JP7367310B2 - Iron-based metal glass alloy powder - Google Patents
Iron-based metal glass alloy powder Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
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- B22F2301/00—Metallic composition of the powder or its coating
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- B22F2301/052—Aluminium
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- B22F2301/056—Alkaline metals, i.e. Ca, Sr, Ba, Ra
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- B22F2301/00—Metallic composition of the powder or its coating
- B22F2301/35—Iron
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Description
本発明は、鉄基金属ガラス合金粉末に関する。 The present invention relates to iron-based metallic glass alloy powder.
近年、電源回路で使用されるパワーインダクタとしては、小型化・低背化の要求から大電流・高周波数で使用できる軟磁性材料が望まれている。従来、インダクタの主材料として酸化物であるフェライト系材料が使用されてきたが、飽和磁化が低いため小型化には不利である。そこで、近年は飽和磁化が高く小型・低背化に有利な合金系材料を使用したメタルインダクタが急増している。メタルインダクタには、鉄を主材料とした軟磁性合金粉末が用いられ、軟磁性合金粉末と樹脂とを混合し、圧縮成形した圧粉磁心などが知られている。圧粉磁心の磁気特性(飽和磁化、透磁率、コアロス、周波数特性など)は、使用する軟磁性合金粉末の磁気特性や粒度分布、充填性、電気抵抗に依存する。 In recent years, soft magnetic materials that can be used at large currents and high frequencies have been desired for power inductors used in power supply circuits due to the demand for smaller size and lower profile. Conventionally, ferrite-based materials, which are oxides, have been used as the main material for inductors, but this is disadvantageous for miniaturization because of its low saturation magnetization. Therefore, in recent years, metal inductors using alloy materials that have high saturation magnetization and are advantageous for miniaturization and low profile have rapidly increased. A soft magnetic alloy powder mainly made of iron is used for metal inductors, and powder magnetic cores made by mixing soft magnetic alloy powder and resin and compression molding are known. The magnetic properties of the dust core (saturation magnetization, magnetic permeability, core loss, frequency characteristics, etc.) depend on the magnetic properties, particle size distribution, filling properties, and electrical resistance of the soft magnetic alloy powder used.
鉄基金属ガラス合金粉末は、圧粉成形した場合に優れた磁気特性が得られる。例えば、メタルインダクタに用いられる合金系材料として、電子材料として好適に用いることができる優れた磁気特性を有する鉄基合金粉末が特許文献1に開示されている。また、合金系材料としての信頼性向上のため、耐食性を向上させた鉄基金属ガラス合金粉末が特許文献2に開示されている。また、難着火性を付与した鉄基金属ガラス合金粉末が特許文献3に開示されている。 Iron-based metal glass alloy powder provides excellent magnetic properties when compacted. For example, Patent Document 1 discloses an iron-based alloy powder having excellent magnetic properties that can be suitably used as an electronic material as an alloy material used in metal inductors. Moreover, in order to improve reliability as an alloy material, an iron-based metal glass alloy powder with improved corrosion resistance is disclosed in Patent Document 2. Moreover, an iron-based metal glass alloy powder imparted with ignition resistance is disclosed in Patent Document 3.
メタルインダクタの製造方法としては、一般的に、圧粉プレス加工が用いられている。しかし、圧粉プレス加工は、高い充填率を得るために、300~600MPaもの高い圧力を加える必要があるので、プレス加工された圧粉の生産性が低い。その為、低圧成型法であるトランスファー成形(射出成型)法など、より生産性の高い製造方法により、メタルインダクタを製造したいという需要がある。そのためには、従来よりも、粉末と樹脂とを混合した際に、より高いスラリーの流動性が求められる。スラリーの流動性は粉末の形状や表面状態により変化し、一般に比表面積の小さい粉末が求められる。さらに、より小型化、高周波化が求められるパワーインダクタ等の用途において、より損失を低減することが求められている。即ち、より比表面積が小さく、より高い特性を有する鉄基金属ガラス粉末が求められている。 Powder pressing is generally used as a method for manufacturing metal inductors. However, in powder pressing, it is necessary to apply pressure as high as 300 to 600 MPa in order to obtain a high filling rate, so the productivity of the pressed powder is low. Therefore, there is a demand for manufacturing metal inductors using manufacturing methods with higher productivity, such as transfer molding (injection molding), which is a low-pressure molding method. To this end, higher fluidity of the slurry is required when the powder and resin are mixed than in the past. The fluidity of the slurry changes depending on the shape and surface condition of the powder, and generally a powder with a small specific surface area is required. Furthermore, in applications such as power inductors that require smaller size and higher frequency, it is required to further reduce loss. That is, an iron-based metallic glass powder having a smaller specific surface area and higher properties is required.
本発明は、比表面積が小さく、高い流動性を有することにより低圧成型法においても高充填が得られる鉄基金属ガラス合金粉末を提供することを目的とする。 An object of the present invention is to provide an iron-based metallic glass alloy powder that has a small specific surface area and high fluidity, so that high filling can be obtained even in a low-pressure molding method.
