JP7389464B2 - suction device - Google Patents

Description

The present invention relates to a suction device.

BACKGROUND ART Conventionally, devices have been used to convey plate-shaped members using the Bernoulli effect. For example, Patent Document 1 discloses a swirling flow forming body that generates negative pressure by forming a swirling flow in a through hole formed in the center of a plate-shaped main body to suction and convey an object to be sucked. Are listed. According to this swirling flow forming body, the fluid flowing out from the through hole is discharged from the end surface opposite to the end surface facing the suctioned object, so the outflowing fluid does not collide with the suctioned object and Vibration of objects is suppressed.

JP2017-217733A

The present invention has been made in view of the above-mentioned technology, and an object of the present invention is to more stably hold an object to be sucked.

In order to solve the above problems, a suction device according to the present invention includes a main body, an end face formed on the lower side of the main body and facing the object to be sucked, and a suction device provided inside the main body and opened in the end face. a hole, a jet port formed on the inner surface of the main body facing the hole, and a supply path that generates negative pressure by jetting fluid from the jet port into the hole to form a swirling flow; an inflow port formed at a position facing the hole and further away from the suction object than the spout; and an inflow port that guides the fluid flowing into the inflow port in a direction away from the suction object. a discharge path formed to allow discharge from the device itself, the discharge path extending from the hole toward the outside of the main body in a substantially straight line with an upward slope in side view; and the inner surface. a flange portion that is formed to protrude from the inside and prevents the fluid jetted from the spout from flowing out toward the suction target while passing the fluid suctioned by the negative pressure; The side surface is characterized in that it is formed so as to guide the fluid ejected from the ejection port in a direction away from the object to be sucked.

In a preferred embodiment, the hole may have a substantially cylindrical shape, and the discharge path may be formed to extend obliquely with respect to the central axis of the hole.

In a further preferred embodiment, the main body has a substantially cylindrical shape, and the main body has a discharge port formed on an outer surface of the main body, the discharge port being formed at a position farther from the suction object than the inflow port. Furthermore, the discharge passage may be a substantially linear passage communicating the inflow port and the discharge port.

In a further preferred embodiment, the suction device further includes a cylindrical portion connected to the outer surface so as to be inclined toward the upper end surface with respect to a direction perpendicular to the central axis of the hole, and the cylindrical portion A second supply path for supplying fluid to the supply path may be provided, one end of a pipe through which the fluid passes is inserted into the cylindrical portion, and the pipe may be held by an operator using the suction device.

According to the present invention, the object to be sucked can be held more stably.

Perspective view of suction device 1 Plan view of suction device 1 Cross-sectional view taken along line AA in Figure 2 BB line sectional view in Figure 2 Enlarged view of part C in Figure 4 Perspective view of suction device 2 Plan view of suction device 2 Side view of suction device 2 Cross-sectional view taken along line DD in Figure 7 Enlarged view of section E in Figure 9 Perspective view of suction device 3 Plan view of suction device 3 Side view of suction device 3 Cross-sectional view taken along line FF in Figure 12 Perspective view of suction device 1A Plan view of suction device 1A Cross-sectional view taken along line GG in Figure 16 Plan view of suction device 1B Plan view of suction device 1C Side view of suction device 1D Side view of suction device 1E Perspective view of suction device 1F Plan view of suction device 1F Side view of suction device 1F

1. First Embodiment A suction device 1 according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of the suction device 1. FIG. FIG. 2 is a plan view of the suction device 1. FIG. 3 is a cross-sectional view taken along line AA in FIG. 2. FIG. 4 is a sectional view taken along line BB in FIG. 2. FIG. 5 is an enlarged view of section C in FIG. 4.

A suction device 1 shown in these figures is a device for suctioning and transporting materials such as semiconductor wafers and foods by utilizing the Bernoulli effect. This suction device 1 includes a main body 11 and a cylindrical portion 13. The main body 11 and the cylindrical portion 13 are integrally formed.

The main body 11 has a cylindrical shape, and has an upper end surface 111, a lower end surface 112, an outer peripheral surface 113, a recess 114, a ceiling surface 115, an inner peripheral surface 116, two jet ports 117, a supply path 118, and two flow holes. It includes an inlet 119, two discharge ports 120, two discharge passages 121, and a flange portion 122. Each component will be explained below.

The upper end surface 111 is a flat end surface.

The lower end surface 112 is a flat end surface, and is a surface that faces the object to be sucked by the suction device 1 .

The recess 114 is a substantially cylindrical hole that opens in the lower end surface 112.

The ceiling surface 115 is a flat surface facing the recess 114. This ceiling surface 115 has a substantially circular shape.

The inner circumferential surface 116 faces the recess 114 and is a tapered surface. This inner circumferential surface 116 is formed to gradually expand in diameter from its lower end to its upper end, and therefore guides the fluid ejected from the ejection port 117 in a direction away from the object to be sucked.

