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JP7437964B2 - proportional solenoid valve - Google Patents
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JP7437964B2 - proportional solenoid valve - Google Patents

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JP7437964B2
JP7437964B2 JP2020026868A JP2020026868A JP7437964B2 JP 7437964 B2 JP7437964 B2 JP 7437964B2 JP 2020026868 A JP2020026868 A JP 2020026868A JP 2020026868 A JP2020026868 A JP 2020026868A JP 7437964 B2 JP7437964 B2 JP 7437964B2
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yoke
plunger
adjustment mechanism
adjustment
solenoid valve
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JP2021131127A (en
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大喜 吉岡
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Takano Co Ltd
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Description

本発明は、ガス等の流体の流量を連続的に制御する流量制御弁等に用いて好適な比例電磁弁に関する。 The present invention relates to a proportional solenoid valve suitable for use as a flow control valve that continuously controls the flow rate of fluid such as gas.

従来、電磁駆動部と弁機構部を組合わせることにより流体の流量を連続制御できるようにした比例電磁弁は、既に本出願人が提案した特許文献1で開示される流量制御弁が知られている。 Conventionally, a proportional solenoid valve that can continuously control the flow rate of fluid by combining an electromagnetic drive part and a valve mechanism part has been known, such as the flow control valve disclosed in Patent Document 1 proposed by the present applicant. There is.

同文献1で開示される流量制御弁は、プランジャの全ストロークにおいてリニアリティの高い高精度の流量制御を行うとともに、安定性及び信頼性の高い制御を行うことを目的としたものであり、具体的には、ソレノイドの外部に設けたアウタヨーク及び内部に設けたインナヨークを有するとともに、インナヨークの前端面に対して、後端面が対向し、かつソレノイドに印加する励磁電圧の大きさに対応して変位するプランジャを有する電磁駆動部と、プランジャの前端に設けることにより流路を開閉する弁体及びこの弁体を弾性支持するダイヤフラムを有する弁機構部とを備え、特に、プランジャの後端面をリング状の平坦部とこの平坦部の内側に設けたテーパ面を有する凸部との組合わせにより形成するとともに、インナヨークの前端面をリング状の平坦部とこの平坦部の内側に設けたテーパ面を有する凹部との組合わせにより形成し、後端面又は前端面の直径に対する凸部又は凹部の直径の比率及びテーパ面の角度を所定の大きさに設定したものである。 The flow control valve disclosed in Document 1 is intended to perform highly linear and highly accurate flow control over the entire stroke of the plunger, as well as to perform highly stable and reliable control. The solenoid has an outer yoke provided outside the solenoid and an inner yoke provided inside the solenoid, and the rear end surface faces the front end surface of the inner yoke and is displaced in response to the magnitude of the excitation voltage applied to the solenoid. It is equipped with an electromagnetic drive unit having a plunger, a valve mechanism unit having a valve body that opens and closes a flow path by being provided at the front end of the plunger, and a diaphragm that elastically supports this valve body. The front end surface of the inner yoke is formed by a combination of a flat part and a convex part provided inside the flat part and has a tapered surface, and the front end surface of the inner yoke is formed by a ring-shaped flat part and a concave part provided inside this flat part and has a tapered surface. The ratio of the diameter of the convex portion or the concave portion to the diameter of the rear end surface or the front end surface and the angle of the tapered surface are set to predetermined sizes.

特開2010-25303号公報Japanese Patent Application Publication No. 2010-25303

しかし、上述した特許文献1で開示される従来の比例電磁弁(流量制御弁)は、次のような解決すべき課題が存在した。 However, the conventional proportional electromagnetic valve (flow rate control valve) disclosed in Patent Document 1 mentioned above had the following problems to be solved.

同文献1の流量制御弁は、円盤形に形成した二枚のダイヤフラム(板バネ部材)の中心部に弁体を取付けるとともに、このダイヤフラムの外周部を、流路を形成するブロックの内面に取付けている。これにより、弁体は、この板バネ部材の中心部により弾性支持される。ところで、この種の流量制御弁は、流量を連続的に制御するため、プランジャ(弁体)の全ストロークにおいてリニアリティの高い高精度の流量制御が求められる。 In the flow control valve of Document 1, a valve body is attached to the center of two disc-shaped diaphragms (plate spring members), and the outer circumference of the diaphragm is attached to the inner surface of a block that forms a flow path. ing. Thereby, the valve body is elastically supported by the central portion of the leaf spring member. Incidentally, since this type of flow control valve continuously controls the flow rate, highly linear and highly accurate flow control is required over the entire stroke of the plunger (valve body).

したがって、製造段階において、部品や機構等に基づくバラツキ(公差)を小さくするための調整を行っており、上述した従来の流量制御弁では、複数の異なる厚さのダイヤフラムを用意し、公差が大きいときは、厚さの異なるダイヤフラムへの変更や二以上のダイヤフラムを組合わせることにより、弁体による弁開度やダイヤフラム(板バネ部材)によるバネ力が所定の基準値内に収まるように調整を行っていた。 Therefore, during the manufacturing stage, adjustments are made to reduce variations (tolerances) based on parts and mechanisms. In some cases, by changing to a diaphragm with a different thickness or combining two or more diaphragms, adjust the valve opening by the valve body and the spring force by the diaphragm (plate spring member) to be within the specified standard values. I was going.

しかし、このような従来の調整手法は、調整時に、組み付け後のアセンブリを一旦分解したり再組立する工程が必要になるため、製造工数の増加に伴う生産性の低下を招くとともに、部品類を傷付けてしまうなどの難点があった。加えて、調整可能な範囲において段階的に変更、例えば、0.01mm単位で変更して調整するため、精度の高い調整を行うには限界があった。 However, such conventional adjustment methods require the process of disassembling and reassembling the assembled assembly during adjustment, resulting in a decrease in productivity due to an increase in manufacturing man-hours, as well as an increase in the number of parts. There were some drawbacks, such as the possibility of damage. In addition, since the adjustment is performed by changing the adjustment stepwise within the adjustable range, for example, by changing in units of 0.01 mm, there is a limit to the ability to perform highly accurate adjustment.

本発明は、このような背景技術に存在する課題を解決した比例電磁弁の提供を目的とするものである。 The present invention aims to provide a proportional solenoid valve that solves the problems existing in the background art.

本発明に係る比例電磁弁1は、上述した課題を解決するため、ソレノイド3の外部に設けたヨーク4の内部に、このヨーク4により、後端5r側が支持された固定プランジャ5,及びこの固定プランジャ5に対して進退変位自在に配した可動プランジャ6を有するとともに、ソレノイド3に印加する励磁電圧Edの大きさに対応して可動プランジャ6を変位させる電磁駆動部2と、可動プランジャ6の前端6fに設けた弁体9,及びこの弁体9に対向し、かつ内側に流路Rを有する弁座10を有するとともに、可動プランジャ6を一端11s側で弾性支持する弾性部材11を有する弁機構部7とを備える比例電磁弁を構成するに際して、固定プランジャ5と可動プランジャ6間に介在させることにより当該可動プランジャ6の直角方向Fcへの動きを規制する立体板バネ37と、弾性部材11の他端11t側の位置を、ヨーク4の外側に配した第一操作部12の操作により弁変位方向Fdに変位させて位置調整可能な第一調整機構部M1と、固定プランジャ5の位置を、ヨーク4の外側に配した第二操作部13の操作により可動プランジャ6に対して進退変位させて位置調整可能な第二調整機構部M2とを備えてなることを特徴とする。 In order to solve the above-mentioned problem, the proportional solenoid valve 1 according to the present invention includes a fixed plunger 5 whose rear end 5r side is supported by the yoke 4 inside a yoke 4 provided outside the solenoid 3, and a fixed plunger 5 whose rear end 5r is supported by the yoke 4. An electromagnetic drive unit 2 has a movable plunger 6 arranged to be movable forward and backward relative to the plunger 5 and displaces the movable plunger 6 in response to the magnitude of the excitation voltage Ed applied to the solenoid 3, and a front end of the movable plunger 6. A valve mechanism having a valve body 9 provided at 6f, a valve seat 10 facing the valve body 9 and having a flow path R inside, and an elastic member 11 that elastically supports the movable plunger 6 at one end 11s side. When configuring the proportional solenoid valve including the portion 7, a three-dimensional plate spring 37 that is interposed between the fixed plunger 5 and the movable plunger 6 to restrict the movement of the movable plunger 6 in the perpendicular direction Fc, and an elastic member 11 are provided. The position of the first adjustment mechanism part M1 on the other end 11t side can be adjusted by displacing it in the valve displacement direction Fd by operating the first operation part 12 arranged on the outside of the yoke 4, and the position of the fixed plunger 5. It is characterized by comprising a second adjustment mechanism part M2 whose position can be adjusted by moving it forward and backward relative to the movable plunger 6 by operating a second operation part 13 arranged on the outside of the yoke 4.

