JP7419976B2 - Vacuum valves, turbomolecular pumps and vacuum vessels - Google Patents

Description

The present invention relates to vacuum valves, turbomolecular pumps and vacuum vessels.

Turbomolecular pumps are used during etching and chemical vapor deposition (CVD) processes, such as in semiconductor production, to evacuate the vacuum vessels in which these processes occur. When particles such as products from these processes flow into the turbomolecular pump from this vacuum vessel, the particles may be blown away by the high-speed rotating rotor. These bounced particles are called recoil particles. The recoil particles may reach the interior of the vacuum vessel.

To address this problem, it has been proposed to trap recoil particles with a member placed between the vacuum vessel and the rotor. In Patent Document 1, recoil particles are captured by a cylindrical network structure formed by braiding thin wires and arranged between an intake port and a rotor of a turbo-molecular pump. In Patent Document 2, recoil particles are blocked by thin plate-shaped blocking members arranged radially on a valve body that can freely protrude into an exhaust flow path between a processing chamber and an exhaust pump.

Japanese Patent Application Publication No. 2010-223213 Japanese Patent Application Publication No. 2010-034392

However, in the methods of Patent Documents 1 and 2 described above, the conductance of the flow path is reduced by arranging a member for capturing recoil particles in the flow path.

A first aspect of the present invention is a vacuum valve that adjusts the opening area of an exhaust flow path, the valve body adjusting the opening area of the exhaust flow path and having a recess formed therein, and an interior of the exhaust flow path. a first trapping member for trapping moving particles, the first trapping member relating to a vacuum valve disposed in the recess.
A second aspect of the present invention relates to a turbo-molecular pump comprising the vacuum valve of the first aspect and a turbo-molecular pump main body formed with an inlet to which the vacuum valve is connected.
A third aspect of the present invention includes a vacuum chamber, a valve body provided on the exhaust side of the vacuum chamber and having a recess formed in a downstream surface of the exhaust flow path, and a valve body that moves inside the exhaust flow path. a first trapping member for trapping particles, the first trapping member being disposed in the recess.

According to the present invention, it is possible to suppress a decrease in conductance of a flow path while capturing recoil particles by a capturing member disposed in a vacuum valve.

FIG. 1 is a conceptual diagram showing the configuration of a semiconductor manufacturing apparatus according to an embodiment. FIG. 2 is a cross-sectional view schematically showing a semiconductor manufacturing apparatus in an embodiment in which a vacuum valve is in an open state. FIG. 3 is a cross-sectional view schematically showing a semiconductor manufacturing apparatus in a case where the vacuum valve of one embodiment is in a closed state. FIG. 4 is an enlarged cross-sectional view of the semiconductor manufacturing apparatus showing the recessed portion of the valve body. FIG. 5 is a conceptual diagram for explaining movement of recoil particles. FIG. 6A is a conceptual diagram showing the first capturing member. FIG. 6B is a conceptual diagram showing a net constituting the first capturing member. FIG. 7 is a cross-sectional view schematically showing a recessed portion of a valve body according to a modification. FIG. 8 is a cross-sectional view schematically showing a concave portion of a valve body according to a modification. FIG. 9 is an enlarged cross-sectional view schematically showing a baffle of a turbo-molecular pump according to a modification. FIG. 10 is a perspective view showing a baffle of a turbomolecular pump according to a modified example. FIG. 11 is a conceptual diagram for explaining the arrangement of the second capturing member in the baffle. FIG. 12 is a cross-sectional view schematically showing a recessed portion of a valve body according to a modification.

Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

-Embodiment-
The vacuum valve of this embodiment is a vacuum valve that is provided at the intake port of a vacuum pump that evacuates a vacuum container, and that adjusts the opening area of an exhaust flow path. The vacuum valve includes a valve body that adjusts the opening area of the exhaust flow path. This valve body includes a member that captures particles moving inside the exhaust flow path. The member placed on the vacuum valve is called the first capture member. The following embodiments will be described using an example in which a vacuum valve is disposed between a processing chamber inside a vacuum container and a turbo molecular pump that reduces pressure in the vacuum container in a semiconductor manufacturing apparatus. The vacuum container side of the vacuum valve is the intake side, and the vacuum pump side is the exhaust side.

