JP7369569B2 - Actuator and actuator manufacturing method - Google Patents

Description

The present invention relates to an actuator that generates vibration and a method of manufacturing the same.

Patent Document 1 discloses an actuator that generates vibrations. The actuator of Patent Document 1 includes a support body, a movable body, and a magnetic drive mechanism that moves the movable body relative to the support body. The magnetic drive mechanism includes a coil and a magnet. One of the coil and magnet is placed on the support, and the other of the coil and magnet is placed on the movable body. The support body and the movable body are connected by a connecting body having at least one of elasticity and viscoelasticity.

In the actuator of Patent Document 1, a gel-like damper member such as silicone gel is used as the connection body. The gel-like damper member is cut into a rectangular shape and is placed at a location where the support body and the movable body face each other. When the movable body vibrates relative to the support, the gel damper member deforms in the shear direction.

JP 2019-13094 Publication

When using a gel-like damper member as a connecting body, it is a challenge to balance the deformability and durability of the gel-like damper member. For example, a gel-like damper member made of silicone gel that has deformation characteristics (spring constant) that can output large vibrations at low frequencies is brittle and easily broken. When a gel-like damper member has a scratch on its surface, the scratch grows and is easily broken, but a brittle gel-like damper member is easily damaged. Particularly, areas where stress is concentrated are more prone to scratches due to fatigue deterioration. Therefore, the durability of the gel damper member is low.

In view of the above problems, an object of the present invention is to improve the durability of a gel-like damper member while ensuring its deformation characteristics.

In order to solve the above problems, the actuator of the present invention includes a support body, a movable body, a gel damper member connecting the support body and the movable body, and a gel-like damper member that connects the movable body with respect to the support body. a magnetic drive mechanism for moving the gel-like damper member, the gel-like damper member includes a gel-like member and a coating layer covering a surface of the gel-like member, the coating layer covering at least an exposed surface of the gel-like damper member. The elastic modulus of the coating layer is smaller than the elastic modulus of the gel-like member.

According to the present invention, the gel-like damper member that connects the support body and the movable body is a member in which a coating layer is formed on the surface of the gel-like member. The coating layer is provided at least on the exposed surface of the gel damper member. In this way, if the exposed surface of the gel-like member is coated, it is possible to suppress the occurrence of scratches on the gel-like member, and even if the scratches are formed before coating, the growth of the scratches can be suppressed. Furthermore, since the coating layer has a smaller elastic modulus and is easier to stretch than the gel-like member, it is possible to prevent the coating layer from interfering with the deformation of the gel-like member. Therefore, since the influence of the coating layer on the deformation characteristics of the gel-like damper member is small, durability can be increased while ensuring the deformation characteristics of the gel-like damper member.

In the present invention, it is preferable that the amount of strain at the elastic limit of the coating layer is greater than the amount of strain at the elastic limit of the gel-like member. In this way, when the gel-like damper member is deformed, the coating layer is more difficult to break than the gel-like member. Therefore, durability can be increased while ensuring the deformability of the gel-like damper member.

In the present invention, it is preferable that the thickness of the coating layer is 200 μm or less. Further, more preferably, the thickness of the coating layer is 100 μm or less. By reducing the thickness of the coating layer in this manner, the influence of the coating layer on the deformation characteristics of the gel-like damper member can be reduced.

In the present invention, the coating layer may be made of rubber. For example, by using a coating material such as silicone rubber, acrylic rubber, or urethane rubber, it is possible to form a coating layer that stretches easily and is difficult to break.

In the present invention, the gel-like member is provided on a first frame member provided on one of the support body and the movable body, and on the other side of the support body and the movable body, and on the outer peripheral side of the first frame member. The coating layer is formed in a radial gap with a second frame member to be disposed, and the coating layer protrudes from the surface of the gel-like member to the surface of the first frame member, and the coating layer protrudes from the surface of the gel-like member to the surface of the first frame member. It may protrude onto the surface of the second frame member. In this way, when directly molding the gel-like member between the first frame member and the second frame member, the coating layer is applied from the surface of the gel-like member to the surface of the first frame member and the surface of the second frame member. By causing the gel-like member to protrude, the end portion of the gel-like member can be protected. Therefore, the durability of the gel damper member can be improved.

Next, the present invention includes a support and a movable body, a gel-like damper member that connects the support and the movable body, and a magnetic drive mechanism that moves the movable body relative to the support. A method for manufacturing an actuator comprising: a molding step of molding a large gel-like member larger than the gel-like damper member from a gel material; a cutting step of cutting the large-sized gel-like member to obtain a gel-like member; forming a coating layer on at least a cut surface of the shaped member to obtain the gel-like damper member; and forming the gel-like damper member so that the surface on which the coating layer is formed is an exposed surface. and an assembly step of arranging the supporting body and connecting the movable body with the gel-like damper member.

In the present invention, when a large gel-like member is cut and used as a gel-like damper member, a coating layer is formed on the cut surface of the gel-like member, so even if the end surface quality of the cut surface is poor, scratches may occur on the cut surface. and growth can be suppressed. Therefore, the durability of the gel damper member can be improved. Furthermore, by forming a coating layer on the surface of the gel-like member, the gel-like member becomes easier to handle. Therefore, the actuator can be manufactured easily.

According to the present invention, the gel-like damper member that connects the support body and the movable body is a member in which a coating layer is formed on the surface of the gel-like member. The coating layer is provided at least on the exposed surface of the gel damper member. In this way, if the exposed surface of the gel-like member is coated, it is possible to suppress the occurrence of scratches on the gel-like member, and even if the scratches are formed before coating, the growth of the scratches can be suppressed. Furthermore, since the coating layer has a smaller elastic modulus and is easier to stretch than the gel-like member, it is possible to prevent the coating layer from interfering with the deformation of the gel-like member. Therefore, since the influence of the coating layer on the deformation characteristics of the gel-like damper member is small, durability can be increased while ensuring the deformation characteristics of the gel-like damper member.