この場合、発明の好適な第一の態様により、弾性部材11には、コイルバネ11cを用いることができる。また、第一調整機構部M1は、ヨーク4と固定プランジャ5間に配し、かつ外周面21wに設けたネジ部21sをヨーク4に設けた開口部のネジ孔部4nに螺合させるとともに、前端21fにより弾性部材11の他端11t側を支持し、かつ後端21rに第一操作部12を有する調節筒21を設けることができる。なお、第一調整機構部M1には、調節筒21のネジ部21sに螺合し、かつヨーク4に当接可能な第一固定ナット22を設けることができる。一方、第二調整機構部M2は、固定プランジャ5の外周面に設けたネジ部5sを調節筒21に設けた開口部のネジ孔部21nに螺合させるとともに、固定プランジャ5の後端5r側に第二操作部13を設けることができる。なお、第二調整機構部M2には、固定プランジャ5のネジ部5sに螺合し、かつ調節筒21に当接可能な第二固定ナット23を設けることが望ましい。 In this case, according to the first preferred aspect of the invention, a coil spring 11c can be used as the elastic member 11. Further, the first adjustment mechanism section M1 is arranged between the yoke 4 and the fixed plunger 5, and screws a threaded part 21s provided on the outer peripheral surface 21w into a threaded hole 4n of an opening provided in the yoke 4, An adjustment cylinder 21 can be provided which supports the other end 11t side of the elastic member 11 by the front end 21f and has the first operating portion 12 at the rear end 21r. Note that the first adjustment mechanism section M1 can be provided with a first fixing nut 22 that is screwed into the threaded portion 21s of the adjustment cylinder 21 and that can come into contact with the yoke 4. On the other hand, the second adjustment mechanism part M2 screws a threaded part 5s provided on the outer circumferential surface of the fixed plunger 5 into a threaded hole 21n of an opening provided in the adjustment cylinder 21, and also A second operating section 13 can be provided at the second operating section 13. Note that it is desirable that the second adjustment mechanism section M2 be provided with a second fixing nut 23 that can be screwed into the threaded portion 5s of the fixed plunger 5 and that can come into contact with the adjustment cylinder 21.

他方、発明の好適な第二の態様により、弾性部材11には、板バネ11pを用いることができる。また、第一調整機構部M1には、ヨーク4の外周面4wに設けたネジ部4sを、弁座10を有するブロック部24に設けた開口部のネジ孔部24nに螺合させるとともに、ヨーク4の外周面に第一操作部12を設けることができる。なお、第一調整機構部M1には、ヨーク4のネジ部4sに螺合し、かつブロック部24に当接可能な第一固定ナット12を設けることが望ましい。一方、第二調整機構部M2は、固定プランジャ5の外周面に設けたネジ部5sをヨーク4に設けた開口部のネジ孔部4nに螺合させるとともに、固定プランジャ5の後端5r側に第二操作部13を設けることができる。なお、第二調整機構部M2には、固定プランジャ5のネジ部5sに螺合し、かつヨーク4に当接可能な第二固定ナット23を設けることが望ましい。 On the other hand, according to a second preferred aspect of the invention, the elastic member 11 can be a plate spring 11p. Further, in the first adjustment mechanism part M1, a threaded part 4s provided on the outer circumferential surface 4w of the yoke 4 is screwed into a threaded hole part 24n of an opening provided in the block part 24 having the valve seat 10, and the yoke The first operation part 12 can be provided on the outer circumferential surface of 4. In addition, it is desirable to provide the first fixing nut 12 which can be screwed into the threaded part 4s of the yoke 4 and can come into contact with the block part 24 in the first adjustment mechanism part M1. On the other hand, the second adjustment mechanism part M2 screws a threaded part 5s provided on the outer circumferential surface of the fixed plunger 5 into a threaded hole part 4n of an opening provided in the yoke 4, and also screws the threaded part 5s provided on the outer peripheral surface of the fixed plunger 5 into the screw hole 4n of the opening provided in the yoke 4. A second operation section 13 can be provided. Note that it is desirable that the second adjustment mechanism section M2 is provided with a second fixing nut 23 that can be screwed into the threaded part 5s of the fixed plunger 5 and can come into contact with the yoke 4.

このような構成を有する本発明に係る比例電磁弁1によれば、次のような顕著な効果を奏する。 According to the proportional solenoid valve 1 according to the present invention having such a configuration, the following remarkable effects are achieved.

(1) 弾性部材11の他端11t側の位置を、ヨーク4の外側に配した第一操作部12の操作により弁変位方向Fdに変位させて位置調整可能な第一調整機構部M1と、固定プランジャ5の位置を、ヨーク4の外側に配した第二操作部13の操作により可動プランジャ6に対して進退変位させて位置調整可能な第二調整機構部M2とを備えるため、製造段階において、調整に伴う組み付け後におけるアセンブリの分解及び再組立を不要にできる。したがって、部品類を傷付けてしまうなどの不具合を回避できるとともに、外部からの操作部に対する操作のみで、弁開度やバネ圧の調整を容易に行うことが可能となり、生産性を大幅に高めることができる。しかも、螺合機構による連続的な位置調整が可能になるため、精度の高い調整を行うことができる。加えて、固定プランジャ5と可動プランジャ6間に、立体板バネ37を介在させたため、当該可動プランジャ6の直角方向Fcへの動きを規制することができる。 (1) a first adjustment mechanism section M1 that can adjust the position of the other end 11t side of the elastic member 11 by displacing it in the valve displacement direction Fd by operating the first operation section 12 disposed on the outside of the yoke 4; Since the fixed plunger 5 is provided with a second adjustment mechanism part M2 that can adjust the position by moving the fixed plunger 5 forward and backward relative to the movable plunger 6 by operating the second operation part 13 disposed on the outside of the yoke 4, it is possible to adjust the position of the fixed plunger 5 at the manufacturing stage. , it is possible to eliminate the need for disassembly and reassembly of the assembly after assembly due to adjustment. Therefore, it is possible to avoid problems such as damage to parts, and it is also possible to easily adjust the valve opening degree and spring pressure just by operating the operating section from the outside, greatly increasing productivity. Can be done. Furthermore, since continuous position adjustment is possible using the screw mechanism, highly accurate adjustment can be performed. In addition, since the solid plate spring 37 is interposed between the fixed plunger 5 and the movable plunger 6, movement of the movable plunger 6 in the perpendicular direction Fc can be restricted.

(2) 好適な態様により、弾性部材11に、コイルバネ11cを用いれば、いわゆるヘタリを生じることなく、安定した弾力性能を確保及び維持できるとともに、広く安定した調整範囲を確保できる。 (2) By using a coil spring 11c for the elastic member 11 according to a preferred embodiment, stable elastic performance can be ensured and maintained without causing so-called fatigue, and a wide and stable adjustment range can be ensured.

(3) 好適な態様により、第一調整機構部M1を構成するに際し、ヨーク4と固定プランジャ5間に配し、かつ外周面21wに設けたネジ部21sをヨーク4に設けた開口部のネジ孔部4nに螺合させるとともに、前端21fにより弾性部材11の他端11t側を支持し、かつ後端21rに第一操作部12を有する調節筒21を設けて構成すれば、調節筒21の追加により、比例電磁弁1の基本構造を変更することなく独立した第一調整機構部M1を構成でき、特に、第一操作部12をヨーク4の上端位置に配することが可能になるため、調整機構全体をヨーク4により外的に保護し、調整操作の容易化及び信頼性の向上に寄与できる。 (3) According to a preferred embodiment, when configuring the first adjustment mechanism section M1, the threaded portion 21s arranged between the yoke 4 and the fixed plunger 5 and provided on the outer peripheral surface 21w is connected to the threaded portion 21s of the opening provided on the yoke 4. If the adjusting cylinder 21 is configured by being screwed into the hole 4n, supporting the other end 11t side of the elastic member 11 by the front end 21f, and having the first operation part 12 at the rear end 21r, the adjusting cylinder 21 can be adjusted. With the addition, it is possible to configure an independent first adjustment mechanism section M1 without changing the basic structure of the proportional solenoid valve 1, and in particular, it is possible to arrange the first operating section 12 at the upper end position of the yoke 4. The entire adjustment mechanism is externally protected by the yoke 4, contributing to easier adjustment operations and improved reliability.

(4) 好適な態様により、第一調整機構部M1に、調節筒21のネジ部21sに螺合し、かつヨーク4に当接可能な第一固定ナット22を設ければ、調整後における調節筒21を確実に固定できるため、調整後における位置ズレを防止し、正確な調整位置を長期にわたって維持できるとともに、再調整も容易に行うことができる。 (4) According to a preferred aspect, if the first adjustment mechanism section M1 is provided with the first fixing nut 22 that can be screwed into the threaded part 21s of the adjustment cylinder 21 and can come into contact with the yoke 4, the adjustment after adjustment is possible. Since the cylinder 21 can be reliably fixed, positional deviation after adjustment can be prevented, an accurate adjusted position can be maintained over a long period of time, and readjustment can be easily performed.

(5) 好適な態様により、第二調整機構部M2を構成するに際し、固定プランジャ5の外周面に設けたネジ部5sを調節筒21に設けた開口部のネジ孔部21nに螺合させるとともに、固定プランジャ5の後端5r側に第二操作部13を設けて構成すれば、第二調整機構部M2及び第二操作部13を、第一調整機構部M1及び第一操作部12の内側に配することができるため、第一調整機構部M1の調整操作及び第一調整機構部M1及び第一操作部12を同方向から操作可能になり、調整操作の容易化に寄与できるとともに、第一調整機構部M1と組み合わせた調整機構全体の小型コンパクト化に寄与できる。 (5) According to a preferred embodiment, when configuring the second adjustment mechanism part M2, the threaded part 5s provided on the outer peripheral surface of the fixed plunger 5 is screwed into the threaded hole part 21n of the opening provided in the adjustment cylinder 21, and , if the second operating section 13 is provided on the rear end 5r side of the fixed plunger 5, the second adjusting mechanism section M2 and the second operating section 13 can be arranged inside the first adjusting mechanism section M1 and the first operating section 12. Since the first adjustment mechanism section M1 can be arranged in the same direction, the first adjustment mechanism section M1 and the first operation section 12 can be operated from the same direction, which contributes to facilitating the adjustment operation. This can contribute to miniaturization of the entire adjustment mechanism combined with the adjustment mechanism section M1.

(6) 好適な態様により、第二調整機構部M2に、固定プランジャ5のネジ部5sに螺合し、かつ調節筒21に当接可能な第二固定ナット23を設ければ、調整後における固定プランジャ5を確実に固定できるため、調整後における位置ズレを防止し、正確な調整位置を長期にわたって維持できるとともに、再調整も容易に行うことができる。 (6) According to a preferred aspect, if the second adjustment mechanism section M2 is provided with the second fixing nut 23 that can be screwed into the threaded part 5s of the fixed plunger 5 and can come into contact with the adjustment cylinder 21, the Since the fixed plunger 5 can be reliably fixed, it is possible to prevent positional deviation after adjustment, maintain an accurate adjusted position over a long period of time, and readjustment can be easily performed.