FIG. 1 is a side view schematically showing the configuration of a semiconductor manufacturing apparatus 1 according to this embodiment. 2 and 3 are cross-sectional views schematically showing the configuration of the semiconductor manufacturing apparatus 1 when the vacuum valve 20 is in an open state and a closed state, respectively. The semiconductor manufacturing apparatus 1 includes a turbo molecular pump 10, a vacuum valve 20, and a vacuum container 40. The turbomolecular pump 10 includes a casing 11 and a rotor 12. The casing 11 includes a casing main body 11A and a flange 11B. The vacuum valve 20 includes a valve body drive section 21 , a connecting section 22 , and a valve body 24 . The valve body 24 includes a valve body body 240 and a first capture member 200, and has a recess 30 formed therein. A processing chamber 41 is formed in the vacuum container 40 .

In the turbo molecular pump 10, a rotor 12 is housed inside a casing 11 and is rotatable around AR as a rotation axis. The rotor 12 is supported, for example, in a non-contact manner by a magnetic bearing or by a ball bearing, and is driven to rotate at high speed by a motor (not shown).

The rotor 12 is formed with multiple stages of rotary blades (not shown). A fixed side fixed to the casing 11 is provided with multiple stages of fixed blades (not shown) arranged alternately with rotary blades in the axial direction of the rotation axis AR.
Although not shown, the turbo molecular pump 10 may include a cylindrical screw rotor on the rotor side and a screw stator provided on the outer circumferential side of the screw rotor on the fixed side.

The turbo molecular pump 10 is formed with an intake port 13 that communicates with the vacuum processing chamber 41 . An exhaust flow path (hereinafter also simply referred to as a flow path) for evacuating the processing chamber 41 is formed in the intake port 13 . By driving the rotor 12 to rotate at high speed, gas molecules flowing in from the intake port 13 are exhausted from an exhaust port (not shown) through a gap between the rotary blade and the fixed blade. An auxiliary pump is connected to this exhaust port so as to be able to exhaust the air.

In the following, the z-axis is taken along the rotation axis AR, and the x-axis and y-axis are set perpendicular to the z-axis and perpendicular to each other (see coordinate system 9). In FIGS. 1 to 5, 7 to 9, and 12, the x-axis is arranged perpendicularly to the paper surface, and the y-axis is arranged to the right toward the paper surface. Further, in the cross-sectional view, objects on the rear side are omitted as appropriate to provide an end view.

The vacuum valve 20 is disposed in an exhaust flow path that connects the processing chamber 41 of the vacuum container 40 and the intake port 13 of the turbo-molecular pump 10 so as to enable exhaust, and adjusts the flow rate of the flow path. The opening area of the exhaust flow path refers to the area of the cross section perpendicular to the flow direction of the exhaust flow path. The vacuum valve 20 is preferably a valve in which the valve body 24 moves from the valve seat in a direction intersecting the valve seat surface, and is more preferably a poppet valve. A poppet valve is a type of valve in which the valve body 24 moves from the valve seat in a direction perpendicular to the valve seat seat surface. A poppet valve can also be said to be a type of valve that moves in the flow direction of fluid flowing through a flow path. The example in FIG. 2 is a poppet valve, in which the connecting portion 22 corresponds to a valve seat, and the upper surface of the connecting portion 22 corresponds to a valve seat seat surface S1 parallel to the xy plane. When the vacuum valve 20 is opened and closed, the valve body 24 reciprocates in a direction (z direction) perpendicular to the valve seat surface S1 (arrow A1).

2 and 3 show the vacuum valve 20 in a fully open state and a fully closed state, respectively. In addition to these, the valve body 24 can be made to be able to stop at any position intermediate between the open position and the closed position. In this case, the vacuum valve 20 is partially open. The conductance of the channel in the partially open state takes a value between the conductance in the fully open state and the conductance (zero) in the fully closed state.

Further, in the semiconductor manufacturing apparatus 1, it is preferable that the position of the valve body 24 is automatically adjusted so as to control the pressure in the processing chamber 41. For example, under the control of a control device (not shown) of the semiconductor manufacturing apparatus 1, the pressure in the processing chamber 41 is set based on input from an input device, and the conductance of the flow path is adjusted to the position of the valve body 24 so as to achieve the pressure. Adjusted by.