FIG. 1 is a perspective view of an actuator according to Embodiment 1 of the present invention. FIG. 2 is a cross-sectional view of the actuator of Embodiment 1. FIG. 2 is an exploded perspective view of the actuator of Embodiment 1. FIG. 3 is an exploded perspective view of the magnetic drive mechanism, yoke, and holder of the actuator of Embodiment 1. FIG. FIG. 3 is an explanatory diagram schematically showing a part of the method for manufacturing the actuator of Embodiment 1. FIG. 3 is a cross-sectional view of an actuator according to Embodiment 2 of the present invention. FIG. 7 is an explanatory diagram schematically showing a part of a method for manufacturing an actuator according to a second embodiment.

Embodiments of the present invention will be described below with reference to the drawings. The actuators of the first and second embodiments include a support 2 and a movable body 3, a magnetic drive mechanism 6 that moves the movable body 3 relative to the support 2, and a gel-like structure that connects the support 2 and the movable body 3. It has a damper member 9. The magnetic drive mechanism 6 has a coil 7 and a magnet 8. The magnetic drive mechanism 6 has a mode in which the coil 7 is provided on the support body 2 side and a magnet 8 on the movable body 3 side, and a mode in which the magnet 8 is provided on the support body 2 side and the coil 7 is movable. An aspect provided on the side of the body 3 can be adopted. The following description will focus on an embodiment in which the coil 7 is provided on the support body 2 side and the magnet 8 is provided on the movable body 3 side.

The gel-like damper member 9 includes a gel-like member 90 and a coating layer 95 formed on the surface of the gel-like member 90. The elastic modulus of the coating layer 95 is smaller than that of the gel-like member 90. Further, the amount of strain at the elastic limit point of the coating layer 95 is greater than the amount of strain at the elastic limit point of the gel-like member 90. Gel-like member 90 and coating layer 95 are formed to satisfy these conditions.

In the first and second embodiments, the gel-like member 90 is a silicone gel with a penetration degree of 10 degrees to 110 degrees. Penetration is defined in JIS-K-2207 and JIS-K-2220, and the smaller the value, the harder it is. The gel-like damper member 9 has linear or non-linear expansion and contraction characteristics depending on the direction of expansion and contraction. For example, when the gel-like damper member 9 is compressed and deformed by being pressed in its thickness direction, the gel-like damper member 9 has an elastic property in which the nonlinear component is larger than the linear component. On the other hand, when it is stretched by being pulled in the thickness direction, it has a stretching characteristic in which the linear component is larger than the nonlinear component. Further, when the gel damper member 9 is deformed in a direction intersecting the thickness direction (shear direction), the deformation is in the direction of stretching and elongation, so it has a deformation characteristic in which the linear component is larger than the nonlinear component.

[Embodiment 1]
(overall structure)
FIG. 1 is a perspective view of an actuator 1A according to Embodiment 1 of the present invention. FIG. 2 is a sectional view of the actuator 1A of the first embodiment. FIG. 3 is an exploded perspective view of the actuator 1A of the first embodiment. In the first embodiment, the first direction Z, the second direction X, and the third direction Y are directions orthogonal to each other. Further, X1 is attached to one side in the second direction X, X2 is attached to the other side in the second direction X, Y1 is attached to one side in the third direction Y, and Y2 is attached to the other side in the third direction Y. , Z1 is attached to one side in the first direction Z, and Z2 is attached to the other side in the first direction Z.

As shown in FIGS. 1 and 2, the actuator 1A of the first embodiment has an overall rectangular parallelepiped shape in which the dimension in the second direction X is larger than the dimension in the third direction Y. As shown in FIGS. In the first embodiment, the movable body 3 vibrates in the second direction X with respect to the support body 2. When the movable body 3 vibrates in the second direction X, the center of gravity of the actuator 1A changes in the second direction X. Therefore, the user can experience the vibration in the second direction X. Note that in the first embodiment, it is also possible to adopt a mode in which the movable body 3 is driven in the third direction Y.

(Support)
As shown in FIGS. 1, 2, and 3, in the actuator 1A of the first embodiment, the support body 2 has a cover 11 and a holder 60, and the movable body shown in FIG. 3 and a magnetic drive mechanism 6 are arranged. The cover 11 includes a first cover member 16 located on one side Z1 in the first direction Z, and a second cover member 17 overlapping the first cover member 16 from the other side Z2 in the first direction Z. By fastening the first cover member 16, the holder 60, and the second cover member 17 in the first direction Z with the screws 18 arranged at one diagonal position, the support body 2 is stacked in the first direction Z. It is formed. Incidentally, at the other diagonal position of the support body 2, a screw (not shown) is disposed for fixing the actuator 1A to the frame of the device when the actuator 1A is mounted on the device.

A recess 160 of the first cover member 16 , a recess 635 of the holder 60 , and a recess of the second cover member 17 are provided on the side surface of the first cover member 16 , the holder 60 , and the second cover member 17 on one side Y1 in the third direction Y. 170 is formed, and the wiring board 15 is fixed here. At this time, the protrusion 636 formed in the recess 635 of the holder 60 is fitted into the hole 155 of the wiring board 15 to position the wiring board 15, and then the wiring board 15 is fixed with an adhesive or the like.

As shown in FIGS. 2 and 3, the first cover member 16 is formed with a substantially rectangular recess 165 that opens toward the other side Z2 in the first direction Z. As shown in FIGS. Furthermore, two recesses 166 and 167 are formed in the bottom of the recess 165 and are lined up in the second direction X. As shown in FIG. 3, the recess 165 has a first wall 161 located on one side X1 in the second direction X, a second wall 162 located on the other side X2 in the second direction X, and a third wall 162 in the third direction. It is surrounded by a third wall 163 located on one side Y1 in the Y direction and a fourth wall 164 located on the other side Y2 in the third direction Y. A recess 160 extending along the second direction X is formed on the outer surface of the third wall 163 .

The second cover member 17 is formed substantially symmetrically with respect to the first cover member 16 in the first direction Z. As shown in FIG. 2, a substantially rectangular recess 175 that opens toward one side Z1 in the first direction Z is formed in the second cover member 17. Furthermore, two recesses 176 and 177 are formed in the bottom of the recess 175 and are lined up in the second direction X. As shown in FIG. 3, in the second cover member 17, the recess 175 has a first wall 171 located on one side X1 in the second direction X and a second wall 171 located on the other side X2 in the second direction X. It is surrounded by a wall 172, a third wall 173 located on one side Y1 in the third direction Y, and a fourth wall 174 located on the other side Y2 in the third direction Y. A recess 170 extending along the second direction X is formed on the outer surface of the third wall portion 173.