The two jet ports 117 are holes formed approximately at the center of the inner peripheral surface 116 in the vertical direction. These jet ports 117 are formed so as to be point symmetrical with respect to the center P1 of the main body 11 in plan view.

The supply passage 118 is a passage formed inside the main body 11, and communicates the supply passage 132 of the cylindrical portion 13, which will be described later, with the spout 117. This supply path 118 supplies the fluid supplied through the supply path 132 of the cylindrical portion 13 into the recess 114 through the two spout ports 117 . The supply path 118 is formed approximately in the vertical center of the interior of the main body 11 when viewed from the side, and includes an arcuate passage 1181 and two linear passages 1182.

The arc-shaped passage 1181 is a passage extending in an arc shape within the main body 11.

Each of the two linear passages 1182 is a passage whose one end is connected to the end of the arcuate passage 1181 and the other end is connected to the spout 117 . These linear passages 1182 are formed to extend tangentially to the inner peripheral surface 116 in plan view. Further, they are formed to extend substantially parallel to each other in plan view. Further, it is formed to extend substantially perpendicularly to the central axis L1 of the main body 11 (or the recessed portion 114) in a side view.

These straight passages 1182 cause fluid to be ejected from the two ejection ports 117 into the recess 114 . The ejected fluid flows along the inner circumferential surface 116 due to the Coanda effect and forms a swirling flow within the recess 114. The formed swirling flow entrains the stationary fluid in the center of the recess 114, thereby generating negative pressure in the center of the recess 114. Due to this negative pressure, the object to be sucked facing the lower end surface 112 is sucked toward the main body 11 side.

Next, the two inflow ports 119 are holes formed at the upper end of the inner peripheral surface 116. These inflow ports 119 are formed above the ejection port 117 (in other words, they are formed at a position farther from the suction target than the ejection port 117). Moreover, these inflow ports 119 are formed so as to be point symmetrical with respect to the center P1 of the main body 11 in plan view.

The two discharge ports 120 are holes formed on the upper end side of the outer peripheral surface 113. The two discharge ports 120 are formed above the inflow port 119 in a side view (in other words, they are formed at a position farther from the suction object than the inflow port 119). Moreover, these discharge ports 120 are formed so as to be point symmetrical with respect to the center P1 of the main body 11 in a plan view.

The two discharge passages 121 are straight passages that communicate the inlet 119 and the discharge port 120, respectively. The two discharge passages 121 are formed so as to extend in a straight line in plan view. Further, in plan view, it is formed to extend substantially perpendicularly to a supply path 132 of the cylindrical portion 13, which will be described later. Further, in a side view, the central axis L2 of each discharge passage 121 is formed to extend upwardly at an angle of about 10 degrees with respect to a line L3 perpendicular to the central axis L1 of the main body 11.

These discharge paths 121 discharge the fluid supplied into the recess 114 to the outside of the suction device 1 . At this time, since these two discharge paths 121 are inclined upward, the fluid is discharged upward (in other words, the fluid is discharged in the direction away from the suction object).

The flange portion 122 is an annular member formed to protrude substantially perpendicularly from the lower edge of the inner circumferential surface 116 in a plan view. As shown in FIG. 5, the flange portion 122 includes a protrusion 1221, a U-shaped groove 1222, and a lower end surface 1223.

The protruding portion 1221 is an annular convex portion that protrudes upward.

The U-shaped groove 1222 is an annular groove formed between the protrusion 1221 and the inner peripheral surface 116.

The lower end surface 1223 is a surface that is substantially flush with the lower end surface 112.

The flange portion 122 allows the fluid sucked by the negative pressure generated within the recess 114 to pass therethrough, while preventing the fluid ejected from the jet port 117 from flowing out from the recess 114 toward the object to be sucked.

Next, the cylindrical portion 13 is a tubular member whose one end is connected to the outer circumferential surface 113 of the main body 11 . The cylindrical portion 13 is connected to the cylindrical portion 13 so that its central axis L4 is inclined upward from one end to the other end at about 45 degrees with respect to a line L5 perpendicular to the central axis L1 of the main body 11, as viewed from the side. This cylindrical portion 13 includes a supply port 131 and a supply path 132.

The supply port 131 is a hole that opens at the other end of the cylindrical portion 13 .

The supply path 132 is a linear passage formed within the cylindrical portion 13 and communicates the supply port 131 and the supply path 118.

One end of a rod-shaped pipe (not shown) is inserted into the supply port 131 of the cylindrical portion 13 and fixed therein. The other end of this rod-shaped pipe is connected to a tube extending from a fluid supply pump (not shown). Fluid (for example, gas such as compressed air or liquid such as pure water or carbonated water) supplied from this fluid supply pump is supplied to the supply path 132 of the cylindrical portion 13 through this rod-shaped pipe.

This rod-shaped pipe is held by an operator using the suction device 1. Therefore, the cylindrical portion 13 into which the rod-shaped pipe is inserted can be said to be a member for fixing the gripping member gripped by the operator to the main body 11.

