the fourth embodiment, viewed from above.
Note that the optical device according to this embodiment has the same configuration as the optical device according to the first embodiment except that the structure of the lens barrel 107 is different, so the same members are given the same numbers. The explanation will be omitted.

As shown in FIG. 5, the air conditioner 205 includes a cooler 402, a heater 403, and a fan 404.
In the air conditioner 205, the gas is first cooled to a predetermined temperature in the cooler 402, then heated to a predetermined temperature by the heater 403, and then supplied to the lens barrel 107 by the fan 404.

The optical device according to this embodiment has a configuration in which the gas supplied from the air conditioner 205 to the lens barrel 107 and the gas discharged from the lens barrel 107 to the air conditioner 205 can exchange heat with each other. .

Specifically, as shown in FIG. 5, a new heat exchange space S' (heat exchange space) is created between the space S where the optical elements 104a and 104b are housed and the exhaust port 109. is provided.
Heat exchange walls 401 (heat exchange walls) are provided on both sides of the space S' in the X direction. Further, a flow path forming member 408 is provided in the center of the space S' so that the gas flowing into the space S' easily comes into contact with the heat exchange wall 401.

As described above, heat exchange is performed between the gas supplied from the air conditioner 205 and the lens barrel 107 and the optical elements 104a and 104b.
Therefore, the heat accumulated in the lens barrel 107 and the optical elements 104a and 104b due to the exposure process is transferred to the supplied gas, thereby increasing the temperature of the gas discharged from the lens barrel 107.
That is, in the optical device according to the present embodiment, since the temperature of the gas discharged from the lens barrel 107 is higher than the temperature of the gas supplied to the lens barrel 107, the gas discharged from the lens barrel 107 flows into the lens barrel 107. Heat is transferred to the supplied gas via the heat exchange wall 401.

As a result, the temperature of the gas supplied to the lens barrel 107 increases, so the output of the heater 403 provided in the air conditioner 205 can be suppressed.
In addition, since the temperature of the gas discharged from the lens barrel 107 decreases, the output of the cooler 402 provided in the air conditioner 205 can also be suppressed.
Therefore, in the optical device according to this embodiment, the power consumption of the air conditioner 205 can be reduced.

As described above, in the optical device according to the present embodiment, gas supplied from the air conditioner 205 to the lens barrel 107 via the air supply port 108 is supplied to the outer wall 201 in the lens barrel 107, the rib 202 in which the opening is formed, and It passes through the flow path L defined by the inner wall 204. Thereafter, the gas flows into the space S from the outlet 208, passes through the spaces S and S', is exhausted from the exhaust port 109, and is recovered by the air conditioner 205.
As a result, the rigidity of the lens barrel 107 is ensured using the rib 202 and the inner wall 204, while suppressing temperature changes in the optical elements 104a and 104b in the lens barrel 107, the gas in the optical path space, and the lens barrel 107 itself. Achieved miniaturization of optical equipment.

In addition, in the optical device according to this embodiment, a space S' for heat exchange is provided between the space S and the exhaust port 109, and a heat exchange space S' is provided between the space S' and the gas in the flow path L. A heat exchange wall 401 whose heat exchange amount is larger than that of the inner wall 204 is provided. That is, the heat exchange wall 401, which is a part of the inner wall 204, has higher heat transfer performance than other parts of the inner wall 204.
Thereby, the output of the heater 403 and the cooler 402 provided in the air conditioner 205 can be suppressed, and the power consumption of the air conditioner 205 can be reduced.

Note that in the optical device according to this embodiment, a heat sink may be installed on the heat exchange wall 401 to promote heat exchange, or the surface may be configured to have an uneven shape.
Furthermore, in the optical device according to the present embodiment, a heat exchange space S' is provided between the gas discharged from the lens barrel 107 and the gas supplied to the lens barrel 107 via the heat exchange wall 401. Although heat exchange was performed in , it is not limited to this. For example, heat exchange can be performed between the gas discharged from the lens barrel 107 and the gas supplied to the lens barrel 107 by bringing the air supply duct 207 outside the lens barrel 107 into thermal contact with the exhaust duct 209. It is possible.

Although preferred embodiments have been described above, it goes without saying that the present invention is not limited to these embodiments, and various modifications and changes can be made within the scope of the gist thereof.

[Method for manufacturing articles]
Next, a method for manufacturing an article using an exposure apparatus including an optical device according to any one of the first to fourth embodiments will be described.