(Magnetic drive mechanism)
FIG. 4 is an exploded perspective view of the magnetic drive mechanism 6, yoke 85, and holder 60 of the actuator 1A of the first embodiment. As shown in FIGS. 2 and 4, the magnetic drive mechanism 6 includes a coil 7 and a magnet 8 facing the coil 7 in the first direction Z. Two coils 7 are arranged in parallel in the second direction X. The coil 7 is an oval air-core coil whose long side 701 (effective portion) extends in the third direction Y, and is a flat coil whose thickness direction is the first direction Z. Coil 7 is held by holder 60.

(holder)
As shown in FIGS. 2 and 4, the holder 60 is formed such that two coil holding holes 66 and 67 are arranged in parallel in the second direction X, and the coil 7 is arranged in the coil holding holes 66 and 67. There is. The coil holding holes 66 and 67 are through holes, and receiving portions 661 and 671 are formed at both ends in the third direction Y. Therefore, when the coil 7 is attached to the coil holding holes 66 and 67 from the other side Z2 in the first direction Z, the short side 702 (ineffective part) of the coil 7 is attached to the one side Z1 in the first direction Z by the receiving parts 661 and 671. Supported. In this state, the coil 7 is fixed to the holder 60 with adhesive or the like.

The holder 60 has one side X1 in the second direction X, the other side X2 in the second direction X, one side Y1 in the third direction Y, and a third side with respect to the portion where the coil holding holes 66 and 67 are formed. The other side Y2 in the direction Y includes a first wall 610, a second wall 620, a third wall 630, and a fourth wall 640. A first opening 601 is formed between the coil holding hole 66 and the first wall 610, and a second opening 602 is formed between the coil holding hole 67 and the second wall 620. The first opening 601 and the second opening 602 penetrate the holder 60 in the first direction Z.

A recess 635 extending along the second direction A convex portion 636 is formed. Four guide grooves 637 are formed in the third wall portion 630, extending from the coil holding holes 66 and 67 to the outer surface of the third wall portion 630 (bottom surface of the recess 635). The winding start end and the winding end end of the conducting wire 75 constituting the coil 7 are pulled out to the outside of the cover 11 through the guide groove 637, and are passed through the notch 150 of the wiring board 15 to the land 151 of the wiring board 15. be soldered. As a result, the two coils 7 are electrically connected in series. Note that the two coils 7 may be electrically connected in parallel.

(movable body)
As shown in FIGS. 2 and 4, the movable body 3 includes a magnet 8 and a yoke 85 that holds the magnet 8. The yoke 85 includes a first yoke 86 including a first plate portion 860 that faces the coil 7 on one side Z1 in the first direction Z, and a first yoke 86 that faces the coil 7 on the other side Z2 in the first direction Z. The second yoke 87 includes a second plate portion 870. The magnet 8 is held by the surface of the first plate portion 860 of the first yoke 86 facing the coil 7 and the surface of the second plate portion 870 of the second yoke 87 facing the coil 7, so that the magnet 8 is attached to the coil 7 in a first direction. They are facing each other at Z. Note that it is also possible to adopt a configuration in which the magnet 8 is held only on at least one of the first plate section 860 and the second plate section 870.

In the first embodiment, the magnet 8 is a magnet 81 fixed to the surface of the first plate part 860 of the first yoke 86 facing the coil 7 by a method such as adhesive, and a second plate part 870 of the second yoke 87. A magnet 82 is provided on the surface facing the coil 7 and fixed by a method such as adhesive. In this state, the magnet 81 faces the long side 701 of the coil 7 on one side Z1 in the first direction Z, and the magnet 82 faces the long side 701 of the coil 7 on the other side Z2 in the first direction Z. There is. The magnets 81 and 82 are each polarized in the thickness direction (first direction Z), and the surface of the magnet 81 facing the coil 7 and the surface of the magnet 82 facing the coil 7 are polarized to different polarities. It is magnetized.

The first yoke 86 extends from the first plate part 860 toward the other side Z2 in the first direction Z to a position overlapping with the second yoke 87, and has a first connecting plate part 861 connected to the second yoke 87. , the second yoke 87 extends from the first plate part 860 on the opposite side of the magnet 81 from the first connecting plate part 861 toward the other side Z2 in the first direction Z to a position overlapping with the second yoke 87. and a second connecting plate portion 862 connected to the second connecting plate portion 862. The first connecting plate part 861 and the second connecting plate part 862 are connected to the end of the second yoke 87 by welding. The first connecting plate portion 861 extends from one side X1 in the second direction X with respect to the coil 7 through the first opening 601 of the holder 60 toward the other side Z2 in the first direction Z, and extends toward the other side Z2 in the first direction Z. The connecting plate portion 862 extends on the other side Z2 in the second direction X with respect to the coil 7 through the second opening 602 of the holder 60 toward the other side Z2 in the first direction Z.

(gel damper member)
As shown in FIG. 2, a gel damper member 9 is disposed at a location where the support body 2 and the movable body 3 face each other in the first direction Z. In the first embodiment, as the gel damper member 9, a first gel damper member 91 is arranged at a location where the first yoke 86 of the movable body 3 and the first cover member 16 of the support body 2 face each other in the first direction Z. A second gel-like damper member 92 is disposed at a location where the second yoke 87 of the movable body 3 and the second cover member 17 of the support body 2 face each other in the first direction Z. More specifically, two first gel-like damper members 91 are disposed between the first plate portion 860 of the first yoke 86 and the bottoms of the recesses 166 and 167 of the first cover member 16, and the second gel-like damper members 91 are Two shaped damper members 92 are arranged between the second plate portion 870 of the second yoke 87 and the bottoms of the recesses 176 and 177 of the second cover member 17.

