JP7401232B2 - Non-destructive testing equipment - Google Patents

Description

Embodiments of the present invention relate to non-destructive testing equipment.

A non-destructive inspection method that performs non-destructive inspection of the inspected object by irradiating the inspected object with radiation, typically X-rays, and detecting the two-dimensional distribution of the attenuated radiation as it passes through the inspected object and creating an image. Destructive inspection devices are known. The object to be inspected is, for example, a lithium ion polymer battery. A lithium ion polymer battery has a structure in which a flat positive electrode plate and a negative electrode plate are stacked inside.

If there is a misalignment in this lamination, that is, if the positive electrode plate protrudes from the negative electrode plate, there is a risk that lithium will be deposited on the protruding positive electrode plate, causing a short circuit and causing a fire. Therefore, it is necessary to inspect the positional deviation between the positive electrode plate and the negative electrode plate inside the lithium ion polymer battery. This inspection is performed using a non-destructive inspection device.

In order to improve inspection accuracy, it is desirable to image at least two of the four corners of the object to be inspected. For this purpose, for example, after irradiating one corner with a radiation beam, the object to be inspected is rotated along a horizontal plane, and another corner is irradiated with a radiation beam, and the two corners are imaged.

Japanese Patent Application Publication No. 2011-39014

However, in such an inspection apparatus, in order to inspect one inspected object, three steps of imaging, rotation, and imaging are required, and the inspection takes time. In particular, if all four corners of the object to be inspected are to be inspected in order to improve the quality of the object, more than twice as many steps are required. On the other hand, when multiple inspection lines are provided to improve inspection tact, there is a problem in that the apparatus becomes larger and more complex.

This embodiment aims at providing a non-destructive inspection apparatus that improves inspection tact in order to solve the above-mentioned problems.

The non-destructive testing device of the embodiment has the following configuration.
(1) Two radiation generators that irradiate a radiation beam onto an object to be inspected having four corners.
(2) Two radiation detectors provided opposite to the two radiation generators, respectively.
(3) An inspection table on which the object to be inspected is placed.
(4) Two imaging units provided at a predetermined interval above the inspection table , which capture images of the object to be inspected.
(5) The optical axes of the radiation beams intersect in front of the object to be inspected, and transmit through two corners on the radiation generator side among the four corners of the object to be inspected.
(6) The examination table includes a moving mechanism.
(7) The moving mechanism moves the two corners to the radiation beam based on the positional relationship between the optical axis of the radiation beam acquired from the images captured by the two imaging units and the two corners of the object to be inspected. Align with the optical axis of the beam.

FIG. 1 is a plan view showing the configuration of a non-destructive testing device according to an embodiment. FIG. 1 is a side view showing the configuration of a non-destructive testing device according to an embodiment. FIG. 2 is a plan view showing the positional relationship between the radiation generator and the object to be inspected according to the embodiment. It is a perspective view showing a conveyance mechanism and an examination stand concerning an embodiment. FIG. 2 is a block diagram showing the relationship between the control device and each component according to the embodiment. It is a figure explaining operation of a conveyance device and an examination stand concerning an embodiment. It is a flow chart showing operation of a non-destructive inspection device concerning an embodiment.

[1. First embodiment]
[1-1. Configuration of embodiment]
Hereinafter, a non-destructive testing apparatus according to a first embodiment will be described in detail with reference to the drawings. 1 and 2 are a plan view and a side view showing the configuration of a non-destructive testing device 1 according to this embodiment. The non-destructive testing device 1 irradiates an object to be inspected 100 with radiation and detects the radiation that has passed through the object to be inspected 100 . Based on this detection result, the non-destructive inspection apparatus 1 generates a perspective image of the inspected object 100.