When fluid is supplied from the fluid supply pump to the suction device 1 described above, the supplied fluid passes through the supply channels 118 and 132 and is ejected from the ejection port 117 into the recess 114. Most of the fluid molecules in the ejected fluid form a swirling flow that rises along the inner circumferential surface 116 and are then discharged to the outside of the suction device 1 through the discharge path 121. At this time, if there is an object to be sucked opposite the lower end surface 112, the centrifugal force and entrainment of the swirling flow will cause per unit volume of the center of the swirling flow, while the inflow of external fluid into the recess 114 is restricted. The density of fluid molecules becomes smaller. That is, negative pressure is generated at the center of the swirling flow. As a result, the object to be attracted is pressed by the surrounding fluid and drawn toward the lower end surface 112.

On the other hand, some of the fluid molecules in the fluid ejected into the recess 114 form a swirling flow that descends against the guidance of the inner circumferential surface 116 . Fluid molecules forming this swirling flow try to flow out from the recess 114, but the flange 122 prevents the fluid molecules from flowing out. The fluid molecules whose outflow is prevented are decelerated by contacting the flange portion 122, and are eventually caught up in the rising swirling flow and are discharged to the outside of the suction device 1 through the discharge path 121.

In this way, in the suction device 1, most of the fluid to be discharged is discharged upward through the discharge path 121, so that the amount of fluid discharged from the lower side of the main body 11 is small, if any. . Therefore, the phenomenon that the discharged fluid collides with the suctioned object, causing the suctioned object to vibrate or rotate, is suppressed compared to the case where the fluid is discharged only from the lower side of the main body 11. As a result, the object to be attracted can be held more stably.

Further, in this suction device 1, since the discharge path 121 is inclined upward, the fluid is discharged upward. Therefore, the interference of the discharged fluid with the suction target can be suppressed compared to the case where the discharge path 121 is not inclined upward. This is particularly noticeable when a plurality of suction devices 1 are used side by side. By slanting the discharge path 121 of each suction device 1 upward, it is possible to suppress the fluid discharged from the suction device 1 from interfering with the suction target sucked by other adjacent suction devices 1. .

Further, in this suction device 1, the cylindrical portion 13 is connected to the main body 11 in an upwardly inclined manner. Therefore, it is easy for an operator who inserts a pipe into the cylindrical portion 13 and uses the suction device 1 while holding the pipe to perform the work while looking at the object to be sucked.

2. Second Embodiment A suction device 2 according to a second embodiment of the present invention will be described with reference to the drawings. The suction device 2 described below differs from the suction device 1 according to the first embodiment described above in the structure of a supply path and a discharge path formed inside the main body.

FIG. 6 is a perspective view of the suction device 2. FIG. 7 is a plan view of the suction device 2. FIG. 8 is a side view of the suction device 2. FIG. 9 is a sectional view taken along the line DD in FIG. FIG. 10 is an enlarged view of section E in FIG. 9.

The suction device 2 shown in these figures is a device for suctioning and transporting materials such as semiconductor wafers and foods by utilizing the Bernoulli effect. This suction device 2 includes a main body 21 and a cylindrical portion 23. The main body 21 and the cylindrical portion 23 are integrally formed.

The main body 21 has a cylindrical shape, and has an upper end surface 211, a lower end surface 212, an outer peripheral surface 213, a recess 214, a ceiling surface 215, an inner peripheral surface 216, two jet ports 217, a supply path 218, and two flow holes. It includes an inlet 219, two discharge ports 220, two discharge passages 221, and a flange portion 222. Each component will be explained below.

The upper end surface 211 is a flat end surface.

The lower end surface 212 is a flat end surface that faces the object to be sucked by the suction device 2 .

The recess 214 is a substantially cylindrical hole that opens in the lower end surface 212 .

The ceiling surface 215 is a flat surface facing the recess 214. This ceiling surface 215 has a substantially circular shape.

The inner circumferential surface 216 faces the recess 214 and is a tapered surface. The inner circumferential surface 216 is formed to gradually expand in diameter from its lower end to its upper end, and therefore guides the fluid ejected from the ejection port 217 in a direction away from the object to be sucked.

The two jet ports 217 are holes formed on the lower side of the inner circumferential surface 216 in the vertical direction. These jet ports 117 are formed so as to be point symmetrical with respect to the center P2 of the main body 21 in plan view.

The supply passage 218 is a passage formed inside the main body 21, and communicates with a supply passage 232 of the cylindrical portion 23, which will be described later, and the spout 217. This supply path 218 supplies the fluid supplied through the supply path 232 of the cylindrical portion 23 into the recessed portion 214 via the two jet ports 217 . The supply path 218 is formed on the lower side in the vertical direction inside the main body 21 when viewed from the side, and includes an arcuate passage 2181 and two linear passages 2182.