The first gel damper member 91 and the second gel damper member 92 are arranged with the first direction Z as the thickness direction, and extend in the second direction X and the third direction Y. The first gel-like damper member 91 and the second gel-like damper member 92 are bonded to the support body 2 on the surface in contact with the support body 2, and are bonded to the movable body 3 on the surface in contact with the movable body 3.

The gel-like damper member 9 is a member in which a coating layer 95 is formed on a part of the surface of a gel-like member 90 made of silicone gel. The coating layer 95 is formed on at least four surfaces of the gel damper member 9: the surface on the X1 side, the surface on the X2 side, the surface on the Y1 side, and the surface on the Y2 side. The gel-like damper member 9 is arranged so that four surfaces, the surface on the X1 side, the surface on the X2 side, the surface on the Y1 side, and the surface on the Y2 side, are exposed surfaces 96 that are not fixed to other members. Therefore, the coating layer 95 is formed over the entire exposed surface 96. Further, in the first embodiment, the coating layer 95 is formed on either the Z1 side surface or the Z2 side surface of the gel damper member 9 in addition to the above four surfaces.

The first gel-like damper member 91 has a coating layer 95 formed on the surface on the X1 side, the surface on the X2 side, the surface on the Y1 side, the surface on the Y2 side, and the surface on the Z2 side. At the Z1 side end of the first gel damper member 91, the gel member 90 is directly bonded to the first cover member 16. On the other hand, at the end of the first gel-like damper member 91 on the Z2 side, the gel-like member 90 is adhered to the first plate portion 860 with a coating layer 95 interposed therebetween.

The second gel-like damper member 92 has a coating layer 95 formed on the surface on the X1 side, the surface on the X2 side, the surface on the Y1 side, the surface on the Y2 side, and the surface on the Z1 side. At the Z2 side end of the second gel damper member 92, the gel member 90 is directly bonded to the second cover member 17. On the other hand, at the end of the second gel-like damper member 92 on the Z1 side, the gel-like member 90 is adhered to the second plate portion 870 with a coating layer 95 interposed therebetween. Note that the first gel-like damper member 91 and the second gel-like damper member 92 can also be used in opposite directions in the first direction Z.

When the movable body 3 moves in the second direction X, the gel damper member 9 deforms in the shearing direction. Since the gel damper member 9 has linear and nonlinear deformation characteristics, the gel damper member 9 can suppress resonance when the movable body 3 is vibrated. Moreover, when the gel-like damper member 9 deforms in the shear direction, it has a deformation characteristic in which the linear component is larger than the nonlinear component. Therefore, when the movable body 3 vibrates in the second direction X, by using the spring element of the gel damper member 9 in the shear direction, it is possible to improve the reproducibility of the vibration acceleration with respect to the input signal.

Moreover, the gel-like damper member 9 is attached so as to expand and contract in the first direction Z between the movable body 3 and the support body 2. When the gel-like damper member 9 deforms in the direction of collapse, it has an elastic characteristic in which the nonlinear component is larger than the linear component. Therefore, when the movable body 3 tries to move in the first direction Z, the spring constant of the gel damper member 9 is larger than the spring constant when the movable body 3 moves in the second direction X, so the gel damper member 9 can be suppressed from being significantly deformed in the first direction Z. Therefore, it is possible to suppress a large change in the gap between the movable body 3 and the support body 2.

(Actuator manufacturing method)
FIG. 5 is an explanatory diagram schematically showing a part of the method for manufacturing the actuator 1A of the first embodiment. The manufacturing process of the actuator 1A of the first embodiment includes the manufacturing process of the gel-like damper member 9 shown in FIG. FIG. 5(a) shows a molding step, FIG. 5(b) shows a cutting step, and FIG. 5(c) shows a coating layer forming step. As shown in FIG. 5(a), in the molding step, a sheet-like gel 97 is molded by filling a mold with gel material and heating and curing it. The sheet-like gel 97 is a large gel-like member larger than the gel-like damper member 9.

Next, in the cutting step, as shown in FIG. 5(b), the sheet-like gel 97 taken out from the mold is cut. For example, when the mold is composed of a first mold and a second mold, the second mold is removed from the first mold after molding, and the sheet-like gel 97 is cut on the support surface 98 provided on the first mold. do. As a result, a rectangular gel member 90 having a size to be used as the gel damper member 9 is obtained. Each gel-like member 90 has cut surfaces 99 at four end faces facing in a direction perpendicular to the thickness direction.

Subsequently, in the coating layer forming step, a coating material is sprayed onto the surface of the gel-like member 90 to form a coating layer 95, as shown in FIG. 5(c). Thereby, a gel-like damper member 9 is obtained. A coating layer 95 is formed on five surfaces of the gel-like damper member 9 except for the surface in contact with the support surface 98 . Therefore, the coating layer 95 is formed over the entire range of the four end faces, which are the cut surfaces 99. Note that it is also possible to adopt a configuration in which the coating layer 95 is formed only on the four end faces, which are the cut surfaces 99.

In the coating layer forming step, when forming the coating layer 95, the amount of coating material sprayed is adjusted so that the film thickness is 200 μm or less. Further, the amount of coating material sprayed is adjusted so that the variation in film thickness is ±30 μm or less. Here, the thickness of the coating layer 95 is more preferably 100 μm or less. For example, the thickness of the coating layer 95 can be 50 μm.

As the coating material, for example, silicone rubber, acrylic rubber, urethane rubber, etc. are used. By using silicone gel as the gel-like member 90 and using a film of a rubber elastic body such as silicone rubber, acrylic rubber, or urethane rubber as the coating layer 95, the elastic modulus of the coating layer 95 can be made lower than the elastic modulus of the gel-like member 90. Can be made smaller. Furthermore, the condition that the amount of strain at the elastic limit point of the coating layer 95 is greater than the amount of strain at the elastic limit point of the gel-like member 90 can be achieved.

After the gel damper member 9 is completed, a step of assembling the actuator 1A is performed. At this time, the completed gel-like damper member 9 is used to connect the support body 2 and the movable body 3. In the first embodiment, the gel damper member 9 is arranged at a location where the support body 2 and the movable body 3 face each other in the first direction Z. At this time, the thickness direction of the gel-like damper member 9 and the first direction Z are made to coincide with each other. As a result, the gel damper member 9 is arranged so that the entire range of the four exposed surfaces 96 is covered with the coating layer 95.