[Object to be inspected]
The object to be inspected 100 is not particularly limited as long as it has a generally rectangular parallelepiped shape with four corners in plan view, but in this embodiment, it is a lithium ion polymer battery having a stacked structure. A lithium-ion polymer battery consists of alternating square positive and negative electrode plates housed in a case filled with electrolyte. A separator is present between the positive electrode plate and the negative electrode plate, and a positive electrode lead is connected to the positive electrode plate, and a negative electrode lead is connected to the negative electrode plate, and each is bundled into one and taken out to the outside. The object to be inspected 100 is inspected and transported while being placed on the tray 10 . A plurality of positioning members 11 (see FIG. 4) are erected on the surface of the tray 10, and the object to be inspected 100 is positioned and fixed between the plurality of positioning members 11.

[Non-destructive testing equipment]
As shown in FIGS. 1 and 2, the nondestructive inspection apparatus 1 includes a radiation generator 2 and a radiation detector 3 that take a fluoroscopic image of an object to be inspected 100, and an inspection table that moves the object to be inspected 100 to an inspection position P. 4. An imaging unit 5 that images the inspected object 100 from above on the inspection table 4 and positions it; a shielding box 6; a transport mechanism 7 that transports the tray 10 on which the inspected object 100 is placed; A transfer mechanism 8 for transferring the tray 10 from the inspection table 4 to the inspection table 4 and from the inspection table 4 to the transfer mechanism 7 is provided. The non-destructive testing device 1 further includes a control device 9 that controls these configurations.

The radiation generator 2 irradiates a radiation beam toward the object 100 to be inspected. A radiation beam is a bundle of radiation that expands into a pyramid shape with a focal point as its apex. The radiation is, for example, an X-ray. This radiation generator 2 is, for example, an X-ray tube.

The radiation detector 3 is disposed facing the focal point of the radiation generator 2, detects a two-dimensional distribution of radiation intensity that is attenuated according to the radiation transmission path, and outputs transmission data proportional to the radiation intensity. The radiation detector 3 includes, for example, an image intensifier (I.I.), a camera, or a flat panel detector (FPD).

In this embodiment, two sets of radiation generators 2 and radiation detectors 3 are provided. As shown in FIG. 3, the two sets of radiation generators 2 and radiation detectors 3 are arranged opposite to each other so that the corners of the object to be inspected 100 are sandwiched between each set. More specifically, the two radiation generators 2 are arranged side by side so that the optical axes of their respective radiation beams intersect in front of the object to be inspected 100 on the inspection table 4 in plan view. The radiation that intersects in front of the object to be inspected 100 passes through two of the four corners of the object to be inspected 100 on the radiation generator 2 side. The radiation transmitted through these two corners is detected by the corresponding radiation detectors 3, respectively.

The inspection table 4 is loaded with the tray 10 on which the object to be inspected 100 is placed, raised from the conveyance height position L to an inspection height position H set above the conveyance height position L, and then moved to the inspection position P. The transport height position L is the height position of the inspection table 4 which is approximately at the same height as the transport mechanism 7. The inspection height position H is a height position at which the radiation generator 2 images the corner of the object 100 to be inspected. The inspection position P is a position of the object to be inspected 100 such that two corners of the object to be inspected 100 on the side of the radiation generator 2 are aligned with the optical axis of the radiation beam. The inspection table 4 includes a movement mechanism 41 that moves itself in the XYZ axis directions, and a rotation mechanism 42 that rotates it around an axis extending in the vertical direction. As the moving mechanism 41, for example, a ball screw mechanism driven by a servo motor can be used. That is, the moving mechanism 41 moves the support surface 43 of the inspection table 4 along the X-axis direction, the Y-axis direction, and the Z-axis direction by driving a servo motor. In this embodiment, the transport direction of the inspection object 100 is the X-axis direction, the direction perpendicular to the X-axis direction on the mounting surface (horizontal surface) of the transport mechanism 7 is the Y-direction, and the vertical direction of the inspection table 4 is the Z-axis. direction.