本発明者らは、種々の研究を行った結果、鉄基金属ガラス合金粉末にAl及び/又はCaを添加したことにより、驚くべきことに、鉄基金属ガラス合金粉末の形状及び表面状態が改善して低比表面積化することにより、粉末の流動性が向上し、低圧成型法を用いた場合でも高充填が得られ、更には、磁性材料としての特性が向上するとの知見を得て、本発明を完成するに至った。 As a result of various studies, the present inventors found that by adding Al and/or Ca to the iron-based metallic glass alloy powder, the shape and surface condition of the iron-based metallic glass alloy powder were surprisingly improved. We obtained the knowledge that by reducing the specific surface area of the powder, the fluidity of the powder improves, high filling can be obtained even when using low-pressure molding, and furthermore, the properties as a magnetic material improve. The invention was completed.
即ち、本発明は、以下の鉄基金属ガラス合金粉末である:
〔1〕Al及びCaの少なくともいずれかが添加されており、Alを0.05~5重量%を含む、鉄基金属ガラス合金粉末。
〔2〕Al及びCaの少なくともいずれかが添加されており、Caを0.001~0.03重量%を含む、鉄基金属ガラス合金粉末。
That is, the present invention is the following iron-based metal glass alloy powder:
[1] Iron-based metal glass alloy powder to which at least one of Al and Ca is added and contains 0.05 to 5% by weight of Al.
[2] Iron-based metallic glass alloy powder to which at least one of Al and Ca is added and contains 0.001 to 0.03% by weight of Ca.
本発明の一態様によれば、
Al及びCaが添加されており、
Al:0.05~2重量%、及び
Ca:0.001~0.025重量%
を含む、上記の鉄基金属ガラス合金粉末が提供される。
According to one aspect of the invention,
Al and Ca are added,
Al: 0.05 to 2% by weight, and Ca: 0.001 to 0.025% by weight
The above-described iron-based metal glass alloy powder is provided.
本発明の一態様によれば、
Al:0.08~1.5重量%、及び
Ca:0.0015~0.025重量%
を含む、上記の鉄基金属ガラス合金粉末が提供される。
According to one aspect of the invention,
Al: 0.08 to 1.5% by weight, and Ca: 0.0015 to 0.025% by weight
The above-described iron-based metal glass alloy powder is provided.
本発明の一態様によれば、
鉄基金属ガラス合金粉末が、下記組成式:
(Fe1-s-tCosNit)100-x-y-z{(SiaBb)m(PcCd)n}x(M1)y(M2)z
[式中、Fe、Co及びNiの組成比率が、
19≦x≦22、
0≦y≦6.0、
0≦s≦0.35、
0≦t≦0.35、及び
s+t≦0.35であり、
Si、B、P及びCの組成比率が、
(0.5:1)≦(m:n)≦(6:1)、
(2.5:7.5)≦(a:b)≦(5.5:4.5)及び
(5.5:4.5)≦(c:d)≦(9.5:0.5)であり、
M1が、Nb又はMoであり、
M2が、Al及び/又はCaであり、
0<zである]
で表される組成を有する、上記の鉄基金属ガラス合金粉末が提供される。
According to one aspect of the invention,
The iron-based metal glass alloy powder has the following composition formula:
(Fe 1-st Co s Ni t ) 100-xy-z {( Sia B b ) m (P c C d ) n } x (M1) y (M2) z
[In the formula, the composition ratio of Fe, Co and Ni is
19≦x≦22,
0≦y≦6.0,
0≦s≦0.35,
0≦t≦0.35, and s+t≦0.35,
The composition ratio of Si, B, P and C is
(0.5:1)≦(m:n)≦(6:1),
(2.5:7.5)≦(a:b)≦(5.5:4.5) and (5.5:4.5)≦(c:d)≦(9.5:0.5 ) and
M1 is Nb or Mo,
M2 is Al and/or Ca,
0<z]
The above-mentioned iron-based metal glass alloy powder having a composition represented by is provided.
本発明の一態様によれば、Cr及びZnからなる群から選択される少なくとも1種を更に含む、上記鉄基金属ガラス合金粉末が提供される。 According to one aspect of the present invention, the above-mentioned iron-based metallic glass alloy powder is provided, further comprising at least one selected from the group consisting of Cr and Zn.
本発明の一態様によれば、粒径(D50)が0.5~50μmである、上記鉄基金属ガラス合金粉末が提供される。 According to one aspect of the present invention, the above-mentioned iron-based metallic glass alloy powder having a particle size (D50) of 0.5 to 50 μm is provided.
本発明は、高い流動性を有することにより低圧成型法においても高充填が得られる鉄基金属ガラス合金粉末を提供することができる。 The present invention can provide an iron-based metal glass alloy powder that has high fluidity and can be highly filled even in a low-pressure molding method.
以下、本発明の一実施形態について詳細に説明する。本発明は、以下の実施形態に限定されるものではなく、本発明の効果を阻害しない範囲で適宜変更を加えて実施することができる。なお、以下の説明において、「A~B」は、「A以上かつB以下」を意味する。 Hereinafter, one embodiment of the present invention will be described in detail. The present invention is not limited to the following embodiments, and can be implemented with appropriate modifications within a range that does not impede the effects of the present invention. Note that in the following description, "A to B" means "more than or equal to A and less than or equal to B."
第1の実施形態に係る鉄基金属ガラス合金粉末は、Al及びCaの少なくともいずれかが添加されており、Alを0.05~5重量%を含む。また、第2の実施形態に係る鉄基金属ガラス合金粉末は、Al及びCaの少なくともいずれが添加されており、Caを0.001~0.03重量%を含む。 The iron-based metal glass alloy powder according to the first embodiment has at least one of Al and Ca added thereto, and contains 0.05 to 5% by weight of Al. Further, the iron-based metal glass alloy powder according to the second embodiment contains at least one of Al and Ca, and contains 0.001 to 0.03% by weight of Ca.