(7) 好適な態様により、弾性部材11に、板バネ11pを用いれば、プレート材又はその組合わせにより構成できるため、電磁弁全体の小型化、更には低コスト化に寄与できる。 (7) According to a preferred embodiment, if the plate spring 11p is used as the elastic member 11, it can be constructed from a plate material or a combination thereof, which can contribute to miniaturization of the entire electromagnetic valve and further cost reduction.

(8) 好適な態様により、第一調整機構部M1を構成するに際し、ヨーク4の外周面4wに設けたネジ部4sを、弁座10を有するブロック部24に設けた開口部のネジ孔部24nに螺合させるとともに、ヨーク4の外周面に第一操作部12を設けて構成すれば、ヨーク4自身を第一調整機構部M1及び第一操作部12に兼用可能になるため、調節筒などの別途の部品を追加することなく実施することができ、調整機構全体のシンプル化及び低コスト化に寄与できる。 (8) According to a preferred aspect, when configuring the first adjustment mechanism part M1, the threaded part 4s provided on the outer circumferential surface 4w of the yoke 4 is replaced with a threaded hole part of an opening provided in the block part 24 having the valve seat 10. 24n, and by providing the first operating section 12 on the outer peripheral surface of the yoke 4, the yoke 4 itself can be used both as the first adjusting mechanism section M1 and the first operating section 12. This can be carried out without adding additional parts such as, and can contribute to the simplification and cost reduction of the entire adjustment mechanism.

(9) 好適な態様により、第一調整機構部M1に、ヨーク4のネジ部4sに螺合し、かつブロック部24に当接可能な第一固定ナット12を設ければ、調整後におけるヨーク4を確実に固定できるため、調整後における位置ズレを防止し、正確な調整位置を長期にわたって維持できるとともに、再調整も容易に行うことができる。 (9) According to a preferred aspect, if the first adjustment mechanism part M1 is provided with the first fixing nut 12 that can be screwed into the threaded part 4s of the yoke 4 and can come into contact with the block part 24, the yoke after adjustment can be adjusted. 4 can be reliably fixed, positional deviation after adjustment can be prevented, accurate adjusted positions can be maintained over a long period of time, and readjustment can be easily performed.

(10) 好適な態様により、第二調整機構部M2を構成するに際し、固定プランジャ5の外周面に設けたネジ部5sをヨーク4に設けた開口部のネジ孔部4nに螺合させるとともに、固定プランジャ5の後端5r側に第二操作部13を設けて構成すれば、第二調整機構部M2及び第二操作部13を、ヨーク4の内側に配することができるため、第一調整機構部M1と組み合わせた調整機構全体の小型コンパクト化に寄与できる。 (10) According to a preferred embodiment, when configuring the second adjustment mechanism part M2, the threaded part 5s provided on the outer peripheral surface of the fixed plunger 5 is screwed into the threaded hole part 4n of the opening provided in the yoke 4, and If the second operation part 13 is provided on the rear end 5r side of the fixed plunger 5, the second adjustment mechanism part M2 and the second operation part 13 can be arranged inside the yoke 4, so that the first adjustment This can contribute to miniaturization of the entire adjustment mechanism combined with the mechanism section M1.

(11) 好適な態様により、第二調整機構部M2に、固定プランジャ5のネジ部5sに螺合し、かつヨーク4に当接可能な第二固定ナット23を設ければ、調整後における固定プランジャ5を確実に固定できるため、調整後における位置ズレを防止し、正確な調整位置を長期にわたって維持できるとともに、再調整も容易に行うことができる。 (11) According to a preferred aspect, if the second adjustment mechanism part M2 is provided with the second fixing nut 23 that can be screwed into the threaded part 5s of the fixed plunger 5 and can come into contact with the yoke 4, the fixation after adjustment is achieved. Since the plunger 5 can be securely fixed, it is possible to prevent positional deviation after adjustment, maintain an accurate adjusted position over a long period of time, and readjustment can be easily performed.

本発明の基本実施形態に係る比例電磁弁の縦断側面図、A longitudinal side view of a proportional solenoid valve according to a basic embodiment of the present invention, 同比例電磁弁の平面図、Plan view of the proportional solenoid valve, 同比例電磁弁の励磁電圧に対する流量の変化特性説明図、An explanatory diagram of the change in flow rate with respect to the excitation voltage of a proportional solenoid valve, 同比例電磁弁の作用説明図、Explanation diagram of the action of a proportional solenoid valve, 同比例電磁弁の調整手順及び作用を説明するためのフローチャート、A flowchart for explaining the adjustment procedure and operation of the proportional solenoid valve, 同比例電磁弁の第一調整機構部を抽出して示す調整工程の説明図、An explanatory diagram of the adjustment process extracting and showing the first adjustment mechanism part of the proportional solenoid valve, 同比例電磁弁の第二調整機構部を抽出して示す調整工程の説明図、An explanatory diagram of the adjustment process extracting and showing the second adjustment mechanism part of the proportional solenoid valve, 本発明の変更実施形態に係る比例電磁弁の縦断側面図、A longitudinal side view of a proportional solenoid valve according to a modified embodiment of the present invention, 同比例電磁弁の平面図、Plan view of the proportional solenoid valve,

次に、本発明に係る好適実施形態を挙げ、図面に基づき詳細に説明する。 Next, preferred embodiments of the present invention will be described in detail based on the drawings.

まず、本実施形態(基本実施形態)に係る比例電磁弁1の構成について、図1及び図2を参照して説明する。 First, the configuration of a proportional solenoid valve 1 according to this embodiment (basic embodiment) will be described with reference to FIGS. 1 and 2.

例示の比例電磁弁1は、ノーマルクローズタイプであり、図1に示すように、基本的な構成として、上側(弁変位方向Fdの開側)に位置する電磁駆動部2及び下側(弁変位方向Fdの閉側)に位置する弁機構部7を備える。電磁駆動部2は、コイルボビン31にワイヤを巻回して構成した筒形のソレノイド3を備える。また、ソレノイド3の外部にはヨーク4を配してソレノイド3を覆う。ヨーク4は全体を磁性材により形成し、筒形のヨーク側面部4mと、このヨーク側面部4mの上端に一体形成したリング状の上端面部4u及びヨーク側面部4mの下端開口を覆うリング状の下端面部4dにより構成する。ソレノイド3の内部、即ち、コイルボビン31における筒体部31cの内部空間の上側(後側)には、磁性材により形成した円柱状の固定プランジャ5を配するとともに、その下側(前側)には、磁性材により形成した円柱状の可動プランジャ6を配する。そして、固定プランジャ5は、後述する第一調整機構部M1及び第二調整機構部M2を介してヨーク4の上端面部4uにより支持されるとともに、可動プランジャ6は、弁変位方向Fdへ進退自在に配される。 The illustrated proportional solenoid valve 1 is a normally closed type, and as shown in FIG. The valve mechanism section 7 is located on the closed side in the direction Fd. The electromagnetic drive unit 2 includes a cylindrical solenoid 3 configured by winding a wire around a coil bobbin 31. Further, a yoke 4 is disposed outside the solenoid 3 to cover the solenoid 3. The yoke 4 is entirely made of a magnetic material, and includes a cylindrical yoke side surface 4m, a ring-shaped upper end surface 4u integrally formed at the upper end of the yoke side surface 4m, and a ring-shaped yoke side surface 4m that covers the lower end opening of the yoke side surface 4m. It is constituted by a lower end surface portion 4d. Inside the solenoid 3, that is, on the upper side (rear side) of the internal space of the cylindrical body part 31c of the coil bobbin 31, a cylindrical fixed plunger 5 made of a magnetic material is arranged, and on the lower side (front side) , a cylindrical movable plunger 6 made of a magnetic material is arranged. The fixed plunger 5 is supported by the upper end surface section 4u of the yoke 4 via a first adjustment mechanism section M1 and a second adjustment mechanism section M2, which will be described later, and the movable plunger 6 can move forward and backward in the valve displacement direction Fd. will be arranged.

また、固定プランジャ5及び可動プランジャ6の外径は、コイルボビン31における筒体部31cの内径よりもやや小径に形成し、これにより生じる各プランジャ5,6と筒体部31c間の隙間に、第一調整機構部M1を構成する筒形の調整筒21を収容する。この調整筒21は、外周面21wの上端部に、回動操作治具を係止可能な係合部12c,12c(図2参照)を形成し、ヨーク4の外側に配する第一操作部12として機能させるとともに、この係合部12c,12cの下方に位置する外周面21wにはネジ部21sを形成する。 Further, the outer diameters of the fixed plunger 5 and the movable plunger 6 are formed to be slightly smaller than the inner diameter of the cylindrical body part 31c of the coil bobbin 31, and a gap between each of the plungers 5, 6 and the cylindrical body part 31c created thereby is filled with a second diameter. A cylindrical adjustment tube 21 constituting one adjustment mechanism section M1 is housed therein. This adjustment cylinder 21 has engaging parts 12c, 12c (see FIG. 2) that can lock a rotating operation jig formed at the upper end of the outer circumferential surface 21w, and a first operating part disposed on the outside of the yoke 4. 12, and a threaded portion 21s is formed on the outer circumferential surface 21w located below the engaging portions 12c, 12c.

一方、ヨーク4の上端面部4uの中心に設けた開口部にはネジ孔部4nを形成し、このネジ孔部4nに、調整筒21側のネジ部21sを螺合させる。これにより、調節筒21における第一操作部12を回動操作すれば、 調整筒21を上下方向(弁変位方向Fd)に変位させることができ、調整筒21の前端21fにより、後述するコイルバネ11c(弾性部材11)の他端11t側の位置を変位させて位置調整を行うことができる第一調整機構部M1が構成される。 On the other hand, a screw hole 4n is formed in the opening provided at the center of the upper end surface portion 4u of the yoke 4, and a screw portion 21s on the adjustment cylinder 21 side is screwed into this screw hole 4n. As a result, by rotating the first operating portion 12 of the adjustment tube 21, the adjustment tube 21 can be displaced in the vertical direction (valve displacement direction Fd), and the front end 21f of the adjustment tube 21 is used to actuate the coil spring 11c, which will be described later. A first adjustment mechanism section M1 is configured that can adjust the position by displacing the position of the other end 11t of the elastic member 11.