(Main effects of Embodiment 1)
As explained above, the actuator 1A of the first embodiment includes the support 2, the movable body 3, the gel damper member 9 connecting the support 2 and the movable body 3, and the movable body 3 connected to the support 2. It has a magnetic drive mechanism 6 that moves it relative to the other. The gel damper member 9 (first gel damper member 91 and second gel damper member 92) includes a gel member 90 and a coating layer 95 covering the surface of the gel member 90. The coating layer 95 is disposed at least on the exposed surface 96 of the gel-like damper member 9 , and the elastic modulus of the coating layer 95 is smaller than the elastic modulus of the gel-like member 90 .

In the first embodiment, the exposed surface 96 of the gel damper member 9 is coated in this way. Therefore, the occurrence of scratches on the surface of the gel-like member 90 can be suppressed, and even if scratches are formed before coating, the scratches are filled in by the coating material, so that growth of the scratches can be suppressed. Therefore, destruction of the gel damper member 9 can be suppressed. Furthermore, the coating layer 95 has a smaller elastic modulus and is easier to stretch than the gel-like member 90. Therefore, the influence of the coating layer 95 on the deformation characteristics of the gel-like damper member 9 is small, so that the durability can be increased while ensuring the deformation characteristics of the gel-like damper member 9.

Furthermore, in the gel damper member 9 (the first gel damper member 91 and the second gel damper member 92) of the first embodiment, the elastic limit of the coating layer 95 is determined by the amount of strain at the elastic limit point of the gel member 90. Since the amount of strain at the point is larger, when the gel-like damper member 9 deforms following the vibration of the movable body 3, the coating layer 95 is more difficult to break than the gel-like member 90. Therefore, the durability of the gel damper member 9 is high. In the first embodiment, since the coating layer 95 is a thin film made of silicone rubber, acrylic rubber, urethane rubber, etc., the coating layer 95 is easily stretchable and difficult to break. Therefore, the above-mentioned elastic modulus condition and strain amount condition at the elastic limit point can be satisfied.

In the first embodiment, the thickness of the coating layer 95 in the gel damper member 9 (the first gel damper member 91 and the second gel damper member 92) is 200 μm or less, more preferably 100 μm or less. Further, the variation in film thickness is set to ±30 μm or less. In this way, by reducing the thickness of the coating layer 95 and making the thickness uniform, the deformation characteristics of the gel-like damper member 9 are less affected.

In the method for manufacturing the actuator 1A of Embodiment 1, when manufacturing the gel-like damper member 9 provided with the coating layer 95, a sheet-like gel 97 (large gel-like member) larger than the gel-like damper member 9 is molded from a gel material. A molding step, a cutting step of cutting the sheet-like gel 97 to obtain the gel-like member 90, and forming a coating layer 95 on at least the cut surface 99 of the cut gel-like member 90 to form the gel-like damper member 9. A coating layer 95 forming step is performed to obtain a coating layer 95. Thereafter, an assembly step is performed in which the gel damper member 9 is arranged so that the surface on which the coating layer 95 is formed is the exposed surface 96, and the support body 2 and the movable body 3 are connected by the gel damper member 9. .

As described above, in the first embodiment, when cutting the large gel-like member 90 and using it as the gel-like damper member 9, the coating layer 95 is formed on the cut surface 99 of the gel-like member 90. Therefore, even if the quality of the end surface of the cut surface 99 deteriorates, the occurrence and growth of scratches on the cut surface 99 can be suppressed. Therefore, the durability of the gel damper member 9 can be improved. Further, by forming the coating layer 95 on the surface of the gel-like member 90, the gel-like member 90 can be easily handled when assembling the actuator 1A. Therefore, the actuator 1A can be manufactured easily.

In the first embodiment, a film of the coating material is formed on at least the cut surface 99 by spraying the coating material onto the surface of the gel-like member 90 . By spraying the coating material, the coating layer 95 can be formed once on a large number of gel-like members 90, so that the gel-like damper member 9 can be formed efficiently. Further, the film thickness can be made thin and uniform. Note that a film of the coating material can also be formed on the surface of the gel-like member 90 by dipping into the coating material. This method also allows the gel-like damper member 9 to be formed efficiently.

[Embodiment 2]
(overall structure)
FIG. 6 is a cross-sectional view of an actuator 1B according to Embodiment 2 of the present invention. In the second embodiment, the axis L is the central axis of the movable body 3. Further, one side in the direction in which the axis L extends (axis L direction) is L1, and the other side in the axis L direction is L2. The actuator 1B of the second embodiment has an overall cylindrical shape extending in the axis L direction. In the second embodiment, the movable body 3 vibrates in the direction of the axis L with respect to the support body 2. The movable body 3 and the support body 2 are connected by a gel-like damper member 9 arranged in a radial gap between the movable body 3 and the support body 2.

In the second embodiment, the support body 2 surrounds the outer peripheral side of the movable body 3, the inner peripheral part of the gel damper member 9 is connected to the movable body 3, and the outer peripheral part of the gel damper member 9 is connected to the support body 2. Although a connected form will be described as an example, the present invention can also adopt a configuration in which the movable body 3 and the support body 2 are arranged interchangeably so that the movable body 3 surrounds the outer peripheral side of the support body 2. Further, in the second embodiment, the movable body 3 is connected to the support body 2 at two locations, one side (L1 side) and the other side (L2 side) in the direction of the axis L by the gel damper member 9. In the second embodiment, the gel damper member 9 disposed at the L1 end of the movable body 3 is the first gel damper member 93, and the gel damper member 9 disposed at the L2 end of the movable body 3 is the first gel damper member 93. 9 is a second gel-like damper member 94. Note that it is also possible to adopt a configuration in which the gel-like damper member 9 is arranged at one location or at three or more locations.

