JP7412226B2 - sliding parts - Google Patents

Description

The present invention relates to sliding parts, and for example, to sliding parts suitable for mechanical seals.

It has been known for a long time to use ceramics such as silicon carbide for sliding members used in mechanical seals, but in recent years, carbon fiber-reinforced carbonized materials, which are hard, hard to wear, have suitable sealing properties and lubricity, have been used. Applications of silicon ceramics are attracting attention.

For example, Patent Document 1 discloses a sealing sliding member that has a sliding surface that slides against another member and seals a fluid through the sliding surface, and the longitudinal direction of the fibers is approximately parallel to the sliding surface. A sealing slide is described having carbon fibers oriented in parallel and silicon carbide disposed between the plurality of carbon fibers.

FIG. 4 shows an enlarged cross-sectional view of a part of an example of a conventional sliding component in which a sealing sliding member disclosed in Patent Document 1 is attached to a base material. The sealing sliding member 11 is attached via the bonding material 13 along one main surface 12a of the base material part 12, and the sliding surface 11a of the sealing sliding member 11 is in contact with the one main surface 12a of the base material part 12. arranged in parallel. The outer edge of the sealing sliding member 11 in contact with the base material portion 12 is covered with a curved meniscus portion M made of the bonding material 13.

By the way, since the ceramic forming the sealing sliding member disclosed in Patent Document 1 is a brittle material, when it is used for the sliding part of a mechanical seal used in harsh environments, it is susceptible to impact. There was a weakness. In addition, under conditions where the rotational speed fluctuates rapidly or the liquid to be sealed contains solids, solids may enter the sliding surface during sliding, a phenomenon known as "togu fishing" (getting caught during sliding). There was a problem in that the sliding part, including the sliding surface, was damaged.

It has also been reported that a temperature increase due to high-speed rotation or a high-temperature sealing material causes large thermal stress in the sliding parts, leading to destruction.

By the way, Patent Document 2 proposes a ceramic bonded body having a hollow structure in which the bonding surfaces of ceramic members are bonded via a bonding layer made of a ceramic bonding material having a lower melting temperature than the ceramic members. ing.

Patent No. 6219373 Japanese Patent Application Publication No. 2007-246319

In order to solve the problem of the sealing sliding member disclosed in Patent Document 1 mentioned above, an attempt was made to apply the invention described in Patent Document 2, but silicon carbide ceramics containing carbon fibers have a low elastic modulus. Therefore, there were problems such as deformation due to sealing pressure and leakage of the sealant.
In other words, focusing only on the physical properties of the sliding members that come into direct contact with each other is insufficient to improve the performance of the mechanical seal as a whole. It can be said that there is room for consideration in the combination of (hereinafter referred to as sliding parts).

The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a sliding component for realizing a mechanical seal with higher performance.

The present invention provides a sliding component consisting of a sliding part and a base material part, wherein the base material part has a higher elastic modulus than the sliding part and is parallel to the sliding surface of the sliding part. A fitting portion into which the sliding portion is fitted is provided on one main surface of the base material portion, and the sliding portion and the base material portion are joined at the fitting portion with a bonding material, The outer edge portion of the fitting portion located on one main surface of the base material portion is covered with a curved meniscus portion made of the bonding material , and the sliding portion is made of a carbon fiber reinforced silicon ceramic composite material and the base material. The device is characterized in that the part is made of silicon-based ceramics, and the bonding material is made of silicon .

By having such a configuration, as a sliding component, it is possible to improve the properties required of a mechanical seal, such as sliding performance, sealing performance, and durability, to a high level.

In order to exhibit such excellent performance, the present invention is such that the sliding part is made of a carbon fiber-reinforced silicon ceramic composite material, the base material part is made of silicon ceramic, and the bonding material is made of silicon.

Further, in a more preferable aspect of the present invention, the width of the sliding part parallel to the one main surface of the base material part is L1, and the sliding part is embedded in the fitting part formed on the one main surface of the base material part. L1/L2 is in the range of 1.5 or more and 20 or less, where L2 is the buried thickness dimension of the sliding portion.

Furthermore, it is more preferable that the shortest distance X between the meniscus part and the outer edge of the fitting part is 0.1 times or more and 0.7 times or less of the L2.

According to the present invention, as a sliding component in which fiber-reinforced ceramics are applied to the sliding portion, conventional problems can be appropriately solved, and a mechanical seal with higher performance can be provided.