本実施形態に係る鉄基金属ガラス合金粉末は、
Al及びCaの少なくともいずれかが添加され、Alを0.05~2重量%、好ましくは、0.08~1.5重量%、及びCaを0.001~0.025重量%、好ましくは、0.0015~0.025重量%を含む。
本明細書において、鉄基金属ガラス合金とは、Fe-P-C系金属ガラス合金、Fe-B-Si系金属ガラス合金などの従来公知の鉄基金属ガラス合金である。
Al及び/又はCaが添加されることにより、鉄基金属ガラス合金粉末の形状及び表面状態が改善して低比表面積化する。鉄基金属ガラス合金粉末の形状及び表面状態の改善とは、鉄基金属ガラス合金粉末がより真球に近い形状となり、鉄基金属ガラス合金粉末の表面の起伏がより少なく平滑化することである。即ち、低比表面積化により、鉄基金属ガラス合金粉末の流動性が向上する。
更には、低比表面積化に伴う、鉄基金属ガラス合金粉末の形状及び表面状態の変化により、鉄基金属ガラス合金粉末の磁性特性が向上する。
The iron-based metal glass alloy powder according to this embodiment is
At least one of Al and Ca is added, with Al being 0.05 to 2% by weight, preferably 0.08 to 1.5% by weight, and Ca being 0.001 to 0.025% by weight, preferably Contains 0.0015 to 0.025% by weight.
In this specification, the iron-based metallic glass alloy is a conventionally known iron-based metallic glass alloy such as a Fe-P-C metallic glass alloy or a Fe-B-Si metallic glass alloy.
By adding Al and/or Ca, the shape and surface condition of the iron-based metal glass alloy powder are improved and the specific surface area is reduced. Improving the shape and surface condition of the iron-based metal glass alloy powder means that the iron-based metal glass alloy powder has a shape closer to a true sphere, and the surface of the iron-based metal glass alloy powder has fewer undulations and is smoothed. . That is, by lowering the specific surface area, the fluidity of the iron-based metal glass alloy powder is improved.
Furthermore, the magnetic properties of the iron-based metal glass alloy powder are improved due to changes in the shape and surface condition of the iron-based metal glass alloy powder due to the reduction in specific surface area.
<Al(アルミニウム)>
第1の実施形態に係る鉄基金属ガラス合金粉末は、Alを0.05~5重量%含む。当該範囲のAlが存在することにより、粉末の形状が改善する。0.05重量%未満の場合、上述の効果が小さく、また、5重量%を超えると、粉末の形状が悪化し、磁気特性を低下させ得る。
<Al (aluminum)>
The iron-based metal glass alloy powder according to the first embodiment contains 0.05 to 5% by weight of Al. The presence of Al in this range improves the shape of the powder. If it is less than 0.05% by weight, the above-mentioned effect will be small, and if it exceeds 5% by weight, the shape of the powder may deteriorate and the magnetic properties may be deteriorated.
<Ca(カルシウム)>
第2の実施形態に係る鉄基金属ガラス合金粉末は、Caを0.001~0.03重量%含む。当該範囲のCaが存在することにより、粉末中の酸素量を低減させる。0.001重量%未満の場合、上述の効果が小さく、また、0.03重量%を超えると、磁気特性を低下させ得る。
<Ca (calcium)>
The iron-based metal glass alloy powder according to the second embodiment contains 0.001 to 0.03% by weight of Ca. The presence of Ca in this range reduces the amount of oxygen in the powder. If it is less than 0.001% by weight, the above-mentioned effect will be small, and if it exceeds 0.03% by weight, the magnetic properties may be deteriorated.
Al又はCaのそれぞれ一方のみが、鉄基金属ガラス合金粉末に含まれる場合も上述の効果を奏し得るが、Al及びCaの両元素を複合的に含有させることにより、驚くべきことに、飛躍的に鉄基金属ガラス合金粉末が低比表面積化し、酸素量が低下する。これは、酸素との親和性が高いAl及びCaにより、合金粉末作製のための溶湯の表面張力が変化することや溶湯の酸素量が変化することによる結果であると考えられる。なお、Al及びCaと同様に酸素との親和性が高い元素であれば、Al及びCaの場合と同様の効果を奏し得る。
Al及びCaの両元素を含む、一実施形態に係る鉄基金属ガラス合金粉末は、Alを0.05~2重量%、好ましくは、0.08~1.5重量%、及びCaを0.001~0.025重量%、好ましくは、0.0015~0.025重量%含む。
Although the above-mentioned effects can be achieved even when only one of Al or Ca is contained in the iron-based metal glass alloy powder, surprisingly, by containing both Al and Ca in combination, the effect can be dramatically improved. The specific surface area of the iron-based metal glass alloy powder decreases, and the amount of oxygen decreases. This is considered to be the result of a change in the surface tension of the molten metal for producing the alloy powder and a change in the amount of oxygen in the molten metal due to Al and Ca, which have a high affinity for oxygen. Note that an element that has a high affinity for oxygen like Al and Ca can produce the same effect as Al and Ca.
The iron-based metal glass alloy powder according to one embodiment, which contains both elements Al and Ca, contains 0.05 to 2% by weight of Al, preferably 0.08 to 1.5% by weight, and 0.05% by weight of Ca. 001 to 0.025% by weight, preferably 0.0015 to 0.025% by weight.