The arc-shaped passage 2181 is a passage extending in an arc shape within the main body 21.

Each of the two linear passages 2182 is a passage whose one end is connected to the end of the arcuate passage 2181 and the other end is connected to the spout 217 . These linear passages 2182 are formed to extend tangentially to the inner peripheral surface 216 in plan view. Further, they are formed to extend substantially parallel to each other in plan view. Further, in a side view, it is formed to extend obliquely with respect to the central axis L6 of the main body 21 (or the recess 214). More specifically, the center axis L7 of each linear passage 2182 is formed to extend upwardly from one end to the other end at about 15 degrees with respect to a line L8 perpendicular to the center axis L6 of the main body 21. has been done. Therefore, the fluid ejected from the ejection port 217 flows in a direction away from the object to be sucked.

These straight passages 2182 cause fluid to be ejected into the recess 214 from the two ejection ports 217 . The ejected fluid flows along the inner circumferential surface 216 due to the Coanda effect and forms a swirling flow within the recess 214. The formed swirling flow entrains the stationary fluid in the center of the recess 214, thereby generating negative pressure in the center of the recess 214. Due to this negative pressure, the object to be sucked facing the lower end surface 212 is sucked toward the main body 21 side.

Next, the two inlets 219 are holes formed at the ends of the ceiling surface 215. These inflow ports 219 are formed above the ejection port 217 (in other words, they are formed at a position farther from the suction target than the ejection port 217). Moreover, these inflow ports 219 are formed so as to be point symmetrical with respect to the center P2 of the main body 21 in plan view.

The two discharge ports 220 are holes formed on the radially outer side of the upper end surface 211. The two discharge ports 220 are formed above the inflow port 219 in side view (in other words, they are formed at a position farther from the suction object than the inflow port 219). Moreover, these discharge ports 220 are formed so as to be point symmetrical with respect to the center P2 of the main body 21 in plan view. Further, it is formed so as not to overlap with the inlet 219 in plan view. More specifically, as shown in FIG. 7, a line L9 extending from the center P2 of the main body 21 to the outlet 220 and a line L10 extending from the center P2 of the main body 21 to the inlet 219 form an angle of about 30 degrees. It is formed like this.

These discharge passages 221 are linear passages that communicate the inlet 219 and the discharge port 220, respectively. These discharge passages 221 are formed so that their central axes L11 extend at an angle of about 15 degrees with respect to a line L12 perpendicular to the central axis L6 of the main body 21, when viewed from the side. Further, the inlet 219 and the outlet 220 are inclined so as to be lined up in this order along the rotational direction D1 of the swirling flow formed within the recess 214 in plan view. Therefore, fluid molecules forming a swirling flow are easily discharged to the outside of the suction device 2 through the discharge path 221.

These discharge paths 221 discharge the fluid supplied into the recess 214 to the outside of the suction device 2 . At this time, since these two discharge passages 221 are formed from the ceiling surface 215 of the main body 21 to the upper end surface 211, the fluid is discharged upward (in other words, the fluid is discharged in the direction away from the suction object). ).

The flange portion 222 is an annular member formed to protrude substantially perpendicularly from the lower edge of the inner circumferential surface 216 in a plan view. As shown in FIG. 10, the flange portion 222 includes a protrusion 2221, a U-shaped groove 2222, and a lower end surface 2223.

The protruding portion 2221 is an annular convex portion that protrudes upward.

The U-shaped groove 2222 is an annular groove formed between the protrusion 2221 and the inner peripheral surface 216.

The lower end surface 2223 is a surface that is substantially flush with the lower end surface 212.

The flange portion 222 allows the fluid sucked by the negative pressure generated within the recess 214 to pass therethrough, while preventing the fluid ejected from the jet port 217 from flowing out of the recess 214 toward the object to be sucked.

Next, the cylindrical portion 23 is a tubular member whose one end is connected to the outer circumferential surface 213 of the main body 21 . The cylindrical portion 23 is connected to the cylindrical portion 23 so that its central axis L13 is inclined upward from one end to the other end at about 45 degrees with respect to a line L14 perpendicular to the central axis L6 of the main body 21, as viewed from the side. This cylindrical portion 23 includes a supply port 231 and a supply path 232.

The supply port 231 is a hole that opens at the other end of the cylindrical portion 23 .

The supply passage 232 is a linear passage formed within the cylindrical portion 23 and communicates the supply port 231 with the supply passage 218 .

One end of a rod-shaped pipe (not shown) is inserted into the supply port 231 of the cylindrical portion 23 and fixed therein. The other end of this rod-shaped pipe is connected to a tube extending from a fluid supply pump (not shown). Fluid (for example, gas such as compressed air or liquid such as pure water or carbonated water) supplied from this fluid supply pump is supplied to the supply path 232 of the cylindrical portion 23 through this rod-shaped pipe.

This rod-shaped pipe is held by an operator using the suction device 2. Therefore, the cylindrical portion 23 into which the rod-shaped pipe is inserted can be said to be a member for fixing the gripping member gripped by the operator to the main body 21.