The valve body drive unit 21 of the vacuum valve 20 supports the valve body 24 and moves it between an open position and a closed position. The drive mechanism of the valve body drive unit 21 is not particularly limited, and may be configured to include a pneumatic drive mechanism, an electric drive mechanism, or the like. Although the valve body drive unit 21 and the valve body 24 appear to be physically separated in FIG. 2, they are appropriately connected by a valve stem or the like. Although two valve body actuators 21 are shown in the drawings of this embodiment, the number is not particularly limited.

An opening 23 is formed in the connecting portion 22 of the vacuum valve 20 . The connecting portion 22 is formed so as to surround the opening 23 along the xy plane. The upper surface of the flange 11B of the turbo-molecular pump 10 is parallel to the xy plane and comes into contact with the lower surface of the connecting portion 22 of the vacuum valve 20. As a result, the opening 23 of the connecting portion 22 and the intake port 13 of the flange 11B are connected to enable exhaust. A sealing member (not shown) such as an O-ring is arranged on the upper surface of the flange 11B, and the flange 11B and the connecting portion 22 are sealed by the sealing member. The region of the connecting portion 22 that is sealed by the sealing member is referred to as a contact portion 220.
In the example of FIG. 2, the valve seat of the valve body 24 is provided on the upper surface of the connecting portion 22, and the contact portion 220 with which the flange 11B abuts is provided on the lower surface of the connecting portion 22. The member on which the valve seat is provided and the member on which the abutment portion 220 is provided may be made of different members.

FIG. 4 is an enlarged sectional view showing the recess 30 of the valve body 24 when the vacuum valve 20 is in an open state. The valve body 24 is made of a plate-like member and is arranged along the xy plane. A recess 30 is formed in a lower surface S2, which is a surface facing the seat surface S1 of the connecting portion 22, which functions as a valve seat of the valve body 24. The lower surface S2 is arranged along the xy plane. The recess 30 is disposed at a position facing the opening 23 on the exhaust side surface of the vacuum valve 20 of the valve body 24 . It is preferable that the central axis AC of the recess 30 substantially coincides with the rotation axis AR of the rotor 12. The first capturing member 200 is arranged in the recess 30 . It is preferable that the first capture member 200 is disposed inside the recess 30 and does not protrude from the lower surface S2 of the valve body 24. The first capture member 200 is fixed to the valve body 24 with a fixture such as a bolt, and moves together with the valve body 24 when the vacuum valve 20 is opened or closed.

In this embodiment, the surface constituting the recess 30 of the valve body 24 is a curved surface. Thereby, particles flying from the opening 23 can be bounced in a direction close to the central axis AC of the recess 30, and the particles can be prevented from entering the flow path to the processing chamber 41 located outside the recess 30, that is, on the outer peripheral side. can be suppressed. For example, when recoil particles fly along the rotation axis AR, their traveling direction is the direction (z direction) shown by arrow A2. At this time, the recoil particles are more likely to be reflected toward the inside of the recess 30 (arrow A3), and can be suppressed from entering the processing chamber 41. The shape of the recess is preferably spherical or parabolic. From the same viewpoint as above, the surface of the valve body 24 constituting the recess 30 may be an inclined surface.

The maximum diameter L3 of the recess 30 is not particularly limited as long as the first capturing member 200 can be placed in the recess 30. However, the maximum diameter L3 of the recess 30 is preferably larger than 1.1 times at least one of the maximum diameter L1 of the intake port 13 of the turbo-molecular pump 10 and the maximum diameter L2 of the opening 23 of the vacuum valve 20. . Thereby, the recess 30 can be arranged so as to cover the intake port 13 or the opening 23, and recoil particles can be further suppressed from entering the processing chamber 41. The shape of the concave portion 30 along a plane parallel to the valve body 24, that is, the shape in the xy plane of the figure is not particularly limited, but it is preferably a shape that matches the opening 23, and can be circular, elliptical, or the like.