本実施形態に係る鉄基金属ガラス合金粉末は、鉄基金属ガラス合金粉末が、下記組成式:
(Fe1-s-tCosNit)100-x-y-z{(SiaBb)m(PcCd)n}x(M1)y(M2)z
[式中、Fe、Co及びNiの組成比率が、
19≦x≦22、
0≦y≦6.0、
0≦s≦0.35、
0≦t≦0.35、及び
s+t≦0.35であり、
Si、B、P及びCの組成比率が、
(0.5:1)≦(m:n)≦(6:1)、
(2.5:7.5)≦(a:b)≦(5.5:4.5)及び
(5.5:4.5)≦(c:d)≦(9.5:0.5)であり、
M1が、Nb又はMoであり、
M2が、Al及び/又はCaであり、
0<zである]
で表される組成を有する鉄基金属ガラス合金粉末であることが好ましい。zは、Al及びCaの含有率に依存し、0<z≦10、0<z≦7.5、0<z≦5、0<z≦2.5、0<z≦1、0<z≦0.5、0<z≦0.25、0<z≦0.1、0<z≦0.05などの範囲であり得る。
鉄基金属ガラス合金粉末が上記の組成を有する鉄基金属ガラス合金粉末であることにより、安価に製造することができ、優れた軟磁気特性を有する。
The iron-based metallic glass alloy powder according to the present embodiment has the following composition formula:
(Fe 1-st Co s Ni t ) 100-xyz {(Sia B b ) m (P c C d ) n } x (M1) y (M2) z
[In the formula, the composition ratio of Fe, Co and Ni is
19≦x≦22,
0≦y≦6.0,
0≦s≦0.35,
0≦t≦0.35, and s+t≦0.35,
The composition ratio of Si, B, P and C is
(0.5:1)≦(m:n)≦(6:1),
(2.5:7.5)≦(a:b)≦(5.5:4.5) and (5.5:4.5)≦(c:d)≦(9.5:0.5 ) and
M1 is Nb or Mo,
M2 is Al and/or Ca,
0<z]
It is preferable that it is an iron-based metal glass alloy powder having a composition represented by: z depends on the content of Al and Ca, 0<z≦10, 0<z≦7.5, 0<z≦5, 0<z≦2.5, 0<z≦1, 0<z The range may be ≦0.5, 0<z≦0.25, 0<z≦0.1, 0<z≦0.05, etc.
Since the iron-based metal glass alloy powder has the above composition, it can be manufactured at low cost and has excellent soft magnetic properties.
本実施形態に係る鉄基金属ガラス合金粉末は、Cr及びZnからなる群から選択される少なくとも1種を更に含むことが好ましい。Cr及びZnからなる群から選択される少なくとも1種を更に含むことにより、鉄基金属ガラス合金粉末の耐食性が改善し、更には、難燃性が向上する。Cr及びZnからなる群から選択される少なくとも1種の含有率は、鉄基金属ガラス合金粉末の全重量に対して、2~6重量%、好ましくは2.8~5.5重量%、更に好ましくは、2.8~4.0重量%である。 It is preferable that the iron-based metal glass alloy powder according to the present embodiment further contains at least one selected from the group consisting of Cr and Zn. By further containing at least one selected from the group consisting of Cr and Zn, the corrosion resistance of the iron-based metal glass alloy powder is improved, and furthermore, the flame retardance is improved. The content of at least one selected from the group consisting of Cr and Zn is 2 to 6% by weight, preferably 2.8 to 5.5% by weight, and more preferably 2.8 to 5.5% by weight, based on the total weight of the iron-based metal glass alloy powder. Preferably, it is 2.8 to 4.0% by weight.
<その他の元素>
本実施形態に係る鉄基金属ガラス合金粉末は、不可避的不純物として、N、S、O等の元素を目的とする特性に影響を与えない程度で含み得る。
<Other elements>
The iron-based metal glass alloy powder according to the present embodiment may contain elements such as N, S, and O as unavoidable impurities to the extent that they do not affect the desired properties.
本実施形態に係る鉄基金属ガラス合金粉末は、粒径(D50)が0.5~50μmであることが好ましい。「粒径」とは、メディアン径:D50を意味し、従来公知の方法、例えば、レーザー回折・散乱法により測定されるものである。上述の鉄基金属ガラス合金粉末の低比表面積化や磁気特性の向上の効果は、幅広い粒径を有する鉄基金属ガラス合金粉末において得られるが、粒径(D50)が0.5~50μm、好ましくは、0.5~30μmであることにより、特に、高い効果が得られる。 The iron-based metal glass alloy powder according to this embodiment preferably has a particle size (D50) of 0.5 to 50 μm. "Particle size" means median diameter: D50, and is measured by a conventionally known method, for example, a laser diffraction/scattering method. The above-mentioned effects of lowering the specific surface area and improving magnetic properties of the iron-based metallic glass alloy powder can be obtained with the iron-based metallic glass alloy powder having a wide range of particle sizes. Particularly high effects can be obtained by preferably having a thickness of 0.5 to 30 μm.