このように、ヨーク4と固定プランジャ5間に配し、かつ外周面21wに設けたネジ部21sをヨーク4に設けた開口部のネジ孔部4nに螺合させるとともに、前端21fにより弾性部材11の他端11t側を支持し、かつ後端21rに第一操作部12を有する調節筒21を設けて第一調整機構部M1を構成すれば、調節筒21の追加により、比例電磁弁1の基本構造を変更することなく独立した第一調整機構部M1を構成でき、特に、第一操作部12をヨーク4の上端位置に配することが可能になるため、調整機構全体をヨーク4により外的に保護し、調整操作の容易化及び信頼性の向上に寄与できる。 In this way, the threaded part 21s disposed between the yoke 4 and the fixed plunger 5 and provided on the outer peripheral surface 21w is screwed into the threaded hole 4n of the opening provided in the yoke 4, and the front end 21f allows the elastic member 11 If the adjustment cylinder 21 supporting the other end 11t side and having the first operation part 12 at the rear end 21r is provided to constitute the first adjustment mechanism part M1, the adjustment cylinder 21 can be added to the proportional solenoid valve 1. The independent first adjustment mechanism section M1 can be configured without changing the basic structure, and in particular, the first operation section 12 can be placed at the upper end of the yoke 4, so the entire adjustment mechanism can be removed from the yoke 4. This can contribute to easier adjustment operations and improved reliability.

さらに、ヨーク4の上端面部4uの上面に、凹部4uiを形成し、この凹部4uiに第一固定ナット22を収容するとともに、調節筒21のネジ部21sに螺合させる。この第一固定ナット22は回動操作によりヨーク4に当接可能となる。このように、第一調整機構部M1に、調節筒21のネジ部21sに螺合し、かつヨーク4に当接可能な第一固定ナット22を設ければ、調整後における調節筒21を確実に固定できるため、調整後における位置ズレを防止し、正確な調整位置を長期にわたって維持できるとともに、再調整も容易に行うことができる。 Further, a recess 4ui is formed on the upper surface of the upper end surface portion 4u of the yoke 4, and the first fixing nut 22 is accommodated in the recess 4ui and is screwed into the threaded portion 21s of the adjustment cylinder 21. This first fixing nut 22 can come into contact with the yoke 4 by rotating it. In this way, by providing the first fixing nut 22 that can be screwed onto the threaded portion 21s of the adjustment tube 21 and abutted against the yoke 4 in the first adjustment mechanism section M1, the adjustment tube 21 can be securely fixed after adjustment. Since it can be fixed to the position, it is possible to prevent positional deviation after adjustment, maintain an accurate adjusted position for a long period of time, and readjustment can be easily performed.

一方、固定プランジャ5は、プランジャ本体部5mと、このプランジャ本体部5mの上端面(後端面)から弁変位方向Fdの上方へ一体に突出形成し、かつ外周面にネジ部5sを有するボルト部5bを備える。したがって、このネジ部5sは、固定プランジャ5の外周面に設けたネジ部5sとして機能する。また、ボルト部5bの上端面には、回動操作治具が係止可能な凹溝5bcを形成する。これにより、このボルト部5bは、固定プランジャ5の後端5r側、即ち、ヨーク4の外側に配した第二操作部13として機能する。さらに、調整筒21の上端には、支持端面部21eを一体形成し、この支持端面部21eの中心に設けた開口部にネジ孔部21nを形成するとともに、このネジ孔部21nに、固定プランジャ5におけるボルト部5bのネジ部5sを螺合させる。 On the other hand, the fixed plunger 5 includes a plunger body 5m and a bolt portion integrally formed upwardly in the valve displacement direction Fd from the upper end surface (rear end surface) of the plunger body 5m and having a threaded portion 5s on the outer peripheral surface. 5b. Therefore, this threaded portion 5s functions as a threaded portion 5s provided on the outer peripheral surface of the fixed plunger 5. Further, a groove 5bc in which a rotating operation jig can be locked is formed on the upper end surface of the bolt portion 5b. Thereby, this bolt portion 5b functions as a second operating portion 13 disposed on the rear end 5r side of the fixed plunger 5, that is, on the outside of the yoke 4. Further, a support end surface 21e is integrally formed at the upper end of the adjustment tube 21, and a screw hole 21n is formed in the opening provided at the center of the support end surface 21e. The threaded portion 5s of the bolt portion 5b in No. 5 is screwed together.

これにより、固定プランジャ5の外周面に設けたネジ部5sを調節筒21に設けた開口部のネジ孔部21nに螺合させるとともに、固定プランジャ5の後端5r側に第二操作部13を設けてなる第二調整機構部M2、即ち、第二操作部13の操作により、固定プランジャ5を上下方向に変位させて固定プランジャ5の位置調整を行うことができる第二調整機構部M2が構成される。 As a result, the threaded portion 5s provided on the outer peripheral surface of the fixed plunger 5 is screwed into the threaded hole 21n of the opening provided in the adjustment tube 21, and the second operating portion 13 is attached to the rear end 5r side of the fixed plunger 5. A second adjustment mechanism section M2 is provided, that is, a second adjustment mechanism section M2 that can adjust the position of the fixed plunger 5 by displacing the fixed plunger 5 in the vertical direction by operating the second operation section 13. be done.

このように、固定プランジャ5の外周面に設けたネジ部5sを調節筒21に設けた開口部のネジ孔部21nに螺合させるとともに、固定プランジャ5の後端5r側に第二操作部13を設けた第二調整機構部M2を設ければ、第二調整機構部M2及び第二操作部13を、第一調整機構部M1及び第一操作部12の内側に配することができるため、第一調整機構部M1の調整操作及び第一調整機構部M1及び第一操作部12を同方向から操作可能になり、調整操作の容易化に寄与できるとともに、第一調整機構部M1と組み合わせた調整機構全体の小型コンパクト化に寄与できる。 In this way, the threaded portion 5s provided on the outer peripheral surface of the fixed plunger 5 is screwed into the threaded hole 21n of the opening provided in the adjustment tube 21, and the second operating portion 13 is attached to the rear end 5r side of the fixed plunger 5. If the second adjustment mechanism section M2 is provided, the second adjustment mechanism section M2 and the second operation section 13 can be arranged inside the first adjustment mechanism section M1 and the first operation section 12. The adjustment operation of the first adjustment mechanism section M1 and the operation of the first adjustment mechanism section M1 and the first operation section 12 from the same direction are possible, which contributes to facilitating the adjustment operation, and when combined with the first adjustment mechanism section M1. This can contribute to making the entire adjustment mechanism smaller and more compact.

さらに、支持端面部21eから上方に突出したボルト部5bには、第二固定ナット23を螺合させる。したがって、この第二固定ナット23は、固定プランジャ5に螺合し、かつ調節筒21に対して当接可能となる。このように、第二調整機構部M2に、固定プランジャ5のネジ部5sに螺合し、かつ調節筒21に当接可能な第二固定ナット23を設ければ、調整後における固定プランジャ5を確実に固定できるため、調整後における位置ズレを防止し、正確な調整位置を長期にわたって維持できるとともに、再調整も容易に行うことができる。 Furthermore, the second fixing nut 23 is screwed onto the bolt portion 5b that protrudes upward from the support end surface portion 21e. Therefore, the second fixing nut 23 can be screwed onto the fixed plunger 5 and can come into contact with the adjustment cylinder 21. In this way, if the second adjustment mechanism part M2 is provided with the second fixing nut 23 that can be screwed into the threaded part 5s of the fixed plunger 5 and can come into contact with the adjustment cylinder 21, the fixed plunger 5 after adjustment can be adjusted. Since it can be securely fixed, it is possible to prevent positional deviation after adjustment, maintain an accurate adjusted position for a long period of time, and readjustment can be easily performed.

他方、弁機構部7は、非磁性材のステンレス材等により形成したブロック部24を備える。このブロック部24の上端面24cは、電磁駆動部2側におけるヨーク4の下端面部4dを取付ける取付面になるとともに、ブロック部24の下端面は、流路配管側への取付面24jとなる。ブロック部24の内部には、内部中空に形成した弁室32を設け、この弁室32を形成する底面部32dの中央に、上方に突出した筒状の弁座10を形成する。この弁座10の内側は流路Rとなり、例示の場合、この流路Rの下端は、流入口33iとして取付面24jに開放されるとともに、弁座10の周囲に位置する底面部32dには、一又は二以上の流出口33e…を形成する。これにより、上端が弁室32に連通する流出口33e…の下端は取付面24jに開放される。さらに、弁室32とブロック部24の上端面24c間には連通空間25を貫通形成する。 On the other hand, the valve mechanism section 7 includes a block section 24 made of a non-magnetic material such as stainless steel. The upper end surface 24c of this block portion 24 serves as a mounting surface for attaching the lower end surface portion 4d of the yoke 4 on the electromagnetic drive portion 2 side, and the lower end surface of the block portion 24 serves as a mounting surface 24j on the flow path piping side. A hollow valve chamber 32 is provided inside the block portion 24, and a cylindrical valve seat 10 protruding upward is formed at the center of a bottom surface portion 32d forming the valve chamber 32. The inside of this valve seat 10 becomes a flow path R, and in the illustrated case, the lower end of this flow path R is opened to the mounting surface 24j as an inflow port 33i, and the bottom surface portion 32d located around the valve seat 10 is opened to the mounting surface 24j. , one or more outlet ports 33e... are formed. As a result, the lower ends of the outlet ports 33e whose upper ends communicate with the valve chamber 32 are opened to the mounting surface 24j. Furthermore, a communication space 25 is formed through the valve chamber 32 and the upper end surface 24c of the block portion 24.