(Support)
The support body 2 includes a metal case 20, a first holder 40 and a second holder 50 made of resin held by the case 20, and a coil holder 70. The case 20 includes a cylindrical case 21 extending in the direction of the axis L, a first end plate 22 fixed to the L1 side end of the cylindrical case 21, and a first end plate 22 fixed to the L2 side end of the cylindrical case 21. A second end plate 23 is provided. A substrate 24 to which a coil wire is connected is fixed to the cylindrical case 21 .

The first holder 40 includes an annular portion 42 fixed to the inside of the L1 side end of the cylindrical case 21, a frame portion 45 disposed on the inner peripheral side of the annular portion 42, and an annular portion 42 and a frame portion 45. It is provided with a connecting part 46 for connecting with. The coil holder 70 includes a holder fixing part 71 fixed to the first holder 40 from the L1 side, and a coil fixing part 72 protruding from the holder fixing part 71 to the L2 side. The holder fixing portion 71 includes hooks 73 that protrude toward the L1 side from a plurality of locations spaced apart in the circumferential direction. The tip of the hook 73 is locked to the edge of the cylindrical case 21.

The second holder 50 includes a cylindrical portion 55 fixed to the inside of the L2 side end of the cylindrical case 21, a frame portion 56 disposed on the inner peripheral side of the cylindrical portion 55, and the cylindrical portion 55 and the frame portion 56. It is provided with a connecting part 57 for connecting with.

(movable body)
The movable body 3 includes a shaft 31 extending in the axis L direction at the radial center of the support body 2, a magnet 8 fixed approximately at the center of the shaft 31 in the axis L direction, and a first yoke that overlaps the magnet 8 on the L1 side. 32, and a second yoke 33 that overlaps the magnet 8 on the L2 side. The second yoke 33 includes a first magnetic plate 34 fixed to the L2 side surface of the magnet 8 by adhesive or the like, and a second magnetic plate 35 that contacts the first magnetic plate 34 from the L2 side.

Furthermore, the movable body 3 includes a first weight member 36 made of metal that contacts the first yoke 32 from the L1 side,
A second weight member 37 made of metal is provided which contacts the second yoke 33 from the L2 side. The first weight member 36 and the second weight member 37 are provided with a shaft hole into which the shaft 31 is fitted. The first weight member 36 extends in the direction of the axis L, and includes a large diameter portion 361 at the end on the L1 side. The large diameter portion 361 is arranged on the inner peripheral side of the frame portion 45 of the first holder 40 . Further, the second weight member 37 extends in the direction of the axis L, and includes a large diameter portion 371 at the end on the L2 side. The large diameter portion 371 is arranged on the inner peripheral side of the frame portion 56 of the second holder 50.

(Magnetic drive mechanism)
The magnetic drive mechanism 6 includes a coil 7 disposed on the support body 2 and a magnet 8 disposed on the movable body 3. The magnet 8 has a cylindrical shape and is magnetized to have north and south poles in the direction of the axis L. A coil fixing portion 72 provided on the coil holder 70 is arranged coaxially with the magnet 8 on the outer peripheral side of the magnet 8 . Therefore, the magnet 8 and the coil 7 are arranged coaxially. The magnetic drive mechanism 6 generates a driving force that drives the movable body 3 in the direction of the axis L by energizing the coil 7 .

(gel damper member)
In the second embodiment, the gel-like damper member 9 is disposed continuously around the entire circumference in the radial gap between the movable body 3 and the support body 2. In the second embodiment, the gel damper member 9 is arranged between the large diameter portion 361 of the first weight member 36 attached to the L1 end of the shaft 31 and the frame portion 45 of the first holder 40. The first gel-like damper member 93 and the second gel-like damper member 93 disposed between the large diameter portion 371 of the second weight member 37 attached to the L2 side end of the shaft 31 and the frame portion 56 of the second holder 50 A gel damper member 94 is provided. The first gel damper member 93 and the second gel damper member 94 are cylindrical members having a constant thickness in the radial direction, and also have a constant dimension (height) in the axis L direction.

The gel-like damper member 9 of the second embodiment is directly molded between a first frame member 901 and a second frame member 902 disposed on the outer peripheral side of the first frame member 901. As shown in FIG. 6, in the second embodiment, the large diameter portion 361 of the first weight member 36 and the large diameter portion 371 of the second weight member 37 are the first frame member 901; It is provided on the movable body 3. Furthermore, the frame portion 45 of the first holder 40 and the frame portion 56 of the second holder 50 are a second frame member 902, and the second frame member 902 is provided on the support body 2. The first gel-like damper member 93 has an inner peripheral portion fixed to the large diameter portion 361 (first frame member 901), and an outer peripheral portion fixed to the frame portion 45 (second frame member). The second gel damper member 94 has an inner peripheral portion fixed to the large diameter portion 371 (first frame member 901), and an outer peripheral portion fixed to the frame portion 56 (second frame member).

The gel damper member 9 (the first gel damper member 93 and the second gel damper member 94) of the second embodiment is a member in which a coating layer 95 is formed on a part of the surface of the gel member 90. The coating layer 95 is formed on the L1 side end surface and the L2 side end surface of the gel damper member 9. The gel-like damper member 9 has an exposed surface 96 in which the end surface on the L1 side and the end surface on the L2 side are not in contact with other members, and a coating layer 95 is formed over the entire range of the exposed surface 96.

At the end surface on the L1 side and the end surface on the L2 side of the first gel-like damper member 93, the coating layer 95 protrudes from the surface of the gel-like member 90 to the surface of the large diameter portion 361, which is the first frame member 901, and the second It protrudes onto the surface of the frame portion 45 that is the frame member 902. Similarly, on the L1-side end surface and the L2-side end surface of the second gel-like damper member 94, the coating layer 95 protrudes from the surface of the gel-like member 90 to the surface of the large diameter portion 371 that is the first frame member 901. , protrudes onto the surface of the frame portion 56, which is the second frame member 902.

The actuator 1B of the second embodiment has a magnetic drive mechanism 6 by energizing the coil 7.
As a result, the movable body 3 moves relative to the support body 2 in the direction of the axis L. When the coil 7 is de-energized, the movable body 3 returns to its original position by the returning force of the gel damper member 9. Therefore, by intermittently energizing the coil 7, the movable body 3 vibrates in the direction of the axis L. When the movable body 3 vibrates in the direction of the axis L, the gel-like damper member 9 follows the vibration of the movable body 3 and deforms in the shearing direction. In the second embodiment, as in the first embodiment, resonance when the movable body 3 is vibrated can be suppressed by the gel-like damper member 9. Further, by using a spring element in the shear direction of the gel damper member 9, it is possible to improve the reproducibility of the vibration acceleration with respect to the input signal.