[製造方法]
本実施形態に係る鉄基金属ガラス合金粉末は、従来公知のアトマイズ法により製造されることが好ましい。例えば、所望の組成に調整した材料を溶解した溶湯に対してAl及びCaを添加し、所望の冷却条件や粒径となるようパラメータを設定したアトマイズ法により粉末が得られる。Al及びCaの添加は、金属の形態であるAl及びCaを溶湯に添加することにより行い、添加する順番は問わない。Al及びCaは酸化物になり易いため、目的とする合金組成に対し、ある程度過剰量のAl及びCaを添加することを要する。
その後、得られた粉末を乾燥、分級し、必要に応じて、表面処理を行い、目的とする鉄基金属ガラス合金粉末を得ることができる。
[Production method]
The iron-based metal glass alloy powder according to this embodiment is preferably manufactured by a conventionally known atomization method. For example, powder can be obtained by an atomization method in which Al and Ca are added to a molten metal containing materials adjusted to a desired composition, and parameters are set to obtain desired cooling conditions and particle size. The addition of Al and Ca is performed by adding Al and Ca in the form of metals to the molten metal, and the order of addition does not matter. Since Al and Ca tend to become oxides, it is necessary to add a certain amount of Al and Ca in excess of the intended alloy composition.
Thereafter, the obtained powder is dried and classified, and if necessary, surface treatment is performed to obtain the desired iron-based metal glass alloy powder.
以下に本発明の実施例を示す。本発明の内容はこれらの実施例により限定して解釈されるものではない。 Examples of the present invention are shown below. The content of the present invention is not to be interpreted as being limited by these Examples.
[鉄基金属ガラス合金粉末の製造]
以下の2つの組成を有するように調製した原料混合物を高周波誘導炉にて溶解し、
〔組成1〕(Fe1-s-tCosNit)100-x-y{(SiaBb)m(PcCd)n}xNby
[式中、s=0、t=0、x=22、y=0.89、m:n=2.9:1、a:b=3.8:6.2、c:d=7.7:2.3であり、Cr:3.0wt%を含む。]
〔組成2〕(Fe1-s-tCosNit)100-x-y{(SiaBb)m(PcCd)n}x(M1)y
[式中、s=0、t=0、x=24.5、y=0、m:n=6.9:1、a:b=5.2:4.8、c:d=0.5:9.5]
水アトマイズ法を用いてブランク(比較材)としての鉄基金属ガラス合金粉末を製造した。
上記ブランク(比較材)の鉄基金属ガラス合金粉末の製造した時と同様に調製した原料混合物を高周波誘導炉にて溶解し、表1に示される各目標とするAl、Ca組成になるようにAl、Caを添加し、水アトマイズ法を用いて鉄基金属ガラス合金粉末を得た。水アトマイズ法の条件は以下の通りである。
<水アトマイズ条件>
・水圧:100MPa
・水量:100L/分
・水温:20℃
・オリフィス径:φ4mm
・溶湯温度:1500℃
[Manufacture of iron-based metal glass alloy powder]
A raw material mixture prepared to have the following two compositions is melted in a high frequency induction furnace,
[Composition 1] (Fe 1-st Co s Ni t ) 100-xy {( Sia B b ) m (P c C d ) n } x Nb y
[In the formula, s=0, t=0, x=22, y=0.89, m:n=2.9:1, a:b=3.8:6.2, c:d=7. 7:2.3 and contains Cr:3.0wt%. ]
[Composition 2] (Fe 1-st Co s Ni t ) 100-xy {( Sia B b ) m (P c C d ) n } x (M1) y
[In the formula, s=0, t=0, x=24.5, y=0, m:n=6.9:1, a:b=5.2:4.8, c:d=0. 5:9.5]
An iron-based metal glass alloy powder was produced as a blank (comparative material) using a water atomization method.
A raw material mixture prepared in the same manner as when producing the blank (comparative material) iron-based metal glass alloy powder was melted in a high-frequency induction furnace so that the target Al and Ca compositions shown in Table 1 were obtained. Al and Ca were added and an iron-based metal glass alloy powder was obtained using a water atomization method. The conditions for the water atomization method are as follows.
<Water atomization conditions>
・Water pressure: 100MPa
・Water volume: 100L/min ・Water temperature: 20℃
・Orifice diameter: φ4mm
・Molten metal temperature: 1500℃
得られた鉄基金属ガラス合金粉末を振動真空乾燥機(VU-60:中央化工機製)により乾燥させた。乾燥条件は以下の通りである。
<乾燥条件>
・温度 100℃
・圧力 10kPa以下
・時間 60分
乾燥後の鉄基金属ガラス合金粉末の組成についての定量分析をICP発光分析装置〔SPS3500DD:日立ハイテクサイエンス製〕にて行った。
The obtained iron-based metal glass alloy powder was dried using a vibrating vacuum dryer (VU-60: manufactured by Chuo Kakoki). The drying conditions are as follows.
<Drying conditions>
・Temperature 100℃
- Pressure: 10 kPa or less - Time: 60 minutes Quantitative analysis of the composition of the iron-based metal glass alloy powder after drying was performed using an ICP emission spectrometer [SPS3500DD: manufactured by Hitachi High-Tech Science].
乾燥後の鉄基金属ガラス合金粉末を気流分級装置(ターボクラシファイア:日清エンジニアリング製)により分級し、目的とする鉄基金属ガラス合金粉末を得た。得られた鉄基金属ガラス合金粉末の粒径(D50)は、湿式粒度分析装置〔MT3300EX II:マイクロトラック・ベル製〕を用いて測定した。 The dried iron-based metallic glass alloy powder was classified using an air classifier (turbo classifier, manufactured by Nisshin Engineering) to obtain the desired iron-based metallic glass alloy powder. The particle size (D50) of the obtained iron-based metal glass alloy powder was measured using a wet particle size analyzer [MT3300EX II: manufactured by Microtrac Bell].