一方、可動プランジャ6は、プランジャ本体部6mと、このプランジャ本体部6mの下端面(先端面)から弁変位方向Fdの下方へ一体に突出形成したシャフト状のバネ支持部6s及びこのバネ支持部6sの下端に一体形成した弁体取付盤部6cを備え、このバネ支持部6s及び弁体取付盤部6cは、連通空間25に収容する。そして、弁体取付盤部6cの下面に、ゴム等で形成した弁部材9gを固定する。この弁部材9gと弁体取付盤部6cにより、可動プランジャ6の前端6fに設けた弁体9が構成され、この弁体9の下面は、弁座10の上端開口に対向し、流路Rを開閉する弁体9として機能する。 On the other hand, the movable plunger 6 includes a plunger body 6m, a shaft-shaped spring support 6s integrally formed to protrude downward from the lower end surface (tip surface) of the plunger body 6m in the valve displacement direction Fd, and this spring support. The spring supporting portion 6s and the valve body mounting plate portion 6c are housed in the communication space 25. Then, a valve member 9g made of rubber or the like is fixed to the lower surface of the valve body mounting board portion 6c. The valve member 9g and the valve body mounting plate portion 6c constitute a valve body 9 provided at the front end 6f of the movable plunger 6. The lower surface of the valve body 9 faces the upper end opening of the valve seat 10, and the flow path R It functions as a valve body 9 that opens and closes.

また、バネ支持部6sには、リング状に形成したバネ座34の中心開口を装着するとともに、このバネ座34とバネ支持部6sの下端における大径部間には、圧縮した弾性部材11、即ち、圧縮したコイルバネ11cを装着する。弾性部材11として、このようなコイルバネ11cを用いれば、いわゆるヘタリを生じることなく、安定した弾力性能を確保及び維持できるとともに、広く安定した調整範囲を確保できる。 Further, the center opening of a ring-shaped spring seat 34 is attached to the spring support portion 6s, and a compressed elastic member 11, That is, the compressed coil spring 11c is attached. If such a coil spring 11c is used as the elastic member 11, stable elastic performance can be ensured and maintained without causing so-called fatigue, and a wide and stable adjustment range can be ensured.

したがって、バネ支持部6sは、バネ座34の中心開口及びコイルバネ11cの内部を貫通し、コイルバネ11cのバネ圧により、バネ座34の上面は、前述した調節筒21の前端(下端)21fに圧接する。この状態では、バネ座34の上面とプランジャ本体部6mの下端面間には所定間隔の隙間が設定される。また、バネ座34の下面はコイルバネ11cの他端(上端)11tに圧接するとともに、コイルバネ11cの一端(下端)11sはバネ支持部6sの下端における大径部に係止し、これにより、電磁駆動部2のソレノイド3が非励磁のときは、弁体9の下面が弁座10の上端開口に圧接し、ノーマルクローズ状態となる。さらに、バネ支持部6sの下端の外周面と連通空間25の内周面間には、リング状に形成した板バネ35を取付ける。この板バネ35により、可動プランジャ6の弁変位方向Fdに対する直角方向Fcへの動きが規制される。 Therefore, the spring support portion 6s passes through the center opening of the spring seat 34 and the inside of the coil spring 11c, and the upper surface of the spring seat 34 is pressed against the front end (lower end) 21f of the adjustment cylinder 21 due to the spring pressure of the coil spring 11c. do. In this state, a gap at a predetermined interval is set between the upper surface of the spring seat 34 and the lower end surface of the plunger body 6m. Further, the lower surface of the spring seat 34 is pressed against the other end (upper end) 11t of the coil spring 11c, and the one end (lower end) 11s of the coil spring 11c is locked to the large diameter portion at the lower end of the spring support 6s, thereby causing electromagnetic When the solenoid 3 of the drive unit 2 is de-energized, the lower surface of the valve body 9 comes into pressure contact with the upper end opening of the valve seat 10, resulting in a normally closed state. Furthermore, a ring-shaped plate spring 35 is attached between the outer peripheral surface of the lower end of the spring support portion 6s and the inner peripheral surface of the communication space 25. This plate spring 35 restricts the movement of the movable plunger 6 in the direction Fc perpendicular to the valve displacement direction Fd.

その他、図1及び図2において、36a及び36bは、固定プランジャ5の外周面及び連通空間25の内周面に設けたゴム製のシール用Oリング,37は固定プランジャ5と可動プランジャ6間に介在させることにより当該可動プランジャ6の直角方向Fcへの動きを規制する立体板バネ,38はソレノイド3から導出した給電コードをそれぞれ示す。 In addition, in FIGS. 1 and 2, 36a and 36b are rubber sealing O-rings provided on the outer peripheral surface of the fixed plunger 5 and the inner peripheral surface of the communication space 25, and 37 is a rubber sealing O-ring provided between the fixed plunger 5 and the movable plunger 6. Three-dimensional plate springs 38 that are interposed to restrict the movement of the movable plunger 6 in the right angle direction Fc each represent a power supply cord led out from the solenoid 3.

次に、このように構成する本実施形態(基本実施形態)に係る比例電磁弁1の使用例を含む基本的な動作について、図3(図1)及び図4を参照して説明する。 Next, the basic operation including an example of use of the proportional solenoid valve 1 according to the present embodiment (basic embodiment) configured as described above will be explained with reference to FIG. 3 (FIG. 1) and FIG. 4.

図4は、比例電磁弁1の使用態様の一例、即ち、比例電磁弁1をガス配管用のバルブコネクタ41に取付けた例を示す。この場合、バルブコネクタ41の流入側接続口41iには、ガスの供給部42を接続するとともに、バルブコネクタ41の流出側接続口41eは、ガスの被供給部43に接続する。また、比例電磁弁1から導出する給電コード38は、給電部45に接続するとともに、この給電部45は制御部46に接続する。これにより、制御部46から給電部45に制御信号が付与されるとともに、給電部45から比例電磁弁1のソレノイド3に対して制御信号に対応した大きさの励磁電圧Edが付与される。 FIG. 4 shows an example of how the proportional solenoid valve 1 is used, that is, an example in which the proportional solenoid valve 1 is attached to a valve connector 41 for gas piping. In this case, the gas supply section 42 is connected to the inflow side connection port 41i of the valve connector 41, and the outflow side connection port 41e of the valve connector 41 is connected to the gas supplied section 43. Further, the power supply cord 38 led out from the proportional solenoid valve 1 is connected to a power supply section 45, and this power supply section 45 is connected to a control section 46. As a result, a control signal is applied from the control unit 46 to the power supply unit 45, and an excitation voltage Ed having a magnitude corresponding to the control signal is applied from the power supply unit 45 to the solenoid 3 of the proportional solenoid valve 1.

今、給電部45からソレノイド3に付与される励磁電圧Edがゼロ(OFF状態)であれば、比例電磁弁1の弁開度も0になるため、比例電磁弁1は、図1に示すノーマルオフの状態となる。即ち、電磁駆動部2のソレノイド3は非励磁のため、コイルバネ11cのバネ圧により弁体9が弁座10の上端開口に圧接する。これにより、流路Rは遮断され、全閉状態になる。 Now, if the excitation voltage Ed applied to the solenoid 3 from the power supply section 45 is zero (OFF state), the valve opening of the proportional solenoid valve 1 will also be zero, so the proportional solenoid valve 1 will be in the normal state shown in FIG. It will be in the off state. That is, since the solenoid 3 of the electromagnetic drive unit 2 is not energized, the valve body 9 is pressed against the upper end opening of the valve seat 10 by the spring pressure of the coil spring 11c. As a result, the flow path R is cut off and becomes fully closed.

一方、給電部45の出力をON状態にするとともに、励磁電圧Edの大きさを変化させれば、図3に示す特性曲線Psのように、弁開度(ガスの流量Q)の大きさは、励磁電圧Edの大きさに対応して変化する。即ち、励磁電圧Edの大きさをゼロから徐々に高くすれば、ソレノイド3の励磁により発生する磁気力も徐々に大きになり、可動プランジャ6は固定プランジャ5側に吸引されて上方へ変位する。この際、Eds〔V〕から弁開度が徐々に大きくなるとともに、可動プランジャ6が固定プランジャ5に当接した位置で停止する。この位置では弁開度が最大、即ち、全開状態となり、流量Qは最大流量Qm〔L/min〕となる。図4中、Lmは、弁体9が全閉状態から全開状態まで変位するストローク範囲を示すとともに、矢印Fg…は、ガスの流通方向を示す。 On the other hand, if the output of the power supply section 45 is turned on and the magnitude of the excitation voltage Ed is changed, the magnitude of the valve opening (gas flow rate Q) will change as shown in the characteristic curve Ps shown in FIG. , changes depending on the magnitude of the excitation voltage Ed. That is, if the magnitude of the excitation voltage Ed is gradually increased from zero, the magnetic force generated by the excitation of the solenoid 3 will also gradually increase, and the movable plunger 6 will be attracted to the fixed plunger 5 side and displaced upward. At this time, the valve opening gradually increases from Eds[V] and stops at the position where the movable plunger 6 abuts the fixed plunger 5. At this position, the valve opening degree is maximum, that is, it is fully open, and the flow rate Q is the maximum flow rate Qm [L/min]. In FIG. 4, Lm indicates a stroke range in which the valve body 9 is displaced from a fully closed state to a fully open state, and arrows Fg... indicate the direction of gas flow.