Furthermore, when the movable body 3 moves in a direction (ie, radial direction) different from the vibration direction (axis L direction), the gel-like damper member 9 deforms in the direction of being crushed. Therefore, when the movable body 3 attempts to move in a direction different from the vibration direction (axis L direction), the spring constant of the gel damper member 9 is larger than the spring constant when the movable body 3 vibrates in the axis L direction. , it is difficult for the movable body 3 to move in a direction different from the vibration direction (axis L direction).

(Actuator manufacturing method)
FIG. 7 is an explanatory diagram schematically showing a part of the method for manufacturing the actuator 1B according to the second embodiment. The manufacturing process of the actuator 1B of the second embodiment includes the manufacturing process of the gel-like damper member 9 shown in FIG. 7(a) to 7(e) show a molding step of molding the gel-like member 90, and FIG. 7(f) shows a coating layer forming step of forming a coating layer 95 on the surface of the gel-like member 90. . In the molding step, a manufacturing jig 100 shown in FIG. 7(a) is used. The molding step includes a first step of assembling the first frame member 901 and the second frame member 902 to the manufacturing jig 100 (see FIG. 7(b)), and a first step of assembling the first frame member 901 and the second frame member 902 to the manufacturing jig 100. A second step of filling the gap S with the gel material 10 (see FIG. 7(c)), a third step of heating and hardening the gel material 10 (see FIG. 7(d)), and removing the gel from the manufacturing jig 100. The fourth step includes removing the first frame member 901 and the second frame member 902 together with the shaped member 90 (see FIG. 7(e)).

As described above, in the second embodiment, the first frame member 901 is formed integrally with the first weight member 36 and the second weight member 37, but in FIG. 7, the configuration of the first frame member 901 is simplified. show. Similarly, the second frame member 902 is formed integrally with the first holder 40 and the second holder 50, but FIG. 7 shows a simplified configuration of the second frame member 902.

As shown in FIG. 7A, the manufacturing jig 100 includes a circular recess 101 and a pin 102 protruding from the center of the bottom surface of the circular recess 101. As shown in FIG. As shown in FIG. 7(b), in the first step, the first frame member 901 and the second frame member 902 are brought into contact with and positioned against the manufacturing jig 100, and the first frame member 901 and the second frame member 902 An annular gap S is formed between the frame members 902. The annular gap S is formed over the entire circumference, and has a constant width in the radial direction over the entire circumference.

As shown in FIG. 7(c), in the second step, the gap S between the first frame member 901 and the second frame member 902 is filled with the gel material 10. Here, before filling the gap S with the gel material 10, a primer 13 is applied to the outer peripheral surface of the first frame member 901 and the inner peripheral surface of the second frame member 902. Note that the work of applying the primer 13 may be performed before or after assembling the first frame member 901 and the second frame member 902 to the manufacturing jig 100.

As shown in FIG. 7(d), in the third step, the gel material 10 is heated together with the manufacturing jig 100, and maintained at a specified temperature for a specified period of time to harden the gel material 10. As a result, a gel-like member 90 is formed in the gap S. When the gel material 10 is heated and cured, the portion in contact with the primer 13 reacts with the primer 13 and is fixed to the outer peripheral surface of the first frame member 901 and the inner peripheral surface of the second frame member 902. Therefore, the gel-like member 90 is fixed to the first frame member 901 and the second frame member 902 by the adhesive force of the gel-like member 90 itself without using an adhesive.

As shown in FIG. 7E, in the fourth step, the gel-like member 90 is removed from the manufacturing jig 100 together with the first frame member 901 and the second frame member 902. For example, a through hole for arranging an ejector pin is provided in the manufacturing jig 100, and the ejector pin is used to attach the gel-like member 90, the first frame member 901, and the second frame member 902 to the manufacturing jig 100. Remove from.

Subsequently, as shown in FIG. 7F, in a coating layer forming step, a coating layer 95 is formed on the L1 side end surface and the L2 side end surface of the gel-like member 90. The thickness of the coating layer 95 and the coating material are the same as in the first embodiment. At this time, the coating layer 95 is formed so as to protrude toward the first frame member 901 from the joint surface between the gel-like member 90 and the first frame member 901, and The coating layer 95 is formed so as to protrude toward the second frame member 901 side from the joint surface. Formation of the coating layer 95 can be performed by spraying a coating material as in the first embodiment. Thereby, a gel-like damper member 9 is obtained.

(Main effects of Embodiment 2)
As explained above, the actuator 1B of the first embodiment includes the support 2, the movable body 3, the gel damper member 9 connecting the support 2 and the movable body 3, and the movable body 3 connected to the support 2. It has a magnetic drive mechanism 6 that moves relative to the magnetic drive mechanism 6. The gel damper member 9 (first gel damper member 93 and second gel damper member 94) includes a gel member 90 and a coating layer 95 covering the surface of the gel member 90. The coating layer 95 is disposed at least on the exposed surface 96 of the gel-like damper member 9 , and the elastic modulus of the coating layer 95 is smaller than the elastic modulus of the gel-like member 90 .

In this way, in the actuator 1B of the second embodiment, the exposed surface 96 of the gel damper member 9 is coated, similar to the first embodiment. Therefore, the occurrence of scratches on the surface of the gel-like member 90 can be suppressed, and even if scratches are formed before coating, the scratches are filled in by the coating material, so that growth of the scratches can be suppressed. Furthermore, the coating layer 95 has a smaller elastic modulus and is easier to stretch than the gel-like member 90. Therefore, the influence of the coating layer 95 on the deformation characteristics of the gel-like damper member 9 is small, so that the durability can be increased while ensuring the deformation characteristics of the gel-like damper member 9.