A schematic cross-sectional view (A) and a schematic front view (B) showing a sliding component according to one embodiment of the present invention A schematic cross-sectional view of the sliding part and its vicinity in Figure 1(A) A schematic cross-sectional view of the enlarged meniscus part in Figure 2 A cross-sectional schematic diagram showing the form of a sliding part according to one conventional aspect.

Hereinafter, the present invention will be described in detail with reference to the drawings. The present invention provides a sliding component consisting of a sliding part and a base material part, wherein the base material part has a higher elastic modulus than the sliding part and is parallel to the sliding surface of the sliding part. A fitting part that fits into the sliding part is provided on one main surface of the base material part, and the sliding part and the base material part are joined at the fitting part by a bonding material, An outer edge portion of the fitting portion located on one main surface of the base material portion is covered with a curved meniscus portion made of the bonding material.

FIG. 1 is a schematic cross-sectional view (A) and a schematic front view (B) showing a sliding component according to one embodiment of the present invention. Here, since the sliding component Z is a cylindrical body centered on the rotation axis, the front surface is one surface perpendicular to the rotation axis, and the cross section is one surface perpendicular to the front surface including the rotation axis.

Note that the schematic diagrams shown in the present invention schematically simplify and emphasize the shapes for explanation, and the detailed shapes, dimensions, and ratios differ from the actual ones. Further, the reference numerals are omitted for the same configurations, and other configurations unnecessary for the explanation are not described.

As shown in FIG. 1, the sliding part Z includes a sliding part 1, preferably formed in an annular shape, that slides in surface contact with another sliding part (not shown), and a base for fixing this sliding part 1. It is a cylindrical body consisting of a material part 2 and having a through hole 2A in the center of the base material part 2 through which a rotating shaft (not shown) passes.

The sliding part 1 satisfies the characteristics required when applied to a mechanical seal, but in the present invention, fiber-reinforced ceramic is used on the premise that it will exhibit excellent sliding performance under harsher conditions. is preferably applied. Such fiber-reinforced ceramics are, for example, silicon carbide ceramics containing carbon fibers as described in Patent Document 1.

In the present invention, the modulus of elasticity of the base material portion 2 is greater than the modulus of elasticity of the sliding portion 1.

The sliding part 1 is preferably made of fiber-reinforced ceramics, but as mentioned above, this fiber-reinforced ceramic has a low elastic modulus, so when used as a mechanical seal, it deforms due to the sealing pressure of the fluid and the sealing material leakage occurs. In addition, the strength is not sufficient, and there are concerns about improving durability.

Therefore, in the present invention, the sliding part 1 having a sliding surface has physical properties specialized for sliding characteristics, and deformation prevention and durability improvement are ensured by the base material part 2 to which the sliding part 1 is directly fixed. As a result, it has excellent overall characteristics as a mechanical seal. One embodiment of this is that the modulus of elasticity of the base material portion 2 is greater than the modulus of elasticity of the sliding portion 1.

As the base material part 2, when fiber-reinforced ceramics are applied to the sliding part 1, a single ceramic material containing no fibers is exemplified. As a specific combination, when the sliding material 1 is carbon fiber reinforced silicon carbide ceramics, the base material portion 2 is a so-called single composition silicon carbide ceramics. The term "single composition" as used herein means that the main component is silicon carbide, and several percent of other elements (silicon, boron, unavoidable impurities) may be included.

The above-mentioned difference in elastic modulus depends on the material used and the shape of the sliding part 1 or the base material part 2, so it is not easy to define it unambiguously. Under the limited condition that the base material portion 2 is used as a base member, the elastic modulus of the base material portion 2 is more preferably 1.1 times or more and 1.5 times or less than the elastic modulus of the sliding portion 1.

If the modulus of elasticity of the base material portion 2 is less than 1.1 times the modulus of elasticity of the sliding portion 1, the strength of the base material is insufficient, and the effects of the present invention are difficult to obtain. On the other hand, if the elastic modulus of the base material 2 exceeds 1.5 times the elastic modulus of the sliding part 1, the difference in physical properties other than the elastic modulus, such as the coefficient of thermal expansion, will increase, and the difference between the base material 2 and the sliding part will increase. This is also undesirable since there is a possibility that cracks may be generated at the contact portion of No. 1 due to the difference in thermal stress.

In the present invention, a fitting portion into which the sliding portion is fitted is provided on one main surface of the base material portion 2 that is parallel to the sliding surface of the sliding portion 1. FIG. 2 is an enlarged cross-sectional schematic diagram of the sliding portion and its vicinity in FIG. 1(A).