When fluid is supplied from the fluid supply pump to the suction device 2 described above, the supplied fluid passes through the supply channels 218 and 232 and is ejected from the ejection port 217 into the recess 214. Most of the fluid molecules in the ejected fluid form a swirling flow that rises along the inner circumferential surface 216 and are then discharged to the outside of the suction device 2 through the discharge path 221 . At this time, if there is an object to be sucked opposite the lower end surface 212, the centrifugal force and entrainment of the swirling flow will cause per unit volume of the center of the swirling flow, while the inflow of external fluid into the recess 214 is restricted. The density of fluid molecules becomes smaller. That is, negative pressure is generated at the center of the swirling flow. As a result, the object to be attracted is pressed by the surrounding fluid and drawn toward the lower end surface 212 side.

On the other hand, some of the fluid molecules in the fluid ejected into the recess 214 form a swirling flow that descends against the guidance of the inner circumferential surface 216. Fluid molecules forming this swirling flow try to flow out from the recess 214, but the flange 222 prevents the fluid molecules from flowing out. The fluid molecules whose outflow is prevented are decelerated by contacting the flange portion 222, and are eventually caught up in the upward swirling flow and are discharged to the outside of the suction device 2 through the discharge path 221.

In this way, in the suction device 2, most of the fluid discharged is discharged upward through the discharge path 221, so that the amount of fluid discharged from the lower side of the main body 21 is small, if any. . Therefore, the phenomenon that the discharged fluid collides with the suctioned object, causing the suctioned object to vibrate or rotate, is suppressed compared to the case where the fluid is discharged only from the lower side of the main body 21. As a result, the object to be attracted can be held more stably.

Further, in this suction device 2, since the discharge path 221 is formed from the ceiling surface 215 to the upper end surface 211, the fluid is discharged upward. Therefore, interference of the discharged fluid with the suction target can be suppressed compared to the case where the discharge passage 221 is not formed from the ceiling surface 215 to the upper end surface 211. This is particularly noticeable when a plurality of suction devices 2 are used side by side. By forming the discharge path 221 of each suction device 2 from the ceiling surface 215 to the upper end surface 211, the fluid discharged from the suction device 2 can be prevented from interfering with objects to be sucked sucked by other adjacent suction devices 2. can be suppressed.

Further, in this suction device 2, the cylindrical portion 23 is connected to the main body 21 in an upwardly inclined manner. Therefore, it is easy for the operator who inserts the pipe into the cylindrical portion 23 and uses the suction device 2 while holding the pipe to perform the work while looking at the object to be sucked.
3. Third Embodiment A suction device 3 according to a third embodiment of the present invention will be described with reference to the drawings. The suction device 3 described below differs from the suction device 1 according to the first embodiment described above in that it does not include a cylindrical portion and a discharge path is formed between the main body and the cover.

FIG. 11 is a perspective view of the suction device 3. FIG. 12 is a plan view of the suction device 3. FIG. 13 is a side view of the suction device 3. FIG. 14 is a cross-sectional view taken along line FF in FIG. 12.

The suction device 3 shown in these figures is a device for suctioning and transporting materials such as semiconductor wafers and foods by utilizing the Bernoulli effect. This suction device 3 includes a main body 31 and a cover 33. The cover 33 is detachably attached to the main body 31.

The main body 31 has a cylindrical shape, and includes an upper end surface 311, four protrusions 312, a lower end surface 313, an outer circumferential surface 314, a through hole 315, an inner circumferential surface 316, two jet ports 317, and two supply ports. It includes a port 318, two supply channels 319, and a flange portion 320. Each component will be explained below.

The upper end surface 311 is a flat end surface. This upper end surface 311 is formed so as to be inclined upward from its inner periphery to its outer periphery. Specifically, it is formed to be inclined upward by about 10 degrees with respect to a line L16 perpendicular to the central axis L15 of the main body 31 (or the through hole 315).

The four protrusions 312 each have a cylindrical shape and are formed to extend along the outer periphery of the upper end surface 311 substantially parallel to the central axis L15 of the main body 31. These protrusions 312 are formed at equal intervals in plan view.

The lower end surface 313 is a flat end surface, and is a surface facing the object to be sucked by the suction device 3.

The through hole 315 is a substantially cylindrical hole that opens to the upper end surface 311 and the lower end surface 313.

The inner circumferential surface 316 faces the through hole 315 and is a tapered surface. This inner circumferential surface 316 is formed to gradually expand in diameter from its lower end to its upper end, and therefore guides the fluid ejected from the ejection port 317 in a direction away from the object to be sucked.

The two jet ports 317 are holes formed on the lower side of the inner circumferential surface 316 in the vertical direction. These jet ports 317 are formed so as to be point symmetrical with respect to the center P3 of the main body 31 in plan view.