By moving the moving mechanism 41, the two corners of the object to be inspected 100 are aligned with the optical axis of the radiation beam. The rotation mechanism 42 is provided on the movement mechanism 41 and is, for example, an actuator including a drive source such as a motor. Note that the rotation mechanism 42 may be provided below the movement mechanism 41. The rotation mechanism 42 rotates the support surface 43 of the inspection table 4 around the Z-axis. By this rotation, the corner of the object 100 on the inspection table 4 and the optical axis of the radiation beam are aligned, and by rotating the object 100 by 180 degrees, the radiation generator 2 side of the object 100 is rotated 180 degrees. It becomes possible to image the two corners that are farthest from each other.

As shown in FIG. 4, the support surface 43 of the examination table 4 on which the tray 10 is placed consists of three surfaces of approximately the same height that are arranged in parallel at a certain interval, and each surface is supported by a support 44. There is. The spacing between the three surfaces and the spacing between the three pillars 44 are both wider than the respective widths of two arms 81a and 81b of the transfer mechanism 8, which will be described later. Since the moving mechanism 41 and the rotating mechanism 42 move the three support columns 44 together, the intervals between the three surfaces of the support surface 43 and the three support columns 44 remain unchanged.

As shown in FIG. 2, the imaging unit 5 is provided above the inspection table 4 and images the object 100 to be inspected in order to detect a positional shift of the object 100 in plan view. The imaging unit 5 can use an infrared (IR) camera, a CCD camera, or a CMOS camera. Note that two imaging units 5 in this embodiment are provided with a predetermined interval therebetween. This is because by comparing images from two imaging units 5 that have parallax with each other, it is possible to detect not only the positional deviation of the object 100 to be inspected in plan view, but also the height position of the corner of the object 100 to be inspected. be.

The shielding box 6 surrounds the radiation generator 2 and the radiation detector 3 and shields radiation. The shielding box 6 is configured to include a radiation shielding material such as lead. The shielding box 6 has a rectangular parallelepiped shape, for example. The shielding box 6 is provided with an entrance 61 for transporting the tray 10 on which the object to be inspected 100 is placed inside, and an exit 62 for transporting the object 100 inside the shielding box 6 to the outside of the shielding box 6. There is.

As shown in FIG. 4, the transport mechanism 7 is a mechanism that transports the tray 10 on which the object to be inspected 100 is placed from the entrance 61 to the inspection table 4, and further from the examination table 4 to the exit 62. The transport mechanism 7 is provided approximately linearly in a direction connecting an inlet 61 and an outlet 62 provided in the shielding box 6 , and passes through the shielding box 6 . That is, the conveyance path of the conveyance mechanism 7 is a generally straight line connecting the carry-in port 61 and the carry-out port 62 provided in the shielding box 6. The transport mechanism 7 includes a carry-in conveyor 71 and a carry-out conveyor 72 provided before and after the inspection table 4 provided in the middle of the transport route. The carry-in conveyor 71 is provided on the carry-in port 61 side of the shielding box 6 and transports the object to be inspected 100 from the carry-in port 61 to the inspection table 4 . The carry-out conveyor 72 is provided on the side of the carry-out port 62 of the shielding box 6 and conveys the object to be inspected 100 from the inspection table 4 to the carry-out port 62 . Protrusions 73 are provided at regular intervals on the surfaces of the carry-in conveyor 71 and the carry-out conveyor 72, and the protrusions 73 engage with recesses provided on a pair of sides perpendicular to the conveyance direction of the tray 10, thereby moving the tray 10. Position. Since the carry-in conveyor 71 and the carry-out conveyor 72 of this embodiment have two conveyor belts, two recesses of the tray 10 are provided on each pair of sides perpendicular to the conveyance direction, and four protrusions are formed in a total of four recesses. 73 is engaged. In this way, the trays 10 are conveyed at a constant interval by the protrusions 73 provided on the two belts.