As shown in FIG. 2, a concave fitting part 2c is provided on one main surface 2a of the base material part 2, which is parallel to the sliding surface 1a of the sliding part 1, so that the sliding part 1 is fitted into the main surface 2a. There is. Here, the sliding surface 1a of the sliding part 1 and the main surface 2a of the base material part 2 which are parallel to each other are not strictly required to be parallel to each other. In consideration of wear of the sliding surface 1a due to this, displacement of the sliding part 1, etc., deviation from perfect parallelism (about 1%) is allowed within a range that does not cause any practical problems.

In the present invention, the sliding part 1 and the base material part 2 are joined by the joining material 3 at the fitting part 2c.

As shown in FIG. 2, the sliding part 1 and the base material part 2 are inserted in such a way that a part of the base material part 2 is inserted into the fitting part 2c, and the bonding material 3 is interposed between the parts and the fitting part 2c. It is joined at 2c. In other words, it can be said that the bonding material 3 plays a role similar to an adhesive.

In the present invention, the sliding portion 1 and the base material portion 2 are bonded using the bonding material 3 using a known technique for bonding ceramics together. For example, there is a method of joining members made of silicon carbide by melting metal silicon.

Further, in the present invention, the outer edge portion of the fitting portion 2c located on one main surface 2a of the base material portion 2 is covered with a curved meniscus portion M made of the bonding material 3.

As shown in FIG. 2, the outer edge 2b of the fitting part located on one main surface 2a of the base material part 2, that is, the annular part corresponding to the joint between the sliding part 1 and the fitting part, is exposed. Instead, it is covered with the bonding material 3, and its shape is a so-called meniscus shape, as exemplified by the invention described in Patent Document 2, for example.

The meniscus portion M plays the role of maintaining the bonding strength between the sliding portion 1 and the base material portion 2 and ensuring the sealing performance of the fitting portion 2c. In addition, in the present invention, although it is ideal that the meniscus portion M is formed uniformly over the entire circumference of the annularly recessed fitting portion 2c, it is not necessarily limited to this. Instead, the meniscus portion M may be formed in a part of the entire circumference of the fitting portion 2c (approximately 60% or more).

As described above, in a preferred embodiment of the present invention, the sliding portion 1 is made of a carbon fiber-reinforced silicon-based ceramic composite material (carbon fiber-reinforced silicon carbide ceramics), the base material portion 2 is made of silicon-based ceramics (silicon carbide ceramics), and the bonded The material 3 is made of silicon. In this way, since the sliding part 1 and the base material part 2 both use silicon, which is the same as the bonding material 3, as a common constituent material, the bonding of each member is highly compatible, which is preferable.

More preferred embodiments of the present invention will be described below. The width of the sliding part 1 parallel to one main surface 2a of the base material part 2 is L1, and the embedded thickness of the sliding part 1 buried in the fitting part 2c formed on the one main surface 2a of the base material part 2. When the dimension is L2, it is more preferable that L1/L2 is in the range of 1.5 or more and 20 or less.

In the present invention, as shown in FIG. 2, the sliding part 1 is held by a fitting part 2c provided on the base material part 2. By providing the fitting portion 2c, compared to the conventional example shown in FIG. 4, in which the sliding member 11 and the base material portion 12 are joined to each other plane-to-plane, the displacement in the radial direction of the rotating shaft is particularly reduced. Prevention becomes stronger.

By the way, it has been found that in a form like the sliding component Z of the present invention, there is an optimal range for the shape of the fitting portion 2c.

As mentioned above, the sliding part 1 has a lower elastic modulus than the base material part 2. Therefore, the outer circumferential surface of the sliding part 1 that contacts the outer edge 2b of the fitting part 2c shown in FIG. 2 is subjected to stress in various parts in the radial direction, and there is a considerable risk of chipping or cracking.

Here, as shown in Fig. 1(B), the sliding part Z is point symmetrical with respect to the rotation axis, and centrifugal force is applied equally at all points in the circumferential direction, and the above-mentioned parts As long as the stress is uniform throughout the circumference, the contact area is large, so no chips or cracks will occur.

However, although the actual sliding part Z is precisely designed, the rotation center axes of the sliding part 1, the base material part 2, and the rotating shaft (not shown) are very small. However, there is a shift. In addition, there are considerable variations in the design accuracy of the fitting part 2c of the base material part 2, the filling of the bonding material 3, the thickness of the meniscus part M, etc. in the actual product, and this is due to the fact that the slider rotating at high speed This causes eccentricity in the moving part Z and causes stress variations in the radial direction.