したがって、この種の比例電磁弁1は、各製品における特性曲線Psがバラつくことなく一定の基準値内に収まることが均質化を確保する上で重要となる。本実施形態に係る比例電磁弁1は、コイルバネ11cのバネ圧を調整することにより、弁体9が開き始める開始点Pssを一定にすることができるとともに、固定プランジャ5の上下位置を調整することにより、最大弁開度、即ち、最大流量Qmsを一定にすることができる。また、基本的に、組立完成状態において、第一調整機構部M1により、コイルバネ11cのバネ圧を容易に調整できるとともに、第二調整機構部M2により、固定プランジャ5の上下位置(最大弁開度)を容易に調整できる。なお、図3中、Zeは第一調整機構部M1による調整範囲、Zqは第二調整機構部M2による調整範囲を示し、仮想線で示すPsmは、非調整前における特性曲線の一例を示している。 Therefore, in this type of proportional solenoid valve 1, it is important for the characteristic curve Ps of each product to remain within a certain reference value without variation in order to ensure homogeneity. In the proportional solenoid valve 1 according to the present embodiment, by adjusting the spring pressure of the coil spring 11c, the starting point Pss at which the valve body 9 starts to open can be made constant, and the vertical position of the fixed plunger 5 can be adjusted. Accordingly, the maximum valve opening degree, that is, the maximum flow rate Qms can be kept constant. Basically, in the assembled state, the first adjustment mechanism section M1 can easily adjust the spring pressure of the coil spring 11c, and the second adjustment mechanism section M2 can adjust the vertical position (maximum valve opening) of the fixed plunger 5. ) can be easily adjusted. In addition, in FIG. 3, Ze indicates the adjustment range by the first adjustment mechanism section M1, Zq indicates the adjustment range by the second adjustment mechanism section M2, and Psm shown by a virtual line indicates an example of the characteristic curve before non-adjustment. There is.

次に、比例電磁弁1に備える第一調整機構部M1及び第二調整機構部M2の調整方法(手順)について、図5(図1)-図7を参照して具体的に説明する。 Next, a method (procedure) for adjusting the first adjustment mechanism section M1 and second adjustment mechanism section M2 provided in the proportional solenoid valve 1 will be specifically explained with reference to FIGS. 5 (FIG. 1) to FIG. 7.

図6は第一調整機構部M1を抽出して示す調整工程の説明図、図7は第二調整機構部M2を抽出して示す調整工程の説明図をそれぞれ示す。なお、調整に際しては、図1における第一固定ナット22と第二固定ナット23は、それぞれ緩めた状態にしておく。また、調整の順番としては、最初に、第一調整機構部M1による調整を行い、この後、第二調整機構部M2による調整を行う。 FIG. 6 is an explanatory diagram of the adjustment process that extracts and shows the first adjustment mechanism part M1, and FIG. 7 shows an explanatory diagram of the adjustment process that extracts and shows the second adjustment mechanism part M2. Note that during adjustment, the first fixing nut 22 and the second fixing nut 23 in FIG. 1 are kept in a loosened state. Moreover, as for the order of adjustment, first adjustment is performed by the first adjustment mechanism section M1, and then adjustment is performed by the second adjustment mechanism section M2.

まず、第一操作部12となる調節筒21の係合部21c,21cに回動操作治具を係止し、調節筒21を回動操作する(ステップS1)。調節筒21は、外周面21wに設けたネジ部21sが、固定側となるヨーク4に設けたネジ孔部4nに螺合するため、調節筒21の回動により調節筒21自身が上下方向(弁変位方向Fd)へ変位し、これにより、調節筒21の前端21fに圧接するバネ座34も追従して上下変位する(ステップS2)。この結果、コイルバネ11cの上端も追従して上下変位するとともに、この際、コイルバネ11cの下端位置は規制されるため、コイルバネ11cが伸縮してバネ圧の大きさも変化する(ステップS3)。図6に仮想線で示す調節筒21は、実線で示す調節筒21に対して、弁変位方向Fdの上方Fduへ移動量L1uだけ変位させた状態を示すとともに、仮想線で示すコイルバネ11cは、実線で示すコイルバネ11cに対して上方へ伸長した状態を示している。 First, a rotational operation jig is locked to the engaging portions 21c, 21c of the adjustment tube 21, which becomes the first operation section 12, and the adjustment tube 21 is rotated (step S1). Since the threaded portion 21s provided on the outer peripheral surface 21w of the adjustment tube 21 is screwed into the screw hole 4n provided in the fixed side yoke 4, the adjustment tube 21 itself is rotated in the vertical direction ( As a result, the spring seat 34, which is in pressure contact with the front end 21f of the adjusting cylinder 21, also follows and is displaced vertically (step S2). As a result, the upper end of the coil spring 11c also follows and moves up and down, and at this time, since the lower end position of the coil spring 11c is restricted, the coil spring 11c expands and contracts, and the magnitude of the spring pressure also changes (step S3). The adjustment tube 21 shown by the imaginary line in FIG. 6 is displaced by the amount of movement L1u in the upward direction Fdu of the valve displacement direction Fd with respect to the adjustment tube 21 shown by the solid line, and the coil spring 11c shown by the imaginary line is The coil spring 11c is shown expanded upward relative to the solid line shown by the coil spring 11c.

そして、調節筒21を回動操作し、設定した目標値になったなら回動操作を停止し、この後、第一固定ナット22を締め付けることにより調節筒21の位置を固定する(ステップS4,S5)。この場合、目標値は、前述した図3に示すPss点となるため、一例として、図4に示す流入側接続口41iから圧縮エアを付与し、励磁電圧EdとしてEds〔V〕を印加した状態において、圧縮エアの圧力が低下する直前における調節筒21の位置を目標値として設定できる。 Then, the adjustment cylinder 21 is rotated, and when the set target value is reached, the rotation operation is stopped, and then the position of the adjustment cylinder 21 is fixed by tightening the first fixing nut 22 (step S4, S5). In this case, the target value is the Pss point shown in FIG. 3 described above. Therefore, as an example, a state in which compressed air is applied from the inflow side connection port 41i and Eds [V] is applied as the excitation voltage Ed is shown in FIG. In this case, the position of the adjustment cylinder 21 immediately before the pressure of the compressed air decreases can be set as the target value.

次いで、第二操作部13となる固定プランジャ5のボルト部5bの凹溝5bcに回動操作治具を係止して固定プランジャ5を回動操作する(ステップS6)。固定プランジャ5のボルト部5bは、位置が固定された調節筒21における支持端面部21eのネジ孔部21nに螺合するため、固定プランジャ5の回動により、固定プランジャ5自身が上下方向(弁変位方向Fd)へ変位する(ステップS7)。これにより、固定プランジャ5の下端面と可動プランジャ6の上端面間の隙間の大きさ、即ち、最大弁開度となる弁体9の位置(弁体9の最大変位ストローク)が変化する(ステップS8)。図7に仮想線で示す固定プランジャ5は、実線で示す固定プランジャ5に対して、弁変位方向Fdの上方Fduへ移動量L2uだけ変位させた状態を示している。 Next, the rotation operation jig is engaged with the concave groove 5bc of the bolt part 5b of the fixed plunger 5, which becomes the second operation part 13, and the fixed plunger 5 is rotated (step S6). The bolt part 5b of the fixed plunger 5 is screwed into the screw hole part 21n of the support end surface part 21e of the adjustable cylinder 21 whose position is fixed. displacement direction Fd) (step S7). As a result, the size of the gap between the lower end surface of the fixed plunger 5 and the upper end surface of the movable plunger 6, that is, the position of the valve body 9 at which the maximum valve opening degree (maximum displacement stroke of the valve body 9) changes (step S8). The fixed plunger 5 shown by the imaginary line in FIG. 7 has been displaced by the amount of movement L2u in the upward direction Fdu in the valve displacement direction Fd with respect to the fixed plunger 5 shown by the solid line.

そして、固定プランジャ5を回動操作し、設定した目標値になったなら回動操作を停止し、第二固定ナット23を締め付けることにより固定プランジャ5の位置を固定する(ステップS9,S10)。この場合、目標値は、前述した図3に示すQms点となるため、一例として、図4に示す流入側接続口41iから圧縮エアを供給し、圧縮エアの流量Qを測定することにより、設定した流量目標値になったときの固定プランジャ5の位置を目標値として設定できる。 Then, the fixed plunger 5 is rotated, and when the set target value is reached, the rotation operation is stopped, and the position of the fixed plunger 5 is fixed by tightening the second fixing nut 23 (steps S9 and S10). In this case, the target value is the Qms point shown in FIG. The position of the fixed plunger 5 when the flow rate target value is reached can be set as the target value.

このように、本実施形態(基本実施形態)に係る比例電磁弁1は、基本構成として、コイルバネ11c(弾性部材11)の他端11t側の位置を、ヨーク4の外側に配した第一操作部12の操作により弁変位方向Fdに変位させて位置調整可能な第一調整機構部M1と、固定プランジャ5の位置を、ヨーク4の外側に配した第二操作部13の操作により可動プランジャ6に対して進退変位させて位置調整可能な第二調整機構部M2とを備えるため、製造段階において、調整に伴う組み付け後におけるアセンブリの分解及び再組立を不要にできる。したがって、部品類を傷付けてしまうなどの不具合を回避できるとともに、外部からの操作部に対する操作のみで、弁開度やバネ圧の調整を容易に行うことが可能となり、生産性を大幅に高めることができる。しかも、螺合機構による連続的な位置調整が可能になるため、精度の高い調整を行うことができる。 As described above, the proportional solenoid valve 1 according to the present embodiment (basic embodiment) has a basic configuration in which the first operation is performed such that the other end 11t side of the coil spring 11c (elastic member 11) is located outside the yoke 4. The position of the fixed plunger 5 can be adjusted by adjusting the position of the first adjusting mechanism part M1 by displacing it in the valve displacement direction Fd by operating the part 12, and by adjusting the position of the fixed plunger 5 by operating the second operating part 13 disposed outside the yoke 4. Since the second adjustment mechanism section M2 is provided with the second adjustment mechanism section M2 whose position can be adjusted by moving forward and backward relative to the second adjustment mechanism section M2, it is possible to eliminate the need for disassembly and reassembly of the assembly after assembly due to adjustment during the manufacturing stage. Therefore, it is possible to avoid problems such as damage to parts, and it is also possible to easily adjust the valve opening degree and spring pressure just by operating the operating section from the outside, greatly increasing productivity. Can be done. Furthermore, since continuous position adjustment is possible using the screw mechanism, highly accurate adjustment can be performed.