上述のように製造した鉄基金属ガラス合金粉末に対し、以下を行った。
[評価項目]
1.形状観察
走査型電子顕微鏡(SEM)〔JSM7200:日本電子製〕を用いて、鉄基金属ガラス合金粉末の形状を観察した。
2.比表面積測定
比表面積測定装置〔BELSORP-mini:マイクロトラック・ベル製〕を用いて、鉄基金属ガラス合金粉末の比表面積をBET法にて測定した。
3.抵抗率評価
粉体抵抗測定ユニット〔ハイレスターUX,ロレスタGX:三菱ケミカルアナリテック製〕を用いて、四端子法で粉体の抵抗率を評価した。
4.充填率評価
鉄基金属ガラス合金粉末とエポキシ樹脂とを混合して造粒紛を作製し、造粒紛をリング状に圧粉成形(成形圧力:5MPa)して圧粉磁心(外径:15mm、内径:9mm、厚さ:3mm)を作製し、重量と外形寸法から充填率を求めた。
5.磁気特性(透磁率測定)
充填率評価を行った圧粉磁心に線径:0.3mmの銅線をバイファイラ巻きしたトロイダルコアを作製し評価試料とした。BHアナライザ〔SY8258:岩通計測製〕を用いて、測定周波数:1MHz、最大磁束密度:25mTの条件で透磁率を測定した。
The following was performed on the iron-based metal glass alloy powder produced as described above.
[Evaluation item]
1. Shape observation
The shape of the iron-based metal glass alloy powder was observed using a scanning electron microscope (SEM) [JSM7200: manufactured by JEOL Ltd.].
2. Specific surface area measurement
The specific surface area of the iron-based metal glass alloy powder was measured by the BET method using a specific surface area measuring device [BELSORP-mini: manufactured by Microtrac Bell].
3. Resistivity evaluation
The resistivity of the powder was evaluated using a four-terminal method using a powder resistance measuring unit [Hiresta UX, Loresta GX, manufactured by Mitsubishi Chemical Analytic Tech].
4. Filling rate evaluation
Granulated powder is prepared by mixing iron-based metal glass alloy powder and epoxy resin, and the granulated powder is compacted into a ring shape (molding pressure: 5 MPa) to form a powder magnetic core (outer diameter: 15 mm, inner diameter: 9 mm, thickness: 3 mm) was produced, and the filling rate was determined from the weight and external dimensions.
5. Magnetic properties (magnetic permeability measurement)
A toroidal core was prepared by bifilar-wound copper wire with a wire diameter of 0.3 mm around the powder magnetic core that had undergone the filling rate evaluation, and was used as an evaluation sample. Magnetic permeability was measured using a BH analyzer [SY8258: manufactured by Iwatsu Keizoku] under conditions of a measurement frequency of 1 MHz and a maximum magnetic flux density of 25 mT.
[評価結果]
評価結果を表1に示す。
表1中の「比表面積理論値倍率」は、下記の手法で求めた。
・粉末が単一の真球である場合の比表面積の理論値を以下の式から算出する。
真球1個の体積の算出
真球1個の体積(μm3)=4/3 × 円周率 × 真球の半径(μm)3・・・[A]
真球1個の表面積の算出
真球1個の表面積(μm2)=4 × 円周率 × 真球の半径(μm)2 ・・・[B]
1cm=104μmであるので、1cm3=1012μm3となる。
1cm3中の真球の個数の算出
1cm3中の真球の個数(個)=1012(μm3) / [A]・・・[C]
1cm3中の真球の表面積の算出
1cm3中の真球の表面積=[B] × [C](μm2)・・・[D]
真球の比重は粉末の比重7.5g/cm3と等しいと考えると、真球の比表面積は、
[D] / 7.5(μm2/g)・・・[E]となる。
1m2=1012μm2であるので、
[E] / 1012(m2/g)・・・[F]により真球の比表面積を求めた。
・各粒径ごとに[F]を求めることで、比表面積と粒径(真球の直径)との間には、
真球の比表面積(m2/g)=0.8 / 粒径(μm)・・・[G]の関係を得た。
・比表面積理論倍率は以下の式で算出した。
比表面積理論倍率=測定の実測値 / [G]から算出した理論値 ・・・[H]
[算出例-表1中ブランク-1]
[G]から算出した理論値=0.8/0.7(μm)
=1.143(m2/g)
[H]から算出した比表面積理論倍率=2.51(m2/g)/1.143(m2/g)
=2.20
表1中の「球形化評価」とは、各Al及び/又はCaが添加された試料の比表面積理論値倍率の値を、粒径(D50)が同等であるブランク(表1中の「比較試料」)の比表面積理論値倍率の値と比較し、比表面積理論値倍率の低減率が、50%以上の場合が◎であり、20%~50%の場合が〇であり、20%以内の場合が△であり、悪化した場合が×である。
表1中の「磁気特性評価」とは、各Al及び/又はCaが添加された試料の透磁率の測定値を、粒径(D50)が同等であるブランク(表1中の「比較試料」)の透磁率の測定値と比較し、透磁率の上昇率が、30%以上の場合が◎であり、10%~30%の場合が〇であり、10%以内の場合が△であり、悪化した場合が×である。
[Evaluation results]
The evaluation results are shown in Table 1.