Therefore, compared to an ideal state in which the sliding part 1 and the base material part 2 are completely circular in the area perpendicular to the rotation axis, the stress at the outer edge part 2b of the fitting part 2c is high. Moreover, it becomes non-uniform in the circumferential direction.

Therefore, in a more preferable aspect of the present invention, L1/L2 is in the range of 1.5 or more and 20 or less so that the risk of chipping or cracking in the sliding part 1 can be reduced even in the above state. I did it like that.

If L1/L2 is less than 1.5, the area of L1 that supports the pressure in the direction of the rotating shaft of the sliding part 1 will be too small, so the holding force that fixes the sliding part 1 and the base material part 2 in the rotating direction will be insufficient. Run short. Moreover, the area of the sliding surface 1a cannot be increased, and the design restrictions for the sliding component Z become large, making it impractical.

When L1/L2 exceeds 20, the proportion of L2, which has the role of releasing stress at the outer edge 2b of the fitting part 2c, becomes too small in the area of the sliding part 1 that supports centrifugal force in the radial direction. Increased risk of chipping or cracking.

Note that the sliding part Z assumed in the present invention does not have a very large diameter, and the outer diameter of the sliding part 1 is about 10 to 100 mm, and the radial width of the sliding surface 1a is about 1 to 30 mm. , the effects of the present invention can be effectively enjoyed.

In a further preferred embodiment of the present invention, the shortest distance X between the meniscus portion M and the outer edge portion 2b of the fitting portion 2c is 0.1 times or more and 0.7 times or less of L2. This will be explained using FIG. 3.

The role of the meniscus portion M is to ensure sealing performance and improve the bonding strength between the sliding portion 1 and the base material portion 2. From this point alone, it can be said that there is no problem since the meniscus portion M is large.

However, if the meniscus portion M is too large, not only does the manufacturing cost increase, but also the influence of deterioration under harsh usage environments becomes apparent. The joint formed in the fitting part 2c by the joint material 3 (hereinafter indicated by the same reference numeral 3 as the joint material) is weak in strength and easily cracks, and once a crack occurs, it will last for a short period of time. may spread over a wide area and cause serious damage.

The present inventor also paid attention to the size of the meniscus portion M of the sliding part Z, and considered measures that could ensure the necessary and sufficient sealing performance and improvement of the bonding strength between the sliding part 1 and the base material part 2. . In other words, since it can be said that the starting point of the above-mentioned crack is in most cases the outer edge 2b of the fitting part 2c, the buried thickness dimension L2 in the fitting part 2c is a representative parameter that affects the stress at that part. A relationship with L2 of the sliding portion 1 was found as a condition for selecting and forming the minimum necessary meniscus portion M.

Here, the size of the meniscus portion M is expressed by the shortest distance X between the meniscus portion M and the outer edge portion 2b of the fitting portion 2c. This can be evaluated by cleaving the sliding part Z at a diameter part equidistant from the rotation axis and observing the cross section with a microscope.

The curved shape of the meniscus portion M has the effect of effectively dispersing stress, but if the shortest distance X is less than 0.1 times L2, the proportion occupied by this curved surface becomes too small There is a possibility that the effect of the meniscus cannot be obtained.

On the other hand, if the shortest distance X exceeds 0.7 times L2, the meniscus portion M becomes too large, and there is a fear that the meniscus portion M itself may be damaged due to insufficient strength.

As described above, the sliding part Z according to the present invention has a combination with the base material part 2 that overcomes the weaknesses of fiber-reinforced ceramics when fiber-reinforced ceramics with excellent sealing properties and wear resistance is used as the sliding material 1. Furthermore, by devising the joining form between the sliding part 1 and the base material part 2, we were able to effectively improve the characteristics required of a mechanical seal.

Hereinafter, the present invention will be specifically explained based on experimental examples, but the present invention is not limited thereto.

[Example 1]
The sliding part 1, the base material part 2, and the joint part 3 were produced by the method shown below, and a sliding part Z consisting of a combination of these parts was manufactured.