The maximum diameter L3 of the recess 30 can be the length of the longest line segment among the line segments that are perpendicular to the central axis AC and pass through two points on the inner wall of the recess 30. The maximum diameter L2 of the opening 23 can be the length of the longest line segment among the line segments that are perpendicular to the rotation axis AR and pass through two points on the inner wall of the opening 23. The maximum diameter L1 of the intake port 13 can be the length of the longest line segment among the line segments that are perpendicular to the rotation axis AR and pass through two points on the inner wall of the intake port 13.
In other words, in a top view of each member in FIG. 4, the intake port 13, the opening 23, and the recess 30, which are openings, are circular, and the maximum diameter L3 of the recess 30 is the maximum diameter L1 of the openings 13 and 23. , L2, and includes the intake port 13 and the opening 23 within the recess 30.

The first trapping member 200 is a member for trapping particles moving inside the exhaust flow path in which the valve body 24 is arranged.

FIG. 5 is a conceptual diagram for explaining the capture of recoil particles by the first capture member 200. In the processing chamber 41 of the semiconductor manufacturing apparatus 1, particles with diameters on the order of submicrons may be generated due to chemical reactions or sliding of mechanical parts during etching processes, CVD processes, and the like. When these particles flow into the turbomolecular pump 10 through the intake port 13, they are splashed away by the rotor 12 rotating at high speed (arrow A4). If the recess 30 and the first trapping member 200 are not present, the recoil particles may advance while being reflected between the lower surface S2 of the valve body 24 and the valve seat surface S1, and reach the processing chamber 41 (broken line arrow A5). When these recoil particles reach the processing chamber 41, they adhere to the wafer and cause a deterioration in semiconductor production yield.

On the other hand, in the vacuum valve 20 of this embodiment, the recoil particles are captured by the first capture member 200, so that it is possible to suppress the recoil particles from entering the processing chamber 41. Furthermore, even if recoil particles are not captured when they enter the first capturing member 200 from the opening 23, they are reflected inward by the recess 30 (arrows A2 and A3 in FIG. 4), so that the flow toward the processing chamber 41 is prevented. It's hard to get to the road. Furthermore, since there is a high possibility that the light will pass through the first capture member 200 again after being reflected by the recess 30, there is a possibility that it will be captured during this pass.

The first capturing member 200 according to the present embodiment is a sheet-like mesh structure made of mesh-like thin metal wires. The first capturing member 200 is made of braided thin wires such as metal wires, as will be described later, and the size of the mesh is larger than the size of the particles. Therefore, although some of the recoil particles that have entered the first trapping member 200 are bounced back by the wire on the surface, most of the particles enter the first trapping member 200 and repeatedly collide with the wire inside. become. By repeating the collision, the kinetic energy of the recoil particles decreases, and eventually they are captured inside the first capturing member 200.

FIG. 6A is a conceptual diagram for explaining the mesh structure that constitutes the first capturing member 200. A cloth-like net 2000 is used as the mesh structure as described in Patent Document 1. As shown in FIG. 6B, the net 2000 is made by knitting thin metal wires such as stainless steel wires using a knitting machine. Note that the net 2000 may be a stockinette knitted net sandwiched between patterning rollers and corrugated. Instead of a net of fine metal wires, a cloth-like material obtained by knitting alumina-silica fibers made of alumina and silica may be used. In that case, in order to obtain appropriate flexibility, the proportion of silica is preferably 6 to 10%. Furthermore, the method of knitting the thin metal wires is not limited to stockinette knitting, but plain weaving or the like may be used.

Since the first capturing member 200 according to the present embodiment is configured with a net 2000 woven from metal wires or the like, the gap is larger than that of a capturing member made of felt-like metal fibers. Therefore, the recoil particles easily penetrate into the first trapping member 200 and are reliably captured.

In this embodiment, by forming a sheet-like structure in which coarse nets 2000 are laminated, recoil particles can more easily enter the first trapping member 200 . In that case, layers with the same mesh may be laminated, or the layers near the surface may have coarser meshes, while the inner layers where particles are captured may have slightly finer meshes. You can change it accordingly. In addition, when laminating relatively flat nets such as metal meshes, it is preferable to fold the metal meshes into waves and then stack them to increase the volume so that recoil particles can easily enter the inside.