The "specific surface area theoretical value magnification" in Table 1 was determined by the following method.
- Calculate the theoretical value of the specific surface area when the powder is a single true sphere using the following formula.
Calculating the volume of one true sphere Volume of one true sphere (μm 3 ) = 4/3 × Pi × Radius of true sphere (μm) 3 ...[A]
Calculation of surface area of one true sphere Surface area of one true sphere (μm 2 ) = 4 × Pi × radius of true sphere (μm) 2 ...[B]
Since 1 cm = 10 4 μm, 1 cm 3 =10 12 μm 3 .
Calculation of the number of perfect spheres in 1 cm 3 Number of perfect spheres in 1 cm 3 = 10 12 (μm 3 ) / [A] ... [C]
Calculation of the surface area of a true sphere in 1 cm 3 Surface area of a true sphere in 1 cm 3 = [B] × [C] (μm 2 )...[D]
Considering that the specific gravity of a true sphere is equal to the specific gravity of powder, 7.5 g/ cm3 , the specific surface area of a true sphere is:
[D] / 7.5 (μm 2 /g)... [E].
Since 1 m 2 = 10 12 μm 2 ,
[E] / 10 12 (m 2 /g)...[F] The specific surface area of the true sphere was determined.
・By determining [F] for each particle size, the relationship between the specific surface area and the particle size (diameter of a true sphere) is
The following relationship was obtained: specific surface area of a true sphere (m 2 /g)=0.8/particle size (μm)...[G].
- The theoretical specific surface area magnification was calculated using the following formula.
Specific surface area theoretical magnification = Actual measurement value / Theoretical value calculated from [G] ...[H]
[Calculation example-Blank-1 in Table 1]
Theoretical value calculated from [G] = 0.8/0.7 (μm)
=1.143 (m 2 /g)
Specific surface area theoretical magnification calculated from [H] = 2.51 (m 2 /g) / 1.143 (m 2 /g)
=2.20
"Spheroidization evaluation" in Table 1 refers to the value of the theoretical specific surface area magnification of each Al and/or Ca-added sample to a blank with the same particle size (D50) ("Comparison evaluation" in Table 1). Compared to the value of the theoretical specific surface area magnification of the sample), if the reduction rate of the theoretical specific surface area magnification is 50% or more, it is ◎, and if it is 20% to 50%, it is ○, and within 20%. A case of △ is given, and a case of deterioration is given a ×.
"Magnetic property evaluation" in Table 1 refers to the measured value of magnetic permeability of each Al and/or Ca-added sample to a blank with the same particle size (D50) ("comparative sample" in Table 1). ), when the increase rate of magnetic permeability is 30% or more, it is ◎, when it is 10% to 30%, it is ○, and when it is within 10%, it is △, If the situation worsens, it is marked as ×.
表1に示されるように、実施例に係る鉄基金属ガラス合金粉末は、ブランク及び比較例に係る鉄基金属ガラス合金粉末に比べ、比表面積が低下し、より真球に近い粉末の形状を有していることから、粉末の形状が改善しており、また、充填率が向上していることから、流動性が向上していることが分かる。
さらに、実施例に係る鉄基金属ガラス合金粉末は、抵抗率及び透磁率が向上している。すなわち、本発明の鉄基金属ガラス合金粉末は、優れた磁気特性を有しており、各種電子部品の圧粉成型用材料等として優れた特性を有していることが言える。
表1に示されるように、本発明は、粉末の粒径(D50)に依存せず、鉄基金属ガラス合金粉末に高い流動性と磁気特性を付与する効果を奏している。また、組成が異なる粉末に対しても、同様に、高い流動性と磁気特性を付与することが分かる。すなわち、他の組成を有する鉄基金属ガラス合金粉末であっても本願実施例に示される効果と同様の効果が得られることが分かる。
As shown in Table 1, the iron-based metallic glass alloy powder according to the example has a lower specific surface area and a powder shape closer to a true sphere than the blank and the iron-based metallic glass alloy powder according to the comparative example. It can be seen that the shape of the powder has been improved because of the fact that the powder has 100% of the powder, and the fluidity has been improved because the filling rate has been improved.
Furthermore, the iron-based metal glass alloy powder according to the example has improved resistivity and magnetic permeability. That is, it can be said that the iron-based metal glass alloy powder of the present invention has excellent magnetic properties and has excellent properties as a powder compacting material for various electronic parts.
As shown in Table 1, the present invention is effective in imparting high fluidity and magnetic properties to iron-based metal glass alloy powder, regardless of the particle size (D50) of the powder. Furthermore, it can be seen that high fluidity and magnetic properties are similarly imparted to powders having different compositions. That is, it can be seen that the same effects as those shown in the Examples of the present application can be obtained even with iron-based metal glass alloy powders having other compositions.
図1は実施例44に、図3は実施例46係る鉄基金属ガラス合金粉末の走査型電子顕微鏡写真であり、図2はブランク2に、図4はブランク4に係るAl及びCaが添加されていない鉄基金属ガラス合金粉末の走査型電子顕微鏡写真である。
図1及び図2、図3及び図4との比較から明らかなように、実施例に係る鉄基金属ガラス合金粉末はブランクの鉄基金属ガラス合金粉末に比べ、明らかに真球に近い形状を有しており、表面の起伏が少なく平滑化されているおり、明らかに異なる形状を有している。表1に示される粉末物性及び磁気物性を向上は、この図1から図4に示される形状及び表面状態の変化によるものということができる。
FIG. 1 is a scanning electron micrograph of the iron-based metal glass alloy powder according to Example 44, and FIG. 3 is a scanning electron micrograph of the iron-based metal glass alloy powder according to Example 46. FIG. This is a scanning electron micrograph of an iron-based metal glass alloy powder.