The two supply ports 318 are holes formed on the lower side of the outer peripheral surface 314 in the vertical direction. These supply ports 318 are formed so as to be point symmetrical with respect to the center P3 of the main body 31 in plan view. A tube extending from a fluid supply pump (not shown) is connected to each supply port 318. This fluid supply pump supplies fluid (for example, gas such as compressed air, or liquid such as pure water or carbonated water).

The two supply passages 319 are linear passages formed inside the main body 31, and communicate the supply port 318 and the spout port 317, respectively. These supply paths 319 supply the fluid supplied through the supply port 318 into the through hole 315 via the jet port 317 . These supply paths 319 are formed to extend in a tangential direction with respect to the inner circumferential surface 316 in plan view. Further, they are formed to extend substantially parallel to each other in plan view. Further, it is formed on the lower side in the vertical direction inside the main body 31 when viewed from the side.

These supply passages 319 eject fluid into the through hole 315 from the two ejection ports 317 . The ejected fluid flows along the inner circumferential surface 316 due to the Coanda effect and forms a swirling flow within the through hole 315. The formed swirling flow entrains the stationary fluid in the center of the through hole 315, thereby generating negative pressure in the center of the through hole 315. Due to this negative pressure, the object to be sucked facing the lower end surface 313 is sucked toward the main body 31 side.

The flange portion 320 is an annular member formed to protrude substantially perpendicularly from the lower edge of the inner circumferential surface 316 in a plan view. The flange portion 320 allows the fluid sucked by the negative pressure generated within the through hole 315 to pass therethrough, while preventing the fluid jetted from the jet port 317 from flowing out from the through hole 315 toward the object to be sucked.

Next, the cover 33 has a disk shape, and its diameter is approximately the same as the outer diameter of the upper end surface 311. This cover 33 has four round holes 331 equally spaced along its outer periphery. Further, the lower surface of this cover 33 is chamfered. The chamfer angle is about 10 degrees.

The cover 33 is attached to the main body 31 by inserting the protrusion 312 of the main body 31 into the round hole 331 thereof. Since the protrusion 312 of the cover 33 is inserted into the round hole 331, movement of the main body 31 in the radial direction is restricted, but movement in the vertical direction is not restricted. Therefore, the cover 33 can be moved upward by being pressed by the fluid ejected into the through hole 315.

When the cover 33 moves upward, an annular inlet 341 is formed between the lower surface of the cover 33 and the inner edge of the upper end surface 311 of the main body 31 . The inflow port 341 is formed above the spout 317 (in other words, it is formed at a position farther from the suction target than the spout 317 is).

Further, as the cover 33 moves upward, an annular discharge port 342 is formed between the lower surface of the cover 33 and the outer edge of the upper end surface 311 of the main body 31. This discharge port 342 is formed above the inflow port 341 (in other words, it is formed at a position farther from the suction object than the inflow port 341).

Furthermore, by moving the cover 33 upward, a linear discharge path 343 that communicates the inlet 341 and the discharge port 342 is formed. The discharge path 343 is formed to extend upwardly at an angle of about 10 degrees with respect to a line L16 perpendicular to the central axis L15 of the main body 31, when viewed from the side. This discharge path 343 discharges the fluid supplied into the through hole 315 to the outside of the suction device 3 . At this time, since the discharge path 343 is inclined upward, the fluid is discharged upward (in other words, the fluid is discharged in the direction away from the suction object).

When fluid is supplied from the fluid supply pump to the suction device 3 described above, the supplied fluid passes through the supply path 319 and is ejected from the ejection port 317 into the through hole 315. Most of the fluid molecules in the ejected fluid form a swirling flow that rises along the inner circumferential surface 316 and are then sucked through the discharge path 343 formed between the upper end surface 311 and the cover 33. It is discharged to the outside of the device 3. At this time, if there is an object to be sucked facing the lower end surface 313, the centrifugal force and entrainment of the swirling flow will cause the unit volume of the center of the swirling flow to The density of fluid molecules around the area becomes smaller. That is, negative pressure is generated at the center of the swirling flow. As a result, the object to be attracted is pressed by the surrounding fluid and drawn toward the lower end surface 313.

On the other hand, some of the fluid molecules in the fluid ejected into the through hole 315 form a swirling flow that descends against the guidance of the inner circumferential surface 316. Fluid molecules forming this swirling flow try to flow out from the through hole 315, but the flange portion 320 prevents the fluid molecules from flowing out. The fluid molecules whose outflow is prevented are decelerated by contacting the flange portion 320, and are eventually caught up in the upward swirling flow and are discharged to the outside of the suction device 3 through the discharge path 343.

In this way, in the suction device 3, most of the fluid to be discharged is discharged upward through the discharge path 343, so the amount of fluid discharged from the lower side of the main body 31 is small, if any. . Therefore, the phenomenon that the discharged fluid collides with the suctioned object, causing the suctioned object to vibrate or rotate, is suppressed compared to the case where the fluid is discharged only from the lower side of the main body 31. As a result, the object to be attracted can be held more stably.