As shown in FIG. 4, the transport mechanism 7 is a transport mechanism 8 that transports the tray 10 on which the object to be inspected 100 is placed from the carry-in conveyor 71 to the inspection table 4 and from the inspection table 4 to the carry-out conveyor 72. Equipped with The transfer mechanism 8 of this embodiment transfers two trays 10 on the carry-in conveyor 71 and the trays 10 on the inspection table 4 at the same time. Therefore, the transfer mechanism 8 includes two arms 81a and 81b of a length that can support the tray 10 stopped on the carry-in conveyor 71 in front of the inspection table 4 and the tray 10 on the inspection table 4 from below. . The two arms 81a and 81b are disposed between the two belts of the carry-out conveyor 72, and are generally U-shaped members in a plan view whose base ends are connected to each other. The distal ends of the two arms 81a and 81b protrude toward the carry-in conveyor 71, and the base ends are supported by an arm moving mechanism 82 provided on the carry-out conveyor 72 side.

The arm moving mechanism 82 reciprocates the two arms 81a and 81b along the carry-out direction (X-axis direction) of the carry-out conveyor 72, and removes the tray 10 from the surfaces of the carry-in conveyor 71, the inspection table 4, and the carry-out conveyor 72. Raise and lower. That is, the arm moving mechanism 82 includes two rails 82a extending in the X-axis direction and a slider 82b running on the rails 82a. The arm moving mechanism 82 also includes a lifting mechanism 82c that moves the two arms 81a and 81b in the vertical direction (Z-axis direction). For example, a ball screw mechanism driven by a servo motor can be used as the lifting mechanism 82c.

As shown in FIG. 5, the control device 9 controls the radiation generator 2, the radiation detector 3, the examination table 4, the imaging section 5, the transport mechanism 7, and the transport mechanism 8. Further, the control device 9 analyzes the fluoroscopic images taken by the radiation generator 2 and the radiation detector 3 and the images taken by the imaging unit 5. That is, the inspection object 100 is conveyed by the carry-in conveyor 71, the carry-out conveyor 72, and the transfer mechanism 8 of the conveyance mechanism 7. Further, the imaging unit 5 is caused to image the object 100 on the inspection table 4, and based on this image, the inspection table 4 is moved in the XYZ directions to align the corner of the object 100 with the optical axis of the radiation beam. Furthermore, the radiation generator 2 and the radiation detector 3 are caused to image the inspection object 100. The control device 9 is a so-called computer, and includes a CPU, a storage such as an HDD or an SSD, a RAM, and a driver circuit. The storage stores programs, the RAM expands programs and temporarily stores data, the CPU processes programs, and the driver circuit supplies power to each component according to the processing results of the CPU.

[1-2. Effect of embodiment]
The transportation and inspection procedure of the inspection object 100 of this embodiment will be described below with reference to FIGS. 6 and 7. On the transport path of the transport mechanism 7, trays 10 on which objects to be inspected 100 are placed are positioned and lined up at regular intervals. The conveyance mechanism 7 conveys these trays 10 from the carry-in port 61 to the carry-out port 62. First, the carrying-in conveyor 71 of the carrying mechanism 7 carries these trays 10 from the carrying-in port 61 to the front of the inspection table 4. When the carry-in conveyor 71 conveys the tray 10 (hereinafter also referred to as the target tray 10a) on which the inspection object 100 to be inspected is placed in front of the inspection table 4, the operation of the belt conveyor is temporarily stopped. Note that a tray 10 (inspected object 100) that has just been inspected is placed on the inspection table 4 (hereinafter also referred to as an inspected tray 10b). Here, the height of the inspection table 4 and the height of the transport mechanism 7 are approximately the same. That is, the inspection table 4 is located at the transport height position L.

As shown in FIG. 6A, the two arms 81a and 81b are moved by the transfer mechanism 8 in the direction of the target tray 10a (X-axis direction). The two arms 81a, 81b pass between the three pillars 44 of the inspection table 4 from their tips, go under the inspected tray 10b, and advance below the target tray 10a (step S01). As shown in FIG. 6(b), when the tips of the two arms 81a and 81b advance beyond the bottom of the target tray 10a, they stop moving in the X-axis direction and then move upward. do. At this time, the two arms 81a and 81b protrude from between the two belts of the carry-in conveyor 71 and between the three surfaces of the support surface 43, and lift the target tray 10a and the inspected tray 10b (step S02). .