次に、本発明の変更実施形態に係る比例電磁弁1について、図8及び図9を参照して説明する。 Next, a proportional solenoid valve 1 according to a modified embodiment of the present invention will be described with reference to FIGS. 8 and 9.

変更実施形態と前述した図1に示した基本実施形態の第一の異なる点は、第一調整機構部M1を構成するに際し、図8に示すように、ヨーク4の外周面4wの下端部付近に設けたネジ部4sを、弁座10を有するブロック部24に設けた開口部のネジ孔部24nに螺合させるとともに、ヨーク4の外周面4wに第一操作部12を設けて構成した点にある。この場合、基本実施形態における連通空間25及び弁室32は、ヨーク4の下端面部4d内に形成される。したがって、変更実施形態における第一調整機構部M1は、ヨーク4自身を第一調整機構部M1及び第一操作部12に兼用可能になるため、調節筒などの別途の部品を追加することなく実施することができ、調整機構全体のシンプル化及び低コスト化に寄与できる。 The first difference between the modified embodiment and the basic embodiment shown in FIG. The screw portion 4s provided in the valve seat 10 is screwed into the screw hole portion 24n of the opening provided in the block portion 24 having the valve seat 10, and the first operating portion 12 is provided on the outer peripheral surface 4w of the yoke 4. It is in. In this case, the communication space 25 and the valve chamber 32 in the basic embodiment are formed within the lower end surface portion 4d of the yoke 4. Therefore, the first adjustment mechanism section M1 in the modified embodiment allows the yoke 4 itself to be used both as the first adjustment mechanism section M1 and the first operation section 12, so it can be implemented without adding separate parts such as an adjustment tube. This can contribute to the simplification and cost reduction of the entire adjustment mechanism.

また、変更実施形態と基本実施形態の第二の異なる点は、弾性部材11として、板バネ11pを用いた点にある。例示の板バネ11pは、重ね合わせた二枚の板バネ部材11pu,11pdを用いた。そして、板バネ11pの中心位置を可動プランジャ6の前端部6fに取り付けるとともに、板バネ11pの外周側は、連通空間25の内周面に取り付けて構成した。なお、板バネ11pは、基本実施形態で用いた仕切プレート35の代わりにもなるため、板バネ11pはこの仕切プレート35を兼用する。このように、弾性部材11に、板バネ11pを用いれば、プレート材又はその組合わせにより構成できるため、電磁弁全体の小型化、更には低コスト化に寄与できる。 The second difference between the modified embodiment and the basic embodiment is that a plate spring 11p is used as the elastic member 11. The illustrated plate spring 11p uses two stacked plate spring members 11pu and 11pd. The center of the leaf spring 11p is attached to the front end 6f of the movable plunger 6, and the outer peripheral side of the leaf spring 11p is attached to the inner peripheral surface of the communication space 25. Note that the leaf spring 11p also serves as the partition plate 35 used in the basic embodiment, so the leaf spring 11p also serves as the partition plate 35. In this way, if the leaf spring 11p is used as the elastic member 11, it can be constructed from a plate material or a combination thereof, which can contribute to miniaturization of the entire electromagnetic valve and further cost reduction.

変更実施形態における第一調整機構部M1では、第一操作部12によりヨーク4を回動操作すれば、ブロック部24に対してヨーク4を弁変位方向Fdへ上下変位させることができるため、弁体9に対する板バネ11pのバネ圧を変更(調整)することができる。このため、変更実施形態では、基本実施形態における調節筒21は存在しない。 In the first adjustment mechanism section M1 in the modified embodiment, if the yoke 4 is rotated by the first operating section 12, the yoke 4 can be vertically displaced in the valve displacement direction Fd with respect to the block section 24, so that the valve The spring pressure of the leaf spring 11p against the body 9 can be changed (adjusted). Therefore, in the modified embodiment, the adjustment cylinder 21 in the basic embodiment does not exist.

さらに、第一調整機構部M1に設ける第一固定ナット22は、ヨーク4のネジ部4sに螺合する。これにより、第一固定ナット22は、ブロック部24に対して当接可能となる。このような第一固定ナット22を設ければ、調整後におけるヨーク4を確実に固定できるため、調整後における位置ズレを防止し、正確な調整位置を長期にわたって維持できるとともに、再調整も容易に行うことができる。 Further, the first fixing nut 22 provided on the first adjustment mechanism part M1 is screwed into the threaded part 4s of the yoke 4. Thereby, the first fixing nut 22 can come into contact with the block portion 24. If such a first fixing nut 22 is provided, the yoke 4 can be securely fixed after adjustment, thereby preventing positional shift after adjustment, maintaining an accurate adjusted position for a long period of time, and facilitating readjustment. It can be carried out.

他方、変更実施形態における第二調整機構部M2の基本的構成は、細部は異なるものの基本実施形態における第二調整機構部M2と同じである。即ち、変更実施形態では、固定プランジャ5の外周面5w(ボルト部5b)に設けたネジ部5sをヨーク4に設けた開口部のネジ孔部4nに螺合させるとともに、固定プランジャ5の後端5r側に第二操作部13を設けて構成した。このような第二調整機構部M2を設ければ、第二調整機構部M2及び第二操作部13を、ヨーク4の内側に配することができるため、第一調整機構部M1と組み合わせた調整機構全体の小型コンパクト化に寄与できる。したがって、第二操作部13により、固定プランジャ5を回動操作すれば、可動プランジャ6に対して固定プランジャ5を弁変位方向Fdへ上下変位させることができるため、弁体9の最大弁開度を変更(調整)することができる。 On the other hand, the basic configuration of the second adjustment mechanism section M2 in the modified embodiment is the same as the second adjustment mechanism section M2 in the basic embodiment, although the details are different. That is, in the modified embodiment, the threaded portion 5s provided on the outer circumferential surface 5w (bolt portion 5b) of the fixed plunger 5 is screwed into the threaded hole portion 4n of the opening provided in the yoke 4, and the rear end of the fixed plunger 5 A second operation section 13 is provided on the 5r side. If such a second adjustment mechanism section M2 is provided, the second adjustment mechanism section M2 and the second operation section 13 can be arranged inside the yoke 4, so that adjustment in combination with the first adjustment mechanism section M1 can be performed. This can contribute to making the entire mechanism smaller and more compact. Therefore, if the fixed plunger 5 is rotated by the second operation part 13, the fixed plunger 5 can be vertically displaced in the valve displacement direction Fd with respect to the movable plunger 6, so that the maximum valve opening of the valve body 9 can be changed (adjusted).

また、第二調整機構部M2に設ける第二固定ナット23も基本実施形態と基本的な構成は同じになる。即ち、第二固定ナット23は、固定プランジャ5のネジ部5sに螺合する。これにより、第二固定ナット23はヨーク4に対して当接可能となる。このような第二固定ナット23を設ければ、調整後における固定プランジャ5を確実に固定できるため、調整後における位置ズレを防止し、正確な調整位置を長期にわたって維持できるとともに、再調整も容易に行うことができる。 Further, the second fixing nut 23 provided in the second adjustment mechanism section M2 also has the same basic configuration as the basic embodiment. That is, the second fixing nut 23 is screwed into the threaded portion 5s of the fixed plunger 5. Thereby, the second fixing nut 23 can come into contact with the yoke 4. If such a second fixing nut 23 is provided, the fixed plunger 5 can be securely fixed after adjustment, thereby preventing positional shift after adjustment, maintaining an accurate adjusted position for a long period of time, and making readjustment easy. can be done.

変更実施形態に係る比例電磁弁1において、その他の細部の構成及び形状は、基本実施形態と異なるも、基本的な構成及び機能は基本実施形態と同じになるとともに、基本実施形態と同様の基本的効果を享受できる。このため、変更実施形態を示す図8及び図9において、基本実施形態を示す図1及び図2と同一構成部分及び同一機能部分には、同一符号を付して、その構成を明確にするとともに、詳細な説明は省略する。 In the proportional solenoid valve 1 according to the modified embodiment, although the configuration and shape of other details are different from the basic embodiment, the basic configuration and function are the same as the basic embodiment, and the basic structure is the same as the basic embodiment. You can enjoy the effective effects. Therefore, in FIGS. 8 and 9 showing the modified embodiment, the same components and functional parts as those in FIGS. 1 and 2 showing the basic embodiment are given the same reference numerals to clarify the structure. , detailed explanation will be omitted.

以上、好適実施形態(基本実施形態及び変更実施形態)について詳細に説明したが、本発明は、このような実施形態に限定されるものではなく、細部の構成,形状,材料,数量,数値等において、本発明の要旨を逸脱しない範囲で任意に変更,追加,削除することができる。例えば、弾性部材11として、コイルバネ11c又は板バネ11pを用いた例を示したが、他の弾性部材或いは各弾性部材の組合わせを排除するものではない。また、第一固定ナット22及び第二固定ナット23は、必須の構成要素となるものではなく、例えば、調整後に接着剤を塗布するなどの固定手段を排除するものではない。一方、前述した引用文献1のように、可動プランジャ6の後端面に凸部(又は凹部)を設け、固定プランジャ5の前端面に凹部(凸部)を設けて構成してもよい。また、ノーマルクローズタイプの比例電磁弁1を例示したが、ノーマルオープンタイプ(非通電時に全開)にも同様に適用可能である。なお、流体としてガスを例示したが、空気や液体等の各種流体を適用することができる。 Although the preferred embodiments (basic embodiment and modified embodiments) have been described in detail above, the present invention is not limited to such embodiments, and the detailed configuration, shape, material, quantity, numerical value, etc. Any changes, additions, or deletions may be made without departing from the gist of the present invention. For example, although an example is shown in which the coil spring 11c or the plate spring 11p is used as the elastic member 11, other elastic members or combinations of each elastic member are not excluded. Further, the first fixing nut 22 and the second fixing nut 23 are not essential components, and fixing means such as applying adhesive after adjustment, for example, are not excluded. On the other hand, as in the above-mentioned cited document 1, a convex portion (or concave portion) may be provided on the rear end surface of the movable plunger 6, and a convex portion (convex portion) may be provided on the front end surface of the fixed plunger 5. Further, although the normally closed type proportional solenoid valve 1 is illustrated, the present invention is similarly applicable to a normally open type (fully open when not energized). Note that although gas is illustrated as an example of the fluid, various fluids such as air and liquid can be applied.