The vacuum container 40 is a pressure-resistant container for performing a process such as an etching process or a CVD process in semiconductor production. A processing chamber 41 is formed in the vacuum container 40 to perform these processes inside.
In addition to being connected to the vacuum container 40 for semiconductor production, the vacuum valve 20 of this embodiment can be connected to a vacuum container for any purpose so as to be evacuated.

According to the embodiment described above, the following effects can be obtained.
(1) The vacuum valve of this embodiment is the vacuum valve 20 that is provided at the intake port 13 of the vacuum pump 10 that evacuates the vacuum container 40 and adjusts the opening area of the exhaust flow path. The vacuum valve 20 includes a valve body 24 that adjusts the opening area of the exhaust flow path and has a recess 30 formed on the side of the vacuum pump 10, and a first trapping member 200 that traps particles moving inside the exhaust flow path. The first capturing member 200 is disposed in the recess 30. Thereby, it is possible to trap recoil particles while suppressing a decrease in the conductance of the flow path.

(2) In the vacuum valve of this embodiment, the first trapping member 200 is arranged at a position facing the opening 23 connected to the exhaust flow path when the vacuum valve 20 is fully open or partially open. Ru. Thereby, recoil particles can be efficiently captured.

The following modifications are also within the scope of the invention and can be combined with the embodiments described above. In the following modified examples, parts having the same structures and functions as those in the above-described embodiment will be referred to with the same reference numerals, and descriptions thereof will be omitted as appropriate.

(Modification 1)
In the embodiments described above, the side surfaces of the recess may be substantially perpendicular to the lower surface of the valve body.

FIG. 7 is a cross-sectional view schematically showing a valve body 24A according to this modification. The valve body 24A includes a valve body 240A and a first capture member 200, and has a recess 30A formed therein. The first capturing member 200 is placed in the recess 30A. The side surface 31 of the recess 30A is formed into a cylindrical shape. The side surface 31 extends in the z-axis direction and is a surface substantially perpendicular to the lower surface S2, which is a surface facing the valve seat of the valve body 24A. Thereby, the recessed portion 30A can be easily processed.
Note that the shape of the recess 30A along a plane parallel to the valve body 24A, that is, the shape in the xy plane of the figure, is not particularly limited, but it is preferably a shape that matches the opening 23, and may be circular, elliptical, etc. can.

(Modification 2)
In the embodiments described above, a plurality of first capture members may be arranged in the recess.

FIG. 8 is a cross-sectional view schematically showing a recess according to this modification. The valve body 24B includes a valve body body 240, first capture members 200A and 200B, and a support member 245, and has a recess 30 formed therein. The first capturing members 200A and 200B are arranged in the recess 30 substantially parallel to each other. The first capture members 200A and 200B have a sheet-like structure that extends substantially parallel to the xy plane along the valve body 24B. The width of the first capturing member 200A and the width of the second capturing member 200B along the xy plane are different. The first capturing members 200A and 200B each have a width that corresponds to the width of the recess 30 at the position where the first capturing members 200A and 200B are arranged.

Support member 245 is a member for supporting first capture members 200A and 200B. The manner in which the first capturing members 200A and 200B are supported by the supporting member 245 is not particularly limited. In this modification, the support member 245 is a columnar structure extending substantially perpendicularly to the lower surface S2 of the valve body 24B. The first capture members 200A and 200B are fixed to the support member 245 with fasteners such as bolts. The material of the support member 245 is not particularly limited as long as it has sufficient strength for support, and may be metal or the like.

In this modification, a plurality of sheet-shaped first capturing members 200A and 200B are arranged in the recess 30. Thereby, the first trapping members can be arranged in accordance with the width at each depth of the recess 30, and as a result, the first trapping members can be arranged more densely in the recess 30 and particles can be captured efficiently.

(Modification 3)
In the embodiments described above, a second trapping member for trapping particles may be arranged in the flow path between the intake port and the rotor of the turbomolecular pump. The semiconductor manufacturing apparatus of this modification differs from the above-described embodiment in that the turbo-molecular pump includes a baffle for supporting the second capture member.