(Sliding part 1)
The powder raw material was prepared by mixing 20 parts by weight of carbon fibers with an average length of 6 mm, 30 parts by weight of silicon carbide powder with an average particle size of 0.8 μm, and 10 parts by weight of carbon black with an average particle size of 50 nm. To this powder raw material were added 15 parts by weight of ethanol, 10 parts by weight of phenol resin, 10 parts by weight of sorbitol polyglycidyl ether, which is a crosslinking polymerizable resin such as imine resin, and 5 parts by weight of polyethyleneimine, which is a crosslinking agent. and mixed. Then, the above mixture was put into a SUS mold (outer diameter 90 mm x inner diameter 60 mm x thickness 5 mm), and after being cured under a pressure of 100 N/cm ² , the mold was removed and placed in an air atmosphere for 150 min. Drying at 100° C. for 2 hours, primary firing at 1000° C. for 1 hour under a reducing atmosphere, and secondary firing at 2000° C. for 1 hour under a reducing atmosphere were carried out in this order. Further, the secondary fired body obtained in the above step was impregnated with molten silicon at 1600° C. for 4 hours under a reduced pressure of 10 Pa. The sliding part 1 was produced as described above. The sliding surface 1a was polished in a known manner so that the RzJIS (ten-point average roughness) was 0.4 μm.

(Base material part 2)
Silicon carbide powder raw material (α-SiC, purity 98%) with an average particle size of 0.7 μm was mixed with 0.8 wt% of boron nitride as a sintering aid, 2 wt% of a phenolic resin binder in terms of C, and then dispersed. A slurry was prepared by mixing alcohol as a medium in a resin ball mill. After the slurry was granulated by spray drying, a mold with an outer diameter of 120 mm x inner diameter of 50 mm x thickness of 20 mm, and a fitting part of 15 mm in width x 2 mm in depth was formed on one main surface, was prepared and used. A molded body was formed. The molded body was uniaxially press-molded at a pressure of 1200 kg/cm ² and then fired at 2100° C. for 1 hour to produce a silicon carbide sintered body that will become the base material portion 2.

(Joint part 3)
A silicon foil having a thickness of 700 μm was prepared, and this was pasted onto the inner surface of the fitting portion 2c of the base material portion 2, and the sliding portion 1 was further fitted. This was heated at 1600° C. for 1 hour under a reduced pressure of 10 Pa to melt the silicon and perform bonding. Note that X was adjusted to a length that caused the silicon foil to protrude from the fitting portion 2c.

Here, the elastic modulus of the sliding part 1 in Example 1 was 100 GPa, the elastic modulus of the base material part 2 was 400 GPa, and the ratio of the elastic modulus of the base material part 2 to the elastic modulus of the sliding part 1 was 4.

In the sliding component Z of Example 1, L1 is 15 mm, L2 is 2 mm, L1/L2 is 7.5, and X is 0.3 times L2 (0.6 mm).

(Comparative example 1)
A sliding part component Z of Comparative Example 1 was manufactured using a sliding part 1 having the same shape as in Example 1 and the same material as the base material part 2. That is, the ratio of the elastic modulus of the base material portion 2 to the elastic modulus of the sliding portion 1 was 1.

[Experiment Examples 1 to 8]
Experiments were conducted using sliding parts that were fabricated in the same manner as in Example 1, except that L1, L2, L1/L2, and Examples 1 to 8 were given.

(evaluation)
A general-purpose mechanical seal evaluation device incorporating the sliding part Z of Example 1 was prepared, and a liquid consisting of water mixed with 1% by weight of silicon powder with an average diameter of 0.1 mm was used as the fluid, and the rotation was performed at a flow rate of 1 L/min. It was operated for 100 hours at a shaft rotation speed of 10,000 rpm and a liquid temperature of 90°C. After that, after confirming the presence or absence of liquid leakage, the sliding part Z was removed, and the surface roughness RzJIS was measured at the center of the sliding surface 1a using a commercially available roughness meter, and the difference in roughness before and after the test was calculated. .

The evaluation was as follows. First, regarding the wear characteristics, when the difference in roughness before and after the test was 0.1 or less, it was evaluated as ○, when it was 0.1 or more and 0.3 or less, it was evaluated as △, and when it was 0.4 or more, it was evaluated as ×. Regarding the sealing performance, those with no liquid leakage were rated ○, and those with liquid leakage were rated ×. Durability is judged by appearance, and Appearance 1 is when observed visually or using a 50x microscope. △, those confirmed visually were marked as ×. Appearance 2 is determined by observing the surface of the meniscus M with the naked eye or using a 50x microscope. ○ indicates that no cracks or peeling is observed even under a microscope, and △ indicates that cracks or peeling are observed only with a microscope. Marked things as ×.