As shown in FIG. 6(c), when the target tray 10a and the inspected tray 10b are separated from the two belts and the inspection table 4 by this lifting, the two arms 81a and 81b stop moving upward. Then, it moves in the direction of the carry-out conveyor 72 (X-axis direction), and moves the target tray 10a above the inspection table 4 and the inspected tray 10b above the carry-out conveyor 72 (step S03). As shown in FIG. 6(d), when the target tray 10a reaches above the inspection table 4, the two arms 81a and 81b stop moving in the X-axis direction and move downward. At this time, the two arms 81a and 81b move downward passing between the three surfaces forming the support surface 43, and the target tray 10a leaves the hands of the two arms 81a and 81b and reaches the conveyance height position. It is delivered to the support surface 43 of the inspection table 4 located at L (step S04). Further, at the same time as the target tray 10a is delivered to the inspection table 4, the inspected tray 10b is also delivered to the carry-out conveyor 72. This transfer is performed by the two arms 81a and 81b passing between the two belts of the carry-out conveyor 72 and moving downward. At this time, the recess 12 provided in the inspected tray 10b engages with the protrusion 73 provided on the surface of the two belts of the carry-out conveyor 72, and is positioned.

Upon receiving the target tray 10a from the transfer mechanism 8, the inspection table 4 uses the moving mechanism 41 to raise the target tray 10a from the transport height position L to the inspection height position H (step S05). When the heights of the objects 100 to be inspected are substantially the same, the moving distance from the transport height position L where the inspection table 4 receives the target tray 10a to the inspection height position H is constant. On the other hand, if there is variation in the height of each object to be inspected 100, the height of the corner of the object to be inspected 100 is detected by capturing an image of the object to be inspected 100 from above using the two imaging units 5. You may adjust the distance.

At the inspection height position H, the imaging unit 5 images the object to be inspected 100 placed on the target tray 10a from above. The control device 9 acquires and analyzes the image captured by the imaging unit 5, and checks whether there is any positional shift of the inspected object 100 in plan view. When a positional shift is detected, the inspection table 4 adjusts the position of the inspected object 100 using the moving mechanism 41 and moves it to the inspection position P (step S06).

Detection of this positional shift is carried out, for example, by storing in advance the lines of the optical axes of the two radiation beams in a plan view in the control device 9, and from the image taken by the imaging unit 5, the line on the radiation side of the object 100 to be inspected. This is done by determining whether the two corners are on the line of this optical axis. When a positional shift is detected, the movement mechanism 41 or the rotation mechanism 42 of the inspection table 4, or both of them, move the inspection table 4 so that the two corners on the radiation side of the inspection table 100 are on the line of this optical axis. Move 100.

This movement will be briefly explained. FIG. 3 shows a state in which only corner A1 of the four corners A1, A2, A3, and A4 of the inspected object 100 that has been moved to the height position H is located on the line of the optical axis of the radiation beam. There is. First, the imaging unit 5 images the positional relationship between the optical axis and the corner of the object to be inspected 100 from above. Next, by analyzing this captured image, the control device 9 recognizes that the object to be inspected 100 is not at the inspection position P, and moves the object to be inspected 100 to the inspection position P in the X-axis and Y-axis directions. Calculate the amount of movement in the axial direction. The control device 9 moves the subject 100 using the moving mechanism 41 or the rotating mechanism 42 of the examination table 4, or both, based on this movement amount.

As an image processing method for calculating such a movement amount, for example, a method using pattern matching, a method using a phase-only correlation method, etc. can be used. Also, a known alignment algorithm such as ICP may be used.