9 and 10 are diagrams illustrating the baffle 15. FIG. 9 is an enlarged view of a portion where the baffle 15 is provided in the turbomolecular pump of this modification. FIG. 10 is a perspective view of the baffle 15. In the turbo molecular pump 10A, fixed blades 16 and rotary blades 120 are arranged alternately along the rotation axis direction (z-axis direction). Baffle 15 is attached to flange 11B of casing 11. As shown in FIG. 10, the baffle 15 includes a disk 150, a support 151, a frame 152, and a second capture member 300. The frame 152 has a rib structure and includes an inner ring 152A, an outer ring 152B, and a radial rib 152C connecting the rings 152A and 152B.

A plurality of columns 151 are fixed to the inner peripheral surface of the inner ring 152A at equal intervals, and a disk 150 is fixed to the lower end of each column 151. The length of the support column 151 is set so that the disk 150 is placed near the top surface of the rotor 12, as shown in FIG. In the case of the magnetic levitation type, the rotor 12 is magnetically levitated and rotates at high speed, but it moves up and down slightly in the direction of the rotation axis depending on the gas load. Therefore, the disk 150 is placed at a position where it does not come into contact with the rotor 12 even if the rotor 12 moves up and down. Further, so that the disk 150 does not block the upper part of the rotor blade 120, the outer diameter of the disk 150 is set to be less than or equal to the diameter of the root portion of the rotor blade 120.

The plate-shaped second capturing member 300 is provided to cover the outer circumferential surface of the inner ring 152A, the inner circumferential surface of the outer ring 152B, and one surface of the radial rib 152C, as indicated by symbols 300A to 300C. . Note that the arrangement of the second capturing member 300C shown in FIG. 10 is applied when the rotor 12 is configured to rotate clockwise when viewed from the intake port side. In the case of a configuration in which the rotor 12 rotates counterclockwise, it is preferable to attach the second capture member 300 so that the opposite surface of the radial rib 152C is covered. The second trapping member 300 can have the same structure and material as the first trapping member 200 except for the overall shape, and the second trapping member 300 is preferably a metal mesh structure.

FIG. 11 shows the baffle 15 viewed from the intake port side. The broken line indicates the first stage rotor blade 120 of the rotor 12. Particles that fall into the pump from the intake port 13 and pass through the baffle 15 fall onto the disk 150 in the center or onto the rotor blade 120 on the outer peripheral side of the disk 150. Particles that have fallen onto the disk 150 remain on the disk and do not return to the apparatus side.

On the other hand, particles that have fallen onto the rotary blade 120 are splashed away by the rotary blade 120 that rotates at high speed. In FIG. 11, the rotor 120 is rotating clockwise as indicated by arrow R. Particles that have fallen onto the rotary blade 120 are subjected to a force in the tangential direction, and therefore have a strong tendency to be blown away in the tangential direction. FIG. 11 shows several trajectories P when particles are simply bounced off in the tangential direction. Since the particles are thus bounced off in the tangential direction, it is considered that more of the recoil particles are incident on the second trapping member 300 on the outer peripheral side. Recoil particles that have entered the second capture member 300 are captured and prevented from entering the vacuum valve.

Many of the recoil particles that are not captured by the second capturing member 300 move in a direction close to perpendicular to the intake port 13 (the z direction in the figure). These recoil particles enter the recess 30 located opposite the intake port 13 and are captured by the first capture member 200 . Therefore, in this modification, the combination of the first capturing member 200 and the second capturing member 300 allows recoil particles to be captured more efficiently.

(Modification 4)
In the embodiments described above, the vacuum valve 20 may be configured as part of a turbomolecular pump. In this case, the above-mentioned turbo-molecular pump 10 corresponds to the turbo-molecular pump body, and the turbo-molecular pump body and the vacuum valve 20 constitute the turbo-molecular pump. Alternatively, the vacuum valve 20 may be configured as part of a vacuum vessel. In this case, the vacuum container 40 described above corresponds to a vacuum container main body, and the vacuum container main body 40 and the vacuum valve 20 constitute the vacuum container. As another embodiment, the valve body 24 may be configured as a part of the vacuum container, and the valve body drive unit 22 may be configured to be detachable as a valve body drive device.