Further, in this suction device 3, since the discharge path 343 is inclined upward, the fluid is discharged upward. Therefore, it is possible to suppress the discharged fluid from interfering with the suction object compared to the case where the discharge path 343 is not inclined upward. This is particularly noticeable when a plurality of suction devices 3 are used side by side. By slanting the discharge path 343 of each suction device 3 upward, it is possible to suppress the fluid discharged from the suction device 3 from interfering with the suction target sucked by other adjacent suction devices 3. .

4. Modifications The above embodiment may be modified as follows. Note that the following modifications may be combined with each other.

4-1. Modification example 1
In the suction device 1 according to the first embodiment, the arrangement of the discharge path 121 may be changed. FIG. 15 is a perspective view of a suction device 1A including a discharge passage 121A instead of the discharge passage 121. FIG. 16 is a plan view of the suction device 1A. FIG. 17 is a sectional view taken along line GG in FIG. 16.

The suction device 1A shown in these figures includes two inflow ports 119A instead of the two inflow ports 119. These inflow ports 119A are holes formed at the upper end of the inner circumferential surface 116, and are formed above the spout 117 (in other words, they are formed at a position farther from the suction object than the spout 117). ). Moreover, these inflow ports 119A are formed so as to be point symmetrical with respect to the center P1 of the main body 11 in a plan view.

Furthermore, the suction device 1A includes two exhaust ports 120A instead of the two exhaust ports 120. These discharge ports 120A are holes formed on the upper end side of the outer circumferential surface 113, and are formed above the inlet 119A in side view (in other words, they are located farther from the suction object than the inlet 119A). (formed in the same position). Moreover, these discharge ports 120A are formed so as to be point symmetrical with respect to the center P1 of the main body 11 in plan view.

Furthermore, the suction device 1A includes two exhaust passages 121A instead of the two exhaust passages 121. These discharge passages 121A are linear passages that communicate the inlet 119A and the discharge port 120A, respectively. These discharge passages 121A are formed to extend in a tangential direction to the inner circumferential surface 116 in plan view. Further, when the main body 11 is rotated around the center P1 in a plan view, the central axis (not shown) of the discharge path 121A is formed so as not to overlap the central axis (not shown) of the supply path 132. There is. Therefore, the fluid that is ejected into the recess 114 and rotates along the inner circumferential surface 116 is easily discharged to the outside of the suction device 1A through the discharge path 121A.
Further, these discharge passages 121A are formed so as to extend substantially parallel to each other in plan view.

Further, in side view, these discharge passages 121A have their central axes L17 inclined upward by about 10 degrees with respect to a line L18 perpendicular to the central axis L1 of the main body 11 from the inlet 119A to the discharge port 120A. It is formed to extend. Therefore, the fluid is discharged upward (in other words, the fluid is discharged in the direction away from the suction object).

In the plan view shown in FIG. 16, the two discharge passages 121A are formed to extend substantially parallel to the supply passage 132 of the cylindrical portion 13, but instead of this, the discharge passages 121A shown in FIG. It may be formed to extend obliquely with respect to the supply path 132, like the path 121B. As another example, the discharge passage 121C shown in FIG. 19 may be formed to extend substantially perpendicularly to the supply passage 132.

4-2. Modification example 2
In the suction device 1 according to the first embodiment, the inclination of the cylindrical portion 13 may be changed. FIG. 20 is a side view of a suction device 1D including a cylindrical portion 13A instead of the cylindrical portion 13. The cylindrical portion 13A included in the suction device 1D shown in the figure is connected to the upper end surface 111 so as to extend substantially parallel to the central axis L1 of the main body 11 in a side view. This cylindrical portion 13A differs from the cylindrical portion 13 according to the first embodiment only in this inclination.

FIG. 21 is a side view of a suction device 1E including a cylindrical portion 13B instead of the cylindrical portion 13. The cylindrical portion 13B included in the suction device 1E shown in the figure is connected to the outer circumferential surface 113 so as to extend substantially perpendicularly to the central axis L1 of the main body 11 in a side view. This cylindrical portion 13B differs from the cylindrical portion 13 according to the first embodiment only in this inclination.

4-3. Modification example 3
Even if the suction device 1 according to the first embodiment is provided with three legs 14 so that the suction device 1 does not fall down due to the weight of the pipe inserted into the cylindrical portion 13 when placed on a workbench. good. FIG. 22 is a perspective view of the suction device 1F including these three legs 14. FIG. 23 is a plan view of the suction device 1D. FIG. 24 is a side view of the suction device 1F.

The three legs 14 of the suction device 1F shown in these figures are each formed to protrude from the lower edge of the outer peripheral surface 113 of the main body 11 in a substantially vertical direction. These leg portions 14 are formed at equal intervals in plan view.