本発明に係る比例電磁弁は、ガス等の流体の流量を連続的に制御する流量制御弁等の各種電磁弁として利用できる。 The proportional solenoid valve according to the present invention can be used as various solenoid valves such as a flow rate control valve that continuously controls the flow rate of fluid such as gas.

1:比例電磁弁,2:電磁駆動部,3:ソレノイド,4:ヨーク,4w:ヨークの外周面,4s:ヨークのネジ部,4n:ヨークの開口部のネジ孔部,5:固定プランジャ,5s:固定プランジャの外周面のネジ部,5r:固定プランジャの後端,6:可動プランジャ,6f:可動プランジャの前端,7:弁機構部,9:弁体,10:弁座,11:弾性部材,11s:弾性部材の一端,11t:弾性部材の他端,11c:コイルバネ,11p:板バネ,12:第一操作部,13:第二操作部,21:調節筒,21w:調節筒の外周面,21s:調節筒のネジ部,21f:調節筒の前端,21r:調節筒の後端,21n:調節筒の開口部のネジ孔部,22:第一固定ナット,23:第二固定ナット,24:ブロック部,24n:ブロック部のネジ孔部,37:立体板バネ,Ed:励磁電圧,R:流路,Fd:弁変位方向,Fc:可動プランジャの直角方向,M1:第一調整機構部,M2:第二調整機構部 1: proportional solenoid valve, 2: electromagnetic drive unit, 3: solenoid, 4: yoke, 4w: outer circumferential surface of yoke, 4s: threaded part of yoke, 4n: threaded hole part of yoke opening, 5: fixed plunger, 5s: Threaded portion on the outer circumferential surface of the fixed plunger, 5r: Rear end of the fixed plunger, 6: Movable plunger, 6f: Front end of the movable plunger, 7: Valve mechanism section, 9: Valve body, 10: Valve seat, 11: Elasticity Members, 11s: one end of the elastic member, 11t: other end of the elastic member, 11c: coil spring, 11p: plate spring, 12: first operation section, 13: second operation section, 21: adjustment tube, 21w: adjustment tube Outer circumferential surface, 21s: Threaded part of the adjustment cylinder, 21f: Front end of the adjustment cylinder, 21r: Rear end of the adjustment cylinder, 21n: Screw hole at the opening of the adjustment cylinder, 22: First fixing nut, 23: Second fixation Nut, 24: Block part, 24n: Screw hole part of block part, 37: Three-dimensional plate spring, Ed: Excitation voltage, R: Flow path, Fd: Valve displacement direction, Fc: Right angle direction of movable plunger, M1: First Adjustment mechanism section, M2: Second adjustment mechanism section

Claims (11)

ソレノイドの外部に設けたヨークの内部に、このヨークにより、後端側が支持された固定プランジャ,及びこの固定プランジャに対して進退変位自在に配した可動プランジャを有するとともに、前記ソレノイドに印加する励磁電圧の大きさに対応して前記可動プランジャを変位させる電磁駆動部と、前記可動プランジャの前端に設けた弁体,及びこの弁体に対向し、かつ内側に流路を有する弁座を有するとともに、前記可動プランジャを一端側で弾性支持する弾性部材を有する弁機構部とを備える比例電磁弁において、前記固定プランジャと前記可動プランジャ間に介在させることにより当該可動プランジャの直角方向への動きを規制する立体板バネと、前記弾性部材の他端側の位置を、前記ヨークの外側に配した第一操作部の操作により弁変位方向に変位させて位置調整可能な第一調整機構部と、前記固定プランジャの位置を、前記ヨークの外側に配した第二操作部の操作により前記可動プランジャに対して進退変位させて位置調整可能な第二調整機構部とを備えてなることを特徴とする比例電磁弁。 A fixed plunger whose rear end side is supported by the yoke is provided inside a yoke provided outside the solenoid, and a movable plunger arranged to be movable forward and backward relative to the fixed plunger, and an excitation voltage applied to the solenoid. an electromagnetic drive unit that displaces the movable plunger in accordance with the size of the movable plunger, a valve body provided at the front end of the movable plunger, and a valve seat facing the valve body and having a flow path inside; In a proportional solenoid valve comprising a valve mechanism having an elastic member that elastically supports the movable plunger at one end side, movement of the movable plunger in a right angle direction is restricted by interposing the movable plunger between the fixed plunger and the movable plunger. a three-dimensional plate spring, a first adjustment mechanism part whose position can be adjusted by displacing the other end side of the elastic member in a valve displacement direction by operating a first operation part disposed outside the yoke; and the fixing member. a second adjustment mechanism part capable of adjusting the position of the plunger by moving it forward or backward with respect to the movable plunger by operating a second operation part disposed outside the yoke; valve. 前記弾性部材は、コイルバネを用いることを特徴とする請求項1記載の比例電磁弁。 The proportional solenoid valve according to claim 1, wherein the elastic member is a coil spring. 前記第一調整機構部は、前記ヨークと前記固定プランジャ間に配し、かつ外周面に設けたネジ部を前記ヨークに設けた開口部のネジ孔部に螺合させるとともに、内端により前記弾性部材の他端側を支持し、かつ後端に前記第一操作部を有する調節筒を備えることを特徴とする請求項1又は2記載の比例電磁弁。 The first adjustment mechanism is disposed between the yoke and the fixed plunger, and has a threaded portion provided on the outer peripheral surface screwed into a threaded hole of an opening provided in the yoke, and has an inner end that adjusts the elasticity. 3. The proportional solenoid valve according to claim 1, further comprising an adjustment cylinder that supports the other end of the member and has the first operating portion at its rear end. 前記第一調整機構部は、前記調節筒の前記ネジ部に螺合し、かつ前記ヨークに当接可能な第一固定ナットを備えることを特徴とする請求項3記載の比例電磁弁。 4. The proportional solenoid valve according to claim 3, wherein the first adjustment mechanism includes a first fixing nut that is screwed into the threaded portion of the adjustment cylinder and that can abut against the yoke. 前記第二調整機構部は、前記固定プランジャの外周面に設けたネジ部を前記調節筒に設けた開口部のネジ孔部に螺合させるとともに、前記固定プランジャの後端側に前記第二操作部を備えることを特徴とする請求項3記載の比例電磁弁。 The second adjustment mechanism part screws a threaded part provided on the outer peripheral surface of the fixed plunger into a threaded hole part of an opening provided in the adjustment cylinder, and also includes a screw part provided on the outer circumferential surface of the fixed plunger, and a second adjustment mechanism provided on the rear end side of the fixed plunger. 4. The proportional solenoid valve according to claim 3, further comprising: a proportional solenoid valve. 前記第二調整機構部は、前記固定プランジャの前記ネジ部に螺合し、かつ前記調節筒に当接可能な第二固定ナットを備えることを特徴とする請求項3記載の比例電磁弁。 4. The proportional solenoid valve according to claim 3, wherein the second adjustment mechanism includes a second fixing nut that is screwed into the threaded portion of the fixed plunger and can come into contact with the adjustment cylinder. 前記弾性部材は、板バネを用いることを特徴とする請求項1記載の比例電磁弁。 2. The proportional solenoid valve according to claim 1, wherein the elastic member is a plate spring. 前記第一調整機構部は、前記ヨークの外周面に設けたネジ部を、前記弁座を有するブロック部に設けた開口部のネジ孔部に螺合させるとともに、前記ヨークの外周面に前記第一操作部を設けてなることを特徴とする請求項1又は7記載の比例電磁弁。 The first adjustment mechanism part screws a threaded part provided on the outer peripheral surface of the yoke into a threaded hole part of an opening provided in the block part having the valve seat, and also screws the threaded part provided on the outer peripheral surface of the yoke into a threaded hole part of an opening provided in the block part having the valve seat. 8. The proportional electromagnetic valve according to claim 1, further comprising one operating section. 前記第一調整機構部は、前記ヨークの前記ネジ部に螺合し、かつ前記ブロック部に当接可能な第一固定ナットを備えることを特徴とする請求項8記載の比例電磁弁。 9. The proportional solenoid valve according to claim 8, wherein the first adjustment mechanism includes a first fixing nut that is screwed into the threaded portion of the yoke and can abut against the block portion. 前記第二調整機構部は、前記固定プランジャの外周面に設けたネジ部を前記ヨークに設けた開口部のネジ孔部に螺合させるとともに、前記固定プランジャの後端側に前記第二操作部を備えることを特徴とする請求項8記載の比例電磁弁。 The second adjustment mechanism unit screws a threaded portion provided on the outer circumferential surface of the fixed plunger into a screw hole of an opening provided in the yoke, and also includes a second operating portion provided on the rear end side of the fixed plunger. 9. The proportional solenoid valve according to claim 8, further comprising: 前記第二調整機構部は、前記固定プランジャの前記ネジ部に螺合し、かつ前記ヨークに当接可能な第二固定ナットを備えることを特徴とする請求項10記載の比例電磁弁。 11. The proportional electromagnetic valve according to claim 10, wherein the second adjustment mechanism includes a second fixing nut that is screwed into the threaded portion of the fixed plunger and can come into contact with the yoke.
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