(Modification 5)
In the embodiment described above, the first capture member 200 is disposed at a position facing the opening 23 when the vacuum valve 20 is in the closed state. However, if the recess 30 is located at a position facing the opening 23 when the vacuum valve 20 is in at least one of the fully open state and the partially open state, the recess 30 is located at a position facing the opening 23 when the vacuum valve 20 is in the closed state. It doesn't have to be done.

(Modification 6)
In the embodiments described above, the first trapping member is made of a metal mesh structure, but the structure and material of the first trapping member are not particularly limited as long as they can trap particles. For example, the first trapping member may be made of felt made by compressing fibers, such as stainless steel felt or fluororesin felt, or may be made of a flexible material such as rubber material, sponge material, or cotton material. may also be used.

(Modification 7)
Although the above-described embodiment has been described using an example of a poppet valve, a recess may be formed in the valve body of the slide valve, and the first capturing member may be disposed in the recess. A slide valve is a valve whose valve body moves in a direction perpendicular to the exhaust flow path. In the case of a slide valve, recoil particles can be captured particularly efficiently in a partially open state.

(Modification 8)
In the embodiments described above, the surface of the valve body opposite to the recessed portion is flat, but a convex portion may be formed thereon. Thereby, it is possible to suppress the strength of the portion where the recessed portion is formed from decreasing.

FIG. 12 is a sectional view schematically showing a valve body 24C in this modification. The valve body 24C includes a valve body 240B and a first capture member 200. In the valve body 24C, a recess 30 is formed on the lower surface S2 facing the opening 23, and a convex portion 60 is formed on the upper surface S3 of the valve body 24C on the opposite side of the recess 30. The shape of the convex portion 60 is not particularly limited. In FIG. 12, an upside-down bowl-shaped convex portion 60 is formed in a region approximately the same size as the opening area of the opening 23 at the center of the valve body 24C. The shape of the upper surface of the convex portion 60 can be made substantially the same as the shape of the surface of the valve body 24C that constitutes the concave portion 30.

(mode)
It will be appreciated by those skilled in the art that the exemplary embodiments described above, or variations thereof, are specific examples of the following aspects.

(Section 1) A vacuum valve according to one embodiment is a vacuum valve that adjusts the opening area of an exhaust flow path, and includes a valve body that adjusts the opening area of the exhaust flow path and has a recess formed therein; and a first trapping member for trapping particles moving inside the flow path, the first trapping member being disposed in the recess. Thereby, the recoil particles can be captured by the capturing member disposed in the vacuum valve, and a decrease in the conductance of the flow path can be suppressed.

(Section 2) In the vacuum valve according to another aspect, in the vacuum valve according to the aspect of Item 1, the surface of the valve body constituting the recess is one of an inclined surface, a curved surface, a spherical surface, or a paraboloid. be able to. Thereby, the incident recoil particles can be reflected in a desired direction and captured more efficiently.

(Section 3) In the vacuum valve according to another aspect, in the vacuum valve according to the aspect of Item 1, the side surface of the recess may be substantially perpendicular to the surface of the valve body that faces the valve seat. Thereby, the recessed portion can be easily processed.

(Section 4) In the vacuum valve according to another aspect, in the vacuum valve according to any of the aspects from paragraphs 1 to 3, the recessed portion is formed when the vacuum valve is in a fully open state or a partially open state. In addition, the exhaust flow path may be disposed at a position facing the downstream opening of the exhaust flow path. Thereby, particles flying from the opening of the vacuum valve can be captured more efficiently.

(Section 5) In the vacuum valve according to another aspect, in the vacuum valve according to any one of the aspects from paragraphs 1 to 4, the vacuum valve is configured such that the valve body is oriented in a direction perpendicular to the exhaust flow path. Alternatively, the valve body may move in the flow direction of the fluid flowing through the exhaust flow path. In these vacuum valves, the influence of the first capture member on the conductance reduction is particularly small.

(Section 6) A turbomolecular pump according to one embodiment includes the vacuum valve according to any one of the embodiments from Sections 1 to 5, and a turbomolecular pump main body in which an intake port to which the vacuum valve is connected is formed. Be prepared. Thereby, it is possible to reduce recoil particles from entering the vacuum container on the intake port side of the turbo-molecular pump, and to suppress a decrease in exhaust efficiency due to a decrease in conductance.