Furthermore, in the gel damper member 9 (the first gel damper member 93 and the second gel damper member 94) of the second embodiment, the elastic limit of the coating layer 95 is determined by the amount of strain at the elastic limit point of the gel member 90. Since the amount of strain at the point is larger, when the gel-like damper member 9 deforms following the vibration of the movable body 3, the coating layer 95 is more difficult to break than the gel-like member 90. Therefore, the durability of the gel damper member 9 is high. In Embodiment 2, like Embodiment 1, coating layer 95 is a thin film made of silicone rubber, acrylic rubber, urethane rubber, etc., so coating layer 95 is easy to stretch and difficult to break. Therefore, the above-mentioned elastic modulus condition and strain amount condition at the elastic limit point can be satisfied.

In the second embodiment, the thickness of the coating layer 95 in the gel damper member 9 (first gel damper member 93 and second gel damper member 94) is 200 μm or less, more preferably 100 μm or less. Further, the variation in film thickness is set to ±30 μm or less. In this way, by reducing the thickness of the coating layer 95 and making the thickness uniform, the deformation characteristics of the gel-like damper member 9 are less affected.

In the gel-like damper member 9 (first gel-like damper member 93 and second gel-like damper member 94) of the second embodiment, the gel-like member 90 includes a first frame member 901 provided on the movable body 3 and a support body. 2, and is directly molded in the radial gap between the first frame member 901 and the second frame member 902 disposed on the outer peripheral side. The coating layer 95 protrudes from the surface of the gel-like member 90 to the surface of the first frame member 901 at each position of the L1 side end face and the L2 side end face of the gel-like member 90, and also extends from the surface of the gel-like member 90. It protrudes onto the surface of the second frame member 902.

In this way, when directly molding the gel-like member 90 between the first frame member 901 and the second frame member 902, from the surface of the gel-like member 90 to the surface of the first frame member 901 and the second frame member By forming the coating layer 95 so as to protrude from the surface of the gel member 902, the end portions of the gel member 90 where stress tends to concentrate can be protected. Therefore, the durability of the gel damper member 9 can be improved.

1A, 1B... Actuator, 2... Support body, 3... Movable body, 6... Magnetic drive mechanism, 7... Coil, 8... Magnet, 9... Gel damper member, 10... Gel material, 11... Cover, 13... Primer, DESCRIPTION OF SYMBOLS 15... Wiring board, 16... First cover member, 17... Second cover member, 18... Screw, 20... Case, 21... Cylindrical case, 22... First end plate, 23... Second end plate, 24... Board , 31... shaft, 32... first yoke, 33... second yoke, 34... first magnetic plate, 35... second magnetic plate, 36... first weight member, 37... second weight member, 40... first holder , 42... Annular part, 45... Frame part, 46... Connection part, 50... Second holder, 55... Cylindrical part, 56... Frame part, 57... Connection part, 60... Holder, 66, 67... Coil holding hole, 70 ...Coil holder, 71...Holder fixing part, 72...Coil fixing part, 73...Hook, 75...Conductor, 81, 82...Magnet, 85...Yoke, 86...First yoke, 87...Second yoke, 90...Gel state Member, 91... First gel damper member, 92... Second gel damper member, 93... First gel damper member, 94... First gel damper member, 95... Coating layer, 96... Exposed surface, 97... Sheet-like gel (large gel-like member), 98... Supporting surface, 99... Cutting surface, 100... Manufacturing jig, 101... Circular recess, 102... Pin, 150... Notch, 151... Land, 155... Hole, 160 ... recess, 161 ... first wall, 162 ... second wall, 163 ... third wall, 164 ... fourth wall, 165 ... recess, 166, 167 ... recess, 170 ... recess, 171 ... first wall 172...Second wall part, 173...Third wall part, 174...Fourth wall part, 175...Recessed part, 176, 177...Recessed part, 361...Large diameter part, 371...Large diameter part, 601...Opening part, 602... Opening, 610... First wall, 620... Second wall, 630... Third wall, 635... Concave, 636... Convex, 637... Guide groove, 640... Fourth wall, 661, 671 ...Receiving part, 701... Long side, 702... Short side, 860... First plate part, 861... First connecting plate part, 862... Second connecting plate part, 870... Second plate part, 901... First frame member , 902...Second frame member, L...Axis, S...Gap, X...Second direction, Y...Third direction, Z...First direction

Claims (7)

a support and
A movable body,
a gel-like damper member connecting the support body and the movable body;
a magnetic drive mechanism that moves the movable body relative to the support body,
The gel-like damper member includes a gel-like member and a coating layer covering a surface of the gel-like member,
The coating layer is provided at least on an exposed surface of the gel damper member,
An actuator characterized in that an elastic modulus of the coating layer is smaller than an elastic modulus of the gel-like member. 2. The actuator according to claim 1, wherein the amount of strain at the elastic limit point of the coating layer is greater than the amount of strain at the elastic limit point of the gel-like member. The actuator according to claim 1 or 2, wherein the coating layer has a thickness of 200 μm or less. The actuator according to claim 3, wherein the coating layer has a thickness of 100 μm or less. The gel-like member is made of silicone gel,
The actuator according to any one of claims 1 to 4, wherein the coating layer is made of rubber. The gel-like member includes a first frame member provided on one of the support and the movable body, and a first frame member provided on the other of the support and the movable body and disposed on the outer peripheral side of the first frame member. It is molded in the radial gap between the two frame members,
From claim 1, wherein the coating layer protrudes from the surface of the gel-like member to the surface of the first frame member and from the surface of the gel-like member to the surface of the second frame member. 5. The actuator according to any one of 5. A method for manufacturing an actuator comprising a support body, a movable body, a gel damper member connecting the support body and the movable body, and a magnetic drive mechanism for moving the movable body relative to the support body. hand,
a molding step of molding a large gel-like member larger than the gel-like damper member from a gel material;
a cutting step of cutting the large gel-like member to obtain a gel-like member;
forming a coating layer on at least a cut surface of the gel-like member to obtain the gel-like damper member;
an assembly step of arranging the gel damper member so that the surface on which the coating layer is formed is an exposed surface, and connecting the support body and the movable body with the gel damper member. Characteristic actuator manufacturing method.

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