After the inspected object 100 placed on the tray 10 moves to the inspection position P, the two radiation generators 2 irradiate the inspected object 100 with radiation beams from two different directions. Of the four corners of the inspected object 100 in plan view, images of A1 and A2 are captured simultaneously, and the radiation that passes through A1 and A2 is detected by the radiation detector 3 (step S07-1). The control device 9 acquires the photographed fluoroscopic images at A1 and A2 of the inspected object 100 from the radiation detector 3, and determines whether the inspected object 100 is good or bad according to a predetermined program. After this, the process proceeds to step S08, which will be described later, but a step of capturing images of A3 and A4 may be inserted before that. That is, the rotation mechanism 42 of the inspection table 4 rotates the support surface 43 by 180 degrees, and the two radiation generators 2 simultaneously image A3 and A4 of the four corners of the object to be inspected 100 (step S07-2). , the process may proceed to step S08.

Step S08 is a step of moving the inspection table 4 downward to the transport height position L after capturing the image of the inspection object 100. That is, the tray 10 (inspected object 100) that has just been inspected is located at the transport height position L. Finally, the carry-in conveyor 71 transports the next target tray 10a to the front of the inspection table 4, and the carry-out conveyor 72 transports the first inspected tray 10b toward the carry-out port 62 (step S09). That is, a space is provided on the carry-out conveyor 72 for placing the inspected tray 10b to be transferred next from the support stand. The above operations of steps S01 to S09 are repeated, and the objects to be inspected 100 placed on the tray 10 are sequentially transported and inspected.

[1-3. Effects of embodiment]
(1) In this embodiment, two radiation generators 2 are provided, and the optical axes of the respective radiation beams are provided to intersect in front of the object to be inspected 100. Only two of the corners can be imaged at a time. This makes it possible to eliminate the step of imaging one corner of the object 100 and then rotating the object 100 to image another corner again, so the inspection tact of the object 100 can be reduced. can be improved.

(2) In this embodiment, it is possible to detect a positional shift of the inspected object 100 based on the captured image of the inspected object 100 by the imaging unit 5, and correct this positional shift using the moving mechanism 41 of the inspection table 4. can. Thereby, the corners of the object to be inspected 100 can be accurately imaged regardless of variations in the size of the object to be inspected 100.

(3) In this embodiment, the rotation mechanism 42 of the inspection table 4 can rotate the inspection object 100 by 180 degrees. As a result, even when all four corners are imaged in order to strictly judge the quality of the inspected object 100, a process of 4 degrees of imaging and 3 degrees of rotation is required in the conventional method. The inspection can be completed with only two imaging steps and one rotation.

(4) In this embodiment, the two trays 10 on the carry-in conveyor 71 and the trays 10 on the inspection table 4 can be transferred simultaneously by the transfer mechanism 8 including the two arms 81a and 81b. As a result, the inspection tact of the object to be inspected 100 can be improved compared to the case where the two steps of first transferring the tray 10 on the inspection table 4 and then transferring the tray 10 on the carry-in conveyor 71 are performed. can.

(5) In this embodiment, the belt conveyor of the transport mechanism 7 is provided with protrusions 73 at regular intervals, and the tray 10 on which the object to be inspected 100 is placed is provided with the recesses 12 that engage with the protrusions 73. There is. Thereby, the interval between the trays 10 to be transported can be made constant, so that the simultaneous transport of the two trays 10 by the transport device is ensured.

[2. Other embodiments]
Although a plurality of embodiments according to the present invention have been described in this specification, these embodiments are presented as examples and are not intended to limit the scope of the invention. The embodiments described above can be implemented in various other forms, and various omissions, substitutions, and changes can be made without departing from the scope of the invention. These embodiments and their modifications are included within the scope and gist of the invention as well as within the scope of the invention described in the claims and its equivalents.

(1) In the first embodiment, when the positional deviation of the corner of the inspected object 100 is detected, the inspection table 4 is moved to align with the optical axis of the radiation beam, but the irradiation direction of the radiation generator 2 is changed. You may change it. In this case, the radiation generator 2 and the radiation detector 3 are provided with a moving mechanism 41, and the moving mechanism 41 can change the irradiation direction and the detection direction opposite thereto.

(2) In the transfer mechanism 8 of the first embodiment, the two arms 81a and 81b scoop up the tray 10 from below and transfer it, but for example, the transfer mechanism 8 may grasp the tray 10 from above and transfer it. It may be. Furthermore, the number of arms 81a and 81b is not limited to two, but may be three, for example. In this case, the support surface 43 of the inspection table 4 consists of four surfaces.