(Section 7) In the turbo-molecular pump according to another aspect, in the turbo-molecular pump according to the aspect of Item 6, the turbo-molecular pump main body traps particles in the flow path between the intake port and the rotor. A second capture member may be provided for the capture. Thereby, it is possible to further reduce recoil particles from entering the vacuum container on the intake port side of the turbomolecular pump.

(Section 8) A vacuum container according to one embodiment includes a vacuum chamber, a valve body provided on the exhaust side of the vacuum chamber and having a recess formed in a downstream surface of the exhaust flow path, and and a first trapping member for trapping particles moving inside, the first trapping member being disposed in the recess. Thereby, it is possible to suppress recoil particles from entering from the exhaust side of the vacuum container and to suppress a decrease in exhaust efficiency.

The present invention is not limited to the contents of the above embodiments. Other embodiments considered within the technical spirit of the present invention are also included within the scope of the present invention.

DESCRIPTION OF SYMBOLS 1... Semiconductor manufacturing equipment, 9... Coordinate system, 10, 10A... Turbo molecular pump, 11... Casing, 11A... Casing body, 11B... Flange, 12... Rotor, 13... Intake port, 15... Baffle, 16... Fixed blade, DESCRIPTION OF SYMBOLS 20... Vacuum valve, 21... Valve body drive part, 22... Connection part, 23... Opening part, 24, 24A, 24B, 24C... Valve body, 30, 30A... Recessed part, 31... Side surface of valve body, 40... Vacuum container , 41... Processing chamber, 60... Convex portion, 120... Rotor blade, 200, 200A, 200B... First capture member, 220... Contact portion, 240, 240A, 240B... Valve body body, 245... Support member, 300, 300A, 300B, 300C...second capture member, 2000...net, AC...center axis of recess, AR...rotor rotation axis, S1...valve seat surface, S2...bottom surface of valve body, S3...top surface of valve body.

Claims (8)

A vacuum valve that adjusts the opening area of an exhaust flow path,
a valve body that adjusts the opening area of the exhaust flow path and has a recess formed therein;
a first trapping member for trapping particles moving inside the exhaust flow path,
The first trapping member is a vacuum valve that is a sheet-like mesh structure made of mesh-like thin metal wires arranged in the recess. The vacuum valve according to claim 1,
In the vacuum valve, the surface of the valve body constituting the recess is any one of an inclined surface, a curved surface, a spherical surface, or a paraboloid. The vacuum valve according to claim 1,
In the vacuum valve, a side surface of the recess is substantially perpendicular to a surface of the valve body that faces the valve seat. The vacuum valve according to any one of claims 1 to 3,
A vacuum valve, wherein the recess is disposed at a position facing an opening on the downstream side of the exhaust flow path when the vacuum valve is in a fully open state or a partially open state. The vacuum valve according to any one of claims 1 to 4,
The vacuum valve is a vacuum valve in which the valve body moves in a direction perpendicular to the exhaust flow path, or in which the valve body moves in the flow direction of fluid flowing through the exhaust flow path. A vacuum valve according to any one of claims 1 to 5,
A turbo-molecular pump comprising: a turbo-molecular pump main body having an inlet to which the vacuum valve is connected. a vacuum valve that adjusts the opening area of the exhaust flow path;
a turbomolecular pump body formed with an intake port to which the vacuum valve is connected;
The vacuum valve is
a valve body that adjusts the opening area of the exhaust flow path and has a recess formed therein;
a first trapping member for trapping particles moving inside the exhaust flow path;
Equipped with
the first capturing member is disposed in the recess,
The turbo molecular pump main body includes a second trapping member for trapping particles in a flow path between the intake port and the rotor .
Turbomolecular pump. a vacuum chamber,
a valve body provided on the exhaust side of the vacuum chamber and having a recess formed in a downstream surface of the exhaust flow path;
a first trapping member for trapping particles moving inside the exhaust flow path,
The first capturing member is a vacuum container , which is a sheet-like mesh structure made of mesh-like thin metal wires arranged in the recess.

Images