4-4. Modification example 4
The outer peripheral shape of the main body 11, 21, or 31 is not limited to a circular shape, but may be an ellipse or a polygon.

4-5. Modification example 5
The taper formed on the inner circumferential surface 116, 216, or 316 is not limited to a linear taper, but may be a parabolic taper or an exponential taper.

4-6. Modification example 6
The number of jet ports 117, 217, or 317 is not limited to two, and may be one or three or more. Further, the vertical position of the jet nozzle 117, 217, or 317 may be changed as appropriate within the scope of the invention described in the claims.

4-7. Modification example 7
The number, structure, and arrangement of supply channels 118, 218, or 319 may be changed as appropriate within the scope of the invention described in the claims.

4-8. Modification example 8
The number, structure, and arrangement of the discharge passages 121, 221, or 343 may be changed as appropriate within the scope of the invention described in the claims. For example, the discharge passage 121, 221 or 343 may be tapered.

4-9. Modification 9
The shape and vertical position of the flange portion 122, 222, or 320 may be changed as appropriate within the scope of the invention described in the claims (for example, see Japanese Patent Application Laid-Open No. 2019-186419).

4-10. Modification 10
The number and shape of the cylindrical portions 13 or 23 may be changed as appropriate within the scope of the invention described in the claims.
Further, the cylindrical portion 13 or 23 may be omitted in the suction device 1 or 2, and the suction device 3 may be provided with the cylindrical portion.

4-11. Modification 11
The shape of the cover 33 is not limited to a circle, but may be oval or polygonal.

4-12. Modification example 12
A dust bin may be attached to the suction device 3 for storing dust contained in the fluid discharged from the device (for example, see FIG. 4 of Japanese Patent Application Publication No. 2017-35350).

4-13. Modification example 13
A cover or a valve for adjusting the amount of fluid discharged from the suction device 2 may be attached to the suction device 2 (for example, see FIGS. 15 and 16 of JP-A No. 2017-217733).

4-14. Modification example 14
In the suction device 3, an annular spacer may be attached to each of the protrusions 312 of the main body 31, and then the cover 33 may be attached to the main body 31. At this time, noise caused by the swinging cover 33 coming into contact with the main body 31 may be reduced by attaching an elastic member such as a coil spring or an O-ring as a spacer.

1, 1A, 1B, 1C, 1D, 1E, 1F, 2, 3... Suction device, 11, 21... Main body, 13, 13A, 13B, 23... Cylindrical part, 14... Leg part, 33... Cover, 111, 211 , 311... Upper end surface, 112, 212, 313... Lower end surface, 113, 213, 314... Outer peripheral surface, 114, 214... Recess, 115, 215... Ceiling surface, 116, 216, 316... Inner peripheral surface, 117, 217, 317... Spout port, 118, 218... Supply path, 119, 119A, 219, 341... Inflow port, 120, 120A, 220, 342... Discharge port, 121, 121A, 121B, 121C, 221, 343... Discharge channel , 122, 222, 320...flange part, 131, 231...supply port, 132, 232...supply path, 312...protrusion, 315...through hole, 318...supply port, 319...supply channel, 331...round hole, 1181 , 2181...Circular passage, 1182, 2182...Linear passage, 1221, 2221...Protrusion, 1222, 2222...U-shaped groove, 1223, 2223...Lower end surface

Claims (4)

The main body and
an end surface formed on the lower side of the main body and facing the suction object;
a hole provided inside the main body and opening at the end surface;
a spout formed on the inner surface of the main body facing the hole;
a supply path that generates negative pressure by jetting fluid from the spout into the hole to form a swirling flow;
an inflow port formed at a position facing the hole and further away from the suction target than the spout;
A discharge passage formed to guide the fluid that has flowed into the inlet in a direction away from the suction object and discharge it from the device itself, and is inclined upwardly in side view from the hole toward the outside of the main body. a discharge path formed to extend substantially linearly ;
a flange portion that is formed to protrude from the inner surface and prevents the fluid ejected from the ejection port from flowing toward the object to be sucked while passing the fluid suctioned by the negative pressure. ,
The suction device, wherein the inner surface is formed to guide the fluid ejected from the ejection port in a direction away from the object to be sucked. The hole has a substantially cylindrical shape,
The suction device according to claim 1, wherein the discharge path is formed to extend obliquely with respect to the central axis of the hole. The main body has a substantially cylindrical shape,
further comprising an outlet formed on the outer surface of the main body at a position farther from the suction object than the inlet;
The suction device according to claim 1 or 2, wherein the discharge path is a substantially linear passage communicating the inflow port and the discharge port. further comprising a cylindrical portion connected to the outer surface at an angle toward the upper end surface with respect to a direction perpendicular to the central axis of the hole;
The cylindrical portion includes a second supply path that supplies fluid to the supply path,
One end of a pipe through which fluid is inserted is inserted into the cylindrical part,
The suction device according to claim 3, wherein the pipe is held by an operator who uses the suction device.

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