(3) In the first embodiment, two sets of radiation generators 2 and radiation detectors 3 are arranged so that corners A1 and A2 of the object to be inspected 100 can be imaged simultaneously, but the other two corners can be imaged simultaneously. It is also possible to arrange two sets of radiation generators 2 and radiation detectors 3 so that the radiation generator 2 and the radiation detector 3 can be used. For example, the two radiation generators 2 may be placed on the unloading side of the inspection table 4 so as to photograph the two front corners (A2 and A3 in FIG. 3) of the inspection object 100 in the transport direction; Two radiation generators 2 may be arranged on the carry-in side of the examination table 4 so as to photograph the two rear corners (A1 and A4 in FIG. 3).

(4) In the first embodiment, the transport mechanism 7 for the tray 10 and the inspection table 4 are separate members, but the transport mechanism 7 for the tray 10 itself can also serve as the inspection table 4. That is, if the tray 10 transported by the transport mechanism 7 is accurately positioned, the transport mechanism 7 is stopped at the inspection position P by the two sets of radiation generators 2 and radiation detectors 3, and the tray 10 is transported in that state. A perspective image of the inspection object 100 on the tray 10 held by the mechanism 7 may be taken.

1...Non-destructive inspection device 10...Tray 10a...Target tray 10b...Inspected tray 11...Positioning member 12...Recess 100...Object to be inspected 2...Radiation generator 3...Radiation detector 4...Inspection table 41...Movement mechanism 42... Rotating mechanism 43...Supporting surface 44...Strut 5...Imaging unit 6...Shielding box 61...Carrying inlet 62...Carrying out port 7...Transporting mechanism 71...Carrying in conveyor 72...Carrying out conveyor 73...Protrusion 8...Transfer mechanism 81a, 81b...Arm 82 ...Arm moving mechanism 82a...Rail 82b...Slider 82c...Elevating mechanism 9...Control device

Claims (4)

two radiation generators that irradiate a radiation beam to an object to be inspected having four corners;
two radiation detectors provided opposite to the two radiation generators, respectively;
an inspection table on which the object to be inspected is placed;
two imaging units provided at a predetermined interval above the inspection table , which capture images of the object to be inspected;
Equipped with
The optical axis of the radiation beam intersects in front of the object to be inspected, and transmits through two corners on the radiation generator side among the four corners of the object to be inspected,
The examination table includes a moving mechanism,
The moving mechanism moves the two corners to the light of the radiation beam based on the positional relationship between the optical axis of the radiation beam acquired from the images captured by the two imaging units and the two corners of the object to be inspected. Align with the axis
Non-destructive testing equipment. The examination table includes a rotation mechanism,
The rotation mechanism directs two corners of the object to be inspected, which are opposite to the radiation generator, toward the radiation generator.
The non-destructive testing device according to claim 1. a conveyance mechanism that is provided on an input side and an output side of the inspection table, and conveys a plurality of the inspection objects arranged at regular intervals;
The object to be inspected placed on the transport mechanism on the carry-in side is transferred to the inspection table, and the object to be inspected placed on the inspection table is transferred to the transfer mechanism on the carry-out side. A transport mechanism that simultaneously transports the
further comprising;
The non-destructive testing device according to claim 1. The transfer mechanism is
two arms that support the object to be inspected placed on the transport mechanism on the carry-in side and the object to be inspected placed on the inspection table from below;
an arm movement mechanism that supports the two arms and reciprocates and raises and lowers the two arms;
The arm moving mechanism reciprocates the two arms along the carry-out direction of the carry-out side conveyance mechanism, and also moves the two arms back and forth along the carry-out direction of the carry-out-side conveyance mechanism, and also moves the two arms between the carry-out side conveyance mechanism, the inspection table, and the surface of the carry-out side conveyance mechanism. configured to raise and lower the inspected object from
The non-destructive testing device according to claim 3.

Images