As is clear from the comparison with FIGS. 1, 2, 3, and 4, the iron-based metal glass alloy powder according to the example has a shape that is clearly closer to a true sphere than the blank iron-based metal glass alloy powder. It has a smooth surface with few undulations, and has a clearly different shape. The improvement in the powder physical properties and magnetic properties shown in Table 1 can be attributed to the changes in the shape and surface condition shown in FIGS. 1 to 4.
Claims (6)
(Fe1-s-tCosNit)100-x-y {(SiaBb)m(PcCd)n}x(M1)y
[式中、Fe、Co及びNiの組成比率(原子%)が、
19≦x≦22、
0≦y≦6.0、
0≦s≦0.35、
0≦t≦0.35、及び
s+t≦0.35であり、
Si、B、P及びCの組成比率(原子%)が、
(0.5:1)≦(m:n)≦(6:1)、
(2.5:7.5)≦(a:b)≦(5.5:4.5)及び
(5.5:4.5)≦(c:d)≦(9.5:0.5)であり、
M1が、Nb又はMoである]
で表される組成を有する原料鉄基金属ガラス合金粉末に対し、Al及びCaが添加されている鉄基金属ガラス合金粉末であり、
Al及びCaの含有量が、鉄基金属ガラス合金粉末の全重量に対して、
Al:0.05~2重量%、及び
Ca:0.001~0.027重量%
である、鉄基金属ガラス合金粉末。 Composition formula below:
(Fe 1-st Co s Ni t ) 100-x- y { ( Sia B b ) m (P c C d ) n } x (M1) y
[In the formula, the composition ratio (atomic %) of Fe, Co and Ni is
19≦x≦22,
0≦y≦6.0,
0≦s≦0.35,
0≦t≦0.35, and s+t≦0.35,
The composition ratio (atomic %) of Si, B, P and C is
(0.5:1)≦(m:n)≦(6:1),
(2.5:7.5)≦(a:b)≦(5.5:4.5) and (5.5:4.5)≦(c:d)≦(9.5:0.5 ) and
M1 is Nb or Mo]
An iron-based metal glass alloy powder to which Al and Ca are added to a raw iron-based metal glass alloy powder having a composition represented by :
The content of Al and Ca is based on the total weight of the iron-based metal glass alloy powder,
Al: 0.05 to 2% by weight, and Ca: 0.001 to 0.027% by weight
Iron- based metal glass alloy powder.
(Fe1-s-tCosNit)100-x-y {(SiaBb)m(PcCd)n}x(M1)y
[式中、Fe、Co及びNiの組成比率(原子%、)が、
19≦x≦22、
0≦y≦6.0、
0≦s≦0.35、
0≦t≦0.35、及び
s+t≦0.35であり、
Si、B、P及びCの組成比率(原子%)が、
(0.5:1)≦(m:n)≦(6:1)、
(2.5:7.5)≦(a:b)≦(5.5:4.5)及び
(5.5:4.5)≦(c:d)≦(9.5:0.5)であり、
M1が、Nb又はMoである]
で表される組成を有する原料鉄基金属ガラス合金粉末に対し、Caが添加されている鉄基金属ガラス合金粉末であり、
Caの含有量が、鉄基金属ガラス合金粉末の全重量に対して、0.001~0.027重量%である、鉄基金属ガラス合金粉末。 Composition formula below:
(Fe 1-st Co s Ni t ) 100-x- y { ( Sia B b ) m (P c C d ) n } x (M1) y
[In the formula, the composition ratio (atomic %) of Fe, Co and Ni is
19≦x≦22,
0≦y≦6.0,
0≦s≦0.35,
0≦t≦0.35, and s+t≦0.35,
The composition ratio (atomic %) of Si, B, P and C is
(0.5:1)≦(m:n)≦(6:1),
(2.5:7.5)≦(a:b)≦(5.5:4.5) and (5.5:4.5)≦(c:d)≦(9.5:0.5 ) and
M1 is Nb or Mo]
An iron-based metal glass alloy powder in which Ca is added to a raw iron-based metal glass alloy powder having a composition represented by :
An iron-based metallic glass alloy powder having a Ca content of 0.001 to 0.027% by weight based on the total weight of the iron-based metallic glass alloy powder.
Al:0.05~2重量%、及び
Ca:0.001~0.025重量%
である、請求項1に記載の鉄基金属ガラス合金粉末。 The content of Al and Ca is based on the total weight of the iron-based metal glass alloy powder,
Al: 0.05 to 2% by weight, and Ca: 0.001 to 0.025% by weight
The iron-based metal glass alloy powder according to claim 1 .
Al:0.08~1.5重量%、及び
Ca:0.0015~0.025重量%
である、請求項3に記載の鉄基金属ガラス合金粉末。 The content of Al and Ca is based on the total weight of the iron-based metal glass alloy powder,
Al: 0.08 to 1.5% by weight, and Ca: 0.0015 to 0.025% by weight
The iron-based metal glass alloy powder according to claim 3.
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