The articles include semiconductor devices, display devices, color filters, optical components, and MEMS.
For example, semiconductor devices are manufactured through a pre-process to create a circuit pattern on a wafer, and a post-process including a processing step to complete the circuit chip produced in the pre-process as a product.
The pre-process includes an exposure process of exposing a wafer coated with a photosensitive agent using an exposure apparatus equipped with an optical device according to any of the first to fourth embodiments, and a development process of developing the photosensitive agent. .
Using the developed photosensitive material pattern as a mask, an etching process, an ion implantation process, etc. are performed to form a circuit pattern on the wafer.
By repeating these steps of exposure, development, etching, etc., a circuit pattern consisting of a plurality of layers is formed on the wafer.
In the post-process, the wafer on which the circuit pattern has been formed is diced, and chip mounting, bonding, and inspection steps are performed.

Display devices are manufactured through a process of forming transparent electrodes. The step of forming a transparent electrode includes a step of applying a photosensitive agent to a glass wafer on which a transparent conductive film has been deposited, and a step of applying a photosensitive agent to a glass wafer on which a transparent conductive film has been deposited. and exposing the glass wafer coated with light. Further, the step of forming the transparent electrode includes the step of developing the exposed photosensitizer.

According to the method for manufacturing an article according to the present embodiment, it is possible to manufacture an article with higher quality and higher productivity than ever before.

104a, 104b Optical element 107 Lens barrel 201 Outer wall 202 Rib 204 Inner wall 205 Gas supply means (air conditioner)
L Flow path S Optical element storage space

Claims (11)

an optical element;
a lens barrel that houses the optical element and has an outer wall, an inner wall, and a rib provided between the outer wall and the inner wall and coupled to at least one of the outer wall and the inner wall;
Equipped with
In the lens barrel, a flow path for gas supplied from a gas supply means is defined between the outer wall and the inner wall, and an optical element storage space in which the optical element is housed is defined inside the inner wall. is,
The gas passes through the flow path and the optical element storage space,
An optical device characterized in that the rib has an opening through which the gas passes . 2. The optical device according to claim 1 , wherein the openings are arranged so that the gas flows in a meandering manner within the flow path. The flow path is provided with a dividing member that divides the flow path into the first flow path and the second flow path having different lengths,
A switching means is provided at a confluence point of the first flow path and the second flow path to switch the flow path so that the gas travels through one of the first flow path and the second flow path. It is provided,
The optical device according to claim 1 , wherein the optical device includes a temperature sensor that detects the temperature of the lens barrel, and a control section that controls the switching means based on the detection result of the temperature sensor. . The lens barrel has a heat exchange space provided between the optical element storage space and the exhaust port,
The gas supplied to the lens barrel passes through the flow path, the optical element storage space, and the heat exchange space in this order, and then is exhausted from the exhaust port,
A part of the inner wall defining the flow path defines a part of the heat exchange space,
The optical device according to claim 1 , wherein the part of the inner wall has higher heat transfer performance than other parts of the inner wall. The lens barrel includes an air supply port that communicates one of the flow path and the optical element storage space with a supply flow path from the gas supply means, and a discharge flow path that connects the other to the gas supply means. An exhaust port is provided to communicate with each other.
5. The optical device according to claim 1 , wherein the inner wall is provided with an outlet that allows the flow path and the optical element storage space to communicate with each other. 6. The optical device according to claim 5 , wherein the air outlet is provided between the first optical element and the second optical element in the direction in which the flow path extends. 7. The optical device according to claim 1, wherein the flow path is provided on both sides of the optical element in a cross section perpendicular to the vertical direction. The optical device according to any one of claims 1 to 7 , wherein the gas supply means is an air conditioner. An exposure device that projects an image of a pattern of an original onto a substrate and exposes the substrate,
An exposure apparatus comprising the optical device according to claim 1 , which houses a projection optical system that projects an image of the pattern onto the substrate. a temperature sensor that is provided in the lens barrel of the optical device and detects the temperature of the gas supplied from the gas supply means;
the gas supply means for supplying the gas whose temperature is controlled based on the detection result of the temperature sensor to the optical device;
10. The exposure apparatus according to claim 9 , comprising: exposing the substrate using the exposure apparatus according to claim 9 or 10 ;
Developing the exposed substrate;
processing the developed substrate to obtain an article;
A method for manufacturing an article characterized by having the following.

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