Table 1 shows the conditions of each of the above-mentioned experimental examples and their evaluation results. The overall evaluation was ○ for all items, ◎ for all items, 〇 for at least one △, and × for at least one item.

As is clear from the results in Table 1, Example 1, Experimental Example 1, Experimental Example 2, Experimental Example 5, and Experimental Example 6 had excellent wear characteristics, sealing properties, and appearance (durability). It can be said. First, regarding the sliding characteristics, the difference in roughness for all of the four mentioned above is 0.1 μm, which can be said to be a slight variation. In addition, there was no leakage in the sealing performance, no abnormality in the sliding part 1 in terms of durability, and no cracks or fissures were observed in the joint part 3 in terms of appearance.

On the other hand, in Comparative Example 1, abnormal rotation was observed during the test, so the test was discontinued. Since the sliding part 1 was made of ceramic with a high modulus of elasticity, it was subjected to a strong impact thought to be caused by the biting of silicon particles, resulting in significant damage to the joint part 3. Therefore, both appearances 1 and 2 were rated x.

Experimental Example 3 has L1/L2 of 22, which is outside the preferred range of the present invention compared to Example 1. In appearance 2, slight cracks were observed in the radial direction. This means that in the area that supports centrifugal force in the radial direction of the sliding part 1, L2, which has the role of releasing stress at the outer edge 2b of the fitting part, takes on a smaller proportion, and there is a slight risk of chipping or cracking. This seems to be due to the increase in price.

In Experimental Example 4, L1/L2 is 1, which is outside the preferred range of the present invention compared to Example 1. In appearance 2, slight cracks were observed in the circumferential direction. This seems to be because the area of L1 that supports the pressure in the rotational axis direction of the sliding part 1 becomes smaller, and the holding force for fixing the sliding part 1 and the base material part 2 in the rotational direction is somewhat insufficient.

Experimental Examples 7 and 8 are outside the more preferred range of the present invention. The curved shape of the meniscus portion M has the effect of effectively dispersing stress. In Experimental Example 7 in which the shortest distance X exceeds 0.7 times L2, the meniscus portion M becomes too large, and there is a concern that it may be damaged due to insufficient strength of the meniscus portion M itself. In this regard, in appearance 2, minute cracks are observed in a small portion of the surface of the meniscus portion M.

Further, in Experimental Example 8 in which the shortest distance X is less than 0.1 times L2, the proportion occupied by this curved surface becomes too small, and there is a possibility that the original effect of the meniscus cannot be obtained. In this regard, in appearance 1, slight chipping was also observed at the boundary between the meniscus portion M and the base material portion 2.

However, Experimental Example 3, Experimental Example 4, Experimental Example 7, and Experimental Example 8 all have slight cracks that can only be confirmed by magnifying observation, and considering that this test is a high-load test. By forming the meniscus portion M slightly thicker, it can be said that it can be used at a practically sufficient level.

Z Sliding parts 1 Sliding part
1a Sliding surface
L1 Width of sliding part
L2 Thickness dimension of the sliding part buried in the fitting part 2 Base material part 2A Penetrating part
2a One main surface of the base material part parallel to the sliding surface of the sliding part
2b Outer edge of fitting part
2c Fitting part 3 Bonding material (joint part)
M Meniscus part X Shortest distance between meniscus part M and outer edge 2b of the fitting part (thickness of meniscus part M)

Claims (3)

A sliding part consisting of a sliding part and a base material part,
The elastic modulus of the base material portion is greater than the elastic modulus of the sliding portion, and the sliding portion is fitted to one main surface of the base material portion that is parallel to the sliding surface of the sliding portion. The sliding part and the base material part are joined at the fitting part by a bonding material, and the outer edge of the fitting part located on one main surface of the base material part is covered by a curved meniscus portion made of the bonding material ,
A sliding part characterized in that the sliding part is made of a carbon fiber reinforced silicon-based ceramic composite material, the base material part is made of a silicon-based ceramic, and the bonding material is made of silicon . The width of the sliding part parallel to one main surface of the base material part is L1, and the embedded thickness dimension of the sliding part embedded in the fitting part formed on one main surface of the base material part is L1. The sliding component according to claim 1 , wherein L1/L2 is in a range of 1.5 or more and 20 or less, where L2 is taken as L2. 3. The sliding component according to claim 2, wherein the shortest distance X between the meniscus portion and the outer edge of the fitting portion is 0.1 times or more and 0.7 times or less of the L2.

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